1. RY NN 2. Q E Q PT Nz Q 3. i a Z 1 7 Q 9 4. URL http www smcworld com SMC oe CoWUPUE K7 1 2011 SMC Corporation All Rights Reserved 5. M3 2 M3X15 L 0 3 0 02 Nm aa L i gt Eh 15D Um OL ab e gt wax15 D lt Ne Bs M4 2 4 1 mm L 0 32 0 02 Nm LB 0 2 3 et M4 4 6. UL UL1310 2 UL1585 30 Vrms 42 4 V Ns N URL http www smcworld com s i DIN 396F S 7. IN 500 kPa Hm FG 8. 1 mm URL http www smcworld com PFMV5 URL http www smcworld com 1 1 5 mm 2 9. GSNVC 6 PFMV5 Ms SMC PFMV5 URL http www smcworld com ISO IEC JIS