ZT67 脱着式デジタル圧力計(1.125集積化対応)
Contents
1. 0 0 OO O SPECIFICATION ZT67 00 00 000 OO 0 ZT 7 Detachable Digital Indicator oo E E ES E oo oo UI O00 0 Pressure range MP gt 00 1MPa 0 19 0 5MPa gt 0 10 IMPa u 0 D Pressure display 1 20 LEDO OO O00 0 0 10m0 1 2 digit LED display Character height 10 mm D Accuracy 1 00 F S 0 1digitg O 0 00 0 Comparator output END DDDUDDDDU x00 200 O00 0 30VDC 80mA NPN open collector output Two independent outputs Maximum ratings 30V DC 80mA CC CH w wo D DUT UU Power supply and consumption 129 24V DC 100 0 30mA DCO D 12 to 24V DC 10 30mA DC or less 00000 0 D Other functions OOoOO000 1 DUDUDUI DUDUDDDDDDDDDDD HDDDUDUIDUI DUUUDUUDDUUDDDUDDUDDUDDUDDUDDUUDU Display scaling comparator operation switching filtering peak hold zero suppression and key lock Lef mm O O Connection UUDUDUDDUDUUD OOOUZIMOOOOOOO0O000000O Quick connector Used with the ZT17 Integrated Pressure Transducer Ges 0000 0 C Analog output option 0 5VDC 30 F S 0009 10kOQ 9 Load resistance 10kQ or Over o 2 meter long cable ON 1 125 Mode ZT67 Detachable Type Digital Pressure Gauge O OO outiine UDUDUDDUUDUDUUDUDUDUDHDUDUDUDHDDDHDDDDD DUDU D DDUDDDDDDDDDDDDDDDDDDDDUDDL2S0DDDUD UDDUUDDDUDUDUDUDUDDDDDDUUDUU UD UUDUDDUUDUDUUDUDDDUDDDUDHDDDDDDDDDDDDDU DU DDDUUDUDDUDUDDUDDDDDDDDUD In addition to conventional pressure transmitters an2. independent Analog output option 19 5V DC or A7 20mA DC Transducer are always manufactured with ZT17 Transducers Comparator output NPN Open collector x 2 output independent Analog output option 19 5V DC Accuracy 3 F S Transducer are always manufactured with ZT17 Transducers ooog0 OoO00ggdg00 0000 0000 0000000000 0 000 OO The contents in the catalogue are subject to change without notice ISO90010 IS0140010 QS9000G 0 0 0 ood O00 0 143 8544 QO 00000000 30 g OQ TEL 08 377605311 FAX 08 3776 6320 HEAD OFFICE 1 30 4 HIGASHIMAGOME OHTA KU TOKYO J APAN LD 8544 e0 00000 00000000000 000000 000000 URL 0000000 0 0120 10 8790 http www naganokeiki co jp 00000 TEL 03 3776 5328 9 0 O O O TEL 082 262 1599 0 0 0 O O TEL 054 253 4148 00000 TEL 03 3776 5329 9 O0 O O O TEL092 572 5072 J O O O O TEL 087 822 8550 00000 TEL 03 3776 5326 9 0 O O O TEL0268 25 3758 O Q QO O TEL 0436 24 0951 0000 0 TEL 03 3776 53245 000000 TEL 046 222 0334 9 9 0 O O TEL076 441 6949 00000 TEL 06 6201 3810 9 O O O O TEL 022 227 9331 OOO000 TEL 052 211 4551 0 OD O O O TEL 048 525 8751 OOOGUG00OOOO 1009 DOOOOOO000000 DU 100 Recycled Paper 040 30 000 PRINTED INJ APAN 3000A S0
