単軸圧縮加工による 超平滑面創成に関する研究 - MIUSE
Contents
1. Fig 2 15 4 3 32. Logeeswaran
3. Sl 9 Fig 2 11 Surftest SJ 400 0 30um 0 10um Fig 2 12
4. 3 2
5. AFM FEM 2 AFM FEM
6. 60 6 2 1 PC Mx o 0 1 Fig 6 4
7. 35 Fig 3 9 ec 5 20 ec 24 35 ec 37 42 ec 47 54 D So Fig 3 9 a e 5 e 20 5 e 5 ec 13 17 8 Fig 3 10 e 13 17 T
8. A 5 a 4 5
9. 1 FUJIFILM FinPixS1Pro Nikon Micro NIKKOR Fig 2 35 2 3mm Fig 2 36 3 WinROOF Ver 5 0 MITANI CORPORATION 4 ROI 5
10. 78 1 Richard P Feynman There s Plenty of Room at the Bottom An Invitation to Enter a New Field of Physics http www zyvex com nanotech feynman html 2 C J88 C 11 2005 839 850 3 ELID 3 22 2001 167 172 4 61 6 1992 513 518 5 46 39 2005 1116 1120 6 C 36 530 1990 268 275 7
11. 2 1 A1050BD H14 Table 2 1 15mm 7mm 10mm RCA 005 1mm 300 3um 200mm 0 8mm Fig 2 1 1 15S00 1
12. LIGA EEM Elastic Emission Machining CVM Chemical Vaporization Machining
13. 4 AFM 20 Table 2 3 AFM A1050BD AFM SR 20umX 20Lm SA 20um 512X512 0 1 2 3 mm 4 AFM Fig 2 33 AFM Rz Fig 2 34
14. Fig 4 5 So ec e 29 r 0mm e 8 e 29 0mm 9 7 3mm Fig 4 6 7 0mm r lImm r 2mm 3mm S e Tool 2 Specimen 2 5 Fig 4 7 e 6 25 ec 29 45 So rx r 0mm S ry sg e 29
15. 10 PRINT 11 L SJ 400 12 AC gt Me AC Rz se Fig 2 27 Surftest SJ 400 Fig 2 28 Table 2 2 Surftest SJ 400
16. START 0 00 START Fig 2 29 3 AA
17. Fig 2 37 50 80 120 170 6 y 100 gg oa A 4p 44 FEI 2 Fig 2 36 26 29 a b Fig 2 37 e 38 70 2 7 FEMD 2 7 1 FEM Virtual Forging 1 07 03 Fig 2
18. 3 Solid Height Lines Mesh SPM OLIMPUS Micro cantilever Micro Cantilever OMCL TR800PSA SiN lll TE 24 SPM AFM Atomic Force Microscope AFM STM LFM AFM AFM
19. AFM FEM s 1 Fig 5 1 R en A1050 O Carbon Rapeseed oil Tool Specimen 1 0 10 20 30 40 50 60 Compressive strain ec Fig 5 1 A e 52 AFM Fig 5 2 r 0mm r lmm 7 2mm 7 mm S ec Se Fig 5 3 Fig 5 4 AFM a b
20. Fig 6 17 FFT FFT Sp 4 Fig 6 18 Tool 1 e Fig 6 19 Dps e Tool 2 Too 1 Tool 2 py Fig 6 20 Tool 1 Dps e Fig 6 21 Dps e Tool 2 Too 1 O Dps Too 2
21. Rz 10nm snm 1 R So lt 30 Rs 5nm 30 2
22. Fig 3 2 0 Snm R 10nm Tool 1 Ro Snm Tool 2 Tool 1 Tool 2 Specimen 1 Specimen 2 Fig 3 3 Specimen 2 gt 40 A 30 Specimen 1 409 Ra Specimen 1 e 30 Specimen 2 Specimen 2 R ec gt 30 Specimen 2 Ra Specimen 1 ec 50
23. 2mm min 6 2mm min 2mm min ee 2mm min 9 10 11 19 12
24. 2 3 1 EM 5X100mm Fig 2 21 1 14 MAIN RJP DP 13 15 D P S Fig 2 22
25. Fig 2 5 2 Fig 2 6 3um 3 10 Fig 2 2 4 5 6 0 80 0 02mm 7 8 Surftest SJ 400
