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1. KOL VO 50 C Service Varian oto Varian advanced exchange service advanced exchange service eva va
2. ol 41 87 900 968 01 C O Varian H Varian N To Turbo V 2K G
3. To TURBO V 2K G To Turbo V 2K G Turbo V 2K G HE 10600 Nm ISO O TOV TOV KUL TL Varian N BIAQMATOX DAANTZA MIO H Turbo V 2K G dev To
4. controller H TOV 33000 max Turbo V 2K G TOV va computer host RS232 RS485 EN LEVEG EYYVOVVTOL
5. VA va n Turbo V 2K G controller inlet screen uovTapiou vo oe CD ROM 15 REMOTE I O IP 54 UE 6 9 SERIAL IP 54 7 9 Network MoniTorr 8 eue pp 87 900 968 01 C ETKATAZTAZH AN KINAYNO H
6. arog EN 61010 1 TOV 80 C dev 120 C 1 O Apy v default
7. Apy AN KINAYNOZ H Apy v KOL zio and Varian 87 900 968 01 C Turbo V 2K G Hos o VO
8. TOV e 20 C 70 C e O 95 um e O KOL OE e 10 IS 42 OAHI TEX I TA THN To Turbo V 2K G
9. TOV 87 900 968 01 C HASZN LATI UTAS T S Biztons gi tmutat Turb molekul ris szivattyukhoz A turb molekul ris szivatty k ahogy a k vetkez gepk nyvben le van rva nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor ll r sz rintkez si hib ja vagy ak r a forg r sz szett rese eset n a forg si energia felszabadulhat AN VIGY ZAT A berendez s k rosod s nak s a kezel szem lyzet s r l s nek megel z s re az ebben a g pk nyvben adott telep t si utas t sokat szigor an be kell tartani 45 87 900 968 01 C LTAL NOS INFORM CI A berendez st professzion lis felhaszn l k sz m ra tervezt k A felhaszn l nak a berendez s m k dtet se el tt el kell olvasnia ezt a g pk nyvet s a Varian ltal biztos tott b rmely inform ci t A Varian nem vonhat felel ss gre olyan esem nyek rt amelyek az ezen utas t soknak val ak r r szbeni meg nem felel s szakk pzetlen szem lyek ltali nem megfelel haszn lat a berendez sbe val jogosulatlan beavatkoz s vagy a konkr t nemzeti szabv nyokkal ellent tes b rmely m velet miatt t rt ntek A Turbo V 2K G egy integr lt rendszer turbo mo
10. ISO 250F H ISO 1609 ue 500 N mm 43 IS O Turbo V 2K G Sevatepn NA ATOM TOV EN 61010 1 Kata ATA N OTOA LKOVOTOLELQ OVTNAV IP 54 O Turbo V 2K G TM SVV EBOVAV EQTOL MAOTE HEAPO VTOA tagon OATL TM OVV ENEAVNA Turbo V 2K G Ka
11. TN oto IIAnpopopiec Technical Information tovg AN KINAYNOB EAKVOVV TOV gt IIPOZOXH OL yovv TOPLAV e
12. Iv TOV H OL 2 bar 5 C 40 C O 95 9o
13. ue Tia TO PN 969 9957 969 9958 controller ue LE TOV ue n NAEKTPOTANCIA 44 LED LED LD1 Turbo V 2K G TOV 400 ms stop W
14. va TOV Turbo V 2K G 35 120 E O K 85 399 IS H Turbo V 2K G dev
15. Input Output STOP JI REMOTE I O Technical Information TA l apaupeire VO 2 3 P PVETE 0 1 mbar 4 Turbo V 2K G START a OUVO ETE VO b START TOV I O JI REMOTE I O Technical Information c START RS 232 485 tqv RS 232 485 Communication Description Technical Information N KINAYNOZ KUL o 15 pin
16. Turbo V 2K G IS O controller ovv su vog O controller TO Varian Vacuum Technologies n Turbo V 2K G o controller UE TOV ano SOFT START ue ano 10 1 N soft start Ol Tia IP 54
17. A serial communication kit with a serial cable and the Navigation software is available optional SERIAL CABLE INSTALLATION In order to maintain the IP 54 protection level please use a certified IP 54 connector or the one provided by Varian 87 900 968 01 C RS 232 RS 485 COMMUNICATION DESCRIPTION Both the RS 232 and the RS 485 interfaces are available on the connector P2 The communication protocol is the same see the structure below but only the RS 485 manages the address field Therefore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the Navi gator software Communication Format e 8 data bit e no parity e 1 stop bit e baud rate 600 1200 2400 4800 9600 pro grammable Communication Protocol The communication protocol is a MASTER SLAVE type where e Host MASTER e Controller SLAVE The communication is performed in the following way 1 the host MASTER send a MESSAGE CRC to the controller SLAVE 2 the controller answer with an ANSWER CRC to the host The MESSAGE is a string with the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt where NOTE When a data is indicated between two quotes it means that the indicated data is the correspond ing ASCII character lt STX gt Start of transmission 0x02 lt ADDR gt Unit address 0x80
18. EXT Etant donn son poids la pompe doit tre manipul e aide des equipements de levage et de deplacement appropries Utiliser les anneaux de levage visses dans les orifices filet s sur le corps de la pompe KS ATTENTION Ne jamais retirer la protection boulonn e avant le branchement de la turbo pompe au systeme Ne pas installer et ou utiliser la pompe dans des milieux expo ses aux agents atmosph rigues pluie gel neige a la pous siere aux gaz agressifs ainsi que dans des milieux explosifs ou a fort risque incendie Pendant le fonctionnement il est necessaire de respecter les conditions environnementales suivantes pression maxi 2 bar au del de la pression atmosph rique temp rature de 5 C 40 C Cf graphique dans Tech nical Information humidit relative O 95 non condensante En pr sence de champs magn tiques la pompe doit tre pro t g e l aide d crans appropri s Pour tout autre renseigne ment se reporter l opuscule Technical Information Le Turbo V 2K G doit tre connect une pompe primaire Cf sch ma dans Technical Information Le Turbo V 2K G peut tre install e dans n importe quelle posi tion Le fixer dans une position stable en reliant la bride d entr e de la turbopompe une contre bride fixe pouvant supporter un couple de serrage de 10600 Nm autour de son axe La turbo pompe avec oollerette d entr e ISO doit tre fi
19. FLANSCH FLANSCH KLEMMSCHELLE ANZ ANZ ANZUGSMOMENT ISO 250 F o 22 Nm mit Gewinde M10 HINWEIS Die Turbo V 2K G kann nicht ber ihren Sockel befestigt wer den Zur Befestigung des Systems ist der Flansch ISO 250F zu verwenden Die Befestigung muss nach ISO 1609 ausgef hrt sein Es sind Mutterschrauben aus Stahl mit einer Festigkeitsklasse von mindestens 500 N mm zu verwenden GEBRAUCHSANLEITUNG IS ACHTUNG Der Turbo V 2K G geh rt zur zweiten Installationsklasse U berdruck die von den Normen EN 61010 1 vorgesehen ist Die Vorrichtung mu daher an eine Speisungsleitung angeschlos sen werden die dieser Kategorie entspricht Zur Gew hrleistung der Schutzart IP 54 sind die Gegenkonnek toren zu verwenden Der Turbo V 2K G hat Verbinder f r den Ein und Ausgang und die Schnittstellenkommunikation die an die Au enkreise ange schlossen werden m ssen soda kein Teil unter Spannung zug nglich ist Sicherstellen da die Isolierung der an den Turbo V 2K G angeschlossenen Vorrichtung auch bei einer Einzelst rung ausreichend isoliert wie es von der Richtlinie EN 61010 1 vorgesehen wird F r die Installation der Optionsteile siehe im Anhang Technical Information GEBRAUCH In diesem Abschnitt werden die wichtigsten Betriebsvorg nge erl utert Vor Benutzung des Systems sind alle elektrischen und pneu matischen Anschl sse auszuf hren W hrend der eventuellen Aufheizung der Va
20. Zatrzymanie Alarmowe Aby zatrzyma natychmiast w stanie alarmowym zesp Turbo V 2K G nale y od czy kabel od zasilania KONSERWACJA Zesp Turbo V 2K G nie wymaga adnej konserwacji Jakakolwiek interwencja musi by wykonana przez upowa niony personel AN NIEBEZPIECZENSTWO Przed wykonaniem jakiejkolwiek interwencji na systemie nale y od czy go od zasilania otworzy odpowiedni elektrozaw r dla wlotu powietrza odczeka a do ca kowitego zatrzymania wirnika i odczeka a temperatura powierzchni pompy b dzie wynosi a poni ej 50 C W przypadku usterki mo liwe jest skorzystanie z serwisu naprawczego Varian lub Varian advanced exchange service kt ry pozwoli na uzyskanie zregenerowanego systemu w zastepstwie uszkodzonego systemu INFORMACJA Przed wysytka do konstruktora systemu do naprawy lub advanced exchange service nale y obowiazkowo wypetni i przekaza do miejscowego biura sprzeda y karte Bezpiecze stwo i Zdrowie za czon do niniejszej instrukcji Jeden egzemplarz kopia karty musi by w o ony do opakowania systemu przed jego wysy k Je eli system musi by poddany rozbi rce nale y przyst pi do jego eliminacji zgodnie z obowi zuj cymi krajowymi normami w meritum sprawy 87 900 968 01 C PRIRUCKA K POUZITI Bezpecnostni navod pro Turbomolekul rn v vevy Turbomolekularni v vevy jak jsou popisov ny v n sleduj c m n vodu obsahuj ve
21. 5 C to 40 C 87 900 968 01 C TECHNICAL INFORMATION Maximum flange no process 80 C temperature process 50 C Power cable With European or NEMA plug 3 meters long optional Serial communication RS232 cable with a 9 pin D type kit male connector and a 9 pin D Max rotor temperature Vibration level 0 01 um at inlet flange displacement permanent lubrication Coolant water Minimum flow 200 I h 0 89 GPM Temperature 10 C 5 35 C Pressure 3 to 5 bar 45 to 75 psi Power supply Input voltage 100 240 Vac Input freg 50 60 Hz Max input power 850 VA NOTE Stand by power 30 to 35 W s 8 E Max operating When the Turbo V 2K G has been stored at a tem power 400 W for Nitrogen and lighter perature less than 5 C wait until the system has gases reached the above mentioned temperature before 390 W for Argon starting the pump type female connector and Navi gator software optional Storage temperature 20 C to 70 C Environment protection Weight kg Ibs 35 77 16 Protection fuse Compliance with e EN 55011 Radio disturbance characteristics e EN 61000 3 2 Limits for har monic current emissions e EN 61000 3 3 Limitation of voltage changes voltage fluc tuations and flicker e EN 61000 6 2 and EN 61326 Immunity for industrial envi ronments which recall EN 61000 4 2 Electrostatic discharge phenomena EN 61000 4 3 Radiated high frequency phenomena EN 6
22. REMOTE I O IP54 kontakt med de koplingene som er nodvendige for starte opp pumpen 15 veis Network MoniTorr kontakt 9 veis SERIAL IP54 kontakt til bruk for serietilkoplingen Feste for str mkabelen montert Ol coo pore 87 900 968 01 C INSTALLASJON AN ADVARSEL P grunn av pumpens vekt m den flyttes med egnede l fte og flytteredskaper Bruk yeboltene som er strammet til i de gjengete hullene p pumpehuset IS FORSIKTIG Ikke ta av det fastskrudde dekslet f r turbopumpen koples til systemet Ikke installer eller bruk systemet i milj er som utsettes for regn sn eller is st v aggressive gasser eksplosjonsfarlige milj er eller milj er med stor brannfare Under bruk m f lgende forhold respekteres maksimalt trykk 2 bar over atmosf risk trykk temperatur fra 5 C til 40 C se diagram i tillegget Teknisk informasjon relativ fuktighet O 95 uten kondens Ved magnetfelt m pumpen beskyttes av dertil skjermer Se Teknisk informasjon for detaljer Turbo V 2K G m koples til en hovedpumpe se skjema i Teknisk informasjon Turbo V 2K G kan monteres i en valgfri stilling Fest Turbo V 2K G i en stabil stilling med inngangsflensen festet mot en fast koplingsflens med et dreiemoment p 10600 Nm rundt aksen Turbopumpen med ISO inngangsflens m festes til vakuumkammeret med bolter Tabellen nedenfor oppgir antall bolter som kreves og strammemomentet
23. Turbo V 2K G r utrustad med kontaktdon f r ing ngarna utg ngarna och f r den seriella kommunikationen som ska anslutas till de externa kretsarna s att det inte g r att komma t n gon sp nningsf rande del Kontrollera att anordningen som r ansluten till Turbo V 2K G har en l mplig uppn isolering ven vid ett enskilt fel enligt standard EN 61010 1 Installation av tillbehorsutrustning beskrivs i Technical Information ANV NDNING Anvisningar f r riktig anv ndning finns i styrenhetens bruksanvisning Innan du anv nder systemet ska du utf ra alla elektriska och pneumatiska anslutningar Om vakuumkammaren uppv rms f r temperaturen vid inloppet aldrig Overstiga 80 C N r pumpen r i funktion f r temperaturen p rotorn aldrig verstiga 120 C Anvandaren maste vara noga med v lja r tt funktionss tt beroende p vilken gas som ska pumpas 1 f r kvave och l ttare gaser O f r argon standard For ytterligare information se bilagan Technical Information KANKER S tt aldrig ig ng pumpen om intagsfl nsen varken r kopplad till vakuumkammaren eller r blockerad p plats med l sflansen Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r att undvika br nnskador K VIKTIGT Undvik sammanst tningar sv ngningar eller pl tsliga f rflyttningar av turbopumpen n r den r ig ng Lagren kan bli skadade Pumpen ska f rses med luft eller med delgaser som
24. Utrustningen r avsedd f r yrkesm ssig anvandning Anv ndaren b r l sa denna bruksanvisning samt vrig dokumentation fran Varian f re anv ndning av utrustningen Varian tar inget ansvar f r skador helt eller delvis till foljd av sidos ttande av instruktionerna ol mplig anv ndning av person utan tillr cklig kunskap obeh rigt bruk av utrustningen eller hantering som strider mot g llande lokala f reskrifter Systemet Turbo V 2K G best r av en turbomolekyl r pump f r h ga och mycket h ga vakuumtill mpningar och en styrenhet Systemet kan pumpa m nga typer av gaser eller gasblandningar Det kan dock inte anv ndas f r att pumpa v tskor eller fasta partiklar Pumpningen stadkoms med hj lp av en h gvarvig turbin max 33000 varv minut som drivs av en trefas h geffektsmotor Inga tillsats mnen anv nds i Turbo V 2K G som d rf r passar for tillampningar som kr ver ett rent vakuum Systemet r utrustat med hj lpkontakter och via dessa kan systemet fj rrstyras med hj lp av en centraldator med seriell anslutning RS232 eller RS485 De f ljande avsnitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under anv ndningen Detaljerade uppgifter finns i bilagan Technical information I bruksanvisningen anvands foljande standardrubriker KANKER Varningsmeddelandena informerar operat ren om att en speciell procedur eller en viss typ av arbete m ste utf ras exakt
25. l arr t complet du rotor et jusqu ce que la temp rature superficielle de la pompe soit inf rieure a 50 C En cas de panne il est possible de b n ficier du service r pa rations Varian ou du Varian advanced exchange service qui permet d obtenir un syst me r g n r en remplacement du syst me endommag NOTE Avant de renvoyer une pompe au constructeur pour r paration ou advanced exchange service remplir et faire parvenir au bureau Varian de votre r gion la fiche S curit et Sant jointe au pr sent manuel d instructions Une copie de cette fiche de vra tre mise dans l emballage de la pompe avant l exp dition En cas de mise au rebut de la pompe proc der son limina tion conform ment aux r glementations nationales concernant la gestion des d chets 87 900 968 01 C INSTRUCCIONES DE USO Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energia cinetica debido a la alta velocidad de rotacion en combi naci n a la masa especifica de sus rotores En el caso de un dano del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energia de rotacion podria ser liberada PELIGRO Para evitar danos a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en
26. 120 seconds e Acquisition time e Save time e Alarm time To change these parameters enter the desired value and then save Provided below is a descrip tion of the parameters that can be modified e Acquisition time Defines the time frame be tween one MoniTorr acquisition and the next It is suggested that you keep this parameter at its default value 87 900 968 01 C e Save time Defines the time frame between two successive storage operations to the Moni Torrs local memory of the acguisition indicated above Every acquisition is summed to previous in order to obtain in memory only the last aver age spectrum e Alarm time Defines the timeout after which an alarm condition is signalled Archive Saving Method Procedure Periodically every Archive Time days the file download program creates a file cab special compressed Microsoft Windows file with the name of the registration day In the file download window the customer can view a new text on green back screen with the date of the registration By clicking on the OK button automatically an explore win dow appears on the screen You will find some acquisition files mon and a compressed archive file named according to the registration day date CAB The customer should send by e mail the compressed CAB file every archive time pe riod to Varian Technical support at the following address vit technical support varianinc com FileDownload ICT
27. File Controller Status Monitor Status Freq Temp Power Download 2 MiniT ask NORMAL OPERATION READY 12 9698971 NORMAL OPERATION READY 250 08 03 10 11 12 13 14 15 16 Ug E Address 1 Freq Hz Fowerfw Temp C Current 4 Voltage V HPS Cycle HPS Tryes E 250 1 58 0 001 33 o Pump Status Check connection Power fail Short circuit Oil min NORMAL OPERATION Pump overtemp Auxiliary fall High load Hot water Controller overtemp Overvoltage Ovveride Overtime New archive file created OK Only for information all files are automatically stored in the directory C Varian TECHNICAL INFORMATION PROFIBUS OPTION General The ProfiBus option allow to communicate with the controller as Profibus DP slave device The option works as a bi directional bridge be tween the ProfiBus network and the Varian turbo controller internal link The interface provides input data measures and output data commands to the controller and in addiction provides standard and user related diagnostics in order to allow the user to manage the exceptions Mechanical This option is mounted in the Option space Installation This option can be factory installed or on the field by Varian personnel The profibus connector pin out is reported in the following figure Please in order to obtain best per formance use profibus certified cables ES CAUTION To
28. La bomba de turbina con brida de entrada ISO debe fijarse por medio de pernos a la camara de vacio En la siguiente tabla se indican el n mero de pernos necesarios y el par de apriete aconsejado por Varian para fijarlos TIPO DE PAR DE ERA MORDAZA IS APRIETE ISO 250 F Perno con rosca M10 NOTA La Turbo V 2K G no puede ser fijada por medio de su base En efecto el sistema puede fijarse nicamente mediante su brida ISO 250F La fijaci n debe realizarse de conformidad con lo establecido por la norma ISO 1609 Deben utilizarse pernos de acero cuya clase de resistencia sea de al menos 500 N mm 15 INSTRUCCIONES DE USO US ATENCI N El Turbo V 2K G pertenece a la segunda categor a de instalaci n o sobretensi n prevista por la normativa EN 61010 1 Por lo tanto este dispositivo debe ser conectado a una l nea de alimentaci n adecuada para dicha categor a Para garantizar el aislamiento IP 54 deben utilizarse los ensambles de conectores suministrados adjuntos El Turbo V 2K G tiene conectores para las entradas salidas y para la comunicaci n serial que deben ser conectados a los circuitos externos de manera que ninguna parte bajo tensi n quede accesible Controlar que el aislamiento del dispositivo conectado al Turbo V 2K G mantenga una acci n aisladora incluso en caso de verificarse una aver a de conformidad con lo establecido por la normativa EN 61010 1 Para instalar los accesorios opcionales v
29. indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salu te allegata al presente manuale di istruzioni Copia della stes sa deve essere inserita nell imballo del sistema prima della spedizione Qualora un sistema dovesse essere rottamato procedere alla sua eliminazione nel rispetto delle normative nazionali specifi che 87 900 968 01 C GEBRAUCHSANLEITUNG Sicherheitshinweise f r Turbomolekularpumpen Die in der folgenden Gebrauchsanweisung beschriebenen Turbomolekularpumpen verf gen aufgrund der hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Ge wicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k nnte diese Rotationsenergie freigesetzt werden AN GEFAHR Um Sch den am Ger t zu vermeiden und um Verletzungen der Bediener vorzubeugen befolgen Sie bitte aufmerksam die in diesem Handbuch beschriebenen Installationshinweise 5 87 900 968 01 C ALLGEMEINE INFORMATIONEN Dieser Apparat ist f r den fachm nnischen Gebrauch bestimmt Vor dem Gebrauch hat der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau zu lesen Bei auch teilweiser Nichtbeachtung der enthaltenen Anweisungen unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mi achtung der nationalen eins
30. owego zapoznania si z tematem patrz dodatek Informacje Techniczne Turbo V 2K G musi by pod czony do g wnej pompy patrz schemat w Informacjach Technicznych Turbo V 2K G mo e by zainstalowany w jakiejkolwiek pozycji Zamocowa Turbo V 2K G w stabilnej pozycji cz c ko nierz wej ciowy turbopompy do ko nierza sta ego wytrzyma ego na obci enie 10600 Nm wok w asnej osi Turbopompa z ko nierzem wej ciowym nale y przestrzega 2 bary ponad ci nieniem ISO musi by zamocowana do komory pr niowej poprzez ruby mocuj ce Niniejsza tabela opisuje ilo potrzebnych rub i na jaki moment zalecany przez firm Varian nale y je dokr ci TYP MOMENT Or MOCOWANIA Nr DOKRECENIA ISO 250 F ruba mocuj ca z 12 22 Nm gwintem M10 INFORMACJA Turbo V 2K G nie mo e by zamocowany poprzez w asn podstaw System mo e by zamocowany tylko poprzez w asny ko nierz ISO 250 F Mocowanie musi by zrealizowane zgodnie z norm ISO 1609 Musz by zastosowane ruby mocuj ce ze stali z klas wytrzyma o ci co najmniej 500 N mm 51 INSTRUKCJA UZYTKOWANIA IB UWAGA Turbo V 2K G nale y do drugiej kategorii instalacji lub nadnapi cia przewidzianej przez norm EN 61010 1 Dlatego te pod czy urz dzenie do linii zasilania kt ra spe ni te wymogi Zastosowa konektory na wyposa eniu aby zagwarantowa odizolowanie IP 54 Turbo V 2K G posiada konektor
31. zemeltet s k zben a k vetkez k rnyezeti felt teleket kell biztos tani maxim lis nyom s 2 bar a l gk ri nyom s felett leveg h merseklete 5 C t l 40 C ig relativ p ratartalom 0 95 nem kondenz l M gneses mez k jelenl t ben a szivatty t v deni kell ferrom gneses pajzs seg ts g vel R szletes inform ci rt l sd M szaki inform ci A Turbo V 2K G t els dleges szivatty hoz kell csatlakoztatni l sd M szaki inform ci A Turbo V 2K G t b rmely helyzetben lehet telep teni R gz tse a Turbo V 2K G t stabil helyzetben a turb szivatty bemeneti karim j t egy r gz tett ellenkarim ra csatlakoztatva amely k pes ellen llni 10600 Nm tengely k r li nyomat knak Az ISO bemeneti karim s turb szivatty t csavarokkal kell r gz teni a v kuumkamr hoz A k vetkez t bl zat a csavarok sz ks ges sz m t s a Varian ltal aj nlott r gz t nyomat kot mutatja KARIMA R GZ T R GZ T ESZK Z NYOMAT K ISO 250F 250 F M10 csavarok 22Nm Nm MEGJEGYZ S A Turbo V 2K G nem r gzitehet az alapjaval A rendszer csak ISO 250F karimaval r gzithet A r gzitest az ISO 1609 norma szerint kell v gezni Legal bb 500 N mm teherb r si oszt ly ac lcsavarokat kell haszn lni 47 HASZN LATI UTAS T S IS FIGYELEM A Turbo V 2K G a m sodik telep t si vagy t lfesz lts g kateg ri hoz tartozik az EN 61010 1 d
32. ALGEMENE INFORMATIE Deze apparatuur is bestemd voor beroepsmatig gebruik De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen onoordeelkundig gebruik door niet hiervoor opgeleid personeel reparaties waarvoor geen toestemming is verkregen of gebruik in strijd met de specifieke nationale wetgeving De Turbo V 2K G is een geintegreerd systeem dat uit een turbomoleculaire pomp voor hoge en ultrahoge vacu mtoepassingen plus bijbehorende controller bestaat Het systeem kan vele soorten gas of gasvormige verbindingen pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect wordt verkregen door een zeer snel draaiende turbine max 33000 toeren min die aangedreven wordt door een elektrische draaistroommotor met hoog rendement De Turbo V 2K G is volledig vrij van verontreinigingen en is dus ook geschikt voor toepassingen die een schoon vacu m verlangen Het is voorzien van hulpconnectoren waarmee het op afstand aangestuurd kan worden door middel van een host computer die met een seri le lijn RS232 of RS485 is aangesloten In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Gedetailleerde inf
33. Connect the device to a mains line that satisfy the above category The Turbo V 2K G has Input Output and serial communication connectors that must be connected to external circuits in such a way that no electrical part is accessible Use the provided mating connectors in order to maintain the IP 94 protection level Be sure that the insulation of the device connected to the Turbo V 2K G is adeguate even in the case of single fault as per directive EN 61010 1 For installation of optional accessories see Technical Informa tion USE This paragraph details the fundamental operating procedures Make all electrical an pneumatic connections before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 80 C While operating the pump the rotor temperature must never exceed 120 C The user must be sure to set the correct gas mode according to the pumped gas 1 for N and lighter gases 0 for Argon default See the annex Technical Information for details ZEIG Never use the turbopump when the inlet flange is not con nected to the vacuum chamber or is not blanked Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns IS CAUTION Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become damaged Use air or inert gas free from dust or particles for venti
34. Heather Jacket Mode Auto man Specific option not available on standard models B5 Gas Load Type 157 B7 Reserved 114 BO B1 Reserved B2 B3 Start Stop Interlock Mode 151 Change the logic of Start stop and Interlock inputs Ask to Varian personnel for this option B4 B5 Set Point Type 101 0 frequency 1 current 2 time 3 status normal operation B6 B7 Analog Output Type 111 Set the analog output on remote 1 0 connector proportional to O frequency 1 power 88 87 900 968 01 C OUTPUT BUFFER 5 BYTES OFFSET SIZE UNIT WIN BYTE BYTE RANGE DESCRIPTION SERIAL TECHNICAL INFORMATION B7 Start Stop 0 Stop 1 Start B6 Low Speed 0 off set the target spee ln Buff byte 8 at high speed Out Buff byte 1 1 on set the target speed In Buff byte 8 at low speed Out Buff byte 3 B5 Soft Start 0 off this function is active at first pump run up and can t be deactivated by the user after first run up activate this function only ifthe pump has been stopped for at least 3 months 1 on B4 Active Stop 107 0 off after a stop command the controller stop driving the motor the pump will decrease its speed by friction with gas load 1 on after a stop command the controller will brake the pump using the motor activate this function only if you don t use the vent valve and for few cycles at week B3 Vent Valve O
35. IS ACHTUNG Die angeschraubte Abdeckung darf erst nach Anschluss der Turbopumpe an das System entfernt werden Die Pumpe darf nicht in Umgebungen die ungeschutzt vor Wetter Regen Frost Schnee Staub und aggressiven Gasen sind sowie auch nicht in explosionsfahigen oder erhoht brand gef hrdeten Umgebungen installiert und oder benutzt werden Beim Betrieb m ssen folgende Umgebungsbedingungen ein gehalten werden Maximaler Druck 2 bar ber dem atmosph rischen Druck Temperatur von 5 C bis 40 C siehe Diagramm im An hang Technical Information Relative Luftfeuchtigkeit 0 95 nicht kondensierend Bei Vorhandensein von elektromagnetischen Feldern ist die Pumpe entsprechend abzuschirmen F r ausf hrliche Informa tionen siehe im Anhang Technical Information Modell Turbo V 2K G ist an eine Prim rpumpe anzuschlie en siehe Schema in Technical Information Modell Turbo V 2K G kann in jeder beliebigen Position instal liert werden Modell Turbo V 2K G ist stabil zu befestigen indem der Flansch am Eingang der Turbopumpe an einen festen Gegen flansch angeschlossen wird der mit einem Drehmoment von 10600 Nm um seine eigene Achse belastbar ist Die Turbopumpe mit dem ISO Eintrittsflansch ist mittels Mutter schrauben an der Vakuumkammer zu befestigen In der nach stehenden Tabelle sind die Anzahl der erforderlichen Mutter schrauben und die von Varian empfohlenen Anzugsmomente angegeben
36. MKA Pozn mky upozor uj na d le it inform cie z textu UCHOV VANIE Ak chcete aby turbomolekul rne v vevy zna ky Varian pod vali maxim lny a spo ahliv v kon dodr iavajte nasleduj ce pokyny e neprekracujte nasledujuce Specifikacie prostredia pocas prevozu pren Sania a uchovavania vyvev o rozsah tepl t 20 C az 70 C o rozsah relat vnej vlhkosti 0 az kondenz cie e zakaznik musi pri prvom spusteni turbo vyvevy vzdy pouzit rezim soft Startu e skladovate nos turbomolekul rnej v vevy je 10 mesiacov odo d a dodania 99 bez IS UPOZORNENIE Ak zak hokolvek d vodu vypr as skladovatelnosti zariadenia vr te v vevu do z vodu v ktorom bola vyroben Inform cie z skate u miestneho zast penia spolo nosti Varian pre predaj a servis 58 NAVOD K POUZITIU PR PRAVA NA IN TAL CIU Turbo V 2K G je dodan v peci lnom ochrannom obale Ak je balenie po koden o sa m e sta napr klad po as prepravy obr te sa na miestne zast penie spolo nosti Varian Po as vyba ovania syst mu dbajte na to aby zariadenie nespadlo nebolo vystaven n razu alebo prudk mu otrasu alebo vibr ci m Kv li celkovej v he zariadenia 35 kg v vevu vytiahnite z obalu za skrutky s o kami zaskrutkovan mi na telese v vevy v poloh ch 120 od seba Obalov materi l zlikvidujte predp san m sp sobom Materi l je 100 recyklovate n a spi a po iadavky smernice EE
37. Turbo V 2K G morate priklju iti na primarno rpalko glej Te hni ne informacije Turbo V 2K G lahko namestite v poljuben polo aj Turbo V 2K G namestite v stabilem polo aj tako da pove ete vhodno prirobnico turbo rpalke na pritrjeno tevno prirobnico ki lahko prenese navor 10600 Nm okoli svoje osi Turbo rpaklo z dovodno ISO prirobnico je treba fiksirati na vakuumsko le i e s pomocjo primerne Varian strojne opreme Spodnja tabela prikazuje Stevilo potrebnih vijakov in pripadajo i navor PRIROBNICA NAPRAVA ZA PRITRJEVANJE IS NAVOR ISO 250 F OPOMBA Naprave Turbo V 2K G ni mo pritrditi s svojo osnovo Sistem lahko pritrdite samo preko ISO 250F prirobnice Pritrjevanje morate izvesi v skladu z ISO 1609 normo Uporabiti morate jeklene vijaki z najmanj o mo jo 500 N mm 63 NAVODILA ZA UPORABO ES POZOR Po direktivi EN 61010 1 spada Turbo V 2K G v skupino za drugo name anje ali prekovolta o Napravo prilju ite na napetost ki je v vskladu z zgornjo kategorijo Naprava Turbo V 2K G ima vhodne izhodne in serijske pri klju ke ki jih je treba povezati na zunanja vezja tako da noben elektri ni del ni dosegljiv Za vzdr evanje IP 54 za itnega nivoja uporabite prilo ene priklju ke Prepri ajte se da je izolacija naprave priklju ene na Turbo V 2K G primerna tudi v primerno ene napake kar je opisano v direktivi EN 61010 1 Za namestitev opcijski dodatkov glej Tehni ne i
38. Vysok teploty m u sp sobi pop leniny IS UPOZORNENIE Dbajte na to aby v veva po as innosti nebola vystaven n razom kmitaniu alebo prudk m pohybom Mohli by sa po kodi lo isk V vevu preplachujte pomocou vzduchu alebo inertn ho plynu zbaven ho prachu a ast c Tlak na preplachovacom vstupe mus by ni ne 1 bar pretlakov V vevy s vybaven peci lnym vstupom na vy erp vanie agres vnych plynov ktor umo uj stabiln tok inertn ho plynu napr klad N2 Ar kv li ochrane lo sk v vevy pozri dodatok Technick inform cie AN VAROVANIE Ak v vevu pou vate na vy erp vanie toxick ch hor av ch alebo r dioakt vnych plynov dodr iavajte pros m po adovan postupy pre likvid ciu jednotliv ch plynov Nepou vajte v vevu v pr tomnosti v bu n ch plynov V veva je navrhnut pre ve k prietoky dus ka arg nu a ahk ch plynov Ak potrebujete erpa plyn a ako arg n informujte sa u technickej podpory firmy Varian 87 900 968 01 C Pouzitie zariadenia Turbo V 2K G Ako zariadenie spusti Pre spusten m syst mu skontrolujte i je pripojen pr slu n I O konektor Ak je syst m pripojen ku vzdialen mu 1 0 preru te sign l pozri odstavec J1 VZDIALENY 1 0 dodatku k Technick m Inform ci m Syst m na tartujte sledom nasledovn ch krokov 1 odpojte ak je pripojen I O konektor 2 zasu te nap jaciu n ru 3
39. alimenta o introduzir ar na bomba abrindo a v lvula espec fica aguardar at a completa paragem do rotor e at que a temperatura superficial da bomba seja inferior a 50 C Em caso de defeito poss vel usufruir do servico de assist ncia Varian ou do Varian advanced exchange service que permite obter um sistema regenerado que substitua a bomba com defeito NOTA Antes de reenviar ao fabricante um sistema para as reparac es ou o advanced exchange service indispens vel preencher e enviar ao escrit rio de vendas local a ficha Seguran a e Saude anexa ao presente manual de instru es A c pia da mesma deve ser colocada na embalagem do sistema antes da expedi o Caso uma bomba deva ser destru da proceder sua elimina o respeitando as normas nacionais espec ficas 87 900 968 01 C GEBRUIKSAANWIJZINGEN Veiligheidsinstructies voor Turbomoleculaire pompen De turbomoleculaire pompen die in deze handleiding worden besproken hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rotor breekt kan de rotatie energie vrijkomen N GEVAAR Om schade aan de apparatuur en letsel bij de bedieners te voorkomen moeten de installatie instructies in deze handleiding nauwgezet worden opgevolgd 21 87 900 968 01 C
