電気電子工学科 - 鳥取大学研究成果リポジトリ
Contents
1. SAM 1000S SEM S AM SAM 1000S SEM SE 2 2000A SAM 2000A 1 25kV gt 1x1ld A WAL YALE 1 135 PREK 4 kV X 12 5mm Y 20mm Z 12 5mm V hE 180 nae RBIF Y REX 10mm 1 7x10Pa SEM SAM 6 CRT X Y SAM 1000S X1 56 T A oot a ea fli F SEM SAMA AF AI RS232C i2. AES X Y vs_acq 59 Ag Cu Mesh ee dN E dE arb unit a SEM Electron Energy eV 9 Ag Cu AE S b Ag Cu 8 SEM AES 50um a Ag 349eV 357eV b Cu 56eV 62eyV 10 SAM 60 SEM SAM I
3. OS 9 6 8 0 0 0 C RS 232C 1 4 1byte 2 0 1 4by te RS 232C 4 SEM S AM 4 AES
4. 1 SEM S AM 20 55 VIP BOARD FRAM 256KB RAM 1MB FDD 1MB FDD 1M8 OS OS 9 68000 BUS VME IEEE1014 C MICRO COMPUTER SYSTEM ADC 12bit AD I l DAC 16bit DA i eee B SaM 1005 CRT TERMINAL PRINTER A SAM 40005 CONTROLL SYSTEM TSS PLOTIER BQ 3 2 SAM 1000S 2 A SEM S AM S AM 1000S SEM SE SC EBERT AESA w dE N E dE E N CE SEM AE S SAM 1 3 3 SAM 10008 3 3 1 2 B SAM 1000S SA M 1000S
5. S AM SEM SAM SEM S AM SEM S AM SEM SAM I MR Auger Secondary electrons electrons 1 SEM SAM G AM 1000S 3 SEM S AM 3 1 2 SEM S AM 1 A SA M 1000S B SAM 10008 C SAM 10 00S SAM 1000S SEM S AM AE S
6. PIA 1 A B 12bi ROM P IA2 PAO Y PA 1 H gt L SAM 1000S D A OP SAM 1000S 3 LCM 68K MPUE16 Gr bitMCB8000 10MHz SRAM osorps 256Kbyte ROM64Kbyte pacsi RS 232 C 2 BU S P 1 A A PTM 1 P 1 A 0 8 b i RS 232C
7. X Y 2 SEM SAM 1 SEM SAM SEM lt 2 0 0
8. P IA2 PAS3 L BCD 1IC ON BC D PIA A B D VM DATA D VM SINGLE BOARD CONPUTER Latch SN7aLS373 MC 68000 Latch SN74LS373 3 3 4 A D A D 6 A DD SAM 1000S SEM SAM AES 2 5 10 20 12b i t A D AD574A OP I C P A D PIA3 PA0 PA7 PB4 PB7 3 4 3 4 1 2 C
9. P I A 1 3 X Y 12b 1 1 D A 2 1 6 bi tD A 1 8 b it 1 2 bi A D 4 2 m 33 Q A lt 20 57 3 3 3 16bit D A D VM BCD 5 D AC HP16B 1 1IC 2 PIA 2 1 C 3 P 1 A 1 A B 16b PIA2 PA2 HH D A OP SAM 100 0 S D VM BC D P I A A B
10. Ag400 Cu400 Ag Cu 100 8 Ca SEM 500 C u 100 Ag400 8 b 8 a A B AES A B 9d Ag400 Cu1 00 AE S Ag 349eV 357 eV C u 56eV 62 e V Ag C u C u A g 3 a ld Ag S49eV SAM 3 57 eV SAM SAM 3 b
11. 16b ij 1 Y V 68000 V ME IEEE1014 MP U VIP Video Image Pro cesser F RAM Frame Memory FDC Floppy Disk Controller MPU TVME 100C MC680 DATA 00MPU 2 RS 232C 1Mbyt eRAM ROM RS 232C V I P ME C 17 1 3 F RAM BCDL ADDRESS BUS BCD8O DVM BcDLOO BCD8000 8CD10000 8CD20000 BIS SINGLE BOARD CONPUTER SEM SAM SIGNAL AES 6 A D ANALOG Switch 58 FALE WEAR GRAXA EERE RAH SEM SAM I 1 1 0 512 0x00000 O0x3FFFF
12. Cu 56eV 62eV SAM SAM S AM 1H 429 1 0mS 5 SAM 100038 gt CRT SEM S AM 1 1989 2 SAM 1000S 1984 3 6 2 1987
13. Wt
14. 1MR1L Ey b 2 84 Ox00000 Ox07FFF Ox08000 Ox0FFFF O0x10000 Ox17FFF O0x18000 Ox1iFFFF 0x20000 Ox27FFF Ox28000 0x2FFFF 0x30000 Ox37FFF 0x38000 Ox3FFFF BI7 FRAM CCD F RAM MEC 1 7 1 4 256K byte 512x512x8bit 1 512x512x1bjit 8 3 4 2 FRAM 7 F RAM 256Kbyte MPU CCD 1 3 0 3 5 SAM 1000S 8b it
15. COMPUTER SINGLE PIAO K BOARD COMPUTER PIAL fe PIA2 CONTROLER 20 0eV 1600 0eV 0O 1eV 0 1 50V sec EE 2048x2048 MPU 68000 URE LATCH GATE CONTROL 12bit ROM 64KB RAM 256KB PIAS TERZ a SANIT AGIA 2 12bit A D one CONVERTER SEM SEM 16sec RE TEANAS SAM 64sec MIN BUFFER 3 SAM 1000S ANALAYZER VOLTAGE 18bit 2 SAM 1000 S 2 3 3 2 SAM 1000S X Y 2 12bit D A 4 AE S SEM S DAC80CBI V 2 AM IC 4 P IA 2 OP
16. Key words SEM SAM I fF 1989 9 H 1 Computer Image Processing for SEM and SAM I Development of the Hardware by Katsumi NISHIMORI Heizo TOKUTAKA Naganori ISHIHARA Yasuhiko WATANABE and Satoru KISHIDA Department of Electrical and Electronic Engineering Received September 1 1989 We introduced a microcomputer system for image processing of the SEM SAM scanning electron microscope scanning Auger electron microscope apparatus SAM 1000S All the operations of the SAM 1000S apparatus except the movement of a specimen the focus adjustment of the electron beam and the selection of the magnification were automatically controlled by the microcomputer Therefore all the instructions for the measurements were directed by watching the images on the monitor display of the microcomputer As the image on the monitor display was brighter than that of the SAM 1000S apparatus the observations of the images did not need a dark room Many kinds of the data analyses for the SEM and SAM images are now possible owing to the improvement of the picture quality and the various techniques for the visual expressions by the image processing using the microcomputer Image processing system Scanning electron microscope Scanning Auger electron micros
17. cope Microcomputer controlled measurement 54 FF 1 SEM Ue BT SAM SEM SAM S AM 10008S5 SAM 10005S SEM S AM
Download Pdf Manuals
Related Search