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比率設定器 - 富士電機

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Contents

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10. Ti I O 2 j WNo99 7 3
11. 0300000000000 32 000000000 4 10 0 2 FS 1digit 1V OFF 10u A 5 105 1 100 3 DC30V 100 33 000000000000 Fem 0 2 FS 1
12. 3 1 0000 312 POWER CONDITION e SYSTEM SET START MODE A
13. 4 1 4 1 4 1 4 1 4
14. RNC 5 34 lt S sta e ER et cce Pe Pl i e x P 5 26 i natnm P 5 14 STOP RUN2 STOP FT
15. Windows PCMCIA PCMCIA 641 PCMCIA 6 4 Q PCMCIA PCMCIA Windows Ccrr card 6 5 Ccomecard
16. 00000000 0000 cu TE Dp 5090 og 40 200 2550 3 90 RH 4 5 6 8 10011 9 812 0000000000000000
17. FLASH_WAR3
18. We SA enim 1 1 CA NN 1 2 panam 1 3 1 3 3 29 REP De 1 5 TS 1 7 ER as 1 8 1 8 TAD RE MR E SE han Go 1 10 TS s NS E E PN 1 11
19. 1 BASIC CYCLE 100 50 2D 200msed 2 PI FULL STROKE PI1 PI2 3 4 DI1 J 012 DI3 J DIA DI5 J DI6 21790 018 00101 0013 00140 001 100 Sec x 100 sed 1 2000 2000 1000 10000 1 2000 01 200 300 POWERDOWN TIME SW CONT 011 3276 180 521 5 112 0000000000000 UUUUUUUUUUUUUUUUUUUUUUUUUUUUUOUUUUUO 51111
20. m 8 1 4 4Pen 32 POINT MIN MAX 0 1 MENU2 3 TREND SETTING i 00 k 0000 u DATAS 0 A Bee 0000 H di gt Ent gt uu lt gt 10
21. O 52101001001 CC M L1 L1 C L1 VOTI I LI LI I 7 1 7 2 7 3 EMB
22. Fit 1 1 1 16 k 00000 Nop AA 19937123731 TOF LOFI 1229212231 11 08 B MIN 0000
23. 0 00 8 000000 00 MENU 2 3 PASSWORD uuu De fault 0000 MENU2 S 000 PARAMETER CONSTANT R 100 00 B1 0 00 B2 0 00 B3 0 00 SH 125 00 28 000 0 SL 25 00 0000 125 00 8 0000 25 00 F 0000 125 00 5 OO c s 25 00 100 00 0 00 1 0 00 0 00 F 0000 ojo 0 00 MENU2 3 gt 0 LINEARIZER MENU2 3 LINEARIZER 00000
24. 1 LL Point 1 dat 000000 2 0000000 Maxmin _1 dat 1 1 hh mm ss 000 00 000 00 000 00 000 00 Lu uL L 4 2 YYYY MM DD hh mm ss 000 00 000 00 000 00 000 00 Pen1 4 Ming Pen4 Min 0 0 YYYY 4 hh 2 MM 2 mmi 2 DD 2 SS 2 Z nnnnnnnnn ED 7 2 Saa a 7 6 7 1 71 0000000000
25. Back Y Ll 5 50 2 Back Y Page MENU MENU C2 20 E 5 17 2 O IMENU 2 3 CONTROL PANEL gt TIME SET 51721 UU tl 51722 TIME SET 552 0000060 BI Ses n ERE EGET EG ERES
26. OD00O00O000000000000 DOD OO O D 21 78 000000 7 2 721 722
27. 1000 327 67 32767 100 00 1 1000001 327 67 327 67 0 00 B2 0000002 S0 Rx PVO B3 x B2 327 67 327 67 96 0 00 B3 3 327 67 327 67 96 0 00 5 svo 5 125 00 25 00 125 00 SV 100 00 SL svo 00000 S 25 00 25 00 125 00 SV down 0 00 down PH PH 125 00 25 00 125 00 PL PV PL 25 00 25 00 125 00 SOH 50580000 50 50 25 000 125 00 12500 5 13 500 0000 0 S0 25 00 125 00 25 00 5 13 DPH PV 0 00 100 00 100 00 DPH cur 00000000 PV 327 67 0 01 0 00 PV 0 OFF 0 00 327 67 5 11 TF PV 0 00 900 0 0 00 PV 5 12 5 100000 SV 0 0
28. 128 3 62 3 6
29. PDZR1001 PDZR2001 10000 8 17 8 18 10 T LINK PDZR1001 0000 PDZR 001 PDZK 1 PDZK 1 0000 8 19 8 12 87 000000000 871 DEC Fg 020293 60 9300 Ean 61 2 082 Os H 025 07 0 0 62 Ox OO PCD gg Son o 63 os O2020n 83 7 H 64 L s 0000 00 0000 0000 000320000 27 o x No 27 e
30. CD ROM 1 1 CD ROM INP TN2PDG 1 RCJ 1 2 1 000 000 CD ROM PDF PDF Adobe Acrobat Reader 4 0 CD ROM Adobe Acrobat Reader 5 0 Adobe http www adobe con o 1 2
31. 9 MENU MENU1 3 v II ALMO FLT Sel 3 1 1 Ack ALARM 1 16 TI A 1960 12431 11 02 17 y um AlmS
32. 121 IHL P 3 3 PV SV 50 SV PV SV 6 su O Tu 3 7 TREND SETTING 2 31 MEHE l P 3 10 FLT FL Do P 5 3 OT EMH REE OTT EO a 5 9 6 Q PI e 14
33. 2 20 Pen 4 0000 0000 RESET Pen1 4 BASE MENU1 3 9999 0 32767 096 FULL SCALE BASE SCALE gt FULL SCALE FULL O MENUJ1 3 999 10000 32767 100 FULL SCALE BASE SCALE gt FULL SCALE D P 1 0 2 4 UNIT O 1 3 3 173 5 17 3 5 18 510 2 3 5 10 1 ALARM SETTING
34. MENU MENU1 3 0 MENU MENU MENU1 3 2 3 MENU3 32 MENU 3 Y Sel o Back 1 1 3 3 8 MENU 1 3 ALM FLT STATUS MENU 2 3 PARAMETER CONSTANT LINEARIZER TRENDSETTING ALARM SETTING IC CONTROL PANEL MENU 3 3 SCC FIX RUN STOP Run
35. SV 7 6 075 PDG 11 T 8 1 8 2 8 3 8 4 8 5 8 6 8 7 81 00000000 811