40. for RS 232 lt ADDR gt Unit address 0x80 device num ber 0 to 31 for RS 485 lt WIN gt Window a string of 3 numeric char acter indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph COM Command 0x30 to read the window 0x31 to write into the window 77 TECHNICAL INFORMATION lt DATA gt an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not present The field length is variable according to the data type as per the following table FIELD LENGTH DATA TYPE VALID CHARACTERS 0 OFF 1 ON 0 0 9 right justified with 0 Alphanumeric A from blank to ASCII lt ETX gt End of transmission 0x03 lt CRC gt XOR of all characters subsequent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will ANSWER whose structure depends from MESSAGE type Numeric N Lo respond with an the When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE NOTE Some error settings are foreseen NACK foreseen with UNKNOWN WINDOW Read Write com mands foreseen only with Write com mands NOTE Using the RS 485 interface the message structure remains identical to the one used
41. jaan tai lumen p lyjen tai aggressiivisten kaasujen kanssa tai joissa on olemassa rajahdys tai tulipalovaara K yt n aikana on noudatettava seuraavia ymp rist koskevia ehtoja maksimipaine 2 baaria yli atmosf risen paineen l mp tila 5 C 40 C ks Tekniset tiedot liitteen kaaviota Suhteellinen kosteus 0 95 ei tiivist v Mik li lasna on magneettikenttia tulee pumppu suojata tahan tarkoitukseen olevilla suojilla Lisatietoja loytyy Tekniset tiedot liitteesta Turbo V 2K G tulee kytkea paapumppuun ks Tekniset tiedot liitteen kaaviota Turbo V 2K G voidaan asentaa mihin tahansa asentoon Kiinnittakaa Turbo V 2K G vakaaseen asentoon liitt m ll turbopumpun sis ntulolaippa kiinte n vastalaippaan joka kestaa 10600 Nm n momentin akselinsa ympari ISO imulaipalla varustettu turbopumppu tulee kiinnitt tyhjokammioon pulteilla Seuraavassa taulukossa ilmoitetaan tarvittava pulttim r ja Varianin suosittelemat kiristysmomentit KIRISTYS KINNIKE MAA R MOMENTTI Pultti M10 kierteill HUOM Turbo V 2K G pumppua ei voida kiinnitt perustasta J rjestelm voidaan kiinnitt ainoastaan ISO 250F laipasta Se tulee kiinnitt ISO 1609 standardin mukaan K yt ter spultteja joiden lujuusluokka on v hint n 500 N mm LAIPPA ISO 250 F 39 K YTT OHJEET IS HUOMIO Turbo V 2K G kuuluu toiseen EN 61010 1 s nn s
42. llanden g ller vid drift maximitryck 2 bar Over atmosf riskt tryck temperatur fran 5 C till 40 C se bild i Technical Information relativ luftfuktighet 0 95 utan kondens n rvaro av magnetf lt ska pumpen skyddas med en s rskild sk rm Se bilagan Technical information f r ytterligare upplysningar Turbo V 2K G m ste anslutas till en huvudpump se schemat i Technical information Turbo V 2K G kan installeras i valfri position F st pumpen i ett stabilt l ge genom att ansluta pumpens intagsfl ns till en fast fl ns som m ste tala ett vridmoment p 10600 Nm kring sin axel Turbopumpen ISO m ste f stas vid med intagsflans vakuumkammaren med bultar I foljande tabell anges hur m nga bultar som beh vs samt tdragningsmoment som rekommenderas av Varian TYP AV ANT KLAMMER FL NS ISO 250 F M10 bult OBSERVERA Turbo V 2K G kan inte f stas med hj lp av sitt fundament Systemet kan endast f stas med hj lp av fl nsen ISO 250F Fasts ttningen m ste ske i verensst mmelse med ISO standard 1609 St lbultar med en str ckgr ns pa 500 N mm m ste anv ndas 31 BRUKSANVISNING IS VIKTIGT Turbo V 2K G tillh r den andra installationsklassen eller 0 versp nningsklassen enligt standard EN 61010 1 Anslut d r f r anordningen till en elledning som uppfyller kraven f r denna klass Anv nd de medlevererade kontakterna f r att kapslingklass IP54
43. rfria fr n damn eller andra partiklar Ing ngstrycket mot r tt d rr m steunderstiga 1 bar ut ver det atmosf riska trycket F r pumpning av fr tande gaser r dessa pumpar f rsedda med en speciell ppning igenom vilken man ska leda en str m av delgas kv ve eller argon f r att skydda lagren se bilagan Technical information KANKER D pumpen anv nds f r pumpning av giftiga l ttant ndliga eller radioaktiva gaser b r man f lja de s rskilda anvisningarna f r varje enskild gas Anv nd ej pumpen i n rheten av explosiva gaser Pumpen r konstruerad f r att pumpa stora m ngder kv ve argon och l ttare gaser Om du skulle beh va pumpa gaser som r tyngre n argon kontakta Varians tekniska service f r information 87 900 968 01 C Anv ndning av Turbo V 2K G Hur du startar systemet Kontrollera innan du startar systemet att l O kontakten har tagits bort Om systemet r anslutet till en fj rrstyrd l O enhet m ste du kontrollera att stoppsignalen r aktiv se avsnitt J1 REMOTE I O i bilagan Technical Information Starta systemet p f ljande s tt 1 Ta bort I O kontakten om s dan finns 2 Anslut pumpen till eln tet 3 Pumpa ned trycket i vakuumkammaren till 0 1 mbar 4 Skicka startsignal till Turbo V 2K G p n got av f ljande s tt a Anslut den medlevererade l O kontakten b Skicka en fj rrstyrd startsignal via I O kontakten se avsnitt
44. seket 1 h zza ki ha jelen van a rendszer B K csatlakoz j t 2 dugja be a t pk belt 3 szivattyuzza le a vakuumkamrat 0 1 mbarra 4 adjon a Turbo V 2K G nek start jelet a k vetkez m dszerek valamelyik vel a a mell kelt B K csatlakoz csatlakoztat sa b t voli start jel ad sa a B K csatlakoz n kereszt l l sd M szaki inform ci f ggel k J1 T VOLI B K bekezd se c t voli start jel ad sa az RS 232 485 soros interf szen kereszt l l sd M szaki inform ci f ggel k RS 232 485 kommunik ci le r sa VIGYAZAT Amikor a t pfesz ltseg r van kapcsolva s gy ri 15 t s csatlakoz csatlakoztatva van a Turbo V 2K G automatikusan elindul IS FIGYELEM A vezerl t m r mechanikusan s elektromosan a szivatty hoz csatlakoztatva sz ll tj k A vezerl nek a szivatty r l val lev laszt s t csak jogosult Varian v kuumtechnol giai szem lyzet v gezheti MEGJEGYZ S Amikor legel sz r futtatja a Turbo V 2K G t a vez rl egys g automatikusan elind tja a rendszert egy k l nleges elj r ssal amely v di a csap gyakat az esetleges s r l sekt l SOFT START A rendszer l p sr l l p sre fokozatosan indul teljes sebess gig 10 perct l 1 r n bel lig Miut n a rendszer el rte a teljes sebess get a soft start elj r s le lesz tiltva s a k vetkez ind t sok szok sos ton t rt nnek MEGJEGYZ S Az IP 54 v delmi fokozat fenntart s
45. te MERK For opprettholde IP54 beskyttelsesniv et m kun kontaktene som f lger med pumpen brukes Bruk kun str mkabelen art nr 969 9957 eller 969 9958 og fest den til styreenheten med det bestemte festet se figuren nedenfor Bruk denne kabelen og st pselet sammen med en egnet jordet kontakt for unng elektrisk st t og for overholde EU forskriftene 36 BRUKERVEILEDNING Systemet leveres med en gr nn LED styrt av et statussignal Den gr nne lysdioden LD1 p TURBO V 2K G basepanel angir systemets funksjon ved hjelp av blink den lyser fast pumpen roterer normalt den blinker langsomt ca hver 400 ms systemet er i stilling for akselerasjon bremsing stopp eller Waiting for interlock den blinker hurtig ca hver 200 ms feiltilstand Hvordan stoppe Turbo V 2K G Stopp pumpen p en av f lgende m ter 1 Kople fra I O kontakten som f lger med 2 GI et fjernstyrt stoppsignal med I O kontakt se avsnittet J1 REMOTE I O i vedlegget Technical Information 3 Gi et fjernstyrt stoppsignal med seriegrensesnittet RS232 485 se avsnittet RS232 485 Communication Description i vedlegget Technical Information N dstopp Trekk ut nettkabelen fra styreenheten for stoppe Turbo V 2K G i en n dsituasjon VEDLIKEHOLD Turbo V 2K G er vedlikeholdsfritt Alt arbeid p systemet m kun utf res av autorisert personell AN ADVARSEL For noe arbeid gjgres p systemet m det frak
46. vyCerpajte v kuov komoru na 0 1 mbar 4 Dajte sign l pre spustenie v vevy Turbo V 2K G jedn m z nasledovn ch sp sobov a pripojen m dodan ho protikusu I O konektora b poslan m vzdialen ho sign lu spustenia cez I O konektor pozri odstavec J1 VZDIALENY I O dodatku k Technick m Inform ci m c poslan m vzdialen ho sign lu spustenia cez rozhranie RS 232 485 pozri odstavec Popis komunik cie cez RS232 RS 485 dodatku k Technick m Inform ci m AN VAROVANIE Ak funguje nap janie a je pripojeny prislusny vychodzi 15 kolikovy konektor zariadenie Turbo V 2K G sa spusti automaticky IS UPOZORNENIE Kontroln modul sa dod va mechanicky aj elektricky pripojen k v veve Odpojenie kontroln ho modulu od v vevy treba zveri autorizovan m servisn m technikom firmy Varian Vacuum Technologies POZN MKA Pri prvom spusten v vevy Turbo V 2K G kontroln modul automaticky na tartuje syst m zvl tnym postupom ktor chr ni lo isk syst mu pred po koden m SOFT START Syst m sa dosiahne pln r chlos postupne v asovom intervale od 10 min t do jednej hodiny Ke syst m dosiahol pln r chlos re im soft tartu je zablokovan a al ie spustenia prebiehaj norm lnym sp sobom POZN MKA Pre z skanie rovne ochrany IP 54 pou ite konektory dodan s v vevou Pou ite konektory PN 969 9957 alebo 969 9958 pre nap jaciu n ru a pripevnite ich ku kontroln mu modulu vhod
47. zelite Crpati pline ki so teZji od Ar prosimo da kontaktirate Varian tehni no podporo za ve informacij 87 900 968 01 C Uporaba Turbo V 2K G Zagon sistema Preden sistem za enete se prepri ajte da je I O prikljucek izklju en Ce je sistem povezan na oddaljen I O se prepri ajte da je na voljo stop signal glej odstavek J1 REMOTE 1 0 v prilogi Tehnicnih informacij Za zagon sistema sledite naslednjim korakom 5 izklju ite Ce je na voljo sistemski I O priklju ek 6 priklju ite napetost 7 iz rpajte vakuumsko posodo do 0 1 mbar 8 oddajte signal za za etek z enim od naslednjih na inov a Priklju ite prilo en I O priklju ek b Oddajte oddaljeni signal za zagon preko l O priklju ka glej odstavek J1 REMOTE I O v prilogi Tehni nih informacij c Oddajte oddaljeni signal za zagon preko RS 232 485 serijskega vmesnika glej odstavek RS232 RS 485 Opis komunikacij v prilogi Tehni nih informacij AN OPOZORILO Ko je dovedena napetost in je vstavljen tovarni ko privzeti 15 pin se Turbo V 2K G samodejno za ene ES POZOR Upravljalec je mehansko in elektronsko povezan na Crpalko Odstranjevanje upravljalca iz rpalke mora izvesti samo poo bla eno osebje Varian Vacuum Technologies OPOMBA Ko prvi za enete Turbo V 2K G kontrolna enota samodejno za ene sistem s posedbno proceduro ki zavaruje te aje proti po kodbam SOFT START Sistem se po korakih za ene do polne hitrosti v asu od
48. 968 01 C HIGH VACUUM FLANGE CONNECTION To connect the Turbo V 2K G pump to the ISO F inlet flange position the integrated inlet screen centering ring as shown in the figure INLET SCREEN N T I Then fix the two flanges with the bolts as shown in the following figures according to Norm ISO 1609 CHAMBER VACUUM Sn N TT N ZA ae FORE VACUUM PUMP CONNECTION A flange KF 40 NW is available to connect the Turbo V2K G pump to the fore vacuum pump A hose or vacuum approved pipe can be used Ifa rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the use of bellows NOTE The Turbo V 2K G pump is characterized by its high compression ratio also for oil vapors When using a mechanical oil sealed pump it is advisable to install a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil backstreaming 95 TECHNICAL INFORMATION PUMP USED IN PRESENCE OF MAGNETIC FIELDS Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consump tion by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radia tion a
49. The user should read this instruction manual and any other additional information supplied by Varian before operating the equipment Varian will not be held responsible for any events occurring due to non compliance even partial with these instructions im proper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The Turbo V 2K G is an integrated system with a turbo molecular pump for high and ultra high vacuum applications with its relevant controller The system can pump many types of gases or gas compound It is not suitable for pumping liquids or solid particles The pumping action is obtained through a high speed turbine max 33000 rpm driven by a high performance 3 phase electric motor The Turbo V 2K G is free of contaminating agents and therefore is suitable for applications requiring a clean vacuum It is equipped with auxiliary connectors to be controlled from a remote site by means of an host computer connected through a serial line RS232 or RS485 The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equip ment Detailed information is supplied in the appendix Techni cal Information This manual uses the following standard protocol TRIER The warning messages are for attracting the attention of the operator to a particular procedure or practice whic
50. V 2K G upevn te v n jak stabiln poloze a p vodn p rubu turbovyv vy p ipojte k pevn protip rub kter snese torzn moment 10600 Nm kolem sv osy Turbomolekul rn v v va se vstupn p rubou ISO se mus p ipevnit k vakuov komo e rouby N sleduj c tabulka uv d nezbytn po et roub a p slu n utahovac moment kter doporu uje firma Varian si P CHYTN x UTAHOVACI ibi ZARIZENI POS MOMENT POZN MKA V v vu Turbo V 2K G nelze p ipevnit pomoc jej podstavy Toto za zen lze p ipevnit pouze pomoci jeho p ruby ISO 250F Upevn n mus b t provedeno podle normy ISO 1609 z vr z v A z 7 v 2 Musi se pou it ocelov rouby o pevnosti nejmen 500 N mm 55 PR RU KA K POU IT IS VAROV N Podle sm rnice EN 61010 1 pat v veva Turbo V 2K G do druh elektroinstala n nebo p ep ov t dy Za zen p ipojte do nap jec s t kter spl uje uvedenou t du V v va Turbo V 2K G je vybavena vstupn mi a v stupn mi konektory a konektory pro s riovou komunikaci kter se mus p ipojit k extern m obvod m tak aby dn elektrick sou st nebyla p stupn Pro zachov n ochrann ho kryt IP 54 pou ijte odpov daj c dodan konektory Zajist te aby izolace za zen p ipojen ho k v v v Turbo V 2K G byla p im en i v p pad jedin poruchy podle sm rnice EN 61010 1 Chcete li inform
51. anbefalt av Varian STRAMME TYPE KLEMME MOMENT egnede FLENS ISO 250 F Bolt med M10 12 22 Nm gjenge MERK Turbo V 2K G kan ikke festes med bruk av bunnen Systemet kan kun festes med ISO 250F flensen Festingen m utf res i henhold til ISO 1609 standarden Det m brukes st lbolter med en styrkeklasse p minst 500 N mm 35 BRUKERVEILEDNING IS FORSIKTIG Turbo V 2K G horer til installasjonsklasse eller overspen ningsklasse nummer 2 i folge EN 61010 1 standarden Kople derfor anordningen til en hovedledning som tilfredsstiller krave ne for denne klassen Bruk kontaktene som fglger med for garantere beskyttelsen Turbo V 2K G er utstyrt med koplingsstykker for inn utgangene og seriekommunikasjonen som m koples til de ytre stromkretsene slik at ingen deler under spenning er tilgjengelige Forsikre deg om at isoleringen av anordningen koplet til Turbo V 2K G har en egnet isolering ogs under forhold med en enkel feil i f lge EN 61010 1 standarden IP54 For installasjon av tilleggsutstyr vises det til Teknisk informasjon BRUK Alle instruksjoner for korrekt bruk finnes i dette avsnittet Les n ye gjennom denne manualen f r systemet tas i bruk Mens oppvarmingen av kammeret p g r m temperaturen ved inngangsflensen ikke overskride 80 C Mens pumpen er i funksjon m rotorens temperatur aldri overstige 120 C Brukeren m passe p innstille riktig driftsmodus i henhold til gassen
52. die bei Nichtbeachtung Schaden an der Anlage verursachen konnten HINWEIS Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden LAGERUNG Um ein H chstma an Effizienz und Zuverl ssigkeit der Varian Turbomolekularpumpen zu gew hrleisten sind die folgenden Anweisungen zu beachten e W hrend des Transports der Handhabung und der Einla gerung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden e Temperatur von 20 C bis 70 C e Relative Feuchtigkeit von 0 bis 95 nicht kondensie rend e Der Kunde hat die Turbomolekularpumpen nach dem Emp fang bei Erstinbetriebnahme stets im Modus Soft Start in gangzusetzen e Die Lagerdauer f r eine Turbomolekularpumpe betr gt 10 Monate ab dem Speditionsdatum IS ACHTUNG Falls die Lagerdauer aus verschiedentlichen Gr nden die ge nannte Frist berschreiten sollte ist die Pumpe an das Werk zur ckzusenden F r Informationen wenden Sie sich bitte an den rtlichen Varian Vertreter GEBRAUCHSANLEITUNG VOR DER INSTALLATION Modell Turbo V 2K G wird in einer speziellen Schutzverpa ckung geliefert Eventuelle Transportsch den sind der zust n digen rtlichen Verkaufsstelle zu melden Modell Turbo V 2K G ist vorsichtig auszupacken wobei es vor dem Herunterfallen und vor St Ren und Vibrationen zu sch tzen ist Das Verpa ckungsmaterial ist vorschriftsgem zu entsorgen F r die Entnahme der Pumpe aus ihrer Ver
53. el presente manual 13 87 900 968 01 C INFORMACI N GENERAL Este equipo es para uso profesional El usuario ha de leer atentamente el presente manual de instrucciones y cualquier otra informaci n suplementaria facilitada por Varian antes de usar el aparato Varian se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales espec ficas El sistema est en condiciones de bombear diferentes tipos de gas y de compuestos gaseosos pero no es adecuado para bombear l quidos ni part culas s lidas El efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad 33000 r p m m x movida por un motor el ctrico trif sico de alto rendimiento El Turbo V 2K G no posee ningun agente contaminante y por lo tanto es adecuado para aplicaciones que requieren un vac o limpio Adem s cuenta con conectores auxiliares mediante los cuales es posible pilotearlo de remoto a trav s de un ordenador host conectado con l nea serie RS232 o RS485 A continuaci n se facilita toda la informaci n necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n m s detallada Este manual utiliza las convenciones siguientes FEU Los mensajes de peligro atraen la atenci n del opera
54. enchufe junto con un tomacorriente adecuadamente conectado a tierra para evitar descargas el ctricas y cumplir con los requerimientos de las normas CE 16 INSTRUCCIONES DE USO El sistema cuenta con un LED verde piloteado por una se al de estado El LED verde LD1 situado en el panel de la base del TURBO V 2K G indica con la frecuencia de su parpadeo las condiciones operativas del sistema encendido fijo la bomba est en rotaci n normal parpadea lentamente periodo de 400 ms aproximadamente el sistema est en estado de rampa o de frenado o de stop o de waiting for iterlock parpadea r pidamente periodo de aproximadamente condici n de error C mo detener la Turbo V 2K G La detenci n de la bomba podr efectuarse aplicando una de las siguientes modalidades 200 ms 1 retirando el ensamble conector de l O suministrado adjunto 2 enviando una sefal de STOP de remoto mediante el conector I O v ase el apartado J1 REMOTE I O en el ap ndice Technical Information 3 enviando una se al de STOP de remoto mediante el interfaz serie RS 232 485 v ase el apartado RS 232 485 Communication Description en el ap ndice Technical Information Parada de Emergencia Para detener en condiciones de emergencia el Turbo V 2K G es necesario desconectar del controlador el cable de alimentaci n MANTENIMIENTO El Turbo V 2K G no necesita ning n mantenimiento Cualquier operaci
55. eventuali responsabilit dovute all inosser vanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche La Turbo V 2K G un sistema integrato costituito da una pom pa turbomolecolare per applicazioni di alto e ultra alto vuoto e dal relativo controller II sistema capace di pompare molti tipi di gas o di composto gassoso ma non adatto per il pompag gio di liquidi o di particelle solide L effetto pompante e ottenuto tramite una turbina rotante ad elevata velocit 33000 giri min max mossa da un motore elettrico trifase ad alto rendimento La Turbo V 2K G e total mente priva di agenti contaminanti ed quindi adatta per ap plicazioni che richiedono un vuoto pulito Ha inoltre dei connettori ausiliari tramite i quali e possibile pilo tarlo da remoto tramite un computer host collegato con linea seriale RS232 o RS485 Nei paragrafi seguenti sono riportate tutte le informazioni ne cessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nel l appendice Technical information Questo manuale utilizza le seguenti convenzioni N PERICOLO messaggi di pericolo attirano attenzione del operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali IS ATTEN
56. for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt 87 900 968 01 C TECHNICAL INFORMATION The controller can answers with the following re Command STOP sponse types Source PC Destination Controller TYPE LENGTH VALUE DESCRIPTION 02 30 30 30 31 30 03 42 32 After a read instruction of a logic window umeric c of a numeric window After a read instruction Alphanumeric 10 bytes of an alphanumeric Source Controller window Destination PC The command execu AC 1 byte 0x6 tion has been success 02 03 38 35 fully completed The command execu NACK 1 byte 0x19 yon has bean failed STX JA ACK ETX CRC Unknown The specified window Wi 1 byte 0x32 in the command is not indow a valid window The data type specified in the command Logic Command SOFT START ON Data Type 1 byte 0x33 Numeric or Alphanu Source PC Error meric is not accorded Destination ntroller with the specified Win estination Controlle dow The value expressed 02 31 30 30 31 31 03 42 32 0x34 during a write com mand is out of the STX WINDOW WR ON ETX CRC range value of the specified window The specified window Source Controller is Read Only or tempo Desti ER ze estination PC sol rarily disabled for ex Win Disabled 1 byte 0x35 ie you tte the Soft Start when the 02 03 38 35 Pump is running i I Command SOF
57. maintain the IP 54 protection level use the appropriate connector provided with the pump FEMALE CONNECTOR ProfiBus connector 87 900 968 01 C Configuration Before power on the controller set the Profibus address by the 2 rotary switches Up to 126 different addresses from 0 to 125 can be selected The address value sets by the 2 switches is expressed in hexadecimal notation so value from 00 to 7D are permitted this setting is read by the interface during the power on phase so any change of the switch position after the power on is ignored Indicators Two LEDs are present on the interface one green and one red e the red led indicates that the interface is cor rectly powered e the green led shows the interface status ac cording the following table E ai 2pulses 2 pulses face di Blink fast pucr Blink slow 1 pulse ProfiBus link established controller link NOT established yet Controller state machine not in Regular data exchange This situation could be normal in the first 45 seconds after the interface power on Controller address searching phase or after the controller power on 2 pulses ProfiBus link not established yet ProfiBus state machine not in Regular data exchange This failure has priority in the indication over the previous Blink fast Gateway fail internal check or wrong ad dress set address gt 0x7D or address not stabl
58. minimum purge gas flow rate of 20 sccm 0 33 mbar l s This value can be exceeded according to the process requirements Please contact Var ian for specific applications 94 TECHNICAL INFORMATION The purge gas throughput of 20 sccm with the rec ommended forepump allows to achieve a high vacuum pressure in the 10 mbar range The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points 1 Close the corrosive gas flow into the system 2 Leaving the Turbo V 2K G pump and the backing pump running and the purge gas flowing wait for enough time to evacuate the corrosive gas from the system Turn off the Turbopump 4 Open the Turbo V 2K G vent electro valve up to the atmospheric pressure in the system 5 When the Turbo V 2K G pump and the back ing pump are stopped and the system is at atmospheric pressure for a better bearing protection it is advisable to leave the purge gas flowing into the Turbo V pump with the chamber or the Turbo V vent valve opened to avoid system overpressures If the vent valve cant be kept opened the backing pump should be left operating Purge gas line Pressure regulator Purge and vent port Forevacuum pump Turbopump Water line Purge and vent layout 87 900
59. n deber ser realizada por personal autorizado ETEN Antes de realizar cualquier operaci n en el sistema desconectarlo de la corriente enviar aire de la bomba abriendo la v lvula oportuna esperar hasta que el rotor se pare completamente y esperar a que la temperatura superficial de la bomba sea inferior a 50 C En caso de averia se podr utilizar el servicio de reparaci n Varian o el Varian advanced exchange service que permite obtener un sistema regenerado para sustituir el averiado NOTA Antes de enviar al fabricante un sistema para su reparaci n o advanced exchange service es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud adjunta al presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje del sistema antes de enviarlo En caso de que el sistema se tenga que desguazar eliminarlo respetando las normas nacionales espec ficas 87 900 968 01 C INSTRU ES PARA O USO Indica es de Seguran a para Bombas Turbomoleculares As bombas turbomoleculares descritas no seguinte Manual de Instru es t m uma alta quantidade de energia cin tica devida a alta velocidade de rota o unida massa especifi ca de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o e stator ou uma ruptura do rotor a energia de rota o pode ser liberada Para evitar danos ap
60. operatore deve assicurarsi di predisporre il corretto modo di funzionamento in funzione del gas da pompare 1 per Azoto e gas pi leggeri O per Argon modo di default Per ulteriori det tagli vedere l appendice Technical Information N PERICOLO Non far funzionare mai la pompa se la flangia di ingresso non collegata alla camera a vuoto o non chiusa con la flangia di chiusura Non toccare la turbopompa e I suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura pu cau sare lesioni alle persone IS ATTENZIONE Evitare urti oscillazioni o bruschi spostamenti della turbopompa quando e in funzione cuscinetti potrebbero danneggiarsi Per la mandata al aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attra verso apposita porta deve essere inferiore a 1 bar oltre la pressione atmosferica Per il pompaggio di gas aggressivi queste pompe sono dotate di una apposita porta attraverso la quale amp necessario fornire alla pompa un flusso di gas inerte Azoto o Argon per proteg gere i cuscinetti vedere appendice Technical Information AN PERICOLO Quando la pompa viene utilizzata per il pompaggio di gas tos sici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza di gas esplosivi La pompa progettata per avere un alto trasferimento di Azoto Argon e gas p
61. priporo ljivo da je naprava zaprta dokler je ne namestite v sistem S tem boste onemogo ili onesna enje sistema Turbo V 2K G paket vsebuje rpalko z vgrajenim upravljalcem 10 zaslon vgrajen 11 navodila za uporabo na CD ROMu 12 vre ka s pripomo ki 13 15 pinski priklju ek IP 54 za REMOTE I O priklju ek z vsemi medpovezavami potrebnimi za zagon rpalke 14 9 pinski priklju ek IP 54 za SERIAL priklju ek ki se uporablja za serijsko povezavo 15 9 pinski priklju ek za Network MoniTorr 16 Nosilec za napetostni kabel vgrajen 87 900 968 01 C MONTAZA AN OPOZORILO Zaradi teZe je treba za rokovanje s Crpalko uporabiti primerne naprave za premikanje Uporabite vijake ki se nahajajo v luknjah na telesu Crpalke ES POZOR Lepljiv in zascitni pokrov ne odstranjujte dokler ne pove ete turbo rpalko na sistem Je AD K N Napravo name ajte samo odznotraj in v nobenem primeru je ne name ajte v okolju ki je izpostavljeno na atmosferske agente de sneg led prah agresivni plini ali v okoljih kjer obstaja nevarnost poZara Tekom delovanja je treba spo otvati naslednje pogoje Maksimalen pritisk 2 bara nad pritiskom atmosfere Temperatura zraka od 5 C od 40 C Relativna vla nost O 95 brez kondenza V prisotnosti magnetnih polje mora Crpalka biti za itena s feromagnetnim itom Za dodatne informacije glejte prilogo Tehni ne informacije
62. przed zanieczyszczeniem systemu W opakowaniu zespo u Turbo V 2K G znajduj si 9 pompa z wbudowanym sterownikiem kontroler 10 inlet screen zamontowany 11 instrukcja na CD ROM 12 woreczek z akcesoriami 13 konektor 15 drogowy REMOTE IO IP 54 z zintegrowanymi po czeniami potrzebnymi do uruchomienia pompy 14 konektor 9 drogowy SERIAL IP 54 do zastosowania dla po czenia szeregowego 15 konektror z 9 czami dla Network MoniTorr 16 wspornik do podtrzymania kabla zasilania zamontowany 87 900 968 01 C INSTALACJA AN NIEBEZPIECZENSTWO Pompa z powodu w asnego ci aru musi by przemieszczana poprzez odpowiedni sprz t do tego celu Do tego celu nale y zastosowa odpowiednie zawiesia wkr cone w gwintowane otwory znajduj ce si na korpusie pompy IB UWAGA Nie zdejmowa zamocowanej rubami pod czeniem turbopompy do systemu pokrywy przed Nie instalowa i lub u ytkowa pompy w otoczeniach wystawionych na czynniki atmosferyczne deszcz mr z nieg py y gazy chemiczne w rodowiskach wybuchowych lub z wysokim zagro eniem po aru Podczas dzia ania obowi zkowo nast puj ce warunki otoczenia maksymalne ci nienie atmosferycznym temperatura powietrza od 5 C do 40 C wzgl dna wilgo 0 95 bez opar W obecno ci p l elektromagnetycznych pompa musi by odpowiednio zabezpieczona przez odpowiednie ekranowanie W celu szczeg
63. radioaktivn ch plyn dodr ujte pros m po adovan postupy pro likvidaci ka d ho plynu V v vu nepou vejte v p tomnosti v bu n ch plyn V v va je ur ena pro vysoce v konn od erp v n N2 Ar a leh ho plynu Pokud byste pot ebovali od erp vat plyny t ne Ar kontaktujte technickou podporu firmy Varian a dejte informace 87 900 968 01 C Pouzivani zarizeni Turbo V 2K G Jak se zarizeni uvadi do provozu Pred spu t n m zafizeni zkontrolujte pros m jestli je rozpojen konektor Je li za zen p ipojeno k n jak mu vzd len mu modulu I O zkontrolujte p vod sign lu pro zastaven viz odstavec J1 REMOTE I O v p loze Technick informace Pri spou t n tohoto za izeni postupujte podle t chto krok 1 odpojte od za zen p ipojen I O konektor je li 2 zapojte do s ov z suvky 3 vy erpejte podtlakovou komoru na 0 1 mbar 4 jedn m z n sleduj c ch zp sob p ive te do v vevy Turbo V 2K G spou t c sign l a pripojte dodan odpovidajici I O konektor b privedte do konektoru I O spou t c sign l ze vzd len ho mista viz odstavec J1 REMOTE I O v p loze Technick informace c prive te spou t c sign l ze vzd len ho mista prost ednictv m s riov ho rozhran RS 232 485 viz odstavec Popis komunikace RS232 RS 485 v p loze Technick informace V STRAHA Jakmile bude p ipojeno nap jen a zasunu
64. re personskader IS VIGTIGT Denne advarselsmeddelelse vises f r procedurer f lges n je for ikke at risikere maskinskader der skal BEM RK Dette g r opm rksom p vigtig information i teksten OPBEVARING Det er n dvendigt at overholde f lgende forskrifter for at sikre optimal funktion og driftssikkerhed i de turbomolekyl re pumper fra Varian e S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne e temperatur fra 20 C til 70 C e relativ fugtighed fra 0 til 95 ikke kondenserende e Kunden skal altid starte de turbomolekyl re pumper ved hj lp af Soft Start funktionen ved modtagelse og start af pumperne for f rste gang e De turbomolekyl re pumper m opbevares i 10 m neder fra forsendelsesdatoen IS VIGTIGT Hvis opbevaringsperioden af en eller anden grund er l ngere er det n dvendigt at sende pumpen tilbage til fabrikken Yderli gere oplysninger f s ved henvendelse til den lokale Varian repr sentant 26 BRUGSANVISNING FORBEREDELSE F R INSTALLATION Turbo V 2K G leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen viser tegn p skader der kan v re opst et under transporten S rg for at Turbo V 2K G ikke tabes eller uds ttes for st d ved udpakningen P grund af systemets v gt 35 kg er det n dvendigt at benytte de tre jebolte placeret ved 120 der er
