第3章 試験設備および試験手法
Contents
1. 0000 0000 000 0000 ug u 0000000 ej 45 336 Fig 3 36 The picture of XPS Ar GUN XPS spectrum SAMPLE 337 0000000000 17 Fig 3 37 The system of XPS and Ar etching 17 UOUOUU 8 I D D U LI L JUIUDUNUUUUUUUDUUOUUUUUUUUDUDUUUDUNUUUUUUDUDUD 1000 httpz www sasj gr jp pn index html JUIUDUNUUDUUUUUUUUUUDUUUUUUUDUUUAPSUDUUUUUUU 46 Peak fitting UH DHL DO DO UU U UE LI Common Data Processing system Version B O The Analysis Society of Japan ll 3 38 UID Compro 8 Fig 3 38 The XPS analysis software 8 472. EAS C 3 2 3 0 IU L k a EE BL P 322 SO 3 290 00000000 3300000 39 4 Peltiert Device 3 29 QVUUOUUUUUUUUUO Fig 3 29 The picture of test setting gn ae Um Thermocouple Power source 330 IB LULU GL LU Fig 3 30 The system of deterioration test 40 33 UUUUUU JUIUDUNUUDUUDUUDDUDDU Hiex million 130 um 0000 0090 000 00000 0000 00 0 0 0 BOpmY UUW 3 310 0 0 0 0 0 0 0000 l 3 8000000 3 31 0 0000000 Hizex U Fig 3 3 The picture of Hizex 13 8 0000000000 Hizex milion amp Table 3 8 The particular of Hizex Average molecular weight 50 600 million 41 00000000 00 Hizex TL TD UO DEO O D Hl JUIUNUIUUUUUUDUUODUUUUUUDDUDUUDUDUUUDUUUDUUUuUuDDunD JUIUDUONUIUUUUUUDDUDUUDUUUUDD 020 JUIUDUNUUDUUUUUUUDDUUUUUUDUUDODUUUUUUUDUUUUuUu 0000 3 200 120 200 nm DL DO ELO HEB DL OLD KO IU l 0000 000 0 0 000 3230000 3240 200 400 EDO LU CEU Uu I UU 00000 3500 3600000000 00000 16 6 LI DL llt 00000000000000 3 600 86 000 0 08 0 00000000 53 0000000 4 2 00000 00 8
3. ih FTIR JU D 0 031000000000000000 3340000 O0 3 34 14 Fig 3 34 The system of FT IR 14 b 0000 OUUU U ATR Attenuated Total Reflection 100 EJ E 00000 00000 EE EE E lUIUUUUUDUUUUUUUUUDUUUUDUUUUDUUUUDUDUDD Evanescent Wave I I UU IU uu HU Di nn Uu UU I UI U Uu UU 3 Uu UU I UL OU E E Oui D C CE DE OE U LI C 44 00000000 130 Retractive index ll n sample evanescent wave iam radiation detector 3 35 QUUUUUU 5 Fig 3 35 The principle of ATR 15 342 XPS X ray Photoelectron Spectroscopy uuuugdgdgduuuuuxiuuiiiiuililiuiuiuiiiiillilibliilltL Ll 0000 0000 0000 0 0 0 0 0
4. 0 01 0 001 Kadiant Intensity W m2 nm 0 0001 Lii i i b iii idiiiiliiiilsiiii 100 150 200 250 300 350 Wavelength nm 35 00000 Fig 3 5 The spectrum distribution of D2 lamp at 30 cm 19 UbUOUUUUUY UUUHUUU 00000000 0001273000000000 0 0 0 E2420 0000000 0090 000000 4000000 000000000 3 6 00000 000 00000 3 200 000 00 0 00000 0 0 0 00 00000 00 0 0 0 00000 7000000000000 00000 Fig 3 6 The picture of lamp 3 200UUUU0U0U0U0U0U Table 3 2 The Xe lamp Data Wavelength 185 2000 nm Guaranteed life 1800 hour Average life 3000 hour 20 Xe lamp Radiant Intensity at 50cm 0 3 Radiant Intensity Radiant Intensity W m2 nm 0 200 400 600 800 1000 1200 Wavelength nm 0 3 7 000000 50 i I UL UL Uu UU I l Fig 3 7 The spectrum distribution of lamp at 50cm 313 DDD 00000001 00000000 0 19000 i i I 20020 20 20 2 00 00000 UI U 000000 S1226 8BQ 0000000000 38000 00000 330 UVIIII Ll EO O 3 0 0 0 00000000 e 1 3 8 UVIII LI LH EH EH H8496 16 Fig 3 8 The UV sensor module H8464 16 0 33 UVII D DIU HELL Hs496 16 Table 3 3 UV sensor module H 496 16 data Spectral Response 160 220 nm Wavelength of Maximum Response 60 nm Photoca
