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SUBLIMATION CONTROLLER DESCRIPTION

1. Error code on display Other L Damaged sealing area Other Customer application Customer application LEAK DETECTORS INSTRUMENTS Cannot calibrate L No zero high backround L Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode L Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum L Cooling coil damage Pump seized C Other C Vacuum leak Other Customer application Customer application FAILURE DESCRIPTION Please describe in detail the nature of the malfunction to assist us in performing failure analysis NOTA Su richiesta questo documento disponibile anche in Tedesco Italiano e Francese REMARQUE Sur demande ce document est galement disponible en allemand italien et francais HINWEIS Auf Aufrage ist diese Unterlage auch auf Deutsch Italienisch und Franz sisch erh ltlich France and Benelux Varian s a 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 Les Ulis cedex Orsay 91941 France Tel 33 1 69 86 38 84 Fax 33 1 69 86 29 88 From Benelux Tel 31 118 67 15 70 From Benelux Fax 31 118 67 15 69 Canada Central coordinati
2. ELECTRICAL DIAGRAM In the following page is shown the electrical diagram of the Sublimation Controller 27 87 900 077 01 D N m x uw e N 00 lt SALON INMV0 GO3ILV83N39 s3i dWNOO v SI SIHL TECHNICAL INFORMATION HSV MOL due N3ENON Leva 1300N ISN4 LO AOC NVYOVIO INISIM SNIVIN dSL 0 c806v98 O voll cO AOCC WWvSHOVIO ONISIM SNIVA dSL C0 C806v9 CO Ve 9 L TINVd JV deu pL NOILZSO 919MY 9 1 v 919MY 9 4 er SJINGOW VINS 5 MO193NNOO Sn 1B ANI NOILdO VOLI ANNOI 919MY 3N18 919MV NMOYS MOd IVIM3S 8 y d A av 338 a CCOMYV dONVYO a 919MV 9 A 38N3 INN ee EE a E ze K zcowv NMONH 919Mv 3018 9IOMV NMOUE OLO3NNOO 806v9 0 NM b806 9S0 MO N DM E 11 n 0 1 Eg Ma i 994 Y3MOd eL E 9 t aJ ZZIMV MO TISA M ed 819MV D A ER e NANNY V e Gd Oo Cd CCOMNV JONVMO C ld s R ZzONN OI SLIMY 3018 919MV NMO3B EM d bd L L BIOMV 9 A jd CONV NMOUG l E goal aye 8 1 IN N Ee 919MV 3h18 919M V NMOYA JIOMY 30718 X ew SIOMY NMOSB SOMV IM aj ej 9 I I CCOMV
3. rungen vom Typ T6 3A und f r eine Versorgungsspannung 100 120 V Ws T10A Sicherungen ein Tauschen Sie immer soweit erforderlich die Sicherungen und das Netzkabel aus Sollte ein Austausch des Netzkabels vorgenommen werden so m ssen die Leiter wie folgt ange schlossen werden blau neutral braun Phase gr n gelb Erde Setzen Sie den Spannungsumschalter wieder ein und set zen Sie den Sicherungskasten wieder auf Stecken Sie das Netzkabel in eine Netzsteckdose 87 900 077 01 D Spannungsumschalter INSTALLATION N ET Der Sublimation Controller wird mit einem Netzkabel mit 3 Lei tern und mit einem den internationalen Normen entsprechenden Netzstecker geliefert Es sollte immer dieses Netzkabel benutzt werden das an eine vorschriftsm ig geerdete Steckdose anzu schlie en ist um Stromentladungen zu vermeiden Vergewissern Sie sich da das Ger t vorschriftsm ig geerdet ist Im Inneren des Controllers entstehen hohe Spannungen die schwere Sch den verursachen und lebensgef hrlich sein k n nen Vor jedem Montage bzw Wartungseingriff mu deshalb der Netzstecker gezogen werden IS ACHTUNG Der Controller kann auf einen Tisch oder ein Gestell montiert werden In beiden F llen mu eine ungehinderte Zirkulation der K hlluft durch die im Geh use vorne und unten eingelassen Luft ffnungen gew hrleistet sein Wenn der Controller in einem Gestell montiert wird MUSS er in eine
4. 70 C Relative Luftfeuchtigkeit 0 95 nicht kondensierend VOR DER INSTALLATION Der Controller wird mit einer speziellen Schutzverpackung gelie fert Eventuelle Transportsch den m ssen der zust ndigen rtli chen Verkaufsstelle gemeldet werden Beim Auspacken vorsich tig vorgehen damit der Controller nicht f llt oder St en ausge setzt wird Das Verpackungsmaterial mu korrekt entsorgt wer den Es ist vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r Umweltschutz Verpackung des Controllers Der Sublimation Controller sind werkseitig f r folgende Versor gungsspannungen ausgelegt e Modell 929 0023 f r 220 V Ws Eingangsspannung von 180 bis 265 V Ws e Modell 929 0022 f r 120 V Ws Eingangsspannung von 90 bis 130 V Ws Soll die Versorgungsspannung ge ndert werden so gehen Sie wie folgt vor Schalten Sie den Controller aus und ziehen Sie das Netzka bel Nehmen Sie den auf der R ckseite des Controllers installier ten Sicherungskasten ab und ziehen Sie den Spannungs wechsler heraus Stellen Sie den Spannungswechsler auf die gew nschte Versorgungsspannung ein indem Sie ihn nach au en hin drehen IS ACHTUNG Sollte die Vorsorgungsspannung von 100 120 V Ws auf 220 240 V Ws oder umgekehrt ge ndert werden M SSEN IN JEDEM FALL auch die Sicherungen und das Netzkabel entsprechend ausgetauscht werden Setzen Sie f r eine Versorgungsspannung 220 240 V Ws Siche
5. AN SS UI EE EE ES SOMV JAIM vc EE RESTE E E SE bp eni have gee al El NA T 6 8 S SOMV 33M d 060679 FO 87 900 077 01 D 28 E ccoMy 3n le ZZOMV 39NVHO ZZOMV MOTT3A HJWHOJSNVML ZZOMV 034 9 d SONV JIM BIMV JIM i OCT Ovia YINYOJSNYYL i er ZCONN NMOWB zem NEO SONV FNM SE COM JHM 001 NMOSA X OZOMV MIVIA OZOMV MOVIE Bah AOS MOL WHO Ce Ly 8 0679 0 A18W3SSV LX3N JAQON YO AdAL N HSVG 6 a 7 S 9 L 8 a VARIAN gt Request for Return RO 9001 l A Return Authorization Number RAF WILL NOT be issued until this Request for Return is completely filled out signed and returned to Varian Customer Service 2 Return shipments shall be made in compliance with local and international Shipping Regulations IATA DOT UN 3 The customer is expected to take the following actions to ensure the Safety of workers at Varian a Drain any oils or other liquids b Purge or flush all gasses c Wipe off any excess residues in or on the equipment d Package the equipment to prevent shipping damage for Advance Exchanges please use packing material from replacement unit 4 Make sure the shipping documents clearly show the RA and then return the pack
6. riavvio automatico della sublimazione dopo una mancanza di alimentazione su YES 3 87 900 077 01 D Informazioni dettagliate sui modi di funzionamento sono contenute nell appendice Technical Information Accensione del Sublimation Controller Per accendere il Sublimation Controller sufficiente portare l interruttore di alimentazione presente sul pannello posteriore nella posizione I Per procedere con la sublimazione amp sufficiente premere l interruttore SUBLIMATION presente sul pannello frontale si accender il Led verde associato NOTA Se il pulsante del pannello frontale non viene portato nella posizione ON la sublimazione non avr luogo ma l unit rester in attesa dell impostazione dei parametri Spegnimento del Sublimation Controller Per spegnere il Sublimation Controller si deve procedere come segue premere il pulsante SUBLIMATION del pannello frontale per portarlo in posizione OFF Led verde spento portare l interruttore di alimentazione del pannello posteriore nella posizione O MANUTENZIONE Il Sublimation Controller non richiede alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato In caso di guasto possibile usufruire del servizio di riparazione Varian o del Varian advance exchange service che permette di ottenere un controller nuovo in sostituzione di quello guasto MESSAGGI DI ERRORE ISTRUZIONI PER L USO
7. sempre all ultimo modo di funzionamento impostato Se il parametro AUTOSTART stato impostato su YES ed era in corso una sublimazione questa riprender automaticamente 5 L unit progettata per funzionare in due diversi modi e con la selezione manuale dei parametri MANUAL e e di a me del cavo opzionale verso la REMOTE SET Deo e con la ae automatica dei parametri AUTOMATIC e Connettore RS 232 422 485 opzionale AUTOMAT REMOTE Connettore di alimentazione selezione tensione di ingresso Il Sublimation Controller pu essere usato per comandare le d ape um La IV to O pompe del tipo TSP oppure del tipo Mini Ti Ball ER I spento 0 Nei modi MANUAL e REMOTE SET la selezione dei parametri TRS PSISSONENT della sublimazione viene effettuata direttamente dall operatore attraverso i comandi del pannello frontale modo MANUAL o NOTA inviati sul connettore di UO modo REMOTE L unit predisposta in fabbrica nel seguente modo Se il Sublimation Controller deve essere usato in abbinamento a M vp dot MEE o ANGAT pompe del tipo TSP deve essere selezionato il tipo di sorgente tivo di te TSP TSP Se il controller deve essere usato in abbinamento a pompe HPO CFSOIgEnte del tipo Mini Ti Ball deve essere selezionato il tipo di sorgente corrente di sublimazione 30 A Mini Ti Ball tempo di sublimazione 1 minuto periodo di sublimazione 3 minuti livello di pressione 1x10 mbar AUTOSTART
8. In the following paragraph are described the different setting for each operating mode To display the sublimation parameters menu and to switch from one page to another press the V or A Keys When the desired parameter is displayed the value can be changed as follows 1 press the SET key 2 press A key to increase the value or v key to decrease the value 3 press SET key to confirm the choice or MODE key to escape without changing the value In any case the controller come back to the normal operating mode and the display shows one of the following messages depending on the source type selected 87 900 077 01 D ris el r i t s mje n t x ITT Iwa The message MAN at the end of the second row can be different It depends on the operating mode selected and changes as previously described NOTE The controller escapes automatically from the sublimation parameters setting mode before 30 second if no selection are made and return to the normal operation NOTE The sublimation current value can even be set when the sublimation is activated Selection inMANUAL Operating Mode In this operating mode the possible selection on the front panel are sublimation period sublimation time current value During the sublimation period setting the display shows s u eje eleirl lolo Li xix iili majn Where XX is the value currently set and YYYYY is the unit used m
9. Technologies Asia Ltd 14F 6 No 77 Hsin Tai Wu Rd Sec 1 Hsi chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Fax 886 2 2698 9678 Toll Free 0800 051342 UK and Ireland Varian Ltd 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU England Tel 44 1865 291570 Fax 44 1865 291571 United States Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Other Countries Varian Inc Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Customer Support amp Service North America Toll Free 1 800 882 7426 vtl technical support varianinc com Europe Tel 00 800 234 234 00 vtt technical support varianinc com China Toll Free 800 820 8266 vtc technical support varianinc com Japan Toll Free 0120 655 040 vtj technical support varianinc com Korea Toll Free 080 222 2452 vtk technical support varianinc com Taiwan Toll Free 0 800 051 342 vtw technical support varianinc com Worldwide Web Site Catalog and Order On line www varianinc com Representative in most countries ap A VARIAN
