2 l/s Ion Pump - Agilent Technologies
Contents
1. Figure 14 Model 919 0524 Figure 15 Magnet model 919 0038 21 s lon Pump 87 900 091 01 D 47 60 5 Technical Information Installation Pump Assembling Before installing the pump into the system the pump must be assembled To assemble the pump proceed as follows see the following figure 1 2 3 4 Remove the pump parts from the packaging Remove the fixing clip 3 from the magnet 2 Insert the pump 1 into the magnet Fix the pump to the magnet by means of the fixing clip Figure 16 Pump assembly 48 60 2 s lon Pump User Manual 87 900 091 01 D Technical Information 5 Pump Installation To install the pump into the system proceed as follows 1 During installation keep the pump and system clean Avoid touching surfaces which will ultimately be under vacuum When the Vaclon pump is open to the atmosphere take care to avoid introducing foreign particles oil solder flux or any volatile substances Before attaching the pump clean the system thoroughly Chemical cleaning is the most complete cleaning method for the vacuum system however do not attempt it when pockets and crevices exist that will prevent thorough rinsing Degreasing with an ac2. ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en uvre le processus de collecte et mise au rebut 30 60 2 s lon Pump User Manual 87 900 091 01 D 2 1 s lon Pump User Manual 4 Instructions for Use General Information 32 Preparation for Installation 33 Installation 34 Use 36 Operating Procedure 37 Maintenance 38 Disposal 38 Original Instructions tt Agilent Technologies 21 50 4 Instructions for Use General Information 32 60 This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The 2 l s series pumps are ion pumps commonly used to cr
3. Gebrauchsanleitung Abbildung 1 Installation Die Pumpe darf nicht in Umgebungen installiert und oder benutzt werden die ungeschutzt vor Witterungsbedingungen Regen Frost Schnee Staub und aggressiven Gasen sind und in denen Explosions und erh hte Brandgefahr besteht Wahrend des Betriebes soll die Umgebungstemperatur zwischen 0 C und 85 C betragen um die angegebenen technischen Merkmale zu gewahrleisten VORSICHT Die Pumpe soll versiegelt bis sie fur den Anschlu an das System bereit ist 18 60 2 s lon Pump User Manual 87 900 091 01 D Gebrauchsanleitung 2 WARNUNG Um Personensch den zu vermeiden darf die Hochspannungsleitung der Pumpe erst angeschlossen werden wenn die Pumpe im System installiert ist und alle Eintrittsflansche entsprechend angeschlossen oder geschlossen sind FALSCH Der Pumpenbetrieb wird nur durch den Einsatz speziell daf r vorgesehener Agilent Steuereinheiten MicroVac optimiert VORSICHT Die Einhaltung der Sicherheitsvorschriften im Gebrauch der Pumpen wird nur durch den Einsatz der Kontroll und Verkabelungssysteme Agilent garantiert VORSICHT Der Durchgangsisolator f r den Anschlu des Hochspannungskabels ist f r den Gebrauch des Kabels Agilent P N 929 0706 in Verbindung mit der Kontrolleinheit Agilent MicroVac P N 929 0200 o P N 929 0201 vorgesehen Nur in diesem Fall steht die Funktion H V Cable Safety Interlock zur Verf gung die f r die Aussc
4. Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc Ee Agilent Technologies Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 9 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested No
5. azoto secco in modo da evitare l assorbimento di vapore acqueo da parte delle pareti della pompa VATI 33413 YZ XI Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza di gas esplosivi aida Non avvicinare dispositivi elettronici alla pompa Il campo magnetico attorno ad essa pu provocare dei malfunzionamenti dei dispositivi stessi 2 1 s lon Pump User Manual 87 900 091 01 D 13 60 1 Istruzioni per l uso Manutenzione Le pompe della serie 2 l s non richiedono alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato MATA 2 40 217419 Prima di effettuare qualsiasi intervento sulla pompa scollegarla dall alta tensione Qualora una pompa dovesse essere rottamata procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche Smaltimento Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sla esso la casa madre o un rive
6. cable is disconnected from the pump 2 1 s lon Pump User Manual 87 900 091 01 D 35 60 4 Instructions for Use The pump can be installed in any position For convenience a pump is usually mounted vertically with the inlet up or placed horizontally Pumps can be supported by the mounting flange in any position For detailed information about the pump installation see the appendix Technical Information Use All the instructions for the correct use of the pump are contained in the control unit manual Read the manual carefully before using the pump Rough pumping down to 1x10 mbar is recommended for the most rapid starting Roughing with an oil sealed mechanical pump is not desirable but when used a trap in the roughing line is recommended to reduce pressure due to water vapor and oils from the mechanical pump Be careful to minimize the time that this pump is open to the system and ion pump since mechanical pump vapors will start diffusing into the system at pressures below 1x10 mbar and cause contamination In systems where oils must be completely eliminated turbopump roughing pumps should be used Hygroscopic deposits and hydrogen absorption into titanium may cause starting times to increase with age During exposure to air the deposits of titanium compound absorb water vapor In subsequent start ups pump heating causes release of the water vapor and some previously pumped hydrogen thus the starting time may b
