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1. P 32. 3 MEMS 021 gt PSSF26 75 CT N REV e MAN LI A y lt V r Bl 8 gt SNI Hi Hr Gi Dill HII REV S SAV LI A y lt lt V r ll cg AKOFLOC GENERAL CATALOG 4 40msec
3. d 1 m
4. LP 1 8 F900 1 mm 1 4 F900 1 4 UJR Rc 1 4 3 8 F900 3665 ME am kn nr 3660 FO ONTR OLLEF l 7 Ns 10SCCM 80SLM 3660 30SLM 100SLM 3665 CO GooeFs 3665 0 1009F S osec F within 296 typical 1 596F S 2 096F S 20 0 596F S 20C H F S 5SLM 49 294kPa P
5. KOFLUEL KH 1 KKUFLUEL
6. MEMS MEMS J Fb my
7. 1 11 Me NE E ll CZ KOELOC 9100 AUTO PRESSER CONTROLLER ll 0 5SLM 1 0SLM 2 0SLM NN 1 49kPa a 2 0 98kPa B 3 0 343kPa 4 0 490kPa MODEL ili s 9100R EF 1 4UJR _ I E I MODEL PF 1 N 1 su 042 i
8. L 9 L MODEL3810DS ann ll namae 1 8 2 1 1 3810DSM3G 1 2 x 3 382 8 3 l 1 a i 9 9 LPG 1SLM MIN 10kPa 3810DSM3G AIR 500SCCM MIN 20kPa x O Terww sokpa 1 3 063 gt WISH Sl CN AUIII Fi H 3 SqQ0 188 TAON bs nu u E gt pa Bha sm
9. RS485 LILIHIHIHIILIIUI CF I L Om DE500 Koma ill E I j DISPLAY MOOE Ne 7 l F S Ns 10SCCM 80SLM E D 5 K j U YE J 2 b Bn 2 10096F S lt FSO6 1 0 0 F S B C 52218 t 2 F S 1 FS 2 59 FS 3 1 096F S 20C 0 296F S 20 C DRS
10. Flow Instruments amp Gas Generators K 2009 VISION 2000 SERIES VISIDNG000 15g TR55 HLHIIHIHILI le 0 0 5 0 sw17 Bi 2000 1 G 00 l AP bar F16 5 a 0 3 6 9Y 5 16 l 24 27 30 33 36
11. Oo a C lt e M x DSuD15 I 0 5VDC 15VDC 596 60mA 1 300mm Db sub 15PIN PIN PIN 1 NC 9 IOVDC INC 10 NC 3 NC 11 15VDC 4 NC 12 COM 5 COM 13 NC 6 0 5V 14 INC 7 NC 15 NC 8 NC 3150 3250 3350 3450 D sub15 HFC HFM D sub15 04 gt IPUJISHHI N Esas S IHS S 1 MO0c NdH HO C2 KOFLOC GENERAL CATALOG MODEL HFM 200W LS SERIES MODEL HFM 200W LS
12. LED3 1 2 LCD6 1 0 1cc Ps DC 5V DC0 5V Bi B 96 _ IIe 9 _ B 2 D 6 DPM 243 244 DPM 243 VISION S000 DPM 244 LED 4 1 DC 24V lt gt EBHHHBH Q o ge J 55
13. pimi ni m Rimas KOMDNUDC a DISPLAY MOOE BNWER PHHH J SV 5 DC24V RS232C RS485 14 4 1 1 8 F900 PRO 3 8 F900 1 4 UJR Rc 1 4 ll MODEL 8500MC 8500MM i F S Ns i SF O 5 SENI J 2 J 0 jj
14. i 020 lt KUFLUL FAX Flow Instruments amp Gas Generators K 2009 EW
15. 3600O 3700 3800 100SLM HFC HFM 3 100C 1 MPa KKUELUL
16. 1 MODEL 7800 MEMS 0 lt 5V FSB LR ZU IN TF sil 1 C7800 024 Flow Instruments amp Gas Generators K 2009 B Model 800 1
17. Ns 0s Hs He COs Ar Ns CF Ns Ns Ar Ar CF 1 4 1 4 Ar Ar 1 4XN CF Flow Instruments amp Gas Generators K 2009 5
18. EB lI ji AC100V 10V DC 15VX 00mA DC 12VX G00mA elelejeje lal 2 A DC0 5Vx x HFM DPM 3 ALM 4 ACM 10 DCO 5V 2 PSK 2TFX 12V 059 LN lt FS R25 7 X 1CJSd 1 dOM gt 00c d9 13GOIAN K KOFLOC GENERAL CATALOG PSK 1FB PSK 3FB PSK 6FB 8 PSKaIFE PskS PsKEE 1 H amp 16F 5 DC ss 85 132VAC 47 66Hz DPM 100 22W 70W 140W DPM 3 CK 1A Z 125V 0 8A 125V 3 15A 125V 6 3A Es Em 15VDC 596 1FB
19. KFC standard J SEMI standard 1 9 Ns 50SCCM 19 50 1 100 0 5SCCM 2 9
20. L DC 4V L 2 M3 3 3810DS 3810DS 044 Ji Ns 10SCCM 20SLM 30 100SLM 296F S 20C 396F 5 620C 980kPa 1x107Pa m s 5 45C 15 350C j O 0 mim Rc1 4 DC2o4V 5 NPN 3810D9 ll
21. MODEL5410 L m G KOFLOC 8 CU 8 5400 OW CONTROLLER tO s 76 124 9 REN m 98 1 M4 5 i ma yD Nias 10SCCM 0SLM OO 0 100 F 8 1sec Set Point 29 typical QS 0 100 0 20 j5 Tsec 1 096F S 20C 0 596F S
