取扱説明書 アリキャット マスフローコントロー
Contents
1. lt CR gt 2 3 24 6 Short viscosity Density Compressibility E Long Form 25 deg C 25 deg C 25 deg C 14 696 PSIA 14 696 PSIA 14 696 PSIA 1 ram zem im em 2 ow mee mom Demo ose a cer caron posae Meso imm os 5 caus Emae 93540 12385 0994 6 m Hydrogen 89153 0085 1005 7 He Heim 198457 016 10005 e oe me sess tess as 5 no Nitrous Oxide 148456 18088 09946 10 Ne Neon 3119 0826 1005 12 cans Propane 145 18816 09841 14 com Acewene 104448 10720 09999 16 remo iso Butane 74988 24405 0 5947 20 c25 75 Argen725 Co2 205615 16766 0998 90 Argon 10 CO2 zz cs sa argon7e coz 2 14 16079 02882 as c2 98 argon r2 coz La cis 79eoo2725 Agon 16751 area os 75 Argon 25 Helium 230 996 26 A25 T5 amp Helum 25 Argo 90 Helium 7 5 Argon2. MC 1 100 F S DE bes tae rr 100 amp 1 E 316L FFKM Kalrez standard Viton EPDM Buna Neoprene 39 11 1 TOT TOTAL FOO ET ELAPSED MASS CC TIME TOTAL a t MASS TOTAL 6 0
3. 0 TENE equas ELAPSED TIME 4 2 2 6553 5 OFF ELAPSED TIME RESET 0 0 e TT lt CR gt lt ID T lt CR gt Bl A T lt CR gt ID A lt gt OFF 0
4. 4 2 6 MENU MENU 11 4 2 7 LET aH y yy uec an TOV 4 3 SELECT MENU RS 232C RS 485 MODEL IHFD RLICRT SCIENTIFIC DRTR COMM LN UP LH DH Select Menu CONTROL Gas Select Control Setup 12 Communications Select PSIA E 1z 68 21 a 608 SCCM Es Rir A Bg ggg 8B BB
5. A 0 5VDC 0 10VDC 1 5VDC 4 20mADC DIN 8 D 9 15 50SLPM 12 30VDC 73 SOSLPH LLE 24 30VDC sks SOSLPM R 250mA 50SLPM EXE 7Z50mA EX 303 302 LOLAS YA FE Viton FFKM Kalrez standard RIV Viton EPDM TIA ETS Buna Neoprene x77 ni Vo MET Y E KER CRD TFTRD 7 5SCCM 500SLPM 2 0 C 1Atm 101 33kPa 3 4 20mADC 15VDC 29 MC MCS 200 1 100 1 er x 0 5SCCM 0 00250 5 mL min 0 0050 5 mL min 1SCCM 0 005 1 mL min 0 01 1 mL min 6 89 kPa 2SCOI 0 01 2 mL min 0 02 2 mL min 5SCCM 0 025 5 mL min 0 05 5 mL min M 5 10 32 AR Y 10SCCM 0 05 10 mL min 0 17 10 mL min 20SCC 0 1 20 mL min 0 2 20 mL min 58COW 10SOW 1SLPI 0 005 1 L min 0 01 1 L min uu 10 34 kPa 1 8 9 NPT
6. gt 16 4 3 4 MISCELLANEOUS MISC MISCELLANEOUS ZERO BAND 0 0 UP DOWN 0 099 295 CF SELET 1 CANCEL CLEAR 0 SET PRESS AVG FLOW AVG UP DOWN 1 256 TF
7. ecd urn 12 Var M5X0 8 1 8 NPT ITS a pM Oe HHUFTATRDSTUF RT an BIRD 12psi UE NIST 2 Power Jack Control Valve 8 Pin MiniDIN Inlet Connection Port Flow Direction Arrow 3 3 1 DINS 50SLPM 12 30VDC 250mA 50SLPM 15 30VDC 750mA er DIN gt 1 6
