マスフローコントローラ Aera ® FC-R7800シリーズ（887KB ）
Contents
1. Aera Swagelok VCR Swagelok Company Corporation 2013 5 Tel 03 5765 4076 Fax 03 5765 8312 Email hmcc hitachi metals Co jp 2013 5 T FT2 VEGETABLE OIL INK2. 1 FC R7820CD FC R7820D 3 3 0 5 CD MFC Aera MFC 10 scom 5 slm N O0 6 30 slm N C 6 50 slIm 35 200 lm 1 0 100 2 Typical SEMI E17 91 3 0 100 2 Typical SEMI E17 91 1
3. 1 4 VCR Swagelok 1 4 VCR 3 8 VCR 1 0 kg DC 15 V 2 25 mA DC 15 V 2 180 mA 2 8 kg DC 15 V 2 25 mA DC 15 V 2 200 mA 3 1 W max 3 5 W max DC 0 9 V DC 0 5 V RoHS RoHS 10 sccm 5 slm 6 50 slm 51 200 slm Aera 9 D 1 4 VCR 3 8 VCR 782x 1 4 Swagelok 3 8 Swagelok 782x sccm slIm 200 R 7800 D 200 sccm MFC RoHS 9 D 1 4 VCR N 200 sccm
4. 1 4 VCRY 183 8 mm C A 124 0 mm 3 8 VCR 192 3 mm B 12 7 mm 15 0 mm B 132 0 mm 152 0 mm D 28 6 mm 38 0 mm 18 6 mm 25 5 mm F 69 0 mm 90 0 mm http www hitachi metals CO jp 105 8614 2 1 N 03 5765 4000 FAX 03 5765 8311 510 8102 210 059 377 3040 FAX 059 377 4575 059 377 3132 FAX 059 377 4575 980 0021 6 35 BB 022 267 0216 FAX 022 266 7891 732 0827 2 16 8B 082 535 1711 FAX 082 535 1713 HL K267 B 2013 5
5. 1 20SLM 2 2 0 5 0 5 1 0 2 1x10 Pa m sec He 2 100 2 49 275 kPaD 69 275 kPaD 98 275 kPaD 145 275 kPa 490 kPaG 981 kPaG 5 45 C 20SLM Qp 30SLM 147 275kPaD 30SLM Qp 50SLM 196 275kPaD 20SLM Qp 50SLM 147 275kPaD 1 F S 30SLM 1 0 2 F S 150SLM 5 100 3 F S 150SLM 195 295kPaD SUS 316 L SUS 316 PTFE
6. 1 HITACHI Materials Maglc 4 4 1 VCR Swagelok 10sccm 200sImOD 1x10 Pa m3 sec He FC H7800 RE Aera MFC FC R7800
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