Home

VarioMatch User Manual

Contents

1. At load resistances lower than 3 O a capacity of larger than 900 pF is required The VarioMatch match network uses a load coil to extend the capacitance range of the load capacitor without the negative side effects described above For more information see Set Up the Match for Your Load on page 5 16 Gamma Topology In addition to the L match topology AE produces match networks that use the Gamma topology Gamma topology matches allow loads of very low impedances to be matched This can be advantageous for ICP loads Some VarioMatch match network ICP units can be operated in two different configurations which allow two different load impedance ranges Other VarioMatch match networks use only Gamma topology See Chapter 3 Specifications 2 6 Product Overview and Theory 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform In configuration A Gamma topology the tune series capacitor comes first from the generator s point of view while in configuration B L match topology the load shunt capacitor comes first Plasma 3430 Figure 2 4 Gamma topology 3431 Figure 2 5 L match topology 57020080 00D Product Overview and Theory 2 7 Advanced Energy 2 8 Product Overview and Theory 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Chapter 3 Specifications This chapter lists specifications for the VarioMatch match network PHYSICAL SPECI
2. ee 5 11 Figure 5 8 Input Mains connector Y FFF FF se 5 12 Figure 5 9 Tapping of the tune coil for small capacitive load 5 20 Figure 5 10 Tapping of the tune coil for medium capacitiveload 5 21 Figure 5 11 Tapping of the tune coil for high capacitive load 5 22 Figure 5 12 Tap position for small loads FF FFY Yg b 24 Figure 5 13 Tap position for medium loads FFFF Yg b 25 Figure 5 14 Tap position for large loads VYY es 5 26 Figure 5 15 Alternate interconnector and bridge lt V eee 5 29 Figure 5 16 Disconnect the original interconnection 5 30 Figure 5 17 Attach the new interconnector 5 31 Figure 5 18 Remove the front panel Y Y es 5 32 Figure 5 19 Remove solder joints 5 33 Figure 5 20 Jumper setting forLmatchtopology eee 5 34 Figure 5 21 Jumper setting for Gamma topology eee eee eee 5 35 Figure 5 22 Location of capacitor bank with three jumpers 5 37 Figure 7 1 Models 300 1000 and 1500 coil and inductor schematic 14 turn tune coil 7 1 57020080 00D List of Figures xiii Advanced Energy Figure 7 2 Tune coil 14 turns tap 1 Load coil 3 turns tap A 7 3 Figure 7 3 Tune coil 14 turns tap 2 Load coil 3 turns tap A 7 4 Figure 7 4 Tune coil 14 turns tap
3. is reguired on the left side of the unit If your unit is water cooled you will see a W or AW after the model number on the product label 3 6 Specifications 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Physical Specifications Table Table 3 1 describes the physical specifications of the VarioMatch match network Table 3 1 Physical specifications Description Specification Mounting Directly onto the load or onto a mounting plate See Installing the VarioMatch Match Network on page 5 4 Size 375 mm x 245 mm x 150 mm 14 75 x 5 9 x 9 65 Note Additional space required for air flow and connections See Spacing Requirements on page 3 5 See also Figure 3 1 through Figure 3 4 Weight 6 5 kg 14 3 Ib Clearance See Spacing Requirements on page 3 5 See also Figure 3 1 through Figure 3 4 Connector cable specifications Match INTERFACE 15 pin subminiature D female For pinout and connector functional description see Table 4 1 on page 4 2 RF GENERATOR input 50 O N type connector 57020080 00D Specifications 3 7 Advanced Energy Table 3 1 Physical specifications Continued Description Specification PLASMA LOAD Varies by VarioMatch product PN connector PNs 69002206 69002207 69002208 6 mm brass tube fittings PNs 69000004 69000018 69000022 69000024 69000032 69000033 69000037 69000041 69000046 69000062 69
4. Physical Specifications Table on page 3 7 for your unit s internal coil specifications SETTING TUNE COIL TAPS The number of turns and available taps enables the VarioMatch match network to be flexible enough to match nearly all load systems The number of turns and available taps varies based on the model you purchased see Physical Specifications on page 3 1 The following guidelines will help to determine the optimum component values for a particular load system The match network should be configured to allow matching with the tune capacitor set between 20 and 80 of its capacitance range to avoid extreme RF stress Always try to achieve a tuning position with both capacitors in the range of 20 to 80 Increase the number of active coils if the tune capacitor is at the upper end of its tuning range greater than 80 Decrease the number of active coils if the tune capacitor is at the lower end of its tuning range less than 20 Large and highly capacitive loads require for example 4 to 6 turns on a coil with 14 turns e Medium capacity loads require for example 6 to 10 turns on a coil with 14 turns e Small area loads for example etching diodes for example 10 to 14 turns on a coil with 14 turns 5 18 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform For specific recommendations contact Global Services for a technical bulletin for y
5. on page 5 16 for information on using a CESAR generator to control the VarioMatch match network TOOLS REGUIRED TO CHANGE THE INTERCONNECTION AE supplies the following eguipment e Interconnector Bridge to hold the water tubing in place once you remove the original interconnector You will need to supply the following additional eguipment 7 mm wrench 12mm wrench 14mm wrench DISCONNECTING POWER AND RF AND REMOVING THE COVER To Disconnect Power and RF and to Remove the Cover Turn off RF from the generator Disconnect AC MAINS Disconnect RF in RF GENERATOR Disconnect RF out PLASMA LOAD Remove the top cover being careful to not damage the plug leading to the fan Uu A U N a Remove the large top cover with the fan from the VarioMatch match network by unscrewing the twelve screws on the cover Leave the small top and side covers in place b Disconnect the plug leading from top lid to the fan 5 28 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform CHANGING THE INTERCONNECTOR To Change the Interconnector 1 Locate the alternate interconnector and bridge These two pieces were attached to the unit when shipped from the factory Interconnector Bridge Figure 5 15 Alternate interconnector and bridge 2 Disconnect water and drain the unit See Disconnecting Water and Draining the VarioMatch Match Network
6. 3 turns tap A VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Figure 7 85 Tune coil 10 turns tap 8 Load coil 3 turns tap A ue VK 2 um LO OR We e SS ms E AC y d r i fy S ae 3 a y it Lb C7 Ge mU e AN LIT HU FAI PR e L7 Sc Li GC CA KC CH Lk TA 57020080 00D VarioMatch Match Network Tuning Ranges 7 85 Advanced Energy Figure 7 86 Tune coil 10 turns tap 9 Load coil 3 turns tap A 7 86 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Figure 7 87 Tune coil 10 turns tap 10 Load coil 3 turns tap A wee gene LA KEEN EE RN ATI Se d e CL Ad ee ae A CA ex GN YS PEERS o AEN a TCISD NN Cf 57020080 00D VarioMatch Match Network Tuning Ranges 7 87 Advanced Energy 7 88 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform A AC input 5 12 connecting 5 11 connector pin description 5 12 connector specifications 3 8 current specifications 3 11 3 12 3 13 freguency specifications 3 11 3 12 3 13 voltage specifications 3 11 3 12 3 13 air flow reguirements 5 2 specification 3 16 authorized returns 6 5 automatic mode first time operation 5 13 match INTERFACE 4 1 operation 5 14 auto
7. 57020080 00D VarioMatch Match Network Tuning Ranges 7 71 Advanced Energy Smith Charts AN G SOR SERS RRC 2 Dee ES dE SO Figure 7 72 VM 1500 Gamma 7 72 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform GOTT eI LTT Bene p CORONA LL TT SH EE Q enn SE e Ce ge ae SE CA Figure 7 73 VM 1500 L match 57020080 00D VarioMatch Match Network Tuning Ranges 7 73 Advanced Energy d d Ee Zeie Cys a DE C7 XD OO PERE YS n ror CU es WR Ku A Ai KH C Figure 7 74 VM 4015 Gamma 7 74 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform DELTA MATCH Schematic Lin C series wire Lout RF IN e RFOUT Cshunt yd Figure 7 75 Delta match coil and inductor schematic 57020080 00D VarioMatch Match Network Tuning Ranges 7 75 Advanced Energy Smith Chart 5 y ag wii ar a 2P na T3 ES Reeg Ha Figure 7 76 Tune coil 2 5 turns VM PN 69000082 Schematic and Smith charts are not available 7 76 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform VM 700 Schematic These units have one 10 turn tapped tune series coil and one 26 5 turn fixed coil The tapped coil has taps on ev
8. Advanced Energy Table 3 3 Electrical specifications for VM 700 series Continued Description Specification Maximum RF load current 15A Maximum RF load voltage 4000 V peak Input impedance to generator 500 Maximum load DC self bias 0 VDC to 4000 VDC voltage DC selfbias monitor voltage 0 V to 10V Runtime from start point to end 3 seconds point Tuning range To reach appropriate resistance and reactance values you may need to change load and series coil settings See Set Up the Match for Your Load on page 5 16 For details on tuning ranges possible for your unit see Chapter 7 VarioMatch Match Network Tuning Ranges VM1000 Series Table 3 2 describes the VM 1000 series electrical specifications Table 3 4 Electrical specifications for VM 1000 series Description Specification Freguency 13 56 MHz AC line voltage 100 VAC to 240 VAC single o AC line frequency 50 Hz to 60 Hz AC line current maximum 10Ato0 7A Maximum transfer power 1000 W Maximum reactive power Varies by VarioMatch product part number PN 69000023 69000115 100 000 W All other PNs 88 000 W Maximum RF load current Maximum RF load voltage Varies by part number PN 69000023 69000115 25 A All other PNs 22 A 4000 V peak Input impedance to generator 50 Q 3 12 Specifications 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Ta
9. CHANGING THE JUMPERS To Change the Jumpers 1 Remove the front panel by unscrewing the eleven screws as shown then remove the front panel Screws Figure 5 18 Remove the front panel 5 32 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform 2 Carefully remove the three solder joints on the left box as shown and remove the top of the box Solder locations Figure 5 19 Remove solder joints 57020080 00D Installation Setup and Operation 5 33 Advanced Energy 3 Move the jumpers as needed for the desired configuration see Figure 5 20 on page 5 34 and Figure 5 21 on page 5 35 Two jumpers on the left two posts for L topology Figure 5 20 Jumper setting for L match topology 5 34 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Two jumpers on the right two posts for Gamma topology 70 E dis z j Figure 5 21 Jumper setting for Gamma topology 4 Replace the top cover of the metal box carefully resoldering in place 5 Replace the front panel by replacing the eleven screws REATTACHING THE TOP COVER AND RECONNECTING POWER AND RF To Reattach the Top Cover and Reconnect Power and RF 1 Reattach the top cover a Plug in the fan b Attach the top cover using the twelve screws you removed earlier 2 Reconnect PLASMA LOAD RF GENERATOR and AC MAINS as
10. Ge ASAU mm RAT aue uet KEEN a r1 sy ELLA LL eC Figure 7 59 4 MHz Tune coil 25 turns tap 2 Load coil 4 turns tap D 7 60 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform See KH Die TONT SR Ah SNO AH ege EE deel Es EBEN HEAR SE HERR E ERO LAL Zi TH CN L1 Lit CA GN re pu s a Kc GE ss ee H Figure 7 60 4 MHz Tune coil 25 turns tap 3 Load coil 4 turns tap D 57020080 00D VarioMatch Match Network Tuning Ranges 7 61 Advanced Energy Figure 7 61 4 MHz Tune coil 25 turns tap 4 Load coil 4 turns tap D 7 62 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform LA ELE aal E CC ia i r YF OA ACC eh a ee C A CA et ene AA CN mes SS Figure 7 62 4 MHz Tune coil 25 turns tap 5 Load coil 4 turns tap D 57020080 00D VarioMatch Match Network Tuning Ranges 7 63 Advanced Energy Figure 7 63 4 MHz Tune coil 25 turns tap 6 Load coil 4 turns tap D 7 64 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform L LC iJ L7 E LJ Pr C pct TOP CECI PCR DOREM EA Figure 7 64 4 MHz Tune coil 25 turns tap 1 Load coil 4 turns tap E 57020080 00D VarioMatch Match Network Tuni
11. VarioMatch Match Network Tuning Ranges 7 21 Advanced Energy 27 MHZ UNITS ay BEES Bienes ED aes eas aea a y Co dee gt dy ZA a LR SR C2 eta d a EE EE EE S 17 By ec y dg or LAPS TIERE Wee Get REESEN e Side de ZS HD GHA Y 5 HE HN TER wee oes my y d Gs RE C ee KG e CO ct ORA e T Ge en os EE Y et eh ett es KS SOS SO SSSI SSS EE ES SICS OS SSIS SESS 4 040 LE cc Gestetner Es GEN KEE LAE Figure 7 21 27 MHz Tune coil 6 turns tap 1 57020080 00D 7 22 VarioMatch Match Network Tuning Ranges AE VarioMatch Match Network VM 1000 1500 Platform d i E LS EE GZ Figure 7 22 27 MHz Tune coil 6 turns tap 2 57020080 00D VarioMatch Match Network Tuning Ranges 7 23 Advanced Energy me uen V a KSE EC AC Ka Figure 7 23 27 MHz Tune coil 6 turns tap 3 7 24 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform NN LOX KORN LEK PELE CPLR ELL Mare Mar ite LA PL PRL LK LIL PRC 2 UT HANS head 1 a m eene Figure 7 24 27 MHz Tune coil 6 turns tap 4 57020080 00D VarioMatch Match Network Tuning Ranges 7 25 Advanced Energy LALLA gt CL Y SOS CT L3 SE Ee mA Ll E i Li Hi LA ar ae A KE 3 Figure 7 25 27 MHz Tune coil 6 turns tap 5 7 26 VarioM
12. and Operation 5 3 Advanced Energy If your unit uses a coaxial connector then wire the coaxial connector to the load using the shortest possible length of cable For power levels greater than 1 kW cable length should not exceed one meter Use a coaxial cable with high voltage capability and good thermal immunity AE recommends RG 393 U a coaxial cable with Teflon insulation Compared to conventional coaxial cable capable of operating at 80 C maximum this cable can run at up to 200 C without any damage This consideration is important as the heat generated by the losses of the connection plus the heat transferred from the load is considerable If your VarioMatch match network uses a female 6 mm multi contact high current connector or an M6 bolt connect the PLASMA LOAD connector to the load with wiring of the lowest possible impedance A flat copper strip 30 to 50 mm or more wide is much better suited for this connection than a thick wire See the Physical Specifications on page 3 1 to see which connector your unit uses SHIELDING THE RF CONNECTIONS Shield all RF connections to prevent RF radiation and to minimize safety hazards Shielding is also important to communication as excessive noise can corrupt the data packet and cause errors If you are using a copper strap arrange a good well grounded shield around the copper strap as you would with a coaxial cable to prevent RF radiation INSTALLING THE VARIOMATCH MATCH
13. connection 254 00 mm 10 00 374 00 mm 14 72 m3 HA 1 a Le O Si e 3272 Figure 3 4 VM 1000 1500 platform bottom panel 3 4 Specifications 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform 3275 Figure 3 5 VM 1000 1500 platform top panel Spacing Reguirements The following sections describe the space needed to provide room for connections and to meet cooling reguirements 57020080 00D Specifications 3 5 Advanced Energy FRONT PANEL CONNECTIONS For front panel RF Input and other connections 200 mm 7 9 required for the RF Input connector when using a straight connector 100 mm 3 9 required for the RF Input connector when using an angled connector PLASMA LOAD CONNECTION For units with the PLASMA LOAD connection on the bottom panel 200 mm 7 9 reguired for 7 16 connector when using a straight connector gt 70 mm 2 8 required for 7 16 connector when using an angled connector For units with the PLASMA LOAD connection on the rear panel 200 mm 7 9 reguired for 7 16 connector when using a straight connector 80 mm 3 1 reguired for 7 16 connector when using an angled connector to also accommodate proper airflow No spacing recommendations are available from AE for other PLASMA LOAD connections COOLING For proper airflow allow 80 mm 3 1 above the top and rear of the unit For connection to water 100 mm 3 9
