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DUAL CONTROLLER DESCRIPTION

1. Ar Request for Return VARIAN gt lt quest gi ont FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS O Does not start Noise Vertical Power Rotational Speed Does not spin freely O Vibrations L Horizontal Current Inlet Pressure LI Does not reach full speed LI Leak L Upside down Temp 1 Foreline Pressure LI Mechanical Contact Overtemperature Other Temp 2 Purge flow O Cooling defective 0 OPERATION TIME TURBOCONTROLLER ERROR MESSAGE ION PUMPS CONTROLLERS VALVES COMPONENTS LI Bad feedthrough L Poor vacuum L Main seal leak L Bellows leak Vacuum leak TT High voltage problem L Solenoid failure LI Damaged flange Error code on display L Other LI Damaged sealing area LI Other Customer application Customer application LEAK DETECTORS INSTRUMENTS L Cannot calibrate L No zero high backround L Gauge tube not working Display problem L Vacuum system unstable Cannot reach test mode L Communication failure Degas not working Failed to start Other L Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS TT Pump doesn t start O Noisy pump describe O Heater failure Electrical problem L Doesn t reach vacuum L Over temperature L Doesn t reach vacuum Cooling coil damage LI Pump seized LI Other L Vacuum leak L Other Customer application Customer application FAILURE DESCRIPTION Please describe i
2. Data neg RS232 Connector Data pos Data pos N C Signal Ground N C N C N C Data neg O O N O OI B O0O N RS485 CONNECTOR lef ale RS485 Connector 44 73 87 900 094 01 H USAGE General Make all vacuum manifold and electrical connections and refer to lon pump instruction manual before to operating the DUAL controller ZN To avoid injury to personnel and damage to the equipment if the pump is Iying on a table make sure it is steady Never operate the pump if the pump inlet is not connected to the system or blanked off Abbreviations This section provides the notations that are used during message display e Unit of measure Torr pressure mbar pressure Pa pressure Volt voltage V voltage mA current Amp current A current W power e Abbreviations HV1 High Voltage 1 HV2 High Voltage 2 mG1 mini Gauge 1 mG2 mini Gauge 2 SC1 Serial Comm 45 73 TECHNICAL INFORMATION STARTUP e Plug the controller power cord into a suitable power Source e Set the main power switch on the rear panel to the ON position e The display comes on and the following is displayed DREES EE Display of the uC software version naar ae eel sE EX eoe SEES ER Display of the DSP software version EE ee ae eee NOTE Upon completion of the initialization routine the Dual controll
3. Proceed as follows to power on the controller and enable the voltage on the H V connectors e Insert the cable from the pump and the interlock loopback pin of the H V cable into the related connectors on the rear panel e Set the power switch on the rear panel to the ON position e Set the ENABLE HV switch on the front panel to the ON position e Press the HV 1 2 ON OFF buttons ON LED lit NOTE With only one H V circuit installed both rows on the display are dedicated to pump number one while with two circuits installed each row is dedicated to a different pump Starting the Pump To start the pump press the corresponding HV ON OFF button the ON LED will come on Stopping the Pump To stop the pump press the corresponding HV ON OFF button the ON LED will go off MAINTENANCE The Dual controller does not require any maintenance Any form of servicing on the unit must be performed by authorized personnel If servicing is needed contact Varian Technical Support or subscribe to the Varian Advanced Exchange Service where the faulty controller is replaced by a refurbished one If the controller needs to be scraped proceed to do so in compliance with the specific national norms 30 73 INSTRUCTIONS FOR USE DISPOSAL Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid
4. Voltage Pump Pressure CHANGE Current Pump Pressure CHANGE Are the MG installed MG1 Pressure MG2 Pressure The START PROT 1 and START PROT 2 buttons enable disable the PROTECT operating mode when this mode is enabled the corresponding LED on the front panel comes on NOTE The START PROT 1 and 2 buttons are active even with H V set to ON In the START mode the controller will continue to provide high voltage regardless of the current supplied The high voltage is disabled if during operation in the PROTECT mode the current delivered exceeds the Iprotect level 47 73 TECHNICAL INFORMATION 2 HV Voltage CH1 Voltage CH2 CHANGE CH1 Current CH2 Current CHANGE CH1 Pressure CH2 Pressure CHANGE Are the MG installed A MG1 Pressure CHANGE MG2 Pressure UNIT CONFIGURATION Using the Menu button accesses this configuration menu NOTE If the high voltage is enabled the controller settings cannot be modified they can only be changed with H V set to Off Messages Associated to the Menu Button When pressing the Menu button the device enters into the cycle configuration program that must be terminated in order to return to the Main Menu The unit automatically exits from this menu if nothing is pressed within a preset time of 15 sec Pressure Unit selection When pressing Main menu button the first time it is possible to select the pressure unit of
5. gt 1 610 3Eh 31h 36h 31h 30h Dh 87 900 094 01 H MiniGauge Commands TECHNICAL INFORMATION Command Description Mode Channels Format Possible Values emiss Emission on off Read Gauge 1 Status 30h emiss Off Write Gauge 2 31h emiss On 32h emiss Auto Mini B A and ColdCathode only degas on off Mini B A degas mode Read Gauge 1 Status 30h off Write Gauge 2 31h on Mini B A only gas correction Gas Read Gauge 1 Integer 10 999 Correctio Write Gauge 2 Mini B A only n value auto on Emission auto on mode Read Gauge 1 Status 30h disable Write Gauge 2 31h enable ConvecTorr only auto on value Emission auto on value Read Gauge 1 Exp Torr 1 0E 2 1 0E1 Write Gauge 2 ConvecTorr only auto on hv1 Auto on High Read Gauge 1 Status 30h disable Voltage 1 mode Write Gauge 2 31h enable Mini B A and ColdCathode only auto on value Auto on High Read Gauge 1 Exp Torr 1 0E 8 1 061 hv1 Voltage 1 value Write Gauge 2 Mini B A and ColdCathode only auto on hv2 Auto on High Read Gauge 1 Status 30h disable Voltage 2 mode Write Gauge 2 31h enable Mini B A and ColdCathode only auto on value Auto on High Read Gauge 1 Exp Torr 1 0E 8 1 061 hv2 Voltage 1 value Write Gauge 2 Mini B A and ColdCathode only 65 73 87 900 094 01 H MiniGauge Commands TECHNICAL INFORMATION Command Name Binary ASCII MultiGauge General Usag
6. 55 75 Diode Noble 30 mA Diode Spare 400 mA Step Mode of Operation When the current reaches the value listed in the table the controller changes the voltage output OUTPUT VOLTAGE kV 8 a zn 6 5 4 1x10 1x10 1x10 1x10 1x10 1x10 PRESSURE Torr Output voltage change over vs pressure Pump Current value for Current value for size type switching from switching from 5 to 7 0 to 5 KV 3 KV Models with negative H V card 500 StarCell 9 0 x 10 A 2 5 x 10 A 300 StarCell 5 5 x 10 A 1 6 x 10 A 150 StarCell 3 0x 107A 8 5 x 10 A 40 55 75 1 3x 10 A 3 8x 10 A StarCell 20 StarCell 6 5x 10 A 1 9x 10 A 38 73 87 900 094 01 H TECHNICAL INFORMATION Optional Gauge Connector The following table gives the connector pinout in the Mini B A configuration Mini B A 24 V Power Power Ground Signal Ground FEMAL CONNECTOR Pressure Signal Input Pressure Signal Input Power Ground Calibration Output 24 V Power Signal Ground N C Degas ON OFF Output Degas Status Input Emission ON OFF Output Emission Status Input OO NOIA Oo hy Emission Status Input Emission ON OFF O F mission utput FEMALE Pressure Signal input Remo
7. Ground Connections NOTE The cable interlock closes on pump ground The high voltage is disabled if the connection is interrupted Close the interlock using the appropriate counter connector when using a cable which is not equipped with the interlock connector USAGE This section provides you with the major operating procedures For more information and for the procedures that concern connections or specific options refer to the section USAGE in the Technical Information appendix Before using the controller perform all electrical and pneumatic connections and refer to the manual of the connected pump To avoid injury to persons or damage to the equipment if the pump needs to be placed on a table make sure that the table is stable Never activate the pump if the input flange is not connected to the system or if it is not closed with the blank off flange Controls and Indicators on the Dual Controller Front Panel The following figure shows the Dual controller front panel The following table gives the definition and function of the controls and indicators o Ar ENTER CONFIG ON PROT LOO Ti Enable HV e Qui ED Ga O DUAL O I ON OFF ON OFF i Jon Pump Controller OFF ET Q Front Control Panel Legend 1 B
8. IATA DOT UN 3 The customer is expected to take the following actions to ensure the Safety of workers at Varian a Drain any oils or other liquids b Purge or flush all gasses c Wipe off any excess residues in or on the equipment d Package the equipment to prevent shipping damage for Advance Exchanges please use packing material from replacement unit 4 Make sure the shipping documents clearly show the RA and then return the package to the Varian location nearest you North and South America Europe and Middle East Asia and ROW Varian Vacuum Technologies Varian SpA Varian Vacuum Technologies 121 Hartwell Ave Via Flli Varian 54 Local Office Lexington MA 02421 10040 Leini TO ITALY Phone 1 781 8617200 Phone 39 011 9979111 Fax 1 781 8609252 Fax 39 011 9979330 CUSTOMER INFORMATION Company name a e I RI ia Contact person Name necia esta Tessin EX ARRE RR e eege ge E Mall teen een Ship Method Shipping Collect 0 or c ee Ge Europe only VAT reg Number USA only Taxable Non taxable Customer Ship Tor Customer Bill To PRODUCT IDENTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange CT Paid Repair LI Warranty Exchange Warranty Repair L Loaner Return Credit O Shipping Error O Evaluation Return O Calibra
9. Messages Associated to the MiniGauge Menu Button If GAUGE1 or GAUGE2 was set during the channel selection phase you can access the minigauge menu described below As in the case of the previous menu also in this case use the CHANGE button to change the parameters and the ENTER button to confirm MiniGauge Type Selection m el Isleltlelelr ofauale mals Isfel efel elalulele Ce Tele ele Ea mals Isfel efel elalu ele ARRE CR EEE NSA The Calibration message provided below is displayed only if Convectorr was previously selected mals olafililemjarijon AAA If you confirm YES the display will guide you through atmospheric and High vacuum calibration The message Emission indicated below is displayed only if miniB A was previously selected TECHNICAL INFORMATION Usually you can select between OFF and ON but if the miniB A is undergoing its power on phase the following message will be displayed The message for Degas ON OFF selection is the following The message for Gas Type selection is the following mer elals rvfele By using the CHANGE and ENTER buttons you can select and confirm one of the following options SPARE CORRECT AIR HELIUM HYDROGEN OXYGEN The message Gas Correction shown below is only displayed if the SPARE Correct option was previously selected me lelals Teloirlal Auto Turn on sequence If 2 of miniB A and 1 Convector Gauge a
10. TECHNICAL INFORMATION CONTROLLER OUTLINE The outline dimensions for the Dual controllers are shown in the following figures Controller Model Dimensions 36 73 87 900 094 01 H FUSE HOLDER The following figure shows the location of this assembly FUSE HOLDER Rear Panel Proceed as follows to replace one or both fuses e Remove the assembly by levering in position A with a small screwdriver e Replace the fuse Use only T type fuses of the following characteristics 100 120 Vac 8A 200 240 Vac 4A INTERCONNECTIONS The following figure shows the Controller inter connections HV CONNECTORS REMOTE 1 0 COMPUTER SERIAL PORT MULTI GAUGE EYESYS CONNECTORS Controller Interconnection e Female Remote I O connector e Optional female Gauge connector s e Optional serial male connector 37 73 TECHNICAL INFORMATION START MODE OF OPERATION Max voltage and polarity Models with negative H V card Pump size type 500 StarCell 300 StarCell 150 StarCell 75 55 40 StarCell 20 StarCell Spare 500 Diode Noble Diode 300 Diode Noble Diode
11. et 1 carte RS 232 Unit de base 120 Vac avec 1 carte haute tension HV positive et carte RS 232 Unit de base 120 Vac avec 2 cartes haute tension HV positive et 1 carte RS 232 Unit de base 230 Vac avec 1 carte haute tension HV n gative et 1 carte RS 232 Unit de base 230 Vac avec 2 cartes haute tension HV n gative et 1 carte RS 232 Unit de base 230 Vac avec 1 carte haute tension HV positive et 1 carte RS 232 Unit de base 230 Vac avec 2 cartes haute tension positive et 1 carte RS 232 929 7012 929 7013 929 7014 929 7015 Le contr leur Dual est en mesure de g rer jusqu 2 pompes ioniques de 20 l s 500 l s avec polarit positive ou n gative Il permet d effectuer des lectures fiables de pression jusqu 10 Torr en am liorant ainsi les prestations de la pompe en ce qui concerne le champ entier op rationnel Avec 2 mesureurs Eyesys Gauges optionnels l on peut effectuer la lecture de pression avec les diff rentes pr cisions et les diff rents champs de mesure Le contr leur Dual peut tre g r en mode LOCAL ELOIGNE I O ET SERIEL par l interm diaire des interfaces RS 232 422 et 485 les interfaces RS422 et RS485 sont optionnelles 87 900 094 01 H NOTE Contacter le bureau de ventes Varian pour commander les syst mes avec RS 422 485 et les mesureurs Eyesys Gauge Les modalit s selon lesquelles les commandes op rationnelles sont fournies d pendent de la moda
12. v Istep2 Setting Y Set point 1 Setting Y Set point 2 Setting Y Main Menu 49 73 87 900 094 01 H TECHNICAL INFORMATION In case a Standard Pump is selected the parameters can just be read and the operations that can be done are shown in the following flow chart Pump Type Selection STANDARD PUMP Imax Visualization Pmax Visualization Iprotect Visualization Step Fixed Selection FIXED y STEP Vstep1 Visualization Istep1 Visualization Vstep2 Visualization Y BEE Istep2 Visualization Y Set point 1 Setting Set point 2 Setting Main Menu 50 73 87 900 094 01 H The same sequences can be seen in the following pages TECHNICAL INFORMATION Step Fixed Operating Mode can be changed with any type of pump lvls felefele map PECE Eee See EE Spare Pump Pressure Reading Setting ail elroolnalcrfor ro When this page is displayed the operator should store the pressure value corresponding to the pump current of 100 nA with 5000 V applied on the pump in use In other words program the conversion table from current to press Store the pressure value for other three pump current values 10 ua 10 mA 400 mA Since an exponential value is displayed press the CHANGE button to change the mantissa of the pressure and then confirm by pressing the ENTER button
13. 7008 tensione negativa e 1 scheda RS232 Unit base da 120 Vca con 2 schede alta 929 7009 tensione negative e 1 scheda RS232 Unit base da 120 Vca con 1 scheda alta 929 7010 tensione positiva e 1 scheda RS232 Unit base da 120 Vca con 2 schede alta 929 7011 tensione positive e 1 scheda RS232 Unit base da 230 Vca con 1 scheda alta 929 7012 tensione negativa e 1 scheda RS232 Unit base da 230 Vca con 2 schede alta 929 7013 tensione negative e 1 scheda RS232 Unit base da 230 Vca con 1 scheda alta 929 7014 tensione positiva e 1 scheda RS232 Unit base da 230 Vca con 2 schede alta 929 7015 tensione positive e 1 scheda RS232 US ATTENZIONE I messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura NOTA Le note contengono informazioni importanti estrapolate dal testo DESCRIZIONE DEL CONTROLLER Il controller Dual della Varian un controller per le pompe ioniche modulare e flessibile L unit configurata in fabbrica a seconda delle esigenze del cliente Il controller Dual disponibile con e Pannello frontale con tastierina display 16x2 e scheda processore e Scheda di I O remoto e Scheda di comunicazione seriale opzionale e Alimentatore da 24 Vcc 20 W per il misuratore Eyesys Gauge opzionale e Scheda di alimentazione con DSP integrato per la gestione delle tensioni in uscita e Scheda e di alta ten
14. 9 pin 10 Prise d alimentation 11 Interrupteur d alimentation principal Qo SL Obs CORN ES UTILISATION Modes de fonctionnement Le Dual contr leur peut fonctionner dans les modalit s suivantes e LOCAL e ELOIGNE 1 O input output e SERIEL Dans le mode LOCAL toutes les commandes sont activ es par le panneau frontal Dans le mode ELOIGNE UO toutes les commandes sont activ es par un ordinateur loign reli par l interm diaire d un connecteur de input output plac sur le panneau post rieur Dans le mode SERIEL toutes les commandes sont activ es par un ordinateur externe reli par l interm diaire d une interface s rielle RS 232 422 485 MODE D EMPLOI NOTE La modalit op rationnelle s lectionn e est m moris e par le syst me et donc d s le r tablissement de la tension suite sa chute le contr leur Dual reviendra la modalit op rationnelle o il tait au moment de la chute de tension NOTE Lorsque une modalit op rationnelle est s lectionn e le syst nme acceptera uniquement les commandes de la modalit relative mais il est en mesure de visualiser des informations et d acqy rir des signaux et des donn es contemporairement de toutes les interfaces L unit est projet e afin de fonctionner dans les modalit s suivantes e mode START e mode PROTECTED Dans le mode START le contr leur fournit toute la puissance ind pendamment des conditions de la pompe jusqu atteind
15. Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat 87 900 094 01 H GEBRAUCHSANLEITUNG FEHLERMELDUNGEN In einigen St rungsf llen zeigt das Selbstdiagnosesystem des Controllers die in der nachstehenden Tabelle zusammengefaBten Meldungen an BESCHREIBUNG STORUNGSBEHEBUNG FEHLER HOCHSPANNUNG 1 ODER 2 HV X ERROR Hochspannung durch eine Verriegelung von der 1 Den Schalter HV ENABLE auf EIN setzen PANEL INTERLOCK vorderen Schaltflache oder Gehause und die Prozedur zum Einschalten der ausgeschaltet HV ENABLE auf AUS gesetzt Hochspannung wiederholen oder Gehause entfernt Sicherstellen dass das Geh use richtig montiert ist HV X ERROR Hochspannung von einer Verriegelung von den Sicherstellen dass die R ckkoppelungs REMOTE INTERLOCK Fern E As abgeschaltet St psel mit den Verriegelungsbr cken installiert sind Sicherstellen dass die externe Verriegelung geschlossen ist HV X ERROR HV von einer Verriegelung eines Wenn die Pumpe ein Hochspannungskabel CABLE INTERLOCK Hochspannungskabel abgeschaltet mit einer Sicherheitsverriegelung benutzt Sicherstellen dass der Stecker auf der Pumpenseite richtig eingesetzt ist und der R ckkoppelung
