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PZ214E User Manual E-517 Digital Piezo Controller

1. cesseeeseeeeeeeseetseetseesseeeseeeseeees 30 3 5 How to Customize the System eeecseeeeceeeeeeeeeseeseeeeeneeeeeenes 30 351 Set System Paramete S ciinei aa tia cteeameceetiaaieces 31 352 Configure Axes and Channels aueseesseeesrreieeerrssrrrniserrraernreceeereaars 33 353 Galibration Seins neniet iianee ee aE E O E EAEE EES 38 354 Select Command Set Version ccccccceceeeeeeeeeeeeeeeeeeeeeeeeteeneaeeees 44 30 Updates A a a aaa aa aaa ataa sculls 45 3 6 1 Software Updates 20 0 0 cc ccecececcece cece ee ceceneceeeeeeetesecaeaeeeeeeeeeesetseaeess 45 3 62 Firmware Update 22 0 0 ecececceccececeeeeeeeeceeeeeeeeeeesesecnueaeeeeeeeeeesensnaeees 46 System Description 48 4 1 Basic EIOMONtS cece ceccccccceccaeeeeseeeeeeeceseeseaseceeeesesseeaeaeseeeseeseeaaes 48 42 Accessible Items and Their Identifiers ceeeeeeeeeeeeeeeeees 50 43 Control Value Generation ccecceeeeeeeeeee cece eeeeeeeeeeeeeeneeeeeeeeeeeess 53 43 1 Overview and Signal Path 0 ceeceeeeeeeeeeeeeeenneeeeeeeeeeeeeneeeeeeeaes 53 432 Control Value Generation in ONLINE Mode cccceeceeeee eee eeees 54 433 Drift Compensation 0 cccccccceceeceeceeeeeeeeeeeneaeeeeeeeeeeseeetneeeeeeeeeteees 56 44 On Target R adiNg i os cee aeoe aaa Nan bo EnA Sunt utente comietn eee recat 57 Communication 58 5 14 Interfaces Available nnnnnnnnnnnnnnnerererrrrrrrrrr
2. ccccceseeseececeeeeeeesaeeeseeeeeaeanees 119 102 COMMANG SUMVey beiicicheg ski tneadeneavsesteahsditoadbbbaetainntiedantacateadenthh anaes 120 10 2 1 E 517 GCS Commands Alphabetical Survey cccceeee 120 10 22 E 517 GCS Commands Survey by Function s 124 10 3 Command Reference alphabetical ceeeeeeeeeeeeeeeeeeeeeeeneaes 131 104 Error COES i aa aer dae cd tek red id ae Senedd Gade 234 Controller Parameters 250 11 1 Parameter Handling ccc cifs8 82 xicseutes ten del ceieseacetesdasaideratdeeecaeteacsteds 250 112 Parameter OVErVieW ccccccccccccecccececseeeceseuceseuuseuueceuuaesueueeeuaeeanees 252 Troubleshooting 258 Customer Service 263 Old Equipment Disposal 264 Technical Data 265 15 1 SPeCitICAtiONnSs wisi wav nied E a tot tins ould 265 152 PiN ASSIQHING MIS c c5 i ac gesetesieeck ches actu dete detabhawie ice ies FAE ek setes 267 15 2 1 Digital In OUt SOCK eee cece erent ee danae tates aada aAA 267 15 22 IRS2232 S0CKCtHts eciaceccartias ds epateead Baie Aare hs a aa 267 15 2 3 Main GONNECIOR sre iieee ns ere nad Se oe ates ot cock oles ace E deen 268 Introduction 1 Www pi ws Piezo Nano Positioning PI Introduction m Low Noise 24 bit D A Converter m Sample Rate 25 kHz m TCP IP USB IEEE 488 and RS 232 Interfaces m 6 Digit Display for Voltage and Position m 1 amp 3 Channel Versions m Wave Generator with Programmable Trigger l O m Module for E 500 Piezo C
3. Parameter ID Command Item Type Max Data Parameter Notes hexadecimal Level Con No Type Description for write cerned of access Items 0x0E000900 0 System 1 INT Pulse width us for all trigger output 10 20 Up to 150 Us 0x0E000B03 3 System 1 INT Number of sensor channels 0x0E000B04 3 System 1 INT Number of piezo channels 0x0E000B05 3 System 1 INT Number of trigger outputs 0x0E000D00 0 System 1 INT LCD brightness 10 31 0x0E000D01 0 System 1 INT LCD contrast 5 31 0x11000400 0 System 1 INT RS232 Baudrate 0x11000600 0 System 1 CHAR Ethernet IP address 0x11000700 0 System 1 CHAR Ethernet IP mask 0x11000800 0 System 1 INT Ethernet IP configuration 0x11000900 0 System 1 INT GPIB address 0x11000B00 2 System 1 CHAR Ethernet IP MAC address 0x12000001 2 System 1 INT GPIB enable 0x13000003 0 Wave 3 INT Wave generator Generator cycles 0x13000004 3 System 1 INT Max Wave Points 0x13000109 0 Wave 3 INT Wave generator Generator table rate 0x1300010A 3 System 1 INT Number of wave tables 0X1300010B 0 Wave 3 FLOAT Wave offset Generator 0x13000201 3 Wave Table 3 INT Max Wave Points of table i 0x16000000 0 System 1 INT Table rate Www pi ws E 517 PZ214E Release 1 0 0 Page 256 PI Controller Parameters Piezo Nano Positioning Parameter ID Command Item Type Max Data Parameter Notes hexadecimal Level Con No Type Description for write cerned of access Items 0x16000100 3 System 1 INT
4. In closed loop operation servo ON the given offset is interpreted as position value In open loop operation servo OFF the offset corresponds to a piezo voltage value E 517 PZ214E Release 1 0 0 Page 228 GCS Commands Piezo Nano Positioning PI www pi ws WOS Get Wave Generator Output Offset Description Reads the current value of the offset which is added to the wave generator output For more information see also Wave Generator p 84 Format WOS lt WaveGenID gt Arguments lt WaveGenID gt is the wave generator identifier Response lt WaveGenID gt lt Offset gt LF where lt Offset gt is the current wave generator output offset In closed loop operation servo ON the offset is interpreted as position value In open loop operation servo OFF the offset corresponds to a piezo voltage value Notes The offset read by WOS is the Wave Offset parameter value in volatile memory ID 0x1300010b This value results either from settings made with WOS p 228 WAV p 209 SPA p 185 or SEP p 183 or from internal calculation during the wave generator output see WOS for details WPA Save Parameters To Non Volatile Memory Description Write the currently valid value of a parameter of a given item from volatile memory RAM to non volatile memory The values saved this way become the power on defaults Caution If current parameter values are incorrect the system may malfunction
5. m Input signal channels up to three channels the identifiers are 1 to 3 can not be changed In the E 517 firmware the input signal channels represent the sensor channels of the piezo control electronics The current number of sensor channels can be queried with the TSC command p 199 reads the Number Of Sensor Channels parameter ID OxOEOOOBO3 m Output signal channels up to three channels the identifiers are 1 to 3 can not be changed Www pi ws E 517 PZ214E Release 1 0 0 Page 50 System Description Piezo Nano Positioning PI Www pi ws In the E 517 firmware the output signal channels represent the piezo amplifier channels of the piezo control electronics The current number of piezo channels can be queried with the TPC command p 198 reads the Number Of Piezo Channels parameter ID 0x0E000B04 Digital output lines up to three lines the identifiers are 1 to 3 can not be changed 1 to 3 identify the DIO_O1 to DIO_O3 lines on the Digital In Out Socket p 267 The maximum number of digital output lines is given by the Number Of Trigger Outputs parameter ID 0x0E000B05 The number of currently usable digital output lines can be queried with the TIO command p 196 See External Triggering Signaling p 77 for more information Digital input lines up to three lines the identifiers are 1 to 3 can not be changed 1 to 3 identify the DIO_I1 to DIO_I3 lines on the Digital In Out Socket p 267 The n
6. Genera You can get IP settings assigned automaticaly your network supports thet c ay wis 7 d to ask your netw madaar he Adapt P address and aaua aimar me naa i Subnet mask do not change the Default Use the loliowing IP address gateway setting Use the folowing DNS server addesses Prefered DNS server Press OK Figure 8 Internet Protocol TCP IP Properties window the settings shown are only examples maybe they does not match that of your controller Www pi ws E 517 PZ214E Release 1 0 0 Page 65 Communication Piezo Nano Positioning PI If you want to change the IP address and IP mask settings of the E 517 1 www pi ws Establish a serial connection between PC and E 517 as described in RS 232 Serial Connection p 67 Use the IFS command p 163 in the command entry facility of the program to adapt the IP address and IP mask settings of the E 517 to those of the PC to check the PC settings you can open the Internet Protocol TCP IP Properties window as described above To change the IP mask subnet mask send IFS 100 IPMASK mask mask must be identical to the Subnet mask setting of the PC To change the IP address send IFS 100 IPADR address At least the last portion of the IP address must be different from that of the PC and any other device in the same network the applicable address settings depend on the IP mask setting If for example the PC has the IP address 172 21 0
7. Now the second wave generator can be started with WGO a waveform must have been defined before and the trigger action on the DIO_O2 line will take place as specified the assignment of axes to wave generators and of digital output lines to axes is fixed See also Trigger Output Synchronized with Wave Generator p 97 CTO Get Configuration of Trigger Output Description Format Arguments Response Replies with the values set for specified trigger output lines and parameters CTO lt TrigOutID gt lt CTOPam gt lt TrigOutID gt is one digital output line of the controller see CTO lt CTOPam gt parameter ID see CTO If all arguments are omitted the values for all parameters are given for all output lines lt TrigOutID gt lt CTOPam gt lt Value gt LF For lt Value gt see CTO DCO Set Drift Compensation Mode Description Format Sets drift compensation mode for given axes on or off Drift compensation is applied to avoid unwanted changes in displacement over time and is therefore recommended for static operation For a detailed description see Drift Compensation p 56 Drift compensation is automatically deactivated as long as the wave generator is activated DCO lt AxisID gt lt DCOState gt E 517 PZ214E Release 1 0 0 Page 145 GCS Commands Www pi ws Arguments Response Troubleshooting Piezo Nano Positioning PI lt AxisID gt is one
8. Reading of the trigger line settings made with TWS p 201 for the waveform points To query the waveform shape use the GWD command p 154 See also Wave Generator p 84 and Configuring Trigger Output p 77 TWS lt StartPoint gt lt NumberOfPoints gt lt TrigOutID gt lt StartPoint gt is the start point in the waveform starts with index 1 lt NumberOfPoints gt is the number of points to be read per digital output line lt TrigOutID gt is one digital output line of the controller The trigger settings signal states in GCS array format see the separate manual for GCS array SM 146E and the example below The trigger settings for the output lines DIO_O2 identifier 2 and DIO_O3 identifier 3 are queried for the waveform points 1 to 20 The response gives the signal states of the digital output lines at the individual waveform points 0 low 1 high tws 1 20 2 3 TYPE 1 SEPARATOR 9 DIM 2 SAMPLE_TIME 40E 6 NDATA 20 END_HEADER OOO COCO C OO CO OC OO HF SF HF FH Ooo OO Sore Oa oa E 517 PZ214E Release 1 0 0 Page 203 GCS Commands Www pi ws Piezo Nano Positioning PI OOo Ove o oo MO Oo se 2 o oa 6 VCO Set Velocity Control Mode Description Format Arguments Response Troubleshooting Notes Sets the Velocity Control Mode of the specified axis to ON or OFF VCO lt AxisID gt lt VelCtriState gt lt AxisID gt is o
9. WAV 2 X SIN_P 2000 20 10 2000 0 1000 Define a sine waveform for Wave Table 2 which belongs to the second wave generator The segment length and hence the number of points in the wave table is 2000 TWG Clears all output trigger settings related to the wave generator by switching the signal state for all points to low the power on default state is also low It is recommended to use TWC before new trigger actions are defined TWS 2 500 1 2 1500 1 2 1900 1 2 2000 1 Set trigger actions for the digital output line DIO_O2 identifier is 2 at the waveform points 500 1500 1900 and 2000 it is set high at all other points the state of the line is low due to the TWC usage You can define at most 10 trigger points per command line CTO 2 3 4 The digital output line DIO_O2 is set to Generator Trigger mode WGO 2 1 Start output of the second Wave Generator immediately synchronized by servo cycle Now the trigger output action on the DIO_O2 line will take place as specified with TWS WGO 2 0 Stop output of the second Wave Generator and hence also the trigger output The trigger output is now to be limited to a certain number of wave generator output cycles and the pulse width is to be changed In addition to the trigger points defined with TWS pulses are also to be output every time the axis reaches the amplitude limit E 517 PZ214E Release 1 0 0 Page 97 Wave Generator Piezo Nano P
10. Www pi ws Drift compensation is recommended in static operation to avoid an unwanted change in displacement over time It can be activated with the DCO command p 145 The drift compensation acts as an additional control loop in ONLINE mode The E 517 DAC output control voltage is automatically adjusted according to the following criterion m Open loop operation The current piezo voltage of the channel shown on the display must match the last commanded open loop control value m Closed loop operation The current sensor position of the channel shown on the display must match the last commanded target position In dynamic operation DCO should be OFF As long as you use the wave generator the drift compensation is deactivated automatically After the wave generation has finished the primary DCO setting becomes effective again Depending on the desired behavior after wave generator operation you should decide if you want to activate or deactivate DCO before you start the wave generator m Ifthe last position after wave generator stop is important DCO should be off m If the last position after wave generator stop does not matter you can keep DCO on The position of the piezo actuator then may show a stepwise change E 517 PZ214E Release 1 0 0 Page 56 System Description Piezo Nano Positioning PI 4 4 On Target Reading You can read the on target status of the individual axes with the ONT command p 176
11. lt uint gt is the number of sensor channels which are available the answer gives the value of the Number Of Sensor Channels parameter ID O0x0E000B03 See Accessible Items and Their Identifiers p 50 for more information Using the Sensor Enable parameter ID 0x02000000 you can change the E 517 configuration in case of hardware changes e g if you install additional sensor and or amplifier channels in the system If this parameter is changed the Number Of Sensor Channels parameter is adapted automatically E g if parameter 0x02000000 is set to disabled for a sensor channel this sensor channel is no longer included in the TSC response See Configure Axes and Channels p 33 for details TSP Get Input Signal Position Value Description Format Arguments Requests the current position of the selected input signal channel in physical units um TSP lt InputSignallD gt lt InputSignallD gt is one input signal channel of the controller E 517 PZ214E Release 1 0 0 Page 199 GCS Commands Www pi ws Response Notes Piezo Nano Positioning PI lt InputSignallD gt lt float gt LF where lt float gt is the current position of the input signal channel in physical units The input signal channels to be queried with TSP are the sensor channels of the piezo control electronics IDs 1 to 3 actually available IDs depend on the response to the TSC command p 199 TVI T
12. www pi ws Sets an offset to the output of a wave generator The current wave generator output is then created by adding the offset value to the current wave value Generator Output Offset Current Wave Value Do not confuse the output offset value set with WOS with the offset settings specified during waveform creation with WAV p 209 While the WAV offset affects only one segment i e only one waveform the WOS offset is added to all waveforms which are output by the given wave generator WOS sets the value of the Wave Offset parameter ID 0x1300010b in volatile memory If the wave generator is started with the option start at the endpoint of the last cycle the E 517 at the end of each output cycle equates the volatile value of the Wave Offset parameter with the current generator output Deleting wave table content with WCL p 219 has no effect on the settings for the wave generator output offset For more information see Wave Generator p 84 WOS lt WaveGenID gt lt Offset gt lt WaveGenID gt is the wave generator identifier lt Offset gt is the wave generator output offset any float number See below for details None You can set the offset also using the CFG wave type see WAV command p 209 or by directly changing the Wave Offset parameter ID 0x1300010b with SPA p 185 or SEP p 183 Save the value with WPA p 229 to non volatile memory where it becomes the power on default
13. E 517 PZ214E Release 1 0 0 Page 72 Data Recording Www pi ws Piezo Nano Positioning PI first channel Send SPA 1 0x05000000 to query the current filter type setting response should be 2 FIR filter default setting of the Digital Filter Type parameter Send SPA 1 0x05000000 0 to deactivate the digital filter Close the Command Entry window Open the Data Recorder window via the E 517 Show Hide data recorder menu entry Configure recording Press the Configure button in the down right corner of the Data Recorder window In the Configure Data Recorder dialog which opens check the box in the Read column and select Current position of axis in the Option column for the axis to be measured In the example shown in the figure below the current position of axis A will be recorded and read afterwards xi Read Source Option Derivat 1 Current postion of was M O 2 go B Current postion of aod f E 3 go c Current position of axis f El eee M Read al Read none Read auto select The settings configured here wil apply to the next recording They wil not affect akeady displayed data x J ewm Click OK to close the dialog Configure the measurement in the bottom line of the Data Recorder window Select the axis to be measured in the leftmost field A in this example Deselect the Servo checkbox since the measurement must be done in open loop operation Enter the amplitude of the impulse i
14. The previous contents of the wave table are overwritten by the new segment symmetric curve Amplitude Segment length WAV 5 amp RAMP 3000 35 0 3000 0 200 2250 lt WaveTablelD gt 5 lt AppendWave gt amp lt WaveType gt RAMP lt SegLength gt 3000 lt Amp gt 35 lt Offset gt 0 lt WaveLength gt 3000 lt StartPoint gt 0 lt SpeedUpDown gt 200 lt CurveCenterPoint gt 2250 The defined segment will be appended to the existing wave table contents asymmetric curve Amplitude Speed up Gown 4 Segment length Wave length www pi ws E 517 PZ214E Release 1 0 0 Page 94 Wave Generator Single Scan Line Curves Piezo Nano Positioning PI WAV command Comments Waveform Segment WAV 1 X LIN 1500 30 15 1500 0 370 lt WaveTablelD gt 1 lt AppendWave gt X lt WaveType gt LIN lt SegLength gt 1500 lt Amp gt 30 lt Offset gt 15 lt WaveLength gt 1500 lt StartPoint gt 0 lt SpeedUpDown gt 370 The previous contents of the wave table are overwritten by the new segment waveform offset 15 Do not confuse with the wave generator output offset set with WOS Amplitude Offset WAV 2 X LIN 1500 40 0 1100 210 180 lt WaveTablelD gt 2 lt AppendWave gt X lt WaveType gt LIN lt SegLength gt 1500 lt Amp gt 40 lt Offset gt 0 lt WaveLength gt 1100 lt StartPoi
15. lt TriggerStep gt The width of each trigger pulse is 30 us by default can be changed using the Pulse Width parameter ID OxOE000900 The unit of lt TriggerStep gt is um or prad Axis Position a a E Be TriggerStep t Trigger _ 1 i 3 Time ih sl I i H i CTOsentwith Pulso wdtt 30 us Time trigger definition Figure 12 Position Distance Trigger Mode The following parameters must be set for the digital output line which is to be used for trigger output lt TrigOutID gt m TriggerMode lt CTOPam gt 3 E TriggerStep lt CTOPam gt 1 General notation of the CTO command for this mode in fact the command arguments can be divided in two portions each starting with the lt TrigOutID gt declaration Www pi ws E 517 PZ214E Release 1 0 0 Page 79 External Triggering Signaling Piezo Nano Positioning PI Command Trigger mode Step size setting mnemonic selection CTO lt TrigOutID gt 3 0 lt TrigOutID gt 1 Stepsize Example A pulse is to be generated whenever the first axis A by default has covered a distance of 0 1 um Since the assignment of axes to digital output lines is fixed A belongs to DIO_I1 the first digital output line lt TrigOutID gt 1 must be configured Send CTO 130110 1 7 22 Example On Target Trigger Mode Www pi ws With the On Target trigger mode the on target status of the axis is written to the corresponding trigger line The on target sta
16. lt WaveLength gt lt WavePoint gt lt SegStartPoint gt The index of the segment starting point in the wave table Must be 1 lt WaveLength gt The length of the user defined curve in points The segment length i e the number of points written to the wave table is identical to the lt WaveLength gt value lt WavePoint gt The value of one single point Www pi ws E 517 PZ214E Release 1 0 0 Page 211 GCS Commands Www pi ws Piezo Nano Positioning PI For SIN_P lt SegLength gt lt Amp gt lt Offset gt lt WaveLength gt lt StartPoint gt lt CurveCenterPoint gt lt SegLength gt The length of the wave table segment in points Only the number of points given by lt SegLength gt will be written to the wave table If the lt SegLength gt value is larger than the lt WaveLength gt value the missing points in the segment are filled with the endpoint value of the curve lt Amp gt The amplitude of the sine curve lt Offset gt The offset of the sine curve lt WaveLength gt The length of the sine curve in points cycle duration lt StartPoint gt The index of the starting point of the sine curve in the segment Gives the phase shift Lowest possible value is 0 lt CurveCenterPoint gt The index of the center point of the sine curve Determines if the curve is symmetrical or not Lowest possible value is 0 Example for more examples see Defining Waveforms p 92 Amplitud
17. www pi ws The high voltage output of the piezo control electronics may be deactivated automatically when an internal temperature sensor detects overheating If this occurs it is recommended to reduce the frequency and or the amplitude and or the duration of the wave generator output The E 517 can not produce waveforms with arbitrary frequency It can change the output voltage only once every 40 us i e the maximum update rate for the wave generator output is 25 kHz Therefore the period of the waveform must be a multiple of 40 us For example If you want a 70 Hz sine wave the closest possible value is 70 028 Hz and the resulting waveform will be output with 70 028 Hz and not exactly 70 Hz All wave generators can run simultaneously The wave generators are clocked individually so that multiple wave generators only run synchronously when started with the same WGO command As long as a wave generator is running it is not possible to change WAV p 209 or to delete WCL p 219 the connected wave table i e the waveform The wave generator table rate WTR p 231 the number of output cycles WGC p 220 the wave offset WOS p 228 and the output trigger settings TWS p 201 can be modified while a wave generator is running When the E 517 is in OFFLINE mode the wave generator output can not be started If the wave generator output was started in ONLINE mode it remains active when switching to OFFLINE mode but it i
18. 1158 4405 SP LF 1 0000 0000 LF 10 1 3 Limitations for GCS Commands More than one command mnemonic per line is not allowed The number of characters per line is limited to 256 byte 1 character 1 byte This means that the number of arguments following a command mnemonic is limited to 32 Example If you send TWS 1 100 11 200 11 300 11 400 11 500 1 1 600 11 700 11 800 1 1 900 11 1000 1 1 1100 1 the controller will return error 24 incorrect number of parameters when you ask with the ERR command p 153 afterwards because the number of arguments is 33 Www pi ws E 517 PZ214E Release 1 0 0 Page 119 GCS Commands PI Piezo Nano Positioning The number of characters to use for axis identifiers is limited to 8 SAI command p 181 and Axis Name parameter ID 0x07000600 10 2 Command Survey 10 2 1 E 517 GCS Commands Alphabetical Survey Www pi ws 5 p 131 6 p 131 7 p 132 8 p 132 9 p 133 24 p 133 IDN p 134 ATC p 134 ATC p 137 ATS p 138 CCL p 139 CCL p 140 CSV p 141 CSV p 141 CTO p 142 CTO p 145 DCO p 145 DCO p 146 DEL p 146 DFH p 146 Request Motion Status Query If Position Has Changed Since Last POS Command Request Controller Ready Status Query If Macro Is Running Get Wave Generator Status Stop All Motion Get Device Identification Start Auto Calibration Get Auto Calibr
19. General Command Set E517 or E516 see Select Command Set Version p 44 for details Lines 2 to 4 show the current voltage and position values in V and um for all connected channels The current voltage value can also be read with the VOL command p 209 and the current position value with the TSP command p 199 The main screen is active upon power on and reboot Control Mode Servo Mode GCS Syntax Version ONLINE OFFLINE Closed loop open loop E517 E516 Main Screen Voltage and Position Display DISPLAY SERVICE where you can adjust the brightness and the contrast of the display Ranges are 10 31 for brightness and 5 31 for contrast The settings can be permanently saved as power on defaults with WPA 100 see WPA command p 229 and are also available via controller parameters brightness ID OxOEQOODOO contrast ID 0x0E000D01 see Controller Parameters p 250 for more information COMMUNICATION where you can select the RS 232 baud rate and the IEEE 488 address The settings can be permanently saved as power on defaults with WPA 100 see WPA command p 229 They are also available with IFC p 159 IFC p 161 temporary settings and IFS p 163 IFS p 164 default settings and via controller parameters RS 232 baud rate ID 0x11000400 IEEE 488 address ID 0x11000900 see Default and Current Settings p 59 and Controller Parameters p 250 for more information E 517 PZ214E Relea
20. Parameter Overview p 252 SPA Set Volatile Memory Parameters Description Format www pi ws Set a parameter of a given item to a value in volatile memory RAM Parameter changes will be lost when the controller is powered down or rebooted or when the parameters are restored with RPA p 179 Caution This command is for setting hardware specific parameters Wrong values may lead to improper operation or damage of your hardware Related commands HPA p 157 returns a list of the available parameters SEP p 183 writes parameter settings directly into non volatile memory without changing the settings in volatile memory WPA p 229 writes parameter settings from volatile to non volatile memory RPA resets volatile memory to the value in non volatile memory SPA lt ItemID gt lt PamID gt lt PamValue gt E 517 PZ214E Release 1 0 0 Page 185 GCS Commands Arguments Response Troubleshooting Notes Available item IDs and parameter IDs Example 1 Www pi ws Piezo Nano Positioning PI lt ltemID gt is the item for which a parameter is to be changed in volatile memory See below for details lt PamlID gt is the parameter ID can be written in hexadecimal or decimal format See below for details lt PamValue gt is the value to which the given parameter of the given item is set none Illegal item identifier wrong parameter ID value out of range command le
21. Positioning Technical Data 15 Technical Data 15 1 Specifications Function Channels Processor Sampling rate sensor Thermal drift Linearity nominal range Resolution Interfaces and operation Interfaces communication I O ports Command set User software Software drivers Supported functionality Display Manual control www pi ws E 517 i1 Digital operation module DSP 60 MHz 25 kHz 8 times oversampling Stability 0 2 mV 0 01 DAC 24 bit 12 V ADC 18 bit sampling Ethernet TCP IP USB RS 232 IEEE 488 1 trigger input 1 trigger output 5V MDR14 connector PI General Command Set GCS PIMikroMove Lab VIEW drivers Windows and Linux Libraries DLL Wave generator data recorder macro programming LCD display for monitor signals position and voltage states and trackball menus Operation via trackball E 517 PZ214E Release 1 0 0 E 517 i3 Digital operation module DSP 60 MHz 25 kHz 8 times oversampling Stability 0 2 mV 0 01 DAC 24 bit 12 V ADC 18 bit sampling Ethernet TCP IP USB RS 232 IEEE 488 3 trigger inputs 3 trigger outputs 5V MDR14 connector PI General Command Set GCS PIMikroMove Lab VIEW drivers Windows and Linux Libraries DLL Wave generator data recorder macro programming LCD display for monitor signals position and voltage states and trackball menus Operation via trackball
22. TMN p 197 and TMX p 197 to ask for the current valid travel range limits The current PLM settings are saved with the WPA command in addition to the current parameter values and other settings See the WPA description p 229 for details The definition of the home position can be changed with DFH p 146 The travel range limits will then be adapted to the new home position E 517 PZ214E Release 1 0 0 Page 177 GCS Commands Www pi ws Piezo Nano Positioning PI PLM Get High Position Soft Limit Description Format Arguments Response Get the position soft limit which determines the high end of the axis travel range in closed loop operation PLM lt AxisID gt lt AxisID gt is one axis of the controller lt AxisID gt lt HighLimit gt LF where lt HighLimit gt is the limit position for the high end of the travel range in physical units POS Get Real Position Description Format Arguments Response Troubleshooting Note Returns the current axis position If all arguments are omitted gets current position of all axes POS lt AxisID gt lt AxisID gt is one axis of the controller lt AxisID gt lt float gt LF where lt float gt is the current axis position in physical units Illegal axis identifier To request the current position of input signal channels sensors in physical units use the TSP p 199 command instead RB
23. default is 115200 is also accessible as parameter ID 0x11000400 Uart Baudrate GPADR lt PamValue gt gives the device address to be used for GPIB IEEE 488 communication default is 4 is also accessible as parameter ID 0x11000900 GPIB Address IPADR The first four portions of lt PamValue gt specify the default IP address for TCP IP communication the last portion specifies the default port to be used default is 192 168 168 10 50000 is also accessible as parameter ID 0x11000600 IP Address Note While the IP address can be changed the port must always be 50000 IPSTART lt PamValue gt defines the startup behavior for configuration of the IP address for TCP IP communication 0 use IP address defined with IPADR 1 use DHCP to obtain IP address if this fails use IPADR default is also accessible as parameter ID 0x11000800 IP Configuration IPMASK lt PamValue gt gives the IP mask to be used for TCP IP communication in the form uint uint uint uint default is 255 255 255 0 is also accessible as parameter ID 0x11000700 IP Mask IFS Get Interface Parameters As Default Values Description Get the interface configuration parameter values stored in non volatile memory i e the current power on default Format IFS lt InterfacePam gt Www pi ws E 517 PZ214E Release 1 0 0 Page 164 GCS Commands Piezo Nano Positioning PI Arguments lt InterfacePam gt is the interface parameter to be queried
24. in addition to any output pulses defined with TWS p 201 Note that with CTO you can also change the polarity of the trigger output active high is default E 517 PZ214E Release 1 0 0 Page 221 GCS Commands Piezo Nano Positioning PI The number of wave generator output cycles during which trigger pulses are to be output can be set using the Number Of Trigger Cycles parameter ID 0x18000100 The width of a trigger pulse is 30 us by default You can change the default pulse width using the Pulse Width parameter ID 0x0E000900 Possible values are in the range of 10 to 150 us Keep in mind that wave generator output will continue even if the terminal or the program from which it was started is quit The 9 single character command p 133 can be used to query the current activation state of the wave generators The reply shows if a wave generator is running or not but does not contain any information about the wave generator start mode With WGO you can ask for the last commanded wave generator start options WGO settings p 221 For more information see Wave Generator p 84 and Configuring Trigger Output p 77 Format WGO lt WaveGenID gt lt StartMode gt Arguments lt WaveGenID gt is the wave generator identifier With the E 517 there is a fixed one to one assignment of wave generators to axes and wave tables E g starting wave generator 1 affects the first axis A by default and the waveform i
25. present Driver could not be opened on Vista run as administrator Unknown axis identifier Page 244 GCS Commands Piezo Nano Positioning 1002 PI_NR_NAV_OUT_OF_RANGE 1003 PI_INVALID_SGA 1004 PI_UNEXPECTED_RESPONSE 1005 PI_NO_MANUAL_PAD 1006 PI_INVALID MANUAL_PAD_KNOB 1007 PI_INVALID MANUAL_PAD_AXIS 1008 PI_CONTROLLER_BUSY 1009 PI_THREAD ERROR 1010 PI_IN MACRO_MODE 1011 PI_NOT_IN_MACRO_MODE 1012 PI_MACRO_FILE_ERROR 1013 PILNO_MACRO_OR_EMPTY 1014 PI_MACRO_EDITOR_ERROR 1015 PI_INVALID ARGUMENT 1016 PI_AXIS_ALREADY_EXISTS 1017 PI_INVALID_AXIS_IDENTIFIER 1018 PI_COM_ARRAY_ERROR 1019 PI_COM_ARRAY_RANGE_ERROR 1020 PI_INVALID_SPA_CMD_ID Www pi ws E 517 PZ214E Release 1 0 0 PI Number for NAV out of range must be in 1 10000 Invalid value for SGA must be one of 1 10 100 1000 Controller sent unexpected response No manual control pad installed calls to SMA and related commands are not allowed Invalid number for manual control pad knob Axis not currently controlled by a manual control pad Controller is busy with some lengthy operation e g reference move fast scan algorithm Internal error could not start thread Controller is already in macro mode command not valid in macro mode Controller not in macro mode command not valid unless macro mode active Could not open file to write or read macro No macro with given name on controller or macro is empty Inter
26. the hardware e g potentiometers are not adjusted properly m the SERVO switch of the channel is set to ON on the piezo control electronics m An invalid channel identifier is used e g ATZ 4 1 CAUTION The ATC procedure will move the axis and the motion may cover the whole travel range Make sure that it is safe for the stage to move The protected parameters Min Voltage ID 0x0B000007 and Max Voltage ID 0x0B000008 which limit the output voltage for the piezo channels are adapted automatically if ATC with options 1 or 6 is used New hardware modules are added to the piezo control electronics see Configure Axes and Channels p 33 for an example Now the auto calibration procedure is required to adjust all gain and offset parameters properly Send CCL 1 advanced Send ATC 112131 Note A complete auto calibration procedure ist started for all channels Send ATS Receive 11 0 2 1 1 3 1 0 E 517 PZ214E Release 1 0 0 Page 136 GCS Commands Piezo Nano Positioning PI Note The ATC procedure was successful for channels 1 and 3 but not for channel 2 Check the hardware of channel 2 for errors and repeat the auto calibration for channel 2 if the hardware is free from defects Send ATC 2 1 Send ATS 2 1 Receive 2 1 0 Note ATC now was successful for channel 2 if the ATC procedure should continue to fail contact your Physik Instrumente Sales Engineer Send WPA 100 Note Save the results
27. unchanged and the axis does not move Send MOV 1 Receive 1 2 500000 Send POS 1 Receive 1 2 500000 NLM Set Low Position Soft Limit Description Limits the low end of the axis travel range in closed loop operation soft limit Format NLM lt AxisID gt lt LowLimit gt Www pi ws E 517 PZ214E Release 1 0 0 Page 173 GCS Commands Arguments Response Notes Piezo Nano Positioning PI lt AxisID gt is one axis of the controller lt LowLimit gt is the limit position for the low end of the travel range in physical units None The position value set with NLM must be equal to or larger than the range limit given by parameter 0x07000000 and smaller than the range limit given by parameter 0x07000001 or by PLM p 177 Use TMN p 197 and TMX p 197 to ask for the current valid travel range limits The current NLM settings are saved with the WPA command in addition to the current parameter values and other settings See the WPA description p 229 for details The definition of the home position can be changed with DFH p 146 The travel range limits will then be adapted to the new home position NLM Get Low Position Soft Limit Description Format Arguments Response Get the position soft limit which determines the low end of the axis travel range in closed loop operation NLM lt AxisID gt lt AxisID gt is one axis of the controller lt AxisID gt lt
28. use the trackball to access and modify several settings See Display Screens p 21 for details E Commanding motion in ONLINE mode The CHANNEL SETTING screen gives access to channel specific screens There you can enter target values position or voltage depending on the current servo mode to move the corresponding axis Rolling the trackball left right selects the digit to be changed rolling the trackball up down selects the value for that digit You can switch between the individual channels by pressing the trackball While trackball settings and move commands can be used in parallel to command axis motion they are not accepted when the wave generator is running for the axis See Control Value Generation p 53 for more information Www pi ws E 517 PZ214E Release 1 0 0 Page 22 Piezo Nano Positioning PI Operation In OFFLINE mode you can check the current voltage and position values on the channel specific screens 3 2 Modes of Operation Control mode The piezo channels amplifiers of the control electronics can be operated in either ONLINE or OFFLINE control mode The active mode determines the applicable control sources for the output voltage See Control Modes p 23 and see Display Screens p 21 for more information Servo mode The current servo mode determines if a motion axis is driven in open loop servo OFF or closed loop servo ON operation In closed loop operation a servo loop participates i
29. 0x04000E01 4 Note The setting should become immediately effective on the display It is made in volatile memory only If everything is okay and you want to use this system configuration after the next power on save the parameter settings from volatile to non volatile memory Send WPA 100 Note When WPA is used without specifying any parameters all currently valid parameter values from volatile memory and several other settings are saved see WPA for details Send SEP 2 0x04000E01 Receive 2 0x04000E01 4 Note Check the parameter settings in non volatile memory The task performed in example 2 can also be done in the following way provided you are sure that the new system configuration will work Send CCL 1 advanced Note Switch to command level 1 because this level is required for write access to the Display Format parameter Send SEP 100 2 0x04000E01 4 Note The setting is made in non volatile memory and hence is the new power on default but is not yet active the display does not change To use the new settings immediately you now have to load them to volatile memory otherwise they would become active after the next power on or reboot of the controller Send RPA E 517 PZ214E Release 1 0 0 Page 187 GCS Commands Piezo Nano Positioning PI Note The new configuration is now active Send SPA 2 0x04000E01 Receive 2 0x04000E01 4 Note Check the parameter settings in volatile memory T
30. 1 send IFS 100 IPADR 172 21 0 2 50000 Do not use 255 and do not change the port setting must always be 50000 Close the connection Connect the E 517 to the Ethernet card in the PC using the included special cross over cable point to point connection If you connect the E 517 to a free access point e g to a hub on a network to which the PC is connected use the straight through network cable Power cycle the E 517 Use the Search for controllers functionality described in Network with DHCP Server p 62 to establish the connection between PC and the E 517 E 517 PZ214E Release 1 0 0 Page 66 Communication Piezo Nano Positioning PI 5 4 RS 232 Serial Connection Www pi ws The serial communications port is accessed via the sub D 9m RS 232 connector p 267 on the front panel of the E 517 Use the included null modem cable to connect the E 517 to the host PC if the PC has only one COM port it is probably COM 1 The serial port on the E 517 is preset to the following parameters 115 200 baud 8 bits no parity RTS CTS In the connection dialog of the host software e g PIMikroMove PlTerminal or LabView drivers you make the settings on the host PC side Select the correct PC COM port and make sure that the baud rate and other settings in the dialog match those of the E 517 Otherwise no communication can be established Start up controller ee 2 x 1 Connect controler
31. 10 V Py is the actual stage position when sensor monitor voltage is 0 V Vio is the actual piezo voltage when the control voltage for the amplifier is 10 V in open loop operation Servo OFF Vo is the actual piezo voltage when the control voltage for the amplifier is 0 V in open loop operation servo OFF Example 1 A stage has sensor monitor output of 0 to 10 V the stage travel is to be 0 um to 50 um the piezo voltage is to be 0 and 100 V when the control voltage is 0 V and 10 V respectively in open loop operation The settings must then be Ksen 50 0 0 0 10 0 5 0 Osen 0 0 Kpzt 100 0 0 0 10 0 10 0 Opzt 0 0 The stage is connected to the first sensor channel and the first amplifier channel So you have to send SPA 1 0x02000300 5 1 0x02000200 0 1 0x0B000003 10 1 0x0B00000A 0 to change the parameters in volatile memory Example 2 The stage travel is to be 25 um The piezo voltage in open loop operation is to be 0 5 and 100 5 V when the control voltage is 0 V and 10 V respectively Then Ksen 25 25 10 0 5 0 Osen 25 Kpzt 100 5 0 5 10 0 10 1 E 517 PZ214E Release 1 0 0 Page 39 Operation Www pi ws Piezo Nano Positioning PI Opzt 0 5 The stage is connected to the third sensor channel and the third amplifier channel So you have to send SPA 3 0x02000300 5 3 0x02000200 25 3 0x0B000003 10 1 3 0x0B00000A 0 5 to change the parameters in volatile m
32. 30 us by default except with the MinMaxThreshold trigger mode where the pulse width depends on the threshold settings You can change the default pulse width using the Pulse Width parameter ID OxOE000900 Possible values are in the range of 10 to 150 us lt TrigOutID gt corresponds to the output lines DIO_O1 to DIO_O3 IDs 1 to 3 see Digital In Out Socket p 267 The assignment of these lines to the axes of the E 517 is fixed DIO_O1 belongs to the first axis A by default DIO_O2 to the second axis B by default and DIO_O3 to the third axis C by default This means that with E 517 11 models only DIO_O1 can be used If axes channels are deactivated see Configure Axes and Channels p 33 for details only the output lines of the active axes can be used E 517 PZ214E Release 1 0 0 Page 142 GCS Commands Piezo Nano Positioning PI lt CTOPam gt parameter IDs available for E 517 1 TriggerStep 2 Axis 3 TriggerMode 4 Trigger Delay always 0 5 MinThreshold 6 MaxThreshold 7 Polarity lt Value gt available for the appropriate lt CTOPam gt ID for TriggerStep step size in physical units default value is 0 1 for Axis the axis to connect to the trigger output line The assignment is fixed see above for TriggerMode default value is 4 0 PositionDistance with this TriggerMode a trigger pulse is written whenever the axis has covered the TriggerStep distance lt CTOPam gt ID
33. 6 channels channels for piezo items 4 to 6 monitor refer to piezo voltage output channels of the amplifier DAC offset ATC option 3 0x0A000010 2 FLOAT 6 affects the DACs which output the control voltages for the piezo amplifier channels DAC gain ATC option 3 0x0A000020 2 FLOAT 5 affects the DACs which output the control voltages for the piezo amplifier channels Gain Kpzt SPA SEP 0x0B000003 0 FLOAT 9 when control voltage changes 1 V the piezo voltage change is Kpzt V Offset Opzt SPA SEP 0x0B00000A 0 FLOAT 10 when control voltage is 0 V the piezo voltage is Opzt V Www pi ws E 517 PZ214E Release 1 0 0 Page 43 Operation Piezo Nano Positioning PI NOTES Although the item IDs for the parameters affected by ATC range from 1 to 6 the channel IDs for ATC always range from 1 to 3 ATC option 1 affects all settings which can be adjusted separately by options 2 to 6 The protected parameters Min Voltage ID 0x0B000007 and Max Voltage ID 0x0B000008 which limit the output voltage for the piezo channels are adapted automatically if Opzt and Kpzt are changed and or ATC option 6 is used 3 5 4 Select Command Set Version Users who have written software for the E 516 interface display module which is the predecessor of the E 517 can switch to the GCS syntax used with the E 516 Except for the PlTerminal the software on the E 517 CD can not be used when the E 517 is switched t
34. A 0 Check current servo mode for axis A The axis is in open loop operation response 0 i e there is no correction of drift or other effects SVA A 80 Move axis A by setting the corresponding output voltage to 80 volts VOL 1 1 0079 9742 Query the current output voltage of piezo channel 1 which drives axis A SVA A 150 Attempt to set the output voltage for axis A to 150 volts VoL 4 12400793725 The last commanded voltage value lay beyond the allowed range and the SVA command therefore was ignored E 517 PZ214E Release 1 0 0 Page 27 Operation Piezo Nano Positioning PI SVA A A 0080 0000 Query the commanded output voltage It resulted from the last valid SVA command VMA A A 0120 0000 Get voltage output high limit for the axis VMA A 90 Set voltage output high limit for the axis to 90 volts VMI A 10 Set voltage output low limit for the axis to 10 volts SVA A 85 Set the output voltage for axis A to 85 volts VOL 1 1 0085 4611 Query the current output voltage of piezo channel 1 SVA A 100 Set the output voltage for axis A to 100 volts VOL 1 1 0085 4606 Query the current output voltage of piezo channel 1 SVA A A 0085 0000 Query the commanded output voltage It resulted from the last valid SVA command ERR 302 Get error code of the last occurred error error 302 tyoitage out The error code is cleared by the ERR of
35. ChannellD gt lt Option gt lt Status gt LF where lt Status gt gives the results of the latest auto calibration procedure If 0 the ATC procedure was successful Values gt 0 indicate option specific error codes multiple non zero error codes for the same channel and option will be listed one after another see example below for details Option Possible Status values 1 0 no error occurred this answer is only possible if ATC has been called with option 1 before 1 ATC procedure failed 2 0 no error occurred 1 Sensor monitor ADC error 3 0 no error occurred 1 DAC error 4 0 no error occurred 1 Voltage monitor ADC error 5 0 no error 1 Error with sensor input to P I controller E 517 PZ214E Release 1 0 0 Page 138 GCS Commands Piezo Nano Positioning PI 6 0 no error 1 Amplify range error for piezo monitor voltage 2 Amplify error for piezo amplifier Example 1 Send ATS 2 1 Receive 2 1 0 Note No error at all for channel 2 this response is only possible if ATC lt channel gt 1 was sent before i e complete calibration performed Otherwise only the individual options 2 to 6 can return 0 Example 2 Send ATS 36 Receive 3 6 2 Note Amplify error channel 3 Example 3 Send ATS 36 Receive 3 6 21 Note Amplify range and amplify error channel 3 CCL Set Command Level Description Changes the active command level and determines thus the availability of commands and
