EG-6000M 取扱説明書 - オゾン測定器 – 荏原実業株式会社 計測器
Contents
1. E 26 272. ZONE PRODUCTS E 1 1 3 1 3 2 4 4 2 5 1 a 5 2 5 3 5 4 5 5 5 6 5 7 1 2 3 4
3. IN_ A O a 1 _ 5 o o le O so 8 5 c 7 0 _ el 9 mm ey A 1 TT HE at aa CT E CZONE PRODUCTS E ECP P63 001 7 001 05 10 3 2 SO OS QOO 10 3 1
4. E 1 2 3 OZONE PRODUCTS ECP P63 001 7 001 05 MODE MES 5 7
5. 2 3 1 2
6. MES 6 2 1 9 D 1 CD 2 TD 3 RD 4 DIR 5 GND 6 D5R 7 RTS 8 CTS 9 RI open UNC 4 4 0 9600 bps 8 bit 1 bit XX 2 QAOE PRODUCTS ECP P63 001 7 001 05 6 2 2 STX
7. 22 20 CK 1 OO G A 22
8. 750 Q 5 3 DC0 gt 1 V 0 10 V 5 3 10 kO 7 3 1 18 ONE PRODUCTS ECP P63 001 001 05 LED RS232C
9. 5 lt 30 1 5 5 9 COMPENSATION TMP ON 6 1 6 COMPENSATION SWIICH OFF MES
10. 6 No 1 OOS M3x6SUS 6 6 17
11. 3 2 X 10 3 5 2 4 1 8 30 1 5 7 20 E CZONE PRODUCTS ECP P63 001 001 05 5 3
12. EE IA Electronic Industrial Association 2 0 IN 10 OZONE PRODUCTS ECP P63 001 7 001 05 2 253 7 nm T
13. 0 E 1 2 1 E 1 CK 1 1 E 2 1 2 E 2 CK2 2 ES 1 2
14. 2 5 2 5mm M3 x10 SUS 2
15. 5 0 001 2 000 0 1 Se 4 E CZONE PRODUCTS ECP P63 001 7 001 05 10 A ER
16. 5 6 2 2 c AC240 V 1 A 2 2 5 6 MM CM NO NC CM NO NC 1 4 lt A 2 c NO NC CM NO NC CM NO NC RR 2 KO 1 0 DC4 20 mA
17. 2 1 2 40 E CZONE PRODUCTS E ECP P63 001 7 001 05 10 5 E X M ES MES MES CK1 MES
18. M6 26 E CZONE PRODUCTS ECP P63 001 001 05 7 2 2 7 2 3 0 6 mm 4 mm 1 4 SEA FI1owel 30 ne
19. A 1 o C x log 6 QA T x C Q Io I x A Ng OES oe 2 E CZONE PRODUCTS ECP P63 001 001 05 3 3 1 EG 6000M 04 EG 6000M 06 EG 6000M 10 4 6 10 20 lt 99 ch 0 1 00 ppm 0 01 ppm 1 5 LArin 1 9 FS month 2 96FS month 1 9 FS 1 9 FS 0 0 1 ppm
20. 1 SW1 2 SW2 1 2 01 0 1 2 1 O 1 1 O 5 6 2 2
21. SEMI S2 E CZONE PRODUCTS ECP P63 001 7 001 05 3 2E ppm 3 lt 6 2
22. 11 1 1 2 11 2 1 2 nl 4 2 E CZONE PRODUCTS ECP P6 001 7 001 05 oo O Q Q 2002 6 24 2001 11 27 2 DESIGNED RA EG 6000M OUTLINE OF EG 6000M TITLE mm Unit DIMENSIONS IN parg 2001 06 15 EBARA JITSUGYO CO LTD E J 0ZONE PRODUCTS 43 DRAWING NO ABOoOO008 0105 b ECP P63 001 7 001 05 E0 H0521 44 E CZONE PRODUCTS 215 0033
23. M6E 1 SUS 2 5 4 4 5 1 2 1 3 60 4 5 1
24. 7 4 UV 0ZONE MONITOR model 6000M 15 28 E CZONE PRODUCTS ECP P63 001 7 001 05 8 1 1 MES ON 20 2000 XX YY 2 1 5 L min 3 CK 1 1 1000 lt 3500
25. 12 t TT 2t 5 4 5 4 1 10 5 4 5 4 2 CK 1 1 CK2 2
26. 5 6 2 AL2 2 b AC125 V 0 5 A a 2 2 5 6 1 2 3 4 5 6 7 8 9 10 1 2 EE 9 10 DEE I OE 5 6 TL 9 0 1 5 6 7 8 9 10 9 1 2 1 0 4 6 i ii
27. 1 2 ID T IMER 20 99 2 X 3 2 1 2 1 5 L min 14 E CZONE PRODUCTS ECP P63 001 001 05 4 2
28. 10 1 10 1 1 1 5 L min 10 1 2 1 1 10 1 3 CK 1 2000 3200 600 3500 6 00
29. 10 3 2 10 2 2 10 5 1 2 2 32 E CZONE PRODUCTS 1 0 ECP P63 001 7 001 05 3 17 mes ll EEE ele a ml 4 BZ007A 2 1 5 4