26. 71 Height nm 0 5 10 15 20 102 10 100 10 10 Horizontal position MH m 4 um a A1030 O Carbon ec 13 0 direction Specimen 1 SO 2 0 10 15 20 102 10 10 10 10 Horizontal position HR m 4 nm b Fig 6 17 FFT A1050 O Carbon A1030 O Carbon 1 8 FSR 20 Lm 0mm SR 20 um 7 0mm 1 8 2 Specimen 1 LR Specimen 2 2 i 1 6H9direction 3mm _1 6 9direction 3mm Tool 2 1 4 1 4 1 2 1 2 V0 1 gt 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Compressive strain Compressive strain a Tool b Tool 2 Fig 6 18 Dps e 72 Al 050 O Carbon Specimen 1 a r i A1050 O Carbon 1 8 LSR 20 um r 0 Specimen 2 1 6 T direction 1 6 direction a Q 1 4 1 4 1 2 12 1 1 2 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Compressive strain Compressive Strain a Tool 1 b Tool 2 Fig 6 19 Dps e A1050 O Rapeseed oil 1 8 FoR 1 8 FSR 20 um _ Speclmen 1 5 7 Specimen 2
27. ee ee EVAP 10 20 20nm 30 4 V A E S 0 G S EVAP 2 5 2 3 4 D P 15 30 R P R P PH 30 MI
28. 3 Pagel 3 Page2 3 800 m 80 8 800 800 Table 2 2 R c c
29. 32 3 1 os 00 32 3 2 AFM 34 3 3 FEM 40 4 1 46 4 1 gt 46 4 2 AFM 47 4 3 FEM ee 51 5 54 5s 1 54 5 2 AFM CC 54 5 3 FEM 56 6 58 6 1 6 8 6 2 NN WW 59 6 2 1 60 6 2 2 II ee 6 1 6 3 AFM lt 0 63 6 3 1 lt gt
30. ce p 2g 3 AFM 1 Fig 6 7 6 18 3496 49 65 80 6 65 8 80 6 x100 6 20 64 a AFM b c 2 9 49 Fig 6 5 ei 17 SA 20num 7 3mm Tool 1 6 A1050 O Carbon SDeclmen 1 E lt 96 SR 20 um r 3mm 10 10 Lz nm 10 102 FO DD 10 gt 10 10 10 107 4 nr Fig 6 6 Lz 4z 65 A1030 O Carbon SR 20um r 2mm Specimen 1 A1030 O Carbon SR 20 um r 2mm Specimen 1 0 7 27 107 ec 2 79 N 10 RS 0 103 103 2 2 103 104 105 106 107 108 10 103 104 105 10 107 10 10 A nm A nm2 a 8 18 34 49 65 80 b 65 A10350
31. 1 2 3 EA 6 1 4 D X 4 1 7 Te A Vl 6 2 4 Z 62 RA 6 3 D 2g Ds li As TN 7 RZ 2 ZS 1 4 pl aa oi iS a ALN eS ZSI A
32. Fig 3 2 e 0 R 5 amp e 20 0mm 5 3mm Fig 3 8 7 0mm r lmm r 2mm 3mm e Tool 2 e 30 Specimen 1 Specimen 2 1 eg gt 30 A Specimen 2 0mm 30
33. 0 8mm 5 1 25mm N L N 0 08mm 0 25mm s 4s 4 5 6 7 8 9 20 2 5 ym Lg DAT DAT 0 0 0m
34. 7 Tool 2 ec 14 23 Specimen 1 7 Specimen 2 Specimen 1 41 Fig 3 20 Tool 1 e 49 Az lt 7 7 A1030 O Carbon Tool 1 On Load P kN S 0 5 10 15 20 25 30 Compressive strain ee Fig 3 15 e 42 ec 389 0 Fig 3 16 FEM e 5 p 0 18 es 17 p 0 285 ec 24 p 0 175 e 38 u 0 38 Tool 1
35. nl Nk Lapping Lapping Lapping Grinding WA 1200 WA 4000 WA 8000 As received Alumina Alumina Alumina _10min 15min mn R 0 95 pum 0 30 hm Rz 0 10 um Rz 0 06 um 1 2 4 Fig 2 8 Fig 2 8 1 1 Fig 2 9 SKD11 HRC60 62 R 0 93um 15_002 a b Fig 2 9 2 WA 1200 Fig 2 10 WA 1200 WA 1200 td CN ee lar I
36. FH 48 30 00 x 30 00 um Z 0 00 700 00 nm Fig 4 3 AFM e 0 SR 20pm 20 00x20 00 um Zz 0 00 300 00 nm 20 00x 20 00 uml Z 0 00 300 00 Inml 8 r 0mm b r 1mm 20 00 x 20 00 um Zz 0 00 300 00 nm 20 00 x 20 00 um Z 0 00 300 00 nm c r 2mm r 3mm Fig 4 4 AFM e 45 SR 20pm Tool 1 49 A1050 O Rapeseed oil sR 20um 7 0mm Specimen 1 a 4 EN E Tool 1 ee r 3mm 40 S 0 10 20 30 40 50 Compressive strain 6 Fig 4 5 85 e Tool 1 SR 20um r lmm SR 20um r 0mm A1050 O Rapeseed ol A1050 O Rapeseed ol 60 Specimen Specimen 2 Specimen 1 Tool 1 Specimen 2 40 Tool 2 40 Tool 1 20 SEA 0 10 20 30 40 50 0 10 20 30 40 50 Compressive strain Compressive strain Imm a 0mm