65. silmukkapulttia jotka on ruuvattu pumpun runkoon Pakkausmateriaali voidaan kierr tt kokonaisuudessaan ja se vastaa EY direktiivi 85 399 ymp rist n suojelusta IS HUOMIO Jotta kaasun vuoto ongelmilta v ltytt isiin ei tyhji lle altistuviin osiin tule koskea paljain k sin K ytt k aina k sineit tai muuta sopivaa suojausta HUOM Turbo V 2K G ei vaurioidu ilmalle altistuessaan On kuitenkin suositeltavaa s ilytt pumppu suljettuna ja sinet ityn kunnes se asennetaan j rjestelm n Siten estet n j rjestelm n likaantuminen Turbo V 2K G pumpun pakkauksessa on pumppu sis nrakennetulla valvojalla sis ntulon laippa asennettu t m ohjekirja CD ROMilla varustepussi OI PEN 15 tieliitin REMOTE IO IP54 jossa on pumpun k ynnistykseen tarvittavat sis nrakennetut liit nn t 9 tieliitin SERIAL IP54 jota k ytet n sarjaliit nt n 9 tieliitin Network MoniTorr s hk kaapelin kannatin asennettu RE 87 900 968 01 C ASENNUS VAARA Pumppua tulee sen painosta johtuen k sitell asianmukaisilla nosto ja siirtolaitteille K yt erityisia silmukkapultteja jotka on ruuvattu pumpun runkoon tehtyihin kierteitettyihin reikiin ES HUOMIO Ala poista pulteilla kiinnitettya kantta ennen turbopumpun kytkemist j rjestelm n Pumppua ei tule asentaa ja tai kayttaa ymp rist ss miss se joutuu kosketuksiin s tekij iden sateen
66. som pumpes 1 for nitrogen og lettere gasser 0 for argon standardmodus For ytterligere detaljer se vedlegget Technical Information AN ADVARSEL Ikke start pumpen hvis inngangsflensen ikke er koplet til vakuumkammeret eller ikke er lukket med lukkeflensen Ikke bergr turbopumpen eller noe av tilleggsutstyret under oppvarmingen De h ye temperaturene kan fore til brannskader IS FORSIKTIG Unng st t svingninger eller plutselige bevegelser av turbinpumpen n r den er i funksjon Lagrene kan skades Bruk st v og partikkelfri luft eller inaktiv gass ved forsyning av pumpen Trykket ved inngangen m ikke v re mindre enn 1 bar over atmosf risk trykk Ved pumping av etsende gasser er disse pumpene utstyrt med en spesiell pning Til denne pningen skal flyt av inaktive gasser argon eller kvelstoff koples for beskytte lagrene se Teknisk informasjon AN ADVARSEL N r pumpen brukes for pumpe giftige brannfarlige eller radioaktive gasser skal de relevante forskriftene for de enkelte gasstypene folges Pumpen skal ikke brukes i eksplosjonsfarlige miljger Pumpen er utviklet for a pumpe store mengder med nitrogen argon og lettere gasser Hvis det er nodvendig pumpe gasser som er tyngre enn argon vennligst kontakt Varians tekniske service for informasjon 87 900 968 01 C Bruk av Turbo V 2K G Hvordan starte opp systemet F r systemet startes kontroller at I O kontakten er fjernet Hvis syste
67. styreenhet Systemet kan pumpe mange typer gass eller gassblandinger men er ikke egnet for pumping av v sker eller faste partikler Pumpingen oppn s med en h yhastighetsturbin maks 33000 opm koplet til en trefaset elektrisk motor Turbo V 2K G har ingen forurensende stoffer og er derfor egnet for anlegg med behov for rene vakuum Systemet har i tillegg hjelpekontakter slik at det kan fjernstyres med en vertsmaskin koplet gjennom en serielinje RS232 eller RS485 De folgende avsnitt inneholder all informasjon som er nodvendig for sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Teknisk informasjon Denne manualen bruker folgende standardprotokoll AN ADVARSEL Disse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremgangsm te eller praksis som hvis den ikke folges kan medfore alvorlige skader IS FORSIKTIG Denne advarselen vises foran fremgangsm ter som dersom de ikke f lges kan f re til at utstyret skades MERK Merknadene inneholder viktig informasjon som er hentet fra teksten LAGRING For garantere optimal drift og p litelighet for Varian turbomolekyl re pumper m f lgende anvisninger f lges e Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges e Temperatur fra 20 C til 70 C e Relativ fuktighet fra 0 til 95 uten kondensering e Kunden m alltid soft starte de turbomolekylaer
68. tempt to write a parameter with following coding diag status byte Write success Controller response was NACK Controller response was Unknown window Controller response was Bad Data Type Controller response was Over range Controller response was Bad operation Controller response was an unknown response Parameter not supported by the controller TI O RON O The ProfiBus external diagnosis services are used to report following unexpected situations e Controller fail if the controller goes in fail mode an external diagnostic service is re quired and one byte in the diagnostic buffer signals the type of failure e User parameter mismatch if the user sets one or more parameters out of their allowed range a ProfiBus external diagnostic service is required and some bits in the diagnosis frame signals which parameter is wrong i e over range or under range 92 TECHNICAL INFORMATION Diagnostic buffer MEANING M station non exist set by master station not ready slave not ready for data exchange cfg fault configuration data doesn t match ext diag slave has external diagnostic data not supported slave doesn t support re guested function invalid slave response slave sets per manent 0 prm fault wrong parameter assignment master lock slave is parameterised by another master prm reg slave has to be re parameterised stat diag static diagnosis fixed 1 wd
69. utiliser le syst me effectuer tous les branchements lectriques et pneumatiques Pendant le chauffage ventuel de la chambre vide la temp rature de la bride d entr e ne doit pas d passer 80 C Pendant le fonctionnement de la pompe la temp rature du rotor ne doit jamais tre sup rieure 120 C L op rateur doit veiller adapter le mode de fonctionnement au gaz pomper 1 pour azote et gaz plus l gers 0 pour Argon mode d faut Pour plus de d tails consulter l appendice Technical Information EXT Ne jamais faire fonctionner la pompe si la bride d entr e n est pas reli e la chambre vide ou si elle n est pas ferm e avec la bride de fermeture Eviter de toucher la turbopompe ainsi que ses accessoires ventuels pendant les op rations de chauffage La temp rature lev e peut tre l origine de l sions graves IS ATTENTION Lorsque la turbopompe fonctionne viter tout choc oscillation ou d placement brusque car les paliers pourraient se d t rio rer Pour le refoulement de l air de la pompe utiliser de l air ou du gaz inerte exempt de poussi re ou de particules La pression d entr e travers la porte pr vue cet effet doit tre inf rieure 1 bar au del de la pression atmosph rique Pour le pompage de gaz agressifs ces pompes sont dot es d une porte sp ciale travers laquelle il est n cessaire de four nir la pompe un flux de gaz inerte azote ou argon pour p
70. van de turbopomp met een vaste contraflens die een koppel van 10600 Nm rondom de eigen as kan verdragen De turbopomp met ISO ingangsflens moet bevestigd worden aan de vacu mkamer met behulp van bouten De volgende tabel beschrijft het aantal benodigde bouten en met welk koppel Varian adviseert om ze aan te halen FLENS KLEMTYPE NR AANHAAL KOPPEL ISO 250 F Bout met M10 12 22 Nm schroefdraad OPMERKING De Turbo V 2K G kan niet bevestigd worden via zijn basis Het systeem mag uitsluitend bevestigd worden via zijn ISO 250F flens De bevestiging moet conform de norm ISO 1609 gebeuren Er moeten stalen bouten worden weerstandsklasse van minstens 500 N mm gebruikt met een 23 GEBRUIKSAANWIJZINGEN USS ATTENTIE De Turbo V 2K G behoort tot de tweede installatiecategorie of overspanningscategorie die door de norm EN 61010 1 is voorzien Sluit deze inrichting dus aan op een voedingslijn die aan deze categorie voldoet Gebruik de bijgeleverde contraconnectoren om de beveiligingsgraad IP 54 te garanderen De Turbo V 2K G bezit connectoren voor de ingangen uitgangen en voor de seri le communicatie die aangesloten moeten worden op de externe circuits zodat geen enkel deel onder spanning toegankelijk is Controleer of de inrichting verbonden met de Turbo V 2K G goed geisoleerd is ook in geval van een enkele storing zoals voorzien door de norm EN 61010 1 Zie Technical Information voor installatie van accessoires d
71. vyvevu mus te vr tit v robci Informujte se pros m u mistniho z stupce pro prodej a servis v vev firmy Varian 94 PR RU KA K POU IT PR PRAVA K INSTALACI Za zen Turbo V 2K G se dod v ve speci ln m ochrann m obalu Pokud toto balen vykazuje zn mky po kozen k n muz mohlo doj t b hem prepravy kontaktujte va i m stn prodejn pobo ku Pri vybalovani d vejte pozor aby zafizeni nespadlo a chra te jej pfed v emi nenad l mi n razy otfesy nebo vibracemi Pro vyjmut v vevy z obalu a tak kv li jeho hmotnosti 35 kg pou ijte tri Srouby s okem na roubovan na t lese vyv vy s rozte 120 Balic materi l nelikvidujte nedovolen m zp sobem Tento materi l Ize 100 recyklovat a spl uje po adavky sm rnice EEC 85 399 IS VAROV N Aby se zamezilo probl m m s odply ov n m nepou vejte hol ruce pri manipulaci s komponenty kter budou vystaveny vakuu V dy pou vejte rukavice nebo jinou vhodnou ochranu POZN MKA V norm ln m prostfedi se vyv va Turbo V 2K G nem e poskodit Presto doporu ujeme abyste ji nechali zakrytou dokud nebude nainstalovana do syst mu T m se zamezi zne i t n tohoto za zen Balen Turbo V 2K G obsahuje erpadlo s vestav n m regul torem vstupn s to namontov no tento n vod k pou it na CD ROM bra na s p slu enstv m 15 p lovy konektor IP 54 pro p ipojen ke konektor REMOTE I O d l
72. 03 353 Fax 49 6151 703 302 07 03 Sales and Service Offices India Varian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S de R L de C V Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Taiwan Varian Technologies Asia Ltd 14F 6 No 77 Hsin Tai Wu Rd Sec 1 Hsi chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Fax 886 2 2698 9678 UK and Ireland Varian Ltd 28 Manor Road Walton On Thames Surrey KT 12 2QF England Tel 44 1932 89 8000 Fax 44 1932 22 8769 United States Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Other Countries Varian Vacuum Technologies via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350
73. 1 Slut derfor a nordningen til en forsyningslinie som opfylder kravene i denne klasse Benyt de medleverede kontakter for at sikre opretholdelse af IP 54 isoleringsbeskyttelsen Turbo V 2K G er forsynet med konnektorer til ind udgange og til seriel kommunikation Konnektorerne skal tilsluttes de eksterne kredsl b s ledes at det ikke er muligt at opn adgang til de sp ndingsf rende dele Kontroll r at anordningen der er tilsluttet Turbo V 2K G har en passende isolering Dette g lder ogs i tilf lde af enkeltfejl som angivet i normen EN 61010 1 Der henvises til bilaget Teknisk Information for oplysninger vedr rende installation af ekstraudstyret ANVENDELSE Dette afsnit beskriver de vigtigste driftsprocedurer Inden anvendelse af systemet b r samtlige elektriske og pneumatiske tilslutninger udf res forbindelse med opvarmning af vakuumkammeret m temperatur ikke overstige 80 C Rotorens temperatur m aldrig overskride 120 C i forbindelse med brug af pumpen Operat ren skal kontrollere at den korrekte funktion er indstillet i forhold til gastypen som skal pumpes 1 til kv lstof og lettere gasarter 0 til argon default indstilling Vedr rende yderligere detaljer henvises til bilaget Technical Information indl bsflangens AN ADVARSEL Pumpen m aldrig aktiveres hvis indl bsflangen ikke er tilsluttet vakuumkammeret eller hvis pumpen ikke er lukket ved hj lp af lukkeflangen R r aldri
74. 10 minut do 1 ure Ko sistem dose e polno hitrost se mehki zagon onemogo i in naslednji zagoni so normalni OPOMBA Za vzdr evanje IP 54 za itnega nivoja morate uporabljati samo priklju ke ki so bili zraven rpalke Uporabite priklju ke PN 969 9957 ali 969 9958 za napetostni kabel ki ga pritrdite na upravljalec s posebnim nosilcem glej naslednjo skico Uporabljajte ta kabel in vtika skupaj s primerno ozemljeno vti nico tako da vas tok ne strese in da zadovoljite EU predpisom 64 NAVODILA ZA UPORABO Sistem ima zeleni statusni signal Zelena LED dioda ki se nahaja na sprednji plo i Turbo V 2K G s hitrostjo utripanja ozna uje delovne pogoje sistema e Brez utripanja rpalka je normalno vrti e Po asno utripanje perioda pribli no 400 ms Sistem je v stanju ramp breaking stop ali v stanju Waiting for interloc e Hitro utripanje perioda pribli no 200 ms Napaka Zaustavljanje sistema Za zaustavljanje sistema lahko uporabite eno od naslednjih metod 4 priklju ite prilo en I O priklju ek o oddajte oddaljeni signal za zagon preko I O priklju ka glej odstavek J1 REMOTE I O v prilogi Tehni nih informacij 6 Oddajte oddaljeni signal za zagon preko RS 232 485 serijskega vmesnika glej odstavek RS232 RS 485 Opis komunikacij v prilogi Tehni nih informacij Zaustavitev v sili Za zaustavitev naprave Turbo V 2K G v sili morate odstraniti napetost VZDR EVANJE Turbo V 2
75. 1000 4 4 EN 61000 4 5 EN61000 4 6 Conducted high frequency phenomena EN 61000 4 11 Voltage fluctuation voltage dips and short interruptions 71 87 900 968 01 C TECHNICAL INFORMATION 900 sccm 800 sccm 700 sccm 600 sccm 500 sccm 400 sccm 300 sccm Inlet Pressure mbar 50 sccm 100 sccm 200 sccm 350 W 100 W 200 W 250 W 300 W 10 0 Fore Pressure mbar Throughput and power curves for Argon power limit 350 W Data with 80 mr h primary pump 600 sccm 800 sccm 1000 sccm 1200 sccm 1400 sccm 1600 sccm Inlet Pressure mbar ESSE 100 sccm 200 sccm 300 sccm 400 sccm 500 sccm 10 1 10 Foreline Pressure mbar Throughput and power curves for Nitrogen power limit 400 W Data with 80 m h primary pump 72 87 900 968 01 C TECHNICAL INFORMATION TURBO V 2K G OUTLINE The following figure shows the Turbo V 2K G outlines dimensions are in mm inches INI V Ds NA Sk FAD Turbo V 2K G VALA TE R ODO N NA ITER N VV RUBBER TUBE DIA 9 0 INTERCONNECTIONS The following paragraphs describe the Turbo V ww x ISOLATION 2K G interconnections OUTPUT START STOP Optocoupled J1 REMOTE I O START STOP Optocoupled At power on tne controller goes into Remote I O INTERLOCK Obtoc wpied mode even if it was in Serial mode before HOME down INTERLOCK Optocoup
76. 2K G patr do druhej in tala nej prep ovej kateg rie pod a smernice EN 61010 1 Zariadenie je potrebn pripoji ku zdroju nap jania ktor vyhovuje uvedenej kategorii Zariadenie Turbo V 2K G m konektory pre vstup v stup a konektory s riovej komunik cie ktor je potrebn pripoji k vonkaj m okruhom tak aby nebola dostupn iadna elektrick s as Pre z skanie rovne ochrany IP 54 pou ite dodan protikusy konektorov Presved ite sa i zariadenie pripojen k Turbo V 2K G m adekv tnu izol ciu aj pre pr pad samostatnej chyby pod a smernice EN 61010 1 O in tal cia doplnkovej v bavy pozri pr ru ku Technick Inform cie POU ITIE T to as popisuje z kladn sp soby pou itia zariadenia Sk r ne za nete syst m pou va zapojte v etky elektrick a pneumatick pripojenia Teplota vstupnej pr ruby po as zahrievania v kuovej komory nesmie prekro i 80 C Po as prev dzky v vevy teplota rotora nesmie prekro i 120 C Pou vate mus zvoli spr vny plynov re im pod a ak plyn sa erp 1 pre N2 a lahke plyny O pre arg n v chodzie nastavenie Podrobn inform cie sa nach dzaj v dodatku Technick inform cie AN VAROVANIE Nikdy nepouZivajte turbovyvevu ak vstupn pr ruba nie je pripojen k v kuovej komore alebo nie je zablendovan V priebehu zahrievania sa nikdy nedotykajte turbovyvevy ani iadneho pr slu enstva
77. 4 1 vi ferd O Y E O lt U 900 905 Freguency Hz The set point output stays open until the freguency becomes higher than 505 Hz that is 500 Hz 1 of 900 Hz then the output goes closed and stays colsed until the freguency becomes lower than 495 Hz that is 500 Hz 1 of 500 Hz It is possible to mask the set point checking for a programmable mask time window 103 The SET POINT signal has the following default settings reference guantity controller status thereshold not relevant hysteresis not relevant activation type active close NO delay time 0 second NOTE The Navigator Software ver 3 0 optional or any user developed serial communication software according to RS 232 485 Communication Proto col allows the operator to set all the programma ble feature When no external input output device is available the J1 connector must be closed with the supplied mating connector that short circuits the START and INTERLOCK inputs with the GROUND input 75 TECHNICAL INFORMATION Electrical connections examples e Start Stop or Interlock D Open Stop Outside controller Inside controller Pin 9 24Vdc Pin Open Stop Pin 15 Gnd Inside controller Outside controller Instead of switch is possible to use transistor e Soft Start Speed Setting Purge Vent Pin 9 24Vdc Pin 7 Pin 15 Gnd Outside controll
78. 6 Diagnostic manage MON ras ee NE mt n 92 Biagnostie els SOMNI D OR MEN EU PR oa 92 INEERSCREENINSTALEATION ana ae en east samat 93 WATER COOLING CONNECTION Ge en ea lee ct oot 93 PUMP PURGING AND VENTING aso nn ne 94 Purge and Vent installation oe a a 94 Pump used with corrosive gases iii 94 HIGH VACUUM FLANGE CONNECTION a en 95 FORE VACUUM PUMP CONNECTION ea ele 95 PUMP USED IN PRESENCE OF MAGNETIC FIELDS ee 95 ORDERABLE PARTS aloe uil eee 95 ISTRUZIONI PER L USO Indicazioni di Sicurezza per Pompe Turbomolecolari Le pompe Turbomolecolari descritte nel seguente Manuale di Istruzioni hanno una elevata quantita di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa speci fica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o per una rottura del rotore energia di rotazione potrebbe essere rilasciata AN PERICOLO Per evitare danni al apparecchiatura e prevenire lesioni agli operatori e necessario seguire attentamente le istruzioni di installazione descritte nel presente manuale 1 87 900 968 01 C INFORMAZIONI GENERALI Questa apparecchiatura destinata ad uso professionale L uti lizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Varian prima dell utilizzo del apparecchiatura La Varian si ritiene sollevata da
79. 7 conector conjugado de 9 vias Network MoniTorr 8 bra adeira de fixa o do cabo de alimenta o montada Oi GM DE 87 900 968 01 C INSTALAC O Devido ao seu peso a bomba deve ser manuseada com a ajuda de equipamentos de levantamento e desloca o espec ficos Para tal utilizar as respectivas cavilhas montadas nos furos roscados existentes no corpo da bomba IS ATEN O N o remover a cobertura aparafusada antes de ligar a turbobomba ao sistema N o instalar e ou usar a bomba em ambientes expostos a agentes atmosf ricos chuva gelo neve poeiras gases agressivos em ambientes com possibilidade de explos o ou com elevado risco de inc ndio Durante o funcionamento necess rio que sejam respeitadas as seguintes condi es ambientais press o m xima 2 bar al m da press o atmosf rica temperatura de 5 C a 40 C consultar a planilha no ap ndice Technical Information humidade relativa O 95 nao condensante Na presen a de campos electromagn ticos a bomba deve ser protegida atrav s de blindagens adequadas Para ulteriores detalhes consultar o ap ndice Technical Information O Turbo V 2K G deve ser ligado a uma bomba prim ria consultar esquema em Technical Information O Turbo V 2K G pode ser instalado em qualquer posi o Fixar o Turbo V 2K G em posi o est vel ligando o flange de entrada da turbobomba a um contra flange fixo capaz de re
80. 8 INSTRU ES PARA O USO PREPARA O PARA A INSTALA O O Turbo V 2K G fornecido numa embalagem protectora especial se esta apresentar sinais de danos que poderiam ter ocorrido durante o transporte entrar em contacto com o escrit rio de vendas local Durante a remo o da embalagem tomar muito cuidado para n o deixar cair o controller e para n o submet lo a choques ou vibra es Devido ao seu peso 35 kg para retirar a bomba da embalagem necess rio utilizar as tr s cavilhas fixadas a 120 ao corpo da bomba N o depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a norma CEE 85 399 para a protec o do meio ambiente KS ATEN O Para evitar problemas de perdas de g s n o tocar com as m os os componentes destinados exposi o do v cuo Utilizar sempre luvas ou outra protec o adequada NOTA A normal exposi o ao ar n o pode danificar a Turbo bomba V 2k Aconselha se no entanto mant la selada e bem fechada dentro da caixa at ao momento da instala o no sistema para evitar que se suje com poeiras A embalagem da Turbo V 2K G cont m bomba com controller integrado inlet screen montado este manual em CD ROM sacos dos acess rios conector conjugado de 15 vias REMOTE I O IP 54 com todas as liga es necess rias para activar a bomba conector conjugado de 9 vias SERIAL IP 54 a utilizar para a liga o s rie
81. ART signaali yhdell seuraavista tavoista a Liit ohessa toimitettu I O liitin b Anna START et signaali 1 O liittimell ks Technical Information l tteen kappale J1 REMOTE I O c Anna START et signaali RS232 485 sarjaliit nn n kautta ks Technical Information liitteen kappale RS232 485 Communication Description VAARA Kytkett ess s hk p lle 15 nastaisen liittimen ollessa liitettyn Turbo V 2K G k ynnistyy automaattisesti IS HUOMIO Valvoja toimitetaan pumppuun mekaanisesti ja s hk isesti kytkettyn Valvojan saa irrottaa pumpun rungosta ainoastaan Varian Vacuum Technologies yrityksen valtuuttama henkil HUOM Kun Turbo V 2K G k ynnistet n ensimm isen kerran valvoja k ynnist j rjestelm n automaattisesti erikoistoimenpiteell joka suojaa laakereita vaurioilta SOFT START J rjestelm k ynnistet n per kk isill askelilla t yteen nopeuteen asti 10 minuutista 1 tuntiin vaihtelevana aikana Kun j rjestelm on saavuttanut t yden nopeuden soft start toimenpide kytket n pois ja seuraavat k ynnistykset suoritetaan normaalisti HUOM K yt ainoastaan pumpun ohessa toimitettuja liittimi s ilytt ksesi IP54 suojatason K yt s hk kaapelina ainoastaan tuotetta 969 9957 tai 969 9958 ja kiinnit s hk kaapeli valvojaan erityisell kannattimella ks seuraava kuva K yt t t kaapelia ja pistoketta yhdess oikein maadoitetun pistoras
82. BANTART S A Turbo V 2K G nem ig nyel karbantart st A rendszeren v gzett b rmely munk t jogosult szem lyzetnek kell elv geznie MSL A rendszeren b rmely munka v gz se el tt v lassza le azt a t pfesz lts gr l szell ztesse a szivatty t a megfelel elektromos szelep kinyit s val v rjon am g a rotor forg sa le ll s am g a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n l pjen kapcsolatba a helyi Varian szervizk zponttal ahol tudnak adni egy helyre ll tott rendszert a hib s helyett MEGJEGYZ S Miel tt jav t sra vagy cser re visszak ldi a rendszert a gy rt hoz az ehhez a g pk nyvh z csatolt Egeszseg s biztons g lapot ki kell t lteni s el kell k ldeni a helyi kereskedelmi irod hoz A lap egy m solat t sz ll t s el tt be kell illeszteni a rendszercsomagba Ha a rendszert le kell selejtezni azt rtalmatlan tani kell a konkr t nemzeti szabv nyoknak megfelel en 87 900 968 01 C INSTRUKCJA UZYTKOWANIA Wskaz wki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych Pompy Turbomolekularne opisane w niniejszej Instrukcji Obstugi posiadaja wysoka energie kinetyczn spowodowan bardzo wysok pr dko ci obrot w razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojanem lub z powodu p kni cia wirnika energia obrotowa mo e by zwolniona A TE
83. C 85 399 IS UPOZORNENIE Ak chcete pred s probl mom s odply ovanim nechytajte komponenty ktor bud vystaven v kuu hol mi rukami V dy pou vajte rukavice alebo in vhodn ochranu POZN MKA Be n vystavenie okolit m podmienkam nem e Turbo V 2K G po kodi Napriek tomu je eln aby zariadenie pred mont ou zostalo hermeticky uzavret To zabr ni jeho kontamin cii S prava Turbo V 2K G zahr uje v veva s integrovan m kontroln m modulom vstupn mrie ka tento n vod na pou itie na CD kabela s pr slu enstvom 15 kol kov konektor IP 54 ako protikus pre konektor dia kov ho ovl dania REMOTE I O obsahuj ci v etky spojenia potrebn pre spustenie v vevy 6 9 kol kov konektor IP 54 ako protikus pre s riov konektor pou van pre s riov spojenie 7 9 kolikowy konektor protikus pre Network MoniT orr 8 Uchytna svorka a pre napajaci kabel namontovana FR BDR 87 900 968 01 C INSTAL CIA AN VAROVANIE Kv li jej v he s v vevou manipulujte s pomocou vhodn ch pom cok a n strojov Pou ite z vesn o k zaskrutkovan do otvorov v telese v vevy IS UPOZORNENIE Neodstra ujte priskrutkovan ochrann kryt sk r ne pripoj te turbov vevu k syst mu V vevu nein talujte ani nepou vajte v prostred vystavenom vonkaj m vplyvom d sneh ad prach koroz vne plyny ani vo v bu n ch prostrediach aleb
84. Customer Support amp Service North America Tel 1 800 882 7426 toll free vtl technical support varianinc com Europe Tel 00 800 234 234 00 toll free vtt technical support varianinc com Japan Tel 81 3 5232 1253 dedicated line vtj technical support varianinc com Korea Tel 82 2 3452 2452 dedicated line vtk technical support varianinc com Taiwan Tel 0 800 051 342 toll free vtw technical support varianinc com Worldwide Web Site Catalog and Order On line www varianinc com Representative in most countries AL AS VARIAN
85. D die door een statussignaal wordt aangestuurd De groene LED LD1 op het paneel van de basis van de Turbo V 2K G geeft door de frequentie van zijn knipperen de werkcondities van het systeem aan brandt onafgebroken de pomp draait normaal knippert langzaam periode van circa 400 ms het systeem is in de status oploop of remmen of stop of waiting for interlock knippert snel periode van circa 200 ms fouttoestand Hoe wordt de Turbo V 2K G gestopt Om de pomp te stoppen kan n van de volgende methoden worden gebruikt 1 verwijdering van de bijgeleverde I O contraconnector 2 verzending van een STOP signaal op afstand via de 1 0 connector zie paragraaf J1 REMOTE I O in de bijlage Technical Information 3 verzending van een STOP signaal op afstand via de seri le interface RS 232 485 zie paragraaf RS 232 485 Communication Description in de bijlage Technical Information Noodstop Om de Turbo V 2K G in noodomstandigheden te stoppen moet de stroomtoevoerkabel van de controller losgemaakt worden ONDERHOUD De Turbo V 2K G is onderhoudsvrij Eventuele werkzaamheden moeten door bevoegd personeel worden uitgevoerd AN GEVAAR Alvorens werkzaamheden aan het systeem uit te voeren de stekker verwijderen de pomp met behulp van de hiervoor bestemde klep ontluchten en wachten totdat de rotor volledig stil staat en de oppervlaktetemperatuur van de pomp onder een temperatuur
86. E Gaal OI Aby unikn uszkodzenia aparatury i zapobiec uszkodzeniom cia a ope rator w nale y obowi zkowo przestrzega zalecenia dotycz ce instalacji opisane w niniejszej instrukcji obs ugi 49 87 900 968 01 C OG LNE INFORMACJE Ta aparatura jest przeznaczona do u ytku zawodowego U ytkownik musi przeczyta bardzo uwa nie niniejsz instrukcj ka d dodatkow informacj dostarczon przez firm Varian przed u ytkowaniem aparatury Firma Varian uchyla si od jakiejkolwiek odpowiedzialno ci w przypadku cz ciowego lub ca kowitego braku przestrzegania instrukcji w przypadku niew a ciwego u ytkowania przez nieprzeszkolony personel w przypadku nieupowa nionych interwencji jak i w przypadku braku zastosowania odpowiednich norm krajowych System Turbo V 2K G jest zintegrowanym systeme sktadajacym sie z pompy turbomolekularnej dla zastosowan wysokich ultra wysokich pr ni jak i przez odpowiedni system sterowania tzw kontroler System jest w stanie pompowac wiele typ w gazu lub mieszanek gazowych ale nie jest przystosowany do pompowania ptyn w lub statych czastek Zjawisko pompowania jest uzyskane poprzez obrotowa turbine o wysokiej predkosci max 33000 obr min napedzana przez elektryczny silnik trojfazowy o wysokiej wydajnosci Turbo V 2K G jest calkowicie bez czynnik w zanieczyszczajacych dlatego te jest odpowiedni do zastosowan gdzie jest wymagana tzw czysta pr nia Poza tym posiada pomocni
87. ION PARAMETERS _ Does not start L Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp I Foreline Pressure L Mechanical Contact L Overtemperature _ Other Temp 2 Purge flow L Cooling defective OPERATION TIME TURBOCONTROLLER ERROR MESSAGE ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other L Damaged sealing area Other Customer application Customer application LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Customer application Customer application FAILURE DESCRIPTION Please describe in detail the nature of the malfunction to assist us in performing f
88. J1 REMOTE i bilagan Technical Information c Skicka en fj rrstyrd startsignal via det seriella granssnittet RS232 485 se avsnitt RS232 485 Communication Description i bilagan Technical Information A MATER Nar str mmen ar p slagen och den 15 poliga kontakten medfoljer vid leveransen ar isatt startar Turbo V 2K G automatiskt IS VIKTIGT Styrenheten levereras mekaniskt och elektriskt ansluten till pumpen Frankoppling av styrenheten fran pumpen far endast g ras av auktoriserad personal fran Varian Vacuum Technologies OBSERVERA Nar du anv nder Turbo V 2K G f r f rsta g ngen startas systemet automatiskt av styrenheten med en speciell procedur som skyddar lagren mot eventuella skador SOFT START Systemet startas stegvis for att till slut uppna max hastighet Detta tar mellan 10 min och 1 timme N r systemet har uppn tt max hastighet deaktiveras proceduren f r mjukstart F ljande starter sker d refter p normalt s tt OBSERVERA F r att uppr tth lla kapslingsklass IP54 ska du endast anv nda de kontakter som f ljer med pumpen Anv nd endast str mkabeln art nr 969 9957 eller 969 9958 F st str mkabeln vid styrenheten med hj lp av en l mplig f stbygel se f ljande figur Anv nd sladden och kontakten tillsammans med en jordad anslutning f r att undvika st tar och enligt kr vande EU normer 32 BRUKSANVISNING Systemet r utrustat med en gr n LED f r status
89. JA UZYTKOWANIA een ee a beta 49 PRIRUC KAKE UT oh Ron 53 NAVOD K POU T NU a een 57 NAVODIEAZAUPORABO ne en ee Ne r hie 61 INSTRUCTIONS FOR USE ei ee ee aa E 65 TECHNICALINFORMA DON ta ee an 69 DESCRIPTION OP THE TURBO V ZEG aoi coca 69 PUMDDESCDUOM WANE ppt 69 Controller DESC ee cesa 70 TECHNICAL SPECIFICATION wetten den den nente eenheden denten dieen ette 70 TURBO V ZIG OUTLINE ciance pres cda 73 NTERCONNEC THONS aule ea eine 73 MS REMOTE Old Rue ee ee 73 STN 76 SERIAL CABLE INSTALLATION en nen ea lee 76 RS 232 RS 485 COMMUNICATION DESCRIPTION nennen nennen nennen 77 Communication Formale ee lidia 77 Communication POLO CO AN 17 VWIDGOW Me ANTI GS ee lee nada ot fanu a ba 19 MONITO E en ee p Nee 81 Fowsring On tie MONITO an en hn 81 a EN Eee En ENE Er re En SIE 81 MAIMIERNA CE ANN 81 MoniTorr Installation on the Network and on the Main PC 81 MoniTorr Connectivity Kit Installation Procedure 82 STONE NS RE TNNT 83 NetWork Connector RS 4609 une a i 83 Installing the File Download Software 4 83 Operating Procedura a te 84 PVG WO ACS OW AN NT 84 RUNO HOT SI RE 84 Modifying the Parametros 84 Archive Saving Method Procedure se 85 PROFIBUS OPTION atan ae a 85 i a ECT CD EEUU 85 MEN ANN 85 AS ANO EE IO A rn ele E 85 Com UNN rn 86 NAAS SN 86 Software operation and state machine ei 8
90. K G ne potrebuje vzdr evanja Kakr no koli delo na sistemu mora opraviti avtorizirano osebje AN OPOZORILO Pred za etkom dela na sistemu ga izklju ite iz napetosti pre istite rpalko tako da odprete primerno odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru okvare kontaktirajte lokalni Varian servisni center ki vam lahko zamenja pokvarjen sistem z novim OPOMBA Preden odnesete sistem na popravilo ali zamenjavo z drugo enoto morate izpolniti Health and Safety obrazec ki je pri lo en navodilom in ga poslate lokalni prodajni pisarni Pred po iljanjem morate kopijo obrazca vstaviti v embala o sistema Sistem je treba uni iti v skladu z dolo enimi nacionalnimi stan dardi 87 900 968 01 C INSTRUCTIONS FOR USE Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released To avoid damage to equipment and to prevent injuries to operating per sonnel the installation instructions as given in this manual should be strictly followed 65 87 900 968 01 C GENERAL INFORMATION This equipment is destined for use by professionals
91. T START OFF Source PC Destination Controller Source PC Out of Range 1 byte NOTE The RS 485 is a 2 wire gnd optional half duplex communication link Destination Controller Source Controller umm PP LE LE LEE STX A ACK ETX CRC Source Controller Destination PC OO LI 78 87 900 968 01 C Command READ PUMP STATUS Source PC Destination Controller with address 3 eee ILL Source Controller with address 3 in stop status Destination PC iu nc WINDOW DATA STATUS Command READ SERIAL CONFIGURATION Source PC Destination Controller with address 3 in 485 mode LA 11 Source Controller Destination PC k cd n i Window Meanings Start Stop Read Data Description Admitted Write Type Values R W L in remote mode the window is a read only Low speed activation Soft Start write only in Stop condi tion Set Point type 0 OFF 1 ON default 0 Remote 1 Serial 0 default 1 YES 1 NO 0 default 1 the first time and 0 for the following 0 Frequency 1 Current 2 Time 3 Status default 3 N 102 103 104 105 108 109 111 118 120 121 122 Read Write R W R W R W R W R W R W g R W R W R W Data Type Z TECHNICAL INFORMATION Description Set Point threshold expressed in Hz mA or s Set Poin
92. Technical Informa tion N KINAYNOY H IS ATOGVOYETE NA TM TOVAPHITO GE N and H 1 bar
