光源事業ーUVランプ関連
Contents
1. LE 9100S BML 10001DE E Model BML 8000DKL Relative spectral energy distribution E Model BML 8000DKL Intensity degradation data i line BML 8000DKL 100 BML 8000DKL a 100 80 E 90 2 u Z 60 g 80 E b e g c 40 70 i L i L l 0 200 400 600 800 1000 1200 Operating time H 20 L 200 250 300 350 400 450 Wave length nm 11 NESE ET SHU ES Super High Pressure Short Arc UV Lamps For FPD Manufacturing FPD 33 Equipment Lamp Type BML 3500JF Power W Voltage V Current A Lifetime h E BIT ARICREA ZY 7 Figure NO BML 5000UJF BML 5000JF BML 8000UJF 8 000 BML 8001F 8 000 WACOM Standard For FPD PWB PHOTO ETCHING BML 10000UJF BML 16000 10 000 16 000 BML 17000 BML 18000 17 000 18 000 BML 25000 25 000 BML 35000 E Construction of short arc UV lamp Lead wire Lead rod Tungsten E lectrode Tungsten Metal base C Filling tip ham Terminal Luminous bulb Quartz Arc gap Trigger wire Sealing section Conductive foil Molybdenum Sleeve nat Metal base O a L j Reflective coat Threaded pin L 0000 0 35 000 Handling Precautions 1 Be sure to turn on a lamp in a lamp house because the lamp radiates strong UV when lighting and increases the voltage in th2. CIR 9 Ja KT UW3V7 SUPER HIGH PRESSURE SHORT ARC UW LAMPS Nr WACOM presents UV light sources to realize higher precision in the electronic device field and large sized display panels in the display panel field WACOM super high pressure Short Arc UV lamp is used as UV light source for semiconductor manufacturing systems exposure system such as a semiconductor device display panel and printed wiring boards Being a point light source of high luminance this lamp radiates emission line spectrum of 365nm 405nm and 436nm which are necessary for exposure E Spectral distribution of radiation et Gla G TEU LSI OI v 9 LIBR ENHET INA ZAENI BV Z BOM NA VAR HE Ny 7 TV TT Z KL LER CI ETP v TRIRE CDT Y KERI RENEI LT DI7 ZMR NA YF RR TFT LCD P LCD BH7 714 IVA TS A TT AT LT BRE EL 74 TL EDOS KRI ATL BEDRICHITS IPA DER NA VAR TOWEFT iI ABER COE ACN CWS RT RS NE RHH ZA a hV 7UVIV Tee I BV UI S TCHY ET S Luminance E Luminous intensity ah BML 3500JF distribution in Arc distribution l BML 3500JF BML 3500JF 180 160 150 140 100 i a ed EER PERRY es HRS S 60 50 ASX E a o O gt E LISS ONY gt 056 E VS L CLC OO 40 18300 gt amp i 2 20 i 0 20 30 40 50 60 0 200 250 300 350 400 450 Wave Length nm ya K7 Z7UW gt 3V7 HSS Super High Pressure Short Arc UV Lamps For Semiconductor Manufacturing 44234 E1RSZRAB SOR Moder W
3. ITIARHSENITL VETS OT Tk HANS BU THIDE ODA FG Ho HIT TERY TIFT lt HEEN OAAHFET ZL TRE BARORALE ee Er I 4 IVAZ DMNUMABS ED TEEN TRUC LS 3 VY LC RLH S CTOSDED DF CART CHBLCES B25 AIO LET QHITADIT I TIER BORRE ERIRE Jo FY TDAI AF SATANIC TSUN KT AO REZ EAD C DGT C S KEN TDD FER AMEDECKH Av ROMRALED EB XAREMS HALT c KEN OERAADIY TSI AT UE TEUR dC EXREWELT WG FS TE DME SEB CORRAL TC TEL BED HAP IK ERIS EPHACHTIETOC TAPREHBORALEVUES 19 Abi 85s 415 AN ZU Bor FANG Har Hr F24 MINE YO Ad eo za XH S U Ess 419 38 M rol GA SKS of FAAS aro ASS 2 Ad Qe HU 4 VE i5 5 fe 45 Fo ds da HZ Bol TMS aey Holo Q ET gd is 3 ir AG Fol gece Azo Holt 29 St Me als N Q op Bor FANG Swe aedo 2 Ved 8 220 OG Z 85 Z HHA BES Fol THO Ha SA gH od NSS Meld a2 BSR HEA MS APN ME AAS AS TUNG HE Be T ATH Bae Heg eo 2 Aae BH ROL 799 BA ape HEA MAS MFAS APA AM Z ET Maud A ei Hele Azo Se 545 TU YHE YA ALE of FAA Ee HEALY rele 29 AS rox Bor FANG errs e 1 OMe A WHS AGH 585 BA NSS aH yarad Bot Sd CSAS TZ Heyo gud 82 45 84 59 USE HEA AG FANG HZA D Heyg Aol of Sup az Hay Y ele Fo fare HESA Meg BALL oA BES Fah TAAL Ho BUS MS Hza E Mole NAN 8728 sks oy TU AS Hol EN Ge 75 aged QU Fat p gS ra ges AS ABH FL UH E Hot gele HS Aol WAC YS 289 gdo 8 4 auc es Y 54 gee ish ao EIE 997 SDE Nzi Azt 22 HL Wu 23040 IE Ste UP OM a HAE NEO OM BUA BAG FAG Quo Xg 3 axe ofo o oln
