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FTS CCI User Guide.book

1. s sssoosss0o0 0 7 2 112 3298 01 Step Height Calibration Standard 5MM gis ces anbras kay aa dete souin syek yan 7 2 Description awa asa enan ooo ape a a a 7 2 112 3499 01 Step Height Calibration Standard 50mm with traceable calibration 7 2 Description bas ka l e n ba Sed e ooo a ia 7 2 112 3297 01 Calibration Flat 7 3 DOS CHIU OV Bis as dan e lal enviar indented kt ale 7 3 Specification za pik ss pan passe kak ei pasan 7 3 112 2902 01 HP Deskjet Printer 7 3 Descriptio icine Gaus Morten n bod eie 7 3 Important a opa da va iii peni 7 3 112 2696 01 LaserJet Printer 7 4 112 3217 01 HP Business Inkjet Printer 2000 sait pose a teye pen ae eat 7 4 112 3290 01 Objective lens eee 7 4 112 3291 01 Objective lens eee 7 4 112 3292 01 Objectivelens ss scence 7 4 112 3293 01 Objective lens eee 7 5 112 3294 01 Objective lens eee 7 5 Issue 5 2 September 2005 Page xi TS CCI 3D Non Contact Surface Profiler Systems Page xii Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Chapter 1 Safety Important Safety Information Before operating this instrument the operator should be familiar with this handbook and the contents of the On Line Help facility within the Software and understand the operation of the instru ment Note Please refer to the Installation CD for the latest version of the Use
2. Objective Field of Working Lateral sampling Maximum component Lens View mm Distance nm resolution um slope 10x 1 80x 7 4 1 76 3 1 80 20x 0 90 x 4 7 0 88 10 0 90 50x 0 36x 3 4 0 35 12 0 36 Issue 5 2 September 2005 Page 2 5 TS CCI 3D Non Contact Surface Profiler Systems Page 2 6 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Chapter 3 Installation Instructions for the Talysurf CCI instruments Introduction Talysurf CCI instruments are initially installed by a representative of Taylor Hobson Limited Any subsequent moving and re instal lation should also be carried out by a representative of Taylor Hob son or a suitably trained person This must be done with care for the instrument and consideration for its applications and location Having completed the system installation all details of the basic operation of the CCI Software are obtained by reference to this handbook or the software On Line Help facility In case of any queries or problems Taylor Hobson Limited can be contacted at the addresses shown at the back of this handbook Note Please retain this handbook for future reference Unpacking the Instrument Installation is carried out by a service engineer or a representative of Taylor Hobson Limited Caution e Please DO NOT unpack your instrument or any associated products or accessories unless with a prior agreement with a service eng
3. SSS i m u suren KH L ver soz peog OM IT uj suie f 1 was4s I i Li 1 9o ng a reuondo m 2201592 JOU Lpueog owas lur suey ul suey nt wayshs WRAS 8BLSL GOSH Lonpouvon dos ANSO00 HZINOJ euogdo JOULON z opuoyi aan B0L S9Z 399989 WE yuwe AQE yuwe LO EZSL 605H uj swe waysAs 1 pris ueg S 90 105x VUN YORNGUISIG JaMOd 199 LA i LO LZbL BOSM f eLa EJI a x8 IJ 5 40 22 6054 FOLIE BOSS JW OLO 39L W93 L0 8251 605Xi swen 4W S000 HZLNG3 OO zistao5n mqH O n pesi vou aber L aie ae 1Zd A Z yun aoepayy s9033 199 A TI u il A a l t 1 L S kon TODESI BOSY DR J 1 kas IN gaannaaaa F BOG Wou L Ze S92 ams Ee i 0 198 Ops Ex anne r V twop q sun v rn cums pued wos S o sages to 201 592 Jayadwe ones 17d T 7 VOFZZST 605M J jevondo JeBueyn ze01 592 Jeu JWSODO HZING 3 POU pasyojoy abes AX peay WGBWAUNSBSN EGrE ZIL esaweg La Issue 5 2 September 2005 Page 3 24 TS CCI 3D Non Contact Surface Profiler Systems CCI 2000 5 Interconnection diagram Interconnection diagram Figure 3 GulYuDJ jUeuunissu juewoebuoly awol4 NMOU dn TUSIA 330 NO SOWNY OAUAS SGUIYSS UMS OUD JUO 4 660 1 S9Z JollIdWD ONSS 17d ul SUIDW WSJS S ZO LGSE ZLL ges gon J ZZNq Ozald pese kann zezsy ipuoydo Jemod
4. File Slider Slider Batc User Oper si si ALR ALR Name Type h ID Info ator RMS Height RMS Height C HD 00 00 Typ1 A034 U1 2 87 1 29E 6 31E 2 1E D001 E 06 05 06 05 SUR Lenses Objective Field of View mm Working Lateral sampling Maximum Lens Distance mm resolution um component slope 10x 1 26 x 1 26 7 4 1 2 8 20x 0 63 x 0 63 4 7 0 62 14 5 50x 0 25 x 0 25 3 4 0 25 22 Power lead The power lead K509 1527 on the interconnection diagram on p 3 24 of the User Guide is replaced by K509 1539 Issue 5 2 September 2005 Page 4 67 TS CCI 3D Non Contact Surface Profiler Systems Page 4 68 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Chapter 5 Maintenance Procedures and Service Support Cleaning and Routine maintenance General Cleaning Caution Cleaning of the instrument using inappropriate cleaning mate rials may lead to damage being caused to the instrument The cleaning of the instrument is to be limited to cleaning of the instrument covers and the tabletop only 1 The covers should be cleaned using a soft cloth moistened with water or if required a mild detergent solution No cleaning sol vents or abrasive cleaners of any kind should be used on the covers as these may damage the surface of the covers 2 The tabletop can be cleaned with a soft cloth moistened with Isopropyl Alcohol if required Lens Cleaning Caution UNDER NO CIRCUMSTANCES are you
5. AlignmentRequired False Number of Alignment Points 2 Comments Section Header for measurement positions Distance between X positions mm 0 and above Distance between Y positions mm 0 and above Number of X positions 1 or more Number of Y positions 1 or more Set to True to measure all points in a grid False is not yet supported Section Header for alignment information True if alignment points are to be used Number of alignment points to be used 0 1 X1 Y1 or 2 X1 Y1 and X2 Y2 Issue 5 2 September 2005 Page 4 59 TS CCI 3D Non Contact Surface Profiler Systems X1 Index 1 Y1 Index 1 X2 Index 2 Y2 Index 1 AutoCorrection XYCorrectionRequired False ZCorrectionRequired False X Index of first alignment point typically 1 1 to lt X Total gt Y Index of first alignment point typically 1 1 to Y Total X Index of second alignment point typically X Total 1 to X Total 0 if not required Y2 must also be 0 Y Index of second alignment point typically Y Total 1 to Y Total 0 if not required X2 must also be 0 Section Header for auto correction tracking information True if tracking in XY required Only valid for HDD measurements and uses HDD reference position to align XY for next measurement True if tracking in Z required uses mean surface height and adjusts the piezo position for the next measurement Page 4 60
6. Move to position moves the X Y or Z axis to the position entered into the appropriate box when GO is clicked Step Nudge move Moves the X Y or Z axis in steps as defined by the value entered into the box Light Unit Controls Light level control joni SG Z Move moves Move to Position the Z axis in the direction A specified at Q low speed o Step Nudge Move X amp Y Axes Axis om 10 000mm 10 000mm Z Bottom End Stop Light filter selector The light level controls are used to adjust the light level that illumi nates the component being measured so that an optimum level of illumination is pro duced at the camera The light filter selector has four settings I This is the broadest bandwidth filter used for normal measure ments ie x1 speed Il M and IV These settings represent the other filters that have progressively narrower bandwidths The narrower bandwidths provided are used for fringe findings and fast measurements Page 4 4 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Description of User Interface User Interface Introduction The complete User Interface UI for the Talysurf CCI system con sists of two main applications e The Talysurf CCI Application which controls the measure ment and collection of measured data from the instrument e The TalyMap application which performs the actual a
7. tion value against the current lens type e The CCI Application applies the Z Form correction to all mea surements Issue 5 2 September 2005 Page 4 33 TS CCI 3D Non Contact Surface Profiler Systems Z Datum Correction Z Form from a single measure ment Artefact As for Advanced Z Datum Correction Sequence Similar to that for multiple measurement Z Datum Correction except only one measurement is taken Application As for Advanced Z Datum Correction Note Only a single Z datum correction surface is to be maintained which is set either via the normal or advanced datum correction methods Calibration Artefacts Available calibration artefacts for the instrument are the Step Height Calibration Standard see figure 4 1 and 4 2 the Lateral Calibration Standard see figure 4 3 and the Calibration flat see figure 4 4 The Step Height Calibration Standard is used to cali brate the Z gain The Lateral Calibration Standard consists of a number of concentric circles used to calibrate the XY gain The calibration artefacts available as accessories for the instru ment are Step height calibration standard Sum with traceable calibra tion e Step height calibration standard 50um with traceable calibra tion e Lateral calibration standard e Lateral calibration standard with traceable calibration e Precision flat Page 4 34 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems e P
8. 3 a a o 13X90S SNIVW JNINNUSNI 2 Si00L si PSPDO An A w e USUM JUBISM xoddy 100 18d BAGG XON 8 Osee ZLL Sotz Jequnu pod HL 146jem xoIddp sep pepuswwoos HoWNnysy 006 oes SFILJINITIIN NI SNOISNFWIG TV SIXV TWOILNSA JHL ANOSY OFYOUJIN 39 NYO NOUYUNADI3NOI SIHL LON INIWNUISNI IDO JHL 404 NYId 20074 G30NINNOD3UV SI SIHL o s8 LUNUWJIUIW OOS sen Note The floor plan is a recommendation only and allows for easy maintenance access to the rear of the instrument Issue 5 2 September 2005 Page 3 4 TS CCI 3D Non Contact Surface Profiler Systems Recommended positioning of the components Figure 3 3 System components in their recommended location Clean area All forms of airborne particle are detrimental to the performance of the instrument but particularly smoke dust and airborne oil par ticles Ideally the instrument should be located in a clean environ ment Draughts Draughts and airborne vibration should be avoided Avoid placing the instrument in draughts or directly under or next to air condi tioning vents Ideally an Environmental enclosure should be used to minimise the airflow around the component measurement area Issue 5 2 September 2005 Page 3 5 TS CCI 3D Non Contact Surface Profiler Systems Temperature Gradients Avoid siting the instrument in areas that have a very rapid temper ature gradient and avoid siting near windows or skylights w
9. Both Admin and Service Users can if required change their pass word see How Do I Change My Password page 4 20 Tools The Tools menu enables you to select the units of measur ment The default setting for the units of measurement is the met ric system It also allows you to select Macros where you can run and optionally create and edit macros to control the measurement For automated systems the homing prompt at start up can be turned on If a licence exists for HDD Slider Measurement this menu also includes a button for launching an application to create and edit slider definition files See section HDD Slider Measurement on page 4 61 Macros are written in Visual Basic for NET using Microsoft s Visual Studio for Applications VSA o Page 4 20 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems An example measurement macro 1s provided VSA includes online help for writing Visual Basic macros and macros can only be created edited by an Admin user Help Access to On line help and to licensing information Issue 5 2 September 2005 Page 4 21 TS CCI 3D Non Contact Surface Profiler Systems How Do I Start The Instrument Switch on the following items e Power Distribution unit 1 e Computer and monitor 2 e Light source 3 Run the User Interface UI by running the Talysurf CCI applica tion It will open in the Configuration Tab The instrument is ready for use How Do I Ch
10. Set the mode scanning speed and filter back to the required values e Turn off the focus aids and ensure there are no saturated yel low areas Levelling a component The interference fringes that you see on the video screen of the software are a certain vertical distance apart Therefore the more fringes you see or the closer the fringes are together the less level the component is If you spend a little time levelling a component well the measure ment time can be reduced significantly as the instrument does not have to scan as far as it would with an unlevelled component The end result is also slightly better although it should be noted that the difference created by a shallow slope is very slight If necessary use the focussing aids on the Fringe Setup Tab to make the fringes more obvious Rotating a knob on the tip tilt stage clockwise causes the fringes to rotate anticlockwise and vice versa To level the component you need to rotate the right hand knob on the tip tilt stage until the fringes spread out and cross the screen at 45 While doing this use the Z adjust to keep the fringes on the Page 4 48 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems screen Then rotate the left hand knob causing the fringes to spread out further until a single fringe can be seen on the screen EN a Sloped One knob adjusted Almost level Level Pre Analysis of Results Assessment of missing Data
11. e The electrical supply to the instrument should be CON NECTED VIA A SEPARATE MAINS ISOLATING SWITCH and that prior to connection this switch is set to the OFF position Failure to do so could expose you to severe injury or even death e The mains lead MUST BE DISCONNECTED before mak ing any system interconnections or attempting to change a fuse Failure to do so could result in severe injury or even death Page 1 2 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems e The CCI is a heavy item weighing 210kg depending upon model Exercise extreme caution when moving the instru ment Failure to do so could result in severe injury or even death Ideally you should use wheels if provided a pallet truck or a fork lift to move the instrument Desktop ver sions have handles provided for lifting It is recommended that four people are used to move the base Screw in carry ing handles are provided for use with moving the base e DO NOT attempt to lift the column by the leadscrew or the handwheel if fitted Failure to lift the column in the correct manner could result in severe injury or even death e DO NOT under any circumstances leave a column stand ing in the vertical position if it has not been bolted into place Failure to secure the column could result in severe injury or even death Issue 5 2 September 2005 Page 1 3 TS CCI 3D Non Contact Surface Profiler Systems Cautions If it is requ
