TurboDrag Pump Betriebsanleitung • Operating Instructions
Contents
1. 06 JO 50915 G6 VACUUM 25 PFEIFFER 10 Spare Parts Pos Description Pieces Size Number Comments Ordering Quantity pare parts TMH 071 TMU 071 6 Rubber foot 4 P 3695 700 ZD 8 Electronic drive unit TC 600 1 PM C01 720 90 Locking cover 1 PM 083 021 X 91 D ring 1 68 x3 P 4070 972 PV 92 Lubricant reservoir standard version 1 PM 073 073 T incl O ring 93 92 Lubricant reservoir Y Version 1 PM 103 794 T incl O ring 93 and 8 x Porex rods 89 Spare parts 4 R SS IWS N N HZ AN MSY gum Laut SS Ze S 547A ERE C40 930 1 26 VACUUM 11 Accessories Description Size Number Comments Order Quantity Operating Instructions Components for cooling Dirt trap R 3 8 P 4161 300 2R Recycled Water Cooling Unit TZK 400 230 V 50 Hz PM Z01 245 PM 0369 BN Air cooling 24 VDC PM Z01 253 PM 0543 BN Water cooling PM 016 000 T PM 0546 BN Cooling unit for convection cooling PM 039 237 T Components for venting Venting Valve TVF 005 without current closed 24 VDC PM Z012. Connect plug X2 on connecting cable 8a with power supply TPS 200 DCU 200 Accessories on connection X2 Using screws and toothlock 8c included with the cable consigment secure plug X2 to power supply 105 1 1 Only with cable PM 051 843 T see section Accessories Connecting the TC 600 with power supply TPS 100 or DCU 100 mounting diagram for shielded connection cable X1 Mains connection X2 Connection power supply X4 Connection TC 600 51 ON OFF switch 8 Electronic Drive Unit TC 600 8a Connecting cable TC 600 TPS DCU 8b Screw 8c Screw with tooth lock 3 pieces 8d Remote plug 105 power supply S1 105 8a 8d 8c 4 8 PFEIFFER VACUUM 11 3 10 Installation Of Pfeiffer Vacuum Display And Control Units An external display and control unit DCU 001 DCU 100 HPU 001 or an external PC can be connected via the connection RS 485 on the TC 600 with the use of a shielded 8 pole modular connecting cable contained with the delivery of the DCU HPU Connecting the Serial Interface RS 485 RS 232 level converter TIC 001 DCU with power supply HPU 001 DCU 001 TC 600 without power supply The serial interface is galvanically and safely separated from the maximum supply voltage from the TC 600 Connection Designation Value Serial
3. Floor mounting of the turbomolecular pump is only admissible after consulting the manufacturer The person responsible for commissioning must PLEASE NOTE ensure that the installation is carried out in accordance with the legal regulations and the pertinent industrial standards Notes to the accessories named below are ee located in the section 11 Accessories There are also located the information on the appropriate operating instructions 6 PFEIFFER amp VACUUM 3 2 Connecting The High Vacuum Side The utmost cleanliness must be observed when fitting all high vacuum parts Unclean components prolong the pumping time All mounting materials for the flanges must be dry and free of any grease or dust with the installation PLEASE NOTE CAUTION Only those turbopumps with a Y behind the type designation please see rating plate for example TMH 071 Y P may be fitted in all posi tions Connecting via a Pfeiffer Vacuum vibration compensator The high vacuum side can be flanged onto the vacuum cham ber either directly or via a Pfeiffer Vacuum vibration compen sator see Section 11 Accessories When using a Pfeiffer vacuum vibration compensator suitable securing needs to be introduced capable of absorbing the energy of the rotor should it suddenly block since the vibration compensator itself alone cannot absorb the oc
4. Close the high vacuum flange and evacuate the turbopump via the fore vacuum flange Vent turbopump via the venting connection with nitrogen or dry air Close the fore vacuum and venting connections by blank flanging Place the pump vertically on its rubber feet Storage the pump only indoors at a permissible ambient temperature between 25 C and 55 C n rooms with moist or aggressive atmospheres the turbo pump must be air sealed in a plastic bag together with a bag of dessicant If the pump has been shut down for 3 years the bearing must be changed please contact Pfeiffer Vacuum Service PLEASE NOTE PFEIFFER VACUUM 17 5 Monitoring Operations 5 1 Operations Display Via LED Certain operations modes of the turbopump and the TC 600 can be ascertained via the two integrated LEDs located on the front panel of the TC 600 The following operations modes are displayed LED Cause green red Glows power supply OK Function pumping stati on ON carried out Flashes short power supply OK 1 12s active Pumping station OFF Blinks Mains power supply failure 1 2s active Glows Collective malfunction for example run up time error over temperature turbopump or TC 600 Switching output 2 active low Blinks Warning 1 2s active e g supply voltage short circuit to earth mains power failure Diffe
5. Connecting the sealing gas valve 9 Locking screw sealing gas connection 15 Seal 66 Sealing gas valve 66a Seal ring 3 8 Connecting The Electronic Drive Unit CAUTION nce operating voltage has been supplied the T TC 600 performs a self test on the supply C 600 voltage The supply voltage for turbopumps PIEASENOTE The turbopump and the electronic drive unit TMH 071 TMU 071 is 24 VDC 5 in accor TC 600 are connected and together form a dance with EN 60 742 single unit The connecting cable 8a has to be ordered separately see Accessories 3 9 Installing The Power Supply If the turbopump is operated with a display and PEASENCTE control unit DCU 001 DCU100 or the HPU 001 CAUTION Voltage may only be supplied with the Pfeiffer V the remote plug 8d must be disconnected Vacuum power supplies accessory The use of other power supplies requires the prior agree N ment of Pfeiffer Vacuum and equalization with the valid specification specifications available Unscrew screw with tooth lock 8c from the TC 600 above on request the connection X4 Plug the plug X4 on connecting cable 8a into the e mains connection must be freely connection X4 on the TC 600 and screw in screw 8b accessible at all times Secure plug X4 on the TC 600 with a screw and tooth lock 8c
6. Switch off the turbopump vent to atmospheric pressure see section 4 6 and allow to cool as necessary f necessary remove the turbopump from the system Unscrew allen head screws 8c 2 pieces from the electronic drive unit 8 20 PFEIFFERE VACUUM Assembling disassembling of the TC 600 8 Electronic drive unit TC 600 8c Hexagon socket screw M4 x 50 40 Adapter TC TMH U 071 40a Hexagon socket screw M4 x 16 The adapter 40 must not be released for the replacement of the TC or following works Assemble the new electronic drive unit TC 600 order number please see section Spare Parts on the turbopump and connect again Please take into account that after replacement the standard operating parameters are always pre set If your application requires different parameters please modify accordingly CAUTION 7 2 Replacing The Lubricant Reservoir The lubricant reservoir should be replaced at least every three years Where extreme operating conditions or unclean processes are involved the replacement interval should be checked with Pfeiffer Vacuum Service CAUTION The procedure for the replacement of the lubricant reservoir depends on the turbopump type Necessarily observe the properties abbreveations on the rating plate Standard Version The lubricant reservoir can contain toxic substances from the medium pumped The lubricant reservoir must be di