22. LIL ea MFC 15VDC 850mA MAX 3 ACB5V AC 40V TERM CKR 300 J Ja DC 0 5V _ 1 1 5VDC 250mA as MI 4 100 lt 2000 100 B 0 19 8digit i 85VA A C AC85V AC240V 4 7 440Hz gt 350g W 73xH 73xD 119 5mm B 107 x 119 5 x CR 300 SIN 1 2mm BG 5tos 2 1 6 0mm MFC gg r l BUIRXDPIKE Ne 0 MODEL CR 300 0
23. 3 Jl MODEL8500 re pm mes m 9 Fe KOWMWK E00 mr EC Bl 1 8 1 8 IN 1 4 1 4 x 1 1 8500M3G 32 g 2 3 3 j Il 1 VY 3 I 1 I LPG 1SLM MIN IokPa 8500M3G AIR 500SCCM MIN 20kPa 0 1SLM MIN _20kPa 062 Flow Instruments amp Gas Generators K 2009 MODEL3810DS MODEL3810DS 3810DS
24. 10SCCM 80SLM 8100 Ne SosSLM 100SLM 3105 z F sec OE SALASTOU OO NUS 0 596F S OE pi 380kPa T l Z J O Pam SR He FE 0 50 15 35 j U on l OG TE 1 1 4F900 3 8F800 1 8Fg00 1 4UJRH Rc 1 4 Dsub9 KFC standard SEM standard SAI 1 5VDC 5 100mA jJ _ J 5VDC 59 100mA 9 16 18UNF 3105 J Dsub9 KFC standard No No 1 NC 6 NC 0 5V 7 COM u 15VDC 8 NC 4 CUM 9 NC u ID5VDC 045 gt WISH Sl CN Il FH 36 S S 001 1HdOMM gt WISH Sl CN Fai S HAS 09 TAdOMN AKOFLOC GENERAL CATALOG MODEL 3760 SERIES MODEL3760 MODEL3660
25. 1000g 034 MODEL D8500 AKO RS 48 5 MODEL D8500 Logging PC 3 1 ON OFF Flow Instruments amp Gas Generators K 2009 MODEL D8500 100m MODELD8500 ID 1 MODELD8500 MODELD8500 D 2 1D n TRx 19PIN 31 TRx TRx_COM 18PIN 0PIN 7 035 gt WISH Sl CN u asi 00S8Gq TAOMN gt Hal HB lt FS R25 7 ON 00S9 1 C2 KOFLOC GENERAL CATALOG MODEL 8500 MODEL8300 24V View Point
26. At E
27. CF CF 019 HH gt WISH Sl N til K K FLJL GENERAL CATALOG YA7H Mass Flow Controller Mass Flow Meter 80 KFC standard KUFLUEL 1999 20SLM Dsub9 KFC standard 6
28. DC30V 50mA AMP1 718826 5 AMP 1 7 18 2 5 Flow Instruments amp Gas Generators K 2009 MODEL3100 MODEL3200 MODEL 3100 SERIES Jol ES CY L CF L F S 1SCCM SR K KOELOC 3100 MASS FLOW METER VOe M4 5 10 NR 1 4F9 1 4F900 SR 1SCCM 5SCCM 1 8F9 1 8F900 1 4UJR 1 4 Rc1 4 4 bh o OO HE
29. L 15PIN D CONNECTOR STANDARD sas n mI T TI Ji Air 0O00 1000SLM Gsec typicaD Ps 196E 5 T fil 3 4MPa HP 6 8MPa 9 X107Pa m s U He 15 35C JZ Jj Z BB 1 4 j 7 SLUJSS16 Ni lt Jj 1 GF900 F 5 gt 300SLM 3 4F900 1 NES HN 300SLM 1 2F900 HFM 301 1 FITTING FITTING TYPE DIM A SWAG 1 2 W NUT 6 31 165 9 gt 300SLM 3 4F900 HFM 301 3 4FITTING FITTING TYPE DIM A SWAG 3 4 W NUT 6 99 177 5 DIM B 4 31 109 5 DIM B 4 11 10O4 4 C DIM C 1 56 39 6 DIM C 1 36 34 5 ll 0 1 2F9 1 2F900 300SLM 3 4F9 3 4F900 300SLM lt HiHzma Vuvsus J T m s i MODEL Ns 1 2F9 FNRH
30. 4 4 0 5V g min kg min SI Pa m s SCCM SLM lt KOFLUL 1998 10 SEMI standard SCCM Standard Cubic Centimeter per gl amp UFLUEL Ns
31. CE LILHIMHIHILI FM0101 S S P FMO105 S S P X 0 8 0 4 ll MODEL FMO1 S NO PPS l W 01 S 4 20mA 02 P 03 D 4 20mA 05 i FMO101 FM0102 FMO103 FM0105 a 1 8 62 Z 5 J D F SS 0O 6 80 0 80 0 1150 X H3 8 EA RT1 2 oAGM0653 05 4Lmn 2 gt 16L min 4 40L min 10 gt 150L min 396F S 0 596F S S 4 0mA JJ P
32. 3 Rus Rds G d 016
33. MODEL 38109 SERIES Flow Instruments amp Gas Generators K 2009 1 MODEL3810S L 0 5VDC 27 P 5 44 K K FLUC wam 3810 E MASS FLOW CONTROLLER 48 MS 4 ll MODEL 3810S amp x
34. HFM 200 15000SLM 1 5 L 0 5VDC L Ji Air 6sec 1 5 F S LJIN 3 4MPa 1Xx107Pa m s He E 15 35C Rg sb oA 8 8 t FU __
35. 030 J F S Ns 200SCCM 1SLM 5SLM 10SLM 20SLM J 2 Ar N Ar r EE I al 2 100 300msec 19 F S 04 F 8 100kPa O Door S 5kPa H 0 700kPpa 98UkFg m 60C JES SU JES S0 5C 45C 10C 60C m 10 9096RH DCO 5 3 0V DC5V 5 60mA RoHS H PC PTFE H 9 16 18UNF B Oko Flow Instruments amp Gas Generators K 2009 CH1 500mV SLM MODEL D7100 MODEL D7100 lt Model D7100 Model D7100 T 4000 20 4000 Vout Te 3500 L stss II tts O O 3000 1 0 3000 1 0 2500 5 gt 2500 OB a 4 gt LL 2000 0 0 2000 N oo j gt _ 1500