37. WA 8000 0 06um 0 01um 7mm AFM Az 0 08um 0 02Lm Se20 mm Fig 2 18 AFM Fig 2 19 AFM Fig 2 20 a WA 8000 b WA S000 Fig 2 17 WA S000 Fig 2 18 WA 8000 13 20 00 x 20 00 um Z 0 00 700 00 nm Fig 2 19 AFM CWA 8000 20 0 gt 10 1 20 Horizontal position HL m Fig 2 20 WA 8000 2 3
38. Fig 2 40 FEM FEM Zs Ls Before deformation After deformation Fig 2 40 7 32 3 AFM FEM 3 1 Fig 3 1 e 27
39. Ls 0mm ec Fig 4 14 ec 6 25 ec 29 45 02 na Ls 7 8S Ls 0mm 9 8 Fig 4 15 Tool 1 ec 29 Az 7 7 Roe 9 Load P kN 0 W220 30 40 30 Compressive strain 8 Fig 4 11 e e 29 e 42 eu 10
40. R 2 RR AFM Rj Re Fig 2 33 7 6 _ direction ar Fig 2 33 D AFM 27 30 20 E 10 S 0 BD 10 20 0 10 20 Horizontal position um Fig 2 34 Az 2 6
41. Specimen 1 Specimen 2 RR Pax 4 po en Dax Mpa 3 1 4 Fig 3 4 az ec Tool 2 ea Too 1 Tool 2 Tool 1 TooL 2 Too 1 33 3 b es 27 Fig 3 1 Tool 1 A1050 O Carbon Specimen Speclmen 2 ool 1 0 10 20 30 40 50 60 Compressive strain 6 Fig 3 2 R
42. 13mm Fig 2 23 2 V S V S 0 3 EVAP G S E S 2 V A 10A 30 40A 20nm
43. 6 5 ps 5 Dps 3 70 ps ps CS MNO 77
44. Fig 2 31 Fig 2 32 AFM 3 7mm 1 34mm A 0 8um 2 9um gt So Fig 2 31
45. LL ty 0V e 13 DO AFM 14 15 2 4 Surftest SJ 400 R Surftese SJ 400 Fig 2 27 Fig 2 28 2 10um 2um 60 Surftest SJ 400 1 AC 2
46. e 77 1 xn a 8 6 4 L 1 2 3 21 3 22 7 23 13 231 13 23 2 5 16 23 3 5 16 23 4 5 17 23 5 18 2 4 Surftest SJ 400 19 2 5 CAFM 22 2 5 1 BE 22 2 5 2 II 23 2 6 27 2 7 FEM 29 27 1 29 2 7 2 30 2 7 3 Ls 5p 31 3
47. Se gt gt cos 2mk N 6 6 0 B Ve sin 2mk N 6 7 0 a 4 DS 6 8 2 II a 6 FFT 1963 Cooley Tukey p fBm Fractional Brownian Motion 7 Vp 0 lt lt 1
48. S AFM 3 R Fig 4 8 AFM Fig 4 8 b Fig 4 9 Fig 4 10 A Fig 4 9 e 6 25 Fig 4 10 e 29 45 Imm r 3mm Rue
49. 20 20 00 x 20 00 pm Max 500 00Inm 20 00 x 20 00 bm Max 500 00 nm a r 0mm Ss 16nm b r 0mm Ss 14nm Fig 3 AFM e 49 SA 20um QQ 20 00 x 20 09 hm Z Max 500 00 nm 20 0D x 20 00 hm Z Mx 5C0 GOInm a r 0mm Ss 17nm b r 0mm S 39nm Fig 3 4 AFM 10 SA 20Lum 5 3 FEW Fig 5 5 7 e Fig 5 5 a r 1mm Fig 5 5 b r 2mm Fig 5 c r 3mm z m 7 2mm 7 3mm 7 Fig 5 6 5 7 7
50. 23 Photo detector 6 Beam splitter SR Lens Laser beam ee EE Si Sample gt ee 23 05 X Cantilever 8 Piezo Scanner Bi 3 2 5 2 AFM SPM manager 2 AFM AFM 3 4 Z Table28 9
51. OS 4 12 2004 437 438 8 44 515 2003 1159 1163 9 V J Logeeswaran M L Chan Y Bayam M Saif Islam D A Horsley XX Li W Wu S Y Wang R S Williams Ultra smooth metal surfaces generated by presSure induced surface deformation of thin metal films Appl Phys A 87 2007 187 192 10 14 2002 11 16 2004 12 17 2005 13 18 2006 14 19 2007 15
