- 株式会社ユーアイ
Contents
1. RS12 1051 RS13 1116 0A RS11 2038 A y RS11 1022 RS11 1021 Ay RS13 2207 0A 2 RS13 2208 0A RS11 2043 0A RS13 1002 AVy RS13 3030 RS11 1186 RS13 3017 0A 2014 6 5 SH 450 ULVAC XT07 0489BB 2008 le 6in x3 DCx1 RFx1 500W CRYO RP MH63 5260 ny2 E 5in x20in 3 DC SIH 4545 ULVAC MH63 0222 1988 2UP2. 2014 6 5 RS10 8089 0A 2 2063 ALCATEL 284112 RS04 8052 7 l2oioo1 334781 RS10 8092 0A 7 GLD 1o0 ULVAC 72971 RS10 8093 0A 7 GLD 1oo ULVAC 72975 RS13 8063 0A D 330DK ULVAG A01A 00558 253L m RS13 8065 0A D 330DK ULVAC A01A 00729 253L m RS13 8066 0A D 330DK ULVAG A01A 00903 253L m 253L m RS13 2299 0A D 330DK ULVAC A01A 05000 ALH9 Ar RS13 2324 0A D 330DK ULVAC A01B 032571 253L m
3. lt ULVACC 2014 6 5 RS04 8067 25 2 1Omx2 ULVAC RS13 8043 0A 25 4 Cio_ lulVAo jcBi439 RS13 8044 0A 251 e1O lulVAC lcMio024 RS13 8040 0A 2 1 C15R ulVAo lpEi237 RS13 8041 0A 251 o15R lulVAC lpEt330 _ RS13 8112 0A 221 C15R lulVAo lpEi4ot _ RS13 8115 0A 251 lot5V lOlVAC H RS10 8103 0A 2 1 C80 _ UGCl RS13 8038 0A 251 lcsoMT lulvAC lce781 RS13 8039 0A 2 1 C30MT luLVAc loc19o0 le le
4. 2014 6 5 1KW 27 12MHz RS06 2704 RF RFS 2712K M BOX MBX 2712A RS07 3026 IRF RFS 30CB ULVAC ULVAC 306001 1 3kW 13 56MHz M BOX 5KW 13 56MHz MBX 1350U AC POW RFS POW IN AMC 4m AMC AMC 207004 306030 AMC RFS 4m CONT MBX CONT AMC 8m POW OUT AMC POW IN MBX 8m VDC MBX VDC IN VDC 12m AC100 MBX 3m 50c Im RS12 8048 RFS 1350U ULVAC 5KW 13 56MHz MBX 50EA 1 CONT RFP CONT RFS 4m CONT MBX CONT AMC 8m POW OUT AMC POW IN MBX 12m VPP IN VPP MBX RS12 1294 RFS 50GC ULVAC 200003 300004 CD Power Control Monitor VDC 8m MBX 8m 8m CONT 4m RS13 2154 RF RFS 13200F ULVAG 210006 20KW 13 56MHz 8m RS13 2153 RFS 27200L ULVAC 208005 20kW27 12MHz 8m RS13 2151 RFS 27400F IULVAC _ 210001 40kW 27 12MHz
5. lt ULVAC gt RS10 2807 CERAUS Z 1000 ULVAC ME00 7820 RS10 2808 2 gt em Hoa RS13 1114 0A A gt X 1000 ULVAG ME98 1005 IBS 6000 ULVAC MB04 1012 2004 2 MLX 3000N ULVAC ME00 5016 ULVAC ME99 1017 a ULVAC ME96 1064 ULVAC MA08 3536 2010 ULVAC RK92 1009 1993 RS12 1062 2 RS12 1061 2 y gt m NM RS12 1204 RS12 1227 RS12 1118 RS13 3127 0A RS13 1115 0A RS13 2209 0A Xx x Fa m S FF m RS13 3124 0A wm NS ww m 2014 6 5 Multi Chamber 2T p 6in SP1 Metal SP2 Metal infrared Lamp GPCS 300GT TMP I CryoTr
6. NW50 RIE NW50 RIE NW50 RIE NW50 RIE 3000L min NW50 RIE 1300L min 2 7Pa NW50 2014 6 5 1300L min 2 7Pa NW50 3000L min RS12 1126 A30W EBARA CA0200 CPA 3000L min RS12 1127 A30W EBARA C40290 EA 3000L min RS12 1128 A30W EBARA C70771 GE4D2E ss 3000L min RS12 1129 A30W EBARA C80285 CR RS12 1130 A30W EBARA CA0191 CE RS12 1134 RD90 1 0210673 RS12 1139 RD90 1 01B0410 2002 RS12 1325 SD60V II 1000 min RS12 1326 SD60V I 1000 min RS12 1327 1 SDe0V
7. 24 gt RS12 1027 0A 4 2 i00 3 DC RP 5 A AC100V 50 60Hz 1KVA RS13 8022 0A E 102 6127 03 e 80mm RP 501 min RS12 2033 0A X ECR 300E ANELVA EVP 19881 Multi Chamber RS11 1185 ENDURA AMAT 3843 E No 6520 p 8in Etchx1 SPx3 9F RS11 1201 HSR 512A 1M9062 1994 lp 4in 3 RF 3 ia Fmy2 RS12 1228 L 350S C ANELVA EVP 30577 1996 5 DCg RF2
8. 30 RS09 1270 MDX L8M RS09 1169 MODULE MFG is pon suerrvcewenn AMAT RS09 1275 0 D Body EE RSo9 1218 loDBody EE RS09 1276 0 D Body RS09 1219 0 D Lid RS09 1274 O D Lid RS09 1039 PC1 MATCH ASSY 0010 20441 RS09 1050 PCB ASSEMBLY DIGITAL I 0 AMAT RS09 1052 PCB ASSEMBLY DIGITAL I 0 AMAT EE RS09 1273 ODid EE EE AMAT EE RS09 1051 PCB ASSEMBLY DIGITAL I O IAMAT RS09 1053 PCB ASSEMBLY DIGTAL 1I O IAMAT _ RS09 1054 PCB ASSEMBLY DIGITAL IT O _ AMAT _ RS09 1059 lpcB AssEMBLY TG GAUGE MoNiroR AMAT RS09 1079 pog ssgweuy ENGopgn mrEmeo MAT RS09 1060 pog ssgweuy recuee womoR MMAT RS09 1061 PCB ASSY Al MUX AMAT RS09 1055 PCB ASSYANALOG INPUT _ AMAT _ RS09 1078 PcB ASSY SBC 1 0 BREAKOUT AMAT _ Rseez7 jean Reog Tz6 power STANDARD EhEerRoNGS Ne ems sspsvs
9. 36 gt 0 RS12 1404 FT IR_ Nicolet4700 Thermo IAFZ0400155 X RS04 8036 0A 4p2 z247186 RS04 8037 0A 4 Xa 7 lst47ea29 RS04 8096 0A A 2 SS 7602 20Mhz lWATSU 5227789 RS04 8097 0A 4 A 7 sS 7602 20Mh2HWATSU sz27772 INM 0402 FIB ITS3700 9 F4l897834 4 TG8120 zroo6809 EE R RS13 1040 0A TOF SIMS TFS 2 1 7 1997
10. lt gt RS11 1202 RS13 2181 RS13 2186 RS13 2188 0A RS11 8095 x SS ICF152 STP 300 1084A 1997 ee VG250 NW40 VG100 NW25 IO CVD VG100 NW25 liCF m ELF1003M S N GZS160 RS08 8008 0A TMP 1003 CZM045 RS09 1475 TMP 1O03LM RS09 1477 TMP 1003LM RS10 8002 0A 2 TMP 1003LM pzMo31 RS10 8003
11. RS13 2311 0A VAC RS13 2312 0A ULVAC RS13 2313 0A ULVAC Pa RS13 2285 0A ULVAC 33621 WP 4m C2 Pa Torr RS13 2278 0A ULVAC 43500 WPB 4m 10m RS13 2300 0A ULVAC 19897 20m WP01 Pa torr A 9 20m WP01 Pa torr RS13 2301 0A ULVAC 49714 39 RS13 2302 0A ULVAC 19899 30m WP01 Pa A a 20m
12. 2014 6 5 gt RS13 1030 0A lr esoiriaswpA7 s 2o06 HORIBA OL PSO1 1A amp SMPA7 5 2100C RS11 1169 Transpector 2 lroTr2sBoz800 RS11 1170 ITranspecter 2 70003237 Tanspeetor 2 911 242 G1U H100M RS13 1143 0A TRANSPECTOR XPR XPR TR 10 INFICON H8TR15B00 gt RS11 2208 He 2 22 HELIOT 302s ULVAC 3198 gt gt R RS12 1087 WM 2500 TOPCON 00110021 2001 RS12 1088 WM 2500 TOPCON Oo110022 2001 Smif200mm 0 079h m RS12 1396 WM 300FOUP TOPCON 00350074 200 300mm RS13 3164 0A 9 WM3000 90890007 1999 2014 2 RS13 8018 0A ESM 1 ULVAC 1
13. a 12CH 35m 30m 25m 25m 25m 25m 25m 30m 35m 30m 25m 30m RO ES AO LMODO2 ei ea 0 12CH 35m 30m 25m 25m 25m 25m 25m 30m 35m 30m 25m 30m RS13 2231 0A EM 301 UEVAS RS11 2102 EM 301 8cH ULvAc PH1508 MAXe RS11 2103 _ lEM so1 scH luLvAc PH1509 MAXe RS11 2189 EM 301 8cH ULvAc PH7301 MAXe RS13 1083 0A GP 1000 ULVAC 4049 everzw RS13 1085 0A GP 1000 we fo everzw RS13 1087 0A E leP iooo ULVAC 4047 VO RS13 1088 0A eP iooo ULVAG 14683 2000 I 0 RS13 1089 0A E leP iooo ULVAG 9174 VO RS13 2310 0A GP 1000G ULVAC
14. CP RP mm x mm x m m 8 MN I ow mm S mm x oo a oo oo ww ULVAC ME58 5039 ULVAC MH59 0112 ULVAC ME58 5058 1984 500 x 600H EGL 206M CRYO RP 500 x 600H EG CRYO RP 500x600H 3 PD 050C L 35M 2 02 x 3 CRTM 9000 100 150 2 Au ow CP RP p 1000x1000L DP RP 3 JPD 075C LR90 UTM 3302F
15. 2006 29 AUTO MANUAL AL In Sn JRA 050 50mmx75mm 5 Torr8 C30V RP D 650 PMB 003C E B EGL 35M HP1010SG 1 MFCAr 100sccm CRTM 6000 U 12HSP C30MT PMB 003C D 950DK 0 lt 10rpm W x4 x6 K EBS 10A ULVAC XJ99 70010A EBX 1000 ULVAC MA00 1060 C30 HPS 1000F mm mm mn x ULVAC SE58 1359 4 ULVAC ME90 1073 o 600Wx800H EG CRYO RP L 35M p 650Wx800H EGL 35M 10kW mm w
