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1. 9 7 A 0 3um 99 9 1 0 8ppm 2 24ppm a gt Ng 5 60C 6 1 9 0 05MPa 1 0MPa Max 1 0 MPa N C auto drain Min 0 15 MPa N 0 auto drain Min 0 1 MPa k Opt
2. Mo 2008 1 SMBOL WM N ol Z Year 2008 2009 12010 2021 2 SYMBOL o P Ql 7 LMonth Jan Feb Mar Dec SM C URL http www smcworld com TEL 03 5207 8260 TEL 052 461 3400 TEL 06 6459 5160 ie TR 7 0120 837 838 4 4 2008 SMC Corporation All Rights Reserved AMX OM L021 A
3. ion H 1 6 MPa 150C 550C 0 1MPa 5m N C 4 10 N 0 6 5 10 AM850 9 2 8m 0 1MPa 2 2 0 AM EL AM AM EL150 7 Oe B A 0_ MPa _ _ wr 4 27y _ 2 2 0

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