16. INTERLOCK oppure la copertura stata rimossa dall unita e quindi ripetere la procedura di accensione Assicurarsi che la copertura sia installata correttamente GAUGE X ERROR Il microprocessore non rileva HW di gestione Spegnere l alimentatore del controller Dual quindi GAUGE NOT FOUND misuratore riaccenderlo Se il problema persiste contattare Varian per la riparazione o sostituzione GAUGE X ERROR stato rilevato un malfunzionamento nel Controllare il cavo di collegamento tra il GAUGE FAULT misuratore Eyesys collegato controller Dual ed il misuratore Assicurarsi che il misuratore funzioni correttamente quando scollegato dal controller Dual Se il problema persiste contattare Varian per la riparazione o sostituzione GAUGE X ERROR Il misuratore stato scollegato dal controller Dual Ricollegare il misuratore e ripetere la procedura di GAUGE NOT CONNECT alimentazione SYSTEM ERRORS SYSTEM ERROR Ad uso del Supporto tecnico Varian per la diagnostica Spegnere e riaccendere il controller Dual se il ER1 10 problema persiste contattare Varian per la riparazione o sostituzione 8 73 87 900 094 01 H GEBRAUCHSANLEITUNG ALLGEMEINES i BEZEICHNUNG BESTELL Dieser Apparat ist f r Fachbetriebe bestimmt Vor NUMMER Gebrauch sollte der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen Dual Modelle genau lesen Bei Nichtbeachtung auch teilweise der Grundmodell 120 VWs
17. Read 2 32h HV on in start fixed V Read 3 33h HV on in protect step V Read 4 34h HV on in protect fixed V Read 3 2Dh33h Power off caused by Interlock Panel Read 4 2Dh34h Power off caused by Remote I O Interlock Read 3 2Dh33h Power off caused by Cable Interlock Read 8 2Dh38h Power off caused by HV Overtemperature Read 7 2Dh37h Power off caused by Remote I O not Present or Remote I O Fault Read 6 2Dh36h Power off caused by HV Protect Read 7 2Dh37h Power off caused by HV Short Circuit 61 73 87 900 094 01 H Device Number and Device Type Commands Coding TECHNICAL INFORMATION Channel Device number Device type HV1 HV2 0 30h Spare HV1 HV2 1 31h 500 SC Tr HV1 HV2 2 32h 300 SC Tr HV1 HV2 3 33h 150 SC Tr HV1 HV2 4 34h 75 55 40SC T HV1 HV2 5 35h 20 SC Tr HV1 HV2 6 36h 500 Diode ND HV1 HV2 7 37h 300 Diode ND HV1 HV2 8 38h 150 Diode ND HV1 HV2 9 39h 75 55 40 D ND HV1 HV2 10 3Ah 20 25 Diode ND Gauge1 Gauge2 0 30h Convectorr Gauge1 Gauge2 1 31h Mini B A Gauge1 Gauge2 2 32h Cold Cathode Serial 0 30h RS232 422 Serial 1 31h RS485 NOTE When reading if the required device is missing DUAL replies 3Fh Interlock Status Coding BitField Interlock type active if 1 01h Reserved always 0 02h Front Panel Interlock equal to bit 20h 04h HV1 Remote UO Interlock 08h HV1 Cable interlock 10h Reserved al
18. Relay contacts which are connected to the Remote Control connector on the rear panel e Inthe SERIAL mode all the commands are through a local computer connected to the RS 232 422 485 interface STORAGE The following environmental conditions must be met when transporting and storing the controller e Temperature 20 C to 70 C e Relative humidity O 95 non condensing PRIOR TO INSTALLATION The controller comes in a special protective packaging if there is any sign of damage that could have been caused during transportation contact your local sales office immediately When unpacking the controller be particularly careful to avoid dropping it or knocking it against anything The packaging material is totally recyclable and complies with EEC directives 85 399 for the safeguard of the environment Controller Packaging 26 73 INSTRUCTIONS FOR USE The Dual controller is preset at the factory to operate with the following power supply voltages e Models 929 7000 1 2 3 and 929 7008 09 10 11 input voltage of 100 to 120 Vac frequency of 50 60 Hz e Models 929 7004 5 6 7 and 929 7012 13 14 15 input voltage of 200 to 240 Vac frequency of 50 60 Hz INSTALLATION EU The Dual controller is equipped with a three wire power cord with an internationally approved plug Always use this power cord and insert the plug into an appropriately grounded power outlet to avoid electrostatic discharges High voltages
19. V Assicurarsi che la copertura sia installata correttamente Controllare che siano installati gli interruttori di richiusura con relativi interlock esterni ponticellati Assicurarsi che l interlock esterno sia chiuso Nel caso in cui la pompa utilizza un cavi HV con interlock di sicurezza controllare che il connettore all estremita della pompa sia inserito correttamente e che il pin di richiusura all estremit dell unit sia inserito nel relativo connettore sul pannello posteriore Nel caso in cui la pompa utilizza un cavo HV a polo singolo senza interlock controllare che il ponticello sia correttamente inserito tra la presa del cavo HV interlock e la terra Ripetere la procedura di accensione del Dual se il problema persiste contattare Varian per la riparazione o sostituzione Contattare Varian per la riparazione o sostituzione Assicurarsi che la temperatura ambientale durante il funzionamento del controller non sia superiore ai 45 Assicurarsi che i fori di aerazione sulla copertura non siano ostruiti Assicurarsi che le palette della ventola girino liberamente e che l aria coinvogliata all interno del controller Dual non sia ostruita da polvere o da materiale estraneo Attendere qualche minuto in modo che la temperatura interna dell unit si raffreddi e quindi ripetere la procedura di accensione dell alta tensione H V Ripetere la procedura di accensione del Dual se il problema persiste conta
20. da 0 a 95 senza condensa PREPARAZIONE PER L INSTALLAZIONE Il controller viene fornito in un imballo protettivo speciale nel caso in cui si presentassero segni di danni che potrebbero essere stati causati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballo prestare particolare attenzione a non lasciar cadere il controller e a non sottoporlo ad urti Il materiale dell imballo completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Imballo del controller ISTRUZIONI PER L USO Il controller Dual configurato in fabbrica per funzionare con le seguenti tensioni di alimentazione e Modelli 929 7000 1 2 3 e 929 7008 09 10 11 tensione di ingresso da 100 a 120 Vac frequenza di 50 60 Hz e Modelli 929 7004 5 6 7 e 929 7012 13 14 15 Tensione di ingresso da 200 a 240 Vac frequenza di 50 60 Hz INSTALLAZIONE Eu Il controller Dual provvisto di un cavo di alimentazione a 3 fili dotato di spina approvata a livello internazionale Utilizzare sempre questo cavo di alimentazione inserendo la spina in una presa di alimentazione munita di collegamento a terra onde evitare scariche elettrostatiche All interno del controller si sviluppano delle alte tensioni che possono provocare delle lesioni gravi o addirittura la morte Prima di eseguire qualsiasi operazione di installazione o manutenzione del controller scollegarlo dalla presa elet
21. de de e te aa ASGIPPrEIOIOCOL4 ated et I uae Sees alee den o eS MultiGauge Compatible Protocol iii LIST OF COMMANDS 2 52 42 28220 EI 56 General Commands i oe ta a aii a Ae hat 56 Command Code Value ncaa di a MO 57 HV on off Command Coding iii 57 Device Number and Device Type Commands Coding sss 58 Interlock Status Coding iui une oL iet ved sei o ra ee ees 58 High Voltage Commands ea E Eo IE Age 59 Remote 1 0 Commands Coding sisi 60 MiniGauge Commands o ains iL A vnde 61 Configuration Commands iii 63 Serial Property Commands Coding su 64 Protocol EOS PERPE E E ei ei 65 MultiVac Compatibile Serial a D S Dual Controller Error Status 06 SPECIFIC PROTOCOL SETTINGS iif 222er Schenna OT ACK Nack Modes Ey a ee HRS baa Libia 67 Wiite Heply E nixa tii na LO la Eo ess 67 Multiple Commands ren ire D en E Nerea iaia 67 Automatic Serial Mode sies e hehe cena AE A EE aAA 67 Compatibility with MultiVac iii 67 ACGESSORIES OPTIONS 23 28 02 eere a D I ISTRUZIONI PER L USO INFORMAZIONI GENERALI Questa apparecchiatura destinata ad uso professionale L utente deve leggere attentamente il presente Manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Varian prima dell utilizzo dell apparecchiatura La Varian declina ogni responsabilit dovuta alla mancata
22. following commands therefore remain The part relating to the Gauges will not guarantee unchanged compatibility since the Gauge cards implemented have been changed with respect to MultiVac HV on off V meas meas Pr meas fixed step start protect Vmax Vstep1 Istep1 Istep2 SetPt1 SetPt2 P100nA Imax P10uA P10mA P400mA Pmax Iprotect on the MultiVac 72 73 In addition configuration commands were unavailable 87 900 094 01 H TECHNICAL INFORMATION ACCESSORIES OPTIONS DESCRIPTION PART NUMBER Rack Adapter High Voltage cables H V bakeable cable radiation resistant 13 ft 4 m long 929 0705 with Interlock E H V bakeable cable radiation resistant 13 ft 4 m long 929 0710 H V bakeable cable radiation resistant 13 ft 4 m long 929 0712 for vaclon Pumps Eyesys Convectorr gauge cable Eyesys Mini B A gauge cable 929 0720 RS422 computer interface option Ask for Modified Standard P N RS485 computer interface option Ask for Modified Standard P N Eyesys gauges option Ask for Modified Standard P N 73 73 87 900 094 01 H a vanta e Request for Return RI 9001 AN 1 A Return Authorization Number RA WILL NOT be issued until this Request for Return is completely filled out signed and returned to Varian Customer Service 2 Return shipments shall be made in compliance with local and international Shipping Regulations
23. interno della pompa vedere la figura seguente o gt NX Lu Es E o gt E D o E gt o 1x10 1x10 1x10 1x10 1x10 1x10 PRESSURE Torr Cambiamento della tensione in uscita vs pressione 87 900 094 01 H Accensione del controller dal pannello frontale modalit LOCAL NOTA Per accendere l alta tensione HV occorre che l interlock esterno sia chiuso connettore inserito Nel caso in cui non venga eseguita alcuna connessione esterna inserire i ponticelli di chiusura e interlock forniti con l unit Procedere come segue per alimentare il controller e abilitare la tensione sui connettori di alta tensione H V e Inserire il cavo proveniente dalla pompa ed il pin di interlock loopback del cavo H V nei relativi connettori sul pannello posteriore e Predisporre l interruttore di alimentazione sul pannello posteriore nella posizione di ON e Predisporre l interruttore ENABLE HV sul pannello anteriore nella posizione ON e Premere i pulsanti HV 1 2 ON OFF LED ON si accende NOTA Con un solo circuito H V installato entrambe le righe del display sono dedicate alla pompa numero uno mentre con due circuiti installati ogni riga dedicata ad una pompa diversa Avvio della pompa Per avviare la pompa premere il rela
24. l unit nm A A 3 V rifier que la couverture soit install e correctement HV X ERROR La haute tension HV a t teinte par un interlock Contr ler que soient install s les interrupteurs REMOTE INTERLOCK recu par le Remote I O de fermeture avec les interlock externes avec pontets V rifier que l interlock externe soit ferm HV X ERROR La haute tension HV a t teinte cause d un Sila pompe utilise un c ble HV avec interlock CABLE INTERLOCK interlock du c ble HV de s curit contr ler que le connecteur l extr mit de la pompe soit introduit correctement et que le pin de fermetrure l extr mit de l unit soit introduit dans le connectur dur le panneau post rieur Si la pompe utilise un c ble HV p le simple sans interlock v rifier que le pontet soit correctement introduit entre la prise du c ble HV interlock et le sol HV X ERROR Le cuircuit de haute tension HV n a pas t R p ter la proc dure d allumage du contr leur HV NOT FOUND relev Dual si le probl me persiste contacter Varian pour la r paration ou la substitution HV X ERROR La haute tension a t teinte cause d un Conctater Varian pour la r paration ou la HV FAULT dysfonctionnement dans le circuit HV substitution HV X ERROR Les capteurs de temp rature l int rieur du V rifer que la temp rature environnante HV OVERTEMP contr leur Dual ont relev une temp rature qui durant le fonctionnement du con
25. mA max Closed Protect selected Open Start selected 15 positive 34 negative Communication select Digital input 8 to 30 VDC VAC 15 mA max Active on the positive edge If a positive edge is detected the DUAL switches alternatively from Serial Communication operation to Remote UO operation and vice versa 16 positive 35 negative The External Interlock it will operates independently operational Communication Remote I O In any operational mode from the StepV FixedV mode Digital input NOTE mode Local 8 to 30 VDC VAC 15 mA max Closed Step V Open Fixed V NOTE The input signals are only active if the operational mode is set to Remote The output signals are active in all operational modes Remote the Interlock must be closed to start the pump 41 73 87 900 094 01 H TECHNICAL INFORMATION EXTERNAL E DUAL INTERNAL 5000 e EXTERNAL VOLTAGE 8 to 30 Vdc AC or INTERNAL VOLTAGE Pin 6 positive Pin 23 Negative Typical Input Connection Remote Power On Proceed as follows to turn on the HV from the Remote 5 Close the Interlock contact on the corresponding I O Connection Remote I O connector pins 11 30 6 Close the Output On Off contact on the 1 Switch on the DUAL corresponding Remote UO connector pins 13 32 2 Switch the unit to the Remote I O mode of 7 Close the corresponding Confirm Contact on the operation by
26. measure in fact the display shows the last unit set Pressing the CHANGE button allows to change the unit of measure the following units can be selected mbar Torr and Pascal e me s s ume vm IMAN Confirm the made selection by pressing the ENTER button 87 900 094 01 H TECHNICAL INFORMATION Channel Selection sjele ele r lompaanonjer aaa Press the CHANGE button to display the options available on the second row HIGH VOLTAGE 1 HIGH VOLTAGE 2 GAUGE 1 GAUGE 2 SERIAL COMM Confirm by pressing the ENTER button The same information can be seen in the following flow chart Main Menu MENU Pressure Unit Selection ENTER Channel Selection Serial Comm Selection Pump Type Gauge Selection Selection Y Y Y 48 73 87 900 094 01 H TECHNICAL INFORMATION Pump Type Selection Use the CHANGE button to select the pump then The following message is now displayed confirm the selection made by pressing the ENTER button In case the Spare Pump is selected the operations that can be done are shown in the following flow chart Pump Type Selection SPARE Vmax Setting Imax Setting Y Pmax Setting Y Iprotect Setting P100nA Setting P10uA Setting Y P10mA Setting Y P400mA Setting Step Fixed Selection STEP FIXED Y Vstep1 Setting Istep1 Setting Vstep2 Setting
27. only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale x 87 900 094 01 H INSTRUCTIONS FOR USE ERROR MESSAGES For certain types of failure the controller performs an autodiagnostic test and displays one of the messages indicated in the following table HIGH VOLTAGE 1 OR 2 ERRORS HV X ERROR PANEL INTERLOCK HV X ERROR REMOTE INTERLOCK HV X ERROR CABLE INTERLOCK HV X ERROR HV NOT FOUND HV X ERROR HV OVERTEMP HV X ERROR REMOTE UO NOT FOUND HV X ERROR R I O FAULT HV X ERROR PROTECT HV X ERROR SHORT CIRCUIT HV switched off by an interlock received from the front panel or cover HV ENABLE switch set to OFF or unit cover removed HV powered off due to an interlock received from Remote I O HV power off caused by an HV cable interlock HV circuit has not been detected Temperature sensors inside the Dual have detected a temperature which exceeds the safety threshold Remote I O card not detected Remote I O circuit failure The overcurrent protection was triggered with the PR
28. step start protect start protect mode Read HV1 HV2 Status 30h start Write 31h protect Psel Power supply polarity Read HV1 HV2 Status 30h negative 31h positive Vmax Vmax variable Read HV1 HV2 Integer V 3000 7000 step 100 Write Imax Imax variable Read HV1 HV2 Integer mA 100 400 step 10 Write Pmax Pmax variable Read HV1 HV2 Integer W 100 400 step 10 Write Iprotect Iprotect variable Read HV1 HV2 Integer mA 10 100 step 10 Write Vstep1 Vstep1 variable Read HV1 HV2 Integer V 3000 7000 step 100 Write Istep1 Istep1 variable Read HV1 HV2 Exp A 1 0E 9 1 0E1 Write Vstep2 Vstep2 Read HV1 HV2 Integer V 3000 7000 step 100 Write Istep2 Istep1 variable Read HV1 HV2 Exp A 1 0E 9 1 0E1 Write SetPt1 SetPt1 variable Read HV1 HV2 Exp Torr 1 0E 9 1 0E1 Set Point 1 Write have to be greater than SP2 SetPt2 SetPt2 variable Read HV1 HV2 Exp Torr 1 0E 9 1 0E1 Set Point 2 Write Remote I O Reads the status of the Read HV1 HV2 BitField See Remote I O table Output Remote UO outputs Remote I O Reads the status of the Read HV1 HV2 BitField See Remote I O table Input Remote I O inputs 63 73 87 900 094 01 H High Voltage Commands TECHNICAL INFORMATION Command Name Binary ASCII MultiGauge General Usage Commands Compat Protocol ascii hex ascii hex ascii hex fixed step BO 42h30h BO 42h30h 60 36h30h star
29. the 0 and 9 range ASCII 30h 39h Status can also assume values greater than 1 The commands have a read and a write mode By specifying the type of read operation being performed the Host queries the Dual controller which in turn replies in a format compliant with the command sent As long as a write operation can be carried out the write and read formats for the same command coincide 87 900 094 01 H The write modes will have the following possible replies e ACK command correctly received and executed run a query to check that the value has been written typical for TECHNICAL INFORMATION e Error unexecutable command due to a context error CT 21h see Protocol Errors e Value command received and executed the value is immediately returned in the High Voltage Gauge power on power same format of the write command off the query is not required The commands are associated to the channel which is specified in the Channel field The following table indicates the values that can be assigned in this field Value Channel Description 0 30h No channel The command does not act on any specific channel but overall on the entire Dual controller e g firmware version read m 31h High Voltage 1 The command acts on a Channel 1 corresponding to the High Voltage 1 module 2 32h High Voltage 2 The command acts on a Channel 2 corresponding to the High Voltage 2 module 3
30. you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely 4 OVI NN Wi n s did Sergio PIRAS Vice President and General Manager VARIAN Vacuum Technologies Note Fax or mail the Customer Request for Action see backside page to VARIAN Vacuum Technologies Torino Quality Assurance or to your nearest VARIAN representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO VARIAN VACUUM TECHNOLOGIES TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS VARIAN S p A Via F lli Varian 54 10040 Lein Torino Italy E MAIL marco marzio varianinc com COMPANY FUNCTION ADDRESS TEL N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by VARIAN VTT XXXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc ap VARIAN gt lt ISTRUZIONIPEREUSO aaa OA GEBRAUVCHSANLEITUNG a iaia INSTRUCTIONS FOR USE ars TECHNICAL INFORMATION Goiania AAA a DUAL CONTROLLER DESCHIDTION ii Algorithm for the Distribution of the Available Power CONTROLLER SPEGIFIGATIONS 4 22 22 42 ace te o ee en uere o epe Output Voltages ELIT C