16. OH 28000L m VG150 CVD SiH4 PH3 B2H6 RS13 2034 RS13 2036 3 2037 RS13 2038 RS13 2039 RS13 2040 RS13 2041 RS13 2042 3 2043 RS13 2044 RS13 2045 3 2046 3 2047 3 2048 RS13 2172 RS13 2173 RS 32 RS RS13 2134 RS13 2135 3 2 1190 0A IECO SHOCK 2 1191 0A IECO SHOCK 3 2287 0A S09 1478 S09 1480 2 1164 0A QDP80 2 1165 0A QDP80 RS08 8029 RS08 8030 36 S12 RS a a ULVAC ULVAC ULVAC R 1800 NK03 2991 1 R 1800 CK04 6031 2 R 1800 NK03 2991 4 R 1800 A1034 10409 R 1800 NK03 2990 4 R 1800 YK04 0027 2 R 1800 NK03 2921 1 R 1800 NK03 2990 1 R 1800 NK03 2991 2 R 1800 NK03 2921 2 R 1800 NK03 2923 1 R 1800 YK04
17. 2014 6 5 lt ULVAC gt RS07 2852 4 242 2m vo wlULVAC 70 x 430 ULVAC VAP 200T ULVAC JI an RS11 1015 VAP 200 ULVAC JIS 8in ULVAC JIS in RS11 1017 IVAP 200T luLVAc JIS 8in 7 VAP 200T ULVAC MNO3 0347 8 JIS 8in RS12 1433 VAP 200T ULVAC MNO3 0347 3 JIS 8in VAP 200T ULVAC MNO3 0347 4 JIS 8in VAP 200T ULVAC MN03 0347 5 JIS 8in VAP 250T ULVAC O00098 _ VAP 250T ULVAC O00102 JIS 10n 2 VAP 250T ULVAC 000103
18. Ar Air RS12 1251 1100L S VG150 VG40 A43A 01507 2000 200V 1200W Ar Air RS12 1256 1 3 oo gt tr lt gt a 1100L S VG150 VG40 RS13 2320 0A A43A 00985 lt gt RS13 1019 0A PMB 001CM 70 PMB 012CM 2 1443 PMB 012CM ULVAG AiilA 03226 1980 Lm 3 16700L m VG100 A ULVAC A17A 01230 16700L m VG100 RS09 1419 RC 012A ULVAC 16700L m VG100 12 PRC 012A ULVAG A69A 01742 16700L m VG100 14 ULVAC A69A 01732 16700LZm VG100 17 ULVAC A69A 01172 16700L m VG100 18 Pevw lve VG100
19. csioooxi Seoo0xi RS12 1048 PURIC MX IT LS MLD2173321 2004 ULVAC ZX 1000 38
20. w 200mm 2 4 02 CF4 Ar CHF3 C4F8 SF8 Antenna 1kW 13 56MHz BIAS 300W 12 5MHz ny2 NLD Deep Etch Antenna 1kW Bias 500W 13 56MHz my NLD Deep Etch 2014 6 5 Deep Etch Hz Hz 2014 6 5 esa ew i mans me MAX Energy 200KeV RS07 2983 IMX 3500 ULVAC MI98 0001 4in 1 30 200KeV lt gt RS04 8081 ACCEL DECEL P S MDL 2 10 52609 RS04 8015 0A ACCEL DECEL Pp S MpL 2710 ls5t70 RS04 8084 ARC FIL P S Nes ppeysgE 1108388 4 RS04 8092 CPU BOX _
21. RS11 3129 PRC 012A ULVAG A68A 01022 2004 16700L m VG100 RS11 3130 PRC 012A ULVAC A68A 00960 2004 OD oe RS11 8069 PRC 012A ULVAC A69A 02252 16700L m VG100 RS13 3083 PRC 012A ULVAG A69A 02711 16700L m VG 100 RS13 3084 PRC 012A ULVAC A69A 02714 16700L m VG 100 RS13 3085 PRC 012A ULVAG A69A 02718 16700L m VG 100 RS13 3086 PRC 012A ULVAC A69A 02723 16700L m VG 100 RS11 2064 PRC 012AS ULVAG 16700L m VG100 RS11 2065 PRC 012AS ULVAC 16700L m VG100 RS12 1223 EH500 EDWARDS oo6700640
22. XTM 2 INFICON CA 1111 ANELVA RS13 3016 VEP 1000 ULVAG MF06 1008 RS13 8023 0A RP gt RS10 8101 0AIEB EGK 3 ULVAC RS09 1309 EB eu 35 ULVAG RS09 1576 EB HEeo 40M ULVAC 1 RS11 8162 EB EGK 3C ULVAC 183100264 RS11 8163 EB EGK 3C ULVAC 183100262 _ RS11 8164 EB EGL 35 ULVAC 177100197 RS11 2558 us he 579883 ey M N 3151900 005A AE RS11 2466 24 SS O CRTS 12NS CRTS 12NS CRTS 12NS CRTS 12NS CRTS 12NS TDU 08F TDU 08F TDU 08F ULVAC 579882 eo M N 3151900 005A AE luL
23. 16250 JA28 VAT VF300 RS11 2072 7 16250 JA28 VAT VF300 RS11 2070 16250 JA28 VAT VF300 16250 JA28 VAT VF300 RS11 2069 16250 JA28 VAT VF300 16250 JA28 VAT VF300 RS11 1160 2 48240 GEO1 VAT IRC 2 7 ICF152 RS11 1158 48244 CEO1 VAT CR ICF203 RS11 2229 RS07 2961 RS11 2223 RS11 2224 RS 1 8017 RS07 2931 RS11 2077 1 2078 S11 2172 1 2173 ES ot 4 22 1 9221 VAT A 249751 Zi LL
24. E m RS13 8027 0A RS07 2652 140021FRC 3kw RS11 2268 KYOSAN RS11 2269 KYOSAN RS09 1042 RF RS09 1152 RS13 8106 0A KYOSAN 0103037 RS11 2266 KYOSAN 1kw RS11 2267 KYOSAN 1kw RS13 8108 0A RFK50Z SW1 KYOSAN o1o4099 20 DC gt RS13 1135 0A DC HPK I5ZI ULVAC WA4077 HPK 15ZI IULVAC WA1733 MDL 1001A ULVAG C356777 10kw RS13 3088 DC MDL 1001A UOLVAC C440625 10kw DC IMDL 1001A ULVAC C442141 10kw
25. 2 850 x 900 3 SIV 850 ULVAC MA03 1012 2006 2 DC CRYO RP SE 850 x 900 3 SIV 850 ULVAC MA06 1006 2006 2 RF CRYO RP AY x4 x2 x1 150 mm 2 200mm9 TMP DRY P2 P4 P5 300 x 3 P3p 300 x1 Pt DC 4KW 6KW RF 2KW m ho 4 MA08 3623 2010 ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC AYy 2 x6 x1 150 mm 2 200mm9 TMP DRY P2 P6w 300 x 5 P7 300
26. M 500FW LVAC M 1001 ULVAC M 1001 ULVAC M 2300 ULVAC M 2300 ULVAC M 2300 ULVAC UTM 2300FW D3HULVAC M 2300 LVAC M 2300 LVAC M 2300 LVAC M 2300 LVAC M 2300 LVAC LVAC M 2300 LVAC M 2300 UTM 2300FWD3B 1IULVAC UTM 3301FW D1 LVAC ULVAC UTM 3301FW D1 ULVAC x UFC 203 NW40 CVD 20m CVD 20m VD 20m CVD 20m CVD 20m CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 CVD
27. RS12 1208 RS13 1152 0A RS12 1312 RS09 2186 CDE 80N 1WFX0013 CE 3001 ULVAC MA03 1008 CSE 1000 RE92 1023 CSE 1110 MH58 0012 CSE 1210 EA 506 DEM 451 DES 320E FT1410GA NE 5500 NLD 500 MV03 1022 NLD 570 MA09 1048 NLD 6000 MV99 1003 NLD 800 FF 3 o ULVAC ANELVA EVP 26588 ANELVA EVP 16956 Takaoka TA01140075 ANELVA EVP 35058 ULVAC MV02 5006 0 ULVAC MV97 1003 2004 1987 2001 INE 5500 2000 2005 2 45GHz 1 kW p 200mm ICP Antenna 1kW 13 56MHz TMP DRP APC 150mm ESC CF4 C3F8 SF6 He Ar O2 RIE 500W 13 56MHz o 200mm RIE 500W 13 56MHz
28. SEC E440J STEC 3430014434 coiosecm VoR Re Rata fsc STEC 43572997 H2 10sccm VCR RS09 2672 rAdtD 3 SEC F740MCA1 sTEC 2451023 kw 2SLM_VCR Fujikin Valve 3 Po sto lemma An 2001 8511 2089 ee000 IoO Ha0D RSz 1350 RS12 1371 RS12 1372 RS11 2118 3 SQa x jswc 37 2014 6 5 EIR RS09 2604 RORZE RS13 1113 0A Zi 1000 ULVAC ME97 1088 RS08 8027 UTMF5000 ASYST A06260950 1 RS08 8026 UTV UTV F2620W ASYST 502000000159 RS10 8031 KEYTRAN ULVAC R11862 717 01 JzMqz TB38A KEYTRAN 4ZEX 172 RS10 8029 HH13
29. RS09 1390 222022 ENDORAS500Y2 IAMJ RS09 1544 BLDG TO BLDG Transfer AMAT RS09 1509 CH A MA RS09 1510 CH B IAMAT 1 _ RS09 1527 CRYOPUMPCABLE _ IAMAT _ RS09 1528 CRYO PUMP CABLE IAMAT RS09 1530 CRYO PUMP CABLE AMAT IAMAT RS12 2091 Endura BOX RS12 2077 Hearter ASSY 0010 01465 1 _ IAMAT_ 1 _ RS09 1554 Hose Push Lok 5 8 250PSI IAMAT RS09 1555 Hose Push Lok 5 8 300PSI MA RS09 1552 eseessuos0oip X 780 op 200PslSYNTH AMAT 1 _ RS09 1523 IIONGAUGE CABLE IAMAT _ EE RS09 1524 ION GAUGE CABLE IAMAT RS09 1525 IION GAUGE CABLE MA RS09 1529 ION GAUGE CABLE IAMAT RS09 1534 IMAGNET 0020 20221 1 _ RT EE RS09 1545 MFCAR100sccm AMAT RS09 1546 MFC AR100sccm MA RS09 1541 MFCN2200sccm STEC AMAT RS09 1507 Nallow Load Lock LLA MA 1 RS09 1508 Nallow Load Lock LLB AMAT RS09 1550 PVD HP FT MAT RS09 1551 PVDHPLFT IAMAT RS09 1519 REwoE sYsTEw VpEpo 7 MoNTOR AMAT _ RS09 1520 lnEwore eYsrEw vpEpo MoNro AMAT _ RS09 1521 RonE sYsEv vpepo 7 MoMTroR AMAT _ 5 SS5 0020 21665 AMAT 0020 21665 AMAT 1 0020 23278 AMAT RSO
30. ed Ey 1KW 13 56MHz RA M BOX MBX 1310A 20m 1KW 13 56MHz RS13 2073 M BOX MBX 1310A 20m RS13 2074 RF 00M a 1KW 13 56MHz SRE M BOX MBX 1310A 16m 1KW 13 56MHz RS13 2112 M BOX MBX 1310A 16m 1KW 13 56MHz M BOX MBX 1310A 1KW 13 56MHz M BOX MBX 1310A CO 1KW 13 56MHz M BOX MBX 1310A 4 S 1KW 13 56MHz RS13 2249 0A M BOX MBX 1310A 16m 1KW 13 56MHz RS13 2251 0A IRF M BOX MBX 1310A 16m EE ES 4 FF RS13 2252 0A IRF 2008 ph 1 slslslslslsalsglslslals o Pp Pp Pp Pp Pp pp Pp pp Pp