36. 00000 230 TREND 5 10000 DENT N ugugggaggnmunun 1000 soste FILES POINT Pe 0000 0000000000000 0000 Pen1 Pen4 0000 10000000000 Dand 1040000000000 0000 00000 Drag 00 11 Pen4 gt 4 Ent 6 1 J LOG TY Pen1 00000001 8 e COMMAND Ent 1 oov RESETIT Ent 0 e STARTITI 0 0000 I n
37. 5V 5V e DC1 5M 00 Dm 1 1 0 LIT 0 5 lol 8 10 Al SCI 3 5V 15kQ SC 8 11 88 852 00000000L DC1 5V SCI 3 1 0000 5 8 12
38. 2000000000 140000 12 1 ai uat 1010 1990 EN61010 10 1993 I O 40 80 16 50081 21 1994 50082 21 1995 00 000000000 0000000 151 00000000 8 21 500kbps 8 23 00000000 500m 161 1000 512178 INP TN2PDA2 B 0000000000 0000000 5V 20MB 32MB 32 1 4 18 20 g 90000 0 32 135 11 4 0 1 16 00000 PCMCIA 0120 893009 SDCFB 4 101 00 4MB SDCFB 20 101 00 20MB SDC
39. 515 11 AOSET 5 4 5 15 12 T T 1 5 44 CHIN CH5 0000 0000 FFFF 5152 A 0000 5 15 2 1
40. E E N 4 L 83 000 j DC24V J 0 8 4 L Eros Ol perm Im EUN UE 900 P Ob 8 jaconoon 0 8 5 842 24 m VPI 820 D D PCD 19 62 T DC24V Q 9 9 DC24V 86 VPD 200 0 0 PCD 210 DC24V DC24V 8 VPD PCD 40mA
41. 5 36 4 000000000 448 680 0000000000 0000000000 0 1 10 000 4 0 0 T 4mAD DI D DL D D 44 D I D OFF ONO OLD
42. AC100V AC240V 8 og 50 000000 0000000 40 100 20 70 206 5 90 RH 5 95 4 9m 52 60cm
43. 1 un 00001 4 04 528 4 4 ALA Loop i un 2 04 v 1 gt 2 gt 32 CODE D Ent 0000 o Em oce 1 0000 1 0020 1614 5 36 00000000
44. LOOP TI gt gt gt R L e 51 e O T LINK TT T Link STATE TT T Link SETUP Master SY UKUTAI FTLS USE FAULT CLEAR PDA INP TN2PDA 53 SOPR 0 00 AUT MAN AUT MAN e No 44 No 44 d Mi 1 No 44 OFF gt ON 4mA Viii
45. 62 00 00000000 0 0 9 E Q D 5m 000000000 000000 j o 3 8000 2 0000000000 6 2 OFF OFF BUS
46. 12 D D D 0000 1000000000 00 000000000000 START RESET 5 000000 RESET 5 0000000000000000 9 CARD 00000000 e 5 4 5 INTERVAL
47. 5 12 56 00000 sap 5 5 5 5 61 5 62 0 517 000000060 5 7 000000 RUN STOP 5 71 5 7 2 RUN STOP 5 18 MENU3 3 0000 ss lt 20 TGLRAT ION WAFER CONNECT OUT CORRECT Pasa RUN STOP STOP RUN
48. 01000 WAFER Y WaferNo 01 0000 5 38 J WaferNo Ol CODE 0021 5 39 v n WaferNo 01 1 Ent WaferNo 01 10 AiD 1 0032 Ent 5 40 6 v WaferNo 01 3 Ent Q 01 30 1 LS1 0916 5 41 WaferNo 01 ego WaferNo O2 WaferNo 3 5 42 5 4 1 0000 091 803 5 42 WaferNo 04 lt gt Y 5 37 5143 000000 RUN STOP RUN RUN STOP 1 5 RUN MENU 8 8 Eid
49. I O I O 5 2 T LINK J LOOP STATUS MONITOR Al Al AO MONITOR AO AO DI MONITOR DI DI DO MONITOR DO DO WAFER OUT X T LINK MAS T link I O 00000000 00 T LINK SLV T link T link 5 3 3235 ODE STATUS MODE 0212 54 001600000 10 ERIRE 161000000000 D D SCC ON Remote Local 000 2 0000000000 Auto SCC LSD D D 324 AQ 0 0 0 OAOD O U Ul SIATUS AC 5 MONITOR D 53 54
50. 6 1 1 4 8 3 1 PCMCIA 000000000 4 20 32MB SDCFB 4 101 00 4 SDCFB 20 101 00 20MB 1 1 1 SDCFB 32 101 00 32 000000000000 http www sandiskcom PCMCIA PCMCIA 15 16 HHI C C U s Qasa PDA
51. 2003 2 00000 3 00000
52. 8 INPUT 0000000 8 PV BASE 9999 0 SCALE 32767 PV 0 BASE SCALE gt FULL SCALE PV_FULL P 9999 10000 SCALE 32767 PV 100 BASE SCALE gt FULL SCALE og 4 2 DIMENSION 0 SV BASE S SV 9999 0 SCALE 32767 PV 0 BASE SCALE gt FULL SCALE SV FULL 5 SV 9999 10000 SCALE 32767 svo 100 BASE SCALE gt FULL SCALE S SV 0r 4 2 DIMENSION 0 UNIT SETTING 173 5 28 p BASE SCALE FULL SCALED 0 0 0 D FULL SCALE gt 5 5 Hl E UU BASE SCALE 2 FULL SCALED 0 0 00000000 8 0000000000 OO U 0000001 0000002 529 000000 mou UNIT SETTING Ent
53. 6 2 ttes 6 3 6 3 ET ERU 6 4 61 0000000000000 e TREND SETTING TI I LI
54. m 00000000000 U 0 Em D 00000000000 00000000000 gt 00000000000 00000000000 U UJU DD U Pv DDD svi I 5 L 0 x 0000 500000_ SO POINTER 00000000 000000 000000 0000 I 00000000 K E EEE FWI ELECTRIC 0000000 2 Back 0000000 Cnt 0 0000000 Constant 00000000000 U U U U Parameter
55. n __ 0 000 m v mm a d 000 18 RUN STOP m i aonn m 00000000 0000 anining T LINK SLAVE 00 0000 0000 4 uu0 000000 0000 f 00000000 panai 142