14. tap C 7 57 Figure 7 57 4 MHz Tune coil 25 turns tap 6 Load coil 4 turns tap C 7 58 Figure 7 58 4 MHz Tune coil 25 turns tap 1 Load coil 4 turns tap D 7 59 Figure 7 59 4 MHz Tune coil 25 turns tap 2 Load coil 4 turns tap D 7 60 Figure 7 60 4 MHz Tune coil 25 turns tap 3 Load coil 4 turns tap D 7 61 Figure 7 61 4 MHz Tune coil 25 turns tap 4 Load coil 4 turns tap D 7 62 Figure 7 62 4 MHz Tune coil 25 turns tap 5 Load coil 4 turns tap D 7 63 Figure 7 63 4 MHz Tune coil 25 turns tap 6 Load coil 4 turns tap D 7 64 Figure 7 64 4 MHz Tune coil 25 turns tap 1 Load coil 4 turns tap E 7 65 Figure 7 65 4 MHz Tune coil 25 turns tap 2 Load coil 4 turns tap E 7 66 Figure 7 66 4 MHz Tune coil 25 turns tap 3 Load coil 4 turns tap E 7 67 Figure 7 67 4 MHz Tune coil 25 turns tap 4 Load coil 4 turns tap E 7 68 Figure 7 68 4 MHz Tune coil 25 turns tap 5 Load coil 4 turns tap E 7 69 Figure 7 69 4 MHz Tune coil 25 turns tap 6 Load coil 4 turns tap E 7 70 Figure 7 70 ICP coil and inductor schematic Gamma 7 71 Figure 7 71 ICP coil and inductor schematic L match 7 71 Figure 7 72 VM 1500 Gamma x e AER RG R GO DR ROD RR A 7 72 Figure 7 73 VM 1500 L match eau eee erm Rr wd 7 73 Figu
15. 25 turns tap 2 Load coil 4 turns tap A 7 42 Figure 7 42 4 MHz Tune coil 25 turns tap 3 Load coil 4 turns tap A 7 43 Figure 7 43 4 MHz Tune coil 25 turns tap 4 Load coil 4 turns tap A 7 44 Figure 7 44 4 MHz Tune coil 25 turns tap 5 Load coil 4 turns tap A 7 45 Figure 7 45 4 MHz Tune coil 25 turns tap 6 Load coil 4 turns tap A 7 46 Figure 7 46 4 MHz Tune coil 25 turns tap 1 Load coil 4 turns tap B 7 47 Figure 7 47 4 MHz Tune coil 25 turns tap 2 Load coil 4 turns tap B 7 48 Figure 7 48 4 MHz Tune coil 25 turns tap 3 Load coil 4 turns tap B 7 49 xiv List of Figures 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Figure 7 49 4 MHz Tune coil 25 turns tap 4 Load coil 4 turns tap B 7 50 Figure 7 50 4 MHz Tune coil 25 turns tap 5 Load coil 4 turns tap B 7 51 Figure 7 51 4 MHz Tune coil 25 turns tap 6 Load coil 4 turns tap B 7 52 Figure 7 52 4 MHz Tune coil 25 turns tap 1 Load coil 4 turns tap C 7 53 Figure 7 53 4 MHz Tune coil 25 turns tap 2 Load coil 4 turns tap C 7 54 Figure 7 54 4 MHz Tune coil 25 turns tap 3 Load coil 4 turns tap C 7 55 Figure 7 55 4 MHz Tune coil 25 turns tap 4 Load coil 4 turns tap C 7 56 Figure 7 56 4 MHz Tune coil 25 turns tap 5 Load coil 4 turns
16. 3 Load coil 3 turns tap A 7 5 Figure 7 5 Tune coil 14 turns tap 4 Load coil 3 turns tap A 7 6 Figure 7 6 Tune coil 14 turns tap 5 Load coil 3 turns tap A 7 7 Figure 7 7 Tune coil 14 turns tap 6 Load coil 3 turns tap A 7 8 Figure 7 8 Tune coil 14 turns tap 1 Load coil 3 turns tap B 7 9 Figure 7 9 Tune coil 14 turns tap 2 Load coil 3tums tapB 7 10 Figure 7 10 Tune coil 14 turns tap 3 Load coil 3 turns tap B 7 11 Figure 7 11 Tune coil 14 turns tap 4 Load coil 3 turns Iapnb 7 12 Figure 7 12 Tune coil 14 turns tap 5 Load coil 3 turns tap B 7 13 Figure 7 13 Tune coil 14 turns tap 6 Load coil 3 turns tap B 7 14 Figure 7 14 Tune coil 14 turns tap 1 Load coil 3 turns tap C 7 15 Figure 7 15 Tune coil 14 turns tap 2 Load coil 3 turns tap C 7 16 Figure 7 16 Tune coil 14 turns tap 3 Load coil 3 turns tap C 7 17 Figure 7 17 Tune coil 14 turns tap 4 Load coil 3 turns tap C 7 18 Figure 7 18 Tune coil 14 turns tap 5 Load coil 3 turns tap C 7 19 Figure 7 19 Tune coil 14 turns tap 6 Load coil 3 turns tap C 7 20 Figure 7 20 Models 1000 and 1500 coil and inductor schematic 6 turn coil 7 21 Figure 7 21 27 MHz Tune co
17. 5 guidelines safety 1 2 SEMI 1 5 icons in user manual 1 1 on unit 1 2 industry guidelines compliance with 1 5 input connector see RF input connector input impedance to generator 3 11 3 12 3 14 installation how to 5 4 reguirements 5 1 safety guidelines 1 2 tools reguired 5 2 INTERFACE 15 pin match 4 1 automatic mode 4 1 cabling reguirements 4 2 connecting 5 7 connector 3 7 4 1 grounding 4 2 interacting with CESAR generator 5 15 pin descriptions 4 2 using switches 4 7 interlock 1 6 see also limits L L match network 2 5 labels on unit 1 2 limits 1 6 load coil and capacitor in L match network 2 5 coil specifications 3 10 coil theory 2 5 definition 2 1 igniting plasma 5 16 load capacitor 2 4 load coil 2 4 load coil tap settings 5 22 set up the match 5 16 load checks troubleshooting 6 3 M MAINS see also AC input connector 3 8 5 12 manual tuning mode 5 15 marking CE 1 3 maximum load DC selfbias voltage 3 11 3 12 3 13 3 14 maximum reactive power 3 11 3 12 3 14 maximum FF load current 3 11 3 12 3 14 maximum RF load voltage 3 11 3 12 3 14 maximum transfer power 3 11 3 12 3 13 modes see tuning modes mounting 3 7 5 5 5 6 N normal operation 5 14 O operation automatic tuning mode 2 2 5 14 first time 5 12 manual tuning mode 2 2 5 15 normal operation 5 14 safety guidelines 1 2 theory of operation 2 3 overvoltage category specifications 3 17 P physical specifications 3 1 3 7
18. Load coil 3 turns tap A 7 6 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform ee A aydd 3 Lc aun uw KA c Cea ere EEN Figure 7 6 Tune coil 14 turns tap 5 Load coil 3 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 7 Advanced Energy e s HU PHA A sen i L3 Nar CH 1 1 CO Reg z A untra dt wn ua Ai E A E EE e Ch CN ae O SSE C Belt AC Ss iy o o RR EE ge TNE cs TrA CT HT NEP SS Bm en Hk CL Figure 7 7 Tune coil 14 turns tap 6 Load coil 3 turns tap A 7 8 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Figure 7 8 Tune coil 14 turns tap 1 Load coil 3 turns tap B 57020080 00D VarioMatch Match Network Tuning Ranges 7 9 Advanced Energy EL A t EH EE OA ATT x TA KK NOD AS CX CO RAO RICCA E SS KA me Sin Cane ea AN CC OC I V PAST ae EE TT E a Figure 7 9 Tune coil 14 turns tap 2 Load coil 3 turns tap B 7 10 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform eet EA mr LLEN ENG aaa HEELS SY HU ES et ss EE de a Ya DH TD EE ES JE Figure 7 10 Tune coil 14 turns tap 3 Load coil 3 turns tap B 57
19. Observe proper electrical safety precautions and observe your local safety regulations To Prepare the Unit for Moving or Storage 1 Turn the power supply off Lockout tagout all sources of input power to the VarioMatch match network DANGER RISK OF DEATH OR BODILY INJURY Disconnect and lockout tagout all sources of input power before working on this unit or anything connected to it 2 Disconnect the input power cable 5 38 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform For information to assist you in disconnecting the input power cable see Connecting AC Input Mains Power on page 5 11 Disconnect the RF input connector For information to assist you in this procedure see Connecting RF Input From a Generator on page 5 8 Disconnect the PLASMA LOAD connector For information to assist you in this procedure see Connecting to the Load on page 5 9 Disconnect the cooling hoses For information to assist you in this procedure see Connecting the Cooling Water on page 5 7 Drain the water Blow the lines out with compressed air Clean dry air CDA is preferred Once you complete the above process the VarioMatch match network is ready for moving storing or other tasks reguiring that the unit is purged of water 57020080 00D Installation Setup and Operation 5 39 Advanced Energy 5 40 Install
20. To Mount the VarioMatch Match Network 1 Ensure AC MAINS PLASMA LOAD and RF GENERATOR are all disconnected 2 If the PLASMA LOAD connector is on the bottom of the unit ensure you have an opening in the mounting plate that lines up with the connector 3 Attach the VarioMatch match network cabinet to the mounting plate with four M6 screws Connecting the Match INTERFACE Optional The 15 pin female subminiature D connector on the front panel lets you connect the VarioMatch match network to an external remote controller like the AE RMC 1 or a homemade controller or to an AE RF generator To Connect the Match INTERFACE Connect the cable between the controlling device and the INTERFACE connection on the VarioMatch match network For specific information on the interface connection including pin descriptions and communication protocols see Chapter 4 Communication Interfaces and Controls Connecting the Cooling Water A CAUTION Do not use de ionized water for cooling purposes De ionized water causes both corrosion and erosion of cooling manifolds 57020080 00D Installation Setup and Operation 5 7 Advanced Energy A CAUTION When fastening the water hose be sure the bullkhead does not rotate this could cause internal damage to the unit If your unit is not water cooled skip this section The Water In and Water Out connectors are brass hose connectors on the side panel of the VarioMatch
21. described in Installing the VarioMatch Match Network on page 5 4 57020080 00D Installation Setup and Operation 5 35 Advanced Energy Changing the Fixed Capacitor Setting Model 0415 2 MHz Units Only The VarioMatch match network Model 0415 2 MHz unit is eguipped with a circuit board containing additional fixed capacitors You can switch these capacitors in parallel to the load capacitor to increase the capacitance To Change the Capacitor Settings 1 2 Disconnect AC MAINS 3 Disconnect RF in from the RF GENERATOR 4 5 Turn off RF from the generator Disconnect RF out PLASMA LOAD Remove the top cover being careful to not damage the plug leading to the fan a Remove the large top cover with the fan from the VarioMatch match network by unscrewing the twelve screws on the cover Leave the small top and side covers in place b Disconnect the plug leading from top lid to the fan Using an appropriate wrench open or close the jumper bridge to set the desired capacitance This circuit board is located in the RF section of the VarioMatch match network on the inner side of the cabinet close to Ci oAp The following 5 36 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform table shows the additional capacitance as a conseguence of the jumper settings Figure 5 22 shows the location of the circuit board and jumpers Table 5 3 Capacit
22. e PSO acer LC HH Ze CA XC Es lt gt e ES lt j CH Sex Ce SI CU e EE DELE m Xy eS Sei Cyd UC E d e L f HH a is Sica H Figure 7 31 40 MHz Tune coil 6 turns tap 5 7 32 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Figure 7 32 40 MHz Tune coil 6 turns tap 6 VM 0415 Schematic The tune series coil has taps at taps at 10 13 16 19 22 and 25 turns These are labeled 1 through 6 in the schematic The load shunt coil has 4 turns with 5 taps labeled A B C D and E These labels are used in the Smith charts 57020080 00D VarioMatch Match Network Tuning Ranges 7 33 Advanced Energy Lin wire MEET E c d de de ze rh rh rh Figure 7 33 VM 0415 coil and inductor schematic Smith Charts 2 MHZ UNITS Lshunt The Smith charts for the 2 MHz VM 4015 show the tuning range with tune coil tap set at 6 load coil tap set at E The tune range varies by capacitance setting Table 7 3 Location of Smith chart illustrations for 2MHz VM 0415 Capacitance Smith Setting Chart 0 pF Figure 7 34 680 pF Figure 7 35 1360 pF Figure 7 36 2040 pF Figure 7 37 2720 pF Figure 7 38 3400 pF Figure 7 39 7 34 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Figure 7 34 2 MHz Tune coil 6 Load coil E 0 pF 57020080 00D VarioMatch
23. good and common ground which can result in the following RF radiation Malfunction of match controllers or other devices Electrical shock from the VarioMatch match network cabinet To Properly Ground the VarioMatch Match Network Mount the unit as described in Mounting the VarioMatch Match Network on page 5 6 RF grounding is achieved via mounting the unit to the mounting plate Note Use the GROUND connectors on the rear of the unit only if you cannot mount the VarioMatch match network as described MOUNTING THE VARIOMATCH MATCH NETWORK Note VM 69000082 see your company s internal documentation for mounting instructions Use these instructions for mounting the VarioMatch match network to a mounting plate attached to the load The mounting plate acts as ground for the VarioMatch match network There is no need to open the VarioMatch match network cover You can secure the unit to the mounting plate using the four M6 mounting threads on the bottom panel For the location of the screw holes see Unit Dimensions on page 3 1 5 6 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform When selecting the mounting hardware choose screws that will not extend into the unit cabinet more than 10 mm Brass fasteners are recommended 8Ze Mounting plate acts as ground Figure 5 1 Installing the VarioMatch match network to a mounting plate
24. losses and eventually burn away Guidelines for PLASMA LOAD Cables and Connectors The proper connection of the VarioMatch match network to the load influences operation of the whole RF system The following is important information for connecting to PLASMA LOAD There will be a high RF current flowing between the VarioMatch match network and the load The RF output PLASMA LOAD is much higher than RF input RF GENERATOR High currents are common because the real part of a load impedance is typically between 1 Q and 10 O This results in a relatively high current even at low RF power levels Due to skin effects the RF current will flow only on the surface of the conductor reaching a depth of only 10 micrometers to 20 micrometers depending on the conductor material and the freguency To reduce the conductive losses as well unwanted voltages drops across the lead always try to optimize the surface area of a lead The large RF current flowing through the lead to the load will cause losses in power as well as RF radiation For optimum results minimize the lead length and maximize the lead surface area If you don t use a coaxial cable as the PLASMA LOAD connection coaxial cable should not be used at power levels exceeding approximately 1 5 kW you must ensure adeguate RF shielding of the connection to prevent RF radiation which can cause malfunctions in nearby instrumentation and electronic eguipment 57020080 00D Installation Setup
25. match INTERFACE using a shielded cable The shield should be connected to ground at pin 1 of the D connector To avoid a ground loop which could result in erratic operation of the remote control do not connect the cable shield to any other ground in the system 57020080 00D Communication Interfaces and Controls 4 7 Advanced Energy 4 8 Communication Interfaces and Controls 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Chapter 5 Installation Setup and Operation PREPARING TO INSTALL THE VARIOMATCH MATCH NETWORK The following sections provide information that you need to understand before installing the VarioMatch match network Spacing Requirements See Physical Specifications on page 3 1 for the unit dimensions and clearance Installation Requirements Install this unit according to the following requirements AN WARNING Maintenance personnel must receive proper training before installing troubleshooting or maintaining high energy electrical equipment Potentially lethal voltages could cause death serious personal injury or damage to the equipment Ensure that all appropriate safety precautions are taken DANGER RISK OF DEATH OR BODILY INJURY Disconnect and lockout tagout all sources of input power before working on this unit or anything connected to it 57020080 00D Installation Setup and Operation 5 1 Advanced Energy COOLING REQUIREM
26. match network can operate in the following modes Automatic tune mode AE recommends automatic tune mode for standard operation In automatic tune mode a fast analog control signal measures amplitude and phase and automatically drives the capacitors to transform the impedance of the chamber to the impedance that the generator reguires Automatic tune mode reguires no user interface Manual tune mode In manual tune mode the automatic tuning feature is disabled and the capacitor positions are controlled only through the INTERFACE port Product Overview and Theory 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform THEORY OF OPERATION Figure 2 1 describes the VarioMatch match network s theory of operation Phase Magnitude Detector RF In gt lt Port analog Interface N Control 2 m re rem re pe pm pm pm vm zm vm em zm mm rm mm mm l Receptacle Filter SMPS l pas n Filter Board 45W Fan l 3297 Figure 2 1 Theory of operation Table 2 1 Theory of operation description Section Description AC In The VarioMatch match network converts 100 VAC to 240 VAC single phase to the DC voltages used in the match The 45 W SMPS switched mode power supply supplies 15 VDC and 5 VDC The cooling fan is powe