3. C Sealg 1 125 surface mounting interface OOOOOO Pressure range OT 0 5MPa gt Of 1MPa 0 1g 0 5MPa gt 0 10 1MPa 000000 D Maximum allowable pressure 00000020 Double the pressure range O OU Accuracy 109 F S Q0 0 5 F S 1 0 or 0 5 F S D 0 0 U Material of gas exposed section POO aris SUS316L BOD sc Co Ni0 0 ly SUS316L sure sensor Co Ni alloy 0 oC od res oouo 0 0 0 Display unit that can be combined od zro DOOOO00000 67 Detachable Digital Indicator y O 00000 D Surface treatment of gas contact part UCI 0 O UC treatment DREE NAGANO KEIKI CO LTD 1 00 0 0 pimensions Z 67 Wwo20 000000000 ZT67 W02 Detachable Digital Pressure Gauge I oO RER NAGAN KEKI rT 3 ooogg POWER SOURCE Dn 000 0 COMMON POWER SOURCE 0 UDDDDDDDDD OPEN COLLECTOR OUT10 OOOO0000000 WHITE OPEN COLLECTOR OUT2 H OOO0O000000000 ORANGE ANALOG OPTION ry ZT17 WW2000000000000000 ZT17 ZW2 Integrated Pressure Transducer A 0 ooo000 RED POWER SOURCE 0 c 0 000000 WHITE POWER SOURCE D 0 000000 GREEN SENSOR OUTPUT D B 0 ooo000 BLUE SENSOR OUTPUT u 21 6 21 6D
4. 0g 0 5MPa gt 00 1 0MPa og 0 5MPa gt og 0 5MPa gt 3 5MPa o0 1 0MPa op 1 0MPa 0 10 0 2MPa gt 1MPa _ oan 0 3MPa gt 0 19 0 3MPa 0 10 0 3MPa 0 10 0 5MPa 0 1 0 5MPa gt 0 10 0 5MPa 2MPa gt 0 19 1 0MPa gt 0 19 1 0MPa gt 0 1 1 0MPa 0 19 1 0MPa 0 19 1 0MPa OOO size O00 size 49 LEDO D 3 1 20 LEDD D 9 28 9 35 4 digit LED display 3 1 2 digit LED display 129 24V DC 10 49 20mAq 0 0 150 24V DC 10 120 24V DC 10 AQ 20m at the selection 150 24V DC 10 24V DC 100 5V DC 120 24V DC 10 40 20mAq 0 0 150 24V DC 10 120 24V DC 10 AQ 20m at the selection 150 24V DC 10 120 24V DC 10 0000 indication 3 F S 0000 out put 10 F S 05 OFS O00 0 indication 0 5 F S 9 doit 0000 indication 1 0 F SQ ldigit ERD 00000 electrolyic polishing UC 0 00 UC grade UCD 0 0 0 UC grade UCDO 0 0 0 UC grade BAD 2 5u mRy 0 0 74 mRy 0 0 7u mRy 0 0 74 mRy P 5x 1012 Pagg a D 5x 10 102 pain sog 5x 10722 pang a O 1x 10 Fand S 5x 102 Palm s orless 5x 10 10 Palm s orless 5x 1072Pa im q s or less 49 20mA DCO 20 00 10 5vDcg 3000 49 20mA DC 0 2 wire system 10 5V DC O 3 wire system 40 20mA DC 02000 4 20mA DC 0 2 wire system oo00000 GE Transducer are always manufactured with digital indicators or amplifier DUDDDDUD ZTLIO00DDD0D Comparator output NPN Open collector x 2 output
5. IA H HERO Serene ZT67 O00 D Model ZT67 ZTe7U 000000000 Model ZT67 Detachable Digital Pressure Gauge O00 0 O Standard spec ood O 004 109 F S 0 1digitg It can be operated in combination with ZT17 Pressure Transducer with constant outpi Accuracy 1 0 F S 1digit XIXIXIX X D 0 0 0 0 E O00 0 OO DD O00 Ol Additional spec Option 0 27170 U0UDDDD 0000UD0D0DDD0D0DDDD D ut Jering please specify pressure range and unit ressure range and connection when ordering E ood Range ogg odo 0 19 O 5MPa 0 0 0 0 5000 II 0 19 0 5MP Number of digit indication 0 5000 0 19 LOMba 0 0 0 1 0009 0 0 19 1 0MP Number of digit indication 1 000 og 0 5MP 0 0 0 0 50000 o 0 5MP Number of digit indication 0 5000 o0 1 0MP amp 0 0 0 1 00000 on 1 0MP Number of digit indication 1 0000 1 00 F S 0 1digit DUDU Display accuracy 120 24VDC 100 DU Power Supply 0o00 Output signal TI O Document 000 ni od od 0000 UDDDD 0o00 NPNOOOOOGOOOO O X20 NPN Open corector x 2 output OoO0000 Analog output OO Nil 10 SVDC og i oo 0 Accuracy 000 7 ooog 3 F S 0000 DUDDD 00000 Required Please spesify your requirement Drawing one sheet Instruction manual Inspection procedure