7. comunque di mantenerla chiusa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere 2 1 s lon Pump User Manual 87 900 091 01 D 9 60 1 Istruzioni per l uso Figura 1 Installazione Non installare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento per ottenere le specifiche tecniche dichiarate la temperatura ambiente deve essere compresa tra 0 C e 85 C GA a La pompa deve essere tenuta sigillata finch non pronta per essere collegata al sistema 10 60 2 s lon Pump User Manual 87 900 091 01 D Istruzioni per l uso 1 14 412172 Per evitare lesioni alla persona non collegare l alta tensione alla pompa prima che sia installata nel sistema e che tutte le flange di ingresso siano adeguatamente collegate o chiuse Il funzionamento delle pompe ottimizzato solo con l uso della apposita unit di controllo Agilent MicroVac Vidal Il rispetto delle normative di sicurezza nell uso delle pompe garantito solo con l uso delle unit di controllo e dei cavi Agilent aida Il passante per la connessione del cavo di alta tensione previsto per l uso con il cavo Agilent P N 929 0706 in congiunzione con l unit di controllo Agilent MicroVac P N 929 0200 o P N 929 0201 Solo in questo caso disponibile la funzione H V Cabl
8. lfrei sein m ssen erweisen sich f r den obengenannten Vorgang Turbopumpen als geeigneter Hygroskopische Ablagerungen und die Absorption von Wasserstoff in der Titanverbindung k nnen die Anlaufzeit verl ngern und eine k rzere Standzeit der Pumpe verursachen Die Ablagerungen der Titanverbindungen absorbieren Wasserdampf wenn sie der Luft ausgesetzt werden Dadurch bewirkt beim anschlie enden Anlaufvorgang die Aufheizung der Pumpe die Abgabe des Dampfes und eines Teils des zuvor gepumpten Wasserstoffs so dafs sich die Anlaufzeit verl ngert 2 s lon Pump User Manual 87 900 091 01 D Gebrauchsanleitung 2 Bedienungsschritte Es ist nach dem diesbezuglichen Handbuch vorzugehen fur den Gebrauch der Pumpe sind die folgenden Bedienungsschritte zu beachten 1 Mittels einer Vorvakuumpumpe das System auf einen Druck von 1x10 mbar oder einen niedrigeren Druck bringen Die Steuereinheit an eine entsprechende Versorgungsquelle anschliefsen und einschalten Sofern der Betriebsstart bei einem Druck von ber 1x10 mbar erfolgt zeigt MicroVac High Load an Wahrend des Anlaufes der Ionenpumpe soll das Vorvakuumventil ge ffnet bleiben bis ein angemessener Anlaufdruck erreicht ist Wenn die Spannung der Ionenpumpe nach Schlie ung des Ventils abfallt ist das Ventil fur eine zusatzliche Vorvakuumpumpung zu Offnen Sobald der Druck sinkt steigt die Spannung erneut an und ist das Vorvakuumventil zu schliefsen Wen
9. 0 Operating Notes 42 Technical Specification 43 Outline Drawing 45 Installation 48 Pump Installation 49 Control Unit Connection 50 Bakeout 51 Pump Troubleshooting 53 2 s Pump Replacement Parts and Accessories 54 2 s lon Pump User Manual 87 900 091 01 D 2 1 s lon Pump User Manual 00 00 1 Istruzioni per l uso Informazioni generali 8 Preparazione per l installazione 9 Installazione 10 Uso 12 Procedure diuso 13 Manutenzione 14 Smaltimento 14 Traduzione delle istruzioni originali e Agilent Technologies 7 60 1 Istruzioni per l uso Informazioni generali AVVERTENZA ATTENZIONE 8 60 Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilita dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Le pompe della serie 21 s sono pompe ioniche utilizzate comunemente per applicazioni di ultra alto vuoto grazie alla loro pulizia capacit di pompare qualsiasi tipo di gas e del loro funzionamento senza vibrazioni e necessit di manutenzione Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garanti
10. 2 1 s lon Pump Models 919 0520 919 0521 919 0522 919 0523 919 0524 Magnet 919 0038 Manuale di Istruzioni Bedienungshandbuch Notice de Mode d Emploi User Manual 87 900 091 01 D 05 2011 EP Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 091 01 D Edition Edition 05 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a sep
11. Agilent VacIon 2 l s pumps are ion pumps and are available in the following versions Tab 1 PART NUMBER MODEL 919 0520 2 1 s pump mini CFF To ET AU ug EET EI GT 919 0524 2US pump OD 90 SST tube tee style The part numbers in the table are relevant to the pump without the magnet The magnet part numbers is 919 0038 The 2 l s pump is a pump which operates on the principle of ion gettering in the pressure range from 107 to less than 10 mbar A roughing pump is needed to lower the system pressure from atmosphere to below 10 mbar Figure 2 Model 919 0520 Figure 3 Model 919 0521 2 s lon Pump User Manual 87 900 091 01 D Technical Information 5 Figure4 Model 919 0522 Figure 5 Model 919 0523 Figure 6 Model 919 0524 Figure 7 Magnet model 919 0038 Figure 8 Pump main assemblies 21 s lon Pump 87 900 091 01 D 41 60 5 Technical Information Operating Notes 42 60 Vaclon pumps operate as a single cell Penning discharge A potential of about 3 kV is applied to the anode cell the cathodes are at ground potential Electrons are co
