2.プラズマ容器を真空に引くよ！
Contents
1.2.
3.
4. 10 10 4Pa 10 10 Torr
5. 2 4 4 10 6 10 4 Pa 10 3 10 Pa
6. LHD 2 5 5 2 5m
7. 560 10 11 12 13 14 15 A Schram Le Vide 103 55 1963 W Beckmann Vacuum 13 349 1963 A Okamoto et al Plasma Fusion Res 3 059 2008 T Zama et al Jpn J Appl Phys 32 L349 1993 http www swagelok com 0
8. 6 6 g h 2 7 ICF 2 Lets Start to Pump Down a Vacuum Vessell c
9. 1 sccm 10 sccm 100 sccm 0 17 Pa m3 s 100 sccm S 150 7 s 1 Pa
10. 1 2 5 mm
11. Lecture Note a o bottom view CF 6 b g 6 e
12. e e e e
13. 100 mm 2 03m s 300 7 s 7 s 100
14. 2 3 1 2 Lets Start to Pump Down a Vacuum Vessel 553 A Okamoto 1 2
15. 2 2 2 O C C 1 1 0 C2 1 C 1 C 1 C
16. 1 3 LHD A Okamoto et al Plasma Fusion Res 7 2401018 2012 UAW A A N A A NY A NY A NY A A N A A YAN A N A A AYAY A N A A NY A N A NY A A N A YA ANNV A NV A NV A NY A NV A NV A NV A NY A NV A NV A NV A NV A NY A NV A NV A NV A NY A NV A NV A NV A NY A NV A NNY A NNY Ny A NY A V A NY A V A NY A V A NY A NY ANY A NY A NV A NY A V A N A V A NY A V A N A V A N A NY AVA N A YI Lecture Note 2 Lets Start to Pump Down a Vacuum Vessell A Okamoto 2
17. oil rotary pump mechanical booster pump turbo molecular Dump oil diffusion pump operation pressure 107 10 8 1075 104 103 10 2 10 1 100 101 102 103 104 105 pressure Pa 4 Lecture Note 20000 90000 rpm
18. 12 3 SUS chamber 9 0 063 L 0 8 Gas inlet He Q 0 17 Pa m3 s Quartz pipe 9 0 036 0 5 PG3 Lk OK Kx End plate PG1 PG2 Manifold Manifold d 0 1 L 0 8 d 0 1 L 0 5 gt gt x x to TMP 0 35 m3 s to TMP L i LL i i 1 1 1 1 1 as 0 0 5 1 1 2 c r FU 0E 3 3 RE z m 3 DT ALPHA a 9 L m p PGn b c X 554 3 a 3 C
19. Q_ C 2 C O Journal of Plasma and Fusion Research Vol90 No 9 September 2014 1 c 2 2 dz 0 1m 1m 0 3 ms 300 7 s 2
20. 6 6 a 4 C 6 b 6 c 2 6
21. 2 8
22. owncloud lt HYPERT MAP_TI DT ALPHA ne _ a a LHD LHD
23. 2 9 2 Lets Start to Pump Down a Vacuum Vessell 559 A Okamoto
24. 4 2 2 a manifold Mag coils gas cylinder 1 a b VV GV TMP FV LV RP PG b Tohoku University Sendai MIYAGI 980 5879 Japan 552 author s e mail atsushi okamoto qse tohoku ac jp 2014 The Japan Society of Plasma Science and Nuclear Fusion Research Lecture Note 1
25. 3 c 13 1 2 SL ms Pa m3s
26. RR 0 48 m 10 ms 14 1 2 3 4 2 2 6
27. e e 1 4 JSPS 22740357 24246152 1 3 1994 2
28. 561
29. ICF 1 0 ICF 1 ITPD 7 Cc ICF ICF 7 d O
30. 2 556
31. 0 006 m3 s 300 7 min 20 mh 7 min my h 30 2 100 Pa 0 1 Pa 5 2 Let s Start to Pump Down a Vacuum Vessell A Okamoto 400 300 200 pumping speed 7 min 100 0 102 101 109 101 10 lt 103 104 105 PreSSure Pa 5
