FIB 装置を用いた微細加工
Contents
1. 2 1 Snm 20A cm 20nA 0 5X0 5um 2 4 X2 4mm2 lt E mail muroi ims tsukuba acJp Ga 30kV 5 30kV SkV2. TEM 3 0 ee 0 Ma MN 1 pi ts M i 1 CC i hd Ne i i 13 14 CdTe 14 15 1um lum 15 TEM 1 SMI2050 Rev 3 1 2 FIB Q amp A _72
3. 2 Le CiaHio W CO 5 X 0 5Smm Y 0 5Smm Z 0 10mm T 3 60 R 0 360 S0mm 12mm 2 2 FIB 1 0 01 0 Ium PR 2 a CO er 20nm 9 29 Si 10um 10um Sum 1 Beam DR BeamSize h m a View View SIM UFine URoush Probe 69
4. 7 7 TEM 8 8 8 8 A MM TEM 6 9
5. 6 TiO CrO 0 06um 10 A D FIB A D B C 10 11 10 FIB FIB 11 A D Ll LD _71 FIB CrO gt Ga CrO YR TiO Ga DD 7 FIB 13 CuMnPt 30um X30um 50um URough 2
6. BeamSize FIB 1 Si 3 Sum BeamCondition 4 1 Mid Fine UFine 1 4 A 5 5 3 TEM SIM
7. TEM 2 15um 2um 0 5um 3 TEM 6 9 I IV CdTe TEM 3 0 1nm 6 TEM 3 TEM 3 0 4 90 0 td 0 2700 FIB Ga ri
8. FIB OE FIB SMI2050 14 21 COE TEM FIB PC 1 TEM Transmission Electron Microscope ye TEM 0 1um FIB 2 FIB SMI2050 Focused Ion Beam FIB SIM Scanning Ion Microscope TSI 2
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