12. E 1 Slow starting more than Air leaks which limit pressure to Leak check the vacuum system 30 minutes above 10 6 mbar and cause longer with a helium leak detector starting time 2 Slow pump down due to Vapours and gases admitted to a Heat the system walls thereby absorption of vapours on system are absorbed on the walls of accelerating the desorption pump and system walls the system and pump Subsequent process Baking mobilizes the reduction in pressure depends on vapours so they can be cracked the rate of depletion of this vapour and pumped by discharge Heavy hydrocarbons are most troublesome because of their relative low vapour pressure and are very difficult to remove even by baking 3 Slow starting or slow High voltage feedthrough is leaking Replace the feedthrough 4 Current higher than lon pump leakage current causing Highpot the pump expected at any given higher pressure reading pressure 21 s lon Pump 87 900 091 01 D 53 60 5 Technical Information 2 1 s Pump Replacement Parts and Accessories 919 919 0520 0521 HV Bakeable cable radiati
13. ITION Does not start Noise Vertical Does not spin freely Horizontal Upside down Vibrations Does not reach full speed Leak Mechanical Cantact Overtemperature PARAMETERS Power Rotational Speed Current Inlet Pressure Temp 1 Foreline Pressure Temp 2 Purge flow Cooling defective Clogging ION PUMPS CONTROLLERS Poar vacuum High valtage prablem Bad feedthrough Vacuum leak Main seal leak Solenoid failure OPERATING TIME VALVES COMPONENTS Bellows leak Damaged flange Error code on display Other LEAK DETECTORS Damaged sealing area Other INSTRUMENTS Cannot calibrate No zero high backround Vacuum system unstable Cannot reach test mode Failed to start Other Gauge tube not working Display problem Communication failure Degas not working Error code on display Other SCROLL AND ROTARY VANE PUMPS Pump doesn t start Noisy pump describe DIFFUSION PUMPS Heater failure Doesn t reach vacuum Electrical problem Doesn t reach vacuum Over temperature Cooling coil damage Vacuum leak Other Pump seized Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product R
14. a erVvVvreeeeee ES mini ia a ama CE e888 21 s lon Pump 87 900 091 01 D 43 60 5 Technical Information lt gt 2 LU De De O n A 10 10 10 PUMP PRESSURE mbar Figure 9 Pressure vs Current curve 44 60 2 s lon Pump User Manual 87 900 091 01 D Technical Information 5 Outline Drawing The following figure shows the outline drawing for the 2 l s pump and the magnet all dimensions are in inches mn Figure 10 Model 919 0520 Figure 11 Model 919 0521 21 s lon Pump 87 900 091 01 D 45 60 5 Technical Information Figure 12 Model 919 0522 Figure 13 Model 919 0523 46 60 2 s lon Pump User Manual 87 900 091 01 D Technical Information 5
15. a High Load Laisser la soupape de pr vide ouverte pendant le d marrage de la pompe ionique tant qu une pression de d marrage appropri e n a pas t atteinte Si la tension de la pompe ionique descend apres la fermeture de la soupape la rouvrir pour un pr pompage suppl mentaire D s que la pression diminue la tension remonte et la soupape de pr vide doit tre referm e Lorsque l on porte la pompe a la pression atmosph rique utiliser de l azote sec de facon a viter l absorption de vapeur aqueuse par les parois de la pompe Lorsque la pompe est utilis e pour le pompage de gaz toxiques inflammables ou radioactifs suivre les procedures appropri es a chaque gaz Ne pas utiliser la pompe en pr sence de gaz explosifs Ne pas approcher de dispositifs lectroniques de la pompe Le champ magn tique environnant cette derni re peut entra ner des dysfonctionnements desdits dispositifs 2 1 s lon Pump User Manual 87 900 091 01 D 29 60 3 Mode d emploi Maintenance Les pompes de la s rie 2 l s ne demandent aucun entretien Toute intervention doit tre ex cut e par un personnel agr WI ESSAI Avant toute intervention sur la pompe la d brancher de la haute tension En cas de mise au rebut d une pompe proc der son limination dans le respect des normes nationales en vigueur Mise au rebut Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform
16. ar la pompe m canique Essayer de r duire au minimum le temps ou la pompe m canique est ouverte vers le systeme et vers la pompe ionique car ses vapeurs se r pandent dans le syst me des pressions inf rieures 1x10 mbars causant une contamination de celui ci Dans les syst mes ou l huile doit tre compl tement absente il est pr f rable d effectuer ladite op ration a l aide d une pompe Turbo Des d p ts hygroscopiques et l absorption d hydrog ne dans le compos de titane peuvent provoquer par effet du vieillissement de la pompe l allongement du temps de d marrage Pendant l exposition a lair le d pot du compos de titane absorbe de la vapeur d eau et cette action a pour cons quence qu au d marrage suivant le chauffage de la pompe entrainera la dispersion de la vapeur et d une partie de l hydrog ne pomp e pr c demment ce qui aura pour effet d allonger le temps de d marrage 2 s lon Pump User Manual 87 900 091 01 D Mode d emploi 3 Procedure d utilisation AVERTISSEMENT ATTENTION Se reporter au manuel correspondant et observer la proc dure suivante pour l utilisation de la pompe 1 A l aide d une pompe de pr vide porter le syst me a une pression de 1x10 mbars ou inf rieure Brancher l unit de controle a une source d alimentation appropri e et l allumer Si la mise en route est effectu e une pression sup rieure 1x10 mbars le MicroVac indiquer