5. 3 12 00000 CP 1 4 127 045L Fig 3 12 The Peltiert Device CP 1 4 127 045L O 3 5 UOO GUU UL Table 3 5 The Peltiert Device data Type CP 1 4 127 0451 Maximum Voltage 15 4 V Maximum Current 8 5 A i 1313 0000000 Fig 3 13 The cooling equipment 32 UL 3 2 10 00000 JUIUDUUUUUUUDUUDUUUUDUUUUUNUDUUUUUUUDUDUUUL JUIUDUNIDUUUDUDUUDUUDUUUUDDUUDUUUUUDUUUUUDDUD 3 5 00000 00060 0 0 0000 3 70 0000 0 0 0 00 JUIUDUNUUUUUUUUDDUUDUDUUUUUUUUUUUUDDUUDUUuu JUIUDUNIUUUUUUDUUUUUUUUDDUUUUUUUUUUDUUUuuDnwuno JUIUNUUUUUUUDUUOUUUUUUDDUUUDUUUUUDUDUUUuDnwuno JUIUDUUUUUUDUDUUDUUUUUDUDUDUUUUUUDUNUUDUUUUDDUD JUIUDUUUUU DE WNO BORSE HS496 16 51226 8BQ f EMS ROMA FAH SD26 8BQ AI Lhe pe gt BUE L e Rf MPU 7 YES 2 OLWYR 0 Sip firm IH JE et PH Jn OO Je ii TR BF 7p BHAE EEST Ad MOL 1314 DIDBUdOgdgtulllt Fig 3 14 The flow chart of radiant intensity measurement a JUIUDUNUUUUUUUUUDDUUDUDUUUUUUUD 3 5 0001000000 00000 00000 00000 0 0 8496 16 D D DEL LI 3 150 0 3 16 I UL 28 UV Sensor Output Current UV Sensor Output Current 500 ai waman mamam maman mamam mamam mamana Current Sum 64 n 400 Sum 2 2 mA m
6. Output Current Output Current nA nm 150 170 190 210 230 250 150 170 190 210 230 250 Wavelenegth nm Wavelength nm 3 15 3 16 Fig 3 15 The output current per unit effective area Fig 3 16 The output current when used UV Sensor 00000 uvo000000000000000v000 23 0 00000000 00000 mmx3 mmxz 28 mm 0 28 cm O O 2 8 10 0 0 641 00000000 I III b hili ii 00 35 64 DL ULULULLLLul uuiuulliuultlultultLutLitul 00000 20emYUUUUUUUUUUUUU UVIILDL LI UL IL H8496 16 uuuuil niliiuuilliliulilililbllitiiulilitliitlutllilL il lul 3 50 20 64 0 3100000000000000 0 3 1700 3 180000 3 19 uuuulili litliillulluL Ll 29 3 17 H8496 16 0 0 0 Fig 3 17 The H8496 16 Setting m UV sensor module HRBR496 156 3 18 H8496 16 3 19 Fig 3 18 H8496 16 Setting in the chamber Fig 3 19 The picture 1s the experiment JUIUDUNUUDUUUUUDDUUUOUUUUUUUDDDUDUUUD 3200 0 0 000010 JUUUDUDUUDUDUUUUUUDUUDUDUUDUUUUDU 15 39 1 001000 30 D2 lamp Radiant Intensity at 20 0 1 0 01 0 001 Radiant Intensity W m nm 100 150 200 250 300 350 Wavelength nm 3 20 00000 00
