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Agilent 4155C/4156Cユーザ・ガイド 測定と解析

Contents

1. 1 o o a o
2. ul
3. 4 Agilent 4155C 4156C 5 WARNING CAUTION CAT 1 ON Supply OFF Supply STANDBY Supply INSTALLATION CATEGORY 1 4 INSTALLATION CATEGORY I
4. 3 8 Agilent 4155C 4156C 5 EN EVENT ENABLE TOTAL SAMP TIME TOTAL SAMP TIME AUTO NO LIMIT NO OF SAMPLES
5. amp 5C 4156C 415 1 F 1 In QSCV MEASURE QSCV MEASURE SETUP MEASURE MEASURE SETUP INTEG TIME
6. 4 I 3 4 Agilent 4155C 4156C 5 Figure 3 1 Case 1 Samp1ing Tnterva1 gt Meas Time SMU Output PGU Output Meas Time Time 4 6 HO ne Sampling Sampling Sampling Tnterva Tnterva1 N 3 5 Trigger Trigger Trigger Trigger Trigger 1 Total Sampling Time TOTAL SAMP TIME TOTAL SAMP TIME is one of the stop condition Starts Samp1ing Stops Samp1ing 7 Case 2 Sampling Interval lt Meas Time SMU Output PGU Output Meas Time EE gt Time 4 6 oid Ti gt gt lt gt o me 8 c s fc Samp1ind Samp1
7. 3 1
8. 2 2 Agilent 4155C 4156C 5 8 7 Figure 8 1 expression monadic operator dyadic expression operator numeric constant scientific constant data variable MM NR read out function keyword expression USDC7DO2 Ox12C Figure 8 2 LS Fe RE 0 EE UGD 07003 8 8 Agilent 4155C 4156C 5 modadic operator dyadic operator
9. 1 65535 PGU 2 PGU lt Table 7 15 1 1 PGU 2 1 2 PGU 1
10. FILTER SMU ON OFF Fi ia o Agilent 4155C 4156C 5 5 15 5 STRESS Status CONT AT ANY STOP AT ANY ABNORM STOP AT COMPLIANCE SMU 10
11. ot 2 No oF SAMPLES Fe No og SAMPLES 10 INITIAL TNTERVAL 1 1 INITIAL INTERVAL 10 MU AA 10 1 nitia1 1nterva1 2 10
12. P 4 15 P 4 16 6 TN M 5 HHHHHHH ma n Use P 4 17 7 Agilent 4155C 4156C 5 4 9 VNAME INAME DELETE ROW Quasi static C V chan CHANNELS C
13. 1 5 5 1 1 2 times initial Lhnterval Lnt eryal Discard Agilent 4155C 4156C 5 3 17 3 5 2 4 Hmes 2 times Initial Interyal interval Interval 4 3 Discard MEASURE SAMPLING SETUP MODE INITIAL INTERVAL
14. FCTN MODE VARI V START STOP COMPLIANCE VARZ I START COMPLIANCE VPULSE BASE START STOP COMPLIANCE 8 IPULSE BASE COMPLIANCE VART V START P STOP COMPLIANCE OFFSET RATIO START P COMPLIANCE OFFSET RATIO VPULSE BASE START P STOP Pb COMPLIANCE OFFSET RATIO IPULSE BASE COMPLIANCE CONST W SOURCE COMPLIANCE I SOURCE COMPLIANCE VPULSE BASE PEAK COMPLIANCE lt IPULSE BASE COMPLIANCE a SMU b VAR1 c MEASURE PG U SETUP Agilent 4155C 4156C 5 8 13 he Ra CHANNELS CHANNEL DEFINITION 1 STBY
15. TRIG OUT DELAY STEP DELAY Agilent 4155C 4156C 5 8 41 TRIG OUT DELAY SMU TRIG OUT DELAY TRIG OUT DELAY 4155C 4156C TRIG OUT DELAY 0 32 7 ms 100 us T1 TRIG OUT DELAY Pulse Width 4155 4156 Output rw Output External Instrument ileX Tex
16. 2 Agilent 4155C 4156C 5 6 13 1 MARKER CURSOR
17. 4155C 4156C 3 2 Agilent 4155C 4156C 5 DUT Agilent 4155C 4156C 3 Table 3 1 T
18. b 80 us 560 us c 480 us Table 7 3 J HRSMU 10 pA 0 lt lt 10 pA 10 fA 100 V 100 pA 0 SI S100 pA 10fA 100 V 1 nA 0 lt lt 1nA 100 fA 100 V 10 nA 0 lt lt 10nA 1 pA 100 V 100 nA 0 lt S100 nA 10 pA 100 V 1 nA 0 lt SuA 100 pA 100 V 10 nA 0 lt S10 nA 1 nA 100 V 100 LA 0 SI lt 100 nA 10 nA 100 V 1 mA 0 lt lt 1 mA 100 nA 100 V 10 mA 0 lt lt 10 mA 1 nA 100 V 100 mA 0 lt lt 20 mA 10 nA 100 V 20 mA lt lt 50 mA 10 nA 40 V 50 mA lt lt 100 mA 10 uA 20 V Agilent 4155C 4156C 5 7 7
19. 1 2 0 us 100 0 ps 1 0 us 99 9 ps 0 100 0 ps 0 1 us 2 100 us 1000 ps lus 999 ps 0 1000 ps 1 DS 3 1 00 ms 10 00 ms 0 01 ms 9 99 ms 0 10 00 ms 10 us 4 10 0 ms 100 0ms 0 1 ms 99 9 ms 0 100 0 ms 100 ps 3 100 ms 1000 ms 1 ms 999 ms 0 1000 ms 1 ms 6 1 00s 10 00s 0 01s 9 99s 0 10 00s 10 ms a 0 lt Table 7 16 1 1 Agilent 4155C 4156C 5 7 21 Table 7 16
20. 0 V 2 a 0 RR Agilent 4155C 4156C 5 8 11 MEAURE OUTPUT SEQUENCE Figure 8 3 STBY SMU1 1 0 SMU3 2 OFF SMU4 3 OFF PGU1 4 0 PGU2 5 0 SMU2 6 0 Figure
21. VAR1 VAR2 VAR1 VPULSE IPULSE VAR1 VAR1 SMU HRSMU 1 2W MPSMU 1 2W HPSMU 1 20W ITcomp Figure 7 10 a Icomp Vcomp
22. NO OF STEP 2 1001 STEP 1 SMU o SMU
23. Figure 8 SM SMU PG 16440A Input SMU ss RT Channel 1 SW1 Selected gt To DUT Input PG co SW3 SW2 CONTROL From41501 D gt Input To 2nd Control Logic o 2n 16440A Out a Channel 2 NN NM Output 0 selectedD To DUT Input PG SW2 SW1 SW2 Mechanlcal Helay SW3 Semiconductor Switch UGDO4004 8 22 Agilent 4155C 4156C 5 NOTE SMU PG SELECTOR CH1 2 CH3 SMU PG CH2 2 CH4 SW1 SW2 SW3 SMU 0 OFF OFF SMU PGU
24. 1 LINE LINE SELECT LINE SELBCT 1 2 NONE 1 2 2 GRAD MODE ON 3 LINE ON OFF ON 4 MARKER CURSOR 5 GRAD VALUE DISPLAY DISPLAY SETUP LINE PARAMETER ON X Y
25. 2 SWEEP MODE SINGLE START 3 1 V STOP 3 1 V STEP 100 mV COMPLIANCE 100 mA SWEEP MODE SINGLE DOUBLE START STOP STEP STEP 2 3 QSCV MEAS VOLTAGE QSCV MEAS VOLTAGE 80 mV STEP STEP ON 0 START STOP QSCV MEAS VOLTAGE STEP AE 4 20 Agilent 4155C 4156C 5 Quasi static C V 4 TIMING
26. SMU VSU 100 mA SMU VSU A D PGU 100 mA 5 16 Agilent 4155C 4156C 5 Fr STRESS STRESS SETUP 94JANO1 01 3QPM STRESS MODE PULSE IDORATTON IT UNIT PGU1 PGU2 PULSE 1 0ms AME COUNT FERIGD 10 00mmS KACOCUMUL ATED STRESS WIDTH 5 00ms 5 00ms 0 0000s DELAY TIME 0 00000 s10 00000 s PEAK VALUE 100my 1QQOmV HQOLD TIME BASE VALUE 0 000 Y 0 000 Y 0 000 Ss LEADING TIME 200 ns 200 ns TRAILING TIME 100 hs 100 ns FTLTER 1MPEDANCE Low Low xSTRESS ICONTINUE AT ANY Status KOONSTAN UNIT N
27. Figure 4 8 HRSMU 12 10 sg 8 8 6 8 3 4 Oo 2 0 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 1E 11 amp NN gt 8 8 1E 12 8 9 1E 13 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V i lt 10 pA 100 pA 20 V 2 1 0 5 0 3 s DUT 100 G ohm 200 pF 4 36 Agilent 4155C 4156C 5 Figure 4 9 Quasi static C HRSMU Reading Accuracy 2 0 0 001 0 01 0 1 1 QSCV Measurement Voltage V Offset Accuracy F 1 E 14 0 001 0 01 0 1 1 QSCV Measurement Voltage V 1 nA 2 V 2 1 0 5 0 2 0 1 05 UT 10 T ohm
28. SCALING CANCEL SCALING 1 GRAPHLIST GRAPHICS SHORT 93Aug09 06 18PM mA 2 00 OyerlaW MeasurEmsft Curve gt BT VAR B OFF Preseht Clhrve a El PRMTRS 200U div SHOW OVERLAY INFO 9 00 SCALE i 9 00 TQ 0 000 wD CY 1 00 div NE OVERLAY MARKER SCALING DISPLAY swEEP TiMiNG coNsT CURSOR SETUP sETUP SETUP SETUP UGTO2012 100 80 Agilent 4155C 4156C 5 6 29 GRAPH LIST LIST 1 MARKER 2 MARKER ON OFF
29. 1 2 Agilent 4155C 4156C 5 NOTE SN a
30. DUT 4 10 1H 8 QSCV SERIES RESISTANCE DISCHARGE 10 FP QSCV 4 1 1 4 4 P 4 PGU 4 12 P 4 14 12 P 4 13 Agilent 4155C 4156C 5 Quasi static C V
31. SMU CHANNEL DEFINITION VNAME TINAME VSU CHANNEL DEFINITIO VNAME SMU CHANNEL DEFINITION VNAME TINAME VMU CHANNEL DEFINITION VNAME PGU Table 8 1 TIME INDEX PGU CHANNEL DEFINITION VNAME PGT PGD PGT X PG1W PGT X PG2W PG1DL PGU1 PG2DL PGU2 PG1W PGU1 PG2W PGU2 PG1B PGU1 PG2B PGU2 PG1LD PGU1 PG2LD PGU2 PG1TR PGU1 PG2TR PGU2 8 4 Agilent 4155C 4156C
32. Agilent 4155C 4156C 5 7 39 Table 7 24 a E 2 HPSMU 1nA MPSMU 5 1nA 1nA HRSMU 10 pA 10pA 10pA 100pA 100 pA 1nA 1nA VMU 0 2VD a b VMU2 20 V Table 7 25 HPSMU 1nA 1 MPSMU 1 nA 1
33. 1 TNTEG TD VD Agilent 4155C 4156C 5 9 7 LGT LGT A A 0 A lt 0 LGT ID LOG LOG A A 0 A lt 0 LOG ID 9 8 10 Overflow e Overflow Agilent 4155C 4156C 5 MAVG A B MAVG A B n n Sr Xp 7 7 1 r lt nS lt
34. DELETE ROW DELETE ROW PGU1 PGU2 ac STRESS CHANNEL DEFINITION 4JANO1 Q1 30PM CHANNELS xSMU PG SELECTOR MEASURE STRESS MEASURE STRE SS NNO UNIT NAME MODE NAME FCTN 1 1SMU PGU SMU1 MP VA 2 1SMU PGU SMU2 MP V2 3 1OPEN OPEN SMU3 MP V3 4 OPEN OPEN SMU4 MP SMU5 MP SMU6 MP VSU1 VSU2 PGU1 VPULSE SYNC TRIGGER SETUP PGU 2 VPULSE ET DISABLE GNDU POLARITY POSITTVE DELE TE ROW SYNC STRESS STRE SS NEXT SETUP FORCE PAGE UGTO19110Ox70 5 14 Agilent 4155C 4156C 5 stress STRESS SETUP STRESS STRESS SETUP
35. Agilent 4155C 4156C 5 3 9 MEASURE SAMPLING SETUP ENABLE DISABLE ENABLE DISABLE ENABLE DELAY 0 INITIAL INTERVAI x 32767 s INITIAL INTERVAL NAME EVENT Va1 THRESHOTD
36. 4 5 As Ma 0 i Interpolate ON ON 2 MARKER DISABLE Agilent 4155C 4156C 5 6 33 VCE 0 1
37. THINNED OUT 720 us 65 535s NO OF SAMPLES 10001 TOTAL SAMP TIME NO OF SAMPLES lt 10001 TOTAL SAMP TIME INITIAL INTERVAL Xx NO OF SAMPL 1x10 s NO LIMIT ES 1 s NO LIMIT TOTAL SAMP TIME
38. MTN TD SQRT SORT A SORT TD 9 10 Agilent 4155C 4156C 5 MI MX MY MY1 MY2 CX CY CY1 CY2 IX IY IY1 IY2 L1CO L1G L1G1 L1G2 LIX LIY L1Y1 L1Y2 L2CO L2G L2G1 L2G2 L2X L2Y L2Y1 L2Y2 NOTE Md
39. rast INTERPOLATE ON OFF ON 2 MARKER OFF 6 14 Agilent 4155C 4156C 5 2 MARKER A GRAPH LIST GRAPHICS 751 2530mV SHORT 10 00uA 93Aug09 06 18PM 1 0342uA 1 00 decode decode div div 100 f 100 f 0 000 VBE V 100 m div 1 00 IARKER MAX ITER OFH
40. 4155C 4156C Figure 8 7 Figure 8 7 Th Hold Time Th Td Delay Time 4155 4156 EE Trigger Input External Instrument 1 Trigger Signal a Sampling Measurement step delay tme 4156 4155 4156 Th Td Td Start Value Trigger Input Fxternal Instrument 7 Trigger Signal UGDO4013 11Qx110 b weep Measuremehnt Single Repeat Append 4155C 4156C 1 4155C 4156C 8 40 Agilent 4155C 4156C 5
41. 1 10 110 1A 1pA 1 10 114 100 pA 1 2 100 nA 100 pA 1 10 114 10 pA 104 100 pA
42. rFi Rpur rr Rpur TS1 Tc R pur R pur A AA V V V To Tp AAA lt vy 8 K V J V N a Mi a non Kelvin connection b Kelvin connection 10 Q
43. Chan CHANNELS CHANNEL DEFINITION MEASUREMENT MODE SAMPLING VNAME INAME Vce weir Ic 4 MODE V SMU VS V 7 1 gt U VPULSE COMMON DVOLT VMU Ye U PGU SMU PGU SMU G
44. Agilent 4155C 4156C 5 Agilent 16440A PGU SMU STRESS CHANNEL DEFINITION stress PGU single SMU 16440A 8 5
45. ABS A AT AVG COND DELTA DIFF EXP TINTEG LGT LOG MAVG MAX MIN SQRT Agilent 4155C 4156C 5 9 3 SN ABS ABS A ID ABS ID AT AT A B B A Id Id Td AT Td 1 AVG AVG A yl ID AVG TD 9 4 Agilent 4155C 4156C 5 COND
46. ON l Display ANALYSIS SETUP DISPLAY ANALYSIS SETUP 2 1 DISABLE 8 3 AFTER 1 lt DISABLE it 4 3 AFTER
47. SI gt gt MEASURE MEASURE SETUP TIME MEASURE SWEEP SETUP MEASURE 0UTPUT SEQUENCE
48. 4 5B F 4 Reading accuracy B Offset accuracy Tinteg Bp CpXx Tinteg DpXx Tleak A Ap Vstep Tinteg Bo Bocx Cg Co Cocx Cg x Tinteg Do Docx Cg Ao Tleak Rdut Vstep Tinteg Tleak Vs7ep V Ag DUT Q Cg F Ax Bx Cx Dx Table 4 1 Table 4 2 Figure 4 5 Figure 4 26 Table 4 3 4 28 Agilent 4155C 4156C 5 a Quasi static C V Table 4 1
49. 1 5 2 Figure 3 1 Figure 3 1 GrTrMg rnteg Time Tmeas Tinteg Toh Tmeas Tinteg rnteg Time Toh
50. OO ff Hm F ms ngle 0 V 0 A E EX 0 Single sktop PAGE TROL stop singe PAGE CONTROL Table 2 1 Table 2 1 UNIT FUNCTION MODE
51. HPSMU 2 V 1pA 1000 mA 20 V lpA 1000 mA 40 V 1pA 3500 mA 100 V 1pA 125 mA 200 V 1pA 50 mA HRSMU 100 fA lt II lt 100 pA 10 fA 100 pA lt lt 1 nA 100 fA 1nA lt IH lt 10 nA 1pA 10nA lt lt 100 nA 10 pA 100nA lt I lt 1 uA 100 pA 1uA lt S10 HuA 1 nA 10 LA lt I lt 100 uA 10 nA 100 LA lt lt 1 mA 100 nA 1 mA lt H lt 10 mA 1 LA 10 mA lt lt 100 mA 10 uA MPSMU lpA lt HS1nA 100 fA 1nA lt IH lt 10 nA lpA 10nA lt lt 100 nA 10 pA 100nA lt I lt 1 uA 100 pA 1uA lt S10 LA 1 nA 10 LA lt I lt 100 uA 10 nA 100 LA lt I lt 1 mA 100 nA 1 mA lt H lt 10 mA 1 LA 10 mA lt lt 100 mA 10 uA 7 26 Agilent 4155C 4156C 5 HPSMU 1pA lt MN lt lnA 100 fA 1nA lt lt 10nA 1pA 10nA lt I lt 100 nA 10 pA 100nA lt lt 1 uA 100 pA 1uA lt lt 10 JA 1nA 10 uA lt I lt 100 nA 10 nA 100 LA lt I lt 1 mA 100 nA 1mA lt Iil lt 10 mA 1 uA 10 mA lt I lt 100 mA 10 nA 100 mA lt lt 1A 100 nA
52. 17cop 2zce 1 7 compliance 2 5 12 Figure 7 9 Agilent 4155C 4156C 5 7 23 Higure 7 9 Table 7 17 FY como comotance V como VV comotance Current Voltage VsO 1 0 gt 0 K comel eomp 2 Gutput Output Voltage Current cozp 3 complance b V compoliance conmo UGD04017 COMMON COMMON GNDU 1 6 A HRSMU 105 mA MPSMU 105 mA HPSMU 1 A i HRSMU 10pA 1
53. 2 DATA DISPLAY RESOLUTION IN EXTEND E E 10 pA oT NORMAL 1 fA EXTEND 10 aA Agilent 4155C 4156C 5 3 39 Single Repeat s
54. seress STRESS STRESS FORCE STRESS DURATION PULSE COUNT STATUS 100 ACCUMULATED STRESS STRESS STRESS SETUP ACCUMULATED STRESS STRESS STRESS FORCE CHANGE COMMENT CHANGE DURATION DURATION
55. 2 NN EAI NN MARKER SKIP Agilent 4155C 4156C 5 6 5 Figure 6 2 LIST GRAPH LIST LIST GRAPH LIST LIST SHORT 93Aug09 06 18PM VF IF V A DIRECT MARKER 1 10 00000m 4 150000p 2 0 000000 1 150000p ER 3 10 00000m 3 300000p RT EO A CT 5 30 00000m 14 80000p 5 9 DIF 575 0000p AZM dA SPREAD RE SWEEP TIMING CONST SHEE SETUP
56. SMU3 SMU2 PGU2 SMU1 PGU1 OT i NO Agilent 4155C 4156C 5 5 9 4155C 4156C 10 5 5 STRESS STRESS SETUP STRESS Status 3 TRESS Status CONT AT ANY RESS Status STOP AT ANY ABNORM TRESS Status STOP AT COMPLIANCE
57. 3 22 Agilent 4155C 4156C 5 20 ms 200 ms 1 TIME 20 ms 40 ms 60 ms 80 ms 100 ms 120 ms 140 ms 160 ms 180 ms 200 ms LOG10 1 10 200 ms 2 s 90 LOG10 1 10 90 10 TIME TIME 77og 77og gt Ttarget Tlog Ttarget lt Ttarget
58. 40 V stop stop 7 46 Agilent 4155C 4156C 5 Figure 7 12 A MOMUC rr Finish or Slop Finlsh measurement or stress force ls completed Stress a Stress UGDO4009 Agilent 4155C 4156C 5 7 47