17. arate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Softvvare is delivered and licensed as Commercial computer softvvare as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure prac
18. areillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information Cette notice utilise les signes conventionnels suivants Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale dont la mauvaise ex cution peut provoquer de graves l sions Les messages d attention apparaissent avant certaines proc dures dont le non respect peut provoquer des dommages irr versibles l appareillage Les notes contiennent des renseignements importants extrapol s du texte 2 s lon Pump User Manual 87 900 091 01 D Mode d emploi 3 Preparation de l installation ATTENTION La pompe est fournie dans un emballage de protection sp cial si l on constate des signes d endommagement imputables au transport contacter aussitot le revendeur local Pendant l op ration de d ballage veiller tout particuli rement a ne pas laisser tomber la pompe et a ne lui faire subir aucun choc ni aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est entierement recyclable et il est conforme a la directive CEE 85 399 en mati re de protection de l environnement En vue d viter tout probleme de d gazage ne pas toucher a mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e La pompe ne peut tre endommag e si elle reste simplement expos e a l atmosph re Il est quoi
19. connector into the socket on the control unit rear panel Refer to the control unit instruction manual Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at least 10 seconds after removing the main power from the control unit to allow capacitors to discharge completely 50 60 2 s lon Pump User Manual 87 900 091 01 D Technical Information 5 To disconnect the coaxial high voltage cable from the controller slide the safety locking sleeve very little sleeve travel is required from the control unit and at the same time pull on the male end of the cable connector to remove it from the socket on the control unit Bakeout When a 2 l s ion pump does not reach the desired base pressure and there are no leaks it is necessary to bake the system This can be done by heating the pump and all the components in the system and is generally required to achieve less than 10 mbar base pressures The pump body can be baked up to 400 C if the magnet and the H V cable connector have been removed Ifthe bakeout is done with magnets and H V cable connected the maximum allowable temperature is 150 C and the pump control unit can be left on in order to be able to monitor the pressure variations During the bakeout cycle the pressure must not increase above 5x10 mbar if this value is reached turn the bakeout off and then on again when low p
20. e lengthened 36 60 2 s lon Pump User Manual 87 900 091 01 D Instructions forUse 4 Operating Procedure Refer to the MicroVac control unit instruction manual and follow the procedure below when operating the pump 1 With a clean roughing pump establish a roughing pressure of 1x10 mbar or lower in the vacuum system Plug the control unit into a suitable power source and switch the power ON When the start up is at a pressure higher than 1x10 mbar MicroVac controller will show an High Load condition Allow the roughing valve to remain open after turning on the ion pump until an adequate starting pressure is reached If the ion pump voltage drops after closing the roughing valves reopen the valve for additional rough pumping As the pressure decreases the voltage again will rise and the roughing valve should be closed When venting the pump use dry nitrogen This will avoid water vapor absorption on the pump walls WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases CAUTION Do not put any electronic device near the pump otherwise the magnetic field around it may cause a device malfunctioning 2 s lon Pump User Manual 87 900 091 01 D 37 60 4 Instructions for Use Maintenance Disposal 38 60 The 2 l s series pumps do not require any ma
21. e Safety Interlock che fa s che l alta tensione venga spenta quando il relativo cavo viene scollegato dalla pompa 2 1 s lon Pump User Manual 87 900 091 01 D 11 60 1 Istruzioni per l uso Uso 12 60 La pompa pu essere installata in qualsiasi posizione Per convenienza normalmente viene montata in posizione verticale con la flangia di ingresso in alto o in posizione orizzontale Le pompe possono anche essere mantenute sospese in ogni posizione tramite la loro flangia di ingresso Per informazioni dettagliate sull installazione della pompa vedere l appendice Technical Information Tutte le istruzioni per il corretto funzionamento della pompa sono contenute nel manuale dell unit di controllo Leggere attentamente tale manuale prima dell utilizzo Si raccomanda di portare la pompa ad una pressione di 1x10 mbar in modo da ottenere un avvio pi rapido A questo scopo meglio non utilizzare una pompa meccanica sigillata con olio ma se deve essere utilizzata una tale pompa si raccomanda di inserire una trappola lungo la linea di vuoto per ridurre la pressione causata dai vapori di acqua e di olio provenienti dalla pompa meccanica Cercare di ridurre al minimo il tempo in cui la pompa meccanica aperta verso il sistema e verso la pompa ionica poich i suoi vapori si diffondono nel sistema a pressioni inferiori a 1x10 mbar causando una contaminazione dello stesso Nei sistemi in cui l olio deve essere completamen