56. MENU MENU MENU1 3MENUZ 3MENUJ3 3 MENU1 3 MENU MODE LOOP R L SV SV SV 40 SV SV 40 A UUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUU I SYSTEM SET 2 60 34 322 000000 00000001 00000002 00000003 00000004 0000000 i 0000000 1020 30 4 LOOP
57. 5 34 5 36 COD 000000 000 __ 1003 000001 0004 Z 11 0000 40002 000000 J 0000 03000 04000 A 5 34 5 35 1 1 OUTI IN1 100 H CUTI 200 L A H cuT CUT 3T 000000 IN m OUT H CUT L CUT 5 35 5 35 5 INP TN2PDA T 5 34 0000 0000000 ou Gd ecrn 0032 AO1 12 0033 2 00 48000 5 36 5 36 No 01 No48 48
58. 5 17
59. 00000 gt MENU2 3 0 CONSTANTII O O LOOP 1 1000000 D 5 5 80 0000000 0 00 SV cASIT CAS 4 sv CAS 3 16 0 00 0 00 0 00 3s 00000 3 81 uu OFF D VII D mA FIX ROM FIX FIX 382 000000000
60. 45 1 3 00000000000000 SOL SOH DPL DPH PVL PVH SVL SVH 25 00 125 00 25 00 125 00 0 000 100 00 0 000 100 00 AI CHECK DAI CHECK OPTION AI Ai ON OFF ON OFF Li 100 11 5094 111 5094 5 00 105 0098 D FLASH WAR WAFER STOP CNCT ERROR ROM ROM
61. 000 UID 00 0 20 0 3 0 41 0 5 0 2 0 3 00000000 8 84 83 111 X4 D VC NX YK J 7 0000 8mm 0 000 S 1 0100 144 72 21 6 0000 100Min
62. 1 2 12 060000060
63. PV 5 102 00000000 Kawsa ALARM SET PV Ber ararFh alarm iLooP PH PL 1 521 00000000 1 C1 C C C IPM NONE 000 PHPL PV DPH DPL PVO 530 000000 PH PL DPH DPL NONE 5 19 511 3300 5 5 1 1 51111 51112 SYSTEM SET P 5 22 00000000
64. LU TAG 2 2 22 ON e A AUTO
65. 4 4 1 2 5 6 2 7 8 9 10 4 PCD 12 DI1 DI2 DI3 13 14 15 DI4 DI5 DI6 16 17 18 DI7 DI8 DI9 19 20 21 10 22 DO1 DO2 23 24 25 DO3 DO4 26 27 28 DO5 DO6 29 30 31 DO7 DO8 32 DO9 DO10 8 2 815 872 10080 8 22 0000 0000 17 1 DIOL 24V 0 220 230 240 250 260 271 361 371 381 430 44 0 00000000 9 800 LU 0 u 000 00000
66. MENU lt Back 3 2 2 03004 mH CN rN TOE aa 2000000000000 DC1 sv000 000 0 120 0 0 rao oor 0 AC85V 264 50 60Hz ZA EE EE oo0000pp O00000 unun unum ua an 0g rauumuimudarou HE e 05 020202020 1 7 027 705010207 1 a LEE 20V 30V 1 00000 000 bc 00000 10000 000000
67. 5 46 0000 0000 PL INH 1 FFFF DPH INH DPL INH 1 R ACK 1 0000 0000 FFFF 1 1 Fry p 1580 5 41 s 516 5161 I T LINK 5 T LINK SLAVE T LINK 5 16 11 T LINK SLAVE 161 16 51612 i543 T LINK SLY OUT CUT CONNECT WNO O0 WNO O1 OO OODC 0000 04 0000 5 0000 08 0000
68. BUS 1 e TI 10 amp 2 6 1 3 1 3 2 3 3 3 4 3 5 3 6 3 7 3 8 PLE u sumi 3 2 3 3 PER DE 3 6 aa edens 3 7 3 8 EP 3 10 3 14 Mua 3 17 31 00 D LI 311 0000000 AC Dg 3 1
69. 7 11 00000000000 00 m TI T4 I O 712 T4 1 0
70. 6 5 64 00000000 0 D 642 000000000000000
71. 8 17 00 1 2 3 4 5 6 00 7 8 9 2 00 6 00 7 panin 8 PLE 8 E 9 10 00 11 AHA A EE PPH Giao 00 17 aR 18 00 1 0000 1 ET EST Ek ET L3 L3 L3 0000000 8 48 81 20000 200mS PV
72. svo v I Hl D SV 5 00000000 0 40 0 SVI 400 00000 372 0000000 00000000 0080 ON 01800 ON 00000 000 O O sI U m
73. 8 6 843 5 8 8 844 2mnf D 1000 Q SC 1 CIR 10u 10kO I 8 11 8 80 COR 00 O 100 00000 D 24 1
74. 0 U OFF 000000 BUSY A 00000 23 06 021304 000 0000000000000 00000 000 e 5 Sy 40 8 SV
75. FLASH WAR WAFER STOP CNCT ERROR 3 3 128 3 11 363
76. 9100 00000000 AC100V 240V 50 60 2 AC90V 20ms DC24V 20ms P XJ 00000000 1810 FLT FLT 11 ABS UL94V 0 IP54 72x 144 x 272mm 72 x 144 x 280mm 1 9kg 0 45 90 to 45 M3 5
77. NONE J IC READY IC 553 IC IC Sel READY 2 WAIT 3 Sel WAIT 4 READY IC WAIT 1 IC PC 5 17 4 0000 IMENU 2 3 gt CONTROL PANEL gt UNIT MAKE 00000000000 UNIT 5 17 41 5 1742 1000 5 54 000000 0 5 55 00000000 0001 00010
78. ON 4 3 e eo 00000 44 44
79. 4 5 00000000 e 7 8 00000
80. FLT TEL EL BL LL GL kaykan Patet Dated yaaa 5 2 TET 5 3 terc 5 9 SAT 5 11 5 12 S6 5 13 5 7 5 17 5 15 SS ay aun 5 16 ELE ED 5 19 anu ayaq a 5 20 ED BIG eth ot 5 27 5 30 EL PPB BPB FEB BB a ttd 5 34 T OR 5 39 5 42 az 5 44 5 3 5 4
81. Ert cd va 5 47 5 17 5 0000000000 IMENU 3 3 CONTROL PANEL gt TREND UMP TREND 5 17 3 1 Tmd 5 17 3 2 TREND JUMP 00000 000000 Em 00000 8 80 000 0000 0000 000000 00000000 0 D 6 Lada 000 DOOL