30. 0 4 mm AW626 oe 1 2 mm AWG16 0 3 mm AWG22 0 75 mm AWG20 CH ID 1 2 3 4 5 6 7 MK CH ID 8 1I D 1 0 4 6 ID CH ID b AC125 V 0 5 A a 16 E CZONE PRODUCTS E JW ECP P63 001 001 05 1 AL 1 1 b AC125 V 0 5 A a 1 1
31. M 2 1 1 I A 21h 41h 01 2 01 10 0 03 0 03 ppmj XX X C 01 0 1 1 MES UP20 EF Au toZ
32. E7 tt 1 E 8 1 5 L min E 9 4 nds He A 1 2 1 E 10 i 1 2 ii 2 X 3 lt 1 1 12
33. Ty gon Tygon M4 x 6 SUS2 NO0 2 Tygon Re M4 20 19 35 ZONE PRODUCTS ECP P63 001 7 001 05 10 3 3 10 3 1
34. mp 5 2x20 mm AC250 V 0 8 A UL 2 AC M 4 AC AC100 220 V 10 9 50 260 Hz FG 19 E CZONE PRODUCTS ECP P63 001 7 001 05 5 5 1 ON OFF LED 1ch 2ch 5ch ON 3ch 4ch 6ch off LED 11 T T IMER sec 20 lt 99 sec
35. 39 ZONE PRODUCTS ECP P63 001 001 05 10 4 1 CK1 1 CK2 2 10 O00 3200 2 MES ON 2 0 CK 1 1 VR1 1000 3200 CK2 2 VR2 1000 3200 VR1 28 VR2 0 SLAV1 PCB 5038 603 HARE 1 CK1 CK2
36. 13 PTFE 1 47kPa G E CZONE PRODUCTS ECP P63 001 7 001 05 7 3 7 3 1 TLP521 LED Vf 2 VI AR vi 10 20 mA 14 LED Vf 2 V LED 7 3 2
37. UP20 E 4 E 5 ON E 6 41 ONE PRODUCTS ECP P63 001 7 001 05 E 7
38. 1 0 05 ppm 2 0 1 ppm 5 7 5 7 AL 1 AL2 INT PUR SPN 4 5 1 SW1 LED 1 SW1 LED
39. MODE PA1 PA2 INT AL2 PUR AL1 TE1 CK2 TE2 CK1 TE3 5 MODE SWITCH MES Le Eee poems e el PICO samp 4 samp 7 1 2 IV 3 _ samp IV 1 MODE SWIICH 2 E CZONE PRODUCTS E ECP P63 001 001 05 1 2 MES CK1 MES DO UR oa 5 2 5 CYPT PP
40. ii c AC240 V 1 A c AC240 V 1 A i A ZUNE PRODUCTS E ECP P63 001 7 001 05 1 1 c AC240 V 1 A 1 1
41. UP20 6 3 DC24 V 6 4 25 E CZONE PRODUCTS ECP P63 001 7 001 05 7 7 1 1 2 3 4 5 6 7 7 2 7 2 1 17 k g s 4
42. 2 3 2 CZONE PRODUCTS 6 6 6 E J ECP P63 001 7 001 05 1 4 C 5 45 C 2 0 C 293 PK 273 x os 4 2 DTE
43. 1 3 2 7 NN RAEI NR 3 2 3 3383 1 7 2 1 14 3 2 aa 2 0 4 5 2 3 5 aa 3 2 AB6008 0105D 4 3 5 E CZONE PRODUCTS E ECP P63 001 001 05 EG 6000M 2
44. 5 5 3 5 5 1 1 TE 1 1 SW1 0O 25 50 75 100 9 21 E CZONE PRODUCTS E ECP P63 001 7 001 05 5 5 2 2 TE 2 1 SW1 P WD ON S 5 OFF 5 5 3 3 TE3
45. 30 EG6000M 04 4 O6 6 10 10 OPT OD O D DC24V S a 15 E CZONE PRODUCTS ECP P63 001 001 05 p 6X4 30 lt 8
46. OUT_ RS232C N CHID AL1 ERR_ TAL1 vo IARI lt NC CM NO ov 1 10 CM NO NC IEEEIE EH elelefefeioleleie Jeloieleleleielelelel eleleleleleieleiolel felefeieleioleleie TTT TT TT 4 10 1 6 10 1 2 3 4 5 6 7 8 9 10 C 4 M NO NC CM NO NC AL 1 ERR_ A CH10 N N N ST do 9 eelelele 5 CH ID _ _AC 50 60Hz 90 260V NM CcH 1 CH2 CHS CH4 1 CH 1 Cl6 N N N N N N 7 2 ID 1 2 1 wp 6 X 4
47. 2 1 5 9 8 P40 0 1 ppm 1992 0 1 ppm TWA ACGIH 1992 1993 E CZONE PRODUCTS E ECP P63 001 7 001 05 1 2 3 4 1 gt 2 98 06 kPa G 1 kgf cm2 G