7. 1 A We hereby declare that the product cited below satisfies all relevant provisions of EC directive Machinery 2006 42 EC In addition the product cited below satisfies all relevant provisions of EC direc tive Electromagnetic Compatibility 2004 108 EC The agent responsible for compiling the technical documentation is Mr J rg Stanzel Pfeiffer Vacuum GmbH Berliner Stra e 43 35614 TMH 071 TMU 071 Guidelines harmonised standards and national standards and specifications which have been applied DIN EN ISO 12100 1 2004 DIN EN ISO 12100 2 2004 DIN EN ISO 14121 1 2007 DIN EN 1012 2 1996 DIN EN 61010 1 2002 Pfeiffer Vacuum GmbH Dr M Wiemer CE 2010 Managing Director gt PFEIFFER VACUUM gt Vacuum is nothing but everything to us Turbopumps Rotary vane pumps Roots pumps Dry compressing pumps Leak detectors Valves Components and feedthroughs 5 828 Vacuum measurement e 996 Gas analysis o System engineering Service IND PFEIFFER E VACUUM Pfeiffer Vacuum Technology AG Headquarters Germany Tel 49 0 64 41 8 02 0 Fax 49 0 64 41 8 02 2 02 info pfeiffer vacuum de www pfeiffer vacuum net
8. Connections Diagram TC 600 TC 750 m 3 24 VDC max 200 mA supply voltage DCU _ gt lt n c RS485 5 B ns te lt m RS 485 DO RI mass connection _ _ gt 17 lt 7 GND SS DCU ET RS 485 DO RI m 1 24 VDC max 50 mA S Venting release T lt m Motor TAP 4 Pumping station mies UA cona WH Heating Reset opt sealing gas 4 lcm Heating R li mR PWM on touch relation 25 75 WE Switching output max 50m g Switchi 1 24 VDC 0 mA output 2 24 VDC 50 mA m l pd c 12 Contact output 1 Switch point attaind 1 m c 14 Contact output 2 Collective malfunction cm Analog output 0 10 VDC 5 Relay box L 3 Mains input heating HEATTMS lt 115 208 230 VAC Tse 4 N LL e p 3 l6 m HEATING Heating ee eee E E EL E e l VENT S X Venting valve BIN i TVF 005 te c 1 m Gaspar 2 Relay box Mains input pumping station 115 208 230 FVPUMP CT lt y 5 Connection pumping station 6 c m Pumping station Imax 16 Ws He gee 5 E
9. be disconnected from each other when the turbopump is completely at rest and the TC 600 has been disconnected from the power supply The cause of any operating voltage leakage to earth red LED flashes must be eliminated to avoid the danger of an electric shock Modifications reserved 1 1 For Your Orientation Instruction in the text Working instruction here you have to do something Symbols used The following symbols are used throughout in all illustrations D High vacuum flange Fore vacuum flange Venting connection Cooling water connection Air cooling Electric connection Sealing gas connection Abbreviations used DCU Display and control unit HPU Handheld programming unit TC Electronic drive unit turbopump TPS Power unit Position numbers The same pump and accessory parts have the same position numbers in all illustrations 1 2 Pictogram Definitions Warning danger of burns from touching hot parts WARNING WARNING Warning danger of personal injury Caution danger of damage the pump or to CAUTION the system WARNING Warning danger of injury from rotating parts e PLEASE NOTE Please note attention to particulary important information by on the product handling the product or to a particular part of the documentation PFEIFFER VACUUM 3 2 Understanding The Pu
10. 135 PM 0507 BN Drying Unit TTV 001 PM Z00 121 PM 0022 BN filled with zeolite Venting flange DN 10 ISO KF PM 033 737 T Clip clamping ring for the venting flange DN 10 15 ISO KF PF 102 016 T Components for heating Casing heating Water cooling required 230 V Schuko plug PM 041 900 T PM 0542 BN 208 V UL plug PM 041 901 T PM 0542 BN 115 V UL plug PM 041 902 T PM 0542 BN Other accessories Connecting cable TC 600 TPS DCU 3m PM 051 103 T Other lengths on request Connecting cable TC 600 TPS DCU 3m PM 051 843 T Other lengths on request shielded Power supplies 100 for fitting to walls or standard runners PM 041 827 T PM 0521 BN TPS 100 19 insert unit PM 041 828 T PM 0521 BN DCU 100 19 insert unit with Operating and Display Control Unit PM C01 694 PM 0477 BN Display and control unit DCU 001 PM 041 816 T PM 0477 BN Handheld programming unit HPU 001 PM 051 510 T PT 0101 BN Mains cables Schuko plug 230 V P 4564 309 ZA UL plug 208 V P 4564 309 ZF UL plug 115V P 4564 309 ZE Relay box backing pump 90 265 V 5 A PM 041 937 T PT 0030 BN 90 265 V 20 A PM 041 938 T PT 0030 BN PWM adapter box PM 051 028 U PM 0563 BN Level Converter RS 232 485 TIC 001 PM 051 054 T PM 0549 BN Cover plate for TC 600 IP 54 PM 051 327 U PT 0024 BN Profibus DP gateway TIC 250 PM 051 257 T PM 0599 BN Vibration compensator TMH DN 63 ISO K PM 006 800 X TMH DN 40 ISO KF PM 006 799 X TMU DN 63 CF F PM 006 801 X Splint
11. 3 FAN lt Mains input power supply 90 132 185 265 VAC TPS XXX DCU XXX 14 PFEIFFERE VACUUM 4 Operations 4 1 Before Switching On Sections 4 1 to 4 3 refer only to operating the pump in its delivery status without display and control unit The bridges venting release motor TMP ON and pumping station ON are fitted in the remote control plug Turbopump rotors rotate at high speed When the high vacuum flange is open there is a danger of injury and of damage to the pump caused by objects falling into the pump Therefore never operate the pump with open high vacuum flange WARNING e With water cooling Open cooling water supply and check flow Plug connecting cable Accessory into the TC 600 and connect with power supply TPS 100 or DCU 100 on X2 please see section 3 8 Please note The following pre settings have been programmed Running up time 15 min Rotation speed switchpoint 8096 Automatic venting 50 For further works settings please refer to the parameter over view in the operating instructions Pumping Operations With the DCU PM 0547 BN These settings can only be altered via serial interface RS 485 via DCU HPU or PC please refer to the respective operating instructions Take care when pumping hazardous gases WARNING Take note of all safety recommendations of the A gas manufacturer 4 2 Switchi
12. 8 Hydrogen mbar 12 12 12 Maximum gas throughput at nominal rotation speed 2 With water cooling Nitrogen mbar I s 1 3 1 3 1 3 Helium He mbar l s 27 27 27 With air cooling 3 Nitrogen mbar I s 0 58 0 58 0 58 Maximum gas throughput at intake pressure of 0 1 mbar 4 With water cooling Nitrogen mbar 1 5 2 2 2 Helium He mbar l s 3 3 3 Hydrogen H mbar l s 2 2 2 Vertex power characteristics line 5 A W Hz 80 1500 80 1500 80 1500 B W Hz 80 1500 80 1500 80 1500 W Hz 60 1500 60 1500 60 1500 D W Hz 80 1300 80 1300 80 1300 Final pressure 6 With rotary vane pumps mbar 1 107 1 107 5 10710 With diaphragm pumps mbar 1 107 1 107 1 108 Lubricant TL 011 TL 011 TLO011 Maximum cooling water consumption with water at 15 6 l h 100 100 100 Cooling water temperature C 5 25 5 25 5 25 Permissible ambient temperature with air cooling C 0 40 0 40 0 40 Heating power consumption W 32 32 32 Weight kg 2 8 3 8 3 8 Permissible magnetic field mT 3 3 3 Operating voltage VDC 24 5 24 5 24 5 Duration max current consumption A 4 1 4 6 4 1 4 6 4 1 4 6 Duration max power 100 110 100 110 100 110 Fuse internal V T8A 250 T8A 250 T8A 250 Protection class IP 30 IP 30 IP 30 Relative humidity 5 85 non condensing 5 85 non condensing 5 85 non condensing 1 Measured with 20 helium concentration and a measurement period of 10s 2 Until frequency fall off higher gas thro
