高速走査外径測定機
Contents
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3. 3 2 M pugne 321 Z 0000200000 00200000 IP60 05 000000 RcV 8 Principle of dirt detection 3 2 2 5 2 2 3 2 3 EEPROM
4. 1 5mm 0 00 10mm m 11 KL1000ANH D LI D m Reproducibility of 1003 013000000 Evenness of Linearity EJ s f 40 D 12 D D D D D D 0 5 10 15 20 30 35 40 45 50 Unevenness of Reproducibility 14 1 25mm n 000 Stability of KL1003A N 2p ni 120 44 6 5 L8 m KL153AN 1000 6 3 32mm KL100BAN 9 2 200000000 2 L 50 100 150Hz 1mm P P KL153AN 0000000 0000 0000 KL1008AN 2 6 13 1 4000 0 E KL153AN t lam x KL1003AN E 64 3 2 540 140 5 E 4556 5 20 40 60 80 100 120 140 160 180 200 50 ui 00000000000000 t 12u m t 5 q Characteristics of fluctuation against vibrating frequency of 2u m object
5. 2 12 4 31 3 1 3 000 19x 10 5 4 EI fi n lp m 1 B nf w 022 u ny 19x 10 ny s 5ns 3 200MHz I ECL CMOS W O3ns CMOS 27 100MHz 4 80MHz 3ns 3ns 0 33ms 1 3 CPU 10 RISC CPU 04 000000000 3000 Deflection of cantilever 149 No 76 Oct 1998
6. 2 000m limm 42 IP60 4 3 07 00000000000000 Operation key and display arrangement for easy operation 44 71 45 3 2 6 4 6 LSI CPU 1 3 1 2 4 7 a z 1 KL1008AN BN 4 1 3 000 5 1 5 2 3 000 No 76 Oct 1998 151 1 Main specification
7. 53 04u m 30 12u mi Li 6 u ut 1 0241 x 015 m O6p ni 9 43 Ut 03p m 54 HOLD 10 2 4096 HU DL LU Uu uou UD 55 512 LU Lu Uu 5 6 1 00200 1 1 6 2 2 2 11 XY lommi 3 UD 1 8 m 6 T 61 00 5 Ut 3 D Smm m 040 O5 00 8 I 16 00000000000 10240 Jem Unevenness of Repeatability avg 1024 25 0500 25 0506 25 0512 250518 25 0524 25 0530 25 0536 25 0542 25 0548 25 0554 25 0560 mm 08 00000000000000 160 Histogram of output avg 16 distribution measurements No76 Oct 1998 153 0000 um
8. 0 H KL100BAN KL10BBN 021 31mm 0000 32mm 0000 20mm 06 0345 AVG1024 0 X O3p nij 13645 AVG4096 go g 2u m 000 24m 5qQ 00000000 3000 0 67ms AVG 2 0 000 79m 00000000 000 enm 000 38 2 0 455 og 40 C 0 000 O0 300 W0x TID 44 DUmni 1 0 0000 70mni 21kg IP60 KL3000A 0 0 214 8 16j 37 6 228 258 512 1024 2018 4096 0000 s0000 T2bit 0 0 10V x 100mmp 000000 101 10007 RS232C 1 200 960 ort 0 0 UO 55051 6 abt 000000 1215 0 0 10V x 15mm 10V 15m 00000
9. 100 1000 10000 00000 10 Repeatability of KL1003A N for each average um
10. 0o00 03 000000000 Block diagram of processing circuit
11. No 76 Oct 1998 154 3 000 7 10 3 8 6 D 1973 No 76 Oct 1998 155
12. 19v 33mi 30p ni 15 m 06416 03m 7 5 m Hu oV 90 26M 30 0 000 u 210 W ix 10 281 DO mni 249 Hu 455 2 3 5000000 10x 2mm0 0 0 0 mm9 000000000 No 76 Oct 1998 152
13. 3 2 4 KL1003ANO086 amp ais ue 000000000000 builtin Comparison between air purge unit of KL153AN and built in air purge 7 10 710 SMT IC 32 5 y2 y5 No760ct 1998 150
14. Anritsu High Speed SLB Scanning Laser Beam Dia Measuring System UDC 531 715 7171 6817069 24 Yuji Takeuchi Shinji Hamano 00000 Fumio Kashima 00000 Shinichi Takayama 0000000 0000000 A L1rr r OA L E3 LJ A A Hideaki Takahashi 2 00030000 annane 1 KL1003AN KL3000A 00000000000 External view of SLB Dia Measuring System KL1003A N 02 000000 3000A Operating principle of optical system No760Oct 1998 148 9 00000000
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