半導体産業用圧力計
Contents
1. 0 0 2 0 100MPa 0 1 0 1 0 1 2MPa A 0 25MPa 0 35MPa 460 A l 5 40 D 1 5 F S 50 GW11 16 21 60 GW12 17 22 27 R1 4 PT 9 16 18UNF 1 4NPT G14B PF SUS316 GW2 SUS316L SUS304 SUS GW2 He 1 01X10 9 Pa m3 s 10mm NAGANO KEIKI CO LTD GW11 173 R PT GW11 1K3 ZNPT GW11 173 14 1932. X 5 X em TTF Fixlxlxlxlxi oO OD DO DU BD WY BD A B Mm 50 SUS304 SUS316 R 1 4 50 SUS304 SUS316 R 1 4 60 SUS304 SUS316L G1 4 B 60 SUS304 SUS316L G 1 4B D D G1 4B GW11 16 R1 4 9 16 18 UNF 1 4NPT SUS316 0 1 0 1 0 2 0 3 0 4 0 6 1 1 5 2 MP a 0 0 2 0 3 0 4 0 6 1 1 5 2 2 5 3 5 0 5 7 10 0 15 25 0 35 GW12 17 B 0 50 70 GW12 17 B 0 100 GW12 17 B 1 5 F S B A
3. GW2 1 1
4. 1K3 18UNF 0 GW11 193 6 3 g 61 GW16 173 193 1K3 GW17 123 173 193 1K3 623 673 693 6K3 G 2B PF GW16 173 _R PT GW16 1K3 ZNPT GW12 123 473 193 1K3 GZB PF GW12 123 9 18UNF GW16 193 4 19 GW17 1L3 73 R 4 PT K3 4NPT 18UNF GW27 194 MI 22 5 61 5 GW16 673 GW GW16 673 R 4 PT GW16 6K3 4NPT 693 6K3 18UNF 8 15 5 GW16 693 GW12 173 R PT GW12 1K3 ZNPT 9 18UNF GW12 193 GW21 194 14 18UNF 14 34 95 36 18UNF GW22 194 GW27 694
5. 9 16 18UNF Cajon VCRB 36 18UNF GW R _A M m m 0 100 500 50 lt 100 700 1000 ppm 10 000 20 500 1000 100 700 1000 6000 a 5 b 5 1 b es He He a a a b bo EE Ne 5 a A b
6. 0 1 1 1 GW Tul X X lew2 0D QO DO WY BO A 50 SUS304 SUS316L 9 16 18UNF 60 SUS304 SUS316L 9 16 18UNF 60 SUS304 SUS316L 9 16 18UNF A D D 9 16 18 UNF SUS316L 0 1 0 1 0 2 0 3 0 4 0 6 1 1 5 2 MP a 0 0 2 0 3 0 4 0 6 1 1 5 2 2 5 3 5 a 0 5 7 10 0 15 25 1 5 F S A
7. CatNo C03 01 E GW GW Pressure Gauges for Semiconductor Industry 30 65
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