31. 0 Leini Torino Italy Tel 39 011 9979 111 Fax 39 011 997 9 350 03 06 Sales and Service Offices Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Toll Free 0120 655 040 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Varian S de R L de C V Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Taiwan Varian Technologies Asia Ltd 14F 6 No 77 Hsin Tai Wu Rd Sec 1 Hsi chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Fax 886 2 2698 9678 Toll Free 0800 051342 UK and Ireland Varian Ltd 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU England Tel 44 1865 291570 Fax 44 1865 291571 United States Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Other Countries Varian Inc Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Customer Support amp Service North America Toll Free 1 800 882 7426 vtl technical support varianinc com Europe Tel 00 800 234 234 00 vtt technical support varianinc c
32. 150 Diode Noble Diode 75 Diode Noble Diode 55 Diode Noble Diode 40 Diode Noble Diode 20 Diode Noble Diode Spare 7000V 7000V 7000V 7000V 7000V 7000V 400 mA 400 W 400 mA 400 W 300 mA 400 W 250 mA 200 W 150 mA 150 W 400 mA 400 W Models with positive H V card 7000V 400 mA 400 W 7000V 400 mA 400 W 7000V 300 mA 400 W 7000V 250 mA 200 W 7000V 150 mA 150 W 7000V 400 mA 400 W 87 900 094 01 H TECHNICAL INFORMATION Protect Mode of Operation Pump Current value Current value for When the current value exceeds the trip current for size type for switching switching from 5 to 3 more than 0 2 seconds the power supply turns off the from 7 0 to 5 KV KV high voltage and an error message is displayed Models with negative H V card 9 g g play g Spare User selection User selection PUMP SIZE TYPE PROTECT TRIP CURRENT Models with positive H V card 500 Diode 1 4x 103 A 3 9x 10 A Noble Diode 300 Diode 7 2x107A 2 1x10 A Models with negative H V card 500 StarCell 100 mA 300 StarCell 100 mA 150 StarCell 50 mA Noble Diode 150 Diode 3 6x107A 9 5x 10 A Noble Diode 40 55 75 22x10 A 6 7x 10 A Diode Noble Diode 20 Diode 2x10 A 2 7 x10 A Noble Diode Spare User selection User selection 40 55 75 StarCell 30 mA 20 StarCell 20 mA Spare 400 mA Models with positive H V card 500 Diode Noble Diode 100 mA 300 Diode Noble Diode 100 mA 40
33. 2h34h Pump polarity error 2048 32h30h34h38h Intervention on non present remote UO error 4096 34h30h39h36h Write attempt made in REMOTE COMM mode 8192 38h31h39h32h Modification allowed on SPARE pump only In the following example is shown a bad command send to the DUAL Binary Protocol 04 AO 31 V 81h 30h 34h 41h 30h 33h 31h 76h e 05 A03 3T 1h 30h 35h 41h 30h 33h 21h 33h 54h Ascii Protocol 04 A0 3 1 0377 24h 30h 34h 41h 30h 33h 31h 30h 33h 37h 37h 05 AO 3 3 0385 24h 30h 35h 41h 30h 33h 21h 33h 30h 33h 38h 35h Multigauge Compatible Protocol 3 30 23h 33h 33h 30h 3Fh Dh gt 3 00 3 3Eh 33h 30h 30h 21h 33h Dh 69 73 87 900 094 01 H Dual Controller Error Status TECHNICAL INFORMATION Value Error type Error reference High Voltage errors 1 31h High Voltage off due to front panel interlock Panel Interlock activation 2 32h High Voltage off due to Remote I O interlock Remote Interlock activation 3 33h High Voltage off due to Cable HV interlock Cable Interlock activation 4 34h Dual fault HV not found 5 35h High Voltage off due to a general DSP HV Fault determined fault 6 36h High Voltage off due to an HV module HV Overtemperature overtemperature determined by the DSP 7 37h Remote I O card not present or faulty R I O not found 8 38h Remote I O card present but faulty R
34. 33h Gauge1 The command acts on a Channel 3 corresponding to the MiniGauge 1 module 4 34h Gauge2 The command acts on a Channel 4 corresponding to the MiniGauge 2 module 5 35h Serial The command acts on a Channel 5 corresponding to the Serial Communication module Furthermore the physical measurements visible from the serial line will always have the related unit of measure indicated This applies above all for pressure measurements that are not subject to the settings made on the Dual controller NOTE The RS485 mode is normally used in a data exchange network where the software addressing of the different nodes connected maximum 32 is only made possible by means of the binary protocol Therefore in the RS485 mode the Dual controller will only recognize the binary protocol and will ignore any data exchange performed using the ASCII and MultiGauge Compatible Protocol 57 73 In the Remote I O mode only the commands present on the digital outputs of the Remote I O Fixed Step Local Remote Start Protect pump on off are read only active The write commands are enabled in the automatic mode only In addition the remote mode cannot be selected during a menu editing phase using the front panel 87 900 094 01 H Binary Protocol Host to Dual controller command format TECHNICAL INFORMATION header command length command channel data checksum Dual controller to Host reply
35. 73 87 900 094 01 H INDICATIONS GENERALES Cet appareillage a t congu en vue d une utilisation professionnelle Il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Varian avant l utilisation de l appareillage Varian d cline par cons quent toute responsabilit en cas d inobservation totale ou partielle des instructions donn es d utilisation incorrecte de la part d un personnel non form d op rations non autoris es ou d un emploi contraire aux r glementations nationales sp cifiques Les paragraphes suivants donnent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information Cette notice utilise suivants les signes conventionnels EU Les messages de danger attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale qui si elle n est pas effectu e correctement risque de provoquer de graves l sions I ATTENTION Les messages d attention apparaissent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement l appareillage NOTE Les notes contiennent des renseignements importants isol s du texte DESCRIPTION DU CONTROLEUR Le contr leur Dual de la Variant est un controleur pour les pom
36. 78h70h 95 39h35h P400mA xq 78h71h xq 78h71h 96 39h36h reinitialize eeprom xr 78h72h xr 78h72h 97 39h37h setPoint histeresys XS 78h73h XS 78h73h 98 38h38h Serial Property Commands Coding bitField bit at 0 bit at 1 01h Disables full compatible MultiVac Enables full compatible MultiVac 02h Disabled reply on Write Enables reply on Write 04h Disables Ack Nack mode Enables Ack Nack mode 08h Disables multiple commands Enables multiple commands 10h Disables automatic Enables automatic serial mode serial mode 20h Not used Not used 40h Parity bit 0 read only Parity coding 80h Parity bit 1 read only O none 1 odd 2 even 3 not valid The following example shows a reading of the serial property Binary Protocol 04 xb 0 81h 30h 34h 78h 62h 30h 3Fh 1h Oh e 1 1 xb 0 00000100 th 31h 31h 78h 62h 30h 30h 30h 30h 30h 30h 31h 30h 30h 2Ah 68 73 Ascii Protocol 04 xb 0 0493 40h 30h 34h 78h 62h 30h 3Fh 30h 34h 39h 33h 11 xb 0 00000100 0785 24h 31h 31h 78h 62h 30h 30h 30h 30h 30h 30h 31h 30h 30h 30h 30h 37h 38h 35h Multigauge Compatible Protocol 0 81 23h 30h 38h 31h 3Fh Dh gt 0 81 00000100 3Eh 30h 38h 31h 30h 30h 30h 30h 31h 30h 30h Dh The answer means that the unit is in ACK NACK mode 87 900 094 01 H Protocol Errors If incongruencies are detected in the composition of the data packet sent to the Dual controller in other words a correct reception but an incorrec
37. A Write on SPARE pump P400mA Pressure value at Read HV1 HV2 Exp Torr max 7 5E 5 P100mA 5000V with I 400mA Write 1 0E2 reinitialize Reloads the defaults in Write No channel Status 1 reloads the defaults in eeprom EEPROM EEPROM setpoint Histeresys percentage Read No channel Integer 96 0 100 step 1 histeresys range of the setPoint Write Remote I O value 1 DUAL Controller doesn t reply to this command and the display will show SYSTEM ERR 5 turn off and on the power to reset the error 67 73 87 900 094 01 H TECHNICAL INFORMATION Command Name Binary ASCII MultiGauge General Usage Commands Compat Protocol ascii hex ascii hex ascii hex serial config mode xa 78h61h xa 78h61h 80 38h30h serial property xb 78h62h xb 78h62h 81 38h31h short circuit volt XC 78h63h XC 78h63h 82 38h32h short circuit current xd 78h64h xd 78h64h 83 38h33h short circuit time xe 78h65h xe 78h65h 84 38h34h protect time xf 78h66h xf 78h66h 85 38h35h protect delay xg 78h67h xg 78h67h 86 38h36h prDelta1 xh 78h68h xh 78h68h 87 38h37h prDelta2 xi 78h69h xi 78h69h 88 38h38h P100nA xj 78h6Ah xj 78h6Ah 89 38h39h P1pA xk 78h6Bh xk 78h6Bh 90 38h30h P10pA xl 78h6Ch xl 78h6Ch 91 39h31h P100uA xm 78h6Dh xm 78h6Dh 92 39h32h PimA xn 78h6Eh xn 78h6Eh 93 39h33h P10mA Xo 78h6Fh Xo 78h6Fh 94 39h34h P100mA xp 78h70h xp
38. Bad header Inexistant or incorrect header Time out Unrespected time out Treset When a data exchange error occurs the Dual controller does not react in any way to the command received but replies with an NACK message except in cases when an RS485 serial line is used If an unrecoverable error crash error occurs on the Dual controller the serial line will not be able to handle any type of data exchange 56 73 TECHNICAL INFORMATION SOFTWARE PROTOCOL The Dual controller automatically detects the type of software protocol used by analyzing the header and provides its related reply The three protocols have equivalent data fields which comply with the following formats No of Bytes Read 1 Type Description 9 3Fh performs reads on the Dual controller 0 30h false off 1 31h true on XXxxx represented in BCD on 5 digits always positive Like the integer type but with meanings associated to the number s single bits x xEsxx where x is BCD digits E is the 45h character and s is the o sign Sequence of n characters included within the 20h and Status 1 Integer 5 BitField 8 Expo 7 nential String n 7Fh range 3 the h notation following a number indicates that the number is expressed in hexadecimal format BCD the number is represented by digits included within
39. Dual Controller Models 929 7000 929 7001 929 7002 929 7003 929 7004 929 7005 929 7006 929 7007 929 7008 929 7009 929 7010 929 7011 929 7012 929 7013 929 7014 929 7015 87 900 094 01 H APRIL 2007 NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem GE Agilent Technologies I MANUALE DI ISTRUZIONI D BEDIENUNGSHANDBUCH F NOTICE DE MODE D EMPLOI GB INSTRUCTION MANUAL DUAL Controller ap VARIAN gt lt vacuum technologies Dear Customer Thank you for purchasing a VARIAN vacuum product At VARIAN Vacuum Technologies we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our product On the back side you find a Corrective Action Request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update
40. I O fault 9 39h High Voltage off due to the protect function Protect activation 10 31h30h High Voltage off due to shortcircuit protection Short Circuit activation 11 31h31h High Voltage off due to an HV module Over Volt Curr overvoltage or overcurrent determined by the DSP 12 31h32h High Voltage off due to the zero measurement Zero Meas protection activation MiniGauge errors 1 31h MiniGauge off due to front panel interlock Panel Interlock activation 2 32h The selected Minigauge was not recognized Gauge not found 3 33h The Minigauge is signaling a Fault condition Gauge fault 4 34h The selected Minigauge was disconnected Gauge not connected System errors 1 31h RAM failure RAM diagnostics error Software Error 2 32h config register incorrect value in the uC Software Error 68HC11 configuration register 3 33h test mode invalid uC 68HC11 operating mode Software Error 4 34h copyright violation of the signature in the ROM Software Error or the ROM was corrupted 5 35h eeprom fault checksum or non volatile memory Software Error write errors Factory defaults are automatically loaded 6 36h version number incompatible uC and Dsp Software Error versions 7 37h hv dsp not found the Dsp does not respond Software Error during the uC initialization phase 8 38h dsp fault the Dsp does not respond during Software Error normal operation 9 39h invalid option option card not configured Software Error correctly 10 31h30h unkno
41. Modus da bei Versagen von lonenpumpe oder Kabel wegen Kurzschluss oder Uberlastung der Starkstrom abschaltet Detaillierte Angaben zu den beiden Betriebsarten finden sich im Anhang Technical Information Stufenbetrieb Stufenbetrieb muss gew hlt werden um die Pumpenleistung zu erh hen und bei sehr niedrigem Druck ohne Einfluss des Leckstroms ablesen zu k nnen Im Stufenbetrieb w hlt der Dual Controller die beste Ausgangsspannung entsprechend dem Pumpen eingangsdruck siehe die folgende Abbildung o gt x Lu Es E zi o gt E gt a E D o 1x10 1x10 1x10 1x10 1x10 1x10 PRESSURE Torr nderung der Ausgangsspannung in Funktion des Drucks 87 900 094 01 H Einschalten des Controllers von der vorderen Schalttafel LOKAL Modus ANMERKUNG Um die Hochspannung einschalten zu k nnen muss die externe Verriegelung geschlossen sein Stecker eingesteckt Wenn kein Anschluss nach au en gemacht werden soll die mit der Einheit gelieferten Br cke zum Schlie en einsetzen Zum Einschalten des Controllers und zur Aktivierung von Spannung an den Hochspannungssteckern wie folgt vorgehen e Das Kabel von der Pumpe und den R ckkoppelungsstift der Verriegelung am Hochspannungskabel in die betreffenden Stecker auf der hint
42. N RR Danger messages call the operators attention to a specific procedure or operation that could cause serious injury if not performed correctly LS WARNING Warning messages are provided before procedures that could cause damage to the equipment if not complied with NOTE Notes provide you with important information extracted from the text CONTROLLER DESCRIPTION Varian s Dual controller is a flexible ion pump controller which is pre configured at the factory according to the customer s requirements The Dual controller is available with e Front panel with keypad display 16x2 and microprocessor card e Remote I O card e Serial data exchange card optional e 24 Vdc 20 W power supply unit for the Eyesys Gauge optional e Power supply card with integrated DSP for output voltage management e High voltage card s INSTRUCTIONS FOR USE The configurations are listed in the following table DESCRIPTION Dual Models 120 Vac basic unit with 1 929 7000 negative HV 120 Vac basic unit with 2 929 7001 negative HV s 120 Vac basic unit with 1 929 7002 positive HV 120 Vac basic unit with 2 929 7003 positive HV s 230 Vac basic unit with 1 929 7004 negative HV 230 Vac basic unit with 2 929 7005 negative HV s 230 Vac basic unit with 1 929 7006 positive HV 230 Vac basic unit with 2 929 7007 positive HV s 120 Vac basic unit with 1 929 7008 negative HV and RS 232 card 120 V
43. ONTROLLER OUTLINE En FUSE HOEDER sy Se eno eet deed ee tue tuu oasi INTERCONNECTIONS 42 2 2 0 tte ot rtt be d c UT ti ii eeu Fog led teres START MODE OF OPERATION epe tee dee teet een Protect Mode of Op ration ette ai Step Mode of Operation u get c ee te AEN Optional Gauge Connector ii Remote VO Connector nasi nn de en HI Aaa Female Remote I O Connector Output Signal VV Female Remote I O Connector Input Signal Hemote PoWer Ont codd to onc TI Lt erde Optional Male Serial Connector sise USAGE vet cata ina iniettare rionale dette Generalitat io A rita Abbreviations furl ie Em STARTUP elia retra RA editt t d hae Ratto OPERATING MODES rnc pee i e ce er Ed ehe page iate Messages Associated to the Mode Button sss ene High Voltage Commande sisi UNIT CONFIGURATION ini SERE nre ed en LO E EET SLM edu RU EHE e ee EE Messages Associated to the Menu Button Messages Associated to the MiniGauge Menu Button ernennen Messages Associated to the Menu Button Related to the Serial Channel SERIAL INTERFACE cuatri della G n ral EE General Definitions of the Hardware Protocol Hardware Signals Management ii Transmission Format and Timeout esses enne nnne nenne nnne Data Exchange Error Management SOFTWARE PROTOCOL ebrei e i e p este dg ae eat Binary ProtoCol 14 e sd dpt e
44. OTECT mode of operation selected A short circuit was detected on the H V output 31 73 Set the HV ENABLE switch to ON and repeat the H V power on procedure Make sure that the cover is installed correctly Check that the loopback plugs with the external interlock jumpered are installed Make sure that the external interlock is closed If the pump uses an HV cable with safety interlock check that the connector at the pump end is inserted correctly and that the loopback pin at the unit end is inserted into the related socket on the rear panel If the pump uses an single pole HV cable without interlock check that the jumper is correctly inserted between the Interlock cable HV plug and ground Repeat the Dual power on procedure if the problem persists contact Varian for repair or exchange Make sure that the environmental temperature of Dual controller operation is not over 45 Make sure that the ventilation slots on the cover are not obstructed Make sure that the fan blades rotate freely and that the air channeled inside the Dual controller is not blocked by dust or foreign matter Wait a few minutes for the temperature inside the unit to cool down and then repeat the HV power on procedure Repeat the Dual power on procedure if the problem persists contact Varian for repair or exchange Make sure that the Remote UO external connectors are connected as indicated in this manual Repeat th
45. START Modus w hlen so dass der Controller arbeiten kann bis der Kurzschluss Strom erreicht wird Die Unversehrtheit der Hochspannungskabel pr fen Das Kabel von der lonenpumpe abnehmen und pr fen ob es in der Pumpe oder im Kabel einen Kurzschluss gibt Die Einschaltprozedur f r Dual Controller Hochspannung wiederholen Bleibt der Fehler bestehen Varian zwecks Reparatur oder Austausch kontaktieren Die Einschaltprozedur f r Dual Controller Hochspannung wiederholen Bleibt der Fehler bestehen Varian zwecks Reparatur oder Austausch kontaktieren Den Schalter HV ENABLE auf EIN setzen und die Prozedur zum Einschalten der Hochspannung wiederholen Sicherstellen dass das Geh use richtig montiert ist Das Netzteil des Dual Controller aus und wieder einschalten Bleibt der Fehler bestehen Varian zwecks Reparatur oder Austausch kontaktieren 1 Das Verbindungskabel zwischen Dual Controller und Gauge pr fen 2 Sicherstellen dass das Eichnormal richtig arbeitet wenn es vom Dual Controller getrennt ist Bleibt der Fehler bestehen Varian zwecks Reparatur oder Austausch kontaktieren Das Eichnormal wurde vom Dual Controller Das Eichnormal wieder anschlieBen und die getrennt Einschaltprozedur wiederholen Nur f r Diagnosen durch den Varian Service Den Hauptschalter des Dual Controllers aus und wieder einschalten Bleibt der Fehler bestehen Varian zwecks Reparatur oder Austausch kontaktieren 16
