NewView シリーズ用 MetroPro 取扱説明書 ＜簡易版＞
Contents
1. Done Current Selection 28 60 22. Tilt X Tit Y Tilt x Ref Tilt Ref IAuto Step Cal Avgs Nominal Step Height 1 80800 Page2 40 60 EIE Nominal Step Height Auto Step Cal Aves 5 Auto Step X Do you want to calibrate the system YES
3. 2 FIFNKG RL RF Application MyApp app app Data MyData dat dat Fiducial MyFid fid fid Mask MyMasks mas mas Pattern MyPattern pat pat Report MyReport rep rep Script MyScript scr Scr Settings MySettings set set Template MyGeom geo Zernike MyZernikes zfr 25 60 METROPRO 7 F ILOR Save Application Save Data Save Report Save Template Save 1 Save Save Application Select Data File to Save filename flename2 2 Current Selection 2 Enter 3 Done
4. Surface Profile Profile Plot Data Distance pix Height pum 8 0 0 02348 44 0 0 02202 245 0 0 01784 46 0 0 01197 47 0 0 00680 248 0 0 01004 49 0 0 01259 5 0 20 0 01120 0 00641 52 420 0 00765 FaU 0 01120 etc 1 30 33 60 gt Metrology ZYGO System Error File X System Error Filel System Error File Camera Mode Image Zoom System Error File gt MetroPro MicroErr app X MetroPro MetroProWindow Load Application 2 5 Mich Pagel 35 60
5. 7 00 ZYGO ZYGO 108 8011 2 16 2 TEL 03 3740 3334 FAX 03 3740 3367 ZYGO ZYGO 530 8260 3 3 10 TEL 06 4795 9077 FAX 06 4795 9070 55 60 9 UOUUUUUL OOOO L Zygo Metrology HHHHHHHHHI McroapgH 0 000000 Lateral Calibrator 00 0000 gt Application z Calibrator 102 Mirau 57 60 Selection Button 00 Objective 0 00000000 Button 0 0000 0000000 000 000 0 0006 Lateral Calibration Standard 00 OOO 000000 000 0 0000 00 00 00000 000000 00000 900000 58 60 0 000000000000 000 000 000000 Lateral Calibration Standard 0 0 000 00000 0000 O O 00000 000 00000 00 00 Aread 0 0 0 000 0 0 0 0 00 00 00 L x HHHHHHUHHUHHHHHHHHUHUHHHHHHHUHHHHHHL 59 60 000 00 U 6 Standard 0000 00 0 00 00000 0000000000000 agl
6. System Error File 2 5X 5X Michelson Page2 36 60 System Error File gt System Error File MetroPro Measure Control Measurement Controls comment Part Number Min 1 15 Sorial Number Min Area Size 7 Instrument NewVlew ICO Id 0 SN 050404 Acquisition Mode Scan Camera Mode 320x240 120 Hz Remove Fringes On Subtract Sys Err On Numb gt Sye Err File SysErr x25xl dat FDA Moise Threshold 15 Phase Controls Scan Controls Tength 23 um binolar 1 bhase Res Extended Scan Length Loic pm Connection Order Location Res Action Friter D Substract Sys Err ON 3 Sys Err File System Error
7. 2 Windows HP DeskJet 30 60 METROPRO 27 7 7 2 F 1 1 Window Control Print 2 Print Panel Printer Print 3 Windows Print OK Windows Print Number of copies Pages from 3 Selection IAT gt 77 YIRIA VYKRCT AAI
8. 3 60 2005 2 17 A Metrology PFI ZYGO Filled Profile Filed Profile Filled Filled Filled Surface Map Profile Plot Surface Profile Profile Plot Profile Plot Result PV rms Profile Plot 4 60 1 Filled Plot 82603 2 Filled Plot
9. Filled Plot 1 1 5 60 3 HB 1 Zi Surface Profile 4 Profile Statsj Profile Stats Eins ltt 0 306 Meee shel 305 Ei FS E 026 1 eas A res 0 051 6 60 4 Ctrl l
10. 1 3 Home Z Axisj NewView Z 47 60 2490 _ Facus Sat Focus 2 Gote Fecus Zaro Unset Focus Stage Controls Auto Tilt Set Tilt Zero Tilt Zero Unset Tilt Zero ps Stage 2 Avis Go Stage Origin Edit Pattern Edit Pattern Pos View Pattern Pos Run Pattern Wont Pattern Align Pattern Stage Controls j Home Stage Home Z Axisl 1 New Control Window Controls 3 Application Window New Data Window New Control Window Window New Report AS Report Window Tocess Window Video Monitor Window Save Application saye Application HO Controls 2 Controls New Button Misce