82. 2 2 22 Pet kana 2 3 2 3 TA 2 4 PIN hay Aaa muru ua hamu 2 5 a kaw as aus u 2 6 teu 3 1 ah 3 2 3 2 3212 A0 3 2 S tua C na TEE 3 3 3 4 HA paqa 3 5 RE 3 6 z EM una aan 3 7 3 8 PP 3 8 35210 A i 3 8 ES waman 3 10 316L a cate tre DE LL 3 10 362 Hu 3 11 3 63 IB ED BR 3 12 SS dius E 3 14 ESSE ESAS 3 15 3720 OD m m DEA apa 3 16 E wa TP 3 17 esse eA REA 3 17 SA A DE E I 3 17 E AA 4 1
83. e e 4 1 PDZB1001 43 PDZN0001 TY 23M Fix 2 4 2 2 Y Pilc 12
84. u INP TN2PDG1c Windows Microsoft corporation Schneider Electric
85. UNIT SET UNIT SET 0000 D 5 30 000000 0 0 AOI AO SETTING A010 A05 51312 5 13 11 U 513 5 131 L gt pip 2 d pjEL o2 IS 5 ES gt LG gt gt NN n N Ej 1 1 m Or un oa o0 Ga EXP o EXE 00H EYES CIE EXE Lr o EYES m ES p nm z EE G mn Lr o00 200042 ooo o 4 m 7 1N laoo ala Em a En oo L
86. 7 5 19 000000 UUUUUUUUUUUUU O DUE 10 nu u D u 0 u D 0000 000600 00000 000000000000 327 67 327 67 100 0 0 00 0000 59 2 30 TREND SETTINGITI H1 B B i B U D D DE CE 7 UT UI 10001 004 8 320000000 UUUUUUUUUUUUUUUUUUUUUUUUDUUUUU UUDDDUUUDDUUUUU uut 591 38 3 1 TRENDI
87. DPL 2 6 SYSTEM SET 523 00000000 0000 00000 LATCH ON OFF OFF SO ALM INH 500000 10 10 5008 00000000000 ON OFF SYSTEM FLT LATCH 0000000 0000000000000000 ON OFF 1 50 0000000000000000000 590 00000000 so H SO 0 0 500 00000000000 2000000000000000000000000 5 22 5 113 0000000 51111 0 0000000000000 0 5 0 00000000000000000060 0000000 20 0000000000100 0000000000 0000 51112 LOCK SV Key MODE Keyl 000 MODE LOCK 5 24 DDDUDDDD 0 0 0000 00000 Operation 00000 ON OFF OFF SV YA I D D RD LE D DL D U U
88. EZ Ky 1 V 2 7 7 D CO TCO NCC UNI L F nnn 00000 137 5 gt a 100Min 0000 8a 841
89. m 141 0032 00000000000 0 20 000000000000000 0 www fesys co j p http www fic n amp j p 042 585 2800 FAX 0421 585 2810 0000 9 000 120 00 001 50 00
90. 5 3 50 5 3 5 3 PV 0 B D AOS 000000 Ao4 0 0 0 4502 2 000000000 15 007 HUUU scc 5 SO R SV4B3 X KPV B1 482 8000 3 E E r3 82 83 R o SL Wi 00000 50 000000 4 1 ET ERE TELS 21 000000010 511 5 12 513 agam ca oa
91. MONITOR MONITOR T LINK Sb SL n HE E 5 9 T LINK SLVIN T LINK SLV u u D D D 00000 D D Wno 00 0000000 0 900000000 000 160 0 15 00000 58 33 531 2300 0000 000 0 00 00 0 00 000 0 00000 1 U 5 32 00000000 0000000 1 000 1 000 O unnnn 0000 SOPRO 000000 20000070 000 12000 22000 510 000000000 KP 0 5 12 000000 5 11 000000 Low i t z F i SL SH 5 13 0000000000 59
92. 020000000000 bpsl 00 MODBUSII 000 0 0 19200bps 0000000000 5 24 5115 I PVLA2AI gTI BEL OL BEL B B D 5 11 5 1 000 000 000000 1 5 12 50 11251 0 5 11251 0 10VDC 0000 1125 0000 TC PT 1125 5 11 5 2 PV1 2ch 00000000 6ch 00000000 0000 1 210 00000000 5 26 00000000 00000000 0000 00000 PVchl 1 2 1 2 0 00000000000 ON OFF OFF 1 PV1 2ch 6 ON OFF OFF ON OFF D DAIch1 12
93. 0 0 0 0 0 00000 000 e INIT CONT SY STEM SET RESTART TIME A SYSTEM 5 015 T T T UU START MODEITII O 000000000 50000 000000000 3 2 32 3 2 0000 SV 0000 lt V 60 00 swunnnn 000000000
94. 8 13 VP D d D ddr vP PCITI D DC20 30V 0 0 HH54P 00 0109 000000000600 P E ETE L3 c3 c 24 VP 86 861 MOD 58T 59 0000
95. 4 9 52
96. 5 15 3 1 5 51532 171 PH OUT CONECT PL 0000 PL IN 0000 DPH INH 0000 DPL INH 0000 0097 lt lt gt gt
97. 3 9 6 Frs FLT 5751 1 FAULT STATUS CHECK PV AI 112131415 0000000 Ch 1 Ch2 3 13 37 3 7 1 3 72 00 vu u 00 svo 0 0 0 0 FSO 400 0 00 vu u 00 SV E svo 0 0 0 0 FSO 400 0 0000000 000 5 00 0000 50000 I 100 7 0000000000000 000000000000 0000000 0000 50 00 MENU 0 0 E 5 eeu 3 14 371 00000
98. 3 50 813 1 600V IV JIS C330 JIS C3401 1 25x 3 5S 2x 3 5S 0 250 2m 2 600V IY JIS C330 JIS C3401 0 20 2 5mmf 3 G Al VPI VPD PCD AO MODI MOD SCI 4 MID 1 5 82 82 000000000 821 8mm 2500 2500 0 m e 30 7 68 mm U81 000000 822
99. 000 OFF 0p 0000000000 0000 000000 00 ON OFF OFF Lr Lr pH caooooo0C m maa m m L3 EJ a m 1 021 H EE Ll OFF 0p 0000000000000 523 5 114 0000000000000 00000000000001 5 1141 00000000000 00000000001 51142 0000 000000000 200000 puas hh R 0000 Modbus a _ 525 00000000 00000000 U D 0000 SATION ADR 00000000000005 10 255 1 BAUD 0000 0000000000000 02 2400 4800 9600 9600 MODBUS 19200 38400 19200 PARITY 0000 STOP 000000000 2 10 000000000000 00 0000000000000