6. Mill sheet Test report x YSN S 2S 0 D 0 D 0 O00 00 OO 000 Of Additional spec Option Gi ei UUUU ZT17 271700 Model ZT Transducer 0 000 OO Standard spec 00000 D0ODDDDUCH H zro7 0000000000000000 In door use Surface treatment of gas contact parf UC treatment Operation in combination with ZT67 Detachable digital Indicator with constant output 1 1259 000 0000 0 1 125 surface mounting OO0gc00000000 7 Integrated Pressure 07 DUDU Mounting system Q 00 0 c Seal W100 D w Seal Co Ni 0 00 0 0 0 DD Co Ni Alloy SUS316L 0 10 0 5MPa 0 10 1 0MPa OI 0 5MPa 0 1 0MPa 0 50 F 9 0 5MPaQ 0 00000 Of 0 50 F S Option at 0 5MPa over 1 00 F S OO0000000 SUDDDDUUU X when ordering og og Accuracy DU Power Supply 0o00 Output signal TI 0 Document QOOO000 00000 Conbination with diverse digital Pressure gauge Additional spec Required Please spesify your requirement Drawing one sheet Instruction manual Inspection procedure Mill sheet Test report O RSS ven NAGANOKEIKICO LTD 1 4VCR00000 15 1 125 1 1259 1 5 15 1 125 000 oo000o0000000 Panel mouting Indicating part is detachable form sensing part op 0 4MPa gt og 0 3MPa gt 00 1 0MPa 00 0 3MPa gt 00 1 0MPa
7. d digital pressure gauges with ultra clean specification which have been used for semiconductor gas supply systems we offer a newly developed product which can be applied to the 1 125 surface mount interface The digital pressure gauge is configured so that the indicator unit and sensor unit can be attached and detached through one touch operation contributing to labor saving in integrated mounting Z7 7 QOOO000000 DUDDZrDDDDDDDDDDDDDDDDDDDDDDDD UUDUDUDUDUDDDUDDDDDDDDDODUDDDUDDDDD OO00000g ZT67 Detachable Digital Indicator It can be operated in combination with ZT17 Pressure Transducer with constant output It has a multi functional products equiped with analog output comparator output Z717 DO 0000000000000 UUDUDUDUDUDUDUUDDDDDDDDDDDUDUDUDUDDD DU UDUDUDUDUDUDDUDUDDDDDDDDDDDUDDDUDDDDD DDDUDUDDUDUDU ZT17 Integrated Compatible Pressure Transducer It considers the easy maintenance The output from the pressure transducer is a constant signal in addition mounting or removing the indicating part is easy by the one touch connector 0000000000000000000000000000000000 Please confirm the suitableness of the materials used against the measuring gases CEQ O00 00 0 CE marking 0 DD DU Applicable Directive 89 336 EEC 0 000 OD Applicable Standards EN61326 1997 Al 1998 EMI Class A EMS Annex A 2717 00000000000000 ZT17 Integrated Pressure Transducer 0000000000 0 Connection mounting method 1 1250 000000000000 W sealg
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