36. 5 15V 0 5V 0 5V or L _ V V mau IN d OU Minute OC 1 cc min SLM Standard Liter per Minute L min SCCM SLM 80 C 1 NCCM NLM 0C 1 SCCM 0C 1atm NLM 0C 1atm
37. 1 Q 9 L 4 u 19 0 e M5SZ2U 5 s lg e MODEL 7100NL Rc1 8 I I i l I l l 9 MODEL 7100NL Rcl 8 N 200SCCM 032 i F S 100 M ASS FLOW SE NSOR FLOW 00SCCM SLM S Air Ns F l 3 00 60msec DCU5 8 0V 0 50C 45C 0 80C 0 3MPa DCA 5 5 5YV si ns H F FR RR Hf I lt qi EN d 30 S SQ 0 896F G 0 8kPa 1WXG DXGH CS 5108 1 N NL Ll 1 EE W 3 S W 2 FH m T 3 s8 cF MI 39 lt Hq Ht WF HE HE HE g ea KOFLOC MODEL D3660
38. 147 96 109 15 07 gt _ gt gt OO h j 2 0 lt i DG O 5 V 15VDC 300mA 4 1 DMI eE 6 0 0 1 MODEL ICH 500 0 h h 4
39. 3 G 4 25VA A C AC85 264V E 500g W 96xH 48xD 147mm 0 3 F S 1digit i MFC BEBBBBJ OOO O O O Bm CR 500 Z RS 485 057 J gt WIJ HSL HB allii Fi H 3 O00S dO 1dGOIAN gt WISH Sl CN Wisiri 006 dO OMW AKOFLOC GENERAL CATALOG MODEL CR 300 CR 300 HO5T TERM W 7BxH 7
40. CK 0 5V 000 999 lt CK 1A 2A MODEL CK 1A es 9 05 1 Z 48 Age sSP oN Le 1 5 5mm MODEL CK 2A oS 3 OD Ngg 4 40 UNC CK 2A A DV tH 5V 10k 0 19 DKLTAOK_2A 5V COM MFC KSTA s CK 2A PSK MM 055 WISH SIN AUIII i 3 SA2ld3S JO 1dGOIN gt 00L Add 1 dOW gt Farsi 1 VO0 dO T3GOIA KUFLUHE GENERAL CATALOG MODEL CR 700A
41. 5V 1 50mAMax 3 1 Rs 100 1999 100 ll ERA FE 02 2digit BS ShOs oO 25VA MODEL A C AC100 AC240V 50 60HZ u 400g W 96xH 48xXD 131mm MODEL CR 200 MODEL 3660 N MODEL PSK 2TFX 1 DC DPM 3 PR DPM 3
42. amp S DPM 100 CR 500 100 125 1 8 F900 L mm 122 8 1 4 F900 127 4 159 4 1 4 UJR 123 8 155 8 Rc 1 4 102 134 3 8 F900 130 4 162 4 3765 W p CN lt i i NA N ocL ML 1005LM 3765 2sec typical 1 596F S 896F S 20C 980kPa 0 CR Ha 5 45C 15 35C SUS TE 1 4F900 3 8F900 ll 0 NR
43. tJ400g lli IL S 6P JAE No ie ni 24V COM COM 0 01 F OO O 029 gt LN ias iim ON 001 d 1 C2 KOFLOC GENERAL CATALOG MODEL D7100 MODEL DZ7100 MODEL 7Z100NL DC5V MEMS 300msec DC5V L KOR D77100 MASS FLOW SENSOR ll H lt H MODEL D7100 I l l I l l MODEL D7100 O N 1SLM
44. CRH 700A RS232C 4 LED SV RS232C MFC 15VDC 200mA MAX AC100V mm minum miu Ll TI 140 0 5 EG 144 EW EPP S ISA EI r 139 5 68105 u FLOW ADD orr Mow SET cLn ser anp IHDST KOrnr ca i SPE ES SE S S
45. eee 52 VISION 2000 53 ALM 4 ACM 10 DPM 3 DPM 243 244 poooogoooogoooooogoooooogoonoaooooooodooooogo 54 DPM 100 CK 55 CR 700A io 56 CR 500 re 57 CR 300 58 CR 200 MODEL ESK2TEX S59 PSK FB PSK 85 60 P es FE am 8500 60 FOW CONDO M Hi S 5 _ 2 61 8500 ooooooboopooooooooooooooooooooooo 62 3810DS ooooooooooooooooooooooooooooooooooooooo 63 64 Es
46. RS 232C 5VA A C ACIOOV 900g Ww 72xH 144xD 178mm 0 3 F S 1digit Ep CR 700 l III P i MFC O gt I MODEL CR 00 Flow Instruments amp Gas Generators K 2009 CR 500 j 868 S 5 RS485 W 96xH 48 6 RS485 24 MFC 15VDC amp 300mA MAX ACB5 G64V
47. lt gt Flow Instruments amp Gas Generators K 2009 3003660720 D3660 7200 lt i gt 7200 HFC303 7900 2 ss00pms0 lt 6599 gt 1 10 50 1 5 20 50 100 500 1000 5000 L 7 TI 6 SCCM SLM lt s HFM301 7800 50 100 500 1000 SCCM SLM FM0102 CE CSA FM0103 m NAS FM0105