11. System Error Page3 37 60 o UOUUUUUL OUUU Metrology ZYGO StepHt app NewView5000 X 1X 10X System Error File fin Ned 2 18 Thayo 29007 ik jRoweys Fringes cin Nunbor of Avorages gt ELA Meidge 14 10 lt gt 0 StepHt app VLS I SHS 1 8QC D Mask Data Mask Editor Pagel 39 60 Test Mask Reference Mask X Step40M mas
12. Measure Cntrl Meazgurement New lew ICO Td 0 SN 050023 julsition Meee Scan Gamera Mode 320x240 120 Hz Subtract Sys Err EEL File dat um 1 sec th 1000 ALR Number Serial Number TET Camera Mode Sys Err 0n System Error Sys Err File dat Min
13. OK Step Calibration Results OOAve rages HOMeasured 1 910689 wm OONominal 1 80800 DODitference 0 00289 0 16 1 00223 change system calibration file Pages 41 60 2004 8 A 20 A Zygo Metrology PPI WIAA ZY GO SEWER AverageHeight 32 25 R Of AT FIR AverageHeight 1 Mask Datal Mask Editorl 2 Reference Test Rectangle Mask BG Inc l Mask
14. tiff bmp 1 zygo Window Control T Print 2 Print Panel File tif bmp Print Print Panel T Source Image 3 Enter 2 27 Profile Plots Control Charts KU Process Stats Window Control Print 2 Print Panel Data Vice O7 F Off me HF Jeg ee FERL Printz Vy7 Les 3 Wi
15. Se l G Filled Plot 29490 Surface Profile 3 Profile Plot Hm 0 50000 4 Max min mim Height um degs Inspect Ort ELEN 0 000 0100 0 200 0 300 0 400 0 400 Eset Prof Distance rmm Trace 7 Profile Surface Plofile Show Controller Profile Plotl Units min Units x inin v to Clipboard mm Mindow Control Inspect off Profile Inspector 1 Inspector 2 Calipers Inspect Off Surface Profile Profile Plot nm mm 500 00 mm r i 4 7 4 1000 00 H 14500
16. Home Stage Home Z axisjl 2 5 2 IeSSad ir ements Aba res a Scan Length 51 60 o WOUUUL 1 50x0 100x 0 OU UUUU 52 60 ZYGO Metrology TORE ZYGO 2005 10 20 Page 1 of 3 ZYGO NewView5000 5
17. Next 32 PE Prev 24 60 _ 14 MetroPro 7 3 20 MetroPro 7 4 x lels 14 7 3x 20 7 4x MetroPro
18. MicrosoFt E 29 60 METROPRO HEJJ Print Panel Print Print Panel Print Panel Print Panel Print Panel 2990 es Print Bitmap Print Panel Move Grid Name To Front Printer Windows Print Box File MetroPro
19. 4 Pickl 5 Reference Test Mask 42 60 6 Unfill Reference Test 7 Ref 8 Defineo Ref Reference 9 Pickl 10 Reference Mask 11 UnflHl Reference Mask 43 60 12 Pickl 13 Test Mask 14 Fill Mask 15 Testl 16 Definel _ Testl Test Mask 17 Test Ref Ctrl l
20. Surface Wavefront Map T R 18 Remove None Remove Plane Analyze Cntrl Remove None 19 Analyze l Surface Map Test 44 60 20 New Data Surface Wavefront Test Reference Map New Data Window Intensity GSunface Wayvetronh Test Default Surtaca sWavetront 2 Profiles 4 Surtace sWavetront Suctace s Wave tront 4 t Surface Wavefront 10110 5 Rasults DMI Test Diagnos Test Micrse LYNZ 21 Surface Wavefront Map T R New Result AvgHet Test AvgHgt Test JBox New Window New Button New Contr New Attribute Annotation Bitmap Copy to Cliphe Window Contre 1 ous 45 60 UUUUUUL TU UU
21. 2 Yes Directory Load Application Load Data Load 1 Select Data File to Load na Load Application flename2 2 79 3 Done 26 60 77 MetroPro Remove Files 1 Remove Files Select Files to Remove MetroPro New Application Load Application Save Configu