93. Turbo V 2K G Pumping System Models 969 8871 969 8873 87 900 968 01 C MAY 2005 VARIAN ap AS vacuum technologies MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUC ES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKASIKIRJA FELHASZN L I K ZIK NYV PODRECZNIK INSTRUKCII N VOD K POU IT N VOD NA OBSLUHU PRIRO NIK ZA NAVODILA INSTRUCTION MANUAL Turbo V 2K G ap VARIAN gt lt vacuum technologies Dear Customer Thank you for purchasing a VARIAN vacuum product At VARIAN Vacuum Technologies we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our product On the back side you find a Corrective Action Request form that you may fill out in the first part and return 0 us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you wi
94. V 2K G wordt in een speciale beschermende verpakking geleverd als er schade wordt geconstateerd die tijdens het transport veroorzaakt zou kunnen zijn meteen contact opnemen met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat de Turbo V 2K G niet kan vallen en geen stoten of trillingen te verduren krijgt Vanwege het gewicht 35 kg van de pomp moet deze uit de verpakking worden verwijderd met behulp van de drie oogbouten die op 120 op het pomplichaam zijn vastgeschroefd Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal is volledig recyclebaar en voldoet aan de EEG milieurichtlijn 85 399 IS ATTENTIE Om ontgassingsproblemen te voorkomen mogen de componenten die met het vacu m in aanraking komen niet met de blote handen aangeraakt worden Gebruik altijd handschoenen of een andere geschikte bescherming OPMERKING De Turbo V 2K G kan niet beschadigd raken door normale blootstelling aan de omgeving Men adviseert echter om de pomp afgesloten en verzegeld te houden tot het moment van installatie in het systeem Dit om contaminatie van het systeem te voorkomen In de verpakking van de Turbo V 2K G zijn aanwezig pomp met ge ntegreerde controller inlet screen gemonteerd deze handleiding op CD ROM zak met accessoires SI pp I 15 pin contraconnector IP 54 voor REMOTE 1 0 connector met alle geintegreerde aansluitingen die benodigd zijn om de pomp op te starten 6 9 p
95. ZIONE messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni al apparec chiatura NOTA Le note contengono informazioni importanti estrapolate dal testo IMMAGAZZINAMENTO Per garantire il massimo livello di funzionalita ed affidabilita delle pompe Turbomolecolari Varian devono essere osservate le seguenti prescrizioni e durante il trasporto lo spostamento e immagazzinamento delle pompe non devono essere superate le seguenti con dizioni ambientali e temperatura da 20 C a 70 C e umidit relativa da O a 95 non condensante e il cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta e il tempo di immagazzinamento di una pompa turbomoleco lare di 10 mesi dalla data di spedizione LS ATTENZIONE Se per gualsiasi ragione il tempo di immagazzinamento supe riore occorre reinviare la pompa in fabbrica Per ogni informazio ne si prega di contattare il locale rappresentante della Varian ISTRUZIONI PER L USO PREPARAZIONE PER L INSTALLAZIONE La Turbo V 2K G viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verifi cati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere la Turbo V 2K G e a non sotto porla ad urti o vibrazi
96. a opravu nebo v m nu za repasovan kus mus te list Health and Safety Zdrav a bezpe nost p ilo en k tomuto n vodu vyplnit a odeslat do kancel e m stn ho prodejn ho odd len Pfed odesl n m za zen mus te k za zen p ibalit kopii tohoto listu Pokud se m za zen vy adit mus se zlikvidovat v souladu s konkr tn mi st tn mi normami 87 900 968 01 C NAVOD K POUZITIU Bezpe nostn n vod pre Turbomolekul rne v vevy Turbomolekul rne v vevy ak s n sledovne popisovan obsahuj ve k mno stvo kinetickej energie v aka vysokej ot avej r chlosti v kombin cii s konkretn m objemom ich rotorov V pr pade syst movej poruchy napr pri kontaktu rotora statora alebo pri zr caniu rotora sa mo e uvolni rota n energia AN VAROVANIE Pokyny k in tal cii uveden v tomto n vode musia by pr sne dodr ovan za elom prevencie zranenia obsluhy 57 87 900 968 01 C VSEOBECNE INFORM CIE Toto zariadenie je ur en pre profesion lnych pracovn kov Sk r ne za nete zariadenie pou va pre tajte si n vod na pou itie a v etky al ie pokyny spolo nosti Varian Spolo nos Varian nenesie iadnu zodpovednos za ak ko vek udalosti zapr inen postupom ktor nie je vs lade dokonca ani v iasto nom s lade st mito pokynmi zapr inen nespr vnym pou van m zariadenia nepou en mi osobami neopr vnenou pravou zariad
97. ace o dopl kov m p slu enstv viz Technick informace POUZITI Tento odstavec popisuje podrobnosti z kladn ch pracovn ch postup Pred pou it m syst mu prove te v echna elektrick a pneumatick pfipojeni Pri zah v n vakuov komory teplota p vodn p ruby nesm p ekro it 80 C Za chodu v v vy nesm teplota rotoru nikdy p es hnout 120 C U ivatel mus zadat podle od erp van ho plynu p slu n plynov re im 1 pro N2 a leh plyny O pro argon v choz nastaven Viz podrobn informace v p loze Technick informace BERN Turbovyv vu nikdy nepou vejte nebude li vstupn pr ruba p ipojen k vakuov komo e B hem zah v n se turbovyv vy ani jej ho p slu enstv nedot kejte Vysok teplota m e zp sobit pop leniny IS VAROV N B hem chodu chra te v v vu p ed n razy vibracemi a prudk mi pohyby Mohly by se po kodit lo iska Pro odplyn n v v vy pou vejte vzduch nebo inertn plyn kter je zbaven prachu a sm tek Tlak p i odv tr vac m otvoru mus b t men ne 1 bary nad atmosf rick m tlakem Pro erp n agresivn ch plyn jsou tyto v v vy vybaveny speci ln m otvorem kter umo uje plynul p tok inertn ho plynu nap N2 Ar pro ochranu lo isek v v vy viz p lohu Technick informace AN VYSTRAHA Pokud pou v te v v vu pro erp n toxick ch ho lav ch nebo
98. ade in compliance with local and international Shipping Regulations IATA DOT UN 3 The customer is expected to take the following actions to ensure the Safety of workers at Varian a Drain any oils or other liquids b Purge or flush all gasses c Wipe off any excess residues in or on the equipment d Package the equipment to prevent shipping damage for Advance Exchanges please use packing material from replacement unit 4 Make sure the shipping documents clearly show the RA and then return the package to the Varian location nearest you North and South America Europe and Middle East Asia and ROW Varian Vacuum Technologies Varian SpA Varian Vacuum Technologies 121 Hartwell Ave Via Flli Varian 54 Local Office Lexington MA 02421 10040 Leini TO ITALY Phone 1 781 8617200 Phone 39 011 9979111 Fax 1 781 8609252 Fax 39 011 9979330 CUSTOMER INFORMATION ENN En Contact person Name unsre dei NE A EEE E M OE Ship Method sera Shipping Collect PO OONA Europe only VAT reg Number USA only Taxable _ Non taxable Customer Bill VOE de PRODUCT IDENTIFICATION TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair L Loaner Return Credit L Shipping Error L Evaluation Return L Calibration L Other HEALTH and SAFETY CERTIFICATION Varian Va
99. ages noget som helst indgreb p systemet skal str mmen f rst afbrydes og luften i pumpen skal fjernes ved at bne ventilen Vent med foretagelse af indgrebet til rotoren er standset og til temperaturen p pumpens overflade er under 50 C tilf lde af skader p systemet kontaktes et Varian reparationsvaerksted eller Varian advanced exchange service der udskifter systemet med et repareret system BEM ERK Inden systemet sendes til reparationsvaerkstedet eller Varian advanced axchange service skal Sikkerheds og tilstandsdokumentet der er vedlagt denne instruktionsmanual udfyldes En kopi af dette dokument skal inds ttes i systemets emballage inden afsendelse Skrotning af systemet skal foreg i overensstemmelse med det p g ldende lands s rlige love 87 900 968 01 C BRUKSANVISNING S kerhetsanvisningar for Molekylara turbopumpar De molekylara turbopumparna som beskrivs I bruksanvisningen har en hog kinetisk energi beroende p den h ga rotationshastigheten och rotorernas specifika massa det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsenergin frigors AN VARNING For att undvika skador p utrustningen och forhindra att skador orsakas p operat rer m ste installationsinstruktionerna som beskrivs i den h r bruksanvisningen f ljas noga 29 87 900 968 01 C ALLM N INFORMATION
100. ailure analysis NOTA Su richiesta questo documento disponibile anche in Tedesco Italiano e Francese REMARQUE Sur demande ce document est galement disponible en allemand italien et francais HINWEIS Auf Aufrage ist diese Unterlage auch auf Deutsch Italienisch und Franz sisch erh ltlich Argentina Varian Argentina Ltd Sucursal Argentina Av Ricardo Balbin 2316 1428 Buenos Aires Argentina Tel 54 1 783 5306 Fax 54 1 786 5172 Benelux Varian Vacuum Technologies Rijksstraatweg 269 H 3956 CP Leersum The Netherlands Tel 31 343 469910 Fax 31 343 469961 Brazil Varian Industria e Comercio Ltda Avenida Dr Cardoso de Mello 1644 Vila Olimpia Sao Paulo 04548 005 Brazil Tel 55 11 3845 0444 Fax 55 11 3845 9350 Canada Central coordination through Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Toll Free 1 800 882 7426 China Varian Technologies Beijing Room 1201 Jinyu Mansion No 129A Xuanwumen Xidajie Xicheng District Beijing 100031 P R China Tel 86 10 6641 1530 Fax 86 10 6641 1534 France and Wallonie Varian s a 7 avenue des Tropigues Z A de Courtaboeuf B P 12 Les Ulis cedex Orsay 91941 France Tel 33 1 69 86 38 13 Fax 33 1 69 28 23 08 Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 6151 7
101. aiting for interlock 400 MS Turbo V 2K G 1 VO 2 STOP I O JI REMOTE VO Technical Information 3 STOP RS 232 485 RS 232 485 Communication Description Techni cal Information TO Turbo V 2K G TO anog tov controller To Turbo V 2K G AN KINAYNOZ
102. an s specialised person nel 81 TECHNICAL INFORMATION Maintenance The MoniTorr card doesnt require any mainte nance Any intervention must be carried out by authorised personnel In case of failure the Varian Repair Service is available or Advanced Exchange Service that pro vides you with a regenerated controller in re placement of the faulty one MoniTorr Installation on the Network and on the Main PC The RS 485 interface allows connecting more than one system in network up to 32 In this way it is possible to download all the spectrums data with a single PC through a protocol converter not yet available which operate as a gateway from 485 to 232 link The controller provides the serial address of the MoniTorr option Every controller must therefore have a different serial address so as to avoid con flicts on the network Every controller has 0 de fault serial address So the user must set the controller s address The following figure shows the connection of the MoniTorr to the RS485 network MoniTorr Addr 31 MoniTorr Addr 1 MoniTorr Addr 0 Network J1 RS 232 converter J2 RS 485 Network connection NOTE The protocol converter is not strictly needed for Monilorr operation It is also possible to use the standard RS232 to RS485 converter and the stan dard optical to RS232 converter In order to install and operate the MoniTorr card of the Turbo V 2K G its necessary to ge
103. ar Varian qui decline par cons guent toute responsabilit en cas de non respect total ou partiel des instructions donn es utilisation impropre par un personnel non form op rations non autori s es ou emploi contraire aux reglementations nationales sp cifigues Le Turbo V 2K G est un systeme int gr constitu une pompe turbomol culaire concue pour des applications de vide pouss et ultrapouss et dot un contr leur Le syst me est en mesure de pomper de nombreux types de gaz ou de com pos s gazeux mais il nest pas adapt au pompage de liguides ou de particules solides L effet de pompage est obtenu gr ce une turbine tournant a vitesse lev e 33000 tr min maxi mue par un moteur lectri que triphas a haut rendement Le Turbo V 2K G est totale ment exempt agents polluants et il est par cons guent indigu pour toutes les applications exigeant un vide propre II est en outre dot de connecteurs auxiliaires qui permettent de le piloter a distance a travers un ordinateur central connecte a travers une ligne serielle RS232 ou RS485 Les paragraphes suivants fournissent toutes les indications n cessaires a garantir la s curit de op rateur pendant utili sation de l appareillage Des renseignements plus d taill s se trouvent dans appendice Technical Information Cette notice utilise les signes conventionnels suivants EXT Les messages de danger attirent attention de op rat
104. ara RS232 RS 485 Communication Description of annex Techni cal Information When power is supplied and factory default 15 pin mating con nector is inserted the Turbo V 2K G will start automatically IS CAUTION The controller is furnished already mechanically and electrically connected to the pump Detaching of the controller from the pump must be carried out by authorized Varian Vacuum Tech nologies personnel only NOTE When you run the Turbo V 2K G for the very first time the con trol unit automatically starts the system with a special proce dure which protects the bearings from possible damages SOFT START The system is launched step by step at full speed in a time variable from 10 mins up to 1 hour After the system has reached the full speed the soft start procedure is disabled and following starts are performed in the normal way NOTE In order to maintain the IP 54 protection level you must use only the connectors provided with the pump Use connectors PN 969 9957 or 969 9958 for the power cable and fix it to the controller by means of the suitable retaining bracket see the following figure Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to satisfy CE reguirements 68 INSTRUCTIONS FOR USE The system is provided with a green status led signal The green LED located on the Turbo V 2K G base front panel indicates with
105. aragraphe RS 232 485 Communication Description Des cription communication dans l appendice Technical Information EXT Lorsque le syst me est branch au r seau et que le connecteur 15 broches est connect la pompe Turbo V 2K G se met automatiquement en marche LS ATTENTION Le contr leur est fourni d j connect connexion m canique et lectrique la pompe La s paration du contr leur du corps de la pompe peut tre effectu e uniquement par le personnel auto ris par la soci t Varian Vacuum Technologies NOTE Lors de la premi re mise en marche de la pompe Turbo V 2K G le contr leur lance automatiquement le syst me en ex cutant une proc dure sp ciale qui prot ge les paliers contre tout ris que d endommagement SOFT START Le syst me est lanc progressivement jusqu ce qu il atteigne la vitesse maximum en un temps qui peut varier de 10 minutes 1 heure D s que le syst me atteint sa vitesse maximum la proc dure de soft start est d sactiv e et les d marrages suivants sont effectu s en mode normal NOTE Pour garantir l indice de protection IP 54 n utiliser que les connec teurs fournis avec la pompe Pour l alimentation utiliser exclusive ment un c ble type PN 969 9957 ou 969 9958 et le fixer au contr leur l aide de la bride pr vue voir la figure ci dessous Utiliser ce c ble et cette fiche avec une prise connect e d une mani re ad quate terre pour vite
106. arelhagem e prevenir les es aos operadores necess rio seguir atentamente as instru es de instala o descritas neste manual 17 87 900 968 01 C INFORMA ES GERAIS Esta aparelhagem destina se a uso profissional O utilizador deve ler atentamente o presente manual de instru es e todas as informa es adicionais fornecidas pela Varian antes de utilizar a aparelhagem A Varian n o se responsabiliza pela inobserv ncia total ou parcial das instru es pelo uso indevido por parte de pessoas n o treinadas por opera es n o autorizadas ou pelo uso contr rio s normas nacionais espec ficas O Turbo V 2K G um sistema integrado constitu do por uma bomba turbomolecular para aplica es de alto e ultra alto v cuo integrada no relativo controller O sistema est em condi es de bombear muitos tipos de gases ou de compostos gasosos mas n o adequado para aspirar l quidos ou part culas s lidas O efeito da bomba obtido atrav s de uma turbina rotativa de alta velocidade 33000 r p m m x movida por um motor el ctrico trif sico de alto rendimento O Turbo V 2K G totalmente isentos de agentes contaminadores e portanto adequado para aplica es que requerem um v cuo limpo Al m disso est equipado com conectores auxiliares com os quais poss vel comand lo dist ncia atrav s de um computador host ligado com linha s rie RS232 ou RS485 Nos seguintes par grafos est o descritas
107. as System wird mit einer gr nen LED geliefert die von einem Statussignal angesteuert wird Die gr ne LED LD1 an der Bodenplatte von Modell Turbo V 2K G gibt mit der H ufigkeit ihres Blinkens die Betriebsbedingun gen des System an Daueranzeige Die Pumpe befindet sich im normalen Be trieb Langsame Blinkanzeige ca 400 ms das System befindet sich entweder im Status Rampe Abbremsung Stopp oder Waiting for Interlock Schnelle Blinkanzeige ca 200 ms Fehlerstatus Stillsetzung der Turbo V 2K G F r die Stillsetzung der Pumpe gibt es die folgenden M glich keiten 1 Mitgelieferten E A Konnektor entfernen 2 Das Signal STOP von der Fernsteuerung ber den E A Konnektor geben siehe Abschnitt J1 REMOTE I O im Anhang Technical Information 3 Das Signal STOP von der Fernsteuerung ber die serielle Schnittstelle RS 232 485 geben siehe Abschnitt RS 232 485 Communication Description im Anhang Techni cal Information WARTUNG Modell Turbo V 2K G erfordert keine Wartung Eventuelle Ein griffe d rfen nur von autorisiertem Fachpersonal ausgef hrt werden EEE Vor jedem Eingriff am System den Netzstecker ziehen die Pumpe ber ffnung des entsprechenden Ventils bel ften und abwarten bis der Rotor vollkommen stillsteht und die Tempera tur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten kann der Varian Service oder der Varian advan ced exchange service in Anspruc
108. ase Technical Information USO En este apartado se citan los procedimientos operativos principales Antes de usar el sistema realizar todas las conexiones el ctricas y neum ticas Durante el posible calentamiento de la c mara de vac o la temperatura de la brida de entrada no ha de ser superior a 80 C Durante el funcionamiento de la bomba la temperatura del rotor no deber superar nunca los 120 C El operador deber verificar siempre que el modo de funcionamiento que ha predispuesto sea adecuado para el gas que se debe bombear esto es 1 para nitr geno y gases m s ligeros O para arg n modo predeterminado Para mayores detalles v ase el ap ndice Technical Information ETER No hacer funcionar nunca la bomba si la brida de entrada no est conectada al sistema o no est cerrada con la brida de cierre No tocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas D ATENCI N Evitense golpes oscilaciones o bruscos desplazamientos de la turbobomba durante su funcionamiento Los cojinetes podrian dafiarse Para el envio de aire de la bomba utilizar aire 0 gas inerte sin polvo o particulas La presi n de entrada a trav s de la puerta deber ser inferior a 1 bar por encima de la presi n atmosf rica Para bombear gases agresivos estas bombas est n dotadas de una puerta especifica mediante la cual es necesari
109. at starte systemet 1 Fjern I O kontakten hvis den er monteret 2 Tilslut str mmen 3 Indstil trykket i vakuumkammeret til 0 1 mbar 4 Overf r startsignalet til Turbo V 2K G p en af f lgende m der a Tilslut den medleverede I O kontakt b Overf r det fjernstyrede startsignal ved hj lp af I O kontakten se afsnittet J1 REMOTE I O i bilaget Technical Information c Overfor det fjernstyrede startsignal ved hj lp af den serielle greenseflade RS232 485 se afsnittet RS232 485 Communication Description i bilaget Technical Information AN ADVARSEL Turbo V 2K G starter automatisk efter tilslutning af strom og indseettelse af den medleverede 15 benede kontakt IS VIGTIGT Ved levering er styreenheden allerede sluttet mekanisk og elektrisk til pumpen Det er kun personale fra Varian Vacuum Technologies som m fjerne styreenheden fra pumpehuset BEM RK N r Turbo V 2K G startes for f rste gang starter styreenheden automatisk systemet ved at benytte en s rlig procedure som beskytter lejerne mod potentielle skader SOFT START Systemet startes gradvist indtil fuld hastighed n s dette tidsrum varierer fra 10 minutter til 1 time N r systemet har opn et fuld hastighed frakobles soft start proceduren og de efterf lgende starter sker som normalt BEM RK Benyt udelukkende de kontakter som leveres sammen med pumpen for at opretholde IP 54 isoleringsbeskyttelsen Benyt kun str mkab
110. chl gigen Normen bernimmt die Firma Varian keinerlei Haftung Modell Turbo V 2K G ist ein integriertes System das aus einer Turbomolekularpumpe f r Hoch und H chstvakuum anwendungen integriert mit einem entsprechenden Controller besteht Das System kann viele Arten von Gas oder gasf rmi gen Gemischen pumpen ist jedoch nicht f r das Pumpen von Fl ssigkeiten oder Festk rperpartikeln geeignet Die Pumpwirkung wird durch eine hochtourige Turbine max 33000 1 min erreicht die von einem Hochleistungs drehstrommotor angetrieben wird Modell Turbo V 2K G enth lt keinerlei umweltsch dliche Substanzen und eignet sich des halb auch f r Anwendungen die ein sauberes Vakuum erfor dern Es verf gt des Weiteren ber Hilfskonnektoren ber die es von einem Host Rechner mit seriellem Anschluss RS232 oder RS485 ferngesteuert werden kann In den folgenden Abschnitten sind alle erforderlichen Informati onen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben EEE Die Gefahrenhinweise lenken die Aufmerksamkeit des Bedie ners auf einen Vorgang oder eine bestimmte Ausf hrungswei se die bei unkorrekter Ausf hrung schwere Verletzungen her vorrufen k nnten IS ACHTUNG Die Warnhinweise werden vor Vorgangen angegeben
111. cuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Customer Service to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT been exposed to any toxic or hazardous materials OR HAS been exposed to any toxic or hazardous materials In case of this selection check boxes for any materials that equipment was exposed to check all categories that apply Toxic Corrosive Reactive Flammable Explosive Biological Radioactive List all toxic or hazardous materials Include product name chemical name and chemical symbol or formula Print Name Customer Authorized Signature Print lla Date A NOTE If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Do not write below this line Notification RA Customer ID Equipment romaneske ap Request for Return VARIAN gt lt SEN FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSIT
112. cze konektory poprzez kt re mo liwe jest zdalne pilotowanie go przy pomocy gt wnego komputera potaczonego z linia szeregowa port RS232 lub RS485 W nastepnych paragrafach zostaty przedstawione wszystkie potrzebne informacje w celu zagwarantowania bezpieczenstwa operatora podczas uzytkowania aparatury Szczeg towe informacje zostaty przedstawione w dodatku dotyczacym informacii technicznych Informacje Techniczne W tej instrukcji zastosowano nastepujace umowne znaczenia AN NIEBEZPIECZENSTWO Komunikaty niebezpieczenstwa przyciagaja uwage operatora co do danej procedury lub danego postepowania kt rego nieprawidlowe wykonanie mogtoby spowodowa powazne uszkodzenia ciata IB UWAGA Komunikaty zwi kszonej uwagi s wy wietlane przed procedurami i w przypadku ich braku przestrzegania mo e doj do uszkodzenia aparatury INFORMACJA S to wa ne informacje wyci gni te z tekstu MAGAZYNOWANIE W celu zagwarantowania najwy szego poziomu funkcjonalnego i niezawodno ci pomp turbomolekularnych Varian musz by przestrzegane nast puj ce zalecenia e podczas transportu przesuni cia i magazynowania pomp nie mog by przekroczone nast puj ce warunki rodowiskowe e temperatura od 20 C do 70 C e wzgl dna wilgo od 0 do 95 bez opar e klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je zawsze uruchomi w spos b Soft Start e czas magazynowania danej pom
113. de lagers krijgt geleverd zie bijlage Technical Information AN GEVAAR Wanneer de pomp wordt gebruikt voor het pompen van brandbare giftige of radioactieve gassen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Gebruik de pomp niet in aanwezigheid van explosieve gassen De pomp is voor een hoge doorvoercapaciteit van stikstof Argon en lichtere gassen ontworpen Indien de noodzaak bestaat om zwaardere gassen dan Argon te pompen wordt u verzocht om contact op te nemen met de Technische Service van Varian voor informatie 87 900 968 01 C Gebruik van de Turbo V 2K G Hoe wordt het systeem gestart Controleer alvorens het systeem te starten of de I O contraconncetor verwijderd is Als het systeem verbonden is met een remote I O controleer dan of het STOP signaal actief is zie paragraaf J1 REMOTE I O in de bijlage Technical Information Start het systeem via de volgende stappen 1 verwijder de I O contraconnector indien aanwezig 2 Sluit het voedingsnet aan 3 breng de druk in de vacu mkamer op 0 1 mbar 4 geef aan de Turbo V 2K G het START signaal op een van de volgende manieren a sluit de bijgeleverde I O contraconnector aan b geeft het START signaal op afstand via de I O connector zie paragraaf J1 REMOTE I O in de bijlage Technical Information c geef het START signaal op afstand via de seri le interface RS 232 485 zie paragraaf RS 232 485 Com
114. dor sobre un procedimiento o una ejecuci n espec fica que de no realizarse correctamente podria provocar graves lesiones personales US ATENCI N Los mensajes de atenci n se visualizan antes de los procedimientos que de no cumplirse podr an provocar da os al aparato NOTA Las notas contienen informaci n importante extra da del texto ALMACENAMIENTO Para garantizar el nivel m ximo de funcionalidad y fiabilidad de las bombas turbomoleculares Varian deber n aplicarse las siguientes instrucciones e durante el transporte desplazamiento y almacenamiento de las bombas no deber n superarse las siguientes condiciones ambientales e temperatura entre 20 C y 70 C e humedad relativa entre 0 y 95 no condensante e el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez e el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de env o al cliente US ATENCI N En caso de superarse por cualquier motivo el per odo m ximo permitido de almacenamiento ser necesario devolver la bomba al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Varian 14 INSTRUCCIONES DE USO PREPARACION PARA LA INSTALACION El Turbo V 2K G se suministra en un embalaje especial de protecci n si se observan da os que podr a
115. drive and run the Setup program If the personal computer uses with Windows 2000 Professional Operating System copy the three diskettes into a temporary directory in the PC and then run the W2000 bat file from the hard disk TECHNICAL INFORMATION In the two cases the following screen will be dis played on the personal computer Monitorr File Download Setup wekom to the Monitor File Oowriasd netallston program ei copias o er shared files they are in use Before proceeding we recommend that you dose am application you may Close all the applications and then select OK The following screen will now be displayed on the per sonal computer monitor Monitorr File Download Setup NOTE It is suggested that you maintain the proposed di rectory and path so as to facilitate the identification of the files generated by the system Click on the figure to continue with the installation At this point the following screen is displayed on the personal computer monitor Monitorr File Download Setup 4 Monitorr File Download Choose Program Group FI Setup will add items to the group shown in the Program Group box You can enter a new group name or select one from the Existing Groups list Pubblicazione guidata sul Web OuickTime Snapshot Viewer Strumenti di Office ThinkPad 87 900 968 01 C NOTE It is suggested that you maintain the proposed program group so as to facilitate the identi
116. e za nete oko vek robi v syst me odpojte ho od zdroja nap jania vyvetrajte v vevu tak e otvor te pr slu n ventil po kajte k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyh adajte kontaktn stredisko spolo nosti Varian kde v m pokazen syst m vymenia POZN MKA Sk r ne syst m odo lete na opravu alebo v menu mus te vyplni dotazn k Zdravie a bezpe nos Dotazn k pripojen k n vodu na pou itie je potrebn vyplni a odosla miestnemu predajcovi K piu dotazn ka vlo te do bal ka so syst mom a odo lite spolu s n m Ak je potrebn likvid cia syst mu mus prebehn v s lade so pecifick mi predpismi danej krajiny 87 900 968 01 C NAVODILA ZA UPORABO Varnostna navodila za Turbomolekularne Crpalke Turbomolekularne rpalke opisane v naslednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko sprosti rotacijska energija AN OPOZORILO Da bi se izognili po kodbam opreme in prepre ili po kodbe osebja morate natancno slediti navodilom za namesCanje iz tega prirocnika 61 87 900 968 01 C SPLOSNE INFORMACIJE Oprema je namenjena za profesionalno uporabo Pred uporabo mora uporabnik prebrati navodila za upo
117. e del controller dal corpo pompa puo solo essere effettuata da personale autoriz zato dalla Varian Vacuum Technologies NOTA Quando si avvia la Turbo V 2K G per la prima volta il controller automaticamente avvia il sistema con una procedura speciale che protegge i cuscinetti da possibili danni SOFT START Il sistema viene avviato a passi successivi fino alla piena velocit in un tempo che varia da 10 minuti fino ad 1 ora Dopo che il sistema ha raggiunto la piena velocit la procedura di soft start viene disabilitata e gli avvii successivi vengono eseguiti nel modo normale NOTA Per mantenere il livello di protezione IP 54 utilizzare esclusiva mente i connettori forniti con la pompa Per il cavo di alimenta zione utilizzare solo i PN 969 9957 or 969 9956 e fissare il cavo al controller con l apposita staffetta vedere la figura se guente Utilizzare questo cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i requisiti delle norme CE ISTRUZIONI PER L USO Il sistema fornito di un LED verde pilotato da un segnale di stato II LED verde posto sul pannello frontale della Turbo V 2K G indica con la frequenza del suo lampeggio le condizioni opera tive del sistema acceso fisso la pompa in rotazione normale lampeggiante lentamente periodo di circa 400 ms il si stema in stato di rampa o di frenata o di Stop o di Wai ting for interloc
118. e during power on Blink slow Gateway operating properly Software operation and state machine From the software point of view the interface can be seen as two devices one for ProfiBus and the other for the internal link linked together TECHNICAL INFORMATION Each device has its own state machine to manage the device operation Profibus link state machine Power on PROFIBUS STATE MACHINE POWER ON Interface set up WAIT PRM WAIT CFG DATA EX Regular data exchange Wait for parameterisation from the master Wait for configuration from the master Internal link state machine Power on INTERNAL LINK STATE MACHINE POWER ON Interface set up SRC ADDR Search for the controller serial address IDENTIFY Identify controller model and protocol DATA EX Regular data exchange 87 900 968 01 C TECHNICAL INFORMATION The two machines continuously share I O data slave configuration and reads back the entire slave with the relative bus and interact each other only status in following conditions For this purpose one Input from slave to master e ProfiBus Data Exchange is suspended static and one Output from master to slave buffers are diagnosis activated if the internal serial link in provided All the needed parameters are mapped not established inside each buffer The following tables summarise the ProfiBus pa rameter access related to the corresponding win dows serial protocol for this pro
119. e el apartado J1 REMOTE I O en el ap ndice Technical Information c dar la senal de START de remoto mediante la interfaz serie RS 232 485 v ase el apartado RS 232 485 Communication Description en el apendice Technical Information RE Una vez que se conecta la alimentaci n y se activa el ensamble conector de 15 pins suministrado adjunto la Turbo V 2K G parte autom ticamente US ATENCI N El controlador se entrega ya conectado mec nica y el ctricamente a la bomba La separaci n del controlador respecto del cuerpo de la bomba puede ser efectuada nicamente por personal autorizado por Varian Vacuum Technologies NOTA Al activar la Turbo V 2K G por primera vez el controlador activa autom ticamente el sistema mediante un procedimiento especial que protege los cojinetes contra posibles da os SOFT START El sistema se activa paso a paso hasta alcanzar la plena velocidad en un lapso comprendido entre 10 minutos y 1 hora Una vez que el sistema ha alcanzado plena velocidad el procedimiento de soft start se inhabilita y las sucesivas activaciones se efect an de modo normal NOTA Para mantener el nivel de protecci n IP 54 deben utilizarse nicamente los conectores suministrados junto con la bomba Para el cable de alimentaci n utilizar s lo los PN 969 9957 o 969 9958 y fijar el cable al controlador por medio de la correspondiente abrazadera v ase la siguiente figura Utilizar el cable y el