8. SET GERO ERLER RAY 75 25 90 LON 92 8 98 2 75 25 A 25 75 25 A1025 90 7 5 2 5 PraXair Helistare A1025 Star29 90 AKRA 8 2 PraXair Stargon CS P 95 5 15 4 3 3 RS232C COM RS232 COMM RS485 COMM zh 2 22 Unit ID ID ID ID Baud
9. sedg smj cde 7 2 scd ed p PO Uu MO gt vk E I lt CR gt lt gt lt CR gt lt ID gt lt CR gt lt IDx gt lt gt lt CR gt lt gt lt CR gt lt gt lt CR gt T lt CR gt lt gt lt CR gt LE DER lt ID gt lt gt lt CR gt lt ID gt lt gt lt CR gt lt IDx gt lt gt lt CR gt lt 1D gt lt gt lt CR gt lt ID gt lt gt lt CR gt W21 gt lt CR gt lt 1ID gt 021 lt gt lt CR gt R21 lt CR gt lt 1ID gt 021 lt gt lt CR gt W22 gt lt CR gt lt ID 022 lt gt lt CR gt R22 lt CR gt lt ID 022 lt gt lt CR gt lt ID gt T lt CR gt lt ID gt lt gt lt CR gt
10. 293 BACK MAIN ID Unit ID ID UP DN ID ID TID A Z gt ID BH TID BACK ID RESET A ID A SET ID ID TID LE DN UP e LEC TE 3 Vu BCS At 7 be 38400 19200 9600 2400baud 19200baud BACK SET
11. Volume Flow Mass Flow pU ZI E l A 014 70 4025 00 02 0004 02 0004 02 0004 Air A 1014 70 7025 00 702 0004 02 0004 02 0004 Air ID EJ Volume Flow Mass Flow AZ kl GERD ALOE 7 8 ID Volume Flow Mass Flow 1 MOV VOV TOV POV 20 5 5 lt ID gt lt gt lt CR gt X 64000 1 MC 100SLPM D
12. 0 1 5 Re 0 7MPa CI ZNULOEJIZZVIJ LETLEVP 2IITAT I RWL2 BO V E GND PID PID P 13 4 3 1 CONTROL SETUP PID Zt 16 PID PID P 13 4 3 1 CONTROL SETUP
13. 1I 10 X DIN LM USER RS 6 8 97 RS 2326 3S4 7 RS 485 F GND 2 RS 232C RS 485 pe 3 2 3 2 1 DIN 4 8 0 5VDC 0 10VDC 4 20mA lt gt GND 250 0 lt gt 4 20mA 15VDC gt
14. PID PID OF BEDS PB LFW ET P 13 4 3 1 CONTROL SETUP PID 1 7 GND GND 1 8 RS 232C RS 485 P 16 4 3 3 RS232C COM P 19 5 2 1 9
15. DBB 8 888 SLLM MENU MENU ELHPSED MASS 5L TIME TOTAL o MENU Y a SCCM Beag ag aa BHL K FRESE MENU Select Menu RS 232C RS 485 MAIN COMM CONTROL SETUP MAIN 10 4 2 MAIN ON 4 2 1 PSIA PGIH SC SETPT PSIA CH PSIA 13 60 E cum 21 58 o ESE DEREN FH LC EAS AI 0 000 loo PSIG PSIA 0 440 O s MM CCN SCCM MENU 4 2 2 C
16. 0 0 01VDC 10 0VDC JULES 3 3 4 4 20mA 4 20mA 0 4mAa 20mA zo oo e Tc Bm 15VDC 3 3 5 2 AD VEAFON BT JI Z 2 EED ET OCC TEE 7 E19 7 6 8 BEI 2 EA 25835 0 5VDC 0 10VDC 4 20mA EE 4 4 1 LEST BRAY PSIA CN CCM SCCM SETPT MENU