10. areazione presenti sulla copertura superiore e laterale Se il Sublimation Controller viene utilizzato come modulo a rack DEVE essere inserito in un adattatore alto quattro unit rack per evitare che cada all interno del rack stesso Il pannello frontale del Sublimation non previsto per reggere il peso dell unit Non installare o utilizzare il Sublimation Controller in un ambiente esposto ad agenti atmosferici pioggia neve ghiaccio polvere gas corrosivi o in un ambiente esplosivo o ad alto rischio di infiammabilit ISTRUZIONI PER L USO NOTA Se il Sublimation Controller utilizzato come unit da tavolo devono essere presenti i quattro piedini laterali Se il Sublimation Controller installato in un rack rimuovere i quattro piedini e posizionarlo con almeno 30 mm 1 2 pollici di spazio sopra e sotto Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali e temperatura da 5 C a 45 C e umidit relativa O 90 senza condensa Per collegare il Sublimation Controller alla pompa utilizzare il cavo specifico fornito come opzione Per informazioni su questi ed altri collegamenti e sull installazione della scheda opzionale consultare l appendice Technical Information USO In questo paragrafo sono riportate le principali procedure operative Per ulteriori dettagli e per procedure che coinvolgono collegamenti o particolari opzionali fare riferimento al paragraf
11. be connected to the I O connector to set some sublimation parameters and receive feedback from the field The pin layout is shown in the following figure Sublimation Controller outline The correspondence between pin and signal is Pin 1 Input signal Voltage range 0 to 10 Vdc Used for setting sublimation current value between 30 A corresponding to 6 Vdc and 50 A corresponding to 10 Vdc Pin 2 Input signal Voltage range 0 to 5 Vdc Used for setting pressure threshold value minimum value 1 10 mbar corresponding to O Vdc maximum value 1 10 mbar corresponding to 5 Vdc Pin 3 Interlock This pin must be shorted to one of the common pins number 4 or 6 to 9 the jumper is furnished with the controller Pin 4 Common 18 Pin 5 Output signal Voltage range O to 10 Vdc Used to feedback the sublimation current value applied during sublimation 0 Vdc 0 A 10 Vdc 50 A Pin 6 to 9 Common NOTE Without the interlock connection the controller cannot operate If the controller is not connected with a remote unit the tap furnished with the controller must be used If the controller is connected with a remote unit the interlock must be correctly connected as described 87 900 077 01 D USE There are three different type of settings that can be selected 1 configurati
12. filaments disponibles restants et il signalera que la commutation a eu lieu sur les voyants d affichage Si le TSP RECOVER est en mode MANUAL l op rateur doit r amorcer manuellement la proc dure de sublimation MANUAL la sublimation est coup e CARTRIDGE Il s est produit une coupure des trois filaments du Remplacer le cartridge DEFECTIVE XXX TSP et la sublimation est coup e FAULT Il s est produit une surcharge du transformateur et Eliminer la cause de la surcharge sur le OVER TEMPERATURE le cycle de pompage est coup transformateur EXTERNAL Le contact d interlock pin 3 n a pas t connect Connecter l interlock INTERLOCK sur le connecteur d E S 12 87 900 077 01 D GENERAL INFORMATION This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Varian before operating the equipment Varian will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorised interference with the equipment or any action contrary to that provided for by specific national standards The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This manual uses the following standard protocol AN TRI
13. und andere ber einen Verbindungsstecker und E A Signale bertragen ANMERKUNG Nach einem Stromausfall wird der Sublimationsbetrieb immer in der jeweils zuletzt selektionierten Betriebsart aufgenommen Wenn der Parameter AUTOSTART mit YES best tigt wurde und der Sublimationsvorgang lief wird dieser automatisch wieder aufgenommen Das Ger t kann auf zwei verschiedene Arten betrieben werden e ber manuelle Selektion der Parameter MANUAL und FERNGESTEUERT SET e ber automatische Selektion der Parameter AUTOMA TISCH und AUTOMATISCH FERNGESTEUERT Der Sublimation Controller kann zur Steuerung von TSP Pumpen oder Pumpen der Baureihe Mini Ti Ball eingesetzt wer den In den Betriebsarten MANUAL und FERNGESTEUERT SET wird die Selektion der Sublimationsparameter vom Bediener ber die frontale Schalttafel des Controllers Betriebsart MANUAL vorge nommen oder ber den Verbindungsstecker und entsprechende E A Signale Betriebsart FERNGESTEUERT bertragen Wenn der Sublimation Controller mit TSP Pumpen verwendet wird mu die Betriebsart TSP selektioniert werden Wird der Sublimation Controller dagegen mit einer Mini Ti Ball Pumpe verwendet so mu die Betriebsart Mini Ti Ball eingestellt werden 2 Steckverbindung zum Anschlu des Zusatzkabels zur TSP oder Mini Ti Ball Pumpe Steckverbindung RS232 422 485 Sonderzubeh r Netzkabelanschlu Wahlschalter Eingangsspannung Siche rungen Netz
14. 0023 set for 220 Vac 50 Hz Sublimation Controller It consist of various boards The following figure shows the minimum configuration Sublimation Controller boards Top view 1 Dc power supply board it contains the line voltage change over and the EMI filter The ac input voltage is rectified and the needed DC output voltages are generated Microprocessor boards located on front panel it is based on a single chip microprocessor with a large input output capability It manages commands coming from the front panel keyboard and from the various cards and drives the front panel display and all output card function 2 bh TECHNICAL INFORMATION 3 Display and front panel keyboard it contains the functional push buttons the LEDs indicating the operating filament and the active mode of operation and the LCD display NOTE Leave at least 30 mm 1 2 inches of free air circulation on top and bottom of the unit for an efficient cooling of the unit Blind the unused slots on rear panel with the provided covers SUBLIMATION CONTROLLER SPECIFICATION Input Voltage selectable at the rear of the case 90 to 110 Vac 1 phase use setting 100 Vac 110 to 130 Vac 1 phase use setting 120 Vac 190 to 230 Vac 1 phase use setting 220 Vac 230 to 265 Vac 1 phase use setting 240 Vac 47 to 63 Hz 660 W activ
15. ER The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury US CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment NOTE The notes contain important information taken from the text CONTROLLER DESCRIPTION Varian s Sublimation Controller is a titanium sublimation pumps TSP controller The unit can be factory configured to the customer s needs but the configuration can be modified by the user to adapt the controller to the different user needs DESCRIPTION PART NUMBER Base Unit Sublimation Controller set for 929 0023 220 Vac input voltage Sublimation Controller set for 929 0022 110 Vac input voltage Accessories RS 232 Computer Interface 929 0024 Card RS 422 Computer Interface 929 0025 Card RS 485 Computer Interface 929 0026 Card Cable for TSP pump 924 0730 924 0752 The Sublimation Controller can control a TSP or a Mini Ti Ball pump type The Sublimation Controller can be operated in different ways MANUAL AUTOMATIC AUTOMAT REMOTE and REMOTE SET In MANUAL and AUTOMATIC modes all controls are given on front panel In REMOTE SET and AUTOMAT REMOTE some controls are given on front panel and others are given by signal through the I O connector Cable for Mini Ti Ball pump INSTRUCTION FOR USE STORAGE When transp
16. MELDUNG BESCHREIBUNG ST RUNGSBEHEBUNG POWER AC FAIL St rung am Versorgungsstromkreis aufgrund einer falschen Versorgungsspannung HEATER DEFECTIVE Unterbrechung im Gl hdraht der Heizeinheit w hrend des Pumpzyklus mit Mini Ti Ball Pumpe FILAMET X DEFECTIVE Unterbrechung im Gl hdraht X entweder 1 2 oder 3 w hrend des Sublimationszyklus mit TSP Pumpe Sollte der Parameter TSP RECOVER mit AUTOMATISCH eingegeben worden sein so aktiviert das Programm automatisch die norma le Betriebsart indem der n chste Gl hdraht der Heizpatrone selektioniert wird Sollte der Parameter TSP RECOVER mit MANUELL eingegeben worden sein wird der Sublimationszyklus unterbrochen CARTRIDGE DEFECTIVE XXX Unterbrechung eines oder aller Gluhdrahte des TSP Pumpe Unterbrechung des Sublimations Zyklus FAULT OVER TEMPERATURE EXTERNAL INTERLOCK Kein Anschlu des Interlock Kontaktes Stift 3 der Steckverbindung E A Schalten Sie das Ger t aus vergewissern Sie sich von der Spannungspr senz und der vorge schriebenen Werte 110 120 V Ws 60 Hz oder 220 240 V Ws 50 Hz Tauschen Sie die Mini Ti Ball Pumpe aus Sollte der Parameter TSP RECOVER mit AUTOMATISCH eingegeben worden sein so selektioniert das Programm selbstt tig einen der weiteren Gl hdr hte und zeigt dies ber das entsprechende LED an Sollte der Parameter TSP RECOVER mit MANUELL eingegeben worden sein mu de
17. N EN Prima di effettuare qualsiasi intervento sul controller scollegare il connettore di alimentazione In caso di guasto possibile usufruire del servizio di riparazione Varian o del Varian advanced exchange service che permette di ottenere un controller in sostituzione di quello guasto Qualora un controller dovesse essere rottamato procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche SMALTIMENTO Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita Per certi tipi di guasti il controller esegue una auto diagnosi e visualizza uno dei messaggi mostrati nella tabella seguente MESSAGGIO DESCRIZIONE AZIONE CORRETTIVA POWER AC FAIL corretta HEATER DEFECTIVE Anomalia rilevata sul circuito di alimentazione dovuta ad una tensione di alimentazione non Si verificata una interruzione del filamento del Spegn
18. NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem T Agilent Technologies Sublimation Controller I MANUALE ISTRUZIONI D BEDIENUNGSHANDBUCH F NOTICE DE MODE D EMPLOI Model 929 0022 GB INSTRUCTION MANUAL Model 929 0023 87 900 077 01 D APRIL 2006 Sublimation Controller Sublimation Controller uu ap VARIAN gt lt vacuum technologies Dear Customer Thank you for purchasing a VARIAN vacuum product At VARIAN Vacuum Technologies we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our product On the back side you find a Corrective Action Request form that you may fill out in the first part and return fo us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very importan
19. PROCEDURES D UTILISATION Modes de Fonctionnement Le Sublimation Controller peut fonctionner dans les modes MANUAL AUTOMATIC REMOTE SET et AUTOMAT REMOTE Dans les modes MANUAL et AUTOMATIC toutes les commandes sont donn es par tableau frontal Dans les modes de fonctionnement AUTOMAT REMOTE et REMOTE SET les commandes sont donn es soit par des signaux sur le cable d E S soit par par le tableau frontal NOTE Apr s une coupure d alimentation le Sublimation retourne toujours au dernier mode de fonctionnement tabli Si le 5 parametre AUTOSTART a t tabli sur YES et si une sublimation tait ce moment l en cours cette derniere reprendra automatiquement 1 Connecteur de liaison du c ble optionnel vers la pompe TSP ou Mini Ti Ball 2 Connecteur RS 232 422 485 optionnel L unit est concue pour fonctionner dans deux modes diff rents Connecteur d alimentation eslection dela tension d entr e e avec la s lection manuelle des param tres MANUAL et fusibles de protection i REMOTE SET 4 Interrupteur d alimentation allum I coup O e avec la s lection automatique des parametres AUTOMATIC 5 Connecteur de signaux d E S et AUTOMAT REMOTE Le Sublimation Controller peut tre utilis pour commander les pompes du type TSP ou bien du type Mini Ti Ball Dans les modes MANUAL et REMOTE SET la s lection des a 7 NOTE param tres de la sublimation est effectu e directement par l op ra
20. S ATTENZIONE messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura NOTA Le note contengono informazioni importanti estrapolate dal testo DESCRIZIONE DEL CONTROLLER Il Sublimation Controller della Varian un controller per le pompe a sublimazione di titanio TSP L unit pu essere configurata in fabbrica a seconda delle necessit del cliente ma a configurazione pu essere modificata anche dal cliente per consentire l adattamento a esigenze diverse DESCRIZIONE NUMERO DI PARTE Sublimation Controller 929 0023 predisposto per una tensione di alimentazione di 220 Vac Sublimation Controller 929 0022 predisposto per una tensione di alimentazione di 120 Vac Accessori Scheda RS 232 Computer Interface 929 0024 Scheda RS 422 Computer 929 0025 Interface Scheda RS 485 Computer 929 0026 Interface Cavo per pompa TSP 924 0730 924 0752 Il Sublimation Controller pu controllare una pompa del tipo a sublimazione di titanio TSP oppure del tipo Mini Ti Ball Il Sublimation Controller ha diversi modi di funzionamento MANUAL AUTOMATIC AUTOMAT REMOTE e REMOTE SET Nei modi MANUAL e AUTOMATIC tutti i comandi sono dati tramite il pannello frontale Nei modi REMOTE SET e AUTOMAT REMOTE alcuni comandi sono dati tramite il pannello frontale ed altri mediante segnali sul connettore di I O Cavo per pompa Mini Ti Ball ISTRUZIONI PER L
21. TING PROCEDURES Operating Modes The Sublimation Controller can be operated in the MANUAL AUTOMATIC REMOTE SET and AUTOMAT REMOTE mode In MANUAL and AUTOMATIC modes all the controls are given on front panel In AUTOMAT REMOTE and REMOTE SET the controls are given via signals coming through the I O cable NOTE After a power failure the Sublimation Controller will return to the previously selected operating mode If AUTOSTART parameter was set on YES and before the power failure the unit was in sublimation mode the sublimation starts on again automatically 5 The unit is designed to operate in two different modes e with manual selection of the parameters MANUAL and Connector to plug the optional cable for TSP or Mini Ti Ball REMOTE SET modes connection e with automatic selection of the parameters AUTOMATIC RS 232 422 485 connector optional and AUTOMAT REMOTE modes Power cord socket input voltage selector protection fuses The Sublimation Controller can be used to control the TSP or Power switch ON I OFF O Mini Ti Ball pumps type O signals connector In MANUAL and REMOTE SET operating modes the sublimation parameters are setting by the user by means of the front panel controls MANUAL mode and or by signal send on the I O Sublimation Controller rear panel connector REMOTE mode If the Sublimation Controller is used in conjunction with the TSP NOTE pump the TSP source type must be set If the Sub
22. USO IMMAGAZZINAMENTO Durante il trasporto e l immagazzinamento del controller non devono essere superate le seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa O 9596 non condensante PREPARAZIONE PER L INSTALLAZIONE Il Sublimation Controller viene fornito in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere il controller e a non sottoporlo ad urti o vibrazioni Non disperdere l imballo nell ambiente materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Imballaggio del Controller Il Sublimation Controller predisposto in fabbrica per le seguenti tensioni di alimentazione e modello 929 0023 per 220 Vac tensione di ingresso da 180 a 265 Vac e modello 929 0022 per 120 Vac tensione di ingresso da 90 a 130 Vac Nel caso in cui fosse necessario cambiare la tensione di alimentazione eseguire la seguente procedura Spegnere il Sublimation Controller e staccare il cavo di alimentazione dalla rete Togliere la maschera portafusibili dal pannello posteriore e sfilare il cambiatensione Ruotare il cambiatensione portando il valore di tensione desiderato rivolto verso l esterno IS ATTENZIONE Se la selezione d
23. Werk nach den Angaben des Kunden voreingestellt werden wobei im Werk voreingestellte Ger te vom Kunden den spezifischen Be triebsbedingungen entsprechend konfiguriert werden k nnen BEST NR BEZEICHNUNG Grundeinheit Sublimation Controller voreingestellt f r Versorgungsspannung 220 V Ws Sublimation Controller voreingestellt f r Versorgungsspannung 120 V Ws Karte RS 232 Computer Schnittstelle Karte RS 422 Computer Schnittstelle Karte RS 485 Computer Schnittstelle Kabel f r Pumpe TSP 929 0024 929 0025 929 0026 924 0730 Kabel f r Pumpe Mini Ti Ball 924 0752 Der Sublimation Controller kann zur Steuerung von Sublimati onspumpen aus Titan TSP oder Pumpen der Baureihe Mini Ti Ball eingesetzt werden Der Sublimation Controller kann in den Betriebsarten MANUAL AUTOMATISCH AUTOMATISCH FERNGESTEUERT und FERNGESTEUERT SET voreingestellt betrieben werden In den Betriebsarten MANUAL und AUTOMATISCH werden die Steuerbefehle ber die frontale Schalttafel des Controllers ein gegeben in den Betriebsarten AUTOMATISCH FERNGE STEUERT und FERNGESTEUERT SET dagegen werden be stimmte Steuerbefehle ber die frontale Schalttafel des Control lers eingegeben und andere ber einen Verbindungsstecker und E A Signale bertragen GEBRAUCHSANLEITUNG LAGERUNG Beim Transport und bei der Lagerung des Controllers m ssen folgende klimatischen Verh ltnisse eingehalten werden Temperatur von 20 C bis
24. YES the sublimation begin with the parameters previously set or default until the SUBLIMATION key is pressed and the relevant green Led is turned off During a sublimation cycle it is possible to modify the current value In this case press SET key and the display shows Usel Gast fal Pitt ETT Imlaln With the V or A keys increase or decrease the current value then press SET key to confirm or any other key to escape without modifying the setting NOTE The Sublimation Controller escape automatically from the current setting before 30 second if no selection are made and return to sublimation operation Operation in AUTOMATIC mode After the start confirmation by press SET key at the message SUBLIMATION START YES the sublimation begin when the pressure measured incoming to the I O connector reach the pressure threshold set In this operation mode the display shows s u eje elrlelsistulrfel Lixixixixix mjofafr To finish sublimation press the SUBLIMATION key and the relevant Led is turned off 24 TECHNICAL INFORMATION Operation in REMOTE SET mode The operation is the same previously described for MANUAL operation but the current depends on the signal incoming to the I O connector To end sublimation press the SUBLIMATION key and the relevant Led is turned off In this operating mode it is possible to display the current measured on the incoming signal on the I O connec
25. age to the Varian location nearest you North and South America Europe and Middle East Asia and ROW Varian Vacuum Technologies Varian SpA Varian Vacuum Technologies 121 Hartwell Ave Via Flli Varian 54 Local Office Lexington MA 02421 10040 Leini TO ITALY Phone 1 781 8617200 Phone 39 011 9979111 Fax 1 781 8609252 Fax 39 011 9979330 CUSTOMER INFORMATION EE Contact person Name unsre dei e A ri VUE nee toas Ship Method sera Shipping Collect er Europe only VAT reg Number cece cence eee eees USA only Taxable _ Non taxable Customer Bill TO EEN PRODUCT IDENTIFICATION TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return _ Credit L Shipping Error Evaluation Return C Calibration Other HEALTH and SAFETY CERTIFICATION Varan Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Customer Service to discuss alternatives if this requirement presents a problem The equipment listed above check one L HAS NOT been exposed to any toxic or hazardous materials OR L HAS been exposed to any toxic or hazardous materials In case of this selection check boxes for any materials that equipment was exposed to check all categories that apply C Toxic Corrosive Reactive Flammable Explosive Bio
26. ante par points clair par l arri re 16 caract res 2 lignes TSP FILAMENT Voyants verts indiquant 1 2 3 e S ils sont allum s la s lection du filament correspondant de la pompe TSP e S ils clignotent le filament correspondant de la pompe est coup Touche de s lection manuelle de l un des trois filaments de la pompe TSP 4 ON OFF Bouton de commutation de mode de fonctionnement du contr leur OU e Sur OFF le mode Fixation des Param tres est actif e Sur ON le mode Sublimation est actif 5 SUBLIMATION La diode verte indique e si elle est allum e on est dans le temps d attente entre 2 sublimations ou bien dans la phase de rampe de courant e si elle clignote la sublimation est en cours NN MINI TIBALL Le voyant vert s allume lorsque le mode de fonctionnement pour Mini Ti Ball est s lectionn 7 SET Bouton qui permet selon les cas e de confirmer le d but de la sublimation e de m moriser les s lections faites e de mettre z ro une situation d Erreur MODE Bouton qui permet selon les cas e de s lectionner le mode de fonctionnement MANUAL AUTOMATIC AUTOMAT REMOTE et REMOTE SET e de sortir des pages de fixation des param tres sans modifier les param tres Boutons servant modifier les valeurs dans les pages de fixation des param tres ALY Tableau Dorsal du Sublimation Controller La figure suivante indique les commandes et les connexions du tableau dorsal du Sublimation Controller