31. 1000 mn RS12 1328 SD60V 1000Mmn RS12 1329 SD60V I 1000 min lt gt RS10 8088 0A DSR 300 MBS Oko3020102 71799 RS13 8019 0A VPC 250 ZV61 3145 RS13 8020 0A VPC 250 ZV61 3148 A RS13 8021 0A VPC 250 ZV61 3161 RS09 2124 DP40 EH250 EDWARDS 5274A 7270FF XYZ ULVAG CR RS11 1156 VG40 VG40 VG40 VG40 VG40 Ss skrlsrlst F NW40 NW40 NW40 NW40 NW40 10
32. VULH 150CM ULVAC H150178 ULVAC 2002 ULVAC H650189 UFci14 UFC203 150FH OK H 2014 6 5 12 gt RS09 1149 APC 253A 11792 IMKS RS11 2157 RS11 2158 RS13 8013 0A RS09 8004 0A RS09 8005 0A RS10 8026 RS08 8035 0A RS09 2648 RS11 2216 RS11 2217 RS11 2220 RS11 2460 RS13 8009 0A RS13 8012 0A RS13 8010 0A RS13 8011 0A RS10 8024 RS10 8025 RS09 8009 0A RS09 8010 0A RS09 8011 0A RS09 8012 0A RS09 8013 0A RS09 8014 0A RS09 8015 0A RS10 2762 RS09 8016 0A L VAT F 24 60045 1077 RS09 8017 0A L VAT F 24 60045 1078 RS09 8018 0A L VAT F 26 60049 893 RS09 8019 0A
33. 7089 2007 IpcM60 2014 1 ie C V V RS13 3162 0A CVmap 3093A Four Demens 0903313093A 2014 2 lt gt RS13 3013 0A 2 2 x8 7 x4 x4 VCR y2A 0050 21303 AMAT 2 Ar 944AOPLPNCSFSFF VERIEFLO CORP NUPRO 2 WG3NS1RR2 MILLIPORE RS09 1199 0A 2 2014 6 5 RS12 1357 0A tE IUOCHI
34. RS11 8144 BOX IE mA rl RS10 8053 Hi420ATKK 5 IAdme _ RS10 8054 li420ATKKe Adme _ RS10 8052 lf608ATKK 5 IAdme _ RSio ao51 lkumoae wmammsi RS10 8048 lpr30 WUV 6 RS10 8049 lpMc6 _ RS10 8050 PVME 387 3y2 sosowikepe2 9910 10099 RS10 8045 lpMc m _ ULVAC _ RS10 8046 lpwc m luLVAc lpe RS10 8047 lpMC m _ luLVAC _ RS10 8040 lsysrEwrrgoxl Nez RS10 8041 lsYsrEMFBoxl Neo1l RSTo soss coM krwxo wersssml 25 lt 44747 ENDURA gt
35. RS13 8095 0A GP 1SRY A ULVAC 32565 A977 GP 1SRY A ULVAC 32806 49277 ee le ee CH RS13 2284 0A GP 1SSW ULVAC 2603 WP 4m 7 10m OK GP 2ARY ULVAC 000142 4m RS13 8052 0A 5 GP 2ARY ULVAC OO0171 4nm G TRAN BPR2 INPUT DC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V G TRAN BPR2 ULVAC 15810 INPUTDcC24V OUTPUTDC0 10V G TRAN BPR2 ULVAC 15811 INPUTDG24V OUTPUTDG0 10V G TRAN BPR2 ULVAC 15812 INPUTDcC24V OUTPUTDC0 10V G TRAN BPR2 ULVAC 15819 INPUTDG24V OUTPUTDG0 10V G TRAN BPR2 ULVAC 15820 INPUTDcC24V OUTPUTDC0 10V RS08 2158 G TRAN BPR2 ULVAC 3363 SENSOR CABLE 35m G TRAN BPR2 ULVAC 3364 7 SENSOR CABLE 40m RS08 2160 G TRAN BPR2 ULVAC 3365 SENSOR CABLE 40m ES G TRAN BPR2 ULVAC 3366 7 7 SENSOR CABLE 40m RS11 3081
36. 5m 14 6m RS13 3058 2 C30VR ULVAC XC1312G 14 6m 39963hr 2009 ee 9 3m 14 6m RS13 3063 C30VR ULVAG XC1317G 9 6m 40054hr 2009 ee 9 4 7m 22 14 7m RS13 3065 2 C30VR ULVAC XC1320G 14 7m 40045hr 2009 ee NE 13 7m RS13 3066 C30VR ULVAG XC1326G 7 7m 36037hr 2009 He He He RS13 3069 2 C30VR ULVAC XC1332G PP 9 2009 RS11 8135 0A 2 1 RS11 8089 0A 221 Ic3ozRr lulvAc lcsiot3 RS12 1172 2 1 lcs0zZR lulvAc _ lcs1249 RS12 1173 2 1
37. INPUT DC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V G TRAN BPR2 INPUT DC24V OUTPUT DC 0 10V RS11 3096 INPUT DC24V OUTPUT DC 0 10V G TRAN BPR2 INPUT DC24V OUTPUT DC 0 10V RS11 3098 E5 INPUT DC24V OUTPUT DC 0 10V G TRAN BPR2 INPUT DC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V E5 INPUT Dc24V OUTPUT DC 0 10V G TRAN BPR2 INPUT DC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V G TRAN BPR2 INPUT DC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V G TRAN BPR2 INPUT DC24V OUTPUT DC 0 10V INPUT DC24V OUTPUT DC 0 10V RS11 8031 G TRAN_BPR2 ULVAC 04284 7 30M RS11 8073 G TRAN BPR2 ULV
38. x 1 Cu P2 P6 RF 5KW P7 DC 4KW P3 2010 ho MA08 3625 MR 2110E ME58 0161 9 4 2C1E3T e 8in SP1 Metal SP2 Metal SP3 Etch RIE DS MA04 3429 2004 AVy 200p x 1 2 1 5 x5 MA00 1034 5inx18inx3 DC TMP RP pr 8 MA00 1013 Fny2 12in 1 SP RF 3kWx1 TMP DRP 6in NN NS MA07 1009
39. 3000L m VG80 NW40 CVD SiH4 PH3 B2H6 22 3000L m VG80 NW40 CVD SiH4 PH3 B2H6 3000L m VG80 NW40 CVD SiH4 PH3 B2H6 22 3000L m VG80 NW40 CVD SiH4 PH3 B2H6 22 3000L m VG80 NW40 CVD SiH4 PH3 B2H6 3000L m VG80 NW40 CVD SiH4 PH3 B2H6 3000L m VG80 NW40 CVD SiH4 PH3 B2H6 3000L m VG80 NW40 CVD 3000L m VG8O NW40 CVD 3000L m
40. RS11 1184 SPC 530H ANELVA EVP 13998 1 1983 5inx15in 3 DC RF DP 2004 LT RS12 2027 2 SPF 540H EVP 24622 RS13 1155 0A 2 SRL 3320 42012540 2001 RF 2 TMPty lt ULVAC Ceraus gt 2014 6 5 RS09 1483 RYB _ RYB1 _ ULVAC RSo9 1500 Bom UvaAc Rso9 1501 ose vac SG6100S WLvAc SG6100S loLVAC _ PMC I wvAc RS09 1484 GS 1G IULVAC 0 RS12 1154 GS 1G luLVAc_ lP236 _ RS12 1155 GS 1G loLVAo P237 RS12 1156 GS 1G IULvaAc P238 RS12 1157 GS IG loLVAo _ lp247 luLVAC _ lpP248 loLVAo _ lpP249 luLVAc_ lpP271 loLVAo _ 445 luLVAc _ 461 ULVAC P128 1 ULVAC P137 1 ULVAC pi97 RS11 8139 BOX IME m RS11 8140 BOX IE m rk RS11 8141 BOX IME m 7 RS11 8142 BOX IE m rk RS11 8143 BOX IME MA
41. FTI 2300W 20m CVD SiH4 PH3 B2H6 FTI 2300W 20m CVD SiH4 PH3 B2H6 FTI 2300W 20m CVD FTI 2300WD3 TMP 20m CVD SiH4 PH3 B2H6 FT 3301W 20m CVD SiH4 PH3 B2H6 FTI 3301W 20m SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 0 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 FA SH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 FX SHA H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 FA SH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 2 SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2
42. 651cD2SiNJ MKS 2008 gt 651CD2SINJ MKS 016293672 n gt 651CD2SINJ MKS O16293679 gt 651CD2SINJ MKS O16293683 gt 651CD2SINJ MKS O16293684 gt 651CD2SINJ MKS O16293833 IPpR ct cCBcp IMKS Oo0094997 RS09 1421 ky lcMX ii1O lcELERTTY CK gt RS11 2012 MDC 260 MAXTEKJINC 121 _ RS10 8059 0A CRTM 7000 ULVAC 0934 il RS11 1057 H CRTM 7000 ULVAC 0977 RS10 8105 0A CRTM 5000 ULVAC 2014 6 5 16
43. ULVAC SE59 1362 4 CRYO RP p 650Wx800H mm 3 DP RP e 65 7 0Wx800H ULVAC SE56 1351 3 3 x 3 DP RP mm x Ce m m x x m m wr 5 mm x oo ULVAC ULVAC ULVAC ULVAC MH89 7043 MH97 1045 MH97 1044 ME58 0136 1998 01 F 2 p 750Wx900H EGL 35M EGL 406M CRYO 10kW CRYO RP 750Wx750Dx900H 100 1983 500 x 600H
44. RFP 05CA IULVAC 392024 9 2014 6 5 RS10 8078 0A RFP 05CAO ULVAC 388022 RS10 8079 0A RFP 05CAO ULVAC 393022 RS10 8080 0A RFP 05CAO ULVAC 387089 RS10 8081 0A RFP 10CA0 ULVAC O88017P AMC 6D S N 300175 VPP 5D S N 300016 VDC 5D RS13 1020 0A RF RFP 20CA ULVAC 399004 S N 300013 1kw 400KHz M BOX AMV 1000 LF DI 2 S N 1090800003 RF 8m RS13 8026 0A IRF AD TEC 10154000085 M BOX RF CONT 10m RF 1 O 3m RF 2m RF CONT 1kw 400KHz M BOX AMV 1000 LF DI 2 S N 1090800004 RF 8m ES OA M BOXRF CONT 10m RI O 3m 2m RF CONT
45. 1E1T1H2C p 5in Etch 2 SP Metal x2 CRYO RP 7 2C3T1E X x 3 2 140 mm 2 180mm TMP DRY P3 P4 6UV P5 e 300 1 RF 3KW 100 2 12 RS12 1001 ww on ULVAC MH60 0287 1985 RS12 1301 1990 tn ww ow ULVAC ULVAC MH62 5073 ULVAC MH62 0058 ULVAC IMH90 5010 XW05 6514 RS13 2204 9 RS13 1009 ww ow MH61 0502 NH8978 RS12 1405 ow RS13 2210