48. 2 3 12 TEL 044 961 0560 FAX 044 991 0561 E mail e ozone e K co Jp 541 0046 3 2 13 5 TEL 06 6231 3528 FAX 06 6231 2929 E mall ozon osaka e jK co Jp T215 0033 2 3 12 TEL 044 981 0560 FAX 044 981 0561 E mall ejozndsn1 e jk co jp
49. 10 4 CK2 2 CK 1 8 2 1 MES 2 ON 3 8 3 16 29 E CZONE PRODUCTS E ZONE PRODUCTS ME S TEST MES MES MODE SWITCH IL MES 30 a 1 IL 1 6 ECP P63 001 7 001 05 ECP P63 001 001 05 9 1 8 1
50. 2 1 ppm 3 SPN 0 96 ppm 0 88 p pm 0 88 4 1 234 x lt 1 131 5 1 131 8 4 A B
51. P RS TMP ON 13 ZUNE PRODUCTS ECP P63 001 7 001 05 1 SW1 5 7 5 5 2 SW2 5 5 DATA 5 7 2 2 2 2 1 1
52. 0 1 2 2 c AC240 V 1 A A 2 a b AC125 V 0 5 A 2 1 2 5 E CZONE PRODUCTS ECP P63 001 7 001 05 DCO 1 V1 2 DC4 20 mA 3 D 6X4 1 4 PTFE Flowe 1 1 3
53. 10 18 0 220 WSSWPmWe 2 0 1 2 2 1 1 3 2 7 14 aa 28 15 2 8 16 30 17 34 18 ai 3 4 19 2 3 5 2 0 EE 35 2 1 3 wonm Wnsh 3 6 2 2 3 6 2 3 37 2 4 3 8 25 3 8 26 WU 3 9 27 3 9 2 8 4 0 1 MODE SWITCH lt
54. ETX 02h 03h ASCII STX ETX 1 6 2 3 1 5 I 21h II S 53h HH W 57h IV F 46h V M 4Dh UP2Z0
55. 2 2 2 1 4 1 3 6 0 4 5 2 25 mm 24 38 E CZONE PRODUCTS ECP P63 001 001 05 10 3 6 OD Gf OO VS 10 3 1
56. 7 1 7 2 7 3 7 4 SN 8 1 8 2 8 3 x 1 HH 10 1 10 2 10 3 10 4 10 5 ZUNE PRODUCTS ECP P63 001 7 001 05 kh oi MN MN MP MR MR MM M NM NNNNN NNNNN 0 CO WwW NNNN CN 1 D ECP P63 001 001 05 1 i 6 2 7 3 10 4 10 5 MODE SWITCH ee 1 2 6 COMPENSATION SWITCH 1 3 7 0 1 5 8 I D 16 9 1 2 1 7
57. ElO7 07 4 6 6 EMO73A 1 0 or 3 em 1 2 E CONE cis 3 A hte 33 PRODUCTS ECP P63 001 001 05 10 3 1
58. No OOXXXXXXXXXXOOXXXXXXXXXX gt 1 2 16 1 3FF3FF 33h 46h 46h 33h 46h 46h 2 ch1 AL1 ch5 AL2 O10001 30h 31h 30h 30h 30h 31h IV F O 46h 4Fh OK FN 46h 4Eh NG 1 V MO 4Dh 4fh OK MN 4Dh 4eh NG UP20 ee eet 5 El
59. E CZONE PRODUCTS ECP P63 001 001 05 10 3 4 3 0 3 3 10 3 1 3 3 M3 x 6 SUS4 N0 2 23 E CZONE PRODUCTS ECP P63 001 7 001 05 10 3 5 10 3 1
60. RS232C 9600 bps DC24 V 200 WI ECP P63 001 001 05 4 4 1 ALARM2 ALARM1 MES PQ NT 3 9 0 0 0 2 4 5 6 7 8 9 10 mm MES POINT SELCT 1 7 ALARM1 EBARAIIITSUGYO CO LTD 4 2 1 4 1 2 10 E CZONE PRODUCTS ECP P63 001 001 05 POWER ON OFF
61. 0 20 ml 5 40 C 90 9 R H AC100 220 V 10 9 6 50 60 Hz 4 50 VA AC100 V W 430 x H 132 6 XxX D467 5 EIA 17 kg 10 AC2Z250 V 0 8 A 2 2 S2 0200 1 2 10kO 0 10 V 3 7 5 00 4 DC24 V 5 3 2 E CZONE PRODUCTS 5 45 20 C 293 K
62. ECP P63 001 7 001 05 E0 HO516 EG 6000M 2011 07 19 E CZONE PRODUCTS ECP P63 001 7 001 05 EGG 6000M Wy ge EG 6000M EG 6000M EG 6000M 04 4 EG 6000M 06 6 EG 6000M 10 10
63. er o compensat ion 24 E CZONE PRODUCTS ECP P63 001 001 05 I SA 53h 41h 10 5 O K U P UP20 N M MES ZR EO E10 WA 57h 41h XXXXXX XXXXXX 1 0 2 0
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