表面性状測定用非接触検出器 CrispyPU
Contents
1. 0 8 mm Evaluation length In 4 mm Cut off wavelength Ac 0 8 mm JC JHSS XA 2 R parameter A aM A E E E Pe MS A Ae ee es R Crispy B f Stylus detector eEO PPAR Ee 4 Fen AA a AE AESA ATSE ee AAA E SE e Arrn FEE 7 aena oa aAA Ra 0 614 0017 um 0 636 i 1 5 2 25 3 429 0 158 um 3 645 um X EK MRA Zii UZ ICSS RE Measurement Length mm YAR A BCI ERA EDE tR Features JEt Non contact FEAR CO WWE D Te MEAR Hrs CLES AT amp OT V DIOSA AD DE b PRETT VAG CRAY ECI BRUT LED AAR ARYY Measurement of the soft material to which gets damaged in a stylus detector is possible And measurement of a rubber a sponge a liquid or an adhesive sheet is also possible X 4mm Y 4 mm Z 6 um JA Rubber Zlum 23 0 X 3 mm Y 3 mm 18 0 13 0 X um Z um AnmRYY Sponge Z um 2 0 0 0 2 0 S00 T 30 1200400 n et X um 1600 agg gt Sooo 555 lt 7 h Adhesive sheet f i7 fhe High resolution FR as SR AC db V BRD M I RERU Ra Bi nm K nm 225 WEDS ARE CT A low noise was realized though it is a detector drive style Ra of Several nm height of tens of nm can be measured Z um SRa 0 7 nm 0 0025 X 2 mm X 0 4 mm Step Height 65 nm jimi Y 0 4 mm anin Z 4 5 nm l E 0 024 50 P ioo 0 008 0 008 zA Y bom z 0 001 0 0 024 0 040 Cr 83818 Chrome deposited film Cr 7512 Chrome deposite2. DYES SIL 0 When a more highly precise and wider measuring range Is required L t AF RHA Laser AF detector te Feature t Feature 100 um LA EO Ye RE FA gt AERO RRE 3 KWE ACE Ten FRY Y gt AE The measuring range of 100 um or more A E FRIRE Aa White light interferometry detector e High speed 3D measurement of the narrow area It is strong to a slope film thickness measurement WAT ey sy Sina Camera image CELE EES ket ae Ics Head of detector RAM LHIoxth Various worked surface X 2mm Z um Y 2mm 10 0 X 4 mm fia a 00 Z 25 um ON Y 4mm A T A L 5 0 Z 2um AMIE ee 0 60 3 5 bg ARLE HE eile ag 000 N 10 4 5 0 TI AERE A T so 0 20 209 N 10 0 5 ee MRE APR eta Y um 0 60 g W A 08 O soono ERA A X um Balog N pe 15 0 2000ra MM 500 7m Woo 1eotP2 X um 0093600 sang 4000 W Cutting HHH Grinding 15 0 X 4mm Y 4mm 100 Z 25 um 0 50 500 1000 00 z 1 S T Y um N 0 50 1000 1500 X um 2600 3000 pan 00350 3500 song 404 X um 100450 Eog 500 v WWMI Wrinkly textured surface WE 2FL Polishing Porous material X um Zim i B00 dndi 1so00 0000 25000 X 4mm Y 4 mm Z 25 um Y has AEINDORHIROISIR ITSO MOE A Crispy DA ASMA MPO REAR OCTA FAS htk sL TTNET HAZE RE Measurement condition Roughness profile is in agreement with a stylus detector except for the amplitude for a RS In 4 mm higher frequency curve is large Ay ZIE Ac
3. Etk Specification Bl 320 Measuring range aa H tE JH gt HI ae ae H JER AH HH pa 2 Resolution 2X EI IA AE M FTA ATR A AA The diameter of the spot in a measuring range REHE Accuracy ELIE Repeatability Non contact Detector for Surface Roughness Measurement Cris 4 or more ENAS 25 Measurable angle SA W D y Bx AW 7 Maximum power D4 Ke Wavelength Laser AFA Class Mass X1 Fg 0 eX PJE A change of the mode is possible 2 EE EME Be ERE ZME L724 When Kosaka standard roughness specimen is measured X3 MATE CHIE LE BA OACEIKTHBD b OEE The angle of a measurement surface and a horizontal plane when it measures near a focus point PU OS500 CHAORIS RINSE ORA LO AMRA Ek Simo AK AER FCO ESOS aP Cais LIFLV CIEE FIFU lt SB ELSES AS A RBI CORACEACCD ODES Frior to operation please read user information Do not install the instruments in humid dusty or hostile in the technical manual supplied environments to prevent mechanical or electrical failure Tokyo Business Office Mikuni East Bldg 2F 3F 6 13 10 URL http Awww kosakalab co p Sotokanda Chiyoda ku Tokyo 101 0021 Japan HE T101 0021 ARETRERAHH 3 10 52 2AE Telephone 81 3 5812 2011 Facsimile 81 3 5812 2015 AANA a D8 l2 208 1 FAX 03 5812 2085 Home Page http www kosakalab co jp L E mail tokyom kosakalab co jp ES T101 002 SARTREN 9 4 AKEILIE TEL 03 5812 201149 FAX 03 5812 2015 OZRERTE