46. 20 Pe eee 28 2 PRC 012A ULVAC 0 2616 PRC 012A ULVAC 25 PRC 012A ULVAC 27 PRC 012A ULVAC 28 PRC 012A ULVAC o 1 1 olole mime U mi Pp J A69A 01173 16700L m VG100 S A69A 01177 16700L m VG100 2 A69A 01171 16700L m VG100 4 A69A 01749 16700L m VG100 A69A 00815 16700L m VG100 0 1 1 A69A 01750 SL ho 16700L m VG100 A69A 01774 16700L m VG100 2 a A69A 01775 2004 16700L m VG100 2 P I I 1 w w w A69A 01745 2004
47. RS13 8087 0A E leP 1sRY A ULVAG 34569 2A2 RS13 8088 0A eP 1sRYQ ULVAC 28141 2 A RS13 8089 0A leGP 1SRYA ULVAG 32587 A 47 RS13 8090 0A GP 1SRY A ULVAC 27999 A 7 RS13 8091 0A __ leP 1sRY A ULVAC 28058 A 7 RS13 8092 0A leP 1sRY A ULVAC 27998 A RS13 8093 0A leP 1sRY A ULVAG 28129 A 47 RS13 8094 0A GP 1SRY A ULVAC 28128 A 2014 6 5
48. w 200mm RIE 500W 13 56MHz DP PMB RP RE p 150mm RIE e 4 2 Hn RIE R Px2 TMPx1 CtoC ISM TMP DRP APC w 50mm ESC 4 CF4 CI2 SF6 He Ar O2 TMP DRP APC 150mm 2 C4F6 CH2F2 O2 ny2 TMP TMP 2804LMO LN C to CH my2 NLD Antenna 2kW Bias 1kW 13 56M TMP DRP APC o 100mm C4F6 CH2F2 O Antenna 2kW Bias 1kW 13 56M TMP DRP APC p 150mm C4F6 CH2F2 O2
49. 8m 1 0 TC 200 EI 1003M S N CZS 038 EI 303M S N CZR 76 TC 400 IO EI 1003M S N CZS 009 EI 1003M S N DZS 141 EI 1003M S N CZS 139 2014 6 5 AC _ POWER S N CZR 71 lt RS08 8032 RS11 2527 RS11 1256 RS13 2049 RS13 2050 RS13 2051 RS13 2052 RS13 2053 RS13 2054 RS13 2055 RS13 2056 RS13 2105 RS13 2106 RS13 2125 RS13 2126 RS13 2127 RS13 2128 RS13 2129 RS13 2216 0A RS13 2217 0A RS13 2218 0A RS13 2219 0A RS13 2220 0A RS11 8146 RS12 1288
50. ULVAC MCH MLX gt ULVAC 018140116196 ULVAC MCH MLX ULVAC O18110116193 ULVAC MCH MLX RS11 2314 ULVAC 018080116190 ULVAC MCH MLX RS11 2315 5 Pe 6200 ULVAC ULVAC MCH MLX gt RS11 2316 ULVAC 018370116197 ULVAC MCH MLX RS11 2317 Pe 6200 ULVAC ULVAC MCH MLX gt RS11 2318 ULVAC 018070116199 ULVAC MCH MLX ULVAC O18090116191 ULVAC MCH MLX ULVAC o18100116192 ULVAC MCH MLX ULVAC O18120116194 ULVAC MCH MLX PG 6200 ULVAC 018390116199 ULVAC MCH MLX gt RS11 2325 E gt PG 6200 IULVAC 28400419176 _ ULVAc MCH MLX gt RS10 8104 0A GLD6 ULVAC GLD7 GLM2 1 0 14m GLM2 ULVAC 2008 GLM2 IULVAC 2008
51. F 26 60049 894 RS09 8020 0A TE RS09 8021 0A F 26 60317 201 RS09 8023 0A L M RS11 2163 L SMG Nws5 RS11 2164 SMC INwss RS11 2166 L SMC INws5 RS09 8024 0A L SMC RS11 2082 SMC _ Ne5 RS11 2084 SMC Nwes SMC RS09 8006 0A 11210 0159 HVA 95 01971 IiCFo7O 7 RS09 8007 0A 11220 0150x HVA o1 17155 iCFo7O RS11 2226 14036 CE44 AAC1 VAT F14 109375 3 ICF114 14046 CE34 0005 VAT F14 96835 73 IF253 RS11 2222 2 14048 CE34 0005 VAT _ F14 104723 72 ICF306 RS11 2067 16250 JA28 VAT 7 VF300 RS11 2068
52. gt MMO7 RS12 1413 SM78250082 2 RS12 1414 2 SM 09010 SM39050050 ECLIPSE EE ESO 177Y 15 RS11 2381 BreMutA ioraL iMBL gt gt RS11 2382 Bh2MutA iorAL iBL 4 J _ RS09 1406 ERGoLUX _ RS12 1345 MM 22 NIKON 10031 RS12 1347 OPTIPHOTO 150dNIKON 9102843 RS12 1322 S 300oH_ HITACHI SEM RS09 1401 w soouwas w AT lwwo IMMe6o INkoN 2202349 OPTIPHOTO 2 NikoN i53664 2014 6 5
53. TMP 1003LM MZM092 2006 CF RS11 8094 7 ITMP 1003LM FZM214 ICF EI 1003MW S N ZGA109 TMp gE RS13 1011 RS 1 oo RS09 1474 RS13 2 RS13 2 RON J 84 RS13 1123 0A RS13 1124 0A RS08 8010 RS08 8011 RS11 2253 RS11 2254 ir WN la RS13 2180 RS09 1583 RS RS 13 1122 0A Nv TT MEN KEIS SL ST TMP CONT ICF 253 BM03 ITMP 1003LM TMP 202LM M M MP280 M M ICF152 NW25 406134 Cu ICF152 NW25 Cu BLO1 BL02 HZL026 O rng FZL182 O rme
54. VLP U14S JIS 14in RS12 1260 L JIS 14in 2 RS12 1107 0A L VLP U1S ee ge 3 RS12 1108 VLP U1S ULVAC 1989 IS in RS09 8047 0A L VLP U1SW ULVAC O170001 JIS in RS09 8048 0A 2 VLP U1SW ULVAC 0170002 JIS in RS09 8049 0A L VLP U1SW ULVAC O170004 JIS in RS09 8050 0A 2 VLP U1SW ULVAC O170019 JIS in RS09 8051 0A L VLP U1SW ULVAC 0170034 JIS 1in7 RS09 8052 0A N VLP U02 ULVAC 027242 JIS in VLP U2 IULVAC 028933 JIS 2in RS09 8054 0A N VLP U02 ULVAC 028935 JIS in VLP U2 IULVAC 028942 JIS 2in RS09 8056 0A N VLP U02 ULVAC 028955 JIS 2in VLP U2 IULVAC O28995
55. 20m 2 VD 20m CVD 20m CVD 20m CVD 20m CVD 20m VD 20m CVD 20m CVD SiH4 PH3 B2H6 FTI 2300W 20m CVD SiH4 PH3 B2H6 FTI 2300W 20m CVD SiH4 PH3 B2H6 FTI 2300W 20m CVD SiH4 PH3 B2H6 FTI 2300W 20m CVD SiH4 PH3 B2H6 FTI 2300W 20m CVD SiH4 PH3 B2H6
56. JIS 2in RS09 8058 0A 2 VLP U02 ULVAC 029000 JIS 2in RS09 8059 0A L VLP U2 ULVAC 029022 JIS 2in RS09 8060 0A N VLP U02 ULVAC 029065 JIS in JIS in RS09 8061 0A N VLP U2S ULVAC 021536 JIS in RS09 8062 0A y VIP U2S ULVAC 021537 JIS 2in VLP U2S IULVAC 021544 JIS 2in RS09 8064 0A y VLP U2S ULVAC 021551 JIS 2in VLP U2S IULVAC 021552 JIS 2in 7 VLP U2S ULVAC 221041 JI 2in RS12 1106 0A VLP U2S
57. Fc 9853U0 NEC S390195 _ 75 RS04 8021 HV P S PS UL180P5X1222 GLASSMAN Reo eO67 VPS ESuieope22 lsussnwv 980258 R08022 HV PS RS04 8088 HVP S DEC P S Pewwwweiecwwiowy loLAssMAN S N 99993103 SO4 023 FV PZSEXT PIS ain aA TG hea oo a RS04 8089 HV P S EXT P S ywpewwwnm GLASSMAN S N 2900392 5 ENG3PZSE 22 1 GA RS04 8091 Q LENS P S PS UL 15 2G1255 eLAssMAN S N 2930099 le RS04 8026 cPU Box RS04 8027 DOSE DISPLEY RS04 8093 DOSE DISPLEY 60055 53900 029 km 2 luLVAC szeill _ pz 8000 ReedtYe IS9UR6E WAGNET PS LRS04 8057 0A 7 lulvAc 9 lt gt FHT 75S ULVAC MF99 1131 MAX1800 C RP PMB ge lt RS12 1044 TYPE BH par
58. PSH 306C IULVAC U406 017 PSH 306C IULVAC U406 037 PSH 306C IULVAC U406 014 PSH 306C IULVAC U406 027 PSH 306C IULVAC U406 026 PSH 306C IULVAC U406 025 PSH 306C IULVAC U406 039 PSH 306C IULVAC U406 050 PSH 306C IULVAC U406 056 PSH 306C IULVAC U406 058 PSH 306C IULVAC U406 077 PSH 306C IULVAC U406 069 PSH 306C IULVAC U406 071 RS13 8061 0A PSE 700H lt gt 22 2 2 2 2 2 2 2 2 2 2 2 2014 6 5
59. VG100 NW25 2 EI 303M TMP CONT TMP CONT PU1501PC PFEIFFER S N 13882198 IICF 306 NW 40 M N PMP03697 PU1501PC PFEIFFER S N 14072840 CF 306 NW 40 M N PMP03697 VG150 NW25 CVD 2 ITURBOVAc361C3 L_ TMP CONT VG 200 TMP 1003LM T8SN UCI BM05 0301919 BM04 0301918 NE BM02 0109836 TMP CON VG 200 TMP 1003LM T8SN UCI TMP CNOT VG 200 TMP 1003LM T8SN UCI RS13 1125 0A
60. 2008 2014 6 5 CVD SiH4 PH3 B2H6 FT 3301W 20m CVD SiH4 PH3 B2H6 FT 3301W 20m VG350 MgO ECH 150 VG350 FTI 3302W 1m Mg0 ECH 150 VG350 1m MgO ECH 150 FTLF 3302W VG350 1m MgO ECH 150 FTLF 3302W VG350 1m MgO ECH 150 FT 3302W VG350
61. RS12 1122 2014 6 5 lt RF gt RS13 1043 0A RF Os RS13 1044 0A RF gt RS13 1045 0A RF Ng RS13 1046 0A RF Mt RS13 1047 0A IRF RS13 1049 0A IRF 200W 13 56MHz 200W 13 56MHz RF _ON OFF 200W 13 56MHz RS13 1050 0A RF 0 RS13 1101 0A RF OW SE 00W 13 56MHz FS 02CA ULVAC 595168 200W 13 56MHz RS13 1102 0A a 1 Pp lt Ri RS13 1103 0A RS10 8085 0A RFS 05C ULVAC 395006 RS RFS 05C ULVAC 397091 RS09 1302 RFS 1205S ULVAC 500w 1256MHz a RS11 8119 FS 1305A ULVAC 50ow 1250MHz