27. o RR SR RR stoke ae EN NO aC REN ees 2 1 Operating Modes iussisse xx Rex RE aoe wes AAR UU LE RE EIN RE RE 2 2 Theory of Operation iux ud emper EEN DN UR e En eae wd DRUD Pa 2 3 Boo rmn 2 4 L Match Topology imi ee RR WG S RC E Ri ww ee ac 2 5 Gamma TOBOIDOY egt ea d EE RO GDG WD REE RIF DE Ud YY ud 2 6 Chapter 3 Specifications Physical Specifications RR WR RR RG Rx ac ewe AFU ees ead ews 3 1 Unit len EEN 3 1 Spacing Requirements 3 5 Front Panel Connections ew GYR DEUED deve eR ek eR Rea 3 6 PLASMA LOAD Connection usi emo DD ERROR GR 3 6 CODING EEN 3 6 Physical Specifications Table 3 7 Electrical Specifications 33i HN pees de EE 3 10 VM 300 Series EEN 3 11 dE 3 11 VMTDUD KETTER 3 12 VM 1500 Series ix gx x RERO WD HR WR OR RENG YD Gw N 3 13 Cooling Specifications isis re REED Me Seek YE ead PRES ERO RES 3 14 Environmental Specifications 0 000 eee 3 17 57020080 00D Table of Contents vii Advanced Energy Chapter 4 Communication Interfaces and Controls 15 Pin VarioMatch Match Interface ee 4 1 INTERFACE Connector so as a DD CER DD P OA Fee O DU UD YE 4 1 Match Interface Cabling Requirements VV Y Y y 4 2 Pi Descriptions RT _ _ _ 4 2 Wiring Diagrams as ese 9 EE Ae ER E Ae E d s 4 4 Match INTERFACE Using Switches FF a 4 7 Chapter 5 Installation S
28. on page 5 38 3 Using a 12 mm wrench disconnect the compression nut on the copper tube so that the tube is loose 4 Using the 14 mm wrench unscrew the nut on the copper tube side 5 Pull the brass tube through the hole The plastic tube will stay connected 57020080 00D Installation Setup and Operation 5 29 Advanced Energy 6 Using a 7 mm wrench unscrew the interconnection from it s current position Step 4 water line Step 6 I interconnector Step 3 Figure 5 16 Disconnect the original interconnection 7 Attach the bridge by screwing it onto the bracket with two 7 mm bolts 8 Feed the brass water tube through the hole in the bridge 9 Replace the nut from the copper tube 10 Replace the compression nut from the copper tube 11 Attach the new interconnector The new interconnector attaches a On the non water supported side b On the same screw hole as the feed line from the phase magnitude detector In both places the interconnection is placed on the inner side of the screw hole You need to first disconnect the screw holding the feed line then reattach 5 30 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Step 8 Step 9 Step 11 a Step 10 New interconnector Step 11 b bridge Step Figure 5 17 Attach the new interconnector 57020080 00D Installation Setup and Operation 5 31 Advanced Energy
29. pressure specification 3 15 temperature specification 3 15 weight 3 7 iv Index 57020080 00D
30. real part of the load impedance For example lower load impedance reguires more capacitance of load capacitor which reguires more active coils The number of turns on the load coil depends on your unit For example if you unit contains a load coil with 3 tapped positions Use the position closest to the load capacitor for small loads e Use the center position for medium size loads Use the position furthest from the load capacitor for large loads For specific recommendations contact Global Services To Change the Tap Settings on the Load Coil 1 Turn off RF from the generator 2 Disconnect AC MAINS 3 Disconnect RF in from the RF GENERATOR 4 Disconnect RF out PLASMA LOAD 5 Remove the top cover being careful to not damage the plug leading to the fan a Remove the large top cover with the fan from the VarioMatch match network by unscrewing the twelve screws on the cover Leave the small top and side covers in place b Disconnect the plug leading from top lid to the fan 6 Using a flathead screwdriver unscrew the bolt from the current tap setting 7 Move the lugged tap wire to the desired coil and screw the bolt into the tab for examples see Figure 5 12 Figure 5 13 Figure 5 14 57020080 00D Installation Setup and Operation 5 23 Advanced Energy d RF GENERATOR connection Load capacitor Load coil tap position A for small loads Figure 5 12 Tap position for sma
31. tap 3 Load coil 3 turns tap A 7 80 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Figure 7 81 Tune coil 10 turns tap 4 Load coil 3 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 81 Advanced Energy oe m Sri LLL S pc er CT LET SOSH ss eg SS SS A A dee SSO A Sg den dE e eg ag SE EK BIA SS 4 051690550 CA RESO SS ERE SS eS d e Ke Ne e 2 A gt ee GN x KS ey d d Ka e ne 22 AC e y d E O y C LA i o o a A d d d Den Han GZ i ry A See OY ae LA weu ene CO Y OK Be Figure 7 82 Tune coil 10 turns tap 5 Load coil 3 turns tap A VarioMatch Match Network Tuning Ranges 57020080 00D 7 82 AE VarioMatch Match Network VM 1000 1500 Platform Figure 7 83 Tune coil 10 turns tap 6 Load coil 3 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 83 7 84 Advanced Energy d CY d gt ys gt A os SS Gei CG 2S de d Ge a date Ge 2S es SW dee PAS PAT AAP EE Beeler dd AF i E ac ez Ss TAN T3 iF FAI HE FAS LL L1 HD ne EE NS SAS XS So CS A sn SES UL a Okt Ah A ye vs Figure 7 84 Tune coil 10 turns tap 7 Load coil
32. the specified operating temperatures See Cooling Specifications on page 3 14 Ensure that exhausted air does not circulate back into the unit to become input air Install the VarioMatch match network so that the cooling fan is facing up Position the unit so that it is easy to unplug the AC input power cord unless you install another suitable disconnecting device that complies with the accessibility and other applicable requirements of EN 61010 1 Ensure proper grounding see Grounding the Unit on page 5 5 Mount the VarioMatch match network see Mounting the VarioMatch Match Network on page 5 6 GROUNDING THE UNIT AN WARNING Do not attempt to turn on power until the VarioMatch match network is grounded 57020080 00D Installation Setup and Operation 5 5 Advanced Energy A good ground connection is essential to achieve the best possible RF connection between the match network and the ground of the load The VarioMatch match network chassis must be intimately grounded to the plasma chamber The ground lead must provide a low impedance RF path If a proper RF ground is not achieved the RF current flowing through the ground leads will cause ground bouncing The RF current flowing through a poor ground connection will result into a voltage across that ground lead In this situation the load and the match network will have a different voltage potential and the ground can no longer be regarded as a
33. this manual before attempting to install and operate this unit At a minimum read and follow the safety instructions and practices documented under Safety Guidelines on page 1 2 DANGER WARNING AND CAUTION BOXES IN THE MANUAL or associated equipment Advanced Energy includes this symbol in Danger 1 This symbol represents important notes concerning potential harm to people this unit Warning and Caution boxes to identify specific levels of hazard seriousness 1027 DANGER DANGER indicates an imminently hazardous situation that if not avoided will result in death or serious injury DANGER is limited to the most extreme situations AN WARNING WARNING indicates a potentially hazardous situation that if not avoided could result in death or serious injury and or property damage 57020080 00D Safety and Product Compliance Guidelines 1 1 Advanced Energy AN CAUTION CAUTION indicates a potentially hazardous situation that if not avoided could result in minor or moderate injury and or damage to property CAUTION is also used for property damage only accidents SAFETY GUIDELINES Review the following information before attempting to install and operate the product Rules for Safe Installation and Operation Please note the following rules Do not attempt to install or operate this eguipment without proper training Ensure that this unit is properly grounded see also Grounding the Un
34. 00007 69000041 25 turns taps at 10 13 16 19 22 and 25 turns default tap setting on 4 PN 69000062 69000226 6 turns taps at every turn default tap setting on 6 PN 69000070 6 turns taps at every turn default tap setting on 2 PN 69000214 26 5 turns taps at 1 through 10 default tap setting on 3 PN 69000082 5 turns fixed PN 69002206 69002207 69002208 no tune coil on these ICP units 57020080 00D Specifications 3 9 Advanced Energy Table 3 1 Physical specifications Continued Description Specification Load coil The load coil varies by VarioMatch product part number on the number of turns the number of possible taps and the default tap setting from the factory A B or C PN 69000001 69000062 69000226 69002206 69002207 69002208 No load coil PN 69000004 69000018 69000022 69000023 69000024 69000025 69000046 69000114 69000115 69000214 69000230 69000227 69000229 69000032 69000034 69001207 69001214 2 turns 3 taps default B PN 6900003 69000036 69000037 69000080 69000082 69000116 69000228 2 turns 3 taps default C PN 69000007 69000041 4 turns 5 taps default B Topology Varies by VarioMatch product PN PN 69002206 69002207 69002208 L match or Gamma Default Gamma PN 69000001 Gamma All other PNs L match ELECTRICAL SPECIFICATIONS This section includes electrical specifications for VM 300 VM 700 VM 1000
35. 000070 69000080 69000114 690001 16 69000226 69000227 69000228 69000229 69000230 69001214 7 16 DIN socket PN 69000001 M6 bolt PNs 69000007 69000023 69000025 69000034 69000036 69000115 69000214 69001207 MC B6N female 6 mm PN 69000082 Customer supplied The connection is located on the rear side or bottom panel of the unit AC power input AC IEC 320 connector MAINS connector Coolant connectors Brass water fittings for water tubing 6 mm OD 4 mm ID 0 24 OD 0 16 ID Internal coil specifications 3 8 Specifications 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Table 3 1 Physical specifications Continued Description Tune coil Specification The tune coil varies by part number on the number of turns the number of possible taps and the default tap setting from the factory PN 69000001 2 5 turns fixed coil PN 69000036 69000116 14 turns taps at 4 6 8 10 12 14 turns default tap setting on 1 PN 69000033 69000037 69000228 14 turns taps at 4 6 8 10 12 14 turns default tap setting on 2 PN 69000032 69000080 14 turns taps at 4 6 8 10 12 14 turns default tap setting on 3 PNs 69000004 69000018 69000022 69000023 69000024 69000025 69000034 69000046 69000114 69000115 69000230 69000227 69000229 69001207 69001214 14 turns taps at 4 6 8 10 12 14 turns default tap setting on 4 PN 690
36. 0001 69000024 69000025 69000229 69001207 69001214 69002207 69002208 140 000 W PN 69000007 69000041 220 000 W Maximum RF load current Varies by VarioMatch product part number PN 69000070 69000226 20 A PN 69000062 25 A PN 69000001 69000024 69000025 69000229 69001207 69001214 69002207 69002208 35 A PN 69000007 69000041 55 A Maximum RF load voltage 4000 V peak Input impedance to generator 500 Maximum load DC self bias 0 VDC to 4000 VDC voltage DC selfbias monitor voltage 0 V to 10V Runtime from start point to end 3 seconds point Tuning range To reach appropriate resistance and reactance values you may need to change load and series coil settings See Set Up the Match for Your Load on page 5 16 For details on tuning ranges possible for your unit see Chapter 7 VarioMatch Match Network Tuning Ranges COOLING SPECIFICATIONS Table 3 6 lists the cooling specifications for the match network Table 3 7 describes the environmental and climatic specifications 3 14 Specifications 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform A CAUTION Do not use de ionized water for cooling purposes De ionized water causes both corrosion and erosion of cooling manifolds Table 3 6 Cooling specifications Description Cooling medium Minimum water flow Specification Air cooled for units that show only A af
37. 020080 00D VarioMatch Match Network Tuning Ranges 7 11 Advanced Energy am SR SO lt lt CLK SR ON Ss OKRA Ci Ge e F y lt S aL Figure 7 11 Tune coil 14 turns tap 4 Load coil 3 turns tap B 7 12 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform BE eens ES E L E R EE ee Y HS AH LL 0257 0 rh Mat A y i anan eae a ET INS CAC CO Se SA eg ja anu CA KE Figure 7 12 Tune coil 14 turns tap 5 Load coil 3 turns tap B 7 13 VarioMatch Match Network Tuning Ranges 57020080 00D Advanced Energy KC a Ge KOHN CA TAAN C CY NA SS RSS Ae dene ei Ze EE Ne ee nma a 3 Figure 7 13 Tune coil 14 turns tap 6 Load coil 3 turns tap B CA CC pee ri ia Li PAN ce A Si GO Gg meats ATA y CH e a ae SS C GC N99 SSIS LS CS 7 14 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform A ROKK KDE Pers LI LC Figure 7 14 Tune coil 14 turns tap 1 Load coil 3 turns tap C 57020080 00D VarioMatch Match Network Tuning Ranges 7 15 Advanced Energy ES LIS d s CC KAAL cht AN Ze TIS W CN o e5 Se Gs e Li RR Figure 7 15 Tune coil 14 turns tap 2 Load coil 3 turns tap C 7 16 VarioMatch Match Network Tuning Ranges
38. 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform 5 A OH E LA A3 EL Li t ri HR as a Figure 7 16 Tune coil 14 turns tap 3 Load coil 3 turns tap C 57020080 00D VarioMatch Match Network Tuning Ranges 7 17 Advanced Energy Figure 7 17 Tune coil 14 turns tap 4 Load coil 3 turns tap C 7 18 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform CHEERS Le de de ees s s YR ERI CIIM SAG ar Gs FT Figure 7 18 Tune coil 14 turns tap 5 Load coil 3 turns tap C 57020080 00D VarioMatch Match Network Tuning Ranges 7 19 Advanced Energy TH CEEL HR j D Figure 7 19 Tune coil 14 turns tap 6 Load coil 3 turns tap C 7 20 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform 6 TURN TUNE SERIES COIL Schematic n Lseries Lin copper tube Cseries wire RF IN 654321 RF OUT Lout Figure 7 20 Models 1000 and 1500 coil and inductor schematic 6 turn coil Smith Charts Table 7 2 Location of Smith chart illustrations for 6 turn tune coil Tune Coil VarioMatch Freguency E 27 MHz 40 MHz 1 Figure 7 21 Figure 7 27 2 Figure 7 22 Figure 7 28 3 Figure 7 23 Figure 7 29 4 Figure 7 24 Figure 7 30 5 Figure 7 25 Figure 7 31 6 Figure 7 26 Figure 7 32 57020080 00D
39. Ac ADVANCED E ENERGY AE VarioMatch Match Network VM 1000 1500 Platform User Manual October 2009 57020080 00D LLL Em User Manual AE VarioMatch Match Network VM 1000 1500 Platform 57020080 00D Aca E e Advanced Energy COPYRIGHT This manual and the information contained herein is the proprietary property of Advanced Energy Industries Inc No part of this manual may be reproduced or copied without the express written permission of Advanced Energy Industries Inc Any unauthorized use of this manual or its contents is strictly prohibited Copyright 2007 2009 Advanced Energy Industries Inc All Rights Reserved DISCLAIMER AND LIMITATION OF LIABILITY The information contained in this manual is subject to change by Advanced Energy Industries Inc without prior notice Advanced Energy Industries Inc makes no warranty of any kind whatsoever either expressed or implied with respect to the information contained herein Advanced Energy Industries Inc shall not be liable in damages of whatever kind as a result of the reliance on or use of the information contained herein PRODUCT USAGE STATEMENT AN WARNING Read this entire manual and all other publications pertaining to the work to be performed before you install operate or maintain this equipment Practice all plant and product safety instructions and precautions Failure to follow instructions can cause personal injury and or property damage If
40. D mun mess CAA Y ee 57020080 00D VarioMatch Match Network Tuning Ranges 7 55 Advanced Energy a ch Li e de mw wr CA Ss F SN Xe SN AC OOO oO CS CA EEN GOCH OS QN a EE EN ve at dec SS A o Figure 7 55 4 MHz Tune coil 25 turns tap 4 Load coil 4 turns tap C 7 56 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Ka OC AR cL L yW m dT KC AC Figure 7 56 4 MHz Tune coil 25 turns tap 5 Load coil 4 turns tap C mw mU YA GC a AA Che Wa RA ab e dee e E per CT dee Sri SS FH RS E ON COCINA 57020080 00D VarioMatch Match Network Tuning Ranges 7 57 Advanced Energy HITS de L7 E y re do LC uw Li a 1AN VH BU A Ka a SH KA nk un fo y f ms as Figure 7 57 4 MHz Tune coil 25 turns tap 6 Load coil 4 turns tap C 7 58 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform EL eg dh Se LI SS n CTH on SOP A et pet gO ghana SEN A dE GENEE GE ten KO wees UA a iet CEA VCI ecce an BEE Ee KL ro CA LE EC KK Figure 7 58 4 MHz Tune coil 25 turns tap 1 Load coil 4 turns tap D 57020080 00D VarioMatch Match Network Tuning Ranges 7 59 Advanced Energy See KEE CH RE ak BET IS KR Ke