120. e program is configured to work with the COM 1 serial port If a change is required click the right mouse button with the cursor on the Varian logo on the right hand side of the windows bar ee 10 40 Select the Setup option and the program displays the following k 2 4 MonitorrS rw File Active Client Queue Status Event Log Debug Setup Com Port 1 Rx timeout ms 500 Baud Rate bps 115200 Tx retry 3 Remove echo Save Defaults Select the COM port of the computer being used and then check whether or not all the other pa rameters are the same as those shown in the ex ample It is also very important to have the same configuration for the Remote Echo option At this point save the Setup and exit from the pro gram Exit also from the FileDownload program The program will be reconfigured the next time the computer is restarted Modifying the Parameters The operator can change the configuration of the Monitorr parameters To change the configurations select one of the Monitorrs connected to the network by positioning the cursor in the row of the Monitorr to be modified and clicking the left mouse button Then click the right mouse button select Remote Device and then Set Counters You are now prompted to enter a password the password to be entered is VARIAN The following three parameters are displayed with their respective default values 60 seconds 125 minutes
121. e pumpene n r de mottas og startes opp forste gang e Lagringstiden for en turbomolekyl r pumpe er 10 m neder fra sendedato IS FORSIKTIG Hvis lagringstiden av en hvilken som helst grunn er lenger m pumpen returneres til fabrikken Vennligst kontakt den lokale Varian forhandleren for informasjon 34 BRUKERVEILEDNING KLARGJORE TIL INSTALLASJON Turbo V 2K G leveres i en spesiell beskyttelsesemballasje Viser denne tegn p skader som kan ha oppst tt under transporten m du ta kontakt med det lokale salgskontoret N r Turbo V 2K G pakkes ut m du se til at det ikke slippes ned eller utsettes for noen form for stot P grunn av vekten 35 kg bruk de tre gyeboltene p 120 p pumpehuset for trekke pumpen ut av esken Emballasjen ma ikke kastes p en ulovlig mate Alle materialer er 100 resirkulerbare og er samsvar med EU direktiv 85 399 om miljgbeskyttelse IS FORSIKTIG For unng avgassingsproblemer m ingen del som skal utsettes for vakuum h ndteres med bare hendene Bruk alltid hansker eller andre og passende verneutstyr MERK Vanlig eksponering i miljget kan ikke skade Turbo V 2K G Vi anbefaler uansett oppbevare pumpen lukket og forseglet helt til den skal installeres i systemet Dette vil hindre at systemet forurenses esken med Turbo V 2K G finnes f lgende Pumpe med innebygd styreenhet Inngangsflens montert Denne veiledningen p CD ROM Pose med tilbeh r 15 veis
122. econditioned unit the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be in serted in the system package before shipping If a system is to be scrapped it must be disposed of in accor dance with the specific national standards 87 900 968 01 C DESCRIPTION OF THE TURBO V 2K G The Turbo V 2K G pumping system consists of a pump with a dedicated controller fixed to it The system has an ISO 250 F high vacuum flange The system model part numbers are 969 8871 with Monitorr 969 8873 with Monitorr and ProfiBus options The following figure shows the Turbo V 2K G Nitrogen Normal 400W I YES def Fail OverTemp 69 TECHNICAL INFORMATION Pump Description The pump consists of a high frequency motor driv ing a turbine fitted with 5 bladed stages and 2 Macrotorr stages The turbine rotates in an anti clockwise direction when viewed from the high vacuum flange end The turbine rotor is supported by permanently lu bricated high precision ceramic ball bearings in stalled on the forevacuum side of the pump The static blades of the stator are made of alumin ium alloy These are supported and accurately po sitioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding rotor discs These are made of alumin
123. eljes tm nyszintj nek garant l s ra a k vetkez tmutat sokat kell k vetni e szivatty k sz ll t sakor mozgat sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni h m rs klettartom ny 20 C 70 C o relativ p ratartalom O 95 nem kondenz l e A turbomolekularis szivatty kat mindig l gyan kell ind tani amikor a felhaszn l tveszi s el sz r zemelteti o Egy turbonukle ris szivatty rakt rozhat si ideje 10 h nap a sz ll t s d tum t l IS FIGYELEM Ha valamilyen okb l a rakt rozhat si id t t ll pik a szivatty t vissza kell vinni a gy rba K rem inform ci rt forduljon a helyi Varian v kuumkereskedelmi s szolg ltat si k pviselethez 46 HASZN LATI UTAS T S EL K SZ T S TELEP T SRE A Turbo V 2K G t k l nleges v d csomagol sban sz ll tj k Ha ez s r l s jeleit mutatja ami sz ll t s k zben felmer lhet forduljon a helyi szolg ltat si irod hoz A rendszer kicsomagol sakor gyeljen arra hogy ne ejtse le s ker lje annak b rmilyen hirtelen t s t vagy r zk d s t A s lya miatt 35 kg haszn lja a szivatty t rzs be 1207 ban becsavart h rom szemcsavart a szivatty nak a csomagb l val kih z s hoz Ne rtalmatlan tsa a csomagol anyagokat nem megengedett m don Az anyag teljesen jrafeldolgozhat s megfelel az EEC 85 399 es direkt v nak IS FIGYELEM G zk
124. ener el cable de alimentaci n montada SL 2 10 87 900 968 01 C INSTALACION ETEN Siempre a causa de su peso la bomba debe ser manejada utilizando medios especificos de elevaci n y desplazamiento Para ello deben utilizarse las correspondientes armellas enroscadas en los respectivos agujeros practicados en el cuerpo de la bomba misma ES ATENCI N No retirar la cubierta empernada antes de haber conectado la bomba de turbina al sistema No instalar ni o utilizar la bomba en lugares expuestos a agentes atmosf ricos lluvia hielo y nieve polvo y gases agresivos en lugares explosivos o con alto riesgo de incendio Durante el funcionamiento es necesario que se respeten las condiciones ambientales siguientes presi n m xima 2 bares por encima de la presi n atmosf rica temperatura de 5 C a 40 C v ase gr fico en el anexo Technical Information humedad relativa 0 95 no condensadora Cuando existan campos electromagn ticos la bomba ha de protegerse mediante pantallas oportunas V ase el anexo Technical Information para m s detalles El Turbo V 2K G ha de conectarse a una bomba primaria v ase diagrama en Technical Information El Turbo V 2K G puede instalarse en cualquier posici n Fijar el Turbo V 2K G en posici n estable conectando la brida de entrada de la turbobomba a una contrabrida fija que puede resistir a un par de 10600 Nm alrededor de su eje
125. enia alebo ak mko vek postupom ktor je v rozpore so pecifick mi tandardmi danej krajiny Zariadenie Turbo V 2K G predstavuje integrovan syst m s turbomolekul rnou vyvevou pre vysok a ultravysok v kuov aplik cie s relevantn m kontroln m modulom Syst m dok e vy erpa ubovo n typ plynu alebo zmesi plynov Nie je vhodn na vy erp vanie tekut n alebo pevn ch ast Vy erp vanie zabezpe uje ve mi r chla turb na max 33000 ot ok min tu poh an vysokov konn m 3 f zov m elektrick m motorom Zariadenie Turbo V 2K G neobsahuje iadne kontamina n inidl a preto sa hod pre aplik cie vy aduj ce ist v kuum Zariadenie je vybaven pomocn mi konektormi kv li mo nosti ovl dania zo vzdialen ho miesta pomocou hostite sk ho po ta a pripojen ho cez s riov komunika n linku RS232 alebo RS485 Nasleduj ce asti obsahuj v etky potrebn inform cie ktor zaru uj bezpe nos pracovn ka vpriebehu pr ce so zariaden m Podrobn inform cie sa nach dzaj v dodatku Technick inform cie N vod na pou itie obsahuje tieto tandardn ozna enia AN VAROVANIE Varovania maj s stredi pozornos pracovn ka na ur it postup alebo innos nespr vne vykonanie ktor ch m e sp sobi v ne zranenie IS UPOZORNENIE Upozornenia ozna uj postupy nedodr anie ktor ch m e sp sobi po kodenie zariadenia POZN
126. enligt anvisningarna annat fall finns risk f r sv ra personskador IS VIKTIGT Detta varningsmeddelande visas framf r procedurer som m ste f ljas exakt f r att inte risk for maskinskada skall uppst OBSERVERA Detta visar p viktig information i texten F RVARING Respektera f ljande anvisningar f r att garantera optimal pre standa och driftsakerhet f r Varian turbomolekyl ra pumpar e Vid transport flytt och lagring av pumparna ska foljande omgivningsforhallanden respekteras e Temperaturomrade 20 C till 70 C e Relativ fuktighet O till 95 utan kondens e Kunden ska alltid mjukstarta de turbomolekyl ra pumparna nar de mottas och satts i drift for forsta g ngen e De turbomolekylara pumparna kan lagras i 10 m nader fr n leveransdatumet K VIKTIGT Om lagringstiden av n gon anledning r l ngre m ste pumpen skickas tillbaka till fabriken Var god och kontakta den lokala Varian terf rs ljaren f r ytterligare information 30 BRUKSANVISNING F RBEREDELSER F R INSTALLATIONEN Turbo V 2K G levereras i ett s rskilt skyddande emballage Kontakta det lokala f rs ljningskontoret om emballaget visar tecken p skador som kan ha uppst tt under transporten Se till att Turbo V 2K G inte tappas eller uts tts f r st tar vid uppackningen P grund av dess vikt 35 kg b r du anv nda de tre 120 lyft glorna p pumphuset f r att ta upp pumpen ur f rpackningen Kasta inte packmate
127. enutzt wird sind die f r das jeweilige Gas vorgeschriebenen Vorg nge und Ma nahmen zu befolgen Die Pumpe darf niemals bei Vorhandensein von explosionsf higen Gasen verwendet werden Die Pumpe ist f r einen hohen Durchsatz an Stickstoff Argon und leichteren Gasen konzipiert Falls das Pumpen von Gasen erforderlich ist die schwerer als Argon sind ist mit dem Technischen Kundendienst von Varian R cksprache zu halten 87 900 968 01 C Benutzung der Turbo V 2K G Ingangsetzung des Systems Vor der Ingangsetzung des Systems ist zu kontrollieren dass der E A Gegenkonnektor entfernt ist Wenn das System an eine Vor richtung f r die Ferneingabe ausgabe angeschlossen ist ist zu berpr fen dass das Signal STOP aktiv ist siehe Abschnitt J1 REMOTE I O im Anhang Technical Information Zur Ingangsetzung des Systems sind die folgenden Schritte auszuf hren 1 E A Gegenkonnektor entfernen sofern vorhanden 2 Ger t an das Netz anschlie en 3 Druck in der Vakuumkammer auf 0 1 mbar bringen 4 Fur die Erteilung des Signals START an die Turbo V 2K G gibt es die folgenden M glichkeiten a Mitgelieferten E A Gegenkonnektor anschlie en b Das Signal START von der Fernsteuerung ber den E A Konnektor geben siehe Abschnitt J1 REMOTE I O im Anhang Technical Informati on c Das Signal START von der Fernsteuerung ber die serielle Schnittstelle RS 232 485 geben siehe Abschnitt RS 232 485 Communication De
128. er Inside controller Outside controller Inside controller 87 900 968 01 C PURGE VENT VALVES the pump integrates the purge and vent valves The two valves are Normally Closed so if a power fail occur the valves will remain closed 1 OnCommand 1 Remote I O Pin 10 Low gt Purge Close Pin 10 High gt Purge Open Pin 12 Low gt Vent Close Pin 12 High gt Vent Open 0 Serial def win 122 0 Vent Close def win 122 1 Vent Open win 145 0 Purge Close def win 145 1 Purge Open Fail gt Vent and Purge Closed Power Fail gt Purge and Vent Closed Stop J2 Serial This is a 9 pin D type serial input output connector to control via an RS 232 or RS 485 connection the Turbo V K G Start Command TECHNICAL INFORMATION In remote mode you can open the purge valve N C connecting pin10 of J1 to pin 9 or supplying 24 Vdc between pin 10 and pin 15 The same thing occurs for the vent valve with pin 12 Note that the vent and purge valve can also be controlled by means of the serial connection see the following diagram for details 0 Auto def Win 126 set the Vent Valve Opening Delay from 0 to 65535 1bit 0 2s def 10s 50bit Win 147 set the Vent Valve Open Time from 0 to 65535 lbit 0 2s def 0 infinite Ramp Normal AutoTun Stop Breaking If win 147 0 enn sonata O Fe s m s meg SSCS issa SSS s lem SS E RESERVED
129. essive gasser og ligeledes ikke i eksplosivt eller brandfarligt milj F lgende krav til omgivelsesforholdene g lder ved drift max tryk 2 bar over det atmosf riske tryk temperatur fra 5 C til 40 C se illustrationen i bilaget Teknisk Information relativ luftfugtighed O 95 ikke kondenserende Hvis pumpen er anbragt i n rheden af elektromagnetiske felter skal den afsk rmes Se bilaget Teknisk Information for yderligere oplysninger Turbo V 2K G skal tilsluttes en hovedpumpe se skemaet Teknisk Information Turbo V 2K G kan installeres i en hvilken som helst position Fastg r Turbo V 2K G i en stabil position ved at slutte turbopumpens indl bsflange til en fast kontraflange der t ler et moment p 10600 Nm omkring akselen Turbopumpen med ISO indgangsflange skal fastg res p vakuumkammeret ved hj lp af bolte Nedenst ende tabel angiver det n dvendige antal bolte samt Varians anbefalede tilsp ndingsmoment DREJNINGS LANGE KLEMMETYPE ANT MOMENT ISO 250 F Bolt med M10 gevind BEM ERK Turbo V 2K G pumpen kan ikke fastgores ved hjeelp af dens sokkel Pumpen kan kun monteres ved hj lp af dens ISO 250F flange Fastgorelsen skal opfylde kravene i ISO 1609 standarden Benyt st lbolte med en modstandsklasse p min 500 N mm 27 BRUGSANVISNING IS VIGTIGT Turbo V 2K G h rer til den anden installationsklasse eller o versp ndingsklasse jf normen EN 61010
130. eur sur une proc dure ou une manoeuvre sp ciale qui effectu e de facon impropre risque de provoquer de graves l sions US ATTENTION Les messages d attention apparaissent avant certaines proc dures dont le non respect pourrait endommager serieusement l appareillage NOTE Les notes contiennent des renseignements importants extrapo l s du texte STOCKAGE Pour garantir les performances et la fiabilit maximales des pompes turbomol culaires Varian il est indispensable de res pecter les instructions suivantes e Le transport la manutention et le stockage des pompes doivent imp rativement avoir lieu dans les conditions am biantes suivantes e temp rature de 20 C 70 C e humidit relative de O 95 non condensante e A la premiere utilisation les pompes turbomol culaires doivent toujours tre mises en marche en mode soft Start e Le temps de stockage d une pompe turbomol culaire est de 10 mois compter de la date d exp dition US ATTENTION En cas de d passement du temps de stockage la pompe doit tre retourn e en usine Pour tout renseignement contacter le repr sentant Varian de zone 10 MODE D EMPLOI PREPARATION POUR L INSTALLATION Le Turbo V 2K G est livr dans un emballage de protection special en cas d endommagement de l emballage pouvant s tre produit pendant le transport contacter le bureau de vente local Pendant l op ration d ouverture de l emballage ve
131. fastsp ndt p pumpehuset for at fjerne pumpen fra emballagen Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder EU direktiv 85 399 om milj beskyttelse IS VIGTIGT Komponenter der skal uds ttes for vakuum m ikke ber res med bare h nder idet der er risiko for afgasning Anvend altid handsker eller anden lignende beskyttelse BEM RK Turbo V 2K G beskadiges ikke hvis den uds ttes for omgivelsesluften Det anbefales dog at holde pumpen lukket og forseglet indtil den skal installeres i systemet Herved undg s kontamination a med Turbo V 2K G indeholder Pumpe med indbygget styreenhed Indgangsflange monteret Cd rom med denne manual Pose med tilbehor 15 benet REMOTE 1 0 kontakt IP 54 med indbyggede tilslutninger der er n dvendige i forbindelse med start af pumpen 6 9 benet SERIAL kontakt IP 54 til seriel tilslutning af pumpe 7 9 benet Network MoniTorr kontakt 8 Konsol til blokering af str mkabel monteret Vm PA 87 900 968 01 C INSTALLATION AN ADVARSEL P grund af dens veegt skal pumpen h ndteres ved hjeelp af passende l fte og transportudstyr Benyt gjeboltene der er fastspaendt i gevindhullerne p pumpehuset IS VIGTIGT Fjern f rst den fastboltede afsk rmning n r turbopumpen er blevet sluttet til systemet Install r og anvend ikke pumpen i milj er der uds ttes for p virkninger fra atmosf ren regn sne is damp aggr
132. fication of the program Select continue to go on with the installation The following screen is displayed on the personal com puter monitor Monitorr File Download Setup Select OK to conclude the installation NOTE If during installation the program finds some sys tem files that are out of date you will be prompted to restart the computer In this case proceed to re start the computer and repeat the installation pro cedure Operating Procedure Proceed as follows to correctly use the controller e Power on the system The related LED on the front panel will come on e The MoniTorr detects when the pumps maxi mum rotation speed is reached At this point the acquisition and analysis of the data deriving from the pump begins and is signalled by the flashing of the Data Acquisition LED yellow Download Software The File Download program acquires the file from the MoniTorrs connected in the network and stores them on hard disk This is automatically performed by the program when it is launched or at regular intervals depending on the parameters set Functionality As soon as it is activated file download estab lishes a connection with the MoniTorrs on the net work and updates the data that are present on the panel displayed on the personal computer monitor As soon as tt is activated it starts to scan the net work and it continuously downloads the file when it is ready 84 TECHNICAL INFORMATION Th
133. g the speed has been reduced because the gas load is higher than the Power Limit 4 Braking the pump is reducing the speed using the motor 5 Normal operation the pump is at target speed 6 Fail see error code byte Input Buffer Byte 27 90 87 900 968 01 C TECHNICAL INFORMATION OFFSET SIZE UNIT WIN BYTE BYTE RANGE DESCRIPTION SERIAL B4 Verify Line Select the auto voltage selection mismatch the real input voltage B3 Power Fail internal circuitry failure B2 Controller Over Temperature Controller Power Section Temperature or Controller CPU Section Tem perature are over the limit B1 Pump Over temperature Pump Bearing Temperature or Pump Body Temperature are over the limit BO Check Connection To Pump the connection between controller and pump missing Sccm Flow Meter Reading Specific option not available on standard models PU Start Stop Status E Low Speed Status 001 Read the Low Speed function status Out Buff byte O B6 0 off the target speed In Buff byte 8 is high speed Out Buff byte 1 1 on the target speed In Buff byte 8 is low speed Out Buff byte 3 B2 Soft Start Status 100 0 on this function is active at first pump run up and can t be deactivated by the user after first run up activate this function only if the pump has been stopped for at least3 months this procedure will take 1h B3 Vent Valve Sta
134. g status Set Point Type diag status Analog Out Type Reserved Reserved External diagnostic 22 B7 4 B3 0 23 B7 4 B3 0 INLET SCREEN INSTALLATION The inlet screen mod 969 9138 prevents the blades of the pump from being damaged by debris greater than 5 2 mm diameter The inlet screen however does reduce the pump ing speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure It is welded to the center ring of the ISO 250 F vi ton gasket The screen can be removed as shown in the fol lowing figure 93 TECHNICAL INFORMATION The following figure shows the ISO 250 F pump flange section with the protection screen fitted on it As you can see the overall dimensions do not change as the inlet screen remains inside the pump profile IS CAUTION If the chamber of the system is baked at a high temperature a shield should be installed to pre vent thermal radiation heating the high vacuum flange on the pump The maximum temperature allowed for the inlet flange is 80 C WATER COOLING CONNECTION The pumping system is supplied with a metallic model water cooling kit 87 900 968 01 C Two 9 10 mm internal diameter rubber or plastic tubes from the water supply must be fitted to the two dedicated nozzles NOTE These tubes must be held on the respective noz zles using hose clips to avoid that the tube s gets loose or di
135. g turbopumpen eller dens tilbeh r i forbindelse med opvarmningsprocedurerne Den h je temperatur kan resultere i skade p personer IS VIGTIGT Undg sammenst d vibrationer eller bratte bev gelser i forbindelse med brug af turbopumpen Der er risiko for beskadigelse af lejerne Pumpen skal forsynes med luft eller delgasser der ikke indeholder st v eller faste partikler Indgangstrykket ved den specielle d r skal v re mindre end 1 bar over atmosf risk tryk I forbindelse med pumpning af aggressive gasser er disse pumper udstyret med en d r igennem hvilken det er n dvendigt at forsyne pumpen med delgasser kv lstof eller argon for at beskytte lejerne se bilaget Teknisk Information AN ADVARSEL N r pumpen anvendes til toksiske brandfarlige eller radioaktive gasser fglges fremgangsm den for den enkelte gastype Anvend ikke pumpen til eksplosive gasser Pumpen er projekteret til at sikre en hoj pumpekapacitet for kvaelstof argon og lettere gasarter Kontakt Varians tekniske servicecenter vedrgrende yderligere oplysninger hvis det er nodvendigt at pumpe gasarter som er tungere end argon 87 900 968 01 C Brug af Turbo V 2K G Start af systemet Kontroller at I O kontakten er blevet fjernet inden start af systemet Kontroller at stopsignalet er aktiveret hvis systemet er tilsluttet en fjernstyret I O anordning se afsnittet J1 REMOTE I O i bilaget Technical Information G r f lgende for
136. h if not fol lowed correctly could lead to serious injury IS CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment NOTE The notes contain important information taken from the text STORAGE In order to guarantee the maximum level of performance and reliability of Varian Turbomolecular pumps the following guide lines must be followed e when shipping moving and storing pumps the following environmental specifications should not be exceeded e temperature range 20 C to 70 C o relative humidity range 0 to 95 non condensing o the turbomolecular pumps must be always soft started when received and operated for the first time by the cus tomer o the shelf life of a turbomolecular pump is 10 months from the shipping date IS CAUTION If for any reason the shelf life time is exceeded the pump has to be returned to the factory Please contact the local Varian Vacuum Sales and Service representative for informations 66 INSTRUCTIONS FOR USE PREPARATION FOR INSTALLATION The Turbo V 2K G is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Cause its weight 35 kg use the three eyebolts screwed at 120 on the pump body to extract the p
137. h genommen werden der ein general berholtes System als Ersatz f r das defekte System zur Verf gung stellt HINWEIS Bevor Fa Varian ein System zur Reparatur oder den Um tauschdienst eingesandt wird ist das Formular Sicherheit und Gesundheit das diesem Handbuch beiliegt ausgef llt an die rtliche Verkaufsstelle zu senden Eine Kopie ist der Verpa ckung des Systems vor dem Versand beizulegen Eine eventuelle Verschrottung hat unter Beachtung der ein schl gigen nationalen Vorschriften zu erfolgen 87 900 968 01 C MODE D EMPLOI Normes de s curit pour Pompe Turbomoleculaires Les pompes Turbomoleculaires decrites dans le Manuel dlnstructions suivant ont une energie cinetique lev e due a la grande vitesse de rotation associ e a la masse sp cifigue de leurs rotors En cas de panne du systeme par exemple a cause un contact entre rotor et stator ou d une rupture du rotor nergie de rotation pourrait tre lib r e AN DANGER Pour viter tout deg t aux appareillages et emp cher toute blessure aux op rateurs il faut suivre attentivement les instructions installation de crites dans ce manuel 9 87 900 968 01 C INDICATIONS GENERALES Cet appareillage a t concu en vue dune utilisation profes sionnelle Avant toute utilisation de l appareil il est conseill a l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie p
138. homi system nale y wykona nast puj ce czynno ci 5 zdj je li jest obecny konektor I O 6 pod czy zasilanie sieci 7 doprowadzi ci nienie wewn trz komory pr niowej na warto 0 1 mbar 8 dostraczy do Turbo V 2K G sygna STARTU w jeden z nast puj cych sposob w a pod czy konektor I O na wyposa eniu b poda sygna START zdalnie poprzez konektor I O patrz paragraf J1 ZDALNE I O w dodatku Informacje Techniczne c poda sygna START zdalnie poprzez interfejs szeregowy RS 232 485 patrz paragraf RS 232 485 Opis Komunikacji w dodatku Informacje Techniczne AN NIEBEZPIECZENSTWO Kiedy zostanie dostarczone zasilanie i konektor 15 taczy na wyposazeniu jest pod aczony Turbo V 2K G uruchomi sie automatycznie ZS UWAGA Sterownik kontroler jest dostarczony ju po czony mechanicznie i elektrycznie do pompy Odseparowanie kontrolera od korpusu pompy mo e by tylko wykonane przez personel upowa niony przez firme Varian Vacuum Technologies INFORMACJA Kiedy uruchamia si Turbo V 2K G po raz pierwszy kontroler automatycznie uruchamia system ze specjaln procedur kt ra chroni o yska przed mo liwym ich uszkodzeniem SOFT START System zostanie uruchomiony kolejnymi fazami a do uzyskania pe nej pr dko ci w przeci gu odpowiedniego czasu kt ry waha si od 10 minut do 1 godziny Po osi gni ciu pe nej pr dko ci przez system procedura soft start zos
139. hoz csak a szivatty hoz mell kelt csatlakoz kat szabad haszn lni Haszn ljon PN 969 9957 vagy 969 9958 csatlakoz t t pk belhez s r gz tse a vez rl h z alkalmas tart bilincs seg ts g vel l sd k vetkez bra Ezt a k belt s csatlakoz dug t megfelel en f ldelt csatlakoz aljazattal haszn lja hogy elker lje az ram t s vesz ly t s eleget tegyen az EK normat v iban lefektetett biztons gi k vetelm nyeknek 48 HASZN LATI UTAS T S A rendszer el van l tve egy z lt llapotled jellel A Turbo V 2K G n elhelyezett z ld LED a villog s nak gyakoris g val jelzi a rendszer zemi k r lmenyeit nem villog sn l a szivatty rendesen forog o lassan villog kb 400 ms peri dus a rendszer emelked ben fekezesben ll s vagy kapcsolatra var llapotban van o gyorsan villog kb 200 ms peri dus hibafeltetel A rendszer le llit sa A szivatty le ll t s hoz a k vetkez m dszerek egyik t haszn lhatja 1 a mell kelt B K csatlakoz kih z sa 2 t voli stop jel ad sa a B K csatlakoz n kereszt l l sd M szaki inform ci f ggel k J1 TAVOLI BK bekezd se 3 t voli stop jel ad sa az RS 232 485 soros interf szen kereszt l l sd M szaki inform ci f ggel k RS 232 485 kommunik ci le r sa V szle ll t s A Turbo V 2K G v szhelyzetben val azonnali le ll t s hoz le kell kapcsolni a t pfesz lts get KAR
140. ian kanssa jotta s hk iskuilta v ltyt n ja CE normien vaatimukset t yttyv t 40 K YTT OHJEET J rjestelm on varustettu vihre ll LED valolla jota ohjataan tilasignaalilla Vihre LED LD1 joka sijaitsee TURBO V 2K G n perustan paneelissa osoittaa vilkkumistiheydell n j rjestelm n toimintaolosuhteet palaa jatkuvasti pumppu py rii normaalisti vilkkuu hitaasti noin 400 ms n jakso systeemi on kiihdytys jarrutus pys ytys tai Waiting for interlock tilassa vilkkuu nopeasti noin 200 ms n jakso virhetila Turbo V 2K G pumpun pys ytys Pys yt pumppu yhdell seuraavista tavoista 1 Poista ohessa toimitettu I O liitin 2 Anna STOP et signaali I O liittimella ks Technical Information liitteen kappale J1 REMOTE I O 3 Anna STOP et signaali RS232 485 sarjaliit nn n kautta ks Technical Information liitteen kappale RS232 485 Communication Description H t pys ytys Turbo V 2K G on pys ytett v h t tilassa irrottamalla s hk kaapeli ohjausyksik st HUOLTO Turbo V 2K G ei vaadi lainkaan huoltoa Mahdolliset toimenpiteet tulee j tt valtuutetun henkil n teht v ksi AN VAARA Ennen mink n tyyppist toimenpidett j rjestelm ss kytkek se irti s hk verkosta p st k pumppuun ilmaa avaamalla siihen tarkoitettu venttiili ja odottakaa roottorin t ydellist pys htymist Antakaa t m n j lkeen pum
141. ie als optie verkrijgbaar zijn GEBRUIK In deze paragraaf worden de belangrijkste gebruiksprocedures vermeld Breng alle elektrische en pneumatische aansluitingen tot stand alvorens het systeem te gebruiken Tijdens de eventuele verwarming van de vacu mkamer mag de temperatuur op de inlaatflens niet meer dan 80 C bedragen Tijdens de werking van de pomp mag de temperatuur van de rotor nooit 120 C overschrijden De gebruiker moet controleren of de correcte bedrijfswijze is ingesteld afhankelijk van het te pompen gas 1 voor stikstof en lichtere gassen 0 voor Argon default Voor meer details wordt verwezen naar de bijlage Technical Information AN GEVAAR Laat de pomp nooit draaien als de inlaatflens niet op de vacu mkamer is aangesloten of als de afsluitflens niet gesloten is Raak de turbopomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken IS ATTENTIE Vermijd schokken trillingen of bruuske verplaatsingen van de turbopomp wanneer deze in werking is De lagers kunnen an ders beschadigd raken Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 1 bar boven de atmosferische druk bedragen Deze pompen zijn voor het pompen van agressieve gassen van een speciale poort voorzien waardoor de pomp een stroom inert gas stikstof of argon ter bescherming van
142. iller tout par ticulierement ne pas laisser tomber le Turbo V 2K G et ne lui faire subir aucun choc et aucune vibration Compte tenu de son poids 35 kg il est n cessaire d utiliser les trois anneaux de levage 120 viss sur le corps de la pompe pour l extraire de son emballage Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et conforme la directive CEE 85 399 en mati re de protection de l environnement US ATTENTION Afin d viter tout probl me de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e NOTE La Turbo V 2K G ne peut tre endommag e par une exposition environnementale normale Toutefois il est conseill de main tenir la pompe ferm e et scell e jusqu son installation dans le systeme Ceci afin de pr venir toute contamination du systeme La pompe Turbo V 2K G comprend Pompe avec contr leur int gr Protection d entr e mont e CD Rom contenant cette notice d utilisation Sachet d accessoires Connecteur 15 voies E S DISTANCE IP 54 avec toutes les connexions n cessaires la mise en marche de la pompe 6 Connecteur 9 voies SERIE IP 54 utiliser pour la connexion s rielle Connecteur 9 voies Network MoniTorr Bride de retenue du c ble d alimentation mont e DE EN 87 900 968 01 C INSTALLATION
143. in contraconnector IP 54 voor SERIAL connector die voor de seri le verbinding wordt gebruikt 7 9 pin contraconnector voor Network MoniTorr 8 opsluitbeugel voor het vasthouden van de voedingskabel gemonteerd 87 900 968 01 C INSTALLATIE AN GEVAAR De pomp moet in verband met zijn gewicht met speciale hef en transportwerktuigen worden gehanteerd Gebruik hiervoor de speciale oogbouten die zijn vastgeschroefd in de gaten in het pomplichaam IS ATTENTIE Verwijder niet de opgeboute afdekking voordat de turbopomp met het systeem wordt verbonden De pomp mag niet geinstalleerd en of gebruikt worden in ruimten die blootgesteld ziin aan de weersomstandigheden regen vorst sneeuw stof agressieve gassen of in ruimten met explosiegevaar of zeer groot brandgevaar Tijdens de werking moeten de volgende omgevingscondities aanwezig zijn max druk 2 bar boven de atmosferische druk temperatuur van 5 C tot 40 C zie grafiek in de bijlage Technical Information relatieve vochtigheid O 95 niet condenserend In aanwezigheid van magnetische velden moet de pomp op passende wijze afgeschermd worden Zie de bijlage Technical Information voor meer informatie De Turbo V 2K G moet op een primaire pomp aangesloten zijn zie schema in Technical information De Turbo V 2K G kan in alle standen worden ge nstalleerd Bevestig de Turbo V 2K G in een stabiele positie en verbind de inlaatflens