13. A rotation speed proportional voltage 0 10 VDC correspond to 0 100 f 4 can be tapped via the analog output load 2 10 Additional functions power current can be assigned to the analog output via a DCU or Serial Interface RS 485 4 4 Gas Type Dependent Operations Water cooling is required if the pumps are to be operated with gas load CAUTION AN Where high level gas loads and rotation speeds are involved the resulting friction subjects the rotor to the effect of great heat To avoid over heating a power rotation speed charac teristic line is implemented in the TC 600 this ensures that where maximum gas loads are involved the pump will ope rate at any rotation speed without the danger of damage arising The maximum power is dependent on the type of gas Two characteristic lines are available for any type of gas in order to fully exploit the power potential of the pump Set the applicable gas mode on the TC 600 via the DCU HPU or PC Gas Mode 0 for gases with molecular mass gt 40 e g Ar Gas Mode 1 for all lighter gases Factory setting Gas Mode 0 WARNING Pumping gases with molecular mass 2 40 with the incorrect gas mode can cause damage to the pump Before pumping such gas types please contact the manufacturer Gas type characteristic line Power Run up D C Gas mode 0 B A Gas mode 1 Frequency fnom F
14. Betriebsanleitung Operating Instructions Translation of the Original Operating Instructions TurboDrag Pump with Electronic Drive Unit TC 600 TMH 071 TMU 071 PM 0504 BE M 0702 PFEIFFER E VACUUM Index Page 1 Safety Instructions 3 Tele For Your Orientation cct tt 3 1 2 Pictogram Definitions 3 2 Understanding The Pumps 4 TMH 071 TMU 071 2 1 Main 4 Proper Use uice ete t ar a t 5 Itmproper eee 5 2 2 Differences Between The Pump Types 5 2 3 Scope 5 3 Installation 6 3 1 Preparations For Installation 6 3 2 Connecting The High Vacuum Side 6 Installing The High Vacuum Flange 7 Directly Flanging The 8 3 3 Connecting The Fore Vacuum Side 9 3 4 Connecting The Cooling 9 3 5 Connecting The Venting Valve 10 3 6 Connecting The Casing Heating Unit 10 3 7 Connecting The Sealing Gas Valve 10 3 8 Connecting The Electronic Drive Unit TC 600 11 3 9 Installing The Power Supply 11 3 10 Installation Of Pfeiffer Va
15. H pumps are not high enough The heating duration is dependent on the degree of dirt and on the required final pressure level The heating duration should be at least 4 hours Where casing heating is involved the turbopump must be water cooled PLEASE NOTE 10 PFEIFFER VACUUM The temperature of the high vacuum flange must CAUTION not exceed 120 C A WARNING High temperatures are generated when turbopumps are heated There is a danger of injury from coming into contact with hot parts even after the casing heating has been switched off Heating sleeve and the pump casing should be thermally insulated during the installation During the heating phase be careful not to come into contact with the heating sleeve or the pump casing Plug control lead of the casing heating into the connection HEAT TMS of the TC 600 on the turbopump 3 7 Connecting The Sealing Gas Valve To protect the pump particularly where corrosive or dust pro ducing processes are involved it is necessary to use sealing gas For all processes from 5096 of the maximum gas load sealing gas must be used to ensure rotor cooling Unscrew the locking screw 9 from the sealing gas connection of the turbopump Screw in the sealing gas valve 66 with seal ring 66a For details on adjusting the sealing gas flow refer to the operating instructions see Accessories
16. PF 501 406 T or copper seal silvered PF 501 506 T 10 pieces Splinter shield PM 016 312 Protective screen PM 016 333 1 supplied pieces Stud screw with blind hole Stud screw with blind hole A CF F flange B Stud screw with washer and nut C Copper seal Ug 2 52 c A B f used Insert the splinter shield and protective screen in the high vacuum flange with the clamping lugs downward towards the pump Bring the seal centric into the correct position Connect the flanges via 8 pieces of hexagon screws 8 with washers and nuts The hexagon screws need to be tightened revolving with a tightening torque of 22 2 Nm Control the torque afterwards because of the sealing material s flowing a retightening of the screws may be required Directly Flanging The Pump Only those turbopumps with a Y behind the type designation please see rating plate e g TMH 071 Y P may be fitted in any positions Turbopumps in standard version without Y on the rating plate can be flanged onto the vacuum chamber vertically 0 up to an angle of 90 maximum CAUTION The fore vacuum flange must always point CAUTION downwards f used Insert the splinter shield and protective screen in the high vacuum flange with the clamping lugs downward towards the pump Bring the seal centric into the correct position Connect the flang
17. bus DP Gateway TIC 250 accessory is available for connecting an electronic drive unit TC 600 to a Profibus DP 3 12 Connecting The Remote Control Unit Remote control options for various functions are provided with the connection REMOTE on the TC 600 via the 15 pole e D Sub Connector Shielded cable must be used Shielding is 15 8 on the plug side of the 600 connected the TC casing The inputs 2 6 are activated by connecting them to the 24 V on pin 1 active high please see 3 12 Connection Diagram Pin occupancy and remote plug functions please see following table Pin arrangement and function of the remote plug functions Pin occupancy remote plug When connecting supply voltage the turbopump is started On delivery Pin 1 Pin 2 Pin 3 and Pin 4 are bridged in the mating plug CAUTION Pin no Input open low Input closed high on 24V pin 1 1 4 24 V 2 venting blocked see Section 3 5 venting released see Section 3 5 3 motor turbopump off motor turbopump on the turbopump is driven current flows through the motor coils 4 pumping station off pumping station on the turbopump is driven backing pump is started via the relay box 5 heating off heating on the heating is switched on once the rotation speed switchpoint is attained and off when the rotation speed switchpoint is unattained
18. connection Check power supply voltage for short circuit to earth Enter 1500 Hz for parameter 777 see operating instruction PM 0547 BN Pumping Operations With DCU If there is no DCU HPU available contact Pfeiffer Vacuum Service 1 Without a DCU or HPU inform Pfeiffer Vacuum Service to check the cause of trouble PFEIFFER VACUUM 19 7 Maintenance Exchange Vo liability for personal injury nor material damage will be accepted for damages and operational interruptions which have been caused by improper maintenance in addition all guarantees become invalid PLEASE NOTE The bearing should be changed every three years request Pfeiffer Vacuum Service to change Where extreme operating conditions or unclean processes are involved the replacement interval should be checked with your Pfeiffer Vacuum Service Center You can change the electronic drive unit TC 600 and the lubri cant reservoir yourself Please contact your Pfeiffer Vacuum Service for all other maintenance and service work Apply no mechanical stress to the electronic CAUTION drive unit TC 600 7 1 Replacing The Electronic Drive Unit The turbopump and the TC 600 must only be disconnected from each other when the turbopump is completely at rest and the TC 600 has been disconnected from the power supply CAUTION Remove the electronic drive unit TC 600 from the turbopump as follows