17. ee Ey FE ID Iv IE ze DIE ADE E DET IDEE IT EEE 2037 lt IDIKA Z fil O AS lt CR gt pes vede STI A lt gt 1 1 19 9 4 9 4 1 ANEN SIII I Uv pe Lore e Se DK6R ID TD A lt CR gt ID A 5 4 2 RD oes 014 70 7025 00 02 0004 02 0004 02 0004 Air 014 70 025 00 02 0004 02 0004 02 0004 Air Volume Flow Mass Flow A uw 6 7
18. 3 2 2 4 8 2 3 2 3 RS 232C RS 485 RS 232C RS 485 DIN 8 RS 232C RS 485 RS 232C RS 485 GND DY 7 pp 9 Ez RS 232C RS 485 RS 232C RS 485 Serial Cable End PC Serial Port 3 3 3 3 1 RS 232C RS 485 Hanne MAT RS 232C RS 485 3 3 2 0 5VDC M 0 5VDC 0 0 01VDC 5 0VDC 3 3 3 0 10VDC 0 10VDC
19. C C 4 2 3 SETPT 4 2 4 COM LPM Volumetric Flow Rate CCM LPM 4 2 5 SCCM SLPM Mass Flow Rate Mass Flow Rate I 20C 14 696psia SCCM SLM P 13 4 3 1 CONTROL SETUP gt
20. P 17 4 3 4 MISCELLANEOUS PRESS AVG FLOW AVG 1 10 0 0 5 F S 0 0 3 2 P 17 4 3 4 MISCELLANEOUS ZERO BAND 20 8 MIO US MGS VISSZA RE 0 8 Reading 0 2 F S 0 4 Reading 0 2 F S 1 100 F S 100 1 100ms STP 72 20 C 1Atm 101 33kPa 10 50 C 10 50 C 17 REMOTE 30 100C 10 85C 0 100 GERENS TE 0 02 F S C Atm 102 4 F S Hf 47 SR Zo e ues MO e 485 0 5VDC EJ UZ EXE MELLE HIT TTAB O 5VDC 0 10VDC 1 5VDC 4 20mADC eoru 227 219 0 5VDC 0 10VDC 1 5VDC 4 20mADC ACT PERO
21. A1025 2 0 CO2 Praxair Helistar A1025 90 Argon 8 CO2 28 Starz 2 Oxygen 218 817 Praxair Stargon amp CS 95 Argon 5 Methane 223 483 1 5850 0 9993 in micropoise 1 Poise gram cm sec Grams Liter NIST REFPROP 7 database Gas Viscosities Densities and Compressibilities at 25 C 20 Viscosity Density Compressibility Number Long Form 0 deg C 0 deg C 0 deg C 14 696 PSIA 14 696 PSIA 14 696 PSIA ro ar i258 1207 os 09991 0 9976 09994 202 0 9933 ol9lsi 33 T D slakla df Nitrogen Helum 186345 1 0005 Oxygen 86 127 0 9900 3070 0 08988 10007 4 cou Acetylene orara 11728 09905 is cana 0 9925 16 canto 0 9627 7 xr open 202178 37422 0 9901 15 Xe xenon 212085 58988 09991 0 9650 13 n CaHi0 67 691 2 7048 0 9587 20 C 25 75 Argon 25 CO2 190 579 1 8309 0 9982 136 350 0 9928 Ne Nem 293825 08999 10005 O2 oxygen 190555 14290 0 9990 C3H8 74 687 20101 0 9787 90 Argon 10 CO2 201 897 0 9987 2 cs sesamonremcoo 203423 1799 ossee 0 9990 24 C 75 75 C02 25 Argon 154328 19270 09 0 9995 A25 75 Helium 25 Argon 218962 0 5794 10002 90 Helium 7 5 Argon 2 5 CO2 Pp Praxair Helistar amp A1025 90 Argon 8 CO2 2 Oxygen 203 139 1 7918 0 9988 Praxair Stargon CS 29 P 5 95 Argon 5