36. ChannellD gt is one channel of the piezo control electronics can be a sensor channel for lt Option gt 2 and 5 or a piezo channel for lt Option gt 3 4 6 or both for lt Option gt 1 possible IDs are 1 2 3 lt Option gt selects the settings to be calibrated The IDs of the parameters affected by the individual options are listed below In addition the item IDs are given which are to be used when asking for the parameter values with SPA or SEP commands Possible options are 1 Complete calibration includes all settings affected by options 2 to 6 2 Sensor monitor ADC gain ID 0x04000500 and offset ID 0x04000600 parameter item IDs 1 to 3 3 DAC for control voltage gain ID Ox0A000020 and offset ID 0x0A000010 parameter item IDs 1 to 3 4 Voltage monitor ADC gain ID 0x04000500 and offset ID 0x04000600 parameter item IDs 4 to 6 5 Sensor input to P I controller E 509 module E 517 PZ214E Release 1 0 0 Page 135 GCS Commands Www pi ws Response Troubleshooting Notes Example Piezo Nano Positioning PI gain ID 0x04000700 and offset ID 0x04000800 parameter item IDs 1 to 3 6 Piezo monitor voltage output of amplifier e g E 503 E 505 or E 507 gain ID 0x04000700 and offset ID 0x04000800 parameter item IDs 4 to 6 none ATC will fail if m the stage is not connected m the hardware is defective m the calibration facilities physically present on
37. DIO_I3 lines which are located on the E 517 PZ214E Release 1 0 0 Page 149 GCS Commands Piezo Nano Positioning PI Digital In Out Socket p 267 These lines can be used to start and synchronize the wave generators see WGO p 221 command for details With the E 517 there is a fixed one to one assignment of axes to the wave generators and the digital input lines This means that the digital input line will only start and synchronize the corresponding wave generator but no other wave generators m with E 517 i1 models only DIO_I1 can be used m if axes channels are deactivated see Configure Axes and Channels p 33 for details only the input lines of the active axes and the corresponding wave generators are available The lt DIOID gt identifiers to use for the lines are 1 to 3 If lt InputOn gt 0 the digital input is LOW OFF if lt InputOn gt 1 the digital input is HIGH ON DRC Set Data Recorder Configuration Description Format Arguments Www pi ws Set data recorder configuration determines the data source and the kind of data RecordOption used for the given data recorder table DRC lt RecTablelD gt lt Source gt lt RecOption gt lt RecTablelD gt is one data recorder table of the controller see below lt Source gt is the data source for example an axis output signal channel or input signal channel of the controller The required source depends on the selec
38. E 517 Controller 2 Select connected ages J 3 Start up axes Version Info Figure 9 RS 232 configuration of the host PC side in PIMikroMove If you have established a connection and want to change the currently active baud rate proceed as follows 1 Use the IFC command p 159 in the command entry facility of the program e g by sending IFC RSBAUD 57600 2 Close the connection E 517 PZ214E Release 1 0 0 Page 67 Communication Piezo Nano Positioning PI 3 Open the connection again with the baud rate you just set with IFC in the example 57600 The currently active RS 232 baud rate can also be checked set on the E 517 front panel in the COMMUNICATION display screen p 21 This screen can be accessed by the trackball p 22 The front panel setting corresponds with the baud rate setting available over the PC interface NOTE It is recommended that the host PC has a genuine hardware RS 232 interface If the host PC uses a USB to serial adapter instead data loss could occur during communication especially when transferring large amounts of data 5 5 USB Connection The USB interface is available on the front panel of the E 517 via the type B USB socket Use the included USB cable USB A USB B to connect the E 517 to the host PC The first time you connect over the USB interface be sure you are logged on the PC as a user having administrator rights After the E 517 is powered on a
39. Firmware Update Wizard guides you through the firmware update of your E 517 system U Select PI controller Figure 4 Select controller to be connected to Firmware Update Wizard www pi ws E 517 PZ214E Release 1 0 0 Page 47 System Description Piezo Nano Positioning PI 4 System Description 4 1 Www pi ws Basic Elements For successful operation of the E 517 you should familiarize yourself with the following features of the device Logical Axes The E 517 controls logical axes With the E 517 the axis to channel assignment is fixed so that the first motion axis A by default always is driven by the first piezo channel and measured by the first sensor channel the second axis B by default belongs to the second piezo channel and to the second sensor channel and the third axis C by default belongs to the third piezo channel and to the third sensor channel The assignment is given by two read only matrices which are implemented via controller parameters sensor to axis matrix parameter IDs 0x07000500 0x07000501 0x07000502 and axis to piezo matrix parameter IDs 0x09000000 0x09000001 0x09000002 Input and Output Signals Input signal channels are the sensor channels and output signal channels the piezo channels of the system Furthermore the E 517 provides digital in and output lines for triggering tasks See Accessible Items and Their Identifiers p 50 for details Communication Interfac
40. Frequency Response www pi ws Measurements Mechanical resonances of the system may exaggerate the response to certain frequencies in the control signal To determine the resonant frequencies of the mechanics use the E 517 data recorder to observe the system response to an impulse in open loop operation NOTE Very stiff mechanics e g S 325 S 316 P 8xx or P 2xx have resonant frequencies of several kilohertz With such mechanics the frequency response measurement described below will not deliver meaningful results since the sensor bandwidth of the system is limited by the hardware settings on the E 509 analog sensor servo module Meaningful results can only be attained with mechanics whose resonant frequency is lt 1 kHz Proceed as follows for the axis whose resonant frequency is to be measured In this example the resonant frequency of axis A is to be measured 1 Make sure the mechanics is mounted and connected to the piezo control electronics in exactly the same way as in the application The load on the mechanics is especially important 2 Start PIMikroMove on a host PC connected to the E 517 see the PIMikroMove software manual on the included CD for details 3 Inthe Command Entry window of PIMikroMove deactivate the digital filtering of the sensor signal for the sensor channel which belongs to the measured axis This is recommended to achieve more reliable results In this example you have to do this for the
41. InputSignallD gt is one input signal channel of the controller lt InputSignallD gt lt uint gt LF where lt uint gt is the current A D value dimensionless The input signal channels to be queried with TAD are the sensor channels of the piezo control electronics IDs 1 to 3 actually available IDs depend on the response to the TSC command p 199 The TAD response represents the digitized signal value without digital filtering TIO Tell Digital I O Lines Description Format Arguments Response Tell number of installed digital I O lines TIO none l lt uint1 gt O lt uint2 gt where lt uint1 gt is the number of digital input lines lt uint2 gt is the number of digital output lines E 517 PZ214E Release 1 0 0 Page 196 GCS Commands Piezo Nano Positioning PI Notes The digital output lines reported by TIO are DIO_O1 to DIO_O3 They can be set with CTO p 142 TWS p 201 and WGO p 221 The digital input lines reported by TIO are DIO_11 to DIO_I3 The can be read with the DIO command p 149 With E 517 i1 models only DIO_O1 and DIO_I1 are available If axes channels are deactivated see Configure Axes and Channels p 33 for details only the output and input lines of the active axes are available All the lines are located on the Digital In Out Socket p 267 of the E 517 TMN Get Minimum Commandable Position Description Get the minimum commandable po
42. It is strongly recommended to save the parameter values of the E 517 to a file on the host PC before you make any changes This way the original settings can be restored if the new parameter settings will not prove satisfactory To save the parameter values and to load them back to the E 517 use the Device Parameter Configuration window of PIMikroMove See Create Backup File for Controller Parameters p 12 for more information To adapt the E 517 to your application you can modify parameter values The parameters available depend on the controller firmware With HPA p 157 you can obtain a list of all available parameters with information about each e g short descriptions The volatile and non volatile memory parameter values can be read with the SPA p 188 or SEP p 184 commands respectively Note that many parameters are protected by higher command levels as indicated in the Command Level column in the Parameter Overview table p 252 By going to command level 1 using the CCL command p 139 it is possible to change level 1 parameters Parameters with level 2 or higher are reserved for service personnel Using the general modification commands SPA RPA SEP and WPA all parameters for which the currently active command level has write permission can be changed in volatile memory SPA p 185 RPA p 179 or in non volatile memory SEP p 183 WPA p 229 It is recommended that any modifications be first ma
43. Maximum number of channels 0x16000200 3 System 1 INT Maximum record points 0x16000201 3 Data 3 INT Maximum Recorder record points of Table table i 0x18000100 0 Digital 3 INT Number of Only applied Output Line trigger cycles to trigger output in conjunction with the wave generator Www pi ws E 517 PZ214E Release 1 0 0 Page 257 Troubleshooting Piezo Nano Positioning PI 12 Troubleshooting Www pi ws Communication with controller does not work Communication cable is wrong or defective Check cable Does it work properly with another device For RS 232 a null modem cable must be used For TCP IP connections Connect the controller to an Ethernet connector in the PC using the included cross over network cable When connecting to a network hub or router it might be necessary to use a straight through network cable Communications has not been established yet TCP IP communication If no DHCP server is available on the network or if a point to point connection between host PC and controller is being used after power on or reboot it might take a period of about 30 seconds before communication is possible The interface is not configured correctly With the RS 232 interface check port and baud rate depending on your controller the baud rate may be set via DIP switches on the front panel or via a controller parameter It is recommended that the host PC have a genuine RS 232 interface
44. Must be equal to or greater than 1 If not specified 1 is used The value can also be set queried with the WTR WTR commands and is also available as Wave generator table rate parameter ID 0x13000109 use WPA to save it to non volatile memory lt s gt double amplitude shift after each complete period In scanning applications this parameter is the distance between lines If not specified O is used The value can also be set queried with the WOS WOS commands and is also available as Curve Offset parameter ID 0x1300010B use WPA to save it to non volatile memory Note that if the wave generator is started with the option start at the endpoint of the last cycle bit 8 the E 517 at the end of each output cycle equates the offset value with the current generator output lt L gt double limit of waveform amplitude In scanning applications this parameter defines the field limit If not specified 1e6 is used The period of the resulting output wave results from the following equation k PAS 1 where is the Servo Update Time in seconds is given by parameter 0x0E000200 The initial phase angle of the output waveform is g x360 H None Invalid wave table identifier The total number of points for the waveform which may consist of several segments exceeds the available number of memory points E 517 PZ214E Release 1 0 0 Page 218 GCS Commands Www pi ws Notes Piezo Nano Positioning P
45. Nano Positioning PI Parameter ID Command Item Type Max Data Parameter Notes hexadecimal Level Con No Type Description for write cerned of access Items 0x09000000 3 Logical Axis 3 FLOAT Driving with piezo 1 0x09000001 3 Logical Axis 3 FLOAT Driving with piezo 2 0x09000002 3 Logical Axis 3 FLOAT Driving with piezo 3 0x0A000010 2 Output 3 FLOAT DAC offset Signal Channel 0x0A000020 2 Output 3 FLOAT DAC gain Signal Channel 0x0B000003 0 Output 3 FLOAT Gain Signal Channel 0x0B000007 2 Output 3 FLOAT Min voltage Signal Channel 0x0B000008 2 Output 3 FLOAT Max voltage Signal Channel 0x0B00000A 0 Output 3 FLOAT Offset Signal Channel 0x0C000000 0 Output 3 FLOAT Output voltage Signal low limit V Channel 0x0C000001 0 Output 3 FLOAT Output voltage Signal high limit V Channel 0x0D000000 2 System 1 CHAR Device serial number 0x0D000100 2 Hardware 2 CHAR Hardware serial Component number 0x0D000200 2 Hardware 2 CHAR Hardware name Component 0x0D000400 2 Hardware 2 INT Hardware Component revision 0x0D000600 2 System 1 INT Device ID 0x0E000100 3 System 1 FLOAT Sensor sampling time 0x0E000200 3 System 1 FLOAT Servo update time www pi ws E 517 PZ214E Release 1 0 0 Page 255 Controller Parameters Piezo Nano Positioning PI
46. Nano Positioning PI For more information see Data Recording p 71 The record table rate set with RTR is saved in volatile memory RAM only To save the currently valid value to non volatile memory where it becomes the power on default you must use WPA p 229 Changes not saved with WPA will be lost when the controller is powered down To have write access to the parameter it might be necessary to switch to a higher command level using CCL p 139 RTR Get Record Table Rate Description Format Arguments Response Notes Gets the current record table rate i e the number of servo loop cycles used in data recording operations RTR None lt RecordTableRate gt is the table rate used for recording operations unit number of servo loop cycles Gets the Data Recorder Table Rate parameter value in volatile memory ID 0x16000000 For more information see Data Recording p 71 SAI Set Current Axis Identifiers Description Format Arguments Response Sets the axis identifiers for the given axes After it was set with SAI the new axis identifier must be used as lt AxisID gt in all axis related commands SAI lt AxisID gt lt Newldentifier gt lt AxisID gt is one axis of the controller lt Newldentifier gt is the new identifier to use for the axis see below for details none E 517 PZ214E Release 1 0 0 Page 181 GCS Commands Piezo Nano Positioning PI Www
47. P _CNTR_MOVE_TO_LIMIT_SWITCH_FAILED 50 P _CNTR_REF_WITH_REF_DISABLED 51 PI_CNTR_AXIS_UNDER_JOYSTICK_CONTROL 52 P _CNTR_COMMUNICATION_ERROR 53 P _CNTR_DYNAMIC_MOVE_IN_PROCESS 54 P _CNTR_UNKNOWN_PARAMETER 55 P _CNTR_NO_REP_RECORDED 56 P _CNTR_INVALID_ PASSWORD 57 P _CNTR_INVALID_ RECORDER_CHAN 58 P _CNTR_INVALID_RECORDER_SRC_OPT Www pi ws E 517 PZ214E Release 1 0 0 PI Controller number invalid No joystick configured Invalid axis for electronic gearing axis can not be slave Position of slave axis is out of range Slave axis cannot be commanded directly when electronic gearing is enabled Calibration of joystick failed Referencing failed OPM Optical Power Meter missing OPM Optical Power Meter not initialized or cannot be initialized OPM Optical Power Meter Communication Error Move to limit switch failed Attempt to reference axis with referencing disabled Selected axis is controlled by joystick Controller detected communication error MOV motion still in progress Unknown parameter No commands were recorded with REP Password invalid Data Record Table does not exist Source does not exist number too low or too high Page 236 GCS Commands Piezo Nano Positioning 59 P _CNTR_INVALID_RECORDER_SRC_CHAN 60 P _CNTR_PARAM_PROTECTION 61 P _CNTR_AUTOZERO_RUNNING 62 P _CNTR_NO_LINEAR_AXIS 63 P _CNTR_INIT_RUNNING 64 P _CNTR_READ_ONLY_PARAMETER 65 P _CNTR_PAM_NOT_FOUN
48. Start Stop Mode Get Wave Generator Start Stop Mode Starts Recording In Sync With Wave Generator Get Maximum Number Of Wave Table Points Set Wave Generator Output Offset Get Wave Generator Output Offset Save Parameters To Nonvolatile Memory Set Wave Generator Table Rate Get Wave Generator Table Rate 10 2 2 E 517 GCS Commands Survey by Function Www pi ws The E 517 commands are listed below according to the following function groups m Motion Commands m Macros m Wave Generator m Data Recorder m Interface m Trigger Digital I O Lines m System Setup Calibration E 517 PZ214E Release 1 0 0 Page 124 GCS Commands Www pi ws PI Piezo Nano Positioning m Status Signal Values m Device Information m Miscellaneous Note that some commands are assigned to multiple groups Motion Commands 24 p 133 DRR p 152 GOH p 154 HLT p 156 IMP p 165 IMP p 166 MOV p 170 MOV p 171 MVR p 172 STE p 189 STE p 190 STP p 190 SVA p 191 SVA p 193 SVR p 195 Macros 8 p 132 24 p 133 MAC p 167 Stop All Motion Get Recorded Data Values Go To Home Position Halt Motion Smoothly Start Impulse And Response Measurement Get IMP Settings Set Target Position Get Target Position Set Target Relative To Current Position Start Step And Response Measurement Get STE Settings Stop All Motion Set Open Loop Axis Value Get Open Loop Axis
49. Strut test command failed because of an unexpected strut stop While MOV is running position can only be estimated Position was calculated during MOV motion Invalid handle No bios found Save system configuration failed Load system configuration failed Send buffer overflow Voltage out of limits Open loop motion attempted when servo ON Page 239 GCS Commands Piezo Nano Positioning 304 PI_CNTR_RECEIVING_BUFFER_OVERFLOW 305 PI_CNTR_EEPROM_ERROR 306 PI_CNTR_I2C_ERROR 307 PI_CNTR_RECEIVING_TIMEOUT 308 PI_CNTR_TIMEOUT 309 PI_CNTR_MACRO_OUT_OF_SPACE 310 PI_CNTR_EUI_OLDVERSION_CFGDATA 311 PI_CNTR_EUI_INVALID_CFGDATA 333 PI_CNTR_HARDWARE_ERROR 400 PI_CNTR_WAV_INDEX_ERROR 401 PI_CNTR_WAV_NOT_DEFINED 402 PI_CNTR_WAV_TYPE_NOT_SUPPORTED 403 PI_CNTR_WAV_LENGTH_EXCEEDS_LIMIT 404 PI_CNTR_WAV_PARAMETER_NR 405 PI_CNTR_WAV_PARAMETER_OUT_OF_LIMIT 406 PI_CNTR_WGO_BIT_NOT_SUPPORTED 555 PI_CNTR_UNKNOWN_ERROR 601 PI_CNTR_NOT_ENOUGH_MEMORY 602 PI_CNTR_HW_VOLTAGE_ERROR 603 PI_CNTR_HW_TEMPERATURE_ERROR 1000 PI_CNTR_TOO_MANY_NESTED_MACROS Www pi ws E 517 PZ214E Release 1 0 0 PI Received command is too long Error while reading writing EEPROM Error on 12C bus Timeout while receiving command A lengthy operation has not finished in the expected time Insufficient space to store macro Configuration data has old version number Invalid configuration data Internal hardware error Wave generator inde
50. TMN p 197 and TMX p 197 to ask for the current valid travel range limits Motion commands like IMP are not allowed when the E 517 is in OFFLINE mode or when the wave generator output is active When a macro is running on the E 517 IMP will be executed not until the macro is finished or stopped See Control Value Generation p 53 and Control Modes p 23 for details An impulse consists of a relative move of the specified amplitude followed by an equal relative move in the opposite direction Depending on the current servo mode the impulse is performed relative to the current position servo ON or to the current piezo voltage servo OFF In closed loop operation servo ON the given amplitude is interpreted as relative position value In open loop operation servo OFF the amplitude corresponds to a relative piezo voltage value IMP Get IMP Settings Description Format Arguments Response Get last sent IMP settings for the given axis IMP lt AxisID gt lt AxisID gt is one axis of the controller lt AxisID gt lt Amplitude gt LF where lt Amplitude gt is the height of the last commanded impulse See IMP p 165 for details E 517 PZ214E Release 1 0 0 Page 166 GCS Commands Www pi ws Piezo Nano Positioning PI MAC Call Macro Function Description Format Arguments Call a macro function Permits recording deleting and running macros on the controlle
51. To provide a meaningful value even if the system hardware stage controller electronics does not support an on target status signal software emulated on target reading is enabled by default with parameter 0x07010600 1 enabled The on target status can only be identified in closed loop operation servo ON and is influenced by the Tolerance parameter ID 0x07000900 the on target status is true if Current Position Target Position lt Tolerance The default tolerance value is 0 01 um Software emulated on target reading requires the following m Successful hardware operation m The velocity control mode for the axis should be set to ON with VCO command p 204 to have the control voltage increasing continuously during a certain small time period Otherwise the axis would immediately reach the target position and ONT monitoring would make no sense See figures below for examples VCO ON VCO OFF Current Position Current Position P aii S e Tolerance Target Position Tolerance Target Position Time Time ONT 0 ONT 1 ONT 1 With the On Target trigger mode set by the CTO command p 142 the on target status of the axis can be written to the corresponding trigger line See Example On Target Trigger Mode p 80 for more information www pi ws E 517 PZ214E Release 1 0 0 Page 57 Communication Piezo Nano Positioning PI 5 Communication 5 1 Interfaces Available The E 517 can be control
52. VCO p 204 VCO p 204 VEL p 205 VEL p 206 VER p 206 VMA p 207 VMA p 207 VMI p 208 VMI p 208 PI Piezo Nano Positioning Get Servo State Open Loop Closed Loop Operation Set Relative Open Loop Axis Value Get ADC Value Of Input Signal Tell Digital I O Lines Get Minimum Commandable Position Get Maximum Commandable Position Get Number Of Record Tables Get Number Of Output Signal Channels Get Number Of Input Signal Channels Get Input Signal Position Value Tell Valid Character Set For Axis Identifiers Clear All Wave Related Triggers Get Number Of Wave Generators Set TriggerLine Action To Waveform Point Get TriggerLine Action At Waveform Point Set Velocity Control Mode Get Velocity Control Mode Set Velocity Get Velocity Get Versions Of Firmware And Drivers Set Voltage Output High Limit Get Voltage Output High Limit Set Voltage Output Low Limit Get Voltage Output Low Limit E 517 PZ214E Release 1 0 0 Page 123 GCS Commands VOL p 209 WAV p 209 WAV p 219 WCL p 219 WGC p 220 WGC p 220 WGO p 221 WGO p 226 WGR p 227 WMS p 227 WOS p 228 WOS p 229 WPA p 229 WTR p 231 WTR p 233 PI Piezo Nano Positioning Get Voltage Of Output Signal Channel Set Waveform Definition Get Waveform Definition Clear Wave Table Data Set Number Of Wave Generator Cycles Get Number Of Wave Generator Cycles Set Wave Generator
53. Value Set Relative Open Loop Axis Value Query If Macro Is Running Stop All Motion Stops macro execution Call Macro Function E 517 PZ214E Release 1 0 0 Page 125 GCS Commands Www pi ws MAC p 170 STP p 190 Wave Generator 9 p 133 24 p 133 CTO p 142 DRR p 152 GWD p 154 STP p 190 TWC p 200 TWG p 200 TWS p 201 TWS p 203 WAV p 209 WAV p 219 WCL p 219 WGC p 220 WGC p 220 WGO p 221 WGO p 226 WGR p 227 WMS p 227 WOS p 228 WOS p 229 PI Piezo Nano Positioning List Macros Stop All Motion Stops macro execution when used inside the macro Get Wave Generator Status Stop All Motion Stops wave generator output Set Configuration Of Trigger Output Get Recorded Data Values Get Wave Table Data Stop All Motion Stops wave generator output Clear All Wave Related Triggers Get Number Of Wave Generators Set TriggerLine Action To Waveform Point Get TriggerLine Action At Waveform Point Set Waveform Definition Get Waveform Definition Clear Wave Table Data Set Number Of Wave Generator Cycles Get Number Of Wave Generator Cycles Set Wave Generator Start Stop Mode Starts wave generator output Get Wave Generator Start Stop Mode Starts Recording In Sync With Wave Generator Get Maximum Number Of Wave Table Points Set Wave Generator Output Offset Get Wave Generator Output Offset E 517 PZ214E Release 1 0 0 Page 126
54. Wave Generator Started by Trigger Input p 100 for an example 7 2 Configuring Trigger Output Www pi ws This section describes how to program the digital output lines of the E 517 using the CTO command p 142 to trigger other devices The current trigger output configuration set with CTO can be saved with the WPA command p 229 send WPA 100 E 517 PZ214E Release 1 0 0 Page 77 PI External Triggering Signaling Piezo Nano Positioning The general format of the CTO command is as follows i e all trigger related settings for a digital output line can normally be made with one command line the number of arguments following a command mnemonic is limited to 32 CTO lt TrigOutID gt lt CTOPam gt lt Value gt The following CTO trigger modes are supported by the E 517 m 0 Position Distance a trigger pulse is written whenever the axis has covered a given distance See Example Position Distance Trigger Mode m 2 OnTarget the on target status of the selected axis is written to the selected trigger output line See Example On Target Trigger Mode m 3 MinMaxThreshold values for MinThreshold and MaxThreshold must be defined When the axis position of the selected axis is inside the band specified by the MinThreshold and MaxThreshold values the selected trigger output line is set high otherwise it is set low See Example MinMax Threshold Trigger Mode m 4 Generator Trigger enables tri
55. Wave Related Triggers Set TriggerLine Action To Waveform Point Get TriggerLine Action At Waveform Point Set Wave Generator Start Stop Mode Selects trigger input and output options for the wave generator System Setup Calibration ATC p 134 ATC p 137 ATS p 138 CCL p 139 CCL p 140 CSV p 141 CSV p 141 DCO p 145 DCO p 146 DFH p 146 DFH p 149 NLM p 173 NLM p 174 PLM p 177 PLM p 178 RPA p 179 Start Auto Calibration Get Auto Calibration Settings Get Auto Calibration Status Set Command Level Get Command Level Set GCS Syntax Version Get Current Syntax Version Set Drift Compensation Mode Get Drift Compensation Mode Define Current Position As Axis Home Position Get Home Position Definition Set Low Position Soft Limit Get Low Position Soft Limit Set High Position Soft Limit Get High Position Soft Limit Reset Volatile Memory Parameters E 517 PZ214E Release 1 0 0 Page 128 GCS Commands Www pi ws SAI p 181 SAI p 182 SEP p 183 SEP p 184 SPA p 185 SPA p 188 SVO p 193 SVO p 194 VCO p 204 VCO p 204 VEL p 205 VEL p 206 VMA p 207 VMA p 207 VMI p 208 VMI p 208 WPA p 229 PI Piezo Nano Positioning Set Current Axis Identifiers Get List Of Current Axis Identifiers Set Nonvolatile Memory Parameters Get Nonvolatile Memory Parameters Set Temporary Memory Parameters Get Temporary Mem
56. Www pi ws E 517 PZ214E Release 1 0 0 Page 93 Wave Generator Ramp Curves Piezo Nano Positioning PI WAV command Comments Waveform Segment WAV 4 X RAMP 2000 20 10 2000 0 100 1000 lt WaveTablelD gt 4 lt AppendWave gt X lt WaveType gt RAMP lt SegLength gt 2000 lt Amp gt 20 lt Offset gt 10 lt WaveLength gt 2000 lt StartPoint gt 0 lt SpeedUpDown gt 300 lt CurveCenterPoint gt 1000 The previous contents of the wave table are overwritten by the new segment waveform offset 10 Do not confuse with the wave generator output offset set with WOS symmetric curve D 2 lt WAV 4 X RAMP 2000 35 0 2000 499 100 1000 lt WaveTablelD gt 4 lt AppendWave gt X lt WaveType gt RAMP lt SegLength gt 2000 lt Amp gt 35 lt Offset gt 0 lt WaveLength gt 2000 lt StartPoint gt 499 lt SpeedUpDown gt 300 lt CurveCenterPoint gt 1000 The previous contents of the wave table are overwritten by the new segment symmetric curve center point Speed up dawn Amplitude Start point Segment length Wave length WAV 5 X RAMP 2000 15 0 1800 120 50 900 lt WaveTablelD gt 5 lt AppendWave gt X lt WaveType gt RAMP lt SegLength gt 2000 lt Amp gt 15 lt Offset gt 0 lt WaveLength gt 1800 lt StartPoint gt 120 lt SpeedUpDown gt 150 lt CurveCenterPoint gt 900
57. a command line can not be executed the line is not executed at all When all arguments are optional and are omitted the command is executed for all possible argument values For example RPALF resets all parameters in volatile memory The lt AxisID gt argument is used for the logical axes of the controller Depending on the controller an axis could be identified with up to 16 characters all alphanumeric characters and the underscore are allowed See Accessible Items and Their Identifiers p 50 for the identifiers E 517 PZ214E Release 1 0 0 Page 118 GCS Commands Piezo Nano Positioning PI supported by the E 517 Definitions for query commands report commands CMD SP lt argument gt LF When all arguments are optional and are omitted all possible values are reported For example POS queries the position of all axes Reply syntax lt argument gt SP lt argument gt lt value gt LF Multi line reply syntax lt argument gt SP lt argument gt lt value gt SP LF lt argument gt SP lt argument gt lt value gt LF for the last line The command CMD SP lt arg3 gt SP lt arg1 gt SP lt arg2 gt LF replies in the same order lt arg3 gt lt value3 gt SP LF lt arg1 gt value1 SP LF lt arg2 gt value2 LF Example Send TSP 2 1 Report 2
58. allows the system to settle down regression time We need another macro which initializes the E 517 and then calls the scanline macro Create the following macro named scan MAC B ONL 1 SVO A VEL A MOV A WGC 1 MAC NSTART UNIDIR 5 MAC END Run the macro with MAC START SCAN Watch the motion on the controller display After 5 steps of 2 um axis A returns to 0 00 um whereas the position of axis B is increased by 2 um If you decide to change the starting point of the scan area lower left corner you have to adjust the MOV A 0 B 0 command in the SCAN macro as well as the offset parameter in the wave definitions www pi ws E 517 PZ214E Release 1 0 0 Page 106 Wave Generator Piezo Nano Positioning PI Bidirectional XY Scan If measurements can be done in back and forth motion the scan can be performed more rapidly because there is just a small Y step between the X scanlines But as can be seen in the graph below the backward motion falling edge differs from the forward motion rising edge This is why a macro is required that toggles between the two waveforms e e o eot 8 2um a gt e he be gt e gt o E e4 0 0 o4 0 lt 1 2 3 4 5 e gt e gt e gt e gt e Figure 22 Bidirectional XY scan A delay time regression time Figure 23 Position over time for axis A and B Www pi ws E 517 PZ214E Release 1 0 0 Page 107 Wave Generator Piezo Nano Positioni
59. axes are halted none Illegal axis identifier HLT stops motion of all axes caused by move commands MOV p 170 MVR p 172 GOH p 154 SVA p 191 SVR p 195 After the axes are stopped if servo is on their target positions are set to their current positions or if servo is off their open loop control values are set to their last valid control values HPA Get List Of Available Parameters Description Format Arguments Www pi ws Responds with a help string which contains all available parameters with short descriptions See Controller Parameters p 250 for further details The listed parameters can be changed and or saved using the following commands SPA p 185 affects the parameter settings in volatile memory RAM WPA p 229 copies parameter settings from RAM to non volatile memory SEP p 183 writes parameter settings directly into non volatile memory without changing RAM settings RPA p 179 resets RAM to the values from non volatile memory HPA none E 517 PZ214E Release 1 0 0 Page 157 GCS Commands Piezo Nano Positioning PI Response lt PamlID gt lt string gt LF where lt PamlID gt is the ID of one parameter hexadecimal format lt string gt is a string which describes the corresponding parameter The string has following format lt CmdLevel gt TAB lt MaxItem gt TAB lt DataType gt TAB lt FunctionGroup Description gt TAB lt ParameterDescrip
60. can be adjusted by parameters 0x02000300 and 0x02000200 see Calibration Settings p 38 for details With E 517 i1 models only one axis one sensor and one piezo channel are physically available even though you should manage it to enable more in firmware and display With E 500 modular systems the channels in the chassis are counted from right to left front view The actual occupancy of the slots has no influence on the channel and axis counting E g the amplifier and sensor servo modules in the leftmost slots are always identified as the third piezo channel ID 6 and the third sensor channel ID 3 and the corresponding axis is always the third axis C by default whether the other slots are occupied by modules or not E 517 PZ214E Release 1 0 0 Page 33 Operation You can configure the following E 517 settings Setting Piezo Nano Positioning PI Effect On Parameter Possible Notes ID Values Axes channels accessible in the E 517 firmware LCD display content All commands related to axes and channels direct influence on the response to SAI p 181 current axis identifiers TSC p 199 number of sensor channels TPC p 198 number of piezo channels Sensor Enable ID 0x02000000 Channel hidden or shown in the display number of decimal places and unit display for a channel Display Format ID 0x04000E01 Display Unit ID 0x04000E00 Example 1 Hardware upgrade 0 D
61. commanded open loop control value Servo must be off when using this command open loop operation SVR lt AxisID gt lt Difference gt lt AxisID gt is one axis of the controller lt Difference gt is the value which is added to the current open loop control value See below for details none The specified control value is out of limits The limitation results from the voltage limit parameters IDs 0x0B000007 0x0B000008 0x0C000000 and 0x0C000001 of the piezo channels which would be involved in the axis motion Illegal axis identifier Servo is On for one of the specified axes Motion commands like SVR are not allowed when the E 517 is in OFFLINE mode or when the wave generator output is active When a macro is running on the E 517 SVR will be executed not until the macro is finished or stopped See Control Value Generation p 53 and Control Modes p 23 for details E 517 PZ214E Release 1 0 0 Page 195 GCS Commands Www pi ws Notes Piezo Nano Positioning PI The lt Difference gt value is to be given as a piezo voltage value in V The SVR command can be interrupted by 24 p 133 STP p 191 and HLT p 156 TAD Get ADC Value Of Input Signal Description Format Arguments Response Note Get the current value from the specified input signal channel s A D converter Using this command it is possible to check for sensor overflow TAD lt InputSignallD gt lt
62. doing so observe the position display for the axis in the Position field and the current output voltage for the corresponding piezo actuator in the stage in the Voltage field of the Piezo channels tab card The output voltage values should follow the commanded values At 0 V output voltage the current position value of the axis should be approximately 0 um but due to the calibration settings of the system the axis position can differ from 0 by about 20 of the axis travel range You can also use the lt and gt buttons to decrement increment the commanded value by the value given in the Step size field 1 0 V in the figure below Arrow buttons causing motion PIMikroMove TM 2 2 5 42 Connections E 517 172 17 128 86 Tools few hb s s HOOD DERfe HAR O groller macros Target Openloop Value gt Step size Position HALT State Velocity Servo Usesoftlimits aa p UNKNOWN_STAGE 1 lt 0 000000 C11 00000 9 S 1 000000 18 824900 ETTER 1 000000 bb p UNKNOWN _STAGE i lt j lt 0 000000 0 000000 gt gt i 1 000000 11 481000 1 000000 ac p UNKNOWN_STAGE i lt 0 000000 0 000000 gt gt i 1 000000 1 506300 10 000000 g Sensor channels A D Value Sensor Pos Normalized Value 1 18 817200 2 1721562 11 475 00 3 1791519 1 495900 www pi ws E 517 PZ214E Release 1 0 0 Page 18 First Steps Piezo Nano Positioning PI If open loop operation is successful you can switch to closed loop op
63. format WGO 1 0x3001 The same command with lt StartMode gt given in decimal format WGO 1 12289 E 517 PZ214E Release 1 0 0 Page 225 GCS Commands Piezo Nano Positioning PI Example 2 Wave generator 1 is to be started with the option start at the endpoint of the last cycle bit 8 value 0x100 dec 256 The start mode is to be triggered by external signal synchronized by servo cycle bit 1 value 0x2 dec 2 Hence the resulting lt StartMode gt value is in hex format 0x100 0x2 0x102 or in dec format 256 2 258 Send WGO 1 0x102 or WGO 1 258 WGO Get Wave Generator Start Stop Mode Description Get the start stop mode of the given wave generator The 9 single character command p 133 can be used to query the current activation state of the wave generators The reply shows if a wave generator is running or not but does not contain any information about the wave generator start mode With WGO you can ask for the last commanded wave generator start options WGO settings p 221 Note that 24 p 133 or STP p 191 stop the wave generator output but do not reset the start stop mode settings so that WGO will still report the start mode which was set by the last WGO command p 221 For more information see Wave Generator p 84 Format WGO lt WaveGenID gt Arguments lt WaveGenID gt is the wave generator identifier Www pi ws E 517 PZ214E Release 1 0 0 Page 226 GCS C
64. from a running macro SVA p 191 SVR p 195 IMP p 165 STE p 189 by trackball settings p 22 and by the wave generator p 84 When the control mode is switched from OFFLINE to ONLINE the open loop control value is set to the value of the Default Voltage parameter ID 0x07000C01 See Control Value Generation p 53 for details The open loop control value returned by SVA is to be interpreted as piezo voltage value in V SVA gets the commanded open loop values for the axes Use VOL p 209 to get the current voltage output of the piezo channels SVO Set Servo State Description Format Sets servo control state for given axes open loop or closed loop operation SVO lt AxisID gt lt ServoState gt E 517 PZ214E Release 1 0 0 Page 193 GCS Commands Www pi ws Arguments Response Troubleshooting Notes Piezo Nano Positioning PI lt AxisID gt is one axis of the controller lt ServoState gt can have the following values 0 servo off open loop operation 1 servo on closed loop operation none Illegal axis identifier CAUTION In ONLINE mode the SERVO switches of all channels must be set to OFF on the piezo control electronics Otherwise the SVO command has no complete control over the servo mode settings When the servo is switched on for an axis the target position is set to the current position and when it is switched off the last valid control value rema
65. generators use the TWG command p 200 The maximum number of wave tables is given by the Number of Waves Tables parameter ID 0x1300010A The maximum number of points per table can be queried with the WMS command p 227 or via the Max Wave Points of table i parameter ID 0x13000201 Use the SPA command p 188 to ask for the parameter values Www pi ws E 517 PZ214E Release 1 0 0 Page 84 Wave Generator Piezo Nano Positioning PI 8 1 2 Basic Operation 1 Define the waveform segment by segment using the WAV command p 209 The waveform will be written to the selected wave table 2 Start the wave generator output and hence the motion of the axis using the WGO command p 221 You can choose several start options e g start stop by external trigger see the description of the WGO command for more information When starting the wave generator data recording is started automatically 3 Stop the wave generator output with WGO or 24 p 133 or STP p 190 The simple example below shows how to start periodic motion of the first axis A by default using the command entry facilities of PIMikroMove or PlTerminal Command String to Send Action Performed WAV 1 X SIN_P 2000 20 10 2000 0 1000 Define a inverted cosine waveform for Wave Table 1 belongs to the first axis see WAV description for details WGO 1 1 Start output of Wave Generator 1 belongs to the first axis immediately and synchronized by se
66. in the corresponding User Manual s On power on or reboot with the RBT command p 178 the E 517 copies information from non volatile memory to volatile memory The control mode is reset to OFFLINE and the servo mode to open loop operation You can define a start up macro which runs on power on or reboot see Working with Controller Macros p 113 for more information To skip the execution of the start up macro press the trackball on the E 517 once immediately after you have powered on or rebooted the piezo control electronics while Physik Instrumente is still shown on the display NOTE TCP IP communication If no DHCP server is available on the network or if a point to point connection between host PC and controller is being used after power on or reboot it might take a period of about 30 seconds before communication is possible 3 5 How to Customize the System www pi ws NOTES Values stored in non volatile memory are power on defaults so that the system can be used in the desired way immediately Note that PI records the data files of every E 517 controller calibrated at the factory for easy restoration of original settings should that ever be necessary E 517 PZ214E Release 1 0 0 Page 30 Operation Piezo Nano Positioning PI 3 5 1 Set System Parameters www pi ws CAUTION Incorrect parameter values may lead to improper operation or damage to your hardware Be careful when changing parameters
67. limits command ERR 0 error 0 No error occurred since the last ERR No error query VMA A 100 Set voltage output high limit for the axis to 100 volts SVA A 100 Set the output voltage for axis A to 100 volts SVA A A 0100 0000 Query the commanded output voltage It resulted from the last valid SVA command VOL 1 1 0099 3135 Query the current output voltage of piezo channel 1 POS A A E0106 1647 Query the current position axis A The nominal travel range 0 to 100 V is 100 um with a tolerance of 20 SVR A 20 Move axis A relative by subtracting 20 volts from the current output voltage VoL 1 1 0080 4106 Query the current output voltage of piezo channel 1 POS A A 0093 9297 Query the current position axis A Www pi ws E 517 PZ214E Release 1 0 0 Page 28 Operation Www pi ws Example 2 PI Piezo Nano Positioning This example moves three axes in closed loop operation Afterwards the current position is queried It is discovered that axis B is blocked by an external hard stop It will then be moved back to its zero position Hardware E 500 system with 3 channels each equipped with a sensor servo module piezo stage with 3 axes Command String to Send Response Action Performed ONL 1 12131 Switch all piezo channels identifiers 1 2 3 to ONLINE mode so that axis motion can be caused by move commands received via interface or from a running macro wave
68. lost when the E 517 is powered down VMA Get Voltage Output High Limit Description Get the high limit of the piezo voltage soft limit Format VMA lt OutputSignallD gt Arguments lt OutputSignallD gt is one piezo channel of the piezo control electronics Response lt OutputSignallD gt lt HighLimit gt LF where lt HighLimit gt is the high limit of the output voltage in V Notes VMA queries the voltage limit given by the Output Voltage High Limit parameter ID 0x0C000001 in volatile memory Www pi ws E 517 PZ214E Release 1 0 0 Page 207 GCS Commands Piezo Nano Positioning PI VMI Set Voltage Output Low Limit Description Gives the low limit of the piezo voltage soft limit Format VMI lt OutputSignallD gt lt LowLimit gt Arguments lt OutputSignallD gt is one piezo channel of the piezo control electronics lt LowLimit gt is the low limit of the output voltage in V Response None Notes VMI concerns the value of the Output Voltage Low Limit parameter ID OxOCOO0000 The voltage value set with VMI must be equal to or larger than the voltage limit given by parameter 0x0B000007 The voltage limit set with VMI is saved in volatile memory RAM only To save the currently valid value to non volatile memory where it becomes the power on default you must use WPA p 229 Changes not saved with WPA will be lost when the E 517 is powered down VMI Get Voltage Output Low L
69. of piezo channels If disabling was successful the response is 1 SPA 2 0x04000e01 1 2 0x04000e00 Hide the second sensor channel ID 2 from the display and remove the unit setting SPA 5 0x04000e01 1 5 0x04000e00 Hide the second piezo channel ID 5 from the display and remove the unit setting WPA 100 Save the current E 517 configuration to make it the power on default Www pi ws E 517 PZ214E Release 1 0 0 Page 37 Operation Piezo Nano Positioning PI 3 5 3 Calibration Settings The E 517 comes calibrated i e the offset and the gain settings for the sensor and piezo electronics and for the internal A D and D A converters are optimized for highest precision of the present hardware electronics and stage s Recalibrate the lt Produktname only in the following cases m New stage added to the system or stage replaced m Changes of the piezo control electronics NOTES For successful calibration of the E 517 as described here it is important that m All stages are connected to the piezo control electronics m The SERVO switches of all channels are set to OFF on the piezo control electronics m The hardware is free from defects m The calibration facilities physically present on the hardware e g potentiometers are properly adjusted see the User Manual s of the piezo control electronics for calibration instructions If you install new electronics channels which were or
70. of write access to system parameters Format CCL lt Level gt lt PSWD gt Arguments lt Level gt is one command level of the controller lt PSWD gt is the password required for changing to the appropriate command level The following command levels and passwords are valid Level 0 is the default setting all commands provided for normal users are available read access to all parameters no password required Www pi ws E 517 PZ214E Release 1 0 0 Page 139 GCS Commands Piezo Nano Positioning PI Level 1 adds additional commands and write access to level 1 parameters commands and parameters from level 0 are included The required password is advanced Level gt 1 is provided for PI service personnel only Users can not change to a level gt 1 Contact your Physik Instrumente Sales Engineer or write info pi ws if there seem to be problems with level 2 or higher parameters Response none Troubleshooting Invalid password Notes HLP p 156 lists all commands available in the current command level HPA p 157 lists the parameters including the information about which command level allows write access to them For more information about parameter handling see Controller Parameters p 250 After controller power on or reboot the active command level is always Level 0 CCL Get Command Level Description Get the active command level Format CCL Arguments none Response lt L
71. on board If the host PC uses a USB to serial adapter instead data loss could occur during communication especially when transferring large amounts of data With the GPIB IEEE 488 interface check the device address With the TCP IP connection connect the controller to a network access point before you power it on Check IP address and IP mask the settings of the devices in the network must be compatible e g the IP address of each device must be unique Make sure that your network administrator has not set the network to forbid unknown devices like the E 517 to log on Note that if the controller is already connected to your or another host PC via TCP IP a second TCP IP session cannot be established Presently E 517 PZ214E Release 1 0 0 Page 258 Troubleshooting Piezo Nano Positioning PI Www pi ws only one port 50000 is available on the E 517 so that only one application at a time can use the TCP IP connection gt The first time you connect over the USB interface be sure you are logged on the PC as a user having administrator rights After the E 517 is powered on a message will appear on the PC screen saying that new hardware has been detected Follow the on screen instructions and insert the E 517 CD The required FTDI hardware drivers are found in the USB_Serial_Driver directory Controller was power cycled or rebooted With TCP IP and USB connections communication can not be maintained after the E 517 i
