挿入型静電容量センサ製品紹介 Web版
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1. 2014 11 Si 3 0 1 High2. 1 0 LoW 0 0 0 10 20 30 40 50 60 20 80 s wafer off wafer on chucking dechucking waferoff 1 2 3 4 5 300mm Si 300mm CTPS 3KV2AF 1 waferoff Si 0v 2 wafer on Si 3 chucking ON Si 4 dechucking OFF 5 waferoff Si REATIV
3. E 213 0034 507 1 ono a a 11 http www createch co jp 2014 11
4. WEB EE ESC 2 ch I O 1 O Digital 2ch Analog 1ch J900g 0 65 a a 5 Si NPN i MHV DC 2 0kV MHV
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