22. MODEL SERIAL NO DATE MFG DATE CAL CAL BY SW REV BACK MAIN 18 9 RS 232C RS 485 5 1 9 2 2400 9600 19200 38400 TEL 5 3 5 3 1 MN CTC E A I AJ SESE T 222375 RE SE a RS 232C FD 1 10 60 ET 2 RS 485 pm LIJ eS 5 3 2 lt CR lt CR gt ASCII 0Dh CF ejl RUE SW Do Ed NO uy
23. 36
24. 1 SELET JUu i 1 CANCEL CLEAR 0 SET LCD CONTRASNT UP DOWN 0 30 0 30 CANCEL RESET 10 SET 17 4 3 5 MFC DATA MFG DATA MODEL INFO ALICAT SCIENTIFIC Ph 324 290 6464 Fax 528 298 4189 MODEL M IASLPM D SERIAL MO 586043 DATE MFG 19 7 20i12 DATE CAL 1849 2812 CAL BY DL SW REV 2V62 MODEL INFO L T SER og EPPO LES BACK MAIN sm
25. ZaHLIDAT SCIENTIFIC OOOO HHHHHHHHHL T114 0001 6 10 12 TEL 03 3903 2181 FAX 03 3903 0123 e mail sales team sayama com http www sayama com Rev 25 10 2014 02 18 CO CC 5 2 6 DE II E T E E PE dar KS EID I E EEEE PE LS 7 UCNE Ss SOEE 7 m 7 y F 77 7 FF FT 8 ld TI 12 EN EB 8 DIANA Nes 8 3 2 3 RS 2820 Re 1485 n wi c v a ee a a ee ea a a wa re 8 OE LYS CNET al 9 80 l RS 2820 R5 4855 7 A Do MJ anos pots er EP PEU RN RECTO PA CA RESO A 9 9 9 2 EIER EER AU SOV 633 sdas di e Rt tS a v E ll dd ESAS Bie i 9 9 Oo A LE EE IV PCR 9 Ji 9 SZ EEN 9 1 10 4 AN 10 4 22 MAIN kou nee nS I 11 NICE MET li A oe COE ed s PEU Lig 11 4 2 5 SCCM SLPM Mass Flow Rate 11 LEON MENS AA A A wae as Ree as 11 Al e CU i 12 A Sa SELECT MENU E di o a i dius 12 4 3 1 CONTROL SETUP oo eee 13 41 9 2 GAS SELECT AI REN a ada 15 89 R92926 COM MEE audas nenn O des or EE 16 4 3 4 MISCELLANEOUS TT 17 4 3 5 MFC DATA asd cen oad oa WON Gv duces dae Rane be pe td By be ERES dtt 18 ARS CR SA I II Sat PETERET 19 eo 19 ZU e ERNEUT 19 DONC UC so TETTE EF A TTT TTT TTT TTT 19 IN PIR Gi la S
26. 47 63 4X 8 32 UNC F 9 53 AX 8 32 UNC Y 9 53 33 66 REF EMT mm 32 9 5 MCR 250SLPM MCH Series D 250SLPM 1 2 NPT BOTH SIDES 4X 8 32 UNC T 8 337 4X 8 32 UNC Y 9 53 33 66 REF ET mm 9 6 MCR 500SLPM MCR 1500SLPM MCR Series 40 64 0 500SLPM 0 1000SLPM 0 1500SLPM E m _ 139 57 I 8 13 3 4 NPT Both Sides 184 79 82 55 531 5 08 BE 05 45 63 36 2 4X832UNC Y 8 334 A AX amp 32UNC Y 9 53 33 66 REF mm 33 9 7 MCR 2000SLPM 0 20005LPM AM 3 4 NPT BOTH SIDES 3 08 9 53 58 5 47 63 4X amp 32UNC T 8 38 L AX amp 32UNC Y 8 33 E mm 9 8 MCR 3000SLPM MCR Series 0 3000SL PM 36 83 1 1 4 NPT Both Sides 47 mm 34 10 MCS MCS MC 30 100 CN 100 ws 7757 100 100 C3H6 100 0 5 MUTA 100