72. pi ws Notes An axis could be identified with up to 8 characters Use TVI p 200 to ask for valid characters SAI affects the Axis Name parameter ID 0x07000600 in volatile memory RAM To save the currently valid value to non volatile memory where it becomes the power on default you must use WPA p 229 Changes not saved with WPA will be lost when the E 517 is powered down SAI Get List Of Current Axis Identifiers Description Gets the axis identifiers See also Accessible Items and Their Identifiers p 50 Format SAI ALL Arguments ALL is optional and provided for compatibility with controllers which allow for axis deactivation ALL then ensures that the answer also includes the axes which are deactivated Response lt AxisID gt LF lt AxisID gt is one axis of the controller E 517 PZ214E Release 1 0 0 Page 182 GCS Commands Www pi ws Piezo Nano Positioning PI SEP Set Non Volatile Memory Parameters Description Format Arguments Response Troubleshooting Set a parameter of a given item to a different value in non volatile memory where it becomes the new power on default After parameters were set with SEP you can use RPA p 179 to activate them write them to volatile memory without controller reboot Caution This command is for setting hardware specific parameters Wrong values may lead to improper operation or damage of your hardware Related com
73. range After the hardware installation the E 517 must be configured as follows with all stages connected to the channels Command String to Send Response Action Performed CCL 1 advanced Switch to command level 1 to have write access to the configuration parameters SPA 2 0x02000000 1 3 0x02000000 1 Enable sensor channels 2 and 3 and hence also the second and the third axis B and C by default and piezo channels 2 and 3 SAI Get the axis identifiers of all axes which are accessible by commands If enabling was successful the response shows axes A B and C TSC Get the number of sensor channels If enabling was successful the response is 3 TPC Get the number of piezo channels If enabling was successful the response is 3 SPA 2 0x04000e01 3 2 0x04000e00 um Show the second sensor channel ID is 2 in the display with 3 decimal places and the unit um SPA 5 0x04000e01 2 5 0x04000e00 V Show the second piezo channel ID is 5 in the display with 2 decimal places and the unit V SPA 3 0x04000e01 3 3 0x04000e00 um Show the third sensor channel ID is 3 in the display with 3 decimal places and the unit um SPA 6 0x04000e01 2 6 0x04000e00 v Show the third piezo channel ID is 6 in the display with 2 decimal places and the unit V SPA 2 0x02000300 5 2 0x02000200 0 2 0x0B000003 10 2 0x0B00000A 0 Adjust the Ksen Osen Kpzt a
74. record options to data recorder tables Settings can be saved with WPA depending on the number of points Lists available record options gives information about additional parameters concerned with data recording Triggers recording Changes the data recorder table rate in volatile memory Data Recorder Table Rate parameter ID 0x16000000 Reads the current setting of the data recorder table rate Data Recorder Table Rate parameter ID 0x16000000 Triggers recording Reads the number of available data recorder tables Maximum Number of Channels parameter ID 0x16000100 eee recording So recording mand Reference p 131 For the identifiers of the items which can be addressed with the commands see Accessible Items and Their Identifiers p 50 Www pi ws E 517 PZ214E Release 1 0 0 Page 75 Data Recording Piezo Nano Positioning PI Parameter Command Item Type Max Data Parameter ID Level Concerned No of Type Description Items 0x16000000 0 System 1 INT Data Recorder Table Rate 0x16000100 3 System 1 INT Max Number of Data Recorder Channels 0x16000200 3 System 1 INT Data Recorder Max Points 0x16000201 3 Data 3 INT Maximum record Recorder points of table i Table See Controller Parameters p 250 for more information regarding the controller parameters and their handling Www pi ws E 517 PZ214E Release 1 0 0 Page 76 External Trig
75. segment Gives the phase shift in points Lowest possible value is 0 lt g gt The phase shift in degrees Lowest possible value is 0 lt B gt The offset of the tangent curve For CFG the wave type dependent parameters are lt n gt lt m gt lt p gt lt k gt lt s gt lt L gt The settings for parameters lt k gt and lt s gt can be saved to non volatile memory as power up defaults and are also available via separate commands see below The settings for parameters lt n gt lt m gt lt p gt and lt L gt are valid until a new WAV command is sent or the wave table content is cleared or the controller is powered down or rebooted If less than six parameters are specified the values are assigned in order left to right and the unspecified parameters retain their previous values lt n gt integer the length of the periodic waveform i e how many points are to be included in one period of the waveform Must be between 1 and 8192 lt m gt integer amount by which the current point pointer is incremented each time Must be between 1 and 8191 E 517 PZ214E Release 1 0 0 Page 217 GCS Commands Www pi ws Response Troubleshooting Piezo Nano Positioning PI lt p gt integer phase shift of periodic waveform i e which point is the starting point of the waveform Must be between 1 and 8191 lt k gt integer the number of interrupts samples before incrementing the current point pointer
76. specific ONL commands p 174 sent over the communications interface or received from a macro running on the E 517 m Pressing the trackball on the E 517 front panel when the main screen is displayed switches the mode for all channels at once The current control mode is visible for the individual channels on the main screen of the E 517 display see Display Screens p 21 Using the ONL command p 175 you can check the current control mode on a per channel basis NOTES Upon power on or reboot all piezo channels of the system are by default in OFFLINE mode You can switch them to ONLINE mode using a start up macro see Start Up Macro p 115 for details In OFFLINE mode the E 517 accepts all commands just as in ONLINE mode The only difference between the modes is the control source selection of the channel In ONLINE mode the SERVO switches of all channels must be set to OFF on the piezo control electronics 3 2 2 Servo Mode ON OFF The current servo mode determines if a motion axis is driven in open loop servo OFF or closed loop servo ON operation m Closed loop operation Any control input analog DC offset E 517 input like move commands trackball settings and wave generator output is interpreted as target position Based on this target position and on the position feedback of the corresponding sensor channel a servo loop generates the control value for the piezo channel The servo loop thus maintains th
77. started before previous operation completed IEEE488 No capability for intended operation Page 242 GCS Commands Piezo Nano Positioning 24 COM_GPIB_EFSO 25 COM_GPIB_EBUS 26 COM_GPIB_ESTB 27 COM_GPIB_ESRQ 28 COM_GPIB_ETAB 29 COM_GPIB_ELCK 30 COM_RS_INVALID_DATA BITS 31 COM_ERROR_RS_SETTINGS 32 COM_INTERNAL_RESOURCES_ERROR 33 COM_DLL_FUNC_ERROR 34 COM_FTDIUSB_INVALID_HANDLE 35 COM_FTDIUSB_DEVICE_NOT_FOUND 36 COM_FTDIUSB_DEVICE_NOT_OPENED 37 COM_FTDIUSB_IO_ERROR 38 COM_FTDIUSB_INSUFFICIENT_RESOURCES 39 COM_FTDIUSB_INVALID_PARAMETER 40 COM_FTDIUSB_INVALID_BAUD_RATE 41 COM_FTDIUSB_DEVICE_NOT_OPENED_FOR_ERASE 42 COM_FTDIUSB_DEVICE_NOT_OPENED_FOR_WRITE 43 COM_FTDIUSB_FAILED_TO_WRITE_DEVICE Www pi ws E 517 PZ214E Release 1 0 0 PI IEEE488 File system operation error IEEE488 Command error during device call IEEE488 Serial poll status byte lost IEEE488 SRQ remains asserted IEEE488 Return buffer full IEEE488 Address or board locked RS 232 5 data bits with 2 stop bits is an invalid combination as is 6 7 or 8 data bits with 1 5 stop bits RS 232 Error configuring the COM port Error dealing with internal system resources events threads A DLL or one of the required functions could not be loaded FTDIUSB invalid handle FTDIUSB device not found FTDIUSB device not opened FTDIUSB IO error FTDIUSB insufficient resources FTDIUSB invalid parameter FTDI
78. switched to the E 516 GCS syntax version Not all parameters of the E 517 are present as E 516 parameters and the IDs of the available parameters differ from the E 517 parameter IDs See the E 516 documentation for available parameters 3 6 Updates 3 6 1 Software Updates www pi ws Updated releases of software and manuals are available for download at www pi ws While the manuals are freely accessible you need a password for the software download This password is provided on the E 517 CD in the E 517 Releasenews PDF file in the Manuals directory To download the latest software complete CD mirror from the PI Website proceed as follows 1 On the www pi ws front page click on Download Support in the Service section on the left 2 On the Download Support page click on Manuals and Software 3 On the PI Download Server page enter the Username and the Password which are provided in the E 517 Releasenews xxxxx pdf on the E 517 CD and click on Login 4 Click on Download in the navigation bar across the top 5 Click on the E Piezo Drivers amp Nanopositioning controllers category 6 Click on E 517 7 Click on Software if you click on Documents you will get the latest manuals 8 Click the download button below the latest CD Mirror includes the manual versions that were with the release E 517 PZ214E Release 1 0 0 Page 45 Operation Piezo Nano Positioning PI 3 6 2 Firmware Updates The overall firmware revision of you
79. system to the individual application See Controller Parameters p 250 for more information E Command Levels Command levels determine the availability of commands and the write access to the controller parameters Changing the current active command level may require a password and can be done with the CCL command p 139 E Special Features Wave generator Each axis can be controlled by a wave generator which outputs user specified patterns so called waveforms This feature is especially important in dynamic applications which require periodic synchronous motion of the axes See Wave Generator p 84 for more information Data recorder The E 517 comprises a real time data recorder It is able to record several input and output signals e g current position control voltage from different data sources e g axes or output signal channels See Data Recording p 71 for more information Macros The E 517 can store macros The macro feature allows defining command sequences and storing them permanently in non volatile memory in the device It is possible to define a macro Www pi ws E 517 PZ214E Release 1 0 0 Page 49 System Description Piezo Nano Positioning PI that will be executed automatically every time the E 517 is started facilitating stand alone operation without a host computer See Working with Controller Macros p 113 for more information Software on Host PC Usually a host computer i
80. that the IP address and port number were correctly transferred to the Hostname and Port fields Then press the Connect button to establish the connection E 517 PZ214E Release 1 0 0 Page 62 Communication Piezo Nano Positioning PI Start up controller je Ey 2jxj 1 Connect controler E 517 Controller RS 232 IEEE 488 FToruse TCP IP Hostname f TCP IP Address 172 17 128 86 Ey Port 50000 2 mals PI Controllers a a 7 Search for controllers J O eee E 3 Start up axes E 753 Version Info Figure 7 The connection dialog in PIMikroMove NOTE In the controller selection list you can also identify the controllers which already have a TCP IP connection open If you try to connect to such a controller an error message will be generated as no multiple TCP IP connections are possible 5 3 2 PC with Ethernet Card The IP address and IP mask settings of PC and E 517 must be compatible with each other in the following cases because otherwise no connection can be established m The E 517 is directly connected to an Ethernet connection of the PC m E 517 and host PC both are connected to the same network where no DHCP server is available in this case the settings must also be compatible with those of any other devices in the network You can configure either the PC or the E 517 settings to be compatible If you have a network with multiple E 517s the settings of the individ
81. the E 517 every time motion is to be performed When you start macro3 this implicates that macro2 is executed 10 times Write macro2 MAC BEG macro2 MOV A 10 B 10 C 10 DEL 1000 MOV A O0BOCO DEL 1000 MAC END Write macro3 MAC BEG macro3 ONL 112131 SVOAI1LBI1CI1 vcoA1B1Cl1 DCOAITBI1Cl1 VEL A 100 B 100 C 100 MAC NSTART macro2 10 MAC END Www pi ws E 517 PZ214E Release 1 0 0 Page 114 Working with Controller Macros Piezo Nano Positioning PI 9 2 Starting Macro Execution A defined macro can be run by the command MAC START lt macroname gt where lt macroname gt is the name that was given to the macro to be run To run a macro multiple times call it with MAC NSTART lt macroname gt n where n gives the number of times the macro is to be run Macro execution will be stopped if there is an error in the macro either syntax error or illegal command If the E 517 is in OFFLINE mode move commands from a running macro are not allowed they provoke an error message See Control Modes p 23 for details A macro can be started when the wave generator is running but move commands from the macro are not executed and provoke an error message Commands sent when a macro is running will be executed not until the macro is finished or stopped The only exceptions are 5 6 7 8 9 and 24 which are executed immediately When a macro is running trackball settings can be used in parallel to command axis moti
82. the commanded axis prior to using this command closed loop operation MOV lt AxisID gt lt Position gt lt AxisID gt is one axis of the controller lt Position gt is the new absolute target position in physical units none Target position out of limits Use TMN p 197 and TMX p 197 to ask for the current valid travel range limits Illegal axis identifier Servo is Off for one of the axes specified Motion commands like MOV are not allowed when the E 517 is in OFFLINE mode or when the wave generator output is active When a macro is running on the E 517 MOV will be executed not until the macro is finished or stopped See Control Value Generation p 53 and Control Modes p 23 for details E 517 PZ214E Release 1 0 0 Page 170 GCS Commands Notes Example 1 Example 2 Example 3 Piezo Nano Positioning PI During a move a new move command resets the target to a new value and the old one may never be reached The MOV command can be interrupted by 24 p 133 STP p 190 and HLT p 156 Send MOV 1 10 Note Axis 1 moves to 10 target position in um Send MOV 1 243 Send ERR Receive 7 Note The axis does not move The error code 7 in the reply to the ERR command p 153 indicates that the target position given in the move command is out of limits Send MOV 1 10 2 100 3 4000 Send ERR Receive 7 Note The axes do not move The error code 7 in the repl
83. the current interface settings with SPA it may be necessary to close the current connection and re open it with the new settings In addition to the general modification commands there are commands which change certain specific parameters All the commands listed below except of IFS change the parameter value only in volatile memory and WPA must be used to save the value to non volatile memory IFS changes and saves the interface parameters directly in non volatile memory only DFH p 146 User Origin ID 0x07010200 IFC p 159 interface parameters RS 232 Baud Rate ID 0x11000400 GPIB Address ID 0x11000900 IP Address ID 0x11000600 IP Configuration ID 0x11000800 IP Mask ID 0x11000700 RTR p 180 Table Rate for data recording ID 0x16000000 SAI p 181 Axis Name i e the axis identifier ID Ox07000600 VEL p 205 Servo Loop Slew Rate ID 0x07000200 VMA p 207 Output Voltage High Limit ID OxOC000001 VMI p 208 Output Voltage Low Limit ID OxO0CO00000 WAV p 209 with CFG wave type Wave Offset ID 0x1300010B and Wave Generator Table Rate ID 0x13000109 WGC p 220 Wave Generator Cycles ID 0x13000003 WOS p 228 Wave Offset ID 0x1300010B WTR p 231 Wave Generator Table Rate ID 0x13000109 E 517 PZ214E Release 1 0 0 Page 250 Controller Parameters Piezo Nano Positioning PI www pi ws IFS p 163 the same interface parameters as IFC but in no
84. type concerned See Accessible Items and Their Identifiers p 50 for the identifiers of the items Valid parameter IDs are given in Parameter Overview p 252 SEP Get Non Volatile Memory Parameters Description Format Arguments Response Troubleshooting Www pi ws Get the value of a parameter of a given item from non volatile memory With HPA p 157 you can obtain a list of the available parameters and their IDs SEP lt ItemID gt lt PamID gt lt ltemID gt is the item for which a parameter value from non volatile memory is to be queried See below for details lt PamlID gt is the parameter ID can be written in hexadecimal or decimal format See below for details lt ItemID gt lt PamID gt lt PamValue gt LF where lt PamValue gt is the value of the given parameter for the given item Illegal item identifier wrong parameter ID E 517 PZ214E Release 1 0 0 Page 184 GCS Commands Available item IDs and parameter IDs Piezo Nano Positioning PI lt ltemID gt can be an axis identifier a sensor channel a piezo channel a wave generator a wave table a data recorder table a digital output line a hardware component or the whole system the item type depends on the parameter see Parameter Overview p 252 for the item type concerned See Accessible Items and Their Identifiers p 50 for the identifiers of the items Valid parameter IDs are given in
85. 0 the number of items is 3 which means that this parameter has different values for each of the 3 input signal channels sensor channels For parameters which refer to the whole system the maximum number of items is always 1 See Accessible Items and Their Identifiers p 50 for the item identifiers to use with SPA SEP or WPA when changing saving parameter values or when asking for parameter values with the SPA or SEP commands Values stored in non volatile memory are power on defaults so that the system can be used in the desired way immediately Note that PI records the data files of every E 517 controller calibrated at the factory for easy restoration of original settings should that ever be necessary NOTES With the E 517 the WPA command saves also the settings made by the following commands although they are no parameters CSV p 141 Set GCS Syntax Version selects E 517 or E 516 GCS syntax CTO p 142 Set Configuration Of Trigger Output DRC p 150 Set Data Recorder Configuration NLM p 173 Set Low Position Soft Limit limits the axis travel range in closed loop operation PLM p 177 Set High Position Soft Limit limits the axis travel range in closed loop operation VCO p 204 Set Velocity Control Mode On Off activates deactivates velocity limitation The settings of the E 517 are also valid if the device is switched to the E 516 GCS syntax version Not all parameters of the E 517 a
86. 00109 IFS p 163 the same interface parameters as IFC but in non volatile memory The PIMikroMove host software gives access to parameter values in a more convenient way Use its Device Parameter Configuration window to check edit the individual parameters See the PIMikroMove manual for more information See Controller Parameters p 250 for detailed information NOTES With the E 517 the WPA command saves also the settings made by the following commands although they are no parameters CSV p 141 Set GCS Syntax Version selects E 517 or E 516 GCS syntax CTO p 142 Set Configuration Of Trigger Output DRC p 150 Set Data Recorder Configuration NLM p 173 Set Low Position Soft Limit limits the axis travel range in closed loop operation PLM p 177 Set High Position Soft Limit limits the axis travel range in closed loop operation VCO p 204 Set Velocity Control Mode On Off activates deactivates velocity limitation The settings of the E 517 are also valid if the device is switched to the E 516 GCS syntax version Not all parameters of the E 517 are present as E 516 parameters and the IDs of the available parameters differ from the E 517 parameter IDs See the E 516 documentation for available parameters E 517 PZ214E Release 1 0 0 Page 32 Operation Piezo Nano Positioning PI 3 5 2 Configure Axes and Channels www pi ws The E 517 comes preconfigured i e the n
87. 1 2 OnTarget with this TriggerMode the on target status of the selected axis is written to the selected trigger output line this status can also be read with the ONT command 3 MinMaxThreshold with this TriggerMode values for MinThreshold and MaxThreshold lt CTOPam gt IDs 5 and 6 must be defined When the axis position of the selected axis is inside the band specified by the MinThreshold and MaxThreshold values the selected trigger output line is set high otherwise it is set low with the default polarity setting 4 Generator Trigger with this TriggerMode the trigger line action requires use of TWS p 201 and or WGO p 221 The number of wave generator output cycles during which trigger pulses are to be output can be set using the Number Of Trigger Cycles parameter ID 0x18000100 for MinThreshold MaxThreshold position value in physical units used for the MinMaxThreshold TriggerMode both values must be set to form a band default values are 0 0 Min and 1 0 Max Www pi ws E 517 PZ214E Release 1 0 0 Page 143 GCS Commands Www pi ws Example 1 Example 2 Piezo Nano Positioning PI for Polarity default value is 1 sets the signal polarity for the trigger line 0 Active Low 1 Active High For application examples see Configuring Trigger Output p 77 and the lines below A pulse on the digital output line DIO_O1 ID 1 is to be generated whenever axis A has covered a distanc
88. 1 modular analog piezo control electronics It makes possible controlling the analog piezo control electronics via PC interface TCP IP USB RS 232 IEEE 488 GPIB trackball macro programming and wave generator output The LCD display shows the current voltage and position values The E 517 may only be used for applications suitable according to the device specifications Operation other than instructed in this User Manual may affect the safeguards provided The E 517 is a laboratory apparatus as defined by DIN EN 61010 It meets the following minimum specifications for safe operation any more stringent specifications in the technical data table p 265 are of course also met m Indoor use only m Altitude up to 2000 m m Temperature range 5 C to 40 C m Max relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C m Line voltage fluctuations not greater than 10 of the line voltage m Transient overvoltages as typical for public power supply Note The nominal level of the transient overvoltage is the standing surge voltage according to the overvoltage category II IEC 60364 4 443 m Degree of pollution 2 Www pi ws E 517 PZ214E Release 1 0 0 Page 5 Introduction Piezo Nano Positioning PI 1 2 Safety Precautions WARNING READ INSTRUCTION www pi ws Install and operate the E 517 Amplifier Controller only when you have read the operating instruction Kee
89. 20 Get Number Of Wave Gets the value of the Wave Generator Generator Cycles Cycles parameter ID 0x13000003 from volatile memory Www pi ws E 517 PZ214E Release 1 0 0 Page 110 PI Piezo Nano Positioning Wave Generator WGO p 221 Set Wave Generator The WGO command starts the wave Start Stop Mode generator output It provides several start options e g Start wave generator output triggered by external signal Use and reinitialize DDL or Use DDL WGO p 226 Get Wave Generator Gets the last commanded start Start Stop Mode options but not the activation status use 9 instead with Wave Generator wave generator is running WMS p 227 Get Maximum Number Of Gets the value of the Wave table Wave Table Points length of table i parameter ID 0x13000201 WOS p 228 Set Wave Generator Sets the value of the Wave Offset Output Offset parameter ID 0x1300010b in volatile memory Can also be set with the CFG wave type of the WAV command WOS p 229 Get Wave Generator Gets the value of the Wave Offset Output Offset parameter ID 0x1300010b from volatile memory Sets the value of the Wave Generator Table Rate parameter ID 0x13000109 in volatile memory Can also be set with the CFG wave type of the WAV command The interpolation type set with WTR must be 0 WTR p 233 Get Wave Generator Gets the value of the Wave Generator Table Rate Table Rate parameter ID 0x13000109 from volatile memory 9
90. 517 comes normally installed in the chassis of the analog piezo control electronics in the configuration ordered by the customer The system is calibrated at the factory and ready for use E 516 COMPATIBILITY NOTE Users who have written software for the E 516 interface display module which is the predecessor of the E 517 can switch to the GCS syntax used with the E 516 see Select Command Set Version p 44 Pl software and documentation for the E 516 GCS syntax version is available for download at www pi ws or can be obtained from your Physik Instrumente Sales Engineer 1 4 Unpacking Www pi ws The E 517 Interface Display Module usually comes installed in an analog piezo control system Unpack the system with care Compare the contents against the items covered by the contract and against the packing list The E 517 includes the following components E 517 Interface Display Module as covered by the contract C 815 34 RS 232 cable for connecting E 517 and host PC null modem cable C 815 563 special cross over network cable can be used to connect the E 517 to a network access point or to a PC with Ethernet socket 000011448 USB cable USB A USB B MDR connector for Digital In Out socket consisting of 4347 MDR connector 14 pol RM 1 27 4348 MDR cover 14 pol E 517 PZ214E Release 1 0 0 Page 8 Introduction Piezo Nano Positioning PI m E 517 CD Distribution CD containing E 517 host software see Software De
91. Be sure that you have the correct parameter settings before using the WPA command E 517 PZ214E Release 1 0 0 Page 229 GCS Commands Www pi ws Format Arguments Response Troubleshooting Notes Piezo Nano Positioning PI RAM settings not saved with WPA will be lost when the controller is powered down or rebooted or when RPA p 179 is used to restore the parameters With HPA p 157 you can obtain a list of all available parameters Use SPA p 185 to check the current parameter settings in volatile memory See SPA p 185 for an example WPA lt Pswd gt lt ItemID gt lt PamID gt lt Pswd gt is the password for writing to non volatile memory See below for details lt ltemID gt is the item for which parameters are to be saved from volatile to non volatile memory See below for details lt PamlID gt is the parameter ID can be written in hexadecimal or decimal format See below for details none Illegal item identifier wrong parameter ID invalid password command level too low for write access Parameters can be changed in volatile memory with SPA p 185 DFH p 146 IFC p 159 RTR p 180 SAI p 181 VEL p 205 VMA p 207 VMI p 208 WAV p 209 WGC p 220 WOS p 228 and WTR p 231 When WPA is used without specifying any arguments except of the password all currently valid parameter values are saved With the E 517 the WPA command saves also t
92. CD This graphical user interface is included in the typical installation which requires about 50 MB free disk space Note that not all software components are available for Linux PCs See Software Description p 10 for more information Www pi ws E 517 PZ214E Release 1 0 0 Page 9 Introduction Piezo Nano Positioning PI 1 6 Software Description Operating system details Windows stands for 2000 XP and Vista Linux stands for kernel 2 6 GTK 2 0 glibc 2 4 The table below lists the software tools which are on the E 517 product CD with application recommendations For more information see the corresponding software manuals Software Supported Short Description Recommended for Tool Operating System GCS Library Windows Allows program access to the Recommended for customers Linux E 517 from languages like C who want to use a library for The functions in the library are their applications siete ln ol The dynamic version of the omma eet library is needed by the Windows operating systems LabVIEW driver set and by PI_GCS2_DLL PIMikroMove Linux operating systems libpi_pi_gcs2 so x x x and libpi_pi_gcs2 x x x a where x X X gives the version of the library LabVIEW Windows LabVIEW is a software tool Users who want to use drivers Linux available separately from LabVIEW for programming National Instruments for data their applications based on acquisition and process control the G
93. CS See the GCS The E 517 LabVIEW software LabVIEW manual of your consists of a collection of virtual controller for more instrument VI drivers for the information E 517 controller This driver set supports the PI General Command Set GCS Included are Vis for GCS commands and high level Vis for various tasks Www pi ws E 517 PZ214E Release 1 0 0 Page 10 Introduction Piezo Nano Positioning PI Software Supported Short Description Recommended for Tool Operating System PIMikroMove Windows PIMikroMove permits you to Users who want to test the start your motion system host equipment before or instead PC controller and of programming an stage s immediately without application and who want to the need to write customized learn how to use the software It offers motion control commands For motor displays and features that in controllers PIMikroMove many cases make it unnecessary offers an easy way to to deal with ASCIl format optimize the servo commands It also has a parameters complete command input facility which represents an easy way to experiment with various commands PIMikroMove uses the GCS DLL described above to command the controller Note that the program offers comprehensive online support PlTerminal Windows PlTerminal is a Windows GUI Users who want to send the which can be used as a simple commands of the PI General terminal with almost all PI
94. Command Set GCS directly controllers Firmware Windows The Firmware Update Wizard Users who want to update the Update Wizard guides you through the update of firmware the firmware for the hardware modules of your E 517 system NOTE Except for the PlTerminal the software on the E 517 CD can not be used when the E 517 is switched to the E 516 GCS syntax version predecessor of the E 517 Do not switch to the E 516 GCS syntax version except when necessary for compatibility reasons See Select Command Set Version p 44 for details Www pi ws E 517 PZ214E Release 1 0 0 Page 11 First Steps Piezo Nano Positioning PI First Steps 2 1 Installing the Software on the Host PC Windows operating systems 1 2 Insert the E 517 CD in your host PC If the Setup Wizard does not open automatically start it from the root directory of the CD with the E icon Follow the on screen instructions and select the typical installation Typical components are LabView drivers GCS DLL PIMikroMove Linux operating systems 1 2 Insert the E 517 CD in the host PC Open a terminal and go to the linux directory on the E 517 CD Log in as superuser root Start the install script with INSTALL Keep in mind the case sensitivity of Linux when typing the command Follow the on screen instructions You can choose the individual components to install If the installation fails make sure you hav
95. D 66 P _CNTR_VOL_OUT_OF_LIMITS 67 P _CNTR_WAVE_TOO_LARGE 68 P _CNTR_NOT_ENOUGH_DDL_MEMORY 69 P _CNTR_DDL_TIME_DELAY_TOO_LARGE 70 P _CNTR_DIFFERENT_ARRAY_LENGTH 71 P _CNTR_GEN_SINGLE_MODE_RESTART 72 PI_CNTR_ANALOG_TARGET_ACTIVE 73 P _CNTR_WAVE_GENERATOR_ACTIVE 74 P _CNTR_AUTOZERO_DISABLED 75 P _CNTR_NO_WAVE_SELECTED 76 P _CNTR_IF_BUFFER_OVERRUN Www pi ws E 517 PZ214E Release 1 0 0 PI Source Record Table number too low or too high Protected Param current Command Level CCL too low Command execution not possible while Autozero is running Autozero requires at least one linear axis Initialization still in progress Parameter is read only Parameter not found in non volatile memory Voltage out of limits Not enough memory available for requested wave curve Not enough memory available for DDL table DDL can not be started Time delay larger than DDL table DDL can not be started The requested arrays have different lengths query them separately Attempt to restart the generator while it is running in single step mode Motion commands and wave generator activation are not allowed when analog target is active Motion commands are not allowed when wave generator is active No sensor channel or no piezo channel connected to selected axis Sensor and piezo matrix Generator started WGO without having selected a wave table WSL Interface buffer did overrun and command couldn t be rece
96. Description Format Arguments Response Gets current control mode for given piezo channel ONL lt OutputSignallD gt lt OutputSignallD gt is one piezo channel of the controller lt OutputSignallD gt lt ControlMode gt LF where lt ControlMode gt is the current mode which can have the following values 0 OFFLINE mode the output voltage depends on analog control input and DC offset applied to the channel 1 ONLINE mode the E 517 controls the generation of the output voltage E 517 PZ214E Release 1 0 0 Page 175 GCS Commands Piezo Nano Positioning PI Notes The current control mode is also visible for the individual channels on the main screen of the E 517 display see Display Screens p 21 In ONLINE mode the SERVO switches of all channels must be set to OFF on the piezo control electronics ONT Get On Target State Description Get on target status of given axis If all arguments are omitted gets status of all axes Format ONT lt AxisID gt Arguments lt AxisID gt is one axis of the controller Response lt AxisID gt lt uint gt LF where lt uint gt 1 when the specified axis is on target 0 otherwise Troubleshooting Illegal axis identifier Notes The on target status can only be identified in closed loop operation servo ON Software emulated on target reading must be enabled by the Enable SW On Target Signal parameter ID 0x07010600 1 enabl
97. FFLINE mode but it is not used as control value This means that it will not cause axis motion until switching back to ONLINE mode Incorrect control mode of the piezo channel Check the current control mode using the ONL command p 175 or on the main screen of the E 517 display The current control mode of a piezo channel determines the applicable control sources for the output voltage and hence for the axis motion See Control Modes p 23 for details Incorrect configuration Check the parameter settings on the E 517 with the SPA p 188 and SEP p 184 commands Incorrect GCS syntax version Check the current GCS syntax version using the CSV command p 141 or on the main screen of the E 517 display E517 or E516 in the top right corner of the display The current GCS syntax version determines the applicable GCS commands and software tools except for the PlTerminal the software on the E 517 CD can not be used when the E 517 is switched to the E 516 GCS syntax version See Select Command Set Version p 44 for details The high voltage output of the piezo control electronics is deactivated while the communication with the E 517 is still possible The high voltage output of the piezo control electronics may be deactivated automatically when an internal temperature sensor detects overheating To reactivate the high voltage output let the device cool down and power cycle or reboot the E 517 Note that t
98. GCS Commands WTR p 231 WTR p 233 Data Recorder DRC p 150 DRC p 152 DRR p 152 HDR p 155 IMP p 165 RTR p 180 RTR p 181 STE p 189 TNR p 198 WGO p 221 WGR p 227 Interface IFC p 159 IFC p 161 IFS p 163 IFS p 164 ONL p 174 ONL p 175 Piezo Nano Positioning PI Set Wave Generator Table Rate Get Wave Generator Table Rate Set Data Recorder Configuration Get Data Recorder Configuration Get Recorded Data Values Get All Data Recorder Options Start Impulse And Response Measurement Starts recording Set Record Table Rate Get Record Table Rate Start Step And Response Measurement Starts recording Get Number Of Record Tables Set Wave Generator Start Stop Mode Starts recording Starts Recording In Sync With Wave Generator Set Interface Parameters Temporary Get Current Interface Parameters Set Interface Parameters As Default Values Get Interface Parameters As Default Values Set Control Mode ONLINE or OFFLINE operation Get Control Mode Trigger Digital I O Lines CTO p 142 Set Configuration Of Trigger Output E 517 PZ214E Release 1 0 0 Page 127 GCS Commands Www pi ws CTO p 145 DIO p 149 TIO p 196 TWC p 200 TWS p 201 TWS p 203 WGO p 221 PI Piezo Nano Positioning Get Configuration Of Trigger Output Get Digital Input Lines Tell Digital I O Lines Clear All
99. GCS array SM 146E and the example below E 517 PZ214E Release 1 0 0 Page 152 GCS Commands Notes Example PI Piezo Nano Positioning If lt RecTablelD gt is omitted the data from all available tables will be read With HDR p 155 you will obtain a list of available record options and trigger options and information about additional parameters concerned with data recording For detailed information see Data Recording p 71 drr 1 10 TYPE 1 SEPARATOR 9 DIM 3 SAMPLE_TIME 40E 6 NDATA 10 NAMEO Target position of axisl NAMEL Current position of axisl NAME2 Voltage of piezo channell END_HEADER 0001 6215 0001 5383 0000 3192 0001 6215 0001 5383 0000 3192 0001 6215 0001 5383 0000 3193 0001 6215 0001 5382 0000 3192 0001 6215 0001 5382 0000 3192 0001 6215 0001 5381 0000 3192 0001 6215 0001 5380 0000 3192 0001 6215 0001 5380 0000 3192 0001 6215 0001 5380 0000 3192 0001 6215 0001 5379 0000 3192 ERR Get Error Number Description Format Arguments Response Troubleshooting www pi ws Get error code lt int gt of the last occurred error and reset the error to 0 Only the last error is buffered Therefore you should call ERR after each command The error codes and their descriptions are fully listed in Error Codes p 234 ERR none The error code of the last occurred error int Communication brea
100. I Make sure not to exceed the output power limits of the hardware when defining the waveform The amplifier output power of the piezo control electronics is proportional to the amplitude and the frequency of the control signal e g wave generator output See the data sheet or the User Manual of the piezo amplifiers used for specifications WAV Get Waveform Definition Description Format Arguments Response Troubleshooting Get the value of a wave parameter for a given wave table See How to work with the Wave Generator p 84 for more information WAV lt WaveTablelD gt lt WaveParameter D gt lt WaveTablelD gt is the wave table identifier lt WaveParameterlD gt is the wave parameter ID 1 current wave table length in number of points more parameters may be defined in the future lt WaveTablelD gt lt WaveParameterlD gt lt float gt LF where lt float gt depends on the lt WaveParameterID gt gives the current number of waveform points in the wave table for lt WaveParameterID gt 1 Invalid wave table identifier WCL Clear Wave Table Data Description Format Arguments Clears the content of the given wave table As long as a wave generator is running it is not possible to clear the connected wave table For a detailed description see Wave Generator p 84 WCL lt WaveTablelD gt lt WaveTablelD gt is the wave table identifier E 517 PZ214E Rel
101. LowLimit gt LF where lt LowLimit gt is the limit position for the low end of the travel range in physical units ONL Set Control Mode Description Format Www pi ws Sets control mode for given piezo channel ONLINE or OFFLINE mode ONL lt OutputSignallD gt lt ControlMode gt E 517 PZ214E Release 1 0 0 Page 174 GCS Commands Www pi ws Arguments Response Troubleshooting Notes Piezo Nano Positioning PI lt OutputSignallD gt is one piezo channel of the controller lt ControlMode gt can have the following values 0 OFFLINE mode the output voltage depends on analog control input and DC offset applied to the channel 1 ONLINE mode the E 517 controls the generation of the output voltage In ONLINE mode the SERVO switches of all channels must be set to OFF on the piezo control electronics none Illegal channel identifier The current control mode determines the applicable control sources for the output voltage and hence for the axis motion See Control Modes p 23 for more information The current control mode is visible for the individual channels on the main screen of the E 517 display see Display Screens p 21 Using the ONL command p 175 you can check the current control mode on a per channel basis Pressing the trackball on the E 517 front panel when the main screen is displayed switches the mode for all channels at once ONL Get Control Mode
102. OUT_OF_RANGE 1071 PI_EXT_PROFILE_OUT_OF_MEMORY 1072 PIEXT_PROFILE_WRONG_ CLUSTER 1073 PILUNKNOWN_CLUSTER_IDENTIFIER 1074 PIINVALID DEVICE _DRIVER_VERSION Www pi ws E 517 PZ214E Release 1 0 0 PI WaveEditor Error during wave creation incorrect index for integer parameter WaveEditor Error during wave creation incorrect index for floating point parameter WaveEditor Error during wave creation could not calculate value WaveEditor Graph display component not installed User Profile Mode Command is not allowed check for required preparatory commands User Profile Mode First target position in User Profile is too far from current position Controller is already in User Profile Mode User Profile Mode Block or Data Set index out of allowed range ProfileGenerator No profile has been created yet ProfileGenerator Generated profile exceeds limits of one or both axes ProfileGenerator Unknown parameter ID in Set Get Parameter command ProfileGenerator Parameter out of allowed range User Profile Mode Out of memory User Profile Mode Cluster is not assigned to this axis Unknown cluster identifier The installed device driver doesn t match the required version Please see the documentation to determine the required device driver version Page 248 GCS Commands Piezo Nano 1075 1076 Www pi ws PI_INVALID_LIBRARY_VERSION PI_INTERFACE_LOCKED E 517 PZ214E Release 1 0 0 Posi
103. Page 265 a E Technical Data Piezo Nano Positioning P j Miscellaneous Dimensions 21HP 3U 21HP 3U Operating voltage E 500 system E 500 system www pi ws E 517 PZ214E Release 1 0 0 Page 266 Technical Data Piezo Nano Positioning PI 15 2 Pin Assignments 15 2 1 Digital In Out Socket Connector type MDR14 1 GND GND 2 nc not connected 3 output DIO_O3 TTL this digital output line can be configured with the CTO p 142 TWS p 201 and WGO p 221 commands for triggering tasks identifier is 3 with E 517 i3 only 4 output DIO_O2 TTL this digital output line can be configured with CTO TWS and WGO for triggering tasks identifier is 2 with E 517 i3 only 5 output DIO_O1 TTL this digital output line can be configured with CTO TWS and WGO for triggering tasks identifier is 1 6 nc not connected 7 nc not connected 8 reserved reserved 2 9 reserved reserved 1 10 nec not connected 11 input DIO_13 TTL digital input line 3 for start and synchronization of wave generator 3 see WGO p 221 command with E 517 i3 only 12 input DIO_12 TTL digital input line 2 for start and synchronization of wave generator 2 see WGO with E 517 i3 only 13 input DIO_I1 TTL digital input line 1 for start and synchronization of wave generator 1 see WGO 14 reserved reserved The signal state of the DIO_I1 to DIO_I3 input lines can be queried wi
104. Piezo Nano Positioning PI DFH Get Home Position Definition Description Format Arguments Response Troubleshooting Notes Returns the sensor position on which the current home position definition of given axes is based User Origin parameter ID 0x07010200 DFH lt AxisID gt lt AxisID gt is one axis of the controller if omitted all axes are affected lt AxisID gt lt SensorPosition gt LF where lt SensorPosition gt is the sensor position which was valid at the time the last DFH command was processed is used as offset for the calculation of the current axis position Illegal axis identifier The sensor position on which the current home position definition of given axes is based is saved as User Origin parameter ID 0x07010200 You can change this parameter with DFH p 146 or using SPA SEP See DFH for an example DIO Get Digital Input Lines Description Format Arguments Response Notes Lists the states of the specified digital input lines Can be used to query externally generated signals Use TIO p 196 to get the number of installed digital I O lines DIO lt DIOID gt lt DIOID gt is the identifier of the digital input line see below for details lt DIOID gt lt InputOn gt LF where lt InputOn gt gives the state of the digital input line see below for details Using the DIO command you can directly read the DIO_11 to
105. Piezo Nano Positioning PI PZ214E User Manual E 517 Digital Piezo Controller Operation Module Release 1 0 0 Date 08 12 2008 This document describes the following products m E 517 i3 Interface Display Module TCP IP USB RS 232 3 Channels m E 517 i1 Interface Display Module TCP IP USB RS 232 1 Channel Amplitude Segment length Wave length Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Moving the NanoWorld www pi ws Tel 49 721 4846 0 Fax 49 721 4846 299 an info pi ws www pi ws mamo naro oann Declaration of Conformity ccording to ISO IEC Guide 22 and EN 45014 Guide 22 and EN 45014 strumente GmbH amp Co KG Auf der Romerstrasse 1 aa Karlsruhe The manufacturer hereby declares that the product Product Name Computer Interface and Display Module Model Numbers E 517 Product Options all complies with the following European directives 2006 95 EC Low voltage directive LVD 2004 108 EC EMC Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic immunity EN 61000 6 1 Sa Low Voltage Directive EN 61010 1 Electrical equipment which is intended to be integrated in other electrical equipment only conforms to the cited EMC Standards and normative documents if the user ensures a compliant connection when implementing the total s
106. R Set Wave Generator Table Rate Description Format Arguments Www pi ws Set wave generator table rate and interpolation type WTR lt WaveGenlID gt lt WaveTableRate gt lt InterpolationType gt lt WaveGenID gt is the wave generator identifier See below for details lt WaveTableRate gt is the table rate to be used for wave generator output unit number of servo loop cycles must be an integer value larger than zero E 517 PZ214E Release 1 0 0 Page 231 GCS Commands Www pi ws Response Notes Piezo Nano Positioning PI lt InterpolationType gt When a wave generator table rate higher than 1 is set this option can be used to apply interpolation to the wave generator output between wave table points For the available interpolation types see below None lt WaveGenID gt details With E 517 i1 models only wave generator 1 can be used If axes channels are deactivated see Configure Axes and Channels p 33 for details only the wave generators of the active axes can be used Interpolation types available The E 517 provides no interpolation so that the interpolation type must always be 0 no interpolation Using the WTR command you can lengthen the individual output cycles of the waveform As long as the wave generator output is synchronized by servo cycles and not paused by an external signal see WGO p 221 for details the duration of one output cycle for the waveform c