12. Bottom End Stop The Z axis has a bottom end stop which can be set You will typically need to set this just above the com ponent surface so that the Z axis cannot be driven down to the component where it would damage the instrument and the compo nent Move the Z axis down so that the lens is just above the com ponent surface and then select the Set Z Bottom End Stop at Current Position button When the end stop is set the red high lighting is removed and the status bar will display the Z Stop value To clear the Z Stop select the button Clear Z Bottom End Stop Additionally the Z Bottom end stop can be set to a pre Issue 5 2 September 2005 Page 4 17 TS CCI 3D Non Contact Surface Profiler Systems determined value using the button Set Z Bottom End Stop to value Toolbar G Calibrate button The Calibrate button initiates the instrument calibration process The calibration process uses a self descriptive wizard and requires calibration artefacts to be available during the process Only avail able to Admin Service users S users Diagnostics button The Diagnostics button ini tiates the instrument s diagnostic process to enable you to determine whether the instrument is currently func tioning correctly and to determine where the faults if any are located Only available to Admin Service Measure button The Measure button begins the measurement process Help button The Help button ta
13. Z 6x 0y Stage with 25 25 100mm 4 and 4 Range resp ectively e 112 3515 XX Motorised joystick only X Y Stage 110x75mm Range Manual Z 0x 0y Stage with 100mm 4 and 4 Range respectively Issue 5 2 September 2005 Page 3 11 TS CCI 3D Non Contact Surface Profiler Systems e 112 3516 XX Automatic X Y Z Stage 150x150x100mm Range Manual 0x 0y Stage with 4 and 4 Range respectively e 112 3524 XX Automatic X Y Z Stage 150x150mm Range Manual Z 0x 0y Stage with 100mm 4 and 4 Range respec tively e 112 3517 XX Automatic X Y Z Stage 250x200x100mm Range Manual 0x 0y Stage with 4 and 4 Range respectively Piezo options e 265 1031 100um Piezo amp Controller 100um Vertical Range for 5x 10x 20x amp 50x lens e 265 1073 100um Piezo amp Controller 100um Vertical Range for 2 5x lens e 265 1063 100um Piezo amp Dual Controller for use with 2 5x 5x 10x 20x amp 50x lens e 265 1079 400um Piezo Controller for use with 10x 20x amp 50x lens Page 3 12 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Accessories e 112 3560 XX Environmental Cabinet Calibration Setting Standards e 112 3323 XX Lateral Calibration Standard for all lenses e 112 3498 XX Lateral Calibration Standard with Traceable Calibration Certificate e 112 3298 XX Sum Step Height Calibration Standard with Traceable Calibration Certificate E FANE R
14. covers an area of 10mm the grid line pitch and line width is 10um wide amp 100um pitch for the 10x objective Sum wide amp 50um pitch for the 20x objective 2um wide 20um pitch for the 50x objective e Each grid patch has the corresponding objective magnification value and pitch value displayed below the patch in 2mm high lettering 112 3498 01 Lateral Calibration Standard with traceable calibration 112 3298 01 Step Height Calibration Standard Sum Description This standard is used to calibrate and verify the gain of Z direction data It consists of three steps of nominally Sum 112 3499 01 Step Height Calibration Standard 50um with traceable calibration Description This standard is used to calibrate and verify the gain of Z direction data It consists of three steps of nominally 50pm Page 7 2 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems 112 3297 01 Calibration Flat Description The mirror is used to remove through calibration any out of flatness of the system It is used to verify the flatness and linearity measuring performance of the system Specification nominally A 50 flatness 13nm 3A rms roughness 112 2902 01 HP Deskjet Printer Description The Hewlett Packard Deskjet 950C printer can be supplied as an optional accessory Results printouts are output to fit on A4 or Letter size paper Details of operation and specifica tion are provided in the manuf
15. en 4 4 Description of User Interface essere 4 5 User Interface Introduction u u cscrrre 4 5 Configuration screen serve ke mka be ase ena ko it 4 6 LenS sence DU SI SAA Y IN SSA PWE PANSE SKINNER 4 6 MOE IG dni pd m ak a asa e Be ke a a a 4 7 TLE a ET an a a bon bn ai 4 7 Scanning Speed I disi po vast bande Aaa mona donan 4 8 Special Options ch sis tier atic oo sade blak ob stay 4 8 Fringe set up SECTSS acres we sa fia kaa kle apts 10 Contrast reference onson 4 11 Gradient enhance ooon 4 11 Cross haik ok aaa A E ka an pan 4 11 RAN DE os ik d d ene at alee po aka vat ked anba 4 11 BOHOM across ses konte sab sol an kan stints 4 11 Estimated time akasan ak pin an eee te koka yan 4 11 Scan setting buttons urreerrrreeeeverooonsesonoooos 4 12 TWE SONNEN Sesi kwak di a de duka vista pla aa b a kai kaa 4 12 Light Level Setting woua beni siskssson 4 12 Measurement screen 4 ki odepa sky a kaa piano tan 4 13 Computation settings rreeeeeeveerrrreeeesoorossnone 4 13 SENESI ok eerie EER E EA doua 4 14 WI ENS M Eka te ve ai e ka e A eie 4 14 Measurement Type ccccccccccsssscccessesssceeseenns 4 15 Frame sequence oossoo 4 15 Issue 5 2 September 2005 Page v TS CCI 3D Non Contact Surface Profiler Systems Axis Control Screen sit evite ki kan keyi di kad e saa nas 4 16 Move To Position esozeua asse syen va tiyakesentve 4 16 Z MOVE ai ea ok ye ei banan 4 17 Step Nudge Move actos teens 4 17 Refresh Joys
16. etc Once the measurement is complete the Surface pane will show the result The shape of the surface is suggested by a bluescale image where lower areas appear darker than higher areas Any red spots on the image are missing data Missing data could be due to having the light level set too high try reducing the light level and re performing the measurement the missing data should be reduced see setting light levels informa tion on pages 4 37 Data Binning Data Binning refers to the process of averaging the data from adja cent pixels averaged to give one average pixel selected from the surrounding pixels To set the binning level you should select the appropriate resolu tion mode that is XY xyz or Z e The XY resolution mode gives the greatest lateral detail It looks at all 1024x1024 pixels of the camera individually Issue 5 2 September 2005 Page 4 49 TS CCI 3D Non Contact Surface Profiler Systems resulting in a longer calculation time This mode would for example be used when measuring a finely polished sample e The xyz mode applies 2x binning This means that a square of 2x2 pixels is averaged to create one bigger average pixel This results in better Z resolution but you loose out on some x y detail e The Z mode applies 4x binning a square of 4x4 pixels is combined into one This gives the best result in Z although more x y detail is lost Z mode would for example be use
17. is lost Z mode would for example be used for measuring step heights Zoom The zoom options available are x1 x2 and x4 Note The zoom function is a digital zoom with the following parameters x1 zoom gives a full XY Field of View FOV of 1024x1024 pixels Issue 5 2 September 2005 Page 4 7 TS CCI 3D Non Contact Surface Profiler Systems e x2zoom gives a reduced XY FOV of 512x512 pixels e x4 zoom gives a reduced XY FOV of 256x256 pixels There is also a zoom function in the TalyMap Analysis software refer to the TalyMap Operating Instructions or on line help When the x2 and x4 zoom is selected the area of interest can be moved by clicking and holding on the small blue square and drag ging to anew location Upon releasing the video will display at the new location Scanning Speed You are also able to select the scanning speed that you desire for the scan The options available are x1 x5 and x9 with x1 giving the highest Z accuracy result When the scan ning speed is changed a message is displayed informing you of the need to change the Hardware Light Filter see Light Levels page 4 37 to the correct setting Special Options The Special Options are selected by clicking on the Exclamation Mark button Special Options Data Output Mode F Low Noise Scan Type I Top Surface Post Threshold aX The Special options dialog offers the following functionality Page 4 8 Issue 5 2 Sep
18. left and top parameters are with respect to the reference point Note that the value is negative to the left of and above the reference point 2 Reference point definition A search is made from the top to locate the rough position of the magnetic area lower edge followed by a refined search at different angles until the horizontal reference line is found The X Y refer ence point is then found by moving up a distance of HorizFindOff set normal to the reference line and searching along a profile of length HorizFindLength until a defined landmark on the slider is found An example slider image with rectangular areas is provided in the following Figure Issue 5 2 September 2005 Page 4 65 TS CCI 3D Non Contact Surface Profiler Systems HorizFindO fiset HorizFindLength Eg 31 E g 100 Vertical Reference Line Slider Results File An example results file is shown below All values are in mm Normalis ation Region Eg Width 224 Height 35 Left 112 Tap 85 Reference Region Eg CoredFul 0 Width 224 Height 144 Left 112 Tap 8 For each step defined in the definition file there will be a corre sponding step height value and a roughness value RMS in the results file Page 4 66 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems There is one row of results for each slider
19. measurement is complete Show TalyMap button Click on this button to start the Taly Map program manually Making a Scan To make a scan click the go button in the Measurement Tab a new dialogue appears detailing progress and providing you with a Stop button You cannot move around the UI while a measurement is taking place The only button you can press is the red stop button If desired the component can be moved once the scan progress bar is complete Basic Analysis Once the measurement is complete the Surface pane will show the result The shape of the surface is suggested by a bluescale image where lower areas appear darker than higher areas Any red spots are missing data Issue 5 2 September 2005 Page 4 43 TS CCI 3D Non Contact Surface Profiler Systems The analysis of the results is performed using TalyMap Please refer to the TalyMap system for Operating Instructions To start the TalyMap program click on the Show TalyMap button Note After the surface has been displayed for a short while the live video pane is automatically redisplayed Calibration Note you should calibrate the instrument regularly and monitor the calibration constants to enable you to monitor the effects of the environment and time on the stability of the instrument and the measurements made See How Do I Calibrate the instrument page 4 23 Page 4 44 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Sy
20. of ownership which may be affixed thereto USE The Software is licensed as a single product it may not be installed on more than one computer at a time The TalyMap Software is protected by a security system tied to the hardware of the computer on which it is installed Once the soft ware is loaded on a computer a code the Activation Code must be requested from THL and entered into the computer to enable the functionality of the software THL will make the Activation Code available to you on condition you provide THL with proof of purchase of the Software if requested to do so by THL Page 4 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems In the event that the TalyMap Software is moved to another com puter or items of the hardware are altered such that the Activation Code is no longer valid a replacement Activation Code will be required THL will provide a replacement Activation Code against reasonable assurances from you that the Software has not been copied in violation of this Agreement UPDATES If you purchased this Software as an upgrade it constitutes a sin gle product together with the product that you upgraded and may not be used to increase the total number of licensed copies of the Software You may use the upgraded product only in accordance with this License Agreement and you may not transfer this Soft ware or the product you upgraded unless they are transferred together as a sin
21. only be modified in writing signed by you and an authorised officer of THL If any provision of this License Agreement is found void or unenforceable the remainder will remain valid and enforceable according to its terms If any remedy provided is determined to have failed for its essential pur pose all limitations of liability and exclusions of damages set forth in the Limited Warranty shall remain in effect THIRD PARTIES For the avoidance of doubt nothing in this Agreement shall confer on any third party any benefit or right to enforce this Agreement ENTIRE AGREEMENT THL shall not be liable to you for loss arising from or in connec tion with any representations agreements statements or undertak ings made prior to this License Agreement APPLICABLE LAW This License Agreement shall be interpreted in accordance with the laws of England and you hereby submit to the exclusive juris diction of the English Courts Issue 5 2 September 2005 Page 7 TS CCI 3D Non Contact Surface Profiler Systems TAYLOR HOBSON LID CUSTOMER CONTACTS If you have any questions concerning these terms and conditions or if you would like to contact Taylor Hobson for any other reason please check for your local contact on our website at www taylor hobson com or write to the company at Taylor Hobson Ltd PO Box 36 2 New Star Road Leicester LE4 9JQ United Kingdom Tel 44 0 116 276 3771 Page 8 Issue 5 2 September 2005 TS CCI 3D Non Cont
22. range by dragging the slider bar with the mouse and observing the fringes as they appear on the live video screen By clicking on the set top and set bottom buttons the scan range can be set The top point is set to be just above where the top fringe appears while the bottom point is set to be just below where the bottom fringe appears These points are stored in the soft ware The screen also gives you the capacity to set a pointer to the mid dle of the piezo scan range The value displayed in the window below the slider can be changed by you allowing an alternative point on the piezo scan range to be displayed in the video screen Page 4 10 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems There are a number of Image focussing options available to you through the Fringe set up screen Contrast reference Selecting Contrast reference makes it easier for you to pick out surface detail It also produces a ghost image that you can use to line up successive components when you require to measure the same point on a series of identical components Gradient enhance Gradient enhance is useful to help you to pick out edges Cross hair Turn on a cross hair cursor The following scan options are also available through the Fringe set up screen Range This window defines the range of the scan as defined by the top and bottom limit markers This figure can be changed by you Bottom