48. 0 5VDC 15VDC 596 50mA G m MODEL S NR 046 F S AIR LS 3 S 3 NPT 1500SLM LS 4F S 4 S000SLM LS GF S 6000SLM LS 8F S SS 15000SLM Jl D sub 15PIN PN PN 1 NC 9 15VDC NC 10 NGC 3 NC 11 15VDC 4 NC 12 CUM 5 COM 13 NC 6 0 5V 14 NC 7 GND 15 NC 8 NC 3150 3250 3350 73450 D sub15 HFC HFM D sub15
49. IP66 MODEL DPM 100 Flow Instruments amp Gas Generators K 2009 DPM 100 PSK FB 48xX48 W 48 xH 48 PSK FB DPM 100 PSK FB 2001 10 PSK FB PSK
50. MODEL 5100 MODEL 9100 HFC 303 MODEL 3810DS MODEL 3100 MODEL 3760 HFM 301 MODEL HFM 200W LS 6 2 016 MODEL 3810S MODEL D3810 FMO101 0102 0103 0105 FM31 PFA VISION 2000 MODEL ALM 4 IMODEL ACM 10 MODEL DPM 3 MODEL DPM 100 na JEE BX YE MODEL CK MODEL CR 700A LE MODEL DPM 243 244 MODEL CR 500
51. HI GO LO 420 DC 2 Z DCO 5V S a HI GO LO0d 5mA LU JL AC250V 1A MAX DC 5V B Z 100 A Y DPM 3 PF ka KOELOC MODEL DPM 3 3 1 2 1000 48 Ass ge su 96 6 36 5 054 ACM 10 DIN96 x 48
52. COM 3 4V COM 4 COM 5 N C 02 IO0Z TdGOIA gt Hal HB lt gs sssi OIN0062 _TdGOIA K K FL GENERAL CATALOG MODEL 7900MG MODEL 7900MC L 1 MEMS 0O 5V 4 20mA DC24VBF5 300SLM B MODEL 7900MC 3 8 F9 V y 7 O 026 i 2
53. MODEL CR 300 MODEL CR 200 MODEL PSK 2TFX P058 7 MODEL PSK FB MODEL8500 PSK 85 CP 85CF FLOW COMPO MODEL8500 6 18 as MODEL3810DS R 0 8 01 w gt WISH Sl N til K K FLJL GENERAL CATALOG YA7H Mass Flow Controller Mass Flow Meter 3 KOFLUELy MASS FLOW
54. LP i KKUFLU 3200 MASS FLOW CONTROLLER 1 mm 1 4 F900 1 8 F900 1 4 UJR 10 NR 1 4F9 1 4 F900 SR 1SCCM 5SCCM 1 8F9 1 8 F900 LP 1 4UJR 1 4UJR 1 4 RHc1 4 MODEL 3200 I A pu sss MODEL x 3200 4r9 NH 1SLM 0 x Pa TP CON i N IROLLER 10SCCM 0SLM e 007655 0 10096F S 1sec withi n 2 typical O S pa o 0 596F S 20C 0 296F S 20C I F S 5SLM 49 294kPa P SO O05555 513 98UkPga i assis IX10 Pa m s Hem lt U 0 50C 15 35C
55. O MODEL 7800 H 1F9 HN2 H1SLMH 1 1 2 F9 1 4 F9 3 8 F9 MODEL 7200MG Flow Instruments amp Gas Generators K 2009 MEMS L 0 5V 4 20mA DC24V KO MASS FEGOW GONTEQE EP ELOW a 3 6 _ 70 2e M3 3 MODEL 7200MCm Rc1 4 _ s lt 1 MODEL 7800MCH Rc1
56. SSS 906916 AM RS RE NBR 174 F900 1 8 F900 1 4UJR Rc174 m a xl H Jl HI Cr i suD9 KFC standard SEMI standard ebVDC i as DIII 9 15VDC 5 100mA 15VDC 5 200mA Ft s Wl EE rm MU EQ Si am qu 3 H m s IO li 1000g Dsub9 KFC standard No No HI 0 5V 15VDC OI E O O COM 15VDC O OO NI O SH HII la mil gt T O 039 gt WISH Sl N I Ill iH 36 S Id S O00 E 1dGOIA gt Hal HB lt FS SR25 7 ON S IdS OOtS 1 K KOFLOC GENERAL CATALOG MODEL 5400 SERIES MODEL5400 196 1
57. DS20P 060 Flow Instruments amp Gas Generators K 2009 FLOW COMPO DINZ 7 CR 300 MFC MFM L FS MFC FCC OPEN J 2 RU5T TERM FS SET UPEN LOSE FLOW 5ET LER HOST ERM R 301 MFM Ji M O D E L FCC 3000 G 1 FCC 3000 G FCM 3000 G 1 FCM 3000 G jj MFC MFMI3660 MFO 3200 MFC 3760 MFM 3100 MFM N F S 10SCCM 20SLM 0IMISES0S 10SCCM 0SLM ES 6 1 BI N F gt J ef GSEC F S 6 1SEC F S 66 CSEC SA 545 I 0 50C 5 45C I 0 5
58. 5 lt F S s20SLM 98 294kPa 147kPa 294kPa 98UkPga 1X10 Pa m s He 5 45 15 35C ss gt 0 mat 366088 NE 3665 Sei MP 294kPa 784kPa 1 8F9 1 8 F900 EH 1 4UJR 1 4UJR 1 4 Rc1 4 MODEL 3660 8 0 3665 lt 4 Enl MODEL 3660 au N soc 0 x 036 SUS316 2 NBR 1 4 F900 3 8 F900 1 8F900 1 4UJH RHc 1 4 Dsub9 KFC standard SEM standard 0 5VDC 0 5VDC