41. ENTS Ensure that exhausted air does not circulate back into the unit and become input air Also ensure that all cooling requirements are within specification See Cooling Specifications on page 3 14 Tools Required for Installation AE supplies the following equipment Two AC MAINS cables Use the cable appropriate to your location Ifthe PLASMA LOAD connector on your VarioMatch match network is MC6 or 6 mm brass tube fittings AE supplies the matching plug See the Physical Specifications on page 3 1 to see which PLASMA LOAD connector your unit uses For successful installation you will need to supply the following additional eguipment Four M6 mounting screws preferably brass and an appropriate screwdriver If the PLASMA LOAD connector on your VarioMatch match network is a strap connection you need to supply the strap connector and the ground strap See the Physical Specifications on page 3 1 to see which PLASMA LOAD connector your unit uses For water cooled units Plastic hose 6 mm OD 4 mm ID 0 24 OD 0 16 ID see Connecting the Cooling Water on page 5 7 Cables see also Connector Cable specifications on page 3 3 Shielded 50 O coaxial cable for RF input from the generator RF cabling to connect the unit to a generator See Cable Reguirements on page 5 3 Communication interface cable if you will use remote control of the unit If you purchased an ICP u
42. FICATIONS Unit Dimensions Figure 3 1 through Figure 3 4 illustrate the physical dimensions The PLASMA LOAD connector can be located on either the rear panel or the bottom panel depending on your model 168 9 mm 6 65 l24 mm La 0 95 CLEIT y I CH 3 I3 3 i Em RF GENERATOR INTERFACE a NET q d 149 mm 9 9 5 87 105 5 mm 111 mm 4 15 MAINS 4 37 100 240 VAC 30 mm 1 18 t 9 on i 11 172 0 mm 3263 6 77 Figure 3 1 VM 1000 1500 platform front panel 57020080 00D Specifications 3 1 Advanced Energy i ol Be Ei ges oO b U 250 96 mm 9 88 J N z 5 z m e 3 x z KS i OO P J AN AN D d EH ie TEL 3266 131 mm I 5 16 7 Figure 3 2 VM 1000 1500 platform left side panel 3 2 Specifications 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform PLASMA LOAD uto OV e x GROUND 32 00 mm N T 22 50 mm 0 87 e 192 50 mm 3269 7 58 217 50 mm 8 56 Figure 3 3 VM 1000 1500 platform rear panel 57020080 00D Specifications 3 3 Advanced Energy Ka 244 00 mm 9 61 a 230 00 mm 9 06 m 182 00 mm 7 17 62 00 mm 2 44 14 00 mm 0 55 EN rj 1400mml l A 0 55 l Holes for mounting the unit and for ground
43. ING Leaving on the RF power after turning off the input power to the match network may damage the unit Some ICP units can be operated using either the L match or the Gamma topology which allow two different load impedance ranges By changing the capacitor s interconnection you can change the topology of the VarioMatch match network See Chapter 3 Specifications for a list of part numbers that support this See Topologies on page 2 4 for information about the L Match and Gamma topologies If your IPC VarioMatch match network supports changing between L Match and Gamma topologies The default topology as shipped from the factory is Gamma Configuration A Use the instructions in this section to change from Gamma to L match topology e The load impedance ranges for each configuration are shown in the Smith charts in the Technical Bulletin for your unit Contact Global Services to obtain the correct Technical Bulletin To change topology perform the tasks documented in the following sections Tools Required to Change the Interconnection on page 5 28 Disconnecting Power and RF and Removing the Cover on page 5 28 57020080 00D Installation Setup and Operation 5 27 Advanced Energy Changing the Interconnector on page 5 29 Changing the Jumpers on page 5 32 e Reattaching the Top Cover and Reconnecting Power and RF on page 5 35 Also see Interaction With a Cesar Generator
44. IR Before returning any product for repair and or adjustment first follow all troubleshooting procedures If after following these procedures you still have a problem or if the procedure instructs you to contact AE Global Services and discuss the problem with a representative Be prepared to give them the model number and serial number of the unit as well as the reason for the proposed return This consultation call will allow Global Services to determine if the unit must actually be returned for the problem to be corrected Such technical consultation is always available at no charge 57020080 00D Troubleshooting and Global Services 6 5 Advanced Energy 6 6 Troubleshooting and Global Services 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Chapter 7 VarioMatch Match Network Tuning Ranges This chapter shows the VarioMatch match network s tuning ranges using Smith charts The figure captions include the number of turns and tap settings for the Smith chart shown in the illustration To find the number of turns and tap settings of the load and tune coils of your unit see Physical Specifications Table on page 3 7 14 TURN TUNE SERIES COIL Schematic The tune series coil has taps at 4 6 8 10 12 and 14 turns These are labeled 1 through 6 in the schematic The load shunt coil has 3 turns labeled A B and C These labels are used in the Smith charts C series Lin Lshunt wi
45. Internal circuitry may vary i HBV l l 11 T l l l l l l G T l i Gnd 3441 l Figure 4 4 Pin 11 57020080 00D Communication Interfaces and Controls 4 5 Advanced Energy User supplied circuitry may vary Internal circuitry Gnd 3442 ge Figure 4 5 Pin 12 User supplied circuitry may vary Internal circuitry 10 kQ I Gnd 3443 Figure 4 6 Pins 13 14 4 6 Communication Interfaces and Controls 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform User supplied circuitry may vary an Wu Internal circuitry CD 4001 B NOR Gate Gnd Figure 4 7 Pin 15 4 7 KQ LED NY 3444 Match INTERFACE Using Switches To construct a simple manual control wire four normally open momentary switches for the motor drive and one on off switch for auto manual mode selection as described below Table 4 2 Match INTERFACE switch descriptions c Momentary Motor Results Connect to switch drive INTERFACE Pin Common connection of all 5 switches Ground Switch 1 motor 1 run clockwise decrease Cryne Switch 2 motor 1 run counter increase Cryne clockwise Switch 3 motor 2 run clockwise decrease Cj oad Switch 4 motor 2 run counter increase Cy oad clockwise Switch 5 on Manual Selects Manual or Auto mode off Auto Connect the switch box to the
46. Match Network Tuning Ranges 7 35 Advanced Energy CL vat re weet ane o Leg ES CASO N ks Figure 7 35 2 MHz Tune coil 6 Load coil E 680 pF 7 36 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform c S o I IIT as SORE HD L EE Ee OE yL Sener ini ae at Figure 7 36 2 MHz Tune coil 6 Load coil E 1360 pF 57020080 00D VarioMatch Match Network Tuning Ranges 7 37 Advanced Energy y DC A MEN ai Ke wa ar ere Y Y KE SE Figure 7 37 2 MHz Tune coil 6 Load coil E 2040 pF 7 38 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Pen Bm E n FH m m Ei eee yr PEN 5 wiwn fee eer A SEES SSG SSS EE fo E Fd tf TY Ct ZZ C TRES LiT gt y CC e Figure 7 38 2 MHz Tune coil 6 Load coil E 2720 pF 7 39 VarioMatch Match Network Tuning Ranges 57020080 00D Advanced Energy X e SS Su x X a See ai 4e NY SS SS SY Ge EE SC x e SN Yn g Ka Ge 2s XS SS SS Figure 7 39 2 MHz Tune coil 6 Load coil E 3400 pF 4 MHZ UNITS The Smith charts for the 4 MHz VM 4015 show the tuning range at each tune and load coil tap setting AE does not recommend varying the additional capacitance setti
47. NETWORK WARNING Maintenance personnel must receive proper training before installing troubleshooting or maintaining high energy electrical equipment Potentially lethal voltages could cause death serious personal injury or damage to the equipment Ensure that all appropriate safety precautions are taken The following sections explain how to install the unit 1 Mounting the Unit on page 5 5 gt General Mounting Instructions on page 5 5 gt Grounding the Unit on page 5 5 Mounting the VarioMatch Match Network on page 5 6 5 4 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Connecting the Match INTERFACE Optional on page 5 7 Connecting the Cooling Water on page 5 7 Connecting RF Input From a Generator on page 5 8 Connecting to the Load on page 5 9 Nn A o N Connecting AC Input Mains Power on page 5 11 Mounting the Unit GENERAL MOUNTING INSTRUCTIONS AN CAUTION Do not mount on hot tool excessive temperatures can cause components to overheat and fail When mounting the VarioMatch match network keep in mind the following Mount the VarioMatch match network as close as possible to the load leaving room to access all connectors and to open the top panel See Physical Specifications on page 3 1 for dimensions and spacing reguirements Ensure the unit will remain within
48. ages may cause serious personal injury or damage to equipment Ensure that proper safety precautions are taken External Load Checks Open Short RF Output Path There are three basic components that could impede the RF path the VarioMatch match network output connector the output cable or lead or the chamber Follow the steps below 1 Disconnect AC MAINS from both the generator and the VarioMatch match network to ensure that there is no RF power at the output of the unit 2 For the unit output connector a Remove the output cable and visually inspect the output connector for signs of arcing or heat stress b Verify an open is measured between the center conductor and outer shield c Make sure the output connector is mounted firmly to the VarioMatch match network chassis 3 For the output cable a Visually make sure there is a good connection between the output cable and end connectors on both sides of the output cable b Swap cables if possible and retry operating the VarioMatch match network 4 For the tuner and the chamber Swap the VarioMatch match network with another known good unit Also consider these questions 57020080 00D Troubleshooting and Global Services 6 3 Advanced Energy 1 Are you currently setting up a new chamber system 2 Has any work been done recently on the chamber 3 Have there been any changes in your process recently If you answered yes to any one of the previou
49. amber look for the following a Is the plasma lit If not you may have a faulty connector or too little input power Check your match process and check that the full system is properly designed and installed b Is the plasma stable that is is there a constant glow If not switch to manual tune mode and experiment to see if you can get it stable Once it is stable in manual mode look at the positions of the capacitors Minimally the capacitors should be in the tuning range of 20 to 80 ideally between 30 to 80 If the capacitors are outside this range change the coil tappings see Set Up the Match for Your Load on page 5 16 c Did the capacitors begin to move If not check if AC MAINS is properly connected then switch to manual tune mode If the capacitors move in manual tune mode but not in automatic tune mode verify that you have RF coming into the match network from the generator If not the matching motors won t move in automatic tune mode If the capacitors still do not move contact AE Global 57020080 00D Installation Setup and Operation 5 13 Advanced Energy Services see Chapter 6 Troubleshooting and Global Services d Did reflected power decrease to within specifications If not ensure the capacitors are within the tuning range of 30 to 80 e Did the motors stop moving If the motors do not stop moving ensure the capacitors are within the tuning range of 30 to 80 4 Vary the cha
50. ance due to jumper settings on circuit board Bridge Capacitance J1 J2 J3 0 pF X 680 pF z x 1360 pF X X 2040 pF X d X 2720 pF X X X 3400 pF Ji J2 J3 Figure 5 22 Location of capacitor bank with three jumpers 7 Reattach the top cover a Plug in the fan 57020080 00D Installation Setup and Operation 5 37 Advanced Energy b Attach the top cover using the twelve screws you removed in step 2 8 Reconnect PLASMA LOAD RF GENERATOR and AC MAINS as described in Installing the VarioMatch Match Network on page 5 4 DISCONNECTING WATER AND DRAINING THE VARIOMATCH MATCH NETWORK Use this procedure when you need to purge the VarioMatch match network of cooling water for maintenance moving or storing When moving or storing the unit use special care to ensure that the cooling system is properly drained If water freezes in the cooling system during storage it could damage the unit CAUTION Be sure to purge all water from the generator before shipping Failure to do so can result in damage to the unit during shipping Note You must evacuate the water from both the rack and from individual CESAR generators in the rack The following steps are listed in the order they are to be performed when preparing the unit for moving or storage Note These recommended steps are not meant to supersede your organization s safety regulations
51. and VM 1500 products 3 10 Specifications 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform VM 300 Series Table 3 2 describes the VM 300 series electrical specifications Table 3 2 Electrical specifications for VM 300 series Description Specification Freguency 13 56 MHz AC line voltage 100 VAC to 240 VAC single o AC line frequency 50 Hz to 60 Hz AC line current maximum 10Ato0 7A Maximum transfer power 300 W Maximum reactive power 88 000 W Maximum RF load current 22 A Maximum RF load voltage 4000 V peak Input impedance to generator 500 Maximum load DC self bias voltage 0 VDC to 10 VDC Runtime from start point to end point 3 seconds Tuning range To reach appropriate resistance and reactance values you may need to change load and or tune coil settings See Set Up the Match for Your Load on page 5 16 For details on tuning ranges possible for your unit see Chapter 7 VarioMatch Match Network Tuning Ranges VM 700 Series Table 3 3 describes the VM 700 series electrical specifications Table 3 3 Electrical specifications for VM 700 series Description Specification Frequency 13 56 MHz AC line voltage 100 VAC to 240 VAC single o AC line frequency 50 Hz to 60 Hz AC line current maximum 10Ato0 7A Maximum transfer power 700 W Maximum reactive power 60 000 W 57020080 00D Specifications 3 11
52. and can typically achieve a matched condition between 1 2 second and 5 seconds from the start of tuning The match network accurately and reliably tunes with RF levels as little as 190 of the maximum transfer power see Chapter 3 Specifications VarioMatch match networks are designed for operation under the demanding conditions presented by low resistance plasma loads with their resultant high RF currents All components and connections inside the network are designed to withstand very large RF currents and high current pulses 57020080 00D Product Overview and Theory 2 1 Advanced Energy A DC bias measurement circuit available on most units permits the DC self bias voltage created in the load to be monitored The bias voltage is scaled down by a factor of 1 400 if not otherwise stated to a safe convenient value The DC bias test voltage delivered by the VarioMatch match network always is positive even if the actual self bias voltage in the chamber is negative VarioMatch match networks are completely self contained and reguire no additional external components all that is reguired for operation is an AC MAINS connection No additional controller is reguired if the network is operated in conjunction with an AE RF generator manual controls for the network are incorporated in the generator itself An additional controller is necessary only if manual operation without an AE RF generator is desired OPERATING MODES The
53. anges 14 turn Tune Series Col 7 1 ee NEE IS 7 1 Smith Charte 7 2 6 turn Tune Series Coil 1 ibpEISeakedigdGosxew ew eR IRE Yy A Uog 7 21 ee NEE EE 7 21 Smith CAMS hole Sed erar bas od ciate 4 qat bemus 7 21 27 MPZ UNE RET e TEC RTL TUTTI PME E 7 22 40 mHz Units 324 454 2400 vetoes vedio FYD GU ld GOD EN eee 7 28 VNEOA T5 s ouch XR HI ee EE 7 33 EELER 7 33 Smith Charis aeu a du RD GER Ga RR AG eidcm Daub RR 7 34 rulle KT 7 34 4 MZ Dni i oe ed Y WE WDD WAG EE NE 7 40 CG CEET 7 71 ee NEE 7 71 Smith Charte 7 72 Delta Mate su yd ah YNG DL GYR okay AU IA ae en GEG 7 75 CISL erer REC ERE E ee ES 7 75 Smith Chart culos ehe Eu EB Eu EU nn AUR EA DR YNE 7 76 VMPN69000082 LY I YY RR ss 7 76 MI OO BEER 7 77 Leier 7 77 Smilli GALS ss sess ete ee ee te UO ER 7 77 57020080 00D Table of Contents ix Advanced Energy D Table of Contents 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Table 2 1 Table 2 2 Table 3 1 Table 3 2 Table 3 3 Table 3 4 Table 3 5 Table 3 6 Table 3 7 Table 3 8 Table 4 1 Table 4 2 Table 5 1 Table 5 2 Table 5 3 Table 6 1 Table 7 1 Table 7 2 Table 7 3 Table 7 4 Table 7 5 List of Tables Theory of operation description YY YY ees 2 3 Load capacitor capacitybyload F ua 2 6 Physical specifications i2 cssc ra dace eth haer a rr n RR FR AUD Re EN 3 7 Electrical specifications for VM 300 serie