22. eate ultra high vacuum due to their cleanliness ability to pump different gases and maintenance and vibration free operation The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This manual uses the following standard protocol The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The caution messages are displayed before procedures which if not followed could cause damage to the equipment The notes contain important information taken from the text 2 s lon Pump User Manual 87 900 091 01 D Instructions forUse 4 Preparation for Installation CAUTION The pump is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Normal exposure to the envir
23. eg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japa
24. etone or methanol followed by water rinsing is usually sufficient 2 To achieve maximum pumping speed connect the pump to the system with a tube that has the shortest length and the largest diameter possible 3 For ultrahigh vacuum work joints should be tungsten inert gas welded hydrogen brazed or vacuum brazed Do not use flux in making joints for ultrahigh vacuum 4 Gaskets in the system should be of soft metal such as annealed copper aluminum or gold 5 After the pump is sealed in place leak check the entire system 6 Assemble the magnet to the pump 21 s lon Pump 87 900 091 01 D 49 60 5 Technical Information Control Unit Connection WARNING The high voltage present in the high voltage cable which connects the control unit to the ion pump can cause severe injury or death Before mounting the high voltage connector of the cable on the pump high voltage feedthrough or before removing it be sure the main power is removed from the control unit To avoid injury never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off Make sure that the pump is well connected to the grounded vacuum system Connect the control unit to the ion pump with the coaxial high voltage cable assembly as follows 1 Push the female end of the cable connector over the high voltage feedthrough 2 Push the male end of the cable
25. eturn shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e f requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesw
26. haltung der Hochspannung sorgt sobald das entsprechende Kabel von der Pumpe gel st wird 2 1 s lon Pump User Manual 87 900 091 01 D 19 60 2 Gebrauchsanleitung Gebrauch 20 60 Die Pumpe kann in einer beliebigen Position installiert werden Aus praktischen Gr nden wird sie in der Regel senkrecht mit nach oben gerichtetem Eintrittsflansch oder waagerecht eingebaut Die Pumpen konnen auch in einer beliebigen Position an ihrem Eintrittsflansch hangend eingebaut werden Detaillierte Informationen zur Installation der Pumpe sind dem Anhang Technical Information zu entnehmen Samtliche Hinweise fur den korrekten Betrieb der Pumpen sind im Handbuch der Steuereinheit enthalten Dieses Handbuch ist vor der Inbetriebnahme genau durchzulesen Es wird empfohlen die Pumpe auf einen Druck von 1x10 mbar zu bringen um einen rascheren Anlauf zu gew hrleisten Zu diesem Zweck empfiehlt es sich keine lversiegelte mechanische Pumpe zu verwenden Falls hingegen eine derartige Pumpe benutzt werden mu soll an der Vakuumleitung eine Falle eingesetzt werden um den durch die Wasser und ld mpfe aus der mechanischen Pumpe erzeugten Druck zu verringern Es ist zu versuchen die Zeit auf ein Mindestma zu reduzieren w hrend der die mechanische Pumpe zum System und zur Ionenpumpe ge ffnet ist da sich ihre D mpfe bei Dr cken unter 1x10 mbar im System verbreiten und dessen Verunreinigung verursachen Bei Systemen die vollkommen
27. iederverkaufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat 2 s lon Pump User Manual 87 900 091 01 D E Agilent Technologies 2 s lon Pump User Manual 3 Mode d emploi Indications Generales 24 Pr paration de l installation25 Installation 26 Utilisation 28 Proc dure d utilisation 29 Maintenance 30 Mise au rebut 30 Traduction de la mode d emploi originale 23 60 3 Mode d emploi Indications Generales AVERTISSEMENT ATTENTION 24 60 Cet appareillage a t concu en vue d une utilisation professionnelle Il est conseill a l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent avant d utiliser l appareil Agilent d cline toute responsabilit en cas de non respect total ou partiel des instructions fournies d op rations non autoris es d utilisation impropre par du personnel non form ou contraires aux r glementations nationales sp cifiques Gr ce leur propret leur capacit de pomper tous les types de gaz leur fonctionnement sans vibrations et l absence d entretien les pompes de la s rie 2 l s sont des pompes ioniques g n ralement utilis es pour des applications de vide ultra pouss Les paragraphes suivants fournissent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l app