59. lt i 109 2 2 C TY YT 7 E F3 1 v10UU96E G OCRE SS seC 0 10096F S 6sec 0 5SLM 1SLM 2SLM 1 50kPa N 1 52 F S NE 0 JE O 5 F S 0 696F GS 0 50C F S oUS91 6 SUS430 PTFE Bs Ni 4 SW OP O 3 6 SO FC 14 lx10 Pa m s He 0 1 5VDC 0 5VDC g 15VDC296 100mA EE 600mA 1000g Ji Dsub9 KFCstandard No No 1 6 Hi 0 5V 7 COM 3 15VDC Lo 4 COM 9 NC 5 IDVDC Flow Instruments amp Gas Generators K 2009 HFC 303 SERIES
60. LILI II i r IL KKUFLU 126 130 5 5700 MASS FLOW CONTROLLER gt ll _ 0 a KP Ra 0 1 SU SUS CO SR 1SCCM 5SCCM QS SL LP MP 294kPa 784kPa _ 0 i 1 4UJR k i me so yun Ps __ ub pl e MASS FLOW CONTROL EP lt O TI r m N 10SCCM 20SLM gt E So 100 HF S O 100 F 8 1sec
61. m F S N C 300SLM 500SLM 1000SLM P 5 Air N s m j pi 00 5 100 lsec sec 20C T oF Oo S ES S F S EE E SbBl 0 190 CE 100 300kPa 150 300kPa m eC 0C Ni 2 HR SI G rs OUO O HAB ml 1 O 90 RH0 BLU iss ft SB 4 P0mAIDCO 5V NE p 06 5 DC24V 350mA m 2 EEEES8Bn 1 0606 50 RoHS CE 5 05 RE 3 8 F900 1 2 F900 l Dsub9 No i P r 24V 8 COM COM 9 NC NC MODEL FC100 Flow Instruments amp Gas Generators K 2009 MODEL FC100 PID L
62. D 12 24VDC 0 70C 1MPa 0 50C 5 9096RH IP64 JIGS C0920 a a PPS 0 BS 096 22m 3m 85g 165g 100g p05g 051 Hal NI lt _ aS Il fi DN S3ld3S G010 6010 6010 10LOMWH gt Hal HB lt ll S IH S Vdd V IN di en3A KUFLUE GENERAL
63. 1 1 20 50ms 0 05 1 2 1 EE CH1 Sir le N 14 U 1 2 Model7800 40x40mm 7800 10x20mm 4X4mm 1 100 4X4mm Zk 2 gt t 3 400mW 7800 s 10m
64. 39 sz000 l F 2 lt 2 J c 2 40 5100 0t 41 9100 42 HFC 303 Can SOS a OR OX 43 3810DS SG aa puno ug EO OO 44 3100 45 3760 oe 46 HFM 301 OCRCEODOHROECEDCR2COSCCEOICRDIGCCOPCSCOXOCPCRKCGCOIPECECODROPSYCCRCOERCROEP 47 HFM 200W LS li 48 3810S eit 49 D3810 OO 0 50 FM0101 0102 0103 0105 ooooooooooooooooooooooooooo 51 FM31 PFA
65. 1 4F9 1 4F900 1 8F9 1 8F900 1 4UJR a 1 4 Rc1 4 3 8F900 3765 1 4F9 MODEL 3760 046 1 1 8F900 1 4UJR Pe Z h Dsubd KFC standard 0 5VDC 15VDC 5 100mA jJ _ J 5VDC 5 100mA amp 9 16 18 UNF 650g 3765 Jl Dsub9 KFC standard No No 1 NC 6 NC 0 5V 7 COM 3 15VDC 8 NC 4 COM 9 NC 5 15VDC Flow Instruments amp Gas Generators K 2009 HFM 301 SERIES HFM301 1000SLM 3 4MPa 6 8MPa 0 5V
66. 3 4F800 DsuD 15 RSUNG 2 NE N 0 bVDGC DO EM OS 1 300mm Jl D sub 15PIN PIN PIN I NC 9 I5VDC NC 10 NG NC 1 1 15VDC JE NG 12 COM 5 CUM U NG r 0O 5V 14 NC 15 NG 8 3150 3250 3350 3450 D sub15 HFC HFM D sub15 043 gt Hal HB lt FS SR 25 S dAS SUOLS HOW AKOFLOC GENERAL CATALOG MODEL 3810DS SERIES s MODEL3810DS MODEL38 10 15VDC s RS BE
67. 20C RI H dl I m Rh HH G SNIP FS lt SSLM 49 294kPa FS 2USLM_ 88 294kPa UC lb5C 35C 0 0596 F S C 10 90 O 5VDC 56 RS485 3600bps 6 ml DC 1l5V TOOmA ISV 200mA D02315 06 5 4 Dsub9 KFC standard For CE j H PTFE SUS316 ll MODEL MODEL Rc1 4 1 4F9 1 4UJR 1 4F900 RC1 4 1 4UJR ML e s I SG00g 033 099cGq TAOMN gt Hal HB lt FS SR UI ON 00S9G0 1 C2 KOFLOC GENERAL CATALOG MODEL D8500
68. No No 6 Hi 7 COM 3 15V 8 Lo 4 COM 9 J GSE 5 15V No 1 6 8 9 NC 3 989 100 HX YTLERIA Ns or Air 1009 2
69. 1 He 5100 5400 5410 32g00 S100D 1 SCCM SR 0 88 0 509 0 10 6 KFC Standard Dsub9 Dsub9
70. 159 MODEL2800 DC24V MLC 50 MASS FLOW VALVE PLOV 2 M3 3 ll L 150 400kPa M 350 650kPa H 600 900kPa MODEL FC100 e MopEL FC100 e EE __ x lt O T r T O J Bj N C F S 50SCCM 500SCCM 5SLM Z Air Ns Ar He Hs CO 0O lsec 0 96F G Oj CCO L l SO 400kPa M 350 650kPa L GO0 S00kPa 0 98GMFga 0C EE x s PEBE EBI i 10 909 RH 8605 OV DC 4V 300mA 4V 1096 5 RoHS CE NBR 0 L 6175