4. S 351S 120 60 160X 145X377 Hairline Enclosed BMS 5015 0 93 120 77 5 160 145X377 Hairline ag Enclosed DC KSG 1002MHW 22 85 38 350X 190X475 D Booe KSG 2002MHW 4 150 37 380X 235X560 JD Sig KSG 3502MHW 7 150 56 380X235X 560 en Enclosed DC KSG 5003MHW 7 3 110 60 400 265 X 650 D Booter KSG 8003MFW 10 5 130 80 400X 265X650 D Enclosed KSG 15 6 160 95 420X 297X 680 D Enclosed 10003HFW 22 2 200 13 5 550X415X 695 Enclosed KSG 36 4 350 200 480 X 850X795 Enclosed Eee ee ee TO Polished WACOM s power supply is designed to conform to the characteristics SHORIIREILB RI VYaA kVY PUVIVYIDATS of WACOM super high pressure UV lamp lea RAR ET C BHU Ser G TUC TU je HAT v FY LEH LS DLR LTE LC LU S WACOM s power supply is smaller in size and lighter in weight than syk VINA ME ELAS LELK TORAL before by adoption of a new switching method realized by the latest Wit Oy S c K UN STR RA KOCMAL EEC Z transistor CICK U FRATAR U ATRAE CRED OZER RAN SME A power supply develops an extremely high voltage condition when DAREERUET lighting Carefully follow the handling manual for actual lighting Use WACOM s power supply when lighting WACOM super high pressure UV lamp Example to use WACOM Short arc lamp Application with collimating lens system Application with collimating mirror system WACOM short arc lamp Collimating mirror Condensing mirror gt l WACOM short arc lamp Second plane mirror Integra
5. attage Voltage Current Average UTs Gap Li L2 a d Metal Base oure No w v A x1 h cold max mm max mm mm mm Anode Cathode 9 BMI 200D1 BML 250D3 BML 250D4 BMI 350D1 BML 350DP BMO 500D1 BMO 500DM BMO 500S BML 1000DSF BMO 1002DF 1 BML 1003FAL 700 1 000 BMO 2001S 27 HEX BMO 2002SA Ve Specification Wattage Voltage Current Average Life Irag Li L a d Base Paure No Modell W V A X 1 h nans nm max mm max mm mm mm Anode Cathode Sue 012 KXM 501A VA KXM 501D VAR KXM 5000MF 5 000 1 Average Life IN cases of continuous burning at rated lamp current x1 PER ERE GER RIILUE SED FEE FIA Trelis Se FT HLTV HIF ET S Model KXM 5000MF Spectral distribution of radiation 350 400 450 Wave Length nm 100 KXM 5000MF E Model KXM 5000MF Intensity degradation data i line 80 KXM 5000MF j 100 G S G pe O l 2 E 90 T 2 l Z 80 20 70 L I I E 0 200 400 600 800 0 I Operating time H 200 250 300 BSE JM KT UV STZ Super High Pressure Short Arc UV Lamps For i Line Stepper i RAF Y JX B T R 7 a h L U 5 T Equipment NSR 2005 i8 A Lamp Type KXM 2000NIF H Wattage W Voltage V Current A Lifetime h Figure No NSR 2005 i9 110 NSR 2205 i11 KXM 2001NIF NSR 2205
6. e lamp 2 Never look at a lamp when lighting Strong UV radiated from the lamp injures human eyes 3 Clean a lamp with alcohol before fixing Due to such stains as fingerprints and impurities the lamp loses transparency and life is reduced 4 If a lamp should be fixed at the both metal base in a lamp house the lamp might be damaged due to heat expansion Leave one end unfixed giving 2 3mm movable space 5 This UV lamp is designed for vertical lighting Be sure to place the UP metal base top Be sure to place the cathode and the anode as specified Erroneous fixing causes breakage of the lamp RREO A l 12T SUT AB AFR TIE RIAL TN DEE TITR S FIOT J 321 MO ADR Oa ET LC FEU 2 DY TF THA ERLO TEL TH H B KTL 08 ITS TRIER