27. atto di interlock pin Collegare l interlock 87 900 077 01 D ALLGEMEINES Dieser Apparat ist f r Fachbetriebe bestimmt Vor Gebrauch soll te der Benutzer dieses Handbuch sowie alle weiteren von Varian mitgelieferten Zusatzdokumentationen genau lesen Bei Nicht beachtung auch teilweise der enthaltenen Hinweise unsach gem em Gebrauch durch ungeschultes Personal nicht autori sierten Eingriffen und Mi achtung der einheimischen hier zur Geltung kommenden Bestimmungen bernimmt die Firma Varian keinerlei Haftung In den folgenden Abschnitten sind alle erforderlichen Informatio nen f r die Sicherheit des Bedieners bei der Anwendung des Ger tes aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben A CAN Die Gefahrenhinweise lenken die Aufmerksamkeit des Bedieners auf bestimmte Vorg nge oder Praktiken die bei unkorrekter Aus f hrung schwere Verletzungen hervorrufen k nnen IS ACHTUNG Die Warnhinweise vor bestimmten Prozeduren machen den Be diener darauf aufmerksam da bei Nichteinhaltung Sch den an der Anlage entstehen k nnen ANMERKUNG Die Anmerkungen enthalten wichtige Informationen die im Text hervorgehoben werden BESCHREIBUNG DES CONTROLLERS Der Sublimation Controller von Varian ist ein Controller f r die Pumpen mit Titansublimation TSP Das Ger t kann im
28. c T E D Li Mni Ile Then the controller passes to the normal start up operations and the display shows aero Then if a serial module is mounted on the controller the display shows At the end of this check if no problems on the serial port are detected the display shows Before the serial port check if the Computer Interface Card is mounted or before the message AUTOTEST the software check the presence of the zero crossing signal and in case of fault frequency absent or different from 50 or 60 Hz the display shows jeje wE R ale Ice and the controller must be shut down If the check has a positive result the display shows for a few seconds I Jalufrloirlelsit Then the display shows one of the following message depends of the source type previously selected Mieli Tijela 87 900 077 01 D Or ris el ele mje n t lx ITT majn Where X can be 1 2 or 3 depending on the TSP filament selected The message MAN that appears at the end of the second row indicates the operation mode currently set factory set MANUAL To enable the configuration mode to modify the autostart and the automatic change of the TSP filament press the MODE and SET keys NOTE Before activating the configuration mode make sure that the SUBLIMATION Led is off The display shows sufelel lmfalr loln amp w rjo s TJAJR T vjels The AUTOSTART i
29. dant le transport et l emmagasinage du contr leur il faudra veiller respecter les conditions environnementales suivantes e temp rature de 20 C 70 C e humidit relative de 0 a 95 non condensante PREPARATION POUR L INSTALLATION Le Sublimation Controller est fourni dans un emballage de protection sp cial si l on constate des marques de dommages pouvant s tre produits pendant le transport contacter aussit t le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particulierement ne pas laisser tomber le contr leur et ne lui faire subir aucun choc Ne pas jeter l emballage dans la nature Le mat riel est enti rement recyclable et il est conforme aux directives CEE 83 399 en mati re de protection de l environnement Emballage du contr leur Le Sublimation Controller est pr quip en usine pour les tension d alimentation suivantes e mod le 929 0023 pour 220 Vac tension d entr e de 180 265 Vac e mod le 929 0022 pour 120 Vac tension d entr e de 90 130 Vac S il s av re n cessaire de changer la tension d alimentation proc der comme suit Couper l alimentation du Sublimation Controller et d brancher le c ble d alimentation du r seau Enlever le cache porte fusible du tableau dorsal et d gager le survolteur d volteur Tourner le survolteur d volteur de mani re ce que la valeur de tension souhait e se trouve vers l ext r
30. de table soit comme module rack doit de toute fa on tre positionn de fa on ce que l air de refroidissement puisse circuler librement travers les trous d a ration se trouvant sur la couverture sup rieure et lat rale Si le Sublimation Controller est utilis comme module rack Il DOIT tre introduit dans un adaptateur haut de quatre unit s de rack pour viter qu il ne tombe l int rieur du rack Le tableau frontal du Sublimation Controller n est pas pr vu pour supporter le poids de l unit Ne pas installer ou utiliser le contr leur dans des milieux expos s des agents atmosph riques pluie gel neige des poussi res des gaz de combat ainsi que dans des milieux explosifs ou risque lev d incendie MODE D EMPLOI NOTE Si le Sublimation Controller est utilis comme unit de table il faut que les quatre pieds lat raux soient pr sents Si le Sublimation Controller est install dans un rack enlever les quatre pieds ou bien le positionner avec 30 mm 1 2 pouces d espace au moins au dessus et au dessous Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes e temp rature de 5 C 45 C e humidit relative de 0 a 95 non condensante Pour relier le Sublimation Controller la pompe utiliser le c ble sp cifique fourni en option Pour tous renseignements concernant ces connexions et d autres connexions ainsi que l insta
31. e power maximum 800 VA apparent power maximum see note 6 3 A for 220 240 Vac setting slow blow qty 2 10 A for 100 120 Vac setting slow blow qty 2 Frequency Power Operating 0 to 45 C 90 maximum non condensing humidity Temperature Humidity Radio interference suppression Conforms to EN55011 class A group 1 IEC 1000 4 2 3 4 Conforms to EN 61010 and EN 60204 Installation category Cables Mains 3 meters long 3 wires 0 75 mm 12 Kg NOTE When the controller is powered by means of a transformer the transformer power must be at least 1500 VA to avoid a distortion of the power waveform Safety requirements Weight 87 900 077 01 D SUBLIMATION CONTROLLER OUTLINE The outline dimensions for the Sublimation Controller base unit are shown in the following figure PUMP CONNECTION The pump is connected to the controller rear panel via LOAD connector cable to be separately ordered AN TRIER When installing the high power cable Turn the power off Plug the cable on the pump side and secure it with the ring nut Plug the cable on the controller side and secure it with the ring nut When removing the cable make sure that the power is off a oira 8 34 141 2 5 6 7 N 2 Mone f SET Sublimation Controller TECHNICAL INFORMATION REMOTE UO CONNECTION An external analogue unit can
32. e pressure threshold is reached as in the AUTOMATIC operating mode The current value of sublimation is set by means of a signal incoming on the analog input on pin 2 of the I O connector range 0 to 10 Vdc If the W key is pressed the display shows the previous message mode REMOTE SET If the A key is pressed the display shows the first message illustrated before mode MANUAL To select the desired operating mode press the SET key The controller comes back to the normal operating mode and the display shows one of the following messages depending on the source type selected LIII TIL Iwa The message MAN at the end of the second row can be different It depends of the operating mode selected in mode AUTOMATIC the message become AUT in mode REMOTE SET the message become REM in mode AUTOMAT REMOTE the message become A M NOTE The controller escape automatically from the operating mode selection before 30 second if no selection are made and return to the normal operation If the MODE key is pressed during the operating mode selection the Sublimation Controller returns to the normal operation and the operating mode remains that previously selected before the activation of the operating mode selection Sublimation Parameters Setting The mode by means of which is possible to modify the sublimation parameters depends on the selected operating mode MANUAL AUTOMATIC REMOTE SET and AUTOMAT REMOTE
33. ec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en oeuvre le processus de collecte et mise au rebut Dans certains cas de panne le contr leur proc de un autodiagnostic et affiche l un des messages indiqu s dans le tableau ci dessous MESSAGE DESCRIPTION INTERVENTION POWER AC FAIL HEATER DEFECTIVE FILAMET X DEFECTIVE erron e Mini Ti Ball cartridge Si le param tre TSP RECOVER est en mode D tection d une anomalie sur le circuit d alimentation due une tension d alimentation Il s est produit une coupure du filament du r chauffeur pendant un cycle de pompage avec le Il s est produit une coupure du filament X X pouvant tre 1 2 ou 3 au cours d une sublimation avec un TSP Si le parametre TSP RECOVER est en mode AUTOMATIC le logiciel r tablit directement le fonctionnement normal s lectionnant le filament suivant du Couper l unit puis s assurer que la tension est pr sente et que les valeurs d alimentation ont t correctement tablies 110 120 Vac 60 Hz ou 220 240 Vac 50 Hz Remplacer le Mini Ti Ball Si le param tre TSP RECOVER est en mode AUTOMATIC le logiciel proc dera la s lection automatique de l un des
34. eed as follows On the rear panel turn the power switch on stulelL mlalrl on position Wait for the following messages displayed in s T A R T Y E s MAN sequence Press SET key to confirm the start or any other key Did i ge d i E LA time during the current Ti A DCK Where XX X are the currently value used Mii n il Itlil Inlal l l Le Then finish the current ramp during the sublimation the display shows the voltage the LLL LLL TT man current and the time used for the sublimation as follows vixx xy nxx xa ejv R R Ielslwiet JMAIN whe x xfs xxi xx majn ris el ele me nit lx LIT Iwa Then press the SUBLIMATION key The relevant Led will be turned on and the display shows sjtiWwAmToN TI Where XX X are the currently value used and XX XX XX is the sublimation time expressed in hours minutes and seconds format amp s r A R T gt Info JMAIN 23 87 900 077 01 D Between sublimations the display shows the remaining time before next sublimation and the period set for the sublimation as follows rime rfol isjuBitj xixin P E R tjo p Xix nj MAIN Where XX are the current value The operation of the Sublimation Controller depends on the operating mode selected as described below Operation in MANUAL mode After the start confirmation by press SET key at the message SUBLIMATION START