71. CE CSA z J i 7 FM310 FM3104 gt KE 59 1 10 50 50 100 500 1000 5000 CcC min L min 023 gt PUJBUSHrU NB Fir gt LN lt FS R ON 0092 K K FL GENERAL CATALOG 0 008 MODEL 7800 MODEL 7800 MEMS 0 5V 4 20mA DC24V minus mit mi nan MODEL 7800 0 4 0 3 GO0 m
72. 1 i 5VDC 1 6FB 6 5VDC 59 6 5VDC 5 D sub 2 Em A H J B S 0 SVDCEA15VDG 0O0 5VDCG Q S L 2 e CAG 0 90 Rh BUSEEUZUYC C 0 8kg 1 3kg 1 7kg 1 dW SE 2 Nn L 39 Wda CED 3Q Wda POWER LED sld3as A4958 dO G8 ASd gt Sdld3S g4 ASd TAON PSK 85 CP 85CF SERIES PSK 85 AC 8500 Q Psk 85 1 5m CP 85CF MODEL8500 CP 85CF 1M 1 5m RS485 232C 8500
73. 5VDC 5 100mA 15VDC 5 200mA 9 16 18UNF 800g J Dsub9 KFC standard No No 1 6 Hi 0 5V 7 COM 3 15VDC 8 Lo 4 CUM 9 5 I5VDC Flow Instruments amp Gas Generators K 2009 MODEL 3200 SERIES MODEL3200 3910 LH LI l CF L FS 1SCCM SR
74. CR 700A MFC MFM Wi E Ccn7ooA FC CR 700A XM HFC CR 700A 3m CP HFC303 CR700A 3M gt 3660 CR 700A 1m MFG 1M 1m 3M 13m MFC MFM IMODEL MFC I 2 CP XM CP XM CK 2A lm 3m 5m 064 Flow Instruments amp Gas Generators K 2009 MODEL 3100 OIRUDC gt lt AMD MODEL 9100 MODEL 3810DS MODEL 3660 MODEL 9 100 III IT OMDRUDI D3660 065 gt Hal HB Eh 7 U Vm NN K K FL GENERAL CATALOG gt mPJSHEI NBl zm
75. Flow Instruments amp Gas Generators K 2009 MUDEL3660 RS485 pisri pis n Til IlL I KO DIE Q 76 32 122 81 M4 4 KOELOC D3660 DIGITAL MASS FLOW i F S Ns 10SCCM 20SLM 39 u Sit 0 5 m JN JJ x s Es lt F S 6 gt 100 0 2 1 F gt 506 26 3 m 1 096F S 0C 0 296F S
76. P er UES U 98 AE SS 5 556 m 1 096F S 200 980k Fa F S 5SLM 49 294kPa F S COUSLM 98 294kPa kPa 1498 kPa JO 500 lu DE EE Gl Ro ht BU ul h H 10 9S90 BU 8E s UU YC C VE s A 5 0V 5V 4mA 20mA MC 0 Rc1 4 MM 81 Im 1 4F9 1 0 5V 0 5V 1 R883ac S3 3m 1 4UJR 8 4 20mA 4 20mA 2 RS485 5 38 5m 3 0 5V 4 20mA 4 4 80mA 0 5V 036 Fx E 0V 5V 4mA 20mA F5JS x 7 LED4 0000 9999 E 01 _ RS485 S232C P 2 Bn a Max35V 50mA
77. Be TmV ldigit mm J DC24V 300mA max DC24V 1096 596 piFE SUS IS E Jj Z 85 M Ff Rc1 4 1 4F900 1 4UJR 1200g OV 5V 4mA lt 20mA 30100SLM 8550 Flow Instruments amp Gas Generators K 2009 MODEL8500 MODEL8500 MODEL8550 105 0 2 RS 485 MODEL DB500 Loggig PC 31 ON OFF 100m MODEL8500 MODEL8500 MODEL8500 ID 1 ID ID n 31 TRx TRx TRx_COM 19PIN 18PIN 20PIN 7 037 gt WISH Sl N Uu sr mi 0098 TAOMN S Id S 0996 1d3GOIA KDEFLOC GENERAL CATALOG MODEL 3600 SERIES 1 MODEL3660 S amp S
78. D 4 20mA 052 i FM3103 FM3104 L min 0 4 4 2 20 5 50 10 100 3 8 s 3 4 I 396F S 1digit 0 596F S 10 90C 0 50C 3 LED 4 20mA tH LED2 max80mA 30VDC gaa 0mA max 10mA 30VDCO 12 24VDC PFA 0 PBT PI 5Xu ES a u 4 WaWaP0C0S rr J Ea om
79. Hl 1096F S IO096F 8 4 Model 7100NL FE MEMS MEMS Micro Electro Mechanical Systems MEMS MEMS i Ju lt MODELZ7100NL ma Ep F 1 MODEL7100NL 0 _ MODEL7100NL 2 022 IE gt PID
80. eS N 056 MODEL CR 200 Flow Instruments amp Gas Generators K 2009 CR 200 i le 109 I 16 i gg 9 6 DC 0 5V DD CSUMA 15V 25UrmmA G s
81. llap l C EF pas DC 0 5V 15VDC 200mA 3 4 k 0 1009620 0 MODEL 0 _ 9 v MODEL CR 700A 3200 N 3m 056 U PE c
82. 0 5 1500 0 5 1000 1 0 1000 1 0 500 1 5 500 1 5 0 2 0 OS 0 50 100 150 200 0 50 100 150 200 SCCM GCCM Model D7100 5C k ss sh 4000 2 0 4000 20 Vout 3500 1 5 3500 1 5 3000 1 0 3000 1 0 2500 0 5 2500 05 _ E 2000 00 2000 oo R tn N m 1500 O 5 1500 0 5 1000 O 1000 1 0 sl 500 9 500 1 5 0 0 0 20 2 0 S0 OO TS0 200 0 50 100 150 200 SCCM SCCM MODEL D7100 031 gt Hal HB lt FS R TN00 LZ 1dHGOIN K K FL GENERAL CATALOG MODEL 7 1 OONL MODELZ 100NL ra MEMS G0mW DC5V