19. ction Technical Data Operation without the use of cooling equipment Operation without cover plate for the TC in environments which require a protection class superior to IP 30 Installation in systems where the turbopumps are subjected to impact like stress and vibrations or the effect of periodically occurring forces The use of other power units or accessories which are not named in this manual or which have not been agreed by the manufacturer The connection to power units with earthing of a direct voltage pole Improper use will cause all claims for liability and guarantees to be forfeited 2 2 Differences Between The Pump Types Feature TMH 071 TMU 071 High vacuum flange ISO KF 1SO K CF F High vacuum seal Elastomer Metal Attainable final 1 1077 mbar 5 10710 mbar pressure without baking out with baking out Abbreviations on the rating plate of the turbopump Suffix P Purge gas connection for the prevention of the ingress of aggressive gases into the motor and bearing arena Sealing gas valve see Accessories Suffix Y Installation orientation in all positions possible 2 3 Scope Of Delivery Turbomolekular pump with Electronic drive unit TC 600 protecting cover for high vacuum flange protecting cover for fore vacuum flange only DN 631S0 K 2 bracket screws PFEIFFER VACUUM 5 3 Installation 3 1 Preparations For Installation Do not carry out any
20. curring forces Please consult the manufacturer The maximum permissible temperature at the CAUTION Pe vibration compensator is 100 AN Use a Pfeiffer Vacuum splinter shield or protective screen The use of a Pfeiffer Vacuum splinter shield or protective screen in the high vacuum flange protects the turbopump against foreign bodies coming from the vacuum chamber but does reduce the volume flow rate as followed Reduced volume flow rate in H2 Splinter shield DN 63 13 5 3 Protective screen DN 63 3 1 1 Splinter shield DN 40 26 13 8 Installing The High Vacuum Flange ISO K flange with ISO F flange For installing the following components are available Incase the rotor blocks suddenly torque levels up to 3 g 820 Nm can occur which need to be absorbed by the system and the high vacuum flange Connection nominal Designation Order number diameter WARNING Ifthe pumps are secured with the attachment of DN 63 IS0 K Centering ring coated PM 016 206 U ISO K flange to ISO F or with the attachment of Centering ring coated mit PM 016 207 U ISO KF flanges it can come to twisting the flan splinter shield ge in case the rotor blocks suddenly T protective screen For installing the turbomolecular pumps to the high Claw crip use 4 pieces PF301 100 T vacuum flange the components listed in the following must be u
21. cuum 12 Display And Control Units COnBDSGELOF 4 e e ot 12 3 11 Connecting The RS 485 12 3 12 Connecting The Remote Control Unit 13 3 13 Connections Diagram 14 4 Operdtions oo esee 15 4 1 Before Switching 15 2 2 ere te 15 4 3 Operations With The Remote Control Unit 15 Venting Release Optional 15 Motor Turbopump sssssm 15 Putriplfig Staton 2 ene EU 15 Heating Reset 16 Standby 3 oe erm 16 Rotation Speed Setting Mode 16 Via Input PWM Switching etr ett 16 Analog 16 4 4 Gas Type Dependent Operations 16 4 5 Operations With The DCU 001 DCU 100 17 or HPU 001 4 6 Switching Off And Venting 17 4 7 Shutting Down For Longer Periods 17 2 PFEIFFER amp VACUUM Page 5 Monitoring Operations 18 5 1 Operations Display Via LED 18 5 2 Turbopump Temperature Management 18 6 What To Do In Case Of 19 Breakdowns 7 Maintenance Exchange 20 7 1 Replacing The Electronic Drive Unit 20 7 2 Replaci
22. ding caused by Water flow insufficient nsufficient air supply Fore vacuum pressure too high Ambienttemperature too high Connect pins 1 3 and 1 4 on the remote plug Use suitable cable Check backing pump function Check seals Seek leak and repair Reduce supply of process gas Check bearing noises Inform Pfeiffer Vacuum Service Setlonger start up time with the DCU or PC Ensure free flow Ensure adequate air supply Reduce fore vacuum pressure Reduce ambient temperature Pump doesn t attain final pressure Pump dirty Leak in vacuum chamber Bake out pump If seriously contaminated Request Pfeiffer Vacuum Service to clean Seek leak starting with vacuum chamber lines or pump e Repair leak Unusual operating noises Bearing damaged Inform Pfeiffer Vacuum Service of need for repair Rotor damaged Inform Pfeiffer Vacuum Service of need for repair e Splinter shield if fitted Check seat of splinter shield not seated firmly see Section 3 2 Red LED on the TC 600 glows Collective malfunction Reset via mains OFF ON or remote pin 5 Different malfunction display with the DCU possible 1 Red LED on the TC 600 flashes Warning through Mains power failure Supply voltage short circuitto earth Wrong setting for nominal rotation speed Parameter 777 Different warning message with the DCU possible 1 Check power supply voltage Check power supply mains
23. er shield DN 40 ISO KF PM 006 375 X DN 63 ISO K PM 006 376 X Protective grill DN 63 ISO K PM 006 597 R Sealing ring TMH DN 63 ISO K PF 303 106 T Cu seal 10 pieces DN 63 CF PF 501 406 T Set of screws TMU DN 63 CF PF 505 002 T Sealing gas valve PM Z01 142 PM 0229 BN Hose nipple for the sealing gas valve DN 16 ISO KF 10 PF 144 020 Assembly material Accessories for flange mounting see section 3 2 When ordering accessories and spare parts please be sure to state the full part number When ordering spare parts please state additionally the unit type and unit number see rating plate Please use this list as an order form by taking a copy PFEIFFER VACUUM 27 Declaration of Contamination of Vacuum Equipment and Components The repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to accept any equipment without a declaration This declaration can only be completed and signed by authorised and qualified staff 1 Description of component Equipment type model Code No Serial No Invoice No Delivery Date 2 Reason for return 3 Equipment condition Has the equipment been used yes no O What type of pump oil was used Is the equipment free from potentially harmful substances
24. es via 8 pieces of stud screws M8 with washers and nuts The stud screws need to be tightened revolving with a tightening torque of 22 2 Nm Control the torque afterwards because of the sealing material s flowing a retightening of the screws may be required 8 PFEIFFER amp VACUUM Installation orientations for Y version 11 Vacuum chamber 11 oy Permissible installation orientation for the turbopump in standard version 11 Vacuum chamber The maximum loading capacity of the high vacu um flange is 200 N equivalent to 20 kg Assymetric loading on the high vacuum flange must be avoided CAUTION Horizontal installation With horizontal pump installation and oil sealed backing pumps e g rotary vane pumps the fore vacuum flange of the turbopump must be aligned vertically downwards maximum deviation 20 otherwise the turbopump could become dirty Installation position with oil sealed backing pump 11 Vacuum chamber D uc I tH a No forces from the piping system must be allowed to act on the pump where turbopumps are anchored Suspend or support all pipes to the pump CAUTION 3 3 Connecting The Fore Vacuum Side Vacuum pressure lt 10 mbar with enhanced convection coolin