28. intenance Any work performed on the pump must be carried out by authorized personnel WARNING Before carrying out any work on the pump disconnect it from the High Voltage supply If a pump is to be scrapped it must be disposed of in accordance with the specific national standards Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 2 1 s lon Pump User Manual 87 900 091 01 D 2 1 s lon Pump User Manual Technical Information Description of the Pump 40 Operating Notes 42 Technical Specification43 Outline Drawing 45 Installation 48 Pump Assembling 48 Pump Installation 49 Control Unit Connection 50 Bakeout 51 Unusual Operating Conditions 51 Pump Troubleshooting 53 2 s Pump Replacement Parts and Accessories 54 Original Instructions UE Agilent Technologies 39 60 5 Technical Information Description of the Pump 40 60 The
29. k Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
30. n Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 05 2011 Publication Number 87 900 091 01 D P Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan 8821 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Par
31. n Sicherheitshinweise folgendermafsen hervorgehoben Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf eine spezielle Prozedur oder Praktik die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen konnte Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam da bei Nichteinhaltung Sch den am Ger t entstehen k nnen Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden 2 s lon Pump User Manual 87 900 091 01 D Gebrauchsanleitung 2 Vor der Installation Die Pumpe wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Beim Auspacken vorsichtig vorgehen damit die Pumpe nicht f llt oder St en oder Vibrationen ausgesetzt wird Das Verpackungsmaterial ist ordnungsgem zu entsorgen Es ist vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r den Umweltschutz VORSICHT Um Entgasungsprobleme zu vermeiden d rfen die Komponenten die mit dem Vakuum in Kontakt kommen nicht mit blo en H nden ber hrt werden Stets Handschuhe oder einen anderen geeigneten Schutz tragen Die Pumpe kann wenn sie einfach der Atmosph re ausgesetzt ist nicht besch digt werden Sie sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden 2 1 s lon Pump User Manual 87 900 091 01 D 17 60 2
32. n die Pumpe auf atmospharischen Druck gebracht wird sollte Trockenstickstoff verwendet werden damit die Wande der Pumpen keinen Wasserdampf aufnehmen Wenn die Pumpe zur Forderung von giftigen leicht entflammbaren oder radioaktiven Gasen benutzt wird sind die fiir das jeweilige Gas vorgeschriebenen Vorgange zu befolgen Die Pumpe nie bei Vorhandensein von explosivem Gas benutzen VORSICHT Keine elektronischen Ger te in die Nahe der Pumpe bringen Das darum befindliche Magnetfeld kann zu Funktionsst rungen der Ger te f hren 2 1 s lon Pump User Manual 87 900 091 01 D 21 60 2 Gebrauchsanleitung Wartung Die Pumpen der Serie 2 l s erfordern keine Wartung S mtliche Eingriffe durfen nur von autorisiertem Personal vorgenommen werden Vor Eingriffen an der Pumpe ist diese von der Hochspannungsquelle zu trennen Bei eventueller Verschrottung einer Pumpe ist diese entsprechend der einschlagigen nationalen Vorschriften zu entsorgen Entsorgung 22 60 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in Ubereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsmull entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Gerats d h die Muttergesellschaft oder den W
33. n du cable Agilent P N 929 0706 accoupl l unit de contr le Agilent Micro Vac P N 929 0200 ou P N 929 0201 Dans ce cas uniquement la fonction H V Cable safety Interlock est op rationnelle Cette fonction pr voit la coupure de la haute tension lorsque le cable correspondant est d branch de la pompe 2 1 s lon Pump User Manual 87 900 091 01 D 21 60 3 Utilisation 28 60 Mode d emploi La pompe peut tre install e dans toutes les positions Par facilit elle est s n ralement mont e en position verticale avec bride d entr e en partie haute ou en position horizontale Les pompes peuvent galement tre suspendues dans toutes les positions a l aide de leur bride d entr e Pour plus de d tails sur l installation de la pompe consulter l appendice Technical Information Toutes les instructions pour le fonctionnement correct de la pompe sont fournies dans la notice de l unit de controle Il est conseill de lire attentivement cette notice avant d utiliser la pompe Il est recommand de porter la pompe une pression de 1x10 mbars de fa on a obtenir un d marrage plus rapide Pour ce faire il est pr f rable de ne pas utiliser une pompe m canique scell e a l huile mais au cas ou il serait n cessaire d utiliser une telle pompe il est recommand d introduire un dispositif de retenue le long de la ligne de vide afin de r duire la pression due aux vapeurs d eau et d huile engendr es p
34. nditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica del termini e condizioni contrattuali di vendita 14 60 2 s lon Pump User Manual 87 900 091 01 D 2 1 s lon Pump User Manual 2 Gebrauchsanleitung Allgemeine Hinweise 16 Vor der Installation 17 Installation 18 Gebrauch 20 Bedienungsschritte 21 Wartung 22 Entsorgung 22 Ubersetzung der Originalanleitungen TL Agilent Technologies 15 60 2 Gebrauchsanleitung Allgemeine Hinweise VORSICHT 16 60 Dieses Gerat ist fur den professionellen Gebrauch bestimmt Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von Agilent mitgelieferten Zusatzdokumentationen genau lesen Bei vollst ndiger bzw teilweiser Nichtbeachtung der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mifsachtung der nationalen Bestimmungen bernimmt Firma Agilent keinerlei Haftung Die Pumpen der Serie 2 1 s sind Ionenpumpen die aufgrund ihrer Reinheit ihrer F higkeit alle Arten von Gas zu pumpen und ihres vibrations und wartungsfreien Betriebes allgemein fur Ultrahochvakuumanwendungen zum Einsatz kommen In den folgenden Abschnitten sind alle erforderlichen Informationen fur die Sicherheit des Bedieners bei der Anwendung des Gerats aufgefuhrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werde
35. nstrained from going directly to the anode by the presence of an axial magnetic field of about 1200 gauss A self shielding insulator isolates the anode from ground potential When the VacIon pump is operating properly with magnet installed the current drawn is proportional to pressure see the figure in the following page After the system is rough pumped to below 10 mbar the pump can be started by simply switching on the VacIon pump control unit A current draw on the control unit will indicate that the pump discharge has started The pump can operate in any position and can be supported on the mounting flange Always wait at least 30 seconds after turning off the high voltage switch before disconnecting the power supply leads This should allow the power supply output capacitor to discharge adequately 2 s lon Pump User Manual 87 900 091 01 D Technical Information 5 Technical Specification The following table details the main technical specifications of the 2 l s Ion Pump Tab 2 _Nominal pumping speed for Nitrogen l s nn Operating life at 5x10 mbar hours 8000 Operating voltage 3300 Vdc 10 96 Maximum starting pressure mbar 1x104 _Ultimate pressure mbar O TU aum Internal volume litres 0 064 Maximum baking temperature C 400 without magnet 150 with magnet Material Body AISI 304 Cathode Titanium Anode AISI 304 eten his a Weight 0 3 net kg 0 6 with magnet aaa i6
36. on resistant 929 0706 13 4 m long with safety interlock For a complete overview of Agilent s extensive vacuum product line please refer to the Agilent Vacuum Catalogue 54 60 2 s lon Pump User Manual 87 900 091 01 D iy Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer
37. onment cannot damage the pump Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust 2 1 s lon Pump User Manual 87 900 091 01 D 33 60 4 Instructions for Use Figure 1 Installation Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation to obtain the declared functioning specification the ambient temperature must be between 0 C and 85 C CAUTION The pump should be kept sealed until it is ready for attachment to the vacuum system 34 60 2 s lon Pump User Manual 87 900 091 01 D Instructions forUse 4 WARNING To avoid injury never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off The pump operation is optimized using the special Agilent MicroVac controller only CAUTION The safety specifications agreement using the pump is guaranteed using the Agilent controller and cable only CAUTION The High Voltage cable feedthrough is designed for use with cable Agilent P N 929 0706 in conjunction with Agilent MicroVac controller P N 929 0200 or 929 0201 Only in this case the H V Cable Safety Interlock function is available This function switch off the high voltage when the relevant
38. pplicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 ATA Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Tel Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only C Taxable Non taxable 2 PRODUCT IDENTIFIGATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A LI Non Billable Billable mmm New PO hard copy must be submitted with this form 3B Exchange _ Repair _ Upgrade _ Consignment Demo _ calibration _ Evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIGACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement p
39. qu il en soit conseill de ne pas la retirer de son emballage avant le moment de l installation afin d viter toute pollution due a la poussiere 2 1 s lon Pump User Manual 87 900 091 01 D 25 60 3 Mode d emploi Figure 1 Installation Ne pas installer et ou utiliser la pompe dans des milieux expos s des agents atmosph riques pluie gel neige des poussi res des gaz de combat ainsi que dans des milieux explosifs ou a fort risque d incendie Pendant le fonctionnement pour respecter les sp cifications techniques d clar es la temp rature ambiante doit tre comprise entre 0 C et 85 C GT La pompe doit tre conserv e scell e jusqu ce qu elle soit pr te tre branch e au syst me 26 60 2 s lon Pump User Manual 87 900 091 01 D Mode d emploi 3 VI RS AUIAUEN Pour viter toute l sion aux personnes ne pas brancher la haute tension la ATTENTION ATTENTION pompe avant que celle ci soit install e dans le syst me et avant que toutes les brides d entr es soient correctement assembl es ou ferm es Le fonctionnement de la pompe n est optimis que si celle ci est utilis e avec l une des unit s de controle Agilent sp cifiques MicroVac Lors de l utilisation des pompes le respect des normes de s curit n est garanti que par l usage des unit s de contr le et des cables Agilent Le passage pour la connexion du cable de haute tension est concu pour l utilisatio