83. E MODEL 9100 MODEL D8500 IL Il Vi V F A JS LINJ5 gt 44J koo om IL__ LAE P MODEL D3660 MODEL 9100 kou Pressure meter CCFL lt Baking System gt lt gt LNG MODEL D8500
84. HFC 303 HFC 203 1000SLM 1 096 1000SLM 15PIN D CONNECTOR STANDARD ZERO SPAN 119 4 Pr e ia 5 4 9 25 j B 254 50 8 A x 1 IO Y co 635 Rl m 32 UNC 6 300SLM 1 2F900 gt 300SLM 3 4F900 HFC 303 1 FITTING HFc 3o3 3 4 FITTING FITTING TYPE D
85. 20C 0 296F S 20C F S 5SLM 49 294kPa D S lt F S 205LM 98 294kPa mi U ZL S980kPa 1x10 Pa m s F ll 5400 5410 1 4UJR 4UJ 0 QS SL oO oe ses Casi eeoa o 040 0 50C 15 35C SUSS316L N Co PTFE ii j 0 IS 1 4UJR Dsub9 KFC standard SEMI standard O 5VDC 0 5VDC 5400 15VDC 5 100mA 15VDC 5 200mA 5410 15VDC 5 100mA 15VDC 5 100m 100
86. 4 H Ne FH 20SLM F _ A 119 5V 9 SV 2 4 20mA 4 20mA KUFLU 7200 MASS FLOW CON TROLLER fE N C F 8 50SCCM500SCCM 5SLM 10SLM 20SLM Jj Air Ns Ar He Hs CO 1009 1sec 830C 196F S 296F 5 0 296F S O 2 Z C 15 35C 500KPa AH 500kPa il 0kPa 7 27 JJ BlE FF B_ 150 400kPa M 350 65OkPa H 600 900kPa Wm 980kPa 20C Wa ikaks 0 50C OC 60C PegliaEaB 10 096RH Iru 4 S0mA DC0 5V Ips n 4 S0mA DCO 5V DC24V 350mA a SAN r RoHS CE NBR SUS RHcl 4 m 800g 800g 1000g Dsub9 No x 2
87. 5 2 MA Sv 5 Q lt 500 1000SLM gt Ko Z800 MASS FLOW CONTHOLLER J wa 5008CCM 50SLM 500SLM Wa FS 18LM I0SLM 1008LM STV jodosLM Nr b N Ha Hp CDs Ar Ns Rn SHRJ B RI lt 00 5 100 H 300msec 500msec seC 20C FS 12 F 8 36FS 50 FS 0 2 C 15 lt 35 F E 0 98MPa Dr HSE ERES S 0C lt 50C 10C 60C 10 90 RH 4 0mA DC0 5V mh DC24V 100mA 24V 10 5 RoHS CE 2 SUS303 N W 1 4 F900 3 8 F900 1 2 F900 1 F900 1200g 026 300SLM gt OU _ 800 OLLER OO OW N 9 15 97 30 5 32 J _ amp 46 ll 1 0 5V K 9 9 si MODEL 7800
88. CATALOG FM31 PFA SERIES PPS PFA 2 CE MODEL31 0 ag 3000 S 4 20mA P
89. O MODEL 1 4 100SCCM i PSK 1FX I lt a g 3810 MAS FLOW SENSOR FLOW i Ns 10 2SLM 3 50SLM 209F S 20C 5 0 F S 20C 0 596F S 20C 980kPa m 5 45C 15 35 C SUS303 PTFE jJ Rc1 4 0 5VDC 15VDC 5 40mA 15VDC 5 10mA C50g 350g ll _ No 1 15VDC No COM No 3 15VDC No 5 COM 3810 2000 3 3810 AMP171826 5 AMP171822 5 DPM 3 MODEL DPM 3 L S gI iqi CP TFX xxM CC TFX xxM KORUDE 380 gt WISH Sl CN AUIII i 3 So dAS SO18 1dGOIN gt WISH
90. OAC T a E H H H Hi 0 9 8MPa 5OkPa 300kPa 50kPa s OC JO 50 ll 109 9096 00 5V 4 20mA FQ 00 lt 5V 4 lt 20mA SV Iuz L FR IE Max35V 50mA Max35V 50mA RS485 9600bps MODEL DB8500MC H s 10 1mV 3 m HoHS CE DC24V 300mA WAS 4 V 1096 596 4 eoml 2 ss 4 20mA Rc1 4 1 4F900 1 4UJR a
91. SH CNN N44 K KOFLOC GENERAL CATALOG Dsub9 3660 3100 5400 5100 PSK 1FB a _ PSK 3FB XM STD1 XM Pisa PSK 6FB Sa Suka kusaya CR 200 ME Dsub15 CR 200 300 500 HFC _ CR 500 HFM DPM 100 ii DPM 100 mm sTD1 Ce _sTD1 1M lim 5TD1 1M lim STD4 3m 3m 5M I5m 5m XM XM 5400 PSK 1FB 5m PSK 1FB DPM3 CK 1A 3m CP STD1 5M CC STD1 3M HFC CR 200 1m PSK 1FB DPM100 5m CP STD4 1M CC FBDPM100 5M
92. 0C 15 lt 35 15 35 15 35C 15 35C MFC MFM CR 300 B C M L MFC MFM FLOW COMPO I 4 3eeo 3goo 3100O 0 37eo 061 gt PS Sma Sl HB wOdINOO MO A KUFLUE GENERAL CATALOG MODEL8500 gt Hal HB lt spn 00G8 13GOIAN R MODEL8500 MODELS500
93. 0g MODEL5400 Jl Dsub9 KFC standard No No 1 6 Hi 0 5V 7 COM 3 15VDC 8 Lo 4 COM 9 5400 5 IDVDC 2 3 4 5 7 Flow Instruments amp Gas Generators K 2009 MODEL 5100 SERIES MODEL5100 3440 MFC 3440