25. g 0 1 mbar Recommendation Oil free diaphragm pump or rotary vane vacuum pumps from the Pfeiffer Vacuum range note installation position turbopump see section 3 2 Backing pump Connecting the backing pump All connections of the fore vacuum line with the usual small flange components or hose screw connections Be sure to conduct away the exhaust gases from the backing pump Do not reduce the free cross section of the fore vacuum flange with following components CAUTION The exhausted process gases and vapours can represent a health hazard and can also be envi ronmentally damaging Comply with all the gas manufacture s safety instructions WARNING With rigid pipe connections fit a bellows in the connecting line to reduce vibration The electrical connection of the backing pump is made via a relay box whose control line is connected to FV PUMP on the TC 600 see section accessories 3 4 Connecting The Cooling Unit Turbopumps TMH 071 TMU 071 can optionally be provided with enhanced convection cooling air cooling or water cooling The turbopumps must be operated with air or water cooling where the fore vacuum pressure is increased 0 1 mbar and or operations with gas loads For all proces ses from 50 of the maximum gas load sealing gas must be used to ensure rotor cooling Use and installation Heatsink for convection cooling installation orientati
26. ice on the most cost efficient and quickest solution Detailed information and addresses at www pfeiffer vacuum net Service Maintenance and repairs in the Pfeiffer Vacuum ServiceCen ter The following steps are necessary to ensure a fast smooth servicing process RMA form and contamination declaration Fill in the RMA form and send it by fax or e mail to your service address Enclose the RMA confirmation of receipt from Pfeiffer Vacuum in the shipment Fill in the contamination declaration and enclose it in the shipment required Dismantle all accessories Drain operating fluid lubricant Leave the electronic drive unit on the pump Send the pump in its original packaging if at all possible VReturn Material Authorization downloadable at www pfeiffer vacuum net Contaminated vacuum pumps Units which are microbiologically explosively or radioactively contaminated will not be accepted by Pfeiffer Vacuum as a matter of principle Hazardous substances are substances and compounds in accordance with the hazardous goods directive current version Should pumps be contaminated or the contamination declaration be missing Pfeiffer Vacuum will decontaminate the pumps at your cost Returning contaminated pumps or units Neutralise the pump by flushing it with nitrogen or dry air Close off all openings so that they are air tight Seal the pump or unit in suitable protective film Onl
27. in accordance with the installation instructions t Do not disconnect the plug between the TC 600 and accessory components during operations t Disconnect the voltage supply to the TC 600 before opening the turbopump t When working on the turbopump the high vacuum flange should only be opened once the rotor is at rest t When using sealing gas the pressure in the hose connec tion should be limited to 2 bar via the overpressure valve f a heater is in use temperatures of up to 120 can be present in the area of the high vacuum flange Take care to avoid burns During operations temperatures of up to 65 C can arise in the lower part of the turbopump Take care to avoid burns t Keep leads and cables well away from hot surfaces gt 70 t Operate the turbopump with TC 600 only in conjunction with the relevant power unit accessory t The unit has been accredited protection class IP 30 When the unit is operated in environments which require other protection classes the necessary measures must be taken Protection class IP 54 is afforded by retro fitting a cover plate Accessory to the TC 600 t The mains connection must be subject to a safe connection to the PE protection class 1 t f the turbopump and the TC 600 are operated independently of each other only permissible with the agreement of the manufacturer the turbopump must be connected to the PE t The turbopump and the TC 600 must only
28. interface type RS 485 Baud rate 9600 Baud Data file word length 8 bit Parity no parity Start bits 1 Stop bits 1 2 The electrical connections in the TC 600 are optically decoupled RS 485 3 5 Occupancy not connected 24 V output loadable with 210 mA not connected not connected 1 8 RS 485 0 DO RI Gnd View from RS 485 D DO RI the plug side not connected of the TC 600 gt 12 PFEIFFERE VACUUM It is possible to connect an RS 232 e g PC via PLEASE NOTE ha a level converter please see Accessories 3 11 Connecting The RS 485 Please refer to the operating instructions PM 0488 BN for detailed operating procedures and electrical data in respect of the serial interface RS 485 Connection to a fixed bus system Connect all units with D pin 5 RS 485 and D pin 7 RS 485 to the bus The bus must be closed at both ends PLEASE NOTE The connections should be made in accordance with the specification of the Serial Interface RS 485 All units connected to the bus must have differing serial interface addresses parameter 797 The group address of the TC 600 is 960 Only SELV may be connected to the serial inter WARNING ane RS 485 A All switched on remote functions have priority over the serial interface functions The Profi
29. ld Splitter shield PM 600 375 X E Protective screen Clamping ring for metal seal Dode orE A B See that the sealing surface is not damaged Flange the turbopump according to the drawing and the component parts in your set of mounting material Use 4 bracket screws Tighten the bracket screws crosswise in three steps Tightening torque 25 2 Nm The screws on the clamping ring need to be tightened with a tightening torque of 3 7 Nm PFEIFFER VACUUM 7 CF F flange Applications for installing an CF F to an CF F flange are Stud screw with blind hole and Hexagon screw and clearance hole The following items are needed the particular set of mounting material and a copper seal Using asplinter shield or protective screen is optional Don t touch the copper seal with bare hands this may affect the sealings efficiency See that the sealing lip is not damaged PLEASE NOTE The components for installing to an CF F flange are to be ordered under the following numbers Hexagon screw and clearance hole Hexagon screw and clearance hole A CF F flange B Hexagon screw with washer and nut C Copper seal Connection nominal Designation Order number diameter DN 63 CF F Hexagon screw 8 with PF 505 002 T washer and nut 25 pieces Stud screw M8 with PF 507 002 T washer and nut 18 pieces Copper seal 10 pieces
30. mps TMH 071 TMU 071 2 1 Main Features Turbopumps TMH 071 TMU 071 with the TC 600 form a complete unit Voltage is supplied by the power unit see Accessories On delivery the pumps have been set up for operations in remote mode b Remote plug 8d should must be removed if PLEASE NOTE operations with DCU or HPU are required Turbomolecular Drag Pump TMH 071 TMU 071 High vacuum flange Fore vacuum flange Venting valve Rubber feet Electronic drive unit TC 600 d Remote plug coc 8 4 2 6 Cooling Enhanced convection cooling with cooling unit accessory air cooling accessory or water cooling accessory Integrated protective measures against excess temperatures The electronic drive unit TC 600 reduces the rotor rotation speed Bearings High vacuum side Wear free permanent magnetic bearing Fore vacuum side Oil circulatory lubricated ball bearing with ceramic balls 4 PFEIFFER amp VACUUM Ambient conditions The turbomolecular pump needs to be installed in compliance with the following ambient conditions Installation location protected against the weather rooms within buildings Temperature 5 C to 40 C Relative humidity of the air 80 at T lt 31 C up to max 50 at T 40 C Air pressure 77 kPa 106 kPa Installation altitude 2000 m max Pollution degree 2 Overvoltage category Connection v