46. Vca fr quence de 50 60 Hz e Mod les 929 7004 5 6 7 et 929 7012 13 14 15 tension d entr e de 200 240 Vca fr quence de 50 60 Hz INSTALLATION WEE Le contr leur Dual est pourvu d un c ble d alimentation trois fils pourvu d une prise norme internationale Utiliser toujours ce cable d alimentation en introduisant la prise dans une prise d alimentation munie de liaison au sol afin d viter les d charges lectrostatiques A l int rieur du contr leur se d veloppent des hautes tensions qui peuvent provoquer des l sions graves ou carr ment la mort Avant d effectuer n importe quelle op ration d installation ou d entretien du contr leur le d brancher de la prise lectrique LS ATTENTION Le contr leur peut tre utilis soit comme unit de table que comme module install dans une armoire De toute facon il doit tre plac de mani re ce que l air puisse circuler librement travers les trous d a ration pr sents dans la couverture Lorsque le contr leur est utilis comme module armoire il DOIT tre install dans un adaptateur d une hauteur de quatre unit s armoire afin d viter qu il ne tombe l int rieur de l armoire m me Le panneau frontal du contr leur n est pas pr vu pour supporter le poids de l unit Ne pas installer ou utiliser le contr leur Dual dans des milieux expos s aux agents atmosph riques pluie neige glace En pr sence de poussi re de gaz corrosifs ou dans
47. a proc dure de r galage Pour effectuer la proc dure de r glage du contraste de l cran allumer le contr leur et la fin de l initialisation appuyer sur la touche ENTER plac e sur la panneau ant rieur en gardant appuy jusqu l obtention d sir e En laissant la touche ENTER la valeur de contraste sera sauvegard e dans la m moire de l unit CHANGE de CONFIG VARIAN S nie ce CHE START START PROT1 PROT2 Loce Sew Gone Lorsque l unit arrive la modalit de r glage du contraste l afficheur affiche le relatif message et les LED de l afficheur commencent clignoter O O OG ozuLo 20 73 87 900 094 01 H Tableau dorsal du Dual Contr leur Le dessin suivant reporte les contr les et connecteurs sur le panneau post rieur du contr leur Dual La configuration report e dans le sch ma consiste en deux cartes a haut voltage HV de deux cartes Set Point Remote Control une carte d interface RS 232 422 et la liaison deux mesureurs Eyesys Gauges Tableau dorsal Si ge porte fusible ConnecteurFischer HV2r Interlock du c ble HV sur le connecteur HV2 Connecteur Fischer HV1 r Interlock du c ble HV cable sur le connecteur HV1 Connecteur 37 pin pour Eloign I O HV2 Connecteur 37 pin pour Eloign UO HV1 Connecteur 9 pin Multipour mesureurs Eyesys multiples 9 Connecteur d interface
48. ac basic unit with 2 929 7009 negative HV cards and one RS 232 card 120 Vac basic unit with 1 929 7010 positive HV and RS 232 card 120 Vac basic unit with 2 929 7011 positive HV cards and one RS 232 card 230 Vac basic unit with 1 929 7012 negative HV and RS 232 card 230 Vac basic unit with 2 929 7013 negative HV cards and one RS 232 card 230 Vac basic unit with 1 929 7014 positive HV and RS 232 card 230 Vac basic unit with 2 929 7015 positive HV cards and one RS 232 card The Dual controller can control up to two ion pumps from 20 l s to 500 l s with positive or negative polarity Reliable pressure are measured at up to 10 Torr Variable voltages allow the pump performance to be optimized on the entire operational field PART NUMBER With two optional Eyesys Gauges pressure readings can be taken with different accuracy and fields of measurement The Dual controller can be controlled in the LOCAL mode REMOTE I O mode and in the SERIAL mode via the RS 232 422 and 485 ports the RS422 and RS485 are optional 87 900 094 01 H NOTE To order systems with RS 422 485 and Eyesys Gauges contact the Varian sales office The ways in which the operating commands are entered into the system differ depending on the controller s mode of operation e In the LOCAL mode all the commands are entered through the front panel e n the REMOTE I O mode all the commands are entered through remote lO signals
49. ach dem Bootstrap die ENTER Taste bet tigen die sich auf der vorderen Schalttafel befindet und diese solange gedr ckt halten bis die gew nschte Einstellung erreicht wurde Dann die Taste ENTER loslassen der Kontrastwert wird dann im Speicher der Einheit abgespeichert werden pni varian Zb CONFIG B MENU MODE Contrast LCD IA Adjustment Wenn die Einheit auf die Modalitat yur Kontrasteinstellung zugreift erscheint auf dem Display eine Nachricht und die LEDs auf dem START ff START PROT1 PROT2 O O O 0 Display beginnen zu blinken 3 OPA O C 12 73 87 900 094 01 H Hintere Schalttafel des Dual Controllers Die folgende Abbildung zeigt die Schalter und AnschluBstellen der hinteren Schalttafel des Dual Controllers Die gezeigt Konfiguration besteht aus zwei HV Karten zwei Karten Get Point Remote Control einer Karte RS 232 422 Computer Interface und Anschluss zu zwei Eyesys Gauges Hintere Schalttafel Sicherungsfach HV2 Fischer Stecker Verriegelung f r das HV Kabel am HV2 Stecker HV1 Fischer Stecker Verriegelung f r das HV Kabel am HV1 Stecker 37 poliger Stecker f r Fern E A HV2 37 poliger Stecker f r Fern E A HV1 9 polige Stecker f r Multi Gauge Eyesys 9 poliger Stecker der seriellen Schnittstelle Stecker f r Netzkabel Hauptschalter TIRO Ono Oy OT ds COR s TO BEDIENUNG Betrie
50. ack lit Liquid Crystal Display 16 characters x 2 rows 2 Green LEDs indicating the selected operating mode Local LED on when the LOCAL operating mode is selected Serial LED on when the SERIAL operating mode is selected Remote LED on when the REMOTE 1 0 operating mode is selected 87 900 094 01 H HV ENABLE switch active regardless of the operating mode selected To power on the HV from the front control panel from Remote I O or from the serial line the HV ENABLE switch must be set to the ON position HV1 on off and HV2 on off buttons used to enable disable the operation of the high voltage circuits LEDs when the ON LED is lit the corresponding HV circuit is enabled While when the PROT LED is lit the Protect operating mode has been selected for the corresponding pump INSTRUCTIONS FOR USE Group of six function buttons with the following functions ENTER button used to confirm a selection that has been made with the CHANGE button CHANGE CONFIG button used to display all of the different options available MENU button used to enter into the configuration menu MODE button used to select the operating mode START PROT 1 and START PROT 2 buttons used to select the Start Protect operating mode for the corresponding pump Sequence to adjust the LCD contrast of the DUAL lon Pump Controller The DUAL ion pump controller is equipped with a LCD display located on the controller front pa
51. al momento dalla caduta di tensione NOTA Quando viene selezionata una qualsiasi modalit operativa il sistema accetter solamente i comandi della relativa modalit per in grado di visualizzare informazioni e acquisire segnali e dati contemporaneamente da tutte le interfacce L unit progettata per funzionare nelle seguenti modalit e modalit START e modalit PROTECTED Nella modalit START il controller fornisce tutta la potenza indipendentemente dalle condizioni della pompa fino a raggiungere la corrente di corto circuito Questa modalit di funzionamento deve essere utilizzata per avviare la pompa ad alta pressione Nella modalit PROTECTED il controller limita la corrente in uscita e spegne l alta tensione quando il valore di corrente supera la corrente di soglia per oltre 0 2 secondi In condizioni di normale funzionamento questa la modalit preferita in quanto in caso di guasto alla pompa ionica o al cavo causato da corto circuito o alto carico l alta tensione si spegner Fare riferimento Technical Information per informazioni dettagliate sulle modalit operative Modalit operativa Step La modalit Step deve essere scelta alfine di ottimizzare le prestazioni della pompa e consentire le letture a pressione molto bassa senza influenzare la corrente di dispersione Nella modalit Step il controller Dual sceglie la tensione in uscita pi appropriata secondo la pressione all
52. as gesamte Gewicht der Einheit zu tragen Der Controller darf nicht in Umgebungen installiert u o benutzt werden die Witterungseinfl ssen Regen Frost Schnee Staub und aggressiven Gasen ausgesetzt sind und in denen Explosions und erh hte Brandgefahr besteht ANMERKUNG Wenn der Controller in einem Gestell installiert werden soll m ssen alle vier FuBe abmontiert und ber und unterhalb wenigstens 30 mm 1 2 Zoll Platz gelassen werden Wahrend des Betriebs m ssen Umgebungsbedingungen eingehalten werden folgende e Temperatur 0 C to 45 C e Rel Luftfeuchtigkeit O 95 96 nicht kondensierend 87 900 094 01 H F r den AnschluB des Controllers an die Pumpe muB das optional gelieferte Kabel benutzt werden HV GEBRAUCHSANLEITUNG Detailliertere Hinweise zu weiteren AnschluBarten sowie zum Einsatz von Zusatzkarten finden Sie im Anhang Technical Information Interlock El ANMERKUNG Die Verriegelung des Kabels wird auf der Masse der Pumpe geschlossen Wenn die Verbindung unterbrochen wird wird die Hochspannung deaktiviert Die Verriegelung mit dem entsprechenden Gegenstecker schlie en wenn ein Kabel ohne Verriegelungsstecker benutzt wird GEBRAUCH In diesem Kapitel sind die wichtigsten Betriebsvorg nge aufgef hrt F r weitere Hinweise bez glich Anschlu und Montage des bestellbaren Zubeh rs verweisen wir auf das Kapitel USAGE im Anhang
53. bsarten Der Dual Controller kann in den folgenden Modi arbeiten e LOKAL e FERN E A Ein Ausgang e SERIELL Bei LOKAL werden alle Befehle ber die vordere Schaltafel gegeben Bei FERN E A kommen alle Befehle von einem abgesetzten Computer ber den E A Stecker auf der hinteren Schalttafel Bei SERIELL kommen alle Befehle von einem externen Computer der ber eine serielle Schnittstelle RS 232 422 485 angeschlossen ist GEBRAUCHSANLEITUNG ANMERKUNG Das System speichert welche Betriebsart gew hlt ist und setzt daher bei Wiederanlauf nach einem Stromausfall mit der Betriebsart fort die vor der Unterbrechung gew hlt war ANMERKUNG Wenn eine Betriebsart gew hlt ist nimmt das System nur die in diesem Modus g ltigen Befehle an Es kann aber gleichzeitig Informationen anzeigen und Signale und Daten von allen Schnittstellen entgegennehmen Der Controller kann in folgenden Betriebsarten betrieben werden e START Modus e PROTECTED Modus In der Betriebsart START arbeitet der Controller unabh ngig vom Pumpenzustand bei voller Leistung bis zum voreingestellten Kurzschlu stromwert Diese Betriebsart mu zur Steuerung von Pumpen bei Hochdruck gew hlt werden In der Betriebsart PROTECTED werden der Stromausgangswert des Controllers begrenzt und die Hochspannung abgeschaltet sobald der Strom den voreingestellten Schwellenwert l nger als 0 2 Sekunden berschreitet Bei Normalbetrieb ist dies der bevorzugte
54. bt der Fehler NOT FOUND bestehen Varian zwecks Reparatur oder Austausch kontaktieren 15 73 87 900 094 01 H GEBRAUCHSANLEITUNG BESCHREIBUNG STORUNGSBEHEBUNG HV X ERROR R I O FAULT HV X ERROR PROTECT HV X ERROR SHORT CIRCUIT HV X ERROR OVER VOLT CURR HV X ERROR ZERO MEAS GAUGE X ERROR PANEL INTERLOCK GAUGE X ERROR GAUGE NOT FOUND GAUGE X ERROR GAUGE FAULT GAUGE X ERROR GAUGE NOT CONNECT SYSTEMFEHLER SYSTEM ERROR ER 1 10 Fehler im Kreis f r Fern E As Bei gew hlter Betriebsart PROTECT trat ein Uberstrom auf Im Hochspannungsausgang wurde ein Kurzschluss entdeckt Im Hochspannungsausgang wurden falsche Spannungs und Stromwerte entdeckt Dieser Fehler zeigt falsches Funktionieren des Hochspannungs Steuerkreises an Der Mikroprozessor des Dual Controllers hat festgestellt das an dem Hochspannungsausgang der aktiv sein sollte sowohl Spannung als auch Strom fehlen Der Schalter HV ENABLE steht auf AUS oder das Geh use wurde von der Einheit entfernt Der Mikroprozessor kann die HW zur Gauge Steuerung nicht finden Im angeschlossenen Eyesys Gauge wurde eine St rung entdeckt Sicherstellen dass die externen Anschl sse der Fern E As so verbunden sind wie in diesem Handbuch angegeben Die Einschaltprozedur f r Dual Controller Hochspannung wiederholen Bleibt der Fehler bestehen Varian zwecks Reparatur oder Austausch kontaktieren Wenn n tig den
55. controller table due to an invalid data exchange Interlock Reads the status Read No channel BitField See the Interlock table Status of the interlocks DUAL Controller doesn t reply to this command 60 73 87 900 094 01 H Command Code Value TECHNICAL INFORMATION Command Name Binary ASCII MultiGauge General Usage Commands Compat Protocol ascii hex ascii hex ascii hex local remote ZO 5Ah30h ZO 5Ah30h 10 31h30h HV on off AO 41h30h AO 41h30h 30 30h30h Unit of measure DO 44h30h DO 44h30h 03 30h33h uc firmware version EO 45h30h EO 45h30h 05 30h35h Dsp firmware version E1 66h30h E1 66h30h 04 30h34h device number FO 46h30h FO 46h30h 01 30h31h device type F1 46h30h F1 46h30h 11 31h31h V meas SO 53h30h SO 53h30h 07 30h37h meas TO 54h30h TO 54h30h 08 30h38h Pr meas UO 55h30h UO 55h30h 02 30h32h Vacuum Pump Controller error status z0 7Ah30h zo 7Ah30h 19 31h39h Serial reset 0 5Bh30h 0 5Bh30h 06 30h36h remote error 10 21h30h 10 21h30h 12 31h32h Interlock status O 5Dh30h Jo 5Dh30h 13 31h33h HV on off Command Coding Mode Code Description Write 0 30h HV power off Write 1 31h HV power on in compliance to the Start Protect and Fixed Step selection made using the related commands Read 0 30h HV off Read 1 31h HV on If full compatible MultiVac Read 1 31h HV on in start step V
56. d in BCD 58 73 87 900 094 01 H TECHNICAL INFORMATION MultiGauge Compatible Protocol Host to Dual controller command format header command channel command data terminator Dual controller to Host reply format header response channel command data terminator where Field No of Bytes Value Description Header command 1 23h Header Header response 1 3Eh Header gt Channel 1 30h No Channel 31h High Voltage 1 32h High Voltage 2 33h Gauge 1 34h Gauge 2 35h Serial Communication Command 2 See commands description Data n See commands description Terminator 1 ODh Carriage Return Following are shown a typical command with the answers of the DUAL in the three different formats The command is the status at the the High Voltage 1 Binary Protocol 04 A01 Z 81h 30h 34h 41h 30h 31h 3Fh 7Ah 04 A010u 1h 30h 34h 41h 30h 31h 30h 75h Ascii Protocol 04 AO 0389 40h 30h 34h 41h 30h 31h 3Fh 30h 33h 38h 39h 04 A01 0346 24h 30h 34h 41h 30h 31h 30h 33h 34h 36h Multigauge Compatible Protocol 130 23h 31h 33h 30h 3Fh Dh gt 1300 3Eh 31h 33h 30h 30h Dh 59 73 87 900 094 01 H LIST OF COMMANDS The commands that have been implemented are described in the following tables TECHNICAL INFORMATION General Commands Command Description Mode C
57. des milieux explosifs ou fort risque d inflammabilit NOTE Si le contr leur est install dans une armoire enlever les quatre pieds de mani re ce qu il soit plac avec au moins 30 mm d espace en haut et en bas Pendant le fonctionnement il est n cessaire de respecter les conditions d environnement suivantes e temp rature de 0 C 45 C e humidit relative O 90 non condensante 87 900 094 01 H Pour relier le contr leur la pompe utiliser le cable sp cial fourni en option HV MODE D EMPLOI Voir l appendice Technical Information pour toutes informations d taill es sur ces connexions et sur d autres connexions ainsi que sur l installation des cartes optionnelles Interlock El BRANCHEMENT DE TERRE DE LA POMPE Connexions des masses NOTE L interlock du c ble est serr sur la masse de la pompe Si le branchement est coup la haute tension est interrompue Lorsqu on utilise un c ble sans connecteur d interlock fermer l interlock avec le connecteur de fermeture pr vu cet effet UTILISATION Dans ce paragraphe on indique les principales proc dures op rationnelles Pour tous autres d tails et pour les proc dures concernant des connexions ou des l ments en option se reporter au paragraphe USE de l appendice Technical Information Avant d utiliser le contr leur effectuer toutes les connexions lectri
58. dre l alimentateur du contr leur Dual et ensuite le r allumer Si le probl me persiste contacter Varian pour la r paration ou la substitution V rifier le c ble de liaison entre le contr leur et le mesureur V rifier que le mesureur fonctionne correctement losrsqu il est d branch du contr leur Dual Si le probl me persiste contacter Variant pour la r paration ou la substitution Rebrancher le mesureur et r p ter la proc dure d alimentation Aux fins du Support technique Variant pour le diagnostic Eteindre et allumer le contr leur Dual si le probl me persiste contacter Varian pour la r paration ou la substitution 24 73 87 900 094 01 H GENERAL INFORMATION This equipment is intended for professional use Prior to using this equipment the user must carefully read this Instruction Manual in its entirety and any additional information provided by Varian Varian declines all responsibility for damage caused by the total or partial misuse of the instructions provided herein by the improper use of the equipment by untrained personnel by unauthorized interventions or by negligence in complying with any specific national rule or regulation The following sections provide you with all the information needed to guarantee the operator s safety when using the equipment Detailed information is provided in the appendix entitled Technical Information The following conventions are used in this manual
59. e Commands Compat Protocol ascii hex ascii hex ascii hex emiss id 69h30h id 69h30h 52 35h32h degas on off a0 61h30h a0 61h30h 40 34h30h gas correction cO 63h30h cO 63h30h 50 35h30h auto on do 64h30h do 64h30h 53 35h33h auto on value e0 65h30h e0 65h30h 54 35h34h auto on hv1 10 6Ch30h 10 6Ch30h 55 35h35h auto on value hv1 mo 6Dh30h mo 6Dh30h 56 35h36h auto on hv2 no 6Eh30h no 6Eh30h 57 35h37h auto on value hv2 00 6Fh30h o0 6Fh30h 58 35h38h The following example shows how to turn on the eyesys mini B A GAUGE on the channel 3 Binary Protocol 04 i0 3 1 81h 30h 34h 69h 30h 33h 31h 5Eh ACK 6h Ascii Protocol 04 i0 3 1 0417 40h 30h 34h 69h 30h 33h 31h 30h 34h 31h 37h ACK 6h Multigauge Compatible Protocol 352 1 23h 33h 35h 32h 31h Dh 6h 66 73 87 900 094 01 H Configuration Commands TECHNICAL INFORMATION The following commands are enabled in the configuration mode only This mode is accessed through the serial property command enabling the configuration reset the system to exit Command Description Mode Channels Format Possible Values serial config Enables write access to Read No channel Status 30h normal mode the configuration Write 31h serial configuration parameters mode serial property Serial protocol Read No channel bitField See the protocol characteristics Write properties table sh