59. NO LIMIT AUTO TOTAL SAMP TIME TOTAL SAMP T NO OF ME SAMPLES P 3 36 Agilent 4155C 4156C 5 3 31 Initial Sampling Interval Hold Time 5 Number of Samples Output Value C UG010da 00x69 HOLD TIME 3 32 Agilent 4155C 4156C 5
60. 4155C 4156C SEQUENTIAL MEASURE OUTPUT SEQUENCE OUTPUT SEQUENCE DUT SIMULTANEOUS MEASURE OUTPUT SEQUENCE 0UTPUT SEQUENCE 1 3 3 5 8 7 48 Agilent 4155C 4156C 5 SEQUENT
61. XI Y 1 DISPLAY SETUP 2 RE SETUP GRAPH MARKER CURSOR 3 4 DATA VARIABLE L gt EXIT CANCEL
62. b i c 480 us 7 14 Agilent 4155C 4156C 5 SMU SMU gt 4 ms SMU 0 5 ms 100 ms 100 ks 5 ms 1s 100 ps A H nD SMU
63. 2 87 888452279m HI rast CURSOR OFF GRAPH LIST GRAPHICS A CURSOR 751 2530mV 19 SHORT 93AUg99 06 18PM D2UA 10 02uA A 1 00 1 00 MARKER oF MARKER MIN MAX TNTER POLATE OFF e vV MARKER DIREGT MARKER CURSOR SKITP AUTY aNMALY STS 100 f 0 009 VBE V 100 m div 1 00 AX18 TAKER7 LIME SCALING DISPLAY SWEEP TIMING A SETUP SETUP BETUP CONST ETUP UGTO200D3 6 16 Agilent 4155C 4156C
64. E5250A APPLY SETUP 1 2 CLOSE X OPEN MY APPLY SETUP 1 2 BIAS DISABLE BIAS ENABLE E5250A
65. STRESS CHANNEL DEFINITION Agilent 4155C 4156C 5 1 7 45 PGU 16440A 16441A R Figure 7 12
66. ON OFF 5 ZERO CANCEL OFF a DUT b siop c ZERO CANCEL ON DUT MEASURE OSCV MEASURE SETUP SMU1 HR MEASUREMENT UNTT UNIT FCTN RANGE cNAME INAME SMU2 HR SMU1 HRIVAR1 1nA capo1 LEAKO1 TNTEG TIME TIME NPLC oscv 100ms 5 LEAK 100ms
67. 3 between a point and a point BY X Y COORDINATE BY DATA CONDITION E LINE 1 2 1 LYSIS SETUP 1 El LINE2 O H 2 2 E 1 E E 2 X X 9 0 E
68. 4 _ x Step 7 Step 8 Step 9 1 12 1 12 1 1 24 2 1 36 3 1 48 p 8 33 E5250A 3 E5252A INPUT1 SMU1 INPUT5 SMU5 1 5 INPUT8 VSU2 6 36 Agilent 4155C 4156C
69. 2 CHANNELS CHANNEL DEFINITION 3 4 MEASU REMENT MODE 4155C 4156C QSCV CHANNELS SMU1 SMU2 Chan QSCV UNIT SMU1 SMU2 V1 V2 VNAIME INAME I1 V MODE 12 COMMON FCTN VAR1 CONST SMU1 SMU2 DELETE ROW CHANNELS CHANNEL DEFINITION SWEEP MEASUREMENT MODE ssey SAM PLING CHANNELS MEASURE STBY SERIES UNIT VNA
70. l DISPLAY MODE GRAPHICS 2 1 Xaxis 3 Y1axis Y1 4 Y2axis Y2 NAME NAME 1 CHANNELS CHANNEL DEFINITION USER FUNCTION USER VARIABLE GRID ON OFF LINE PARAMETER ON OFF X Y DATA VARIABLES
71. 8 10 Agilent 4155C 4156C 5 RA FCTN MODE SMU VSU PGU VAR1 V START START YAR2 START VAR1 VPULSE BASE IPULSE BASE CONST V SOURCE SOURCE SOURCE SOURCE VPULSE BASE 5 IPULSE BASE a VMU GNDU PS PGU1 PGU2 4155C 4156C
72. OS Capacitor Capacitance Voltage 4155C 4156C 16442A 1 lt 2 DUT 1 SMU1 SMU2 5 CD So 4 18 Agilent 4155C 4156C 5 3 CHANNELS CHANNEL DEFINITION 1 4155C 4156C Quasi static C V
73. UNIT MODE FCTN SMU V VAR1 V ICOMMON CONST VSU V CONST PGU V CONST GNDU COMMON CONST SMU CHANNELS CHANNEL DEFINITION C cintegx 7 1 ox wx 7 cinteg or w 2 1 47 7 Lo V Vo P 4 4 F 7 ceg 4155C 4156C Agilent 4155C 4156C
74. 7 38 7 39 Js 2 7 39 gt 1 7 41 QSCV 7 42 7 42 7 44 0 7 45 0 2 IT IN TS DI NAO ROD 2 2 5 7 45 7 45 a ha RR 7 45 0 7 46 0 7 46 INT 7 48 ER 7 49 7 51 7 53 6 Agilent 4155C 4156C 5
75. Agilent 4155C 4156C 5 HOLD TIME 1 HoriD TIME 0 1 eTIME 0 TNITTAL TINTERVAL lt 2ms 30 ms 655 35 s 100 us INITIAL TNTERVAL gt 2ms 0 655 35 s 100 us Agilent 4155C 4156C 5 3 19 INITIAL INTERVAL 720 us 1 92 ms 2 ms 65 535 s NO OF SAMPLES 10001 TOTAL SAMP TIME NO LIMIT HOLD TIME 30 ms 655 35 5 0 655 35s 100 us 100 us STOP CONDITION DISABLE DISABLE ENABLE 1 8 FIX FIX AUTO LIMITED Short Short Medium Long
76. unit range cname iname integration time leak compensation zero cancel 1 nA 10 nA HRSMU 10 pA 100 pA IL IL 2 QSCV cinteg LEAK linteg QSCV MEASURE QSCV MEASURE SETUP error Short Medium Long
77. DUT 10 9 oo Hn A oo as B CC BBBBg SH HI R Box 8 1 16 P 1 18 P 1 19 P 1 20 P 1 21 SMU P 1 PGU
78. E5250A 4 E5252A TINPUT1 SMU1 INPUT3 SMU3 1 3 INPUT6 SMU6 4 48 TNPUT OUTPUT PORT NO PORT SMU1 1 SMU2 2 SMU3 3 SMU4 SMU5 SMU6 4 48 8 36 Agilent 4155C 4156C 5 Step 7 E5250A APPLY SETUP E5250A Step 8 E5250A APPLY OPEN ALL E5250A Step 9 CANCEL SBTUP CHANGE i
79. 4 7 44 Agilent 4155C 4156C 5 4155C 4156C SMU VSU PGU GNDU R 4 0V 20 V 100 LA 100 uA ov 20 V 0 Vdc 20 V LOW ov 0 0 SMU HH CHANNELS CHANNEL DEFINITION
80. jek STRESS MODE ac MODE VPULSE FCTN SYNC DURATION DURATION PULSE COUNT FREE RUN sop ACCUMULATED STRESS RESET ACCUM STRESS HOLD TIME
81. time origin Figure 3 2 SEQUENTIAL MEASURE 0UTPUT SEQUENCE OUTPUT SEOUENCE PGU time origin Figure 3 3 Mi Figure 3 2 SIMULTANEOUS CONST 1 1 Pulse Blas ER PG CONST 2 a holg tinme time origin sampling start sampling completion UG
82. 1 100 ns 1000 ns 1 ns 2 0 50 us 10 00 ps 10 ns 3 5 0 us 100 0 ps 100 ns 4 50 us 1000 ps 1 Ds 3 0 5 ms 10 00 ms 10 ps lt x 0 8 lt x 0 8 50 Q 0 Q PGU 41501A7B 8 7 22 Agilent 4155C 4156C 5 SMU HPSMU MPSMU HRSMU VSU SMU VSU
83. TOTAL SAMP TIME AUTO stop GPIB 4155C 4156C NAME THRESHorD EVENT EVENT NO ENABLE DELAY TNITTAL TNTERVAL 2 msec INITIAL INTERVAL a
84. 0 OF STEP START STOP STEP 1 0 1 SMU 7 ee OSCV meas voltage hold time delay time source cvoltage 2 10 V step 1 delay time 7 Agilent 4155C 4156C 5 NOTE NOTE Quasi static C V MEASURE QSCV MEASURE SETUP
85. TBASIC 4155C 4156C 1 MO DV SMU COMMON SMU R tr 4155C 4156C 1 R SMU 1 SMU Agilent 4155C 4156C 5 8 17 Table 8 2 R R igure 8 4 R
86. ST 8 3 8 4 2 8 5 NE 0 0 8 6 YA LU DAN 9 90 SS DUAL Cu 8 7 822 22 2 SR ee ee os 8 10 RA FNRI AS DE gt 8 10 RI ZANE 00 8 10 8 11 8 11 2 ii 8 12 8 13 AO IA 2 8 14 R 8 15 eS ee 2 2 8 15 8 15 RE Ce 8 17 as EID 8 18 2 TO 8 20 SMU PG 8 22 SS RE 8 23 7 TTT OTTO 8 23 9 ML IAN SSC 2 8 24 8 25 8 25 8 28
87. DISCHARGE ew 3 83 3 30 Agilent 4155C 4156C 5 THINNED OUT 10 25 50 Meas MEASURE SAMPLING SETUP MODE 2 LIN LOGXX XX 1 INITIAL INTERVAL MODE NO OF SAMPLES TOTAL SAMP TIME
88. DTSPLAY DTSPLAY SETUP 00DEC07 02 18PM GRAPH Cs DTSPLAY MODE GRAPHTCS LIST GRAPHICS Xaxis Ylaxis Y2axis NAME TIME Ve SCALE LTNEAR LINEAR MIN 0 000000000 s 0 000000000 V MAX 200 00ms 1 000000 Y GRTD LINE PARAMETER ON ON DATA VARTABLES DATA DTSPLAY RESOLUTTON INDEX NORMAL GRAPHICS Select Display Mode with softkey or rotary knob B DrsPtAY ANrysrs PREV NEXT SETUP SETUP PAGE PAGE Agilent 4155C 4156C 5 3 45 6 Single 4155C 4156C GRAPH LIST MARKER Vv GRAPHICS SHORT 00DEC07 04 52PM MARKER 196ms 921 20mv erNDEX 20 9 1 00 MARKER MTN MAX INTER POLATE OFF DIRECT MARKER CURSOR MARKER
89. triqge signal PGU1 1 3 delay time pulse width PGU2 8 UGDOA024 100 100 pulse start PGU PGU 8 44 Agilent 4155C 4156C 5 Agilent 4155C 4156C 5 Agilent 4155C 4156C 9 2 Agilent 4155C 4156C 5
90. CURSOR TO MARKER 1 LINE LINE SELECT LINE SELECT 1 2 NONE 1 2 2 TANGENT MODE ON 3 LINE ON OFF ON 4 DISPLAY DISPLAY SETUP LINE PARAMETER ON Y OFF DISPLAY SETUP DATA VAR
91. VAR2 START VAR2 STEP VAR2 NO OF STEP VAR2 COMPLIANCE SMU POWER COMP ON 0FF SWEEP MODE SINGLE LIN L0G LINEAR STOP START STEP NO OF STEP UNIT NAME CHANNELS CHANNEL DEFINITION Agilent 4155C 4156C 5 1 19 Ir CHANNELS CHANNEL DEFINITION VAR1 VAR1
92. o Single Single 0 V 0 A Fe E Agilent 4155C 4156C 5 2 13 DISPLAY SETUP Y AXIS REGION Y 1 X AXIS REGION X X AXIS DISPLAY X NORMAL REVERSE Y AXIS DISPLAY Y NORMAL REVERSE GRID
93. 4155C 4156C 4155C 4156C STRESS CHANNEL DEFINITION TRIGGER SETUP Stress Force State PGU J 0 ac stress SMU Ue NON qate trigger output Trigger Signal 4155C 4156C MEASURE OUTPUT SEQUENCE
94. STOP AT ANY ABNORM STOP AT COMPLIANCE SMU SMU SERIES RESISTANCE 10k ohm 100k ohm 1M ohm SMU VSU 100 mA SMU VSU A D PeU 100 mA 1 26 Agilent 4155C 4156C 5 A DISPLAY DISPLAY SETUP pispay
95. rie i A Guard Force DUT Buffef V V 10 6 Agilent 4155C 4156C 5 DUT 0 CM 4156C HRSMU 41501A B HPSMU 1 Fe
96. D SABLE 1 i 0 0 VCE 10 VCE VCE 2 3 DISPLAY ANALYSIS SE 93JUL22 11 32AM LTNE1 NORMAL 1ine on Yi between a point AT x 0 kk and a nt WHERE VEE AFTER VCE A 1NE2 1 8 MARKER At a point where Interpolate OFF MAX VCE DISPLAY AT SETUE RES PREV PAGE NEXT PAGE IGTO20 5 6 36 Agilent 4155C 4156C 5 2 1 2 Agilent 4155C 4156C 5 Graph List
97. 1 MO R 762Z74 7 or User s Guzde R 2 2 SMU 1 MQ 100 kQ 10 kQ 0 9 R 4155C 4156C R Agilent LED R 04155 61610 1 5 m 04155 61609 3 0 m 04155 61605 0 4 m 16493K 001 1 5 m 16493K 002 3 0 mm Agilent 4155C 4156C
98. GPIB 4155C 4156C GPIB Agilent 4155C 4156C 5 8 27 Step 1 Step 2 PP be a E5250A CHANNELS E5250A PROPERTIES cnan E5250A PROP E5250A PROPERTIES CHANNELS E5250A PROPERTTES 01JAN15 05 04PM E5250A SETUP GPTB ADDRESS122 CONTROL OFF CARD TYPE E5252A CONFIG MODE NORMAL MATRTX CONNECTION MODE BIAS COUPLE PORT STATUS CONN CONN PORT 1 3 5 7 9 RULE SEO CARD1 FREE BBM CARD2 FREE BBM CARD3 FREE BBM CARD 4 FREE BBM E5250A INPUT CONNECTTON TNPUT 1 SMU1 INPUT 5 SMU5 LILILLHLLL TNPUT 2 SMU2 INPUT 6 SMU6 TNPUT 3 SMU3 TNPUT 7 VSU1 INPUT 4 SMU4 INPUT 8 VSU2 TNPUT 9 VMU1 TINPUT 101VMU2 22 Enter GPTB address of E5250A 0 to 30 B CHANNETL USER USER E5250A DEF FCTN VAR S PROP GPIB GPIB ADDRESS E5250A GPIB
99. SWEEP MODE LIN LOG Figure 1 4 Output Voltage or Current A Synchronous Source Stop Value Primary Source N Stop Value 4 3 Synchronous Source Start Value 2 Primary Source 1 Start Value 0 Time UGDO3004 120x90 Agilent 4155C 4156C 5 1 CHANNELS CHANNEL DEFINITION SMU VSU VAR1 SMU VSU VAR1 MODE V VPULSE IPULSE 2 VAR1 3 MEASURE SWEEP SETUP
100. MX X GMX MY Y GMY Y1 Y2 MY1 Y1 MY1 MY2 Y2 GMY2 Agilent 4155C 4156C 5 9 23 9 24 Agilent 4155C 4156C 5 10 Agilent 4155C 4156C 5 DUT 16442A B 4155C 4156C
101. 4 Y2axis Y2 NAME NAME CHANNELS CHANNEL DEFINITION USER FUNCTION USER VARIABLE GRID ON OFF LINE PARAMETEKR ON OFF X Y DATA VARTABLES 2 DATA DISPLAY
102. MEASURE SAMPLING SETUP FILTER FILTER ON FILTER OFF F SMU dc 10 ms STRESS STRESS SETUP FILTER FILTER ON FILTER OFF Agilent 4155C 4156C 5 7 37 NOTE NOTE Agilent 4155C 4156C 1
103. 6 DELETE ROW L i 4 10 Agilent 4155C 4156C 5 NOTE Quasi static C V QSCV QSCV Meas MEASURE QSCV SETUP VAR1 SWEEP MODE SINGLE DOUBLE VAR1 START VAR1 STOP VAR1 STEP VAR1 COMPLIANCE
104. FCTN NSYNC Figure 5 1 MEASURE OUTPUT SEQUENCE OUTPUT SEQUENCE PGU1 SMU1 PGU2 SMU2 SMU3 1 HCS NO 5 8 Agilent 4155C 4156C 5 Figure 5 1 lle State Stress Force State ldle State Stress Force PGU1 1 1 1 AC Stress SMU1 OO Pp NSYNC PGU2 AC Stress a pulse a elay time of PGU SMU2 NSYNG Held Time SMU3 DC Stress 1 Stress Start Stress Stop UGDO4003 PGU1 SMU1 PGU2 SMU2 5 SMU3 PGU1 PGU2 SMU3
105. UNIT SMU1 FCTN VAR1 RANGE 1nA CNAME CAPO1 INAME LEAKO1 UNIT FCTN CNAME INAME VNAME 1NAME 3 INTEG TIME TIME NPLC QSCV 100 ms 5 LEAK 100 ms 5 QSCV LEAK QSCV 0 04 400 50 Hz 0 033333 333 33 60 Hz LEAK 0 02 2 50 Hz 0 016667 1 6667 60 Hz 4 22 Agilent 4155C 4156C 5 Quasi static C V F 4 LEAK COMPENSATION
106. NB 8 Source output time Step Delay Time Tsd Delay Time Td Td Tsd Hold Time Measurement tme Wait Time Vstart 7 36 Agilent 4155C 4156C 5 SMU SMU SMU SMU SMU dc ON OFF ms INITIAL INTERVAL ms
107. OFF VMU ON VMU Agilent 4155C 4156C 5 1 17 CHANNELS CHANNEL DEFINITION A Meas MEASURE SWEEP SETUP VAR1 SWEEP MODE lt SINGLE DOUBLE VAR1 LIN LOG LIN LOGXX XX 1 10 25 50 VAR1 START
108. 4155C 4156C stanapy Standby 4155C 4156C stanagby
109. 80 us 560 us c 480 us Table 7 7 MPSMU lnA 0 SI lt S1nA 100 fA 100 V 10 nA 0 lt S10 nA 1pA 100 V 100 nA 0 lt lt 100 nA 10 pA 100 V 1 LA 0 SS1uA 100 pA 100 V 10 nA ON S10 nA 1 nA 100 V 100 LA 0 lt lt 100 uA 10 nA 100 V 1 mA OI lt 1 mA 100 nA 100 V 10 mA 0 lt lt 10 mA 1 LA 100 V 100 mA 0 SI lt 20 mA 10 LA 100 V 20 mA lt I lt 50 mA 10 LA 40 V 50 mA lt lt 100 mA 10 uA 20 V 7 10 Agilent 4155C 4156C 5 Table 7 8 MPSMU ee 1PLC 4 lnA 0 lt S1 15 nA 10 fA 10 fA 100 fA 1pA 10 nA 0 lt S11 5 nA 10 fA 100 fA lpA 10 pA 100 nA 0 SS115 nA 100 fA 1pA 10 pA 100 pA 1 HuA 0 lt lt 1 15 nA 1pA 10 pA 100 pA 1nA 10 LA 0 SI S11 5 nA
110. 2 QSCV MEAS VOLTAGE 2 10 V STEP ISTEP STEP ISTART STOP HOLD TIME 0 655 35 s 10 ms DELAY TIME 0 65 535 s 100 us NO OF STEP START STOP STEP 1 1 UNIT NAME CHANNELS CHANNEL DEFINITION QSCV
111. 3 VAR1 SETUP POLARITY POLARITY 0 4 0 Y a positive 5 negative c blpolar positive X negative X bipolar X 0 0 Agilent 4155C 4156C 5 2 5 NOTE 8 primary sweep source VAR1 step time
112. Agilent 4155C 4156C 5 7 31 VMU 20 V 2 V 7 23 IT 7 32 Agilent 4155C 4156C 5 NOTE LONG
113. 1 CHANNELS CHANNEL DEFINITION SMU VSU VAR1 2 MEASURE SWEEP SETUP VAR1 SWEEP MODE LIN LOG 1 LIN LOG LINEAR NO OF STEP LOG10 1 10 LOG25 1 25 LOG50 1 50 Agilent 4155C 4156C 5 START STOP STEP NO OF STEP COMPLIANCE POWER COMP HOLD TIME DELAY TIME 1 6 FF 9
114. Figure 6 1 GRAPH LIST GRAPHICS GRAPH LIST GRAPHICS SHORT 93Aug09 06 18PM MARIER 751 2530mw 10 00UA 1 0342uA CA 0 MARKER 1 09 1 00 MIN MAX 1C IB DIRECT MARKER CURSOR decodes decods div div MARKER SKTP AUTO ANALY SIS 109 f 19G f CURSOR 9 009 vBE Y 100 m div 1 00 OFF AX1S LINE SCALING DISPLAY SWEEP TIMING CONST Y2 SETUP SETUP SETUP SETUP UGTQ2002 GRAPH LIST GRAPHICS MARKER CURSOR MARKER Y1 o Y2 AXIS Y2 AXIS Y1 AXIS Y2 H AXIS Y1 H 6 4 ON he 3 H Y2 RR Y2