31. n on the venting connection about one turn Venting with the Venting Valve TVF 005 accessories Venting release via the remote control see section 4 7 or via the serial interface with DCU HPU or PC see operating instructions Pumping Operations With The DCU Venting in two stages when the vacuum chamber should be vented as quickly as possible First stage venting with a pressure increase rate of 15 mbar s for 20 seconds Second stage venting with an optionally large venting valve The valve cross section for a venting rate of 15 mbar s must be compatible with the size of the vacuum chamber Where small vacuum chambers are involved the Pfeiffer Vacuum venting valve TVF 005 can be used for first stage venting Shut off water supply if installed 4 7 Shutting Down For Longer Periods If aggressive or hazardous gases are pumped there is a danger of personal injury resulting from coming into contact with process gases Before removing a turbopump from the system first WARNING Vent the turbopump with a neutral gas or dry air Ensure that there is no residual process gas in the system nor in the feeder lines If the turbopump is to be shut down for more than a year Remove turbopump from the system Change the lubricant reservoir see section 7 2 Lubricant TL 011 should not be used when there have been no operations for 3 years PLEASE NOTE
32. nally at 66 of its nominal rotation speed standby ON or at its nominal rotation speed standby OFF Rotation Speed Setting Mode Via Input PWM The supply of pulse width modulated signals PWM with a ground frequency of 100 Hz 20 with an amplitude of maximum 24 V and a key ratio of 25 7596 enables the rotation speed to be set the range 20 100 of the nominal rotation speed U 0 3 20 fond max 33V min 13V 100 7 33V 25 75 PWM T pwm 10ms 122096 fpwm 100Hz 1 20 If no signal is present the pump accelerates its final rotation speed A PWM adapter box for rotation speed setting operations for the turbopump is available as an option please see Accessories Switching Outputs The switching outputs 1 and 2 can be loaded with a maximum 24 V 50 mA per output The following functions are assigned to the switching outputs Switching output 1 Active high when the rotation speed switchpoint is attained The switchpoint for the turbopump is set at 8096 of the nominal rotation speed It can be used for example for a message pump ready to operate Switching output 2 Active low with a malfunction collective malfunction message 16 PFEIFFER VACUUM The connection of a relay is made between pin 10 mass and the respective switching output pin 8 or pin 9 see section 3 13 Connections Diagram Analog Output
33. ng On Switch on the turbopump with switch S1 on the power supply When air cooling is fitted the cooling fan is also switched on via the TC 600 Once the self test has been successfully completed on the TC 600 duration approximately 10 seconds turbopump and backing pump if connected begin to operate Rear panel TPS 51 ON OFF switch X1 Mains connection X2 Connection TC 600 Fuse F2 Fuse 4 3 Operations With The Remote Control Unit Remote control operations can be performed via the 15 pole D Sub connection with the designation REMOTE on the TC 600 refer to section 3 12 and 3 13 Inputs 2 6 are activated if they are connected with the 24 V on pin 1 active high please see section 3 13 Connections Diagram On delivery there is a bridge between Pin 1 Pin 2 Pin 3 and Pin 4 on the TC 600 mating plug Once operating voltage has been supplied and on successful completion of the self test on the TC 600 the turbopump and any possible connec ted backing pump begin to operate CAUTION Venting Release Optional Automatic venting Venting Switch off Mains power failure 1 frequency the pumping station 750 Hz venting valve opens venting valve opens corresponds to 5096 for 150 ms at4 s for 150 ms at 4 s of the final rotation intervals intervals speed lt 500 Hz venting valve opens venting valve opens as for 3600 s wo
34. ng The Lubricant Reservoir 21 Standard 21 Y Version Mounting In Any Orientation 22 8 Servie uoo reo RE SE edades 23 9 Technical Data 24 9 1 Dimensions Diagram 25 10 Spare Parts 26 11 Accessories err ee 27 Declaration of Contamination 28 Manufacturer s Declaration last page Please note Current operating instructions are available via www pfeiffer vacuum net For information about certifications if applicable please see the signet on the pump or www tuvdotcom com r TUVdotCOM ID 0000021320 1 Safety Instructions t Read and follow all instructions in this manual Inform yourself regarding Hazards which can be caused by the pump Hazards which can be caused by your system Hazards which can be caused by the media being pumped t Avoid exposing any part of the body to vacuum t Observe the safety and accident prevention regulations t Regularly check that all accident prevention measures are being complied with t Do not operate the turbopump with open high vacuum flange t Do not carry out any unauthorised conversions or alterations to the turbopump with TC 600 t When returning the turbopump observe the shipping instructions t The turbopump must be anchored
35. oirs and Porex rods must be disposed of in accordance with local regulations Safety instructions data sheet on request or via internet under www pfeiffer vacuum net Switch off the turbopump vent to atmospheric pressure see section 4 6 and allow to cool as necessary f necessary remove the turbopump from the system Unscrew rubber feet 6 from the underside of the pump Unscrew locking cover 90 on the underside of the pump with installation tool E order number N 5709 103 90 Lever out the lubricant reservoir 92 with the help of two screwdrivers 22 PFEIFFER amp VACUUM Remove the Porex rods 89 eight pieces with tweezers Clean off any dirt on the pump and locking cover with a clean fluff free cloth Insert new Porex rods eight pieces with tweezers Insert new lubricant reservoir 92 up to the O ring 93 in the pump The lubricant reservoir is already filled with OM Lubricant TL 011 do not add additional A lubricant Screw in locking cover 90 The lubricant reservoir is brought into the correct axial position with the locking cover Screw the rubber feet back in 8 Service Pfeiffer Vacuum offers first class service e Lubricant and bearing exchange on the spot by Pfeiffer Vacuum field service e Maintenance repairs in the nearby service center or servi ce point e Fastreplacement with exchange products in mint condition e Adv