4. HLET H LL ADE RMEL EHD amp 37 Height B TOHLE EEIT ELR ET TOR MRAZY ALOK AY ry amp WAG TIED Zed FA RE 2 HEA ID7RFARIDICRE LET wae age E VAE Height A ICHAWaIS aan Fo KY peice Height C HEHA amp BAO CARDED COLD BRO WM E A ee wee a ae dh DICK OD BON FASE AG LOS lt R HED HB BTV ALDOMICHT LE DTD BASIE A lt Ze 0 EFT HAT OIERIL EA FDR A EO KES RS 77D SRALET HIVES ORASIEDAEe RET SO EC RDD DEREZ ROE A measuring plane is irradiated with red laser light And the light reflected by the measuring surface is collected by an object lens This collected light is parallel light when the focus position of the object lens coincides with a measuring plane Height B At this time the angle between the reflective surface of the critical angle prism and the parallel light is set as a critical angle It becomes diverging light when a position Height A nearer than a focus has a measuring surface And it becomes converging light when a position Height C farther than a focus has a measuring surface When such an diverging light or converging light reflect by the critical angle prism the reflection angle of light flux which is in one side from the center becomes smaller than a critical angle Therefore since a part of light comes out of a prism reflected light becomes weak All the light flux of another side is reflected since the reflection angle becomes larger than a critical angle The distance from a foc
5. ORAEA i E mailtokyom kosakalab co ip TEBE ERR 321 4346 ARRARAS a TEL 0285 83 4966 FAX 0285 62 3430 AlkS SPR 1532 00 AAR ae ECE A 1 1 2 TABR IO eI TEL 06 6885 0765 FAX 06 6885 1976 ptes T465 0025 nena Ftr3 609 cats EL TEL 052 705 1801 FAX 052 705 1804 LSB 341 0035 St R Pnees b3 TEL 048 955 1211 FAX 048 955 1218 J F aP ry ra ae JL Pa Bo I 7321 4346 MARRANTA PR TCMER ROK SRV ERTSLEMSUET 2014 02 TEL 0285 82 8476 0 FAM 0285 82 3430 Specifications may change as systems are up graded Brin Hari REELHY OD Se AHA S MER e BaET SET HE C4 poy EF TRV WER EOR ME Ze JE CHE n detector is a unit which enable measurement of surface texture of sample by non contact by connecting with our surface roughness measuring instrument RI Principle PARE SL gt RMWAX Critical angle focal error detection method PD2 PD2 PD2 Height A Height B Height C FE BOE FT IE WHR IE Diverging light Parallel light Converging light si DthStA k JJA lt 4 Photo Diode Critical ange _J gt PD Prism q S LAS D PERIPE gt l PD2 QTY A kKLYR 1 4147 4 Retarders am L Object Lens ale Measuring Surface MEZA Ht Standard combination FEAR HH a Crispy fill 7 h BRAHE PR ae N D Collimate Lens S sU N c 2 4 N L t Aa z ZIF R a Laser Diode RRR ZIT ETSA SVIFT WANE TH RH XS teem PS ME CRA n H RT o CHRM
6. aster than stylus detector And detection of the thin groove scratch etc which a stylus detector can t measure is also possible Z 3um Zum Z 0 2 um Zlum X um 0 00 X um 0 000 0 100 200 300 400 500 600 700 200 900 1000 0 100 200 300 400 500 600 700 800 900 1000 0 20 a 0 040 S S 0 40 2 0 080 _2 5S 0 60 53 0 120 gt S gt s S 0 80 0 160 S 2 1 00 B 0 200 So B Ake cue Hak ov 0 1 um Stylus detector tip radius 0 1 um Crispy LU PRaA Telok X fur Zfum 0 10000 20000 30000 40000 50000 60000 70000 80000 AE ORR IAC TOT Er SAYRE ek L_LeDoASe BIETS EC ERF Z xE T TORD HWE C AERO KIWE LY RERIT E AM ERA Orr PEDS ZR FHT FT ete Okay ee FE ASC JANE Ba A C720 ET ko