23. the user with a summary of the measurement settings If you have an auto mated system the axes positions and Z stop are displayed Con figuration screen Xx Pp Hitge Saip Moeanitmanoon The opening screen is the configuration screen and is also accessed through the configuration tab It provides you with a number of user options for configuring the camera and the scan These include Field of view options such as Lens The options available under this selection are Page 4 6 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Note The lens installed must match the setting on the Configura tion screen 2 5x Field of view 7 0mm x 7 0mm 5x Field of view 3 6mm x 3 6mm 10x Field of view 1 8mm x 1 8mm 20x Field of view 0 9mm x 0 9mm 50x Field of view 0 36mm x 0 36mm Mode The mode options available are XY Mode This mode gives the greatest lateral detail It looks at all 1024x1024 pixels of the camera individually resulting in a longer calculation time This mode would for example be used where fine detail is required xyz mode This mode applies 2x binning This means that a square of 2x2 pixels is combined to create one bigger average pixel This results in better Z resolution but you loose out on some x y detail Z Mode This mode applies 4x binning a square of 4x4 pix els is combined into one This gives the best result in Z although more x y detail
24. the user is prompted to optionally home the axes This will set the axes to pre defined positions by moving each axis to its end stop as described on the homing dialog This homing prompt can be turned off from the dialog It is turned on again from the menu Tools gt Options Move To Position Page 4 16 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems e Specify a position for one or more of the axes and select Go to start the move Select the home button to move all axes to their home posi tions Z Move Select and hold the arrowed button to move the Z axis at a slow speed in the direction of the arrow This speed is suitable for focussing and finding fringes Step Nudge Move Enter a step increment for X Y or for Z and then press the appropriate button to move the X Y or Z axis in the required direction A single press of the button will move the axis the increment specified If you hold the button then the axis will continually increment until the button is released Refresh Joystick This button can be used to re enable the joy stick Load Component Select this button to start a load component sequence A dialog is displayed where one or more axes positions can be entered Select Go to start moving the axes to the speci fied positions When the axes have stopped moving you can load your next component Select OK when prompted to return the axes back to their original positions Z
25. to attempt to clean any of the lenses with anything other than lens cleaning tissue eg Whatman lens cleaning tissues cat no 2105841 Also use either Isopropyl alcohol or Ethanol to moisten the tissue DO NOT use Methylated Spirit Acetone Water or any Aerosol cleaner Issue 5 2 September 2005 Page 5 1 TS CCI 3D Non Contact Surface Profiler Systems PC Anywhere The PC has PC Anywhere software installed This is for use by the Service Engineers for remote fault diagnostics of the system If the Service Department need to use this facility you will need to connect the computer to the telephone line using the cable sup plied and then run PC Anywhere Instructions will be supplied from the Service Engineer as to what other actions you will need to take No attempt should be made by the User to change any of the settings associated with this software Service support and Spares If you should need to contact the Taylor Hobson Service depart ment please use the following contact numbers e Telephone 44 116 2463135 e Fax 44 116 2460325 e e mail service taylor hobson com Spares The following is a list of spares that you should maintain e 112 3348 01 Projector Lamp For Illuminator e You should maintain a set of replacement fuses for the instru ment and its associated equipment Not supplied by Taylor Hobson Page 5 2 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Chapter 6 F
26. zoom to the required field of view An example TalyMap template is available named ZoomFor2 5xLens mnt and this can be specified in the UI s Measurement tab Page 4 56 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Patern measurement Pattern Control The pattern is controlled via a pattern file described later which includes X Pitch Y pitch X measurements Y measurement The user may select which pattern file to use via a dialog shown below at the start of the pattern measurement The selected file will be checked to ensure it is valid and any errors reported Pattern Measurement Pattern Definition File PatternExample txt HM CIS Alignment information consisting of up to 2 points defined in grid relative co ordinates is also stored in this file Alignment point indices are based on an index of 1 instead of standard zero based index Automatic positional correction tracking is available for X Y amp Z axes and can be turned on or off via the X YCorrectionRequired and ZCorrectionRequired settings in the definition file An example file is available PatternExample txt in the Applica tion s installation folder Issue 5 2 September 2005 Page 4 57 TS CCI 3D Non Contact Surface Profiler Systems Pattern Execution During pattern execution live video is displayed no surface images Alignment dialog displayed if necessary asking the user to move to co
27. 25 Calibration VY Pes sik isnvexnternanieentotemicnnaedts 4 25 Calibration Wizard dcsceciseces esterases ncenatecarinenannlts 4 25 XY Calibration X and Y Gains 4 27 LAE NEN SRR eT eRe bi at nee ar ape pan 4 27 SCOUCNCE ea oak ka ko pep is ust eee 4 27 Application six ass ke cern kenn anfas kal teat 4 28 Z Calibration Z Gain oke tra ek saa sok sas sban s 4 29 J VIG JACK pies panik pe e e enn ia epa kosa 4 29 SEQUENCE aa via da penn ia pan e tues ton ka 4 29 50mm step height procedure eeeeeeeee 4 31 Advanced Z Datum Correction Z Form from multiple measurements ssseessooessnorennrrn 4 32 ANTYE JOU l sno sd kids titer eE 4 32 Seguente kankan pa b kan kaki pave ie 4 32 Z Datum Correction Z Form from a single measurement a a kak kaa sone kon e oo oo ekta bese 4 34 APYE fat kn a a e Ton iv atis kita 4 34 Seg ence srr PEN NOYE dane NA NI 4 34 Application bab baba pios ka bois da bann Akab 4 34 Calibration Artefacts sssseesseossorrresorrsnr 4 34 How Do I Make a basic Measurement 4 37 Selecuns a lens si da ka asa seek a ced Weer sisan 4 37 Changing lens xtc pasan ad k on season ka saa saaa ban 4 38 Positioning the component 4 38 Configure the Instrument 1 4 38 Issue 5 2 September 2005 Page vii TS CCI 3D Non Contact Surface Profiler Systems Focus on Surface Set Light Levels and Find FT OS pre yes psi der hast past is yale let kids 4 39 Set
28. 3 17 Computer options sousvoccwirvecassnsitersveetcssewereerd 3 18 POS ecco hein ene A A WE W EN W 3 19 LENSES pe pierre e ae ka Is miks 3 19 Talymap options uvvvrrrrreoooooroosnnnonoonsesononoonon 3 19 A for CCI 6000 ooon 3 19 SIDES ODIONS oes aE EEE EEEE 3 20 Piezo OP HONS aye pandan yo kons esaye eas 3 21 PACCCSSOLNE Fo oo oka ns sa pa en eee bes 3 21 Installation procedure ssssresssrrssrsrsrrrernnrrnn 3 22 Adjusting Anti Vibration air mounts CCz 6000 only ansete beskeden 3 22 Interconnection diagram CCI 6000 3 23 Interconnection diagram CCI 2000 3 25 Installing Upgrading software 3 26 Networking of the PC S s sssessrrssressrrrressrrsnr 3 26 User Ris AE vceescuscneconnescrsntvinedsaneeuantnrebavnereactnees 3 26 Setting Up the System tee eee seke ik ik aaa 3 26 System pre packing instructions 3 27 Chapter 4 Operating Instructions 4 1 Introduction w ee ii osse de ekasdeaeeeo p n sesi ssaokssesasskesees 4 1 Page iv Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Description of instrument controls 4 2 Z stage control manual ssssersessresssrrssnns 4 2 X Y and Tip tilt stage controls manual 4 2 Motorised X Y stage controls 4 3 Automatic X Y Z stage controls 4 3 Light Unit Controls ssssssssesssrrressrrrrsersrrrnnrnrr
29. 4 Exploring Surface Texture Computer options e 265 1101E Personal Computer English version Page 3 18 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Options Lenses e 112 3292 XX 10x Objective Lens 1 8mm x 1 8mm field of view e 112 3293 XX 20x Objective Lens 0 9mm x 0 9mm field of view e 112 3294 XX 50x Objective Lens 0 36mm x 0 36mm field of view Talymap options As for CCI 6000 Issue 5 2 September 2005 Page 3 19 TS CCI 3D Non Contact Surface Profiler Systems Stages options e 112 3514 XX Manual X Y Z 0x 0y Stage with 25 25 100mm 4 and 4 Range respectively P e 112 3515 XX Motorised joystick only X Y Stage 110x75mm Range Manual Z 0x 0y Stage with 100mm 4 and 4 Range respectively Page 3 20 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Piezo options e 265 1099 Piezo and controller 100um vertical range with LVDT feedback Accessories As for CCI 6000 Issue 5 2 September 2005 Page 3 21 TS CCI 3D Non Contact Surface Profiler Systems Installation procedure The installation process will be performed by a Taylor Hobson Service Engineer or other similar representative of Taylor Hobson Any subsequent moving and re installation should also be carried out by a representative of Taylor Hobson or a suitably trained per son This must be done with care for the instrument and consider ation for
30. 9ES L 609 v801 G97 189909 JOUIUOIWN ewol4 I Bago Tuo yulu Page 3 25 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Installing Upgrading software Full instructions for the installation of the application software are provided on the Application software cd in the file Talysurf CCI Software Installation Procedure Networking of the PC s The PC needs to be set up with the one User i e a single User before and after networking If the PC is set up with multiple users then it may be necessary to do a separate installation of the Frame Grabber for each user See Installing Upgrading software page 3 26 for more information After a PC has been networked it may not recognise the USB port Aladin used for the Talymap dongle To correct this in Control Panel gt System gt Hardware Devices gt Device Manager gt Ports remove the unrecognised USB Port Then re boot If the Aladin USB port is still unrecognised select Control Panel gt Sys tem gt Hardware Devices gt Add New Hardware Device User Rights If a new user is added to the PC then they need to be given Power User or Administrator User rights as the CCI Application soft ware modifies files in the installation folder located in C program Files Setting Up the System Once the instrument is assembled and all the connections are made the instrument is ready for use The representative of Taylor Hob son wil
31. EIN r RA Issue 5 2 September 2005 Page 3 13 TS CCI 3D Non Contact Surface Profiler Systems 112 3499 XX 50um Step Height Calibration Standard with Traceable Calibration Certificate ad n Measuring line groove a Page 3 14 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems e 112 3297 XX Calibration Flat Mirror 0 2nm RMS with Non traceable Calibration Certificate e 112 3507 XX Calibration Flat Mirror 0 2nm RMS with Traceable Calibration Certificate Printers e 112 2902 XX HP DeskJet Printer e 112 2696 XX LaserJet Printer e 112 3217 XX HP Business Inkjet Printer Issue 5 2 September 2005 Page 3 15 TS CCI 3D Non Contact Surface Profiler Systems Furniture e 112 3350 XX Talysurf CCI Computer Desk Page 3 16 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Hardware Installation CCI 2000 System Components M112 3613 XX TALYSURF CCI 2000 MEASURING INSTRUMENT comprising e K510 3061 XX Granite Base with Rubber AV Mounts desk mounted Issue 5 2 September 2005 Page 3 17 TS CCI 3D Non Contact Surface Profiler Systems e 112 3614 XX CCI Measuring Unit consisting of TalySurf CCI Measurement Head e 112 3416 XX CCI Application Software Pack e CCI User Guide e K505 72CCI Quick Reference Guide for Clean Rooms e 112 3348 XX Light Source Bulb Spare e 600 1
32. Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Hdd Slider Measurement The slider should be set up with fringes normal to the head as shown below Actions menu and toolbar button to start a slider measurement Only available if licence is registered The HDD Slider information dialog contains fields for the user to enter slider type related information and results file name The user has the option to specify whether a single slider or a slider holder is to be measured The slider type is specified as a file name This file contains details of each step to be measured on the slider File details are provided below The results file contains settings and results for each slider mea sured A new file is created at the start of each slider holder mea surement File details are provided below After an HDD slider measurement the enhanced surface image will be displayed After an HDD slider measurement selecting deselecting the Peak radio will only display the enhanced SUR file output and not tog gle between peak and phase results Issue 5 2 September 2005 Page 4 61 TS CCI 3D Non Contact Surface Profiler Systems Help menu contains licence item Selection displays licence status and option to enter a new licence that matches the unlock code of the PC Slider measurement This is carried out with the following measurement settings e Mode XY e Zoom x2 recommended e Concurrent e
33. Scan Length and position 4 41 Scan setting buttons visa oo da e kaka kaa ee re 4 4 ENO slider oa cerccoussrdourensipuccrseraadecnes era rens sd 4 42 Setting TalyMap options ssseesssroresorrsnt 4 42 Save 3D Data File As oseese 4 42 Auto increment cs dantan ob pol fasad ta pa 4 43 New document kale kan Dra ae beke konsa te 4 43 Apply template to document 2 4 43 Auto run TalyMap rrrreeeeeeeooroesneonooooonanons 4 43 Show TalyMap button reeeeeeeerreserenoooossons 4 43 Make S N bere bade send reken penyen ee dasoyenyonnn 4 43 Basic AnNalySiS srerssossssssssetesdsnsssssnsserdantnnisssrerees 4 43 CALIBRATION sinesi te edt rend os fe oo keep kem andan 4 44 Advanced Measurement Topics cssssseees 4 45 Technical Description of Scanning Broadband TNS Her OMG Y ai kb ban eke kek kk a kep nee ae pan eens 4 45 Sample Preparation for Measurement 4 46 Good Metrology Practice for CCI 4 46 Finding Fringes and Use of Levelling Stages 4 47 Finding fringes ccs suntvcvcvsnrrsersunixeravedacisna veiiews 4 47 Levelling a component mosseessrrrrsrserrrnrersrrrrrnn 4 48 Pre Analysis of Results Assessment of missing Data CLE gre cic sian a a a ai e epa plak e rer 4 49 Data BN ASERNE SEKS ante konn 4 49 How do I use the Special Options 4 50 Data Output Mode Low Noise W u dcsseerre 4 50 SCAM Ry PO 343 ewa aksyone se kase senk kaa kons esans si