144. irekt va szerint Csatlakoztassa az eszk zt a fenti kateg ri nak megfelel h l zathoz A Turbo V 2K G nek olyan bemeneti kimeneti s soros kommunik ci s csatl z sai vannak amelyeket gy kell k ls aramk r kh z csatlakoztatni hogy elektromos r szek ne legyenek hozz f rhet k Haszn lja a mell kelt csatlakoz kat az IP 54 v delmi fokozat fenntart s hoz Gy z dj n meg r la hogy a Turbo V 2K G hez csatlakoztatott eszk z megfelel egyes hiba eset n is az RN 61010 1 direkt va szerint Opcion lis tartoz kok telep t s hez v lassza a M szaki inform ci t HASZN LAT Ez a bekezd s r szletezi az alapvet zemeltet si elj r sokat V gezze el az sszes elektromos s pneumatikus csatlakoztat st a rendszer haszn lata el tt A v kuumkamra meleg t se k zben a bemeneti h m rs klete nem haladhatja meg a 80 C ot A szivatty m k dtet sekor a rotor h m rs klete soha nem haladhatja meg a 120 C t A felhaszn l nak gyelnie kell hogy a szivatty zott g z szerint be ll tsa a helyes g zm dot 1 az N s k nnyebb gazokhoz O az argonhoz alap rtelmez s R szletek rt l sd M szaki inform ci szelep MSL soha ne haszn lja a turb szivatty t amikor a bemeneti karima nincs csatlakoztatva a v kuumkamr hoz vagy nincs kiiktatva Ne rintse meg a turb szivatty t vagy annak tartoz kait a meleg t si folyamat k zben Magas h m rs klet g st oko
145. its flashing freguency the system operating condi tions e with no flashing the pump is normally rotating e slowly flashing period of about 400 ms the system is in ramp or in braking or in Stop or in Waiting for interlock status e fast flashing period of about 200 ms error condition How to stop the system To stop the pump you can use one of the following methods 7 unplugging the provided mating I O connector 8 giving a remote stop signal through the I O connector see para J1 REMOTE I O of annex Technical Information 9 giving a remote stop signal via the serial RS 232 485 inter face see para RS232 RS 485 Communication Descrip tion of annex Technical Information Emergency Stop To immediately stop the Turbo V 2K G in an emergency condi tion it is necessary to remove the mains MAINTENANCE The Turbo V 2K G does not require any maintenance Any work performed on the system must be carried out by authorized personnel TRIER Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate electro valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Varian service center who can supply a reconditioned system to replace that broken down NOTE Before returning the system to the constructor for repairs or replacement with a r
146. iu leggeri Nel caso in cui ci fosse la necessita di pompare gas piu pesanti del Argon si prega di prendere contatti con Assistenza Tecni ca della Varian per informazioni 87 900 968 01 C Uso della Turbo V 2K G Come avviare il sistema Prima del avvio del sistema controllare che il controconnettore I O sia rimosso Se il sistema collegato ad un dispositivo di Inpu Output remoto assicurarsi che il segnale di STOP sia attivo vedere il paragrafo J1 REMOTE I O nell appendice Technical Information Per avviare il sistema eseguire i seguenti passi 1 rimuovere se presente il controconnettore I O 2 collegare alimentazione di rete 3 portare la pressione allO interno della camera a vuoto a 0 1 mbar 4 fornire alla Turbo V 2K G il segnale di START in uno dei seguenti modi a collegare il controconnettore I O in dotazione b dare il segnale di START da remoto tramite il connettore I O vedere il paragrafo J1 REMOTE I O nell appendice Technical Infor mation c dare il segnale di START da remoto tramite l inter faccia seriale RS 232 485 vedere il paragrafo RS 232 485 Communication Description nell appendi ce Technical Information N PERICOLO Quando viene fornita alimentazione ed il controconnettore a 15 pin in dotazione inserito la Turbo V 2K G si avvia automa ticamente IS ATTENZIONE Il controller viene fornito gi connesso meccanicamente ed elettricamente alla pompa La separazion
147. ium alloy During normal operation the motor is fed with a voltage of 54 Vac between phases three phase at 555 Hz To avoid rotor overheating an auto matic power management routine is implemented in the control unit microprocessor The user can select through serial line the gas load type be tween Argon and Nitrogen or lighter gases with window 157 O Argon and default 1 Nitrogen When Nitrogen is selected the power limit is fixed at 400 W for Argon selection the user must set the maximum foreseen water cooling temperature Twater max by the window 158 After these set tings the controller will operate as shown in the fol lowing diagram O Argon def 0 NO NO Tb gt 60 C Normal 220W 1 YES def Fail OverTemp Normal 220 W Normal with Pmax derived from the Figure I 87 900 968 01 C where e Tb upper bearing temperature e body measured water cooling related tem perature e Tbody lim body temperature corresponding to Twater max according to Figure 2 e WIN 118 set the body temperature control Power W 390 Power Limit Applied 20 Tbodylim C 38 Figure 1 Twater max Figure 2 A thermistor sensor is mounted near the upper bearing in order to read the bearing temperature and to prevent the pump from overheating A thermistor sensor is mounted near the water cooling channel in order to evaluate the cooling efficiency The pump can be water cooled o
148. ivon si probl m k elker l s re ne haszn ljon puszta kezeket v kuumnak kitett komponensek kezel s re Mindig haszn ljon keszty t vagy m s alkalmas v delmet MEGJEGYZ S A k rnyezetnek val szok sos kitetts g nem k ros thatja a Torbo V 2K G t M gis aj nlatos azt z rva s t m tve tartani am g nem telep tik a rendszerbe Ez megakad lyozza a rendszer szennyez d s t A Turbo V 2K G csomag a k vetkez ket tartalmazza szivatty be p tett vez rl vel bemeneti sz r felszerelve a k zik nyv CD ROM on tartoz kok zacsk IP 54 15 t s csatlakoz T VOLI B K sz m ra a szivatty ind t s hoz sz ks ges sszes vezet kkel IP 54 9 t s csatlakoz soros csatlakoz shoz haszn land SOROS csatlakoz hoz 7 9 t s csatlakoz H l zati MoniTorr hoz 8 Tart bilincs a t pk bel szerelt megtart s hoz Che ON 9 87 900 968 01 C TELEPITES AN IGY ZAT S lya miatt a szivatty t alkalmas mozgat s kezel eszk z kkel kell kezelni Haszn lja az alkalmas kezel k szletb l val a szivatty t rzs ben l v lyukakba csavart szemcsavarokat IS FIGYELEM Ne t vol tsa el a csavarozott kupakot a turb szivatty nak a rendszerhez val csatlakoztat sa el tt Ne telep tse valamint ne haszn lja a szivatty t atmoszf rikus k zegeknek kitett k rnyezetben es h j g porban agressz v g zokban illetve robban vagy t zvesz lyes k rnyezetben
149. k lampeggiante velocemente periodo di circa 200 ms con dizione di errore Come arrestare la Turbo V 2K G Per arrestare la pompa si pu usare uno dei seguenti metodi 1 togliendo il controconnettore di I O in dotazione 2 inviando un segnale di STOP da remoto tramite il connet tore I O vedere il paragrafo J1 REMOTE I O nell ap pendice Technical Information 3 inviando un segnale di STOP da remoto tramite l interfac cia seriale RS 232 485 vedere il paragrafo RS 232 485 Communication Description nell appendice Technical In formation Arresto di Emergenza Per arrestare immediatamente in condizioni di emergenza la Turbo V 2K G occorre staccare il cavo di alimentazione dall a limentazione MANUTENZIONE La Turbo V 2K G non richiede alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato N PERICOLO Prima di effettuare qualsiasi intervento sul sistema scollegarlo dall alimentazione mandare al aria la pompa aprendo apposi ta elettrovalvola attendere fino al completo arresto del rotore ed attendere che la temperatura superficiale della pompa sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazio ne Varian o del Varian advanced exchange service che per mette di ottenere un sistema rigenerato in sostituzione di quello guasto NOTA Prima di rispedire al costruttore un sistema per riparazioni o advanced exchange service
150. kov vstupy a v stupy s ve ker m propojen m nezbytn m pro spu t n erpadla 6 9 kolikovy konektor IP 54 pro p ipojen ke konektoru SERIAL kter se pou ije k s riov mu p ipojen 7 9 kolikovy konektor pro p ipojen za zen Network Moni Torr 8 P chytka pro uchycen nap jec ho kabelu namontov na OP ON 87 900 968 01 C INSTALACE AN VYSTRAHA Kv li sv hmotnosti je tfeba pfi manipulaci s vyv amp vou pouz vat odpovidajici n stroje a n fadi Pou vejte pr slu n rouby s okem na roubovan do otvor v t lese v v vy US VAROV N P ed p ipojen m turbomolekularni v v vy do syst mu nesund vejte roubovac v ko Vyv vu neinstalujte v prost ed kter je vystaveno atmosf rick m vliv m d sn h led prachu agresivn m plyn m ve v bu n m prostfedi nebo v prostfedi s vysok m nebezpe m po ru Za provozu je tfeba dodr ovat n sledujici podm nky dan prost ed m maxim ln tlak 2 bary nad atmosf rick m tlakem teplota vzduchu od 5 C do 40 C relativn vlhkost 0 95 bez sr en V p tomnosti magnetick ch pol se v v va mus chr nit feromagnetick m st n n m Viz podrobn informace v p loze Technick informace V v va Turbo V 2K G se mus p ipojit k prim rn mu erpadlu viz Technick informace Vyv vu Turbo V 2K G Ize instalovat v libovoln poloze Vyv vu Turbo
151. kuumkammer darf die Temperatur am Eingangsflansch 80 C nicht berschreiten W hrend des Pumpenbetriebs darf die Temperatur des L ufers niemals 120 C berschreiten Der Bediener hat sich zu vergewissern dass die richtige Be triebsart in Abh ngigkeit von dem zu pumpenden Gas einge stellt ist 1 f r Stickstoff und leichtere Gase 0 f r Argon vor eingestellte Betriebsart F r ausf hrliche Informationen siehe im Anhang Technical Information EEE Die Pumpe darf nicht in Betrieb genommen werden wenn der Eingangsflansch nicht an die Vakuumkammer angeschlossen oder nicht mit dem Verschlu flansch verschlossen ist W hrend des Aufheizens d rfen weder die Pumpe noch even tuelle hei e Zubeh rteile ber hrt werden Es besteht Verbren nungsgefahr IS ACHTUNG W hrend des Betriebs sind Sto und Vibrationseinwirkungen sowie Ruckbewegungen an der Turbopumpe zu vermeiden da die Lager besch digt werden k nnten F r die Bel ftung der Pumpe trockene staub und partikelfreie Luft oder Inertgase verwenden Der Eingangsdruck am Bel f tungsanschlu soll unter 1 bar ber dem atmosph rischen Druck betragen Zum Pumpen von aggressiven Gasen sind die Pumpen mit einer ffnungsklappe ausgestattet ber die zum Schutz der Lager Inertgas Stickstoff oder Argon zuzuleiten ist siehe Anhang Technical Information EEE Wenn die Pumpe zur F rderung von giftigen leicht entflamm baren oder radioaktiven Gasen b
152. le 14 Select menu File Archive Time and select the number of days for a periodical file download to be sent for example 7 days 15 Read the Archive Saving Method Procedure Paragraph 16 Start the system NOTE The computer must be always connected to the MoniTorr Please be sure that the PC hasnt automatically Standby or Suspend procedure ac tive 87 900 968 01 C Interconnections The following figure shows the Monitorrs intercon nections Network Connector RS 485 r 5 K 7 ZA Ju 3 A k ab A N SJ O CY E CIONIA ADIA M A a lt 5 SIGNAL GROUND gt AGE i CONNECTOR SE a O B O 57 7 NT 8 B N NG oh 9 N A N 7 Network connector RS 485 In order to have the IP 54 environment protection use the appropriate connector provided To wire the MoniTorr network please connect all the A terminal toghether and the same for B and Gnd terminals Transmission Channel Characteristics Type RS 485 2 wire gnd optional half duplex levels RS 485 baud rate 115200 57600 38400 19200 9600 4800 2400 1200 300 1 10 programmable character length 8 bits parity none stop bit 1 bit protocol master PC slave MoniTorr Installing the File Download Software The MoniTorr connectivity kit comes with the soft ware needed to transfer via RS 485 all the data stored To install the software simply insert disk ette No 1 into the personal computer
153. led SPEED SETTING Optocoupled FAULT COMMOMN OUT Relay 7 SOFT START Optocoupled OUT Relay OUT Transformer i Optocoupled This connector carries all the input and output sig S DET Relay nals to remote control the Turbo V 2K G 12 VENT Optocoupled 13 FAULT N O OUT Relay It is a 15 pins D type connector the available sig 14 ANALOG OUTPUT OUT RE nals are detailed in the table the following para graphs describe the signal characteristics and use 15 GROUND OUT Transformer 73 87 900 968 01 C Signals description START STOP input signal to start or stop the pump With the supplied cover connector the START STOP signal is connected to the 24 Vdc pin and the SIART STOP signal to the GROUND pin in this condition the pump auto matically starts as soon as the controller recog nises the input supply Plug amp Pump INTERLOCK input signal to confirm the pump ro tation With the supplied cover connector the INTERLOCK signal is connected to the 24 Vdc pin and the INTERLOCK signal to the GROUND pin in this condition the pump auto matically starts as soon as the controller recog nises the input supply Plug amp Pump SPEED SETTING PWM input signal to set the pump speed The PWM signal characteristics must be the following e frequency 100 Hz 20 e amplitude high level from 12 to 24 V e duty cycle range from 25 to 75 corresponding to a pump speed from 475 Hz t
154. lekul ris szivatty val nagy s rendk v l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A rendszer sokfajta t pus g zt vagy g zkever ket k pes szivatty zni Nem alkalmas folyad kok vagy szil rd r szecsk k szivatty z s ra A szivatty z si m veletet egy nagyteljes tm ny 3 f zis elektromos motorral hajtott nagysebess g turbina max 33000 fordulat perc biztos tja A Turbo V 2K G szivatty szennyez anyagokt l mentes s ez rt alkalmas tiszta v kuumot ig nyl alkalmaz sokra Fel van szerelve seg dcsatlakoz kkal amelyeket t voli helyr l kell ir ny tani soros vonalon RS232 vagy RS485 kereszt l csatlakoztatott gazdag p seg ts g vel A k vetkez bekezd sek a berendez st haszn l kezel biztons g nak garant l s hoz sz ks ges sszes inform ci t tartalmazz k R szletes inform ci t tal l a M szaki inform ci f ggel kben Ez a k zik nyv a k vetkez szabv nyos protokollt haszn lja MSL A figyelmeztet zenetek felh vj k a kezel figyelm t egy konkr t elj r sra vagy gyakorlatra amit ha nem k vetnek megfelel en s lyos s r l shez vezethet IS FIGYELEM A Figyelem zenetek olyan elj r sok el tt jelennek meg amelyeket ha nem k vetnek a berendez s k rosod s t okozhatj k MEGJEGYZ S A megjegyz sek a sz vegb l vett fontos inform ci t tartalmaznak T ROL S A Varian Turbomolecular szivatty k maxim lis t
155. let art nr 969 9957 eller 969 9958 og fastg r str mkablet til styreenheden ved hj lp af den respektive konsol se nedenst ende figur Benyt dette kabel og stik sammen med en stikkontakt som p passende m de er forbundet til jorden for at undg elektriske st d og opfylde kravene if lge CE EF normerne 28 BRUGSANVISNING Systemet er udstyret med en gr n LED som overv ges af et signal for tilstand Den gr nne LED LD1 der er anbragt p panelet p TURBO V 2K G s fundament angiver systemets funktion ved blink A konstant t ndt pumpen er i normal rotation langsomme blink periode p ca 400 ms systemet er i stilling for acceleration bremsing stop eller Waiting for interlock hurtige blink periode p ca 200 ms fejl Afbrydelse af Turbo V 2K G Benyt en af f lgende metoder for at afbryde pumpen Fjern den medleverede I O kontakt 2 Overf r et fjernstyret stopsignal ved hj lp af I O kontakten se afsnittet JI REMOTE I O i bilaget Technical Information 3 Overf r et fjernstyret stopsignal ved hj lp af den serielle gr nseflade RS232 485 se afsnit RS232 485 Communication Description i bilaget Technical Information N dstop Afbrydelse af Turbo V 2K G i n dsituationer sker ved at koble ledningen fra styreenheden VEDLIGEHOLDELSE Turbo V 2K G beh ver ikke nogen vedligeholdelse Ethvert indgreb skal foretages af autoriseret personale AN ADVARSEL Inden der foret
156. lettati pra ticati sul corpo pompa IS ATTENZIONE Non rimuovere la copertura imbullonata prima del collegamento della turbopompa al sistema Non installare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento e necessario che siano rispettate le seguenti condizioni ambientali pressione massima 2 bar oltre la pressione atmosferica temperatura dell aria da 5 C a 40 C umidit relativa O 9596 non condensante In presenza di campi elettromagnetici la pompa deve essere protetta tramite opportuni schermi Vedere l appendice Techni cal Information per ulteriori dettagli La Turbo V 2K G deve essere collegata ad una pompa primaria vedere schema in Technical Information La Turbo V 2K G pu essere installata in qualsiasi posizione Fissare la Turbo V 2K G in posizione stabile collegando la flangia di ingresso della turbopompa ad una controflangia fissa capace di resistere ad una coppia di 10600 Nm attorno al pro prio asse La turbopompa con flangia di ingresso ISO deve essere fissata alla camera da vuoto per mezzo di bulloni La seguente tabella descrive il numero di bulloni necessari e con quale coppia di serraggio consigliata da Varian stringerli TIPO DI COPPIA DI PE FISSAGGIO ne SERRAGGIO ISO 250 F Bullone con filettatura M10 NOTA La Turbo V 2K G no
157. li maksimalni u inek in zanesljivost rpalk Varian Turbomolecular se morate dr ati naslednjih vodil o Pri poSiljanju premikanju in shranjevanju Crpalk ne smete prese i naslednjih specifikacij e temperaturno obmo je 20 C do 70 C e obmocje relativne vla nosti O do 95 kondenza e Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko e ivljenjska doba turbomolekularne rpalke je 10 mesecev od datum posiljanja brez IR POZOR Ce zaradi kakr nega koli razloga prese ete Zivljenjsko dobo je treba rpalko vrniti v tovarno Za dodatne informacije kontaktirajte lokalnega predstavnika prodaje in storitev za Varian Vacuum 62 NAVODILA ZA UPORABO PRIPRAVA ZA MONTA O Naprava Turbo V 2K G je dobavljena v posebni zascitni emba la i Ce je embala a po kodovana kontaktirajte lokalno proda jno pisarno Pri odpiranju sistema pazite da vam ne pade iz rok oz ga ne stresajte Zaradi te e 35 kg uporabite tri vijake ki jih postavite 120 na ohi je rpalke da jo izvle ete iz embala e Embala o zavrzite v skladu s pravili Material je mo no v celoti reciklirati in je v skladu z ECC direktivo 85 399 ES POZOR Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami saj boste tako prepre ili probleme pu anja Zmeraj uporabite rokavice ali drugo primerno za ito OPOMBA Normalna izpostavijenost na okolje ne more po kodovati Turbo V 2K G naprave Vendarle je
158. lik n v veva se ot norm ln e pomal blik n interval cca 400 ms syst m se pozvolna rozb h nebo brzd nebo stoj nebo je ve stavu ek n na blokovani e rychl blik n interval cca 200 ms poruchov stav Jak se zarizeni zastavuje V v vu m ete zastavit nekterym z n sledujicich zp sob 1 odpojte dodan odpovidajici I O konektor 2 prive te do konektoru I O zastavovaci signal ze vzd len ho mista viz odstavec J1 REMOTE I O v priloze Technick informace 3 pfivedte zastavovaci signal ze vzd len ho mista prost ednictv m s riov ho rozhran RS 232 485 viz odstavec Popis komunikace RS232 RS 485 v priloze Technick informace Nouzov zastaven Chcete li vyv vu Turbo V 2K G vnouzov situaci okam it zastavit je treba prerusit s ov nap jen DR BA Zafizeni Turbo V 2K G nevy aduje dnou dr bu Ve ker pr ce na tomto zar zen mus prov d t opr vn n osoby AN VYSTRAHA Ne za nete prov d t jak koli pr ce na tomto za izeni odpojte jej od s t odvzdu n te v v vu otev en m p slu n ho ventilu po kejte a se rotor p estane ot et a po kejte dokud povrchov teplota v v vy neklesne pod 50 C V p pad poruchy kontaktujte m stn servisn st edisko firmy Varian kter m e dodat n hradn repasovan za zen v m nou za porouchan POZN MKA P ed odesl n m v v vy v robci n
159. lk mnozstvi kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V pripade syst mov nefuk nosti napr kontaktu rotoru anebo statoru nebo pri zhroucen rotoru m e doj t k uvoln ni rota n energie A V STRAHA Pokyny k instalaci uveden v tomto n vodu mus b t prisne dodr ov ny za elem prevence zran n obsluhy 53 87 900 968 01 C VSEOBECNE INFORMACE Toto zafizeni je ur eno pro odborn ky UZivatel by si m l pred pou it m zafizeni precist tento n vod a v echny dal informace dodan firmou Varian Firma Varian neodpov d za jak koli nehody kter vzniknou n sledkem i ste n ho nedodr en t chto pokyn nespr vn m pou v n m neznal mi osobami neopr vn n m z sahem do zafizeni nebo jakoukoli innost kter je v rozporu s pokyny uveden mi v p slu n ch st tn ch norm ch Vyv va Turbo V 2K G je integrovan syst m s turbomolekul rn vyv vou a p slu n m regulatorem pro takov aplikace kde se po aduje vysok a velmi vysok vakuum Zafizeni m e od erp va libovoln plyn nebo plynnou sm s Nen vhodne na erp n tekutin nebo pevn ch stic erp n zaji uje velmi rychl turb na max 33000 ot min poh n n vysoce v konn m trojf zov m elektromotorem Zafizeni Turbo V2K G neobsahuje dn kontaminuj c l tky a proto se hod pro aplikace vyZadujici ist vakuum Je vybave
160. met er koplet til en fjernstyrt I O anordning forsikre deg om at stoppsignalet er aktivert se avsnittet J1 REMOTE I O i vedlegget Technical Information G frem p f lgende m te for starte systemet 1 Fjern I O kontakten hvis finnes 2 Kople til str mmen 3 Far trykket i vakuumkammeret til 0 1 mbar 4 Gi et startsignal til Turbo V 2K G p en av f lgende m ter a Kople til I O kontakten som f lger med b Gi et fjernstyrt startsignal med I O kontakten se avsnittet J1 REMOTE I O i vedlegget Technical Information c Gi et fjernstyrt startsignal med seriegrensesnittet RS232 485 se avsnittet RS232 485 Communication Description i vedlegget Technical Information AN ADVARSEL Turbo V 2K G starter automatisk n r str mmen er tilkoplet og 15 veis kontakten som f lger med er satt inn IS FORSIKTIG Ved levering er styreenheten koplet mekanisk og elektrisk til pumpen Demontering av styreenheten fra pumpehuset m kun utf res av autorisert personale fra Varian Vacuum Technologies MERK N r Turbo V 2K G starter opp f rste gang starter styreenheten automatisk systemet med en spesialprosedyre som beskytter lagrene mot mulige skader SOFT START Systemet kj res trinnvis til full hastighet innen en tidsperiode som varierer fra 10 minutter til 1 time Etter at systemet har n dd full hastighet deaktiveres soft start prosedyren og de neste gangene systemet startes opp gj res det p normal m
161. munication Description in de bijlage Technical Information AN GEVAAR Wanneer de voeding wordt geleverd en de bijgeleverde 15 pin connector is ingebracht start de Turbo V 2K G automatisch ES ATTENTIE De controller wordt reeds mechanisch en elektrisch aan de pomp verbonden geleverd De controller kan slechts van het pomplichaam worden gescheiden door hiertoe bevoegd personeel van Varian Vacuum Technologies OPMERKING Wanneer de Turbo V 2K G voor de eerste keer wordt gestart start de controller automatisch het systeem met een speciale procedure die de lagers tegen mogelijke schade beschermt SOFT START Het systeem wordt via opeenvolgende stappen op volle snelheid gebracht in een tijdsbestek dat van 10 minuten tot 1 uur kan vari ren Nadat het systeem de volle snelheid heeft bereikt wordt de soft start procedure ontmachtigd en worden de volgende starten op de normale wijze uitgevoerd OPMERKING Om de beveiligingsgraad IP 54 te behouden mogen uitsluitend de bij de pomp geleverde connectoren gebruikt worden Gebruik voor de voedingskabel uitsluitend de PN 969 9957 of 969 9958 en bevestig de kabel aan de controller met behulp van de hiervoor bestemde opsluitbeugel zie volgende figuur Gebruik de kabel en de stekker samen met een goedgeaard stopcontact om elektrische schokken te voorkomen en om te voldoen aan de vereisten van de EG normen 24 GEBRUIKSAANWIJZINGEN Het systeem is voorzien van een groene LE
162. n mi svorkami pozri nasleduj ci obr zok T to n ru so z str kou pou vajte spolu s vhodne uzemnenou z suvkou aby nedo lo k z sahu elektrick m pr dom a aby boli splnen po iadavky noriem ES 60 N VOD K POU ITIU Syst m je vybaven zelenou stavovou LED di dou Zelena LED di da LD 1 na z kladnom elnom paneli Turbo V 2K G base ukazuje frekvenciou blikania sp sob innosti syst mu e iadne blikanie v veva norm lne rotuje e pomal blikanie interval asi 400 ms syst m je v niektorom z t chto stavov st panie klesanie brzdenie Stop alebo v re ime akanie na spojenie e r chle blikanie interval asi 200 ms chybov stav Ako zariadenie zastavi V vevu m ete zastavi jedn m z nasleduj cich sp sobov 1 odpojen m dodan ho I O konektora opa n ho pohlavia 2 poslanim vzdialen ho sign lu stop cez I O konektor pozri odstavec J1 VZDIALENY 1 0 dodatku k Technick m Inform ci m 3 poslan m vzdialen ho sign lu stop cez rozhranie RS 232 485 pozri odstavec Popis komunik cie cez RS232 RS 485 dodatku k Technick m Inform ci m N dzov zastavenie Ak chcete zariadenie Turbo V 2K G okam ite vypn v stave n dze mus te vytiahnu k bel nap jania zo z suvky zdroja nap jania DR BA Zariadenie Turbo V 2K G nevy aduje iadnu dr bu Ak ko vek pravy a opravy syst mu mus vykona autorizovan person l AN VAROVANIE Sk r n
163. n snow ice dust aggressive gases or in explosive environments or those with a high fire risk Dur ing operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure air temperature from 5 C to 40 C relative humidity O 95 non condensing In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The Turbo V 2K G must be connected to a primary pump see Technical Information The Turbo V 2K G can be installed in any position Fix the Turbo V 2K G in a stable position connecting the inlet flange of the turbopump to a fixed counter flange capable of withstanding a torque of 10600 Nm around its axis The turbopump with ISO inlet flange must be fixed to the vac uum chamber by means of bolts The following table shows the necessary number of bolts and the relevant fixing torque as recommended by Varian FIXING FIXING ENGE DEVICE EN TORQUE ISO 250 F M10 bolts NOTE The Turbo V 2K G cannot be fixed by means of its base The system can only be fixed through its ISO 250F flange Fixing must be done according to ISO 1609 norm Steel bolts with a strength class at least of 500 N mm must be used 67 INSTRUCTIONS FOR USE IS CAUTION The Turbo V 2K G belongs to the second installation or over voltage category as per directive EN 61010 1
164. n Off 0 close 1 open Valid only if in Parameter buffer Byte 15 B1 1 and Byte 15 B2 0 B2 Purge Valve On Off O close 1 open Valid only if in Parameter buffer Byte 15 B1 1 and Byte 15 B2 0 B1 Heather Jacket Enable Specific option not available on standard models BO Stop Speed Reading 167 O no after a stop command the user can t know the real pump speed 1 yes after a stop command the user can know the real rotor speed see In Buff Byte Offset 6 this function is available for the latest controllers otherwise will be ig nored 1 2 Hz 475 555 High Speed Value 120 Set the high rotational speed de ault 555 3 2 Hz 475 555 Low Speed Value 117 Set the low rotational speed de ault 475 89 87 900 968 01 C TECHNICAL INFORMATION INPUT BUFFER 15 WORDS OFFSET SIZE UNIT WIN BYTE BYTE RANGE DESCRIPTION SERIAL 0 10000 Current Motor current consumption Power Motor power absorption 0 400 Power Limit Applied Maximum allowable power 6 2 Hz 0 555 Driving Frequency 203 Read the rotational speed of the pump 2 Hz 0 555 Target Frequency 120 Read the target rotational speed 10 2 Flow Meter Alarm Time 213 Specific option not available on standard models 12 2 Flow Meter Alarm Event 215 Specific option not available on standard models 0 65536 Cycle Number Number of cycles start and stop done by the pump 0 65536 Last Cycle Time How long the last cycle la
165. n haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga el Turbo V 2K G y de no someterlo a golpes o vibraciones Debido a su peso 35 kg para extraer la bomba del embalaje deben utilizarse las tres armellas en 120 que se encuentran enroscadas en el cuerpo bomba No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con la directiva CEE 85 399 para la preservaci n del medio ambiente US ATENCI N Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vac o Utilizar siempre guantes u otra protecci n adecuada NOTA La Turbo V 2K G no puede sufrir da os s lo por quedar expuesta a la acci n de la atm sfera No obstante se aconseja mantener la bomba cerrada y sellada hasta el momento de instalarla en el sistema a fin de prevenir la contaminaci n del mismo El embalaje de la Turbo V 2K G contiene bomba con controlador integrado inlet screen montado el presente manual en CD ROM bolsa con accesorios ensamble de conector de 15 vias REMOTE I O IP 54 que incluye las conexiones necesarias para reactivar la bomba 6 ensamble de conector de 9 v as SERIAL IP 54 a utilizar para efectuar la conexi n serie 7 ensamble de conector de 9 v as Network MoniTorr 8 abrazadera para ret
166. n pu essere fissata tramite la sua base Il sistema pu essere fissato solo tramite la sua flangia ISO 250F Il fissaggio deve realizzato in conformita alla norma ISO 1609 Devono essere usati bulloni in acciaio con una classe di resisten za di almeno 500 N mm ISTRUZIONI PER L USO IS ATTENZIONE La Turbo V 2K G appartiene alla seconda categoria di installa zione o sovratensione prevista dalla normativa EN 61010 1 Connettere quindi il dispositivo ad una linea di alimentazione che soddisfi tale categoria Utilizzare i controconnettori in dotazione per garantire l isola mento IP 54 La Turbo V 2K G ha dei connettori per gli ingressi uscite e per la comunicazione seriale che devono essere connessi ai circuiti esterni in modo che nessuna parte sotto tensione sia accessibi le Assicurarsi che l isolamento del dispositivo connesso alla Tur bo V 2K G abbia un isolamento adeguato anche in condizione di guasto singolo come previsto dalla normativa EN 61010 1 Per l installazione degli accessori opzionali vedere Technical Information USO In questo paragrafo sono riportate le principali procedure ope rative Prima di usare il sistema effettuare tutti i collegamenti elettrici e pneumatici Durante l eventuale riscaldamento della camera da vuoto la temperatura sulla flangia di ingresso non deve essere superiore a 80 C Durante il funzionamento della pompa la temperatura del rotore non deve mai superare i 120 C L
167. n standard models 4 1 Sccm Flowmeter Threshold Specific option not available on standard models 0101017 eV 7 2 Hz mA s Setpoint Value Set the threshold for the set point out 2 S 0 99999 Setpoint Mask Time Set the time during the controller does not drive the set point out 11 2 0 2 s 0 65535 Vent Valve Opening Delay 126 Set the delay time between the stop command and vent opening Valid only in purge vent auto mode Parameter Buffer byte 15 B1 0 default 15 O infinite the valve will never open 13 2 0 2 s Vent Valve Open Time 1 Set how long the vent will remain open then both purge and vent will be closed Valid only in purge vent auto mode Parameter Buffer byte 15 B1 0 O infinite the valve remain open till a start command 87 87 900 968 01 C 115 102 103 47 OFFSET SIZE BYTE BYTE 15 1 NI Bit Filed TECHNICAL INFORMATION UNIT WIN RANGE DESCRIPTION SERIAL 25 BO Vent amp Purge Auto Man 1 0 Auto the controller drives purge and vent valves 1 Manual see Par Buff byte 15 B2 B1 Vent amp Purge Remote Profibus 146 0 Serial or Profibus see Out Buff byte 0 B3 and B2 1 Remote the valves are driven by the inputs on remote I O connector B2 Interlock Type 110 0 continuos the interlock must be present to run the pump 1 at start the interlock must be present only at start command B3 Setpoint Logic 104 0 active close NO 1 active open NC B4
168. nd hence the rotor may be overheated while static parts of the pump remain cool This effect is strongly dependant from the inten sity time function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum opera tion no particular problem should be expected However if the effect is greater than the case should be carefully reviewed by Varian s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and ap plied to the rotor ORDERABLE PARTS DESCRIPTION Turbo V 2K G system with Monitorr op tion PART NUMBER 969 887 1 Turbo 2K G with ProfiBus and MoniTorr options 969 8873 Mains cable NEMA Plug 3m long 969 9958 Mains cable European Plug 3m long 969 9957 Serial cable and Navigator Software 3 0 969 9883 Protocol Converter RS 232 lt gt RS 485 wire 969 9258 Inlet screen ISO 250 with center ring 969 9138 Water cooling kit for 6x8 IDxOD flexible tube Water cooling kit for 3 8 in ID flexible tube MoniTorr Connectivity kit 969 9348 969 9338 969 9260 87 900 968 01 C a VARIAN SK Request for Return Ne 9001 1 A Return Authorization Number RA WILL NOT be issued until this Request for Return 1s completely filled out signed and returned to Varian Customer Service 2 Return shipments shall be m