7. gt 2 E 1 5 1111111 0 5 ttt 0 MA 120 160 200 240 280 320 360 400 440 Wavelength nm 3 25 E 4900 000000000 Fig 3 25 The spectrum distribution of sun 36 Table3 6 Comparison of sun with D2 lamp Total Intensity W m Wavelength 120 200 nm anje Ratio of the sunto D2 lamp Wa E LD I hilo Table 3 7 Comparison of sun with Xe lamp Total Intensity W m Ratio of the sun to Xe lamp Wavelength 200 400 nm 16 5cm 8 6 0 08 Xe lamp 8 0 cm 26 0 24 000 0000 20emYOUUUUUUUUUUUUUUUY 16001 00000 0000 00 0000 16 5 0 0 t 0 0800 cm 024 1 D LEO LE CE UI LI 322 ll D EE HEH HEI EFE ELE aH B lll LabVIEW National Instrument gBiublllllillliulil D d B OOUOOUUULUULDUULL uL Ungu 3 260000 36 E Measurement point 4 326 Fig 3 26 The setting of thermocouple 0 0000000 320 3 2300 3 24 000 0 0 0 000 000 IU H JUIUDUNUUUUUDUUOUUUUUUUDDUUDUUUDUUUDUUUUDDUD Ul The D2 lamp test Tem
8. 0 lU I Ul Uu I Uu I i Ui l 26 024 0 00000000 19900000000000000 50 56 00000 CT 00000 0000 0 0 000 6 0 00000 120 20 nmi UOUUUUUU 000000 16 53 190 0000 0 000 000 000 300 80000 Ui Uu I IU Hl 0000000000000000 250 1 4000 ESH T O 00 000 0 0 00 0 0 0 0 0 00 0 1336 um DEED Uu TU I Uu Uu UI UL 332 Fig 3 32 The picture of 102 test 42 340 000 EERO XDUDUUL PSSI III LI FT IR Magna 760 Nicolet U JPSs 90xs 000 BODUDUL l 3 4 1 E EJ E EJ E DS EE EL 000 0 E U FT IR Fourier Transform Infra Red Spectrometer 0 0 0 0 0 0 0 0 0 0 0 6 000000 FT R 000000 130 3 33 U E U U UO OA OE UUE Fig 3 33 The picture of FT IR _ 8
9. 00000 Fig 3 20 The spectrum distribution of D2 lamp DOLDULDLDLULULL LU A 37 3 1 5 8mmx5 8mm I HL DO UU Uu BU II UU I 51226 8 3 210 3 22 000 m S1226 8BQ 80 T T g Il 25 60 Sum s4 0 Am 5 a 2 50 5 40 n 1 gt E B 30 1 bel 4 8 20 Oo 0 5 o 1 0 0 200 400 600 800 1000 1200 0 200 400 600 800 1000 1200 Wavelenzgth nm Wavelength nm 3 21 I UU Uu Uu Uu Uu UU I i Ui L 1322 Fig 3 21 The output current per unit effective area Fig 3 22 The output current when used UV sensor 0 0000000000000000000000001 000 404000000 00000000 5 8 mmx5 8mm 33 mm 0 33 O O 3 3x107 O 0 13 mAT O00 00000000 0013 mA IU i Ui Ui Ui i ui uuuunlnnuuuuuuunnno UOUUUUU 0 0 0 0 0 0000 0 16 5 0 0000 00 0 000 0 0 0 0 00 000 0 81 37000 0 81 mA 0 13 2 D EO DE UL UL 000 U uuuuuuulliluiulillitlliuliluliliullliiillil socml I U L 25 37000 2 5 mA 0 1
10. 3 19 3 2300 3 24 D 0 0 0 0 0 0 0 0 000 L 50000000 32 lamp Radiant Intensity at 16 5cm Radiant Intensity 1 5 0 5 Radiant Intensity W m2 nm ER 0 200 400 600 800 1000 1200 Wavelength nm 323 0000 1 I Uu MU UU D OLD ELO HELD DEBE U 7 uu Fig 3 23 The spectrum distribution of lamp at 16 5cm 24 lamp Radiant Intensity at 8 0 cm Radiant Intensity Radiant Intensity W m2 nm ad 0 200 400 600 800 1000 1200 Wavelength nm O 324 0000 amp mYOUUUUUUUUUUUUUUUUUUO Fig 3 24 The spectrum distribution of Xe lamp at 8cm ASTM American Society for Testing and Materials E 490 Air Mass 0 20000 00000000000 100 1000 000 00000 3250000 3 29 0 HEB BL UL 0 0 00 0 0 0 EE CE C 120 200 nm 3 6 D I i i UE 00000 200 400 0 000 LL uuuuliuuulululiilililiiuliiill 37L LL L 34 Radiant Intensity W m2 nm 2 5 E 490 spectrum of the sun Air Mass 500 Radiant Intensity 1000 1500 2000 2500 3000 Wavelength nm E 490 spectrum of the sun Air Mass 0 I I I I I S 25 HHHH ri
