1. A4 DX SD 03 ACCTee 80 04 E MC S65A 05 E MG S39A 06 E MC S24B 07 DM48507 08 DM48775 09 10 11 12 13 14 15 2. al 2 umR 60 DM48775 LH 100 mm 2 25 umR 24 mm 0 05 1 0 L 1000 um 0 15 um 100 mm AC100 V 240 V 50 60Hz Max 670 VA Rc1 4 960 762 1678 255 840 1893 405 0 45 MPa 0 7 MPa 6 mm 1360 640 1893 410 01 DX SD 3. ARETEC ME SURFCOM NEX SURFCOM IN wm SURFCOM NEX a 5mm 10mm 2 0 05mm 5mm 0 1 0nm 100nm ms EL 5mm 1 0 15H 1 100 um H LH 50mm 1 1L 100 um L 0 75mN 6 mH 60 a SURFCOM NEX 15 1 0 nm 100 nm