35. electable values by means of the v or A keys are comprised from 1 10 to 1 10 mbar with step of 1 10 mbar Selection in REMOTE SET Operating Mode In this operating mode the possible selection on the front panel are sublimation time sublimation period For these parameters the possible settings and the messages displayed are the same shown for the MANUAL operating mode excepted for the script REM in place of MAN at the end of the second row selection in AUTOMAT REMOTE Operating Mode In this operating mode the possible selection on the front panel are sublimation time pressure threshold 87 900 077 01 D TECHNICAL INFORMATION For these parameters the possible settings and the Parameters Values messages displayed are the same shown for the In the following table are indicated the different MANUAL and AUTOMATIC operating mode possible values for each sublimation parameter excepted for the script A R in place of MAN at the end of the second row PARAMETER DEFAULT VALUE ADJUSTABLE RANGE uem ET SO At 50 A at stp OSA Time 1 minute 1 minute to 7 minutes at step of 30 seconds Period 3 minutes 3 minutes to 32 hours with following intermediate values 10 minutes 30 minutes 1 hour 2 hours 4 hours 8 hours Pressure threshold 1x10 mbar 1x10 mbar to 1x10 mbar at step of 1x10 mbar Sublimation Pressing the V or A keys the display shows To start the sublimation proc
36. ella tensione di ingresso viene portata da 100 120 Vac a 220 240 Vac o viceversa DEVONO essere cambiati anche i fusibili ed il cavo di alimentazione Per le tensioni 220 240 Vac i fusibili devono essere T6 3A mentre per le tensioni 100 120 Vac devono essere T10A Se necessario cambiare i fusibili ed il cavo di alimentazione Se occorre cambiare il cavo di alimentazione esso va cablato nel seguente modo blu neutro marrone fase giallo verde terra Reinserire il cambiatensione e riposizionare la maschera portafusibili Collegare il cavo di alimentazione alla rete 87 900 077 01 D Selettore della Tensione di Alimentazione INSTALLAZIONE N EN Il Sublimation Controller munito di un cavo di alimentazione a 3 fili con una spina di sicurezza approvata a livello internazionale Utilizzare questo cavo di alimentazione e spina insieme ad una presa munita di collegamento di terra onde evitare folgorazioni Verificare che il collegamento di terra sia collegato correttamente All interno del controller si sviluppano alte tensioni che possono recare gravi danni o la morte Prima di eseguire qualsiasi operazione di instalazione o manutenzione del controller scollegarlo dall alimentazione US ATTENZIONE II Sublimation Controller pu essere usato sia come unit da tavolo sia come modulo a rack in ogni caso deve essere posizionato in modo tale che l aria possa circolare liberamente attraverso i fori di
37. ere l unit quindi verificare la presenza di tensione e la corretta impostazione dei valori di alimentazione 110 120 Vac 60 Hz o 220 240 Vac 50 Hz Sostituire il Mini Ti Ball riscaldatore durante un ciclo di pompaggio con il Mini Ti Ball FILAMENT X DEFECTIVE direttamente il normale funzionamento selezionando il filamento successivo del cartridge Si verificata una interruzione del filamento X dove X pu essere 1 2 o 3 durante una sublimazione con un TSP Nel caso in cui il parametro TSP RECOVER in modo AUTOMATIC il software ripristina Se il parametro TSP RECOVER in modo AUTOMATIC il software provvede a selezionare automaticamente uno dei restanti filamenti disponibili segnalando l avvenuta commutazione sui Led di visualizzazione Se il parametro TSP RECOVER in modo MANUAL l operatore deve riavviare manualmente la procedura di sublimazione Nel caso in cui il parametro TSP RECOVER in modo MANUAL la sublimazione viene interrotta CARTRIDGE DEFECTIVE XXX interrotta FAULT OVERTEMPERATURE EXTERNAL INTERLOCK 3 sul connettore di I O Si verificata una interruzione di tutti e tre i filamenti del TSP e la sublimazione viene Sostituire il cartridge Si verificato un sovraccarico del trasformatore Rimuovere la causa del sovraccarico sul e il ciclo di pompaggio viene interrotto trasformatore Non stato collegato il cont
38. es Mise hors tension du Sublimation Controller Pour mettre le Sublimation Controller hors tension proc der comme suit presser l interrupteur SUBLIMATION du tableau frontal pour le mettre dans la position OFF voyant vert teint mettre l interrupteur d alimentation du tableau frontal dans la position O ENTRETIEN Le Sublimation Controller n exige aucun entretien op ration doit tre effectu e par un personnel agr En cas de panne il est possible de s adresser au Service de r paration Varian ou bien au Varian advance exchange service qui permet d obtenir un contr leur neuf la place du contr leur d traqu Toute MESSAGES D ERREUR MODE D EMPLOI A ETES Avant d effectuer toute op ration sur le contr leur d brancher le c ble d alimentation En cas de panne il est possible de s adresser au Service de r paration Varian ou bien au Varian advance exchange service qui permet d obtenir un contr leur neuf la place du contr leur d traqu En cas de mise au rebut du contr leur proc der son limination conform ment aux r glementations nationales en la mati re MISE AU REBUT Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut av
39. ieur ES ATTENTION Si la s lection de la tension d entr e est port e de 100 120 Vac 220 240 Vac ou vice versa IL EST NECESSAIRE de changer galement les fusibles et le c ble d alimentation Pour les tensions de 220 240 Vac les fusibles doivent tre T6 3A tandis que pour les tensions 100 120 Vac ils doivent tre T10A Si besoin est changer les fusibles et le c ble d alimentation S il apparait n cessaire de changer le c ble d alimentation celui ci doit tre c bl comme suit bleu neutre marron phase jaune vert terre Remettre en place le survolteur d volteur ainsi que le cache porte fusibles Connecter le c ble d alimentation au r seau 87 900 077 01 D S lecteur de la Tension d Alimentation INSTALLATION N EXT Le Sublimation Controller est muni d un c ble d alimentation 3 fils avec une fiche de s curit approuv e au niveau international Utiliser ce c ble d alimentation et cette fiche avec une prise munie de connexion la terre afin d viter tout risque d lectrocution S assurer que la connexion la terre soit correctement connect e A l int rieur du contr leur se d veloppent de hautes tensions qui peuvent causer de graves dommages et m me la mort Avant d effectuer toute op ration d installation ou d entretien du contr leur le d brancher de la prise d alimentation ATTENTION Le Sublimation Controller peut tre utilis soit comme unit
40. inutes or hours The possible selectable values by means of the v or keys range from 3 minutes to 32 hours for intermediate values refer to Parameters Values When the sublimation time setting is activated the display shows sut j iwg f LL xfx jmjijol jMAIN Where X X min is the value currently set The possible selectable values by means of the v Or keys are comprised from 1 to 7 minutes with step of 30 seconds NOTE The software does not permit the setting of a sublimation time greater than period of sublimation 22 TECHNICAL INFORMATION For the current value of sublimation the display shows s u eje cju R R E NIT LL LL XL EXT Aj IMJAIN Where XX X A is the currently set value The possible selectable values by means of the v Or keys are comprised from 30 to 50 A with step of 0 5 A Selection in AUTOMATIC Operating Mode In this operating mode the possible selection on the front panel are sublimation time sublimation current value pressure threshold For the time and current value the possible settings and the messages displayed are the same shown for the MANUAL operating mode excepted for the script AUT in place of MAN at the end of the second row For the pressure threshold setting the display shows s ufele elrlelsistulrfel Lixpueix x Jmib ajr JAjujT Where X 10 XX is the pressure threshold set in mbar The possible s
41. kdown contact your local Varian service center who can supply a replacement controller ERROR MESSAGES INSTRUCTION FOR USE NOTE Before returning the pump for repairs or replacement with a reconditioned unit the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must also be inserted in the pump package before shipping If a controller is to be scrapped it must be disposed of in accordance with the specific national standards DISPOSAL Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale For a certain type of failure the controller will self diagnose the error and the messages described in the following table will be displayed MESSAGE DESCRIPTION REPAIR ACTION POWER AC FAIL voltage Anomalous operation relevant to the power supply due to an incorrect power supply Swi
42. lection trullo ao 20 Sublimation Parameters Setting ss 21 Paramelers D EL 23 SUE M N 23 Operation in MANUAL Mode nennen nnne enean nnn nnns nennen 24 Operation in AUTOMATIC Mode nennen nennen nnns 24 Operation REMOTE SET lee EE 24 Operation in AUTOMAT REMOTE Mode sees nennen nnns 24 SUBLIMATION TIMING lt lt uns 24 OPERATIONAL FeO Vy CHAR T EE 24 SPARE PARTS ardea balena 27 ELECTRICAL RE KEE 27 INFORMAZIONI GENERALI Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Varian prima dell utilizzo dell apparecchiatura La Varian si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical informations Questo manuale utilizza le seguenti convenzioni AN EN messaggi di pericolo attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali I