60. e Dual power on procedure if the problem persists contact Varian for repair or exchange If necessary select the START mode so that the controller can work until the short circuit current is reached 1 Check the integrity of the HV cable 2 Remove cable from ion pump and check if there is a short circuit in pump or cable 87 900 094 01 H INSTRUCTIONS FOR USE HV X ERROR Incorrect voltage and current values were Repeat the Dual power on procedure if the OVER VOLT CURR detected on the H V output problem persists contact Varian for repair or This error indicates a malfunction of the H V exchange control circuit HV X ERROR The Dual controller s microprocessor has detected Repeat the Dual power on procedure if the ZERO MEAS that both voltage and current were missing from problem persists contact Varian for repair or the H V output that should have been active exchange GAUGE 1 OR GAUGE 2 ERRORS GAUGE X ERROR The HV ENABLE switch is set to OFF or the 1 Setthe HV ENABLE switch to ON and then PANEL INTERLOCK cover has been removed from the unit repeat the power on procedure 2 Make sure that the cover is installed correctly GAUGE X ERROR The microprocessor does not detect the Gauge Switch the Dual controller power supply unit off GAUGE NOT FOUND control H W and then on again If the problem persists contact Varian for repair or exchange GAUGE X ERROR A malfunction has been detected in the con
61. e haut voltage H V il faut que l interlock externe soit ferm connecteur branch Au cas ou aucune connexion externe n est effectu e brancher les pontets de fermeture interlock en dotation avec l unit Proc der comme il suit pour alimenter le contr leur et rendre apte la tension sur les connecteurs de haut voltage HV e introduire le cable provenant de la pompe et le pin d interlock de fermeture du c ble HV dans les connecteurs relatifs sur le panneau post rieur e Disposer l interrupteur d alimentation sur le panneau post rieur en positon ON e Disposer l interrupteur ENABLE HV sur le panneau ant rieur en position ON e Appuyer sur les boutons HV 1 2 ON OFF ON LED s allume NOTE Avec un seul circuit H V install les lignes du display sont d di es la pompe num ro un tandis qu avec deux circuits install s chaque ligne est d di e une pompe diff rente D marrage de la pompe Pour faire d marrer la pompe appuyer sur le bouton HV ON OFF le ON LED s allumera Arr t de la pompe Pour arr ter la pompe appuyer sur le bouton ON OFF le ON LED s teindra ENTRETIEN Le contr leur Dual n a besoin d aucun entretien N importe quel entretien sur l unit doit tre effectu par un personnel technique autoris En cas de panne contacter le Support technique Varian ou bien s abonner au Varian Advanced Exchange Service o le contr leur endommag est remplac par un contr leur recondi
62. ences resulting from the hardware implementation such as the presence of the HV microcontroller the Remote I O the MiniGauge options and the configuration commands NOTE These differences can be limited by using the Serial Property command to set the full compatibility MultiVac bit to 1 Its purpose is to render compatible the already existing programs but introduces certain limitations that advise against its use with new applications In the case of a full compatibility MultiVac the following settings will also be made e Multiple command disable e Reply on write disable e Lexington protocol exclusion 87 900 094 01 H The following table lists the TECHNICAL INFORMATION incompatibilities that remain even though full compatibility MultiVac has been set Command Modification HV on off Cannot be used on the gauges Unit of measure Also implements Pascal 02h reply uC firmware version Identifier for VPc ver 0 1 Device number Pump correspondence table modified Dual error status Returns the Dual error codes according to the table Serial reset Implemented on all versions Full meas hv Eliminated Was available on MultiVac 3 0 and later versions only MultiGauge Full status Eliminated Was available on MultiVac 3 0 and later versions only MultiGauge Remote error Partly implemented Psel Read only also on Spare pump The
63. er will return to the condition it was in when powered off If the high voltage was on at power off when powered back on again the Dual controller will re enable it if allowed to do so by all the interlocks OPERATING MODES Messages Associated to the Mode Button The MODE button is used to change the Dual controllers current operating mode Pressing the MODE button displays the mode currently set Pressing this key cyclically alternates between one of the three modes available LOCAL REMOTE I O SERIAL as shown below _lolplelr alt inle mlolale MERECE ERR NEGRE Re Ea 87 900 094 01 H The three LEDs located underneath the LCD indicate the operating mode that the controller is in NOTE When H V is ON it is not possible to change the Dual controller s operating mode High Voltage Commands If after being powered on the Dual controller is set to the LOCAL mode the LCD will display a message concerning the pump s selected If for example the controller has only one H V channel the following is displayed evils sfolo elei If for example the controller has two H V channels the following is displayed To switch on the high voltage all the interlocks cable Remote I O connector and front panel must first be closed then press the HV1 and or HV2 buttons The voltage and pressure values will be displayed if only one H V card is present If two cards are present the displa
64. eren Schalttafel einsetzen e Den Netzschalter auf der hinteren Schalttafel auf EIN stellen e Den Schalter ENABLE HV auf der vorderen Schalttafel auf EIN stellen e Die Tasten HV 1 2 ON OFF dr cken die ON LED geht an ANMERKUNG Wenn nur ein Hochspannungskreis installiert ist gelten beide Zeilen auf dem Display f r die Pumpe Nr 1 Sind zwei Kreise installiert bezieht sich jede auf eine der beiden Pumpen Starten der Pumpe Zum Starten der Pumpe auf die entsprechende Taste HV ON OFF dr cken die ON LED geht an Stoppen der Pumpe Zum Stoppen der Pumpe auf die entsprechende Taste HV ON OFF dr cken die ON LED geht aus WARTUNG Die Dual Controller sind wartungsfrei Eventuell erforderliche Eingriffe m ssen von dazu befugtem Fachpersonal ausgef hrt werden Bei St rungen kann der Varian Reparaturdienst in Anspruch genommen werden oder schlie en Sie einen Vertrag f r Varian Advanced Exchange Service ab mit dem ein defekter Controller gegen einen general berholten ausgetauscht wird Eine eventuelle Verschrottung mu unter Einhaltung der einschl gigen landes blichen Vorschriften erfolgen 14 73 GEBRAUCHSANLEITUNG ENTSORGUNG Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit
65. format header response length command channel data checksum Field No of bytes Value Description Header command 1 81h Header for the serial RS232 RS422 81h AOh Header and address for the serial RS485 129 160 Header response 1 01h Header for the serial RS232 RS422 01h 20h Header and address for the serial RS485 Length 2 Data packet length in BCD command channel data fields only Command 2 See commands description byte 0 command byte 1 subcommand Channel 1 30h No channel 31h High Voltage 1 32h High Voltage 2 33h Gauge 1 34h Gauge 2 35h Serial Communication Data n See commands description Checksum 1 XOR of all bytes checksum excluded in and with 7Fh ASCII Protocol Host to Dual controller command format header command length command channel data checksum Dual controller to Host reply format header response length command channel data checksum Field No of bytes Value Description Header command 1 40h Header Header response 1 24h Header Length 2 Data packet length in BCD command channel data fields only Command 2 See commands description byte 0 command byte 1 subcommand Channel 1 30h No channel 31h High Voltage 1 32h High Voltage 2 33h Gauge 1 34h Gauge 2 35h Serial Communication Data See commands description Checksum 4 Sum of all bytes checksum excluded represente
66. hannels Format Possible Values Local remote Local or serial Read Write No channel Status 30h local operating mode 31h Remote UO 32h serial HV on off On off Read Write HV1 HV2 Status See HV on off command High Voltage in the codes table Unit of measure Unit of measure Read Write No channel Status 30h Torr on Dual controller 31h mBar 32h Pascal uC firmware uC micro central Read No channel String 18 characters version firmware version e g VPo 1 0 24 04 98 DSP firmware Versione firmware Read No channel String 16 characters version DSP micro HV e g VPd 1 0 24 04 98 Device number Pump number set Read Write HV1 HV2 Status See device table on the specified Gauge1 Gauge2 channel Serial Device type Type of device set Read Channel no String See device table on the specified HV1 HV2 channel Gauge1 Gauge2 Serial V meas Voltage Read HV1 HV2 Integer 00000 if powered off measurement V meas Current Read HV1 HV2 Exp A 0 0E 00 if powered off measurement Pr meas Pressure Read HV1 HV2 Exp 0 0E 00 if powered off measurement Gauge1 Gauge2 Torr Dual Controller Reads the error Read HV1 HV2 Integer See Error Status Table Error Status status on the Gauge1 Gauge2 selected channel Serial no channel Serial reset Resets the Dual write No channel Status 30h not ok controller no reset 31h ok reset performed Remote error Error returned by Reply No channel Integer See the Protocol error the Dual
67. icated with the letter s query HV1 state HV2 state Vmax ch1 Vmax ch2 header A01 ssssssssA02 ssssssssH01 ssssssssH02 ssssssss chk reply HV1 off HV2 on Vmax ch1 5000V Vmax ch2 7000V header A010ssssssssA021ssssssssH0105000 ssssssssH0207000ssss chk TECHNICAL INFORMATION Automatic Serial Mode Setting the appropriate bit via the Serial Property command enables the automatic Serial Mode function When the Dual receives a serial write command it automatically switches to the Serial Mode state in which it can accept the serial command If a read command is received instead the operating mode remains unaltered If this bit is not set the serial write command is not accepted the reply will be an error code and the Dual will remain in the selected operating mode either Local or Remote I O Compatibility with MultiVac The Binary and ASCII protocols are implemented for the most part by the protocol used on the MultiVac but are characterized by certain differences consisting of new features and certain Dual controller structural variations with respect to the MultiVac The new features implemented are the following Mnultiple commands Ack Nack mode Reply on write mode Even and odd parity management New serial commands MiniGauge serial commands Configuration serial commands The structural variations mostly concern the command set and formats In particular it is not possible to make up for the differ
68. if SERIAL was selected during the channel selection phase As for the previous menu also in this case you can use the CHANGE button to change the parameters and the ENTER button to confirm them Baud Rate Selection sel felafel rlalrle It is possible to select between 9600 4800 2400 and 1200 Address Selection e p p n e s s mojoe AAA Parity Selection sel 1 1 I else The following values can be chosen NONE ODD EVEN 54 73 TECHNICAL INFORMATION SERIAL INTERFACE General After having described the connector and the pinouts in the different configurations this section provides information on Dual controllers serial interface In particular bear in mind that compatibility with the existing protocols on the MultiVac Binary and ASCII has been maintained as far as the data format and different commands are concerned Furthermore a new protocol called MultiGauge Compatible is introduced It derives from the Mini B A Eye Sys specifications and implements the data format above all while the majority of the commands are new General Definitions of the Hardware Protocol The Dual controller implements the following data exchange protocols Binary Derived from the MultiVac s binary protocol Ascii Derived from the MultiVac s ASCII protocol MultiGauge Derived from the protocol used for the Compatible MiniGauge Eyesys Protocol With respect
69. ighe 2 LED verdi che indicano la modalit operativa selezionata LED Local acceso quando selezionata la modalit operativa LOCAL LED Serial acceso quando selezionata la modalit operativa SERIAL LED Remote acceso quando selezionata la modalit operativa REMOTE 1 0 87 900 094 01 H 3 Interruttore HV ENABLE attivo indipendentemente dalla modalit operativa selezionata Per alimentare l alta tensione dal pannello di controllo dal Remote I O o dalla linea seriale occorre che l interruttore HV ENABLE sia predisposto nella posizione ON Pulsanti HV1 on off e HV2 on off utilizzati per abilitare disabilitare la funzionalit dei circuiti di alta tensione LED quando acceso il LED ON il relativo circuito HV alta tensione abilitato mentre quando acceso il LED PROT stata selezionata la modalit operativa per la pompa corrispondente ISTRUZIONI PER L USO Gruppo di sei pulsanti di funzione con le seguenti caratteristiche Pulsante ENTER utilizzato per confermare una selezione che stata effettuata con il pulsante CHANGE Pulsante CHANGE CONFIG utilizzato per visualizzare tutte le opzioni disponibili Pulsante MENU utilizzato per entrare nel menu di configurazione Pulsante MODE utilizzato per selezionare la modalit operativa Pulsanti START PROT 1 e START PROT 2 utilizzati per selezionare la modalit Start Protect per la pompa corrispondente Procedura di regolazi
70. inhaltung Sch den an der Anlage entstehen Grundmodell 120 VWs mit 1 929 7010 k nnen HV Karte m positiver Polung A AAA es A und RS 232 Karte ANMERKUNG Grundmodell 120 VWs mit 2 929 7011 HV Karten m positiver Polung Die ANMERKUNGEN enthalten wichtige Informationen und einer RS 232 Karte die im Text hervorgehoben werden Grundmodell 230 VWs mit 1 929 7012 HV Karte m negativer Polung und RS 232 Karte BESCHREIBUNG DES CONTROLLERS Grundmodell 230 VWs mit 2 929 7013 Der Dual Controller der Firma Varian ist ein Ger t zur HV Karten m negativer Polung Steuerung von flexiblen lonenpumpen das nach den und einer RS 232 Karte spezifischen Angaben des Kunden fabrikseitig Grundmodell 230 VWs mit 1 929 7014 vorkonfiguriert wird HV Karte m positiver Polung Der Dual Controller kann in folgender Konfiguration und RS 232 Karte SESCH Grundmodell 230 VWs mit 2 929 7015 f HV Karten m positiver Polung e Vordere Schalttafel mit Tastenfeld Display 16x2 und einer RS 232 Karte und Mikroprozessor Karte e Fern E A Karte e Karte f r seriellen Datenaustausch Option e Netzger t 24 V 20 W f r das Eyesys Gauge Option Der Dual Controller kann bis zu 2 lonenpumpen von 20l s bis 500 l s mit positiver oder negativer Polung steuern Er gew hrleistet eine zuverl ssige Ablesung von d Druckwerten bis zu 10 Torr und verbessert die e Stromversorgungskarte mit integriertem DSP zur Leistung der Pumpe in
71. ionnement du circuit de contr le HV Le microprocesseur du contr leur Dual a relev que soit la tension que le courant ne sont pas pr sents la sortie HV qui devait tre active L interrupteur HV ENABLE est plac sur OFF ou bien la couverture a t enlev e par l unit Le microprocesseur ne rel ve pas PHW de gestion mesureur Un dysfonctionnement a t relev dans le mesureur Eyesys Le mesureur a t d branch par le contr leur Dual SYSTEM ERRORS 1 V rifier que les connecteurs externes Remote I O soient reli s comme d crit dans ce document R p ter la proc dure d allumage du contr leur Dual si le probl me persiste contacter Variant pour la r paration ou la substitution Si n cessaire s lectionner le mode START de mani re ce que le contr leur puisser atteindre le courant de court circuit Contr ler l int grit du c ble de la haute tension D tacher le c ble de la pompe ionique et v rifier s il y a un cout circuit dans la pompe ou dans le c ble R p ter la proc dure d allumage du contr leur Dual si le probl me persiste contacter Variant pour la r paration ou la substitution R p ter la proc dure d allumage du contr leur Dual si le probl me persiste contacter Varian pour la r paration ou la substitution Placer l interrupteur HV ENABLE sur ON et r p ter la proc dure d allumage V rifier que la couverture soit install e correctement Etein
72. le on connector HV2 Fischer HV1 connector Interlock for the HV cable on connector HV1 37 pin connector for Remote I O HV2 37 pin connector for Remote I O HV1 9 pin Multi Gauge Eyesys connectors 9 pin serial interface connector Power cord socket Main power switch EO Ono Oy Os CONN s ne OPERATING PROCEDURES Operating Modes The Dual controller can work in the following operating modes e LOCAL e REMOTE I O input output e SERIAL In the LOCAL mode all the commands are given through the front panel In the REMOTE UO mode all the commands are given from a remote computer through the input output connector located on the rear panel In the SERIAL mode All the commands are given from an external computer through the RS 232 422 485 serial line NOTE The selected mode of operation is stored by the system and therefore even if a power failure occurs when the power is restored the Dual controller will return to the mode of operation that it was in prior to the blackout INSTRUCTIONS FOR USE NOTE When any one mode of operation is selected the system will only accept the commands of that related mode while being able to simultaneously display information and acquire signals and data from all the interfaces The unit is designed to work in the following modes e START mode e PROTECTED mode In the START mode the controller provides all the power regardless of the pump s conditions until reaching the shor
73. ler esegue un test di autodiagnostica e visualizza uno dei seguenti messaggi riportati nella tabella seguente MESSAGGIO DESCRIZIONE AZIONE CORRETTIVA GUASTI DELL ALTA TENSIONE 1 O 2 HV X ERROR PANEL INTERLOCK HV X ERROR REMOTE INTERLOCK HV X ERROR CABLE INTERLOCK HV X ERROR HV NOT FOUND HV X ERROR HV FAULT HV X ERROR HV OVERTEMP HV X ERROR REMOTE UO NOT FOUND HV X ERROR R I O FAULT HV X ERROR PROTECT HV X ERROR SHORT CIRCUIT L alta tensione HV stata spenta da un interlock ricevuto dal pannello frontale o dalla copertura l interruttore HV ENABLE predisposto su OFF oppure copertura rimossa dall unit L alta tensione HV stata spenta da un interlock ricevuto dal Remote I O L alta tensione HV stata spenta a causa di un interlock del cavo HV Non stato rilevato il circuito di alta tensione HV L alta tensione HV stata spenta a causa di un guasto nel circuito HV sensori di temperatura all interno del controller Dual hanno rilevato una temperatura che va oltre i limiti di sicurezza Non stata rilevata la scheda Remote I O Guasto al circuito Remote I O scattata la protezione di sovracorrente quando stata selezionata la modalit operativa PROTECT stato rilevato un corto circuito sull uscita H V 7173 1 Impostare l interruttore HV ENABLE su ON e ripetere la procedura di accensione dell alta tensione H