62. 200W 13 56MHz tc to C ny2 RS11 2405 UNA 2000N ULVAG RE93 1003 600 1000W 2450MHz 50MHz 200W 13 56MHz a RS13 3031 VA 1000 ULVAG 2215 TCA 7822S T 9804525 RS13 3161 lt gt CtoC CVD 156 2 H2 SiH4 N2 B2H6 PH3 CO2 7 ASi RA OE ME AO MA 2 y24x2 2 24x2 RS13 1157 0A 7 CVD CC 200 ULVAC MA04 3507 N2 DLC CVD RS12 1145 CcVD CPD 1210 ULVAC e 200 SiH4 O2 N2 CVD RS 0 2769 CVD DWNT 2 2004 CVD HR 4421 1 1200 CVD PD 240 2 1318 CVD PD 270STA 2 2005 CVD
63. JIS 10in VAP 300WT ULVAC O000186 VG3007 RS11 2148 VAP 300WI ULVAC o0o0183 VG3007 VAP 300WHT ULVAC 000188 VG3007 RS11 2150 VAP 300WL ULVAC O000189 VG3007 VAP 300WI ULVAC O000185 VG3007 RS11 2152 VAP 300WL ULVAC O000184 VG3007 VLH 2 IULVAC 2002 VLH 2 IULVAC 2002 VLHC 3 IULVAC 2002 VLH U1 loLvAo _ ltttf85 VLH U4 ULVAC 625 00400 RS13 2327 0A VLH U4 ULVAC _ 47907 VLP 01 IULVAC 2002 JIS in RS12 1078 X lvp oi IULVAC 2002 JIS in VLP 8R I
64. RS09 1080 5 7 MAT RS09 1093 Kn MAT RS09 1482 7 UDK5i4VN lOLVAC RS09 1485 lupKsi4VN luLVAC RSo9 1094 nskay MAT MV 31 H 2014 6 5 RSo9 1081 IA9 9221 MT 0040 06421 IAMAT 0040 06421 AMAT U 0040 06421 IAMAT _ RSo9 1197 RS09 1198 RSo9 1271 7 RS09 1089 7mt2 5kCCVD MAT RS09 1109 A 8 8 RS09 1120 RS09 1122 RS09 1130 RS09 1132 RS09 1134 WW MAT RS09 1137 a2m dk A RS09 1138 v22 vk MAT RSo9 1139 v22 AMAT RS09 1140 42 a kh p pp
65. RS13 3048 2 1 U12H SP ULVAC 06090833 4100L S 2 IU12H SP ULVAC 0609034 4100L S RS13 3051 2 1 U12H SP ULVAC 0609040 4100L S RS13 3052 2 1 U12H SP ULVAC 0609041 4100L S 2 7 U12H SP ULVAC 0609019 4100L S RS13 3054 2 1 U12H SP ULVAC 08115899 4100L S 2 U12H SP ULVAC 0811540 4100L S RS13 3056 2 1 U12H SP ULVAC 0811542 4100L S RS07 3002 221 U22H ULVAC 17000L S VG550 RS11 2502 2 1 U26H ULVAC 17000LS VG550 RS07 2659 25 4 U 6H ULVAC 0003095D 750L S VG150 RS07 2682 2 1 IU 6H ULVAC 9612407D 750L S VG150 RS08 2099 25 4 U 6H ULVAC 750L S VG150 RS08 2699 221 U 6H ULVAC 750LS VG150 RS09 1023
66. SR 6420 RS RS RS RS ULVAC SAMCO MB03 7002 HN136 716 Yy TEOS CVD 2001 C2F6 ArO2 N2 43006001 C 2003 2002 950xe 257 ALNI 160 1996 2006 q 6inx1 MAX1100 C RP H2 10SLM Co 10SLM 200mm x 600mm 2 MO CVD 400 1000 C TEOS CVD 13 56MHz 300W ny2 Zn MO CVD 400 900C C AMAT Centura gt RS09 1267 15V PWR SUPPLY CEN END REVE _ IAMA
67. EI 1003M CZS 007 2 IE 1003M RS10 8007 0A IEL10083M Kzs059 E202M IAH6O _ RS13 1126 0A EI 303LM CZR 70 RS11 8127 Er303M FZR138 IE303M FZR118 _ E303M IFzRO44 _ IEI D1303M Ii2 EHD303M LKB254 RS13 2191 ITc200 A058678 47 _ n RS13 2193 Tc200 A058678 58 _ gt n 5 RS11 2246 ITcP380 PFEIFFER S N 7007900 M N PMC01490 STP 300 SCU 300 TMP
68. FX SH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 2014 6 5 RS13 2032 RS13 2031 0A RS11 3036 RS11 3037 RS 1 3039 RS 1 3040 RS 1 3041 RS 1 3043 RS11 3044 1 3047 RS13 2222 0A RS13 2223 0A RS13 2225 0A RS11 2535 UTM 3301FW D14 UTM 3301FW D14 D1A D1A D1A UTM 3302 D1A UTM 3302 D1A D1A UTM 3302FH D1 UTM 3302FH D1A UTM 3303FH D3 UTM 3303FH D34 FTF3301W D3 UTM 1200FW ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC ULVAC 3301F0274 3301F0275 3302H0282 3302H0284 3302H0326 3302H0268 3302H0269 3302H0290 3302H0289 3302H0272 3303H 0626 3303H 0701 3301F 0373 2004 2008
69. MCP 1010E ULVAC 1092 RS11 2278 IMCP 1010SX ULVAc 2310 RS11 2279 MCP 1010SX ULVAC 2449 RS11 2369 MCP 1010SX ULVAc 2253 H 21 MM gt RS11 8039 0A SR82 11 N 90 1166000 i1304810901 003 RS11 8082 lsRezrwreo iieeooo i1304810901 002 RS10 8062 0A PHS 075 S 819889 RS09 1579 0A lPsH 040 _ ULVA4C_ PSH 306C IULVAC U406 024 PSH 306C IULVAC U406 0388 PSH 306C IULVAC 410052 001 PSH 306C IULVAC U406 029 PSH 306C IULVAC U406 018 RS13 2080 0A PSH 306C U406 0836 PSH 306C IULVAC U406 021
70. ow GR ULVAC MH63 5223 w a AC Dual 4in x 1 DC x 1 2 5kW CRYO RP gt MKS 2 Ar O2 2004 150mm 1 ULK 06A D 650D 2 A0J2 ny2 4 x3 RF DC 2010 6in x3 DCx1 RFx1 500W CRYO RP 6in3 DC DCS 0402x3 CRYO U 12HSP V30V D 950D GLTL3 GL TL3RY GP 1SRY MFC Ar 1 4in 8
71. 1300mm DP SFD 22 RP KP 3000 012CM JEBG 102UHO 12 x 2 SOCS 1a CRTM 5000SR EL 900x1125H 300 x558H 400H SUS RH 2 THYCO 10 RKC Load 20A M4 2 ISP 250B X 17203hr 10Pa TMU 261 PFEIFFER DCU PFEIFFER 300Hz MR a RS13 2315 0A M43 1HG ANELVA M 012DM ANELVA TG FX0s 30MR
72. 26132 KA21 NW40 2 24128 KA21 NW25 2 26124 KA21 NW16 719543 FC070 ISO Air Normal Close STOP VALVE STOP VALVE NW40 NW40 2014 6 5 A 2014 6 5 gt RS11 2326 IDV 6200 ULVAC 07240212184 ULVAC MCH MLX RS11 2327 E lpv 6200 ULVAC 006760116373 ULVAC MCH MLX RS11 2328 gt pv 6200 ULVAC 006740115388 ULVAC MCH MLX gt 12CH 35m 30m 25m 25m 25m 25m 25m 30m 35m 30m 25m 30m DSISE2AI2 EMS0 AO OO
73. J ee KS SL RS13 2033 R 150 R 180 R 180 R 180 R 180 R 180 R 180 R 180 R 180 R 180 R 180 R 180 R 180 R 180 R 180 R 180 R 180 R 180 R 180 R 180 R 180 R 180 R 1800 Pe ULVAC ULVAC A85A 00657 A85A 00032 A85A 00372 A85A 00422 A85A 00034 A85A 00485 A85A 00100 A85A 00021 A85A 00020 A85A 00887 A85A 00924 A85A 00025 A85A 00362 A85A 00022 A85A 00031 A85A 00023 A85A 01068 A85A 01067 A85A 00878 A85A 00886 A85A 00908 NK03 2923 2 12382 3hr KF25 KF16 DA 241S 00153 240L min Ode 16 xide 12 DVSL 500B 7 2 1800L m VG80 NW40 A96A 00016 2500L m NW50 NW40 2014 6 5 3000L m VG80 NW40 3000L m VG80 NW40 CVD SiH4 PH3 B2H6
74. WP01 Pa torr RS13 2303 0A ULVAC 19896 2 0 10m WP01 Pa torr RS13 2304 0A ULVAC 19894 A 10m WP01 Pa torr RS13 2305 0A ULVAC 19043 a RS13 8076 0A leP 1sRY A ULVAC 32584 A2 RS13 8077 0A GP 1SRYQ ULVAC 28000 A 47 RS13 8078 0A leP 1sRYA ULVAG 28027 2A2 RS13 8079 0A GP 1SRY A ULVAC 32582 A 7 RS13 8080 0A _ leP 1sRYA ULVAC 34570 2A2 7 RS13 8081 0A GP 1SRY A ULVAC 32563 A 7 RS13 8082 0A leP 1sRYQ ULVAC 28059 A RS13 8083 0A leP 1SRYA ULVAG 32583 A 47 RS13 8084 0A GP 1SRY A ULVAC 32586 A 7 RS13 8085 0A __ leP 1sRY A ULVAC 34568 2A2 RS13 8086 0A GP 1SRY A ULVAC 32585 A 7
75. lc3sozR lulvAc lcs1237 RS12 1174 0A 2 1 C30ZR ULVAC CS1235 RS12 1175 0A 251 C30ZR ULVAC CS1199 RS12 1176 0A 2 1 c30ZR ULVAC CS1290 RS11 8035 7 RS11 8108 ITsSN lulVAC lo706582 _ RS11 8109 resn lulvAc loio3767 _ 2300L S MBS a oe mm OE RS13 8029 0A 2 1 U10PU IULVAC 9306800 2300L S RS13 8030 0A 23 4 U10PU IULVAC 9403834 2300L S RS13 8031 0A 25 4 U10PU IULVAC 0509538 2300L S RS10 8096 0A 25 U10PU IULVAC 9308805 2300L S SCV 3030 RS10 8097 0A 25 U10PU IULVAC 9308806 _ 2300L S SCV 3030 RS10 8098 0A 2 1 U10PU ULVAC 9305795 2300L S SCV 3030 RS13 8100 0A 25 4 UioPUs ULVAC O1O1221 2300L S 9 RBH 10 RS07
76. Ar 3000L m TM 3 RS13 2291 0A PKS 030 ULVAC 4 71039 ALn9 Ar 3000L m TM 3 ec 0 nl 200V_60Hz Re CS AL 9 Ar 3000L m TM 3 RS13 2293 0A PKS 030 ULVAC 4 01774 AL9 Ar 3000L m TM 3 RS13 2294 0A PKS 030 ULVAC 4 71028 ALn9 Ar wy 500L m VG 40 RS13 8117 0A VD 301 ULVAC A63A 01713 i 0 3 500L m VG 40 RS13 8118 0A VD 301 ULVAC A63A 02017 i 500L m VG 40 RS13 8122 0A VD 301 ULVAC A63A 01357 ES 4000L m VG80 VG50 RS10 2159 VS 2401 MA Se 2