EET Sie eT DB VET 3 DY TIME ED BUL TILT LES CHRUY TD SETS CT EN TS BEE DANITY CORT L e Sa OD a TID aE E L Fm WL d 4 77 M40 EO Mie BES DE SAR IC C U RIE SAB TB V J BIOS LA Rh 2 3mm FEN HR ZEEL L FAL 5 UV FTV FIHHE SIT TY UP ERNEST HILTF S Are HUE PERRO IRA JERV REL ESITHEMILT FE gt DED dL HEI EDI LARE TEIR RIL TS HU y EE ORB Power Supplies for Super High Pressure Short Arc UV Lamps X a 77 7 UV 5 TART Specification I Input We No load Load Load Max Ripple Dimension ae Color aa Moder ig AC50 60Hz V current KVA Voltage V Voltage V Current A Current mm Panel Cover S s N4 BMS 251S 100 110 40 160X 145X377 Hairline Enclosed Leather BM
7. i11 SHRING3 NSR 2205 i112 KXM 2002NIF H KXM 2011NIF H NSR 2205 i14 E KXM 2510NIF NSR 2205 i14 E2 NSR 4425 i KXM 2510NIH KXM 2501NIF NSR SF100 SF110 FPA 2000 i1 FPA 2500 i2 i3 KXM 3500NIF KXM 1500CIL FPA 3000 i4 i5 i5 iW MR KXM 2001CIL FPA 3000 i5 PAS 5500 100C 100D KXM 2700CIL KXM 1500AIF PAS 5500 200 KXM 2500AIF PAS 5500 200B 200C 400B 400C E Model KXM 2000NIF Spectral distribution of radiation KXM 3500AIL KXM 2000NIF 100 BU av O l Intensity i O N O I 200 250 300 350 Wave length nm 400 E Model KXM 2000NIF Intensity degradation data i line 0 KXM 2000NIF 100 Relative intensity 0 200 400 600 800 1000 Operating time H 1200 1400 1600 ya K7 Z7UW gt 3V7 HSS Super High Pressure Short Arc UV Lamps For FPD Manufacturing FPD 3248 AAD 7 Equipment Lamp Type Wattage W Voltage V Current A Lifetime h Figure No BML 3502DK SCREEN MA1000 6700 series BML 5000DK BML 8000DKL FX 201B 301D 401E 402E 501D BML 3501PNLF FX 501B3 601F BML 4300NHL LE 4000A DEL 3500H LE series DEO 3500H LE 4050 DEL 5000H LE series DEO 5000H HITACHI LE 5565 DEU 5000H LE 8000S DEL 8000H LE 8000A DEL 8004H l e a a ola
8. n Be sure to operate the lamp in specified lamp housing with its door closed Be sure to wear particular glasses to prevent ultraviolet rays when looking directly at the operating lamp Be sure to return used lamps to the manufacturer without breaking or throwing away because high pressure gas and or mercury in these lamps will cause bodily injury and environmental pollution NN Ba ORTHOD IV FE BRLEWCCKEELO DYT EDA Fre AY ORTHOD YV TPSOXe BEREICH CEW CCE TI RSE EO C TRW LTR VET RITHERISHIEB LL GLA TLO DR LAO Q LEEU MEDBRAE HVET aT ISAT LIS 5 NETT FICHE PTA EVRA AMAUOISIEWCS ESL KRORAERVET Oz FORMA pe CEC HICL CRIT DE EREVIK OTL ae oo Oz TRUM T SATS CHAOS REE T lt TE EL HALE BSISEORALBVUET ORN BAL Pe A AROR IA UWS Biz yO T HE RBORACBVES GGF TRR DO TL HRL IRIS ANNA ti VIBE DEN LEWES TRE Ef ACY RP EOHEMZIEVT CHEV OFA mt LVETNLUEI CODY TARAS MOLET F Ame AZ CIGN LT LDS D ADR DR K L EN ChAT Z Tdp VET ST BE TAK EMEARI Y TIRE AMO RACEVET AG tes go Ge TKL 3 A DY T BYIRLY EDERAL OT TE Fl Fe So eee KDICL CC PEE REFRA AHL A ANS EBRD lene LOCKED SANEA LES URD IN ORRE TE BUT EEU RITT c L IC ZR DE L OI I TIE HIR TS HS HD S 15 LE SLC H AC K KE Ln WERE SST RATH RTS A ITK R DIS L I CLEDBDSVES Bix REISAT BAN TOMME FA 7 EU a STB UIT A ES S BASA WEA EROT HET RL LI E a Iemm OFEAHITDHAIK UP L K HC LUE S HU C BV UC lt TKL Ele GIBI USC LC AT L BUTE 77 TOR