43. ler e su OFF il attivo il modo Impostazione Parametri e Su ON attivo il modo Sublimazione 5 SUBLIMATION Led verde che indica e Se acceso che si nel tempo di attesa fra 2 sublimazioni o nella fase di rampa di corrente e se lampeggiante che in corso la sublimazione 6 MINI TIBALL Led verde acceso quando selezionato il modo di funzionamento per Mini Ti Ball 7 SET Pulsante che a seconda dei casi permette di e confermare l inizio della sublimazione e memorizzare le selezioni fatte e resettare una situazione di Errore MODE Pulsante che a seconda dei casi permette di e Selezionare il modo di funzionamento MANUAL AUTOMATIC AUTOMAT REMOTE e REMOTE SET e uscire dalle pagine di impostazione parametri senza cambiare i parametri Pulsanti che servono a modificare i valori nelle pagine di impostazione parametri 2 jA vi Pannello Posteriore del Sublimation Controller La figura seguente mostra i controlli e le connessioni del pannello posteriore del Sublimation Controller PROCEDURE DI USO Modi di Funzionamento Il Sublimation Controller pu funzionare nei modi MANUAL AUTOMATIC REMOTE SET e AUTOMAT REMOTE Nei modi MANUAL e AUTOMATIC tutti i comandi sono dati da pannello frontale Nei modi di funzionamento AUTOMAT REMOTE e REMOTE SET i comandi sono dati sia tramite segnali sul cavo di I O sia dal pannello frontale NOTA Dopo una interruzione dell alimentazione il Sublimation ritorna
44. limation Controller is used in conjunction with the Mini Ti Ball pump the Mini Ti Ball source type must be set The unit is factory set as follows MANUAL operating mode TSP source type sublimation current 30 A sublimation time 1 minute sublimation period 3 minutes pressure threshold 1x10 mbar AUTOSTART automatic restart before power failure on YES 15 87 900 077 01 D Detailed information about the operating modes are contained in the appendix Technical Information Sublimation Controller Switching ON To switch ON the Sublimation Controller switch the power switch located on the rear panel to the I position To start the sublimation push the SUBLIMATION key located on the front panel and the relevant green LED will light NOTE If the SUBLIMATION key is not set in ON position the sublimation will not starts and the unit will wait for a parameters setting Sublimation Controller Switching OFF To switch OFF the Sublimation Controller proceed as follows Set the SUBLIMATION key in OFF position green LED extinguished switch the power switch located on the rear panel to the O position MAINTENANCE The Sublimation Controller does not require any maintenance Any work performed on the pump must be carried out by authorized personnel AN TRIER Before carrying out any work on the controller disconnect it from the supply In the case of brea
45. llation de la carte optionnelle consulter l appendice Technical Information UTILISATION On indique dans ce paragraphe les principales proc dures op rationnelles Pour tous autres d tails et pour les proc dures concernant des connexions ou des l ments en option se reporter au paragraphe Use de l appendice Technical Informations Avant d utiliser le contr leur effectuer toutes les connexions lectriques du contr leur et de la pompe et se r f rer la notice de la pompe connect e Lire galement cette notice avec attention avant d utilise le systeme A EXT Pour viter tous dommages aux personnes et l appareil si la pompe est plac e sur un table d appui s assurer que cette derni re est stable Ne jamais faire fonctionner la pompe si la bride d entr e n est pas connect e au syst me ou n est pas ferm e l aide de la bride de fermeture Commandes et Voyants du Tableau Frontal du Sublimation Controller La figure ci dessous repr sente le tableau frontal du Sublimation Controller La signification et la fonction des commandes et des voyants sont indiqu es dans le tableau de la page suivante N N N TSP KILAMEN K O O 7 Zz Fr N Select Commandes et Voyants du Tableau Frontal du Sublimation Controller 10 87 900 077 01 D MODE D EMPLOI Nom de la Description de la Commande du Voyant Commande du Voyant A Affichage cristaux liquides imprim
46. logical Radioactive List all toxic or hazardous materials Include product name chemical name and chemical symbol or formula Print NAME De Customer Authorized Signature cece cece cece cece cece ees Print Title dees Ae ERES rix ees Date setas re NOTE If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Do not write below this line Notification RA Customer IDA Ee e re Ar Request for Return VARIAN gt SOENT FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS L Does not start E Noise C Vertical Power Rotational Speed L Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure L Mechanical Contact Overtemperature Other Temp 2 Purge flow Cooling defective OPERATION TIME TURBOCONTROLLER ERROR MESSAGE ION PUMPS CONTROLLERS VALVES COMPONENTS L Bad feedthrough Poor vacuum Main seal leak Bellows leak L Vacuum leak C High voltage problem C Solenoid failure Damaged flange
47. ng zu Technical Information Vor Benutzung des Controllers m ssen s mtliche elektrischen Anschl sse des Controllers und der Pumpe ausgef hrt und die Betriebsanleitung der angeschlossenen Pumpe genauestens durchlesen werden N CAN Steht die Pumpe auf einem Tisch mu auf den stabilen Stand geachtet werden da sonst die Gefahr von Personen und Ger tesch den besteht Die Pumpe nie einschalten wenn der Ein gangsflansch nicht am System angeschlossen bzw nicht mit dem Schlie flansch abgedeckt ist Schalter und Anzeigen auf der vorderen Schalt tafel des Sublimation Controllers Nachstehend wird die vordere Schalttafel des Sublimation Controllers gezeigt Die jeweilige Bedeutung und Funktion der Schalter und Anzeigen wird in der nachstehenden Tabelle beschrieben Schalter und Anzeigen auf der vorderen Schalttafel des Sublimation Controllers 87 900 077 01 D Bezeichnung des Schalters der An zeige GEBRAUCHSANLEITUNG Funktion des Schalters der Anzeige ptf R ckbeleuchtetes LCD Display 16 Buchstaben 2 Zeilen TSP FILAMENT Bedeutung der gr nen LEDs 1 2 3 e Aufleuchten Wahl des entspr Gl hdrahtes der TSP Pumpe e Blinken Unterbrechung des Gl hdrahtes der TSP Pumpe e ds a Druckschalter zur manuellen Selektion einer der 3 Gl hdr hte der TSP Pumpe Druckschalter zur Umschaltung der Betriebsart des Controllers ON OFF i e OFF Betriebsart Parametereingabe ak
48. ntroller the message SERIAL ADDRESS XXX is not displayed Operating Mode Selection The operating mode selection permits the selection of the mode by means of which the Sublimation Controller is controlled To select the operating mode press the MODE key The display shows e ANUAL In this operating mode the selection of time period and current value of sublimation are set by means of the control panel 87 900 077 01 D If the key is pressed the display shows TECHNICAL INFORMATION ris el ele mjein t lx e japufrjojmjafrirje In this operating mode only the sublimation current value and the pressure threshold are set by means of the control panel The sublimation occurs when the pressure threshold is reached analog input on pin 2 of the I O connector range 0 to 5 Vdc If the Y key is pressed the display shows the previous message mode MANUAL If the key is pressed the display shows In this operating mode only the time and period of sublimation are set by means of the control panel The current value of sublimation is set by means of a signal incoming on the analog input on pin 2 of the I O connector range 0 to 10 Vdc 0 Vdc 0 A 10 Vdc 50 A If the Y key is pressed the display shows the previous message mode AUTOMATIC If the A key is pressed the display shows amp u T o M A T JR E Mo T E In this operating mode the sublimation starts when th
49. o Use dell appendice Technical Information Prima dell utilizzo effettuare tutti i collegamenti elettrici del controller e della pompa e fare riferimento al manuale della pompa collegata Leggere attentamente anche tale manuale prima dell utilizzo del sistema N PERICOLO Per evitare danni alle persone ed all apparato nel caso in cui la pompa sia appoggiata su un tavolo assicurarsi che sia stabile Non far funzionare mai la pompa se la flangia di ingresso non collegata al sistema o non chiusa con la flangia di chiusura Controlli ed Indicatori del Pannello Frontale del Sublimation Controller La figura seguente illustra il pannello frontale del Sublimation Controller Il significato e la funzione dei controlli e degli indicatori dettagliato nella seguente tabella wa n Off a Controlli ed Indicatori del Pannello Frontale del Sublimation Controller 87 900 077 01 D ISTRUZIONI PER L USO Nome del Descrizione del Controllo Indicatore Controllo Indicatore O SE Display LCD a matrice di punti retroilluminato 16 caratteri 2 righe TSP FILAMENT Led verdi che indicano 1 2 3 e se accesi la selezione del corrispondente filamento della pompa TSP e Se lampeggianti che il corrispondente filamento della pompa TSP interrotto Pulsante per la selezione manuale di uno dei 3 filamenti della pompa TSP 3 SEL Pulsante per la commutazione del modo di funzionamento del control
50. on Controller ist wartungsfrei Eventuell erforderli che Eingriffe m ssen von dazu befugtem Fachpersonal ausge f hrt werden Bei St rungen kann der Varian Reparaturdienst bzw der Varian advanced exchange service in Anspruch genommen werden der f r den Austausch defekter Controller sorgt STORUNGSMELDUNGEN GEBRAUCHSANLEITUNG N FETE Vor jedem Eingriff am Controller mu der Netzstecker gezogen werden Bei St rungen kann der Varian Reparaturdienst bzw der Varian advanced exchange service in Anspruch genommen werden der f r den Austausch defekter Controller sorgt Eine eventuelle Verschrottung mu unter Einhaltung der ein schl gigen landes blichen Vorschriften erfolgen ENTSORGUNG Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll ent sorgt werden darf sondern einem speziellen Sammelsystem zu gef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Ver kaufsbedingungen gepr ft hat In einigen St rungsf llen zeigt das Selbstdiagnosesystem des Controllers die in der nachstehenden Tabelle zusammengefa ten Meldun gen an
51. on of the Sublimation Controller 2 operating mode selection 3 parameters setting NOTE The unit is factory set for MANUAL mode operation source TSP sublimation current 30 A sublimation time 1 minute sublimation period 3 minutes pressure threshold 1x10 mbar AUTOSTART set YES automatic restart after shut down NOTE The message sequences illustrated below is referred at the first operation of the Sublimation Controller with the default settings Configuration Selection The Sublimation Controller configuration permits selection of the follows aspects e type of source that can be used by Sublimation Controller e enables disables of automatic restart of sublimation after a shut down e the automatic manual selection of the TSP filament for the sublimation To enable the configuration mode that permits the selection of the source type press the MODE and SET keys on the front panel and simultaneously on rear panel switch on the power The display shows s ofulrlele rv eE BENEBBEBUDUBBEBESENN Press A or V to change the source type from TSP to Mini Ti Ball and the display shows s ofulrlele mr veg d imfijnjif mjtj ejnt Y Press SET to confirm the choice For a few seconds the display shows depending from the selection one of the following message liest III s ofulrlefel sieiceieiceiel j j j j j j j MAN TECHNICAL INFORMATION Or sjo um c e sE t E