115. ON Agilent 4155C 4156C 5 8 25 Table 8 3 Figure 8 6 Rm 8 4155C 4156C SYSTEM CONTROLLER System MISCELLANEOUS 24755C zs 2726C zs CONTROLLER i 4155C 4156C 1 41501 SMU 1 E5250A 1 E5252A 10x12 1 4 GPIB 1 a SMU 4 b AUX 4 ro ro 1
116. SAMPLING SETUP Meas MEASURE CHANNELS CHANNEL DEFINITION 1 CONSTANT SOURCE 2 CONSTANT SMU COMPLIANCE UNIT NAME MODE PGU MEASURE PGU SETUP PGU P 3 34 Agilent 4155C 4156C 5 3 33 PGU PGU PGU CHANNELS CHANNEL DEFINITION M
117. P 3 36 Agilent 4155C 4156C 5 3 27 P 3 38 P 3 39 P 3 40 7 HHHHHHH e Vecot cntcrmet 3 28 Agilent 4155C 4156C 5 VNAME INAME DELETE ROW
118. 5 REGRESS MODE ON 6 LINE ON OFF ON 1 2 2 1 7 2 MARKER CURSOR SELECT CURSOR 8 CUTSO S NN mA 2 09 the range of regression calculation 1 1 1 G0 000 VD V 1 00 div 19 90 Agilent 4155C 4156C 5 6 25 DISPLAY DISPLAY SETUP LINE PARAMETER
119. Agilent 16493K Agilent 16493C Sense Agilent 4155C 4156C 5 1 31 4155C 16442A B Triaxial Cables 16442A B TnterlockyLED Cable 4155 4155C 16442A B 4155C 16442A B Intlk mmterlockLED Intlk SMU 1 Triaxial 5 SMU1 VSU 1 VSU 1 SMU 2 Triaxial 5 SMU2 VSU 2 lt VSU 2 SMU 3 Triaxial 5 SMU3 VMU 1 VMU 1 SMU 4 Triaxial b SMU4 VMU2 lt VMU2 a LED Agilent 16493J Agilent 16493C SMU4 c Agilent 16493B 1 32 Agilent 4155C 4156C 5 2 DUT 1 DUT
120. SMU Al NN N NNcomlance range AN er 0 2 20 Vp p UGD02009 0 lt Vp pl lt 2V gt 2nA 2 lt Vp p lt 20V gt HHE 6 x Vp p 222E 6 20 lt Vp p gt 20 pA Agilent 4155C 4156C 5 7 15 SMU lt 10 uA 2V gt 10uA I PEAK BASE START STOP
121. VARI OFFSET RATIO COMPLIANCE SMU POWER COMP SMU 1 10 Agilent 4155C 4156C 5 nl SMU SMU 1 Figure 1 5 SMU
122. 2 NORMAL ADC EXTEND 10 pA NORMAL 1 fA EXTEND 10 aA lt 3 0 DATA DISPLAY RESOLUTION Agilent 4155C 4156C 5 1 27 A DISPLAY DISPLAY SETUP pispay l DISPLAY MODE LIST LIST NAME NAME NAME CHANNELS CHANNEL
123. CP 7 23 Agilent 4155C 4156C 5 7 5 ew ep ra HRSMU SMU Figure 7 3 HRSMU Current mA e IM UGDO2003 Table 7 1 HRSMU 2V 0 lt IVI lt 2 V 100 nV 100 mA 20 V 0 lt IVI lt 20 V 1 mV 100 mA 40 V 0 lt IVI lt 40 V 2 mV 50 mA 100V 0 lt IVI lt 100 V S mV 20 mA Agilent 4155C 4156C 5 Table 7 2 HRSMU a ci 640 us 80 us 1PLC 1 92 ms S60 us 2V 0 SIVI lt 2 2 V 2uV 20 LV 200 LV 2 mV 20 V 0 lt IVI lt 22 V 20 LV 200 LV 2 mV 20 mV 40 V 0 lt IVI lt 44 V 40 LV 400 nV 4 mV 40 mV 100 V 0 SIVIS100 V 100 LV 1 mV 10 mV 100 mV a
124. STOP CONDITION NAME Agilent 4155C 4156C 5 7 53 7 54 Agilent 4155C 4156C 5 me Agilent 4155C 4156C 5 7 8 2 R SMU PG Agilent 4155C 4156C 5 3
125. 1 Agilent 4155C 4156C 5 3 13 3 5 1 2 2 oO 4 times initial interval N Discard 4 3 MEASURE SAMPLING SETUP MODE LINEAR INITIAL INTERVAL 1 NO OF SAMPLES 1
126. ON ON 1 GraphList L INE 2 LINE SELECT 1 2 1 3 LINE ON 4 pispay ANLYSIS SETUP DISPLAY ANALYSIS SETUP 5 LINE1 LINE2 TANGENT 1 6 line on Y1 Y2 7
127. EXT TRIG Tn Out 4155C 4156C EXT TRIG In 0ut 4155C 4156C Ext Pulse Generator Trig Out PGU 41501A B Ext Pulse Generator Trig Out 2 ac PeU 8 Agilent 4155C 4156C 5 5 5 2 PULSE COUNT 1 65535 COUNT PERIOD PULSE COUNT PGU ac
128. N Circuit Common Agilent 4155C 4156C 5 10 5 Center Conductor Outer Conductor Coaxlal Cable Probing Needle NN Connector Plate USTOD30 GAL 2OWS52H Contact ma DUT No RN OA NC CCEA
129. ZERO CANCEL ON QSCV MS GRAPH LIST OFF ZERO CANCEL OFF 2 Re Offset data for previous setup UNIT ZERO CANCEL OFF IN ZERO CANCEL ON ees RANGE
130. 0 ON LINE LINE SELECT 1 2 ANLYSIS SETUP LINE ON Display 1 DISPLAY ANALYSIS SETUP GRAD line on Y1 Y2 3 BY X Y COORDINATE X X Y Y BY DATA CONDITION LI 1
131. 10 8 Agilent 4155C 4156C 5
132. 5 2 Agilent 4155C 4156C 5 Agilent 4155C 4156C de ac serress a AC Stress Signa 5 DC Stress Signal STRESS STRESS FORCE 1 Agilent 4155C 4156C 5 5 3
133. 2 6 Agilent 4155C 4156C 5 NO OF STEP VAR1 SWEEP SETUP VAR1 MEASURE SWEEP SETUP NO OF STEP MEASURE SWEEP SETUP x NO OF STEP stop SMU dl o VMU
134. HRSMU Agilent 4155C 4156C 5 7 41 NOTE QSCV QSCV QSCV QSCV 1 MEASURE QSCV SETUP MEASURE QSCV MEASURE SETUP Table 7 26 2 3 MEASURE QSCV MEASURE SETUP ZERO CANCEL ON 4 st
135. 0 NO OF STEP MEASURE 0 0 NO OF STEP MEASURE START 0 SWEEP SETUP 20 V 2 V Agilent 4155C 4156C 5 KNOB SWEEP KNOB SWEEP 94JANO1 O1 30PM SR 500 000OmV 5 000000mA mA 10 00 IF 1 000 ldiv a 5 0000 0000 VF 1000 div V 1 000 Y AXIS SETUP DISPLAY vVAR1 VAR2 CONST ASSTGN coPY SETUP SETUP SETUP SETUP UGHO4007
136. 5 Agilent 4155C 4156C 5 8 6 41 8 7 6 AFTER RNN RUI 9 9 DISABLE I 9 8 AFTER 7 8 2 specified two points mA I 2 00 the range of regression calculation 290u id
137. 9 0 V cvoltage 2 Agilent 4155C 4156C 5 Quasi static C V Figure 4 1 QSCV VAR1 stop voltage limit of sweep source output last step cvoltage 2 Xx Vg f a Trigger NZ delay time 3rd step 0V 0V Measurement items 2nd ste at Nth sweep step Vo ILo step voltage cinteg linteg linteg delay time step voltage start voltage source output value when starting sweep output delay time NOTE 2 1L IL DISPLAY DISPLAY SETUP INAME LEAK COMPENSATIONOO 7x cinteg V hh FI INAME
138. 6 18 2 EE 6 19 6 21 gt 6 23 6 25 6 27 0 eS ER Ra 6 27 OS 6 28 6 29 9 2 6 30 a eR a 6 31 AO IAS WS gt 6 31 ee 6 32 NN ee ee ee ee e 6 33 2 5 8 6 35 6 37 6 39 6 41
139. Higure 7 10 b Vcomp Agilent 4155C 4156C 5 7 27 A FY Figure 7 10 Current Current Compliance Voltage Compliance Voltage Specified complance Speclfied V comelarnce Specified power comolance Specified power comolance Output Area Output Area Volage Current a For voltage sweep b For current sweep UGDO4018 RR SS RM NA TI20030 SMU Figure 7 11 MPSMU 0 V 100 V Current mA Current mA 1 hk 199 100 50 50 20 20 0 20 40 190 gt Yoltage MI 0 20 40 109 MM MI
140. SMU2 RANGE FIXED 2 V RANGE FIXED Agilent 4155C 4156C 5 5 DISPLAY DISPLAY SETUP 1 Display DISPLAY DISPLAY SETUP 2 DISPLAY MODE GRAPHICS 3 X Y1 X axis Y1 axis NAME TIME VG SCALE LINEAR LINEAR MIN Os 0V MAX 200 ms lV X Y1 VG 4 DATA VARIABLES INDEX GRAPH LIST GRAPHICS
141. VAR2 POINTS COMPLIANCE CONST SETUP SETUP COPY MEASURE SWEEP SETUP DISPLAY DISPLAY SETUP POWER COMP OFF EX Agilent 4155C 4156C 5 2 15 2 16 Agilent 4155C 4156C 5 Agilent 4155C 4156C 5
142. Val gt Th Val lt Th NA 1 NAME THRESHOLD E THRESHOLD IVall gt Th NAME THRESHOLD v IVal lt Th NAME THRESHOLD EVENT NO EVENT EVENT 10 E 10 3 36 Agilent 4155C 4156C 5 TOTAL SAMP TIME TOTAL SAMP TIME
143. SMU1 SMU2 5 my Co gt iR Agilent 4155C 4156C 5 3 41 4 3 CHANNELS CHANNEL DEFINITION 1 4155C 4156C 2 CHANNELS CHANNEL DEFINITION Caan 3 MEASUREMENT MODE SAMPLING 4155C 4156C 4 CHANNELS SMU1 SMU
144. 1 7 III gt gt 1 9 2 oo SD 1 11 Aa Sat Se Pb SS RANe 1 14 1 16 1 18 1 19 oO IO 1 20 2 1 21 SMU 1 22 P6U 1 24 1 26 or 1 27 1 28 gt 1 29 N i 4 1 30 1 1 31 2 DUT III 1 33 3 gt 1 35 0 1 37 5
145. HH MEASURE OUTPUT SEQUENCE OUTPUT SEQUENCE 2 0 V Agilent 4155C 4156C 5 7 51 Figure 7 14 Figure 7 14 SMU1 4 VSU1 2 disabled SMU4 VSU2 Idle State Measurement State Idle State Sampling Measurement Mode 1 0 SMU4 disabled VSU2 disabled SMU1 COMMON SMU2 CONST _ SMU3 CONST source and common channels cutput simultaneously A an order that channels returnto OV outout switch Is off eeesee channel outputs a specified source value UGDO4011 7 52 Agilent 4155C 4156C 5 4155C 4
146. VAR SETUP SWEEP MODE SINGLE DOUBLE POLARITY POS NEG BIPOLAR VAR1 RANGE X NO OF STEPS COMPLIANCE Y HOLD TIME STEP TIME 2 14 Agilent 4155C 4156C 5 VAR2 SETUP VAR2 START VAR2 STEP
147. 10 114 100 pA 1 2 100 nA 100 pA 1 10 114 10 pA 104 100 pA 7 30 Agilent 4155C 4156C 5 10 nA 1 nA
148. 9 4155C 4156C 9 Agilent 4155C 4156C 5 8 9 2 4155C 4156C dc SMU VSU PeU VMU GNDU CHANNELS CHANNEL DEFINITION STBY STANDBY ON
149. AUTO 1 4 E5252A E5250A 48 NORMAL 12 PORT FCTN NO FCTN BIAS PORT BIAS PORT COUPLE PORT
150. 2 2 1 Z00M IN 2 1 2 Z00M OUT CENTER AT CURSOR SHOW OVERLAY INFO X Y X Y1 Y2 X Y1 Y2 X Y
151. Append stop Agilent 4155C 4156C 5 1 29 Agilent 4155C 4156C U2 SMU3 S DUT SMU 3 MOS FET Id Vg SMU3 Td Vg X Id Y1 o2VId 9Vg Y2 im ld vd 6 Y ld sy ld i Vi SMUS
152. at apoint LINE2 E1 WHERE 1 EX X Y AT 8 5 8 7
153. Step 8 CONN RULE SROU 1 FREE MR 1 CAUTION 1 1 NOTE FE5250A FREE SROU E5250A CONNECTION SETUP
154. 7 16 Agilent 4155C 4156C 5 VSU VSU Figure 7 6 Figure 7 6 VSU Voltage Source VSU OUT Output Switch 7 COMMON UGDO2006 20 V 1 mV 20 V 100 mA Agilent 4155C 4156C 5 7 17 VMU VMU VMU 2 VMU Figure 7 7 VMU 20 V VMU Table 7 13 Figure 7 7 VMU Grounded Mods lt VMU output Switch lowewe Mode V Differential Mode VMU2
155. a MEASURE SAMPLING SETUP INITIAL INTERVAL gt 2 ms 1 nA lt 2 ms Agilent 4155C 4156C 5 7 29 he 1 10 110 1A 1puA 1
156. CHANGE PLS CNT PULSE COUNT RESET STATUS STATUS RESET ACCUM STRESS ACCUMULATED STRESS STRESS STRESS SETU STRESS 5 22 Agilent 4155C 4156C 5 P ACCUMULATED Fr STRESS STRESS FORCE STRESS STRESS FORCE 94JANO1 01 30PM CHANGE COMMENT STRESS DURATION 10 0000 s CHANGE DURATON 0 0010 STATUS 5 0000 s 50 00 ESET ACCUMULATED STRESS RAUSS 123 4509 s RESET ACGUM STRESS GHANNEL STFESS PREV DEF SETUP PAGE UG Agilent 4155C 4156C 5 5 23 5 24 Agilent 4155C 4156C 5 6
157. VAR1 STOP LOG START STOP VAR1 STEP LIN VAR1 COMPLIANCE POWER COMP SMU ON OFF NO OF STEP START STOP STEP UNIT NAME CHANNELS CHANNEL DEFINITION 1 18 Agilent 4155C 4156C 5 CHANNELS CHANNEL DEFINITION VAR2 MEASURE SWEEP SETUP VAR1
158. Table 7 4 HRSMU P pi 640 us 80 us EE 0 10 pA 0 lt M lt 10 5 pA 1fA 1fA 1fA 10 fA 100 pA 0ZM lt 115 pA 1fA 1fA 10 fA 100 fA lnA 0ZM lt 1 15 nA 10 fA 10 fA 100 fA 1pA 10nA OZM lt 11 5nA 10 fA 100 fA 1pA 10 pA 100 nA 0 lt Il lt 115 nA 100 fA 1pA 10 pA 100 pA 1uA 0 lt lt 1 15 nA 1pA 10 pA 100 pA 1 nA 10 nA 0 lt Ill lt 11 5 nA 10 pA 100 pA 1 nA 10 nA 100 uA 0 lt Il lt 115 nA 100 pA 1 nA 10 nA 100 nA 1 mA 0 lt lt 1 15 mA 1nA 10 nA 100 nA 1 nA 10 mA 0 lt lt 11 5 mA 10 nA 100 nA 1 nA 10 nA 100 mA 0 lt Il lt 100 mA 100 nA 1uA 10 nA 100 nA a E b 80 us 560 ps c 480 us 7 8 Agilent 4155C 4156C 5 MPSMU SMU
159. V2 V ge zy time V Vg IL Vg I Vg V Vg IL Vg Figure 4 1 cinteg 1 V V 0 V V linteg IL IL V TL 4 4 step V IL po
160. VAR1 VAR2 VAR1 CONST Meas MEASURE SWEEP SETUP VAR1 VAR2 VAR1_ CONST 1 SMU PULSE PEBRIOD 2 SMU PULSE WIDTH 3 SMU PULSE BASE UNIT NAME CHANNELS CHANNEL DEFINITION Stop Value 1 Val Steh Value Start Value Pulse Base Hold Time Pulse Width Pulse Period For Pulsed Sweep Source Output Value 1 es Pulse Base Hold TIme
161. 7 38 Agilent 4155C 4156C 5 NOTE NOTE 7 42 SMU VMU QSCV QSCV P 10 nA 1 2 MEASURE MEASURE SETUP MEASUREMENT RANGE 7 24 Table 3 stop Z
162. VAR1 VAR1 VAR1 VAR1 X RATIO OFFSET MBASURE SWEEP SETUP VAR1 1 VAR1 OFFSET VAR1 VARI VAR1 RATIO VAR1 VARI 3 VAR1 COMPLIANCE SMU POWER COMP ON 0OFF UNIT NAME CHANNELS CHANNEL DEFINITION 1 20 Agilent 4155C 4156C 5 CONST
163. 3 1 2 No DUT lt ee Probing Needle 4 N Contact Pad Connector Plate lt UGTHCAGALIAO NASH Contact Pad Agilent 4155C 4156C 5 10 7
164. H CANCEL LIST GRAPH LIST LIST SHORT 93AugO9 06 18PM MARKER ON VF IF M A DIRECT 10 00000m 4 MARKER ra Bi Si Ordo SOO Te 4 20 00000m 6 650000p MARKER 3 30 0 09nm 14 80000p SKIP 7 9 DIF 575 0000p AIVY B SPREAD RE SWEEP TiMING coNsST SHEET SETUP SETUP SETUP SETUP UGTO2014 199xe0 Agilent 4155C 4156C 5 6 31 DISPLAY ANALYSIS SETUP MARKER CURSOR
165. X Y2 Y Yo CX1 Xo X Y2 Qa y Yo og x1 og Xp X Y2 w log yi log yo X Xo0 X Y2 w log Y log yo og x1 log Xo C LINE1 X0 Yo XX1 gt Y 1 LINE1 2 2 X Y2 Agilent 4155C 4156C 5 9 17 gt L1X LINEI X Y 0 X GL1X LINE1 X L1Y LINE1I Y x 0 Y GL1Y Y1 Y2 8 LINE1 X L1Y1 LINE1 Y1 X 0 Y1 L1Y1 LINE1 X L1Y2 LINE1 Y2 X 0 Y2
166. ac STRESS CHANNEL DEFINITION MODE VPULSE FCTN SYNC DURATION 500 us 1 3 1536x107 s 10 s 100 us 10 s 10 ms 5 6 Agilent 4155C 4156C 5 4155C 4156C ac dc
167. Agilent E5250A CPK OO OG OK GOO OO GO OO CK GO OO CO OO Q Q OOO OO 2 4OeO s O00 ES252A output connectors lt slot 1 lt slot 2 slot 3 slot 4 SMU INPUT GPIB connector AUX INPUT GPIB address switch Agilent 4155C 4156C 5 Table 8 4 E5250A E5250A E5250A PROPERTIES SMU INPUT 1 4155C 4156C SMU INPUT1 SMU1 a 5 SMU 1 2 41501 HPSMU MPSMU U12 SMU2 SMU INPUT 3 INPUT3 SMU3 SMU INPUT 4 INPUT4 SMU4 SMU INPUT 5 PUT5 SMU5 SMU INPUT 6 INPUT6 SMU6 AUX INPUT 7 4155C 4156C VSU VMU PUT7 VSU1 41501 PGU AUX INPUT 8 INPUT8 VSU2 AUX INPUT 9 INPUT9 VMU1 AUX INPUT 10 PUT10 VMU2 E5252A
168. CNAME 6 INAME 6 INTEG TIME QSCV 50 Hz 0 04 400 60 Hz 0 033333 333 33 LEAK 50 Hz 0 02 2 60 Hz 0 016667 1 6667 NPCL NPLC 2 20000 1 100 Short Medium Lons 3 LEAK ON OFF COMPENSATION ON DISPLAY SETUP INAME ZERO
169. MI X Y Agilent 4155C 4156C 5 9 11 CX X CX CY Y CY Yi Y2 CY1 Y1 CY1 CY2 Y2 GCY2 9 12 Agilent 4155C 4156C 5 1X LINE1 LINE2 X 6TX
170. 1 39 6 3 1 41 2 09 1 43 2 2 3 RR EA 2 3 Agilent 4155C 4156C 5 1 2 4 2 5 KNOB SWEEP eS II 2 2 8 OOIIl 2 9 0 eee NN SS SS SS eS 2 eo 0 2 10 KT BAE293 2 0 2 2 11 2 12 2 13 TTY 2 14 3 kk 3 3 RR 3 3 3 4 J 3 7 3 8 FRI TOK EE S BPS 3 9 0 3 11 A 3