107. R commands among others GWD p 154 Get Wave Table Data Should be used to check the waveform before the wave generator output is started TWC p 200 Clear All Wave Related Clears only the TWS settings but not Triggers the CTO settings TWG p 200 Get Number Of Wave Number of wave generators number Generators of axes number of wave tables TWS p 201 Set TriggerLine Action To In addition the CTO command must Waveform Point be used to activate the Generator Trigger mode for the desired digital output line You can define at most 10 trigger points per command line TWS p 203 Get TriggerLine Action At Reads the current TWS settings Waveform Point WAV p 209 Set Waveform Definition A waveform must be defined before the wave generator output can be started With the CFG wave type you can configure additional parameters for the waveform amongst others Wave Offset parameter ID 0x1300010b and Wave Generator Table Rate parameter ID 0x13000109 in volatile memory WAV p 219 Get Waveform Definition Reads the number of waveform points currently written to the wave table WCL p 219 Clear Wave Table Data Clears the wave table content but not the WOS settings WGC p 220 Set Number Of Wave If WGC is not used the wave Generator Cycles generator must be stopped with WGO 24 p 133 or STP p 190 WGC sets the value of the Wave Generator Cycles parameter ID 0x13000003 in volatile memory WGC p 2
108. S Commands Piezo Nano Positioning PI Additional information K lt Command description gt lt Command gt end of help Example hadre l RecordOptions l1 Target position of axis 2 Current position of axis 3 Position error of axis 7 Voltage of piezo channel 15 Control output of axis TriggerOptions 0 Default Parameters to be set with SPA 0x16000000 Data Recorder Table Rate end of help Note TriggerOptions 0 default means that recording is triggered by the IMP p 165 STE p 189 WGO p 221 and WGR p 227 commands HLP Get List Of Available Commands Description List a help string which contains all commands available Format HLP Arguments none Response List of commands available Troubleshooting Communication breakdown Notes The HLP response contains the commands provided by the current command level See CCL p 139 for more information HLT Halt Motion Smoothly Description Halt the motion of given axes smoothly For details see the notes below Error code 10 is set 24 p 133 and STP p 190 in contrast abort current motion as fast as possible for the controller without taking care of systems inertia or oscillations Format HLT lt AxisID gt Www pi ws E 517 PZ214E Release 1 0 0 Page 156 GCS Commands Arguments Response Troubleshooting Notes Piezo Nano Positioning PI lt AxisID gt is one axis of the controller if omitted all
109. T Reboot System Description Format Arguments Response Reboot system Controller behaves just like after power on RBT none none E 517 PZ214E Release 1 0 0 Page 178 GCS Commands Notes Piezo Nano Positioning PI With TCP IP and USB connections communication can not be maintained after the E 517 is power cycled or rebooted The connection must then be closed and reopened RPA Reset Volatile Memory Parameters Description Format Arguments Response Troubleshooting Notes www pi ws Resets the given parameter of the given item The value from non volatile memory is written into volatile memory Related commands With HPA p 157 you can obtain a list of the available parameters SPA p 185 affects the parameter settings in volatile memory WPA p 229 writes parameter settings from volatile to non volatile memory and SEP p 183 writes parameter settings directly into non volatile memory without changing the settings in volatile memory See SPA for an example RPA lt ItemID gt lt PamID gt lt ltemID gt is the item for which a parameter is to be reset See below for details lt PamlID gt is the parameter ID can be written in hexadecimal or decimal format See below for details none Illegal item identifier wrong parameter ID This procedure can take a few seconds If you use RPA to activate changed interface parameter settings it may be neces
110. TART lt macroname gt lt uint gt Repeat the specified macro lt uint gt times Another execution is started when the last one is finished MAC START lt macroname gt Starts one execution of specified macro none Macro recording is active keywords BEG DEL or inactive END Macro contains a disallowed MAC command Macro recording E The maximum number of characters for the macro name is 8 the maximum number of macros to be stored on the E 517 is 60 m A macro is immediately written to non volatile memory No additional storage procedure is required m During macro recording no macro execution is allowed m A macro can be overwritten by a macro with the same name m A macro can start another macro without any nesting level limitation A macro can call itself to form an infinite loop m Macros can be recorded when the wave generator is running E 517 PZ214E Release 1 0 0 Page 168 GCS Commands Piezo Nano Positioning PI A running macro sends no responses to any interface This means questioning commands are allowed in macros but not answered and therefore useless Macro execution If the E 517 is in OFFLINE mode move commands from a running macro are not allowed they provoke an error message See Control Modes p 23 for details A macro can be started when the wave generator is running but move commands from the macro are not executed and provoke an error message Commands sent whe
111. USB invalid baud rate FTDIUSB device not opened for erase FTDIUSB device not opened for write FTDIUSB failed to write device Page 243 GCS Commands Piezo Nano Positioning 44 COM_FTDIUSB_EEPROM_READ_FAILED 45 COM_FTDIUSB_EEPROM_WRITE_FAILED 46 COM_FTDIUSB_EEPROM_ERASE_FAILED 47 COM_FTDIUSB_EEPROM_NOT_PRESENT 48 COM_FTDIUSB_EEPROM_NOT_PROGRAMMED 49 COM_FTDIUSB_INVALID_ARGS 50 COM_FTDIUSB_NOT_SUPPORTED 51 COM_FTDIUSB_OTHER_ERROR 52 COM_PORT_ALREADY_OPEN 53 COM_PORT_CHECKSUM_ERROR 54 COM_SOCKET_NOT_READY 55 COM_SOCKET_PORT_IN_USE 56 COM_SOCKET_NOT_CONNECTED 57 COM_SOCKET_TERMINATED 58 COM_SOCKET_NO_RESPONSE 59 COM_SOCKET_INTERRUPTED 60 COM_PCI_INVALID_ID 61 COM_PCI_ACCESS_DENIED DLL Errors 1001 PILUNKNOWN_AXIS_IDENTIFIER www pi ws E 517 PZ214E Release 1 0 0 PI FTDIUSB EEPROM read failed FTDIUSB EEPROM write failed FTDIUSB EEPROM erase failed FTDIUSB EEPROM not present FTDIUSB EEPROM not programmed FTDIUSB invalid arguments FTDIUSB not supported FTDIUSB other error Error while opening the COM port was already open Checksum error in received data from COM port Socket not ready you should call the function again Port is used by another socket Socket not connected or not valid Connection terminated by peer Can t connect to peer Operation was interrupted by a nonblocked signal No device with this ID is
112. VIs gt Check if system runs with Terminal program If yes read the software manual and compare sample code from the E 517 CD to check the necessary driver routines E 517 PZ214E Release 1 0 0 Page 262 Customer Service Piezo Nano Positioning PI 13 Customer Service Call your PI representative or write to info pi ws please have the following information about your system ready m Product codes and serial numbers of all products in the system m Current firmware version of the controller if present m Version of drivers and or host software if present m Operating system on host PC if present Www pi ws E 517 PZ214E Release 1 0 0 Page 263 PI Old Equipment Disposal Piezo Nano Positioning 14 Old Equipment Disposal In accordance with EU directive 2002 96 EC WEEE as of 13 August 2005 electrical and electronic equipment may not be disposed of in the member states of the EU mixed with other wastes To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG will ensure environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have such old equipment from PI you can send it to the following address postage free Physik Instrumente Pl GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Www pi ws E 517 PZ214E Release 1 0 0 Page 264 PI Piezo Nano
113. _DOUBLE_AXIS 23 P _CNTR_ILLEGAL_AXIS 24 P _CNTR_PARAM_NR 25 P _CNTR_INVALID_REAL_NR 26 P _CNTR_MISSING_PARAM 27 P _CNTR_SOFT_LIMIT_OUT_OF_RANGE 28 P _CNTR_NO_MANUAL_PAD 29 P _CNTR_NO_JUMP 30 P _CNTR_INVALID_ JUMP 31 PI_CNTR_AXIS_HAS_NO REFERENCE 32 P _CNTR_STAGE_HAS_NO_LIM_SWITCH 33 P _CNTR_NO_RELAY_CARD 34 P _CNTR_CMD_NOT_ALLOWED_FOR_STAGE 35 P _CNTR_NO_DIGITAL_INPUT 36 P _CNTR_NO_DIGITAL_OUTPUT 37 PI_CNTR_NO_MCM 38 P _CNTR_INVALID_MCM Www pi ws E 517 PZ214E Release 1 0 0 PI Invalid macro name Error while recording macro Macro not found Axis has no brake Axis identifier specified more than once Illegal axis Incorrect number of parameters Invalid floating point number Parameter missing Soft limit out of range No manual pad found No more step response values No step response values recorded Axis has no reference sensor Axis has no limit switch No relay card installed Command not allowed for selected stage s No digital input installed No digital output configured No more MCM responses No MCM values recorded Page 235 GCS Commands Piezo Nano Positioning 39 P _CNTR_INVALID_CNTR_NUMBER 40 P _CNTR_NO_JOYSTICK_CONNECTED 41 PI _CNTR_INVALID_EGE_AXIS 42 PI _CNTR_SLAVE_POSITION_OUT_OF_RANGE 43 P _CNTR_COMMAND_EGE_SLAVE 44 PI_CNTR_JOYSTICK_CALIBRATION_FAILED 45 P _CNTR_REFERENCING FAILED 46 P _CNTR_OPM_MISSING 47 PI_CNTR_OPM_NOT_INITIALIZED 48 PI_CNTR_OPM_COM_ERROR 49
114. a new program instance for each E 517 you want to connect to Www pi ws E 517 PZ214E Release 1 0 0 Page 58 Communication Piezo Nano Positioning PI 5 2 Default and Current Settings www pi ws The default communication parameters are stored on the E 517 You can read the default settings using the IFS command p 164 and change them with IFS p 163 Changes become active with the next power on or reboot when the default values are loaded into the controllers volatile memory RAM The current active interface settings can be temporarily changed with IFC p 159 The new settings become active immediately and the host PC interface configuration may need to be changed to maintain communication When the controller is powered down the settings made with IFC are lost if they were not saved with WPA p 229 To read all current active communication parameters use the IFC command p 161 NOTE The IFS IFS IFC and IFC commands affect the controller side only It is also possible to change the default settings with SEP p 183 and to read them with the SEP command p 184 If you use RPA p 179 to activate the changed settings it may be necessary to close the current connection and re open it with the new settings The appropriate parameter IDs are given below The factory defaults of the communication settings stored in the controller are as follows response to IFS m RSBAUD gives the baud rate to be used f
115. ain at the last output position until a new position is commanded If the wave generator is then restarted it will normally continue with the first point of the waveform Exceptions are possible using several start mode bits of the WGO command WGO bit 1 The wave generator runs as long as the signal on the corresponding digital input line is HIGH and is paused as long as the signal is LOW WGO bit 2 The wave generator outputs one waveform point each time the signal on the corresponding digital input line is HIGH and is paused as long as the signal is LOW with wave table rate 1 If the wave table rate is larger than 1 a point is output for the corresponding number of HIGH pulses See also WTR p 231 WGO bit 14 Wave generator output starts with the point at which the wave generator was last stopped as if the wave output had been paused Note that bit 14 simply specifies a start option and must always be combined with one of the start modes specified by bit O 0x1 or 1 bit 1 0x2 or 2 and bit 2 0x4 or 4 See the WGO command p 221 for more information Wave generator output will continue even if the terminal or the program from which it was started is quit or if the high voltage output is deactivated Www pi ws E 517 PZ214E Release 1 0 0 Page 90 Wave Generator Piezo Nano Positioning PI The following data is lost when the controller is powered down or rebooted m Wave table content waveform defined with WAV p 209
116. al axes in one command line LF LineFeed ASCII char 10 is the default termination character SP Space ASCII char 32 E 517 PZ214E Release 1 0 0 Page 117 GCS Commands Piezo Nano Positioning PI 10 1 2 GCS Syntax www pi ws Except as listed below a GCS command consists of 3 characters e g CMD The corresponding query command has a appended e g CMD Command mnemonic CMD character1 character2 character3 Exceptions m Special commands e g fast polling commands consist only of one character The 24th ASCII character e g is called 24 Note that these commands are not followed by a termination character but the responses to them are m IDN for GPIB compatibility The command mnemonic is not case sensitive General CMD SP lt argument gt LF That means the command mnemonic and all arguments e g axis IDs channel IDs parameters etc must be separated from each other by one space Example Send MOV SP1 SP 10 0 LF to move Axis 1 to position 10 0 the unit depends on the controller can be um or mm for example More than one command mnemonic per line is not allowed Several groups of arguments following a command mnemonic are allowed e g MOVISP11SP117 3 SPi2SP2 05 LF if there were 2 axes The command line ends with the termination character LF If part of
117. an be calculated as follows Output Duration Servo Update Time WTR value Number of Points where Servo Update Time in seconds is given by parameter 0xOE000200 WTR wave table rate value gives the number of servo cycles the output of a waveform point takes default is 1 Number of Points is the length of the waveform i e the length of the wave table If the wave generator is started with WGO bit 2 triggered and synchronized by external signal the wave table rate gives the number of HIGH pulses the output of a point takes WTR sets the value of the Wave Generator Table Rate parameter ID 0x13000109 in volatile memory You can set the wave table rate also using the CFG wave type see WAV command p 209 or by directly changing the parameter with SPA p 185 or SEP p 183 Save the value with WPA p 229 to non volatile memory where it becomes the power on default The value of the E 517 PZ214E Release 1 0 0 Page 232 GCS Commands Piezo Nano Positioning PI parameter in volatile memory can be read with the WTR command p 231 For more information see Wave Generator p 84 An application example can be found in Modifying the Wave Generator Table Rate p 96 WTR Get Wave Generator Table Rate Description Format Arguments Response Notes www pi ws Gets the current wave generator table rate Gets also the interpolation type used with table rate values gt 1 For mor
118. an be started with the ATC command p 134 Switch to command level 1 CCL command p 139 before you apply ATC It is recommended to use ATC option 1 fora complete calibration You can ask with ATC p 137 for the options and with ATS p 138 for the success of the last autocalibration procedure To save the autocalibration results to non volatile memory use WPA 100 See Configure Axes and Channels p 33 and the ATC command description p 134 for examples If the ATC procedure fails contact your Physik Instrumente Sales Engineer E 517 PZ214E Release 1 0 0 Page 40 Piezo Nano Positioning PI Operation Calibration Details 38 i T Figure 2 E 517 calibration settings controller parameters and ATC options highlighted shown for one channel axis of the piezo control electronics details stated below www pi ws E 517 PZ214E Release 1 0 0 Page 41 Operation Piezo Nano Positioning PI The table below gives an overview over the IDs and definitions of the controller parameters used for calibration Description Adjustable E 517 Command Data E 516 by Parameter Level Type Parameter ID hexa for write ID decimal access 2 protected Sensor correction 0 SPA SEP 0x02000200 0 FLOAT 8 order offset Osen when sensor voltage is 0 V the actual position of stage is Osen um Sensor correction SPA SEP 0x02000300 0 FLOAT 7 1st order gain Ksen w
119. ation Settings Get Auto Calibration Status Set Command Level Get Command Level Set GCS Syntax Version Get Current Syntax Version Set Configuration Of Trigger Output Get Configuration Of Trigger Output Set Drift Compensation Mode Get Drift Compensation Mode Delay The Command Interpreter Define Current Position As Axis Home Position E 517 PZ214E Release 1 0 0 Page 120 GCS Commands Www pi ws DFH p 149 DIO p 149 DRC p 150 DRC p 152 DRR p 152 ERR p 153 GOH p 154 GWD p 154 HDR p 155 HLP p 156 HLT p 156 HPA p 157 IFC p 159 IFC p 161 IFS p 163 IFS p 164 IMP p 165 IMP p 166 MAC p 167 MAC p 170 MOV p 170 MOV p 171 MVR p 172 NLM p 173 NLM p 174 PI Piezo Nano Positioning Get Home Position Definition Get Digital Input Lines Set Data Recorder Configuration Get Data Recorder Configuration Get Recorded Data Values Get Error Number Go To Home Position Get Wave Table Data Get All Data Recorder Options Get List of Available Commands Halt Motion Smoothly Get List of Available Parameters Set Interface Parameters Temporary Get Current Interface Parameters Set Interface Parameters As Default Values Get Interface Parameters As Default Values Start Impulse And Response Measurement Get IMP Settings Call Macro Function List Macros Set Target Position Get Target Position Set Target Relative To Current P
120. ation procedure You can query for the parameter values with the SPA and SEP commands see the lt Option gt list below for the parameter IDs and the item IDs to use To save the calibrated values of those parameters to non volatile memory where they become the power on defaults use WPA p 229 when the ATC procedure is finished successfully E 517 PZ214E Release 1 0 0 Page 134 GCS Commands Www pi ws Format Arguments Piezo Nano Positioning PI The auto calibration procedure has the highest priority i e it will overwrite the control values given by all other sources The auto calibration procedure automatically switches between the servo modes open loop closed loop operation and the control modes ONLINE OFFLINE of the E 517 When finished the mode settings which were active at the start of the procedure are restored For that reason the SERVO switches of all channels must be set to off on the piezo control electronics The success of the auto calibration procedure can be queried with the ATS command p 138 With ATC p 137 you can ask for the options used with the latest auto calibration procedure The auto calibration procedure can take several seconds During this time the controller is busy and only very limited able to execute or answer commands Ask with 7 if the procedure is finished See Calibration Settings p 38 for more information ATC lt ChannellD gt lt Option gt lt
121. axis of the controller lt DCOState gt can have the following values 0 drift compensation off 1 drift compensation on none Illegal axis identifier DCO Get Drift Compensation Mode Description Format Arguments Response Troubleshooting Gets drift compensation mode of given axes If all arguments are omitted gets status of all axes DCO lt AxisID gt lt AxisID gt is one axis of the controller lt AxisID gt lt DCOState gt LF where lt DCOState gt is the current drift compensation mode of the axis 0 drift compensation off 1 drift compensation on Illegal axis identifier DEL Delay The Command Interpreter Description Format Arguments Response Delays lt uint gt milliseconds DEL lt uint gt lt uint gt is the delay value in milliseconds none DFH Define Home Position Description Format Defines the current position of given axes as the axis home position by setting the position value to 0 00 DFH lt AxisID gt E 517 PZ214E Release 1 0 0 Page 146 GCS Commands Www pi ws Arguments Response Troubleshooting Notes Example Piezo Nano Positioning PI lt AxisID gt is one axis of the controller if omitted all axes are affected none Illegal axis identifier DFH sets the User Origin parameter ID 0x07010200 to the current sensor position which was valid at the time the DFH command was processed is used a
122. can be RSBAUD GPADR IPADR IPSTART IPMASK or MACADR the availability of the parameters depends on the interfaces present on the controller See IFS p 163 for details Response lt InterfacePam gt lt PamValue gt LF where lt PamValue gt is the value of the interface parameter in non volatile memory see IFS for possible values For lt InterfacePam gt MACADR lt PamValue gt gives the unique address of the network hardware in the E 517 is also accessible as parameter ID 0x11000B00 MAC Address IMP Start Impulse And Response Measurement Description Starts performing an impulse and recording the impulse response for the given axis The data recorder configuration i e the assignment of data sources and record options to the recorder tables can be set with DRC p 150 The recorded data can be read with the DRR command p 152 Format IMP lt AxisID gt lt Amplitude gt Arguments lt AxisID gt is one axis of the controller lt Amplitude gt is the height of the impulse See below for details Response none Www pi ws E 517 PZ214E Release 1 0 0 Page 165 GCS Commands Www pi ws Troubleshooting Notes Piezo Nano Positioning PI The control value resulting from the specified impulse height is out of limits Open loop operation the amplitude limitation results from the voltage limit parameters IDs 0x0B000007 0x0B000008 0x0C000000 and 0x0C000001 Closed loop operation use
123. can take some time depending on the number of points to be read It is possible to read the data while recording is still in progress Configure Recording For general information regarding the data recording you can send HDR p 155 which lists available record options and gives information about additional parameters and commands concerned with data recording The data recorder configuration i e the assignment of data sources and record options to the recorder tables can be changed with DRC p 150 and the current configuration can be read with DRC p 152 Upon E 517 PZ214E Release 1 0 0 Page 71 Data Reco rding Piezo Nano Positioning PI delivery the data recorder is preset to record the current positions of the axes The data recorder sampling period can be read with the RTR command p 181 The answer gives the value of the Data Recorder Table Rate parameter ID 0x16000000 whose default value is one servo cycle You can cover longer periods by increasing this value Use the RTR command p 180 or change the parameter value directly The current data recorder configuration made with DRC and RTR is saved with the WPA command in addition to the current parameter values of the E 517 and other settings see the WPA description p 229 for details When the controller is powered down the contents of the data recorder tables and all settings which were not saved with WPA are lost 6 2 Application Example
124. changed since the last POS command 6 single ASCII character number 6 none E 517 PZ214E Release 1 0 0 Page 131 GCS Commands Www pi ws Response Examples Notes Piezo Nano Positioning PI The answer lt uint gt is bit mapped and returned as the hexadecimal sum of the following codes 1 position of first axis has changed 2 position of second axis has changed 4 position of third axis has changed 0 indicates position of all axes has not changed 3 indicates that the positions of the first and the second axis have changed 6 can be used in open loop and closed loop operation The query considers only motion caused by control sources e g move commands but ignores position changes caused by amplifier noise 7 Request Controller Ready Status Description Format Arguments Response Troubleshooting Asks controller for ready status tests if controller is ready to perform a new command Note Use 5 p 131 instead of 7 to verify if motion has finished 7 single ASCII character number 7 none B1h ASCII character 177 in Windows if controller is ready BOh ASCII character 176 in Windows if controller is not ready e g performing a referencing command The response characters may appear differently in non Western character sets or other operating systems They may be indistinguishable on the controller screen 8 Query If Macro Is Running Descriptio
125. ches of all channels must be set to OFF on the piezo control electronics This gives the E 517 complete control over the servo mode settings Channels which are in OFFLINE mode can not be commanded by the E 517 and hence not by the host PC but only via controls on the piezo control electronics e g analog control input and or DC offset potentiometers The current mode of the channels is also visible in the main screen E 517 PZ214E Release 1 0 0 Page 16 First Steps Www pi ws Axes PIMikroMove TM 2 2 5 42 Connections 519 172 17 128 86 Took Yiew S P NEN erte 1790414 Piezo Nano Positioning PI of the E 517 display top left corner I for ONLINE O for OFFLINE Find details in Modes of Operation p 23 Optionally Configure the PIMikroMove main window It is recommended to see the tab cards for axes sensor and piezo channels see figure below You can arrange them by dragging them with the left mouse button pressed so that they become docked e g to the bottom border of the window On the Axes tab card you can start axis motion see step 7 below The channel tab cards show the current sensor and output voltage values which are also visible on the main screen of the E 517 display Help mpenn R O I lt lt Target Openloop Yalue gt gt Stepsize Position HALT State m a OTE Tj 0 000000 0 000000 5 S 1 000000 9 173600 1o00 A cc p
126. command p 193 has no complete control over the servo mode settings When the servo is switched on for an axis the target position is set to the current position and when it is switched off the last valid control value remains active This means that when servo is switched on or off during motion caused by move commands the axis stops Servo control can not be switched on or off while the wave generator is running for the axis Www pi ws E 517 PZ214E Release 1 0 0 Page 54 System Description Piezo Nano Positioning PI MOY MYR GOH closed loop or SYA SVR open loop White only when command received Servo Switch Write when servo mode IMP STE White changes only relative values changes Trackball settings CHANNEL SETTINGS display screen Generator output enabled by WGO command SVO command Hardware Switch on E 509 Module Highest write MOV command priority Return current target position Control Register SVA command Return current open loop control value Siew Rate Limiter Axis Control Value Axis to Piezo Matrix Charme Control Value Control DAC Control mode selection E 517 Interface by ua corre Display Module or trackball Analog Control Input and DC Offset on Amplifier Module Figure 6 Control sources for an axis in ONLINE mode www pi ws E 517 PZ214E Release 1 0 0 Page 55 System Description Piezo Nano Positioning PI 4 3 3 Drift Compensation
127. ct bit 14 0x4000 hex format or 16384 decimal format wave generator output starts with the point at Www pi ws E 517 PZ214E Release 1 0 0 Page 224 GCS Commands Response Troubleshooting Example 1 Www pi ws Piezo Nano Positioning PI which the wave generator was last stopped as if the wave output had been paused start option None Invalid wave generator identifier When the E 517 is in OFFLINE mode the wave generator output can not be started If the wave generator output was started in ONLINE mode it remains active when switching to OFFLINE mode but it is not used as control value This means that it will not cause axis motion until switching back to ONLINE mode Motion commands like MOV p 170 or SVA p 191 from command line or from a running macro are not allowed when the wave generator output is active See Control Value Generation p 53 and Control Modes p 23 for details Wave generator 1 is to be started by the first trigger pulse and stopped by the second trigger pulse i e bit 12 and 13 are to be set on contributing values of 0x1000 dec 4096 and 0x2000 dec 8192 to lt StartMode gt Because bits 12 and 13 do not actually start the wave generator output bit 0 as start mode must be set in addition contributing 0x1 dec 1 The resulting lt StartMode gt value is 0x3001 dec 12289 Send the following WGO command with the lt StartMode gt given in hex
128. d p 141 See Select Command Set Version p 44 for more information CSV Get Current Syntax Version Description Format Arguments Response Notes Get current GCS syntax version used in the firmware CSV none The current GCS syntax version can be 1 0 for GCS 1 0 or 2 0 for GCS 2 0 In this document lt Version gt 1 0 is referred to as E 516 GCS syntax version and lt Version gt 2 0 as E 517 GCS syntax version E 517 PZ214E Release 1 0 0 Page 141 GCS Commands Piezo Nano Positioning PI See Select Command Set Version p 44 for more information CTO Set Configuration of Trigger Output Description Format Arguments Response Note Available output lines and trigger conditions www pi ws Configures the trigger output conditions for the given digital output line The trigger output conditions will become active immediately CTO lt TrigOutID gt lt CTOPam gt lt Value gt lt TrigOutID gt is one digital output line of the controller see below for details lt CTOPam gt is the CTO parameter ID in decimal format see below for the available IDs lt Value gt is the value to which the CTO parameter is set see below None The current trigger output configuration is saved with the WPA command in addition to the current parameter values and other settings See the WPA description p 229 for details The width of a trigger pulse is
129. d start mode bit O 0x1 hex format or 1 decimal format start wave generator output immediately synchronized by servo cycle bit 1 0x2 hex format or 2 decimal format start wave generator output triggered by external signal synchronized by servo cycle The external signal is provided by the corresponding digital input line see Digital In Out Socket p 267 The wave generator runs as long as the signal is HIGH and is paused as long as the signal is LOW bit 2 0x4 hex format or 4 decimal format start wave generator output triggered and synchronized by external signal The external signal is provided by the corresponding digital input line see Digital In Out Socket p 267 The wave generator outputs one waveform point each time the signal is HIGH and is paused as long as the signal is LOW with wave table rate 1 If the wave table rate is larger than 1 a point is output for the corresponding number of HIGH pulses See also WTR p 231 bit 3 0x8 hex format or 8 decimal format synchronized trigger pulse is output on the corresponding digital output line see Digital In Out Socket p 267 when the wave generator outputs a new data point start option E 517 PZ214E Release 1 0 0 Page 223 GCS Commands Piezo Nano Positioning PI bit 4 0x10 hex format or 16 decimal format synchronized trigger pulse is output on the corresponding digital output line see Digital In Out Socket
130. de with SPA and when the controller runs well saved using WPA If you change the current interface settings with SPA it may be necessary to close the current connection and re open it with the new settings In addition to the general modification commands there are commands which change certain specific parameters All the commands listed below except of IFS change the parameter value only in volatile memory and WPA must be used to save the value to non volatile memory IFS changes and saves the interface parameters directly in non volatile memory only DFH p 146 User Origin ID 0x07010200 IFC p 159 interface parameters RS 232 Baud Rate ID 0x11000400 GPIB Address ID 0x11000900 IP Address ID 0x11000600 IP Configuration ID 0x11000800 IP Mask ID 0x11000700 RTR p 180 Table Rate for data recording ID 0x16000000 SAI p 181 Axis Name i e the axis identifier ID 0x07000600 VEL p 205 Servo Loop Slew Rate ID 0x07000200 VMA p 207 Output Voltage High Limit ID 0x0C000001 VMI p 208 Output Voltage Low Limit ID 0xO0C000000 E 517 PZ214E Release 1 0 0 Page 31 Operation Www pi ws Piezo Nano Positioning PI WAV p 209 with CFG wave type Wave Offset ID 0x1300010B and Wave Generator Table Rate ID 0x13000109 WGC p 220 Wave Generator Cycles ID 0x13000003 WOS p 228 Wave Offset ID 0x1300010B WTR p 231 Wave Generator Table Rate ID 0x130
131. dered together with mechanics these components should come calibrated so that you can immediately start with the calibration described here If the E 517 is switched to the E 516 GCS syntax version the calibration settings described here are also valid but the IDs of the corresponding parameters differ See the list below for details New Stage Added to the System or Stage Replaced The settings to be adjusted are the offset and gain for sensor electronics and piezo amplifier This is done using the Osen Ksen Opzt Kpzt values which can be set directly via controller parameters use SPA SEP WPA commands see Set System Parameters p 31 for detailed information regarding parameter handling m Ksen when sensor voltage changes 1 V the position change of stage is Ksen um parameter ID is 0x02000300 Www pi ws E 517 PZ214E Release 1 0 0 Page 38 Operation Www pi ws Piezo Nano Positioning PI m Osen when sensor voltage is 0 V the actual position of stage is Osen um parameter ID is 0x02000200 m Kpzt when control voltage changes 1 V the piezo voltage change is Kpzt V parameter ID is 0x0B000003 mE Opzt when control voltage is 0 V the piezo voltage is Opzt V parameter ID is OxOBOOOO0A The formulae for calculating the values for Ksen Osen Kpzt Opzt are Ksen P10 Po 10 0 Osen Po Kpzt Vi0 Vo 10 0 Opzt Vo Where P10 is the actual stage position when sensor monitor voltage is
132. e Segment length Wave length E 517 PZ214E Release 1 0 0 Page 212 GCS Commands Www pi ws Piezo Nano Positioning PI For RAMP lt SegLength gt lt Amp gt lt Offset gt lt WaveLength gt lt StartPoint gt lt SpeedUpDown gt lt CurveCenterPoint gt lt SegLength gt The length of the wave table segment in points Only the number of points given by lt SegLength gt will be written to the wave table If the lt SegLength gt value is larger than the lt WaveLength gt value the missing points in the segment are filled with the endpoint value of the curve lt Amp gt The amplitude of the ramp curve lt Offset gt The offset of the ramp curve lt WaveLength gt The length of the ramp curve in points cycle duration lt StartPoint gt The index of the starting point of the ramp curve in the segment Gives the phase shift Lowest possible value is 0 lt SpeedUpDown gt The number of points for speed up and slow down lt CurveCenterPoint gt The index of the center point of the ramp curve Determines if the curve is symmetrical or not Lowest possible value is 0 Example for more examples see Defining Waveforms p 92 D z lt pa point Segment length Wave length E 517 PZ214E Release 1 0 0 Page 213 GCS Commands Www pi ws Piezo Nano Positioning PI For LIN lt SegLength gt lt Amp gt lt Offset gt lt WaveLength gt lt StartPoint gt lt Sp
133. e is still shown on the display For details about the trackball handling see Trackball Functions p 22 E 517 PZ214E Release 1 0 0 Page 116 GCS Commands Piezo Nano Positioning PI 10 GCS Commands The PI General Command Set GCS is supported by a wide range of PI systems This command set is well suited for positioning tasks with one or more axes The command set itself is independent of the specific hardware controller or attached stages Commands are used to set operating modes initiate axis motion and to query system and motion values Because of the variety of functions and parameters a sequence of commands must often be transferred in order to achieve a desired system action You can type commands for example in the Command Entry window of PIMikroMove or in the PITerminal NOTE All information in this section refers solely to the E 517 GCS syntax version For information regarding the E 516 GCS syntax version see the E 516 documentation which is available for download at www pi ws 10 1 Format 10 1 1 Notation www pi ws The following notation is used to define the GCS syntax and to describe the commands lt gt Angle brackets indicate an argument of a command can be an item identifier p 50 or a command specific parameter Square brackets indicate an optional entry Braces indicate a repetition of entries i e that it is possible to access more than one item e g sever
134. e lt uint gt is the number of data recorder tables which are currently available Notes The answer gives the value of the Max Number of Data Recorder Channels parameter ID 0x16000100 For more information see Data Recording p 71 TPC Get Number of Output Signal Channels Description Get the number of output signal channels available on the controller Format TPC Arguments none Response lt uint gt is the number of piezo channels which are available the answer gives the value of the Number Of Piezo Channels parameter ID Ox0EO00B04 See Accessible Items and Their Identifiers p 50 for more information Www pi ws E 517 PZ214E Release 1 0 0 Page 198 GCS Commands Www pi ws Note Piezo Nano Positioning PI Using the Sensor Enable parameter ID 0x02000000 you can change the E 517 configuration in case of hardware changes e g if you install additional sensor and or amplifier channels in the system If this parameter is changed the Number Of Piezo Channels parameter is adapted automatically E g if parameter 0x02000000 is set to disabled for a sensor channel the corresponding piezo channel is disabled too and no longer included in the TPC response See Configure Axes and Channels p 33 for details TSC Get Number of Input Signal Channels Description Format Arguments Response Note Get the number of input signal channels available on the controller TSC none
135. e active with the next power on or reboot To change the interface parameters immediately but temporarily use IFC p 159 It is also possible to change the default settings in non volatile memory with SEP p 183 and to read them with the SEP p 184 command provided that the current command level provides write access to the parameter see CCL p 139 For the appropriate parameter IDs see below If you use RPA p 179 to activate the changed settings it may be necessary to close the current connection and re open it with the new settings Warning The number of write cycles of non volatile memory is limited Write default values only when necessary IFS lt Pswd gt lt InterfacePam gt lt PamValue gt lt Pswd gt is the password for writing to non volatile memory default is 100 lt InterfacePam gt is the interface parameter to be changed see below lt PamValue gt gives the value of the interface parameter see below None CAUTION A TCP IP connection will fail if no DCHP server is present but the startup behavior for IP address configuration is set to use DHCP to obtain IP address if this fails use IPADR IPSTART 1 The E 517 will use the address given by IPADR only if IPSTART 0 The following interface parameters can be set RSBAUD lt PamValue gt gives the baud rate to be used E 517 PZ214E Release 1 0 0 Page 163 GCS Commands Piezo Nano Positioning PI for RS 232 communication
136. e axis position It is not located in the E 517 but in the analog part of the piezo control electronics see the corresponding User Manuals of your system for more information The servo loop applies a proportional integral P l servo controller a notch filter and a slew rate limiter The slew rate can also be influenced by the E 517 parameter ID 0x07000200 Www pi ws E 517 PZ214E Release 1 0 0 Page 24 Operation Piezo Nano Positioning PI m Open loop operation Any control input is interpreted as piezo voltage target Open loop operation omits the servo loop and the control input directly controls the output voltage of the piezo channel The slew rate can be influenced by the E 517 parameter ID 0x07000200 The servo mode can be set by m The SERVO ON OFF toggle switches on the piezo control electronics m Axis specific SVO commands p 193 sent over the communications interface or received from a macro running on the E 517 The current servo mode is visible for the individual axes on the main screen of the E 517 display see Display Screens p 21 Using the SVO command p 194 you can check the current servo mode on a per axis basis NOTE In ONLINE mode the SERVO switches of all channels must be set to OFF on the piezo control electronics This gives the E 517 complete control over the servo mode settings Using a start up macro you can set up the device to start with closed loop operation The example below ill
137. e information see Wave Generator p 84 An application example can be found in Modifying the Wave Generator Table Rate p 96 WTR lt WaveGenlD gt lt WaveGenID gt is the wave generator identifier lt WaveGenID gt lt WaveTableRate gt lt InterpolationType gt LF where lt WaveTableRate gt is the table rate used for wave generator output unit number of servo loop cycles lt InterpolationType gt interpolation type applied to outputs between wave table points when a wave generator table rate higher than 1 is set See below for available interpolation types If lt WaveGenlD gt is omitted all wave generators are queried The wave table rate gives the number of servo loop cycles used by the wave generator to output one waveform point If the wave generator is started with WGO bit 2 triggered and synchronized by external signal the wave table rate gives the number of HIGH pulses the output of a point takes The wave table rate read by WTR is the Wave Generator Table Rate parameter value in volatile E 517 PZ214E Release 1 0 0 Page 233 GCS Commands Piezo Nano Positioning memory ID 0x13000109 Interpolation types interpolation type is always 0 no interpolation PI The E 517 provides no interpolation so that the 10 4 Error Codes The error codes listed here are those of the PI General Command Set As such some may be not relevant to your controller and will simply never
138. e installed the kernel header files for your kernel For an overview over the host software provided see Software Description p 10 2 2 Creating Backup File for Controller Parameters www pi ws It is strongly recommended to save the parameter values of the E 517 to a file on the host PC before you make any changes This way the original settings can be restored if the new parameter settings will not prove satisfactory To save the parameter values and to load them back to the E 517 use the Device Parameter Configuration window of PIMikroMove E 517 PZ214E Release 1 0 0 Page 12 First Steps Www pi ws Piezo Nano Positioning PI See Installing the Software on the Host PC p 12 for how to install the program Proceed as follows to create a parameter file 1 2 Power on the system Find details in a dedicated section p 30 Start PIMikroMove on the host PC and establish a connection to the E 517 as described in Quick Start p 14 In the PIMikroMove main window open the Device Parameter Configuration window using the E 517 gt Parameter Configuration menu sequence In the Device Parameter Configuration window save the controller parameters to a file Use the Save or Save As buttons in the top left hand corner of the window or use the File gt Save Edit Values or File gt Save Edit Values As menu sequences In fact the values from the Edit Mask column are saved E Dev
139. e maximum number of wave definitions has been exceeded The maximum number of wave generators has been exceeded No wave defined for specified axis Wave output to axis already stopped started Not all axes could be referenced Could not find parameter set required by frequency relation Command ID given to SPP or SPP is not valid A stage name given to CST is not unique A uuencoded file transferred did not start with begin followed by the proper filename Could not create read file on host PC Checksum error when transferring a file to from the controller The PiStages dat database could not be found This file is required to connect a stage with the CST command No wave being output to specified axis Invalid password Error during communication with OPM Optical Power Meter maybe no OPM connected WaveEditor Error during wave creation incorrect number of parameters WaveEditor Frequency out of range Page 247 GCS Commands Piezo Nano Positioning 1059 PI_WAVE_EDITOR_WRONG _IP_VALUE 1060 PIWAVE_EDITOR_WRONG_DP_VALUE 1061 PI_WAVE_EDITOR_WRONG_ITEM_VALUE 1062 PIWAVE_EDITOR_MISSING_GRAPH_COMPONENT 1063 PIl_EXT_PROFILE_UNALLOWED_CMD 1064 PI_EXT_PROFILE_EXPECTING MOTION _ERROR 1065 Pl_EXT_PROFILE_ACTIVE 1066 PI_EXT_PROFILE_INDEX_OUT_OF_RANGE 1067 PI_PROFILE_GENERATOR_NO_PROFILE 1068 PIPROFILE_GENERATOR_OUT_OF_LIMITS 1069 PIPROFILE_GENERATOR_UNKNOWN_PARAMETER 1070 PI PROFILE_GENERATOR_PAR_
140. e of 0 05 um The following parameters must be set TrigOutID 1 TriggerMode 0 TriggerStep 0 05 Send CTO 130110 05 Send WPA 100 Note The trigger output configuration is saved as power on default On the digital output line DIO_O2 ID 2 pulses are to be generated at certain waveform points during the wave generator output i e the trigger outputs are to be controlled by the wave generator To do this the trigger line is programmed using the TWS and TWC commands and the corresponding trigger mode is set by CTO Optionally you can restrict the trigger output to a certain number of wave generator output cycles Send TWC Note Clears all trigger settings for the wave generator by switching the signal state for all points to low It is recommended to do this before new trigger actions are defined Send TWS 211220230 Note Sets trigger action for output line DIO_O2 identifier is 2 at waveform point 1 it is set high points 2 and 3 are set low Send SPA 2 0x18000100 4 Note The trigger cycles configured with TWS are to be output on the DIO_O2 line for the first four wave generator output cycles Send CTO2 34 Note The TriggerMode for output line DIO_O2 ID 2 is set to Generator E 517 PZ214E Release 1 0 0 Page 144 GCS Commands Www pi ws Piezo Nano Positioning PI Trigger Send WPA 100 Note The trigger output configuration is saved as power on default except of the TWS settings
141. e the controller is performing time consuming tasks 24 ASCII character 24 none none E 517 PZ214E Release 1 0 0 Page 133 GCS Commands Www pi ws Notes Piezo Nano Positioning PI 24 stops motion of all axes caused by move commands MOV p 170 MVR p 172 GOH p 154 SVA p 191 SVR p 195 Furthermore it stops macros MAC p 167 and wave generator output WGO p 221 After the axes are stopped if servo is on their target positions are set to their current positions or if servo is off their open loop control values are set to their last valid control values HLT p 156 in contrast to 24 stops motion smoothly IDN Get Device Identification Description Format Arguments Response Notes ATC Start Auto Description Reports the device identity number IDN none One line string terminated by line feed with controller name serial number and firmware version For E 517 IDN replies something like Physik Instrumente E 517 107020627 V01 000 Calibration Automatic calibration Adjusts the gain and offset for the E 517 A D and D A converters for the sensor input to the P l controller and for the piezo monitor voltage output of the amplifier To make the ATC command available switch to command level 1 CCL command p 139 The settings to be calibrated are implemented as protected controller parameters which can only be changed by the auto calibr
142. e trackball p 22 The front panel setting corresponds with the address setting available over the PC interface Www pi ws E 517 PZ214E Release 1 0 0 Page 70 Data Recording Piezo Nano Positioning PI S Data Recording 6 1 WwWww pi ws How to Use the Data Recorder The E 517 includes a real time data recorder It is able to record several input and output signals e g current position control voltage from different data sources e g axes or output channels The gathered data is stored temporarily in data recorder tables each table contains the signal from one data source You can configure the data recorder flexibly e g select the type of data and the data source The E 517 provides 3 data recorder tables can be read with TNR p 198 with 8192 points per table Start Recording Data recording is triggered automatically with four commands m STE p 189 step response measurement m IMP p 165 impulse response measurement m WGO p 221 wave generator start and m WGR p 227 restarts recording when the wave generator is running Recording always takes place for all data recorder tables and ends when the data recorder tables are completely filled Read Data The last recorded data can be read with the DRR command p 152 The data is reported in GCS array format For details regarding GCS array see the separate manual SM146E which is provided on the E 517 CD Reading out recorded data