34. September 2005 Page 3 7 TS CCI 3D Non Contact Surface Profiler Systems e 112 3493 XX CCI Measuring Unit consisting of TalySurf CCI Measurement Head e 112 3416 XX CCI Application Software Pack e KSOS 70 CCI User Guide e K505 72CCI Quick Reference Guide for Clean Rooms Page 3 8 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems e 112 3348 XX Light Source Bulb Spare e 600 14 Exploring Surface Texture K501 3065 XX Power Distribution Unit Assembly Computer options e 265 1035E Personal Computer English version e 265 1078E Personal Computer English version Dual Monitor Issue 5 2 September 2005 Page 3 9 TS CCI 3D Non Contact Surface Profiler Systems Options Lenses e 112 3290 XX 2 5x Objective Lens 7 0mm x 7 0mm field of view see note e 112 3291 XX 5x Objective Lens 3 6mm x 3 6mm field of view e 112 3292 XX 10x Objective Lens 1 8mm x 1 8mm field of view e 112 3293 XX 20x Objective Lens 0 9mm x 0 9mm field of view e 112 3294 XX 50x Objective Lens 0 36mm x 0 36mm field of view Note 2 5x lens will not operate with standard piezo 265 1031 use either 265 1073 2 5 only or 265 1063 all lenses Talymap options e 112 3579 01 Talymap Platinum e 112 3580 01 Talymap Gold e 112 3581 01 Talymap Silver Page 3 10 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Stages options e 112 3514 XX Manual X Y
35. Special options Off e Slider Type definition file Slider Holder Control The pattern feature is used to control the measurement of each slider site on a slider holder The pattern file is provided by the user via the slider settings dialog The output from each slider measurement is appended to the results file Note If it is a holder measurement then the existing file will be deleted first Slider Definition Set up A graphical interface is provided via the Tools menu HDD Set up option to allow creation editing of slider definition files The sys tem should be set up as it would for a slider measurement with a sample slider in focus then run the HDD Set up dialog Follow the instructions in the dialog to create or edit a settings file and then use this settings file in the HDD Settings Form See Hdd Slider Measurement section above Page 4 62 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Slider File Format An example slider file is shown below Line Coating Definition DLC Coated 1 Position Find Definition HorizFindOffset 31 HorizFindLength 100 Normalisation Definition Width 224 Height 35 Left 112 Top 55 Reference Definition CorrectFull 0 Comments Section header for type of coating Identifies if slider is DLC coated 1 Coated 0 Not Coated Section header for reference point definition see Note 2 Distance up from horizo
36. TS CCI 3D Non Contact Surface Profiler Systems Talysurf CCI 3D Non Contact Surface Profiler System User s Guide Taylor Hobson PRECISION K505 70 01 Issue 5 2 September 2005 Taylor Hobson PO Box 36 New Star Road Thurmaston Lane Leicester LE4 9JQ England Copyright O 2005 a division of AMETEK Issue 5 2 September 2005 Page 1 TS CCI 3D Non Contact Surface Profiler Systems Page 2 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Taylor Hobson s License License statement and limited warranty IMPORTANT READ CAREFULLY This License Statement and Limited Warranty constitutes a legal agreement License Agreement between you either as an indi vidual or a single entity and Taylor Hobson Ltd THL for the software product Software identified above including any software media and accompanying on line or printed documenta tion BY INSTALLING COPYING OR OTHERWISE USING THE SOFTWARE YOU AGREE TO BE BOUND BY ALL OF THE TERMS AND CONDITIONS OF THIS LICENSE AGREE MENT If you are the original purchaser of the Software and you do not agree with the terms and conditions of this License Agree ment promptly return the unused Software to the place from which you obtained it for a full refund The terms of this License Agreement apply irrespective of how when and by whom the software was installed on a computer irre spective of the ownership of the computer and irresp
37. This window defines the end point of the scan defined by the bottom limit marker This figure can be changed by you Estimated time This window gives the estimated time it will take for the instrument to complete the scan Issue 5 2 September 2005 Page 4 11 TS CCI 3D Non Contact Surface Profiler Systems Scan setting buttons These buttons found on the Fringe Set up tab enable you to set a position on the piezo scan range as the e Top of the scan e Set piezo to centre of range e Bottom of the scan GRE The slider The slider shows the extent of the scan as defined by the scan setting but tons The top line is the top limit marker and is defined by clicking on the Top of the scan button whilst the bottom line is the bottom limit marker and is defined by clicking on the Bottom of the scan button The lighter areas at the top and bottom of the range represent the run up and run down sections of the measurement IMPORTANT For the measurement to capture all of the data all of the fringes have to appear between the top and bottom limit markers Light Level Setting Not available on this version of the CCI Page 4 12 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Measurement screen fie Actions User Tools Welp The measurement screen is accessed through the measurement tab and gives you the functionality for defining a measurement saving the results and beginning th
38. act Surface Profiler Systems Taylor Hobson s License ssssssosssssosssrsrsss 3 License statement and limited warranty 3 LICENSE GRAND arrede 3 OWNERSHIP AND COPYRIGHT 4 USE saloner sion errors ea kone aksan ese 4 UPDATES kiss aveti eti imans TATER 3 TERM voc occarisesaneinoraziactoepecnshahsccesacseumptanyaeaels 5 ACCESS sr ac vtoive eas Sa Rae kr bade kape 5 LIMITED WARRANTY AND LIMITATION OF LIABILITY za artiste tele neateehi lend don an bouda dik 5 GENERAL PROVISIONS ceseeeeeeeeeees 7 THIRD PARTIES sanee nnna 7 ENTIRE AGREEMENT ssssssssssssrrssresresrossnrenrs 7 APPLICABLE LAW a ossnrrsssssrsssrressesrnrsrnsrnrsnrs 7 TAYLOR HOBSON LTD CUSTOMER CONTACT St red ae SNE EAA 8 Chapter 1 Safety oooo0000 1 1 Important Safety Information 2 1 1 Warnings Cautions and notes 1 1 Safety Information sssssrsssrssrsrereornresnrrnnr 1 2 Chapter 2 System Requirements and Specification 2 1 Talysurf COL skredet 2 1 Electrical Supply beer taa eee pa det ee sad 2 1 Environmental Conditions s sessrrro gt 2 1 Issue 5 2 September 2005 Page i TS CCI 3D Non Contact Surface Profiler Systems Talysurf CCI 6000 System Specification 2 2 Vertical resolution best eereeeeeeeooe 2 2 RMS repeatability Z s sseriseeesisesrsssovossc nis 2 2 Measurement range X Y ureeeeeerer
39. acturer s handbooks Versions are supplied appropriate to the country in which it is to be operated 112 2902 E for use in the U K 112 2902 F for use in France 112 2902 G for use in Germany 112 2902 I for use in Italy 112 2902 S for use in Spain 112 2902 U for use in the U S A and Canada Important Use only the lead supplied with the Taylor Hobson equipment to connect the printer to the USB port of the computer Do not use the lead supplied with the printer Issue 5 2 September 2005 Page 7 3 TS CCI 3D Non Contact Surface Profiler Systems For further details on the printer refer to the manufacturer s hand book supplied 112 2696 01 LaserJet Printer 112 3217 01 HP Business Inkjet Printer 2000 112 3290 01 Objective lens Magnification 2 5X Numerical Aperture 0 075 Working Distance 10 3mm Max field Of View 7 0mm x 7 0mm 112 3291 01 Objective lens Magnification 5X Numerical Aperture 0 13 Working Distance 9 3mm Max field Of View 3 6mm x 3 6mm 112 3292 01 Objective lens Magnification 10X Numerical Aperture 0 3 Working Distance 7 4mm Max field Of View 2mm x 2mm Page 7 4 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems 112 3293 01 Objective lens Magnification 20X Numerical Aperture 0 4 Working Distance 4 7mm Max field Of View Imm x Imm 112 3294 01 Objective lens Magnification 50X Numerical Aperture 0 55 Working Distance 3 4m
40. age 8 11 TS CCI 3D Non Contact Surface Profiler Systems Waviness The component of surface texture upon which roughness is super imposed See Form X X axis Horizontal or left and right direction Can refer to left to right movement of a translation stage or to the left to right direction on the video monitor Orthogonal to Y and Z Y Y axis Horizontal or back and forward direction but 90 degrees to X Can refer to the front to back movement of a translation stage or to the up and down direction on the video monitor Orthogonal to X and Z Z Z axis Vertical direction of the microscope relative to the fixture stage Refers to the up and down movement of the microscope head Parallel to the optical axis and normal to the X Y plane Zoom Digital zoom that reduces the area of interest without changing the spatial sampling interval and hence reducing the amount of data Page 8 12 Issue 5 2 September 2005
41. ange My Password To change the password for either the Service or the Admin user you should click on User Management gt Change Admin User Pass word or User Management gt Change Service User Password Page 4 22 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems The Change Password dialog appears Change Password Old Password New Password Enter the existing password in AAA A pen the box titled Old Password and then enter the new pass word into the box titled New Password and confirm this by re entering in the Confirm New Password box Click on OK to confirm How Do I Configure My Instrument In the Configuration Tab you can choose the mode zoom and scanning speed settings for the instrument Mode Select the mode option required by clicking on the appropriate radio button XY xyz or Z XY mode See page 4 7 xyz mode See page 4 7 Z mode See page 4 7 Zoom The area of interest can be digitally zoomed if required by click ing on the zoom setting radio button x1 x2 or x4 Issue 5 2 September 2005 Page 4 23 TS CCI 3D Non Contact Surface Profiler Systems Please note that only certain combinations of zooming and mode are allowed as shown in Table 4 1 Table 4 1 Zoom and Binning Combinations Zoom Mode XY XYZ Z xl X X X x2 X X x4 X Scanning Speeds Select the scanning speed required for the meas
42. ard displays the Current Error as the difference between the measured diameter using the previous gain and the actual diameter e g 0 15pm You decide if the calibration is ok and select Accept button on the wizard The wizard stores the calibration value XY Gain to a file against the current lens type To repeat the calibration click on the camera button This will ek return you to the live video image so that you can repeat the process Application CCI applies X and Y Gain correction to all mea surements Note CCI will not apply X and Y Gain correction to the live video image display or its scale The diameter of the concentric circles on the calibration artefact are stored in a configuration file as default values The user can supply an alternative diameter value in the calibration standard diameter box if for example a more accurate figure was obtained from a different measuring device Page 4 28 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Z Calibration Z Gain Artefact 3 Line step height TH offer two line step heights for the CCI instrument One has a nominal step of 5um and the other a step of SOum You decide which to have depending on measure ment range or lens type You can also use your own standard If using the 50um Step Height see page 4 29 Sequence User accesses Z Calibration from calibration wiz ard Z Calibration Set up Lens 50x WD 3 4m
43. ault Analysis Fault analysis and repair This Instrument and its Software have been carefully designed and tested However we accept that despite this testing faults or apparent faults may occur Software diagnostics The software diagnostics facility automatically runs when the soft ware starts up to check if everything is functioning correctly To run the facility at any other time during use of the instrument you must be logged on as an Admin or Service user Click on the Diagnostics button to run the facility ES The diagnostics facility lists the main components of the system and their status Diagnostics Status Usage Hardware Item Description Part Code Status 2 Camera Standard 1024x1024 CL2Binning FrameGrabber 265 1084 Ok Piezo 100um Failure X Axis 250mm Failure Check PC Connections and Swit Y Axis 200mm Failure Check PC Connections and Swit w 4 Sofware Item Mersion Status Axis Control Simulated Ok More Info Reset Measurement Settings Reference Mirror Alignment Issue 5 2 September 2005 Page 6 1 TS CCI 3D Non Contact Surface Profiler Systems Fault table The following table shows the type of fault and the suggested repair that may occur from time to time Table 6 1 Simple Fault Analysis and Repair Description of Possible cause Suggested action Fault Computer ON Mains voltage not Check mains con OFF Switch LED pr
44. cket and lampholder 12 Rotate the lamp access door toward the illuminator housing and gently press the lamp access door to cause the door clip to seat into the housing and secure the door 13 Reattach AC line cord and the illuminator is ready for service Page 6 6 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Fault reporting This Instrument and its Software have been carefully designed and tested However we accept that despite this testing faults or apparent faults may occur In the first instance please report all faults to the Service Department at Taylor Hobson e Telephone 44 116 2463135 e Fax 44 116 2460325 e e mail service taylor hobson com If you believe you have found a fault with the instrument the soft ware with this user guide or with the On Line Help text please contact the help desk by e mail with a description of your fault E mail address helpdesk Gtaylor hobson com To aid us evaluate the symptoms please give the following e The Licence Registration No TayMap only e The Software Version The Instrument configuration e The P C and Printer type e The area of software in which the fault resides e A full description of the problems with print outs if possible e The measurement data if possible Taylor Hobson would also appreciate any comments you may have about improving this software Many thanks for your co operation Issu
