マスフローコントローラ Aera ® FC-R7700シリーズ （862KB ）
Contents
1. FC R7700 CD MFC Aera MFC FC R7700 22. 2 5 0 5 10 sccm 5 slm N O0 6 20 slm N C 6 50 slm 35 200 slm 2 0 100 2 SEMI E17 91 3 0100 2 Typical SEMI E17 91 1 2 0 5 0 2 0 5 1 1x10 Pa m sec He 2100 2 49 275 kPaD 98 275 kPaD 69 275 kPaD 145 275 kPa 490 kPaG 981 kPaG 5 45 C NO NO 1 F S 30SLM
3. 2013 5 Tel 03 5765 4076 Fax 03 5765 8312 Email hmcc hitachi metals Co jp VEGETABLE OIL INK HL K269 B 2013 5 T FT2
4. 510 8102 210 059 377 3040 FAX 059 377 4575 2013 5 059 377 3132 FAX 059 377 4575 980 0021 6 35 0 Co SS UE 732 0827 2 16 Aerae 082 535 1711 FAX 082 535 1713 Swageloke VCO VCR Swagelok Company Corporation
5. 1 2 F S 150SLM 5 100 3 F S 150SLM 195 295kPa SUS316 L PTFE 1 4 VCR 1 4 VCO 1 4 Swagelok 1 4 VCR 3 8 VCR 1 0 kg DC 15 V 2 25 mA DC 15 V 2 180 mA 2 8 kg DC 15 V 2 25 mA DC 15 V 2 200 mA 3 5 W max RoHS RoHS 10 sccm 5 slm 6 50 slm 51 200 slm Aera 9 D 1 4 VCR 3 8 VCRY 782x 1 4 VCO 3 8 VCO 782x 1 4 Swagelok 3 8 Swagelok 782x
6. sccm slm Ne 64 se i RA 200 FC R 7700 D 200 sccm MFC RoHS 9 D 1 4 VCR N 200 sccm 12 7 mm 0 5 12 7 mm 0 5 15 0 mm 0 6 76 0 mm 3 0 78 5 mm 3 09 133 5 mm 5 3 1 4 VCR fittings 183 8 mm 7 2 3 8 VCR fittings 192 3 mm 7 6 18 3 mm 0 72 18 3 mm 0 72 25 5 mm 1 0 69 0 mm 2 7 69 0 mm 2 7 101 5 mm 4 0 119 0 mm 4 7 119 0 mm 4 7 151 0 mm 4 0 125 0 mm 4 92 125 0 mm 4 92 152 6 mm 6 0 32 0 mm 1 3 32 0 mm 1 3 37 5 mm 1 5 5 0 mm 0 2 3 5 mm 0 14 15 0 mm 0 6 124 0 mm 4 9 124 0 mm 4 9 http www hitachi metals co jp EE 3 105 8614 2 1 N 03 5765 4000 FAX 03 5765 8311
7. HITACHI Materials Maglc p VCHR VCO Swagelok p 10sccm 200sIm 1x107Pa m3 sec He Aera FC R7700 FPD CVD PVD FC R7700
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