52. Ps gt ps ps pps 00 lt B 90 A B Table 6 1 1 A B Dzs 1 1 Dps 1 4 I Horizontal position kL m 8 10 A1050 O Carbon 17 r direction 10 SR 20Lm r 2mm B10 10 10 10 102 101 109 10 102 4 um b Sp 4 Fig 6 8 07 Scan direction Sc
53. Pwax gg FEM Fig 3 16 x Fig 3 17 FEM 7 7 0mm Zs e Fig 3 18 5 Ls 7 Fig 3 7 e 209 Fig 3 19
54. 1 1 a WA 4000 b WA 000 c Fig 2 14 WA 000 Fig 2 16 WA 000 WA S8000 WA 8000 Fig 2 17 1 WA 8000 2 WAAS000 IG WAWS000 0 20 1 1 3
55. SPM 9500 8 11 16 B B Mondelbrot 1he Fractal Geometry of Nature 1982 4 5 17 1986 1 19 18 1990 39 40 19 7 40 462 1999 7 635 639 20 2 7 1996 8
56. 0 6 0 1um 0 08 0 01 Fig 2 7 AFM 360 1 Table 2 1 A1050BD H14 AI050BD 001 009 012 000 00 00 00 00 4 0 8 0 02 Fig 2 2 Fig 2 3 Fig 2 4 WA 1300 Fig 2 6 3um 30 00x30 00 bm Z 0 00 700 00 nm a 3 Height nm 300 0 9 10 15 20 Horizontal position L m b Fig 2 7 AFM ec 0 SR 20um 2 2 Fig 2 8
57. 5 10 5 WA 4000 0 10um A 0 03um Fig 2 16 6
58. ec 6 25 1 50 A1050 O Rapeseed o1 40 7 1 mm SR 20um A1050 O Rapeseed oil r 3mm SR 20pm Cc 29 90 5 30 30 Cs 42 e 45 90 lt 20 lool 1 10F 0 r Direction Direction a r 1mm b r 3mm Fig 4 10 Rg ec 29 45 4 3 FEM Fig 4 11 FEM e e 3 FEM Fig 4 12 FEM Fig 4 13 ec 6 25 ec 29 45 FEM 7
59. Tool 1 Dz Ls Fig 6 14 Tool 1 Dz Zs zz MTEL Me Tool 1 Dz S S Fig 6 16 Tool 1 gt 5 Tool 2 Dz 5 7 Dz Dz D2 08 A1030 O Carbon Speclmen 1 SR 20um r lmm e 38 104 10 10 3 4 5 6 7 8 9 10 103 104 10 10 10 10 10 103 104 105 105 107 108 10 Az nm A nm a b e 38 r lmm Fig 6 10 7z 4z Specimen 1 1 8 HSR 20Hm
60. Fig 2 22 0 lS 2 3 2 Fig 2 24 1 0 0sml 1m 100ml 0 23vol 20ml 100 20ml 150mm 2 3 1 DD c CD Fig 2 24 2 3 3 REH 30
61. Sz Sp 6 17 4 const Sp NN 6 18 Sp Ac 7 Dps 63 Dps 2 0 lt lt 1 Dps B 1 lt lt 3 6 19 Ds 3 lt p E 1 6 3 AFM 6 3 1 Dz AFM SR 20pm x 20um SR 20pm SPM X 2 WinROOF MITANI CORPORATION TIFF
62. 7 Vy fBm 62 Y XG 6 9 r gt 0 7 D YO 0 lt 7 lt 6 10 Y 7 7 FAt 79 6 TD X t 7 KC 79 7 Sx DD XG TD PU 9 yy RT Y Ne gt 6 11 2 s r t ds r dt lt F f T 7 6 12 A 1 ffA a a 6 13 ta ta Sa fs 7 2 IE 6 14 r Y X 9 6 15 r Wi 1 Sr lt wm 6 16 6 16
63. Mandelbrot fractus 2
64. WA 8000 WA 4000 WA 1200 21 Fig 2 29 2 S AFM 2 5 1 SPM Scanning Probe Microscope Fig 2 30 SPM9300J3 DELL OPTIPLEX GX 150 MITSUBISHI RD17GX II MEIRITSU AZ S SPM SPM AFM Z X Y mn NZN em D9R GA
65. AFM S Fig 5 4 b r 0mm r 1mm es 27 r 2mm S 4 Snm 0 29 SR 20hm r lmm A1050 O Specimen 1 Carbon Rapeseed oj 60LN 1ool 1 sR 20um A1050 O Carbon Speclmen 1 Rapeseed ol Tool 1 rr 0mm 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Compressive strain 6 Compressive strain ec a r 0mm b r 1mm R20 pm r 2mm A1050 0 7 3mm A1050 O Specimen 1 Specimen SR 20um 60 60 Carbon Carbon E Rapeseed oil Rapeseed oll 40 Tool 40 Tool l 20 20 0 0 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Compressive strain ee Compressive strain d r 3mm gt A c r 2mm Fig 5 2 8S e