54. as carefully developed this manual using research based document design principles However improvement is ongoing and the writing staff welcomes and appreciates customer feedback Please send any comments on the content organization or format of this user manual to tech writing aei com To order a manual please contact Technical Support technical support aei com 57020080 00D Advanced Energy vi 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Table of Contents Chapter 1 Safety and Product Compliance Guidelines important Safety Information 232423 sez d LD GUY A NEEN RR Rd Rs 1 1 Danger Warning and Caution Boxes in the Manual 1 1 Safety Guidelines issue RR bete RR RD GR E RU E AREE RUE bax 1 2 Rules for Safe Installation and Operation ug 1 2 Interpreting Product Labels FFY ug 1 2 Product Compliance s iov ore woes weg e ERR ERE RUE be RUE T GR ha oe 1 3 Product Certification 43 bx Rt OCURRE de Gate aca MEA E ete d qo 1 3 Safety and Compliance Directives and Standards 1 4 Electromagnetic Compatibility EMC Directives and Standards 1 4 Safety Directives and Standards a 1 4 Industry Guidelines ducts Re GOR EG DO ODRO DO 1 5 Ree te Of USE EE 1 5 Interlocks and Limits FR FF FF uag 1 6 Chapter 2 Product Overview and Theory Product Description iu eu RR RR
55. atch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Ly 17 ab REA D CA T SS KA SE YW me A O sg se Kn Figure 7 26 27 MHz Tune coil 6 turns tap 6 57020080 00D VarioMatch Match Network Tuning Ranges 7 27 Advanced Energy 40 MHZ UNITS oS de if Kj CZ dei Ze Figure 7 27 40 MHz Tune coil 6 turns tap 1 7 28 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform EH Wi A A SEA T ge eke A Oe C ERAN S ON SS TCE Pig ee Figure 7 28 40 MHz Tune coil 6 turns tap 2 57020080 00D VarioMatch Match Network Tuning Ranges 7 29 Advanced Energy m L LA ae Ak x TAY a lt y KEEN eC hh Le x SOR te E CX UA OCS SSRI I SRS so lt lt do do CAN FAU cc Sn CX oS a NE WY SO EX g COS SSCS Ee MBG CD WS OCS ee dE Ee SOS ROSSI KOR p 0595950185655 OOOO OSS ROOK OY LORE SREY Q2 enim Figure 7 29 40 MHz Tune coil 6 turns tap 3 7 30 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform KAR DA SoC Cy ed de SE Figure 7 30 40 MHz Tune coil 6 turns tap 4 57020080 00D VarioMatch Match Network Tuning Ranges 7 31 Advanced Energy CEES LEI O0 PREP KOK me pu LA ei ef asi KK CAE H KC cC CCP KA ER SE 2 Le yda e Ss NS E
56. ation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Chapter 6 Troubleshooting and Global Services This chapter contains basic troubleshooting information as well as procedures for returning a unit for repair TROUBLESHOOTING OVERVIEW Before calling AE Global Services consult the following sections and perform recommended checks and troubleshooting procedures If you are still unable to resolve faults or warnings and resume normal operation after following these checks and procedures contact AE Global Services Troubleshooting Checklists on page 6 2 Use these checklists to begin troubleshooting your unit at the system level Troubleshooting Unit Output on page 6 3 Use this advanced troubleshooting section to evaluate unit output Contacting AE Global Services on page 6 4 Use this section to look up phone numbers and addresses for AE support centers around the world You can also find warranty and return information in this section 57020080 00D Troubleshooting and Global Services 6 1 Advanced Energy TROUBLESHOOTING CHECKLISTS Use troubleshooting checklists to begin troubleshooting your unit A WARNING RISK OF DEATH OR BODILY INJURY Disconnect all sources of input power before working on this unit or anything connected to it WARNING Operating and maintenance personnel must have the correct training before setting up maintaining or troubleshoo
57. ble 3 4 Electrical specifications for VM 1000 series Continued Description Specification Maximum load DC self bias 0 VDC to 4000 VDC voltage DC selfbias monitor voltage 0 V to 10V Runtime from start point to end 3 seconds point Tuning range To reach appropriate resistance and reactance values you may need to change load and or tune coil settings See Set Up the Match for Your Load on page 5 16 For details on tuning ranges possible for your unit see Chapter 7 VarioMatch Match Network Tuning Ranges VM 1500 Series Table 3 5 describes the VM 1500 series electrical specifications Table 3 5 Electrical specifications for VM 1500 series Description Specification Frequency Varies by VarioMatch product part number PN 69000001 69000024 69000025 69000229 69001207 69001214 69002207 13 56 MHz PN 69000007 69000041 2 00 MHz or 4 00 MHz set at the factory PN 69000062 69000226 27 12 MHz PN 69000070 69002208 40 68 MHz AC line voltage 100 VAC to 240 VAC single AC line frequency 50 Hz to 60 Hz AC line current maximum 10Ato07A Maximum transfer power 1500 W 57020080 00D Specifications 3 13 Advanced Energy Table 3 5 Electrical specifications for VM 1500 series Continued Description Specification Maximum reactive power Varies by VarioMatch product part number PN 69000070 69000226 80 000 W PN 69000062 100 000 W PN 6900
58. ch Match Network Tuning Ranges 7 49 Advanced Energy LO a maen FT co Ee rre C A et A YS ATA AC Oe estat S SECH So Ch COSI SS gt d e COSS ROSS OSS LA GE wane ic a CH LC mm e n CA Figure 7 49 4 MHz Tune coil 25 turns tap 4 Load coil 4 turns tap B 7 50 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Figure 7 50 4 MHz Tune coil 25 turns tap 5 Load coil 4 turns tap B 57020080 00D VarioMatch Match Network Tuning Ranges 7 51 Advanced Energy Figure 7 51 4 MHz Tune coil 25 turns tap 6 Load coil 4 turns tap B 7 52 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform cy X L Ge e iy GEN o _ B r WR Eg UU L ym j d Geht Figure 7 52 4 MHz Tune coil 25 turns tap 1 Load coil 4 turns tap C 7 53 VarioMatch Match Network Tuning Ranges 57020080 00D Advanced Energy PAL DDR Y SE ETATS UH LM 4 me weu ean AU Lo VS Figure 7 53 4 MHz Tune coil 25 turns tap 2 Load coil 4 turns tap C 7 54 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform OMC KC e CEA CN w ce NEC Maa cb Figure 7 54 4 MHz Tune coil 25 turns tap 3 Load coil 4 turns tap C LED AR e HEB SNC AX Go AF CZ HETA
59. ch network isn t set up correctly for the load see Set Up the Match for Your Load on page 5 16 Manual Tune Mode In addition to the automatic mode all VarioMatch match network models can be controlled manually by means of an external controller This controller can be the AE RMC 1 Match Network Controller an AE Cesar RF Generator or an arrangement of five switches Manual control is useful when the load isn t Known and you must find the most suitable match Manual tune mode lets you determine whether matching is possible as configured and if the match is achieved near the limits of one or both of the variable capacitors In manual tune mode the automatic tune feature is disabled and the capacitor positions are controlled through the INTERFACE port on the VarioMatch match network When the interface signal MANUAL MODE is pulled high the capacitor positions follow the signals present on the match INTERFACE To Operate the VarioMatch Match Network in Manual Tune Mode If the VarioMatch match network is connected to a CESAR generator see Interaction With a Cesar Generator and Chapter 4 Communication Interfaces and Controls If the VarioMatch match network is connected to a set of five switches see Chapter 4 Communication Interfaces and Controls 57020080 00D Installation Setup and Operation 5 15 Advanced Energy Interaction With a Cesar Generator You can control the VarioMatch match netw
60. deguately sized copper grounding strap Note Grounding the INTERFACE port at the VarioMatch match network reduces Pin Descriptions noise interference To avoid ground loop problems you should typically ground only one end of the INTERFACE port cable Unless otherwise specified all analog signals are O V to 10 V Digital signals are referenced to ground All inputs need to be switched to ground to activate all outputs are open collector Table 4 1 VarioMatch match INTERFACE connector pin description Pin Return Name Signal Description Pin Type 1 GND GROUND Gnd Connect to the shield of the cable for example RC cable 2 lor9 DECREASE Input Connect this 15 V input to ground to turn Coad motor load counterclockwise and thus decrease C oaq Interrupt the connection to ground when the desired position for Cy oaq is reached 3 lor9 INCREASE Input Connect this 15 V input to ground to turn Choad motor load clockwise and thus increase Cj oad Interrupt the connection to ground when the desired position for Cy oaq is reached 4 lor9 DECREASE Input Connect this 15 V input to ground to turn CTune motor load counterclockwise and thus decrease Crune Interrupt the connection to ground when the desired position for Cy is reached 5 lor9 INCREASE Input Connect this 15 V input to ground to turn Crune motor load clockwise and thus increase Crune Interrupt the connection to ground when the desired position
61. e 15 pin match INTERFACE on the VarioMatch match network provides analog and digital signals for controlling and monitoring the unit This interface allows manual tune preset and monitoring functionality for a VarioMatch match network by an AE generator such as a CESAR It can also be used by an external controller Table 4 1 on page 4 2 describes each pin used in the match INTERFACE Alternatively you can control the VarioMatch match network using five switches see Match INTERFACE Using Switches on page 4 7 INTERFACE Connector The match INTERFACE connector is a 15 pin shielded female subminiature D connector see Figure 4 1 Pin 8 Pin 1 50000006 Pin 15 Pin9 1061 Figure 4 1 VarioMatch match INTERFACE connector 57020080 00D Communication Interfaces and Controls 4 1 Advanced Energy Match Interface Cabling Reguirements Connect the VarioMatch match network s 15 pin INTERFACE port to the generator with a shielded 15 wire I O cable Minimize signal losses by keeping the cable as short as possible The maximum recommended cable length between the VarioMatch match network and the controller is 10 meters 33 feet although this may vary by installation Minimize interference from adjacent electrical eguipment by terminating the EMI shield in the cable to the metal shells of the cable s connectors Additionally you must tie the chassis of the VarioMatch match network to a local earth ground through an a
62. ery turn labeled 1 through 10 in the schematic The load shunt coil has 3 turns with taps labeled A B and C Cseries Lshunt 10987654321 26 5 turns Y O RF our Cshunt Lout Figure 7 77 VM 700 coil and inductor schematic Smith Chart The Smith charts in this manual show the tuning only at tap A on the load coil Although the tuning differs for tap B and C the range would not be apparent given the resolution of the Smith charts in this manual Table 7 5 Location of Smith chart illustrations for VM 700 Tune Coil Load Coil Tap Setting Tap Setting A Figure 7 78 Figure 7 79 Figure 7 80 Figure 7 81 Figure 7 82 oc bi OJN Figure 7 83 57020080 00D VarioMatch Match Network Tuning Ranges 7 77 Advanced Energy Table 7 5 Location of Smith chart illustrations for VM 700 Tune Coil Load Coil Tap Setting Tap Setting A 7 Figure 7 84 8 Figure 7 85 9 Figure 7 86 10 Figure 7 87 Fe EAT LTEM HEH PAE Za Figure 7 78 Tune coil 10 turns tap 1 Load coil 3 turns tap A 7 78 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Figure 7 79 Tune coil 10 turns tap 2 Load coil 3 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 79 Advanced Energy LEM 5 CC SES FILM Figure 7 80 Tune coil 10 turns
63. etup and Operation Preparing to Install the VarioMatch Match Network Vvv nan 5 1 Spacing Requirements seus Eek we Pee ede LESSEE YO EYE RE GE 5 1 Installation Requirements 5 1 Cooling Requirements EEGEN 5 2 Tools Required for Installation 5 2 UNPACKING EE 5 2 Cable Requirements nuanua anaana 5 3 General Cabling Considerations for PLASMA LOAD 5 3 Shielding the RF Connections F FF eee 5 4 Installing the VarioMatch Match Network eee 5 4 Mounting the Unit coser Oy eres eet i YR EUO P ER ERR ER 5 5 General Mounting Instructions 5 5 Grounding the a MT 5 5 Mounting the VarioMatch Match Network eee 5 6 Connecting the Match INTERFACE Optional 5 7 Connecting the Cooling Water 5 7 Connecting RF Input From a Generator VV eee 5 8 Connecting to the Load EE 5 9 Connecting the VarioMatch Match Network to the Load 5 11 Connecting AC Input Mains Power 5 11 First Tire OperdllOn 2533 PERIERE eed Y i ana DD GO adders aS 5 12 Normal Operation eo a OO FUR DRDD DDO CDU OU EDR DD DYD bes 5 14 Automatic Tune Mode tk RR ARAN RR RR ER UR O Yg 5 14 Manual Tune Mode Y RR 28 GR O EGYR X REX RR ER EEG eee 5 15 Interaction With a Cesar Generator VYYF FL a 5 16 Importance or Igniting Plasma sc EELER ern bbesdeagaes 5 16 Set Up the Match for Your Load 5 16 Selecting t
64. etwork for minimum reflected power This minimum input power is approximately 1 of the maximum transfer power see Chapter 3 Specifications The magnitude amplitude detector checks the RF voltage and RF current present on the 50 O line between RF generator and VarioMatch match network and then compares this with 50 O The magnitude detector drives the load variable capacitor 5 14 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform The second sensor is the phase detector which measures the phase change compared to a perfect 50 Q resistive load This sensor drives the tune variable capacitor which is in series with the coil Both magnitude and phase information are fed to the motor drive electronics which immediately drive the electric motors in the correct direction To Operate the VarioMatch Match Network in Automatic Tune Mode With the VarioMatch match network connected to a generator connect the VarioMatch match network to AC power and it will turn on in automatic mode Note To operate the VarioMatch match network in automatic tune mode when connected to a CESAR generator refer to the CESAR user manual If the matching guality isn t acceptable and the reflected power cannot be reduced below approximately 190 of maximum transfer power the automatic mode will be unable to match properly and the motors will never stop This condition indicates that the VarioMatch mat
65. for Cg is reached 4 2 Communication Interfaces and Controls 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Table 4 1 VarioMatch match INTERFACE connector pin description Pin Return Pin GND Name GROUND Signal Type Gnd Description Reference ground for DC Bias and capacitor position signals N A Reserved 1or9 MANUAL MODE Input Connect this 15 V input to ground to set the VarioMatch match network into manual mode GND GROUND Gnd Ground connect to the cable shield 10 11 lor9 lor9 5V SUPPLY 15V SUPPLY Output Output 5 Volts DC from internal DC supply For external use Maximum current draw 100 mA 15 V DC from internal DC supply For external use Maximum current draw 100 mA 12 DC SELFBIAS MONITOR Output DC self bias test voltage Provides a test voltage to monitor the DC self bias of the plasma electrode in the vacuum chamber The output voltage is scaled down 400 1 400 V of DC bias results in 1 V output The instrument used to measure the bias voltage should have an input impedance of at least 10 kO 13 CTune POSITION MONITOR Output Series tune capacitor position signal The voltage at this output is directly proportional to the position of the capacitor Crune The minimum voltage is approximately 0 3 V representing the minimum capacity of Cre The maximum
66. g 3 7 overvoltage category 3 17 physical 3 1 3 7 PLASMA LOAD connector 3 8 pollution degree 3 17 RF input connector 3 7 runtime 3 11 3 12 3 13 3 14 size 3 7 spacing requirements 3 5 tune coil 3 9 tuning range 3 11 3 12 3 13 3 14 water contaminates 3 16 water flow 3 15 water pressure 3 15 water temperature 3 15 weight 3 7 standards 1 4 symbols in user manual 1 1 on unit 1 2 T theory of operation 2 3 topology 2 4 2 5 2 6 3 10 troubleshooting checklists 6 2 checks with power off 6 2 checks with power on 6 2 contacting customer support 6 4 overview 6 1 system level 6 2 unit output 6 3 troubleshooting procedures external load checks 6 3 open short RF output path 6 3 tune coil and capacitor in L match network 2 5 coil specifications 3 9 coil theory 2 5 tune capacitor 2 4 tune coil 2 4 tune coil tap setting 5 18 tuning elements 2 4 tuning modes automatic 5 14 automatic mode automatic mode for first time operation 5 13 controlling with match INTERFACE 4 1 manual 5 15 manual mode tuning range 3 11 3 12 3 13 3 14 U unit icons and symbols used 1 2 unit output troubleshooting 6 3 unpacking 5 2 user manual symbols and icons used 1 1 57020080 00D Index iii Advanced Energy V voltage AC input line specifications 3 11 3 12 3 13 W warranty authorized returns 6 5 water connecting 5 7 connectors 3 8 contaminants specification 3 16 flow specification 3 15 hose specificatinos 5 2
