C-KL92C 5P09
Contents
1. 3 84 YF 3 8 inch dia 61 21547 1 2 inch dia Conecting port KL92 BRMMEA KAY AS Ys LAG T3 2_ DIMENSIONS 2 7217247 Inline type 2087 7 K EA 7H rk 20S nut Press fit from Flowell Corporation 2 6 A BRAAE UE 2 4 5 Mounting hole L JVF R Aaaa 2000 12 2000 Standard 4 7 4 7dia 28 28dia 12 7dia d m E ea mes Model number Conecting port KL92 154 1 44 YF 1 4 inch dia KL92 164 3 84 YF 3 8 inch dia BS AZ Unit mm FLP Fy KRA T77 2UZA Flare nut Insert from Entegris Inc 2 P4 5 RFT A TEA gt D TTA m fee jeo AE Model number Conecting port KL92 174 61 21747 1 2inch dia S3007 AX 7 BHXUE2 IZX S300 male screw from Nippon Pillar Packing Co Ltd 2 p 4 5 2 4 5 Mounting hole L v FER AAAF 7 2000 H7 2000 Standard 4 7 4 7dia 28 28dia Im mi ei Conecting port KL92 15A 1 44 YF 1 4 inch dia KL92 16A 3 84 YF 3 8 inch dia KL92 17A 61 21747 1 2inch dia Model number AM ST E23 DIMENSIONS 3 YVYUTWAR KAEIT Single port type SECH Tube connection 15 2 EJXXA 5X6 5HX4 X 2 Mounting hole 4 5 x 6 5 42 Variable resister for zero point adjustment YAW KR ARNI Fete IAE Model number Conecting port 2087 7 FEA 7H rk 20S nut Press2. 4 1 D 5 32 Bore diameter 0 D 1 4 LD 5 32 11 O D 3 8 LD 174 Bore diameter 0 D 3 8 LD 1 4 14 O D 1 2 I D 3 8 Bore diameter OD 1 2 LD 3 8 ZER Tube connection S3007 vk EA HACE I 300 nut Press fit from Nippon Pillar Packing Co Ltd 20SF vk EE A Z2EH 77 xJV 208 nut Press fit from Flowell Corporation JLI Tw FA FY 742UA Flare nut Insert from Entegris Inc S3004 ZZV AREZ 145144 TO 300 male screw from Nippon Pillar Packing Co Ltd Inline type only M SC Conecting type Ehin Pressure conecting bore diameter EAE Pressure conecting port QO EJ Pressure range 1 0 F S JE Accuracy OBR Power supply OKFOJE rave Analog output 24V DC 10 28 xX 4 20mA DC 28 xX 24V DC 10 2 wire system 4 20mA DC 2 wire system 12 24V DC 10 S Rst 1 5V DC S RXX 12 24V DC 10 3 wire system 1 5V DC 3 wire system Eg 0 0 0 00 6 Power supply 74 1787 Analog output 5 K 34x gt h ZU Required Documents tz FLD HO BI THM PF S Vo Ber WRAAE RABE KEES AHF 118185 AA KLHEU gt 1 HEHE M VARTE Please specify the desired documents separately Submission drawings instruction manual inspection procedure test report 1 pc 1 copy inspection traceability certificate attended inspection lt BR ZU X4 CHER AU
3. 2 7 nA 3 wire system 1 5V DC load resistance 10kQ min MAA ERMBADGED GUGM R P Transmission system Free from combustible gas or liquid causing fire explosion under ORs Wit 3 385 2 wire system or 3 wire system normal condition HOA Pressure inlet 18 E Accuracy fi1 727 Sty kh TARY NES VES 61 4 63 78 01 27 VF REISEN Temperature coefficient Tube connection various types of nut male screw 0 05 F S C HZ zero Pi da 0 05 F S C 2 x span JS EPRE Wetted parts material HAPISL PFA IS mE Compensation temperature Z Dft PTFE PFA l Hoc Diaphragm PFA Others PTFE PFA EX AE J XV Setting system EZJLYZY Pressure range DA Sb ER 7 X O 0 3 0 5 MPa External adjustment at zero point St SS D Allowable pressure 7 A E Enclosure 0 7 MPa hx om BL Ar JIVI EER IP54 3855 EF SHEE Fluid temperature range Splash proof excluding cable end IP54 7 AH Chassis material 10 80 C E FA iim EE Sl Operating temperature limits FUJOEL PP 7 y tHe PTFE PFA 10 60 C Polypropylene fluorocarbon polymers RTE 0A Storage temperature range E E Weight SE 10 65 C 140g 7 2 v amp Approx 140g with cable CEvYv 3 77 CE marking HSS Applicable Directive 89 336 EEC E FH E SG BH Operating humidity limits 25 80 RH UEL bu HARE RIES LEVICE 25 80 RH no condensation inside the sensor iM Power source WARE Applicable Standards 24V DC 10 2 RxL 2