45. d for measuring step heights Camera binning decreases the scan time but software binning decreases the system noise How do I use the Special Options To access the Special options click on the Exclamation mark but ton in the Configuration Screen 2 The Special options dialog offers the following functionality Note For details of what each option does and the disadvantages of each see page 4 8 Data Output Mode Low Noise This consists of a tick box to select Low noise which uses soft ware binning the default condition is with the tick box unselected When to use it When the very lowest level of measurement noise is required less than 5nm How to use it Select either xyz or Z mode depending on lateral detail required select Low Noise Page 4 50 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Scan Type The options are Top Surface selected and Top Surface unselected Standard When to use it Use it to automatically measure top surface only on samples with more than one reflective layer How to use it Select Top Surface Post Threshold This consists of a slider that goes from min to max default When to use it Use to reduce the amount of missing data caused by low surface reflectivity How to use it Select Post on the Measurement tab Select a lower Post Threshold to allow the system to measure lower reflectivity surfaces Is
46. der for Hard disk Drive slider measurements Stop Measurement button Clicking on this button will prematurely stop the measurement process and the measurement data is discarded To restart the scan the Start Measurement button is pressed however the scan restarts from its start position not the position that was reached at the point when the Stop measurement button was pressed Frame sequence The frame sequence is the series of video frames seen when going from the top to the bottom of the piezo scan range Itis for diagnostic use only There are three buttons in this area Save Frame sequence This button enables you to save a sequence of frames Issue 5 2 September 2005 Page 4 15 TS CCI 3D Non Contact Surface Profiler Systems The user gives the sequence a filename and the file is saved asa feb file e Load frame sequence This button enables you to load frame sequence files fgb from memory e Show Frame Sequence This button enables you to view the frame sequence through the video screen Axis Control Screen File Actions User Tools Help Fringe Setup Axis Control Measurement Move to Position x Yi Z Go E of Step Nudge Move X amp Y Axes A Y 11 000mm 10 000mm Z Bottom End Stop kok Contrast I d n f Cong nm e Mode ar m Admi Special Options Of Y 1 000 Zz 94 995mm Z Sto 1 Omk At start up
47. e 5 2 September 2005 Page 6 7 TS CCI 3D Non Contact Surface Profiler Systems Page 6 8 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Chapter 7 Accessories 112 3350 02 Instrument Desk Dimensions Height 750mm to 760mm by adjustment to table top Width 900mm Depth 890mm K505 71 CCI User Manual For Clean Rooms This is an identical manual to this one printed on material suitable for use within a clean room environment K505 72 CCI Quick Reference Guide For Clean Rooms The Quick Reference Guide for Clean Rooms consists of a number of encapsulated instruction sheets that instructs the user in the main instrument operations Essentially the Quick Reference Guides act as reminders on the sequence of operations to achieve the required action 112 3348 01 Projector Lamp For Illuminator 112 3323 01 Lateral Calibration Standard Description This calibration standard is used to calibrate and verify gain in X and Y directions by measuring the diameter of concentric circles It consists of a grid to verify distortion linear ity in the X Y plane by measuring the distortions of the straight lines Specification e 5 concentric circles used for lateral calibration of X and Y gain for 2 5x 5x 10x 20x and 50x lenses Issue 5 2 September 2005 Page 7 1 TS CCI 3D Non Contact Surface Profiler Systems e 3 grid patterns one for each objective lens e Each grid pattern
48. e TalyMap program The options given on the screen are Computation settings Two selections are provided giving you the option of selecting e Post Process If post is selected the computer waits for the scan to complete then the data from the camera is processed Using post processing can decrease the number of missing data points especially on low reflective surfaces e Peak Only Coatings on a sample or rough surfaces can con fuse the algorithm in these cases use peak only setting This option can be changed before or after a measurement Issue 5 2 September 2005 Page 4 13 TS CCI 3D Non Contact Surface Profiler Systems Settings The settings options available are concerned with how the data from a measurement is saved and passed to the Taly Map analysis software e Save 3D Data File As The user is able to enter into the given box the filename of the sur file that is to be assigned to the 3D data when it 1s saved e Auto increment If the box is ticked then subsequent measure ments will be stored with the same filename the software will add a three digit extension to the filename eg TalysurfCCI001 sur TalysurfCCI002 sur and so on e New document If the box is ticked then each measurement is placed in a new Talymap document Other wise measurements are appended to a new document e Apply template to document There is also a tick box under this option that allows you to tell TalyMap to apply a partic
49. eas are present light level is approximately 50 on light meter with no fringes visi Page 4 40 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems ble This method is particularly effective with the 50x objec tive Use the Z adjust to slowly move the component in Z until the fringes appear If at any point you see an image similar to that shown use the Z adjust to bring the com a ponent closer to the objective lens The x ti image is part of the instrument s optical sys tem that has come into focus This image is very close to the fringes with the 50x objec tive but gets further away the larger the objective Set Scan Length and position Scan setting buttons These buttons found on the Fringe Set up tab enable you to set a position on the piezo scan range as the e Top of the scan e Set piezo to centre of range e Bottom of the scan KAR Issue 5 2 September 2005 Page 4 41 TS CCI 3D Non Contact Surface Profiler Systems The slider The slider shows the extent of the scan as defined by the scan setting buttons The top line is the top limit marker and is defined by clicking on the Top of the scan button whilst the bot tom line is the bottom limit marker and is defined by clicking on the Bottom of the scan button The lighter areas at the top and bottom of the range represent the run up and run down sections of the measurement IMPORTANT For the measurement to capt
50. ective of whether it is connected to THL supplied equipment or not LICENSE GRANT Subject to the payment of the applicable license fee and your acceptance of the terms and conditions of this License Agreement THL grants you the right to use the Software in the manner pro vided below Issue 5 2 September 2005 Page 3 TS CCI 3D Non Contact Surface Profiler Systems OWNERSHIP AND COPYRIGHT This Software is owned by THL or its suppliers and is protected by copyright law and international copyright treaty Therefore you must treat this Software like any other copyrighted material e g a book except that you may either make one copy of the Software solely for backup or archival purposes or transfer the Software to a single hard disk provided you keep the original solely for backup or archival purposes Except as provided in this License Agreement you may not trans fer rent lease lend copy modify translate sublicense time share or electronically transmit or receive the Software media or documentation You acknowledge that the Software in source code form remains a confidential trade secret of THL or its suppliers and therefore you agree not to modify the Software or attempt to decipher de compile disassemble or reverse engineer the Soft ware except to the extent applicable laws specifically prohibit such restriction You shall not remove or permit to be removed any copyright notice on the software nor any statement
51. eference is at the Left Hand Side and the ref erence shutter is in the forward position as shown in the photo graph Lens reference Reference shutter Page 4 54 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Caution Great care must be taken not to touch the optical faces of the lens and to not drop the lens during removal and fitting Remove the power lead the three Lemo coaxial connectors and one D type connector from the standard Piezo Servo Amplifier and connect to the Piezo Servo Amplifier specially configured for the 2 5x lens see photograph and interconnection diagram Switch on the power to the piezo servo amplifiers l Instrument Earthing Arrangement Issue 5 2 September 2005 Page 4 55 TS CCI 3D Non Contact Surface Profiler Systems Using the lens After you have changed the lens ensure that the correct objective lens is selected at the top of the Configuration Tab of the UI The following procedure needs to be used to per form the Z Calibration see also page 4 27 of User s Guide Measure the levelled step height using zoom magnification of x2 In Talymap apply the template StepHeight MNT which will determine the step height value Run the Calibration Wizard and select calibration type Z Enter the calculated step height from Talymap into the Measured Height box and select the Accept button After taking a measurement TalyMap can be used to
52. er and any accessories that do not derive their power from the CCI system refer to the manufacturer s documentation Environmental Conditions For operation within performance specifications Ambient temperature range e Operating 15 C to 30 C Issue 5 2 September 2005 Page 2 1 TS CCI 3D Non Contact Surface Profiler Systems e Storage 10 C to 50 C Ambient relative humidity e Operating lt 70 non condensing e Storage 10 to 70 non condensing Caution The piezo unit is very sensitive to high humidity and may be damaged if operated outside of this range Take extra care when moving from a cold area to a humid environment Temperature gradient lt 2 C hour Air flow lt 0 5m s Talysurf CCI 6000 System Specification Vertical resolution best 0 1A 10pm RMS repeatability Z 0 03A 3pm Measurement range X Y 0 36mm 7 0mm Lateral sampling resolution X Y 0 35 um best Step height repeatability 0 1nm best Linearity Z 0 05 of measured value Maximum Resolution dependant on mode X Y 1024 x 1024 pixels Resolution of Manual Z stage 0 4mm revolution Page 2 2 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Reflectivity Greater than or equal to 0 1 Stage Range e X and Y 25mm Manual OR 112 x 75mm Motorised option OR 150m x 150mm Auto option 1 OR 250mm x 200mm Auto option 2 e Z column 100mm e Ox and Oy 4 Compone
53. erresenoen 2 2 Lateral sampling resolution X Y 2 2 Step height repeatability 2 2 FINE ATL Z eaen EE ian 2 2 Maximum Resolution dependant on mode 2 2 Resolution of Manual Z stage 2 2 2 Reflectivity non si seine a a aE 2 3 Stage Range veswsaiverinswaurens ena adan ga rites donne 2 3 Component Size aaa pass nose ane 2 3 Component size veseraes sais assez psi en eres ener nr na 2 3 Component weight rrrereeeeeeeeereeesssoooonoe 2 3 Vertical scanning range soosse 2 3 Talysurf CCI 2000 System Specification 2 4 Vertical resolution best eeeree 2 4 RMS repeatability Z scnscosisesnenseosescrineres 2 4 Measurement range X Y rrreeeeeeeeeroronen 2 4 Lateral sampling resolution X Y 2 4 Step height repeatability ereeeevveroonones 2 4 Linearity Z ene ea ak eka ei ieas 2 4 Maximum Resolution dependant on mode 2 4 Resolution of Manual Z stage 2 4 Reflectivity bes tango kas aa a pani n a ia e 2 4 Stage R nge satire boss ae dens a sr b n 2 4 Component size sip season seza ses ew 2 4 Component SIZE eske sansi make kok aaes manton ka rn nn na 2 4 Component weight rrrereeeeveererreesesenoonne 2 4 Vertical scanning range soosse 2 5 Page ii Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Chapter 3 Installation Instructions for the Talysurf CCI instruments 3 1 Introduction sail e
54. es Selection of one of these options next leads to one or more pages of information relating to that calibration type Additionally there is an Issue 5 2 September 2005 Page 4 25 TS CCI 3D Non Contact Surface Profiler Systems option one per type to reset all of the calibrations to defaults and a finish close option Calibration Wizard Lens 50x WD 3 4mm Calibration status Calibration Types Select Calibration type and press gt gt OO QO 9 Bank Clear Han e When the wizard is closed your previous measurement and fringe set up settings are restored Page 4 26 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems XY Calibration X and Y Gains Artefact Glass target with concentric circles is provided as an accessory see page 4 34 Sequence You access XY Calibration from calibration wiz ard XY Calibration Set up Lens 50x WD 3 4mm Calibration Standard Diam 268um Set up Information Ensure Calibration Standard is levelled with the concentric circles in the middle ofthe measurement area Manually adjust Z stage so that no fringes appear on the surface ao Current Error Calibrate EF YA e Set up the calibration standard by following the instructions in the wizard e To start the calibration you need to click on Go button Issue 5 2 September 2005 Page 4 27 TS CCI 3D Non Contact Surface Profiler Systems The wiz
55. esent nections t lit kika Blown fuse in Check fuses computer Keyboard not Connection Check connection working Mouse not present Mouse not Check connection plugged in Random errors Noisy mains Use a mains filter tribution Unit generated on the mains input System not Correctly earth the earthed system No light from light Blown fuse in light Check fuses unit unit or power dis Light bulb blown Replace bulb see page 6 3 Page 6 2 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Table 6 1 Simple Fault Analysis and Repair Description of Fault Possible cause Suggested action Poor image qual ity Dirty objective lens Clean lens see page 5 1 Vibration affect ing the system Remove vibration source or isolate from vibration check AV mounts are correctly func tioning No measured data Incorrect light level Adjust light level Noisy result Incorrect filter set ting Select correct fil ter No image Camera not switched on Switch on camera Light Unit not switched on Switch on light unit Image does not change when fringe settings slider is adjusted Piezo unit not switched on Switch on piezo drive unit Motorised Auto matic axes fail to move Check all connec tions Use diagnostics to check for faults I
56. gle product TERM The License Agreement is effective for an unlimited duration unless and until earlier terminated as set forth herein This License Agreement will terminate automatically if you fail to comply with any of the limitations or other requirements specified herein Upon any expiration or termination of the License Agreement you must destroy all copies of the Software ACCESS You shall permit THL s representatives to have access at all rea sonable times to the Software and any records relating to its use LIMITED WARRANTY AND LIMITATION OF LIABILITY THL warrants that the Software as updated and when properly used will perform substantially in accordance with its accompany ing documentation and the Software media will be free from Issue 5 2 September 2005 Page 5 TS CCI 3D Non Contact Surface Profiler Systems defects in materials and workmanship for a period of ninety 90 days from the date of receipt Any implied warranties on the Soft ware are limited to ninety 90 days Some states or jurisdictions do not allow limitations on duration of an implied warranty so the above limitation may not apply to you THL s and its suppliers entire liability and your exclusive remedy shall be at THL s option either a return of the price paid or b repair or replacement of the Software that does not meet the Lim ited Warranty This Limited Warranty is void if Software fails as a result of accident abuse or mi