143. ease 1 0 0 Page 219 GCS Commands Piezo Nano Positioning PI www pi ws Response none WGC Set Number Of Wave Generator Cycles Description Sets the number of output cycles for the given wave generator the output itself is started with WGO p 221 For a detailed description see Wave Generator p 84 Format WGC lt WaveGenlD gt lt Cycles gt Arguments lt WaveGenID gt is the wave generator identifier lt Cycles gt is the number of wave generator output cycles If cycles 0 then the waveform is output without period limitation until it is stopped by WGO or 24 p 133 or STP p 190 Response None Notes WGC sets the value of the Wave Generator Cycles parameter ID 0x13000003 in volatile memory You can set the wave generator cycles also by directly changing the parameter with SPA or SEP Save the value with WPA to non volatile memory where it becomes the power on default The value of the parameter in volatile memory can be read with the WGC command If the digital input line is used to trigger the wave generator output see WGO for details the count of output cycles continues with each generator restart The generator will be stopped when the number of cycles given by WGC are completed irrespective of any further trigger pulses WGC Get Number Of Wave Generator Cycles Description Gets the number of output cycles set for the given wave generator For a detailed description see Wave Gen
144. ed default setting The on target status is influenced by the Tolerance parameter ID 0x07000900 the on target status is true if Current Position Target Position lt Tolerance See On Target Reading p 57 for more information Www pi ws E 517 PZ214E Release 1 0 0 Page 176 GCS Commands Www pi ws Piezo Nano Positioning PI OVF Get Overflow State Description Format Arguments Response Troubleshooting Get overflow status of given axis If all arguments are omitted gets status of all axes Overflow means that the control variables are out of range can only happen if controller is in closed loop operation OVF lt AxisID gt lt AxisID gt is one axis of the controller lt AxisID gt lt uint gt LF where lt uint gt 0 axis is not in overflow or 1 axis is in overflow Illegal axis identifier PLM Set High Position Soft Limit Description Format Arguments Response Notes Limits the high end of the axis travel range in closed loop operation soft limit PLM lt AxisID gt lt HighLimit gt lt AxisID gt is one axis of the controller lt HighLimit gt is the limit position for the high end of the travel range in physical units None The position value set with PLM must be equal to or smaller than the range limit given by parameter 0x07000001 and larger than the range limit given by parameter 0x07000000 or by NLM p 173 Use
145. eedUpDown gt lt SegLength gt The length of the wave table segment in points Only the number of points given by lt SegLength gt will be written to the wave table If the lt SegLength gt value is larger than the lt WaveLength gt value the missing points in the segment are filled with the endpoint value of the curve lt Amp gt The amplitude of the scan line lt Offset gt The offset of the scan line lt WaveLength gt The length of the single scan line curve in points lt StartPoint gt The index of the starting point of the scan line in the segment Lowest possible value is 0 lt SpeedUpDown gt The number of points for speed up and slow down Example for more examples see Waveform Definition p 92 Amplitude Start point Offset Segment length Wave length For SIN with E 517 PZ214E Release 1 0 0 Page 214 GCS Commands Www pi ws Piezo Nano Positioning PI SIN A sin A n e9 2 F the wave type dependent parameters are lt SegStartPoint gt lt SegLength gt lt A gt lt N gt lt xo gt lt i gt lt B gt lt SegStartPoint gt The index of the segment starting point in the wave table Lowest possible value is 1 Writing to the wave table starts with this point In the wave table all points with an index smaller than lt SegStartPoint gt remain unchanged This means that former written content for that points will not be deleted and is shown by GWD a
146. eenaeees 83 Wave Generator 84 8 1 How to Work with the Wave Generator 0 scssesseeereeetteerteeee 84 81 4 Basic Data a a sie os ahi T E E E E T 84 8 12 Basic Operation ccccccceceeceecececeeeeeececceeeeeeeeeesesesceeaeeeeeeeteeseesnaeess 85 8 13 Additional Steps and SettingS cece eeeeeeeeseeeeeeeeeeteeeeeeeenaeees 86 8 14 Application Notes ccceceecsecceceeeeeeececneeeeeeeeeeseseneaeaeeeeeeesersensnaeees 89 82 Wave Generator Examples eeeseeeteeeseeeseeeseeeseesseeeteeeneeees 92 8 2 1 Defining Waveforms 00 cc cceceeeeeeeeeeceeeeeeeeeeeeseeeeeeeseeeaeeeseeaeeeeteeaaeees 92 822 Modifying the Wave Generator Table Rate eeceeeeeeeeeeeeees 96 823 Trigger Output Synchronized with Wave Generator 97 824 Wave Generator Started by Trigger Input ce eeeeeeeeeeteeeeeeees 100 825 Scanning Examples with Wave Generator and Macros 104 8 3 Wave Generator Related Commands and Parameters 110 Working with Controller Macros 113 10 11 12 13 14 15 9T Defining Ma roS hs ie Se is st acetates Mischa A anani a kaanan 113 92 Starting Macro Execution xsecced car ecietiete Secs essegwearti nee eed daekeremeneiae 115 9 3 StartUp Macro eee esni aa a E A EERE 115 GCS Commands 117 TOF Forma eranen a E a a AA 117 101A NOON e a a a a a aa T a a 117 1012 605 Synta X nan e E e a EN 118 10 1 3 Limitations for GCS CommandsS
147. ell Valid Character Set For Axis Identifiers Description Format Arguments Response Gets a string with characters which can be used for axis identifiers Use SAI p 181 to change the axis identifiers and SAI p 182 to ask for the current valid axis identifiers TVI none lt string gt is a list of characters With the E 517 the string consists of 123456789ABCDEFGHIJKLMNOPQRSTUVWXYZ TWC Clear All Wave Related Triggers Description Format Arguments Response Clears all output trigger settings for the wave generators the settings made with TWS p 201 by switching the signal state for all points to low For a detailed description see Wave Generator p 84 and Configuring Trigger Output p 77 TWC none none E 517 PZ214E Release 1 0 0 Page 200 GCS Commands Www pi ws Piezo Nano Positioning PI TWG Get Number of Wave Generators Description Format Arguments Response Get the number of wave generators available on the controller TWG none lt uint gt is the number of wave generators which are available TWS Set Trigger Line Action To Waveform Point Description Format Arguments Response Notes Associates output trigger line and trigger line action signal state high or low with waveform point The power on default state of all points is low Afterwards the signal state of the trigger output line can be switched to
148. emory Example 3 A stage has sensor monitor output of 0 to 10 V the nominal stage extension is to be 0 um to 15 um the piezo voltage is to be 0 and 100 V However after being calibrated with another system the real piezo extension is 0 um to 14 5 um and the piezo voltage is to be 0 and 98 V Then Ksen 14 5 0 10 0 1 45 Osen 0 Kpzt 98 0 10 0 9 8 Opzt 0 The stage is connected to the second sensor channel and the second amplifier channel So you have to send SPA 2 0x02000300 1 45 2 0x02000200 0 2 0x0B000003 9 8 2 0x0BO0000A 0 to change the parameters in volatile memory Changes of the Piezo Control Electronics Possible changes are for example the installation of additional sensor and or amplifier channels in the system the replacement of that channels and or hardware adjustments e g setting of internal potentiometers for the channels If channels are added to the system they are probably used with new stages In this case first adjust the Osen Ksen Opzt and Kpzt parameters as described above before you adjust the settings described below with the ATC command The settings to be adjusted are the gain and offset for the E 517 A D and D A converters for the sensor input to the P I controller and for the piezo monitor voltage output of the amplifier These settings are implemented as protected controller parameters which can only be changed by an automated autocalibration procedure This procedure c
149. en you try to copy the values of protected parameters from the Edit Mask column to the controller enter the password advanced to switch to command level 1 See the PIMikroMove Manual for further information 2 3 Quick Start Www pi ws The following instructions illustrate the first steps with the E 517 using PIMikroMove because that software offers a convenient user interface for operating the system See the PIMikroMove Manual for the complete more detailed software description and Installing the Software on the Host PC p 12 for how to install the program In the example below an E 517 i3 3 channel model and an X Y Z stage are used CAUTION Thermally stable systems have the best performance For a thermally stable system power on the E 517 at least one hour before you start working with it CAUTION If the piezo stage starts oscillating humming noise In closed loop operation switch off the servo immediately The load and or the dynamics of operation probably differ too much from the setup for which the system was calibrated In open loop operation stop the motion immediately Do not operate the piezo stage at its resonant frequency because the notch filter s may be deactivated in open loop operation You can measure the resonant frequency using PIMikroMove see Data Recorder p 71 for more information Otherwise the piezo stage could be irreparable damaged Re calibration should only be d
150. eration by checking the Servo boxes on the Axes tab card see figure below In closed loop operation target positions for the axes are commanded Enter the target position in the Target field and press Enter on your keyboard or use the arrow buttons to decrement increment the target position by the Step size value The axis position Position field should correspond to the commanded value PIMikroMove TM 2 2 5 42 Connections 517 172 17 128 86 Jools Wew Help a gt e BEJ O a enter help search I lt lt Target Openioop Value gt gt Stepsize Position HALT State Velocity Servo Use soft limits 7 aa pUNKNOWN_STAGE RJ z 0 000000 11 000000 gt gt I 1 000000 0 689200 E otot 1 000000 3 A Ls bib p UNKNOWN_ STAGE 1 2 000 0 000000 S E 1 000000 11 521800 1 000000 cc plUNKNOWN_ STAGE TE 9 000000 0 000000 E 1 000000 1 499500 EE 10 000000 g Sensor channels 1721076 11 522500 1791289 1 501200 www pi ws E 517 PZ214E Release 1 0 0 Page 19 Operation Piezo Nano Positioning PI 3 Operation 3 1 Front Panel Elements 3 1 1 Front Panel Overview RS 232 GPIB IEEE488 Figure 1 E 517 i3 interface display module 3 channels Single channel E 517 i1 models have identical front panels but show only one channel in the display Name Function Ere LCD display See Display Screens p 21 for details Digital In Out MDR14 socket for digi
151. erator p 84 Format WGC lt WaveGenID gt E 517 PZ214E Release 1 0 0 Page 220 GCS Commands Www pi ws Arguments Response Notes WGO Set Wave Description Piezo Nano Positioning PI lt WaveGenID gt is the wave generator identifier lt WaveGenID gt lt Cycles gt LF where lt Cycles gt is the number of wave generator output cycles set with WGC p 220 The number of wave generator cycles read by WGC is the Wave Generator Cycles parameter value in volatile memory ID 0x13000003 If lt WaveGenlD gt is omitted all wave generators are queried Generator Start Stop Mode Start and stop the specified wave generator in the given mode In addition one data recording cycle is started The number of output cycles can be limited by WGC p 220 Using the WTR command p 231 or the CFG wave type see WAV command p 209 you can lengthen the individual output cycles of the waveform Using the WOS command p 228 or the CFG wave type see WAV command p 209 you can add an offset to the output of a wave generator The data recorder configuration can be made with DRC p 150 Recording can be restarted with WGR p 227 Using the CTO command p 142 the E 517 can be set up for trigger output synchronized with the wave generator output If you then start the wave generator with the WGO start options given by bit 3 4 or 5 see below the corresponding pulses are output
152. erface or from a running macro SVA p 191 and SVR p 195 in open loop operation MOV p 170 MVR p 172 and GOH p 154 in closed loop operation IMP p 165 and STE p 189 for both servo modes see below for examples and Servo Modes p 24 for more information m Trackball settings on the CHANNEL SETTING screen see Trackball Functions p 22 for more information m Wave generator output for periodic motion see Wave Generator p 84 for more information and examples While move commands and trackball settings can be used in parallel to command axis motion they are not accepted when the wave generator is running for the axis The macro feature allows defining command sequences and storing them permanently in non volatile memory in the controller Macros can run in OFFLINE and ONLINE mode but move commands from macros are only accepted in ONLINE mode and only when the wave generator is not running See Working with Controller Macros p 113 for more information The E 517 has a real time data recorder It is able to record several input and output signals from different data sources during the axis motion Data recording is triggered automatically with four commands m STE step response measurement m IMP impulse response measurement E 517 PZ214E Release 1 0 0 Page 26 Operation Piezo Nano Positioning PI m WGO wave generator start and m WGR restarts recording when the wave generator is
153. es The E 517 can be controlled from a host computer not included with ASCII commands sent via m TCP IP m RS 232 serial connection m USB connection FTDI USB 1 1 compatible with USB 2 0 m GPIB IEEE 488 connection All interfaces can be active simultaneously The commands from the interfaces are queued in the order the completed command lines are received See Communication p 58 for more information E 517 PZ214E Release 1 0 0 Page 48 System Description Piezo Nano Positioning PI E 517 Firmware The firmware comprises the ASCII command set and the controller parameters and also includes some special features For version information and updates see Firmware Update p 46 mg ASCII Commands The E 517 understands the PI General Command Set GCS version 2 0 The PI General Command Set GCS is supported by a wide range of PI systems This command set is well suited for positioning tasks with one or more axes The command set itself is independent of the specific hardware controller or attached stages Commands are used for example to set operating modes to initiate motion of the mechanics and to query system and motion values See GCS Commands p 117 for more information E Controller Parameters The key features of the E 517 are mirrored in parameters Some of the parameters are protected so that their factory settings can not be changed other parameters can be modified by the user to adapt the
154. evel gt is the currently active command level uint Notes lt Level gt should be 0 or 1 lt Level gt 0 is the default setting all commands provided for normal users are available as is read access to all parameters lt Level gt 1 provides additional commands and write access to level 1 parameters commands and parameters from Level 0 are included Www pi ws E 517 PZ214E Release 1 0 0 Page 140 GCS Commands Www pi ws Piezo Nano Positioning PI CSV Set Syntax Version Description Format Arguments Response Troubleshooting Notes Set current GCS syntax version used in the firmware CSV lt Version gt lt Version gt is the GCS syntax version to be used can be 1 0 for GCS 1 0 or 2 0 for GCS 2 0 none Current command level too low check command level with CCL p 140 and change with CCL p 139 To make the CSV command available switch to command level 1 CCL command p 139 In this document lt Version gt 1 0 is referred to as E 516 GCS syntax version and lt Version gt 2 0 as E 517 GCS syntax version The current selection of the syntax version is saved with the WPA command send WPA 100 in addition to the current parameter values and other settings See the WPA description p 229 for details The current active GCS syntax version is shown in the display main screen rightmost corner E517 or E516 and can be queried with the CSV comman
155. f the first axis A by default in record table 3 E 517 PZ214E Release 1 0 0 Page 151 GCS Commands Www pi ws Piezo Nano Positioning PI DRC get Data Recorder Configuration Description Format Arguments Response Returns settings made with DRC p 150 DRC lt RecTablelD gt lt RecTablelD gt is one data recorder table of the controller if omitted settings for all tables are given The current DRC settings lt RecTablelD gt lt Source gt lt RecOption gt LF where lt Source gt is the data source for example an axis or an output signal channel of the controller The source type depends on the record option lt RecOption gt is the kind of data to be recorded See DRC for a list of the available record options and the corresponding data sources DRR Get Recorded Data Values Description Format Arguments Response Reading of the last recorded Data Set Reading can take some time depending on the number of points to be read It is possible to read the data while recording is still in progress DRR lt StartPoint gt lt NumberOfPoints gt lt RecTablelD gt lt StartPoint gt is the start point in the data recorder table starts with index 1 lt NumberOfPoints gt is the number of points to be read per table lt RecTablelD gt is one data recorder table of the controller The recorded data in GCS array format see the separate manual for
156. feature allows defining command sequences and storing them permanently in non volatile memory in the controller Each defined macro can be called up by its own user defined name In addition it is possible to define a macro that will be executed automatically every time the E 517 is started making possible stand alone operation without a host computer See the subsections below and the MAC command p 167 description for more details and examples For further examples see also Scanning Examples with Wave Generator and Macros p 104 NOTES PIMikroMove offers a comfortable macro editor on the Controller macros tab card Furthermore PlMikroMove offers the Host macro feature which makes it possible to save macros on the host PC With the Host macro feature you can also program conditions and loops in macros which is not directly supported by the E 517 See the PIMikroMove manual for more information regarding Host macros 9 1 Www pi ws Defining Macros To define a macro command sequence first activate macro recording mode with the command MAC BEG lt macroname gt where lt macroname gt is a user settable name with a maximum of 8 characters While in macro recording mode commands are not executed but stored in macro storage Recording mode is exited by the MAC END command The maximum number of macros to be stored on the E 517 is 60 A macro is immediately written to non volatile memory No additional storage pr
157. g of the output cycles continues and the generator will be stopped when the given number of cycles is completed irrespective of any further trigger pulses Www pi ws E 517 PZ214E Release 1 0 0 Page 100 Wave Generator Www pi ws PI Piezo Nano Positioning In the following example the first wave generator is to be started by the first trigger pulse and stopped by the second trigger pulse Command String to Send Action Performed WAV 1 X SIN_P 2000 20 10 2000 0 1000 Define a sine waveform for Wave Table 1 the segment length and hence the number of points in the wave table is 2000 WGO 1 12289 Start and stop output of Wave Generator 1 triggered by external signal To provide the external signal the digital input line DIO_I1 must be used Details bit 12 and 13 are to be set on contributing values of 4096 and 8192 decimal to the lt StartMode gt argument of the WGO command Because bits 12 and 13 are start options which do not actually start the wave generator output bit O as start mode must be set in addition contributing 1 The resulting decimal lt StartMode gt value is 12289 With the lt StartMode gt value given in hexadecimal format the command would be WGO 1 0x3001 E 517 PZ214E Release 1 0 0 Page 101 Piezo Nano Positioning PI Wave Generator WGO bit 1 details Th Vu External digital input signal triggers the wave generator oufput q g
158. generator output and trackball settings SVOAI1Bi1Cl1 Set servo control on closed loop operation for all axes this also writes the current axis position to the target register to avoid jumps of the mechanics DCOA1B1C1 Activate drift compensation for the axes to avoid an unwanted change in displacement over time See Drift Compensation p 56 for details MOV A 30 5 Move axis A to the given absolute position of 30 5 um POR A 0030 4804 Query the current position axis A MOV B 80 Move axis B to the given absolute position of 80 um BUS B B 0056 8775 Query the current position axis B POS B B 0056 8768 Query the current position axis B The commanded position has not been reached MOV B 0 C 30 5 Move axis B to the given absolute position of 0 um and axis C to 30 5 um POS A 0030 4806 B 0000 8773 C 0030 5080 Query the current positions of all axes MVR A 2 B3 C5 Move axes A B and C relative by the given position values POS A 0028 4797 B 0003 8769 C 0035 5079 Query the current positions of all axes E 517 PZ214E Release 1 0 0 Page 29 Operation Piezo Nano Positioning PI 3 4 Power On Reboot Sequence CAUTION Thermally stable systems have the best performance For a thermally stable system power on the E 517 at least one hour before you start working with it Power on the piezo control electronics as described
159. gering Signaling Piezo Nano Positioning PI 7 External Triggering Signaling 7 1 Using Trigger Input and Output It is possible to trigger external devices and to send start stop signals to the wave generators with the digital I O lines of the E 517 See Digital In Out Socket p 267 for the lines and pinout With the E 517 there is a fixed one to one assignment of axes to digital output and input lines This means that m With E 517 11 models only the DIO_O1 and DIO_11 lines are available m If axes channels are deactivated see Configure Axes and Channels p 33 for details only the output and input lines of the active axes are available You can ask for the available lines with the TIO command p 196 You can program the DIO_O1 to DIO_O3 output lines TTL active high to trigger other devices Programming can be done using the CTO command p 142 If the trigger output is to be synchronized with the wave generator output you can use CTO in combination with m TWS p 201 which defines trigger action for certain waveform points m Certain WGO p 221 options which start the wave generator and the corresponding trigger output See Configuring Trigger Output p 77 and Trigger Output Synchronized with Wave Generator p 97 for examples The DIO_I1 to DIO_I3 input lines TTL active high can be used in conjunction with the WGO command p 221 to start and synchronize the wave generator output See
160. gger output synchronized with the wave generator output The trigger line action at certain waveform points can be defined with TWS p 201 and using the WGO command p 221 the wave generator can be started with certain trigger output options See Example Generator Trigger Mode Trigger Output Synchronized with Wave Generator via CTO and TWS p 97 and Trigger Output Synchronized With Wave Generator via CTO WGO and WAV for examples To select the mode set lt CTOPam gt 3 and lt Value gt to the code of the mode default selection is Generator Trigger 4 Furthermore it is possible to select the signal polarity for the digital output line active high active low See Example Polarity Setting p 83 The examples given below can be reproduced using the command entry facilities of PIMikroMove or PI Terminal NOTE The width of a trigger pulse is 30 us by default except with the MinMaxThreshold trigger mode where the pulse width depends on the threshold settings You can change the default pulse width using the Pulse Width parameter ID 0x0E000900 Possible values are in the range of 10 to 150 us Www pi ws E 517 PZ214E Release 1 0 0 Page 78 External Triggering Signaling Piezo Nano Positioning PI 7 2 1 Example Position Distance Trigger Mode The Position Distance trigger mode is designed for scanning applications A trigger pulse is written whenever the axis has covered the distance set with CTO
161. gure 13 MinMax Threshold Trigger Mode The following parameters must be set for the digital output line which is to be used for trigger output lt TrigOutID gt m TriggerMode lt CTOPam gt 3 m MinThreshold lt CTOPam gt 5 m MaxThreshold lt CTOPam gt 6 General notation of the CTO command for this mode in fact the command arguments can be divided in three portions each starting with the lt TrigOutID gt declaration E 517 PZ214E Release 1 0 0 Page 81 gt Time External Triggering Signaling Piezo Nano Positioning PI Command Trigger mode Min threshold setting Max threshold mnemonic selection setting CTO lt TrigOutID gt 3 3 lt TrigOutID gt 5 min pos lt TrigOutID gt 6 max pos Example Whenever the axis position of the first axis A by default is higher than 0 3 um and lower than 0 6 um the corresponding digital output line is to be set high Since the assignment of axes to digital output lines is fixed A belongs to DIO_ 11 the first digital output line lt TrigOutID gt 1 must be configured Send CTO133150 3160 6 7 2 4 Example Generator Trigger Mode With the Generator Trigger mode the trigger output will be synchronized with the wave generator output CTO must be used in combination with TWS p 201 and or WGO p 221 The number of wave generator output cycles during which trigger pulses are to be output can be set using the Number Of Trigger Cycles paramete
162. he controller is powered down To save settings to non volatile memory and thus make them the power on defaults use IFS p 163 instead Alternatively you can change the interface settings with SPA p 185 or SEP p 183 and save the current value with WPA p 229 to non volatile memory provided that the current command level provides write access to the parameter see CCL p 139 For the appropriate parameter IDs see below IFC lt InterfacePam gt lt PamValue gt lt InterfacePam gt is the interface parameter to be changed see below lt PamValue gt gives the value of the interface parameter see below None CAUTION A TCP IP connection will fail if no DCHP server is present but the startup behavior for IP address configuration is set to use DHCP to obtain IP address if this fails use IPADR IPSTART 1 The E 517 will use the address given by IPADR only if IPSTART 0 The current active RS 232 baud rate and GPIB IEEE 488 address can also be set on the E 517 front panel in the COMMUNICATION display screen p 21 This screen can be accessed by the trackball p 22 The front panel settings interdepend with the interface parameter settings described below E 517 PZ214E Release 1 0 0 Page 159 GCS Commands Piezo Nano Positioning PI Possible The following interface parameters can be set interface parameters RSBAUD lt PamValue gt gives the baud rate to be used for RS 232 communication defa
163. he display should have changed now SPA Get Volatile Memory Parameters Description Format Arguments Response Troubleshooting Available item IDs and parameter IDs www pi ws Get the value of a parameter of a given item from volatile memory RAM With HPA p 157 you can obtain a list of the available parameters and their IDs SPA lt ItemID gt lt PamID gt lt ltemID gt is the item for which a parameter is to be queried in volatile memory See below for details lt PamlID gt is the parameter ID can be written in hexadecimal or decimal format See below for details lt ltemID gt lt PamID gt lt PamValue gt LF where lt PamValue gt is the value of the given parameter for the given item Illegal item identifier wrong parameter ID lt ItemID gt can be an axis identifier a sensor channel a piezo channel a wave generator a wave table a data recorder table a digital output line a hardware component or the whole system the item type depends on the parameter see Parameter Overview p 252 for the item type concerned See Accessible Items and Their Identifiers p 50 for the identifiers of the items Valid parameter IDs are given in Parameter Overview p 252 E 517 PZ214E Release 1 0 0 Page 188 GCS Commands Piezo Nano Positioning PI www pi ws SSN Get Device Serial Number Description Get the serial number of the E 517 Format SSN Argumen
164. he length of the wave table which is the sum of the lengths of all segments in this table See How to work with the Wave Generator p 84 for more information Format WAV lt WaveTablelD gt lt AppendWave gt lt WaveType gt lt WaveTypeParameters gt Www pi ws E 517 PZ214E Release 1 0 0 Page 210 GCS Commands Piezo Nano Positioning PI Arguments lt WaveTablelD gt is the wave table identifier lt AppendWave gt This can be X amp or X clears the wave table and starts writing with the first point in the table amp appends the defined segment to the already existing wave table contents i e concatenates a segment to lengthen the waveform adds the content of the defined segment to the already existing wave table contents i e the values of the defined points are added to the existing values of that points if the defined segment is larger than the already existing wave table content the difference will be concatenated to the wave table content lt WaveType gt The type of curve used to define the segment This can be one of PNT user defined curve SIN_P inverted cosine curve RAMP ramp curve LIN single scan line curve SIN sine curve POL polynomial TAN tangent curve CFG special type which configures additionally parameters for a waveform lt WaveTypeParameters gt stands for the parameters of the curve and can be as follows For PNT lt SegStartPoint gt
165. he reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the E 517 as well as the procedures and the commands which are required to put the associated motion system into operation Conventions The notes and symbols used in this manual have the following meanings WARNING Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death DANGER D Indicates the presence of hazardous voltage gt 50 V Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The software tools and the mechanics which might be mentioned in this document are described in their own manuals All documents are available as PDF files Updated releases are available for download at www pi ws http Awww pi ws or via email contact your Physik Instrumente Sales Engineer or write info pi ws mailto info pi ws E 517 Quick Guide PZ214Equ PIMikroMove SM148E E 517 GCS LabVIEW PZ209E E 517 PIGCS2 DLL PZ215E GCSData SM146E Content
166. he settings made by the following commands although they are no parameters CSV p 141 Set GCS Syntax Version selects E 517 or E 516 GCS syntax CTO p 142 Set Configuration Of Trigger Output DRC p 150 Set Data Recorder Configuration NLM p 173 Set Low Position Soft Limit limits the axis travel range in closed loop operation PLM p 177 Set High Position Soft Limit limits E 517 PZ214E Release 1 0 0 Page 230 GCS Commands Available passwords item IDs and parameter IDs Piezo Nano Positioning PI the axis travel range in closed loop operation VCO p 204 Set Velocity Control Mode On Off activates deactivates velocity limitation To have write access to the parameter s it might be necessary to switch to a higher command level using CCL p 139 Warning The number of write cycles of non volatile memory is limited Write default values only when necessary CAUTION Avoid powering down the E 517 during the WPA procedure The password for writing to non volatile memory is 100 lt ItemID gt can be an axis identifier a sensor channel a piezo channel a wave generator a digital output line or the whole system the item type depends on the parameter see Parameter Overview p 252 for the item type concerned See Accessible Items and Their Identifiers p 50 for the identifiers of the items Valid parameter IDs are given in Parameter Overview p 252 WT
167. he wave generator output will continue even if the high voltage output is deactivated i e if a certain number of output cycles was set they may have already finished when the high voltage output is reactivated How to avoid overheating Keep the ambient temperature at a noncritical value Note that the difference between ambient temperature and internal temperature of the piezo control electronics normally is about 20 Centigrade 36 Fahrenheit degrees E 517 PZ214E Release 1 0 0 Page 261 Troubleshooting Piezo Nano Positioning PI Www pi ws Place the system in a location with adequate ventilation Allow at least 10 cm 4 inches clearance from the top and the rear of the unit and 5 cm 2 inches from each side If this is not possible keep the ambient temperature low Never cover the ventilation openings of the piezo control electronics as this will impede ventilation When using the wave generator it is recommended to reduce the frequency and or the amplitude and or the output duration to avoid overheating See Wave Generator p 84 for more information Unsatisfactory system performance The sensor values are not reliable and the whole system is instable Only thermally stable systems can have the best performance For a thermally stable system power on the E 517 at least one hour before you start working with it Custom software accessing PI drivers does not run Wrong combination of driver routines
168. hen sensor voltage changes 1 V the position change of stage is Ksen um ADC gain ATC option 2 0x04000500 2 FLOAT 3 with sensor for sensor monitor monitor ADC Items 1 to 3 for channels this parameter ATC option 4 refer to 1 with for voltage monitor for voltage monitor ADC sensor monitor channels channels position items 4 to 6 refer to monitor for piezo channels voltage ADC offset ATC option 2 0x04000600 2 FLOAT 4 with sensor for sensor monitor monitor ADC Items 1 to 3 for channels this parameter ATC option 4 refer to 2 with for voltage monitor for voltage monitor ADC sensor monitor channels channels position items 4 to 6 refer to monitor for piezo channels voltage www pi ws E 517 PZ214E Release 1 0 0 Page 42 Operation Piezo Nano Positioning PI Description Adjustable E 517 Command Data E 516 by Parameter Level Type Parameter ID hexa for write ID decimal access 2 protected HW gain ATC option 5 0x04000700 2 FLOAT 13 with for sensor sensor input to Items 1 to 3 for channels P I controller this parameter refer to sensor 11 with piezo ATC option 6 channels channels for piezo items 4 to 6 monitor refer to piezo voltage output channels of the amplifier HW offset ATC option 5 0x04000800 2 FLOAT 14 with for sensor sensor input to Items 1 to 3 for channels P I controller this parameter refer to sensor 12 with piezo ATC option
169. ice Parameter Configuration a N alCj x Fie Edt Tools View Help amp B sev IVT BS v Kae rho kkk Params Manager OF E Parameters Location Current Setting Edit Mask COL Chan Param ID RAM Values Servo loop slew rate axis unt ms 0 1 007000200 20000000000 20000000060 Tolerance O 7 07000300 0000 Defaukvokage O 1 0070000 1 00000000e 1 1000000001 User ongin fo 1 007010200 fo con00000e 0 0 00000000e 0 Enable Sw On Targat Signal 0 7 0070600 Enaed Sf Ened Axis servo mode selection 3 1 007030100 Hardwee Hardware m In the Device Parameter Configuration window of PIMikroMove proceed as follows to load back the content of a parameter file with the extension pam 1 Use the File Load and select menu sequence The loaded parameter values are written in the corresponding Edit Mask fields You can copy the loaded parameter values from the Edit Mask fields to the RAM volatile memory or non volatile memory of your controller using the three Write selected edit values buttons in the top right hand corner of the window Note that depending on the controller changing parameters may require a certain command control level CCL You can switch to command level 1 and change level 1 parameters see CCL column while command levels gt 1 are reserved for service E 517 PZ214E Release 1 0 0 Page 13 First Steps Piezo Nano Positioning PI personnel In the dialog which pops up automatically wh
170. id axis parameter file Backup file with axis parameters not found PI internal error code 204 SMO with servo on uudecode incomplete header Page 238 GCS Commands 207 208 209 210 211 212 213 214 215 216 217 218 219 230 231 232 233 301 302 303 Www pi ws Piezo Nano Positioning PI_CNTR_UUDECODE_NOTHING_TO_DECODE PI_CNTR_UUDECODE_ILLEGAL_FORMAT PI_CNTR_CRC32_ERROR PI_CNTR_ILLEGAL_FILENAME PI_CNTR_FILE_NOT_FOUND PI_CNTR_FILE_WRITE_ERROR Pl _CNTR_DTR_HINDERS_VELOCITY_CHANGE PI_CNTR_POSITION_UNKNOWN PIl_CNTR_CONN_POSSIBLY_BROKEN PI_CNTR_ON_LIMIT_SWITCH Pl_CNTR_UNEXPECTED_STRUT_STOP Pl_CNTR_POSITION_BASED_ON_ESTIMATION PI_CNTR_POSITION_BASED_ON_INTERPOLATION PI_CNTR_INVALID_HANDLE PI_CNTR_NO_BIOS_FOUND PI_CNTR_SAVE_SYS_CFG_FAILED PI_CNTR_LOAD_SYS_CFG_FAILED PI_CNTR_SEND_BUFFER_OVERFLOW PI_CNTR_VOLTAGE_OUT_OF_LIMITS PI_CNTR_OPEN_LOOP_MOTION_SET_WHEN_SERVO_O N E 517 PZ214E Release 1 0 0 PI uudecode nothing to decode uudecode illegal UUE format CRC32 error Illegal file name must be 8 0 format File not found on controller Error writing file on controller VEL command not allowed in DTR Command Mode Position calculations failed The connection between controller and stage may be broken The connected stage has driven into a limit switch call CLR to resume operation
171. imit Description Get the low limit of the piezo voltage soft limit Format VMI lt OutputSignallD gt Arguments lt OutputSignallD gt is one piezo channel of the piezo control electronics Response lt OutputSignallD gt lt LowLimit gt LF where lt LowLimit gt is the low limit of the output voltage in V Notes VMI queries the voltage limit given by the Output Voltage Low Limit parameter ID 0x0C000000 in volatile memory Www pi ws E 517 PZ214E Release 1 0 0 Page 208 GCS Commands Www pi ws Piezo Nano Positioning PI VOL Get Voltage Of Output Signal Channel Description Format Arguments Response Note Read the current voltage value of the given output signal channel VOL lt OutputSignallD gt lt OutputSignallD gt is one output signal channel of the controller lt OutputSignallD gt lt float gt LF where lt float gt is the current voltage value in V The output signal channels to be queried with VOL are the piezo channels of the piezo control electronics IDs 1 to 3 actually available IDs depend on the response to the TPC command p 198 WAV Set Waveform Definition Description Define waveform of given type for given wave table To allow for flexible definition a waveform wave table contents can be built up by adding segments Each segment is defined with a separate WAV command To add a segment the lt AppendWave gt argumen
172. ins active See Control Value Generation p 53 for more information The current servo state affects the applicable move commands servo control off use SVA p 191 and SVR p 195 servo control on use MOV p 170 MVR p 172 and GOH p 154 When servo is switched on or off during motion caused by move commands the axis stops Servo control can not be switched on or off while the wave generator is running for the axis Using a start up macro you can set up the device to start with closed loop operation See Start Up Macro p 115 for details SVO Get Servo State Description Format Arguments Gets servo control state of given axes If all arguments are omitted gets status of all axes SVO lt AxisID gt lt AxisID gt is one axis of the controller E 517 PZ214E Release 1 0 0 Page 194 GCS Commands Www pi ws Response Troubleshooting Piezo Nano Positioning PI lt AxisID gt lt ServoState gt LF where lt ServoState gt is the current servo state of the axis 0 servo off open loop operation 1 servo on closed loop operation Illegal axis identifier SVR Set Relative Open Loop Axis Value Description Format Arguments Response Troubleshooting Set open loop control value relative to the current open loop control value to move the axis The new open loop control value is calculated by adding the given value lt Difference gt to the last
173. ion is made via the WGO command p 221 which offers the following start modes and options for use of digital input signals mbit 1 0x2 or 2 start mode Wave generator output is triggered by external signal and synchronized by servo cycles internal clock The wave generator runs as long as the signal is HIGH and is paused as long as the signal is LOW mbit 2 0x4 or 4 start mode Wave generator output is triggered and synchronized by an external signal The wave generator outputs one waveform point each time the signal is HIGH and is paused as long as the signal is LOW with wave table rate 1 If the wave table rate is larger than 1 a point is output for the corresponding number of HIGH pulses See also WTR p 231 m bit 12 0x1000 or 4096 start option The wave generator is started the first time the external signal is HIGH and runs continuously even if the signal becomes LOW mbit 13 0x2000 or 8192 start option The wave generator is stopped when the external signal is HIGH Further trigger pulses have no effect Bit 12 and 13 specify start options which are not effective on their own To start the wave generator you have to combine them with bit 0 start wave generator output immediately start mode Do not combine bit 12 and 13 with the start modes of bit 1 or 2 If the wave generator output is started with bit 1 or bit 2 set while output cycle limitations were made with WGC With each generator restart the countin
174. ion to the wave table with WAV p 209 it is always a good idea to check it by reading back the waveform sequence from the controller before actually outputting it This can be done by the GWD command p 154 Note that the response to GWD does not contain any offset set with WOS p 228 to the wave generator output You can add an offset to the output of a wave generator using the WOS command p 228 Thereafter the output of the specified wave generator is the sum of the offset value and the wave value Generator Output Offset Current Wave Value If the wave generator is started with the option start at the endpoint of the last cycle i e WGO bit 8 is set the E 517 at the end of each output cycle equates the WOS offset value with the current generator output WOS sets the value of the Wave Offset parameter ID 0x1300010b in volatile memory You can also change this parameter with SPA p 185 and E 517 PZ214E Release 1 0 0 Page 86 a Se Axis Target At T 4 Position or Piezo Voltage Wave Generator Piezo Nano Positioning PI SEP p 183 or using the CFG wave type see WAV command p 209 To save the current offset value to non volatile memory use WPA p 229 Keep in mind that this value may also result from the last wave generator run with the start at the endpoint option and can therefore be very large Deleting wave table content with WCL p 219 has no effect on the WOS settings Wave Generato
175. is is moving VEL lt AxisID gt lt Velocity gt lt AxisID gt is one axis of the controller lt Velocity gt is the velocity value in physical units s none Illegal axis identifiers axis is under joystick control via host PC The VEL setting only takes effect when Velocity Control Mode is ON for the given axis see VCO command p 204 The axis can be in closed loop operation servo on or in open loop operation servo off In open loop operation the velocity unit is V s The velocity value must be gt 0 VEL concerns the value of the Servo Loop Slew Rate parameter ID 0x07000200 The velocity set with VEL is saved in volatile memory RAM only To save the currently valid value to non volatile memory where it becomes the power on default you must use WPA p 229 Changes not saved with WPA will be lost when the controller is powered down E 517 PZ214E Release 1 0 0 Page 205 GCS Commands Piezo Nano Positioning PI www pi ws VEL Get Closed Loop Velocity Description Get the current velocity value If all arguments are omitted gets current value of all axes Format VEL lt AxisID gt Arguments lt AxisID gt is one axis of the controller Response lt AxisID gt lt float gt LF where lt float gt is the current active velocity value in physical units s Note VEL queries the current velocity value given by the Servo Loop Slew Rate parameter ID 0x07000200 in volatile memor
176. is not accessible because the E 517 comes installed in the chassis of the analog piezo control electronics E 517 PZ214E Release 1 0 0
177. isabled 1 Enabled 1 channel is not displayed 0 no decimal places e g 100 1 one decimal place e g 100 9 2 2 decimal places e g 100 99 3 3 decimal places e g 100 999 4 4 decimal places e g 100 9999 V volt um um mm mm ur urad mr mrad no unit is displayed This parameter applies to the sensor channels input signal channels 1 to 3 If it is set to disabled for a sensor channel the corresponding axis and piezo channel are disabled too The parameter value 1 hides the channel from the display The maximum number of decimal places is 4 The parameter value hides the unit from the display The maximum number of characters for the unit is 2 The unit is only displayed if the value of parameter 0x04000E01 is different from 1 Modular E 500 system with one E 505 00 single channel amplifier module one E 509 C1A single channel sensor servo module and one E 517 i3 is upgraded two E 505 00 and two E 509 S1 single channel modules are added to the slots for the second and third amplifier and sensor servo channels With the new hardware configuration three axes three piezo Www pi ws E 517 PZ214E Release 1 0 0 Page 34 Operation WwWww pi ws Piezo Nano Positioning P I channels and three sensor channels are available Two single axis stages will be connected to the new channels one with O to 50 um and one with 25 um travel
178. itude is to be given as a piezo voltage value in V The SVA command can be interrupted by 24 p 133 STP p 191 and HLT p 156 Send SVA A 10 Note The piezo voltage for axis A and hence for piezo channel 1 is set to 10 V The axis moves accordingly with no position control Send SVA A 300 Send ERR Receive 302 Note The axis does not move The error code 302 reported by the ERR command p 153 indicates that the piezo voltage value set by SVA is out of limits Send SVA A 300 B 60 C 100 Send ERR Receive 302 Note The axes do not move The error code 302 reported by the ERR command p 153 indicates that at least one of the piezo voltage values set by SVA is out of limits E 517 PZ214E Release 1 0 0 Page 192 GCS Commands Www pi ws Piezo Nano Positioning PI SVA Get Open Loop Axis Value Description Format Arguments Response Troubleshooting Notes Returns last valid open loop control value of given axis SVA lt AxisID gt lt AxisID gt is one axis of the controller lt AxisID gt lt float gt LF where lt float gt is the last commanded open loop control value See below for details Illegal axis identifier SVA gives the open loop control value settings made when the E 517 is in ONLINE mode see Control Modes p 23 for details In ONLINE mode the open loop control value can be changed by move commands received via interface or