77. GLM2 IULVAC 2008 GLN7 IULVAC 3215 O G TRAN BMR2 ULVAC 15004 G TRAN BMR2 ULVAC _ 15005 _ G TRAN BMR2 ULVAC 10207 RS11 2334 G 6200 ULVAC 013910115379 ULVAC MCH MLX gt 15 liG 6200 ULVAC 014100116345 OLVAc liG 6200 ULVAG 013880115376 uLVAo liG 6200 ULVAC 15630123381 ULVAC liG 6200 ULVAG 15650123381 ULVAC liG 6200 OLVAC 9267 I
78. 0 gt RS09 1315 3103 THERMOCOUPLE DXZ 0190 35413 RS09 1316 3103 THERMOCOUPLE DXZ 0190 35413 RS09 1317 3 7 lrscM 03522 IAMAT _ RS09 1374 ASSEMBLY BEARING 0010 30583 IAMAT 0010 05256 0150 75202 0010 09490 0020 34131 0150 70018 0020 34726 0020 34727 3250 01007 3250 01007 8860 AMAT 0600 01011 0600 01011 0190 09533 0190 09533 0190 09533 0190 09533 3310 01074 0140 09551 0240 32135 0090 02980 0090 02980 0100 00084 0100 00084 0010 00084 0200 36629 0020 30570 0020 30570 0300 09055 0100 00165 0010 09019 BENKAN RS09 1349 3690 03269 IAMAT_ 1 V RS09 1388 FACEPLATE TEOS DXZ DCVD 0021 00042 RS09 1382 PArE cyspSrmeunovreee ism 9020 30570 IAMAT 2014 6 5 AMAT _ IAMAT IAMAT AMAT AMAT AMAT AMAT AMAT AMAT AMAT ITERMAUNE IAMAT IAMAT AMAT IAMAT AMAT AMAT AMAT ARAN AMAT AMAT AMAT AMAT AMAT AMAT AMAT IAMAT AMAT AMAT AMAT AMAT AMAT AMAT RS09 1365 VALVE PNEU 1 50 OD PORT KALREZ 3870 01455 INc RS09 1366 VALVE PNEU 1 50 OD PORT KALREZ 3870 01455 INC 0 RS09 1360 3870 01245 Arzmy2 RS09 1371 VGA ViDEO CONTROLLER B
79. 8m RS13 2152 RFS 27400F ULVAC 210002 40KW27 12MHz 8m RS11 2212 MGP 1010E ULVAC 1032 AMC 1AR loLVAo 395008 AMC 1AR ULvAC ezo05 AMO5A IOLVAC 388039 AMC 6D VDCt VDC5A S N 395040 AMC 6D VDC VDC5A S N 397001 AMC 6D IULVAC 395000 VDo VDC5A S N395001 4 AMC 6D VDC VDC5A S N 396035 4 RS13 1081 0A AMC 6D IULVAC 395041 VDC VDC5A S N 395025 AMC 6D lOLVAC 398082 Voa99 AMC 6D IULVAC _ 392008 RS13 1111 0A 2 IAMc 6D IOLVAC 392009 AMC6D IlULVAC _ 392018 AMC6D IOLVAC 394000 AMC6D ULVAC _ 395101 AMC6D IOLVAC 397124 NAK5A NAKSA NAK5A RFP 05CA VDC5AIULVAC RS13 1051 0A Mxee we es RS13 1052 0A VAC 1 Si RS13 1053 0A RS13 1054 0A RS13 1055 0A RS13 1056 0A RS13 1105 0A
80. 4000L m VG80 VG50 RS13 2013 VS 2401 ULVAC A36A 05463 Me 4000L m VG80 VG50 RS13 2016 VS 2401 ULVAC A36A 03834 ie a 4000L m VG80 VG50 RS13 2017 VS 2401 ULVAC A36A 03250 I 2014 6 5 lt gt PKS 016 AI 2 4 RS09 1573 47MsAF 27 MX 2 luLVAC RS12 1064 TYPEEFOU ULVAC 2002 RS12 1065 TYPEEFOU ULVAC 2002 100V 200W 4P ITYPE EFOU ULVAC 2002 100V 200W 4
81. 7 W973 e53B 8 200J 2 IMkS loooeo1724 2 7 304 24VF 8G INUuPRO licro 7 PM 5 VAT FABRNO641PM 16PM 0002 153 PM 5 VAT FABRNO641PM 16PM 0002 160 PM 5 VAT FABRNO641PM 16PM 0002 220 nb lpM 5 VAT lio2s32 R1 li2146 JA14 VAT 0 14048 JE44 VAT _ 7 0 14048 JE44 VAT _ 1 800 345 1967 MKS 9928670041 Z 4 L 1 800 345 1967 IMKS 9928670044 zi 7 26328 KA11 0001 VAT O158 KF25 L Air Normal Close L 26328 KA11 0001IVAT 0241 KF25 L Air Normal Close L 26328 KA11 0001 0247 KF25 L Air Normal Close L 26328 KA11 0001 0250 KF25 L Air Normal Close L 26328 KA11 0001 IO0251 kKF25 L Air No
82. AMAT _ RS09 1074 WAFER_LIFT IAMAT RS09 1058 VME STEPPER CONTROLLERT IAMAT _ RS09 1076 WAFER LIFT MA RS09 1083 wAssY LAVP DRVERTESTED REpo1e0 9009 AMAT RS09 1085 WMAGNET DRIVE ASSY IAMAT RS9 1084 yssruwpomnenresreoreeoeeem IMAT RS09 1292 a emawwww RS09 1206 7 wde RS09 1202 Ir74 w R hO tu RS09 1293 gt 9 py7rhBp wwoesassrss RS09 1192 IoD RS09 1193 oD _ RS09 1210 yk EE RSo9 1195 Ikuo RS09 1204 EE CZ EE RS09 1278 RS09 1255 22 y2 EE RS09 1283 ET RS09 1242 zAzAJ 26 ee RS09 1246 y RS09 1226 RS09 1282 X y Assy RSo9 1200 ajykAssy 1 RS09 1236 EET RS09 1237 ETE RS09 1240 caveer mrenrace gol RS09 1239 mem
83. RS09 1339 22H UU lsEc 4400M STEC RS09 1343 SEC 4400M STEC RS13 2002 SEC 400MK3 sTEc Ar 50ScoM RS13 2003 PAC 3E STEC 7 RS09 1333 3155094 0039A AE RS09 1362 SS BNVS1 AB NUPRO RS09 1364 AB31 2N 2 04A OKD 33 lt gt RS12 1029 ULVAC zoo4AAooses4 1oi 2001 NE 5500 2 RS10 2182 RS12 1304 RS12 2047 RS10 2784 RS11 2399 RS13 3128 0A RS10 2789 RS12 1311 RS12 1030 RS11 2028 RS13 2097
84. 6i6540_ IwM 1700 ToPcoN 207013 67 EO 5 JTSEECEE 2 gt RS 2 1368 ASA RS13 3134 0A IFcx501 2 9227 20RT00607 RS13 3135 0A Fcx501 227 20RT0078 RS13 3136 0A IFcx501 9227 420RT0082 RS13 3121 0A 757 2013 12 RSi33019 ya ME2422 UN lsANro _ 2006 RS13 3163 0A FSM 128L Frontier Semid060629 652 1996 2014 2 2 RS11 1036 492 SS W60A AR 4 55700 6949 lt
85. RS13 2325 0A D 330DK ULVAC A01B 02518 253L m RS13 8070 0A D 650DK ULVAC A03A 01292 507L m RS13 8071 0A D 650DK ULVAG A03A 01347 507Lm RS13 8072 0A D 650DK ULVAC A03A 01518 507L m RS13 8073 0A D 650DK ULVAC A03A 01582 507L m 640L m RS13 2295 0A D 650K ULVAC A02A 00686 ALH9 Ar 640L m RS13 2296 0A D 650K ULVAC A02A 00692 ALH9 Ar 640L m RS13 2297 0A D 650K ULVAC A02A 00687 ALH9 Ar 640L m RS13 2298 0A D 650K ULVAC A02A 00151 ALH9 Ar Rs13 2323 0A D 950DK we omows We G2 PF2 1340 m VG50 VG40 RS10 8095 0A EC 803 ULVAC A22A 00393 3000L m TM 3 RS13 2289 0A PKS 030 ULVAC 4 01775 ALn9
86. q2owx65opx800D RS12 1361 tt Uc q2oowxe5opxtg00H RS12 1362 tE IiOCHh q2owxesopxsoop RS12 1363 YE Spuppp pp 5 5 Uc Gq200wxe5opxgoo RS12 1364 tE ch qzoowxesopxsooD RS12 1033 2 FC 770AC Aere 2001 50sccm S N 26F0358 Sicl4 20sccm S N 26F0278 02 50sccm S N 26F0275 RS09 1028 42 5 Fo780C _ Aeee RS09 1029 42 5 Fc780C Aee RS13 8055 0A SEC 400MK3 UL STEC 4357120100 PAC D2 IO CH4 10sccm VCR 02 10sccm VCR Swagelok Venkan Valve Ar 500sccm VCR Swagelok Venkan Valve Ar 500sccm VCR Swagelok Kits Valve se 30000eo TEo_ euzsg2t7o 2007 rioooom VOR Swagelok Kits Valve a etm Te 6468 0 200scem VCR RS11 217 SEo 2400 YK Ar 200sccm VG Swagelok Venkan Valve RS11 2 02 5sccm VCR Swagelok Venkan Valve RS11 2180 0A 42 5 SEC 4400M MK3STEC 291502486 RS11 2 2 SEC 4400M MK3 STEC 291502490 2001 Ar 1000scom VCR Swagelok Venkan Valve RS11 1
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88. 1998 MC RS13 1106 0A 1 RS13 1107 0A es 0 RS13 1108 0A 6 S m 200W RS10 8074 0A IMBX 05EA5 ULVAC _ RS10 8075 0A 224 MBxX 1OEA IULVAC 393007 RS10 8076 0A MBX 10EA IULVAC 394011 RS13 2167 MBX 1310L lulvAc 309010 liw RS09 1297 MBX 50A ULVAC lsw RS13 2163 MBX 13200F ULVAC soaooo lzoww RS13 2162 MBX 27200L ULVAC 310006 2okw 2712MHz RS13 2160 MBX 27400F ULVAC stooo1 4okw 2712MHz RS13 2161 MBX 27400F ULVAC 310002 _ 4okw 2712MHz A th a b RS11 2291 vDC VDC 1A IULVAC 0o86008 RS11 2292 VDc VDC 1A luLVAc _ 9t020 VDCt VDc05A IULVAC 392025 VDC VDc05D IULVAC 395029 VDCt VDC05D IULVAC 396001 PHS 2C SK1 KYOSAN L N WB3569 PHS36VM luLVAc 393005 EX05A IULVAC 397018
