1. 1 1C EP2 4 15min OO 7 EE ili 3 gt J NA 1 ABB2 A WT SN n KS EF EE Fr A 55mm AL 120mm _ 101 5 20 24mA 1 596 3 76mA IN 50 1009 6 0 2 3 0 1 5 gt DC30V 100mA 0 5 0 2 3 1200 40 C max30s _ 1 2 8kR 200V 2xG1 3 20 a 0 75sq gt 2. 2596 05sq 672 00005 M22xP1 5 672 05005 D 672 08000 30msec 5 U U 09 HH HT 7 3. EQF1069D a w SHIMATORK ua _ _ _ TAG NO SPECIFICATION OF ELECTRIC ACTUATOR D S5BIM SHIMADZU G DDD DOD 672 90805 01 3ON m 50N m 65N m 30KN 4 rm Oz 4 nMEE a g A 19mm AZ 24mm AL 24mm 26mm gt AZ 30mm AL 30mm 10 8kg DC 4 20 mA 250Q DC 1 5 V 10 kQ 5 1 100 110V 50 60Hz 1 2 0A 3 2A 60W 28F 2 200 220V 50 60Hz 1 12A 1 6A 60W 7F AC N6 66 DC500V 1500V JIS C 0920 6 12 1 t y2