57. here sunlight may fall on the instrument Areas that experience temperature gradients of over 2 C hour are not ideal for measurement Vibration Both air borne and ground based vibration is particularly detri mental for the measurement of surface texture It is recommended that all sources of vibration are removed All Talysurf CCI instru ments are supplied with anti vibration mounts It is also important that cables should be run away from sources of vibration and located where they cannot be kicked or jarred Power Supply It is important that a clean power supply should be provided to the instrument If in doubt many computer peripheral dealers can supply a suitable Uninterruptible Power Supply U P S The power supply voltage must conform to the following e Mains supply voltage 90 to 240VAC Caution The light unit and PC may have a switchable voltage selector Ensure that it is set to the correct setting before connecting and switching on e Frequency 50 60 Hz e Power Consumption 500VA Maximum Page 3 6 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems This equipment is intended for installation category low voltage category II in accordance with EN 61010 1 2001 Hardware Installation CCI 6000 System Components M112 3505 XX TALYSURF CCI 6000 MEASURING INSTRUMENT comprising e KSI0 3038 XX Granite Base with Steel Base Frame and Pneumatic AV Issue 5 2
58. inal position likely to be Precision Mechanical or scientific exactness The degree of refinement with which a measurement is stated Profile The contour of the surface in a plane perpendicular to the surface It is a two dimensional plot of the data Page 8 8 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems PZT Abbreviation for piezoelectric transducer This component modu lates the phase of the interference pattern across the detector by moving the objective and hence the reference surface Q R Region Of Interest Sub area from the field of view Repeatability The precision with which repeat measurements of the same sample give the same value with all conditions unchanged between mea surements except time Resolution The smallest quantity that can be measured by a particular instru ment RMS Thread Royal Microscope Society Thread not Root Mean Squared Male thread 20 274 20 198 EXT DIA 36 TPI 55 Whitworth form Female thread 20 396 20 320 EXT DIA 36 TPI 55 Whit worth form Issue 5 2 September 2005 Page 8 9 TS CCI 3D Non Contact Surface Profiler Systems Roughness The finer irregularities of the surface texture usually including irregularities resulting from the production process S SBI Scanning Broadband Interferometer Sparrow Resolution Describes the resolving power of an objective as O SA N A Spatial Sampling Inter
59. ineer or representative of Taylor Hobson Lim ited Issue 5 2 September 2005 Page 3 1 TS CCI 3D Non Contact Surface Profiler Systems Siting the instrument The overall accuracy of measurement results will be influenced by environmental conditions particularly draughts vibration and the rate at which the ambient temperature changes The choice of location depends on the application requirement However to ensure that the optimum performance is achieved wherever possi ble the instrument hardware should be installed with consider ation given to the surroundings in which it will operate The following items must be considered when siting the instru ment Details for recommended desk CCI 2000 The desk is to be provided by the customer 905 2000 only The desk top should be a minimum of 600mm square and able to safely support a minimum weight of 200kg Page 3 2 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems A seperate desk is required to support the computer and electron ics equipment This should nominally be 900mm wide Instrument height CCT6000 Figure 3 1 Instrument height 1655 Issue 5 2 September 2005 Page 3 3 TS CCI 3D Non Contact Surface Profiler Systems Recommended Siting Plan CCI 6000 Figure 3 2 Recommended floor plan a 137005 SNIVW EO 5 rk NCIS 134008 SNIVW z YOUNON BINaWOD 131908 SNIVW 5 USINRId WNOUdO 12108 SNIVW es 2 YANJWOD amp
60. ired to PAT test the equipment for earth conti nuity it should ONLY be tested at a maximum test current of 200mA Test currents above this could damage the sen sitive electronic equipment within the system Before placing the Measuring head on the carriage adaptor plate ensure that the adaptor plate is firmly secured to the column carriage When the objective lens is close to the surface of the com ponent take care not to impact the objective or the PZT into the component as this may damage the objective or the PZT scanner THIS IS NOT COVERED BY WAR RANTY There may be a piezo buzzer that warns of the contact of the objective with the component po En The PZT see picture above is easily damaged and very expensive DO NOT PUT any undue force on the the PZT and when transporting remove and pack in a sealed bag with silica gel Page 1 4 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Chapter 2 System Requirements and Specification Talysurf CCI Electrical Supply e Mains supply voltage 90 to 240VAC Caution The light unit and PC may have a switchable voltage selector Ensure that it is set to the correct setting before connecting and switching on e Frequency 50 60 Hz e Power Consumption 500VA Maximum This equipment is intended for installation category low voltage category II in accordance with EN 61010 1 2001 Note For details of the power requirements for the comput
61. its applications and location Adjusting Anti Vibration air mounts CCI 6000 only Place spirit level on granite base and level by adjusting frame feet Using a pump and the valves mounted on the front of the frame inflate each AV mount so that the diaphragm is level This is best done by slightly over inflating and letting air out of the mount to bring the base down to the required level Page 3 22 Issue 5 2 September 2005 ane mine dan an ENE I i juewobuouY i DUIYWDF JuoWnysy WD i ul SUON EZS 1 605 abo wan We O 198 YojIMs jaudd PAY umop Q s umas Yous jaued Jeay Jezanq Ozald More uoua ul SUID WeajsAs ong I i puodo i Jejuid 1 1 1 I 1 1 PEPPER ul SUON WajsAS ul SUIDIW WIsAg DJOWOJ TS CCI 3D Non Contact Surface Profiler Systems I v801 992 Jagap ouoydo jouvon L JOWUOW I i ASER HUILUOD capi jOv6IP tb 9SU Or L 609X LYS L 60SX L ice al Interconnection diagram CCI 6000 Figure 3 3 Interconnection diagram Manual System Page 3 23 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Figure 3 4 Interconnection diagram Automatic System i owes I x z 1 juowebueny I a I I Buiyue3 juounnsu x I i L pued tm 1 wog yoqstor JI san a GWAOI hm as obes VI YO moun z I si 4 Ja n A ON te tt etn A WO Fk kran one e f y TOFFOST 8054 oye
62. k 4 51 Page viii Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Post WhreshOld aeann visa earned 4 51 Basic TalyMap Functionality eeeseeseeesesososeeeo 4 52 Using the 2 5x lens 5 beki assse dous kasse ass dossksssosssdss k 4 54 Interconnection of Piezo Servo Amplifier 2 5x lens and Installation of lens 4 54 Installation of lens scenerne 4 54 Using the lens Mi iin ba na a aa ben an e ok a me ate 4 56 Pattern measurement sssssssssssssssssrorsrsr 4 57 Pattern CONtrOl sssssssrssrsoseserrerrrrerrnrrrr rr rt 4 57 Pattern Execution 22222 ivrig nerne 4 58 NIOPEN ONE ajite asa mta e errors dere 4 58 Measurement AndlySis eeerrrrerrereeeoorresone 4 58 Patterty Pile ce dence aaa ekta d r seen brass sea 4 59 HDD Slider Measurement sssssssssssssssrsrsssr 4 61 Slider measurement aaa ason as eee e yan goaae esans kastonadyn 4 62 Slider Holder COnNtrOl sssssssssessssssosennrrr rna 4 62 Slider Definition Set up sssssssresssressrorennrrs 4 62 Slider File Format s ssssssssssssesrrrrrererrrrsnrnrrrrrrrr rna 4 63 Slider Results File s smsmmsssssssssosesrersnrrreresrenrrr sey 4 66 Lenses st rs vn rete n a kn es e e ee yi gi ke ape ty z 4 67 POWEP LE JA asprin neger goes orange 4 67 Chapter 5 Maintenance Procedures and Service Support 2 D L Cleaning and Routine maintenance 5 1 Is
63. kes you into the Help System This gives you help with using the instrument in the form of How Do T instructions The glossary of terms is also provided to assist in the operation of the instrument Stop button The stop button is used to stop all axes moves Page 4 18 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Start a pattern measurement Only available if automated axies are connected See Page 4 57 for further details Start a HDD Slider measurement Only avail able if a HDD licence is installed See page 4 61 for further details Issue 5 2 September 2005 Page 4 19 TS CCI 3D Non Contact Surface Profiler Systems Main menus File menu The File menu provides you with the means to open the measurement setting for you to amend or execute or to save the measurement Program exit is also provided on the File menu Actions menu The Actions menu provides options that reflect the toolbar functionality eg Calibrate Diagnostics and Measure Selecting one of these options in the menu will invoke the appro priate function in the same way that the Calibrate Diagnostics and Measure buttons do on the main toolbar User The User menu enables the different levels of User ie Stan dard User Admin User and Service User to log into the system and gain access to their appropriate level of privilege Both Admin User and Service User are requested to input the appropri ate password
64. l then set up the instrument for use Page 3 26 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems System pre packing instructions In the unlikely event that it becomes necessary to return the instru ment it should be carefully re packaged This should be per formed by a representative of Taylor Hobson or a suitably qualified person Issue 5 2 September 2005 Page 3 27 TS CCI 3D Non Contact Surface Profiler Systems Page 3 28 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Chapter 4 Operating Instructions Introduction The Operating Instructions are organised into a number of sub sec tions to enable you to find the information required quite quickly The first sub sections describe the Instrument controls and the User Interface in terms of the main screens the toolbar and the menus This is provided as an introduction to the User Interface and also to aid in the familiarisation with the instrument away from the instrument itself Note Not all procedures are available on all versions of the instru ment The remaining sub sections of this chapter describe How Do T operations to enable you to calibrate the instrument make a simple measurement and then do more advanced operations with the instrument The sub sections are as follows e Instrument Controls Page 4 2 e User Interface Page 4 4 e How Do I Change My Password Page 4 16 e How D
65. lat after each measurement an Calibrate Current Surface Error FO Current Datum Error NT Sequence User accesses Z Datum Correction from calibration wizard e Set up the calibration standard by following the instructions in the wizard e To start the calibration you need to click on Go button Page 4 32 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems e The wizard causes a measurement to be taken and processed for form with the resultant surface being displayed Note form processing involves levelling and filtering e You decide if the surface is ok and select Add to cause the surface to be added to the mean surface The mean surface is then displayed and the wizard calculates RMS of the current surface after software levelling and filtering with current mean surface removed i e datum corrected The RMS value is displayed Note You may choose to ignore the surface by not selecting Add e Rotate and move the part e You then need to click on Go button repeating until a pre set number of acceptable measurements have been taken e The wizard calculates RMS of the current surface with the new mean surface and RMS of the current surface with the previous calibration s mean surface e The wizard displays the Current Error as the difference between RMS new and RMS previous e g 0 85nm e You select Accept button on the wizard to store the calibra
66. m Max field Of View 0 4mm x 0 4mm Issue 5 2 September 2005 Page 7 5 TS CCI 3D Non Contact Surface Profiler Systems Page 7 6 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Chapter 8 Glossary of terms On this page you can look up terms associated with precision sur faces and surface measurement using Interferometers 3D 3D Analysis Analyse a 3D Surface Measurement to determine form and or sur face finish by a process of alignments form removal and filtering and parameter calculating algorithms 3D Processing Mathematically generate a 3D surface map from a number of images 3D Surface Map 3D representation of a measured surface area Comprising of a 2D array X Y of Z Heights A Accuracy The amount by which a measured value adheres to a standard Angstrom Equal to 0 0000000001 metres or 0 1 nanometres Area of interest The area of the component that is of interest to you Issue 5 2 September 2005 Page 8 1 TS CCI 3D Non Contact Surface Profiler Systems B Binning Combining points of information to reduce amount of data to pro cess E g x2 binning combines information from 4 points 2 in the X direction and 2 in the Y direction C CCI Coherence Correlation Interferometer CCI 3000 Product providing 3D Surface Measurement with manual set up Coherence Length The distance over which interference will occur Coherence length of a
67. m Z Step Height 5 000ym Setup Information Ensure Height value is correct Ensure Step Height standard is levelled and aligned parallel to the Y axis with the middle step in the centre of the measurement area Manually adjust Z stage so fringes appear on the top surface The measured height is obtained from Talymap SG Calibrate Measured Height 2 200um Current Error A Issue 5 2 September 2005 Page 4 29 TS CCI 3D Non Contact Surface Profiler Systems Set up the calibration standard by following the instructions in the wizard You can optionally modify a displayed actual step height value To start the calibration you need to click on Go button The wizard causes a measurement to be taken and step height to be calculated in TalyMap A new gain is calculated Alternatively you can enter the result for the calculated step height value and select the confirmation button The wizard displays the Current Error as a difference between the measured step height using previous gain and the actual step height e g 0 15um You decide if calibration is ok and select the Accept button on the wizard to cause wizard to store the calibration value Z Gain to a file against the current lens type The CCI application applies the Z Gain correction to all mea surements To repeat the calibration click on the camera button This will a return you to the live video image so that you can repeat the