171. Agilent 4155C Agilent 4156C Agilent Technologies 041S6 97020 Anugust 2003 5
172. FT rf EF 1 1 1 INITIAL INTERYAL 6 7 5 6 HH Co JIbS
173. GRAPH LIST LIST MARKER CURSOR i ast GRAPH LIST LIST 1 RE SETUP 2 MARKER CURSOR 3 4 EXIT
174. TNITTAL TNTERVAL lt 2ms 30 ms 655 35 s 100 ps TNITTTAL TNTERVAL gt 2ms 0 655 35 s 100 ps HOLD TIME 1 003 s 3 ms 1 1 003 1 030 3 m 1 30 m 1 2 1 030 1 300 30 m 1 300 m 1 3 1 300 4 00 300 m 1 3 1 4 4 31 3 1 30 1 5 31 301 30 1 300 1 Agilent 4155C 4156C 5 3 25 INITIAL INTERVAL 560 us 1 92 ms 2 ms 65 535 s NO OF SAMPLES 111 LOG10 276 LO0G25 551 LOG50 HOLD TIME 30 ms 655 35 5 0 655 35 s 100 us 100 us STOP CONDITION DISABLE DISABLE ENABLE 1 8 FIX FIX AUTO LIMITED Short Short Medium Long d b 3 26 41501A B SMU
175. 0 Y QSCV MEAS VOLTAGE x2 START sTOP 5 V 5 V 10 mV 10 mV HOLD TIME 0 0 5 ISTOP 4 10 pA 100 pA 80 1 nA 10 nA LEAK a Il QSCV b Agilent 4155C 4156C 5 7 43 NOTE QsCV
176. 5 7 33 MEDIUM MEDIUM Medium 1 PLC 50Hz 0 02 1 50 60Hz 0 0167 1 60 Table 7 22 SHORT SHORT na Short SHORT ADC 640 ps 80 us 1 92 ms 80 ns IN 960 ms 1 92 ms Table 7 23 Table 7 21 LONG ADC 100 PLC 10 pA 100 PLC HRSMU 100 pA x 10 HRSMU 1 nA x 5 HRSMU MPSMU HPSMU 10nA 100 mA 1A HPSMU Table 7 22 MEDIUM
177. 2 MARKER CURSOR 3 SCALING CENTER AT CURSOR CENTER AT CURSOR DISPLAY SETUP 6 18 Agilent 4155C 4156C 5 CURSOR TO MARKER 2 2 1 LINE LINE SELECT LINE SELECT 1 2 NONE 1 2 2 GRAD MODE TANGENT MODE REGRESS MODE
178. 3 Delay Time setin TIMING table on MEASURE SWEEP SETUP page 4155 1 4156 a 12 T2 Trigger Output ree Output External Instrument Tex Tex ess EE ee EE st UGD04016 12Ommwx60mmh T2 step delay time set In STEP DELAY field on MEASURE OUTPUT SEQUENCE page Tex measurement time for external instument T2 STEP DELAY 4155C 4156C Agilent 4155C 4156C 5 8 43 PGU PGU Agilent 41501A B 41501A B Ext Pulse Generator Trig Out PGU TTL PGU1
179. 6 Maximum 6 characters alphabet ugdor001 120 40 Agilent 4155C 4156C 5 8 3 Table 8 1
180. 60us 65 535 s NO OF SAMPLES 10001 NO OF SAMPrES lt 10001 TOTAL SAMP TIME TOTAL SAMP TIME INITIAL INTERVAL lt 480 us AUTO INITIAL INTERVAL gt 480 us INITIAL INTERVAL X NO OF SAMPLES 1 s 1x10 s NO rrMrT AUTO 3 14 Agilent 4155C 4156C 5 NO LIMIT TOTAL SAMP TIME AUTO
181. 7 TRAILING TIME 8 IMPEDANCE PGU LOW 0 Q 50 ohm 50 Q UNIT NAME STRESS CHANNEL DEFI ITION Agilent 4155C 4156C 5 IT Peak Value PGU1 Base Value Te PGU2 UGTO1048 85x40 i Delay Time stress start ac STRESS STRESS SETUP 94JANO1 01 30PM XSTRESS MODE xPULSE DURATION UNIT PGU1 PGU2 1 0ms NAME PERIOD MS to XACCUMULATED STRESS WIDTH 5 00ms 5 0Oms 0 0000S DELAY TIME 0 00000 S10 00000 S PEAK VALUE i100mv 100mV HOLD TIME BASE VALUE
182. DUT 4 5 40 V 40 V DUT DUT 3 J
183. USER NEXT VAR PAGE UGO1035JQQ 8 20 Agilent 4155C 4156C 5 A R R SMU 1 MO 16441A R Box SMU DUT Agilent 4155C 4156C 5 8 21 Figure 8 5 SMU PG SMU PG Agilent 16440A PGU SMU STRESS CHANNEL DEFINITION SMU PG SELECTOR Stress PGU singae SMU 2
184. 2 STRESS NAME Vce STRESS FCTN SYNC 1 i P NSYNC P 5 7 1 5 PGU PGUI PGU2 ac MODE VPULSE FCTN Agilent 4155C 4156C 5 5 13
185. 4 CHANNELS Figure 1 7 MARKER CURSOR Edit Backspace VNAME VS Enter VS Enter INAME 1S Enter TS gnter MODE YV V Shift F1 FCTN VAR1 VARI Shift r4
186. teg Time Long Medium Short INTEG TIME Lrong Medqium Short ADC LONG MEDIUM 2 P 10 nA FLEX ADC 2 4 EX 0 27 16 60 ADC ADC E 2 AZ E LONG Long 16 PLC 50Hz 0 32 16 50 60Hz LC 100 PLC 1 PLC Table 7 21 Agilent 4155C 4156C
187. 5 8 15 Phebe oa R R 4155 16442 To R Box trlaxlal caBle 16G441A Input triaxial cable SD be UGDO4023 120 mma5Omm R 0 ohm 4156 16442 To R Box triaxial cable 16441A Kelvin triaxial cable UGDO4022 120mmtSOmm control cable 8 16 Agilent 4155C 4156C 5 NOTE NOTE gt CHANNELS CHANNEL DEFINITION SERIES RESISTANCE R R SMU SMU SMU1 R CH1 SMU2 R CH2 HPSMU SMU5 R CH2 HPSMU R SMU
188. SWEEP MODE SINcLE Shift F1 SINGLE LIN LOG LINEAR Shift F1 LINEAR STOP 2 Enter 2 gnter 2 000 V STEP 1 0 m Enter 10m msnter 10 00 mV Agilent 4155C 4156C 5 VAR1 output RATIO x VAR1 output 0 V 2 V 10 mV 100 mA 3 VAR1 OFFSET 0 Enter 0 gnter 0 000 V RATIO 1 Enter
189. 2 Socket Moduls 3 DUT 4 4 SMU1 SMU2 SMU3 SMU1 5 Agilent 4155C 4156C 5 1 33 4156C Substrate SMU 200V 1A Mad DUT 3 sekctabie EGO Ro ee Free sas Conmectioml 9 wtGJ GUarc Guard Ec Cable Gate Tf Drain Ls 0 Source Vy tzov we4 Han es VA E20V A TO PFACKAGE ZF Hg Voltage A 6 ee 4155C Sunbstrate DUT SMU 209y 1A Ma 1 2 3
190. INITIAL INTI 560 ps 65 535 s ERVAL 560 us 65 535 s 2 NO OF SAMP ES 11 Mopg MODE LOG10 111 LOG25 276 LOGS0 551 Agilent 4155C 4156C 5 HOLD TIME 1 Horp TIME 0 1 GTIME 0 8
191. VCE VCE DISPLAY ANALYSTS SETUP 93JUL22 11 32AM LTNE1 REGRESSIQN 11ne on Y1 between a point AT LINEz 1 2 MARKE At i th OM AFTER VCE J ILMAXEWGE Tnterpo1ate QFF 3 4 5 MAX VCE PREV NEXT PAGE PA DISPLAY AH SETUP UGTO2020 6 34 Agilent 4155C 4156C 5 2 2 1 2 0 ON Graph List LINE SELECT LINE ON AN Display 4 DISPLAY ANALYSIS SETUP line on Y1 Y2 2 NORMAL
192. stop Y AXIS ASSIGN singe 2 CHANNELS MEASURE STOP CONT STOP CONT FCTN VAR1 CONST VARI VAR1 VAR2 MODE VPULSE IPULSE
193. OFF zo Mi w DISPLAY SETUP DATA VAR DATA VAR ON OFF CURSOR TO MARKER Agilent 4155C 4156C 5 6 21 a GRAPH LIST GRAPHICS SHORT 93Aug09 06 18PM KA CURSOR CURSOR 3 572000V 2g9 23u4 TG MARKER mA 2 00 1ntr bt 2 421 Grad S41 61u 200J div TANGENT MODE OFF REGRESS f MGDE OFF Inkrept 2 B8976 0 00 0 000 ww Y 1 00 div 10 00 MARKER SCALING DISPLAY sWEEP TiminG consT CURSOR SETUP SETUP SETUP SETUP GT OO 6 22 Agilent 4155C 4156C 5
194. pot nterpolate ON ON ON 2 LINE1 LINE2 DISABLE T 1 DGM 1 DGM DGM 3 0 4 Oo DISPLAY ANALYgTS 93JUL22 11 32AM LINEE TANGENT line on Y1 at a point where peM MAX DGM 0 01 AFTER DGM EMAXEDGMY 5 6 7 xLINEZ XxMARKER At a point where xInterpolate OFF MAX DGM DISPLAY A PREV NEXT SETUP PAGE PAGE LUGTO2n7 6 40 Agilent 4155C
195. SCALE TO OVERLAY Agilent 4155C 4156C 5 6 11 1 2 E DISPLAY ANALYSIS SETUP AUTO ANALYSIS 6 12 Agilent 4155C 4156C 5
196. 5 Table 7 10 HPSMU P 2 FE 1 640 us 80 us PE 1 92 ms 560 Ls 2V 0 lt IVI lt 2 2 V 2nuV 20 LV 200 LV 2 mV 20 V 0 lt IVI lt 22 V 20 LV 200 LV 2 mV 20 mV 40 V 0 lt IVI lt 44 V 40 LV 400 nV 4 mV 40 mV 100 V 0 SIVIS110 V 100 LV 1 mV 10 mV 100 mV 200 V 0 lt IVIS200 V 200 LV 2 mV 20 mV 200 mV a PRIE b 80 us 560 ps c 480 us Table 7 11 HPSMU 1nA 0 lt 1nA 100 fA 200 V 10 nA 0 lt lt 10nA lpA 200 V 100 nA 0
197. 200 pF 4 Agilent 4155C 4156C 5 a V 03 s 4 37 Quasi static C V Figure 4 10 HRSMU 10 Reading Accuracy 0 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Offset Accuracy P 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 00 1 nA 20 V 2 1 0 5 0 2 0 1 05 03 s UT 10 T ohm 200 pF 4 38 Agilent 4155C 4156C 5 Figure 4 11 Quasi static C HRSMU 12 10 8
198. DISPLAY DISPLAY SETUP 1 pisplay 2 DISPLAY MODE 3 X Y1 Y21 Figure 1 10 1 DISPLAY DISPLAY SETUP GRAPHIC NAME VG VG Shift F3 SCALE LINEAR IN LINEBAR 0 Enter Shift F1 0 gmnter 0 00000 V AX 2 Enter 2
199. Enter SQRT ID Enter NAME DSQID 2 Enter DSQID Enter DEFINITION ZDIFF SQID VGC 5 7 7 blue key blue key 2 blue key VG gnter DIFF SQID VG Enter DISABLE FUNCTION Shift F7 a Y SQRT b 2 DIFF CHA Agilent 4155C 4156C 5 NELS USER FUNCTION DEFINITION 1 37 SH
200. o a E lan aa oo En a oo as BBHB BEBEB DUT 10 P 3 29 R Box 8 P 3 31 P 3 33 PGU 3 34
201. Agilent 4155C 4156C 5 Agilent 4155C 4156C 6 2 Agilent 4155C 4156C 5 4155C 4156C GRAPHICS LIST Agilent 4155C 4156C 5 6 3 GRAPHICS
202. 5 4 15 Quasi static C V A DISPLAY DISPLAY SETUP 6 pispamy DISPLAY MODE LIST LIST NAME NAME CHANNEL DEFINITION QSCV MEASURE SETUP NAME USER FUNCTION USER VARIABLE DATA VARTABLES 2 DATA D
203. EVENT Th EVENT Va1 gt Th NAME THRESHOLD Va1 lt Th NAME THRESHOLD lvall gt ITh NAME THRESHOLD lvall lt ITh NAME THRESHOLD EVENT NO EgvgNr 4 1 200 LT 3 10 Agilent 4155C 4156C 5 MEASURE OUTPUT SEQUENCE OUTPUT SEOUENCE ODE OF SAMPLING 2 STMULTANEOUS
204. 1 8 1 SHORT MEDIUM 80 us LONG a b MEASURE OUTPUT SEQUENCE 2 4 Agilent 4155C 4156C 5 LIN LO0G LIN SUN SWEEP SETUP LIN LOG LOG VAR1 SETUP VAR1 RANGE MEASURE SWEEP SETUP VAR1 STOP
205. Agilent 4155C 4156C 5 1 LED INSTALLATION IEC 825 1 Class 1 WARNING D gt B
206. ON 3 MARKER SKIP VAR2 MARKER OFF EE GRAPH LIST LIST SHORT 93AugO9 06 18PM VF IF v A DIRECT MARKER 10 00000m 4 150000p 2 90 000000 1 150000p MK 3 10 00000m 3 300000p 0 9 30 00000m 6 4 9 DIF 575 0000p A V SPREAD RE SWEEP TIMING coNsT SHEET SETUP SETUP SETUP SETUP UGTO2Q13 100x80 6 30 Agilent 4155C 4156C 5
207. 0 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 1 E 10 Offset Accuracy P BS 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V ul 10 nA 20 V 2 1 0 5 0 3 0 1 05 03 s DUT 1 G ohm 200 pF i 4 44 Agilent 4155C 4156C 5 Quasi static C V Figure 4 17 MPSMU HPSMU Reading Accuracy 0 001 0 01 0 1 1 QSCV Measurement Voltage V 1 E 08 1 E 09 1 E 10 1 E 11 Offset Accuracy F 1 E 12 1 E 13 1 E 14 0 001 0 01 0 1 1 QSCV Measurement Voltage V 1 nA 2 V 2 1
208. HOLD TIME 10s DELAY TTME 100 ms 0 655 35 s 10 ms 0 65 535 s 100 us MEASURE OSCV SETUP STNGLE VARTABLE VAR1 UNIT SMU1 HR NAME v1 SWEEP MoDpg sIncLE IE START 3 100 Vv STOP 3 100 Vv OSCV MEAS VOLTAGE STEP 100 0mV 80 0mV NO OF STEP 61 COMPLTANCE 100 00mA TTMTNG HOLD TIME 10 00 s DELAY TIME 100 0ms OSCV CONTTNUE AT ANY Status CONSTANT UNIT NAME a MODE SOURCE COMPLIANCE SINGLE Select SWEEP Mode with softkey or rotary knob B oscV MEASURE ouUTPUT PREV NEXT SETUP SETUP SEQ 5 PAGE PAGE Agilent 4155C 4156C 5 4 21 Quasi static C V 5 MEASURE QSCV MEAS SETUP 1 Meas MEASURE SETUP MEASURE QSCV MEAS SETUP 2 MEASUREMENT UNIT
209. NOTE Figure 4 2 Figure 4 4 VS Figure 4 2 10 pA 100 pA HRSMU 1 00E 07 1 00E 08 1 00E 09 Integration _ 100E 10 Ne amp 8 2 s 1 00E 11 3 8 10oE 12 1s 1 00E 13 500 ms 1 00E 14 300 ms 1 00E 15 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 4 26 Agilent 4155C 4156C 5 Quasi static C V
210. V 1 POWER COMP OFF 2 12 Agilent 4155C 4156C 5 X Y KNOB SWEEP 94JANO1 01 30PM X AXTS CURSOR 500 0000mV 5 000000mA OSG Y AXIS mA REGION 10 00 X AXIS DISPLAY NORMAL IF an Y AXIS 1 000 DISPLAY div NORMAL a 0000 0000 VF 1000 div V 1 000 Y AXIS SETUP TAY VAR1 VAR2 CONST ASSTGN CoPY Cd ISETUP ISETUP SETUP UGTO1034 100 70 stop 4155C 4156C
211. gt SMU VMU SMU R Box SMUx 6 VMUx 2 4 Agilent 4155C 4156C 5 oO gt 1 E 2 AUTO LIMITED BX gt ey
212. 00 mA SMU SMU Table 7 17 Table 7 20 POLARITY POLARITY
213. 7 5 6 TOTAL SAMP TIME Stops Sampling 3 6 No og SAMPLES P 3 9 Agilent 4155C 4156C 5 DISPLAY DISPLAY SETUP AME NAME GTIME
214. Agilent 4155C 4156C 5 5 11 DUT 10 HH Hh HHHHHHH nn nH oo HHHHH nnnHH HH nn Ol PH HP lt STPESS WEL CEFINITION JA 130N P 5 13 IS 8 ysus pe PuL Pee WPILSE el P 5 15 ac
215. MPSMU HPSMU Reading Accuracy 0 01 0 1 1 10 QSCV Measurement Voltage V 1 E 09 LE 10 Offset Accuracy F LE 11 1 E 12 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 1 nA 40 V 2 1 0 5 0 2 0 1 05 DUT 1 G ohm 200 pF Agilent 4155C 4156C 5 03 s 4 49 Quasi static C V Figure 4 22 MPSMU HPSMU 50 40 Reading Accuracy 0 001 0 01 0 1 10 QSCV Measurement Voltage V 1 E 09 1 E 10 Offset Accuracy F 1 E 11 1 E 12 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 1 nA 100 V 2 1 0 5 0 2 0 1 05
216. DATA VAR ON OFF MARKER SKIP VAR2 INTERPOLATE ON OFF ON 2 c Agilent 4155C 4156C 5 6 23 a GRAPH LIST GRAPHICS SHORT 3Aug09 QG 3Aug09 06 18PM CURSGR To MARKER
217. Me MEASURE SAMPLING SETUP 1 ass ENABLE DISABLE ENABLE DELAY ENABLE DISABLE NAME 1 THRESHOLD NAME EVENT NO EVENT EVENT
218. SMU STOP AT ANY ABNORM STOP AT COMPLIANCE DURATION DURATION 10 PULSE COUNT COUNT x PERIOD 10 Dy o SMU VSU 100 mA SMU VSU A D PeU 100 mA o 5 10 Agilent 4155C 4156C 5 Agilent 4155C 4156C de SMU VSU PGU dc SMU dc ac PGU ac ac
219. Synchronous Sweep VAR1 VAR1 Basic Sweep Subordinate Sweep Synchronous 6 Sweep UGD039 SOx90 VAR1 VAR2 VAR1I SMU VSU SMU Agilent 4155C 4156C 5 1 3 VAR1 1 SWEEP MODE
220. 1 lt cursors a et ee er cursor _ ly X GRAD VALUE Y X Agilent 4155C 4156C 5 T es 6 9 marker measurement curve UGD0008 90x60 CUFSOT 2 L_ cursor regression line UGDO7O10 SOx60 6 10 Agilent 4155C 4156C 5 AUTO SCALING
221. Agilent 4155C 4156C 5 1 15 cnan 35 CHANNELS CHANNEL DEFINITION MEASUREMENT MODE SWEEP VNAME Vce INAME Ic MODE V SMU VSU PGU VMU 1 SMU VPULSE
222. EX X Y 1 AT WHERE 8 4 5 gt Agilent 4155C 4156C 5 8 6 35 F 8 7
223. L2G1 LINE2 Y1 GL 2G1 X Y1 yi Yo 7 Xo X Y1 Qa 1 Yo og x1 og Xp X Y1 w og y log yo X Xo0 X Y1 Qa log Y og yo og x1 log Xo C LINE2 X0 Yo XX1 y1 i LINE2 2 2 X Y1 9 20 Agilent 4155C 4156C 5 L2G2 LINE2 Y2 L2G2 X Y2 Y Yo CX1 Xo X Y2 Qa y Yo og x1 og Xp X Y2 w log yi log yo X Xo0 X Y2 w log Y log yo og x1 log Xo C LINE2 X0 Yo XX1 gt Y 1 LINE2