100. PM 32 0000000000060 33 3 2 1 0000000
101. 25 00 125 00 125 00 25 00 125 00 125 00 25 00 125 00 125 00 25 00 125 00 125 0076 25 00 125 00 125 00 25 00 125 00 125 00 16 25 00 125 00 125 0076 25 00 125 00 125 0096 DD 11 TREND SET MENU2 3 gt TREND 1 80 8 8 COMMAND INTERVAL LOG TYPE SAMPLING Pen Tag1 Pen Tag2 Pen Tag3 Pen Tag4 EICO a o o Pen Data1 Pen Data2 Pen Data3 Pen Data4 Pen BASE FULL Pent D P Pen1 UNIT Pen2 BASE Pen2 FULL Pen2 D P Pen2 UNIT Pen3 BASE Pen3 FULL Pen3 D P Pen3 UNIT Pen4 BASE Pen4 FULL Pen4 D P Pen4 UNIT ALARM SET MENU2 3 0 ALARM SETTING 00000 LOOP1 CONTROL PANEL MENU2 3 gt CONTROL 00000 CONTRAST SET TIME SET year month day hour min sec IC CARD CARD FORMAT UNIT MAKE 12 Unit List UNITO1 UNITO2 UN
102. 401 O UO MENU MENUX 3T 100 MENU1 3 MENU2 3 MENU3 3 2 4 24 00 0000 2 5 9 i ITIL TET ATT TET Te o EEEHEBEH 998999859599993999599 55555555555555555 5
103. 5 13 3 1 RCO 5 3 3 2 DIRECT SETTING T E ON OFED 0 000 00000 0000 00000 0000000000000 0000000 000000000 INPUT TYPE 000 PTO 0 00 010 TCO D 0000 INPUT RANGE 000000000000 00000000000000 00 000 15 00 0000 00000000000000 RCJ ON OFF ON OFF OFF 0000000000000 5 32 0 0 400 0 Pt1000 0 00 150 006 0 0 800 0 Pt1000 0 00 300 0 0 0 400 0 Pt1000 0 00 500 0 0 0 800 0 000 0 00 600 0 0 0 1200 0 Pt1000 50 0 100 0 0 0 1
104. 1 2 5 10 30SEC 15 305 0 0 1 2 5 10 15 30MIN 0 1 2 3 6 12HOUR 0 0 1237 0 0 LOG TYPE Q000 0000000000000000 FILL FILL 000 FILL ROUND EE N AC IS RA ed eg m E ROUND 0000000000000 000000000000000 OO 2001 000 0 T 120 CARD ENDO D CARD RESET SAMPLING 000 POINT POINT POINT MIN_MAX MIN MAX 1 HU
105. 1 3 E 1 7 a 1 8 1 11 11 00000 UUM TUN o o o c o o t o E o t o o o O o o o CLERI TE EG Deis 00000000 000 E E o E E a E E E C e E o O E E a E e t E o o E E a o E o o 9 1000060 00000000 000 000 0 00o 1 NH un pnuaunuupungaunaugupnungaunan
106. AUD AN U D RH
107. MENUJ3 2 WAFER CONNECT T LINK SLAVE AO CONNECT DO CONNECT ALARM CONNECT MENUJ3 3 OUT CONNECT T STOP STOP RUN Run Stop RUN STOP FLT 58 00000 000000 231 CONSTANTI 581 48 488 000 00000 0 00 0 0 0 0 0 0 000 0 CONT 48 1000 0 00000000 0
108. 0 1 10 51522 CH OT 0000 O3 0000 04 0000 OS 0000 Gale CH 08 31a 08 CH 10 T T 1 5 45 UU 0 0 o0 0000 CH10 CH10 0000 00000 0000 5 40 5 15 3 ALARM
109. 2 Uu ER m LL E 5 30 5 132 c lt o 2 lt lt Ej a lt lt 5 13 21 5 13 22 0000 0000000 532 00000000000 9 DN DN gt O gt gt NR 1 1 m m Lr oo BH Eug Lr Lap l Eug Lr EE Eug oo aaga Lr Eug Ern oogHo Ert Lr ERE EE E3 p Er oaoa o08 30 OOO BOON O O ooo ooo 22024 o ooo a a ooon ooon a 2 HH EE Cu 9 LLI lt lt 2 m LL 5 31 5 133
110. 5 45 5173 00000000000000 IMENU 2 3 gt CONTROL PANEL gt IC CARD 5 46 5 17 4 00000 MENU 2 3 gt CONTROL PANEL gt UNIT MAKE 5 47 5175 MENU 33 gt CONFIGURATION gt TREND UMP 5 48 EP ET but 6 1 6 2 2 T RR RE ROS 6 3 63 BOH EP 6 3 E E EU UD A RR sas 6 4 GAT A pumas 6 4 6 4 2 B HB HHIH HBH HB eeu 6 5 e ect D 7 1 7100000000000 7 2 7 2 7 2 TAT 7 6 EPI T 7 6 EPI RR 7 6 OE Ona 8 1 A A E 8 2 NET Ae 8 2 8 2 RR REM NEL PE ME 8 2 Bon proto E EL BT anan state E a UE 8 3 SR RCM RE RR EROR EDS 8 3 ROO 8 3 sam uh 8 5 BU J w SY 8 6 8 6 8 4 2 DERE ERR O O O DC2AVD NER 8 6 O RO SSA
111. 35 351 3 352
112. 00000000000 c 5 45 5 17 3 00000000000000 MENU 2 3 gt CONTROL PANEL gt CARD IC CARD IC 5 17 3 1 IC 5 17 3 2 10000000060
113. 5 12 HS rr C P 5 13 2 3 3 3 C GA 5 30 P 5 23 R L 0000 5 44 8 4 2 CPU 122
114. 9 POWER ON CONDITION SW AUT MAN POWER ON CODITION SW AUT MAN MAN AUT 17 11 4 2 as A 4 2 e ERUNT 4 3 44
115. 1V 100A FS 100mS DC30V 100mA 22 000000000 10 41 OVI OFF 24V 8MA DC30V 10MA SVh SO ON 2000 8 100kO ON 1V OFF 100u 23 2 55 10 O 240 O 00 0 0 oom 40 5 31 00000000 000000060 5 4 R DC0 5V DC1 5V DCO 10V DC1 5V H 0 1 5 15kO LR 00000000 DC1 5V 12 5 112 596 DCO 5V O96 112 596 DCO 10V O96 10596 S 0 1 5 5 MES 000000 00000 FFFF 0 0 000000 0000 0000 0000 AC100V DC24V AC85V AC240V 50 60 2 AC264V