52. on through Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Toll Free 1 800 882 7426 China Varian Technologies Beijing Rm 1648 Central Tower South Wing Beijing Junefield Plaza No 10 XuanWuMenWai Street Beijing 100052 P R China Tel 86 10 63108550 Fax 86 10 63100141 Toll Free 800 820 6556 Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 6151 703 353 Fax 49 6151 703 302 India Varian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 28521171 Fax 91 11 28521173 Italy Varian Inc Vacuum Technologies Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 03 06 Sales and Service Offices Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Toll Free 0120 655 040 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Varian S de R L de C V Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Taiwan Varian
53. ontroller is used as a bench unit it must have the four side legs If the Sublimation Controller is installed on a rack remove the four side legs and position it with at least 30 mm 1 2 inches of clearance on top and bottom During operation the following environmental conditions must be respected temperature from 5 C to 45 C relative humidity O 90 non condensing To connect the Sublimation Controller to the pump use the specific cable supplied as an option See the appendix Technical Information for detailed information about the above mentioned and other connection and about the optional card installation USE This paragraph describes the fundamental operating procedures Detailed information and operating procedures that involve optional connections or options are supplied in the paragraph USE of the appendix Technical Information Make all electrical connections of the controller and the pump prior to operating the controller Read carefully the pump instruction manual prior to operating the system AN ZEIGE To avoid injury to personnel and damage to the equipment if the pump is laying on a table make sure it is secure Never operate the pump if the pump inlet is not connected to the system or blanked off Sublimation Controller Front Panel Controls and Indicators The Sublimation Controller front panel is shown in the following figure The control and indicator meanings and func
54. orting and storing the controller the following environmental requirements should not be exceeded temperature from 20 to 70 C relative humidity O 95 non condensing PREPARATION FOR INSTALLATION The Sublimation Controller is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the controller be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 Controller packing The Sublimation Controller is factory set for follows input voltages e model 929 0023 set to 220 Vac input voltage 180 to 265 Vac e model 929 0022 set to 120 Vac input voltage 90 to 130 Vac If a change in line voltage operation is desired proceed as follows Switch off the Sublimation Controller and unplug the power cord from the wall socket On the rear panel pull off the fuse cover the unplug the voltage selector Rotate the voltage selector until the desired voltage appears towards the external part of the controller US CAUTION If the line voltage pass from 220 240 Vac to 100 120 Vac or viceversa the power cord and the fuses MUST be changed also For 220 240 Vac the fuses must be T6 3A and for 100 120 Vac must be T10A f necessa
55. qui si elles ne sont pas observ es pourraient endommager s rieusement l appareillage NOTE Les notes contiennent des renseignements importants isol s du texte DESCRIPTION DU CONTROLEUR Le Sublimation Controller produit par Varian est un contr leur pour pompes sublimation de titane TSP L unit peut tre configur e en usine selon les n cessit s du client mais la configuration peut galement tre modifi e par le client lui m me qui pourra l adapter des exigences diverses DESCRIPTION NUM DE L ELEMENT Unit de Base Sublimation Controller 929 0023 pr quip pour une tension d alimentation de 220 Vac Sublimation Controller pr quip pour une tension d alimentation de 120 Vac 929 0022 Accessoires Carte RS 232 Computer Interface Carte RS 422 Computer Interface Carte RS 485 Computer Interface C ble pour pompe TSP 924 0752 C ble pour pompe Mini Ti Ball Le Sublimation Controller peut commander une pompe du type sublimation au titane TSP ou bien du type Mini Ti Ball Le Sublimation Controller est caract ris par diff rents modes de fonctionnement MANUAL AUTOMATIC AUTOMAT REMOTE et REMOTE SET Dans les modes MANUAL et AUTOMATIC toutes les commandes sont donn es par tableau frontal Dans les modes REMOTE SET et AUTOMAT REMOTE certaines commandes sont donn es par tableau frontal et d autres par des signaux sur le connecteur d E S MODE D EMPLOI EMMAGASINAGE Pen
56. r Sublimationszyklus vom Bediener neu aktiviert werden Tauschen Sie die Heizpatrone aus berlastung des Transformators und Unterbre Beheben Sie die Ursache der berlastung des chung des Pumpzyklus Transformators SchlieBen Sie den Stift des Interlock Kontaktes an 87 900 077 01 D INDICATIONS GENERALES Cet appareilage a t con u en vue d une utilisation professionnelle Il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Varian avant l utilisation de l appareil Varian d cline par cons quent toute responsabilit en cas d inobservation totale ou partielle des instructions donn es d utilisation incorrecte de la part d un personnel non form d op rations non autoris es ou d emploi contraire aux r glementations nationales sp cifiques Les paragraphes suivants donnent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Informations Cette notice utilise les signes conventionnels suivants AN EXT Les messages de danger attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale qui si elle n est pas effectu e correctement risque de provoquer de graves l sions US ATTENTION Les message d attention sont affich s avant certaines proc dures
57. r vier Rackeinheiten hohen Adapter Einheit installiert wer den um zu vermeiden da der Controller nicht in das Gestell f llt Die vordere Schalttafel des Sublimation Controllers ist nicht geeignet das gesamte Gewicht der Einheit zu tragen Der Controller darf nicht in Umgebungen installiert u o benutzt werden die Witterungseinfl ssen Regen Frost Schnee Staub und aggressiven Gasen ausgesetzt sind und in denen Explosi ons und erh hte Brandgefahr besteht GEBRAUCHSANLEITUNG ANMERKUNG Zur Tischaufstellung des Controllers m ssen die vier seitlichen F e ausgezogen werden Wenn der Controller in einem Gestell installiert werden soll m ssen alle vier F e abmontiert werden lassen Sie bei Rack Installation des Controllers ber und unter halb einen Raum von wenigstens 30 mm 1 2 Zoll W hrend des Betriebs m ssen folgende Umgebungs bedingungen eingehalten werden e Temperatur von 0 C bis 45 C e Relative Luftfeuchtigkeit O 95 nicht kondensierend F r den Anschlu des Sublimation Controllers an die Pumpe mu das zum Controller geh rende Kabel benutzt werden De tailliertere Hinweise zu weiteren Anschlu arten sowie zum Ein satz der Zusatzkarte finden Sie im Anhang Technical Informati on GEBRAUCH In diesem Kapitel sind die wichtigsten Betriebsvorg nge aufge f hrt F r weitere Hinweise bez glich Anschlu und Montage des bestellbaren Zubeh rs verweisen wir auf das Kapitel Use im Anha
58. ry change the fuses and the power cord If power cord must be changed rewire as follows blue neutral brown phase yellow green ground nsert the voltage selector then repositioning the fuse cover Plug the power cord into wall socket 87 900 077 01 D Operating voltage selector INSTALLATION AN WEXNER The Sublimation Controller is equipped with a 3 wire power cord and plug internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock Verify that the ground connections are properly connected High voltages developed inside the controller can cause severe injury or death Before servicing the unit disconnect the input power cable US CAUTION The controller can be used as a bench unit or a rack module but it must be positioned so that free air can flow through the holes of the top and side cover If the Sublimation Controller is used as a rack module it MUST be inserted in a 4 unit height rack adapter chassis to avoid collapse of the controller fall inside the rack The front panel of the Sublimation Controller is not designed to support the controller weight Do not install or use the Sublimation Controller in an environment exposed to atmospheric agents rain snow ice dust corrosive gases or in explosive environments or those with a high fire risk INSTRUCTION FOR USE NOTE If the Sublimation C
59. s factory set on YES This enable the automatic restart of the sublimation after a shut down Press or key to change from YES to NO and viceversa The display shows sufelel lmfalr loln amp wrjo s T AIRT NO Make the selection then press SET key to confirm the choice If a cartridge with multiple TSP is present the display will show mise mRjcjov ER e fajurjojmjajr ife Factory setting is AUTOMATIC that enables the automatic change of the TSP filament in case of fault if possible This configuration can be changed on MANUAL by pressing the Aor V Key In this case the display shows ris el R eEejov ER el Imfalntufale In MANUAL configuration in case of interruption of the TSP filament the controller will be in a fault condition and the sublimation will be interrupted 20 TECHNICAL INFORMATION To confirm the choice press SET key If no serial module are mounted on the controller the display return to the previous message Mini riea ASAS majn Otherwise if serial module are present on the controller the display shows sie rl lal TAplolrlelsis eiii xx iilii Where XXX is the serial address currently set then the display shows sjele rajo B a u p rjaTE e xxixix ejajujof Where XXXX is the speed of communication expressed in Baud NOTE If the RS 232 Computer Interface Card is mounted on the co