66. Fig 2 25 9 8 24 5 49 98 245 490kN 6 490kN 800mm 1000 1 0 80mm min Fig 2 26 17 180 130 250 Lower die holder Fig 2 26 _ 2 3 4 ec e to t X100 96 2 1 to 6 4 2mm min AN LINEAR GAUGE SENSOR GS 112 ONO SOKKI DIGITAL ANALOG OUT GAUGE DG 450 NEC
67. e 100 10 CompressiVe strain 6 Fig 3 3 y e 34 Tool l Tool 2 Pmean MPa CN OO 0 10 20 30 40 50 60 Compressive strain Fig 3 4 Pmean 3 2 AFM AFM Fig 3 5 AFM Fig 3 6 Tool 1 e 27 AFM 0mm Imm 2mm 3mm Fig 3 7 Tool 1 5 e e 5S
68. 57 A1030 Tool 1 Carbon Rapeseed ol 0 0 10 20 30 40 350 0 10 20 30 40 50 Compressive Strain 6 Compressive strain eE 9 a r lmm b r 2mm A1050 O 1ool 1 Carbon Rapeseed ol 0 10 20 30 40 50 Compressive strain 9 c r 3mm Fig 5 ps e Carbon Rapeseed oll CEc 49 43 Tool 1 Carbon Rapeseed oil 24 23 Tool 1 E15 151 10 10 SR 20 um 5 Specimen 1 Speclmen 1 A1030 O 0 00 0 1 0 2 0 3 0 4 0 5 0 0 2 0 4 0 6 0 8 1 1 2 mm Ls mm a ec 24 25 b e 45 49 Fig 5 6 S S 58 6 AFM FEM 6 1 fractal 1975
69. TI RA1200 98 kN IN 982 60 Xx mV 49 kN N 1 493 13 Xx mV 24 S kN IN 247 96X mV mm 0 0982 x V 2 3 5 rite 3 eee 2 5 mm
70. Fig 6 1 Fig 6 2 Fig 6 3 Mandelbrot Van Ness Fig 6 1 9 A A OO AA A Z AA gt gt 2
71. 0mm 1mm mm 1 6 0 direction 7 Mm 6 0 direction 2mm 1 7 3mm r 3mm 1 4 Tool 1 1 4 Tool 2 12 a 1 2 1 1 0 10 20 30 40 50 60 0 10 20 30 40 30 60 Compressive strain 6 Compressive strain 6 Fig 6 20 s e A10S0 O Rapeseed ol 1 8 HR 2 lt 0hm or 0mm Specimen 2 7 1mm 1 6Hrdirectton 2mm A1050 O Rapeseed oil 1 8LSA 20Lm ee r 0 Speclmen 1 rr i r 3mm A r 3mm a Tool l a 1 4 TS 1 2 A 0 10 20 30 40 50 60 0 10 20 30 40 30 60 Compressive strain Compressive strain Fig 6 21 zs e 73 A1030 O Carbon direction SR 20um A1030 O Carbon r direction 1 6 1 6 amp o0 Speclmen 1 e 5 SR 20 cc 5 0 13 7 Sn 1376 al 0 se 17 al 6 lt 20 A a 1 4 we 24 1 4 TC L4 Tool 1 Tool 1 Initial Speclmen Imitial Speclmen 1 0 0 2 0 4 0 6 0 8 1 1 2 0 0 2 0 4 0 6 0 8 1 1 2 Ls mm mm 8 b Fig 6 22 Dps Zs ec 5 24 2 2 A10S0 O Carbon Initial Specimen ec 27
72. SR 20um r 3mm A1050 O Rapeseed ol Specimen l SR 20um r 2mm A1050 O Rapeseed oil Specimen 1 o Specimen 2 Specimen 2 40 Tool 40 Tool 1 S Tool 2 S 20 20 0 WER ee 0 10 20 30 40 50 0 10 20 30 40 50 Compressive strain Compressive strain c r 2mm d r 3mm Fig 4 6 S e Height nm 0 A1030 O Rapeseed o SR 20 Hm 29 A1050 O Rapeseed ol SR 20pm 62 40 1 40T Specimen 1 ec 4296 30 30 gt 20 a 20 OE RE 0 0 0 i a i y We b ee 29 45 a ec 6 25 Fig 4 7 Ss xr Height nm 00 5 10 15 20 0 5 10 15 20 Horizontal position Am Horizontal position hm a ec 50 r 2mm ec 42 r 2mm Fig 4 8 AFM S 20um gt A1050 O Rapeseed oil mm SR 20um A1050 O Rapeseed oil r lmm 9R 20hm 40 40 Ee 60 CEc 109 o CE 0 6 VY EC 0 3 20 eg 20 e 25 0 Tool l 10 0 2 0 Direction Direction a 1mm b r 3mm Fig 4 9 Rae