116. cg go nma Og o0 rd og 051 0000000 52 52 000000 52 1 52 2 5 5
117. 4 5 41 42 FLT DO 43 nn
118. C3 EJ 00000000 00 6 0000000 DII DI10 DO10 16 5 7 RFPSUM RFRAMP RFT
119. PCD 000060000 00000 No 35 36 37 77 78 79 80 00000000 O 1 2 3400 00 0000000 0000 100 240 000 D 0 DC24v n T T 00 240000 10 56 57 760 0 0 0 Diog 24V 0 0 00620000 8 21 8 13 0000 1 1 1 101 11 12 13 2 1 2 2 14 15 16 1 MI 1 71 78 MI 2 MI 2 79 80 AI2 AI3 4 AI5 71 72 73 74 75 AO1 AO3 4 5 51 52 53 54 55 SC 56 57 76 011 012 FLT T1 T2 VST2 MODI MOD VST1 VP VPD 0U 000000 00 8 1
120. 1 89 8535 8 10 A 8mA DC24V 24V DI DO
121. AN 5 11 Sa spp BEP E OM Osea 5 11 eG e 5 12 BSE DLSAN SNA 5 12 CA on RE RUTRUM EBENEN 5 12 DR Pe S aqu 5 13 EG ct 5 13 5 13 5 7 RUNS TOP Laid 5 14 5 14 5 7 2 RUN STOP 5 14 SS RR 5 15 BSL E A 5 15 5 15 5 9 UR IR BED FR 5 16 SIL UE 5 16 E aaa nam ma ham 5 16 5 19 BIOL TIR LR ot 5 19 510200 5 19 51 BBB HT 5 20 5 111 esee 5 20 5112 5 22 5 23 ES 5 24 5 25 sire p0 5 26 RR RAA 5 27 SAD TLD SE a n DSL SRST 5 27 5 122 TWEL TIED EDT HI se See 5 27 ESSEN TR REOR ERE 5 30 D b l aap a eed nr tee
122. TREND 1 8 RESET A 30SEC amp FILL POINT Pen 1 00005 Pen2 0000 lets 0000 Pen4 0000 22000 5 16 0000 00000 00000 00000 00000 00000000000 000000 gt 5 A 1055 22010 520 00000000
123. 0 550 0000000000000000000000000000 36 34
124. 11011111 00000000 91 0A LIN 1 92 LIN 2 93 AJ7 LIN 3 94 LIN 4 TUNES 175 00 155 88 125 00 125 00 123 20 125 88 515 0000000000 A DU 5 11 55 5 5 1 RAM ROM ROM 5 5 2 FTI PASSWORD 0000 Rur Legri RUH 5316 OFF FE 0000 Biri tos Locri MENU 0 0 30000 0 0 0 0 0 0 0000 0 000000 0 0 0 0 ReApY n 00000 0 0 0 00000
125. 4 2 4 2 4 3 aa A OE 4 5 4 5 MENU1 3 ALMFLTO 00000000000000 nn 4 7 5 1 EE YE 5 2 5 2 P 5 2 5 2 S E RD M 5 3 5 21 5 3 52 2 STATUS H m O asas puan 5 3 BRUN 5 4 52 4 ATE BTE BERE AG R aaa 5 5 5 6 So e EPEEPEEPEL E EC 5 7 527 5 8 b tji rsiq bh TPE BOR DIE ZS s aa unata a malas un m Sa 5 9 59 C E EN BR maa 5 9 haymaq ta 5 11 BAL SSS
126. ed d d MODULE SETING O gt 0 CONFIGURATION SETTING TAG1 001 PV BASE SCALE 0 PV FULL SCALE 10000 PV DIMENSION SV BASE SCALE SV FULL SCALE SV DIMENSION o E3 o o E3 E3 UNIT SETTING 0 MENUS S gt 0 CONFIGURATION CH1 RANGE 1 5V AOSETTINGU 00000 BASE 0000 0 00 FULL 100 00 CH2 RANGE 1 5V BASE 0000 0 00 000 FULL 100 00 RANGE 0000000 1 5V BASE 0000 0 00 FULL 100 00 CH4 RANGE 1 5V BASE 0000 0 00 000 FULL 100 00 5 RANGE 0000000 1 5V BASE mm 0 00 FULL 100 00 00 13 SETTING 0 CONFIGURATION DIRECT SETTING PV1 RANGE 1 5V Al SETTINCO 00000 BASE 0 00 FULL 100 00 000 PV2 RANGE 0000000 1 5V BASE 0 00 FULL Jmm 100 00 CH1 RANGE 1 5V BASE 0 00 FULL 100 00 CH2 RANGE 1 5V BASE 0000 0 00 FULL 100 00 CH3 1 5V BASE Jmm 0 00 FULL 100 00 CH4 RANGE 1 5V BASE Jmm 0 00 FULL Jmm 100 00 CH5 RAN
127. 0000 1280 0000000000 ON OFF OFF ch ON OFF oND 0 0 0 0 50 0 0 0 O 10500 D U U DAI checK OO U U D 00000 5 116 00000000 5 11 6 1 1162 6 6 SYSTEM SET 2 Lar Lar EIE Lar Ez E Lar Lr Lr Lar Lr Lar Lr Lr Lr Lr 5 27 START MODE 5 26 00 512 5121 5 122 00000 000000 000000 000000 5 28 000000000 5 27 MENENT
128. AIOG AO CH01 CH04 0000 AIOS AO 5 o 0 0000000000 D PVD01 0 1 PVD02 5 25 000 125 00 20 25 00 125 00 105 106 2 25 000 125 00 5 4 2 FU T 00 000 0000000 55 NENE 5 2 5 SIATUS NEM WEIN SIATUS DI MONITOR 526 DIDODDUD 5 2 7 D D D D D D 00000 D D CH01 DIDD D 00 OFF CH10 DI ON CH01 Don DD 00 00 OFF _ CH10 ON 56 326 LOOP 1 ET H E 00000 000 Noli 10000 2 000 NoAr D 3000 58 10 43000 000 1 00000 0 5 7 0000000000 58 0000000000 00000 0 40000 0 00000 1300000 0 0000 0 0 0000 0 57 5 2 7
129. Op 5 35 5 142 m 0000000000 2 LOOP 1 3 3 BWAFERIT D HD U D
130. TT 1 5 47 T LINK SLAVE T LINK SLAVE WNo 00 T LINK SLAVE I O 0000 0000 WNo 15 5 42 5 162 T LINK MODE O 0 0 O 5 16 21 5 16 22 U 548 000000 00000000 00000 WORD 000000000 000000000000 4W IN 16W 4W _ OUT 4Word In ou DL OOO D D 4W 2Word 2Word 00000 8W IN 8W_OUT 4W