67. gure 2 1 shows a typical VarioMatch L match network circuit Tune Coil 50 Ohms FY Y YN y RF Generator Load Tune Capacitor Impedance Load Coil Plasma ma a V Figure 2 3 VarioMatch L match network circuit In principle the L match network is a good choice when the load impedance is not known and must be determined by experimentation If the match network uses inductors and capacitors with very wide tuning range nearly any impedance can be properly matched The tune coil is connected in series with the wiring to the load The inductance of the wire connecting the match network to the load must be considered to be a part of the tune coil Because of this ensure that this wiring is as short as possible and low inductance Short connection leads will help to reduce EMI The VarioMatch match network must be well grounded to the load 57020080 00D Product Overview and Theory 2 5 Advanced Energy The major practical problem of the L match network is the need for very large tuning capacitors when matching low impedances a typical situation with plasma chambers The following table provides an idea of the load capacitor s capacity The load capacitor must provide for different load resistances Table 2 2 Load capacitor capacity by load Rioad Load capacitor 0 50 2335 pF 1 0 0 1640 pF 2 0 Q 1150 pF 3 00 929 pF 4 00 796 pF 5 00 704 pF 6 0 0 635 pF 7 00 581 pF 8 0 0 537 pF
68. gure 5 10 Tapping of the tune coil for medium capacitive load 57020080 00D Installation Setup and Operation 5 21 Advanced Energy Tune coil tap position for high capacitive load PLASMA LOAD Figure 5 11 Tapping of the tune coil for high capacitive load 9 Reattach the top cover a Plug in the fan b Attach the top cover using the twelve screws you removed in step 2 10 Reconnect PLASMA LOAD RF GENERATOR and AC MAINS as described in Installing the VarioMatch Match Network on page 5 4 Selecting the Correct Tap Setting for the Load Coil See Physical Specifications Table on page 3 7 for your unit s internal coil specifications The other device in the match network that affects the range of the match capability is the load capacitor Depending upon the load resistance the real part of the load impedance this load capacitor needs to be more or less capacitive A small tapped coil at the input of the VarioMatch match network enables the effective value of the load capacitor to be increased to several times its actual value 5 22 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform By changing the tap position on this coil you can adjust the match range for the size of the load The more coils that are active between the tap and the load capacitor the higher the resulting capacitance The ideal position of the tap on the load coil depends on the
69. he Correct Tap Setting for the Tune Coil 5 18 Setting Tune Coil Taps 5 18 Selecting the Correct Tap Setting for the Load Coil 5 22 Changing the Configuration Between the L match and the Gamma Topology 5 27 Tools Required to Change the Interconnection 5 28 Disconnecting Power and RF and Removing the Cover 5 28 Changing the Interconnector VYY RY Yu 5 29 ChangingtheJumpers Y FIL RI ee 5 32 viii Table of Contents 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Reattaching the Top Cover and Reconnecting Power and RF 5 35 Changing the Fixed Capacitor Setting Model 0415 2 MHz Units Only 5 36 Disconnecting Water and Draining the VarioMatch Match Network 5 38 Chapter 6 Troubleshooting and Global Services Troubleshooting Overview 6 1 Troubleshooting Checklists eer Poveda wked dee done acm Dao cR decides 6 2 Checks With the Power OH 6 2 Checks With the AC Power On 6 2 Troubleshooting Unit Output Y GG KSE e RP REDEERREEDRR E 6 3 External Load Checks Open Short RF Output Path 6 3 Contacting AE Global Services 4r BREESE DR Ra RYN EE RG RO RR RR 6 4 Advanced Energy World Headquarters 24 x 7 Technical Support 6 4 Returning Units Tor Repair isis o VER REN NEE Un ee ee eee ee ENEE SEN ee KA EN 6 5 Chapter 7 VarioMatch Match Network Tuning R
70. ibility EMC and safety directives and standards and industry guidelines Note This device must be installed and used only in compliance with the directives and standards listed in addition to EN 60204 IEC 60204 and applicable reguirements Note This eguipment must be installed and used in accordance with the Conditions of Use described in this manual If this eguipment is expanded modified or installed into a larger system the user is responsible to guarantee the compliance of the overall system If this eguipment is used with external components the user must ensure that the Safety and EMC reguirements are not violated ELECTROMAGNETIC COMPATIBILITY EMC DIRECTIVES AND STANDARDS 89 336 EEC EC Council directive on the approximation of the laws of the Member States relating to electromagnetic compatibility EMC Directive EN 55011 Limits and methods of measurement of radio disturbance characteristics of industrial scientific medical ISM radio frequency equipment Class A Group 2 CISPR 11 EN 61000 6 2 Electromagnetic Compatibility generic immunity standard industrial 47 CFR Part 18 Code of Federal Regulations Limits and methods of measurement of radio interference characteristics of industrial scientific and medical equipment SAFETY DIRECTIVES AND STANDARDS 2006 95 EC EC Council directive on the harmonization of the laws of the Member States relating to electrical equipment designed for use with
71. il 6 turns tap 1 FF Y Y Y Y ug 7 22 Figure 7 22 27 MHz Tune coil 6 turns tap 2 es 7 23 Figure 7 23 27 MHz Tune coil 6 turns tap 3 Y YY uu 7 24 Figure 7 24 27 MHz Tune coil 6 turns tap 4 es 7 25 Figure 7 25 27 MHz Tune coil 6 turns tap 5 es 7 26 Figure 7 26 27 MHz Tune coil 6 turns tap 6 YY uu 7 27 Figure 7 27 40 MHz Tune coil 6 turns tap 1 FFY ee 7 28 Figure 7 28 40 MHz Tune coil 6 turns tap 2 FFY YY YY 7 29 Figure 7 29 40 MHz Tune coil 6 turns tap 3 es 7 30 Figure 7 30 40 MHz Tune coil 6 turns tap 4 es 7 31 Figure 7 31 40 MHz Tune coil 6 turns tap 5 FFF ee 7 32 Figure 7 32 40 MHz Tune coil 6 turns app 7 33 Figure 7 33 VM 0415 coil and inductor schematic llle 7 34 Figure 7 34 2 MHz Tune coil 6 Load coil E O0 pF Y Y YY YY Yg 7 35 Figure 7 35 2 MHz Tune coil 6 Load coil E 680 pF 7 36 Figure 7 36 2 MHz Tune coil 6 Load coil E i G0ont anann 7 37 Figure 7 37 2 MHz Tune coil 6 Load coil E 2040pF Yg 7 38 Figure 7 38 2 MHz Tune coil 6 Load coil E Zoo0ont Y Yg 7 39 Figure 7 39 2 MHz Tune coil 6 Load coil E 3400pF Y Yg 7 40 Figure 7 40 4 MHz Tune coil 25 turns tap 1 Load coil 4 turns tap A 7 41 Figure 7 41 4 MHz Tune coil
72. in certain voltage limits LVD Low Voltage Directive IEC EN 61010 1 Safety and Product Compliance Guidelines 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Safety reguirements for electrical eguipment for measurement control and laboratory use INDUSTRY GUIDELINES SEMI S2 0706 Environmental Health and Safety Guidelines for Semiconductor Manufacturing Eguipment Conditions of Use To comply with the stated directives and standards you must meet the following conditions of use Before making any other connection to this device either connect the unit to ground through mounting to a grounded tool or connect the secondary Protective Earth ground terminal to a local earth ground terminal with a copper wire that is sized according to the applicable reguirements Install and operate this device only in accordance with the listed safety guidelines and all other applicable directives and standards specific to your process and application Install and operate this device in an overvoltage category II installation only Install and operate this device only with an RF generator which is installed in an overvoltage category II or better environment Install and operate this device only in a pollution degree 2 or better environment which means an indoor location such as a computer room office or factory floor where only nonconductive pollution occurs during operation Occasionally condensation ca
73. it on page 5 5 Ensure that all cables are properly connected Verify that input line voltage and current capacity are within specifications before turning on the power supplies see Electrical Specifications on page 3 10 Use proper electrostatic discharge ESD precautions Always be careful around this eguipment Interpreting Product Labels The following labels may appear on your unit Safety and Product Compliance Guidelines 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform CE label Protective Earth Ground Further information found in this guide High voltage PRODUCT COMPLIANCE The following sections include information about unit compliance and certification including the conditions of use reguired to be in compliance with the standards and directives Product Certification Certain options of this product may be certified by CE Marking Self declaration assessed by AE Corporate Compliance EMC measurements Verified by the AE Corporate Compliance Lab and or an accredited third party lab For more information refer to the Certificate or Letter of Conformity US or Declaration of Conformity EU accompanying the product 57020080 00D Safety and Product Compliance Guidelines 1 3 Advanced Energy Safety and Compliance Directives and Standards Certain options of this unit have been tested for and comply with the following electromagnetic compat
74. le 3 8 describe the environmental specifications of the VarioMatch match network HO Noncondensing no formation of ice Temperature Relative Humidity Air Pressure Operating 5 C to 40 C 5 to 85 ole 1 78 kPa to 106 kPa 41 F to 1049F 3 1 g m to 25 g m 788 mbar to 1060 mbar Equivalent altitude 2000 m to 500 m 6562 ft to 1640 ft Storage 25 C to 55 C 5 to 95 78 kPa to 106 kPa 13 F to 131 F 1 g m to 29 g m 788 mbar to 1060 mbar Equivalent altitude 2000 m to 500 m 6562 ft to 1640 ft Transportation 25 C to 70 C 959p Note 2 65 6 kPa to 106 kPa 13 F to 158 F 60 g m Note 3 656 mbar to 1060 mbar Equivalent altitude 3500 m to 500 m 11480 ft to 1640 ft Note 2 Maximum relative humidity when the unit temperature slowly increases or when the unit temperature directly increases from 25 C to 30 C Note 3 Maximum absolute humidity when the unit temperature directly decreases from 70 C to 15 C Table 3 8 Environmental specifications Description Specification Overvoltage Category II Pollution degree 2 57020080 00D Specifications 3 17 Advanced Energy 3 18 Specifications 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Chapter 4 Communication Interfaces and Controls This chapter describes the VarioMatch match network s communication interface 15 PIN VARIOMATCH MATCH INTERFACE Th
75. ll loads 5 24 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform wad lt RF GENERATOR connection Load capacitor Load coil tap position B for medium loads Figure 5 13 Tap position for medium loads 57020080 00D Installation Setup and Operation 5 25 Advanced Energy lt RF GENERATOR connection d Load capacitor Load coil tap position C for large loads Figure 5 14 Tap position for large loads 8 Reattach the top cover a Plug in the fan b Attach the top cover using the twelve screws you removed in step 2 9 Reconnect PLASMA LOAD RF GENERATOR and AC MAINS as described in Installing the VarioMatch Match Network on page 5 4 5 26 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Changing the Configuration Between the L match and the Gamma Topology WARNING Maintenance personnel must receive proper training before installing troubleshooting or maintaining high energy electrical equipment Potentially lethal voltages could cause death serious personal injury or damage to the equipment Ensure that all appropriate safety precautions are taken DANGER RISK OF DEATH OR BODILY INJURY Disconnect and lockout tagout all sources of input power before working on this unit or anything connected to it AN WARN
76. match network The VarioMatch match network includes the water fitting see Figure 5 2 for plastic hoses with 6 mm OD 4 mm ID 0 24 OD 0 16 ID The VarioMatch match network water cooling system does not include water solenoid water flow meter or humidity sensor You must take external measures to protect the unit and the environment To Connect Cooling Water 1 Install the user supplied water lines to WATER IN and WATER OUT See the SERTO documentation for instructions on properly connecting the water lines to the water fitting 2 Ensure you meet all cooling requirements see Cooling Requirements on page 5 2 3 Leak check the water connections Figure 5 2 Water fitting for plastic hose with 6 mm OD 4 mm ID 0 24 OD 0 16 ID Connecting RF Input From a Generator Connect the user supplied coaxial cable from the generator s RF output to the RF GENERATOR connector on the match network The RF GENERATOR connector is a 50 O N type connector Figure 5 3 shows the RF GENERATOR connector and Table 5 1 describes the input connector pins 5 8 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform 3280 Figure 5 3 N type connector Table 5 1 RF input connector pin descriptions Pin Description Center RF input Outer Ground Connecting to the Load Note VM 69000082 The RF output connector is customer supplied See your compan
77. matic tuning mode C cables see also connectors guidelines 5 3 match INTERFACE 4 2 requirements 5 3 RF input 5 2 specifications 3 7 VarioMatch host port reguirements 4 2 CE marking 1 3 certification 1 3 CESAR generator connecting 4 1 5 16 interacting 5 15 interaction 4 1 5 15 clearance 3 7 climatic specifications 3 17 coil load 2 4 2 5 3 10 specifications 3 8 3 9 3 10 tune 2 4 2 5 compliance directives and standards 1 4 unit 1 3 conditions of use 1 5 connecting AC input 5 11 Index CESAR generator 4 1 cooling water 5 7 ground 5 5 match INTERFACE 5 7 PLASMA LOAD 5 9 RF input from generator 5 8 to CESAR generator 5 16 to the load 5 11 connectors AC input 3 8 5 11 5 12 coolant 3 8 for strap connection 5 2 INTERFACE 3 7 4 1 INTERFACE using switches 4 7 PLASMA LOAD 3 8 5 2 5 9 RF input 5 8 RF GENERATOR 3 7 specifications 3 7 cooling requirements 5 2 specifications 3 14 current AC input line specifications 3 11 3 12 3 13 customer support contacting 6 4 D DC selfbias monitor voltage 3 12 3 13 3 14 description general 2 1 dimensions 3 7 directives 1 4 E electrical specifications 3 10 electromagnetic compatability EMC directives and standards 1 4 environmental specifications 3 15 3 17 F first time operation 5 12 frequency specifications 3 11 3 12 3 13 57020080 00D Index i Advanced Energy G Gamma topology 2 6 general description 2 1 ground 4 2 5
78. mber conditions according to your process requirements and verify that the VarioMatch match network can cover the required load impedance range NORMAL OPERATION The VarioMatch Match Network operates in the following modes Automatic Tune Mode on page 5 14 Manual Tune Mode on page 5 15 When connected to the AC power MAINS the VarioMatch match network will immediately turn on in the automatic tune mode To manually tune the capacitors use a match controller or an AE Cesar RF generator see Interaction With a Cesar Generator on page 5 16 To allow easy incorporation of the VarioMatch match network into most any load system the unit does not use an on off switch To turn on the unit connect the VarioMatch match network to the AC MAINS connector Use the AC MAINS cable appropriate for your installation 100 V to 240 V at 50 Hz to 60 Hz Also read the information in Importance of Igniting Plasma on page 5 16 Automatic Tune Mode AE recommends using automatic tune mode for normal operation In automatic tune mode the VarioMatch match network controls the impedance functions internally Automatic tune mode requires no user interface Whenever the VarioMatch match network detects RF power the unit automatically moves the capacitors to optimum positions and minimizes the reflected power A minimum RF input power is necessary to allow the electronic circuit to work properly and accurately and to automatically tune the n