40. re la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical information Questo manuale utilizza le seguenti convenzioni I messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate dal testo 2 s lon Pump User Manual 87 900 091 01 D Istruzioni per l uso 1 Preparazione per l installazione ATTENZIONE La pompa viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere la pompa e a non sottoporla ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Onde evitare problemi di degassamento non toccare con le mani nude componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata La pompa non pu essere danneggiata rimanendo semplicemente esposta all atmosfera Si consiglia
41. resents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic C Corrosive C Reactive C Flammable Explosive Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message Application system and model RES Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POS
42. ressure is restored Bake the 2 l s pump for 24 hours Longer bakeout periods are recommended when the pump has been used with heavy gas load applications Wait until the pump cools down to room temperature and recovers its initial pressure before using it in the application Unusual Operating Conditions If the pump current reads lower than normal for the pressure the discharge may have been extinguished To check for the pump being out of strike discharge extinguished remove the magnet and observe the residual current If the current is the same with and without the magnet in place no discharge exists in the pump 21 s lon Pump 87 900 091 01 D 51 60 5 Technical Information 1 Torestart the discharge tap the pump body with a penny held between the thumb and forefinger or heat the pump body locally with a small soldering iron This should liberate surface gas within the pump and restart the discharge NEVER strike the pump with hand tools 2 Ifthe magnet strength is below its rated level the pump discharge and speed will be reduced and the discharge may extinguish at a pressure below 1 x 10 mbar 52 60 2 s lon Pump User Manual 87 900 091 01 D Technical Information 5 Pump Troubleshooting In the event of a power failure momentary or long period the controller is switched off When power is restored the controller will automatically restart Tab 3 SYMPTOM POSSIBLE CAUSE CORRECTION PROCEDUR
43. te Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning praduct e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being retumed under a R must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must camply with all a
44. te assente meglio utilizzare pompe Turbo per la suddetta operazione Depositi igroscopici e l assorbimento dell idrogeno all interno del composto di titanio possono provocare l allungamento del tempo di avvio con l invecchiamento della pompa Durante l esposizione all aria il deposito del composto di titanio assorbe vapore acqueo in conseguenza di ci al successivo avvio il riscaldamento della pompa provoca il rilascio del vapore e di parte dell idrogeno pompato precedentemente con l effetto dell allungamento del tempo di avvio 2 s lon Pump User Manual 87 900 091 01 D Istruzioni per l uso 1 Procedure di uso Fare riferimento al manuale del controller MicroVac ed osservare la seguente procedura per l uso della pompa 1 Tramite una pompa di pre vuoto portare il sistema ad una pressione di 1x10 mbar od inferiore Collegare l unit di controllo ad una apposita fonte di alimentazione ed accenderla Se l avvio avvenuto ad una pressione superiore a 1x10 mbar il MicroVac indicher High Load Lasciare la valvola di pre vuoto aperta durante l avvio della pompa ionica finch non si raggiunge una adeguata pressione di avvio Se la tensione della pompa ionica scende dopo la chiusura della valvola riaprirla per un pre pompaggio aggiuntivo Appena la pressione diminuisce la tensione cresce nuovamente e la valvola di pre vuoto deve essere chiusa Quando si porta la pompa alla pressione atmosferica usare
45. tice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met 2 s lon Pump User Manual 87 900 091 01 D 2 1 s lon Pump 2 1 s lon Pump 2 1 s lon Pump User Manual 87 900 091 01 D 3 60 2 1 s lon Pump 4 60 2 s lon Pump User Manual 87 900 091 01 D Contents Contents 1 Istruzioni per l uso 7 Informazioni generali 8 Preparazione per l installazione 9 Installazione 10 Uso 12 Manutenzione 14 Smaltimento 14 2 Gebrauchsanleitung 15 Allgemeine Hinweise 16 Vor der Installation 17 Installation 18 Gebrauch 20 Wartung 22 Entsorgung 22 3 Mode d emploi 23 Indications Generales 24 Pr paration de l installation 25 Installation 26 Utilisation 28 2 s lon Pump User Manual 87 900 091 01 D 5 60 Contents 6 60 5 Maintenance 30 Mise au rebut 30 Instructions for Use 31 General Information 32 Preparation for Installation 33 Installation 34 Use 36 Maintenance 38 Disposal 38 Technical Information 39 Description of the Pump 4
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