60. schalter aufblinkend EIN nicht aufblinkend AUS Steckverbindung zum Anschlu der E A Signale HINWEIS Der Controller ist werkseitig wie folgt eingestellt Bedienungsart MANUAL Betriebsart f r TSP Pumpe Sublimationsstrom 30A Sublimationszeit 1 Minute Sublimationsdauer 3 Minuten Druckpegel 1x10 mbar AUTOSTART automatischer Neubeginn der Sublimation nach Stromausfall Schalter auf YES 87 900 077 01 D N here Informationen k nnen Sie dem Anhang Technical Infor mation entnehmen Zuschaltung des Sublimation Controllers Zur Zuschaltung des Sublimation Controllers muB der auf der hinteren Schalttafel installierte Netzschalter des Ger tes auf 1 gestellt werden Zur Aktivierung des Sublimationszyklus mu der Schalter SUB LIMATION auf der vorderen Schalttafel gedr ckt werden so da das entsprechende gr ne LED aufleuchtet HINWEIS Wenn der auf der vorderen Schalttafel installierte Schalter des Ger tes nicht auf ON gestellt wird ist der Sublimationszyklus nicht aktiviert und das Ger t befindet sich im Status Parameter eingabe Abschaltung des Sublimation Controllers Gehen Sie zur Abschaltung des Sublimation Controllers wie folgt vor Stellen Sie den auf der vorderen Schalttafel pr senten Schal ter SUBLIMATION auf OFF das gr ne LED erlischt Stellen Sie den auf der hinteren Schalttafel pr senten Netz schalter auf 0 WARTUNG Der Sublimati
61. t to us Please take the time and let us know how we can improve ga a aiia d spew SR Sergio PIRAS Vice President and General Manager VARIAN Vacuum Technologies Note Fax or mail the Customer Request for Action see backside page to VARIAN Vacuum Technologies Torino Quality Assurance or to your nearest VARIAN representative for onward transmission lo the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO VARIAN VACUUM TECHNOLOGIES TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS VARIAN S p A Via F lli Varian 54 10040 Leini Torino Italy E MAIL marco marzio varianinc com COMPANY FUNCTION ADDRESS TEL N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by VARIAN VTT XXXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc VARIAN AK ISTISUZIONI Ae E 1 GEBRAUCHSANDEITUNG nes 5 MODE E EC mc 9 INSTRUCTION FOR USE tette tette tette te tete te tte te ite tis 13 TEGHNIGAL INFORMATION aussehen 17 SUBLIMATION CONTROLLER DESCRIPTION nennen 17 SUBLIMATION CONTROLLER SPECIFICATION iii 17 SUBEIMATION CONTROLBEBER OUTEINE ola 18 PUMP CONNECTION EEN 18 REMOTE VOXLDONNECHON E 18 e 19 Configuralion Seleciont ssi lola AA LOL 19 OperatingiMode Se
62. tch OFF the unit then check the power supply and the correct setting of voltage input values 110 120 Vac 60 Hz o 220 240 Vac 50 Hz HEATER DEFECTIVE Heater filament interruption during a pumping Replace the Mini Ti Ball cycle with the Mini Ti Ball FILAMENT X DEFECTIVE operation selecting a successive cartridge filament If the TSP RECOVER parameter is set in MANUAL the sublimation will turn off CARTRIDGE DEFECTIVE Filament X where X can be 1 2 or 3 interruption during a sublimation with the TSP If the TSP RECOVER parameter is set in AUTOMATIC the software restart the normal If the TSP RECOVER parameter is set in AUTOMATIC the software selects automatically one of the remaining filament and the relevant LED will be ON If the TSP RECOVER parameter is set in MANUAL the user must manually restart the sublimation procedure TSP filament are interrupted and the Replace the cartridge En is turned off FAULT Transformer overload occurs and the pumping Eliminates the cause of the overload on the OVERTEMPERATURE cycle is stopped transformer EXTERNAL The interlock on pin 3 of the I O connector is Connect the interlock INTERLOCK not connected 87 900 077 01 D SUBLIMATION CONTROLLER DESCRIPTION The Sublimation Controller base is available in two versions which differ only in the factory set input voltage e Model 929 0022 set for 120 Vac 60 Hz e Model 929
63. teur au travers des commandes du tableau frontal mode L unit est pr quip e en usine de la fa on suivante MANUAL ou bien ils sont envoy s sur le connecteur d E S mode de fonctionnement MANUAL mode REMOTE type de source TSP Si le Sublimation Controller doit tre utilis en association avec courant de sublimation 30 A des pompes du type TSP il faut s lectionner le type de source temps de sublimation 1 minute TSP Si le contr leur doit tre utilis en association avec des pompes du type Mini Ti Ball il fait s lectionner le type de source Mini Ti Ball p riode de sublimation 3 minutes niveau de pression 1x10 mbar AUTOSTART red marrage automatique de la sublimation apr s une coupure d alimentation sur YES 11 87 900 077 01 D Des renseignements plus d taill s sur le mode de fonctionnement sont contenus dans l appendice Technical Information Mise sous tension du Sublimation Controller Pour mettre le Sublimation Controller sous tension il suffit de mettre l interrupteur d alimentation situ sur le tableau dorsal dans la position I Pour proc der ensuite la sublimation il suffit de presser l interrupteur SUBLIMATION se trouvant sur le tableau frontal le voyant vert correspondant s allumera NOTE Si l interrupteur du tableau frontal n est pas mis dans la position ON la sublimation n aura pas lieu mais l unit restera dans l attente de la fixation des param tr
64. tions are detailed in the following table N N JSP XILAMEN A 2 P Select A E SUBLIMATION di TT Ma Mi J d i Sublimation Controller front panel controls 14 87 900 077 01 D INSTRUCTION FOR USE Control Indicator Control Indicator Description LCD back lighted alphanumeric display dot matrix 16 characters 2 rows Green LEDs that show e if ON the relevant TSP pump filament selected e if blinking the relevant TSP pump filament interrupted Key for controller operating mode selection e OFF when Parameters Setting mode is activated e ON when Sublimation is activated Green LED that show if ON that controller status is in waiting time between two sublimation or during current leading edge if blinking the sublimation is in phase 6 MINI TIBALL Green LED ON when Mini Ti Ball operating mode is selected 7 SET Key that depending on condition e confirm the start of sublimation e memorize the selection made e reseta fail status MODE Key that depending on condition e Select the operating mode MANUAL AUTOMATIC AUTOMAT REMOTE and REMOTE SET e escape from the parameters setting pages without changing the parameters EN y WV Keys used to modify the values in the parameters setting pages Sublimation Controller Rear Panel The following figure shows the controls and the connections of the Sublimation Controller rear panel OPERA
65. tiv e ON Betriebsart Sublimationszyklus aktiv SUBLIMATION Bedeutung des gr nen LEDs e Aufleuchten Anzeige der Wartezeit zwischen 2 Sublimationen oder der Phase des Stromanstiegs e Blinken Sublimation aktiv 6 MN TIBALL Das Aufleuchten des gr nen LEDs steht f r die Selektion der Betriebsart Mini Ti Ball Druckschalter mit folgender Funktionsbelegung e Best tigung Sublimationsbeginn e Speicherung der Selektionen e Storungsruckstellung Druckschalter mit folgender Funktionsbelegung e Selektion der Betriebsart MANUAL AUTOMATISCH AUTOMATISCH FERNGESTEUERT und FERNGESTEUERT SET e Absprung von der Seite Parametereingabe ohne nderung der eingegebenen Parameter A Wi Druckschalter zur Modifizierung der Werte auf den Seiten zur Parametereingabe Hintere Schalttafel des Sublimation Controllers Die nebenstehende Abbildung zeigt die Schalter und Anschlu stellen der hinteren Schalttafel des Sublimation Controllers BEDIENUNG Betriebsarten Der Sublimation Controller kann in den Betriebsarten MANUAL AUTOMATISCH AUTOMATISCH FERNGESTEUERT und FERNGESTEUERT SET voreingestellt betrieben werden In den Betriebsarten MANUAL und AUTOMATISCH werden die Steuerbefehle ber die frontale Schalttafel des Controllers ein gegeben in den Betriebsarten AUTOMATISCH FERNGE STEUERT und FERNGESTEUERT SET dagegen werden be stimmte Steuerbefehle ber die frontale Schalttafel des Control lers eingegeben
66. tor pressing SET key The display shows mile faf XX fe la To escape from this message press the SET key again or wait 30 second without pressing any key Operation in AUTOMAT REMOTE mode The operation is the same as previously described for AUTOMATIC operation but the current depends on the signal incoming to the l O connector The display shows sjuleL elrlelsistulrfel Ix x x x x mejer To end sublimation press the SUBLIMATION key and the relevant Led is turned off In this operating mode as in REMOTE SET it is possible to display the current measured on the incoming signal on the I O connector pressing SET key The message displayed is the same shown in REMOTE SET operating mode excepted for the script A R in place of REM at the end of the second row SUBLIMATION TIMING On the next page are shown the figures of the sublimation timing in the different operating modes OPERATIONAL FLOW CHART In the following page it is shown the operational flowchart that indicates all the major function of the Sublimation Controller 87 900 077 01 D TECHNICAL INFORMATION 1st cycle 2nd cycle subl time subl time Power on 10 start PE ea mee eon analog input sublimation period sublimation period The leading edge can be factory set 0 to 50 A in 30 The leading time are not counted into the sublimation time Am pere 1st cycle 2nd cycle Mini Ti Ball Minim
67. um level can be factory set 30A Power on 35 lt gt subl time lt sublimation period 1st cycle fix 1st cycle Mini Ti Ball Power on subl time mbar threshold pressure gt 5 min pressure setling time factory set during this period pressure is not checked Sublimation Timing in AUTOMATIC and AUTOMAT REMOTE operating mode 25 87 900 077 01 D TECHNICAL INFORMATION POWER UP SOURCE TYPE TSP Mini Ti Ball SUBLIMATION RESTORE User YES Configuration cHe POWER AC FAIL TSP RECOVER AUTOMATIC POWER DOWN MANUAL STAND BY YES UBLIMATIO RESTORE NO Powered off with pumping cycle ON Sublimation ON PARAMETERS SETTINGS SUBLIMATION Sublimation MANAGEMENT OFF POWER DOWN i SET POWER DOWN Alarm ax i 0 YES DISPLAY MODIFY sublimation current SUBL CYCLE OFF Mini Ti Ball or TSP ALARM SE VISUALISATION gt SET TSP MANUAL TSP RECOVER AUTOMATIC No filaments ok FILAMENT CHANGE MANAGEMENT Selection LED of fault filament blinks 26 87 900 077 01 D TECHNICAL INFORMATION SPARE PARTS The Sublimation Controller spare parts are listed in the following table DESCRIPTION PART NUMBER RS 232 Computer Interface Card 929 0024 RS 422 Computer Interface Card 929 0025 RS 485 Computer Interface Card 929 0026 Rack Adapter 929 0064 Cables Cable for TSP pump 924 0730 Cable for Mini Ti Ball pump 924 0752

SUBLIMATION CONTROLLER DESCRIPTION

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