36. oltage 24 VDC 5 Proper Use The Turbomolecular Pumps TMH 071 TMU 071 may only be used for the purpose of generating vacuum The turbopumps may only be used to pump those media against which they are chemically resistant For other media the operator is required to qualify the pumps for the processes involved If the process produces dust the maintenance intervals must be specified accordingly and sealing gas must be used The turbopump must be connected to a backing pump in accordance with Section 3 3 Only Pfeiffer Vacuum power units may be used to operate the TC 600 The use of other power units requires the prior agreement of the manufacturer and equalization with the valid specification The pumps may only be operated providing the ambient conditions in compliance with Protection Type IP 30 are observed Sealing gas must be used to ensure rotor cooling when operate the pump with 5096 of the maximum gas load Improper Use The following is regarded inter alia as improper The pumping of explosive or corrosive gases Operating the pumps in explosive areas The pumping of gases and vapours which attack the mate rials of the pumps The pumping of radioactive media The pumping of corrosive gases without sealing gas The pumping of condensating vapours Operation involving impermissibly high levels of gas loads Operation with improper gas modes Operation involving too high levels of heat radiation power see Se
37. ons see section dimensions Water cooling unit Air cooling unit only valid for ambient temperatures from 5 to 40 C Plug control lead into the connection FAN of the TC 600 on the turbopump PFEIFFER VACUUM 9 3 5 Connecting The Venting Valve The venting valve TVF 005 accessory provides automatic venting in the event of a power failure and switching off Fitting the venting valve Unscrew the venting screw from the venting connection of the turbopump Screw in the venting valve 42 with seal ring Electrical connection Plug control lead 42a into the connection VENT of the TC 600 on the turbopump The venting mode of the venting valve can be selected via DCU HPU or PC via serial interface RS 485 Connecting the venting valve 8 Electronic Drive Unit TC 600 42 Venting valve TVF 005 42a Control lead venting valve TC 600 42b Plug VENT C40 948 42a The maximum pressure at the venting valve is CAUTION 1 5 bar absolute A 3 6 Connecting The Casing Heating Unit The attainment of final pressures is accelerated when turbo pumps and vacuum chambers are baked out Baking out is only practical on pumps with stainless steel casings TMU pumps On account of their aluminium casings the tempera tures attainable on TM
38. optional sealing gas valve off optional sealing gas valve on 5 reset by supplying a pulse T lt 2s with an amplitude of 24V a malfunction acknowledgement can be processed 6 standby off standby on pump is accelerated to 66 of its nominal rotation speed 7 rotation speed setting mode off the rotation speed can be changed by feeding a PWM signal to this pin or via Serial Interface RS 485 see Section 4 7 Rotation Speed Setting Mode 8 Output low Output high rotation speed switchpoint not attained rotation speed switchpoint attained output can be loaded with 24 V 50 mA 9 Output low Output high Collective malfunction message malfunction free operations output can be loaded with 24 V 50 mA 10 Mass ground 11 Contact contact 1 between pin 11 and pin 12 closed Output 1 Switchpoint attained if the turbopump is above the switchpoint 12 Contact Output 1 Switchpoint attained 13 Contact Output 2 Collective malfunction message contact 1 between pin 13 and pin 14 is closed on failure free operation 14 Contact Output 2 Collective malfunction message 15 Analog output rotation speed proportional output voltage 0 10 VDC 0 100 fen g load R gt 10 optional current power 1 The option must be set via the Serial Interface RS 485 see Operating Instructions PM 0547 BN Pumping Operating with DCU 2 The following technical data is applicable for the contacts Umax 50 VDC Imax PFEIFFERE VACUUM 13 3 13
39. or the vertex of the power characteristic line please refer to section Technical Data Maximum power is applied when the pump starts in order to limit the time required Once the set rotation speed is attained switching to the selected power characteristic line is automatic If the gas dependent maximum power is exceeded the rotation speed is reduced until equilibrium between the permissible power and gas fric tion is attained The power limitation serves to protect the pump against thermal overloading In order to avoid rotation speed fluctuations it is recommended to set in rotation speed setting mode the equilibrium frequency or a somewhat lower frequency 4 5 Operations With DCU 001 DCU 100 or HPU 001 Where the turbopump is operated via Pfeiffer Vacuum display and operating units the remo te plug on the TC 600 must be disconnected PLEASE NOTE Operations with the DCU or HPU 001 should be carried out in accordance with the relevant operating instructions see accessories 4 6 Switching Off And Venting Before coming to rest after switching off the turbopump must be vented in order to prevent contamination Close the fore vacuum line Switch off the backing pump or close the fore vacuum valve if connected w Switch off the turbopump with switch S1 on the power supply Venting There are three possibilities to vent turbopump Manual venting Open the venting screw on delivery screwed i
40. rentiated malfunction and warning signals are only possible with the use of a DCU HPU or PC PLEASE NOTE 18 PFEIFFERE VACUUM 5 2 Turbopump Temperature Management Where impermissible motor temperatures are involved or the temperature of the casing is too high the motor current is reduced This can lead to dipping below the set rotation speed switch point and results in the turbomolecular pump being switched off LED on the TC 600 glows red Collective malfunction 6 What To Do In Case Of Breakdowns Problem Possible Causes Remedy Pump doesn t start e Power supply interrupted Check fuse in the power pack unit None of the integrated LEDs Check plug contacts on the mains glow on the TC 600 power supply Incorrect operations voltage supplied No supply of operations voltage Defect TC 600 Check power supply feeder line Check voltage on the power supply 24 V DC at connection X2 Supply correct operations voltage Check plug contacts on the power supply Inform Pfeiffer Vacuum Service of need for repair Pump doesn t start green LED onthe TC 600 is blinking Pump doesn t attain nominal rotation speed within the set run up time Pump cuts out during operations Pins 1 3 and 1 4 on the remote plug not connected Reduction in the voltage in the cable Fore vacuum pressure too high Leak or too much gas Rotor sluggish caused by defective bearing TC run up time too short Thermal overloa
41. rks setting long as sufficient energy is generated by the turbopump 1 When mains power is restored the venting procedure is interrupted Venting blocked Venting does not take place Other venting modes Other venting modes can be selected via the serial interface RS 485 with DCU HPU or PC Motor Turbopump When the pumping station is switched on and once the self test has been successfully completed duration approx 10 sec the turbopump is set in operation During operations the turbopump can be switched on and off while the pumping station is switched on Thereby the turbopump will not be vented Pumping Station Any connected pumping station components are started up e g backing pump venting valve air cooling and with simul taneous activation of the input motor turbopump the turbo pump is set in operation once the self test has been success fully completed duration approx 10 sec PFEIFFER VACUUM 15 Heating Reset Heating optional Once the rotation speed switchpoint is attained the heating unit is switched on when the rotation speed switchpoint is fallen below the heating unit is switched off Reset The heating input has two functions please see section 3 12 point 5 Reset Sealing gas valve optinal Optionally a valve e g TVF 005 accessory for sealing gas inlet can be contolled via this input More information on request Standby The pump can be operated optio