89. 1m MgO FTL 3302W ECH 150 VG350 1m MgO ECH 150 FTLF 3302W VG350 1m MgO ECH 150 FTF 3302W CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 20m H
90. 9012074 RS11 8133 0A U8SN ULVAC 0005540 _ lt gt S N RFB220LG i mo EK jem oNBOAD10E ex SAO7999929 ONBGAD1OF HELX SGKe7omhil ONBGAD68 HELX ISNGIO56559 ToreE EX someeeoe leo sss ToreE IELK SAooe52s7 Tore EK socsssoa 1700L S VG200 2VP 1700L S VG200 H2VP lt ULVAC gt gh dh RS13 2179 RS13 2149 RS13 2150 RS13 2226 0A RS13 2227 0A RS13 2228 0A RS13 2229 0A RS13 2142 RS13 2143 RS13 2144 RS13 2145 RS13 2146 RS13 2147 RS13 2148 RS13 2025 RS13 2027 RS13 2029 RS13 2022 RS13 2023 RS13 2024 RS13 2026 RS13 2028 RS13 2021 RS13 2101
91. CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 CVD 2 22 SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 CVD 2 22 SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 CVD 2 22 SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 CVD o 422 SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 MCH 4500 MCH 4500 lo H 3000L min NW50 22 3000L min NW50
92. VG80 NW40 CVD SiH4 PH3 B2H6 22 3000L m VG80 NW40 CVD SiH4 PH3 B2H6 3000L m VG80 NW40 CVD SiH4 PH3 B2H6 22 3000L m VG80 NW40 CVD SiH4 PH3 B2H6 22 3000L m VG80 NW40 CVD SiH4 PH3 B2H6 3000L m VG80 NW40 CVD i 3000L m VG80 NW40 CVD 3000L m VG80 CVD 1 NW40 3000L m VG80 CVD 1 NW40 OH 3000L m VG80 NW40 CVD
93. WA1267 1997 RS09 2804 HPK 15ZI WA2039 WA1270 7 15ZI S1 S N WA6036 2004 Master15kw Slave15kw 30kw RS09 1162 Mpx L6 AE RS13 3101 DC Sparc leV AE C609412 12kw RS13 3102 DC spare leV AE ce09413 12kw RS13 3103 DC Sparc le V AE C609414 12kw RS13 3104 DC spare leV AE ce14572 12kw RS13 3105 2DC Sparc leV AE C614574 12kw RS13 3106 DC Sparc leV AE C614575 12kw RS13 3107 2DC Sparc leV AE C624126 12kw RS13 3108 XDC SsparcleV AE C675118 12kw Ac gt RS04 8017 RS04 8083 0A RS09 1496 MCP 1010E ULVAG EE D1 RS10 8043
94. 0 SiH4 PH3 B2H6 28000L 2 m VG150 SiH4 PH3 B2H6 28000L m VG150 SiH4 PH3 B2H6 28000L m VG150 SiH4 PH3 B2H6 22 28000L m VG150 SiH4 PH3 B2H6 22 28000L 9 m VG150 SiH4 PH3 B2H6 28000L 2 m VG150 SiH4 PH3 B2H6 CVD 28000L m VG150 SiH4 PH3 B2H6 Ro 28000L m VG150 CVD 22 SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 28000L m VG150 CVD SiH4 H2 CH4 CO2 PH3 B2H6 H2 GeH4 H2 PH3 H2 no CVD 2 22 SiH4 H2 CH4
95. 0027 1 R 1800 NK03 2990 3 R 1800 NK03 2991 3 R1800 A85A 03232 R1800 A85A 01233 A128A 10237 A128A 10013 A128A 10233 A128A 10296 A128A 10236 ES10 348 ES10 349 ES10 ES10 972127973 lepP40 _ lrF9 2Z lapp8o EDWARDS CS7G1416HP EDWARDS CS6D1288HP 2014 6 5 28000L m VG150 SiH4 PH3 B2H6 29 CVD 28000L m VG150 SiH4 PH3 B2H6 CVD 28000L m VG150 SiH4 PH3 B2H6 CVD 28000L m VG150 SiH4 PH3 B2H6 2 CVD 28000L m VG150 SiH4 PH3 B2H6 CVD 28000L m VG150 SiH4 PH3 B2H6 CVD 28000L m VG15
96. 024 2024 Hxty Sopra CCD DUV 190 900nm RS13 3165 0A PC 61H 3608 2008 2014 2 7 Me RS12 1340 DAKTAK3030 ULVAC lt EB RS11 8009 EB HPS 1600F ULVAGC 20020014 RS11 8010 EB HPS 1600F ULVAC 20020012 2 RS11 8048 EB HPS 1600F ULVAG 20020011 J BOX RS10 8100 0A IEB EB JST 10F 24 EBG 203UB4H 4 JST 10F JEOL BS101108 74AEZ372 2003 EBG HV025GO2 EBG LV025G01 3m RS10 8060 0A PSG 004S ULVAG 19912145 RS10 8061 0A PSG 004S ULVAC 19912146 RS10 8102 0A PSG 004S ULVAC
97. 2 1 IU 6H ULVAC 750L S VG150 RS09 2785 RS11 2375 2 RS11 8001 U 6H IULVAC 9801623D 750L S VG150 U 6H he eee RS VG150 U 6H IULVAC 750L S VG150 U 6H IOLVAC U eH E 2 U8H IULVAC 9107055 1700L S U8H IULVAC 91070556 1700LS U8H IULVAC 91070558 1700L S U8H IULVAC 9109079 1700L S U8H IULVAC 9109080 1700L S U8H IULVAC o101098D 1700L S RBH 8 IU8H ULVAC 0512140D 1700L S ICF253 MBS 2014 6 5 RS04 8001 U8H U ULVAC 703506 a RS04 8062 2 1 U8H U ULVAC
98. 2727 2 5 U10PUS IULVAC 2300L S VG250 H2VP RS05 2009 0A 2214 2 U12HL ILVAC eosezz792069 RS13 3035 231 4 U12H SP IULVAC 0609014 4100L S RS13 3036 2 1 U12H SP ULVAC 0609015 4100L S RS13 3037 251 4 IU12H SP ULVAC 0609017 4100L S RS13 3038 2 1 U12H SP ULVAC O609018 4100L S 2 U12H SP ULVAC 609016 4100L S RS13 3040 2 1 U12H SP ULVAC 0809025 4100L S 2 U12H SP ULVAC 0609026 4100L S RS13 3042 2 1 U12H SP ULVAC 0609027 4100L S 2 U12H SP ULVAC 0609028 4100L S RS13 3044 2 1 U12H SP ULVAC 0609029 4100L S 2 U12H SP ULVAC 0609030 4100L S RS13 3046 2 1 U12H SP ULVAC 0609031 4100L S 2 U12H SP ULVAC 0609032 4100L S
99. 5074 1 1984 07 RS10 8030 p 9911 10602 02 005 50 RS09 2670 KEYTRANT RS08 8028 MAG6 RS10 8028 MAG7 9911 10601 003 1600 11 RS11 1254 ULSTA 2400 ULvAc WD05 1001 ULVAC 2Y 9 SMD 2400 A mk ULVAC MLX 3000 RS11 2496 L ULVAC 0190 1994 D4 79 RS04 8076 UT0100 MECS 3X0409A01 s RS04 8077 UTO150 MECS 481903A01 a 1600 Lo RS13 1141 0A 000C 10578 RR RS10 2672 nt SPR 801 X0980 X0538Y3742701B lt gt RS04 8056 PC9801S RS04 8014 2 AG HA 1 RS04 8080 lcyeMAce1oooHl4Anv RS04 8012 leyewacesoopszzll4AnV RS04 8013 eyewcc
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101. 9 1539 SPACERINSULATORUFTER _ IAMAT_UU RS09 1540 SPLTRBOX HEHX_ MAT RSo9 1512 STDufter MAT RS09 1526 SYSCONT BULKHEAD CABLE lAMAT RSo9 1547 VAT tOHKt 1 IAMATWWUWU 1 RS09 1548 VAT O HKt IAMAT RSo9 1549 VAT rO HKt AMAT RS09 1513 Wide Chamber MAT WW hb RS09 1536 WSHR INSULATOR LIFTER MA RS09 1537 WSHRINSULATOR LIFTER IAMAT RS09 1538 WSHRINSULATOR IFTER Necxtm221 5 5 5 I RS09 1506 8510 Compressor 8510 lcrr _ 67A9eosee5 RS09 1559 IAMAT _ RS09 1560 AMAT WU RS09 1517 AL AMAT RS09 1518 ny Ti AMAT RS09 1562 TMP AMAT MAT U_UW SUS Wl 1 0 W RS09 1557 AMAT RS09 1558 RS09 1561 lt gt RS09 1262 0A RS11 2495 ec ytFUL
102. A 100W Dc IHAR 1P100 LOL IMATUSADA 52945 1kv 100mA 100W RS13 1028 0A IDC RS13 8008 0A IDC RS11 2286 RS11 8086 PK WA4264 WA4265 IHPK 03Z KYOSAN WA2433 Ar Ar 2014 6 5 IWA2919 WA1382 H 0Z HPK 10Z HPK 15ZI HPK 15ZI IWA1267 WA6036 gt x m lt 2 2 gt gt gt gt gt 2 1 71 15ZI M S N WA2039 1998 7 15ZI S1 S N WA1270 1997 Master15kw Slave15kw 30kw 2 1 71 15ZI M S N WA2919 2000 7 15ZI S1 S N WA1382 2007 Master15kw Slave15kw 30kw 2 1 71 15ZI M S N
103. AC 04285 30M G TRAN BPR2 ULVAC 04286 3oM G TRAN BPR2 ULVAC O4287 3OM RS07 2783 G TRAN SP 1 SPIULVAC 2224 00381 SP1g 18 RS07 2791 G TRAN SP 1 ISP ULVAC 2222 00265 SP1g 18 15m RS07 2792 G TRAN SP 1 ISPIULVAC 00730 00270 RS11 2529 G TRAN SP 1 ISP ULVAC 17827G 01846 SP1g 18 RS11 2303 ULVAC 21310212188 ULVAC MCH MLX gt ULVAC 01 376 9017382 ULVAC MCH MLX gt RS11 2305 ULVAC 283704191737 ULVAC MCH MLX gt ULVAC 2128 0212185 ULVAC MCH MLX gt RS11 2307 ULVAC 2831 1418377 ULVAC MCH MLX gt ULVAC 1813 0116195 ULVAC MCH MLX gt ULVAC 21270212184 ULVAC MCH MLX gt RS11 2310 E5 PG 6200 ULVAC _ ULVAC MCH MLX gt RS11 2311 Pe 6200 ULVAC