79. nce of the load to 50 O to avoid reflected power and to ensure that the generator s full power is delivered to the load The VarioMatch match network provides rapid accurate and reliable impedance matching across a defined load range Most VarioMatch match networks use a basic L type match topology This configuration allows a very wide tuning range The VarioMatch match network matches a load to an RF power generator with its nominal output impedance of 50 O The load is typically a plasma chamber or CO gt laser system Most VarioMatch match networks are optimized for capacitively coupled plasma and CO laser loads VarioMatch match networks have an excellent ability to match even low impedances real part Typical applications include CVD PVD sputtering RIE and CO laser excitation Some VarioMatch match networks ICP options have been optimized for inductive loads Employing vacuum variable capacitors for tuning ensures greater resistance to high voltage breakdown which often occurs with air gap capacitors and large RF current carrying capability up to a 67 A rating In addition the vacuum variable capacitors permit a much finer tuning resolution allowing faster and more accurate matching than air gap capacitors and resulting in the lowest possible reflected power levels To achieve the guickest and most reliable matching VarioMatch match networks use phase and magnitude detection This is faster than trial and error matching
80. nect the Mains FIRST TIME OPERATION AN WARNING Maintenance personnel must receive proper training before installing troubleshooting or maintaining high energy electrical equipment Potentially lethal voltages could cause death serious personal injury or damage to the equipment Ensure that all appropriate safety precautions are taken 5 12 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform ANN DANGER RISK OF DEATH OR BODILY INJURY Disconnect and lockout tagout all sources of input power before working on this unit or anything connected to it WARNING Leaving on the RF power after turning off the input power to the match network may damage the unit AE recommends that you operate the unit in automatic mode for first time operation To Operate the VarioMatch match network 1 Turn on the system by connecting AC MAINS 2 Turn on the RF generator and adjust it to 100 W A substantial amount of RF power is necessary for proper operation of the automatic detection circuitry and the control circuitry within the VarioMatch match network Allow 5 to 10 seconds for the unit to tune automatically If you are testing the unit with a dummy load use the minimum power to start the minimum amount of power to ensure operation is 25 W 3 Check to see that you have a correct and appropriate response from your load For example if you are using a plasma ch
81. ng Table 7 4 Location of Smith for 4 MHz VM 0415 Tune Coil Load Coil Tap Setting Tap Setting A B C D E 1 Figure 7 40 Figure 7 46 Figure 7 52 Figure 7 58 Figure 7 64 2 Figure 7 41 Figure 7 47 Figure 7 53 Figure 7 59 Figure 7 65 7 40 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Table 7 4 Location of Smith for 4 MHz VM 0415 Tune Coil Load Coil Tap Setting Tap Setting A B C D E 3 Figure 7 42 Figure 7 48 Figure 7 54 Figure 7 60 Figure 7 66 4 Figure 7 43 Figure 7 49 Figure 7 55 Figure 7 61 Figure 7 67 5 Figure 7 44 Figure 7 50 Figure 7 56 Figure 7 62 Figure 7 68 6 Figure 7 45 Figure 7 51 Figure 7 57 Figure 7 63 Figure 7 69 av rt GC Wi SA KA CC ah KC OK A KN CA SAN mm AO ECT A AY OM KEREN ENKE KA SS r ss ss i MM LLTD A esau E e SOS OS eee KA VER GH Figure 7 40 4 MHz Tune coil 25 turns tap 1 Load coil 4 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 41 Advanced Energy Figure 7 41 4 MHz Tune coil 25 turns tap 2 Load coil 4 turns tap A 7 42 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform ml H n LI ine ua Ch VC me EA SEN Figure 7 42 4 MHz Tune coil 25 turns tap 3 Load coil 4 turns
82. ng Ranges 7 65 Advanced Energy i FEN CO ens E utl met H S N Dry LCS Si KK pe P Cr AA GI ai Figure 7 65 4 MHz Tune coil 25 turns tap 2 Load coil 4 turns tap E 7 66 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform 57020080 00D VarioMatch Match Network Tuning Ranges 7 67 Advanced Energy LU Er ne HOW d if H 1 Je Li L7 LI F wee OG XLI ME e COOC uen uan WN EE LT T Ce LLLA lt 3 mw PAA H Su Figure 7 67 4 MHz Tune coil 25 turns tap 4 Load coil 4 turns tap E 7 68 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform yW SE iA ie d AER a aus cro A GA AA Figure 7 68 4 MHz Tune coil 25 turns tap 5 Load coil 4 turns tap E 57020080 00D VarioMatch Match Network Tuning Ranges 7 69 Advanced Energy s Ae DA fy BEE CL A LT fe LE TES DH HE LI NA FREU D ETE FH HY 7 70 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform ICP Schematics Lin C series wire RF OUT C shunt Figure 7 70 ICP coil and inductor schematic Gamma Lin C series wire RF OUT C shunt Figure 7 71 ICP coil and inductor schematic L match
83. nit you must supply the tune coil See the Physical Specifications on page 3 1 to see if your unit is ICP Unpacking Unpack and inspect the unit carefully looking for obvious physical damage If no damage is apparent proceed with the installation If you do see signs of shipping damage contact Advanced Energy and the carrier immediately see Contacting AE Global Services on page 6 4 Save the shipping container for submitting necessary claims to the carrier 5 2 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Cable Requirements GENERAL CABLING CONSIDERATIONS FOR PLASMA LOAD The main objective of an RF delivery system is to provide as much of the generator s output power to the load as possible However losses occur in the coaxial cable the match network and in the lead between the match network and load These losses should be kept as low as possible Guidelines to Minimize Losses Use the following guidelines to minimize losses Keep RF cabling between matching network and load as short as possible Ensure proper shielding of all RF leads Ensure a proper RF return path ground Remember that RF can only run on the surface but not through material e All RF conductive parts should consist of silver plated copper electrolytic copper aluminium or stainless steel Do not use regular steel because it is a bad RF conductor It will cause high
84. nsist of Variable load capacitor Variable tune capacitor Load coil Tune coil Tapped or replacable coils are used to produce the impedance range desired TOPOLOGIES The VarioMatch match network uses one of the following topologies L match topology some ICP units and most non ICP units Gamma topology most ICP units and some non ICP units If you purchased an ICP unit see Chapter 3 Specifications to see the topology for your unit 2 4 Product Overview and Theory 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform L Match Topology Figure 2 1 shows a basic L match network circuit 50 Ohms RF Generator Load Series Tune Coil Impedance Plasma Shunt Load Capacitor 3260 Figure 2 2 L match network circuit The L match network received its name because of the configuration of the capacitor and coil used The L match network is simple and reguires only two tuning elements a series or tune coil and a shunt or load capacitor In practice a guality variable coil cannot be economically constructed because a sliding tap to the coil cannot withstand a high RF current The typical 5 A RF rating for a highly variable coil isn t suitable for plasma loads with their high associated RF currents As a result of these limitations the traditional L match network is modified by the installation of a variable capacitor connected in series with a fixed or tapped coil Fi
85. opper strap Attach the plug to the MC6 PLASMA LOAD output connector Attach the other end of the cable or copper strap to the load wv For units with 6 mm brass fittings AE supplies the brass ferrule and compression nut for this fitting Attach the SERTO compression nut and ferrule directly to the user supplied coil See the SERTO documentation for instructions on properly connecting the plug Attach the plug to the 6 mm brass PLASMA LOAD output connector Connecting AC Input Mains Power A DANGER RISK OF DEATH OR BODILY INJURY Disconnect and lockout tagout all sources of input power before working on this unit or anything connected to it 57020080 00D Installation Setup and Operation 5 11 Advanced Energy The AC input Mains connector is an IEC 320 connector Figure 5 8 shows the input power connector and Table 5 2 describes each pin eae 3 3279 Figure 5 8 Input Mains connector Table 5 2 Input connector pin description Pin Description 1 Phase or neutral if pin 2 is phase 2 Neutral or phase if pin 1 is neutral 3 Ground To Connect the AC Input Power Connect the VarioMatch match network to the power mains by connecting the AC MAINS cord with your input power source see Chapter 3 Specifications for the input voltage for your unit Note The VarioMatch match network does not contain an on off power switch To turn off the unit you must completely discon
86. ork in either manual mode or automatic mode using a Cesar generator When the VarioMatch match network is connected to a Cesar generator via the MATCHING interface you can control the VarioMatch match network using either of the following two methods Front Panel Display The front panel display on the CESAR generator will show the position of the capacitors the mode automatic or manual the measured DC bias and whether the match network is active or not It also allows you to change the mode automatic or manual via buttons and to move the capacitors manually The information of the match network is shown on the Cesar front panel as soon as the Cesar generator detects a connection to the match INTERFACE Host Port You can use the Cesar generator Host Port to control the VarioMatch match network See the Cesar generator user manual for additional information Importance of Igniting Plasma A matching optimization can be done only when the load is consuming energy meaning that there exists a resistive part to which all the energy is transferred Purely reactive components do not dissipate any energy When the load is plasma this means you need to ignite the plasma After the plasma ignites it is then possible to optimize the components in the match network for the best tuning If while experimenting with the match the plasma does not ignite the match components cannot be optimized because there is no load in which to dissi
87. our model To Change the Tap Settings on the Tune Coil Un A U N e Turn off RF from the generator Disconnect AC MAINS Disconnect RF in from the RF GENERATOR Disconnect RF out to PLASMA LOAD Remove the top cover being careful to not damage the plug leading to the fan a Remove the large top cover with the fan from the VarioMatch match network by unscrewing the twelve screws on the cover Leave the small top and side covers in place b Disconnect the plug leading from top lid to the fan Using a 7 mm wrench unscrew the tap from its current position Tabs are silver soldered to the coil The metal interconnect ribbon is attached to the tab of the selected turn using a threaded bar and two bolts Move the tap setting to the desired turn on the coil for examples see Figure 5 9 through Figure 5 11 It is possible that you will also need to move the other end of the ribbon to a new position so the ribbon will reach the chosen tap 57020080 00D Installation Setup and Operation 5 19 Advanced Energy 8 Using the wrench screw the tap to the selected turn on the coil Tune coil tap position for small capacitive load PLASMA LOAD Figure 5 9 Tapping of the tune coil for small capacitive load 5 20 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Tune coil tap position for medium capacitive load PLASMA LOAD Fi
88. pate the RF energy SET UP THE MATCH FOR YOUR LOAD See Chapter 7 VarioMatch Match Network Tuning Ranges to check the tune range for your VarioMatch match network 5 16 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform A WARNING Maintenance personnel must receive proper training before installing troubleshooting or maintaining high energy electrical equipment Potentially lethal voltages could cause death serious personal injury or damage to the equipment Ensure that all appropriate safety precautions are taken A DANGER RISK OF DEATH OR BODILY INJURY Disconnect and lockout tagout all sources of input power before working on this unit or anything connected to it A WARNING Leaving on the RF power after turning off the input power to the match network may damage the unit The ability of the VarioMatch match network to properly match your load will be determined by two major match components The variable capacitors The variable capacitors are determined by the VarioMatch match network model you purchased The capacitors use motors to match the load e The coils and the number of turns on the coils The number of turns on the coil is determined by the part number of the VarioMatch match network model you purchased see Physical Specifications Table on page 3 7 The following sections describe the two coils and describe how to select the tap
89. pin descriptions AC input connector 5 12 match INTERFACE 4 2 plasma see load PLASMA LOAD connector 3 8 5 2 5 9 connector and strap 5 2 pollution degree specifications 3 17 product certification 1 3 compliance 1 3 R returns authorized 6 5 RF input connector connecting from generator 5 8 from generator 5 8 pin descriptions 5 9 specifications 3 7 ii Index 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform RF input cabling specifications 5 2 RF shielding 5 4 runtime from startpoint to endpoint 3 11 3 12 3 13 3 14 S safety conditions of use 1 5 directives and standards 1 4 guidelines 1 2 rules for installation 1 2 rules for operation 1 2 SEMI guidelines compliance with 1 5 size 3 7 spacing requirements 3 5 5 1 specifications AC input line current 3 11 3 12 3 13 AC input line frequency 3 11 3 12 3 13 AC input line voltage 3 11 3 12 3 13 AC input power connector 3 8 air flow 3 16 clearance 3 7 climatic 3 17 coil 3 8 connector and cable 3 7 coolant connectors 3 8 cooling 3 14 DC selfbias monitor voltage 3 12 3 13 3 14 electrical 3 10 environmental 3 15 3 17 frequency 3 11 3 12 3 13 input impedance to generator 3 11 3 12 3 14 load coil 3 10 maximum load DC selfbias voltage 3 11 3 12 3 13 3 14 maximum reactive power 3 11 3 12 3 14 maximum RF load current 3 11 3 12 3 14 maximum RF load voltage 3 11 3 12 3 14 maximum transfer power 3 11 3 12 3 13 mountin
90. re c A O RFIN O S Tes 65432 1 WA Cane NEN Cuun Lout Tu Figure 7 1 Models 300 1000 and 1500 coil and inductor schematic 14 turn tune coil 57020080 00D VarioMatch Match Network Tuning Ranges 7 1 Advanced Energy Smith Charts Table 7 1 Location of Smith chart illustrations for 14 turn tune coil Tune Coil Load Coil Tap Setting Tap Setting A B C 1 Figure 7 2 Figure 7 8 Figure 7 14 2 Figure 7 3 Figure 7 9 Figure 7 15 3 Figure 7 4 Figure 7 10 Figure 7 16 4 Figure 7 5 Figure 7 11 Figure 7 17 5 Figure 7 6 Figure 7 12 Figure 7 18 6 Figure 7 7 Figure 7 13 Figure 7 19 7 2 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform DAT RE X EAT CTS JE TTA S dea dr Ge Figure 7 2 Tune coil 14 turns tap 1 Load coil 3 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 3 Advanced Energy Figure 7 3 Tune coil 14 turns tap 2 Load coil 3 turns tap A 7 4 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform ween CYH Figure 7 4 Tune coil 14 turns tap 3 Load coil 3 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 5 Advanced Energy fyd EHE MM LIH HH LH HH Sch GG mos DER gi sd Sege We RRE rs SZ Figure 7 5 Tune coil 14 turns tap 4
91. re 7 74 VM 4015 Gamma 7 74 Figure 7 75 Delta match coil and inductor schematic 7 75 Figure 7 76 Tune coil 2 5 tUrnS Ter sis despegue DR YG EAR ea E 7 76 Figure 7 77 VM 700 coil and inductor schematic V ug 7 77 Figure 7 78 Tune coil 10 turns tap 1 Load coil 3 turns tap A 7 78 Figure 7 79 Tune coil 10 turns tap 2 Load coil 3 turns tap A 7 79 Figure 7 80 Tune coil 10 turns tap 3 Load coil 3 turns tap A 7 80 Figure 7 81 Tune coil 10 turns tap 4 Load coil 3 turns tap A 7 81 Figure 7 82 Tune coil 10 turns tap 5 Load coil 3 turns tap A 7 82 Figure 7 83 Tune coil 10 turns tap 6 Load coil 3 turns tap A 7 83 Figure 7 84 Tune coil 10 turns tap 7 Load coil 3 turns tap A 7 84 Figure 7 85 Tune coil 10 turns tap 8 Load coil 3 turns tap A 7 85 Figure 7 86 Tune coil 10 turns tap 9 Load coil 3 turns tap A 7 86 Figure 7 87 Tune coil 10 turns tap 10 Load coil 3 turns tap A 7 87 57020080 00D 1 xv Advanced Energy 1 xvi 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Chapter 1 Safety and Product Compliance Guidelines IMPORTANT SAFETY INFORMATION To ensure safe installation and operation of the Advanced Energy VarioMatch match network read and understand