224. P 5 18 dc P 5 20 5 22 5 HHHHHHH RS oo ooo oo 5 12 Agilent 4155C 4156C 5 Stress srress STRESS CHANNEL DEFINITION l1 STRESS MODE V dc SMU VSU PGU I dc SMU VPULSE ac PGU COMMON SMU GNDU
225. 77 4x Fregx EF reg 50 60 7 P 4 4 50 Hz 7 10 pA 0 1 V 0 5 pF zzzge 5 egs ro77gge Agilent 4155C 41 delay time cinteg 56C 5 4 7 Quasi static C V QSCV 3 FPP HH HHHHHHH 6 HHHH
226. Stop value Primary Sweep Source 9 Start value Stop value Secondary Sweep Source 9 Start value Step VaUe Sweep Start Completion Time UO300S Agilent 4155C 4156C 5 1 CHANNELS CHANNEL DEFINITION SMU VSU VAR1 SMU VSU VAR2 2 VAR1 3 MEASURE SWEEP SETUP VAR2 START STOP START STEP NO OF
227. HRSMU Quasi static C 10 Reading Accuracy 0 01 0 1 QSCV Measurement Voltage V 1E 10 Offset Accuracy F 1E 11 0 01 0 1 QSCV Measurement Vo tage V 1 nA 100 V ul DUT 1 G ohm 200 pF 2 1 0 5 0 3 0 1 05 3 V 03 8 Agilent 4155C 4156C 5 4 41 Quasi static C V Figure 4 14 HRSMU Reading Accuracy 2 0 0 001 0 01 0 1 1 QSCV Measurement Voltage V 1 E 09 Offset Accuracy F 1 E 14 0 001 0 01 0 1 1 QSCV Measurement Voltage V 10 nA 2 V 2 1 0 5 0 2 0 1 05 03 s DUT
228. Table 8 2 R SW1 SW2 SW3 SW4 09 ON 0 OFF OFF 10 kQ OFF OFF OFF 0 100 kQ OFF OFF ON OFF 1MQ OFF OFF OFF OFF 4155C 4156C 0 Q Agilent 4155C 4156C 5 Figure 8 4 R R 16441A4 H Box Input guard CH1 Sense GC Mo Sense SW1 From SMU DD CH 1 6 2 Qutput To DUT SW2 Force 1 MG2 O Force 100 ks2 o SW3 10 kQ ss SW4 Input circult common Sense C 9 9 Sense SWT From SMU DYCH2 i outputD To DUT SW2 Force Oj 1M Force 100 kG lt SW3 19 kQ eo W4 Control 9 From 4155 74156 DT Control Logic UGDO4020 Agilent 4155C 4156C 5 8 19 Ne he
229. single KNOB SWEEP stop PAGE CONTROL KNOB SWEEP CURSOR X Y X X VAR1 X VAR1 SETUP VAR1 RANGE Y Y Y AXIS ASSIGN Y KNOB SWEEP 2 8 Agilent 4155C 4156C
230. 0 V 2 0 V Agilent 4155C 4156C 5 7 49 Figure 7 13 Rigure 7 13 SMU1 4 VSU1 2 disabled SMU4 VSU2 8 State Measurement State ldle State la Eo SMU4 disabled VSU2 disabled SMU1 COMMON SMU2 CONST SMU3 VAR1 VSU1 CONST an output order an order that channels return to 0 V output switch IS off eeesee channelis common channel outputs a specified source Value UGDO4010 7 50 Agilent 4155C 4156C 5 SIMULTANEOUS rr a Es 0UTPUT
231. 4155C 4156C dc Agi lt ent 41501A B dc ac A PGU ac dc dc ac SMU EX VSU PGU SMU COMMON STRESS CHANNEL DEFINITION RY DEFI ITION 1 4 CHANNELS CHAN PGU1 PGU2
232. CONTROL ON 4155C 4156C E5250A ON E5250A SETUP CHANNELS E5250A CONNECTION SETUP E5250A MAT OFF OFF 8 28 Agilent 4155C 4156C 5 NOTE Step 3 Step 4 Step 5 E5250A CONFIG MODE RESET E5250A E5250A CONFIG MODE
233. 06 LINEn LINE1 LINE2 IY2 LINE1 LINE2 Y2 6TY2 y2 Oi X y2 V1 0m 06 2 Y2 10 ya LINEn Y2 04 LINEn LINE1 LINE2 9 14 Agilent 4155C 4156C 5 L1C0 LINE1 L1CO LINE1 REGRESSION L1G LINE1 eL1G Y1 Y2 X Y 1 Yo 7 Ki X0 X
234. 1 Figure 5 1 Agilent 4155C 4156C 5 5 7 NOTE PGU DURATION DURATION stopp AC Stress Force 1 Peak Value Base Value Stress Start Stress Stop 4155C 4156C 0 V PGU VPULSE ECTN SYNC
235. AUTO ANALYSIS 2 NOTE Single Append Stop GRAPH LIST MARKER CURSOR AUTO ANALYSIS OD TI 1 LINE1 2 LINE2 3 6 32 Agilent 4155C 4156C 5
236. DIRECT MARKER CURSOR li NII MARKER SKIP Agilent 4155C 4156C 5 6 7 Figure 6 3 GRAPH LIST GRAPHICS SHORT GRAPH LIST GRAPHICS 93Aug09 06 18PM rm CURSOR 751 2539mV 10 02uA 10 02uA OFF A MARKER 1 00 1 00 MIN MAX 1NTER POLATE 5 CFE a DIRECT MARKER CURSOR decods decods idiv 7div MARKER SKIP AUTO ANALY SIS
237. REGRESSION 1 line on Y1I Y2 2 3 between a point and apoint BY X Y COORDINATE X Y AT X X Y Y BY DATA CONDITION WHERE 8 4
238. Table 8 4 NOTE INPUT INPUT E5250A 4 8 32 Agilent 4155C 4156C 5 Step 1 Step 2 E5250A CONNECTION SETUP PE5250A SETUP 4155C 4156C E5250A CHANNETLS E5250A CONNECTTON SETUP 01JAN20 04 13PM ARRAY SETUP DTSPLAY MODE MATRTX CONNECTTON STATUS AI INPUT PORT 111 111111122222 222223333333 333444444444 a 345678901234 567890123456 789012345678 SM E 3 88
239. 5 CHANNELS USER FUNCTION DEFINITION 6 NAME 6 UNIT 6 DEFINITION P 8 7 FET
240. gt Figure 4 3 1 nA HRSMU MPSMU HPSMU 1 00E 05 1 00E 06 J TN Nl amp 1 00E 08 8 TA J Integration 8 NN NN NN Time 100E 09 HH 00E J 2s 1s 1 00E 10 ed k 4 300 ms NJ AI Ny 300 ms 100 ms 1 00E 11 Te T 30 ms sl 30 ms 1 00E 12 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Figure 4 4 10 nA HRSMU MPSMU HPSMU 1 00E 04 1 00E 05 el 1 00E 06 TN RH EE 4 1 00E 07 8 TTAI 1 Integration 8 TT nN TN Time 8 8 1 00E 08 i im HH O 4 TN T Nl ll NR 2s mw N 1s 1 00E 09 500 ms TTA WT 300 ms 100E10 lm 100 ms NT 50 ms 30 ms 1 00E 11 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Agilent 4155C 4156C 5 4 27 NOTE Quasi static C V
241. 10 T ohm 200 pF 4 42 Agilent 4155C 4156C 5 Figure 4 15 Quasi static C HRSMU 10 Reading Accuracy 0 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 1 E 10 1 E 11 Offset Accuracy P 1 E 12 0 00 0 01 0 10 00 0 00 QSCV Measurement Voltage V 10 nA 20 Y 2 1 0 5 0 3 0 1 05 T 10 G ohm 200 pF DW TE c Agilent 4155C 4156C 5 a V 03 s 4 43 Quasi static C V Figure 4 16 HRSMU 10 Reading Accuracy
242. Agilent 4155C 4156C 5 8 33 Step 3 Step 4 PF be a ARRAY INPUT1 INPUT4 INPUT5 INPUT10 TINPUT5 INPUT7 INPUT9 1 TINPUT6 INPUT8 INPUT10 1 0 th INPUT7 VSU1 ENABLE PORT TINPUT5 SMU5 INPUT9 VMU1 INPUT7 p 8 33 INPUT1 INPUT5 INPUT8 INPUT6 7 9 10 LIST
243. GHAPHLIST GRAPHICS SHOHT 93AugO9 06 18PM MARKER 3 572000V 289 23uA SM 590 1uS mA 14 2 00 BINDEX 200u div 0 00 MORE 0 000 wD Vv 1 00 div 10 00 0 9M EXIT CANCEL UGT02009 6 28 Agilent 4155C 4156C 5 SHOW OVERLAY INFO SCALE TO OVERLAY 1 DISPLAY SETUP 2 OVERLAY PLANE 1 2 3 4 OFF EH 1 OFF 4 1 2 3 4 EXIT X Y1 Y2
244. RR Y1 4 R dl dl Agilent 4155C 4156C 5 X Y1 Y2 P 6 9
245. 3 SCALING 4 Z00M IN 2 1 2 Z00M OUT 1 2 2 Z00M IN Z00M OUT DISPLAY SETUP Agilent 4155C 4156C 5 6 17 CANCEL SCALING 1 MARKER CURSOR CURSOR
246. Agilent 4155C 4156C 5 DUT 2 2 Agilent 4155C 4156C 5 4155C 4156C si
247. gmnter 2 00000 V AME SQID MORE 1 2 SQID Shift F7 Shift F3 IN 0 Enter 0 gmnter 0 00000 A AX 1 0 0 m Enter 100m Enter 100 000mA AME MORE 1 2 DSQID Shift F7 Shift F4 DSQID Agilent 4155C 4156C 5 1 41 Figure 1 10 DISPLAY SETUP DISPLAY DTSPTLAY SETUP 01JAN29 10 58AM GRAPH ICS DISPLAY MODE GRAPHTCS LIST GRAPHTCS Xaxis Ylaxis Y2axis NAME VD S0TD DSQID SCALE LINEAR LINEAR LINEAR MIN 0 000000000 Vv 0 0000000000 0 0000000000 MAX 2 0000000 V 100 00000000m 100 00000000m GRTD LTNE PARAMETER ON oN DATA VARIABLES DATA DISPLAY RESOLUTION NORMAL GRAPHICS Select
248. 0 V 0 A MEASURE OUTPUT SEQ UENCE 7 4155C 4156C oO 0 ac dc ac dc H ac
249. HRSMU 2V 20 V 40 V 100 V 10 pA 100pA Ap 4 0 4 0 4 0 4 0 Bp 0 0025 0 018 0 035 0 088 Cp 0 0023 0 0052 0 008 0 019 Dp 0 0009 0 002 0 003 0 0076 Ao 0 07 Bo 3 7E 15 Boc 2 6E 18 Co 3 1E 15 Coc 6 6E 18 Do 7 2E 16 Doc 2 6E 18 1 nA Ap 0 51 0 51 0 52 0 52 Bp 0 0057 0 024 0 047 0 11 Cp 0 003 0 0048 0 0088 0 018 Dp 0 0041 0 008 0 015 0 027 Ao 0 041 Bo 7 0E 15 Boc 8 7E 18 Co 3 0E 14 Coc 6 0E 18 Do 4 0E 15 Doc 8 7E 18 Agilent 4155C 4156C 5 4 29 Quasi static C V 2V 20 V 40 V 100 V 10 nA Ap 0 51 0 51 0 52 0 52 Bp 0 036 0 024 0 047 0 11 Cp 0 003 0 0048 0 0088 0 018 Dp 0 0041 0 008 0 015 0 027 Ao 0 041 Bo 7 3E 15 Boc 8 7E 18 Co 6 0E 14 Coc 6 0E 18 Do 4 3E 15 Doc 8 7E 18 4 30 Agilent 4155C 4156C 5 MPSMU HPSMU Quasi static C V a 200 V HPSMU 2 V 20 V 40 V 100 V 200 V 1 nA Ap 0 521 0 52 0 52 0 53 0 54 Bp 0 00398 0 027 0 047 0 12 0 23 Cp 0
250. MODE VPULSE MEASURE PGU SETUP 1 2 10 Agilent 4155C 4156C 5 Chan CHANNELS CHANNEL DEFINITION MEASUREMENT MODE SWEEP 2 VNAME INAME 6 Vce 3 MODE V SMU VSU PGU VMU I SMU VPULSE PGU IPULSE
251. 5 CANCEL SCALING CANCEL SCALING 1 AXIS Y1 Y2 2 SCALING AUTO SCALING DISPLAY SETUP 1 MARKER CURSOR CURSOR 2 MARKER CURSOR
252. L1Y2 LINE1 X 9 18 Agilent 4155C 4156C 5 L2C0 LINE2 L2CO LINE2 REGRESSION 6 ll L2G LINE2 6L2G Y1 Y2 X Y 1 Yo 7 Ki X0 X Y Qa 1 Yo og x1 og Xp X Y w log ylog yo X Xo0 X Y w log Y log yo og x1 log Xo Y LINE2 xo 7OX171 LINE2 2 8 Agilent 4155C 4156C 5 9 19
253. Reading Accuracy 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 1 E 09 1 E 10 Offset Accuracy F 1 E 11 1 E 12 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 10 nA 20 V 2 1 0 5 0 2 0 1 05 03 s DUT 1 G ohm 200 pF 4 54 Agilent 4155C 4156C 5 Agilent 4155C 4156C 5 4155C 4156C 5gp7e Application Programs Guide Zoo Flash EEPROM Test
254. 6 AFTER 9 6 37 DISABLE 9 8 RO 8 10 Gradient Interpolate ON ON ON
255. Figure 1 8 USER FUNCTION DEFINIT1ON CHANNETLS USER FEUNCTTON DEETNTTTON 01JAN29 10 53AM USER FUNCTION NAME UNTT DEFTNTTTON SoTD SORT TD DSOTD DTIFF SOTD VG DELETE ROW SQID Enter User Function Name max 6 chars B CHANNEL USER USER E5250A PREV NEXT DEF FCTN VAR 3 PROP PAGE PAGE 4 2 SQID VId DSQID 9SQID 9Vg 9VId 2 Vg Id Vg 1 38 Agilent 4155C 4156C 5 5 MEASURE SWEEP SETUP 1 Meas MEASURE SWEEP SETUP 2 VARI Figure 1 9 MARKER CURSOR
256. NO OF SAMPLES TOTAL SAMP TIME AUTO stop GPIB Agilent 4155C 4156C 5 3 37 A DISPLAY DISPLAY SETUP pispay DISPLAY MODE GRAPHICS 2 Xaxis E 3 Y1axis Y1
257. ON Y OFF DISPLAY SETUP DATA VAR DATA VAR ON OFF CURSOR TO MARKER SELECT CURSOR GRAPHALIST GRAPHICS SHORT 93Aug09 06 18PM SR CURSOR 3 572000V 289 23JA MARKER 3 572000Y 289 23uA MARKER mA 2 00 Intr pt 1 421 Grad 4 61 GRAD MODE OFF 200u div TANGENT MODE OFF 8 Intrept 2 BS376 ET 0 000 w V 1 00 div 10 00 ED MARKER SCALING DISPLAY SwEEP TIMING CONST CURSOR SETUP SETUP SETUP SETUP UGTOQ2nn8
258. 5 1 2 EE GRAPH LIST GRAPH GRAPH LIST LIST c KNOB SWEEP Graph List SETUP COPY GRAPH LIST 1 2 CHANNELS USER FUNCTIO
259. 5 8 35 NOTE NOTE NOTE Step 6 PF be a LIST E5250A APPLY SETUP 1 6 1 6 1 12 1 12 E5250A Step 7 Step 8 Step 9 1 12 1 12 1 1 24 2 1 36 3 1 48 4
260. No og SAMPLES HOLD TIME 1 HoriD TIME 0 1 TIME 0 INITIAL TNTERVAL lt 2ms 30 ms 655 35 s 100 us INITIAL TNTERVAL gt 2ms 0 655 35 s 100 us Agilent 4155C 4156C 5 3 15 INITIAL INTERVAL 60 ps 480 ps S60 us 1 92 ms 2 ms 65 535 s NO OF SAMPLES 10001 TOTAL SAMP TIME AUTO AUTO NO LIMIT HOLD TIME 30 ms 655 35 s 100 us 0 655 35 s 100 us STOP C
261. 2 NMR DTISABLE 1 DGM 1 0 5 DGM DGM WB A 9 DISPLAY NINE scTUE 0 93JLL22 tsa LINERAD 1ine on Yi1 at a point WHERE DGM MAX DGM D 91 AFTER crient Ftg 6 LINE2 MARKER At a point where x Interpolate OFF 0 5 DISPLAY OFT9 PREV NEXT SETUP 8NEVSES PAGE PAGE UTNE 6 38 Agilent 4155C 4156C 5
262. DUT 4155C 4156C 0 V DUT stop Standby swanapy 10 2 Agilent 4155C 4156C 5 CAUTION CAUTION 1 Stop Standby seanabpy 2 DUT 16442A B 3
263. FCTN FCTN CONST CONSTANT SOURCE VAR1 VAR1 START STOP STEP VAR2 VAR2 START STEP N0 OF STEP VARI VAR1 START STOP STEP VAR1 OFFSET RATIO 1 Short FIX Agilent 4155C 4156C 5 1 13
264. INDEX 1 15 msec 20 msec 6 INDEX 1 2 3 TIME INDEX 1 10 msec 10 5x 1 1 0 msec TIME INDEX 2 30 msec 10 5x 2 1 3 msec Sampling Interval Hold Time Meas time QTIME at GTNDEX 1 GTIME at QINDEX 2 DISPLAY DISPLAY SETUP Ke X Y1 Y2 No GTIME eTIME
265. 1 2 1 A D 1 1 9 Agilent 4155C 4156C 5 4 13 Quasi static C V QSCYV Meas MEAS SETUP MEASURE QSCV MEASURE SETUP UNIT FCTN QSCV FCTN VAR1 CONST RANGE
266. 2 1 02 04 SS x X 10 yp LINEn Y 0 LINEn LINE1 LINE2 IY LINE1 LINE2 Y GIY Y1 Y2 0q X V2 V1 0 05 a CR y Y 107 3 LINEn Y 0 LINEn LINE1 LINE2 Agilent 4155C 4156C 5 9 13 IY1 LINE1 LINE2 Y1 6 TY1 1 O X 2 Y1 1 0 yi Y1 10 yp LINEn Y1
267. STEP STEP NO OF STEP 1 128 COMPLIANCE SMU SMUU POWER COMP SMU SMU 1 8 Agilent 4155C 4156C 5 gt IT VAR1 VAR1 OFFSET RATIO x RATIO OFFSET RATIO OFFSET
268. numeric constant scientific constant data variable name bui1t in function read out function nd A 2 7 7 101 00 3 0 pw 108 0 mm 1033 k 105 ME 100 G 103 Figure 8 2 q k e q 1 602177 xX 10 9 k 1 380658 Xx 10 2 e 8 854188 Xx 1012 4155C 4156C
269. 2 Agilent 4155C 4156C 5 4 11 Quasi static C V Meas MEASURE QSCV SETUP 1 CONSTANT SOURCE T COMPLIANCE SMU UNIT NAME MODE CHANNELS CHANNEL DEFINITION PGU PGU QSCV Meas PGU SETUP MEASURE PGU SETUP PGU SETUP CHANNELS CHANNEL DEFINITION
270. Agilent 4155C 4156C 5 Figure 7 1 HI gt Agilent 4155C 4156C Agilent 41501A B GNDU SMU VSU Nl VMU PGU GNDU GNDU 0 V 1 6 A HPSMU SMU Figure 7 1 GNDU Agilent 41501A7B GNDU 2 GNDU NFORC Output Switch 0 V V COMMON UGFO
271. COMMON SMU GNDU DVOLT VMU 4 FCTN CONST SMU VSU PGU VAR1 SMU VSU VAR2 SMU VSU VAR1 Mm 1 F DELETE ROW DELETE ROW Agilent 4155C 4156C 5 2 11 1 single KNOB SWEEP Y
272. Inc er 5 Agilent Technologies Agilent 4155SC 4156C 41501B IBC 1010 1 CATEGORY II INSTALLATION CATEGORY I POLLUTION DEGREE 2 Agilent 415SC 4156C 41501B INDOOR USE Agilent 415SC 4156C 41501B Safety Class 1 AC mmternational Electrotechnical Commission IEC NN
273. MARKER MARKER ON OFF ON Y1 Y2 Y1 oc Y2 MARKER 1 300 V 33 721506491m 74 098415671m X Y1 Y2 2 MARKER MIN MAX MARKER SKIP VAR2
