1. H27 7 H27 11 2. SEC 10 hkato fukui nct ac jp 3. 59 Ti 1F 500kN 300kN 4. ss N_gomi fukui nct ac jp 4 A eee ee 4 5. 0 1 m DS EM 6. _ U0 kato fukui nct ac jp 7. arakawa Tukui nct ac jp Te 1 2 1 8. 23 24 25 107 naop fukui nct ac jp 9. CVD nishino fukui nct ac jp CVD CVD 1 2 4 2 Si 150 C 3 0 1 Fig 1 150C Zn0 Fig 2 Fig 3 10. 1 NaCI SEM X EDS EDX X XRD 1 4929457 H23 25 H24 25 11. X CT ER ee Pt a et X PC 40nm 40m FT0 120W FTO 12. O O O Oo Oo O 13. EE 180C 200C AM1 5 NM 14. SEM SEM JST 12 17 18 21 A STEP 23 14 22 24 26 20 ll k yamada fukui nct ac jp 15. XRR 2008 2010 2013 2010 106 Yusuke_f fukui nct ac jp 16. Si0 700C Na Ca _ Si0 17. SOJNa Or a A OHO lo NaOsS Ns OCN CC rn LCH MDI Polymer MR 100 NMR 400MHz IR FL UV CD 109 muranaka fukui nct ac jp 18. A r SEM 102 kawamoto fukui nct ac jp 19. 108 ee elki fukui nct ac jp Pc Pc Pc MDI SOJNa Hor 4 ososH NaOHaq Ho NN D S 3 oh ne ee n Js 20. CVBE gt Um 21. 40 yasuma fukui nct ac jp DLC TiN TiN TiN SPM 22. to 10 104 The Electrochemical Society Active Member jyoko fukui nct ac jp