179. ived correctly Page 237 GCS Commands 77 78 79 80 81 82 83 84 85 86 87 88 89 100 200 201 202 203 204 205 206 Www pi ws Piezo P _CNTR_NOT_ENOUGH_RECORDED_DATA PI_CNTR_TABLE_DEACTIVATED PI _CNTR_OPENLOOP_VALUE_SET_WHEN_SERVO_ON P _CNTR_RAM_ERROR P _CNTR_MACRO_UNKNOWN_COMMAND P _CNTR_MACRO _PC_ERROR PI_CNTR_JOYSTICK_ACTIVE PI_CNTR_MOTOR_IS_OFF PIl_CNTR_ONLY_IN_MACRO PI_CNTR_JOYSTICK_UNKNOWN_AXIS P _CNTR_JOYSTICK_UNKNOWN_ID PI_CNTR_REF_MODE_IS_ON P _CNTR_NOT_ALLOWED_IN CURRENT MOTION MOD E PI_LABVIEW_ERROR PI _CNTR_NO_AXIS PIL_CNTR_NO_AXIS_PARAM_FILE PI _CNTR_INVALID_AXIS_PARAM_FILE PILCNTR_NO_AXIS_PARAM_BACKUP PI_CNTR_RESERVED_204 PI_CNTR_SMO_WITH_SERVO_ON PI_CNTR_UUDECODE_INCOMPLETE_HEADER E 517 PZ214E Release 1 0 0 Nano Positioning PI Data Record Table does not hold enough recorded data Data Record Table is not configured for recording Open loop commands SVA SVR are not allowed when servo is on Hardware error affecting RAM Not macro command Macro counter out of range Joystick is active Motor is off Macro only command Invalid joystick axis Joystick unknown Move without referenced stage Command not allowed in current motion mode PI LabVIEW driver reports error See source control for details No stage connected to axis File with axis parameters not found Inval
180. iver from National Instruments NI or Nl compatible driver The GPIB device address of the E 517 is preset to 4 Make sure that all devices which share the same GPIB bus have unique address settings Possible addresses are 1 to 31 In the connection dialog of the host software e g PIMikroMove PlTerminal or LabView drivers select the correct GPIB board in the PC E 517 PZ214E Release 1 0 0 Page 69 Piezo Nano Positioning PI Communication GPIB Board and enter the address of the E 517 Address Otherwise no communication can be established NOTE The EEE 488 tab card is only present in the host software if a GPIB driver from National Instruments NI or an Nl compatible driver is installed on your PC Start up controller E 517 Controller 1 Connect controller Rs 232 IEEE 488 TCi e GPIB Board 0 lt an l Tv Address 4 a SA 2 Select connected stages Figure 11 GPIB configuration in PIMikroMove If you have established a connection and want to change the currently active address of the E 517 proceed as follows 1 Use the IFC command p 159 in the command entry facility of the program e g by sending IFC GPADR 7 2 Close the connection 3 Open the connection again with the address you just set with IFC in the example 7 The currently active address can also be checked set on the E 517 front panel in the COMMUNICATION display screen p 21 This screen can be accessed by th
181. jUNKNOwN STAGE 1 0 00000 0 000000 5 Sj 1 000000 1 505100 10 000000 gt go Piezo channels gt 1 506200 Sensor channels Piezo channels Note With the E 517 the axis to channel assignment is fixed so that the first motion axis A by default always is driven by the first piezo channel and measured by the first sensor channel the second axis B by default belongs to the second piezo channel and to the second sensor channel and the third axis C by default belongs to the third piezo channel and to the third sensor channel Each E 517 PZ214E Release 1 0 0 Page 17 First Steps Piezo Nano Positioning PI line on the tab cards belongs to one axis or one channel of the system respectively 7 Make some test moves with the individual axes using the controls on the Axes tab card The first moves should be made in open loop operation Servo boxes must be unchecked With the E 517 open loop commanding means to give the desired output voltage values for the axes Command an output voltage of 0 V by entering 0 in the Openloop Value field of an axis and pressing Enter on your keyboard Then enter a new value of about 10 of the axis voltage range and press Enter Increment the Open oop Value this way by steps of a suitable size up to the upper voltage limit of the axis see datasheet or measurement protocol of the mechanics and then reduce it in an analogous manner to the lower voltage range limit of the axis In
182. kdown E 517 PZ214E Release 1 0 0 Page 153 GCS Commands Piezo Nano Positioning PI GOH Go To Home Position Description Move given axes to home position GOH lt AxisID gt is the same as MOV lt AxisID gt 0 Servo must be enabled for the commanded axis prior to using this command closed loop operation This command can be interrupted by 24 p 133 STP p 190 and HLT p 156 Format GOH lt AxisID gt Arguments lt AxisID gt is one axis of the controller if omitted all axes are affected Response none Troubleshooting Illegal axis identifier Notes The definition of the home position can be changed with DFH p 146 The travel range limits will then be adapted to the new home position Motion commands like GOH are not allowed when the E 517 is in OFFLINE mode or when the wave generator output is active When a macro is running on the E 517 GOH will be executed not until the macro is finished or stopped See Control Value Generation p 53 and Control Modes p 23 for details GWD Get Wave Table Data Description Query waveform shape for given wave table The response to GWD does not contain any offset to the wave generator output set with WOS p 228 Format GWD lt StartPoint gt lt NumberOfPoints gt lt WaveTablelD gt Www pi ws E 517 PZ214E Release 1 0 0 Page 154 GCS Commands Arguments Response Example Piezo Nano Positioning PI l
183. led from a host computer not included with ASCII commands sent via m TCP IP m RS 232 serial connection m USB connection FTDI USB 1 1 compatible with USB 2 0 m GPIB IEEE 488 connection All interfaces can be active simultaneously The commands from the interfaces are queued in the order the completed command lines are received NOTES TCP IP communication If no DHCP server is available on the network or if a point to point connection between host PC and controller is being used after power on or reboot it might take a period of about 30 seconds before communication is possible It is not possible to connect multiple TCP IP command streams to the E 517 via TCP IP only one TCP IP connection is possible at any one time When using the USB interface for the first time two FTDI USB drivers must be installed on the host PC These drivers are provided on the E 517 CD in the USB_Serial_Driver directory With TCP IP and USB connections communication can not be maintained after the E 517 is power cycled or rebooted The connection must then be closed and reopened The EEE 488 tab card is only present in the host software if a GPIB driver from National Instruments NI or an Ni compatible driver is installed on your PC Using multiple interfaces simultaneously may cause problems with the host software With PIMikroMove it is possible to connect to multiple controllers in one program instance With PlTerminal you need
184. line so there is always one trigger point missing Www pi ws E 517 PZ214E Release 1 0 0 Page 108 Wave Generator Www pi ws Piezo Nano Positioning PI To achieve a scan area with no missing trigger points the axis can move onward one step width before scanning the next line This is done by increasing the scanline field height and adjusting its offset scan area X Figure 24 Improved bidirectional XY scan This improved bidirectional XY scan can be carried out with a command sequence like the one listed below The extra step in the scan area requires increased delay times Write this command sequence to a macro named bidir2 3846 3846 0 0 0 0 3846 0 2 0 7692 105 2 12 Forward scan 3846 3846 0 0 0 0 3846 0 2 0 7692 105 2 12 Backward scan Modify the last line of the SCAN macro MAC NSTART BIDIR2 5 and run the macro with MAC START SCAN You should recognize the enlarged motion area on the E 517 display The first trigger signal is at 0 um and at 10 um respectively E 517 PZ214E Release 1 0 0 Page 109 Wave Generator Piezo Nano Positioning PI 8 3 Wave Generator Related Commands and Parameters CTO p 142 Set Configuration Of Activates the Generator Trigger Trigger Output output mode which is required for the triggerline actions set with TWS and or ae settings can be saved DRR p 152 Get Recorded Data Reads the iaat recorded data Data Values recording is triggered by the WGO and WG
185. low for all points using the TWC command p 200 It is recommended to use TWC before trigger actions are set with TWS Generator trigger mode must be activated for the selected trigger output line with the CTO command p 142 See also Wave Generator p 84 and Configuring Trigger Output p 77 TWS lt TrigOutID gt lt PointNumber gt lt Switch gt lt TrigOutID gt is one digital output line of the controller see below for details lt PointNumber gt is one point in the waveform starts with index 1 see below for the timing calculation lt Switch gt is the signal state of the digital output line 0 low 1 high None lt TrigOutID gt corresponds to the output lines DIO_O1 to DIO_O3 IDs 1 to 3 see Digital In Out Socket p 267 With the E 517 there is a fixed one to one assignment of axes to the wave generators and the digital output lines This means that E 517 PZ214E Release 1 0 0 Page 201 GCS Commands Www pi ws Piezo Nano Positioning PI m the TWS settings for a digital output line will only be applied if the corresponding wave generator is started but not if other wave generators run m with E 517 i1 models only DIO_O1 can be used m if axes channels are deactivated see Configure Axes and Channels p 33 for details only the output lines of the active axes and the corresponding wave generators can be used The number of arguments following the command mnemo
186. lter type 0 No Filter Channel 1 IIR Filter 2 FIR filter 99 User 0x05000001 0 Input Signal 3 FLOAT _ Digital filter Channel Bandwidth 0x05000002 0 Input Signal 3 INT Digital filter Channel order 0x05000101 0 Input Signal 3 FLOAT User filter Channel parameter AO 0x05000102 0 Input Signal 3 FLOAT User filter Channel parameter A1 0x05000103 0 Input Signal 3 FLOAT User filter Channel parameter BO 0x05000104 0 Input Signal 3 FLOAT User filter Channel parameter B1 0x05000105 0 Input Signal 3 FLOAT User filter Channel parameter B2 0x07000000 2 Logical Axis 3 FLOAT _ Range min limit 0x07000001 2 Logical Axis 3 FLOAT Range max limit 0x07000200 0 Logical Axis 3 FLOAT Servo loop slew rate axis unit s 0x07000500 3 Logical Axis 3 FLOAT Position from sensor 1 0x07000501 3 Logical Axis 3 FLOAT Position from sensor 2 0x07000502 3 Logical Axis 3 FLOAT Position from sensor 3 0x07000600 0 Logical Axis 3 CHAR Axis name 0x07000601 0 Logical Axis 3 CHAR Axis unit 0x07000900 0 Logical Axis 3 FLOAT _ Tolerance 0x07000C01 0 Logical Axis 3 FLOAT Default voltage 0x07010200 0 Logical Axis 3 FLOAT User origin 0x07010600 0 Logical Axis 3 INT Enable SW On 0 Disabled Target Signal 1 Enabled 0x07030100 3 Logical Axis 3 INT Axis servo mode 0 Hardware selection 1 Firmware Www pi ws E 517 PZ214E Release 1 0 0 Page 254 Controller Parameters Piezo
187. lue Number of Points where Servo Update Time in seconds is given by parameter 0Ox0E000200 WTR wave table rate value gives the number of servo cycles the output of a waveform point takes default is 1 Number of Points is the length of the waveform i e the length of the wave table If the wave generator is started with WGO bit 2 triggered and synchronized by external signal the wave table rate gives the number of HIGH pulses the output of a point takes E 517 PZ214E Release 1 0 0 Page 88 Wave Generator Piezo Nano Positioning PI WTR sets the value of the Wave Generator Table Rate parameter ID 0x13000109 in volatile memory You can set the wave table rate also using the CFG wave type see WAV command p 209 or by directly changing the parameter with SPA p 185 or SEP p 183 Save the value with WPA p 229 to non volatile memory where it becomes the power on default The value of the parameter in volatile memory can be read with the WTR command p 231 The E 517 provides no interpolation so that the interpolation type parameter of the WTR command must always be 0 no interpolation With WGR p 227 you can restart data recording while the wave generator is running The recorded data can be read with the DRR command p 152 See Data Recording p 71 for more information If more than one wave generator is running recording starts at the waveform start point which occurs first 8 1 4 Application Notes
188. m Commandable Position Get Maximum Commandable Position Get Number Of Record Tables Get Number Of Output Signal Channels Get Number Of Input Signal Channels Tell Valid Character Set For Axis Identifiers Get Number Of Wave Generators Get Versions Of Firmware And Drivers Get Maximum Number Of Wave Table Points Delay The Command Interpreter Reboot System E 517 PZ214E Release 1 0 0 Page 130 GCS Commands Piezo Nano Positioning PI 10 3 Command Reference Calphabetical 5 Request Motion Status Description Format Arguments Response Examples Notes Requests motion status of the axes 5 single ASCII character number 5 none The answer lt uint gt is bit mapped and returned as the hexadecimal sum of the following codes 1 first axis is moving 2 second axis is moving 4 third axis is moving 0 indicates motion of all axes complete 3 indicates that the first and the second axis are moving The 5 response is influenced by the current control and servo mode as follows m OFFLINE mode response is always 0 m Open loop operation response is always 0 m Closed loop operation ONLINE mode and axis on target response is 0 m Closed loop operation ONLINE mode and axis not on target response is the non zero code indicating that the axis is moving 6 Query If Position Has Changed Since Last POS Description Format Arguments Www pi ws Requests if the positions of the axes have
189. m Output trigger settings TWS p 201 Nevertheless you can keep waveform s and trigger settings using the macro feature The macro feature allows defining command sequences and storing them permanently in non volatile memory in the controller This way you can define waveforms and output trigger settings and save them permanently to the E 517 See Working with Controller Macros p 113 and Scanning Examples with Wave Generator and Macros p 104 for more information The following settings can be saved with WPA p 229 to non volatile memory where they become the power on defaults m Wave offset set with WOS p 228 or WAV with CFG wave type or set automatically when running the wave generator with bit 8 start at the endpoint m Wave generator table rate set with WTR p 231 or WAV with CFG wave type m Number of cycles for wave generator output set with WGC p 220 m Generator Trigger mode selection made with CTO p 142 m Data recorder configuration made with DRC p 150 The different software interfaces provided for the E 517 also support use of the wave generator Waveforms can be defined stored and displayed in and by the software in a more user friendly way than in a terminal using WAV p 209 and WGO p 221 If using the wave generator with the GCS DLL PIMikroMove or LabView read the descriptions in the associated software manual first Www pi ws E 517 PZ214E Release 1 0 0 Page 91 Wave Gene
190. mands HPA p 157 returns a list of the available parameters SPA p 185 writes parameter settings into volatile memory without changing the settings in non volatile memory WPA p 229 writes parameter settings from volatile to non volatile memory See SPA for an example SEP lt Pswd gt lt ItemID gt lt PamID gt lt PamValue gt lt Pswd gt is the password for writing to non volatile memory default is 100 lt ItemID gt is the item for which a parameter is to be changed in non volatile memory See below for details lt PamlID gt is the parameter ID can be written in hexadecimal or decimal format See below for details lt PamValue gt is the value to which the given parameter of the given item is set none Illegal item identifier wrong parameter ID invalid password command level too low for write access E 517 PZ214E Release 1 0 0 Page 183 GCS Commands Notes Available item IDs and parameter IDs Piezo Nano Positioning PI To have write access to the parameter s it might be necessary to switch to a higher command level using CCL p 139 Warning The number of write cycles of non volatile memory is limited Write default values only when necessary lt ItemID gt can be an axis identifier a sensor channel a piezo channel a wave generator a digital output line or the whole system the item type depends on the parameter see Parameter Overview p 252 for the item
191. message will appear saying that new hardware has been detected Follow the on screen instructions and insert the E 517 CD The required FTDI hardware drivers are found in the USB_Serial_Driver directory In the host software e g PIMikroMove PlTerminal or LabView drivers you see all E 517s which are connected to the USB sockets of the host PC In the Start up controller window of PIMikroMove for example the present devices are listed on the FTD USB tab card see figure below Click on the E 517 to which you want to connect Then press the Connect button to establish the connection Www pi ws E 517 PZ214E Release 1 0 0 Page 68 Communication Piezo Nano Positioning PI Start up controller bic at E 517 Controller 1 Connect controler RS 232 FIDIUSS en PI E 517 Display and Interface SN 0000000002 2 Select connected stages I 3 Sart up axes Figure 10 The connection dialog in PIMikroMove NOTE With TCP IP and USB connections communication can not be maintained after the E 517 is power cycled or rebooted The connection must then be closed and reopened 5 6 GPIB IEEE 488 Parallel Connection Www pi ws The parallel communications bus is accessed via the GPIB IEEE488 connector on the front panel of the E 517 Use a suitable cable to connect the E 517 to the host PC The host PC must be equipped with GPIB hardware and the corresponding driver must be installed GPIB dr
192. mmunication in the form uint uint uint uint is also accessible as parameter ID 0x11000700 IP Mask For lt InterfacePam gt MACADR lt PamValue gt gives the fixed unique address of the network hardware in the E 517 is also accessible as parameter ID 0x11000B00 MAC Address Notes CAUTION A TCP IP connection will fail if no DCHP server is present but the startup behavior for IP address configuration is set to use DHCP to obtain IP address if this fails use IPADR IPSTART 1 The E 517 will use the address given by IPADR only if IPSTART 0 If the IP address for the current TCP IP connection was obtained from a DHCP server this address is not reflected in the response to the IFC command The current active RS 232 baud rate and GPIB IEEE 488 address can also be checked on the E 517 front panel in the COMMUNICATION display screen p 21 This screen can be accessed by the trackball p 22 The front panel settings interdepend with the interface parameter settings described above Www pi ws E 517 PZ214E Release 1 0 0 Page 162 GCS Commands Www pi ws Piezo Nano Positioning PI IFS Set Interface Parameters As Default Values Description Format Arguments Response Note Possible interface parameters Interface parameter store The power on default parameters for the interface are changed in non volatile memory but the current active parameters are not Settings made with IFS becom
193. must be enabled for the commanded axis prior to using this command closed loop operation Format MVR lt AxisID gt lt Distance gt Arguments lt AxisID gt is one axis of the controller lt Distance gt gives the distance to move the sum of the distance and the last commanded target position is set as new target position in physical units Response none Www pi ws E 517 PZ214E Release 1 0 0 Page 172 GCS Commands Piezo Nano Positioning PI Troubleshooting Target position out of limits Use TMN p 197 and TMX p 197 to ask for the current valid travel range limits and MOV p 171 for the current target Illegal axis identifier Servo is Off for one of the axes specified Motion commands like MVR are not allowed when the E 517 is in OFFLINE mode or when the wave generator output is active When a macro is running on the E 517 MVR will be executed not until the macro is finished or stopped See Control Value Generation p 53 and Control Modes p 23 for details Notes The MVR command can be interrupted by 24 p 133 STP p 190 and HLT p 156 Example Send MOV 1 0 5 Note This is an absolute move Send POS 1 Receive 1 0 500000 Send MOV 1 Receive 1 0 500000 Send MVR 1 2 Note This is a relative move Send POS 1 Receive 1 2 500000 Send MVR 1 2000 Note New target position of axis 1 would exceed motion range Command is ignored i e the target position remains
194. n Format Arguments Tests if a macro is running on the controller 8 single ASCII character number 8 none E 517 PZ214E Release 1 0 0 Page 132 GCS Commands Www pi ws Response Piezo Nano Positioning PI lt uint gt 0 no macro is running lt uint gt 1 a macro is currently running 9 Get Wave Generator Status Description Format Arguments Response Examples Requests the status of the wave generator s The 9 single character command p 133 can be used to query the current activation state of the wave generators The reply shows if a wave generator is running or not but does not contain any information about the wave generator start mode With WGO you can ask for the last commanded wave generator start options WGO settings p 221 9 single ASCII character number 9 none The answer lt uint gt is bit mapped and returned as the hexadecimal sum of the following codes 1 Wave Generator 1 is running 2 Wave Generator 2 is running 4 Wave Generator 3 is running etc 0 indicates that no wave generator is running 5 indicates that wave generators 1 and 3 are running 24 Stop All Motion Description Format Arguments Response Stops all motion abruptly For details see the notes below Sets error code to 10 This command is identical in function to STP p 190 but only one character must be send via the interface Therefore 24 can also be used whil
195. n V in the field between the start buttons for step and impulse response measurements and press Enter on your keyboard E joo f The Record Rate value should be 1 E 517 PZ214E Release 1 0 0 Page 73 Data Recording Piezo Nano Positioning PI 7 Start the impulse response measurement by clicking on the button right beside the amplitude field An impulse move is commanded with the IMP p 165 command and the recorded position is displayed in the graphics pane of the Data Recorder window 8 To analyze the recorded data and display it as a Bode frequency response diagram click on the FFT button in the icon bar above the graphics display 9 Optionally you can configure the display properties and activate cursors using the buttons in the icon bar above the graphics display see the PIMikroMove manual for details This helps to identify the resonance peak on the Bode plot For example you can place a cursor on the peak and read out the cursor value which is displayed beside the graph see figure below the resonant frequency is about 824 Hz Data Recorder E 517 USB SN 0000000002 TAA joj xj aBer m g amp O eusort gt Record Channel Cursor 1 anes I TT TTT Bors atert ipo stion of aes hy mere sores ss 23 z 56 pepe s m eee eee a eo Ee E I ee e ce m e e Tih 7 Way ih Cursor 2 meas a EULI x 6 10352 v 56 73965 5 DFF Cur 1 Cur 2 2 dX 817 87109 2 dY 2 11085 a d
196. n a macro is running will be executed not until the macro is finished or stopped The only exceptions are 5 6 7 8 9 and 24 which are executed immediately When a macro is running trackball settings can be used in parallel to command axis motion See Trackball Functions p 22 for details Macro execution can be stopped with 24 p 133 and STP p 190 Simultaneous execution of multiple macros is not possible Only one macro can be executed at a time A running macro may not be deleted You can query with 8 p 132 if a macro is currently running on the controller See Working with Controller Macros p 113 for examples www pi ws E 517 PZ214E Release 1 0 0 Page 169 GCS Commands Piezo Nano Positioning PI MAC List Macros Description Format Arguments Response Troubleshooting List macros or content of a given macro MAC lt macroname gt lt macroname gt name of the macro whose content shall be listed if omitted the names of all stored macros are listed lt string gt if lt macroname gt was given lt string gt is the content of this macro if lt macroname gt was omitted lt string gt is a list with the names of all stored macros Macro lt macroname gt not found MOV Set Target Position Description Format Arguments Response Troubleshooting Www pi ws Set new absolute target position for given axis Servo must be enabled for
197. n the generation of the control value for the piezo channel The servo loop thus maintains the current axis position based on a given target position and the position feedback of the corresponding sensor channel See Servo Modes p 24 and Control Value Generation p 53 for more information The individual control and servo modes can be combined arbitrarily The current states are visible on the main screen of the E 517 display 3 2 1 Control Modes The current control mode of a piezo channel determines the applicable control sources for the output voltage and hence for the axis motion m OFFLINE mode The output voltage depends on analog control input and DC offset applied to the channel e g a voltage applied to the CONTROL INPUT socket setting of the DC OFFSET knob Move commands received via interface or from a running macro wave generator output and trackball target settings are ignored and may provoke an error message m ONLINE mode The E 517 controls the generation of the output voltage Target values for the axis motion can be given by move commands received via interface or from a running macro wave generator output and trackball settings Analog control input voltage and DC offset settings are ignored See Control Value Generation p 53 for details Www pi ws E 517 PZ214E Release 1 0 0 Page 23 Operation Piezo Nano Positioning PI Switching between ONLINE and OFFLINE mode can be done by m Channel
198. n use the TCP IP connection The default port setting can not be changed Www pi ws E 517 PZ214E Release 1 0 0 Page 61 Communication Piezo Nano Positioning PI 5 3 1 Network with DHCP Server Www pi ws NOTES For successful connection the E 517 startup behaviour for IP address configuration must be set to Use DHCP to obtain IP address IPSTART 1 default selection You can check the IPSTART settings with the IFS command power on default setting and the IFC command current setting If the IPSTART setting is Use IP address defined with IPADR IPSTART 0 send IFS 100 IPSTART 1 The change becomes active with the next power on or reboot First make sure that the proper startup behaviour is set see Note above Then if a network with DHCP server is available connect the controller to a network access point and power cycle it newer switches accept both cross over and straight through network cables The controller will automatically obtain an IP address over DHCP In the host software e g PIMikroMove PlTerminal or LabView drivers you can use the Search for controllers functionality in the connection dialog to see all available E 517 controllers with their IP address and port settings In PIMikroMove you have for example to press the Search for controllers button in the Start up controller window see figure below In the resulting list click on the controller to which you want to connect Check
199. n volatile memory CAUTION Incorrect parameter values may lead to improper operation or damage to your hardware Be careful when changing parameters It is strongly recommended to save the parameter values of the E 517 to a file on the host PC before you make any changes This way the original settings can be restored if the new parameter settings will not prove satisfactory To save the parameter values and to load them back to the E 517 use the Device Parameter Configuration window of PIMikroMove See Create Backup File for Controller Parameters p 12 for more information NOTE The PIMikroMove host software gives access to parameter values in a more convenient way Use its Device Parameter Configuration window to check edit the individual parameters See the PIMikroMove manual for more information Each parameter refers to one of the following item types see the Item Type Concerned column in the table below m Whole system E 517 interface display module m Hardware components of the E 517 m Logical axes m Input signal channels sensor channels m Output signal channels piezo channels m Wave generators m Wave tables m Data recorder tables m Digital output lines E 517 PZ214E Release 1 0 0 Page 251 Controller Parameters Piezo Nano Positioning PI The Max No of Items column shows the maximum number of items for which the parameter is used Example With an E 517 i3 for parameter 0x0200020
200. nal error in macro editor One or more arguments given to function is invalid empty string index out of range Axis identifier is already in use by a connected stage Invalid axis identifier Could not access array data in COM server Range of array does not fit the number of parameters Invalid parameter ID given to SPA or SPA Page 245 GCS Commands Piezo Nano Positioning 1021 PILNR_AVG_OUT_OF_RANGE 1022 PI_WAV_SAMPLES_OUT_OF_RANGE 1023 PI_WAV_FAILED 1024 PI_MOTION_ ERROR 1025 PI_RUNNING_ MACRO 1026 PI_PZT_CONFIG_FAILED 1027 PI_PZT_CONFIG_INVALID_ PARAMS 1028 PI_UNKNOWN_CHANNEL_ IDENTIFIER 1029 PI_WAVE_PARAM_FILE_ERROR 1030 PILUNKNOWN_WAVE_SET 1031 PI_WAVE_EDITOR_FUNC_NOT_LOADED 1032 PI_USER_CANCELLED 1033 PI_C844_ERROR 1034 PI_DLL_NOT_LOADED 1035 PI_PARAMETER_FILE_PROTECTED 1036 PI NO_PARAMETER_FILE_OPENED 1037 PI_STAGE_DOES_NOT_EXIST 1038 PI_PARAMETER_FILE_ALREADY_OPENED 1039 PI_PARAMETER_FILE_OPEN_ERROR 1040 PI_INVALID_CONTROLLER_VERSION Www pi ws E 517 PZ214E Release 1 0 0 PI Number for AVG out of range must be gt 0 Incorrect number of samples given to WAV Generation of wave failed Motion error while axis in motion call CLR to resume operation Controller is already running a macro Configuration of PZT stage or amplifier failed Current settings are not valid for desired configuration Unknown channel identifier Error while reading writing wave ge
201. nal path only one channel shown in a system with an E 509 sensor servo module a piezo amplifier module and an E 517 interface and display module www pi ws E 517 PZ214E Release 1 0 0 Page 53 System Description Piezo Nano Positioning PI 4 3 2 Control Value Generation in ONLINE Mode In ONLINE mode the E 517 controls the generation of the output voltage The axis motion can be commanded by multiple sources m Move commands received via interface or from a running macro SVA p 191 and SVR p 195 in open loop operation MOV p 170 MVR p 172 and GOH p 154 in closed loop operation IMP p 165 and STE p 189 for both servo modes m Trackball settings on the CHANNEL SETTING screen see Trackball Functions p 22 for more information m Wave generator output for periodic motion see Wave Generator p 84 for more information and examples While move commands and trackball settings can be used in parallel to command axis motion they are not accepted when the wave generator is running for the axis The macro feature allows defining command sequences and storing them permanently in non volatile memory in the controller Move commands from macros are only accepted in ONLINE mode and only when the wave generator is not running See Working with Controller Macros p 113 for more information In ONLINE mode the SERVO switches of all channels must be set to OFF on the piezo control electronics Otherwise the SVO
202. nd Receive Note Send Receive Note Send Receive Note Send Receive Send Receive Note Send Note Www pi ws E 517 PZ214E Release 1 0 0 PI Piezo Nano Positioning Query the current values of the User Origin and range limit parameters NLM A A 0000 0000 PLM A A 0100 0000 Query the low and high position soft limits of the axis DFHA POS A A 0000 0008 TSP 1 1 0009 8720 Query the current axis position and the position of the sensor channel again Now the axis position is 0 because it was defined to be the new home position based on internal calculations using the User Origin parameter The sensor position is still the same as before also shown in the E 517 display SPA A 0x07010200 A 0x07000000 A 0x07000001 A 0X07010200 9 87220000e 0 A 0X07000000 9 87220320e 0 A 0X07000001 9 01277760e 1 Query the current values of the User Origin and range limit parameters again They were changed by the DFH command DFH A A 0009 8722 Query the new home position definition NLM A A 0009 8722 PLM A A 0090 1277 The low and high position soft limits of the axis were also adapted to the new home position definition WPA 100 This command saves the new home position setting and the adapted range settings i e the new parameter values and the new values received by NLM and PLM as power on defaults Page 148 GCS Commands Www pi ws
203. nd Opzt values gain and offset for sensor electronics and piezo amplifier for the new stage connected to the second sensor and piezo channel See Calibration E 517 PZ214E Release 1 0 0 Page 35 Operation WWww pi ws Piezo Nano PI Positioning Settings p 38 for details SPA 3 0x02000300 5 3 0x02000200 25 3 0x0B000003 10 3 0x0B00000A 0 Adjust the Ksen Osen Kpzt and Opzt values for the new stage connected to the third sensor and piezo channel ATC 112131 Start autocalibration of the E 517 inputs and outputs for all channels e g ADC gain offset DAC gain offset Note The new hardware modules come calibrated Nevertheless the ATC procedure is required to adapt several E 517 parameters for highest precision of the E 517 See Calibration Settings p 38 and ATC command description p 134 for details ATS 11213 1 Ww N He PRR oil Ooo Check the autocalibration results If autocalibration was successful the response is 0 for the individual channels TSP 1 0000 4806 2 0000 8773 3 0000 5080 Query the current position of all sensor channels Compare it to the display on the E 517 The display should show position values suitable to the TSP response VOL 1 0002 4736 2 0000 0339 3 0000 8918 Query the current output voltage of all piezo channels Compare it to the display on the E 517 The display should show voltage values sui
204. nd output by the wave generator lt SegLength gt The length of the wave table segment in points Only the number of points given by lt SegLength gt will be written to the wave table If the lt SegLength gt value is larger than the lt N gt value the missing points in the segment are filled with recurrences of the sine curve lt A gt The amplitude of the sine curve lt N gt The wave length i e the length of the sine curve in points cycle duration lt Xo gt The index of the starting point of the sine curve in the segment Gives the phase shift in points Lowest possible value is 0 lt g gt The phase shift in degrees Lowest possible value is 0 lt B gt The offset of the sine curve For POL with POL Ay A x 2x te A xx the wave type dependent parameters are E 517 PZ214E Release 1 0 0 Page 215 GCS Commands Www pi ws Piezo Nano Positioning PI lt SegStartPoint gt lt WaveLength gt xo Ao KAn withn lt 5 lt SegStartPoint gt The index of the segment starting point in the wave table Lowest possible value is 1 Writing to the wave table starts with this point In the wave table all points with an index smaller than lt SegStartPoint gt remain unchanged This means that former written content for those points will not be deleted and is shown by GWD and output by the wave generator lt WaveLength gt The wave length i e the length of the polynomial curve in points c
205. ne axis of the controller lt VelCtrlState gt can have the following values 0 Velocity Control Mode OFF 1 Velocity Control Mode ON none Illegal axis identifier When Velocity Control Mode is ON the axis is driven with the velocity specified with VEL p 205 This is valid in ONLINE mode in open loop and closed loop operation but the VCO settings are not effective when the wave generator is running Velocity Control Mode should be ON if you use the software emulated on target reading ONT command p 176 The current VCO settings are saved with the WPA command in addition to the current parameter values and other settings See the WPA description p 229 for details VCO Get Velocity Control Mode Description Format Arguments Gets Velocity Control Mode of given axes If all arguments are omitted gets mode of all axes VCO lt AxisID gt lt AxisID gt is one axis of the controller E 517 PZ214E Release 1 0 0 Page 204 GCS Commands Www pi ws Response Troubleshooting Piezo Nano Positioning PI lt AxisID gt lt VelCtriState gt LF where lt VelCtrlState gt is the current Velocity Control Mode of the axis 0 Velocity Control Mode OFF 1 Velocity Control Mode ON Illegal axis identifier VEL Set Closed Loop Velocity Description Format Arguments Response Troubleshooting Notes Set velocity of given axes VEL can be changed while the ax
206. nerator parameter file Could not find description of wave form Maybe WG INI is missing The WGWaveEditor DLL function was not found at startup The user cancelled a dialog Error from C 844 Controller DLL necessary to call function not loaded or function not found in DLL The open parameter file is protected and cannot be edited There is no parameter file open Selected stage does not exist There is already a parameter file open Close it before opening a new file Could not open parameter file The version of the connected controller is invalid Page 246 GCS Commands 1041 1042 1043 1044 1045 1046 1047 1048 1049 1050 1051 1052 1053 1054 1055 1056 1057 1058 www pi ws Piezo P _PARAM_SET_ERROR P _ NUMBER_OF_POSSIBLE_WAVES_ EXCEEDED P _NUMBER_OF_POSSIBLE_GENERATORS_EXCEEDED PI_NO_WAVE_FOR_AXIS_DEFINED PI_CANT_STOP_OR_START_WAV PI_REFERENCE_ERROR P _REQUIRED_WAVE_NOT_FOUND Pl_INVALID_SPP_CMD_ID P _STAGE_NAME_ISNT_UNIQUE PI_FILE_TRANSFER_BEGIN_MISSING P _FILE_TRANSFER_ERROR_TEMP_FILE P _FILE_TRANSFER_CRC_ERROR P _COULDNT_FIND_PISTAGES_DAT PI_NO_WAVE_RUNNING PI_INVALID_PASSWORD P _OPM_COM_ERROR P _WAVE_EDITOR_WRONG_PARAMNUM P _WAVE_EDITOR_FREQUENCY_OUT_OF_ RANGE E 517 PZ214E Release 1 0 0 Nano Positioning PI Parameter could not be set with SPA parameter not defined for this controller Th
207. ng PI This XY scan can be carried out with a command sequence like the one listed below Write this command sequence to a macro named bidir MAC BEG bidir 10 1 X POL 3846 3846 0 2 0 1 X POL 0 3846 0 0 0 L CFG 7692 170 5210 117 10000 B 2 0 X POL 3846 3846 0 8 0 Forward scan X CFG 7692 10 5 2 10 17 10000 B 2 MAC END 1 A 1 X POL 0 3846 0 10 0 1 1 Backward scan You can abstain from regression time because the step in Y direction is of the same distance as the up down scan line and the trigger signal does not come until the end of it Modify the last line of the SCAN macro MAC NSTART BIDIR 5 and run the macro with MAC START SCAN You should recognize the bidirectional motion on the E 517 display After 5 axis A steps of 2 um axis B position is increased by 2 um and axis A then steps down to the starting position where axis B position is increased again If you decide to change the starting point of the scan area lower left corner you have to adjust the MOV A 0 B 0 command in the SCAN macro as well as the offset parameter in the wave definitions Improved Bidirectional XY Scan With WGO bit 4 set as start option P ising WGO 1 17 the E 517 always outputs a 6 x trigger trigger signal at the end of a step line or e t a area In the previous bidirectional XY scan E macro bidir the end point of a scan 4 3E See Pe line has the same X position as the start point of the succeeding scan
208. nic is limited to 32 i e you can define at most 10 trigger points per command line As long as the wave generator output is synchronized by servo cycles you can calculate the time for the trigger point in the waveform as follows time generator cycle time PointNumber with generator cycle time Servo Update Time WTR value where Servo Update Time in seconds is given by parameter 0xOE000200 WTR value is the wave table rate i e the number of servo cycles the output of a waveform point takes is given by parameter 0x13000109 default is 1 If you start the wave generator with the WGO start options given by bit 3 4 or 5 the corresponding pulses are output in addition to the output pulses defined with TWS The number of wave generator output cycles during which trigger pulses are to be output can be set using the Number Of Trigger Cycles parameter ID 0x18000100 The width of a trigger pulse is 30 us by default You can change the default pulse width using the Pulse Width parameter ID OxOE000900 Possible values are in the range of 10 to 150 us E 517 PZ214E Release 1 0 0 Page 202 GCS Commands Example Piezo Nano Positioning PI Send TWS 211220230 Note Sets trigger actions for the output line DIO_O2 identifier 2 at waveform point 1 it is set high points 2 and 3 are set low TWS Get Trigger Line Action At Waveform Point Description Format Arguments Response Example www pi ws
209. nment of axes to sensor and piezo channels to wave tables and wave generators and to the digital input and output lines Axes and channels can be activated deactivated to reflect the current hardware configuration of the piezo control electronics see Configure Axes and Channels p 33 for details If axes are deactivated only the digital input and output lines of the active axes and the corresponding wave generators and wave tables can be used To save the currently valid E 517 configuration to non volatile memory e g axis identifiers active axes channels where it becomes the power on default you must use WPA p 229 Www pi ws E 517 PZ214E Release 1 0 0 Page 52 System Description Piezo Nano Positioning PI 4 3 Control Value Generation 4 3 1 Overview and Signal Path The E 517 interface and display module can be combined in several configurations in a piezo control electronics system The signal path diagram below shows a usual configuration mands from Interface or Macro Trackball Settings or Wave Gene rator Output Calculation On Target Mode 1D Ox07010600 Control DAC Monitor On Target 2 fottage Monitor ADC Selection NE OFFLINE ONL Overflow 3 O 2 a a a 8 3 On Target 1 Analog Control Input and DC Offset Piezo Monitor Piezo Vottage 10 or Piezo Voltage 100 Voltage SERVO Switch Hardware E 509 Sensor Servo Module Figure 5 Sig
210. nt gt 210 lt SpeedUpDown gt 180 The previous contents of the wave table are overwritten by the new segment Amplitude Wave length Segment length WAV 2 amp LIN 3000 40 50 3000 0 650 lt WaveTablelD gt 2 lt AppendWave gt amp lt WaveType gt LIN lt SegLength gt 3000 lt Amp gt 40 lt Offset gt 50 lt WaveLength gt 3000 lt StartPoint gt 0 lt SpeedUpDown gt 650 The defined segment will be appended to the existing wave table contents negative amplitud e curve Amplitude 1 Speed up veri Start point Segment length Wave length Www pi ws E 517 PZ214E Release 1 0 0 Page 95 Wave Generator Piezo Nano Positioning PI 8 2 2 Modifying the Wave Generator Table Rate An example for how to modify the duration of the wave generator output using the wave table rate Command String to Send Action Performed WA Se SINR 2000 20 10 20000 T009 Define a sine waveform for Wave Table 2 the segment length and hence the number of points in the wave table is 2000 SPA 1 0x0E000200 Ask for the servo update time of the controller reading the wave table for wave generator output is to be clocked by servo cycles in this example see WGO p 221 for details The E 517 has a servo update time of 40 us WTR Ask for the current wave table rate values default is wave table rate 1 i e each wave table point will be ou
211. o the E 516 GCS syntax version Do not switch to the E 516 GCS syntax version except when necessary for compatibility reasons PI software and documentation for the E 516 GCS syntax version is available for download at www pi ws or can be obtained from your Physik Instrumente Sales Engineer The E 516 GCS syntax version is included in the E 517 firmware so that no extra firmware update is required to make it available Proceed as follows to select the GCS syntax version 1 Send CCL 1 advanced to switch to command level 1 2 Send CSV 1 to switch to E 516 GCS syntax version or CSV 2 to switch to E 517 GCS syntax version default setting 3 Save the selection by sending WPA 100 to make it available after the next power on or reboot The current active GCS syntax version is shown in the display main screen rightmost corner E517 or E516 and can be queried with the CSV command p 141 www pi ws E 517 PZ214E Release 1 0 0 Page 44 Operation Piezo Nano Positioning PI If switched to E 516 GCS syntax version the functions available on the E 517 are the same as with the original E 516 e g data recorder and trigger output independent of the wave generator are not available See the E 516 documentation for the available functions and commands The communications interfaces Ethernet USB RS 232 IEEE 488 work independent of the selected GCS syntax version The settings of the E 517 are also valid if the device is
212. o the E 517 See Working with Controller Macros p 113 for details regarding macros NOTE PIMikroMove provides the PI Wave Generator Tool with which you can create waveforms and start the wave generator output without the need to learn the corresponding commands In the Log window of PIMikroMove you can not only monitor the commands which are sent to the controller when you use the controls of the PI Wave Generator Tool but also save them to a text file Furthermore PIMikroMove offers a comfortable macro editor on the Controller macros tab card Using these features you can easily create macros like those listed below See the PIMikroMove manual for more information Unidirectional XY SCAN In this example a simple XY scan is to be performed An XY scan involves the motion shown below Assume that axis A is parallel to the X direction and axis B is parallel to the Y direction The forward X motion consists of multiple small steps A trigger signal is output after each X step numbered dots in the figure below pe pe pe gt gt basse me ee he oe te e te i es ee ite itd ict od T Se ane oeo re 7s gt o Figure 20 Unidirectional XY scan Www pi ws E 517 PZ214E Release 1 0 0 Page 104 Wave Generator Piezo Nano Positioning PI The correlation between the two motions is shown in the graphs below which plot position against time for axis A and B respectively delay time
213. occur Controller Errors 0 1 2 3 on O ON 10 11 12 13 14 15 16 17 Www pi ws PI_CNTR_NO_ERROR PI_CNTR_PARAM_SYNTAX PI_CNTR_UNKNOWN_COMMAND PI_CNTR_COMMAND_TOO_LONG PI_CNTR_SCAN_ERROR PI_CNTR_MOVE_WITHOUT_REF_OR_NO_SERVO PI_CNTR_INVALID_SGA_PARAM PI_CNTR_POS_OUT_OF_LIMITS PI_CNTR_VEL_OUT_OF_LIMITS PI_CNTR_SET_PIVOT_NOT_POSSIBLE PI_CNTR_STOP PI_CNTR_SST_OR_SCAN_RANGE PI_CNTR_INVALID_SCAN_AXES PI_CNTR_INVALID_NAV_PARAM PI_CNTR_INVALID_ANALOG_INPUT PI_CNTR_INVALID_AXIS_IDENTIFIER PI_CNTR_INVALID_STAGE_NAME P _CNTR_PARAM_OUT_OF_RANGE E 517 PZ214E Release 1 0 0 No error Parameter syntax error Unknown command Command length out of limits or command buffer overrun Error while scanning Unallowable move attempted on unreferenced axis or move attempted with servo off Parameter for SGA not valid Position out of limits Velocity out of limits Attempt to set pivot point while U V and W not all 0 Controller was stopped by command Parameter for SST or for one of the embedded scan algorithms out of range Invalid axis combination for fast scan Parameter for NAV out of range Invalid analog channel Invalid axis identifier Unknown stage name Parameter out of range Page 234 GCS Commands Piezo Nano Positioning 18 PI_CNTR_INVALID_ MACRO_NAME 19 P _CNTR_MACRO_ RECORD 20 P _CNTR_MACRO_NOT_FOUND 21 P _CNTR_AXIS_HAS_NO_BRAKE 22 P _CNTR