274. ON ZERO CANCEL OFF A a 3 single Repeat Appenq GRAPH LIST OFF ZERO CANCEL ON OFF 0 OFF ZERO CANCEL OFF ON ZERO CANCEL OFF ON CANCEL ZERO OFF 1 nA
275. 0 655 35 0s 0 65 535 s 100 us Agilent 4155C 4156C 5 Figure 1 3 VAR1 VAR2
276. 2 system 3 CALIB DIAG SYSTEM SELF CALIBRATION DIAGNOSTICS 4 CALIB ALL 4155C 4156C 30 1 E 1 AUTO CALIB 2 ON Mn E
277. 50 Q 2V 1 V PGU Table 7 14 PGU 2 20 V 0 lt IVI lt 20 V 0 lt IVI Ss 20 V 4mV 100 mA 40 V 0 SIVIS 40 V 0 SIVI S 40 V SmV 100 mA p p 40 V b 1 ms 50 100 mA 200 mA PGU PGU 100 mA 7 20 Agilent 4155C 4156C 5 Table 7 15 PGU 2 PGU PGU
278. E5250A E5250A MAT 4155C 4156C SYSTEM CONTROLLER E5250A ON Save Get TYPE MAT Agilent 4155C 4156C 5 8 37 al 4155C 4156C 41S5 41S6
279. Stress 2 CHANNEL DEF 3 SMU PG SELECTOR MEASURE SMU SMU PGU PGU OPEN PGU OPE PGU 4 SMU PG SELECTOR STRESS SMU SMU PGU PGU OPEN PGU OPEN 3 PGU gt i 0 N 1 2 DUT NL lt b SMU PGU S
280. 2 STANDBY ON Standby Standby FCTN VAR1 VAR1 START VARI RATIO x START OFFSET VAR2 VAR2 START CONSTANT CONSTANT SOURCE single Repeat Append stress 8 14 Agilent 4155C 4156C 5 R R Agilent 16441A R SMU R DUT 4155C 4156C R
281. 5 4 3 NOTE Quasi static C V QSCV MS A 2 QSCV Figure 4 1 start V 1 Va hold time Vg cvoltage 1 2 e
282. A B C D A lt B C A gt B D COND A B C D A B COND ID VG SORT TD VG VD VGS VTH DELTA DELTA A On 2 aj n 1 8n Gani an 2 1 lt n lt N 6n aN aN n N 2 On n n n Ni 1 a DELTA ID Agilent 4155C 4156C 5 9 5 DIFF A B DIFF A B
283. CHANNELS CHANNEL DEFINITIO Meas MEASURE SWEEP SETUP 1 CONSTANT SOURCE 2 1 CONSTANT ka SMU COMPLIANCE UNIT NAME MODE CHANNELS CHANNEL DEFINITION PGU MEASURE PGU SETUP PGU P 1 24 Agilent 4155C 4156C 5 1 21 SMU CHANNELS CHANNEL DEFINITION VPULSE IPULSE SMU FCTN
284. FCTN VAR1 VAR1 Shiftt F2 DISABLE UNIT smimc r7 Agilent 4155C 4156C 5 1 35 SH Figure 1 7 CHANNEL DEFINITION CHANNELS CHANNET DEFINITION 01JAN29 10 57AM SWEEP MEASUREMENT MODE SWEEP SAM PLING CHANNELS MEASURE STBY SERIES UNIT VNAME INAME MODE FCTN RESISTANCE OSCV SMU1 HR VS TS COMMON CONST 0 ohm SMU2 HR VG 8 V VAR1 SMU3 HR VD TD V VAR1 SMU4 HR DEFAULT MEASURE SMU5 HP 0 ohm SETUPE VSU1 VS02 MEM1 M VMU1 DTSCHARGE B Tr YN ON VCE IC PGU1 EFS MEM2 M GNDU Sa VDS TD MORE SWEEP 2 Select Measurement Mode with sofFtkey or rotary knob B CHANNEL USER USER E5250A NEXT DEF FCTN VAR S PROP PAGE 1 36 Agilent 4155C 41
285. INPUT1 INPUT4 TINPUT5 INPUT10 TINPUT5 INPUT7 INPUT9 1 TINPUT6 INPUT8 INPUT10 1 INPUT5 INPUT6 SMU5 SMU6 a NR CHANNELS E5250A PROPERTIES E5250A INPUT NN 0 TNPUT OUTPUT PORT NO PORT SMU1 1 SMU2 2 SMU3 3 SMU4 SMUS5 can be replaced with input 7 or 9 SMU6 4 48 can be replaced with input 8 or 10 8 34 Agilent 4155C 4156C 5 NOTE NOTE NOTE Step 5 ARRAY
286. LEAK COMPENSATION MEASURE QSCV MEASURE SETUP Agilent 4155C 4156C 5 4 5 Quasi static C V MEASURE QS sweep mode start stop step compliance V SETUP SINGLE DOUBLE start stop step 7 VAR1 2 NO OF STEP 1 1001
287. RESOLUTION NORMAL ADC EXTEND 10 pA NORMAL 1 fA EXTEND 10 aA 3 38 Agilent 4155C 4156C 5 A DISPLAY DISPLAY SETUP i fk DISPLAY MODE LIST 21 LIST NAME NAME NAME C HANNELS CHANNEL DEFINITION USER FUNCTION USER VARIABLE DATA VARTABLES
288. VCE 10 VCE VCE 3 DISPLAY ANALYSIS er 93JUL22 11 32AM X O oie A and a goint VCE AFTER IO ERE 10 NE EN line on Y1 between a point AT VCE A INE2 6 xMARKER At a point where Interpolate OFF MAX VCE DISPLAY SETUP PREV PAGE NEXT PAGE UGTO20 Agilent 4155C 4156C 5 6 43 6 44 Agilent 4155C 4156C 5 7 Agilent 4155C 4156C 5 Agilent 4155C 4156C SMU QSCV
289. x 8 HPSMU 200 V 1uA HRSMU MPSMU HPSMU 100 V x 2 HPSMU 200 V 10uA HRSMU 2 V x 2 HRSMU 20 V MPSMU HPSMU 20 V x 2 MPSMU HPSMU 40 V x 3 MPSMU HPSMU 100 V x 6 HPSMU 200 V 100 nA HRSMU MPSMU HPSMU 100 mA 1A HPSMU a Agilent 4155C 4156C 5 7 35
290. 2 X Y2 Agilent 4155C 4156C 5 9 21 L2X LINE2 X Y 0 X QL2X LINE2 X L2Y LINE2 Y X 0 Y GL2Y Y1 Y2 LINE2 X L2Y1 LINE2 Y1 X 0 Y1 GL 2Y1 LINE2 X L2Y2 LINE2 Y2 Xx 0 Y2 GL2Y2 LINE2 X 9 22 Agilent 4155C 4156C 5 MI GMT GRAPHICS LIST GRAPHICS
291. APPLY OPEN ALL E5250A Step 9 CONN SEBQ BBM Break Before Make MBBR Make Before Break NSEQ No Sequence Agilent 4155C 4156C 5 8 31 PF be a Step 10 E5250A E5250A INPUT CONNECTION E5250A CONNECTION SETUP
292. DEFINITION DISPLAY DISPLAY SETUP DATA VARIABLES GRAPH LIST GRAPHICS DISPLAY SETUP DATA VAR 0 GRAPH LIST Agilent 4155C 4156C 5 2 9 mu N 1 CHANNELS CHANNEL DEFINITION 2 single NOTE 2 9 PeU
293. SS 2 AA OASISOSO SO 2 7 3 GNDU 7 3 SMU EER a 7 4 VSU 7 17 VMU 2 7 18 RS CR sks wo er 7 20 AN UL ne 7 23 MM 5 2 7 23 2 Do a ES RS RS a 7 27 Agilent 4155C 4156C 5 5 7 29 hs 7 30 7 31 7 32 2220 NN DD 7 32 JAy 60 0 5 2 0 0 7 33 so 7 33 7 36 7 36 SMU 7 37 7 38
294. gm NAME UNIT DEFINITION gm S DELTA Td DELTA Vg Agilent 4155C 4156C 5 8 5 IBASIC CHANNELS USER VARIABLE DEFINITION DATA TRAC DEF
295. h 3 Agilent 4155C 4156C 5 10 3 4156C HRSMU 41501A B HPSMU SMU 200V 1A Max 1 2 3 Selected 7 Force A SensetOU Foree Sense Q 1 Guard 1 GuardO GuardO IGuard 1 1 1 NZ a Drain N N Gate Substrate Source 0 4 SS 2 DUT 10 4 Agilent 4155C 4156C 5 WARNING CAUTION
296. kr 4 EX E Agilent 4155C 4156C 5 E 2mV E 7 19 Figure 7 8 Table 7 14 ew ep ra PGU PGU 41501A B 402 412 422 2 PGU dc Re PGU Figure 7 8 50 Q 0 MR Ko PGU Output Impedance 50 ohm PGU QD WW orr Cutput Switch oo COMMON Output Impedance Low UGD02008 118x50 RM UMS II NN 50 Q 50 Q
297. ADC 10 pA 50 PLC HRSMU 100 pA 10 PLC HRSMU 1nA 5 PLC HRSMU 3 PLC MPSMU HPSMU 10nA 100 mA 1 PLC 1A 1 PLC HPSMU 7 34 Agilent 4155C 4156C 5 Table 7 23 SHORT 0 96 1 92 ms 10 pA 10 PLC HRSMU 100 pA 2 PLC HRSMU 1nA 1 PLC HRSMU MPSMU HPSMU 40 V x 2 MPSMU HPSMU 100 V x 4 HPSMU 200 V 10 nA x 4 HRSMU MPSMU HPSMU 100 nA x 2 HRSMU 20 V x 4 HRSMU 40 V MPSMU HPSMU 20 V x 2 MPSMU HPSMU 40 V x 4 MPSMU HPSMU 100 V
298. Agilent 4155C 4156C 5 Quasi static C V Quasi static C V 2 4155C 4156C 4 2 Agilent 4155C 4156C 5 Quasi static C V Quasi static CV QSCV QSCV VAR1 1 1
299. Pulse Width Fulse Period Delay Time 3 34 Agilent 4155C 4156C 5 PGU Meas PGU SETUP MEASURE PGU SETUP CONSTANT SOURCE pl UNIT NAME CHANNELS CHANNEL DEFINITION PULSE COUNT FREE RUN PGU 100 mA Agilent 4155C 4156C 5 3 35
300. SEQUENCE RNN MEASURE OUTPUT SEQUENCE OUTPUT SEQUENCE 1 SMU1 SMU2 SMU3 SMU4 VSU1 VSU2 PGU1 PGU2 CO 0 RY mm SS 0 V 1 0 V CHANNELS CHANNEL DEFINITION HH ho 1 EP 0 V CHANNELS DELETE ROW
301. SMU PGU SMU Figure 1 5 SMU Pulsed on Primary Source Unit VAR1 Pulsed on Synchronous Source Unit WAR a Frimary Synch Synchronpu Secondary Secondary Constant Constant Ps MM Pulsed on Secondary Source Unit WAR2 Pulsed on Constsnt Source Unt Primary Primary Synchr onous SynchFonQous ndary Secondary Constant Constant UM Figure 1 6 Agilent 4155C 4156C 5 1 11 Figure 1 6 SMU hotd 7 pulse period i Se wiath Step re of Pulse Sweep source
302. SYNC EL DEFINITION 1 E CHANNELS CHAN CHANNELS CHANNEL DEFINIT SMU STRESS CHANNEL OT NN TA NSYNC EL DEFINITIO ON Fee 9 1 SMU VSU PGU STBY ON 1 PGU gt E
303. a INITIAL INTERVAL x NO OF SAMPIiES 1 s 1x1011s b SMU VMU c SMU R Box SMU d 41501A B SMUx6 VMUx 2 e AUTO LIMITED f 2 6 3 20 Agilent 4155C 4156C 5
304. COUPLE PORT STATUS rk DV 0 Agilent 4155C 4156C 5 8 29 NOTE NOTE Step 6 Step 7 PF be a BIAS PORT E5250A 1 10 10 COUPLE PORT STATUS ON
305. E 4 E E Agilent 4155C 4156C 5 1 2001 1 2 2001 6 3 2001 12 4 2003 1 5 2003 8 Agilent Technologies Inc 2001 2003 All rights are reserved Reproducton adaptation or translation without prior written permission is prohibited except as allowed under the copyright laws 6 Agilent 4155C 4156C 5 Agilent 415SC 4156C Quasi s
306. Figure 3 4 NN Ho1d Time Samp1ing Tnterva1 Discard Data of first decade Data of second decade 1 J 1 W TE NO IE lt le 1 TIME Measurement 1 4 This is the examp1e 1 10 decade to plot LOG10 data V V Y Vy gt TrME First decade Second decade Agilent 4155C 4156C 5 3 21 TIME INITIAL INTERVAL GTrMg MODE N0 OF SAMPLES HOLD TIME MODE 1 LOG10 1 10 MODE LOG10 TNTTTAT TNT NO OF SAMP ERVAT
307. HRSMU 1nA 1 100 pA 1 10 pA 4 i VMU 0 2 V 1 a VMU2 20 V 7 40 Agilent 4155C 4156C 5 NOTE l MEASURE MEASURE SET UP MEASUREMENT RANGE Table 7 24 10 nA 1 nA o 10 nA 100 nA 10 nA 2 ZERO CANCEL
308. y 92 y 7 X2 1 n 1 yn nr ym G Km 1 lt n lt N y yN yNa XN KNa n N yn n yn n A xX n B N 1 VG ID DTEE DTEE ID VG VG EXP EXP A elD EXP ID 9 6 Agilent 4155C 4156C 5 INTEG A B TNTEG A B n 1 G 0 n gt 1 G 1 n GG 7 2 Gi n A i A i B A B
309. 0 R R 1 16441A R Box 4155C 4156C 16442A4 B 2 PAGE CONTROL chan 3 CHANNEL DEF CHANNELS CHANNEL DEFINITION 4 SERIES RESISTANCE o 0 ohm 0 Q 10 kohm 10 kO 100 kohm 100 kQ 1 Mohm 1 MO SMU1 SMU2 10 kQ CHANNELS CHANNEL DEFINITION 94JANO1 O01 30PM 0 ohm XMEASUREMENT MODE SWEEP XCHANNELS MEASURE STBY SERIES UNIT VNAME INAME MQOPE FCTN RESISTANGI 100k U1 MP vbe Ib I VARZ2 OR Oi otim U2IiMP es To V VAR1 10k oh U3 MP COMMON CONST 1M ohm 9 SS 0 CC DU
310. 1 gnter 1 000 77 1 OFFSET 0 VAR1 OFFSET 1 39 Figure 1 9 SWEEP SETUP MEASURE SWEEP SETUP 01JAN29 10 58AM SINGLE VARIABLE VAR1 VAR2 VAR1 UNTT SMU3 HR UNTT SMU2 HR NAME VD NAME VG SWEEP MODE SINGLE OFEFSET 0 0000 V JMB LIN LOG LINEAR RATIO 1 000 START 0 0000 V COMPLTANCE 100 00mA STOP 2 0000 V POWER COMPIOEF STEP 20 0mV NO OF STEPI101 COMPLTANCE 100 00mA POWER COMPIOFF TTMTNG HOLD TTME 0 0000 s DELAY TIME 0 0000 s SWEEP STOP AT ANY ABNORM Status CONSTANT UNTT NAME MODE SOURCE COMPTLTANCE STNGLE Select Sweep Mode with sofFtkey or rotary knoDb B SWEEP MEASURE OUTPUT PREV NEXT SETUP SETUP SEO 3 PAGE PAGE 1 40 Agilent 4155C 4156C 5 6
311. 3 572000V 289 23uA MAPKER mA 2 00 Intr pt 1 4 I Grad 541 861u GRAD MODE OFF 200u div REGRESS MODE OFF inkrcpt 2 B8975 9 00 MARKER 0 000 w tv 1 00 div 10 00 SKIR MARKER PTSPLAY ISwEEP ITIMiNG CoNsT CURSOR SETUP SETUP sETUP BETUP IGTO2006 6 24 Agilent 4155C 4156C 5 1 MARKER CURSOR MARKER MARKER ON OFF ON 2 Y1 Y2 AXIS 3 MARKER SKIP 4 LINE LINE SELECT LINE SELECT 1 2 NONE 1 2
312. No og SAMPLES 7 No og SAMPLES 10 NrTIAL TNTERVAL 1 1 INITIAL INTERVAL 10 10 1 initia1 1nterva1 10 INITIAL INTERVAL 2 2 times tnitia1 interva1 Discard 1 5 5 1
313. Ras ww Po Sense amp 9 wtO WW G GU Oo 9 Connection Gate Cable PG tao EMEN Drain SD a OO OO 9 Source vy zor omA fan VU 2 TO PACKAGE 2 Hg Voltage A rr 1 34 Agilent 4155C 4156C 5 3 CHANNELS CHANNEL DEFINITION 1 4155C 4156C 4155C 4156C 2 DEFINITION nl CHANNELS CHANNEL Chan 3 MEASUREMENT MODE SWEEP MEASUREMENT MODE SWEEP
314. 2 W 10pA 1 fA HRSMU SMU P 7 6 MPSMU SMU 4155C 4 oO 41S01A 7B 420 422 2 100 V 100 mA 2 W 2 MPSMU SMU P 7 9 HPSMU SMU 41501A 7B 410 412 1 200 V 1 A 20 W HPSMU SMU P 7 12 SMU SMU
315. 23 293 PC 95783 Na 3282380 282563St250 22252 s SMU2 RE RR RR EE RE RIE EE RR RE EE RS SMU3 32S2020 261 93 EC 2 OPC ECD SMU4 RE FN 0 10 PE 1 SMU5 SN SGD IS SRD 1 SG 4 VDSL SD GS SS SMU6 VSU1 VSU2 XXXXXXX XXXXXXXXXXXX XXXXXXXXXXXX XXXXXXXXXXXX VMU1 VMU2 OPEN X CLOSE BTAS DTSABLED Xx CLOSE ON BTAS PORT ARRAY Select Setup Display Mode with sofFtkey or rotary knob B CHANNEL USER USER E5250A E5250A DEF FOCTN VAR S PROP SETUP SETUP DISPLAY MODE ARRAY LIST LIST CONFIG MODE NORMAL SETUP DISPLAY MODE LIST CARD NUMBER CARD1 CARD2 CARD3 CARD4
316. 6 PAGE CHAN UVAR DEFE NAME 6 UNIT 6 DATA TRAC DEFE SIZE IBASIC DATA TRAC IBASIC 5 10 ASSTGN GHp4155 TO 800 20 OUTPUT GHp4155 FORM DATA ASCY 30 OUTPUT GHp4155 TRAC DEF UVAR1 5 40 OUTPUT GHp4155 TRAC DATA UVAR1 1 1 1 2 1 3 1 4 1 5 50 END 20 ASCII 30 N
317. 6 AFTER 9 DISABLE 9 8 AFTER 7 Interpolate ON ON 8 ON 2 LINE1 LINE2
318. 6 26 Agilent 4155C 4156C 5 1 2 1 LINE LINE SELECT 2 1 2 NONE 2 LINI E ON OFF 1 2 1 DISPLAY SETUP 2 GRID ON OFF Agilent 4155C 4156C 5 6 27
319. 8 33 8 37 Agilent 4155C 4156C 5 7 8538 o 02 eT ot GS RU AN EAI AS Se 9 9 8 i RE5G09 RRBGISSIE NSK ON DAR Td RE 2 A 2 NIR 8 EC a i ARN NA RR EE RE RR 1 ODN RN Ce NR a 0 ME ET 2 RONEN NT Sa a ON et tn EE EE EO SR 40 MN NY 2 i i RR EE CEERI RAT ME ON EOS RR GT ep TD EN SN GR SE lt 3 1 EO EE EE CE 2 OR a i a NAAN oe 9 GS 8 Agilent 4155C 4156C 5 10 OG 9 16 GOGO 9 17 ON A 9 18 0 3860 Se 2 7 9 18 MM AD aa NE AO 2 1 9 18 ON 9 18 260 NM SS UMSS SAUADSSS SS RS PS IS OO 9 19 2 TE NR 9 19 G2 CG SS 9 20 EDC 9 21 ON EN 9 22 0 9 22 GO 9 22 ON OA 9 22 NANA DS 2 72 AA ne 0 Aa 9 23 GMX SE 9 23 OM NC 9 23 ON CN ES 9 23 MM 9 23 10 3 10 5 10 5 ME se sn Sa 10 7 Agilent
320. SKTP AUTO ANALY 0 00 SIS CURSOR eTTME s VU Um 7diy 00 m OFF MARKER LINE SCALING DISPLAY SAMPLNG STOP CONST CURSOR SETUP SETUP COND SETUP 3 46 Agilent 4155C 4156C 5 GRAPH LIST LIST GRAPH LIST LIST SHORT 00DEC07 04 52PM MARKER TIME 0 0000 s to 196ms 9T NO GTTME VG s V 6 160ms 754 96mv 7 164ms 773 46mv 8 168ms 791 98mv 9 172ms 810 44mV 10 176ms 828 90mV 11 178ms 838 18mV ER 12 180ms 847 42mV RE 13 182ms 856 66mV 14 184ms 865 88mV MARKER 15 186ms 875 12mV SKIP 16 188ms 884 30mV 7 190ms 893 50mV 18 192ms 902 76mV 19 194ms 911 92mV 20 196ms 921 20mV NEXT TNDEX 20 APPEND B MARKER SPREAD RE SAMPLNG STOP CONST SHEET SETUP SETUP COND SETUP Agilent 4155C 4156C 5 3 47 3 48 Agilent 4155C 4156C 5 Quasi static C V