131. m elele 9 oooooooooooo 69 gt A A D 25 OFF
132. DC20V DC30M 63Hz 000 AC100V AC240V bCzavm na a a anu 20 VP PC 7 DC500V 50MQ 30V 40mA 2000 1 AC100V 240 AC500V 1 4 000000000
133. SV 2 23 22 55 100 O 0 0 100 AC240V T 0 0 0 0 50 60 1 DC2AVITI T 5v0 5 DCO 10V 5V 0 1
134. u 00 8 16 8 23 1 1 1191 64 67 65 Rcj 1 66 2 I 2 102 39 42 40 Rcj 2 41 1 MI 1 43 44 MI 2 MI 2 22 23 MI 3 3 24 25 MI 4 4 26 27 AIL AI2 AI3 1 3 4 6 7 9 4 5 6 AOLAO2 45 47 48 50 Jd VL 4 10V 5 2 5 8 10 46 49 011 012 013 57 59 60 014 015 016 62 63 32 017 018 019 33 35 13 0110 14 DO1 DO2 52 53 54 0000000 DO3 DO4 55 56 28 DO5 DO6 29 30 15 DO7 DO8 16 DO9 DO10 FLT 51 UUUUUUU OPT COM MODI MOD COM VP PC 12 00 00 PCD 21 00000000 00 DIO COM 31 34 58 61 00000000 00 Ll N 00
135. 1 UDDDDDDD 0a20 INPUT 2 00000000 0818 INPUT 3 00000000 0919 CODE 0025 No 11 INPUT 1 0824 INPUT 2 00000000 0825 INPUT 3 00000000 0000 CODE 00 3 12 INPUT 1 0428 INPUT 2 0428 INPUT 3 00000000 0000 0000 130 48 INPUT 1 00000000 0000 INPUT 2 00000000 0000 INPUT 3 00000000 0000 15 T LINK SLV OUT 0 MENU3 3 gt 0 OUT WN0 00 gt 0 T LINK 0 B DB UU WN0 01 3 WN0 14 WN0 15 1 L3 AO CONNECT O MENUS 3 2 OUT CH1 AO CONNECTU O CH2 CH3 CH4 5 O MENU3 3 gt 0 OUT CH01 gt 0 DO CONNECT 00000 CH02 CH03 CH04 CH05 CH06 CH07 CH08 CH09 CH10 ETE 1 E3 o O MENUS 3 gt 0 OUT PH INH r3 L3 r3 DPH INH DPL INH R ACK 3 T LINK WORD O gt 0 00 16 WORD J T Link MODED O00000 SYUKUTAI FTLS USE
136. 100 1 0 T4 0011 WNo03 WNo04 WNoO WNo00 I O WNo04 WNo07 1 0 1 0 WNoO3 WNo04 WNo07 1 CC M 7 3 1 7 4 0000000 0000000 7 4
137. 13000 000006000 100 240 Dc24v0 0 0 0 00000 mH m st tn 11 PDG 9 10111213 1415 12345678 Polc l5 noun 11 11 2 2 2 2 2 3 2s a qa isla 2 4 24 Cette bee 2 5 PRECES T TOR 2 6 TAG Nd
138. 60 SESE m lt ea 5566060909 995969990 0090595000909 19 8 11 862
139. FAULT CLEAR o a 00 9 MOV d HNI L1dGd HNI LHdGQ HNI F1d HNI LHd 0000 oroa 67208 90d soq voa SOV AS r0V 4 0 205 207 05 LOY 00000 17 00 10 00000 18 ET m 8 go I itg PV 1d 2 Ai 1cl Ai 6cl PVD 1ch 000000 Wafer 1 1 Wafer 0 Loop10 00 RREQ PRE AREQ PUN W01 W02 W03 W04 A00 A04 A08 A0C A73 A77 A7B A7F W36 W37 W38 W39 A8C A90 A94 A98 A8D A91 A95 A99 A8E A92
140. READ 20200 Eu NES 5 43 Sel RUN STOP OFF ON 3 7 D ab 000 5 38 DID OUT 00000 0 00 D SToP 0000 007 5 STOP III lI 535 0000000 0000 000000000 P 151
141. 0 0 000 100 00 soPR 506000 0 00 0 00 25 00 125 00 PV PVF SV SVB SVF R B1 B2 B3 MV MVB MVF 100 PVF PVB SVF SVB 1 AVES VB s 100 100 100 5 B J B2 B3 1 00 d MVF MVB SVF SVB UD A 5 5 10 54 00000000 O D 2 31 LINEARIZER n 541 IOI ID UI 000000 LINI Li 16 2 02 16 16 19 XOT Y01 15 5 Y03 o4 04 Huunui Input X D 5 14 00000000 542 1
142. 1ch FLT3 1 OABF PV 2ch FLT3 2 Ai 1ch FLT3 3 Ai 6ch FLT3 8 PVD 1ch FLT5 1 PVD 2ch FLT5 2 ROM WAR2 1 ROM WAR2 2 WAR2 3 ROM WAR2 4 ROMI WAR2 5 Wafer Loop1 3 1 Wafer Loop1 WAR4 1 1 1 0880 t day mmH20 mg mPa mm sec kcal F kg day kg h kg min kg sec mm min cal g day mm h kcal m Nm day Nm h min Nm sec m sec day m h m min m sec m min NI day NI h NI min NI sec m h RH 1 km h Vol cc day cc h cc min cc sec e 00 HH 4 00000000 0000000 00000000 0000000
143. 1digit 327670 32767 4131211 0 0096 100 0096 8 5 105 35V 0 1 5 10 0 1 FS 250 4 0 2 FS 1digit 40076 5 FS 5006 1 5 100 5 FS 1 0 50 5 1000 0 25u 0 2 25 10 1 0 2 5 1
144. 1o 8 9 85 000000 851
145. 600 0 Pt1000 100 0 200 0 0 0 1800 0 Pt1000 200 0 600 0 C 200 0 200 0 C Pt1000 200 0 850 0 C 150 0 400 0 C J Pt1000 0 0 150 0 0 0 800 0 J Pt100Q 0 00 300 0 C 200 0 800 0 C J Pt100Q 0 00 500 0 C 0 0 1600 0 J Pt100Q 0 00 600 0 C 0 0 1300 0 J Pt100Q 50 0 100 0 C K K K R B T T E E 5 200 00 400 0 J Pt100Q 100 0 200 0 C WRe 5 26 0 0 2300 0 J Pt100Q 200 0 600 0 C PL II 0 0 1300 0 5 33 314 0 Lr ELI II 5 14 1