68. med broad band Noise Any random or periodic non data signal in the measurement Nominal Surface The intended surface contour exclusive of any intended surface roughness numerical aperture Numerical Aperture N A The sine of the vertex angle of the largest cone of meridional rays that can enter or leave an objective multiplied by the refractive index of the medium in which the vertex is located In air the N A must be less than 1 Nyquist If the original signal is bandwidth limited in that there is a shortest wavelength present highest harmonic in the signal then the Nyquist theorem imposes a limitation on the maximum sampling interval possible The Nyquist theorem states If it is known that an infinitely long signal contains no wavelengths shorter than a specified wavelength then the signal can be recon Page 8 6 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems structed from the values of the signal at regularly spaced intervals provided that the interval is smaller than half of the specified wavelength Strictly the Nyquist theorem only applies to infinitely long sig nals In practice the Nyquist criteria of sampling less than half of the shortest wavelength present is still useful even though signals are finite in length O Objective lens drive unit Unit that drives the objective lens along its axis to enable scan ning Offline Online Online refers to
69. n optical source is affected by the size of the source spatial coherence the phase purity of the source temporal coherence and the spectral bandwidth of the light Coherent Light Source A light source that is capable of producing radiation with all the waves vibrating in phase Page 8 2 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems D E F Field of view The maximum area of the component in X and Y that can be viewed by the camera with a defined optical configuration differ ent for different objective lens Form The general shape of a surface or low frequency surface character istics Fringe Fringe pattern The light and dark band caused by interference On a scanning broadband interferometer this represents the con tours of the component that are the same distance from the objec tive as the reference for any given frame Fringe pattern zone The zone through which fringes appear on a scanning broadband interferometer G GUI Graphical User Interface Software interface Issue 5 2 September 2005 Page 8 3 TS CCI 3D Non Contact Surface Profiler Systems H HDD Hard Disk Drive I Image A 2D array of light intensities at a particular height from the mea sured area A set of images taken at height intervals along the Z Scan Length is used to form a 3D Surface Map Interference The constructive and destructive superposition of two wavefronts that ha
70. nalysis of the measured data TalyMap is described in the Taly Map application On Line Help The Talysurf CCI application UI itself consists of a live video screen and a surface screen both located on the left hand side of the UI and accessed through tabs e The live video screen displays a continually updated image of the surface as seen through the CCI instrument camera e The surface screen displays an image of the last measured sur face e The light level display can be used as a focus aid see page 4 37 and to set the light level for measurements On the right hand side of the UI are three tabs that access the Con figuration Fringe Setup and Measurement areas During the pro cess of preparing to take and actually taking a measurement you should step through the three tabs in order that is configuration fringe setup and finally measurement An additional tab is avail able for axis control if you have an automated system There are four buttons on the toolbar located above the live video surface screens These icons are Calibration Wizard Diagnostics Issue 5 2 September 2005 Page 4 5 TS CCI 3D Non Contact Surface Profiler Systems Measure and Help An additional Stop button is located on the toolbar for an automated system There are five drop down menus located above the toolbar giving access to the options File Actions Users Tools and Help The status bar located at the bottom of the screen provides
71. nfirm position of Ist and 2nd if required alignment point as defined in pattern file This only appears if AlignmentRequired is set to true in pattern file Pattern Alignment Step 1 of 1 Please move the axes to the BasePoint first alignment point and fine tune position Press Confirm to commence pattern measurement A Progress dialog is displayed during a pattern measurement to indicate pattern site and total sites Movement A raster movement is performed across all sites First site is current position On completion the system moves back to the first position Movement order is along increasing X move to next Y and return to start of X etc Measurement Analysis This is done at each site using current measurement and Talymap settings If Talymap parameters are calculated then an export of Talymap data is done and concate nated into a file PatternResults txt overwriting the existing file If the user stops the pattern or an error occurs then the user is prompted for Repeat the measurement Go to next measure ment and Abort Page 4 58 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems At the end of the pattern the axes and piezo are returned to their starting positions Pattern File The pattern file consists of the following entries Line GridPatternSettings X Pitch MM 0 01 Y Pitch MM 0 01 X Total 3 Y Total 3 Measure AlIPointsInGrid True Alignment
72. nken 3 1 Unpacking the Instrument cccccsssccssseee 3 1 Siting the instrument ssssssssssssssssssrrsrsr 3 2 Details for recommended desk CCI 2000 3 2 Instrument height CCI6000 eee 3 3 Recommended Siting Plan CCI 6000 3 4 Recommended positioning of the components3 5 Clean aie alc a nazi pake sa ka see ia eten deba ese les 3 5 Drane DIS ia ee ee lena 3 5 Temperature GradientS eereeeeeoooonsosonon 3 6 WV TT AN DIY AY pet ana bi pret ee ia de ne pea ini ek epe Bayo 3 6 POWER SUPPLY sudden 3 6 Hardware Installation CCI 6000 3 7 System Components wake pa na sike ian kak iye kad 3 7 M112 3505 XX TALYSURF CCI 6000 MEASURING INSTRUMENT seerne 3 7 Computer options sachin a ia 3 9 OOPUONS k k e saa pwe ay n e on a ek ep aa aaa sein 3 10 Lenses oo ky st oo kas t ip etabli 3 10 Talymap options Yasa techn ve ek kok pe 3 10 Stages Options epi dwe apik kisa oia saka bis sab es ake 3 11 Piezo Options oening rerik 3 12 ACCESSO E Seniai a antes pn kes e a aesate 3 13 Calibration Setting Standards 3 13 Issue 5 2 September 2005 Page iii TS CCI 3D Non Contact Surface Profiler Systems PLUMCLS ei er rarere 3 15 FUINUUT E se a l ola la kes rin al pa 3 16 Hardware Installation CCI 2000 3 17 System Components cscceesseceeseeeeeeseeees 3 17 M112 3613 XX TALYSURF CCI 2000 MEASURING INSTRUMENT succeer
73. nt size X and Y up to 300mm Component size Z up to 100mm Component weight up to 10kg Vertical scanning range up to 100um or 400um Table 2 1 Objective lenses available bjecti Field of Working Lateral Maximum a Distance sampling componen ve Lens View mm mm resolution um t slope 2 5x 7 0 x 7 0 10 3 7 03 2 0 5x 3 6 x 3 6 9 3 3 5 3 5 10x 1 80 x 1 80 7 4 1 76 8 20x 0 90 x 0 90 4 7 0 88 14 5 50x 0 36 x 0 36 3 4 0 35 22 Issue 5 2 September 2005 Page 2 3 TS CCI 3D Non Contact Surface Profiler Systems Talysurf CCI 2000 System Specification Vertical resolution best 1A 100pm RMS repeatability Z 0 5A 50pm Measurement range X Y 0 36mm 1 8mm Lateral sampling resolution X Y 0 35 um best Step height repeatability 0 1 on 50um step Linearity Z 0 17 of measured value Maximum Resolution dependant on mode X Y 1024 x 1024 pixels Resolution of Manual Z stage 0 4mm revolution Reflectivity Greater than or equal to 0 1 Stage Range e Xand Y 25mm Manual OR 112 x 75mm Motorised option e Z column 100mm e Ox and Oy 4 Component size X and Y up to 300mm Component size Z up to 100mm Component weight up to 10kg Page 2 4 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Vertical scanning range up to 100um or 400um Table 2 2 Objective lenses available
74. ntal reference used to find vertical reference line Length of horizontal search centred around vertical reference line Section header for normalisation area definition Should be AITiC Position and area parameters see Note 1 Section header for reference area definition Should be planarised AITiC Correction to full reference area used if the form of the AITiC area is to be measured Issue 5 2 September 2005 Page 4 63 TS CCI 3D Non Contact Surface Profiler Systems Width 224 Height 144 Left 112 Top 34 Step 1 Definition definition Name S1 AlumOxide 0 Width 60 Height 3 Left 30 Top 23 Step 2 Definition 1 on O off Note Step heights are always calculated relative to the defined reference region Position and area parameters see Note 1 Section header for first step Step identifier This will appear in the results file Identifies region step is in 1 Aluminium Oxide region 0 Magnetic Region Position and area parameters see Note 1 Section header for second step definition Up to 10 step definitions may be provided use the following section headers Step 1 Definition Step 2 Definition Step 10 Definition Page 4 64 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Note 1 Position and area parameters These parameters are provided in pixels The image area is 256 x 256 The
75. o I Configure My Instrument Page 4 16 e How Do I Calibrate My Instrument Page 4 18 e How Do I Make a Simple Measurement Page 4 29 e Advanced Measurement Topics Page 4 38 Issue 5 2 September 2005 Page 4 1 TS CCI 3D Non Contact Surface Profiler Systems Description of instrument controls Z stage control manual Z Control one each side Used to move the measuring head vertically so that the camera image is in focus and the fringes are visible X Y and Tip tilt stage controls manual ET Left hand tilt adjust Ox Right hand tilt adjust Oy The stage controls are used to angularly and laterally align a fea ture on the part with the measuring head Page 4 2 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Motorised X Y stage controls The motorised X Y stage is the stand alone Axis control and is driven by a stand alone joystick that has three different speed set by the switch on the joystick Automatic X Y Z stage controls The left joystick controls the movement in the X Y plane and the right hand joystick controls the Z axis The switch on top of the joysticks controls the speed of movement when acti vated the speed is the fastest of two speeds When either switch is pressed all axes move at high speed The stop button is located between the two joysticks Issue 5 2 September 2005 Page 4 3 TS CCI 3D Non Contact Surface Profiler Systems
76. omponent than the objective lens working distance see Table 2 1 on page 2 3 given on the side of the objective lens e Select xyz mode and ensure that the Data Out Mode gt Low Noise 1s not selected on the Special options dialog This reduces the camera exposure time that improves visibility of fringes when the Z axis is moving If the component is machined metal rough non ceramic etched MEMS e Set the light level so that no yellow areas are visible The video panel should show a pale blue colour e With no fringes visible a light value of 50 on the light meter will give best results Use the Z adjust to bring the part into focus and interference fringes should become visible e Also turn on the gradient enhance If the component is smooth and featureless e Set light level so that no yellow areas can be seen with no fringes visible a light value of 50 on the light meter will give best results The monitor should show a pale blue colour Issue 5 2 September 2005 Page 4 47 TS CCI 3D Non Contact Surface Profiler Systems e Inthe configuration tab set mode to xyz and scanning speed to x9 also adjust the filter on the light box to III e Select the Fringe Setup tab of the UI If no features are visible click the contrast reference button and turn the contrast refer ence option on e Move the Z adjust to raise the measuring head until a surface comes into focus e Use the Z adjust to find the fringes
77. process Page 4 30 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems 50um step height procedure Measure the 50um Step Height and enter the measured value into Calibration wizard by doing the following 1 Run the Calibration Wizard and clear any existing Z Calibra tion 2 In the Configuration Tab select Z Mode Zoom xl 3 Ensure component is level scan range is approx 60um so that fringes occur on the top and bottom surfaces Ensure the mea suring line is in the centre noonolanannn Measuring line groove a 4 Measure the levelled step height 5 In Talymap Zoom the required profile Convert into a series of profiles and generate a mean profile Analyse the step height of the mean profile 6 Run the Calibration Wizard and select Calibration type Z 7 Enter the calculated step height from Talymap into the Mea sured Height box and select Accept button Issue 5 2 September 2005 Page 4 31 TS CCI 3D Non Contact Surface Profiler Systems Advanced Z Datum Correction Z Form from multi ple measurements Artefact Circular coated glass mirror flat Lambda 50 is pro vided as an accessory see page 4 34 Advanced Z Datum Calibration Set up Lens 50x WD 3 4mm Measurements done Setup Information Manually adjust Z stage so that the calibration flat is levelled and fringes are visible Adjust the position and rotation of the calibration f
78. r Guide Note Not all of the features described are available on all sys tems Note Please retain this handbook for future reference Warnings Cautions and notes A Warning If the actions indicated in a WARNING are not complied with personal injury or death could result A Warning statement will typically describe the potential haz ard and the measures that must be followed to reduce the haz ard Caution If the action specified in the CAUTION is not complied with damage to your equipment could result Note A NOTE provides supplementary information empha sizes a point or procedure or gives a tip for easier operation Issue 5 2 September 2005 Page 1 1 TS CCI 3D Non Contact Surface Profiler Systems Safety Information The Talysurf CCI system is designed to be safe when the follow ing conditions apply e The system is located indoors in dry conditions e The altitude does NOT exceed 2000m A Warnings The following must be observed failure to do so may expose the operator or other persons to risk of serious injury or death e Itisessential that the electrical supply to this instrument consists of a THREE WIRE SYSTEM in which one wire is the earth The instrument must NEVER be connected to a two wire system with or without a separate earth Failure to connect the system to the correct type of supply could lead to an increased fire risk and even result in severe injury or death