74. lit op rationnelle o se trouve le contr leur e Dans le mode LOCAL toutes les commandes sont fournies par l interm diaire du panneua frontal e Dans le mode ELOIGNE I O toutes les commandes sont fournies par l interm diaire de signaux I O relay contacts directement sur le connecteur Remote Control plac sur le panneau post rieur e Dans le mode SERIEL toutes les commandes sont fournies par l interm diaire d un ordinateur locale reli l interface RS 232 422 485 EMMAGASINAGE Pour transporter et emmagasiner le contr leur il faut observer les conditions suivantes d environnement e temp rature de 20 C 70 C e humidit relative O 95 non condensante PREPARATION POUR L INSTALLATION Le contr leur est fourni dans un emballage de protection sp cial si l on constate des dommages pouvant s tre produits pendant le transport contacter tout de suite le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particulierement ne pas laisser tomber le contr leur et ne lui faire subir aucun choc Le mat riel est entierement recyclable et il est conforme aux directives CEE 85 399 en mati re de protection de l environnement Emballage du contr leur 18 73 MODE D EMPLOI Le contr leur Dual est fabriqu en usine afin de pouvoir fonctionner selon les voltage suivants d alimentation e Mod les 929 7000 1 2 3 et 929 7008 09 10 11 tension d entr e de 100 120
75. lle masse NOTA Liinterlock del cavo viene chiuso sulla massa della pompa Se il collegamento interrotto l alta tensione viene disabilitata Chiudere l interlock con l apposito contro connettore se si utlizza un cavo senza connettore di interlock USO In questo paragrafo vengono riportate le principali procedure operative Per ulteriori informazioni e per le procedure riguardanti collegamenti o particolari opzioni fare riferimento al paragrafi UTILIZZO nell appendice Technical Information Prima di utilizzare il controller effettuare tutti i collegamenti elettrici e pneumatici e fare riferimento al manuale della pompa collegata ra Per evitare danni alle persone ed all apparecchiatura nel caso in cui la pompa debba essere posizionata su di un tavolo assicurarsi che quest ultimo sia stabile Non mettere mai in funzione la pompa se la flangia di ingresso non collegata al sistema o se non chiusa con la flangia di chiusura Controlli ed indicatori del pannello frontale del controller Dual Nella seguente figura viene riportato il pannello frontale del controller Dual La tabella che segue indica la definizione e la funzionalit dei controlli e indicatori o mr ENTER CONFIG Enable HV ODIO OFF Pannello frontale Legenda 1 Display a cristalli liquidi retro illuminato 16 caratteri x 2 r
76. mit 1 929 7000 enthaltenen Hinweise unsachgem em Gebrauch HV Karte m negativer Polung durch ungeschultes Personal nicht autorisierten Eingriffen und MiBachtung der einheimischen hier zur Grundmodell 120 VWs mit 2 929 7001 Geltung kommenden Bestimmungen bernimmt die HV Karten m negativer Polung Firma Varian keinerlei Haftung 7 In den folgenden Abschnitten sind alle erforderlichen ii E Md Informationen f r die Sicherheit des Bedieners bei der aR Eod Anwendung des Ger ts aufgef hrt Detaillierte Grundmodell 120 VWs mit 2 929 7003 technische Informationen sind im Anhang Technical HV Karten m positiver Polung aan epale Grundmodell 230 VWs mit 1 929 7004 In dieser Gebrauchsanleitung werden Sicherheits HV Karte m negativer Polung hinweise folgendermaBen hervorgehoben Grundmodell 230 VWs mit 2 929 7005 HV Karten m negativer Polung N GEFAHR Grundmodell 230 VWs mit 1 929 7006 HV Karte m positiver Polung Die Gefahrenhinweise lenken die Aufmerksamkeit des Grundmodell 230 VWs mit 2 929 7007 Bedieners auf bestimmte Vorg nge oder Praktiken die positiven HV Karten bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnen Grundmodell 120 VWs mit 1 929 7008 HV Karte m negativer Polung und RS 232 Karte US ACHTUNG Grundmodell 120 VWs mit 2 929 7009 a HV Karten m negativer Polung Die Warnhinweise vor bestimmten Prozeduren machen und einer RS 232 Karte den Bediener darauf aufmerksam da bei Nichte
77. n detail the nature of the malfunction to assist us in performing failure analysis NOTA Su richiesta questo documento disponibile anche in Tedesco Italiano e Francese REMARQUE Sur demande ce document est galement disponible en allemand italien et francais HINWEIS Auf Aufrage ist diese Unterlage auch auf Deutsch Italienisch und Franz sisch erh ltlich France and Benelux Varian s a 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 Les Ulis cedex Orsay 91941 France Tel 33 1 69 86 38 84 Fax 33 1 69 86 29 88 From Benelux Tel 31 118 67 15 70 From Benelux Fax 31 118 67 15 69 Canada Central coordination through Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Toll Free 1 800 882 7426 China Varian Technologies Beijing Rm 1648 Central Tower South Wing Beijing Junefield Plaza No 10 XuanWuMenWai Street Beijing 100052 P R China Tel 86 10 63108550 Fax 86 10 63100141 Toll Free 800 820 6556 Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 6151 703 353 Fax 49 6151 703 302 India Varian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 28521171 Fax 91 11 28521173 Italy Varian Inc Vacuum Technologies Via F lli Varian 54 1004
78. nected Checkthe connection cable between the Dual GAUGE FAULT Eyesys Gauge controller and Gauge Make sure that the Gauge works correctly when disconnected from the Dual controller If the problem persists contact Varian for repair or exchange GAUGE X ERROR The Gauge has been disconnected from the Dual Reconnect the Gauge and repeat the power on GAUGE NOT CONNECT controller procedure SYSTEM ERRORS SYSTEM ERROR For Varian Service diagnostic purpose only Switch OFF and ON again the power to the DUAL system if ER 1 10 the problem persists contact Varian for repair or exchange 32 73 87 900 094 01 H DUAL CONTROLLER DESCRIPTION The Dual Controller base is available in versions which differ in the factory set input voltage and in the internal configuration e Models 929 7000 1 2 3 and 929 7008 09 10 11 require an input voltage from 100 to 120 Vac frequency of 50 60 Hz e Models 929 7004 5 6 7 and 929 7012 13 14 15 require an input voltage from 200 to 240 Vac frequency of 50 60 Hz The models are provided with a front panel with an LCD alphanumeric display to indicate the operating conditions parameters of the lon pump and a keyboard and a rear panel with input output connectors The figure below shows the Dual controller The controller unit can be operated via e Front panel switches e Remote signals via rear panel connectors e RS 232 485 422 serial link option A maximum power of 420 W is delivered simul
79. nel The contrast of the display is factory set Anyway a contrast adjustment will be needed if one of the following conditions would be true e backlights are on but no characters appear on the display e backlights are on but a black squares matrix appear on the display VARIAN Adjustment needed In order to perform the display contrast regulation power on the controller and after the startup press the ENTER button on the front panel Then keep it pushed until the proper setting is obtained Releasing the enter button will cause the storage of the contrast value into the unit memory CHANGE db CONFIG VARIAN S A wes Contrast LCD Adjustment START PROT2 When the unit enters into the contrast adjustment modality a specific message will appear on the display and all the LED O OG 0 indicators placed under the diplay will start to blink together b DE DUAL O 7H 28 73 87 900 094 01 H Rear Panel of the Dual Controller The following figure shows the controls and connections on the rear panel of the Dual controller The configuration shown in the following figure consists of two H V cards two Set Point Remote Control cards and one RS 232 422 Computer Interface card and the connection to two Eyesys Gauges Rear Panel Fuse holder compartment Fischer HV2 connector Interlock for the HV cab
80. nerhalb des ganzen Verwaltung der Ausgangsspannung Arbeitsbereichs e Hochspannungskarte n Mit zwei optionalen Eyeses Normalen k nnen Druckmessungen unterschiedlicher Genauigkeiten in verschiedenen Bereichen vorgenommen werden Der Dual Controller kann in Modus LOKAL FERN E A und SERIAL ber die Schnittstellen RS 232 422 und 485 gesteuert werden die RS232 und RS485 Karte sind Optionen 9 73 87 900 094 01 H ANMERKUNG Zum Bestellen von Systemen mit RS 422 485 und Eyesys Gauge ein Verkaufsb ro von Varian kontaktieren Wie dem System Steuerbefehle Ubergeben werden hangt von der Betriebsart des Controllers ab e Im LOKAL Modus werden alle Befehle ber die vordere Schalttafel eingegeben e Im Modus Fern E A kommen alle Befehle ber Fern E A Signale Relaiskontakte die an den Stecker f r Fernsteuerung auf der R ckseite angeschlossen sind e Im SERIAL Modus kommen die Befehle ber einen lokalen Computer der an die RS 232 422 485 Schnittstelle angeschlossen ist LAGERUNG Bei Transport und Lagerung der Controller m ssen folgende Umgebungsbedingungen eingehalten werden e Temperatur 20 C bis 70 C e Rel Luftfeuchtigkeit 0 95 96 nicht kondensierend VOR DER INSTALLATION Der Controller wird mit einer speziellen Schutzverpackung geliefert Eventuelle Transport sch den m ssen sofort der zust ndigen rtlichen Verkaufsstelle gemeldet werden Das Verpackungsmaterial mu korrekt entsorgt werden Es is
81. now press the CHANGE button to modify the exponent and then press ENTER to confirm the selection made Storing these values allows the Dual to convert the pump current into pressure values even if the operating voltage is different from 5000 V The correction factor due to the different voltage is automatically applied by the Dual software in order to obtain a continuous correct pressure reading 51 73 If the STEP V mode is selected and the high voltage is disabled the four parameters that regulate the operating mode two voltage values and two current values can be displayed and changed Vstep 1 can be changed for the SPARE pump only ahh v sjtjep s Ov Istep 1 can be changed for the SPARE pump only vis tleh cab PERCE REE orco Vstep 2 can be changed for the SPARE pump only vis voliepj cv BEARBEITEN Istep 2 can be changed for the SPARE pump only vit Iislkielels ab At this point the unit switches to the set point selection menu the set points can be changed on all pump models 87 900 094 01 H Set point 1 or Set point 2 selection valid for all pumps ail ele tere morir At this point it is possible to use the CHANGE and ENTER buttons to change and confirm the values for the mantissa and exponent Pressing the ENTER button to confirm the selection made returns you to the menu of the voltages on the two channels
82. off et HV2 on off boutons utilis s pour brancher d brancher la fonctionnalit des circuits de haute tension LEDs lorsque le LED ON est allum le circuit relatif HV haute tension haut voltage est branch lorsque le LED PROT eest allum la modalit op rationnelle pour la pompe correspondante a t s lectionn e MODE D EMPLOI Groupe de six boutons de fonction avec les caract ristiques suivantes bouton ENTER utilis pour confirmer une s lection qui a t effectu e avec le bouton CHANGE bouton CHANGE CONFIG utilis pour visualiser toutes les options diponibles bouton MENU utilis pour entrer dans le menu de configuration bouton MODE utilis pour s lectionner la modalit op rationnelle boutons START PROT 1 et START PROT 2 utilis s pour s lectionner la modalit Start Protect pour la pompe correspondante Proc dure de r glage du contraste de l cran LCD du el Contr leur pompe ionique DUAL Le contr leur pompe ionique DUAL est pourvu d un cran LCD install dans le panneau ant rieur de l unit Le contraste de l afficheur nonobstant le fait qu il est d j tabli l usine aura besoin d tre r gl si une des conditions suivantes a lieu e Laretroillumination est active mais sur l afficheur n est affich aucun caract re e Laretroillumination est active mais sur l afficheur est affich e une matrice carreaux noirs VARIAN est n cessaire d effectuer l
83. om China Toll Free 800 820 8266 vtc technical support varianinc com Japan Toll Free 0120 655 040 vtj technical support varianinc com Korea Toll Free 080 222 2452 vtk technical support varianinc com Taiwan Toll Free 0 800 051 342 vtw technical support varianinc com Worldwide Web Site Catalog and Order On line www varianinc com Representative in most countries ap ni VARIAN
84. one del contrasto dello schermo LCD del Controller a pompa ionica DUAL Il Controller a pompa ionica DUAL dotato di uno schermo LCD installato nel pannello anteriore dell unit Il contrasto del display nonostante sia impostato dalla fabbrica necessiter di essere regolato qualora si verifichi una delle seguenti condizioni La retroilluminazione attiva ma sul display non visualizzato nessun carattere La retroilluminazione attiva ma sul display visualizzata una matrice a quadretti neri Per eseguire la procedura di VARIAN regolazione del contrasto del necessario eseguire la procedura di regolazione display accendere il controller e al termine dell inizializzazione premere il tasto ENTER collocato sul pannello anteriore tenendolo premuto fino a quando non ottenuta l impostazione desiderata Rilasciando il pulsante ENTER il valore di contrasto sar salvato nella memoria dell unit ES VARIAN xe en woe Contrast LCD SR Adjustment START ff START PROT1 PROT2 E E 6 3 OPA O i Quando l unit accede alla modalit di regolazione del contrasto il display visualizza il relativo messaggio e i LED del display iniziano a lampeggiare 87 900 094 01 H Pannello posteriore del controller Dual La seguente figura riporta i controlli e connettori sul pannello posteriore del controller Dual La configura
85. ort circuit Short circuit voltage Read No channel Integer 1 7000 volt Write short circuit Short circuit current Read No channel Integer mA 1 400 current Write short circuit Short circuit intervention Read No channel Integer s 10 6000 step 10 time time Write expressed in ms x10 protect Protect intervention time Read No channel Integer s 10 6000 step 10 time Write expressed in ms x10 protect Protect at power on Read No channel Integer 10 6000 step 10 delay function enable delay Write expressed in ms x10 time prDeita1 f I V Pressure Read No channel Exp 0 0 10 0 calculation constant Write prDeita2 f l V Pressure Read No channel Exp 0 0 10 0 calculation constant Write P100nA Pressure value at Read HV1 HV2 Exp Torr 1 0E 15 5000V with I 100nA Write min 1 1E 9 P1uA P1uA Pressure value at Read HV1 HV2 Exp Torr P100nA P10pA in read 5000V with I 1uA Write on SPARE pump P10uA Pressure value at Read HV1 HV2 Exp Torr max 1 2E 9 P10uA 5000V with I 10uA Write min 7 4E 8 P100pA P100uA Pressure value at Read HV1 HV2 Exp Torr P10uA P1mA in read on 5000V with I 100uA Write SPARE pump PimA Pressure value at Read HV1 HV2 Exp Torr P100uA P10mA in read 5000V with I 1mA Write on SPARE pump P10mA Pressure value at Read HV1 HV2 Exp Torr max 7 5E 8 P1mA 5000V with I 10mA Write min 7 4E 5 P100mA P100mA Pressure value at Read HV1 HV2 Exp Torr P10mA P400mA in read 5000V with I 100m
86. osservanza totale o anche parziale delle istruzioni fornite in questo documento all uso improprio dell apparecchiatura da parte di personale non addestrato all esecuzione di Le configurazioni disponibili sono elencate di seguito DESCRIZIONE PART NUMBER Modelli Dual Unit base da 120 Vca con 1 scheda alta 929 7000 tensione negativa Unit base da 120 Vca con 2 schede alta 929 7001 tensione negative interventi non autorizzati o alla mancata osservanza Unit base da 120 Vca con 1 scheda alta 929 7002 delle specifiche normative nazionali tensione positiva i paragrafi seguenti sn nn tutte le Unit base da 120 Vca con 2 schede alta 929 7003 informazioni necessarie a garantire la sicurezza tensione positive Unit base da 230 Vca con 1 scheda alta 929 7004 tensione negativa Unit base da 230 Vca con 2 schede alta 929 7005 tensione negative dell operatore durante l utilizzo dell apparecchiatura Nel appendice Technical Information vengono fornite delle informazioni dettagliate Questo manuale utilizza le seguenti convenzioni Eu messaggi di pericolo attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali Unit base da 230 Vca con 1 scheda alta 929 7006 tensione positiva Unit base da 230 Vca con 2 schede alta 929 7007 tensione positive Unit base da 120 Vca con 1 scheda alta 929
87. pes ioniques modulaires et flexibles L unit est fabriqu e en usine selon les exigences du client Le contr leur Dual de la Variant est disponible avec e Un panneau frontal avec clavier display 16x2 et carte processeur e Carte de I O loign e e Carte de communication serielle partielle e Alimentateur 24 Vcc 20 W pour le mesureur Eyesys Gauge optionnel e Carte d alimentation avec DSP int gr pour la gestion des tensions en sortie e Carte de haute tension 17 73 MODE D EMPLOI Les configurations sont indiqu es dans le tableau suivant NUMERO DE DESCRIPTION PIECE Mod les Dual Unit de base 120 Vac avec 1 929 7000 carte haute tension haut voltage HV n gative Unit de base 120 Vac avec 2 929 7001 cartes haute tension HV n gative Unit de base 120 Vac avec 1 929 7002 carte haute tension HV positive Unit de base 120 Vac avec 2 929 7003 carte haute tension HV positive Unit de base 230 Vac avec 1 929 7004 carte haute tension Hv n gative Unit de base 230 Vac avec 2 929 7005 cartes haute tension HV n gative Unit de base 230 Vac avec 1 929 7006 carte haute tension HV positive Unit de base 230 Vac avec 2 929 7007 cartes haute tension HV positive Unit de base 120 Vac avec 1 929 7008 929 7009 929 7010 929 7011 carte haute tension HV n gative et carte RS 232 Unit de base 120 Vac avec 2 cartes haute tension HV n gative
88. pressing the related button on the front Remote I O Connector 12 31 panel 3 Connect the HV cable with the corresponding The following figures show possible interconnections cable interlock that switch on the HV through the Remote I O 4 Press the HV ENABLE button on the front panel e 12 Confirm 31 e 13 ee 32 Output OFF 0 Interlock e e 30 L__ 23 Power Supply e 6 Remote I O Connection DUAL 42 73 87 900 094 01 H TECHNICAL INFORMATION Provided below is the H V switch on timing sequence S Interlock Closed Open S HV ON OFF Closed Open S Confirm Closed Open Timing NOTE If S1 and S2 are not both closed a transition Open to Closed of S3 does not switch on the H V 43 73 87 900 094 01 H TECHNICAL INFORMATION Optional Male Serial Connector The Dual controller uses an RS 232 422 485 serial interface The following tables provide this connector s pinout in the different configurations Y 5 RS422 Transmit Data neg Receive Data pos Transmit Data pos N C Signal Ground N C N C N C Receive Data neg I 5 N C Receive data Transmit data N C Signal Ground N C N C N C N C O O N O OI B 0O N 1 2 3 4 5 6 7 8 9 elels Oo RS422 Connector Li