22. 5 Filled Plot Show Controller Filled Plotl Shaw Canthroaller X Y Units 2 Units to Clipboard Window Control Linear Box MetroPro Version 7 6 1 4 8 4 9 rum Hiliteott Limit Ott 6 Surface Plofile Show Controller Profile Ploll chica Controller x Units Y Units to Clipboard Window Control 7 60 Profile Plot Update NT ns
23. Dirs 1 ea Xx Microsoft Windows File Manager Save Data Remove Files BCT Done
24. Save Load Save Load Windows Dialog MetroPro Windows Select Data File to Save ____ __ Current Selection Done Dis non 32
25. hL Directories 2 LOFTI 177 lL New 2 Enter Esc Enter a name for new directory to create C MetroPro 71 117 Microsoft Windows Explorer Users Passwords Windows Control Panel
26. Commas Profile Plots Control Charts Process Stats Range All Selected First Last 7 32 60 a 20 Print Print Panel Source Data Destination File Data Format Profile Plot 0 0400 50 100 Distance Image Printer Columns Data File Tabs Commas 1 Defaults Fil1led Plot Profile Plot
27. D Objective 3 Reference Flat Phase Aves O iz Auto Save Data OFF Auto Save Data File System Error File X SysErr_ x25x1 dat Reference Flat SiC 7 Phase Aves 8 Phase Avg Pause ON Auto Save Datal ON X Reference Flat System Error File X System Error
28. Enter HUHHHHHUHHHHHHHHUHHHHHHHHUHHHHHUHHL Image Zooi O 0 000 0000 0 0 00006 0000 0 0 0 000 0000 HHHHHHHHHHHUHL HHHHHHUHHUHHHHHHHHHHHHHHL 60 60
29. 0 0 000 0000 00 0000 0 00000 HHHHHHHHUHHHHUmWHHHHHUHHHL OO OTTI 0000000000 00000000000 OO OTTI 4 BG In Bq HHHUHHHHHHL HHHHHHHHHHHH ReHHHHHHHHHHHHHHHHHHHHHHHHHH DeinlHHHHHHHHHHHUHHHHHH 00000 OLR 000 000 00000 0000 6 0000000000 00000 00000 0000000000 20 60 20031 10 7 29 7 Zygo Metrology 7777777777 2760000 DUD HHHHHHH a Boe 21 60 20031 10 7 29 7 Zygo Metrology 8000000000 2 6 HHHHHHHHUHHHHHHHUHHHHHHHHTesHHUHHHHHHHHUHHHHH 22 60 40UUUUU WO METROPRO
30. 00 0 000 0 050 0 100 0 150 0 200 Distance mm Auesct lore 8 60 Inspector 2 2 Calipers 2 x 2440 Mit Ams Profile Plot y Marr yMin run 3 Hon 18 0 0551 mm angle 1 36935 m 0 000 ls 101 Distance mim surface rn 1000 00 1500 00 j 0 000 050 0 150 Minaz AneeCt LOr r Trace min 1 895212 angls 2 907 koera a er ee 9 60 8 Surface Plofile Window Control Name Hide Show w Controller Units Units Resize Gris Print Ren
31. 0 50 100 SiC X Y SiC SiC 53 60 ZYGO Metrology 36017017 ORE ZYGO 2005 10 20 Page 2 of Z SiC Filled Plot SXBUY TA 2 Al lt FBRBOAVESARO Filled Plot Plot Filled 54 60 ZYGO Metrology FHEY VY TORE ZYGO 2005 10 20 Page 3 of 3 50
32. 60 2003 7 10 7 29 7 Zygo Metrology 7000000000 GO77 IIHHHHHHHHHHHHHH ILHHHHHHHHHHHHHHHHHH 000000 0000000 100 OU d 1000 0 0 0000000 0000 00000 Retana 100 Led 1000 0006 000 00000 0000 0 Payor 100 000 00000 00000000 VeskEdloT 0000 000000 17 60 20031 10 77 2 Zygo Metrology 7000000000 GO77 UU Mask Editori O0 0000000000 L0 18 60 20031 10 7 29 7 Zygo Metrology 8000000000 2 6 0000000000 0000 00000000000000000 0 00000 Mask Date O 000000 1 O00 HHHHHHHHHHHHHUHHHHHUHHHUHHHHHHHHUHHHL 19 60 200327 10 7 29 7 Zygo Metrology 7000000000 2 00000 O0 BG Inq 00000 00 0 0
33. Mod 0 een Scan Controls 150m Scan Length Extended TFDA Res Low Extended Scan Length NewView5010 5030 100m 2 13 60 2008 129 5 Aygo Metrology FPI ZYGO Analyze Controls Analyze Controls Road Analyze Cntr1 Fi1ter DRemove Trim 1 10 Tri