146. 8 7 EE ES SAAR 8 7 SESSA SASS 8 8 EN TO EE ME SS 8 8 TREES 8 9 L Blas 8 10 E6 Wauki BEDE EW 8 11 anu Du 8 11 8 6 2 OOOOOOODOO O 8 12 r A SENE SESSA 8 13 STL OTROS 8 13 ETO eaa O 8 16 M M I Pus 1 US 00 2 RB aaa aylu kayma E 00 6 qn BWA MCI 00 7 RAAT A CRIS O 8 ERES NET EUER TET 8 AS e aa 9 D ERU WE WE REO PEOR AE DD 10 11 Ee 17 18
147. A96 A9A A8F A93 A97 A9B w43 W44 AA8 AA9 W07 A18 A19 1 W12 W13 W14 A2C A30 A34 A2D A31 A35 A2E A32 A36 A2F A33 A37 W21 A50 A51 A52 A53 W26 W28 A64 A6C A65 A6D A66 A6E A67 A6F w35 A88 A89 A8B W40 W41 W42 A9C 4 A9D AA1 AA5 A9E AA2 AA6 A9F AA3 AA7 2000 DPH INH DPL INH SMAN REQ 19 EDS
148. FB 32 101 00 32MB 00 2 0000000060 1 1 1 0010 4 214 0013 5 SCC2 0934 1 1 0014 R R2 0935 L L2 0936 4 4 NORM NORM2 0938 1 1 RREQ PRE RREQ1 091 2 PV2 PUN 0918 1 2 093C SCC EN CEN2 093D 6 16 LS LS2 093E 1 PVD1 2 PVD2 10 0110 SV H SH2 0950 SV L SL2 0951 1 DI1 PV H PH2 0952 PV L PL2 0953 A PV H 2 0954 T 1 WNO01 A PV L 2 0955 16 16 0 00 PV
149. GE 1 5V BASE 0 00 000 FULL 100 00 CH6 RANGE 1 5V BASE 0 00 FULL 100 00 0 MENU3 30 gt CONFIGURATION CH1 INPUT TYPE 0 gt DIRECT SETI 00000 INPUT RANGE 00000 0 ON RCJ ON OFF OFF CH2 INPUT TYPE 0000 0 INPUT RANGE 00000 0 ON RCJ ON OFF OFF TREND JUMP gt 0 CONFIGURATIOND O O 0 1Loop 1 8 gt 0 TREND JUMPO 00000 WAFER WAFER CODE 0000 No 1 No 4 INPUT 1 0000 INPUT 2 0000 INPUT 3 00000000 0000 0067 5 INPUT 1 00000000 0031 INPUT 2 0425 INPUT 3 00000000 0916 CODE 008 No 6 INPUT 1 0410 INPUT 2 0881 INPUT 3 0916 CODE 0067 No 7 INPUT 1 UDDDDDDD 0a14 INPUT 2 0031 INPUT 3 00000000 0916 CODE 0000 8 INPUT 1 00000000 0000 INPUT 2 00000000 0000 INPUT 3 00000000 0000 CODE 000 No 9 INPUT 1 00000000 0030 INPUT 2 00000000 0000 INPUT 3 0000 CODE 0024 10 INPUT
150. ITOS UNITO4 UNITO5 UNITOG UNITO7 UNITO8 UNITO9 UNIT10 E3 OOOO OOOO o E3 E3 E3 2 E3 f r3 i 0000 000 De fault MENU 3 3 SYSTEM SETTING SCC MENUS 3 1 00 FIX PASSWORD LOOP1 0 MENU3 3 gt 0 SYSTEM SETTINGO 00000 BASIC CYCLE 000000 200 x 100 mas 011 2 PI FULL STROKE 1 300 Di3 4 PI FULL STROKE 2 300 Di5 6 PI FULL STROKE 3 300 Di7 8 PI FULL STROKE 4 300 MENU2 3 U2 3 00000 0000 MENU3 3 U3 3 0000 RESTART_SET 180sec LP1 LATCH OFF OFF OFF OFF OFF MODBUS STATION ADR BAUD RATE PARITY STOP BIT STATION ADR BAUD RATE PARITY STOP BIT 000 PV Ai Ch6 DAI Ch1 DAI Ch2 Al OU U LOOP1
151. PCM RFAVRG RFSLCT RFSUMA RFABSO RFGAPP RFLNR1 RFLNR1 RFLNR2 RFLNR2 RMIRPV RFLNR3 RMIRTO RFLNRA RFFLIP BITCN2 RFDCOD BITCN3 RFLNR3 BITCN4 RFRALP BITCN5 RFADDE BITCN6 RFSUBE BITCN7 RFMULE BITCN8 RFDIVE BITDIV RFPCNT RFROOT RFALM1 RFSUMM RFAPUL RFSBML RFLLAG RFMULT RFMAV1 RFADDV RFMAV2 RFLOGI RFAPWM RFSWCH RFHOLD RFECOD RFDET4 RFSTGE RFDET5 RFABCD BCD RFDET6 BCTO1BI RFLGC2 BCTO2BI RFLGC3 BIN BCD RFLGC4 BIZTOBC BIN BCD RFLGC5 RFDET1 RFLGC6 RFDET2 RFDET3 RFPRDV RFFLAG RFONF1 RFLIMT RFPUGE RFTIME OY O Uj QN
152. RD 5 30 ee to aaah 5 31 5 32 SiAn wadana 5 34 5 34 5 36 a qaa G L satan un 5 38 Jt mayta aaa 5 39 B fL a ua eti eme 5 39 mani naa SSK an sasa 5 40 SS R EL 5 41 5 16 T EIER Rl h Li PETNI A aus 5 42 E X6 T nh b B DE asco 5 42 OF 5 43 SAIT ERIT eS RNS ESA I 5 44 5 171 MENU 2 32 CONTROL PANEL gt CONTRAST SET 5 44 5172 MENU 2 3 gt CONTROL PANEL gt TIME 5
153. Stop SYSTEM SETTIG CONFIGRATION WAFER CONNECT OUT CONNECT COMMUNICATION 3 1 02 MENU3 3D 0000 00 00 0 00 0 000 0 0 0 0 0 0 000 0 0 0 0000 0 O 2 30 30 O PASSWORD UUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUDU SYSTEM 5 39 36 361 3 2 1 001 PVL
154. T MICREX F120 1 00000 0000000 DC1 5V 17 la 141 00000000 0000 8 4
155. Y 0000000000 00000 0 5 6 3 63 0000000000000 5 17 3 Li LE Lr Lr Lr P O ETE LE E ex eae 63 00000000 0000000000
156. ord 0 0 0 8W_IO ibn oU 4Word Out DWord jo A u e DOLD T Llink 000000 e 1 ll Master 5684 SYUKUTAI FTLS USE FAULT CLEARO HL 0 0000 000000 5 43 517 CONTRAST 5 5 17 1 IMENU 2 3 gt CONTROL PANEL gt CONTRAST SET 5 17 11 LCD 3 51712 CONTRAST CONTRAST Adjust Contrast

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