89. ques et pneumatiques et se reporter la notice de la pompe connect e IN DANGER Afin d viter des accidents aux personnes et l appareillage dans le cas o la pompe doit tre plac e sur une table v rifier qu elle soit stable Ne jamais faire fonctionner la pompe si la bride d entr e n est pas reli e au syst me ou n est pas ferm e avec la bride de fermeture Contr les ou indicateurs du panneau frontal du contr leur Dual Le tableau qui suit indique la d finition et la fonctionnalit des contr les et des indicateurs Fr ENTER CONFIG Enable HV 4 OZUALO o OFF Commandes du Tableau Frontal Legende 1 Display cristaux liquides verso illumin 16 caract res x 2 lignes 2 LED verts qui indiquent la modalit op rationnelle s lectionn e LED local allum lorsque la modalit op rationnelle LOCAL est s lectionn e LED S riel allum lorsque la modalit op rationnelle SERIELLE est s lectionn e LET Eloign allum lorsque la modalit op rationnele ELOIGNE UO est s lectionn e 87 900 094 01 H Interrupteur HV ENABLE actif ind pendamment de la modalit op rationnelle s lectionn e Pour alimenter la haute tension du panneau de contr le du REMOTE 1 0 ou de la ligne s rielle il faut que l interrupteur HV ENABLE soit plac dans la position ON HV1 on
90. re installed the miniB A can be powered on when the Convector pressure is below a predetermined threshold MiniB A Gauge Auto On Auto On Pressure Threshold Selection m el1 elolafelalulelrlolrlr MORE Proceed as follows to activate the High Voltage in the event that the pressure measured by the MiniB A Gauge is lower than a certain threshold 87 900 094 01 H TECHNICAL INFORMATION High Voltage Auto On Auto ON H V Pressure Threschold Select meli alult olo n ali meli efo nfa vi cr o r r HORSES ende p TEES S xti dep lee 4 lr At this point the voltage values are displayed The detailed sequence can be seen in the following flow chart NOT INSTALLED MiniGauge MINI B A Type Selection CONVECTORR Emission On Off Selection Calibration Selection Atmosphere Degas Calibration Selection y Vacuum Calibration Gas Type Selection hoo I7 Manual Setting Auto on HV1 Selection Is the other Gauge a Convector Pon Hv1 Setting Auto on Gauge Selection Auto on HV2 Selection Pon Gauge Y Setting Pon Hv2 Setting ex Main Menu 53 73 87 900 094 01 H Messages Associated to the Menu Button Related to the Serial Channel The serial menu described below can be accessed
91. re le courant de court circuit Cette modalit de fonctionnement doit tre utilis e pour actionner la pompe haute pression Dans le mode PROTECTED le contr leur limite le courant la sortie et teint la haute tension lorsque la valeur du courant d passe le seuil pendant plus de 0 2 secondes Dans des conditions de fonctionnement normal on pr f re utiliser cette modalit puisque en cas de panne de pompe ionique ou c ble caus e par un court circuit ou une haute charge la haute tension s teint Se r f rer l appendice Technical Information pour des informations d taill es sur les modalit s op rationnelles Mode de fonctionnement Step Le mode Step doit tre choisi pour am liorer les performances de la pompe et effectuer des lectures une pression tr s basse sans influer sur le courent de dispersion Dans le mode Step le Dual contr leur choisit la tension en sortie la plus convenable selon la pression dans la pompe voir le dessin suivant o gt e Lu Es E ES o gt E D o E gt o 8 1x10 1x10 1x10 1x10 1x10 1x10 PRESSURE Torr Changement de la tension en sortie par opposition a la pression 87 900 094 01 H Allumage du contr leur du panneau frontal modalit LOCAL NOTE Pour allumer l
92. sart aktiv Um die HV von der vorderen Schalltafel den Fern E As oder ber die serielle Verbindung aus ENTER Taste zum Best tigen der mit der CHANGE einzuschalten muss dieser Schalter auf EIN stehen Taste vorgenommenen Wahl CHANGE CONFIG Taste zur Anzeige aller 4 Tasten HVT ein aus und HV2 ein aus benutzt zum Ein verf gbaren Optionen Ausschalten der Operation der Hochspannungskreise MENU Taste zum Zugriff auf das 5 LEDs wenn die LED EIN an ist ist der betreffende Konfigurationsmen Hochspannungskreis aktiviert Ist die LED PROT an MODE Taste zur Wahl der Betriebsart wurde f r die betreffende Pumpe der Schutzmodus Tasten START PROT 1 und START PROT 2 zur gew hlt Wahl des Anlaufschutz Modus f r die betreffende Pumpe Kontrasteinstellung auf dem LCD Bildschirm des Controllers mit lonenpumpe DUAL Der Controller mit lonenpumpe DUAL ist mit einem LCD Bildschirm ausgestattet der sich auf der vorderen Schalttafel der Steuereinheit befindet Bei Eintreten einer der folgenden Bedingungen muss der Displaykontrast neu geregelt werden auch wenn er werkseitig voreingestellt ist e Die Beleuchtung von hinten ist in Betrieb genommen aber auf dem Display erscheint kein Buchstabe e Die Beleuchtung von hinten ist in Betrieb genommen aber auf dem Display erscheint eine Matrize mit schwarzen K stchen VARIAN Es muss eingestellt werden Zur Displaykontrasteinstellung auf den Controller zugreifen und n
93. sione 1 73 Il controller Dual in grado di gestire fino a due pompe ioniche dalla 20 l s alla 500 l s con polarit positiva o negativa Permette di eseguire delle letture affidabili di pressione fino a 107 Torr ottimizzando quindi le prestazioni della pompa sull intero campo operativo Con due misuratori Eyesys opzionali possibile eseguire letture di pressione con differenti precisioni e campi di musura Il controller Dual pu essere gestito nelle modalit LOCAL REMOTE I O e SERIAL attraverso le interfacce RS 232 422 e 485 le interfacce RS422 e RS485 sono opzionali 87 900 094 01 H NOTA Contattare l ufficio vendite della Varian per ordinare i sistemi con RS 422 485 e misuratori Eyesys Le modalit con cui i comandi operativi vengono impartiti al sistema dipendono dalla modalit operativa in cui si trova il controller e Nella modalit LOCAL tutti i comandi vengono impartiti attraverso il pannello frontale e Nella modalit REMOTE I O tutti i comandi vengono impartiti attraverso segnali I O remoti relay contacts direttamente sul connettore Remote Control posto sul pannello posteriore e Nella modalit SERIAL tutti i comandi vengono impartiti attraverso un personal computer locale collegato all interfaccia RS 232 422 485 IMMAGAZZINAMENTO Per trasportare e immagazzinare il controller occorre osservare le seguenti condizioni ambientali e Temperatura da 20 C a 70 C e Umidit relativa
94. ssage Tmax Maximum time frame within which a reply can be given The controller s 100 msec reply message cannot begin until the expiry of this time frame which is initiated at the end of the Host message Tquery Minimum time frame for query transmission n byte x byte time Tresponse Minimum time frame for reply transmission n byte x byte time Trelease Maximum time frame within which the RS485 line can be freed Within 2 byte time this time frame the controller must free the serial line upon completion of reply transmission Such time out is relevant in the RS485 mode only Equivalent to the transmission time of a single byte at the selected baud rate and assumes the following values 8 33 msec at 1200 4 16 msec at 2400 2 08 msec at 4800 1 04 msec at 9600 A data exchange session will therefore assume the timing shown in the following figure Tmin lt T lt Tmax Trelease FRAME FROM FRAME FROM VAACUM OUMP HOST CONTROLLER Timing 55 73 87 900 094 01 H Data Exchange Error Management The following data exchange errors are handled during reception by the controller Error Type Possible Cause Problems with the Dual controllers data exchange driver Overrun Frame error Line noise incorrect baud rate or data corruption Checksum Data corruption not on the error MultiGauge Protocol Full buffer Too many bytes or data corruption
95. sstift auf der Seite des Controllers in die entsprechende Buchse auf der hinteren Schalttafel eingesteckt ist Wenn die Pumpe ein einpoliges Hochspan nungskabel ohne Verriegelung benutzt Sicherstellen dass die Br cke richtig zwischen der HV Steckdose des Verriegelungskabels und Erde eingesetzt ist HV X ERROR Der Hochspannungskreis kann nicht gefunden Die Einschaltprozedur f r Dual Controller HV NOT FOUND werden Hochspannung wiederholen Bleibt der Fehler bestehen Varian zwecks Reparatur oder Austausch kontaktieren HV X ERROR Hochspannung wegen Fehler im Varian zwecks Reparatur oder Austausch HV FAULT Hochspannungskreis abgeschaltet kontaktieren HV X ERROR Die W rmesensoren im Dual Controller messen Sicherstellen dass die HV OVERTEMP eine Temperatur die ber der Sicherheitsschwelle Umgebungstemperatur nicht ber der f r liegt den Dual Controller zul ssigen H chsttemperatur von 45 C liegt Sicherstellen dass die Ventilationsschlitze im Gehause nicht behindert sind Sicherstellen dass die Ventilatorfl gel sich frei drehen k nnen und die im Dual Controller umgeleitete Luft nicht durch Staub oder Fremdk rper blockiert ist Warten Sie einige Minuten bis die Temperatur im Ger t gesunken ist und wiederholen die Prozedur zum Einschalten der Hochspannung HV X ERROR Die Karte f r Fern E As kann nicht gefunden Die Einschaltprozedur f r Dual Controller REMOTE UO werden Hochspannung wiederholen Blei
96. t Analog output OV to 5V Min impedance 1 MQ OV gt P lt 10 Torr 5V gt P 10 Torr Logarithmic 37 positive 19 ground Voltage recorder output Analog output OV to 7V Min impedance 1 MQ OV gt OKV 7V gt 7KV Linear 6 power 23 ground External voltage Power 10 30VAC 1 5W External voltage to power the optoisolated input 17 36 Not used 3 7 20 26 Not used Typical Output Connection 40 73 87 900 094 01 H TECHNICAL INFORMATION Female Remote I O Connector Input Signal Pin Signal Maximum Ratings Description 11 positive 30 negative External interlock Digital input 8 to 30 VDC VAC 15 mA max Interlock closed The H V output of the corresponding H V channel is enabled Interlock open The H V output of the corresponding H V channel is disabled 12 positive 31 negative Confirm HV ON Digital input 8 to 30 VDC VAC 15 mA max Active on the positive edge If a positive edge is detected the H V output is switched on if both interlock and output ON OFF are closed 13 positive 32 negative Output ON OFF Digital input 8 to 30 VDC VAC 15 mA max Output ON OFF open The H V output of the corresponding channel is switched OFF Output ON OFF closed The H V output of the corresponding channel is enabled 14 positive 33 negative Start Protect mode Digital input 8 to 30 VDC VAC 15
97. t circuit current This mode of operation must be used to start the pump at High Pressure In the PROTECTED mode the controller limits the output current and switches off the high voltage when the current exceeds the threshold current for more that 0 2 seconds In normal operation this is the preferred mode as any failure of the ion pump or cable due to short circuit or high load will cause the high current to switch off Refer to the appendix entitled Technical Information for detailed information on the modes of operation Step Mode of Operation The Step mode has to be chosen in order to increase the performance of the pump and to read at very low pressure without influence of leakage current In Step mode the Dual controller chooses the best output voltage according to the pressure into the pump see the following figure o gt NX Lu Es E E o gt E D o E gt o 1x10 1x10 1x10 1x10 1x10 1x10 PRESSURE Torr Output voltage change over vs pressure 87 900 094 01 H Powering On the Controller from the Front Panel LOCAL Mode NOTE To switch on the H V the external interlock must be closed connector inserted If no external connection is made insert the interlock closing jumper that are provided with the unit
98. t data format the Dual controller will reply with an error code identified by the 21h command according to the following table TECHNICAL INFORMATION Value Description Value in full comp MV 17 31h Reserved checksum error 0 30h 2 32h Non existent command code m d 31h 3 33h Channel not valid for the selected command 2 32h 4 34h Write mode not allowed for the selected command 4096 34h30h39h36h SR 35h Unvalid or non congruent data transmitted 4 34h 6 36h Write value exceeding the allowed limits or step not allowed 16 31h36h p 37h Data format not recognized on the protocols implemented 1 31h 8 38h Write not allowed to channel ON 64 36h34h 9 38h Write not allowed to channel OFF 128 21h32h38h pi 3Ah Write allowed in Serial Configuration Mode only 4096 34h30h39h36h MultiVac Compatibile Serial Error Coding Full compatible MV Value Description 1 31h Not used 2 32h Error in the power supply unit code 4 34h Parameter error 8 38h Length error 16 31h36h Out of limits error 32 33h32h Unallowed step error 64 36h34h Attempt to modify values with pump powered on 128 31h32h38h Attempt to read measurements with pump powered off 256 32h35h36h Pump fault error 512 35h31h32h Intervention on non existing pump error 1024 31h30h3
99. t protect CO 43h30h CO 43h30h 61 36h31h Psel GO 47h30h GO 47h30h 62 36h32h Vmax HO 48h30h HO 48h30h 63 36h33h Imax 10 49h30h 10 49h30h 64 36h34h Pmax JO 4Ah30h JO 4Ah30h 65 36h35h Iprotect KO 4Bh80h KO 4Bh80h 66 36h36h Vstep1 LO 4Ch30h LO 4Ch30h 67 36h37h Istep1 MO 4Dh30h MO 4Dh30h 68 36h38h Vstep2 NO 4Eh80h NO 4Eh30h 69 36h39h Istep2 00 4Fh30h 00 4Fh30h 70 37h30h SetPt1 PO 50h30h PO 50h30h 71 37h31h SetPt2 Qo 51h30h QO 51h30h 72 37h32h Remote I O Output gO 67h30h gO 67h30h 73 37h33h Remote I O Input ho 68h30h ho 68h30h 74 37h34h Remote I O Commands Coding bitField Remote UO input Remote I O output 01h id I O board always 1 High Voltage enable 02h IO board OK always 1 Set Point2 active 04h Step mode Set Point1 active 08h Remote mode Interlock active 10h Protect mode High Voltage fault 20h Output HV enable Remote mode or Local mode 0 Serial mode 1 40h Confirm HV on Protect mode 80h Remote I O interlock Not used always 0 The following example shows the reading on the High Voltage 1 the status of the Start Protect Binary Protocol 04 C01 X 81h 30h 34h 43h 30h 31h 3Fh 78h e 04 CO 10 W 1h 30h 34h 43h 30h 31h 30h 77h 64 73 Ascii Protocol 04 CO 1 0391 40h 30h 34h 43h 30h 31h 3Fh 30h 33h 39h 31h 04 CO 1 0 0348 24h 30h 34h 43h 30h 31h 30h 30h 33h 34h 38h Multigauge Compatible Protocol 161 23h 31h 36h 31h 3Fh Dh
100. t vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r Umweltschutz Verpackung des Controllers 10 73 GEBRAUCHSANLEITUNG Die Dual Controller sind fabrikseitig f r Versorgungsspannungen ausgelegt folgende e Modelle 929 7000 1 2 3 und 929 7008 09 10 11 Eingangsspannung 100 120 VWs Frequenz 50 60 Hz e Modelle 929 7004 5 6 7 und 929 7012 13 14 15 Eingangsspannung 200 240 VWs Frequenz 50 60 Hz INSTALLATION neon Der Dual Controller wird mit einem Netzkabel mit 3 Leitern und mit einem den internationalen Normen entsprechenden Netzstecker geliefert Es sollte immer dieses Netzkabel benutzt werden das an eine vorschriftsmaBig geerdete Steckdose anzuschlie en ist um Stromentladungen zu vermeiden Im Inneren des Controllers entstehen hohe Spannungen die schwere Sch den verursachen und lebensgef hrlich sein k nnen Vor jedem Montage bzw Wartungseingriff mu deshalb der Netzstecker gezogen werden ZS ACHTUNG Der Controller kann auf einen Tisch oder ein Gestell montiert werden In beiden Fallen mu eine ungehinderte Zirkulation der Kuhlluft durch die im Geh use vorne und unten eingelassen Luft ffnungen gew hrleistet sein Wenn der Controller in einem Gestell montiert wird MUSS er in einer vier Rackeinheiten hohen Adapter Einheit installiert werden um zu vermeiden da der Controller nicht in das Gestell f llt Die vordere Schalttafel des Dual Controllers ist nicht geeignet d
101. taneously on the two channels while a maximum power of 400 W is delivered on a single channel If a total of more than 420 W is requested the power delivered by the controller is distributed by means of an appropriate algorithm resident in the DSP The Dual is a power supply designed to meet a wide range of requirements It is a compact unit specifically designed to operate ion pumps with both positive and negative polarity from 20 l s to 500 l s and up to 400 W output power TECHNICAL INFORMATION The unit is programmed with pre defined pump settings and the user can tailor for his purpose the voltage short circuit current maximum power pressure versus current curve for one more pump not included in the pre defined type of pumps Using a patented operation principle the controller is capable of reading pressure down to the 10 Torr range while optimising the pumping speed in the entire operating range Algorithm for the Distribution of the Available Power During the start up phase priority is given to the pump that is started first Consequently this pump is provided with all the power required while the second pump is provided with the power that remains Upon completion of this start up phase the controller if necessary will proportionally distribute the available power according to the maximum power that the pumps can require If more than 420 W are requested to reach a stabilized condition the controller
102. te I O Connector CONNECTOR Degas Status Input Power Ground Degaus ON OFF Output 24 V Power FEMALE CONNECTOR Mini B A Connector Recorder outputs Ground Voltage recorder output Pressure recorder output Not Used Not Used StepV FixedV mode Negative StepV FixedV mode Positive Communication select Negative Communication select Positive Start Protect mode Negative Start Protect mode Positive Output ON OFF Negative Output ON OFF Positive Connector The following table gives the connector pinout in the ConvecTorr configuration Confirm HV ON Negative Confirm HV ON Positive External Interlock Negative External Interlock Positive High voltage ON Common High voltage ON N O Set Point 2 Common Set Point 2 N O Set Point 1 Common Set Point 1 N O Not Used Not Used ConvecTorr REMOTE 24 V Power Power Gound 1 0 Pressure Signal Input Interlock Status Common External Voltage Power Interlock status N O Fault Common External Voltage Ground Fault N O Remote Mode Common Not Used Remote Mode N O Protect Common Not Used Protect Mode N O Signal Ground N C Calibration Output N C N C N C E EI RITA CATALA lafe el ee sel O O N O OI BA O N Remote 1 0 Connector NOTE Connecting cables between EYESYS GAUGES and The following figure gives the connector pinout with DUAL available on req
103. that could cause serious injury or even death are generated inside the controller Before performing controller installation or maintenance disconnect the unit from the power outlet LS WARNING The controller can be used either as a desktop unit or as a rack module In any case it must be positioned in a way that the air can circulate freely through the ventilation slots on the cover If the controller is used as a rack module it MUST be inserted into a four rack high adapter to prevent it from falling inside the rack itself The Dual controller front panel is not designed to support the weight of the unit Do not install or use the controller in an environment exposed to atmospheric agents rain snow ice in the presence of dust corrosive gases or in a highly flammable or explosive environment NOTE If the controller is installed in a rack remove its four feet and place it so as to leave at least 30 mm 1 2 inches of free space above and below The controller must be used in the environmental conditions following e Temperature 0 C to 45 C e Relative humidity O 90 non condensing 87 900 094 01 H To attach the controller to the pump use the specific cable supplied as option HV INSTRUCTIONS FOR USE Refer to the appendix entitled Technical Information for detailed information on these and other connections Interlock E Pump Ground