34. NewView 11000 UUUUU 2 12 15 23 34 P 38 fi Auto XY OOOO 46 50x 100x P 52 56 HHHHHHHHHHHHHHHHHHL ZYGOHH 03 3740 3337 1 20084 11 25 H 2 Metrology 3D Model 3 3 FIRDA 3
35. UUL 2005 4 27 go Metrology FPI TERA ZYVGO BE Stitching Stitching 1Scan 1 Stitching XY 3 Stitching X Y Stitch REAR Home Stage Stitch MicroErr app 1 1 1 Stage Controls Stage Controls Stitch app 1 2 Home Stage X Y
36. ame To Front Hide Show Back Identify Redisplay Close 2490 000 0 050 0 100 0 200 lstahnce Profile Plot ZYGO Print Panel Data File Format Columns Tabs Commas 10 60 Print Default File txt Select File to Save i x 220 ale ck Er GPIminiapp z MesaDisk app Inner mas MetroCellapp FTP_Wedge_Ref MeasureCntrl MetroLog GenStitch Mesalx mas MetroPra cte 2 MetroScr ipt Prt WORD 7 F Profile XE F RRO ISurface Profile IProfile Plot Data Distance Height 0 0000 79 438 0 0011 161 436 0 0022 230 294 0 0034 217 648 0 0045 214 662 0 0056 214 221 0 0067 222 111 0 0079 207 454 0 0090 120 778 11 60 2 HHHHHL 2003 5 12 5 Metrology EV gt MHRA 2 BIE Measurement Controls Measurement Controls
37. d Serial Number Min Area Instrument NewView ICO 0 SN 050023 Acquisition Mode Scan Camera Mode 320x240 120 He Imaqe Zoom Remove Fri On Number of Averages Noise Threshold 10 Scan Length 5 um bipolar High Extended Scan Length 1000 Connection Order Location FDA Res High Discon Action Filter 2 3 3 Stitch Column Row gt Overlap size 1Scan Size Stitch 49 60 a 2 ma 2 Stitch 3 1 Stitch Cntrll Stitch Controls 3 2 Stitch 3 3 Stitch Stitch Type 3 3 1 Type Column amp Row N Cols N Rows Column Row tate ctl lees 3 3 2 X amp Y Size Size X mm Size mm 3 3 3 Annu
38. llaneous gt Home Stage Home Z Axes Home All Axes i i a ee an MEASURE Analyze Mask Data Calibrate Save Data aw Load 4 2 Window Control 1 Reset Reset Data Generate Manipulate Pattern Focus Auto Tilt Dynamic A MIS amp foe ee Data Clipboard Save Settings Load Settings Reset Env Reset MC eS iJ Home ALl To Stage Origin Set Laight Align View Remote Update Zo Auto Metroserip Remote system Command Window 48 60 Controls Home Stage Home Z Axesl 2490 Gant EN 2 2 1 Stitch app Measure Cntrll Measure Controls 2 2 Subtract Sys Err Off Subtract Sys Err On Sys Err File Subtract Sys Err Off Stitch ma 2490 Measurement Controls Part Number Min Mo
39. lus Inner Radius mm l Outer Radius mm Annulus Inner dius mr Inner Radius Outer Radius Type Start amp End Position Stitchl OK OK 50 60 4 4 1 Type Column amp Row X amp Y Size Start amp End Position Annulus 4 2 Stitch Controls Stitch l 5 5 1 1
40. m Mode Outside Fill Fill Remove Spikes OFilter Filter Fi1ter MetroPro 2 23 Filter Low High Wavelen Filter FFT Fixed 14 60 000060 20031 10 77 2 Zygo Metrology 7000000000 2760010 DUD Mask Editor 0 UMetroProf 00000000 0 0 0469 000000000 03471 000000000 000 HHUHUHHHHHHHHHHHHHHHHHHHUHUHHHHHHHH3HHHHHHL HHHHHUHHHHHUHHHHHUHHUHHHHHUHHHHHUHHHHUHHHHHHHL HHHHHHHUHHUHHHHHHHHHHHHHHUHUHHHHHHHL IIHHHHHHHHHHHHHHHHHHHUHHH HHHHHHHHHHHHHHL HOODOO 000 0000 0000 00 0000 0000 0 0 0 0 0 00 UU Mask Editor 00 16
41. ndows Print OK 4 Enter 31 60 Print Panel Source Image Data METROPRO Image Format tif ti bmp 2 Is Defaults Commas Background Color White GOS AA Color C7 Defaults Data Format Columns Tabs h
42. ration Remove Files 2 3 Yes 4 Done Done Template app dat Directory 27 60 METROPRO IFANNYFIODFAULIA
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