92. red from the 15 V supply Phase Magnitude The RF power enters the VarioMatch match network via the RF Detector GENERATOR connector mounted directly on the Phase Magnitude detector module The Phase Magnitude module provides the phase and magnitude signals to the Motor Control section The magnitude signal controls the load capacitor while the phase signal controls the tune capacitor 57020080 00D Product Overview and Theory 2 3 Advanced Energy Table 2 1 Theory of operation description Section Description Motor Control The Motor Control section generates the signals needed to drive the capacitor motors using the phase and magnitude signals and provides for the manual control interface The motors are DC motors and use potentiometers to provide feedback as to the capacitor positions To keep the capacitors and the feedback potentiometers from reaching their mechanical limits the motors automatically reverse directions before the mechanical limits are reached DC Bias DC Bias voltage feedback is provided by the DC bias PCB and the motor driver control board The DC bias board provides the voltage divider whereas the motor driver board buffers and rectifies the DC bias voltage so that the DC bias voltage at the interface port is always positive Load and Tune The VarioMatch match network uses either the L match topology or Gamma topology see Topologies on page 2 4 The tuning elements may co
93. s 3 11 Electrical specifications for VM 700 series i 3 11 Electrical specifications for VM 1000 serieS 3 12 Electrical specifications for VM 1500 SerieS 3 13 Cooling specifications cx es cece caries sadness be eee ewes Y E EA PUE 3 15 Climatic specifications per EN50178 VFYY eee 3 17 Environmental specifications 3 17 VarioMatch match INTERFACE connector pin description 4 2 Match INTERFACE switch descriptions 4 7 RF input connector pin descriptions lille 5 9 Input connector pin description VV ee 5 12 Capacitance due to jumper settings on circuit board 5 37 AE Global Services contact information eens 6 4 Location of Smith chart illustrations for 14 turn tune coil 7 2 Location of Smith chart illustrations for 6 turn tune coil 7 21 Location of Smith chart illustrations for 2 MHz VM 0415 7 34 Location of Smith for 4 MHz VM OAI 7 40 Location of Smith chart illustrations for VM 700 7 77 57020080 00D List of Tables xi Advanced Energy xii List of Tables 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform List of Figures Figure 2 1 Theory of Operation EEN sos ee beeveavds ev dee Yeeeah aes ds 2 3 Figure 2 2 L match network circui
94. s for the coils gt Selecting the Correct Tap Setting for the Tune Coil on page 5 18 Selecting the Correct Tap Setting for the Load Coil on page 5 22 If you purchased an ICP unit The ICP units have no main tune coil Some units have a shunt load coil See Physical Specifications Table on page 3 7 for a listing of tune and load coil specifications by part number 57020080 00D Installation Setup and Operation 5 17 Advanced Energy e You can configure some ICP units to use either the Gamma or the L match topology See Changing the Configuration Between the L match and the Gamma Topology on page 5 27 If you purchased a unit with 2 MHz frequency you can change additional fixed capacitors See Changing the Fixed Capacitor Setting Model 0415 2 MHz Units Only on page 5 36 Selecting the Correct Tap Setting for the Tune Coil The VarioMatch match network is eguipped with a tune coil This design enables the taps to be effective for large RF currents The transformation step is determined mostly by the tune coil represented by the tune capacitor in series with the coil To compensate and correct the phase for optimum matching guality a load capacitor and coil are also used Both tuning elements interact somewhat and are used together to obtain the best possible match Depending on your unit you may be able to set taps to match your load see Setting Tune Coil Taps on page 5 18 See
95. s guestions the unit is probably working properly and it may be reacting to an external load condition You may want to consult your process engineer or system manufacturer to troubleshoot chamber related issues CONTACTING AE GLOBAL SERVICES Please contact AE Global Services if you have guestions or problems that cannot be resolved by working through the provided troubleshooting procedures When you call Global Services make sure to have the unit serial number and part number These numbers are available on unit labels Advanced Energy World Headquarters 24 x 7 Technical Support Table 6 1 AE Global Services contact information Office Contact AE World Headguarters Phone 24 hrs day 7 days week 800 446 9167 or 1625 Sharp Point Drive 1 970 221 0108 Fort Collins CO 80525 USA Fax M F 7 00 am 5 30 pm MST 1 970 407 5981 Email technical support aei com We will respond to email by the next business day For Aera flow product support call 800 MFC AERA 800 632 2372 For Sekidenko thermal product support contact thermalapplications aei com If you would prefer to contact a local or regional sales or service office visit the Advanced Energy web site for current contact information http www advanced energy com and click on Sales amp Support 6 4 Troubleshooting and Global Services 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform RETURNING UNITS FOR REPA
96. t 2 5 Figure 2 3 VarioMatch L match network circuit ee 2 5 Figure 2 4 Gamma topology issus ua lu DR sabe eer GR 3G RACE REG 2 7 Figure 2 5 L match topology sisse esee eee en KENE DUR RO OW RR 2 7 Figure 3 1 VM 1000 1500 platform front panel VV Y Y ug 3 1 Figure 3 2 VM 1000 1500 platform left side panel Y eee eee 3 2 Figure 3 3 VM 1000 1500 platform rear panel VVY FF uu 3 3 Figure 3 4 VM 1000 1500 platform bottom panel Y a 3 4 Figure 3 5 VM 1000 1500 platform top panel YVY FY ug 3 5 Figure 4 1 VarioMatch match INTERFACE connector 4 1 Figure 4 2 Pins 2 3 4 5 8 aortu recata renn inni ia teeta 4 4 Figure 4 3 Pin 10 HF HR aus EE ENEE 4 5 Figure 4 4 PIn ENNER 4 5 Figure 4 5 NCMO Y RY PF RR EE 4 6 Figuie4 G PINS 13 T 4423 UR Gy change ean ead DUR AR OU BE OS Bae 4 6 Figure M PIN E EECH 4 7 Figure 5 1 Installing the VarioMatch match network to a mounting plate 5 7 Figure 5 2 Water fitting for plastic hose with 6 mm OD 4 mm ID 0 24 OD 0 16 ID 5 8 Figure 5 3 N type connector ces GRY ERE C EE ERE EREERST DNE OD UE ER 5 9 Figure 5 4 7 16 DIN female connector YFYF FF ee 5 10 Figure 5 5 MEG connector 2 ee GY GG UR Y doi e dom s YO 5 10 Figure 5 6 MC6 plug a RR te XO ERC ER ERR RU RIA UR RN ean A EROR RR 5 10 Figure 5 7 6 mm brass tube fitting
97. tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 43 Advanced Energy dy ELF ig We ed Go A aU ame vr enau A KE AA Ai RY CYH GA CL SE e ELE AXE D ee e Figure 7 43 4 MHz Tune coil 25 turns tap 4 Load coil 4 turns tap A 7 44 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform ag SE Se Ss ae ct SS CEA 2 Oeo O SY C Les RY ORS LPR LORS PF DRS HE ones CERES Figure 7 44 4 MHz Tune coil 25 turns tap 5 Load coil 4 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 45 Advanced Energy ca IT Ce ay MN ST FfD SOX OSS FD O ss CS t LL LETTER CA ry Figure 7 45 4 MHz Tune coil 25 turns tap 6 Load coil 4 turns tap A 7 46 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Figure 7 46 4 MHz Tune coil 25 turns tap 1 Load coil 4 turns tap B 57020080 00D VarioMatch Match Network Tuning Ranges 7 47 Advanced Energy Ee eg eege E EE e a TARE Ss Cae Sc CD Ss E Figure 7 47 4 MHz Tune coil 25 turns tap 2 Load coil 4 turns tap B 7 48 VarioMatch Match Network Tuning Ranges 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Figure 7 48 4 MHz Tune coil 25 turns tap 3 Load coil 4 turns tap B 57020080 00D VarioMat
98. ter the model name or Air and Water cooled for units that show W or AW after the model name 1 Ipm 0 26 gpm Water pressure Cooling water temperature 0 5 bar 7 25 psi differential as required to achieve minimum flow rate Maximum water pressure 4 bar 58 psi maximum inlet not recommended for operation 20 C to 35 C Cooling water temperature must always be higher than ambient temperature to avoid condensation 57020080 00D Specifications 3 15 Advanced Energy Table 3 6 Cooling specifications Continued Description Specification Contaminates AE recommends the following specifications for the water used to cool the Navigator match network pH between 7 and 9 total chlorine lt 20 ppm total nitrate lt 10 ppm total sulfate lt 100 ppm total dissolved solids 250 ppm total hardness expressed as calcium carbonate equivalent maximum 250 ppm e 250 ppm specific resistivity of 2500 O cm or higher at 259C total dissolved solids TDS as estimated by the following TDS x 640 000 specific resistivity in O cm Note Do not use deionized water for cooling purposes in order to prevent corrosion and erosion of cooling manifolds Minimum air flow 120 m h 3 16 Specifications 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform ENVIRONMENTAL SPECIFICATIONS Table 3 7 Climatic specifications per EN50178 Table 3 7 and Tab
99. the equipment is used in a manner not specified by the manufacturer the protection provided by the equipment may be impaired All personnel who work with or who are exposed to this equipment must take precautions to protect themselves against serious or possibly fatal bodily injury Advanced Energy Industries Inc AE provides information on its products and associated hazards but it assumes no responsibility for the after sale operation of the equipment or the safety practices of the owner or user NEVER DEFEAT INTERLOCKS OR GROUNDS iv 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform TRADEMARKS A ADVANCED isa registered trademark of Advanced Energy Industries IC ENERGY Inc Advanced Energy is a registered trademark of Advanced Energy Industries Inc Cesar is a registered trademark of Advanced Energy Industries Inc Dressler is a registered trademark of Advanced Energy Industries Inc SERTO is a registered trademark of SERTO Ltd Siemens is a registered trademark of Siemens AG Smith The Smith chart shown is produced under a copyright license from Analog Instruments Company New Providence New Jersey 07974 VarioMatch is a trademark of Advanced Energy Industries Inc Windows NT is a registered trademark of the Microsoft Corporation Windows is a registered trademark of the Microsoft Corporation CUSTOMER FEEDBACK Advanced Energy s technical writing staff h
100. ting high energy electrical equipment Potentially lethal voltages may cause serious personal injury or damage to equipment Ensure that proper safety precautions are taken Checks With the Power Off With Power Off Complete the Following Checks 1 Ensure the power to the unit is off 2 Check for visible damage to the unit cables and connectors 3 Ensure all unit connectors are installed correctly and are fastened tightly 4 Ensure ground connections are adequate and secure Checks With the AC Power On After you have performed checks with the unit power off follow this checklist With Power On Complete the Following Checks 1 Follow the procedures for first time operation See First Time Operation on page 5 12 2 Ensure that the proper power is being supplied to the unit s input power connection See Electrical Specifications on page 3 10 for reguirements 6 2 Troubleshooting and Global Services 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform TROUBLESHOOTING UNIT OUTPUT Use extreme caution as this section involves troubleshooting the output of the unit A WARNING RISK OF DEATH OR BODILY INJURY Disconnect all sources of input power before working on this unit or anything connected to it AN WARNING Operating and maintenance personnel must have the correct training before setting up maintaining or troubleshooting high energy electrical equipment Potentially lethal volt
101. uses temporary conductivity when the device is not operating Operate this device under the ambient temperature and water specifications declared in the specification To prevent against condensation install and operate this device with an external water solenoid valve so that water flow is interrupted when the device is not operating Use only shielded cables on the remote control INTERFACE port connector Install this device so that the output power connection is inaccessible to the user Dispose of this product as directed by applicable laws and regulations 57020080 00D Safety and Product Compliance Guidelines 1 5 Advanced Energy INTERLOCKS AND LIMITS A WARNING Advanced Energy products only include interlocks when required by product specification Interlocks in AE products are not intended to meet or satisfy safety requirements Where interlocks exist you must still meet and satisfy safety requirements The presence of interlocks does notimply operator protection The VarioMatch match network does not have an interlock Ensure that you meed your local safety standards Safety and Product Compliance Guidelines 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Chapter 2 Product Overview and Theory This chapter describes the AE VarioMatch Match Network VM 1000 1500 Platform including its theory of operation PRODUCT DESCRIPTION A match network transforms the impeda
102. voltage is approximately 9 7 V representing the maximum capacity of CTune 57020080 00D Communication Interfaces and Controls 4 3 Advanced Energy Table 4 1 VarioMatch match INTERFACE connector pin description Pin Return Name Signal Description Pin Type 14 6 Choad Output Shunt load capacitor position signal POSITION ee MONITOR The voltage at this output is directly proportional to the position of the capacitor Ci oaq The minimum voltage is approximately 0 3 V representing the minimum capacity of Choad The maximum voltage is approximately 9 7 V representing the maximum capacity of Choad 15 lor9 MATCHING Output This open collector output is pulled low when ACTIVITY the VarioMatch match network is active the STATUS motors are running and floats when the matching is done the motors are not running 30 V maximum 20 mA maximum Wiring Diagrams User supplied circuitry may vary Internal circuitry AEN Ke CD4011B NAND Gate SC 10kQ messas a SS Gnd 3439 Figure 4 2 Pins 2 3 4 5 8 4 4 Communication Interfaces and Controls 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform User supplied circuitry may vary Internal circuitry l i 5 V l l l 10 T l l l l l l G T l l I Gnd 3440 l Figure 4 3 Pin 10 User supplied circuitry
103. y s internal documentation for information The VarioMatch match network uses one of the following RF Output PLASMA LOAD connectors located on the rear side or bottom panel of your unit See the Physical Specifications on page 3 1 to see which connector your unit uses 57020080 00D Installation Setup and Operation 5 9 Advanced Energy 7 16 DIN socket Figure 5 4 on page 5 10 MC6 Figure 5 5 and Figure 5 6 on page 5 10 6mm brass tube fitting Figure 5 7 on page 5 11 3281 Figure 5 4 7 16 DIN female connector Figure 5 5 MC6 connector 19 5 mm 0 77 23 5 mm 0 93 3278 51 5 mm 2 03 Figure 5 6 MC6 plug gg 5 10 Installation Setup and Operation 57020080 00D AE VarioMatch Match Network VM 1000 1500 Platform Figure 5 7 6 mm brass tube fitting CONNECTING THE VARIOMATCH MATCH NETWORK TO THE LOAD To Connect the VarioMatch Match Network to the Load 1 Review the cabling reguirements in Cable Reguirements on page 5 3 2 Locate the PLASMA LOAD connector or opening on the bottom or side of your unit For units with 7 16 DIN socket Connect one end of a user supplied coaxial cable to the PLASMA LOAD output connector on the match network Attach the other end of the coaxial cable to the load wv For units with MC6 connector Attach the AE supplied MC6 plug to one end of a user supplied cable or c

Download Pdf Manuals

Related Search

Related Contents

Philips DVP3100V User Guide Manual  JVC HD-58DS8DDU User's Manual  Samsung DVD-R160 User's Manual  広報しまもと平成26年1月15日号全面（PDF：5.6MB）  A LEADER IN MARINE PRODUCT INNOVATION SINCE  Integra LZ1025  ACR Electronics ResQMate Y1-03-0240A User's Manual  IAN 96137 IAN 96137  

Copyright © All rights reserved. Failed to retrieve file