4. Cat No B01 30 C TS SS REI EZ N27 A575 KLI SERIE DIV A335 Model KL92 Pressure Transmitter for Semiconductor Production Appliances Chemical Resistance Pressure Transmitter RIL Wy RBS TP FIO LY WKOENDKIVASYAC FL OULILABEORA CIV SZIORe SERUM DEKS SARS mO E300 FE 72 RAMA RCM LET This product is a fluoropolymers diaphragm seal type pressure transmitter As the O ring free structure minimizes the generation of contaminant and the elution of metal it is suitable for pressure monitoring in the semiconductor manufacturing industry 2 E FEATURES AEBS 2 V7 y HA ABR PFA PTFE C IY Zink d FPDEWBIECEOTWET T i 7YBSORBRERRIWHULCEMED ELELE RIRE EI IPSA CI RTI CULYRKAT LavHiEO3u 2bm kb Wetted parts are all made of fluoropolymers PFA PTFE and so structured as to minimize the generation of contaminant Improved resistance to corrosive chemicals such as hydrofluoric acid Case protective construction of IP54 is employed to meet the application C C requirement of wet station with compact resin body CEv x ZZi amp Conforms to the CE marking 5 ETE ER SPECIFICATION TEC Fluid HD J Output zur PFA PTFEZERIEZVZEO 2 RI 4 20mA DC ffs 5000 max 24V DCS Liquid not corrosive for PFA and PTFE Sixt 1 5V DC AHAH 10kO min E FAERIE Operating condition 2 wire system 4 20mA DC load resistance 5000 max at 24V DC AR OC SEL SUC Elch RSEODIRIN 7 5 amp
5. Specify X if there is no specification item
6. fit from Flowell Corporation 15 2 EJXXA 5X6 5BXf ITI 2 Mounting hole 4 5 x 6 5 42 Variable resister for zero point adjustment YoIV KR AAAF 7 ee 1 rz 2000 22 2000 Standard 28 28dia IS ZS ei Model number Conecting port KL92 SAMMIMIE7TIKDTYAS ys BI Jun mm S3007 7 F IEA HESE CS S300 nut Press fit from Nippon Pillar Packing Co Ltd 15 2 45 X 6 SET UA 42 Variable resister for zero point adjustment Ya KI ARHI ea eS Conecting port Z2UL7 T hkURA T77 2UZA Flare nut Insert from Entegris Inc 15 2 EJXXA 5X6 5HX4 V X 2 Mounting hole 4 5x 6 5 Variable resister for zero point adjustment L JVF R AAAA 2000 2 2000 Standard IS el Model number Conecting port KL92 A GJEJ KAY AS ys fiz mis ta b Ceci WE ETHHORUIEZILLZEIHSETGU Model number configuration For ordering please specify the model number each spec and range JV NO Model name LILI XIX IXIXIXIXIX KANGEN EE 0 6 9 OD Q Chemical resistance pressure transmitter EAN TERRA Selective spec TAMAR 4 A Va VA Additional spec Option Hee Model number VILAT ILAXLAKPFA EK Z AR PTFE PFA In line type Element PFA Sensing part case joint PTFE PFA ZIL LST IL XLMRPFA ES ARF PTFE PFA Single port type Element PFA Sensing part case joint PTFE PFA 1f O D 1
7. wire system EN61326 1997 A1 1998 A2 2001 12 24V DC Sf RXX 3 wire system EMI Class B EMS Annex A E NAGANO KEIKI KL92 RDE KIVA ys ka RE WIRING Z MA 2 wire system Electric current output Sixt BEHN 3 wire system The voltage output D 5x Power source Red i 24V DC 1096 Power source 24V DC 10 amp amp 1812 24V DC Power source 12 24V DC i t BEST DC Volt meter zm FB dt 4 Common Black HJ l Output White SS Receiver iE ER TERT DC Am meter BR Receiver BURARSSLTOwcC SEB SM 5 PRT D CREDRACAU ETO CEBNIZ2Z t HMLU ETT Installation position Upright installation position is recommended since stagnant foreign matter at pressurized parts may cause errors AME st 3E DIMENSIONS 1 172172317 Inline type BI Unit mm G kk 3007 v F IEA HAEJ TR Tube connection S300 nut Press fit from Nippon Pillar Packing Co Ltd 2 6 4 5RXf LIA 2 A D NTT LIA 2 4 5 Mounting hole 2 4 5 Mounting hole 2JL K r XAxbRIi 7 Y Ib K R Shielded wire Air release tube AX 2 7 Eva yz l 2000 SE 2000 HE b4 7 4 7dia L a 2000 Standard 2000 Standard 628 28dia d LA ENERO LU Pressure inlet 45 EA eo Pressure inlet m 3 fei ic Model number Conecting port 1 414 YF 1 4 inch dia
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