27. 2SLP 0 01 2 L min 0 02 2 L min 20 68 kPa 5SLP 0 025 5 L min 0 055 L min 13 79 kPa 10SLP 0 05 10 L min 0 1 10 L min 37 92 kPa 20SLP 0 17 20 L min 0 2 20 L min 137 9 kPa 50SLP 0 2550 L min 0 550 L min 1 44v NPT 62 05 kPa EMCR MCRS Y Y XA E 200 1 00 1 um gt MCR MCRS wur F S M 100SLP 0 57 100 L min 17 100 L min 1 4177 NPT 22 06 kPa Zo0SLPM 1232290 L min 2 5 250 L min 1 2477 NPT 16 55 kPa S00SLPM 2 054500 L min 57 500 L min 44 82 kPa term YAA NPT ARS 30 9 9 1 MC 0 5SCCM MC 50SCCM MC Series 0 0 58CCM 0 10SCCM 0 1SCCM O 205CCM 0 25CCM 0 50SCCM O 3SCCM CGI JEN FELH am ue 8 53 B 53 13 34 A A M5X0 8 6H BOTH SIDES 8 32 UNC VW 4 45 mm 9 2 MC 100SCCM MC 20SLPM MC Series 0 100SCCM 0 2SLPM 0 2005CCM 0 5SLPM 0 500SCCM 0 105LPM JSLPM 0 205LPM 8 89 w 1 8 NPT 1 13 34 Both Sides 2X d B 32UMC Y 8 89 ET mm 31 9 3 MC 50SLPM MC 100SLPM MC Series 0 50SLPM 0 100SLPM 110 92 1 4 NPT Both Sides 4X 8 32 UNC F 9 53 4X 8 32 UNC Y 12 7 Ef mm 9 4 MCR 100SLPM MCHR Series 0 64 0 100SLPM d 357 15 12 7 194 31 17 4 MPT Both Sides 9 531 5 08 i 36 2
28. Methane 207 633 1 7307 0 9990 166 371 0 9995 in micropoise 1 Poise gram cm sec Grams Liter NIST REFPROP 7 database Gas Viscosities Densities and Compressibilities at 0 C 26 1 1 1 LCD P 17 4 3 4 MISCELLANEOUS LCD CONSTRAST GND P 29 18 CX S cub V 1 2 0 10PSID 68 94kPa 1 3 Seyi ABTS EJ BERRA AML MOV VOV POV TOV P
29. TID A 35 SLPM 35 SLPM x 64000 100 SLPM 22400 A22400CCR 35SLPM 729 ET 2 MC 0 5SCCM D ID F 0 22 SCCM 0 22 SCCM X 64000 0 5 SCCM 28160 28160 lt CR gt 0 22 SCM gt Seria1 Main gt Control Setup gt Input 21 9 6 PID PID P 1 220 KW21 2 2 O lt CR gt 4 2 R 2 1 lt CR gt GERO 1 1 5 7 PID PID 0
30. W 2 2 lt gt lt CR gt R 2 2 lt CR gt 1 25 KW22 2 9 lt CR gt 4j 2 R 2 2 lt CR gt gt 1 1 22 9 8 5 8 1 Jed e EN lt gt lt CR gt IZI es voz ey UNIDAS III EFT ID 1 A 1 1 lt CR gt ID A 02 2 C 0 lt CR gt ID C Air 002 SF6 6 Xs 8 23 98 BR C2 23 5 9 MEER O O KK ese p PID PID Belges Pod Zi Ala eU la ue le P Ala ww
31. 12 4 2 7 7 4 0 0 P 13 4 3 1 CONTROL SETUP SETPT SOURCE RS232 P 8 3 2 3 RS 232C RS 485 0 P 21 15 5 SETPT SOURCE FRONT PANEL 0 SETPT SOURCE ANALOG GND P 7 3 1
32. B ECM SECH Main 4 3 1 CONTROL SETUP CONTROL SETUP nas CONTR L SELECT SETUP AUTO ON AUTO OFF AUTOon BIDO 4 8 2 SETPT SOURCE RS232 3 ne FRONT PANEL ANALOG a LN UP LN DN ra LOOP VAR HUB ZIT 9 FACETAS HUA mE Mime EJO 3180 DITA LN UP LN DN OD LN UP LN DN C low Volumetr ic Flow CANCEL 13 PID PID PID P
