ion Flow Controller 取扱説明書
Contents
1.2.
3. 00000000000000000000000000000000000 000000000 O 00 7 90 240 V 50 HI 60 Hz 0 0 000000000 gt T NO 0 0 00000000 CN CFF 0 0 0000000000000000000000000000 N aP Sa NO PP OFF OFF CN CN CFF DC 35 10 nA A ON
4. 10 0000 UUD O 7 7 00000000 ag lt lt 000000
5. 0 0 000000 0 0 0 0000000000000 00000000000 b CN d 0000000000000 f CFF 9 CN lt O EL CFF O UU JU DUDU 000000000 00000000 0000 00000 00 20 21 HOU _ 000000 101 0000000000000000 0 0 0000000
6. 0000 00000000000000000000000000 0 0001 0 00000 0000000000000000000 H 24 L 1 L 5 A ON OFF 2 I l I Ae HON OFF 7 2 00000000001 4 i awa Ha H L 7 ALH L scum JE F H L ie H TEKS 4 Ga L m aa Thi H je L FS LH DIB H L ll
7. Oo 50Hz 60Hz 125V 00000 0 00000 u 0000000000000000 4 SkY Ov 0 0000000 0
8. D UJU UD SPB 8 1 2 NGL ASIL AS 2 L 92 D D
9. HOU 0000 0 00 D E D 0000 NG 0 0 0000 0 0 00000 m NG CN
10. 5 20 nm 250 V 0 5 vad A gt G9 100 DC 500 1500 1 1800 V 3 11 3 0 00 Wx L x H nm 400 125 V PSE ACI25V AC250V 0 00 u eq RH 0 00 10 000 HOU 0000000000 0 00 D 0 00 D Agr
11. 980 0811 022 227 8451 022 227 8454 http www si nao j p infoG i nao co j p 0000 0000 Oc TEL 078 303 4651 0311282
12. HOU 00000 00000000 0 000
13. 46 0 kV 0 0 0000000 0 0 000000000 ESD STANDARD N 3 HEPA FILTER 000000000000000000 TEST NT 0000000000000000 00000000000 13122110 30 30 V 30 V 30
14. 2500 0 HOU 0000 O 0000 0 0 0 0 0 0 90 V 240 V 50 60 10 4 kV 7 5 kV 6 0 1 kM 5 5 kV 0 1 kV 50 u LOH 1 3 H 22 10 H 15
15. 0000000000000 000 00000 _ 0000000000000 000 SoS eee CRS gal 1 450 ADE DDV Tis r iH MAKINA M GC Rhee wm lalih 1 1 1 I 1 1 I 4 T i mea ka 416 MEHENG 25 24 aSIMCO 00000000000 650 0046 078 303 4651 078 303 4655 0000000000 i Da OOU 650 0046 TEL 078 303 4651 FAX 078 303 4655 130 0026 03 3635 7261 FAX 03 3635 7189
16. 6 000000 00000000000000000000000000 i 0000000000000000000000 000000000000000 000 ow Control er 240 NET 125V 90 125 V 2500 RoHSI PSE 200V 250 Annn 0000000000000000000000000 00000000 0 0000000000000000000000000 0000000000000000000
17. 7 1 7 DC 35 V 10 mA 1 SIGNAL 1 TT NG 7 COMMON SIGNAL 1 32 794 COMMON UUUUUUUI 00 00000 0 013273 H 24 L 5rn max yh l f LHI poy aseta 77 TEPE EA GA COMMON Act T COMMON OMMON WE HH 311 EZ SIGHAL wes aon orr tPA st OFF ee ABA Z I 399 SIONAL 10mAmaex 2E GN OFFS 0000080 0000000001 UUUU 00000001 0000001 0000000001 000000001 0000000001 UUUU
18. 1 1 Y 7 5 4 7 5 00000000 0000000000000000000000000000000000000 HII 0 sec 0 1 0 45 0 75 1 0 0000000 Steady state DC 0000 000000 3P 125 V 2500
19. F T 0 0 0 000000000 _ 2 ON ONT A IL m Se 0 i lt 0 125 V 250M
Download Pdf Manuals
Related Search