73. ae 0 10 20 30 40 50 60 0 10 20 30 40 50 Compressive strain Compressive strain 6 a Tool 1 b Tool 2 Fig 6 11 Dz e 2 1 8 oR Specimen 1 1 6 1 4 2 1 1 0 10 20 30 40 50 60 0 10 20 30 40 30 60 Compressive strain Compressive strain a Too1 1 b Tool 2 Fig 6 12 Dz e 0 0 2 0 4 0 6 0 8 1 1 2 Loe mm A1030 O Carbon 1 8 Speclmen 1 a ec 5 24 Fig 6 13 Dz Ls A1050 O Rapeseed oil 8 PR 20um Specimen 1 e 0 29 a e 10 A ec 42 e 21 _ 45 ec 2590 3 eB naB naB Initial Specimen 0 0 2 0 4 0 6 0 8 1 1 2 Ls mm Fig 6 14 z 7 Fig 6 15 Dz 58 A1050 O Carbon 8 SR 20um Specimen e 27 ec EC 33 EC 3 gt cc e 37 cc 0 0 2 0 4 0 6 0 8 mm b e 27 49 69 38 1 1 2 70 A1030 O Rapeseed oh Intial Specimen e Specimen 1 SR lt 0hm o Sbecimen 2 Tool Tool 2 Fig 6 16 Dz S 65 Dp
74. 21 ul H 4 4 4 45 Ay 4 gp Ds Dps Lz Ls Py pmean Rs RR AFM Rz Az AFM S AFM SR Sp X
75. Fig 6 5 a TIFF WinROOF Fig 6 5 b 1 SR 20pm 512X512 1 39 1nm 2 Fig 6 5 4 10 236 2 2 AFM _ 256 256 18 34 49 65 80 0 5 Excel Microsoft Fig 6 6 Lz 4z
76. ea ps Fig 6 22 Fig 6 23 Tool 1 pps 7s Fig 6 22 ec 5 24 Fig 6 23 27 49 Fig 6 24 Tool 1 Zs 7 Dps Fig 6 25 Tool 1 Dps Ss Fig 6 26 Tool 1 Dps S p 5 pps py pps
77. 2 Fig 2 2 Fig 2 3 7mm 6 5mm Fig 2 2 3 3 Fig 2 4 4 6 0 83 0 01mm 2 1
78. DN I CA i Fig 2 13 a WA 1200 b WA 1200 c Fig 2 10 WA 1200 Fig 2 11 D WA 1200 Fig 2 12 WA 200 Fig 2 13 10 3 WA 4000 Fig 2 14 1 WA 4000 WA 4000 2 TRUSCO TO SP10 1 20 3 3 2
79. Specimen 1 Specimen 2 e AA Specimen 1 Specimen 2 R Specimen 2 ee gt 30 e a b e 45 Fig 4 1 Tool 1 47 A1050 O Rapeseed oil Specimen l Specimen 2 lool 1 Tool 2 0 10 20 30 40 30 60 Compressive strain Fig 4 2 A e _4 2 AFM AFM Fig 4 3 AFM Fig 4 4 e 45 AFM 0mm
80. A AN SN AA A amp A EAE A AN NO AMD CA OO ASA AN Fige 6 2 0 1 3 2 3 1 Fig 6 3 6 2 7 0 1 2 3 4 7 5
81. A fr NT 7 TIL SI NT TT TT Cross section Zerosets Fig 6 4 61 6 2 2 FFT 4 _ x eH a 6 4 x x n fn 0 1 2 1 DFT 1 0 a i 6 5 n 0 WM 6 5
82. PO AN 0 AO 2 TO 5 EN EE Optical microscope NND FR iis SPM unit FE Pe i de Fig 2 30 SPM SPM 9500J3 CK Y 30 um X30 uum um LD 4 PSD 24 mm X8 mm Digital Signal Processor DSP
83. 43 s 3000 Ss A1050 O Carbon Tool 1 2 2000 FEM gt ec 9 90 8 cc 13 amp 1000 pd e 24 SS 3 tam 0 02 0 4 0 6 0 8 1 1 2 Ls mm a e 5 24 a 27 2 33 CL 35 6 9 QO 0 02 0 4 0 6 0 8 1 1 2 Ls mm b e 27 37 cc 38 2 6 39 Cc 42 CE 49 950 0 0 2 0 4 0 6 0 8 1 1 2 Ls mm c ec 38 49 Fig 3 17 FEM 44 A1030 O Carbon ec 2 Specirmen 1 0 0 2 0 4 0 6 0 8 1 1 2 Ls mm a ec 5 24 50 A1030 O Carbon 40 Speclmen 1 SR 20 um e 27 ec 33 2 00 2 206 Tool 1 0 0 2 0 4 0 6 0 8 1 1 2 mm b e 27 37 50 A1050 O Carbon 40 Speclmen 1 6 3 8 9 6 SR 20DO mm ec 42 Ec 49 lool 1 0 0 2 0 4 0 6 0 8 1 1 2 mm c ec 38 49 Fig 3 18 45 Specimen 1 Specimen 2 15 1 4 ec 17 23 lool 1 Tool 2 A1030 O Carbon SR 20 um 15 KkSpecimen e 49 9 0 4 directi