94. 39 Q min m F66 F16 5 SSS 05 5 1 10 85 85 8 5 35 min L min 1 5 F 8 0 2 F S L L L UA 0 100C 45MPa H3 78 DC5 24V 8mA 0mA 57 RSS ll TRH55 VISION2000 VISION 2000 a OA 7 16CP 16CP F66 4F44 4F22 F16 5 4F44 053 lt _ M al NB S S A up sa S3JlddS 000Z NOISIA gt WISH Sl N Fii Hrai cho Ndde Ndd OL NJVY T NTVY AON AKOFLOC GENERAL CATALOG MODEL ALM 4 ACM 10 DPM 3 DPM 243 ALM 4
95. 65 66 Mass flow meters and il MODEL 7800 MODEL 7200 MC MODEL 7900 MC IMODEL FC100 MODEL D7100 IMODEL 7100NL MODEL D3660 MODEL D8500 ka sampa CT N I lt a KOFLOC x gt Ee mu DE 07 MODEL 8500 MODEL 3660 MODEL 3200 MODEL 5400 rira m TH Loa 8 Pam
96. IM AY FITTING TYPE DIM AY SWAG 1 2 W NUT 7 56 197 6 SWAG 3 4 W NUT 8 44 214 4 DIM B 5 36 136 1 DIM B 5 76 146 3 DIM C 1 36 34 5 DIM C 1 56 39 6 ll _ 0 9 E HP 1MPa 1 2F9 1 2F900 300SLM 3 4F9 3 4F900 300SLM Ji Air s U S 10600 OM gt smysmhglsHiri NBl E CT Pn El E OE ILA O 100 F S 3sec SS 606 9 H within 96 typical 196E S b 0 2596F S fE lt F 3 4MPa HP 6 8MPa Z L 5 m F J lO o mm oE Hei ya k a lt ZRU 5 905 JZ Jj Z BB 1 4 jo DS GN 92 4 A 1 GF900 F 5 gt 300SLM 3 4F800
97. Mass flow meters and Controllers Mass Flow Controller Mass Flow Meter esas 156 19 Mass Flow ControlleMass Flow Meter C i o Cs 20 21 22 2 7800 24 26 7200MC UU s 27 7900MC ndnboobpoooocooogoooo9968Gooooopotoonooooooaodoboooddpoooood 28 FC100 sana ns Ne n ns 29 D7100 ooooooooooooooogooooooooooo0ooooooooooooogoooooppopooooooo99o 30 31 7100NL oooooooooooaoooooooooooaoooooopooooooooooopoooooooooooooooooooooooooogooooGo 32 D3660 ooooooooooooooooooooooosooooooooooooooonooooooosoooooooooooo 33 D8500 sya 5 72 7 Z 7R1 1 FEl Z X 2 S00 e000 OO 0 0 0 LIT 34 35 8500 e000 OO ON OO 36 37 3660 pooooooooooooooooooooooopoooooooooooooodooooooGo 38 3200
98. Sl NI Fu i S S O18 d 1d3G0IN C2 KOFLOC GENERAL CATALOG MODEL D3810 SERIES D3810 MODEL 3810 CPU IS 1 wa KOFLOC am s sma asia D3810 w MASS FLOW SENSOR MODEL3810 Z F5S5 i No 50SLM S25 5OSLM 3 RD 200C IT 925SLM 3 FS 05 F S s K0UELD fi 980kPa psg7 E 5 45C 15 35C MASS FLOW SENSOR _ SUS303 PTFE JJ ZA BB M LM U FZ Rc 1 4 0 5VDC I 5VDC 5 60mA 15VDC 5 60mA 500g l
99. W 1 40 Su a 4 5 Model7800 18 1ft 10 0 1 m 0 10 sa C 1 0 40 025 ON 0092 gt WISH Sl N Fu i 0092 1dGOIN K K FL GENERAL CATALOG 5 1 500SCCM 100SLM gt AKO ZEBOO ELER 8 FLOVW ZN a N q 12
100. biF within typical 1 096F S 20C JBE O 5 F S 20C 0 296F S 20C 0 50C 15C 35C F 5 5SLM 49kPa 294kPa lt F 5 lt F 8 205LM 98kPa 294kPa 980kPa SUS316L Au PTFE 1 4UJR 1 4F 900 1x10 Pa nm s He 0 5VDC 0 5VDC 5VDC 596 100mA 500mA ff Fm HE 1000g Ji Dsub9 KFCstandard No No 1 6 Hi 0 5V 7 COM 3 15VDC 8 Lo 4 COM 9 NC 5 IDVDC 041 gt Hal HB lt FS SR25 UU ON S ld3AS O016 1 K KOFLOC GENERAL CATALOG MODEL 9100 SERIES MODEL9100 APC Auto Pressure Controller
101. l No 15VDC No 2 COM 2 No 3 15VDC MODEL D3810 1 4 No 4 0 5VDC No 5 COM h Y h 9 3810 AMP171826 5 AMP1 7188 5 3810 1 4 N i DPM 9 PSK 1FX MODEL DPM 3 OOOOOO QOOOOO OOCO se oss COOOO O OO O O O O O O O O O O O O O O Korl0r OO CO O OOOOOOOOOOOOOOO OOOOOOOO OO OO OOO D810 MASS FLOUY SENSOR PLOV MFM ua e 050 Flow Instruments amp Gas Generators K 2009 FM0101 0102 0103 0105 SERIES FM PPS 0 5L min PPS
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