214. ocedure is required Note that saving a macro to non volatile memory typically takes about 1 s A macro can start another macro without any nesting level limitation A macro can Call itself to form an infinite loop During macro recording no macro execution is allowed E 517 PZ214E Release 1 0 0 Page 113 Working with Controller Macros Piezo Nano Positioning PI A macro can be overwritten by a macro with the same name Macros can be recorded when the wave generator is running A running macro sends no responses to any interface This means questioning commands are allowed in macros but not answered and therefore useless Example 1 This simple macro initializes the E 517 and performs a move forward and backward MEG PEG macro Start recording macro macro1 e etka Switch all piezo channels to ONLINE mode PVO ee a Enable servo control mode for all axes a Enable velocity control mode and drift DCOA1B1C1 compensation mode The E 517 now keeps track of proper motion VEL A 100 B 100 C 100 Set velocity to 100 um s MOVA LOT Bi PO aca Move all axes to position 10 um This moves take 0 1 s DEL 1000 Delay of approx 1000 ms MOVAO0BOCO Move all axes to its home DEL 1000 This delay only matters if the macro is run several times in a loop MAG END Exit the macro recording mode The macro now is complete Example 2 Macro1 now is splitted in two separate macros macro2 and macro3 because it in not necessary to initialize
215. of a relative move of the specified amplitude Depending on the current servo mode the step is performed relative to the current position servo ON or to the current piezo voltage servo OFF In closed loop operation servo ON the given amplitude is interpreted as relative position value In open loop operation servo OFF the amplitude corresponds to a relative piezo voltage value STE Get STE Settings Description Format Arguments Response Get last sent STE settings for the given axis STE lt AxisID gt lt AxisID gt is one axis of the controller lt AxisID gt lt Amplitude gt LF where lt Amplitude gt is the height of the last commanded step See STE p 189 for details STP Stop All Motion Description Format Arguments Response Troubleshooting Www pi ws Stops all motion abruptly For details see the notes below Sets error code to 10 This command is identical in function to 24 p 133 which should be preferred when the controller is performing time consuming tasks STP none none Communication breakdown E 517 PZ214E Release 1 0 0 Page 190 GCS Commands Piezo Nano Positioning PI Www pi ws Notes STP stops motion of all axes caused by move commands MOV p 170 MVR p 172 GOH p 154 SVA p 191 SVR p 195 and wave generator output WGO p 221 If STP is part of a macro it stops macro execution when accessed by the command interpre
216. of the auto calibration procedure to non volatile memory ATC Get Auto Calibration Settings Description Format Arguments Response Www pi ws Get the options used for the latest auto calibration procedure started with ATC To make the ATC command available switch to command level 1 CCL command p 139 The success of the auto calibration procedure can be queried with the ATS command p 138 See Calibration Settings p 38 for more information ATC lt ChannellD gt lt ChannellD gt is one channel of the piezo control electronics can be 1 2 3 see ATC for details lt ChannellD gt lt Option gt LF For lt Option gt see ATC p 134 E 517 PZ214E Release 1 0 0 Page 137 GCS Commands Www pi ws Piezo Nano Positioning PI ATS Get Auto Calibration Status Description Format Arguments Response Query the results of the latest auto calibration procedure started with ATC To make the ATS command available switch to command level 1 CCL command p 139 The options used for the latest auto calibration procedure can be queried with the ATC command p 137 See Calibration Settings p 38 for more information ATS lt ChannellD gt lt Option gt lt ChannellD gt is one channel of the piezo control electronics can be 1 2 3 see ATC for details lt Option gt gives the ATC option to be queried see ATC p 134 for details lt
217. ommands Piezo Nano Positioning PI Response lt WaveGenID gt lt StartMode gt LF where lt StartMode gt is the last commanded start mode of the wave generator in decimal format The value may be the sum of several start options and one start mode See the WGO command description for details WGR Starts Recording In Sync With Wave Generator Description Restarts recording when the wave generator is running a first data recording cycle is started with the WGO command p 221 which starts the wave generator output The data recorder configuration can be made with DRC p 150 The recorded data can be read with the DRR command p 152 For more information see Wave Generator p 84 and Data Recording p 71 Format WGR Arguments None Response None Note WGR restarts recording with the next occurring waveform startpoint WMS Get Maximum Number of Wave Table Points Description Get the maximum number of points for the waveform written to the specified wave table Format WMS lt WaveTablelD gt Arguments lt WaveTablelD gt is the wave table identifier Response lt WaveTablelD gt lt NumberOfPoints gt LF where lt NumberOfPoints gt is the number of points available for the wave table Www pi ws E 517 PZ214E Release 1 0 0 Page 227 GCS Commands Piezo Nano Positioning PI WOS Set Wave Generator Output Offset Description Format Arguments Response Notes
218. on See Trackball Functions p 22 for details Simultaneous execution of multiple macros is not possible Only one macro can be executed at a time Macro execution can be stopped from the command line with 24 p 133 The STP command p 190 stops macro execution only when it is part of the macro A running macro may not be deleted You can query with 8 p 132 if a macro is currently running on the controller 9 3 Start Up Macro Www pi ws With MAC DEF lt macroname gt it is possible to set the specified macro as start up macro This macro will be automatically executed with the next power on or reboot of the controller Example MAC BEG init E 517 PZ214E Release 1 0 0 Page 115 Working with Controller Macros Piezo Nano Positioning PI Www pi ws ONL 1 SVO A VCO A DCO A VEL A MAC E QRPPRPR This macro switches the E 517 to ONLINE mode and closed loop operation enables velocity control mode and drift compensation mode and sets the velocity to 20 um s To ask for the current start up macro setting send MAC DEF To undo the current start up macro selection send MAC DEF i e omit lt macroname gt Deleting the current start up macro with MAC DEL lt macroname gt also deletes the start up macro selection NOTE To skip the execution of the start up macro press the trackball once immediately after you have powered on or rebooted the piezo control electronics while Physik Instrument
219. one by adequate trained personnel and after consultation with PI Otherwise preset data will be lost 1 Interconnect your system Find details in the User manual of the piezo control electronics in which the E 517 is integrated and in Communication p 58 and External Triggering Signaling p 77 E 517 PZ214E Release 1 0 0 Page 14 Piezo Nano Positioning PI First Steps 2 Poweron the system Find details in a dedicated section p 30 3 Start PIMikroMove on the host PC It opens with the Start up controller window Start up controller cS 4 2x E 517 Controller RS 232 IEEE 488 FToruse TCP IP Hostname f TCP IP Address 172 17 128 86 ae 00 SCS 3 Start up axes 4 Establish a connection to the E 517 from PIMikroMove This can be done via the TCP IP FTDI USB RS 232 or IEEE 488 GPIB interface using the corresponding tab card in the Start up controller window tab card selection depends on the current hardware connection See Communication p 58 for details Notes When using the USB interface for the first time two FTDI USB drivers must be installed on the host PC These drivers are provided on the E 517 CD in the USB_Serial_ Driver directory TCP IP communication If no DHCP server is available on the network or if a point to point connection between host PC and controller is being used after power on or reboot it might take a period of about 30 seconds before communica
220. ontroller Rack The E 517 is a microprocessor controlled interface and display module for the E 500 piezo controller system It is equipped with low noise 24 bit D A converters and can be controlled through four digital interfaces TCP IP USB RS 232 and IEEE 488 GPIB Alternatively stand alone operation is possible by uploading macro command sequences to the internal non volatile memory For manual control a trackball interface is provided An LCD display indicates position or operating voltages of the individual channels Wave Generator The integrated wave generator can output periodic motion profiles In addition to sine and triangle waves arbitrary user defined motion profiles can be created and stored Data Recorder The flexibly configurable data recorder enables simultaneous recording and read out of up to 3 input and output signals such as for positions or control values This makes possible the later association of events with saved data points Extensive Software Support The controllers are delivered with Windows operating software Comprehensive DLLs and LabVIEW drivers are available for automated control In this document the E 517 i3 and i1 models are also referred to as E 517 or interface display module E 517 PZ214E Release 1 0 0 Page 4 Piezo Nano Positioning PI Introduction 1 1 Prescribed Use The E 517 Interface Display Module is designed for installation in E 500 E 501 E 471 and E 48
221. or RS 232 communication default is 115200 also accessible as Uart Baudrate parameter ID 0x11000400 m GPADR gives the device address to be used for GPIB IEEE 488 communication default is 4 also accessible as GPIB Address parameter ID 0x11000900 m IPADR the first four portions specify the default IP address for TCP IP communication the last portion specifies the default port to be used default is 192 168 168 10 50000 also accessible as IP Address parameter ID 0x11000600 Note While the IP address can be changed the port must always be 50000 E 517 PZ214E Release 1 0 0 Page 59 Communication Piezo Nano Positioning PI m IPSTART defines the startup behavior for configuration of the IP address for TCP IP communication default is 1 use DHCP to obtain IP address also accessible as IP Configuration parameter ID 0x11000800 m IPMASK gives the IP mask to be used for TCP IP communication default is 255 255 255 0 also accessible as IP Mask parameter ID 0x11000700 m MACADR is the unique address of the network hardware in the E 517 read only example 0 d0 c9 a7 1f 86 also accessible as MAC Address parameter ID 0x11000B00 NOTES A TCP IP connection will fail if no DCHP server is present but the startup behavior for IP address configuration is set to use DHCP to obtain IP address if this fails use IPADR IPSTART 1 The E 517 will use the address given by IPADR only if IPSTART 0 If the IP address for the c
222. ory Parameters Set Servo State Open Loop Closed Loop Operation Get Servo State Open Loop Closed Loop Operation Set Velocity Control Mode Get Velocity Control Mode Set Velocity Get Velocity Set Voltage Output High Limit Get Voltage Output High Limit Set Voltage Output Low Limit Get Voltage Output Low Limit Save Parameters To Nonvolatile Memory Status Signal Values 5 p 131 6 p 131 7 p 132 8 p 132 9 p 133 Request Motion Status Query If Position Has Changed Since Last POS Command Request Controller Ready Status Query If Macro Is Running Get Wave Generator Status E 517 PZ214E Release 1 0 0 Page 129 GCS Commands Www pi ws ERR p 153 ONT p 176 OVF p 177 POS p 178 TAD p 196 TSP p 199 VOL p 209 PI Piezo Nano Positioning Get Error Number Get On Target State Get Overflow State Get Real Position Get ADC Value Of Input Signal Get Input Signal Position Value Get Voltage Of Output Signal Channel Device Information IDN p 134 HLP p 156 HPA p 157 SSN p 189 TIO p 196 TMN p 197 TMX p 197 TNR p 198 TPC p 198 TSC p 199 TVI p 200 TWG p 200 VER p 206 WMS p 227 Miscellaneous DEL p 146 RBT p 178 Get Device Identification Get List of Available Commands Get List of Available Parameters Get Device Serial Number Tell Digital I O Lines Get Minimu
223. osition Set Low Position Soft Limit Get Low Position Soft Limit E 517 PZ214E Release 1 0 0 Page 121 GCS Commands Www pi ws ONL p 174 ONL p 175 ONT p 176 OVF p 177 PLM p 177 PLM p 178 POS p 178 RBT p 178 RPA p 179 RTR p 180 RTR p 181 SAI p 181 SAI p 182 SEP p 183 SEP p 184 SPA p 185 SPA p 188 SSN p 189 STE p 189 STE p 190 STP p 190 SVA p 191 SVA p 193 SVO p 193 PI Piezo Nano Positioning Set Control Mode Get Control Mode Get On Target State Get Overflow State Set High Position Soft Limit Get High Position Soft Limit Get Real Position Reboot System Reset Volatile Memory Parameters Set Record Table Rate Get Record Table Rate Set Current Axis Identifiers Get List Of Current Axis Identifiers Set Nonvolatile Memory Parameters Get Nonvolatile Memory Parameters Set Temporary Memory Parameters Get Temporary Memory Parameters Get Device Serial Number Start Step And Response Measurement Get STE Settings Stop All Motion Set Open Loop Axis Value Get Open Loop Axis Value Set Servo State Open Loop Closed Loop Operation E 517 PZ214E Release 1 0 0 Page 122 GCS Commands Www pi ws SVO p 194 SVR p 195 TAD p 196 TIO p 196 TMN p 197 TMX p 197 TNR p 198 TPC p 198 TSC p 199 TSP p 199 TVI p 200 TWC p 200 TWG p 200 TWS p 201 TWS p 203
224. ositioning PI Command String to Send Action Performed SPA 2 0x18000100 4 The trigger cycles are to be output on the DIO_O2 line only for the first four wave generator output cycles SPA 2 0x0E000900 50 The pulse width of the trigger output on the DIO_O2 line is set to 50 us WPA 100 The trigger output configuration is saved as power on default except of the TWS settings WGO 2 33 Start output of the second Wave Generator immediately synchronized by servo cycle with the trigger output when amplitude limit is reached start option WGO bits 1 and 5 are set 1 32 33 Now the trigger output action on the DIO_O2 line will take place as specified with TWS and WGO WGO details The WGO command p 221 offers the following start options for digital output Generator Trigger mode must be enabled with CTO mbit 3 0x8 or 8 synchronized trigger pulse is output on the corresponding digital output line when the wave generator outputs a new data point mbit 4 0x10 or 16 synchronized trigger pulse is output on the corresponding digital output line when the axis finishes each period Ag in the figure below is the curve amplitude set with WAV during the waveform definition mbit 5 0x20 or 32 synchronized trigger pulse is output on the corresponding digital output line when the axis reaches the amplitude limit Agr in the figure below is the field limit set with the CFG wave ty
225. p 133 Get Wave Generator Gets the current activation status of Status the wave generator but not the start options use WGO instead See How to Work with the Wave Generator p 84 for more information For detailed command descriptions see Command Reference p 131 For the identifiers of the items which can be addressed with the commands see Accessible Items and Their Identifiers p 50 WTR p 231 Set Wave Generator Table Rate Parameter Command ItemType Max Data Parameter ID Level Concerned No of Type Description Items 0x13000003 0 Wave 3 INT Wave generator Generator cycles 0x13000004 3 System 1 INT Max Wave Points 0x13000109 0 Wave INT Wave Generator Generator Table Rate 0x1300010A 3 System 1 INT Number of Wave tables Www pi ws E 517 PZ214E Release 1 0 0 Page 111 Wave Generator Piezo Nano Positioning PI Parameter Command Item Type Max Data Parameter ID Level Concerned No of Type Description Items 0x1300010B 0 Wave 3 FLOAT Wave Offset Generator 0x13000201 3 Wave Table 3 INT Max Wave Points of table i See Controller Parameters p 250 for more information regarding the controller parameters and their handling Www pi ws E 517 PZ214E Release 1 0 0 Page 112 Working with Controller Macros Piezo Nano Positioning PI 9 Working with Controller Macros The macro
226. p 267 when the axis finishes each period end of scan line see WAV CFG start option bit 5 0x20 hex format or 32 decimal format synchronized trigger pulse is output on the corresponding digital output line see Digital In Out Socket p 267 when the axis reaches the amplitude limit scan field limit see WAV CFG start option bit 8 0x100 hex format or 256 decimal format wave generator started at the endpoint of the last cycle start option The second and all subsequent output cycles each start at the endpoint of the preceding cycle which makes this start option appropriate to scanning applications The final position is the sum of the endpoint of the last output cycle and any offset defined with WAV p 209 for the waveform bit 12 0x1000 hex format or 4096 decimal format wave generator output is triggered by external signal start option The external signal is provided by the corresponding digital input line see Digital In Out Socket p 267 The wave generator is started the first time the external signal is HIGH and runs continuously even if the signal becomes LOW bit 13 0x2000 hex format or 8192 decimal format wave generator output is stopped by external signal start option The external signal is provided by the corresponding digital input line see Digital In Out Socket p 267 The wave generator is stopped when the external signal is HIGH Further trigger pulses have no effe
227. p the instruction readily available close to the device in a safe place When the instruction is lost or has become unusable ask the manufacturer for a new copy Add all information given by the manufacturer to the instruction e g supplements or Technical Notes CAUTION Your system will be fully calibrated before being shipped If you have informed PI about your application calibration is done with the corresponding setup otherwise with a default setup It is usually not necessary for you to do anything more than adjust the zero point s before operating the system Do not interchange piezo control electronics or piezo stages of a calibrated system Respect the assignment of piezo stages to the electronics channels The assignment is shown by the serial numbers on the device labels With multi axis stages also respect the channel axis assignment given by the cable labeling Re calibration should only be done by adequate trained personnel and after consultation with PI Otherwise preset data will be lost CAUTION Thermally stable systems have the best performance For a thermally stable system power on the E 517 at least one hour before you start working with it E 517 PZ214E Release 1 0 0 Page 6 A Introduction Piezo Nano Positioning PI CAUTION Incorrect parameter values may lead to improper operation or damage to your hardware Be careful when changing parameters It is strongly recommended to save the parameter
228. pe of the WAV command parameter lt L gt Www pi ws E 517 PZ214E Release 1 0 0 Page 98 Piezo Nano Positioning PI Wave Generator One Scan Line One Scanning Field ee The digital output line can be set to any one of the following Tu Vu gt air Vi One puise per data point output waveform j E ae One pulse per line output waveform S i S One puise per field output waveform Figure 17 Digital trigger output synchronized with wave generator output top down wave generator output trigger output caused by bit 3 4 and 5 PARAMETERS MAX TYPE MIN VH voltage of logic high 5 0 V VL voltage of logic low OV TH Time of pulse high 150 us 10 us TL Time of pulse low www pi ws E 517 PZ214E Release 1 0 0 Page 99 Wave Generator Piezo Nano Positioning PI 8 2 4 Wave Generator Started by Trigger Input Using the digital input lines of the E 517 it is possible to apply start stop signals for the wave generator output See the pinout description of the Digital In Out socket p 267 for the availability of the lines and Using Trigger Input and Output for an overview There is a one to one assignment of the digital input lines to the wave generators i e all trigger actions for one wave generator are to be done via the digital input line dedicated to that wave generator The input trigger configurat
229. point Segment length Wave length Www pi ws E 517 PZ214E Release 1 0 0 Page 92 Wave Generator Piezo Nano Positioning PI WAV command Comments Waveform Segment WAV 2 amp SIN_P 2000 25 0 1800 100 900 lt WaveTablelD gt 2 lt AppendWave gt amp lt WaveType gt SIN_P lt SegLength gt 2000 lt Amp gt 25 lt Offset gt 0 lt WaveLength gt 1800 lt StartPoint gt 110 lt CurveCenterPoint gt 900 The defined segment will be appended to the existing wave table contents symmetric curve v D B E lt x WAV 3 X SIN_P 4000 20 0 4000 0 3100 lt WaveTablelD gt 2 lt AppendWave gt X lt WaveType gt SIN_P lt SegLength gt 4000 lt Amp gt 20 lt Offset gt 0 lt WaveLength gt 4000 lt StartPoint gt 0 lt CurveCenterPoint gt 3100 The previous contents of the wave table are overwritten by the new segment asymmetric curve Amplitude Segment length Wave length WAV 1 X SIN_P 1000 30 45 1000 0 500 lt WaveTablelD gt 2 lt AppendWave gt X lt WaveType gt SIN_P lt SegLength gt 1000 lt Amp gt 30 lt Offset gt 45 lt WaveLength gt 1000 lt StartPoint gt 0 lt CurveCenterPoint gt 500 The previous contents of the wave table are overwritten by the new segment negative amplitud e curve symmetric curve Amplitude center point Segment length Wave length
230. put lines m For Item Type Concerned Hardware Component it gives the number of internal boards of which an E 517 consists 1 main board 2 display board order gain Parameter ID Command Item Type Max Data Parameter Notes hexadecimal Level Con No Type Description for write cerned of access Items 0x02000000 1 Input Signal 3 INT Sensor enable 0 Disabled Channel 1 Enabled Enables dis ables also the correspon ding axis and piezo channel 0x02000200 0 Input Signal 3 FLOAT Sensor Channel correction 0 order offset 0x02000300 0 Input Signal 3 FLOAT Sensor Channel correction 1st Www pi ws E 517 PZ214E Release 1 0 0 Page 253 Controller Parameters Piezo Nano Positioning PI Parameter ID Command Item Type Max Data Parameter Notes hexadecimal Level Con No Type Description for write cerned of access Items 0x04000500 2 Input Signal 6 FLOAT ADC gain Parameters Channel apply to the 0x04000600 2 Input Signal 6 FLOAT ADC offset monitor Channel signals for 0x04000700 2 Input Signal 6 FLOAT HW gain sensor Channel position and 0x04000800 2 Input Signal 6 FLOAT HW offset piezo voltage Channel 0X04000E00 1 Input Signal 6 CHAR LCD unit Channel 0X04000E01 1 Input Signal 6 INT LCD format Channel 0x05000000 0 Input Signal 3 INT Digital fi
231. r MAC lt keyword gt lt parameter gt in particular MAC BEG lt macroname gt MAC DEF lt macroname gt MAC DEF MAC DEL lt macroname gt MAC END MAC FREE MAC NSTART lt macroname gt lt uint gt MAC START lt macroname gt lt keyword gt determines which macro function is called The following keywords and parameters are used MAC BEG lt macroname gt Start recording a macro to be named macroname on the controller may not be used in a macro the commands that follow become the macro so if successful the error code cannot be queried End the recording with MAC END MAC END Stop macro recording cannot become part of a macro MAC FREE Ask for the free memory space for macro recording Response lt uint gt is the free memory in number of characters MAC DEF lt macroname gt Set specified macro as start up macro This macro will be automatically executed with the next power on or reboot of the controller If lt macroname gt is omitted the current start up macro selection is canceled E 517 PZ214E Release 1 0 0 Page 167 GCS Commands Www pi ws Response Troubleshooting Notes Piezo Nano Positioning PI MAC DEF Ask for the start up macro Response lt macroname gt If no start up macro is defined the response is an empty string with the terminating character MAC DEL lt macroname gt Deletes specified macro With lt macroname gt all macros are deleted MAC NS
232. r Output t Time t vw Start poirt Start peit start pelt Wave generator started without start at the endpoint of the last cycle WGO bit 8 not set offset remains unchanged Figure 15 Constant offset Wave Generator Output Time Wave Wave Wave Start port Start point Start point Wave generator started with start at the endpoint of the last cycle WGO bit 8 offset incremented at the end of each output cycle Figure 16 Offset incremented during output For triggering purposes the wave generator output can be coupled with the digital output lines DIO_O1 to DIO_O3 of the E 517 see Digital In Out Www pi ws E 517 PZ214E Release 1 0 0 Page 87 Wave Generator Piezo Nano Positioning PI www pi ws Socket p 267 Enable the Generator Trigger mode for selected output lines with the CTO command p 142 note that the CTO settings are saved with WPA Furthermore TWS p 201 and or WGO p 221 must be used to configure the trigger output When using the TWS command First use TWC p 200 to set the signal state of the output lines to low for all waveform points low is also the power on default Then define the trigger line actions with TWS by setting the desired signal states high or low of selected output lines for selected waveform points The number of arguments following the command mnemonic is limited to 32 i e you can define at most 10 trigger points per TWS command line When the wa
233. r ID 0x18000100 The width of each trigger pulse is 30 us by default can be changed using the Pulse Width parameter ID OxOE000900 To enable the Generator Trigger mode the following CTO parameter must be set for the digital output line which is to be used for trigger output lt TrigOutID gt m TriggerMode lt CTOPam gt 3 General notation of the CTO command for this mode Command Trigger mode mnemonic selection CTO lt TrigOutID gt 3 4 See Trigger Output Synchronized with Wave Generator p 97 fora detailed example Www pi ws E 517 PZ214E Release 1 0 0 Page 82 External Triggering Signaling Piezo Nano Positioning PI 7 2 5 Example Polarity Setting Www pi ws It is possible to select the signal polarity active high 1 default active low 0 for the digital output line which is to be used for trigger output The following parameter must be set for the digital output line lt TrigOutID gt m Polarity lt CTOPam gt 7 General notation of the CTO command for polarity selection Command Polarity selection mnemonic CTO lt TrigOutID gt 7 pol code Example The signal polarity for the digital output line 1 is to be set to active low Send CTO 170 E 517 PZ214E Release 1 0 0 Page 83 Wave Generator Piezo Nano Positioning PI Ss Wave Generator Each axis can be controlled by a wave generator which outputs user specified patterns so called waveforms This fea
234. r E 517 system can be identified in the answer of the IDN command p 134 For the revisions of the individual firmware unit ask with the VER command In the E 517 there are the following individual firmware units which can be updated separately Firmware Unit Filename DSP E 517_DSP_Firmware_HW_xxxxx_FW_xxxxx hex FPGA E 517_FPGA_Firmware_HW_xxxxx_FW_xxxxx hex MCU MCU_Firmware_HW_xxxxx_FW_xxxxx hex All firmware updates can be made by running the Firmware Update Wizard on the host computer using the same communication interfaces as for normal operation The Firmware Update Wizard is available on the E 517 CD and can be installed as follows 1 Insert the E 517 CD in your host PC 2 Ifthe Setup Wizard does not open automatically start it from the root directory of the CD with the icon 3 Follow the on screen instructions select custom installation and then select the Firmware Update Wizard welcome n U Piezo Nano Positioning Welcome to the PI Firmware Update Wizard Use this soltwaie to update the fiimware of supported PI devices The Fimwme Update Wizard wil guide you through the Firmware update process Please follow the i that follow instructions in the dialogs Figure 3 The Firmware Update Wizard Start Screen Www pi ws E 517 PZ214E Release 1 0 0 Page 46 Operation Piezo Nano Positioning PI In the Select PI controller window select Auto detection and press the Connect button The
235. rator Piezo Nano Positioning PI 8 2 Wave Generator Examples The following examples can be reproduced using the command entry facilities of PIMikroMove or PI Terminal Note that it might be necessary to adapt them to your hardware configuration 8 2 1 Defining Waveforms Examples for how to define waveform segments for the wave tables based on predefined curve shapes each WAV command defines a waveform segment which either replaces or is appended to the waveform in the specified wave table Inverted Cosine Curves WAV command Comments Waveform Segment WAV 2 X SIN_P 2000 20 10 2000 0 1000 lt WaveTablelD gt 2 lt AppendWave gt X lt WaveType gt SIN_P lt SegLength gt 2000 lt Amp gt 20 lt Offset gt 10 lt WaveLength gt 2000 lt StartPoint gt 0 lt CurveCenterPoint gt 1000 The previous contents of the wave table are overwritten by the new segment waveform offset 10 Do not confuse with the wave generator output offset set with WOS symmetric curve D z lt WAV 2 X SIN_P 2000 30 0 2000 499 1000 lt WaveTablelD gt 2 lt AppendWave gt X lt WaveType gt SIN_P lt SegLength gt 2000 lt Amp gt 30 lt Offset gt 0 lt WaveLength gt 2000 lt StartPoint gt 499 lt CurveCenterPoint gt 1000 The previous contents of the wave table are overwritten by the new segment symmetric curve center point Start
236. re present as E 516 parameters and the IDs of the available parameters differ from the E 517 parameter IDs See the E 516 documentation for available parameters 11 2 Parameter Overview www pi ws See Parameter Handling p 250 for the meaning of the individual columns The content of the Max No of Items column is to be interpreted as follows E 517 PZ214E Release 1 0 0 Page 252 Controller Parameters m For Item Type Concerned Input Signal Channel and Output Signal Channel it gives the number of channels Piezo Nano Positioning PI In principle input signal channels are the sensor channels and output signal channels the piezo channels of the system each with IDs from 1 to 3 The only exception are the parameters regarding the monitor signals for sensor position and piezo voltage 0x04000xxx these signals are all input for the E 517 Hence the parameters refer to input signal channels which comprise sensor channels IDs 1 to 3 as well as piezo channels IDs 4 to 6 m For Item Type Concerned Logical Axis it gives the number of axes m For Item Type Concerned Wave Generator it gives the number of wave generators m For Item Type Concerned Wave Table it gives the number of wave tables m For Item Type Concerned Data Recorder Table it gives the number of data recorder tables m For Item Type Concerned Digital Output Line it gives the number of digital out
237. re gression time Figure 21 Position over time for axis A and B The regression is much longer than the small X steps so extra time is required short arrow under MOV command in the upper graph In the X direction we want to return to the starting point left edge whereas in Y direction we continue making equal steps here 2 um away from the bottom edge and so use a relative motion command MVR B 2 This XY scan can be carried out with a command sequence like the one listed below Write this command sequence to a macro named unidir MAC BEG unidir WGO 1 0 WAV 1 X POL 3846 3846 0 2 0 WAV 1 X POL 0 3846 0 0 0 WAV 1 X CFG 7692 1 0 5 2 10 WGO 1 17 DEL 10000 MVR B 2 DEL 100 MAC END www pi ws E 517 PZ214E Release 1 0 0 Page 105 Wave Generator Piezo Nano Positioning PI NOTE The Field Limit parameter set with the CFG wave type in the WAV command defines the scan area border This value has large scale consequences because the controller automatically returns to the bottom line when reaching the upper border In the example above the field limit is 10 WAV 1 X CFG 7692 1052 10 The macro listed above starts the wave generator output with the option to output a trigger signal after each axis A step WGO bit 4 is set A delay of 10 seconds delay time is required before a relative step in Y direction is done The wave generator automatically returns to its point of origin Another delay of 100 milliseconds
238. rrrrrrrrrrrrrrrrrrrerrrerreene 58 52 Default and Current Settings a ssesessecpshenctemenetves morettarethctaremsceticcmeass 59 53 TOP AP Connection nres a n a a Taree eines 61 53 1 Network with DHCP Server 0 0 0 0 cececeececeeceeeeeeeeecneeeeeeeeeesetenneeaaeees 62 532 PC with Ethernet Card cccccccccceceeceeceeceeeeeeeeeeseceeeaeeeeeeeseesnnieaeeees 63 54 RS 232 Serial Connection s esseersrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrn 67 DD USB Connectionin eoa i 68 5 6 GPIB IEEE 488 Parallel Connection eeeseeeceeseeeeeeeeereeeerreeeeeeee 69 Data Recording 71 6 1 How to Use the Data Recorder ss sssssessesseererrrrrrrrrrrrerrrrrrrerrrerrreen 71 6 2 Application Example Frequency Response Measurements 72 6 3 Data Recorder Related Commands and Parameters eee 75 External Triggering Signaling 77 7 4 Using Trigger Input and Output sssssssessessreererrrrrrrrrrrrrrrrerrrerrene 77 72 Configuring Trigger Output sseesseeesrersrrrrrrrrrrrrrrrrrrrrrrrrrrrrrerrren 77 72 1 Example Position Distance Trigger Mode cccceeeceeeeeeetteeeeees 79 722 Example On Target Trigger MOde ccceceeeeeeeeeeeeeenteeeeeeenaees 80 723 Example MinMax Threshold Trigger Mode eeen 81 724 Example Generator Trigger MOde 0 cccccceeesseeeeeeeetteeeeetieeeeees 82 725 Example Polarity Setting cc ececccceeeeeeeeeeeeeeeseeeeeeeseeeeneees
239. running Recording always takes place for all data recorder tables and ends when the data recorder tables are completely filled See Data Recording p 71 for more information It is possible to trigger external devices during the axis motion and to send start stop signals to the wave generators with the digital I O lines of the E 517 See External Triggering Signaling p 77 for more information and examples and Digital In Out Socket p 267 for the lines and pinout 3 3 2 Command Examples for ONLINE Mode WWww pi ws The following examples can be used in a terminal e g in the Command Entry window of PIMikroMove or in the PI Terminal Example 1 This example moves axis A of the mechanics in open loop operation The output voltage is varied to see the influence of the voltage limits for the corresponding piezo channel hardware limits are given by parameters 0x0B000007 and 0x0B000008 and can not be changed soft limits can be set with VMA and VMI In this example the output voltage will be limited to the range of 10 to 90 volts Hardware A piezo stage and an E 500 chassis with one E 505 amplifier module and E 517 single channel system Command String Response Action Performed to Send ONT oh Switch piezo channel 1 identifiers 1 to ONLINE mode so that axis motion can be caused by move commands received via interface or from a running macro wave generator output and trackball settings SVO A
240. rvo cycles WGO 1 0 Stop output of Wave Generator 1 NOTE PIMikroMove provides the PI Wave Generator Tool with which you can create waveforms and start the wave generator output without the need to learn the corresponding commands See the PIMikroMove manual for more information www pi ws E 517 PZ214E Release 1 0 0 Page 85 Wave Generator Piezo Nano Positioning PI 8 1 3 Additional Steps and Settings WAY WGC Set Number of Wave Generator Cycles WTR or WAY CFG wave type WGO Create Waves Set Wave Generator Table Rate Set Generator Start Stop Mode WCL Delete Waves Switch Output On Off www pi ws Syn WOS or WAY CFG wave type Set Generator output offset Figure 14 Block diagram of one wave generator You can ask with WAV p 219 for the current waveform lengths and delete the content of selected wave tables with the WCL command p 219 The CFG wave type is a special type with which you can configure additional parameters for a waveform The settings should be made subsequent to the real waveform definition and will be applied to the waveform when the wave generator output starts Some CFG settings can be saved to non volatile memory as power up defaults if not they are valid until a new WAV command is sent or the wave table content is cleared or the E 517 is powered down or rebooted See the WAV command description p 209 for more information After you send the waveform definit
241. s Introduction 4 Ut Prescribed User Aae ae a isesetecaetaedidadeideangeccnsttasgeg ae g ide 5 12 Safety Precautions isesectivvewtsecekedstetiedennrcaeanea aati 6 13 Model Survey scccecieccacivelsselesniete eas danee capes Ekan ii apai Seea 8 1E ER OTETO O aE EA A A A A T 8 15 Motion System Requirements c ccccceeceesseececessneeeeeeeeeeeeeneeees 9 16 Software Description s eseseeeseerrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrerrrrrrtten 10 First Steps 12 2 1 Installing the Software on the Host PC 12 22 Creating Backup File for Controller Parameters 12 PAE QUICK Start E A A A A 14 Operation 20 31 Front Panel Elements iieri iriiria inia 20 3 1 1 Front Panel Overview 2 c ccccccceceeeeeececeeeeeeeeteesecenaeceeeeeensensnnaees 20 3 12 Display OOO S aaa ae a O Aea Ka a aa E EEEa EEEa 21 3 13 Trackball FUNCtIONS ccccccceceeeeeeeeeceeeceeeeetececeeeeaeceeeeeeesensaaeeeeees 22 3 2 Modes of Operation cccccccceeeeeeeecceeeceeeeeeeeeeeaeeeaeeeeeesseenseenseeees 23 324 Control Modes 10322 scent eerie ae eee et dees 23 322 Servo Mode ON OF Fj a a a r e aE e aa E Aa a a 24 3 3 How to Command Axis Motion ss sssesseeeseeeeseesrrrrrrerrrrrrrrrrrrrrrerreene 26 3 3 1 Applicable Control Sources 0 ccceceeeeeeeceeeeeeeeeeeeceeeeeeeeeeeentensenaees 26 332 Command Examples for ONLINE Mode ccceeeeeeeeeeeereeeees 27 34 Power On Reboot SEqUuence
242. s not used as control value This means that the wave generator output will not cause axis motion until switching back to ONLINE mode Motion commands like MOV p 170 or SVA p 191 from command line or from a running macro are not allowed when the wave generator output E 517 PZ214E Release 1 0 0 Page 89 Wave Generator Piezo Nano Positioning PI is active See Control Value Generation p 53 and Control Modes p 23 for details Velocity control see VCO command p 204 is not effective when the wave generator is running As long as you use the wave generator the drift compensation is deactivated automatically see Drift Compensation p 56 for more information A wave generator outputs absolute values In closed loop operation servo ON the output is interpreted as target positions In open loop operation servo OFF the output corresponds to piezo voltage values amplifier output in V Servo control can not be switched on or off while the wave generator is running for the axis When a wave generator finishes by running through a specified number of cycles completely the final position will be the last point of the waveform If the option start at the endpoint of the last cycle was selected the final position is the sum of the endpoint of the last output cycle and any offset defined with WAV p 209 for the waveform When the wave generator is stopped within an output cycle by command the axis will rem
243. s offset for the calculation of the new axis position Furthermore DFH adapts the limits of the travel range to the new home position parameters 0x07000000 and 0x07000001 The parameters are set in volatile memory RAM only To save the currently valid values to non volatile memory where they become the power on defaults you must use WPA p 229 Changes not saved with WPA will be lost when the controller is powered down The position shown in the E 517 display is not affected by DFH because it is that of the sensor channel can also be queried with the TSP command p 199 DFH affects only the axis position which can be queried with the POS command p 178 The home position is reset to default value from non volatile memory by the calibration procedures described in Calibration Settings p 38 Send SVO A 1 Send MOV A 9 87 Send POS A Receive A 0009 8712 Send TSP 1 Receive 1 0009 8721 DFH A A 0000 0000 Note Axis A is moved to an absolute position of 9 87 um Then the axis position and the position of the sensor channel are queried Both are identical because the current home position definition is 0 DFH query Send SPA A 0x07010200 A 0x07000000 A 0x07000001 Receive A 0X07010200 0 00000000e 0 A 0X07000000 0 00000000e 0 A 0X07000001 1 00000000e 2 E 517 PZ214E Release 1 0 0 Page 147 GCS Commands Note Send Receive Send Receive Note Send Send Receive Se
244. s power cycled or rebooted The connection must then be closed and reopened Another program is using the interface Close the other program Specific software has problems See if the system works with some other software e g a terminal or development environment You can for example test the communication by simply starting a terminal program e g PI Terminal and entering commands like IDN or HLP Note that multi character commands are transferred as terminated by a LF line feed character and are executed only after the LF is received Stage does not move Cable not connected properly Check the connecting cable s Stage or stage cable is defective Exchange stage with a working stage to test a new combination of controller and stage E 517 PZ214E Release 1 0 0 Page 259 Troubleshooting Piezo Nano Positioning PI Www pi ws With E 7xx controllers this is only possible with stages which are equipped with ID chips With E 861 controllers the encoder hardware of closed loop systems must be identical or the parameters of the GEMAC interpolation circuit must be adapted see GEMAC Parameter Adjustment for more information Wrong command or wrong syntax Check the error code with the ERR command p 153 Error Codes p 234 gives the complete error reference Wrong axis commanded gt Check if the correct axis identifier is used and if the commanded axis is that of the desired stage a
245. s taken from wave table 1 With E 517 i1 models only wave generator 1 can be used If axes channels are deactivated see Configure Axes and Channels p 33 for details only the wave generators of the active axes can be used lt StartMode gt is the start mode for the specified wave generator In the WGO command you supply the start mode in hex or decimal format When no bits are set lt StartMode gt 0 there is no wave generator output for the associated axis Note that the following bits cannot start the wave generator output by themselves bit 3 0x8 or 8 bit 4 0x10 or 16 bit 5 0x20 or 32 bit 8 0x100 or 256 bit 12 0x1000 or 4096 bit 13 0x2000 or 8192 and bit 14 0x4000 or 16384 These bits simply specify certain start Www pi ws E 517 PZ214E Release 1 0 0 Page 222 GCS Commands Www pi ws Piezo Nano Positioning PI options and must always be combined with one of the start modes specified by bit 0 0x1 or 1 bit 1 0x2 or 2 and bit 2 0x4 or 4 Note that if you should combine bits 0 1 and 2 the wave generator starts with the mode given by the least significant bit Do not combine bit 12 and 13 with bit 1 or 2 but only with bit O to start the wave generator See the examples below The start mode values in detail 0 wave generator output is stopped You can also use 24 p 133 or STP p 190 to stop the wave generator output but WGO p 226 will then still report the last commande
246. s used to operate or at least configure the E 517 Therefore an ample array of software tools for installation on the host computer comes with the E 517 For a complete list of all software on the E 517 CD see Software Description p 10 E 516 COMPATIBILITY NOTE Users who have written software for the E 516 interface display module which is the predecessor of the E 517 can switch to the GCS syntax used with the E 516 see Select Command Set Version p 44 PI software and documentation for the E 516 GCS syntax version is available for download at www pi ws or can be obtained from your Physik Instrumente Sales Engineer 4 2 Accessible Items and Their Identifiers The identifiers listed below are used to address the appropriate items with the commands of the PI General Command Set GCS 2 0 which is supported by the firmware of the E 517 m Logical axes up to three axes the default identifiers are A B C A logical axis is an axis of a linear orthogonal coordinate system and represents a basic direction of motion in the E 517 firmware All motion of the mechanics is commanded for logical axes The axis identifiers can be changed using the SAI command p 181 which sets the Axis Name parameter ID 0x07000600 An axis identifier can consist of up to 8 characters valid characters are 123456789ABCDEFGHIJKLMNOPQRSTUVWXYZ_ ask with the TVI command p 200 You can ask with SAI p 182 for the current valid axis identifiers
247. sary to close the current connection and re open it with the new settings E 517 PZ214E Release 1 0 0 Page 179 GCS Commands Piezo Nano Positioning PI Available item lt ItemID gt can be an axis identifier a sensor IDs and channel a piezo channel a wave generator a parameter IDs digital output line or the whole system the item type depends on the parameter see Parameter Overview p 252 for the item type concerned See Accessible Items and Their Identifiers p 50 for the identifiers of the items Valid parameter IDs are given in Parameter Overview p 252 RTR Set Record Table Rate Description Sets the record table rate i e the number of servo loop cycles to be used in data recording operations Settings larger than 1 make it possible to cover longer time periods Format RTR lt RecordTableRate gt Arguments lt RecordTableRate gt is the table rate to be used for recording operations unit number of servo loop cycles must be an integer value larger than zero Response None Notes RTR affects the Data Recorder Table Rate parameter ID 0x16000000 The duration of the recording can be calculated as follows Rec Duration Servo Update Time RTR value Number of Points where Servo Update Time is given in seconds by parameter 0xOE000200 Number of Points is the length of the data recorder table Www pi ws E 517 PZ214E Release 1 0 0 Page 180 GCS Commands Www pi ws Piezo
248. scription p 10 and manuals as PDF files m E 517 Quick Guide in printed form PZ214Equ Note that the E 517 User Manual E 517_User_PZ214Exxx pdf containing the complete documentation is provided as PDF file on the E 517 CD Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately Save all packing materials in case the product need be shipped again 1 5 Motion System Requirements To start working with the E 517 interface display module your motion system must also include the following components m The piezo control electronics in which the E 517 is integrated e g E 500 E 501 system E 471 or E 481 m The mechanics piezo stage with which the piezo control electronics was Calibrated compare serial numbers m For remote operation via the computer interface A PC with Windows operating system 2000 XP Vista or Linux operating system kernel 2 6 GTK 2 0 glibc 2 4 Communications interface to the PC and the appropriate cable Possible interfaces on the PC are COM port USB port GPIB interface IEEE 488 or an Ethernet card The connection between E 517 and PC can furthermore be made via a free access point on a network to which the PC is connected To command the E 517 at least a terminal emulator must be installed on the PC For convenient operation without the need to learn any commands it is recommended to install PIMikroMove from the E 517
249. se 1 0 0 Page 21 Operation Piezo Nano Positioning PI m CHANNEL SETTING where you can command motion in ONLINE mode or the check current position and voltage in OFFLINE mode for individual channels See Trackball Functions p 22 for details You can configure the position and voltage display via parameters e g show hide channels set the number of digits See Activate Deactivate Axes and Channels p 33 for more information 3 1 3 Trackball Functions You can operate the trackball on the E 517 front panel by pressing it or rolling it left right or up down with your fingers It gives access to the following functionality m Display screen selection You can select the active display screen p 21 by rolling the trackball to the left or to the right After power on or reboot always the main screen is active all channels displayed m ONLINE OFFLINE setting When the main screen is active you can switch between ONLINE and OFFLINE mode for all channels by pressing the trackball see Modes of Operation p 23 for details m Skipping start up macro To skip the execution of the start up macro press the trackball once immediately after you have powered on or rebooted the piezo control electronics while Physik Instrumente is still shown on the display For details about start up macro definition see Start Up Macro p 115 m E 517 configuration On the DISPLAY SERVICE and COMMUNICATION screens you can