32. 100 Pa 3 0 6 Pa ms 360 sccm sccm 1 1 standard cubic centimeters per minute 0 01 1 Pa m3 s 2 Nz mm m3 s Pa Pa m3 s Pa TURBOVAC361 100 0 35 1x10 8 5 0 3 lt 50 MAG W300 100 0 3 10 8 2 1 lt 800 HiPace400 100 0 36 5x10 8 10 0 65 lt 1100 ATH500M 100 0 3 1x10 6 100 5 lt 170 TG350F 100 0 33 1x10 6 0 9 lt 260 PT
33. 1 Pa KF NW 3 b ferrule flange VG flange VF 1 nut 9 center rin i A O ring flange 8 a 0 b Swagelok c KF d KF 9 a O b Lecture Note ISO 2861 1 8 c 8 0
34. 300 min 0 1 Pa 5 300 7 min 0 1 Pa S 600 Pa m3 s 0 07 m3 03 m 1m 1 04m 100 Pa 80s V dp dt p 8 3 1 Pa 10 Pa m3 s
35. Pa m3s m 2 10 4x10 8 SUS304 5 2 4x10 8 6 09 3x10 A5052 7 09 2x10 6 A6063 8 4x10 5 9 0 8x 10 6 10 5x10 9 2 3x10 4 11 1 10x10 4 5 2 SUS 1 SUS 10 8 10 7 Pa m3s lm 2 2 1 m2 0 3m 1m 1 0 4m 0 3 ms 300 7 s 10 7 Pa
36. 1 Pa 2 3 2 5 lt 1 Pa 105 Pa C 1 0 O
37. JIS TICF 8 a O VG VF O 0 O 9 0 a gasket Re flange 4 flange knife edge 7 ICF a ICF b c IPD d
38. h 557 A Okamoto a A B C F W d e 3 ICF mm 0 1 1 mm cc ICF34 DNI6CF 34 75 19 1 16 6 M4X20 ICF70 _ DN40CF 70 127 427 39 6 M6x35 1ICF114 DN63CF 114 175 635 64 Se M8x45 ICF152 DN100CF 152 20 101 6 102 16 M8x50 ICF203 DN160CF 203 22 153 153 20 M8X55 ICF253 DN200CF 253 25 203 203 24 M8X60 3 ICF 7 a ICF
39. SUS 1ICF 7 b Journal of Plasma and Fusion Research Vol90 No 9 September 2014 ICF
40. 200 O Swagelok 15 8 b SUS
41. 10 3 10 Pa 10 10 Torr 1m 2 3 1 2 3
42. 2002 3 69 452 1993 4 71 575 1995 AYANNY74NNY77ANNY777AWNY7774NNY7774NNY777ANNY777AWNY7774NNY7774NNY777ANNY777ANNY7774NNY777AWNY777AWNY777ANNY777ANNY777ANNY777ANNY777ANN ANY777ANNY777ANN 74 1 4 Journal of Plasma and Fusion Research Vol90 No 9 September 2014 5 Y Koyatsu er g Vacuum 47 709 1996 6 F Watanabe et al J Vac Sci Technol A13 140 1995 7 S Inayoshi gz al J Vac Soc Jpn 41 574 1998 8 M Suemitsu et al J Vac Sci Technol A5 37 1986 9 Blears erz7 Adv Vac Sci Technol ed E Thomas Per gamon 1960 Vol 2 P 473 1 LHD
43. 300 100 0 3 10 8 0 13 lt 13 FT 480W 114 0 35 10 7 76 1 6 lt 440 TMP 303 100 0 32 10 8 200 lt 400 Journal of Plasma and Fusion Research Vol90 No 9 September 2014 1 a
44. J Plasma Fusion Res Vol 90 No 9 2014 552 560 2 2 Let s Start to Pump Down a Vacuum Vessel OKAMOTO Atsushi 2014 5 7 10 6 10 Pa 10 3 101 Fa 1 m Keywords vacuum conductance pumping speed turbo molecular pump oil rotary pump valve flange 2 1
Download Pdf Manuals
Related Search