33. O CE rr DU SPP ee ee 19 32 Em PODIO sane enko enko ecw enko eku eko a 19 pe lns e NIRE A In TF mU 20 20 X MEUS cg RM CT 20 21 5 0 PID l ey ADS T co seus a Aa 27 5 7 PID AN 22 DROPS ced D c T 23 SE RE QE RU AAA PS O TTT EE E E AT 23 EE 24 OE sve T INEO SANE C 25 27 NE Ad a 27 1 2 BEA SICA TI VAT A UL OI OD EI E ve eek a 27 7 3 MOV VOV POV TOV 27 A WE Gs SS O en 27 DRE OI Rue RA yaaa ok bane Paar be Ph 27 16 ER MEITREBIADG AD 28 Qo EcL E o SA E sn Sanao inko a E iain kda 28 1 8 RS 232C RS 485 cece ee eee e 28 WOMENS ea AM 28 1 10 MES EE CS DO OG pacti ida 28 A EANDEM 29 LS le A A A IR O IP i 9 1 MCG 0 5SCCM SS MUSDOS COM us ns a SI GA an a E E a a 31 9 2 MC 100SCCM MC 20SLPM 0 c cece cece cece cece cece nennen nenn 31 9 3 MC 50SLPM MC 100SLPM cocci cece cece eee ee eee eee ees 32 84 CIE SA 32 02200 33 9 6 MCR 500SLPM MCR 1500SLPM RR 33 NUN i 200 SD PM oderat te s Ee UE it 34 9 9 MEI COQO SPM DA CR AAA AAA AA e at RR 34 10 MCS RIPPED ART AT RH PO FE coco e e aras 35 Me 2 n MA e 36 NR a A pa
34. OZI PID PD PID ALICAT PD2I PID 1 LN UP LN DN LR UF LH DH MODE SETPT SETPT UP DOWN SELECT 14 4 3 2 GAS SELECT GAS SELECT LN UP LN DN C MODE LN UP LN DN PG UP PG DN LN UP LN DN MODE LN UP LN DN F2HE Ethane PG UP PG DN H2 Hydrogen He Helium LN UP LN DN Nitrogen CANCEL Paci dag
35. di daddpadubesupadibadnedioessuns bas 36 1 mn 1S09001 2008 DER ALICAT NIST gt 1 ALICAT Gertificate of Registration pe Lae te Se A AIDA This is lo cahy Ut ha Quabty Managemen gysbem of Alicat Scientific nos Park rr ALTA USA haa Geen ae d and found complying w h lha requirements of ISO 9001 2008 AN hereby granted lor rege ralion prewiding Ma Cerntihcabon njles and conddions are obterved al al hme Certification Siop Design and marulachare of
36. precision instramentalion for the measurement and control ol pressure and the flow of gas andlor Bquid Certificate Humber 0410009 Issue Data 17 No 2010 Audit Date 10 Noy 2010 Original Regisiratien Date 10 F eb 2005 Expiration Data 16 Nog 2013 ra Ji Jd N ul Lares La Ha Aha Cia Bahall ol Management Certification MA 862kPa RI 8Kg cm2 2 EL CHI A RES ENAERE GE LEM 3 4 5 6 7 8 MOV Massflow Over Range POV Pressure Over Range TOV Temperature Over Range 9 MC 0 5SCCM MC 50SCCM 10 MC 0 5SCCM MC 50SCCM
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