169. nformacije UPORABA Ta odstavek opisuje osnovne postopke za uporabo Pred uporabo sistema pove ite vse elektri ne in pnevmatske povezave Pri segrevanju vakuumskega le i a temperatura dovodne prirobnice ne sme prese i 80 C Med delovanjem rpalke rotor ne sme prese i temperature 120 C Uporabnik mora nastaviti pravilen na in plina v skladu s plinom ki se rpa 1 za N2 in la je pline 0 za Argon privzeto Za dodatne informacije glejte prilogo Tehni ne informacije AN OPOZORILO Turbo rpalke ne uporabljajte e dovodna prirobnica ni pri klju ena na vakuumsko le i e Tekom segrevanja se turbo rpalke ali njenih delov ne dotikajte Visoka temperatura lahko povzro i opekline ES POZOR Izogibajte se udarcem oscilacijam ali nenadnim premikom rpalke tekom delovanja Nosilci se lahko po kodujejo Za prezra evanje rpalke uporabite zrak ali inertni plin brez prahu ali delcev Pritisk na oddu niku mora biti manj i od 1 bara nad pritiskom atmosfere Za rpanje agresivnih plinov so te rpalke opremljene s pri klju kom ki omogo a stalen pretok inertnih plinov kot N2 Ar za za ito nosilcev glej prilogo Tehni ne informacije AN OPOZORILO Pri Grpanju strupenih vnetljivih ali radioaktivnih plinov sledite zahtevanim navodilom za odstranjevanje vsakega plina rpalke ne uporabljajte v prisotnosti eksplozivnih plinov Crpalka je narejena za hitro rpanje N2 Ar in lazjih plinov Ce
170. ng the pump The pressure at the vent port must be less than 1 bar above atmospheric pressure For pumping aggressive gases these pumps are fitted with a special port to allow a steady flow of inert gas like Na Ar for pump bearing protection see the appendix Technical Informa tion ZEIG When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases The pump is designed to pump high throughput of Na Ar and lighter gas Should you need to pump gases heavier than Ar please contact Varian technical support for information 87 900 968 01 C Use of Turbo V 2K G How to start the system up Before starting the system please check that the mating I O connector is unplugged If the system is connected to a remote I O make sure the stop signal see para J1 REMOTE I O of annex Technical Information is given To start the system please follow the following steps 9 unplug if present the system mating I O connector 10 plug on the mains 11 pump the vacuum chamber down to 0 1 mbar 12 give the Turbo V 2K G a start signal by one of the follow ing methods a connecting the provided mating I O connector b giving a remote start signal through the I O con nector see para J1 REMOTE I O of annex Technical Information c giving a remote start signal via the serial RS 232 485 interface see p
171. nly For this pur pose the customer must use the dedicated chan nel on the pump body The pump is balanced after assembly with a resid ual vibration amplitude less than 0 01 um The pump can operate in any position and must be supported on the high vacuum flange The con nection of the forevacuum on the side of the pump is a KF 40 NW flange TECHNICAL INFORMATION Turbo V 2K G Controller Description The dedicated controller is a solid state frequency converter which is driven by a single chip micro computer The controller can be operated by a remote host computer via the serial connection a Windows based software is available as an option or by the remote I O connector At every power up the controller is in Remote Mode of operation and accepts only commands from J1 remote I O connector To put it in Serial Mode of operation please refer to the serial com mand table TECHNICAL SPECIFICATION Pumping speed without inlet screen N 1600 l s Ar 1400 l s Compression ratio N2 Ar Base pressure with 5 x 10 mbar recommended 4 x 10 Torr forepump According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the comple tion of test dome bake out with a Turbopump fitted with a ISO 250 flange and using the recom mended pre vacuum pump ISO 250 F KF 40 NW 33000 rpm gt 40 m h
172. no p davn mi konektory aby bylo mo n jej ovl dat ze vzd len ho mista pomoc hostitelsk ho po ta e prostrednictvim s riov linky RS232 nebo RS485 N sleduj c odstavce obsahuj informace pot ebn k zaji t n bezpe nosti obsluhy p i pou v n tohoto za zen Podrobn informace jsou uvedeny v p loze Technick informace Tento manu l pou v n sleduj c standardn protokol AN VYSTRAHA V stra n hl en jsou ur ena pro upozorn n obsluhy na ur it postup nebo innosti kter by v pripad nedodr en mohly zp sobit v n raz IS VAROV N Varovna hl en jsou uvedena pred postupy ktere by v pr pad nedodr eni mohly po kodit za izeni POZNAMKA Pozn mky obsahuj d le it informace prevzat z textu USKLADNEN Aby byla zaji t na maxim ln provozuschopnost a spolehlivost turbomolekularnich v v v firmy Varian mus te dodr ovat n sledujici pokyny o P i p eprav p em s ov n a skladov n v v v byste nem li p ekra ovat n sleduj c technick podm nky prost ed o Teplotni rozp amp ti 20 C a 70 C o Rozp ti vlhkosti 0 a 95 bez sr en e turbomolekul rn vyv vy mus u ivatel po dod vce a poprv v dycky spoustet pozvoln o skladovatelnost turbomolekul rn v vevy je 10 m s c ode dne doruceni US VAROV N Pokud dojde z jak hokoli d vodu k pfekro en skladovac Ih ty
173. o suministrar a la bomba un caudal de gas inerte Nitr geno o Arg n para proteger los rodamientos v ase el anexo Technical Information ETER Cuando la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cuando haya gases explosivos La bomba ha sido proyectada para una elevada transferencia de nitr geno arg n y gases m s ligeros En caso de que deban bombearse gases m s pesados que el arg n se ruega tomar contacto con la Asistencia T cnica de Varian a fin de recibir mayores informaciones 87 900 968 01 C Uso de Turbo V 2K G Como poner en funcionamiento el sistema Antes de activar el sistema deber retirarse el ensamble conector I O Si el sistema se encuentra conectado a un dispositivo de Input Output remoto verificar que la senal de STOP este activada v ase el apartado J1 REMOTE I O en el ap ndice Technical Information Para poner en funcionamiento del sistema se deber proceder de la manera que a continuaci n se indica 1 retirar si est presente el ensamble conector I O 2 conectar la alimentaci n de red 3 disponer en 0 1 mbar la presi n en el interior de la c mara de vac o 4 dar la sefial de START a la Turbo V 2K G mediante una de las siguientes formas a conectar el ensamble conector I O suministrado adjunto b dar la sefial de START de remoto mediante el conector I O v as
174. o 555 Hz linearly see the following diagram um Fa in g S LI Em TT P LL E a m e LU 50 Duty Cycle 55 NOTE High Speed is the nominal rotational frequency of the pump 555Hz Low Speed 475 Hz corre sponds to the rotational frequency for a stand by status to preserve the bearing life Users can set rotational frequency between these two values If any signal isn t applied no connection the driv ing freguency is set to Maximum excitation fre quency the default value is 555 Hz it is settable via serial line by means of window 121 see the serial command table If a continuous signal is applied pin 5 connected to pin 9 the driving frequency is set to Low Speed the default value is 475 Hz it is settable via serial line by means of window 117 see the serial command table 74 TECHNICAL INFORMATION The Low Speed function can also be activated by serial line with win 001 and the low speed value can be adjusted via serial command win 117 Both low speed value win 117 and high speed value win 120 are limited between 475Hz can t be set by the user and Maximum excitation fre quency win 121 555Hz default NOTE The duty cycle percentage is referred to the low level portion of the PWM period SOFT START input signal to activate the soft start function This function must be activated pin 7 shorted with pin 9 if the pump remains unused for 1 m
175. o tam kde existuje vysok riziko po iaru Po as innosti zariadenia je potrebn zabezpe i tieto vlastnosti prostredia maxim lny pretlak 2 bary nad rov ou atmosf rick ho tlaku teplota vzduchu od 5 C do 40 C relat vna vlhkos 0 95 bez kondenz cie V pr tomnosti magnetick ho po a mus by v veva chr nen feromagnetick m t tom Podrobn inform cie sa nach dzaj v dodatku Technick inform cie Zariadenie Turbo V 2K G sa mus pripoji k prim rnej v veve pozri Technick inform cie Zariadenie Turbo V 2K G m e by nain talovan v ubovo nej polohe Upevnite Turbo V 2K G do stabilnej polohy pripojen m vstupnej pr ruby turbov vevy k pevnej pr rube upevnenej tak aby vydr ala nam hanie kr tiacim momentom 10600 Nm okolo svojej osi Turbov veva so vstupnou pr rubou ISO mus by pripojen k v kuovej komore pomocou skrutiek Nasleduj ca tabu ka uv dza potrebn po et skrutiek a relevantn u ahovac to iv moment PR RUBA UPEV OVAC PO ET MECHANIZMUS U AHOVAC KR TIACI MOMENT POZN MKA Turbo V 2K G nemo no upevni pomocou jej z kladnej dosky Syst m mo no upevni len pomocou jeho ISO pr ruby 250F Upevnenie mus by preveden pod a normy ISO 1609 Musia by pou it oce ov skrutky s pevnos ou v ahu najmenej 500 N mm ISO 250 F 59 N VOD K POUZITIU IS UPOZORNENIE Zariadenie Turbo V
176. obach IS UWAGA Unika uderze waha lub gwa townych przesuni turbopompy podczas jej dzia ania Mog uszkodzi si o yska Dla wlotu do powietrza pompy zastosowa powietrze lub oboj tny gaz bez py u lub innych cz stek Ci nienie wej ciowe poprzez odpowiedni wlot musi by ni sze od 1 bara ponad ci nienie atmosferyczne Dla pompowania niszcz cych gaz w pompy te s wyposa one w odpowiedi wlot poprzez kt ry nale y dostarczy pompie przep yw oboj tnego gazu Azot Argon dla zabezpieczenia o ysk Patrz dodatek Informacje Techniczne AN NIEBEZPIECZE STWO Kiedy pompa jest zastosowana do pompowania gaz w toksycznych atwo palnych lub radioaktywnych nale y wykona odpowiednie procedury typowe dla ka dego z gaz w Nie stosowa pompy w obecno ci gaz w wybuchowych Pompa jest zaprojektowana aby posiada a wysoki przep yw Azotu Argonu i innych l ejszych gaz w W przypadku kiedy zaistnieje potrzeba pompowania ci szych gaz w od Argonu w celu informacji nale y skontaktowa si z Serwisem Technicznym firmy Varian 87 900 968 01 C Uzytkowanie Turbo V 2K G Jak uruchomic system Przed uruchomieniem systemu nale y skontrolowa czy konektor I O jest zdjety Je eli system jest podtaczony do zdalnego urzadzenia wejs wyjsc Input Output nale y upewni sie e sygnat STOP jest aktywny patrz paragraf J1 ZDALNE I O w dodatku Informacje Techniczne Aby uruc
177. on response monitoring active Freeze mode received freeze com mand Synch mode received synch com mand reserved diag deactivated slave is parameter ised by another master 3 Resened SSS 3 Master Add master address after parameterisa tion FF without parameter Ident number high Standard diagnostics Ident number low External diagnosis Header length indication including header Interface Status Bo Controller not responds B Controller not identified Bo Input data not fully coherent yet Not used Not used Start Stop diag status Soft Start diag status Active Stop diag status Vent Valve diag status 3 0 Purge diag status 7 4 Heater Jacket diag status Stop Speed Reading diag status High speed setting diag status Low speed setting diag status Water Cooling Max Temp diag status Water Cooling Hyst diag status Set Point Hyst diag status Heater Jacket Setting diag status Flow Meter Threshold diag status 3 0 Reserved diag status Set Point Value diag status Set Point Delay diag status Vent Valve Open Delay diag status Vent Open Time diag status External diagnostic 87 900 968 01 C OFF 18 B Vent Purge Auto Man diag status B3 o Vent Purge Remote Profibus diag status B Interlock Mode diag status B3 o Set Point Logic diag status 20 B Heater Jacket Mode diag status B3 0 Load Gas Type diag status 21 B7 4 B3 0 Purge Gas Type diag status Start Stop Interlock Mode dia
178. oni A causa del suo peso 35 kg per estrarre la pompa dall imballo utilizzare i tre golfari a 120 avvitati sul corpo pompa Non disperdere l imballo nell ambiente II materiale comple tamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente IS ATTENZIONE Onde evitare problemi di degasamento non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata NOTA La Turbo V 2K G non pu essere danneggiata rimanendo semplicemente esposta all atmosfera Si consiglia comunque di mantenere la pompa chiusa e sigillata fino al momento dell in stallazione sul sistema Questo per prevenire la contaminazione del sistema Nell imballo della Turbo V 2K G sono compresi 1 pompa con controller integrato 2 inlet screen montato 3 questo manuale su CD ROM 4 sacchetto accessori 5 controconnettore a 15 vie REMOTE I O IP 54 con inte grate le connessioni necessarie a far partire la pompa 6 controconnettore a 9 vie SERIAL IP 54 da utilizzare per la connessione seriale 7 controconnettore a 9 pin per il Network MoniTorr 8 staffetta per la ritenzione del cavo di alimentazione mon tata 87 900 968 01 C INSTALLAZIONE AN PERICOLO La pompa a causa del suo peso deve essere maneggiata tramite appositi attrezzi di sollevamento e spostamento All uopo utilizzare gli appositi golfari avvitati nei fori fi
179. onsultar o ap ndice Technical Information EEE Quando a bomba utilizada para bombear gases t xicos inflam veis ou radioactivos seguir os procedimentos adequados t picos para cada g s N o usar a bomba na presen a de gases explosivos A bomba foi concebida para fornecer um elevado caudal de Azoto Argon e gases mais leves Se houver a necessidade de bombear gases mais pesados que o Argon aconselha se a entrar em contacto com a Assist ncia T cnica da Varian para obter maiores informa es 87 900 968 01 C Uso da Turbo V 2K G Como activar o sistema Antes do arranque do sistema assegurar se de que o conector conjugado I O n o est montado Se o sistema est ligado a um dispositivo de Input Output remoto assegurar se de que o sinal de STOP est activo consultar o par grafo J1 REMOTE 1 0 no ap ndice Technical Information Para activar o sistema executar as seguintes opera es 1 remover se presente o conector conjugado I O 2 ligar o cabo rede de alimenta o el ctrica 3 deixar aumentar a press o dentro da c mara de v cuo at atingir 0 1 mbars 4 fornecer Turbo V 2K G o sinal de START num dos seguintes modos a ligar o conector conjugado I O fornecido de s rie b dar o comando remoto de START utilizando o conector I O consultar o par grafo J1 REMOTE I O no ap ndice Technical Information c dar o comando remoto de START utilizando o interface s
180. onth or more and de activated for the next run up The soft Start phase is around 55 minutes long The soft start function is factory enabled for the first sys tem start up After the first pump start up until the normal status the soft start is automatically disabled ANALOG OUTPUT this output signal is a voltage from 0 to 10 Vdc proportional to a reference quan tity frequency or power set by the user through se rial line window 111 The default setting is the freguency see the following example diagram The voltage is provided between pins 14 and 15 An high impedance input should be connected to this output gt 100 kO Output V Frequency Hz Output V Power W 87 900 968 01 C FAULT this relay output signal is closed when any system fault condition is detected To detect the type of failure the serial protocol is needed see the para RS232 485 Comunication Description SET POINT this relay output signal is enabled when the reference quantity chosen frequency cur rent or time is higher than the set threshold The signal can be active close or active open More over ifthe reference quantity is the frequency or the current drawn it is possible to set the hysteresis in ofthe threshold value to avoid bouncing For example reference quantity frequency window 101 0 threshold 500 Hz window 102 500 hysteresis 1 window 103 1 activation type active close window 10
181. oples tilfgrselen pumpen m luftes ved pne den aktuelle ventilen og deretter vente til rotoren har stanset og pumpens overflatetemperatur er lavere enn 50 C Dersom systemet stanser m du ta kontakt med Varians reparasjonservice eller med Varians avanserte bytteservice som kan tilby overhalte system til erstatning for det gdelagte systemet MERK Fgr systemet returneres til produsenten for reparasjon eller som innbytte for et overhalt system m det vedlagte skjemaet Helse og sikkerhet fylles inn og sendes til det lokale salgskontoret En kopi av dette arket m vedlegges systemet som sendes tilbake Dersom et system skal kasseres m dette skje i henhold til nasjonale bestemmelser 87 900 968 01 C K YTT OHJEET Turbomolekyylipumppujen Turvaohjeet Tassa kayttoohjeessa kuvatuissa turbomolekyylipumpuissa on korkea maara kineettista energiaa joka aiheutuu korkeasta pyorimisnopeudesta yhdistettyna pumppujen roottorien massaan Jarjestelman vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa pyorimisenergia saattaa vapautua AN VAARA Tassa kayttoohjeessa kuvattuja asennusohjeita on noudatettava tarkasti laitteiston vaurioitumisen ja kayttajien vahingoittumisen valttamiseksi 37 87 900 968 01 C YLEISI TIETOJA Tama laite on tarkoitettu ammattimaiseen k ytt n Ennen laitteen k ytt nottoa tulee k ytt j n lukea huolellisesti ohjekirja ja muut Va
182. ormatie is te vinden in de bijlage Technical information Deze handleiding maakt van de volgende symbolen gebruik ETE Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale procedure of methode die indien niet correct uitgevoerd ernstig lichamelijk letsel kan veroorzaken US ATTENTIE Bij dit symbool staat tekst met procedures die indien niet opgevolgd schade aan apparatuur kunnen veroorzaken OPMERKING De opmerkingen bevatten belangrijke informatie die uit de tekst is gelicht OPSLAG Om een zo goed mogelijke werking en betrouwbaarheid van de Turbomoleculaire pompen van Varian te garanderen moeten de volgende voorschriften in acht worden genomen e tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan e temperatuur van 20 C tot 70 C e relatieve vochtigheid van 0 tot condenserend e de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld e de opslagtijd van een turbomoleculaire pomp bedraagt 10 maanden vanaf de verzenddatum 95 niet USS ATTENTIE Indien om een willekeurige reden de opslagtijd langer is moet de pomp weer naar de fabriek worden gestuurd Voor meer informatie wordt verzocht contact op te nemen met de plaatselijke vertegenwoordiger van Varian 22 GEBRUIKSAANWIJZINGEN UITPAKKEN De Turbo
183. packung sind auf grund des hohen Gewichtes 35 kg die drei um 120 versetz ten senschrauben zu benutzen die am Pumpenkorpus ange schraubt sind Es ist vollst ndig recyclebar und entspricht der Richtlinie 85 399 EWG f r Umweltschutz IS ACHTUNG Um Entgasungen zu vermeiden d rfen die Teile die mit dem Vakuum in Ber hrung kommen nicht mit den blo en H nden angefa t werden Es sind stets Schutzhandschuhe oder andere Schutzmittel zu verwenden HINWEIS Die Turbo V 2K G kann durch ledigliche Einwirkung von atmo sph rischen Bedingungen nicht besch digt werden Es wird indes empfohlen die Pumpe bis zur Installation am System geschlossen und versiegelt zu halten Auf diese Weise kann der Verunreinigung des Systems vorgebeugt werden JC a der Turbo V 2K G Pumpe mit integriertem Controller Inlet Screen montiert Betriebsanleitung auf CD ROM Beutel mit Zubeh r Gegenkonnektor mit 15 PINs REMOTE I O IP 54 mit integrierten Anschl ssen f r den Pumpenanlauf Gegenkonnektor mit 9 PINs SERIAL IP 54 f r den se riellen Anschluss 7 Gegenkonnektor mit 9 PINs Network MoniTorr 8 Halteschelle f r das Stromversorgungskabel montiert gie om 9 87 900 968 01 C INSTALLATION NZZ Die Pumpe ist aufgrund ihres hohen Gewichtes mit geeigneten Hebe und F rderzeugen zu handhaben Zu diesen Zwecken sind die senschrauben zu benutzen die in die Gewindeboh rungen am Pumpenkorpus eingeschraubt sind
184. pun pintal mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Varianin korjauspalvelua tai Varian advanced exchange service vaihtopalvelua jonka kautta saatte uudistetun pumpun vahingoittuneen tilalle HUOM Ennen j rjestelm n l hett mist valmistajalle korjausta tai vaihtopalvelua varten on ehdottomasti t ytett v ja toimitettava paikalliseen myyntitoimistoon Turvallisuus ja Terveys kaavake joka on liitteen ohjekirjassa Kyseisen kaavakkeen kopio tulee liitt j rjestelm n pakkaukseen ennen sen l hett mist Mik li pumppu t ytyy romuttaa toimikaa sen h vitt misess kansallisen lains d nn n m r m ll tavalla 87 900 968 01 C OAHI TEX pe p ropa
185. py turbomolekularnej wynosi 10 miesi cy od daty wysy ki IS UWAGA Je eli z jakiegokolwiek powodu czas magazynowania jest d u szy nale y odes a pomp do fabryki W celu jakiejkolwiek informacji prosimy skontaktowa sie z miejscowym przedstawicielem firmy Varian 50 INSTRUKCJA UZYTKOWANIA PRZYGOTOWANIE DO INSTALACJI System Turbo V 2K G jest dostarczany w specjanym ochronnym opakowaniu w przypadku lad w uszkodze do kt rych mog oby doj podczas transportu nale y skontaktowa si z miejscowym biurem sprzeda y Podczas operacji rozpakowywania nale y zwr ci szczeg ln uwag aby nie spowodowa upadku systemu Turbo V 2K G ani nie poddawa go uderzeniom lub wibracjom Z powodu jego ci aru 35 kg aby wyci gn pomp z opakowania nale y zastosowa trzy zaczepy na 120 wkr cone na korpusie pompy Nie porzuca opakowania w rodowisku Materia ten nadaje si ca kowicie do recyklingu zgodny jest z dyrektyw UE 855 399 dotycz cej ochrony rodowiska IB UWAGA Aby unikn problem w odgazowywania nale y nie dotyka go ymi r koma cz ci przeznaczonych do pr ni Nale y zawsze stosowa odpowiednie r kawice ochronne lub odpowiednie zabezpieczenie INFORMACJA Turbo V 2K G nie mo e by uszkodzony poprzez wystawienie go na dzia anie atmosfery Zaleca si aby pompa do momentu jej instalacji na systemie pozosta a dobrze zamkni ta Jest to w celu zabezpieczenia
186. r des d charges lectriques et satisfaire les requis des normes CE 12 MODE D EMPLOI Le syst me est muni d un LED vert pilot par un signal d tat La LED verte LD1 plac e sur le panneau de la base du Turbo V 2K G indique par sa fr quence de clignotement les conditions op rationnelles du syst me allum e fixe la pompe est en rotation normale clignote lentement p riode d environ 400 ms le systeme est en tat de rampe de freinage de stop ou d attente in terlock clignote rapidement p diode d environ 200 ms condition d erreur Arr t du syst me Pour arr ter la pompe op rer dans l un des modes suivants 1 D brancher le connecteur E S 2 Envoyer un signal de STOP distance travers le connecteur E S Cf paragraphe J1 REMOTE I O E S DISTANCE dans l appendice Technical Information 3 Envoyer un signal de STOP a distance via l interface s rielle RS 232 485 Cf paragraphe RS 232 485 Com munication Description dans l appendice Technical In formation Arr t d urgence Pour arr ter le Turbo V 2K G en conditions d urgence il faut d brancher le cordon d alimentation du contr leur ENTRETIEN Le Turbo V 2K G n exige aucun entretien particulier Toute intervention doit tre effectu e par un personnel agr EXT Avant toute intervention sur le syst me le d brancher refouler l air de la pompe en ouvrant la soupape pr vue cet effet attendre jusqu
187. rabo in vse dodatne informacije ki mu jih je posredoval Varian Varian ni odgovoren za dogodke ki bi nastali zaradi neupoStevanja teh navodil nepravilne uporabe in nepoobla enega poseganja v opremo ali kakr nega koli dejanja ki niso v skladu s standardi Turbo V 2K G je integriran sistem s turbomolekularno rpalko za visoko in ultra visoko vakuumsko uporabo s primernim krmilnikom Sistem lahko rpa vse tipe plinova ali plinskih zme si Ni primeren za rpanje teko ine ali trdnih delcev rpanje se izvaja preko hitre turbine maks 33000 rpm ki jo vodi viso ko u inkovit 3 fazni elektri ni motor Turbo V 2K G ne vsebuje onesna evalnih agentov in je primeren za isto vakuumi ranje Opremljen je z auksiliarnimi priklju ki ki jin lahko krmilite iz oddaljene lokacije z gostiteljskim ra unalnikom povezanim preko serijske povezave RS232 ali RS485 Naslednji odstavki vsebujejo informacije ki so potrebne za varnost tistega ki uporablja to opremo Podrobne informacije lahko najdete v prilogi Tehni ne informacije Navodila so napisana po naslednjem standardnem proto kolu AN OPOZORILO Opozorila so za to da pritegnejo pozornost uporabnika na do lo ene postopke pri katerih lahko pride do resnih poSkodb e se jih ne dr i ES POZOR Sporo ila so prikazana pred postopki pri katerih lahko pride do poSkodbe opreme OPOMBA Opombe vsebujejo pomebne informacije iz besedila SHRANJEVANJE Da bi zagotovi
188. rafo s o descritos os principais procedimentos operacionais Antes de usar o sistema efectuar todas as liga es el ctricas e pneum ticas Durante o eventual aquecimento da c mara a v cuo a temperatura no flange de entrada n o deve ser superior a 80 C Durante o funcionamento da bomba a temperatura do rotor deve ser sempre inferior a 120 C O operador deve verificar se o aparelho funciona na modalidade correcta de acordo com o tipo de g s aspirado 1 para Azoto e gases mais leves O para Argon modalidade pr definida Para maiores detalhes consultar o ap ndice Technical Information MIS Nunca activar a bomba se o flange de entrada n o estiver ligado a c mara de v cuo ou n o estiver fechado com o flange de fecho N o tocar a turbobomba e os seus eventuais acess rios durante as opera es de aquecimento A elevada temperatura pode causar les es s pessoas LS ATEN O Evitar colis es oscila es ou deslocamentos bruscos da turbobomba quando est a funcionar Os rolamentos poderiam sofrer danos Para a sa da de ar da bomba utilizar ar ou g s inerte sem poeiras ou part culas A press o de entrada atrav s da porta espec fica deve ser inferior a 1 bar acima da press o atmosf rica Para bombear gases agressivos estas bombas est o equipadas com uma porta espec fica atrav s da qual necess rio fornecer bomba um fluxo de g s inerte Azoto ou Argon para proteger os rolamentos c
189. riable 0 to 31 default 0 O RS 232 1 RS 485 default 0 Serial type select 87 900 968 01 C 0 TOO HIGH LOAD N CONNECTION OVERVOLTAGE CONTROLL OVERTEMP VERIFY LINE SELECT POWER FAIL Window N 206 Bit Description SHORT CIRCUIT PUMP OVERTEMP MONITORR An integrated MoniTorr card is suitable for the Turbo V 2K G This feature allows the pump s vi bration spectra acguisition and download The necessary hardware is totally integrated into the controller and consists of one PCB card and one accelerometer fixed on the controller s side The MoniTorr card allows to e perform programmed maintenance on the tur bopump e continuously monitor the turbopump operating conditions e identify the wear conditions of one or two bear ings Powering on the MoniTorr At pumps power on the POWER LED comes on and the system proceeds with its self configuration routine Data acquisition and processing will be automatically activated at the moment in which the turbo pump reaches its maximum speed Normal Operation The MoniTorr card is powered from the controller Operation At predefined intervals the Monitorr will also ac quire the data related to the vibration spectrums power and temperature in addition to other data detected by the Turbo controller All the data must be transferred to a PC by means of the File Download program where are stored and where can be analyzed by Vari
190. rialet i soporna Materialet ar atervinningsbart till 100 och uppfyller EU direktiv 85 399 om milj skydd IS VIKTIGT Komponenter som skall uts ttas f r vakuum f r inte hanteras med bara h nder p g a kontamineringsrisken Anv nd alltid handskar eller liknande skydd OBSERVERA Pumpen Turbo V 2K G skadas inte av normal luftp verkan Det rekommenderas dock att h lla pumpen st ngd och f rseglad tills den installeras i systemet Detta f r att f rebygga f rorening av systemet Turbo V 2K G f rpackning inneh ller Pump med inbyggd styrenhet Intagsfl ns monterad Denna bruksanvisning pa CD ROM P se med tillbeh r 15 polig kontakt IP54 REMOTE I O med inbyggda anslutningar som beh vs f r att kunna starta pumpen 9 polig kontakt IP54 SERIAL som anv nds f r den seriella anslutningen 7 9 polig kontakt Network MoniTorr 8 Kabelklammer for att halla fast str mkabeln SLP SD 9 87 900 968 01 C INSTALLATION METER P grund av vikten m ste pumpen flyttas med hj lp av lampliga lyft och flytthjalpmedel Anv nd lyftoglorna som r fastskruvade i de g ngade h len p pumphuset IS VIKTIGT Ta inte bort skruvlocket f rr n turbopumpen ansluts till systemet Installera och anv nd inte pumpen i milj er som uts tts f r p verkan fr n atmosf ren regn sn is damm aggressiva gaser och inte heller i explosiv eller brandfarlig milj F ljande krav pa omgivningsf rh
191. rianin toimittamat lis tiedot Varian ei ota vastuuta seurauksista jotka johtuvat laitteen k ytt ohjeiden t ydellisest tai osittaisesta laiminly nnist ammattitaidottoman henkil n virheellisest laitteen k yt st valtuuttamattomista toimenpiteist tai kansallisen lains d nn n vastaisesta k yt st Turbo V 2K G on kokonaisj rjestelm joka muodostuu valvojalla varustetusta turbomolekyylipumpusta korkean ja ultrakorkean tyhji n k ytt varten J rjestelm kykenee pumppaamaan monen tyyppisi kaasuja tai kaasuyhdisteit mutta se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeudella 33000 kierrosta min max py riv n turbiinin avulla jota k ytt korkeatehoinen kolmivaiheinen s hk moottori Turbo V 2K G j rjestelm ss ei ole lainkaan likaavia aineita joten se soveltuu my s puhdasta tyhji t vaativiin k ytt tarpeisiin Lis ksi pumpussa on apuliittimet jotka mahdollistavat sen kauko ohjauksen is nt tietokoneella joka on kytketty siihen sarjakaapelilla RS232 tai RS485 Seuraavissa kappaleissa on kaikki tarpeelliset tiedot laitteen k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset tiedot l ytyv t osasta Tekniset tiedot T m k sikirja k ytt seuraavanlaisia merkint j VAARA Vaara merkit saavat k ytt j n kiinnitt m n huomion erityiseen k ytt tai toimintatapaan jonka
192. rie RS 232 485 consultar o par grafo RS 232 485 Communication Description no ap ndice Technical Information EEE Quando o aparelho est ligado rede de alimenta o el ctrica e o conector conjugado de 15 pinos fornecido de s rie est introduzido a Turbo V 2K G activa se automaticamente IS ATEN O O controller fornecido com todas as liga es mec nicas e as conex es el ctricas com a bomba j instaladas O controller pode ser separado do corpo da bomba exclusivamente por pessoal autorizado pela Varian Vacuum Techmologies NOTA Quando se activa a Turbo V 2K G pela primeira vez o controller activa automaticamente o sistema com um processo especial que protege os mancais contra poss veis danos SOFT START O sistema entra em funcionamento com uma sequ ncia de opera es sucessivas at atingir o regime m ximo num intervalo de tempo que oscila entre 10 minutos e 1 hora Depois de o sistema chegar velocidade de regime m xima o processo de soft start desabilitado e os arranques posteriores realizam se na modalidade normal NOTA Para manter o n vel de protec o IP 54 utilizar exclusivamente os conectores fornecidos com a bomba Para o cabo de alimenta o usar unicamente os PN 969 9957 ou 969 9958 e fixar o cabo ao controller utilizando a bra adeira espec fica ver a figura que se segue Utilize este cabo e tomada juntos com uma tomada adequadamente conectada a terra para e
193. ro t ger les paliers voir l appendice Technical Information EXT Lorsque la pompe est utilis e pour le pompage de gaz toxi ques inflammables ou radioactifs suivre les proc dures typi ques de chaque gaz Ne pas utiliser la pompe en pr sence de gaz explosifs La pompe est congue pour garantir un transfert lev de l azote de l argon et des gaz plus l gers En cas de pompage de gaz plus lourds que l argon contacter le service technique Varian pour informations 87 900 968 01 C Utilisation de la pompe Turbo V 2K G Mise en marche du syst me Avant la mise en marche du systeme contr ler gue le connecteur E S soit d branch Si le systeme est connect a un dispositif Entree Sortie a distance sassurer que le signal de STOP soit activ voir paragraphe J1 REMOTE I O 1 ES A DISTANCE dans appendice Technical Information Pour d marrer le systeme effectuer les op rations suivantes 1 Retirer si mont le connecteur E S 2 Connecter au r seau 3 Porter la pression l int rieur de la chambre vide 0 1 mbar 4 Donner la pompe Turbo V 2K G le signal de START de l une des facons suivantes a Brancher le connecteur E S fourni b Donner le signal de START distance travers le connecteur E S Cf paragraphe J1 REMOTE V O E S DISTANCE dans l appendice Technical Information c Donner le signal de START distance travers l interface serielle RS 232 485 Cf p