104. tion Others HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Customer Service to discuss alternatives if this requirement presents a problem The equipment listed above check one L HAS NOT been exposed to any toxic or hazardous materials OR HAS been exposed to any toxic or hazardous materials In case of this selection check boxes for any materials that equipment was exposed to check all categories that apply Toxic Corrosive Reactive Flammable Explosive Biological Radioactive List all toxic or hazardous materials Include product name chemical name and chemical symbol or formula Print Name cicci iii Customer Authorized Signature Print Tile oi a Date ues NOTE If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Do not write below this line Notification RA sss Customer ID Equipment
105. tionn HV En cas de mise au rebut du contr leur proc der son limination conform ment aux r glementations nationales en la mati re 22 73 MODE D EMPLOI MISE AU REBUT Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en oeuvre le processus de collecte et mise au rebut K Lea 87 900 094 01 H MODE D EMPLOI MESSAGES D ERREUR Pour certains types de panne le contr leur proc de un autodiagnostic et affiche l un des messages d erreur indiqu s dans le tableau suivant MESSAGE DESCRIPTION INTERVENTION PANNES DE HAUTE TENSION 1 OU 2 HV X ERROR La haute tension HV a t teinte par un interlock Placer l interrupteurV ENABLE sur ON et PANNELL INTERLOCK recu par le panneau frontal ou par la couverture r p ter la proc dure d allumage de la haute l interrupteur HV ENABLE dispos sur OFF tension ou bien couverture enlev e par
106. tivo pulsante HV ON OFF si accender il LED ON Spegnimento della pompa Per fermare la pompa premere il relativo pulsante HV ON OFF si spegner il LED ON MANUTENZIONE Il controller Dual non richiede alcun intervento di manutenzione Qualsiasi tipo di intervento sull unit deve essere eseguito da personale tecnico autorizzato In caso di guasto possibile usufruire del servizio di riparazione Varian o del Varian advanced exchange service che permette di ottenere un controller rigenerato in sostituzione di quello guasto Qualora un controller dovesse essere rottamato procedere nel rispetto delle normative nazionali specifiche 6 73 ISTRUZIONI PER L USO SMALTIMENTO Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunita Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita EEE Ke SA 87 900 094 01 H MESSAGGI DI ERRORE ISTRUZIONI PER L USO Per certi tipi di guasti il control
107. to 400 MA Resolution 10 nA Accuracy gt 10 uA 2 10 uA 10 Pressure Analog REC OUT 0 to 5 Vdc log See Rec Out diagram Minimum recorder input impedence 1 MOhm Voltage Analog REC OUT 0 to 7 Vdc line See Rec Out diagram Minimum recorder input impedence 1 MOhm Measurement updates On the display t lt 2 s On the recorder t 0 1 s In compliance with norms EN 55011 class A group 1 EN 61000 3 2 Harmonic Current Emission EN 61000 3 3 Flicker EN 61000 4 2 ESD EN 61000 4 4 Burst EN 61000 4 3 Radiated RF immunity EN 61010 1 Safety Installation category Il Pollution degree 2 Interconnecting cables Power cord 3 wire 3 meter long with European or US plug Weight both models With 1 H V 10 Kg 22 4 Ibs With 2 H V 11 5 Kg 25 8 Ibs 34 73 87 900 094 01 H TECHNICAL INFORMATION Output Voltages Provided below are the output voltage diagrams D oc o D o gt gt a E e Output current Output Voltage VS Current Curve Recorder Output Voltage ul gt o gt CA al CA N u RECORDER OUTPUT V 0 5 0 1X10 1X10 1X10 1X10 1X10 1X10 PRESSU r Recorder Output Pressure 35 73 87 900 094 01 H
108. to the three native protocols compatibility is guaranteed at format level header terminator checksum etc while the different commands are implemented in compliance with the characteristics of the Dual controller Hardware Signals Management The RX TX and GND signals are present on the data exchange line There is no flow control implemented through RTS CTS and the DTR and DSR signals are not handled The RS232 RS422 and RS485 physical interfaces are implemented NOTE The RS485 requires software addressing and therefore a binary protocol is needed 87 900 094 01 H TECHNICAL INFORMATION Transmission Format and Timeout The serial data transmission parameters are listed below Speed 1200 2400 4800 9600 baud Start bit 1 Stop bit 1 Data bit 8 Parity None Odd Even 1 All the baud rates indicated are supported the default rate is 9600 Data exchange is performed in the Half Duplex mode To guarantee a synchronized data flow and to prevent conflicts the timings indicated in the table below must be respected Treset Maximum delay between consecutive bytes of the same data packet 2 byte time The controller can reinitialize reception if this time frame expires without data exchange Tmin Minimum time frame before a reply can be initiated The controllers 4 msec reply message cannot begin until the expiry of this time frame which is initiated at the end of the Host me
109. tr leru ne soit d passe les limites de s curit pas sup rieure 45 V rifier que les trous d a ration sur la couverture ne soient pas obstru s V rifier que les palettes du ventilateur tournent librement et que l air apport l int rieur du contr leur Dual ne soit pas obstru par la poussi re ou par un mat riau tranger Attendre quelques minutes de mani re ce que la temp rature interne de l unit se refroidisse et ensuite r p ter la proc dure d allumage de la haute tension HV HV X ERROR La carte Remote I O n a pas t relev e R p ter la proc dure d allumage du contr leur REMOTE UO Dual si le probleme subsiste contacter Variant NOT FOUND pour la r paration ou la substitution 23 73 87 900 094 01 H MODE D EMPLOI MESSAGE DESCRIPTION INTERVENTION HV X ERROR R I O FAULT HV X ERROR PROTECT HV X ERROR SHORT CIRCUIT HV X ERROR OVER VOLT CURR HV X ERROR ZERO MEAS GAUGE X ERROR PANEL INTERLOCK GAUGE X ERROR GAUGE NOT FOUND GAUGE X ERROR GAUGE FAULT GAUGE X ERROR GAUGE NOT CONNECT SYSTEM ERROR ER 1 10 Dysfonctionnement dans le circuitRemote I O La protection de surcourant a t d clench e lorsque la modalit op rationnelle PROTECT a t selectionn e Un court circuit a la sortie HV a t relev Des valeurs erron es de voltage et de courant sur la sortie HV ont t relev es Cette erreur indique un dysfonct
110. trica LS ATTENZIONE Il controller pu essere utilizzato sia come unit da tavolo che come modulo installato in un rack In ogni caso deve essere posizionato in modo tale che l aria possa circolare liberamente attraverso i fori d areazione presenti sulla copertura Nel caso in cui il controller viene utilizzato come modulo rack DEVE essere installato in un adattatore alto quattro unit rack per evitare che cada all interno del rack stesso Il pannello frontale del controller Dual non previsto per reggere il peso dell unit Non installare o utilizzare il controller in ambienti esposti ad agenti atmosferici pioggia neve ghiaccio nella presenza di polvere gas corrosivi o in ambienti esplosivi o ad alto rischio di infiammabilit NOTA Nel caso in cui il controller viene installato in un rack rimuovere i quattro piedini in modo che venga posizionato con almeno 30 mm di spazio sotto e sopra Durante il funzionamento occorre che siano rispettate le seguenti condizioni ambientali e Temperatura da 0 C a 45 C e Umidit relativa O 90 senza condensa 87 900 094 01 H Per collegare il controller alla pompa utilizzare il cavo specifico disponibile come opzione HV ISTRUZIONI PER L USO Fare riferimento all appendice Technical Information per informazioni dettagliate su questi ed altri collegamenti Interlock El Collegamenti de
111. ttare Varian per la riparazione o sostituzione Assicurarsi che i connettori esterni Remote I O siano collegati come descritto in questo documento Ripetere la procedura di accensione del Dual se il problema persiste contattare Varian per la riparazione o sostituzione Nel caso fosse necessario selezionare la modalit START in modo che il controller possa operare fino al raggiungimento della corrente di corto circuito Controllare l integrit del cavo dell alta tensione H V Rimuovere il cavo dalla pompa ionica e assicurarsi che non ci sia un corto circuito nella pompa o nel cavo 87 900 094 01 H ISTRUZIONI PER L USO MESSAGGIO DESCRIZIONE AZIONE CORRETTIVA HV X ERROR Sono stati rilevati dei valori errati di tensione e Ripetere la procedura di accensione del Dual se il OVER VOLT CURR corrente sull uscita H V problema persiste contattare Varian per la ven Ga na riparazione o sostituzione Questo errore indica un guasto del circuito di controllo H V HV X ERROR Il microprocessore del controller Dual ha rilevato Ripetere la procedura di accensione del Dual se il ZERO MEAS che sia la tensione che la corrente non sono problema persiste contattare Varian per la presenti sull uscita H V che doveva essere attiva riparazione o sostituzione ERRORI DI FUNZIONAMENTO DEI MISURATORI 1 O 2 GAUGE X ERROR L interruttore HV ENABLE predisposto su OFF Predisporre l interruttore HV ENABLE su ON PANEL
112. uest See Accessories List at related signals description the end of the Instruction Manual 39 73 87 900 094 01 H Female Remote I O Connector Output Signal Pin Signal Maximum Ratings TECHNICAL INFORMATION Description 10N 0 29 common High Voltage on Digital output Relay contact 0 5A at 250VAC 0 2A at 150VDC 0 5A at 30VDC HV On Closed HV Off Open 9 N O 28 common Set point 2 Digital output Relay contact 0 5A at 250VAC 0 2A at 150VDC 0 5A at 30VDC P Pthreshold set point 2 Closed P gt Pthreshold set point 2 Open 8 N O 27 common Set point 1 Digital output Relay contact 0 5A at 250VAC 0 2A at 150VDC 0 5A at 30VDC P Pthreshold set point 1 Closed P gt Pthreshold set point 1 Open 24 N O 25 common Interlock status Digital output Relay contact 0 5A at 250VAC 0 2A at 150VDC 0 5A at 30VDC Interlock OK Closed Interlock FAULT Open 4 N O 5 common Fault Digital output Relay contact 0 5A at 250VAC 0 2A at 150VDC 0 5A at 30VDC HV Off after FAULT Closed Other condition Open 21 N O 22 common Remote mode Digital output Relay contact 0 5A at 250VAC 0 2A at 150VDC 0 5A at 30VDC Serial mode Closed Other modes Open 1 N O 2 common Protect mode Digital output Relay contact 0 5A at 250VAC 0 2A at 150VDC 0 5A at 30VDC Protect ON Closed Protect OFF Open 18 positive 19 ground Pressure recorder outpu
113. w option generic execution error Software Error 70 73 87 900 094 01 H SPECIFIC PROTOCOL SETTINGS Ack Nack Mode Setting the appropriate bit via the Serial Property command enables the Dual to transmit the Acknowledge 06h flow control Write Reply Setting the appropriate bit via the Serial Property command enables the Dual to provide a reply after a write command with the typical read communication Example HV power on header A011 chk reply HV on header A011 chk reply HV not on header A010 chk Multiple Commands Setting the appropriate bit via the Serial Property command enables multiple command function With this function it is possible to transmit to the Dual query command sequences within the same data packet by linking 1 up to 6 query commands to the command channel data fields In the case of multiple commands the data format has the following limitations e Format errors in only one of the commands sent will cause an error with the entire packet e With the multiple command it is not possible to read the strings eg software version e Multiple commands are not enabled with the Lexington protocol e The query has to be as follows command channel data query 8 byte space next command chk e The reply data are collected in 12 byte packets as follows command channel data answer n space Following is an example of a multiple command where a space is ind
114. ways 0 20h Front Panel Interlock equal to bit 20h 40h HV2 Remote UO Interlock 80h HV2 Cable interlock In the following example shown the use of the command HV ON OFF to power up the channel 1 in the three protocols Binary Protocol 04 AO 1 1 81h 30h 34h 41h 30h 31h 31h 74h ACK 6h Ascii Protocol 04 AO 11 0375 40h 30h 34h 41h 30h 31h 31h 30h 33h 37h 35h ACK 6h Multigauge Compatible Protocol 1301 23h 31h 33h 30h 31h Dh ACK 6h NOTE The answer ACK or 6h is given only if the mode ACK NACK is selected if not with this type of command nothing is provided by the DUAL 87 900 094 01 H The following example command is used to read the current of the channel 1 or 2 Binary Protocol 04 TO2 1 81h 30h 34h 54h 30h 32h 3Fh 6Ch e 10 TO2 8 9E 04 ih 31h 30h 54h 30h 32h 38h 2Eh 39h 45h 2Dh 30h 34h 15h High Voltage Commands TECHNICAL INFORMATION Ascii Protocol 04 TO2 0409 40h 30h 34h 54h 30h 32h 3Fh 30h 34h 30h 39h 10 TO 2 4 4 E 04 0679 24h 31h 30h 54h 30h 32h 34h 2Eh 34h 45h 2Dh 30h 34h 30h 36h 37h 39h Multigauge Compatible Protocol 108 23h 31h 30h 38h 3Fh Dh gt 1081 9E 04 3Eh 31h 30h 38h 31h 2Eh 39h 45h 2Dh 30h 34h Dh Command Description Mode Channels Format Possible values fixed step fixed step mode Read HV1 HV2 Status 30h fixed Write 31h
115. will act on the pump power supply voltage so as to maintain constant the power delivered If one of the two pumps enters into the short circuit range the start phase is resumed In this case priority is assigned to the pump that is in the short circuit range if both pumps are in this range priority is assigned to the one that entered this range first If the HV output voltage drops below 150 V with a current equivalent to 80 of the short circuit value for a time frame exceeding 5 seconds the related output is disabled and the following message is displayed HV X ERROR SHORT CIRCUIT Dual Controllers 87 900 094 01 H TECHNICAL INFORMATION CONTROLLER SPECIFICATIONS Input Voltage 100 to 120 Vac 200 to 240 Vac Frequency 50 60 Hz Power 600 VA maximum Output for pump Voltage 7 000 Vdc 2 10 maximum programmable via software between 3 000 V and 7 000 V at 100 V steps Short circuit current 400 MA Power 400 W maximum programmable via software between 100 W and 400 W at 10 W steps Output current 400 mA 10 programmable via software between 100 mA and 400 mA at 10 mA steps Operating temperature 0 C to 45 C Storage temperature 20 C to 70 C Fuse Line voltage Two 4 A slow blow for 200 or 240 input Voltage Two 8A slow blow for 100 or 120 input Voltage Voltage measurement Resolution lt 50 V Accuracy 2 of Vmax Current measurement Measurement range 10 nA
116. y will only show the values of the two voltages The following is displayed if only one card is present ayia rfo olo vfo rte METR dee eee The following is displayed if two cards are present ayia rfo olo wiss artesana The lighting of the LED located above the H V On Off button continuously informs the operator whether the high voltage is present or not 46 73 TECHNICAL INFORMATION By pressing the CHANGE CONFIG button the display will show in sequence the current and pressure values of the pump and the pressure values of the Eyesys Gauges if installed The following is displayed if an HV card is installed vit Tele Je e amo apartan The following is displayed if two H V cards are installed mv iej s el ol alme DEERSEREREREREER If one H V card is installed with multigauge option pressing the CHANGE CONFIG button again displays the following meli lo ole v vje ERSES EIS IESU ER If two H V cards are installed the following are displayed mv lo 7 elo role Ebbe Ana In a dual H V card and multigauge configuration pressing the CHANGE CONFIG button again displays the multigauge pressure as indicated below miel s eje e Te r r Eje ESSE I TERRE Pressing the CHANGE CONFIG button again returns to the voltage value display 87 900 094 01 H The same indication can be seen on the following flow diagram 1 HV
117. zione riportata nella figura consiste in due schede ad alta tensione HV due schede Set Point Remote Control una scheda d interfaccia RS 232 422 ed il collegamento a due misuratori Eyesys Pannello posteriore Sede porta fusibile Connettore Fischer HV2 Bloccaggio del cavo HV sul connettore HV2 Connettore Fischer HV1 Bloccaggio del cavo HV sul connettore HV1 Connettore a 37 pin per Remote I O HV2 Connettore a 37 pin per Remote I O HV1 Connettori a 9 pin per misuratori Eyesys multipli Connettore d interfaccia seriale a 9 pin Presa di alimentazione Interruttore di alimentazione principale A00 M9 gU bom DO PROCEDURE OPERATIVE Modalit operative Il Dual controller pu funzionare nelle seguenti modalit e LOCAL e REMOTE I O input output e SERIAL Nella modalit LOCAL tutti i comandi sono attivati dal pannello frontale Nella modalit REMOTE I O tutti i comandi sono attivati da un personal computer remoto collegato tramite il connettore di input output collocato sul pannello posteriore Nella modalit SERIAL tutti i comandi sono attivati da un personal computer esterno collegato tramite l interfaccia seriale RS 232 422 485 ISTRUZIONI PER L USO NOTA La modalit operativa selezionata viene memorizzata dal sistema e quindi al ripristino della tensione in seguito alla sua caduta il controller Dual ritorner nella modalit operativa nella quale era
118. zu Technical Information Vor Benutzung des Controllers m ssen s mtliche elektrischen und pneumatischen Anschl sse ausgef hrt und die Betriebsanleitung der angeschlossenen Pumpe durchlesen werden ZN mesa Steht die Pumpe auf einem Tisch muss auf stabilen Stand geachtet werden da sonst die Gefahr von Verletzungen und Gerateschaden besteht Die Pumpe nie einschalten wenn der Eingangsflansch nicht am System angeschlossen bzw nicht mit dem SchlieBflansch abgedeckt ist PUMPEN ERDE Schalter und Anzeigen auf der vorderen Schalttafel Die folgende Abbildung zeigt die vordere Schalttafel des Dual Controllers und die Tabelle erl utert die Bedeutung und Funktion der Schalter und Anzeigen CHANGE ENTER CONFIG Starr START PROT 1 PROT 2 mar Enable HV ON Q eves OLO 7 ON OFF ON OF Jon Pump Controller OFF Vordere Schalttafel Legende 1 von hinten beleuchtetes Fl ssigkristall Display 16 Zeichen x 2 Zeilen 2 gr ne LEDs zur anzeige der gew hlten Betriebsart LED LOKAL an wenn der lokale Modus gew hlt ist LED SERIELL an wenn der Modus SERIELL gewahlt ist LED REMOTE an wenn der Modus Fern E A gew hlt ist 87 900 094 01 H GEBRAUCHSANLEITUNG 3 Schalter HV ENABLE ist unabhangig von der gew hlten 6 Gruppe von 6 Funktionstasten mit folgenden Funktionen Betrieb

DUAL CONTROLLER DESCRIPTION

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