Bee FES HIE D gt D DA HO 972 WEE CAS 1 ODMR CHIE BT HE CH Y Gin SOCOM COMO AIS OOOO NSSOCRO0NTS00NNONGI0D 0 9 42a BE Waviness T gt Crispy is a detector of the point measurement which uses a laser probe T hin ESR eR NIE ONGI Te La Zlum 020 FEL amp WE ii Form data is obtained by measuring height driving a table or drive unit Therefore there is no restriction of measurable area by object lens Roughness 7 magnification like a microscope style measuring instrument All the driving ranges of a table or drive unit are measurable area X 0 2 mm Therefore from short roughness measurement to long waviness Y 0 2 mm measurement can be measured with on
7. d film thickness AZEORMK Surface roughness of bore AVON PRF PERO FE Betih te tie CULE TE 0 TAFE O Fe HEAR ES FT BE CF Surface roughness measurement of bore which was difficult in the existing non contact detector is possible by compact optical arrangement lun 600 508 40 30 20 10 3 Z um 3000 2500 2000 X um EHRE Form removal RHENE 7I Y lbe Measuring object with which reflectance is different EERO MM CIS Ee NRO BIC D I 7 Po TE NRO MBE ZI ev Vike UPR ES amp SIERA CBOE SIVEF BEE 60 KHK 5 HR 60 Even the measuring object of extremely different reflectance Reflectance 60 Reflectance 5 Reflectance 60 which is difficult in an optical detector the Crispy can obtain TA about the same result as the stylus detector which is not affected by reflectance I A ol ra al ZS A Microscope image 4 oa 409 00 800 1090 1208 10a 1689 1880 X 2 mm Y 0 6 mm Z 25 um Z g gt m Dd 0 soo 400 Crispy fihaet suRe tas Stylus detector meal High speed FAR ICIBtE L CH ROOD BREEDS ABE CT Z DAITE Aer HAR IC EES 5 FRO UREE CME TCE ELT To PREP CILA 0 IAD TRV ANY B7R LE DRHE ATHE TT High speed measurement is possible since there is no parts which EARLE Measuring condition PR a XE oF WERE Detector X Pitch Speed REFI Contact type 5 um x5 mms moves while tracing the surface In this example It measured 5 times f
8. e detector Z 0 5 um 7 AF BE MIX EXI A large sized measuring object can also be measured Hae SE ZR OC WEDOKE SPH CEB NEE Since it is a detector drive style it is not influenced by the size and weight of a measurement object
9. us is measured by detecting change of those reflected light HS ye eA GE BLT TL FA RER Non contact detector Store box Bracket amp Arm Buffer Amp Circuit board Connection cable Roughness specimen Crispy Control software Instruction manual Inspection report fi Hie Easy operation FR EO Et AHH Attachment of detector is easy YF DEE E ART FORRMOAT AEETI ZARI HHA e OTRA fa HA EITA T CLABES TUUA koe MEHRI Hee amp O BI amp HRT AU DMBICCEET Only by fixation of a knob and connection of a connector Crispy can be easily changed from a stylus detector A tool is unnecessary Therefore correlation of a stylus detector and the Crispy can be checked easily TIY y KART Bracket Style T LAAT Arm Style BaicHAApPt Focusing is automatic Mi WES HT SAIC MICRO Re FR CADE SHER HO ETA A hA by TREICC EY RR Hard Mie CAM CHM LETOC BRA DEST AYER HU ETA Usually it is necessary to manually focus the sensor on the sample surface before measurement But this sensor doesn t have the necessity of focusing manually since the sensor is focused automatically by Auto Stop function L TPHEOR fH A setup of laser intensity is easy b PO Gee 20 Bebe CREA HERD ERA BOU 7 COMED ABE CT S6ISNIBY 7 PORA g IR D 6A ICE CE ET It can measure low reflectivity sample since laser power can be changed in 20 steps Laser power can be set up easily looking at the meter of attached software S bI AmE BUA ERA
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