250. sition in physical units Format TMN lt AxisID gt Arguments lt AxisID gt is one axis of the controller Response lt AxisID gt lt float gt LF where lt float gt is the minimum commandable position in physical units Note The minimum commandable position is defined by the Range Limit min parameter ID 0x07000000 or by the low position soft limit NLM NLM whichever is higher When a new home position is defined with DFH p 146 the minimum commandable position is automatically adapted to the appropriate new value TMX Get Maximum Commandable Position Description Get the maximum commandable position in physical units Format TMX lt AxisID gt Www pi ws E 517 PZ214E Release 1 0 0 Page 197 GCS Commands Piezo Nano Positioning PI Arguments lt AxisID gt is one axis of the controller Response lt AxisID gt lt float gt LF where lt float gt is the maximum commandable position in physical units Description The maximum commandable position is defined by the Range Limit max parameter ID 0x070000071 or by the high position soft limit PLM PLM whichever is lower When a new home position is defined with DFH p 146 the maximum commandable position is automatically adapted to the appropriate new value TNR Get Number of Record Tables Description Get the number of data recorder tables currently available on the controller Format TNR Arguments none Respons
251. t JUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUL Internal clock signal servo cycles for synchronization JUV UU UU UU UU UL Su AND resut of internal clock and external tngger signal Wave Pause Wave Pause Output of generated waveform we assume it is a triangle waveform Figure 18 Wave generator started by external signal and synchronized by servo cycles PARAMETERS MAX MIN VH Voltage of logic high 5 5 V 2 4V VL Voltage of logic low 0 5V 0 5 V TH Time of pulse high 40 us TL Time of pulse low g www pi ws E 517 PZ214E Release 1 0 0 Page 102 Piezo Nano Positioning PI Wave Generator WGO bit 2 details Th gt Eee EP EL er ere kel a T External digkal input triggers and synchronizes the wave generator output Output of generated waveform here we assume is a triangle waveform Figure 19 Wave generator output triggered and synchronized by external signal PARAMETERS MAX MIN VH Voltage of logic high 5 5 V 2 4 V VL Voltage of logic low 0 5 V 0 5 V TH Time of pulse high 10 us TL Time of pulse low 10 us The frequency of the digital input signal must not exceed 25 kHz www pi ws E 517 PZ214E Release 1 0 0 Page 103 Wave Generator Piezo Nano Positioning PI 8 2 5 Scanning Examples with Wave Generator and Macros Using the macro feature you can save the command sequences required for scan motions permanently t
252. t see below is used to concatenate the new segment to the existing wave table contents A segment can be based on predefined curve shapes see the lt WaveType gt argument below The CFG wave type is a special type with which you can configure additional parameters for a waveform The settings should be made subsequent to the real waveform definition and will be applied to the waveform when the wave generator output starts Some CFG settings can be saved to non volatile memory as power up defaults if not they are valid until a new WAV command is sent or the wave table content is cleared or the E 517 is powered down or rebooted E 517 PZ214E Release 1 0 0 Page 209 GCS Commands Piezo Nano Positioning PI Waveforms can not be changed while they are being output by a wave generator If you want to modify a waveform with WAV first stop any wave generator output from the associated wave table The waveform values are absolute values As long as the wave generator output is synchronized by servo cycles and not paused by an external signal see WGO p 221 for details the duration of one output cycle for the waveform can be calculated as follows Output Duration Servo Update Time WTR value Number of Points where Servo Update Time in seconds is given by parameter 0x0E000200 WTR wave table rate value gives the number of servo cycles the output of a waveform point takes default is 1 Number of Points is t
253. t InterfacePam gt is the interface parameter to be queried can be RSBAUD GPADR IPADR IPSTART IPMASK and MACADR the availability of the parameters depends on the interfaces present on the controller Response lt InterfacePam gt lt PamValue gt LF where lt PamValue gt gives the value of the interface parameter from volatile memory For lt InterfacePam gt RSBAUD lt PamValue gt gives the current baud rate of the RS 232 communication is also accessible as parameter ID 0x11000400 Uart Baudrate For gt InterfacePam gt GPADR lt PamValue gt gives the current device address for GPIB IEEE 488 communication is also accessible as parameter ID 0x11000900 GPIB Address For lt InterfacePam gt IPADR the first four portions of lt PamValue gt give the IP address used for TCP IP communication the last portion gives the port is also accessible as parameter ID 0x11000600 IP Address For lt InterfacePam gt IPSTART lt PamValue gt gives the current startup behavior setting for configuration of the IP address for TCP IP communication 0 use IP address defined with IPADR 1 use DHCP to obtain IP address if this fails use IPADR is also accessible as parameter ID Www pi ws E 517 PZ214E Release 1 0 0 Page 161 GCS Commands Piezo Nano Positioning PI 0x11000800 IP Configuration For lt InterfacePam gt IPMASK lt PamValue gt gives the current IP mask setting to be used for TCP IP co
254. t StartPoint gt is the start point in the wave table starts with index 1 lt NumberOfPoints gt is the number of points to be read per table lt WaveTablelD gt is one wave table of the controller The wave table contents waveform in GCS array format see the separate manual for the GCS array SM 146E and the example below gwd 1 10 TYPE 1 SEPARATOR 9 DIM 3 SAMPLE _TIME 40E 6 NDATA 10 NAMEO Wave tablel NAME1 Wave table2 NAME2 Wave table3 END_HEADER 0000 0005 0000 0001 0000 0019 0000 0000 0000 0000 0000 0000 0000 0005 0000 0001 0000 0019 0000 0019 0000 0005 0000 0079 0000 0044 0000 0011 0000 0177 0000 0079 0000 0019 0000 0315 0000 0123 0000 0030 0000 0493 0000 0177 0000 0044 0000 0710 0000 0241 0000 0060 0000 0966 0000 0315 0000 0079 0000 1262 HDR Get All Data Recorder Options Description Format Arguments Response Www pi ws List a help string which contains all information available about data recording record options and trigger options information about additional parameters and commands concerned with data recording HDR none RecordOptions lt RecordOption gt lt DescriptionString gt of lt Channel gt TriggerOptions lt TriggerOption gt lt DescriptionString gt Parameters to be set with SPA lt ParameterID gt lt DescriptionString gt E 517 PZ214E Release 1 0 0 Page 155 GC
255. t be configured for this action No error occurred during function call Error during com operation could not be specified Error while sending data Page 241 GCS Commands Piezo Nano Positioning 3 REC_ERROR 4 NOT_CONNECTED_ERROR 5 COM_BUFFER_OVERFLOW 6 CONNECTION_FAILED 7 COM_TIMEOUT 8 COM_MULTILINE_RESPONSE 9 COM_INVALID_ID 10 COM_NOTIFY_EVENT_ERROR 11 COM_NOT_IMPLEMENTED 12 COM_ECHO_ERROR 13 COM_GPIB_EDVR 14 COM_GPIB_ECIC 15 COM_GPIB_ENOL 16 COM_GPIB_EADR 17 COM_GPIB_EARG 18 COM_GPIB_ESAC 19 COM_GPIB_EABO 20 COM_GPIB_ENEB 21 COM_GPIB_EDMA 22 COM_GPIB_EOIP 23 COM_GPIB_ECAP Www pi ws E 517 PZ214E Release 1 0 0 PI Error while receiving data Not connected no port with given ID open Buffer overflow Error while opening port Timeout error There are more lines waiting in buffer There is no interface or DLL handle with the given ID Event message for notification could not be opened Function not supported by this interface type Error while sending echoed data IEEE488 System error IEEE488 Function requires GPIB board to be CIC IEEE488 Write function detected no listeners IEEE488 Interface board not addressed correctly IEEE488 Invalid argument to function call IEEE488 Function requires GPIB board to be SAC IEEE488 I O operation aborted IEEE488 Interface board not found IEEE488 Error performing DMA IEEE488 I O operation
256. table to the VOL response Note that all piezo channel related commands and parameters use the identifiers 1 to 3 except of the display configuration parameters above which use identifiers 4 to 6 for the piezo channels WPA 100 Save the current E 517 configuration to make it the power on default E 517 PZ214E Release 1 0 0 Page 36 Operation Piezo Nano Positioning PI Example 2 Hardware is removed The second amplifier channel is removed from a modular E 500 system with two single channel amplifier modules one E 509 two channel sensor servo module and one E 517 i3 With the new hardware configuration one axis one piezo channel and two sensor channels are available but only the first sensor channel is still in use After the hardware was removed the E 517 must be configured as follows Command String to Send Response Action Performed CCL 1 advanced Switch to command level 1 to have write access to the configuration parameters SPA 2 0x02000000 0 Disable sensor channel 2 and hence also the second axis B and piezo channel 2 sensor channel 3 is already disabled since no hardware was present in the original configuration SAI A Get the axis identifiers of all axes which are accessible by commands If disabling was successful the response shows only axis A TSC 1 Get the number of sensor channels If disabling was successful the response is 1 TPC 1 Get the number
257. tal input and output lines can be used to trigger external devices and to send start and synch signals to the wave generator s See Digital In Out Socket p 267 for the availability of the lines and for pinout RS 232 Serial connection to host PC See RS 232 Socket p 267 for pinout Trackball for display selection device configuration and ONLINE motion See Trackball Functions p 22 for details Q Universal Serial Bus USB B socket for connection to host PC See USB Connection p 68 for more information GPIB IEEE488 General Purpose Interface Bus GPIB for connection to host PC See GPIB Connection p 69 for more information a5 Network connection over TCP IP See TCP IP Connection for more information www pi ws E 517 PZ214E Release 1 0 0 Page 20 Operation Piezo Nano Positioning PI 3 1 2 Display Screens www pi ws The individual display screens can be accessed by the trackball p 22 on the E 517 front panel You can check the different screens by powering up the piezo control electronics with no actuator stage and no host PC connected The following screens are available via the trackball Main screen the first line shows the current control mode o and servo mode s for all channels 0 OFFLINE open loop operation ONLINE closed loop operation see Modes of Operation p 23 for details and the active syntax version of the PI
258. ted record option lt RecOption gt is the kind of data to be recorded record option See below for a list of the available record options and the corresponding data sources E 517 PZ214E Release 1 0 0 Page 150 GCS Commands Response Notes Record options for the appropriate data sources Example Www pi ws Piezo Nano Positioning PI none The current data recorder configuration is saved with the WPA command in addition to the current parameter values and other settings See the WPA description p 229 for details The E 517 provides 3 data recorder tables can be read with TNR p 198 with 8192 points per table Maximum record points of table i ID 0x16000201 With HDR p 155 you will obtain a list of available record options and information about additional parameters concerned with data recording For detailed information see Data Recording p 71 lt Source gt lt RecOption gt Axis 1 Target Position of axis i e target value in closed loop operation corresponds to the MOV response 2 Current Position of axis corresponds to the POS response 3 Position Error of axis 15 Control Output of axis before the axis to piezo matrix transformation Output 7 Control Voltage of piezo channel Signal after the axis to piezo matrix Channel transformation See Control Value Generation p 53 for more information Send DRC 3A2 to record the current position o
259. ter MAC p 167 After the axes are stopped if servo is on their target positions are set to their current positions or if servo is off their open loop control values are set to their last valid control values HLT p 156 in contrast to STP stops motion smoothly SVA Set Open Loop Axis Value Description Set absolute open loop control value to move the axis Servo must be switched off open loop operation when using this command Format SVA lt AxisID gt lt Amplitude gt Arguments lt AxisID gt is one axis of the controller lt Amplitude gt is the new absolute open loop control value See below for details Response none E 517 PZ214E Release 1 0 0 Page 191 GCS Commands Troubleshooting Notes Example 1 Example 2 Example 3 Www pi ws Piezo Nano Positioning PI The control value specified by the given amplitude is out of limits The limitation results from the voltage limit parameters IDs 0x0B000007 0x0B000008 0x0C000000 and 0x0C000001 of the piezo channels which would be involved in the axis motion Illegal axis identifier Servo is On for one of the specified axes Motion commands like SVA are not allowed when the E 517 is in OFFLINE mode or when the wave generator output is active When a macro is running on the E 517 SVA will be executed not until the macro is finished or stopped See Control Value Generation p 53 and Control Modes p 23 for details The ampl
260. th the DIO command p 149 15 2 2 RS 232 Socket Connector type Sub D 9 pin m RTS Hardware handshake output CTS Hardware handshake input fe eo SC SCS e EE www pi ws E 517 PZ214E Release 1 0 0 Page 267 Technical Data 15 2 3 Main Connector Piezo Nano Positioning Connector type 32 pin connector DIN 41612 PI 1 AGND AGND 2 IN ch1 OUT ch1 3 IN ch2 OUT ch2 4 IN ch3 OUT ch3 5 AGND analog AGND analog 6 IN Sensor ch1 OUT PZT ch1 7 IN Sensor ch2 OUT PZT ch2 8 IN Sensor ch3 OUT PZT ch3 9 AGND analog AGND analog 10 nc nc 11 nc nc 12 nc nc 13 VC EC ch1 servo mode Overflow ch1 14 VC EC ch2 servo mode Overflow ch2 15 VC EC ch3 servo mode Overflow ch3 16 On Target ch1 nc 17 On Target ch2 nc 18 On Target ch3 nc 19 nc nc 20 nc nc 21 nc nc 22 nc nc 23 Sync_100k Sync_200k 24 nc nc 25 reserved nc 26 internal use 27 V nc 27 internal use 130V internal use 33 V 28 15V 15 V 29 15 V 15V 30 5 V VCC 5V VCC 31 GND VCC GND VCC 32 AGND analog AGND analog nc no connection AGND Analog Ground isolated from the GND VCC pins 31ac on E 517 i1 lines for channels 2 and 3 should not be used NOTE Www pi ws This connector is the interface to the analog piezo control electronics Normally it
261. tion gt TAB lt PossibleValue gt lt ValueDescription gt where lt CmdLevel gt is the command level which allows write access to the parameter value lt Maxltem gt is the maximum number of items of the same type which are affected by the parameter the meaning of item depends on the parameter can be axis sensor channel piezo channel wave generator wave table data recorder table digital I O line hardware component or the whole system lt DataType gt is the data type of the parameter value can be INT FLOAT or CHAR lt FunctionGroupDescription gt is the name of the function group to which the parameter belongs parameters are grouped according to their purpose to clarify their interrelation lt ParameterDescription gt is the parameter name lt PossibleValue gt is one value from the allowed data range lt ValueDescription gt is the meaning of the corresponding value Www pi ws E 517 PZ214E Release 1 0 0 Page 158 GCS Commands Www pi ws Piezo Nano Positioning PI IFC Set Interface Parameters Temporarily Description Format Arguments Response Notes Interface configuration After IFC is sent the new settings become active and the host PC interface configuration may need to be changed to maintain communication close the current connection and re open it with the new settings see Communication p 58 for an example Interface settings made with IFC are lost when t
262. tion is possible Use the Search for controllers button select your controller in the resulting list and press Connect If the controller is already connected to your or another host PC via TCP IP a second TCP IP session cannot be established The EEE 488 tab card is only present in the host software if a Www pi ws E 517 PZ214E Release 1 0 0 Page 15 First Steps Www pi ws Piezo Nano Positioning PI GPIB driver from National Instruments NI or an Nl compatible driver is installed on your PC Give the E 517 interface display module control over the output voltage channels of the piezo control electronics by switching them to ONLINE mode This can be done in the Start up controller window which should open automatically with the Start up E 517 step see figure below A channel is in ONLINE mode when its check box is checked otherwise it is in OFFLINE mode When the mode selection is finished press the OK button The PIMikroMove main window will open You can reopen the window for ONLINE OFFLINE selection at any time via the E 517 Start up axes menu sequence from the PIMikroMove main window Start up controller connected E 517 on TOP IP host 172 17 128 06 port 50000 E 2jxj A Online state of the piezo channeKs i a F Channel t 1 Connect controler M Channel 2 M Thanea on 7 D i us 2 Start up E 517 set next time on new connection OK Notes In ONLINE mode the SERVO swit
263. tioning PI The library used doesn t match the required version Please see the documentation to determine the required library version The interface is currently locked by another function Please try again later Page 249 Controller Parameters Piezo Nano Positioning PI 11 Controller Parameters 11 1 Parameter Handling Www pi ws To adapt the E 517 to your application you can modify parameter values The parameters available depend on the controller firmware With HPA p 157 you can obtain a list of all available parameters with information about each e g short descriptions The volatile and non volatile memory parameter values can be read with the SPA p 188 or SEP p 184 commands respectively Note that many parameters are protected by higher command levels as indicated in the Command Level column in the Parameter Overview table p 252 By going to command level 1 using the CCL command p 139 it is possible to change level 1 parameters Parameters with level 2 or higher are reserved for service personnel Using the general modification commands SPA RPA SEP and WPA all parameters for which the currently active command level has write permission can be changed in volatile memory SPA p 185 RPA p 179 or in non volatile memory SEP p 183 WPA p 229 It is recommended that any modifications be first made with SPA and when the controller runs well saved using WPA If you change
264. tocol TCP IP Properties window activate Use the following IP address Make a note of the current P address and Subnet mask settings if any in case they need to be restored later Then adapt the P address and Subnet mask settings to make them compatible with the settings of your E 517 Set the first three portions of P address identical to those of the IP address of the E 517 while the last portion must be different One possible P address setting would be for example 192 168 168 2 the default IP address of the E 517 is 192 168 168 10 Do not use 255 for the last portion Set Subnet mask to 255 255 255 0 if the IP mask of the E 517 is E 517 PZ214E Release 1 0 0 Page 64 Piezo Nano Positioning PI Communication 255 255 255 0 Confirm with OK An example is shown in the figure below 5 Connect the E 517 to the Ethernet card in the PC using the included special cross over cable point to point connection If a hub is used to allow for connection of several devices to the PC connect the E 517 to the hub using the straight through network cable 6 Power on the E 517 7 Use the Search for controllers functionality described in Network with DHCP Server p 62 to establish the connection between PC and the E 517 NOTE If the connection fails change the last portion of the P address setting on the PC and try again to connect via Search for controllers internet Protocol TCP IP Properties
265. tput for a duration of one servo cycle The duration of one wave generator output cycle will be Servo Update Time in s WTR value Number of Points Output Duration in s 0 000040 s 1 2000 0 08 s WIR 2 3 0 Set the wave table rate for the second wave generator to 3 tripling the duration of one wave generator output cycle each wave table point will now occupy 3 servo cycles Note that the E 517 does not support any interpolation to smooth the output Duration of one output cycle will now be 0 000040 s 3 2000 0 24 s www pi ws E 517 PZ214E Release 1 0 0 Page 96 Wave Generator Piezo Nano Positioning PI 8 2 3 Trigger Output Synchronized with Wave Generator www pi ws Using the digital output lines DIO_O1 to DIO_O3 of the E 517 it is possible to trigger external devices See Digital O Socket p 267 for the availability of the lines pinout and Configuring Trigger Output p 77 for trigger applications without wave generator usage There is a one to one assignment of the digital output lines to the wave generators i e all trigger output synchronized with a certain wave generator is to be done via the digital output line dedicated to that wave generator In the example below trigger pulses are to be generated synchronized with the output of the second wave generator i e the second digital output line DIO_O2 must be configured Command String to Send Action Performed
266. ts none Response lt SerialNumber gt is the serial number of the device the answer gives the value of the Device Serial Number parameter ID 0x0D000000 STE Start Step And Response Measurement Description Starts performing a step and recording the step response for the given axis The data recorder configuration i e the assignment of data sources and record options to the recorder tables can be set with DRC p 150 The recorded data can be read with the DRR p 152 command Format STE lt AxisID gt lt Amplitude gt Arguments lt AxisID gt is one axis of the controller lt Amplitude gt is the height of the step See below for details Response none Troubleshooting The control value resulting from the specified step height is out of limits Open loop operation the amplitude limitation results from the voltage limit parameters IDs 0x0B000007 0x0B000008 0x0C000000 and 0x0C000001 Closed loop operation use TMN p 197 and TMX p 197 to ask for the current valid travel range limits Motion commands like STE are not allowed when the E 517 is in OFFLINE mode or when the wave generator output is active When a macro is running on the E 517 STE will be executed not until the macro is finished or stopped See Control Value Generation p 53 and Control Modes p 23 for details E 517 PZ214E Release 1 0 0 Page 189 GCS Commands Notes Piezo Nano Positioning PI A step consists
267. ture is especially important in dynamic applications which require periodic synchronous motion of the axes The waveforms to be output are stored in wave tables in the controllers volatile memory one waveform per wave table Waveforms can be created based on predefined curve shapes This can be sine ramp polynomial tangent and single scan line curves Additionally you can freely define curve shapes Programmable trigger inputs and outputs facilitate synchronization of external events In How to Work with the Wave Generator p 84 and Wave Generator Examples p 92 you will learn how to use the wave generator and Wave Generator Related Commands and Parameters gives an overview During the wave generator output data is recorded in record tables on the controller See Data Recording p 71 for more information 8 1 How to Work with the Wave Generator The following subsections describe the wave generator handling in detail See also Wave Generator Examples p 92 8 1 1 Basic Data The E 517 provides three wave generators and three wave tables with 8192 points per table There is a fixed one to one assignment of axes to wave generators and wave tables If axes are deactivated see Configure Axes and Channels p 33 for details only the wave generators and wave tables belonging to the active axes can be used With E 517 11 models only wave generator 1 and wave table 1 can be used To ask for the number of wave
268. tus can only be identified in closed loop operation servo ON and is influenced by the Tolerance parameter ID 0x07000900 the on target status is true if Current Position Target Position lt Tolerance For the digital output line lt TrigOutID gt which belongs to the axis whose on target state is to be output set the trigger mode lt CTOPam gt 3 as follows Command Trigger mode mnemonic selection CTO lt TrigOutID gt 3 2 Example The On Target status flag of the first axis A by default is to be written Hence you have to set the On Target trigger mode for the digital output line DIO_O1 ID 1 The following command sequence could be used ONL 1 1 SVO A 1 MOV A 0 0 CTO 132 MOV A 1 0 NOTE If software emulated on target reading is enabled with parameter 0x07010600 the on target status can also be read with the ONT command p 176 See On Target Reading p 57 for more information E 517 PZ214E Release 1 0 0 Page 80 Www pi ws External Triggering Signaling Piezo Nano Positioning PI 7 2 3 Example MinMax Threshold Trigger Mode With the MinMax Threshold trigger mode a band is specified with MinThreshold and MaxThreshold lt CTOPam gt IDs 5 and 6 When the axis position is inside the specified band then the trigger output line is set high otherwise it is set low Axis Position MaxThreshold MinThreshold Trigger Output TOOSE EESE EE EE A Time Fi
269. ual devices must be changed to have unique IP addresses for all devices in the Www pi ws E 517 PZ214E Release 1 0 0 Page 63 Communication Www pi ws Piezo Nano Positioning PI network See below for how to proceed NOTES For successful connection the E 517 startup behaviour for IP address configuration must be set to Use IP address defined with IPADR IPSTART 0 You can check the IPSTART settings with the IFS command power on default setting and the IFC command current setting If the IPSTART setting is Use DHCP to obtain IP address IPSTART 1 default send IFS 100 IPSTART 0 The change becomes active with the next power on or reboot After power on reboot of the E 517 you have to wait for a period of about 30 seconds before communication is possible If you want to change the IP address and IP mask settings of the PC Configure the connection on the PC according to the IP address and IP mask settings of the E 517 see Default and Current Settings p 59 for the default E 517 settings Note that the following steps may vary in some details depending on the version of your Windows operating system 1 Follow the menu sequence Start gt Settings Control Panel gt Network and Dial up Connections Local Area Connection 2 Inthe Local Area Network LAN status window click Properties 3 Inthe Properties window of the LAN connection click on Internet Protocol TCP IP 4 Inthe Internet Pro
270. ult is 115200 is also accessible as parameter ID 0x11000400 Uart Baudrate GPADR lt PamValue gt gives the device address to be used for GPIB IEEE 488 communication default is 4 is also accessible as parameter ID 0x11000900 GPIB Address IPADR The first four portions of lt PamValue gt specify the default IP address for TCP IP communication the last portion specifies the default port to be used default is 192 168 168 10 50000 is also accessible as parameter ID 0x11000600 IP Address Note While the IP address can be changed the port must always be 50000 IPSTART lt PamValue gt defines the startup behavior for configuration of the IP address for TCP IP communication 0 use IP address defined with IPADR 1 use DHCP to obtain IP address if this fails use IPADR default is also accessible as parameter ID 0x11000800 IP Configuration IPMASK lt PamValue gt gives the IP mask to be used for TCP IP communication in the form uint uint uint uint default is 255 255 255 0 is also accessible as parameter ID 0x11000700 IP Mask www pi ws E 517 PZ214E Release 1 0 0 Page 160 GCS Commands Piezo Nano Positioning PI IFC Get Current Interface Parameters Description Get the interface configuration parameter values from volatile memory The values from volatile memory can also be queried with SPA p 188 for the corresponding parameter IDs see below Format IFC lt InterfacePam gt Arguments l
271. umber of axes and channels available on the display and in the firmware corresponds to the hardware configuration of your system as well as the display appearance You should change the E 517 configuration only in case of hardware changes e g if you install additional sensor and or amplifier channels in the system Configuration is done via controller parameters see Set System Parameters p 31 for detailed information regarding parameter handling Switch to command level 1 CCL command p 139 before you change parameter values with SPA p 185 or SEP p 183 NOTES With the display configuration parameters described here sensor channels have the identifiers 1 to 3 and piezo channels have the identifiers 4 to 6 Channels 1 and 4 belong to the first motion axis A by default 2 and 5 to the second axis B by default and 3 and 6 to the third axis C by default Keep in mind this assignment when configuring the E 517 In the display the numerical values for sensor channels give always positions and for piezo channels always voltage values Make sure to set a position unit e g um for channels 1 to 3 and set the unit to V for channels 4 to 6 Piezo channel ID 4 Sensor channel ID 1 Piezo channel ID 5 Sensor channel ID 2 Piezo channel ID 6 x Sensor channel ID 3 Changing the unit display via the corresponding parameter value has no influence on the numerical value itself The numerical value
272. umber of currently usable digital input lines can be queried with the TIO command p 196 See External Triggering Signaling p 77 for more information Wave generators three wave generators the identifiers are 1 to 3 can not be changed The number of wave generators is the same as the number of logical axes and each wave generator is dedicated to one axis See Wave Generator p 84 for more information Wave tables memory tables for waveform data three tables with 8192 points per table the identifiers are 1 to 3 can not be changed The number of wave tables is the same as the number of logical axes and each wave table is dedicated to one axis and hence to one wave generator The maximum number of wave tables is given by the Number of Waves Tables parameter ID 0x1300010A See Wave Generator p 84 for more information Data recorder tables memory tables for recorded data three tables with 8192 points per table the identifiers are 1 to 3 can not be changed The number of tables is given by the Max Number Of Data Recorder Channels parameter ID 0x16000100 See Data Recording p 71 for more information Whole system the E 517 system as a whole the identifier is 1 Hardware components two components identifiers are 1 and 2 1 main board 2 display board of the E 517 E 517 PZ214E Release 1 0 0 Page 51 System Description Piezo Nano Positioning PI NOTES There is a fixed one to one assig
273. urrent TCP IP connection was obtained from a DHCP server this address is not reflected in the response to the IFC command The currently active RS 232 baud rate and GPIB IEEE 488 address can also be checked set on the E 517 front panel in the COMMUNICATION display screen p 21 This screen can be accessed by the trackball p 22 The front panel settings correspond with the communication parameter settings described above Www pi ws E 517 PZ214E Release 1 0 0 Page 60 Communication Piezo Nano Positioning PI 5 3 TCP IP Connection The TCP IP connection is available on the E 517 front panel of the controller via the RJ 45 socket with the network icon The access differs depending on the network availability which can be as follows m Network with DHCP server m PC equipped with an Ethernet connection or network without DHCP server For the default IP address IP mask and startup behaviour settings of the TCP IP interface see Default and Current Settings p 59 CAUTION With TCP IP and USB connections communication can not be maintained after the E 517 is power cycled or rebooted The connection must then be closed and reopened NOTES Make sure that your network administrator has not set the network to forbid unknown devices like the E 517 from logging on Only one TCP IP connection is allowed at any one time Presently only one port 50000 is available at the E 517 so that only one application at a time ca
274. ustrates the interpretation of the control input as piezo voltage target or target position depending on the current servo mode The E 517 is in OFFLINE mode in this example and the control input is given by the DC offset potentiometer The DC offset potentiometer setting remains unchanged while switching from open loop to closed loop operation and the voltages and positions are read out in the display Closed loop Open loop operation operation servo ON servo OFF Output 78 78 V 86 46 V voltage 85 993 um 92 886 um Www pi ws E 517 PZ214E Release 1 0 0 Page 25 Operation Piezo Nano Positioning PI 3 3 How to Command Axis Motion 3 3 1 Applicable Control Sources www pi ws The applicable control sources for the axis motion depend on the current control mode of a piezo channel OFFLINE or ONLINE mode see Control Modes p 23 for details In OFFLINE mode the axis motion is commanded by analog control input and DC offset applied to the channel The DC offset plus the analog control voltage must be in the 2 V to 12 V range The voltage gain is 10 or 100 depending on the amplifier type For detailed information regarding OFFLINE control see the User Manual of the piezo control electronics OFFLINE control may be referred to as analog operation there In ONLINE mode the axis motion can be commanded by multiple sources see Control Value Generation p 53 for details m Move commands received via int
275. values of the E 517 to a file on the host PC before you make any changes This way the original settings can be restored if the new parameter settings will not prove satisfactory To save the parameter values and to load them back to the E 517 use the Device Parameter Configuration window of PIMikroMove See Create Backup File for Controller Parameters p 12 for more information CAUTION If the piezo stage starts oscillating humming noise In closed loop operation switch off the servo immediately The load and or the dynamics of operation probably differ too much from the setup for which the system was calibrated In open loop operation stop the motion immediately Do not operate the piezo stage at its resonant frequency because the notch filter s may be deactivated in open loop operation You can measure the resonant frequency using PIMikroMove see Data Recorder p 71 for more information Otherwise the piezo stage could be irreparable damaged Re calibration should only be done by adequate trained personnel and after consultation with PI Otherwise preset data will be lost www pi ws E 517 PZ214E Release 1 0 0 Page 7 Introduction Piezo Nano Positioning PI 1 3 Model Survey The following E 517 models are available E 517 i3 Interface Display Module 24 Bit D A TCP IP USB RS 232 3 Channels E 517 i1 Interface Display Module 24 Bit D A TCP IP USB RS 232 Single Channel The E
276. ve generator output is started with WGO afterwards the trigger pulses will be output as configured In addition the WGO command offers several start options for trigger output WGO bits 3 4 and 5 If you start the wave generator with those start options the corresponding pulses are output in addition to any output pulses defined with TWS The number of wave generator output cycles during which trigger pulses are to be output can be set using the Number Of Trigger Cycles parameter ID 0x18000100 The width of each trigger pulse is 30 us by default can be changed using the Pulse Width parameter ID OxOE000900 The 9 single character command p 133 can be used to query the current activation state of the wave generators The reply shows if a wave generator is running or not but does not contain any information about the wave generator start mode With WGO you can ask for the last commanded wave generator start options WGO settings p 221 You can limit the duration of the wave generator output by setting the number of output cycles with WGC p 220 The waveform itself remains unchanged Using the WTR command you can lengthen the individual output cycles of the waveform As long as the wave generator output is synchronized by servo cycles and not paused by an external signal see WGO p 221 for details the duration of one output cycle for the waveform can be calculated as follows Output Duration Servo Update Time WTR va
277. vel too low for write access If you change the current settings of the communication interface it may be necessary to close the current connection and re open it with the new settings To have write access to the parameter s it might be necessary to switch to a higher command level using CCL p 139 lt ItemID gt can be an axis identifier a sensor channel a piezo channel a wave generator a digital output line or the whole system the item type depends on the parameter see Parameter Overview p 252 for the item type concerned See Accessible Items and Their Identifiers p 50 for the identifiers of the items Valid parameter IDs are given in Parameter Overview p 252 Send SPA 1 0x16000000 8 Note Set the Data Recorder Table Rate for the controller to 8 parameter ID written in hexadecimal format Send SPA 1 369098752 2 Note Sets the Data Recorder Table Rate for the controller to 2 parameter ID written in decimal format E 517 PZ214E Release 1 0 0 Page 186 GCS Commands Example 2 Example 3 Www pi ws Piezo Nano Positioning PI The position of the second sensor channel ID is 2 is to be displayed on the E 517 front panel with 4 decimal places For that purpose the Display Format parameter ID 0x04000E01 must be set to 4 for channel 2 Send CCL 1 advanced Note Switch to command level 1 because this level is required for write access to the Display Format parameter Send SPA 2
278. vidx 0 00258 x 100 Frequency Hz Read Offser 1 H 8 of data points 4036 z Readal Record now Configure faisa I Servo Ff ft0 c00000 ajr I Movebackafter step RecordRate 1 Physik Instrumente E 517 107020627 01 060 10 When the measurement is finished open the Command Entry window again and set the Digital Filter Type parameter back to its initial value see step 3 Www pi ws E 517 PZ214E Release 1 0 0 Page 74 Data Recording Piezo NOTE If the resonant frequency should not measured resonance peak is higher th Nano Positioning P I be damped well enough the an the highest amplitude value for lower frequencies then you should adjust the notch filter center frequency damping of the analog piezo control electronics as described in the User manual of the E 802 submodule 6 3 Data Recorder Related Commands and Parameters Command Description DRC p 150 Set Data Recorder Configuration Configuration Values HDR p 155 Get All Data Recorder Options IMP p 165 Start Impulse and Response Measurement RTR p 180 Set Record Table Rate RTR p 181 Get Record Table Rate Start and Response TNR p 198 Get Number of Record Tables Start Stop Mode WGR p 227 Start Recording Synchronous to Wave Generator See How to use the Data Recorder p 71 for more information For detailed command descriptions see Com Notes Assigns data sources and
279. x error Wave table not defined Wave type not supported Wave length exceeds limit Wave parameter number error Wave parameter out of range WGO command bit not supported BasMac unknown controller error not enough memory hardware voltage error hardware temperature out of range Too many nested macros Page 240 GCS Commands Piezo Nano Positioning 1001 PI_CNTR_MACRO_ALREADY_DEFINED 1002 PI_CNTR_NO_MACRO_RECORDING 1003 PI_CNTR_INVALID_MAC_PARAM 1004 PI_CNTR_RESERVED_1004 1005 PI_CNTR_CONTROLLER_BUSY 2000 PI_CNTR_ALREADY_HAS_SERIAL_NUMBER 4000 PI_CNTR_SECTOR_ERASE_FAILED 4001 PI_CNTR_FLASH_PROGRAM_FAILED 4002 PI_CNTR_FLASH_READ_FAILED 4003 PI_CNTR_HW_MATCHCODE_ERROR 4004 PI_CNTR_FW_MATCHCODE_ERROR 4005 PI_CNTR_HW_VERSION_ERROR 4006 PI_CNTR_FW_VERSION_ERROR 4007 PI_CNTR_FW_UPDATE_ERROR 5200 PI_CNTR_AXIS_NOT_CONFIGURED Interface Errors 0 COM_NO_ERROR 1 COM_ERROR 2 SEND_ERROR www pi ws E 517 PZ214E Release 1 0 0 PI Macro already defined Macro recording not activated Invalid parameter for MAC PI internal error code 1004 Controller is busy with some lengthy operation e g reference move fast scan algorithm Controller already has a serial number Sector erase failed Flash program failed Flash read failed HW match code missing invalid FW match code missing invalid HW version missing invalid FW version missing invalid FW update failed Axis mus
280. xis identifier also required with single axis systems Move commands macros or wave generator commands provoke errors and are ignored The applicable control sources for the axis motion depend on the current control mode of a piezo channel OFFLINE or ONLINE mode see Control Modes p 23 for details In OFFLINE mode move commands received via interface or from a running macro wave generator output and trackball target settings are ignored and may provoke an error message In ONLINE mode the axis motion can be commanded by multiple sources see Control Value Generation p 53 for details move commands received via interface or from a running macro SVA p 191 SVR p 195 MOV p 170 MVR p 172 GOH p 154 IMP p 165 STE p 189 trackball settings on the CHANNEL SETTING screen of the E 517 display wave generator output While move commands and trackball settings can be used in parallel to command axis motion they are not accepted when the wave generator is running for the axis Macros can run in OFFLINE and ONLINE mode but move commands from macros are only accepted in ONLINE mode and only when the wave generator is not running When the E 517 is in OFFLINE mode the wave generator output can not be started If the wave generator output was started in ONLINE mode it E 517 PZ214E Release 1 0 0 Page 260 Troubleshooting Piezo Nano Positioning PI Www pi ws remains active when switching to O
281. y In open loop operation the unit of the velocity value is V s VER Get Versions Of Firmware And Drivers Description Get the versions of the E 517 firmware and the underlying drivers and libraries Format VER Arguments none Response lt string1 gt lt string2 gt lt string3 gt LF where lt string1 gt is the name of the component lt string2 gt is the version information of the component lt string1 gt lt string3 gt is an optional note Notes For E 517 VER replies something like PI PlL_GCS2_DLL dll V1 3 0 35 FW_DSP 01 052 FYW_FPGA 01 060 FW_MCU 01 008 E 517 PZ214E Release 1 0 0 Page 206 GCS Commands Piezo Nano Positioning PI VMA Set Voltage Output High Limit Description Gives the high limit of the piezo voltage soft limit Format VMA lt OutputSignallD gt lt HighLimit gt Arguments lt OutputSignallD gt is one piezo channel of the piezo control electronics lt HighLimit gt is the high limit of the output voltage in V Response None Notes VMA concerns the value of the Output Voltage High Limit parameter ID 0x0C000001 The voltage value set with VMA must be equal to or smaller than the voltage limit given by parameter 0x0B000008 The voltage limit set with VMA is saved in volatile memory RAM only To save the currently valid value to non volatile memory where it becomes the power on default you must use WPA p 229 Changes not saved with WPA will be
282. y to the ERR command p 153 indicates that at least one of the target positions given in the move command is out of limits MOV Get Target Position Description Format Arguments Response Troubleshooting www pi ws Returns last valid commanded target position MOV lt AxisID gt lt AxisID gt is one axis of the controller lt AxisID gt lt float gt LF where lt float gt is the last commanded target position in physical units Illegal axis identifier E 517 PZ214E Release 1 0 0 Page 171 GCS Commands Piezo Nano Positioning PI Notes MOV gives the target position settings made when the E 517 is in ONLINE mode see Control Modes p 23 for details In ONLINE mode the target position can be changed by move commands received via interface or from a running macro MOV p 170 MVR p 172 GOH p 154 IMP p 165 STE p 189 by trackball settings p 22 and by the wave generator p 84 When the control mode is switched from OFFLINE to ONLINE the target position is set to the current position See Control Value Generation p 53 for details MOV gets the commanded positions Use POS p 178 to get the current positions MVR Set Target Relative To Current Position Description Move given axes relative to the last commanded target position The new target position is calculated by adding the given value lt Distance gt to the last commanded target value Servo
283. ycle duration It gives the x value of the equation shown above The segment length i e the number of points written to the wave table results from the lt SegStartPoint gt and lt WaveLength gt values as follows Segment Length SegStartPoint WaveLength 1 For TAN with N a 2A o n 0 2 F the wave type dependent parameters are lt SegStartPoint gt lt SegLength gt lt A gt lt N gt lt Xo gt lt o gt lt B gt lt SegStartPoint gt The index of the segment starting point in the wave table Lowest possible value is 1 Writing to the wave table starts with this point In the wave table all points with an index smaller than lt SegStartPoint gt remain unchanged This means that former written content for those points will not be deleted and is shown by GWD and output by the wave E 517 PZ214E Release 1 0 0 Page 216 GCS Commands Www pi ws Piezo Nano Positioning PI generator lt SegLength gt The length of the wave table segment in points Only the number of points given by lt SegLength gt will be written to the wave table If the lt SegLength gt value is larger than the lt N gt value the missing points in the segment are filled with recurrences of the tangent curve lt A gt The amplitude of the tangent curve lt N gt The wave length i e the length of the tangent curve in points cycle duration lt Xo gt The index of the starting point of the tangent curve in the
284. ystem Possible necessary measures are installation of the component in a suitable shielded enclosure and usage of suitable connectors September 12 2008 Karlsruhe Germany WC Physik Instrumente Pl GmbH amp Co KG Auf der Ribmersty 1 70225 Karisrunhe Germany icing tha Hanaiiwid_ yuugi ao Phone 40 721 40 33 0 Fax 40 721 40 48 200 E mal inio piws Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI PIC PICMA PILine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation The following designations are protected company names or registered trademarks of third parties Microsoft Windows LabView Copyright 1999 2008 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 08 12 2008 Document Number PZ214E BRo Release 1 0 0 E 517_User_PZ214E100 doc Subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi ws http www pi ws About This Document Users of This Manual This manual is designed to help the reader to operate the E 517 Interface Display Module It assumes that t

PZ214E User Manual E-517 Digital Piezo Controller

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