11. O30 000000000 31 00000 311 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 00 310 33 0000 000 0 0 000 sSIUUUUUUUUUDUUUUUUUDDUUUUUUUUDUUUUUDDUD A OOC OE 00 OE O0 IEH 200 350 C JUIUUDDUUIIUUUUDDUUDUUUUUUDUDUUUUUDUUDDUUUUDUDL JUIUDUNUUUUUUUDUUUDUUDDUUUUUUUUDUNUUDUUUUDDUnD NI DAQ National Instrument SC 2345 DO EB EE B HE E EH PCT 000 U 00000 0 0 0 0 0 0 0 00 43cm DL D Uu U HEU Uu Uu IU L 000000000000000000 7 107 0000 Turbo pump Leak bulb light source Window Peltiert device voltaee input 31 UUUDUNUUDUUDUL Fig 3 1 The vacuum chamber and peripheral equipment 16 3 2 DUULDUUL 3 2 The vacuum chamber OUUUU Fig 3 3 The picture of eguipment eI 312 I LI a L LI 000 LI 0000000000000 00011835 OLEO HO CELO ELO UO UO UC UO LEE CI LI UD 500000000 3 100 350 JUIUDUUUUUUUUDUUUUUUUUDUUDDUDUUDUUU 350000000 00000 000000000000000 34 IUL UL Fig 3 4 The D2 lamp 311 DH UUDLUL LL tL tL Table 3 1 The D2lamp Data Wavelength 115 400 nm Cooling method Water cooled type D2 lamp Radiant Intensity at 30cm
12. perature 0 50 100 150 200 Time min 3 27 0000000000000 00000 300 800 Fig 3 27 temperature change during the D2 lamp irradiation The Xe lamp test Temperature C 0 50 100 150 200 250 Time hour 1328 53000 1900 0 Fig 3 28 The transition temperature change during the Xe lamp irradiation 38 ET ET i ET ED ED FEL B 000000 327 25 10000 00 a 7091 00000000000000000 IS 525 NEF EE EFE UL EL EFE EFE EEF ET EU HHB IS QJUUHUUUUUUU3U0U0U0U0U000U0UU 709 00000000 e Pet AH lulii y Dal 1 75 3280000000 11 A
13. thode Minimum Effective Area 6 mm Window Material Synthetic silica 992 H 496 16 pup Sensitibity sensitibity mA W 180 200 220 240 260 Wavelength nm 39 8496 16 Fig 3 9 The H8496 16 Spectral Response 3100 0UUUUUUUUUOUYE SI226 8BQ 0 00000 340000000 O0 3 H LO TO UE B UO UO LI 05 3110 000000000000 1226 8BQ Fig 3 10 The Si photo diode S1226 8BO 34 00000000000 1226 8BQU Ll Table 3 4 Siphoto diode S1226 8BO Data Spectral Response 190 1000 nm Wavelength of Maximum Response 720 nm Typ 16 uA Short Circuit Current Effective Area 5 8 x 5 8 mm 24 51226 8 0 4 0 35 0 3 0 25 0 2 0 15 Sensitibity A W 0 1 0 05 0 200 400 600 800 1000 1200 Wavelength nm 1 3 11 81226 8BQ 10000 Fig 3 1 The S1226 8BO Spectral Response 314 0000000 H LIL bT LIS TIT D EE DEO CELO UE D LI C CP L4 127045L JUIUDUNUUDUUUUUUODUUDUUUDUUUUUUUUDUUUDUUUUDDUD JUIUDUUUUUUDUUOUUUUUUDDUUUDUUUDUNUUDUUUUDDUD DAOUUIUUUDAOUUUUDUUUUUUUUUUUDUUUDUUUUUDUUUUOL 35 3 0 1 PMC 3S3A 0 000000100 v UU ve I Uu Uu Uu UU I UU IU H 3 5xVI 3 1
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