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110. RS13 3090 DC IMDL 1001A ULVAC C582925 10kw Dc IMDL 1001A ULVAC C582927 10kw RS13 3092 DC IMDL 1001A ULVAC C586619 1okw Dc IMDL 1001A ULVAC C586620 10kw DC IMDL 1001A ULVAC C609100 10kw DC IMDL 1001A ULVAC C609102 10kw Dc IMDL 1001A uLVAC C609108 10kw Dc IMDL 1001A ULVAC C609110 10kw Dc IMDL 1001A ULVAC C611708 10kw RS13 3099 lpc IMDL 1001A ULVAC C612995 1okw Dc IMDL 1001A ULVAG C612996 10kw RS09 1498 Do IDCR 1502A uLVAC 19922009 1skw RS09 1499 DC DCR 1502A uLVAC 19922010 15kw RS08 2041 DC MDL 15 ULVAC 145679F ZRO 1skw RS10 2721 DC PAK20 18A PAK10 70 KIKUSUI 2 DC 5kw 500V 10A Dc HAR 1N100 LOL IMATUSADA 52933 iky 100m
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112. ULVAC _ ss1799 RS11 2153 VLP U06AW ULVAC 068772 JIS 6in VLP U06AW ULVAC O68771 JIS 6in gt RS11 2073 VLP U06SW R ULVAC 070277 JIS 6in VLP U06SW R ULVAC O70276 JIS 6in VLP U1 ULVAC 010427 JIS in VLP U1 ULVAC O17451 JIS in VLP U1 ULVAC 021755 JIS in VLP U1 ULVAC 021311 JIS ln VLP U1 ULVAC 021702 JIS in VLP U1 1 2 ULVAC 518203 JI 1 1 2in25 VLP U1 1 2 ULVAC 518215 JI 1 172in VLP U1 1 2 ULVAC 518244 JIS 1 1 2in VLP U1 1 2 ULVAC 518246 JIS 1 1 2in VLP U1 1 2 ULVAC 518249 JIS 1 1 2in VLP U1 1 2 ULVAC 510392 JI 1 1 2in VLP U10S IS 10n VLP U10S JIS 10n VLP U14S JIS 14in VLP U14S JIS 14n
113. VACO 1994 RS07 2971 lti8g lulvACc RS13 8017 0A ULVAC MB61 1020 MPS 254 H 2014 6 5 26 lt gt RS12 1080 RS13 2205 RS13 1038 0A RS10 2175 RS13 1003 RS11 3014 RS12 1419 RS12 1214 0A RS11 1194 RS13 3131 2 1224 RS12 1233 2 1428 3 2099 RS05 2068 RS13 2203 RS13 1154 0A RS11 2397 RS13 1153 0A 0A EBH 6 ULVAC MH62 5022 2005 EBS 10A ULVAC ME54 0003 2014 6 5
114. VAG ie9520850 1959 2005 2005 ILVAG 1997 ILVAC 1997 ILVAG 1997 LVAG 28 2014 6 5 lt gt RS10 2204 OPM2001CN C 9802050 1998 C to Cn my2 RS10 2205 OPM2001CN C 9401250 1994 C to cn ny2 RS13 3123 0A lp 1ooo euen rcNotoeies 10271 2000 on C to CH py2 TN Er lt F RS11 1026 TCA3822 T 9608455 1996 c to C py2 RS12 2079 UNA 2000 ULVAC XS06 4604 1992 9 600 1000W 2450MHz 50MHz
115. al Rsoe ios lpRcozs 2 1783 awr _ Reo lpvohg lpm 0 Rsoe ioao jpvptf Gesurs oiozoe4 war Reos io91 jpvpF5 eee oiozo4 war Rsoe iogz jpvptf oioz2064 war Reosiog3 jpvpt5f 2 5 oio2064 AwAr Rsoeio34 jpvpt2f 2 oioz2064 war Reosio95 jpvpt5f 2 2 ooio2o764 wAr Rsoe1o9o REpuegRmox hwwr Rsoe ios RFMATcHPHASEV lezesoiw war Reos rio3 RFATcHPHASEV leoro27A AMAT RS09 1040 RFpowER souRoE lps_iia Awar Rsesise Te EE CE ME Rsoe io smc BOARD losse awr _ Resseilst Rsoeoee lsvaeAsy Rsosrioee lsevaveAsw hr 1 RS09 1025 SOLD STATE POWER GENERATORIogw zc21FsrlEM RS09 1026 SOLD STATE POWER GENERATOR oEM 12A 21041 51 ENN RS09 1288 STD Bode RS09 1027 SOLD STATE POWER GENERATOR EN i2A OAS EN RS09 1203 STD Body RS09 1280 sTD Lid AMAT RS09 1073 SUSCEPTOR LIFT AMAT Ke RS09 1281 sDt EE RS09 1077 SUSCEPTOR LIFT MO RS09 1241 TC GAUGE TcGAUGEBD RS09 1326 THROTTLE VALVE ASSY ETCH 0010 09019 RS09 1046 VME STEPPER CONTROLLERI AMAT _ AMAT 1 _ RS09 1047 VME STEPPER CONTROLLERT IAMAT _ RS09 1057 VME STEPPER CONTROLLERI
116. ap Multi Chamber 2T w 6in SP1 Metal SP2 Metal Infrared Lamp GPCS 300GT TMP CryoTrap Multi Chamber 1E1T 6in Etch ICP SP Metal infrared Lamp GPCS 300GT TMP CryoTrap Multi Chamber 1E3T 6in Etch ICP SP1 3 Metal Infrared Lamp GPCS 300GT TMP CryoTrap Multi Chamber 4T1E1H 8in Etch ICP HEAT Infrared Lamp SP1 Ta SP2 Ta SP3 FeO SP4 Si TMP CryoTrap Mult Chamber ny2 2 9 G BOX Multi Chamber 1E2T2C 5in Etch 2 SP1 Metal SP2 Metal nfrared Lamp x2 CRYO RP Multi Chamber
117. ioge jpopoweRsuptY hwr 1 1 Reerz24 Fe SE EE CE FE EE SE EE CE FE TE SE EE CE FE EE TN EE CE FE EE SE EE CE FE S020 DORE 0 TE looF EE CE EE EE TN EE CE ME EE TE SE EE CE FE EE TN EE CE FE TE oNE 0 EE CE EE EE CT CT juwae ME Reog Tie6 IDRVERBOX mo Reosizzo py Pm hw Reog 1044 Dua Souree 3 Al oio2082 AWAT Reggio43 pwa Souree i3 JMw l ooio2t266 AwAT RS0 1135 EAN HawATr Reos ioe EANPAG lp war Reog 1075 EATSKwoprEprnRorrrEpRVE AwAT Resie7 IGGONT mmm RS09 1178 NTERFACE laweswwrecesslAMAT RS09 1177 INTERLOCK emoocsasrslAMAT RS09 1179 IINTERLOCK eemwmrewseclAMAT 85 NTERLOCK Losroox mremoeslAMAT 5 SOL oro err AMAT SOL mm wermsslAMAT RS09 1062 RS09 1063 RS09 1064 RS09 1 RS09 1279 RS09 1222 RS09 1214 RS09 1 RS09 1 RS09 1209 RS09 1269 RS09 1036 oo loo ww IN ILAMBDA LIS 715 MAT ILAMBDA US 3 12 MAT ILAMBDA US 7F15 AMAT ILAMBDA US 7F15 AMAT ILAMBDA_HS 7F15 MAT LLCAB Wde Lu Lr 2 AMAT 2 2 AMAT 2 MX OEE ET I 55t5tWtt SV V w V l IMDX L12M H
118. km 16 2002 CRYO PumP RP C to 0 p RTA 6000 2010 i 2 02 N2 gt 0 49m2 35 40 EE tt SA RU 0 9m2 RS13 2201 0A DFM 09A S ULVAC MF99 5104 45C 60 C 30 Eico 2009 ny2 x6 MBE lt gt RS12 1316 1 IA T H _ e471 1300C RS12 1315 3 IA TrHH _ 4 12506 10225465 350mm 200C DG82 Y D Rs12 1339 RS12 1320 VF 2000 koyo EyXA gw 4X36 1200C p 86mm 10 6Pa PID RS13 8016 0A ULV
119. rmal Close L 26328 KA11 0001 0252 KF25 L Air Normal Close a L 6328 KA11 0001 0253 a a L 28332 GE41 0003 lt lt lt lt lt lt 8 64246 CE52 F64 5 gt 0101 ee eews ICF253 64246 JE52 0101 IVAT Fe4 io8ee171 64250 CE52 1101 F64 105808 1 ICF356 64250 CE52 2202 F64 105808 2 ICF356 7 egaerslVAT wfctmz ME CT ME ms KITS 86T XH4o swe XH4o swe 13 STOP VALVE N2 TOKYO KEISO MAX500L min STOP VALVE N2 TOKYO KEISO MAX500L min KF25 L
120. soopsz22l4A nv RS11 2117 Q 901090 3 RS11 8036 99 GP2600 TC11 053930J007499 RS04 8053 PC9801S S369148CA RS04 8054 PC9801S S369146CA lt gt RS12 1094 0A WLK23A16Z 958518K W2790xD2110xH2200 RS12 1350 S RS12 1351 INkoN RS12 1353 Nikon RS12 1354 INkoN Et W1900 D820 H1540 _ RS12 1046 0A 2 910 1250 2300 W910xD1250xH2300 2 650 1450 2600 RS12 1050 0A lecH 22o0ws RISSHI 4090345 RS08 2013 CH 5500WS 722 RS10 2800 CS1500NR B 9803021 ul RS10 2801 MMR 101 O707467 RS10 2802 MMR 101 0708575 RS10 2803 MMR io O707466 RS13 2095 RKE 5500A VW ORION le601003 RS13 2096 RKE 5500A VW ORION _ 602031 RS11 3162 RKS 400V A _ ORION 2503o1 6 RS12 1049 SCS 3WAT 9904132 2004 RS12 1324
121. we es VLP U2S VLP U3 4S VLP U3 4S VLP U3 4S VLP U6S VLP U6S VUGP 40 RS12 1068 VUH 251C RS12 1069 VUH 251G VUH 251C RS12 1071 VULH 40 RS09 8068 0A 7 IVuLH esc VULP 150F VULP 200CM VULP 250CM VULP 25CM VULP 25F VULP 25F VULP 25F VULP 40CM VULP 65CM VULP 65F L VULP 65F ULVAC 020626 2000 IULVAC P400182 IULVAC 2002 cr 070 IULVAC 2002 icF 070 vAcC ULVAC P200075 VULP 25 ULVAC P250036 vAcC ULVAC P402399 ULVAC P651125 luFeii4 JIS 2in JIS 2in ULVAC 800456 JIS 3 4in ULVAC 800361 JIS 374in JIS 3 4in JIS 6in luLVAG Ez5074 o 5 luLVAG ps265l o 2 IoLVAG pz52655 oi VuL 25F ULVAG P650867 lo ULVAC P650887 lo JIS 6in ULVAC 2002 IiCF 070 VUH 651 ULVAG 2002
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