84. O Carbon 106 LSR 20um r 2mm Specimen 1 Ec 2 7 10 102 104 106 108 10 4 nm c 80 Fig 6 7 6 3 2 Dps 6 3 1 AFM Fig 6 8 a Microsoft Visual Basic 6 0 1 FFT vbp FFT 5 4 Sp 2 Dps Fig 6 8 b Dps Drs 3 AFM
85. O Carbon 40 SE 20hm eec 37 SDeclmen 1 2 3 Measured position 7 mm c ec 37 42 0 38 A1050 O Carbon 4 SR 20 Ha 6 24 Specimen 1 27 Ce 33 30 96 bi Tool l 20 10 0 0 1 2 3 4 Measured position 7 mm b e 24 35 50 A1050 O Carbon 40 SR 20 Hm ec 47 Specimen 1 ec 49 30 20 0 2 3 4 Measured position 7 mm d ec 47 54 Fig 3 9 gt A1030 O Carbon Specimen l e 13 Specimen 1 e 17 Specimen 2 e 14 A Specimen 2 e 23 Tool l Measured position 7 mm Fig 3 10 e 13 23 39 50 50 A1050 O Carb 2 A1050 O Carbon 40 i 40 r 3mm SR 20hm 30 30 ee 20 0 LO RR 10F SDeclmen 1 0 J Direction Direction a r 1mm b r 3mm Fig 3 11 Rie ec 5 20 7 A1050 O Carbon A10350 O Carbon r lmm SR 20um r 3mm SR 20um 40 40 UL 24 6 2 790 30 e 33 30 6 35 lt s 20 Tool 1 20 10F Aon tah 10F Speclmen Speclmen 1 0 0 5 Direction Direction a r 1mm b
86. U 0 21 ec 21 U 0 14 ec 29 U 0 093 ec 42 U 0 060 Tool 1 Fig 4 12 FEM i 53 essure MPa Contact Dr 2000 S2000 A1050 O Rapeseed oil Ss A1050 O Rapeseed oil Tool 1 1ool 1 1500 FFM S1500R EEM yh e 29 CE 900 90 1000 lt 51 81000 5 1 500 500 0 02 0 4 0 6 0 8 1 0 0 2 0 4 0 6 0 8 1 Ls mm Ls mm a ec 6 25 b ee 29 45 Fig 4 13 FEM p Zs 0 0 A1050 O Rapeseed ol 40 Specimen 1 SR 20 Lm A1050 O Rapeseed o1l 40 A Specimen l e 29 6 R 20 Hm 4 42 30 30 ec 45 E E Tool 1 2 20 2 20 OE SN GRGRISI2 INIZII OPTSTTT TTPTT 0 0 0 0 2 0 4 0 6 0 8 1 1 2 0 0 2 0 4 0 6 0 8 1 1 2 Ls mm Ls mm a ec 6 25 b ec 29 45 Fig 4 14 8S Zs A1050 O Rapeseed ol SR 20um Specimen 1 ec 29 4 Qdirection 7 direction Tool l 0 0 1 0 2 0 3 0 4 0 3 0 0 Ls mm Fig 4 15 Rae Ls ec 29 54 5S
87. ec 387 3396 C 39 Initial Speclmen Tool 1 Speclmen 1 e 27 3876 e 3396 ec 390 1 6 LeC 35 ec 4290 1 6 me 35 e 4276 e 49 A 37 e499 1 4 1 4 Speclmen 1 SR 20um 1 25 12 direction 1 1 0 0 2 0 4 0 6 0 8 1 1 2 0 0 2 0 4 0 6 0 8 1 1 2 Ls mm Ls mm a b Fig 6 23 Dps Ls ec 27 49 2 2 Initial Specimen Tool 1 Specimen 1 C 0 6 299 oe l0 ec 42 mg 2196 ec 45 e 25 SR 20um A1030 O Rapeseed oil J rdirection Initial Specimen Tool 1 Speclmen 1 e 6 ec 2970 oe 10 ec 429 mg 2196 ec 45 e 25 SR 20um tt i 18 rh 0 0 2 0 4 0 6 0 8 1 1 2 0 0 2 0 4 0 6 0 8 1 1 2 Ls mm Ls mm a b Fig 6 24 ps 7 Initial Specimen e Specimen 1 e Specimen 1 1 6 SR 20hm o Specimen 2 1 6 SR 20hm o Sbecimen 2 ts OO 1 4 O2 9 Tool 2 m1 4 00 direction 1 2 1 2F HRP NGI 0 6 0 8 0 20 40 00 80 0 20 40 60 80 Sa nm Sa nm a b Fig 6 25 Dps 3 Initial Speclmen Le woopm 2 Se