321. TRECT ARKER CURSOR IARKER AUTO ANALY SIS CURSOR OFF AXIS Yi LINE SCALING DISPLAY SETUP SWEEP SETUP TIMING SETUP CONST SETUP UGTO2001 Agilent 4155C 4156C 5 6 15 0 1 MARKER CURSOR CURSOR 0 500V 65 921206597m X Y1 Y2 CURSOR CURSOR SHORT LONG OFF SHORT LONG 2 MARKER CURSOR
322. Y w Y yo 1og x1 og xo X Y w log ylog yo X Xo0 X Y log ylog yo og x1 log Xo GA Y LINE1 Xo y0Xiyi LINE1 2 8 Agilent 4155C 4156C 5 9 15 L1G1 LINE1 Y1 L1G X Y1 Yi1 Yo 1 Xo X Y1 Qa 1 Yo og x1 og Xp X Y1 log yi X Y1 log yi GS 8 AO 0 X11 Y1 log yo X1 Xo0 log yo 1og x1 og x0 LINE1 LINE1 2 X Y1 Agilent 4155C 4156C 5 L1G2 LINE1 Y2 GL1G2
323. 0 5 0 2 0 1 05 03 s DUT 10 T ohm 200 pF Agilent 4155C 4156C 5 4 45 Quasi static C V Figure 4 18 MPSMU HPSMU Reading Accuracy 0 001 0 01 0 1 10 QSCV Measurement Voltage V 1 E 09 1 E 10 1 E 11 1 E 12 Offset Accuracy F 1 E 13 1 E 14 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 1 nA 20 V 2 1 0 5 0 2 0 1 05 03 s DUT 10 T ohm 200 pF 4 46 Agilent 4155C 4156C 5 Quasi static C V Figure 4 19 MPSMU HPSMU Reading Accuracy 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 1 E 08 1 E
324. 1 24 P 1 2 22 9 6 1 14 Agilent 4155C 4156C 5 P 1 27 P 1 28 P 1 29 3 7 1 Df
325. LIN LOG Figure 1 1 SWEEP MODE SINGLE DOUBLE LIN LOG LINEAR LOG10 LOG25 LOG50 Figure 1 1 Single Sweep Double Sweep Linear Sweep _ _ L Log Sweep le L UGD03001 1 4 Agilent 4155C 4156C 5 Figure 1 2 NHI Output Voltage Th 27 tme or Curfent Td delay tme 4 N ramber of steps Stop Value N Th Td Td Single Sweep 3 0 lt 1 Start Value Time Trigger Completion Th bolg tne Output Voltage Td celey time or CU Ni namber of steps Td Stop aerial ValueT Double Sweep Td 2N Start Value f gt Time Trigger Completion USO3O02
326. NAME CHANNEL DEFINITION USER FUNCTION USER VARIABLE QSCV MEASURE SETUP GRID ON OFF LINE PARAMETER ON OFF X Y DATA VARTABLES 2 DATA DISPLAY RESOLUTION lt 3 0 NORMAL ADC EXTEND 10 pA NORMAL 1 fA EXTEND 10 aA Agilent 4155C 4156C
327. PGU 1 PULSE IMPEDANCE LOW 50 ohm 50 Q 2 CONSTANT SOURCE UNIT NAME CHANNELS CHANNEL DEFINITION 4 12 Agilent 4155C 4156C 5 Quasi static C V 1 PAGE CONTROL Meas 2 QSCV Status 3 CONT AT ANY STOP AT ANY ABNORM STOP AT COMPLIANCE
328. SETUP SETUP SETUP UGTO2013 100x80 GRAPH LIST LIST ON MARKER MARKER MARKER CURSOR 6 6 Agilent 4155C 4156C 5
329. Tprev Tlog Ttarget Tprev 77og 1 Figure 3 5 Discard 2 i Tprey J STT9g 9Eored in TTME Sampling RB Interval Ttarget A SB A gt TIME Measurement A Ttarget Tprev B 17Tlog Ttarget Agilent 4155C 4156C 5 3 23 MEASURE SAMPLING SETUP MODE INITIAL INTERVAL NO OF SAMPLES 3 24 1 LOGC10 LOG25 LOG50 MODE 1 LOG10 10 LOG25 25 LOGS0 50
330. 0 5 ms 100 ms 100 us KNOB SWEEP Y AXIS ASSIGN 1 Y2 VAR1 SMU VAR1 VAR1 VSU EC SMU1 SMU2 SMU6 VMU1 VMU2 R VAR1 VARI
331. SMU PGU IPULSE SMU COMMON SMU GNDU DVOLT VMU FCTN CONST SMU VSU PGU VAR1 SMU VSU VAR2 SMU VSU VAR1 SMU VSU 1 16 Agilent 4155C 4156C 5 VNAME INAME VNAME INAME 6 DELETE ROW DELETE ROW DISCHARGE VMU ON
332. SOURCE 500 nA COMPLIANCE lV 3 SMU2 500 nA MEASURE SAMPLING SETUP 00DEc07 02 18PM LINEAR SAMPLING PARAMETER STOP CONDITION 10G10 MODE THINNED OUT ENABLE DISABLE ENABLE INITIAL INTERVAL 2 00ms ENABLE DELAY 0 0000000 s NO OF SAMPLES 20 NAME ve TOTAL SAMP TIME NO LIMIT THRESHOLD 900 00000mV oG25 EVENT val gt Th HOLD TIME 0 000000 s EVENT NO 3 FILTER ON TE CONSTANT THINNED UNIT SMU2 MP our NAME Te MODE I SOURCE 500 0nA COMPLTANCE 1 0000 V THTNNED OUT Select Samp1ing Mode with softkey or rotary knob B SAMPLNG MEASURE OO0TPUr PREV NEXT SETUP SETUP SEQ PAGE PAGE ms MEASURE SETUP 2 V 3 44 MEASU RE SETUP
333. SQD DSQID 19 os 7 MU2 1 SMU1 Yi poo 0 009 G024 145x60 ve a 1 30 Agilent 4155C 4156C 5 1 4155C 4156C 1 2 3 4155C 4156C 16442A B 4155C 4156C 4155C 4156C keyboard 4156C 16442A B 16442A B Kelvin Triaxial Cables N Coaxial Cables mmterlocLED Cable 4156 4156C 16442A B 4156C 16442A B Intlk InterlockLED 2 Intlk VSU 1 VSU 1 SMU 1 lt SMU 1 VSU 2 VSU 2 SMU 2 lt SMU 2 VMU 1 VMU 1 SMU 3 lt SMU 3 VMU 2 b VMU 2 a LED Agilent 16493J Agilent 16493B
334. Table 8 4 l E5250A 1 E5252A E5252A E5250A 1 BE5252A E5250A GPIB CHANNELS E5250A PROPERTIES E5250A 4155C 4156C GPIB GPIB GPIB 4155C 4156C E5250A SMU INPUT 4155C 4156C SMU 41501 HPSMU MPSMU E5250A AUX INPUT 4155C 4156C VSU VMU 41501 PGU E5252A
335. VPULSE VAR1 VARI VAR2 CONST STANDBY V I COMMON V DVOLT 1 SMU n a n a VSU n a eS a VMU e e GNDU 9 PGU e e n a Agilent 4155C 4156C 5 2 3 Table 2 2 Table 2 2 LIN LOG VAR1 LIN LOG LIN SINGLE DOUBLE VAR1 SINGLE DOUBLE SINGLE DOUBLE NO OF STEP VAR1 1 1001 1 1001 0 655 35 s 0 655 35 s AUTO LIMITED AUTO FIX a
336. 1 UGDO4015 60mmhx15mmw 1 trigger output delay tme set In TRIG OUT DELAY field on MEASURE OUTPUT SEQUENCE page Tex mea ww ement time for external Iinstrument T1 TRIG OUT DELAY gt TI Tex Tex 8 42 Agilent 4155C 4156C 5 STEP DELAY SMU 4155C 4156C STEP DELAY STEP DELAY E EE 0 1s 100 us T2 STEP DELAY
337. 10 ms ES 20 HOLD TTME 10 ms STOP CONDTT TON DISABLE TNITIAL INTERVAL 10 ms 100 ms 100ms 1s 1 1 TIME 10 ms 20 ms 30 ms 40 ms 50 ms 60 ms 70 ms 80 ms 90 ms 100 ms LOG10 1 10 90 LOG10 1 10 90 10 TIME 140 ms 170 ms 210 ms 270 ms 330 ms 410 ms 520 ms 650 ms 810 ms 1 02 s 18 msec
338. 10 pA 100 pA 1 nA 10 nA 100 nA 0 SI S11S uA 100 pA 1nA 10 nA 100 nA 1 mA 0 lt lt 1 15 mA 1nA 10 nA 100 nA 1 HuA 10 mA 0 lt S11 5 mA 10 nA 100 nA 1 LA 10 LA 100 mA 0 sl lt 100 mA 100 nA 1 nA 10 WA 100 WA a b 80 us 560 ps c 480 us Agilent 4155C 4156C 5 7 11 ew ep ra HPSMU SMU Figure 7 5 HPSMU Current mA UGD02005 Table 7 9 HPSMU y 2V 0 lt IVIs lt 2 V 100 nV 1000 mA 20 V 0 lt IVI lt 20 V 1 mV 1000 mA 40 V 0 lt IVI lt 40 V 2 mV 500 mA 100V 0 lt IVI lt 100 V 5 mV 125 mA 200V 0 lt IVI lt 200 V 10 mV 50 mA 7 12 Agilent 4155C 4156C
339. 13 gt lt 3 17 2 2 3 21 0 Se SS SS 2 eo 3 27 gt Wo Joo osa eS 3 29 9 gt 3 31 3 33 PeUi 2 3 34 lt 3 36 3 38 3 39 3 40 2 Agilent 4155C 4156C 5 4 EE 3 41 1 3 41 2 DUT 3 41 3 3 42 4 3 43 5 3 45 6 3 46 Quas
340. 26 4 32 Agilent 4155C 4156C 5 Quasi static C V Figure 4 5 HRSMU Reading Accuracy 2 0 0 001 0 01 0 1 1 QSCV Measurement Voltage V 1 E 10 1 E 11 E gt 8 8g LE 12 LE 13 LE 14 0 001 0 01 0 1 1 QSCV Measurement Voltage V 10 pA 100 pA 2 V 2 1 0 5 0 3 s DUT 10 T ohm 200 pF Agilent 4155C 4156C 5 4 33 Quasi static C V Figure 4 6 HRSMU 12 10 8 3 6 lt 8 4 2 0 0 001 0 01 0 1 10 QSCV Measurement Voltage V 1
341. 3 4 8 8 5 AFTER 9 DISABLE 9 8 AFTER 1 6 7 Agilent 4155C 4156C 5 6 39
342. 4155C 4156C 5 9 10 Agilent 4155C 4156C 5 Agilent 4155C 4156C 5 a 4155C 4156C 1 2 Agilent 4155C 4156C 5 nl 3 Basic Sweep 1 VAR1 Subordinate Sweep VAR1 VAR2
343. 4156C 5 a ON ON 1 2 Graph List LINE SELECT LINE ON gt px LINE 1 2 E E Display ANLYSIS SETUP DISPLAY ANALYSIS SETUP LINE1 LINE2
344. 5 LEAK COMPENSATTON ON ZERO CANCEL ON 5 416pF SMU1 HR Select Measurement Unit with softkey B Qscv MEASURE OUTPUT PREV NEXT SETUP SETUP SEQ 5 PAGE PAGE Agilent 4155C 4156C 5 4 23 Quasi static C V 6 1 pisplay DISPLAY DISPLAY SETU DISPLAY DISPLAY SETUP P 2 DISPLAY MODE GRAPHICS 3 X Y1 X axis Y1 axis NAME V1 CAPO1 SCALE LINEAR LINEAR MIN 4 DISPLAY MAX DISPLAY MODE GRAPHICS GRAPHICS X V1 3 V 3 V Y1 DISPLAY SETUP CAPO1 36 pF 110 pF Xaxis DATA VARIABLES GRAPHICS Select EXTEND Ylaxis Y2axis NAME V1 CAP01 SCALEILTNEAR LTNEAR MIN 3 0000000 V 36 00000pF MAX 3 0000000 V 110 00000pF GRTD LINE PARAMETER ON ON DATA DTSPLAY
345. BE 11 1 E 12 EE 8 LE 13 8 L E 14 1 E 15 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 10 pA 100 pA 20 Y 2 1 0 5 0 3 s UT 10 T ohm 200 pF i 4 34 Agilent 4155C 4156C 5 Quasi static C V Figure 4 7 HRSMU 12 10 Reading Accuracy 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 1E 11 1E 12 8 1E 13 lt 1E 14 1E 15 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 10 pA 100 pA 20 V 2 1 0 5 0 3 s ep UT 10 T ohm 1 nF i Agilent 4155C 4156C 5 4 35 Quasi static C V
346. CANCEL oN OFF green stop 4 14 Agilent 4155C 4156C 5 Quasi static C V A DISPLAY DISPLAY SETUP pisplay DISPLAY MODE GRAPHICS Xaxis Ylaxis Y1 Y2axis Y2 NAME
347. Display Mode with softkey or rotary knob B DISPLAY ANLYSIS PREV NEXT SETUP SETUE 3 PAGE PAGE 1 42 Agilent 4155C 4156C 5 Oo 7 single QGO0NS3 73 50 GRAPH LIST GRAPHICS SHORT 01JAN29 10 59AM MARKER OFF 9 100 m 100 m MAREER MIN MAX TNTER SorD x DsoID POLATE OFF SS x 10 0m 10 0m divl div 7 MARKER 7 SKTP AUTO ANALY 2 Srs 0 00 0 00 0 00 vpD 200 m div 2 00 OAI OFF B AXTS MARKER LTNE SCALTNG DISPLAY swEEp TIMING Y1 CURSOR S sgTUP SETUP SETUP Agilent 4155C 4156C 5 1 43 F 1 44 Agilent 4155C 4156C 5 2
348. External Instrument TRIGGER INPUT OUTPUT IN OUT 9 Coaxial Cabls a For Trigger Output Function 4155 4156 External Instrument TRIGGER 5 INPUT OUTPUT IN OUT e Coaxial Cable b For Trlgger Input Function 8 38 Agilent 4155C 4156C 5 MEASURE OUTPUT SEQUENCE TRIGGER SETUP TRIG OUT TRIG IN single Repeat Append Agilent 4155C 4156C 5 8 39
349. Meas PGU SETUP MEASURE PGU SETUP CONSTANT SOURCE MEASURE PGU SETUP UNIT NAME CHANNELS CHANNEL DEFINITION PULSE COUNT FREE RUN PGU 100 mA Agilent 4155C 4156C 5 1 25 Ir 1 PAGE CONTROL Meas 2 SWEEP Status 3 CONT ATANY SMU
350. OFF 1 INPUT1 INPUT2 3 INPUT3 INPUT4 5 INPUT5 INPUT6 7 INPUT7 INPUT8 9 INPUT9 INPUT10 INPUT _ INPUT gt INPUT _ INPUT INPUT n 1 INPUT n m 10 n 48 8 30 Agilent 4155C 4156C 5
351. Pulse Width Pulse Periodt 5 For Pulsed Constant Source 1 22 Agilent 4155C 4156C 5 a a VAR1 VAR2 VAR1 b CONST Agilent 4155C 4156C 5 1 23 PGU PGU PGU CHANNELS CHANNEL DEFINITION MODE V Ne VPULSE Meas MEASURE P
352. Sweep Source hbase vakie outoat value of Pulse constant source Constant Source NN base vekie NN UGDQ3005 120xSG 1 CHANNELS CHANNEL DEFINITION SMU MODE VPULSE IPULSE 2 MEASURE SWEEP SETUP PERIOD Sms 1s 100 us WIDTH 0 5 ms 100 ms 100 us BASE 1 12 Agilent 4155C 4156C 5 SMU
353. V 10 nA 2 V 2 1 0 5 0 2 0 1 05 03 s DUT 10 T ohm 200 pF 4 52 Agilent 4155C 4156C 5 Figure 4 25 Quasi static C V MPSMU HPSMU Reading Accuracy 001 0 01 0 1 1 10 QSCV Measurement Voltage V Offset Accuracy F LE 1 E 10 L E 11 LE 12 09 LE 13 LE 14 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 10 nA 20 V DUT 10 T ohm 200 pF Agilent 4155C 4156C 5 2 1 0 5 0 2 0 1 05 03 s 4 53 Quasi static C V Figure 4 26 MPSMU HPSMU
354. 0 5 7 5 10 5 11 2 5 13 5 15 ac 5 18 dc 5 20 5 22 3 0 2 Rn RS ie 5 lt gt 6 3 GRAPHOCS 6 4 LIST 6 6 MM NN Me A MI 5 6 8 260 6 9 02002 BP R G 2 RI 2 SO 2 2 Pu au 6 11 3 6 11 0 6 12 2 0 NO 0 6 13 DIOIrrIrtrtrtrtrtrtrrrr 6 14 rt 6 16 6 17 4 Agilent 4155C 4156C 5 9 6 17
355. 0 mA 0 100V 100 mA 0 lt lt 20 mA 0 100V 100 mA 20 mA lt ll lt 50 mA 0 40V 100 mA 50 mA lt lt 100 mA 0 20V MPSMU 1nA 10mA 0 100V 100 mA 0 lt lt 20 mA 0 100V 100 mA 20 mA lt I lt 50 mA 0 40V 100 mA 50 mA lt I lt 100 mA 0 20V 7 24 Agilent 4155C 4156C 5 ich HPSMU 1nA 10mA 0 200 V 100 mA 0 lt IIl lt 50 mA 0 200 V 100 mA 50 mA lt lt 115 mA 0 100 V 1A 0 SI lt 50 mA 0 200 V 1A 50 mA lt lt 125 mA 0 100 V 1A 125 mA lt lt 500 mA 0 40 V 1A S00 mA lt lt 1 A 0 20 V Table 7 18 HRSMU 0 V lt IVI lt s2 V 100 WV MPSMU 2V lt IVI lt 20 V 1 mV HPSMU 20 V lt IVI lt 40 V 2 mV 40 V lt IVIS100 V SmV 100 V lt IVI lt 200 V 10 mV Table 7 19 2 HRSMU 2 V 100 fA 100 mA 20 V 100 fA 100 mA 40 V 100 fA 50 mA 100 V 100fA 20 mA MPSMU 2 V 1pA 100 mA 20 V 1pA 100 mA 40 V 1pA 350 mA 100 V 1pA 20 mA Agilent 4155C 4156C 5 7 25 Table 7 20
356. 0 nA PLING SETUP 2 SAMPLING PARAMETER MODE THINNED OUT INTTIAL INTERVAL 2 00 ms NO OF SAMPLES 20 TOTAL SAMP TIME NO LIMTT 2 ms 1 20 3 STOP CONDITION ENABLE DISABLE ENABLE ENABLE DELAY 0s NAME VG THRESHOLD 900 mV EVENT Val gt Th EVENT NO 3 DL Ms Agilent 4155C 4156C 5 VG 900 mV 3 3 43 4 CONSTANT UNIT SMU2 MP NAME IG MODE I
357. 000798 0 0072 0 0088 0 022 0 045 Dp 0 00238 0 011 0 015 0 036 0 072 Ao 0 041 Bo 7 2E 15 Boc 6 0E 18 Co 4 3E 14 Coc S 1E 18 Do 4 2E 15 Doc 6 0E 18 10 nA Ap 0 52 0 52 0 52 0 53 0 54 Bp 0 004 0 027 0 047 0 12 0 23 Cp 0 0008 0 0072 0 0088 0 022 0 045 Dp 0 0024 0 011 0 015 0 036 0 072 Ao 0 041 Bo 6 2E 15 Boc 6 0E 18 Co 7 4B 14 Coc S 1E 18 Do 3 2E 15 Doc 6 0E 18 Agilent 4155C 4156C 5 4 31 Table 4 3 Quasi static C V DUT mswu MPSMU HPSMU 10 pA 2V 10 T ohm 200pF Figure 4 5 2 20 V 10T ohm 200 pF Figure 4 6 20 V 10 T ohm lnF Figure 4 7 20 V 100 G ohm 200pF Higure 4 8 1nA 2 V 10 T ohm 200pF Figure 4 9 Figure 4 17 20 V 10 Tohm 200pE Higure 4 10 Figure 4 18 20 V 10 T ohm lnF Figure 4 19 20 V 10Gohm 200 pF Figure 4 11 Figure 4 20 40 V 1 ohm 200 pF Higure 4 12 Figure 4 21 100 V 1Gohm 200 pF Higure 4 13 Figure 4 22 200 V 1 ohm 200 pF Figure 4 23 10 nA 2 V 10 T ohm 200pF Figure 4 14 Figure 4 24 20 V 10 T ohm 200 pF Figure 4 25 20 V 10Gohm 200 pF Higure 4 15 20 V 1Gohm 200pE Higure 4 16 Figure 4 26 Figure 4 5 Figure 4