9. nd cooling air as indicated Wrong application may have the lamp burst and reduce its life Precautions in Handling Do not soil the lamp particularly the glass part by touching it with bare hands Wear protecting gloves and hold the lamp on the metal part Dirt should be cleaned off with alcohol soaked soft and clean cloth Cleaning the lamp before operation is always recommended Handle the lamp with care and avoid shock and strain Shock or strain may damage the lamp and cause poor operation even though it looks fine Use the original packing material when delivering and returning the lamp and instruct a transporter to handle the package very carefully Position the anode and the cathode correctly when fitting in the lamp and wiring Regarding markings on metal bases stands for the anode and for the cathode For perpendicular operation of the lamp position the metal base of UP mark top Do not incline or put the equipment down on its side when operating Otherwise operating direction of the lamp will vary When installing the lamp in the lamp housing hold the metal base to be fixed to it Then fix the lamp as tight as it would not be easily untightened by hand Lack of cooling air causes burst and short life of a lamp Be sure to clean air filter Confirm with hands before operation whether cooling air is surely coming The operating lamp acquires high temperature and radiates ultraviolet rays to damage eyes and ski
10. of SW HE op 10o gt ofo 12 ol IS tO L N FUN BS HE HEN Az sgo UOT TS gor 390 39 ec AG BAD g E FAO GE NAS YEH Wa FUNG z MESSI HoA Hao BE Tat cir ado Buch HES gye tt LE Fo XS ASM SUC AE Z HEN L LE opa 29 HEN Maker Hed FAAS I U e go go gone TU yogad gedo Eu KE Ad GENERERER RE Aad Ossi DE INE A SARA BED BN UR we He A is 52 5 oxen STRSURS HE Gori e a SSA ST HSE C os SAEMELNESTRIEET Z IRI BLR RIT RTE od OBH ERE ASAT AEREA RHE Z oxi Ot RHS RIRE AGE OA BREE DED Ae Rh DK BE EE HH OPE ERE E NEBE FRED BRER BIS ENKEERR EHETE EE SSN ER ET BREAKERS TAH EJE AE OEE FERARI HH FARER SR Shas IR T E F E HEER EON mNS RAB AAR R a E A BER E TT fl MERRIA GERRARDS SAA LAN BSA Re HERE ARERR REED RAI EA ER ER RBG MASS ily UB OGTR ERSALARATSERGON IME EELE SKENTENA Pah EG SMB UP D 55056 Z Z SSR L BAIR BGS WEA DERKTAE OS BER AER R REN EK HTS ENESTE FEE BAIL OLEA EE ME BIE Dee OD BY T IR 525 HUE Ta AE Er RHPA BARE BD ae HHT Mand RILE OE THES ink REA ARE RRA SAA BREA ES AER AET TTR RAB RT PARE FE LSD ie Efe MARIA IHS T STZ BENET SE Ais WKS Ae Rate fol ay SE ae Se FA 30 00 Z Se A ee DEE
11. ting lens Integrating lens g 7 S hutter Collimating lens S ubstrate S ubstrate 13 HANDLING MANUAL Y TERESE 18 Please be sure to read this manual for safe and adequate use of our lamps Warnings Do not look directly at the operating lamp Highly luminous and ultraviolet A rays from the lamp damage human eyes Do not expose the skin direct to the operating lamp Such expose may cause an inflammation on the skin Keep away from the lamp during and also a short while after operation Q Otherwise high heat cause a burn Keep the lamp away from flammable material such as paper or cloth during and also a short while after operation Otherwise high heat causes a fire Be sure that the anode and the cathode of the lamp are correctly 4 positioned as indicated The lamp becomes unusable if mispositioned Be sure to use specified equipment and a specified power supply Wrong ae application may have the lamp burst Turn off the power supply before installing or removing the lamp and also betore cleaning the equipment Otherwise a worker may get an electric shock AN Cautions The lamp is glass products Protect the lamp from strong shock scratching twisting and bending Change the lamp on or before the expiration date of the average life Overused lamp may possibly burst due to deterioration of quartz glass Be sure to use correct electric current voltage a
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