88. es se se 0 Ws 63 32 Ds 65 6 4 gt 67 65 lt 70 7 75 i RET 55 77 5 0 78 1 P 50 gm
89. r 3mm Fig 3 12 Rg ec 24 35 50 50 A1050 O Carbon A1050 O Carbon 40 mm SR 20um 40 r 3mm 9 SR 20um ec 3796 lt 5 38 6 6o B30 C 39 C 42 s e 42 20 ee foFi 20 Toohi 10 ee 1 SDeClrmen Speclmen 1 0 2 0 Direction Direction a r Imm b r 3mm Fig 3 13 e37 42 40 A1050 O Carbon A1030 O Carbon r 3mm SR 20um r lmm SR 20um 4 e 49 EC 497o 30 e 50 E 30 e 50 s lt e 54 e 54 cg 20 Tool l 2 lool 1 10 OR Specimen 1 0 2 0 Direction Direction a r lmm b r 3mm Fig 3 14 Rg ec 47 54 3 3 FEM Fig 3 15 FEM e e S Sr DSx mm 3 2 MAX Sr DS
90. 0 00 x 20 00 Lrm ZZ 0 00 300 00 nm a 0mm b Imm ann nn 200 NN nm nmj UEU oco ON a DJ an 20 00x 20 20 Lm Z AON 200 00 nm 20 00 x 20 90 lm Z 000 300 00fnm c 2mm 3mm Fig 3 6 AFM e 27 SA 20um Tool 1 37 A1050 O Carbon SR 20um Specimen 1 60 4 r 0mm 1mm r 2mm r 3mm 0 10 20 30 40 50 60 Compressive strain 6 7 Fig 3 7 5 e SR 20 um r lmm A1050 O Carbon Specimen 1 Specimen 2 SR 20 um r 0mm A1050 O Carbon Speclmen 1 Specimen 2 ool 1 001 7 Tool 2 Tool 2 I 0 0 10 20 30 40 50 60 0 10 20 30 40 30 60 Compressive strain Eu Compressive strain a r 0mm b 1mm A1050 O Carbon r 3mm Speclmen Speclmen 2 SR 20 um rr 2mm A1050 O Carbon Specimen Specimen 2 ool 1 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Compressive strain CompressiVe strain c r 2mm d 3mm Fig 3 8 8 e peclmen 1 5 gt Ec 20 0 2 3 4 Measured position 7 mm a e 5 20 50 A1050
91. 38 FEM Table 2 4 FEM 02 Symmetry axis Tool dependence Fig 2 38 FEM 30 Table 2 4 FEM 2 2 7 2 Fig 2 39 FEM FEM 0 01 1s FEM u 0 01 YES Fig 2 39 3 2 7 3
92. Initial Speclme a e Specimen 1 1 6F SR 20hm o Sbecimen 2 Tool l Tool 1 21 4 Tool 2 el4 20 0directionl Q 1 2 1 1 095 20 40 60 80 0 20 40 60 80 Sa nm Sa nm a b Fig 6 26 ps 5 74 75 7 Rz 60nm R 10nm AFM FEM D Dps
93. an direction Rotate 90 Fig 6 9 Dps Tool 1 Table 6 1 CO Tool 1 rs RT SA RT OE 1 OG CM ER 6 4 D gt Fig 6 10 7 4z Lz 4z Fig 6 11 Tool 1 Dz e Fig 6 12 Tool 1 gt e Tool 2 Tool 1 ee Tool 2 se Ue912 BUOIE 9 Fig 6 13
94. on a y direction 0 0 2 0 4 0 6 0 8 1 1 2 Ls mm Fig 3 20 Az 6 49 46 4 3 AFM FEM 4 1 Fig 4 1 ee 45 Fig 4 2 A 3
95. ool 2 e 14 23 Specimen 2 r AFM AFM A Fig 3 11 lt Fig 3 14 AA Fig 3 11 e 5 20 Fig 3 12 ec 24 35 Fig 3 13 ec 37 42 Fig 3 14 47 4 Imm 3mm A 36 30 00 x 30 00 um Z 0 00 700 00 nm Fig 3 5 AFM ec 0 SR 20pum 20 00 x 20 90 Lm Z 0 00 300 00 nm 2
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