194. sconnected during operation Cooling may be carried out either through an open circuit with eventual discharge of the water or us ing a closed circuit cooling system The water temperature must be between 10 C and 35 C with an inlet pressure between 3 and 5 bar In any case the water flow must not be less than 200 l h The customer can alternatively order the 90 bend water cooling kit plastic model 969 9348 or me tallic model 969 9338 NOTE The water electrical conductance must be lt 500 us cm When the conductance is higher in closed water circuit the use of up to 20 of Ethyl Glycole is suggested PUMP PURGING AND VENTING The Turbo V 2K G pump is equipped with an inte grated purging and venting valve device Both valves are fed through a single gas port with 1 8 NPT thread or Swagelok connector Purge and Vent Installation To install the gas purge and vent line it is neces sary to unscrew the purge vent port cover and then connect the gas line Pump used with corrosive gases To prevent damage to the bearings an inert gas must flow into the pump body around the upper bearing towards the forevacuum line To supply the inert purge gas e g nitrogen to the pump through the purge port connect a gas purge line to the pump The purging device automatically provides 20 sccm when fed with 1 bar 14 psi absolute at mospheric pressure IS CAUTION To prevent bearing damage Varian suggests a
195. scripti on im Anhang Technical Information EEE Wenn die Spannung zugeschaltet und der Gegenkonnektor mit 15 PINs angeschlossen ist startet die Turbo V 2K G automa tisch IS ACHTUNG Im Lieferumfang ist der mechanisch und elektrisch an die Pumpe angeschlossene Controller enthalten Die Trennung des Control lers vom Pumpenkorpus darf nur von Personen ausgef hrt wer den die von Varian Vacuum Technologies autorisiert sind HINWEIS Bei Erstingangsetzung der Turbo V 2K G startet der Controller das System mit einer Spezialprozedur um die Kugellager vor etwaigen Sch den zu sch tzen SOFT START Das System wird innerhalb von 10 min bis zu 1 h in aufeinander folgenden Schritten bis zur Arbeitsgeschwindigkeit gestartet Sobald das System die Arbeitsgeschwindigkeit erreicht hat wird die soft start Prozedur deaktiviert Die darauf folgenden Anlaufvorg n ge werden normal ausgef hrt HINWEIS Um die Schutzart IP 54 aufrechtzuerhalten sind ausschlie lich die mit der Pumpe mitgelieferten Konnektoren zu verwenden F r das Stromversorgungskabel d rfen nur die PN 969 9957 oder 969 9958 verwendet werden Das Kabel ist am Controller mit der hierf r vorgesehenen Schelle zu befestigen siehe nachstehende Abbildung Verwenden Sie dieses Kabel und den Stecker zusammen mit einer entsprechend geerdeten Steckdose um Stromschl ge zu vermeiden und den Anforde rungen der EG Richtlinien zu entsprechen GEBRAUCHSANLEITUNG D
196. signal Den gr na Iysdioden LD1 p underdelen av TURBO V 2K G anger genom frekvensen av dess blinkningar hur systemet fungerar e fast sken pumpen roterar normalt e l ngsamt blinkande ungef r var 400 ms systemet r i lage f r acceleration bromsning Stop eller Waiting for interlock e hastigt blinkande ungef r 200 ms feltillstand Hur du stoppar Turbo V 2K G Systemet kan stoppas pa nagot av f ljande satt 1 Ta bort den medlevererade I O kontakten 2 Skicka en fj rrstyrd stoppsignal via l O kontakten se avsnitt J1 REMOTE I O i bilagan Technical Information 3 Skicka en fj rrstyrd stoppsignal via det seriella gr nssnittet RS232 485 se avsnitt RS232 485 Communication Description i bilagan Technical Information Nodstopp Dra ut elsladden fran styrenheten for att utfora ett n dstopp av Turbo V 2K G UNDERHALL Turbo V 2K G ar underh llsfritt Allt servicearbete maste utf ras av auktoriserad personal HETER Innan n got arbete utf rs p systemet m ste pumpens str mf rs rjning avbrytas och pumpen luftas genom att den aktuella ventilen ppnas V nta sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Varian reparationsverkstad eller Varian utbytesservice som kan ers tta systemet med ett renoverat system OBSERVERA Innan systemet l mnas in till tillverkaren f r reparation eller utbyte mo
197. sistir a um torque de 10600 Nm ao redor do pr prio eixo A turbobomba com flange de entrada ISO deve ser fixada c mara de v cuo atrav s de parafusos Damos a seguir uma tabela com o n mero de parafusos necess rios e o tipo de torque de aperto aconselhados pela Varian FLANGE M10 NOTA A Turbo V 2K G n o pode ser fixada por meio da sua base O sistema pode ser segurado s por intermedio da sua flange ISO 250F A fixac o deve ser realizada de acordo com o estabelecido na norma ISO 1609 Devem ser utilizados parafusos de aco com uma classe de resist ncia de pelo menos 500 N mm TORQUE DE TIPO DE BORNE N APERTO 19 INSTRU ES PARA O USO IS ATEN O O Turbo V 2K G pertence segunda categoria de instala o ou sobretens o prevista pela norma NE 61010 1 Portanto ligue o dispositivo a uma linha de alimenta o apropriada para esta categoria Utilizar os conectores conjugados fornecidos de s rie para garantir o isolamento IP 54 O Turbo V 2K G tem dois conectores para as entradas saidas e para a comunica o de s rie que devem ser ligados aos circuitos externos de modo a n o permitir o acesso s partes sob tens o Assegure se de que o isolamento do dispositivo ligado ao Turbo V 2K G esteja isolado correctamente mesmo em caso de avaria conforme previsto pela norma NE 61010 1 Para a instala o dos acess rios opcionais consultar Technical Information UTILIZA O Neste par g
198. sted hours 0 65536 Pump Life Total pump running time 0 100 Voltage Voltage provided to the motor Pump Bearing Temperature 204 Read the pump upper bearing temperature If gt 60 C the controller goes in fail and the pump is stopped Pump Body Temperature 216 Read the pump body temperature close to the water circuit N If gt Pump Body Temperature Limit In Buff byte 25 the controller will re duce the Max Allowable Power If gt 38 C the controller goes in fail pump over temperature and the pump is stopped 2 0 100 Controller Power Section Temperature 222 Read the controller power section temperature if gt 75 C the controller goes in fail controller over temperature N in fail controller over temperature 0 100 Controller CPU Section Temperature 211 Read the controller CPU section temperature if gt 80 C the controller goes 15 38 Pump Body Temperature Limit 164 Read the body temperature limit calculated from the Water Cooling Max Temperature parameter buffer byte 0 N N Bit Field Error Code bit field 206 B7 Too High Load the gas load is too high for the pump B6 Short Circuit a short circuit happened between the two of the three motor phases Bo Over voltage not used BO B3 Status 205 0 Stop 1 Waiting for interlock interlock connections on remote I O connector missing 2 Ramp the pump is increasing the speed 3 Auto tunin
199. t mask time between the pump start and the set point check seconds Set Point signal acti vation type the signal can be N O or N C Set point hysteresis in of threshold Baud rate Pump life cycle time cycle num ber reset Analog out put type output volt age signal proportional to frequency or power Low speed setting Hz Body ther mistor en able High speed setting Hz Maximum excitation frequency in Hz active only in Stop condition Set vent valve open close Purge gas type Threshold sccm flowmeter Admitted Values default 500 0 to 99999 default 0 0 active close N O 1 active open N C default 0 O to 100 default 2 600 O 1200 1 2400 2 4800 3 9600 4 default 4 To reset write 1 O frequency 1 power default 0 O No 1 Ar 475 to win 121 default 475 475 to win 121 default 555 475 to 555 default 555 1 open O close default 0 E 008 R W L Remote default or Serial con figuration N C 79 87 900 968 01 C N Read Write Data Type E3 E3 ating mode Vent valve opening delay expressed in 0 2 sec Set purge valve open close Set valves command Source Vent Valve Opening Time ex pressed in 0 2 sec HPS enable Description Admitted Values Reserved to Varian service Valves oper 0 au
200. t anvendes Varian tager ikke ansvar for skader helt eller delvis som f lge af tilsides ttelse af disse instruktioner fejlagtig brug af personer uden tilstr kkeligt kendskab ukorrekt anvendelse af udstyret eller h ndtering der strider imod g ldende lokale regler Turbo V 2K G systemet omfatter en turbomolekyl r pumpe til h je eller meget h je vakuumtilpasninger og aktuel styreenhed Systemet er egnet til pumpning af mange forskellige former for gas eller gasholdige blandinger men kan ikke benyttes til pumpning af v sker eller faste partikler Pumpningen sker ved hj lp af en hurtigroterende turbine 33000 omdr min Turbinen drives af en elektrisk trefasemotor med h j effekt Turbo V 2K G er ikke fremstillet af skadelige stoffer og er derfor egnet til anvendelse der kr ver rent vakuum Endvidere er systemet udstyret med kontakter som g r det muligt at fjernstyre systemet ved hj lp af en host computer der er tilsluttet med seriel linie RS232 eller RS485 De f lgende afsnit indeholder oplysningerne der er n dvendige for at garantere sikkerhed for operat ren i forbindelse med anvendelse af udstyret Bilaget Teknisk Information indeholder detaljerede oplysninger I brugsanvisningen anvendes f lgende standardrubrikker AN ADVARSEL Advarselsmeddelelserne informerer operat ren om at en speciel procedure eller en vis type arbejde skal udf res praecist efter anvisningerne I modsat fald er der risiko for sv
201. t en renoverad enhet m ste h lso och s kerhetsbladet som medf ljer bruksanvisningen fyllas i och skickas in till den lokala terf rs ljaren Bifoga dessutom en kopia av bladet med pumpen Skrotning av pumpen skall ske enligt g llande lagstiftning 87 900 968 01 C BRUKERVEILEDNING Sikkerhetsanvisninger for Turbomolekyl r Pumper Turbomolekylaer pumpene som er beskrevet i den f lgende Bruksanvisningen har et h yt kinetisk energiniv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor tilfelle feil ved systemet for eksempel p grunn av en kontakt mellom rotor og stator eller brudd p rotoren kan roteringsenergien bli frigitt AN ADVARSEL For unng skader p utsyret og forebygge operat rskader m installa sjonsanvisningene beskrevet i denne manaulen f lges n ye 33 87 900 968 01 C GENERELL INFORMASJON Dette utstyret er beregnet til bruk av profesjonelle brukere Brukeren bar lese denne brukerveiledningen og all annen informasjon fra Varian for utstyret tas i bruk Varian kan ikke holdes ansvarlig for hendelser som skjer p grunn av manglende oppfolging av disse instruksjonene selv delvis feilaktig bruk av utrent personell ikke autoriserte endringer av utstyret eller handlinger som p noen m te er i strid med nasjonale bestemmelser Turbo V 2K G systemet best r av en turbo molekul r pumpe for bruk i h y eller ultrah ye vakuumanlegg og en
202. t souhlasny 15 kol kov konektor dodan v robcem vyv va Turbo V 2K G se rozb hne automaticky IS VAROV N Regul tor je ji mechanicky a elektricky vybaven pro p ipojen k t to vyveve Odpojeni regul toru od vyv vy mus provadet jenom opr vn n pracovn ci firmy Varian Vacuum Technologies POZN MKA Kdy spoustite vyvevu Turbo V 2K G pln poprv ovl dac jednotka spust toto zafizeni automaticky speci ln m postupem kter chr n lo iska v v ry pied p padn m po kozen m POZVOLN ROZB H Zafizeni se pak postupn rozbih a na nejvy obr tky b hem nastaviteln doby od 10 minut do 1 hodiny Jakmile se zafizeni rozb hne na pln obr tky re im pozvoln ho rozb hu se vypne a dal starty ji prob haj norm ln POZN MKA Aby byla zachov na ochrana IP 54 mus te pou t pouze konektory dodan s t mto zafizenim Pou vejte konektory PN 969 9957 or 969 9958 pro nap jec kabel a p ipevn te jej k regul toru vhodnou p chytkou viz n sleduj c obr zek Pou vejte tento kabel se z str kou a pat i n uzemn nou z suvku abyste p ede li razu elektrick m proudem a aby byly zaru en po adavky norem ES 96 PR RU KA K POU IT Za izeni se dod v se zelenou kontrolkou kter signalizuje provozn stav Zelen kontrolka um st n na eln m panelu z kladny vyv vy Turbo V 2K G indikuje provozn stavy syst mu blikanim e bez b
203. t the Monitor Connectivity Kit P N 969 9260 The user should install it on any windows based PC with at least one RS232 port 87 900 968 01 C MoniTorr Connectivity Kit Installation Proce dure 1 Install the File VT Serial Address Configurator on PC launch VT SAC setup exe on CD Rom 2 Connect the RS232 cable between the PC serial port and the first TV 2KG serial port DO 3 Launch the VT Serial Address Configurator program 4 Set the Serial Communication as following a Baudrate 9600 b COM Port Your PC COM Port Number generally COM1 c Numeric a different address for each pump 0 1 2 31 d Click on Set the new address button 5 Close the VT Serial Address Configurator pro gram 6 Repeat all operations from the point 2 choos ing a new address for each pump 7 Install the MoniTorr File Download Program PC FileDW Setup exe on CD rom see In stalling the File Download Software paragraph 8 Connect the RS232 cable from PC to Protocol Converter 9 Connect the RS485 cable between the proto col converter and the network connector of each pump 82 TECHNICAL INFORMATION 10 Check if Baud Rate of protocol converter is fixed at 115K2 switch between 9 position and 11 Connect the power supply to protocol con verter 12 Launch the file download software 13 Select menu File Download Mode and check the following fields e Trigger 1 e Mode Number of file fi
204. taje wy czona i kolejne uruchomienia odbywaj si w normalny spos b INFORMACJA Aby utrzyma poziom zabezpieczenia IP 54 nale y stosowa tylko wy cznie konektory dostarczone razem z pomp Dla kabla zasilania nale y stosowa tylko PN 969 9957 lub 969 9958 i zamocowa kabel do kontrolera odpowiednim wspornikiem patrz niniejszy rysunek Kabel ten pod czy wraz z wtyczk do kontaktu uziemionego celem unikni cia pora e pr dem elektrycznym oraz spe nienia wymog w norm 52 INSTRUKCJA UZYTKOWANIA System jest wyposa ony w zielon diod LED pilotowan przez sygna stanu Zielona dioda led znajduj ca si na panelu przednim Turbo V 2K G wskazuje z cz stotliwo ci w asnego migania stan operacyjny systemu za wiecona na state pompa znajduje si w stanie normalnych obrot w miga powoli okres 400 ms system w stanie zbocza lub hamowania lub w stanie Stop lub w stanie Waiting for interlock miga szybko okres 200 ms stan b du Jak zatrzyma Turbo V 2K G Aby zatrzyma pompe mo na zastosowa jeden z niniejszych sposob w 4 wyjmujac konektor I O na wyposa eniu 5 przesy aj c sygna STOPU zdalnie poprzez konektor I O patrz paragraf J1 ZDALNE I O w dodatku Informacje Techniczne 6 przesy aj c sygna STOPU zdalnie poprzez interfejs szeregowy RS 232 485 patrz paragraf RS 232 485 Opis Komunikacji w dodatku Informacje Techniczne
205. ten mukaiseen asennusluokkaan tai vlijanniteluokkaan Kytke laite t m n vuoksi s hk verkkoon joka tayttaa t m n luokan vaatimukset Kayta ohessa toimitettuja liittimi taataksesi IP54 eristyksen Turbo V 2K G laitteissa on liittimet sisaantuloille ulostuloille seka sarjakytkenn lle jotka on kytkett v ulkoisiin j rjestelmiin siten ettei mihink n j nnitteen alaisena olevaan osaan p st k siksi Varmista ett Turbo V 2K G laitteeseen kytketyn laitteen eristys riitt my s yksitt isen toimintah iri n yhteydess EN 61010 1 s nn sten edellytt m ll tavalla Ks Tekniset tiedot liitett lis varusteiden asentamista varten K YTT T h n kappaleeseen on kirjattu t rkeimm t k ytt toimenpiteet Suorittakaa ennen j rjestelm n k ytt kaikki s hk ja paineilmakytkenn t Tyhji kammion mahdollisen l mmityksen aikana sis ntulolaipan l mp tila ei saa ylitt 80 C tta Pumpun toiminnan aikana roottorin l mp tila ei saa koskaan olla yli 120 C K ytt j n tulee varmistaa oikea toimintatapa pumpattavan kaasun mukaan 1 typelle ja kevyille kaasuille O argonille oletustapa Ks lis tietoja Technical Information liitteest AN VAARA Alkaa k ytt k pumppua ellei sis ntulolaippaa ole kytketty tyhjiokammioon tai pumppua suljettu sulkulaipalla lk koskeko turbopumppuun tai sen lis osiin l mmitt misen aikana Korkea l mp tila saattaa aiheuttaa henkil iden lo
206. th the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Aincerely fp LT f Sergio PIRAS Vice President and General Manager VARIAN Vacuum Technologies Note Fax or mail the Customer Request for Action see backside page to VARIAN Vacuum Technologies Torino Quality Assurance or to your nearest VARIAN representative for onward transmission lo the same address CUSTOMIER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO VARIAN VACUUM TECHNOLOGIES TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS VARIAN S p A Via F lli Varian 54 10040 Lein Torino Italy E MAIL marco marzio varianinc com COMPANY FUNCTION ADDRESS TEL N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc by VARIAN VTT XXXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc A VARIAN gt lt SIRUZIONIPEREUSO illa 1 GEBRAUCRSANCETUNG palio 5 MOPED EPER 9 INSTRUCCIONES DE USO syr ns en else 13 NER ESPRIT 17 GEBRUKSAANNHZNGEN see ee nella 21 BRUGSANVISNING Zee aa 25 BRUKSANVISNING ES e 29 BRUKERVEILEDNING are 33 KM MEET he 37 NIARCIE POE airline o a ea 41 HASZNALATI UTAS T S ran al ilaele to lo 45 INSTRUKC
207. to default 1 on command see win 146 0 to 65535 corresponding to 0 to 13107 sec default 15 0 close 1 gt open default 0 0 Serial 1 Remote default 0 0 to 65535 bit O infinite 1 0 2sec max 13107 sec default 0 0 OFF 1 ON default 0 write only in STOP 155 N Power limit Watt applied 157 RAN L Gas load type Max fore Seen water perature Water cool ing hystere sYs Pump current in Pump power in W pump current X cooling tem Twater max default 0 C min 15 max 35 default 34 default 1 pump voltage X duty cycle Driving fre quency in 80 TECHNICAL INFORMATION Admitted Values Description Pump tem perature in INN i 211 N Controller temperature n 1 Pump body temperature Controller temperature n 2 22 N Flow meter sccm reading Cycle time 0 to 999999 in minutes 0 to 9999 zeroed by the reset 0 to 999999 command QE5XXXX where XXXX are variable Stop 0 Waiting intlk 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 Bit description see the following figure 3 300 Cycle num ber zeroed by the reset command 302 Pump life in hours ze roed by the reset com mand High Power Start cycles number High Power Start tries number of last 9 7 CRC EPROM QE CRC Pa ram PA PASXXXX where XX are va
208. tocol please refers to the serial interface paragraph e Internal serial link Data Exchange is sus pended only for output data if the ProfiBus State machine is not in Data Exchange mode As a general rule unrecoverable communication The interface doesnt any scaling operation on the errors make each machine to jump to the state read written parameters It acts only as a gateway immediately following the power on state between the ProfiBus network and the pumps WAIT_PRM or SRC_ADDR controller serial interface As a consequence of this the scale and the meaning of some parame Message mapping ters depends directly to the specific model of opos Turbo Pump controller connected to the interface The communication is based on the continuous data exchange capability of the ProfiBus standard where the master sends continuously the entire PROFIBUS MESSAGE MAPPING PARAMETER BUFFER 17 BYTES OFFSET SIZE UNIT WIN BYTE BYTE RANGE DESCRIPTION SERIAL ACZ _ 1 Water Cooling Max Temperature Enter here the max temperature you foreseen for your cooling system this value will set the maximum power provided to the pump see Input Buffer Water Cooling Hysteresis Set here the hysteresys on water cooling measurement default 1 dont change if not necessary 2 1 1 99 Setpoint Hysteresis 105 Set the hysteresis on set point output see set point out paragraph 3 1 C Heather Jacket Temperature Setting 113 Specific option not available o
209. todas as informa es necess rias para garantir a seguran a do operador durante o uso da aparelhagem Informa es detalhadas s o fornecidas no ap ndice Technical Information Este manual utiliza as seguintes conven es A EEE As mensagens de perigo chamam a aten o do operador para um procedimento ou uma pr tica espec fica que se n o efectuada correctamente pode provocar graves les es pessoais IS ATEN O As mensagens de aten o s o visualizadas antes de procedimentos que se n o efectuados correctamente podem causar danos aparelhagem NOTA As notas cont m informa es importantes destacadas do texto ARMAZENAGEM Para garantir o n vel M ximo de funcionalidade e fiabilidade das bombas Turbomoleculares Varian devem ser observadas as seguintes prescri es e durante o transporte o deslocamento e a armazenagem das bombas as condi es ambientais devem ser as seguintes e temperatura de 20 C a 70 C e umidade relativa de O a 95 n o condensante e ao acionar as bombas turbomoleculares pela primeira vez o cliente deve ativ las sempre em modalidade Soft Start e o tempo m ximo de armazenagem de uma bomba turbomolecular de 10 meses a contar da data da expedi o IS ATEN O Se por uma raz o qualquer o per odo de armazenagem for superior ser necess rio enviar outra vez a bomba para o fabricante Para mais informa es contatar o representante local da Varian 1
210. tus B4 Purge Valve Status Bo Set Point Status 221 1 closed B6 Flow meter Alarm Status 212 Specific option not available on standard models B7 Not Used In order to don t overload the controller s internal serial link following precautions are taken e The parameters are written from the gateway to the controller only when their value changes e The parameters are never read back from the controller to the interface The controller s response at the write command ACK NACK etc is used to establish if the writing succeed or not 91 87 900 968 01 C Diagnostic management In addition to the ProfiBus six byte standard diag nostic the interface provides both user diagnostic and static diagnostics functions The standard diagnostic management is fully com pliant with the ProfiBus specification During the start up phase after power on the first byte in the user diagnostic area can assume val ues different from zero This byte has the following meaning e Bit O 1 controller not responds RS485 link broken e Bit 1 1 controller not identified not compati ble with the ProfiBus gateway e Bit2 1 first loop of requests not ended val ues in the input data are not fully coherent yet So if the first byte is equal to 0 the interface is working properly otherwise there is a problem Each nibble in the bytes following the interface status byte represents the status of the last at
211. ukkaantumisia IS HUOMIO V lt kolhuja heiluntaa tai kkiliikkeit turbopumpun toiminnan aikana sill laakerit voivat vahingoittua K yt pumpun ilmansy tt n ilmaa tai jalokaasua joissa ei ole p ly tai hiukkasia Erityisen aukon l pi sy tett v n paineen tulee olla alle 1 baaria yli atmosf risen paineen Pumput on varustettu aggressiivisten kaasujen pumppausta varten aukolla jonka l pi pumppuun kuljetetaan jalokaasuja typpi tai argon laakereiden suojaamiseksi katso Tekniset tiedot liite Kun pumppua k ytet n myrkyllisten radioaktiivisten kaasujen pumppaamiseen jokaiselle kaasulle sopivaa menettelytapaa lk k ytt k pumppua r j hdysherkkien kaasujen l hell Pumppu on suunniteltu kuljettamaan suuria m ri typpe argonia ja kevyit kaasuja Jos joudut pumppaamaan argonia painavampia kaasuja pyyd lis tietoja Varianin teknisest palvelusta VAARA paloherkkien tai noudattakaa 87 900 968 01 C Turbo V 2K G pumpun kaytto J rjestelm n k ynnistys Tarkista ennen j rjestelm n kaynnistysta ett l O liitin on poistettu Jos j rjestelm on kytketty I O et laitteeseen varmista ett STOP signaali on p ll ks Technical Information liitteen kappale J1 REMOTE I O K ynnist j rjestelm seuraavasti 1 Poista jos asennettu I O liitin 2 Kytke s hk p lle 3 Vie tyhjokammion paine arvoon 0 1 mbar 4 Anna Turbo V 2K G pumpulle ST
212. ump from the package Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 IS CAUTION In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Al ways use gloves or other appropriate protection NOTE Normal exposure to the environment cannot damage the Turbo V 2K G Nevertheless it Is advisable to keep it closed and sealed until it is installed in the system This will prevent the system from contamination The Turbo V 2K G package includes 17 pump with integrated controller 18 inlet screen mounted 19 this instruction manual on CD ROM 20 accessories bag 21 15 pin mating connector IP 54 for REMOTE 1 0 connec tor with all the interconnections necessary to start the pump 22 9 pin mating connector IP 54 for SERIAL connector to be used for serial connection 23 9 pin mating connector for Network MoniTorr 24 Retaining bracket to retain the power cable mounted 87 900 968 01 C INSTALLATION WARNING Cause its weight the pump must be handled by means of suit able moving and handling tools Use the suitable handling kit eyebolts screwed into the holes of the pump body LS CAUTION Do not remove the bolted cap before connecting the turbopump to the system Do not install or use the pump in an environment exposed to atmospheric agents rai
213. v r nlainen suoritus voi johtaa vakaviin henkil vaurioihin IS HUOMIO Huomio merkit varoittavat toiminnoista joiden laiminly nti voi johtaa laitteen vahingoittumiseen HUOM Huomautukset sis lt v t t rke tekstiss k sitelty tietoa VARASTOINTI Noudata seuraavia ohjeita jotta Varian turbomolekyylinen pumppu toimisi eritt in tehokkaasti ja luotettavasti e Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt e l mp tila 20 C 70 C e suhteellinen kosteus 0 95 ei tiivist v e Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja k ytt ess n sit ensimm isen kerran e Turbomolekyylisen pumpun varastointiaika on 10 kuukautta toimitusp iv st K Huomio Jos varastointiaika on jostain syyst pidempi palauttaa tehtaalle Pyyd edustajalta pumppu tulee lis tietoja paikalliselta Varian 38 K YTT OHJEET VALMISTELUT ASENNUSTA VARTEN Turbo V 2K G toimitetaan erityisess suojapakkauksessa mik li siin on mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee varoa erityisesti Turbo V 2K G putoamista tai siihen kohdistuvia iskuja tai t rin it Pakkausta ei tule j tt ymp rist n Pumpun painosta 35 kg johtuen se tulee nostaa pakkauksesta k ytt m ll kolmea 120
214. van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Varian of de Varian advanced exchange service in te schakelen zo krijgt men een ruilpomp ter vervanging van de defecte pomp OPMERKING Alvorens de pomp ter reparatie of ruil naar de fabrikant op te sturen moet de bij deze handleiding gevoegde kaart Veiligheid en Gezondheid volledig ingevuld naar het plaatselijke verkoopkantoor worden gestuurd Een kopie van deze kaart moet v r versturing bij de pomp in de verpakking worden gevoegd Mocht het systeem gesloopt worden ga dan overeenkomstig de specifieke nationale wetgeving te werk 87 900 968 01 C BRUGSANVISNING Sikkerhedsanvisninger for Molekylzre turbopumper De molekylaere turbopumper der er beskrevet i naervaerende brugsanvisning har en stor kinetisk energi der skyldes den hgje omdrejningshastighed kombineret med deres rotorers specifikke veegt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren gar i stykker kan omdrejningsenergien spredes WOT ose For at undg materielle skader samt at operatorerne kommer til skade er det strengt nodvendigt noje at overholde installeringsvejledningen denne brugsanvisning 25 87 900 968 01 C GENEREL INFORMATION Dette udstyr er beregnet til professionel anvendelse Brugeren bor l se denne brugsanvisning og anden yderligere information fra Varian for udstyre
215. vitar choques el ctricos e satisfazer os requisitos das normas CE 20 INSTRU ES PARA O USO O sistema est equipado com um LED verde comandado por um sinal de estado A luz piloto verde LD1 posicionada no painel da base do Turbo V 2K G indica atrav s da frequ ncia de intermit ncia as condi es operacionais do sistema acesa fixa a bomba funciona normalmente intermit ncia lenta per odo de aprox 400 ms o sistema est em estado de acelera o ou de paragem ou de Stop ou de waiting for interlock intermit ncia r pida per odo de aprox 200 ms condi o de erro Como parar a Turbo V 2K G Para parar a bomba poss vel utilizar um dos seguintes m todos 1 retirando o conector conjugado de I O fornecido de s rie 2 dando o comando remoto de STOP atrav s do conector I O consultar o par grafo J1 REMOTE I O no ap ndice Technical Information 3 dando um comando remoto de STOP atrav s do interface s rie RS 232 485 consultar o par grafo RS 232 485 Communication Description no ap ndice Technical Information Paragem de Emerg ncia Para parar o Turbo V 2K G em condic es de emerg ncia necess rio desligar do controller o cabo de alimentac o MANUTENCAO O Turbo V 2K G n o requer qualquer manutenc o Todas as operac es devem ser efectuadas por pessoal autorizado PERIGO Antes de executar qualquer operac o no sistema deslig lo da
216. x e la chambre vide l aide de boulons Le tableau suivant indique le nombre de boulons n cessaires et le couple de serrage conseill par Varian ISO 250 F TYPE DE COUPLE DE BRIDE COLLIER m SERRAGE NOTE La Turbo pompe V 2K G ne peut tre fix e l aide de son so cle Le syst me peut tre fix uniquement l aide de sa bride ISO 250F La fixation doit tre r alis e en conformit la norme ISO 1609 Il est n cessaire d utiliser des boulons en acier ayant une classe de r sistance minimum de 500 N mm 11 MODE D EMPLOI US ATTENTION Le Turbo V 2K G appartient la deuxi me cat gorie d installa tions ou surtension pr vue par la norme EN 61010 1 De ce fait brancher le dispositif une ligne d alimentation compatible avec cette cat gorie Utiliser les connecteurs fournis pour garantir le niveau de pro tection IP 54 Le Turbo V 2K G dispose de connecteurs pour les en tr es sorties et pour la communication en s rie qui doivent tre branch s aux circuits ext rieurs de fa on qu aucune partie sous tension ne soit accessible S assurer que l isolation du dispositif branch au Turbo V 2K G a une isolation appropri e m me en condition de panne indivi duelle selon les termes de la norme EN 61010 1 Pour l installation des accessoires en option se reporter Technical Information UTILIZATION Ce paragraphe pr sente les principales proc dures op ration nelles Avant d
217. y wej ciowe wyj ciowe i dla komunikacji szeregowej kt re musz by pod czone do obwod w zewn trznych w spos b aby adna cz znajduj ca si pod napi ciem nie mog a by dost pna Nale y upewni si e izolacja pod czonego urz dzenia do Turbo V 2K G posiada odpowiednie odizolowanie nawet w stanie pojedynczej usterki zgodnie z wymaganiami normy EN 61010 1 Aby zainstalowa opcjonalne akcesoria nale y zapozna si z Informacje Techniczne U YTKOWANIE W tym paragrafie zosta y przedstawione g wne procedury operacyjne Przed zastosowaniem systemu nale y wykona wszystkie po czenia elektryczne i pneumatyczne Podczas ewentualnego nagrzania komory pr niowej temperatura na ko nierzu nie mo e przekroczy 80 C Podczas dzia ania pompy temperatura wirnika nie mo e nigdy przekroczy 120 C Operator musi upewni sie Ze urzadzenie jest przygotowane do prawidlowego sposobu dzialania w zaleznosci od gazu do pompowania 1 dla Azotu i lekkich gaz w 0 dla Argonu tryb default W celu dodatkowych informacji nale y zapozna si z dodatkiem Informacje Techniczne AN NIEBEZPIECZE STWO Nigdy nie nale y uruchomi pompe w przypadku kiedy kolnierz wejsciowy nie jest podtaczony do komory lub nie jest zamkniety z kolnierzem zamkniecia Nie dotykac turbopompy i jej ewentualnych akcesori w podczas operacii nagrzewania Wysoka temperatura mo e spowodowa uszkodzenia ciata na os
218. zhat IS FIGYELEM Ker lje a szivatty t s t r z s t vagy durva mozgat s t zem k zben A csap gyak megs r lhetnek Haszn ljon port l s szil rd r szekt l mentes leveg t vagy k z mb s g zt a szivatty szell ztet s hez A szell z porton l v nyom snak 1 barn l kisebbnek kell lennie a l gk ri nyom s f l tt Agressz v g zok szivatty z s hoz ezek a szivatty k fel vannak szerelve egy k l nleges porttal hogy lehet v tegy k k z mb s gaz pl No Ar stabil raml s t v delmet visel szivatty sz m ra l sd M szaki inform ci f ggel k MSL Amikor a szivatty t mergez gyul kony vagy radioaktiv gazok szivattyuz s ra haszn lja k rem k vesse az egyes g zok rtalmatlan t s hoz sz ks ges elj r sokat Ne haszn lja a szivatty t robban g zok jelenl t ben A szivatty t No Ar s k nnyebb g zok nagyteljes tm ny szivatty z s hoz tervezt k Ha az Ar n l nehezebb g zokat kell szivatty znia k rem inform ci rt forduljon a Varian m szaki t mogat shoz 87 900 968 01 C A Turbo V 2K G haszn lata A rendszer elind t sa A rendszer elind t sa el tt ellen rizze hogy a B K csatlakoz ki van e h zva Ha a rendszer t voli B K hoz van csatlakoztatva ellen rizze hogy stop jel l sd M szaki inform ci f ggel k J1 T VOLI B K bekezd se adva van e A rendszer ind t s hoz k rem k vesse a k vetkez l p

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