358. 03 s DUT 1 G ohm 200 pF 4 50 Agilent 4155C 4156C 5 Figure 4 23 Quasi static C HPSMU V 80 70 60 50 8 40 3 30 g 20 10 0 0 001 0 01 0 1 10 QSCV Measurement Voltage V 1 E 09 1 E 10 8 1 E 11 1 E 12 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 1 nA 200 V 2 1 0 5 0 2 0 1 05 03 s DUT 1 G ohm 200 pF Agilent 4155C 4156C 5 4 51 Quasi static C V Figure 4 24 MPSMU HPSMU Reading Accuracy 0 001 0 01 0 1 1 QSCV Measurement Voltage V E 09 Offset Accuracy F 0 001 0 01 0 1 1 QSCV Measurement Voltage
359. 09 1 E 10 1 E 11 Offset Accuracy F 1 E 12 1 E 13 1 E 14 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 1 nA 20 V 2 1 0 5 0 2 0 1 05 03 s DUT 10 T ohm 1 nF Agilent 4155C 4156C 5 4 47 Quasi static C V Figure 4 20 MPSMU HPSMU 20 18 16 14 Reading Accuracy oo 2 0 0 001 0 01 0 1 10 QSCV Measurement Voltage V 1 E 09 1 E 10 Offset Accuracy F 1 E 11 1 E 12 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 1 nA 20 V 2 1 0 5 0 2 0 1 05 03 s DUT 10 G ohm 200 pF 4 48 Agilent 4155C 4156C 5 Figure 4 21 Quasi static C V
360. 100 f 109 f 9 000 VBE Y 100 m diy 1 00 AXTS SCALIN6 IDrsPLAY SwEEP TiMING ooNsT SETUP SETUP SETUP SETUP UGTG2003 P 6 9 P 6 11 Marker Cursor 6 8 Agilent 4155C 4156C 5 4 2 2
361. 156C DISPLAY DISPLAY SETUP 1 GRAPHICS NAME X 2 GRAPHICS NAME Y1 3 GRAPHICS NAME Y2 4 LIST NAME No 1 5 LIST NAME No 2 6 LIST NAME No 3 7 LIST NAME No 4 8 LIST NAME No 5 9 LIST NAME No 6 10 LIST NAME No 7 11 LIST NAME No 8 12 DATA VARIABLES 13 DATA VARIABLES 8 DATA VARIABLES NAME X MEASURE SAMPLING SETUP
362. 2001 Agilent 4155C 4156C 5 7 3 ew ep ra SMU SMU SMU 1 Figure 7 2 SMU SMU 3 V source monitor source CV monitor COMMON i Figure 7 2 SMU V Source Mode Output Switch 0 09 G SMU FORCE 1Source Mode UGDO2002 7 4 Agilent 4155C 4156C 5 SMU SMU HRSMU SMU 4156C 4 100 V 100 mA
363. 5 20 Agilent 4155C 4156C 5 Fr SMU1I 5 00 V 1 00 mA STRESS STRESS SETUP 94JANG1 0O1 3OPM STRESS MODE PULSE DURATION UNIT PGU1 PFPGU2 1 0ms NAME PERTIOD 19 0OWS ACCUMULATED STRESS WIDTH 5 0OmS 5 0Oms 0 0000s DELAY TIME 0 00000 s 0 00000 s PEAK VALUE 10OmV 100mV HOLD TIME BASE YALUE 0 000 V 0o 000 V 0 000 Ss LEADING TIME 1Q0 nS 100 ns TRAILING TIME 100 ns 10Q ns FILTER ON IMPEDANCE Low Low XSTRESS CONTINUE AT ANY Status CONSTANT UNIT SMU1 MP NAME VSU MODE SOURCE COMPLTANCE 0 0010000 CHANNEL DEF UGOO13 109 STRESS PREY NEXT FORCE PAGE PAGE Agilent 4155C 4156C 5 5 21
364. 56C 5 4 CHANNELS USER FUNCTION DEFINITION 1 USER FCTN FUNCTION DEFINITION 2 CHA nl ELS USER Figure 1 8 MARKER CURSOR Edit Backspace NAME SQID 2 Enter SQID Enter DEFINITION SQRT ID 2 3 p blue key ID
365. 6 TNDEX V1 V1 SMU1 T1 Il SMU1I rrME CO 1 1 10 7747 Thold Tinterval x INDEX 1 a TIME Thold Tinterval INDEX 2 Agilent 4155C 4156C 5 3 7 10 msece 5 msec TIME
366. 8 3 Measurement ldle State Standby State State Standby State ldle State SMU1 PGU1 2 PGU2 SMU2 4 4 Pulse Start 2 2 Pulse Stop SMU3 SMU4 an output order an order that channels return to 0 V UGDO4008 110w100h 8 12 Agilent 4155C 4156C 5 4155C 4156C 4155C 4156C FCTN MODE
367. 9 8 6 lt 8 4 2 0 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 1 E 10 G9 8 1 B 11 8 1 E 12 0 001 0 01 0 1 0 QSCV Measurement Voltage V 1 nA 20 Y 2 1 0 5 0 3 0 1 05 DUT 10 G ohm 200 pF Agilent 4155C 4156C 5 V 03 s 4 39 Quasi static C V Figure 4 12 HRSMU 10 Reading Accuracy 0 01 0 1 10 QSCV Measurement Voltage V 1 E 10 Offset Accuracy F 1E 11 0 01 0 1 10 QSCV Measurement Voltage V ul 1 nA HH 40 V 2 1 0 5 0 3 0 1 05 03 s DUT 1 G ohm 200 pF i 4 40 Agilent 4155C 4156C 5 Figure 4 13
368. 9 000 V 9 000 V O 00O s LEAEING TIME 1 100 ns TRAILING TIME AOS 100 ns FTLTER ON IMPEDANCE LOW Low XSTRESS CONTINUE AT ANY Status xCONSTANT UNIT SMU1 MP NAME VSU MODE V SOURCE 5 00 V COMPLTANCE 1 000OmA 0 000000100 CHANNEL ST STRESS PREV NEXT DEF FORCE PAGE PAGE UGOO14 100x Agilent 4155C 4156C 5 5 19 dc FCTN SYNC SMU VSU MODE V FCTN SYNC PGU dc FCTN NSYNC stress STRESS SETUP CONSTANT 9 CONSTANT SOURCE CONSTANT SMU COMPLIANCE UNIT NAME MODE YU CHANNEL DEFINITION
369. AME MODE SOURCE GOMPL TANCE ELURATIQI CHAN STRESS PREV NEXT DEF FQRCE PAGE PAGE G01012 100x Agilent 4155C 4156C 5 5 17 ac MODE VPULSE FCTN SYNC PGU ac FCTN NSYNC PGU Stress STRESS SETUP PULSE 1 PERIOD PGU1 PGU2 2 1 WIDTH 3 DELAY TIME 4 PEAK VALUE 5 BASE VALUE 6 LEADING TIME
370. AME UVAR1 SIZE 5 40 UVAR1 1 1 1 2 1 3 1 4 1 5 8 6 Agilent 4155C 4156C 5 NOTE NOTE NOTE a i Figure 8 1 2 1 2 Enter DY Y gt
371. DEFINITION USER FUNCTION USER VARIABLE DATA VARIABLES 2 DATA DISPLAY RESOLUTION NORMAL ADC EXTEND 10 pA NORMAL 1 fA EXTEND 10 aA 1 28 Agilent 4155C 4156C 5 single Repeat
372. DO3014 20x80 Agilent 4155C 4156C 5 3 11 Figure 3 3 SEQUENTIAL a CONST 1 Pulse Bias WE Pg a CONST hold tinme time origin sampling start sampling stop UGDO3007 120X80 3 12 Agilent 4155C 4156C 5 J 1 2 2 3
373. ERO CANCEL ON 1 tt OFFSET CANCEL 0 1 Medjum 10 nA
374. Figure 7 4 Table 7 5 MPSMU MPSMU Current mA Valtage IM UGD02004 2V 0 SIVI lt 2 V 100 WV 100 mA 20 V 0 SIVI S20 V 1 mV 100 mA 40 V 0 SIVI S40 V 2 mV 50 mA 100 V 0 SIVI lt 100 V 5S mV 20 mA Agilent 4155C 4156C 5 7 9 Table 7 6 MPSMU P BS 2 640 us SO us 1PLC 1 92 ms S60 us 2V 0 lt IVI lt 2 2 V 2 nuV 20 LuV 200 LV 2 mV 20 V 0 lt IVI lt 22 V 20 LV 200 LV 2 mV 20 mV 40 V 0 SIVIS44 V 40 LV 400 nV 4 mV 40 mV 100 V 0 SIVIS100 V 100 LV 1 mV 10 mV 100 mV a b
375. GU SETUP PGU SETUP 1 PERIOD PGU1 PGU2 2 WIDTH 3 DELAY TIME 4 PEAK VALUE 3 BASE VALUE 6 LEADING TIME 7 TRAILING TIME 8 IMPEDANCE PGU LOW 0 ohm 50 ohm 50 ohm Pulse Peak Leading Time 4 49 Pulse Base iling Tr 7 a PGU 90 Fk a Pulse Width Pulse Peripd Delay Time 1 24 GE RE Agilent 4155C 4156C 5 PGU
376. HANNEL DEFINITION MEASUREMENT MODE QSCV VNAME Vg INAME Ig MODE V SMU VSU PGU I SMU COMMON SMU GNDU FCTN VAR1 QSCV Y SMU CONST SMU VSU PGU GNDU VNAME INAME
377. IAL 1 SMU1 SMU 2 SMU3 SMU4 VSU1 VSU2 PGU1 PGU2 oO SS oy 3 OD BO 0 V 1 0 V CHANNELS CHANNEL DEFINITION CHANNELS DELETE ROW 2 OUTPUT SEQUENCE 1
378. ISPLAY RESOLUTION NOML ADC EXTEND 10 pA 1 fA EXTEND 10 aA NORMAL 4 16 Agilent 4155C 4156C 5 Quasi static C V Single Repeat Append stpp Agilent 4155C 4156C 5 4 17 Quasi static C V HT 4155C 4156C QSCV MOS
379. ME INAME MODE gcrN RESTSTANCE oscv SMO1 HR vi v VAR1 0 ohm SMU2 HR v2 2 COMMON CoNSr SMU3 HR DEFAULT SMO5 HP 0 ohm SETUP vsul VSU02 MEM1 M VMU1 DTSCHARGE B T VMD2 oN VCE IC PGU1 PGU2 MEM2 M Ca DS MORE Qscv 2 Select Measurement Mode with soFtkey or rotary knob CHANNEL USER USER E5250A E5250A NEXT DEF FCTN VAR S ERop SETUP PAGE Agilent 4155C 4156C 5 4 19 NOTE Quasi static C V 4 MEASURE QSCV SETUP QSCV 1 2 Meas MEASURE QSCV SETUP
380. N r 1 nt r x 27 1 EE N r lt n 1 N r N n 1 a n 4 x i A r B A 1 5 ID MAVG ID 5 Agilent 4155C 4156C 5 9 9 MAX AX A MAX TD MIN TN A
381. NDU FCTN a ONST Rt VNAME 1 AME 1 H DELETE ROW E Agilent 4155C 4156C 5 E 6 E 3 29 U ON OFF U VMU
382. ODE V Ne VPULSE Meas PGU SETUP MEASURE PGU SETUP 1 PERIOD PGU1 PGU2 2 1 WIDTH 3 DELAY TIME 4 PEAK VALUE 5 BASE VALUE 6 LEADING TIME 7 TRAILING TIME 8 IMPEDANCE PGU LOW 0 ohm 50 ohm 50 ohm PGU Pulse Peak 3 90 TT a Talma Ti Leading Time 9 7 mm Pulse Base 1 Me
383. OFF 1 ON OFF 2 3 LINE ON OFF ON 1 2 2 1 4 2 MARKER CURSOR SELECT CURSOR DISPLAY DISPLAY SETUP LINE PARAMETER ON Y OFF DISPLAY
384. OFF ON ON PGU PGU OPEN OFF ON OFF OPEN OFF OFF OFF SW1 SW2 SMU 0 OFF SMU PGU OFF ON PGU OPEN OFF OFF SW1 SW2 SW3 SW1 SW2 SW3 SW3 SW1 SW2 PGU PGU OPEN 1 PGU 41501A B 4155C 4156C Agilent 4155C 4156C 5 L 8 23 SMU PG 1 PAGE CONTROL
385. ONDITION DISABLE DISABLE ENABLE 1 8 9 FIX FIX AUTO LIMITED Short Short Medium Long a INITIAL INTERVAL Xx NO OF SAMPLES 1 s 1x1011 s b SMU VMU c SMU R Box SMU d 41501A B SMUx 6 VMUx2 e AUTO LIMITED f 2 3 16 Agilent 4155C 4156C 5
386. RESOLUTTION Display Mode with sofFtkey or rotary knob GRAPH TCS LIST LL DISPLAY SETUP ANLYSIS SETUP S PREV PAGE NEXT PAGE 4 24 Agilent 4155C 4156C 5 7 Single GRAPH LIST GRAPHTCS MARKER F _ 2 900 VY 108 508pF 110 p CAP01 10 0p di 36 0p 3 00 V1 V 500 m diy QSCYV Quasi static C V B MARKER ON MARKER MTN MAX INTER POLATE OFF DIRECT MARKER CURSOR MARKER SKTP AUTO ANALY STS CURSOR OFF MARKER CURSOR LINE SCALTNG 8 DISPLAY SETUP OSCV SETUP TIMING SETUP CONST SETUP NOTE QSCV 3 1 V 3 1 V Agilent 4155C 4156C 5 4 25 Quasi static C V
387. SETUP DATA VAR DATA VAR ON OFF SELECT CURSOR Agilent 4155C 4156C 5 6 19 2 GRAPH LIST GRAPHICS SHORT 93Aug09 06 16PM ao 3_g72000 TO CURSOR 3 572000V 289 23uA MARIKER mA EE 2 00 Intrppt 1 421 I Grad 541 61u GRAD MOPE OFF 200u div TANGENT MCDE OFF REGRESS MoDE OFF a 1ntrcpt 2 B8976 0 00 SELECT 0 000 w y 1 00 div 10 00 bd MARKER SCALING DISPLAY SwEEP ITIMINe coNsT CURSOR SETUP SETUP SETUP SETUP UGT02004 6 20 Agilent 4155C 4156C 5
388. TFESS CHANNEL DEF INITION 94JANo1 q1 30PM smu CHANNELS SMJ PG SELECTOR MEASUFE STFESS MEASURE STRESS LNIT NAME MCDE NAME FGTN SMO PeU SMJ1 MP V 2 ISMUJ G1 SMJ2 MP v2 3 GPEN oFEN PPEN SMJ3 MP v3 4loPEN oFEN SMJ4 MP SMJ5 MP SMJe MP ysSJ vsu2 PeJ1 VPULSE SYNC TRIGGER SETUP PGU2 VPULSE SYNC DISABLE GNDU ROLARITY POSITIVE PeU NNEET STRESS ISTHESS INEXT EE SETUP IEoHcE PAGE VT 8 24 Agilent 4155C 4156C 5 4155C 4156C Agilent E5250A E52524 E5250A Table 8 3 E5250A Figure 8 6
389. UNIT VNAME INAME MODE FCTN SMU1 VB TB COMMON CONST SMU2 VG IG I CONST SMU1 SMU2 DELETE ROW CHANNETLS CHANNEL DEFTNTTTON 00DEC07 02 18PM MEASUREMENT MODE SAMPLING CHANNELS MEASURE Y SERIES UNIT SMU1 MP VNAME INAME MODE FCTN RESISTANCE 0 ohm CHANNEL ASSIGN COMMON G CONST SMDU2 MP CONST SMDU3 MP SMU4 MP SMDU5 HP VS01 Vs02 VMU1 0 ohm DISCHARGE ON VMU2 PGU1 PGU2 GNDU DELETE ROW VB Enter Vo ltage Name max 6 chars B CHANNEL USER USER NEXT DEF FCTN VAR PAGE 3 42 Agilent 4155C 4156C 5 4 MEASURE SAMPLING SETUP 1 Meas MEASURE SA F 0 1 50
390. a When power complance is set b When power complance js not set SMU 0 V 4 7 28 Agilent 4155C 4156C 5 se INTERVAL 8 gt 2 ms INTERVAL 8 lt 2 ms
391. able 3 1 VAR1 VART VAR2 CONST STANDBY V I COM V I SMU n a n a n a e e ia e e VSU n a n a n a e e e VMU e GNDU e PGU a b a SMU b PGU n a e Agilent 4155C 4156C 5 3 3 V
392. i static C V 4 3 4 3 4 3 4 4 4 6 4 8 4 10 QSCYV 4 11 4 12 PGU 4 12 4 13 4 14 4 15 4 16 4 17 a 4 18 1 4 18 2 DUT 4 18 3 4 19 4 4 20 5 4 22 6 4 24 Agilent 4155C 4156C 5 3 7 9 4 25 SE ST 4 26 4 28 5 3 RM 5 4 RI RE RA CN SE 5 6
393. ing Sampling 2 Interval Interval Interval 3 5 Trigger Trigger Trigger Trigger Trigger Total Sampling Time TOTAL SAMP TIME TOTAL SAMP TTME is one of the sop condition Starts Sampling Stops Sampling 7 Agilent 4155C 4156C 5 3 5 1 Starts Sa pling 2 Ho1d Time 3 SMU VMU Trigger 4 5 1 6 Case 1 Case 2 4 Sampling Interva1 Trigger
394. iv 0 00 1 9 000 vD V 1 00 div 10 00 UGTA2NS I Interpolate ON ON ON 2 6 42 Agilent 4155C 4156C 5 LINE1 LINEB2 DISABLE 1 0 0
395. lt lt 100 nA 10 pA 200 V 1 HuA 0 SS1uA 100 pA 200 V 10 nA OI S10 nA 1nA 200 V 100 nA 0 SI lt 100 uA 10 nA 200 V 1 mA 0 lt lt 1 mA 100 nA 200 V 10 mA 0 lt S10 mA 1 HuA 200 V 100 mA 0 lt lt 20 mA 10 LA 200 V 50 mA lt lt 100 mA 10 uA 100 V 1A 0 3I lt 50 mA 100 nA 200 V 50 mA lt lt 125 mA 100 LA 100 V 125 mA lt lt 500 mA 100 LA 40 V 500 mA lt 1A 100 LA 20 V Agilent 4155C 4156C 5 7 13 Table 7 12 HPSMU 9 yi 2 1PLC 0 a a lnA 0 lt lt 1 15 nA 10 fA 10 fA 100 fA 1pA 10 nA OE S11 5 nA 10 fA 100 fA lpA 10 pA 100 nA 0 SI lt 115 nA 100 fA 1pA 10 pA 100 pA 1uA 0 SI lt 1 15 nA 1pA 10 pA 100 pA 1 nA 10 uA 0 SI lt 11 5 LA 10 pA 100 pA 1nA 10 nA 100 LA 0 lt S11S uA 100 pA 1nA 10 nA 100 nA 1 mA 0 SI lt 1 15 mA 1 nA 10 nA 100 nA 1 HuA 10 mA 0 SI S11 5 mA 10 nA 100 nA 1 LA 10 uA 100 mA 0 lt I lt 50 mA 100nA 1pA 10 nA 100 nA 50 mA lt lt 115 mA 100 nA 1 LA 10 nA 100 LA 1A 0 slS1A 1 HuA 10 uA 100 LA 1 mA a 0
396. op Table 7 26 1 ZERO CANCEL 0 QSCV 70 7 42 Agilent 4155C 4156C 5 QSCV Table 7 26 0
397. sa 4 O 9 V Output Switch AN Grounded Moge V COMMON UGDO2007 NOTE DUT DUT VMU 1 SMU DUT SMU DUT 1pA SMU SMU VMU SE MO RS 7 18 Agilent 4155C 4156C 5 Table 7 13 VMU aa 640 us 80 us C IPLC 1 92 ms 560 us 2V 2uV 20 nuV 200 nV 2mV 20 V 20 uv 200 nuV 2 mV 20 mV 0 2 V 0 2nV 2nV 20 nV 200 nV 2 V 2 nuV 20 uV 200 nV 2 mV a 20 V 2V 200 pV c 480 ps b
398. tatic C V Quasi static C V Agilent 4155C 4156C Agilent 415SC 4136C Agilent 41501A B Agilent 4155C 4156C Agilent 4155C 4156C Agilent 4155C 4156C 5 7 Agilent 4155C 4156C 5 1 rr 1 3
399. top Append 3 40 Agilent 4155C 4156C 5 nl HT 4155C 4156C Charge Vo1tage 3 gt SMO2 ee Time 4155C 4156C 16442A 1 2 DUT

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