42. sed exclusively Otherwise the turbomolecular Claw grip ISO K with ISO F pump may twist or tear off The clamps bolts nuts and A 180 centering rings special designs from Pfeiffer Vacuum B Claw grip The minimum strength of 170 N mm of the flange material C Centering ring coated needs to be observed D Splinter shield E Protective screen Installation is done as follows ISO K flange with ISO K flange For installing the following components are available redes i B nominal Designation Order number See that the sealing surface is not damaged Flange the turbopump according to the drawing and the DN 63 150 Centering ring coated PM 016 360 T component parts in your set of mounting material incl 4 bracket screws t Use 4 claw grips Centering ring coated with PM 016 361 T Tighten the claw grips crosswise in three steps splinter shield Tightening torque 16 1 Nm incl 4 bracket screws Centering ring coated with PM 016 362 T IS0 KF flange with IS0 KF flange protective screen For installing the following components are available incl 4 bracket screws Connection nominal Designation Order number Bracket screw ISO K with ISO K diameter A ISO K flange DN 40 ISO KF Clamping ring for metal seal PF 105 040 T B Bracket screw C Centering ring coated Centering ring PF 110 140 T P Splinter shie
43. sposed of in accordance with the respective regulations Safety instructions data sheet on request or via internet under www pfeiffer vacuum net WARNING Switch off the turbopump vent to atmospheric pressure see section 4 6 and allow to cool as necessary f necessary remove the turbopump from the system Unscrew rubber feet 6 from the underside of the pump Unscrew locking cover 90 on the underside of the pump with installation tool E order number N 5709 103 90 Lever out the lubricant reservoir 92 with the help of two screwdrivers Clean off any dirt on the pump and locking cover with a clean fluff free cloth Insert new lubricant reservoir 92 up to the O ring 93 the pump The lubricant reservoir is already filled with CAUTION Lubricant TL 011 do not add additional lubricant Screw in locking cover 90 The lubricant reservoir is brought into the correct axial position with the locking cover Screw the rubber feet back in PFEIFFER VACUUM 21 Y Version Mounting In Any Orientation CAUTION A WARNING A The following instructions are only valid for turbopump types with the properties abbre veation Y on the rating plate Both the lubricant reservoir 92 and the Porex rods 89 can contain toxic substances from the media being pumped Lubricant reserv
44. ughputs with reduced rotation speed 3 Until ambient temperature 40 C 4 Rotation speed of pump may drop below the nominal rotation speed 24 PFEIFFER VACUUM 5 For gas characteristic lines please refer to section 4 4 6 In accordance with German Industrial Standard DIN 28428 7 At maximum gas throughput 8 Protection class IP 54 is afforded for the TC 600 by retro fitting a cover plate Accessory 9 1 Dimensions Diagram TMH 071 P TMU 071 P Buljooy OSI 9 3 OSI Or 5 50 9 NG 9 99 Vio 31 05191 og y 89 01
45. unauthorised conversions or alterations to the turbopump The operator must ensure that the TC 600 is integrated into an emergency safety circuit The supply voltage of the TC 600 must be interrupted when releasing the emergency safety condition For special requirements please contact Pfeiffer Vacuum WARNING In case the rotor blocks suddenly torque levels WARNING up to 820 Nm can occur which need to be ab sorbed by the system and the high vacuum flange The maximum permissible rotor temperature of the pump is 80 C If the vacuum chamber or parts in the vacuum chamber are heated must be fitted if necessary suitable shielding in the vacuum chamber before the turbopump constructional suggestions available on request Thetemperature ofthe high vacuum flange may not exeed 120 C Only remove the blank flange from the high and fore vacu um side immediately before connection Turbopumps TMH 071 TMU 071 the lubricant reser voir is already fitted and filled Where magnetic fields of 3 mT are involved suitable shielding must be provided available on request Ifthe pump is baked out the heating sleeve and the body of the pump must be insulated to prevent burns from accidental contact Either air or water cooling is necessary for operating the pump Where operations with convection cooling are in volved a cooling unit must be used please see Accesso ries
46. y return the pump unit in a suitable and sturdy transport container Exchange units For all exchange units the standard operating parameters are always pre set If your application requires different parame ters please modify accordingly Service orders All service orders are carried out exclusively according to our repair conditions for vacuum units and components PFEIFFER amp VACUUM 23 9 Technical Data Feature Unit TMH 071 P TMH 071 P TMU 071 P TMH 071 Y P TMH 071 Y P TMU 071 YP Connection nominal diameter Inlet DN 40 ISO KF DN 63 ISO K DN 63 CF F Outlet DN 16 ISO KF G 1 4 DN 16 ISO KF G 1 4 DN 16 ISO KF G 1 4 Venting connection G 1 8 G 1 8 G 1 8 Nominal rotation speed Hz 1 min 1500 90 000 1500 90 000 1500 90 000 Standby rotation speed Hz 1 min 1000 60 000 1000 60 000 1000 60 000 Start up time min 2 5 2 5 2 5 Noise level dB A 45 45 lt 45 Final pressure backing pump mbar lt 10 lt 10 lt 10 Integral leak rate mbar I s lt 2 108 lt 2 108 2 108 Maximum permissible rotor temperature C 80 80 80 Permissible heat radiation power W 4 4 4 Volume flow rate for Nitrogen l s 33 59 59 Helium He l s 39 50 50 Hydrogen 1 5 32 42 42 Compression ratio for Nitrogen 101 101 10 Helium He 6 106 6 108 6 106 Hydrogen gt 105 gt 105 gt 105 Maximum fore vacuum pressure for Nitrogen N5 mbar 18 18 18 Helium He mbar 18 18 1
47. yes to section 5 no O go to section 4 4 Process related contamination of equipment toxic yesO nog corrosive yesO microbiological hazard explosive yesO no O radioactive 1 no O other harmful substances yesO evidence of decontamination We will not accept delivery of any equipment that has been radioactively or microbiologically contaminated without written Please list all substances gases and by products which may have come into contact with the equipment Tradename Chemical name Danger class Precautions associated Action if spillage or human Product name Symbol with substance contact Manufacturer 1 2 3 4 5 5 Legally Binding Declaration hereby declare that the information supplied on this form is complete and accurate The despatch of equipment will be in accordance with the appropriate regulations covering Packaging Transportation and Labelling of Dangerous Substances Name of Organisation Address Post code Tel Fax Telex Name Job title Date Company stamp Legally binding signature 48 prEIFFERE VACUUM Berliner Stra e 43 35614 Asslar Germany N 021 Managing Director Declaration of conformity according to the EC directive e Machinery 2006 42 EC Annex
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