79. r x y resolving power or need to examine features that have high slope gradients Note The vertical resolution of the instrument does not depend on the objective lens The higher magnification objectives are able to measure steeper inclines This makes them more suitable for measuring extremely Issue 5 2 September 2005 Page 4 37 TS CCI 3D Non Contact Surface Profiler Systems rough surfaces and more undulating components than the lower magnification objectives see Table 2 1 on page 2 3 Changing lens To change the lens you must first unscrew the current lens from the instrument and return it to its plastic con tainer ensuring that it is screwed in place in the container lid You can then remove the new lens you require from the lens container and screw this onto the instrument There is a quick release fitting that enables the lens to be changed quickly and easily Caution Great care must be taken not to touch the optical faces of the lens and to not drop the lens during removal and fitting After you have changed the lens ensure that the correct objective lens is selected at the top of the Configuration Tab of the UI Positioning the component Place the component to be measured onto the measuring table top and roughly locate the region of interest beneath the objective lens On a textured surface you will be able to see a light spot on the area Configure the Instrument See How Do I Configure My Instrument
80. recision flat with traceable calibration Figure 4 1 Step Height Calibration Standard Sum with traceable calibration Three lines are etched onto the surface the centre one being the calibrated line Figure 4 2 Step Height Calibration Standard 50um with traceable calibration Issue 5 2 September 2005 Page 4 35 TS CCI 3D Non Contact Surface Profiler Systems Figure 4 3 Lateral Calibration Standard with or without traceable calibration WWW TAYLOR HOBSON COM va x 50 HH 112 3323 There is an additional calibration artefact available the Calibration Flat that is used to calibrate and quantify the form error of the sys tem Figure 4 4 Calibration Flat with or without traceable calibration Page 4 36 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems How Do I Make a basic Measurement The steps to making a basic measurement are as follows Selecta lens e Change the lens if required e Position the component e Configure the instrument e Focus on Surface Set Light Levels and Find Fringes e Set Scan Length and start position e Set up TalyMap e Make a scan e Analyse the results Selecting a lens The choice of objective lens depends on e how large an area you want to measure e the lateral detail you want to be able to resolve A 10x objective proves ideal if you need a medium field of view but the 50x objective is more suitable if you need greate
81. sapplication Any replacement Software will be warranted for the remainder of the original war ranty period or thirty 30 days whichever is longer AS THE PRICE FOR THE LICENSE IS UNRELATED TO A PARTICULAR USE TO WHICH THE LICENSEE INTENDS TO APPLY THE SOFTWARE THL MAKES NO WARRANTIES IN RELATION TO THE PERFORMANCE OF THE SOFTWARE OR ITS FITNESS FOR ANY PARTICULAR PURPOSE SAVE AS PROVIDED IN THIS CLAUSE THL AND ITS SUP PLIERS DISCLAIM ALL OTHER WARRANTIES EITHER EXPRESS OR IMPLIED INCLUDING BUT NOT LIMITED TO ANY IMPLIED WARRANTIES OF MERCHANTABILITY FITNESS FOR A PARTICULAR PURPOSE NON INFRINGE MENT OR TITLE WITH REGARD TO THE SOFTWARE AND THE ACCOMPANYING DOCUMENTATION THIS LIMITED WARRANTY GIVES YOU SPECIFIC LEGAL RIGHTS YOU MAY HAVE OTHERS WHICH VARY FROM STATE TO STATE OR JURISDICTION TO JURISDICTION SAVE THAT ITS LIABILITY FOR PERSONAL INJURY OR DEATH CAUSED BY ITS OR ITS AGENTS NEGLIGENCE SHALL NOT BE AFFECTED IN ANY WAY NEITHER THL NOR ITS SUPPLIERS SHALL BE LIABLE FOR ANY DAM Page 6 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems AGES WHATSOEVER INCLUDING WITHOUT LIMITA TION DAMAGES FOR LOSS OF BUSINESS PROFITS BUSINESS INTERRUPTION LOSS OF BUSINESS INFOR MATION OR ANY OTHER PECUNIARY LOSS ARISING OUT OF THE USE OF OR INABILITY TO USE THIS THL PRODUCT EVEN IF THL HAS BEEN ADVISED OF THE POS SIBILITY OF SUCH DAMAGES GENERAL PROVISIONS This License Agreement may
82. see page 4 21 Page 4 38 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Focus on Surface Set Light Levels and Find Fringes The following quick procedure will focus on the surface set appropriate light levels and find the required fringes A more advanced procedure is given in Advanced topics see page 4 43 e Select the live video tab on the UI e Ensure xl zoom is selected in the Configuration Tab of the UI e Use the Z adjust to move the measuring head closer to the component than the objective lens working distance see Table 2 1 on page 2 3 OR Z Control one each side Caution When the objective lens is close to the surface of the component take care not to impact the objective or the PZT body into the com Issue 5 2 September 2005 Page 4 39 TS CCI 3D Non Contact Surface Profiler Systems ponent as this may damage the objective or the PZT scanner THIS IS NOT COVERED BY WARRANTY There is a piezo buzzer that warns of contact of the objective with the component x i e Turn on the light source Set the light level using the light level control so that a small yellow area can be seen on the image Use the Z adjust to raise the measuring head The size of the yellow area will increase to a maximum as will the light level display At this point you are close to the fringes Reduce the light level so that no yellow ar
83. sing the small clip toward the rear of the illuminator with your thumb or finger Once the clip disengages from the illuminator housing the lamp access will spring open several inches The lamp access door will open slightly more than 90 to allow easy access to the lamp and lamp socket Issue 5 2 September 2005 Page 6 5 TS CCI 3D Non Contact Surface Profiler Systems Do not pry open the door with a tool This may result in damage to the illuminator housing or the lamp access door 5 Check the lamp assembly to verify that the lamp and socket are cool before proceeding Caution The lamp runs at very high tem peratures and contact with a hot lamp may result in severe injury 6 Pull the lamp eject lever to remove the lamp from the socket 7 Lift and remove the lamp from the lamp socket by grasping the rear of the lamp adjacent to the lamp power pins 8 Remove the lamp from the socket 9 Discard the old lamp 10 Insert the replacement lamp into the lamp socket by aligning the lamp power pins with the slots in the lamp socket CAUTION Do not touch the interior of the lamp reflector the lamp envelope or the lamp pins with your fingers Touching the interior of the lamp reflector the lamp envelope or the lamp pins will result in significant shortening of the lamp life Handle the lamp only by the exterior of the reflector or the area adjacent to the pins 11 Push the lamp gently into the socket to seat the lamp in the so
84. software that communicates with the instrument hardware Offline refers to software that communicates with a simulation of the instrument hardware and therefore does not need interface cards and their drivers or hardware to be present P Persistent Refers to Software Settings that are saved so that they can be recalled the next time the software is run Phase Discontinuity A phase discontinuity occurs when the software algorithm for con necting the adjacent pixel phases in a continuous manner cannot determine the direction and height of a step This is typically Issue 5 2 September 2005 Page 8 7 TS CCI 3D Non Contact Surface Profiler Systems caused by steep surface slopes This slope limitation in the micro scope 1s objective dependent Pixel Shortened form of picture element The smallest element of the CCD detector used for imaging and data acquisition Points The number of detector pixels in a particular data set The number varies due to the use of the masks and zoom features which can alter the definable measurement area Position uncertainty The uncertainty of the position feedback of an axis E g if the position feedback displays a figure of X mm how close to the actual carriage position relative to a defined datum is value X likely to be Positioning uncertainty The uncertainty to which the axis can be positioned to E g if the command asks the axis to drive to X mm how close to X is the f
85. ssue 5 2 September 2005 Page 6 3 TS CCI 3D Non Contact Surface Profiler Systems Bulb replacement procedure Warning A Ensure that the power is removed from the light unit and allow a short time after removal of the power for the bulb to cool down before attempting to change the bulb e Unscrew the two screws securing the front plate to the light unit and withdraw the plate and attached lamp holder chassis from the light unit e Remove the connector from the back of the bulb and slide the bulb out of the holder e Replace with new bulb and re attach connector DO NOT touch the bulb with uncovered fingers e Slide lamp holder chassis back into the light unit and secure with the two screws e Order replacement bulb 112 3348 01 Projector Lamp Page 6 4 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Lamp replacement for alternative illuminator type WARNING A Risk of electrical shock Remove power plug before lamp replacement and wait for hot lamp to cool LAMP NI FILTER LEVER SIDE DOOR HOLDER Pull back to eject lamp 1 Turn the illuminator intensity control fully counterclockwise the 0 position and run the illuminator with the fan for several minutes Wait until the nosepiece is cool to the touch 2 Press the ON 1 OFF O rocker switch to the OFF O position 3 Remove the AC power cord from the AC power receptacle 4 Open the lamp access door by depres
86. stems Advanced Measurement Topics Technical Description of Scanning Broadband Inter ferometry An interferometer is an optical device that splits a beam of light from a single source into two separate beams Each of these beams travel separate paths one onto a reference surface and the other onto the surface to be measured The beams are then recombined resulting in an interference pattern An imaging device usually a CCD array is used to collect this information In a scanning broadband interferometer a white light source is used this has the effect that interference reaches maximum inten sity when the two paths one to the reference and the other to the sample surface are the same distance By moving the interferome ter vertically away from the measurement surface the point at which this interference occurs can be found for each pixel of the CCD By tracking the position of the interferometer during this process a 3D map of the surface can be formed v A CCD Sensor Filter l Beam Splitter White Light Source A l Objective Scanner M W ya s Beam Splitter Measuring Range Y Object t to be measured Figure 4 2 Interferometer Schematic Issue 5 2 September 2005 Page 4 45 TS CCI 3D Non Contact Surface Profiler Systems Sample Preparation for Measurement Samples for measurement must be clean and free from grease smears fingerprints and dust Handling procedures must ensure that the sample is no
87. sue 5 2 September 2005 Page 4 51 TS CCI 3D Non Contact Surface Profiler Systems Basic Taly Map Functionality For full operational details consult the Taly Map documentation Input Measured Data Level sample ie remove measured sample tilt Apply surface texture filters as necessary Page 4 52 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Acquire numerical 1 surface parameter results Parameters calculated Rough Sample A Compare with other samples learn to control your process make befter parts and control scrap Parameters calculated Asplitude Pararetere sen ge e ut sen Issue 5 2 September 2005 Page 4 53 TS CCI 3D Non Contact Surface Profiler Systems Using the 2 5x lens Interconnection of Piezo Servo Amplifier 2 5x lens and Installation of lens Switch off the power to both of the piezo servo amplifiers Caution Failure to switch off the power to the piezo servo amplifiers before removing or connecting cables could result in damage to the piezo servo amplifier Installation of lens To install the 2 5x lens you must first unscrew the currently installed lens from the instrument and return it to its plastic container ensuring that it is screwed in place in the container lid You can then remove the 2 5x lens from the lens container and carefully screw this into place on the instrument Ensure that the lens r
88. sue 5 2 September 2005 Page ix TS CCI 3D Non Contact Surface Profiler Systems Generali leaning sweat ee 5 1 Lens Clean ho sa ati a koi rinner kis bebe 5 1 PC Anywhere ossssssssesovsssoossss vsossseosoosssssossssessssses 5 2 Service support and Spares sssssssssssss00 5 2 SS DALES e ab AN ASS eee EE e PA tare 5 2 Chapter 6 Fault Analysis 6 1 Fault analysis and repair cccscsssccsssssssceeees 6 1 Software diagnOStiCS ssssserssorressrrsrsrrsnt 6 1 Faulttable rode rags cadena ts ceed epa tas pens ad ae oeil 6 2 Bulb replacement procedure 1 6 4 Lamp replacement for alternative Hluninator typen ser este A ME AWA AN ia 6 5 Fault reporting s sssssssssssssssssosooss00000000s00nnrncsr 6 7 Chapter 7 Accessories 7 1 112 3350 02 Instrument Desk 7 1 Dimensi n S rewesss es ER SEE e nen rann s 7 1 K505 71 CCI User Manual For Clean ROOMS 78208 efase katkat dered Wao 7 1 K505 72 CCI Quick Reference Guide For Clean ROOTS dil ekipe lye pe vo Se A aude pab sais 7 1 112 3348 01 Projector Lamp For Illuminator AAA A AN AN W A ON NY AN AY rr rr rna 7 1 112 3323 01 Lateral Calibration Standard 7 1 Description e oo poke EE a 7 1 Page x Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Spetification sg pitie silaa se ai iye 7 1 112 3498 01 Lateral Calibration Standard with traceable calibration
89. t contaminated with any of these No other preparation for the sample is necessary e If there are fingerprints smears on the sample the instrument will measure them rather than the sample itself e Bits of dust and dirt on the sample could end up as missing data Good Metrology Practice for CCI As mentioned in Chapter 3 the following areas will affect the quality of the measurements made e Locating the instrument in a clean area to minimise airborne particles ie smoke dust and airborne oil particles e Draughts and airborne vibration should be avoided e Temperature Gradients areas that experience temperature gra dients of over 2 C hour are not ideal for the measurement of precise form e Vibration is particularly detrimental for the measurement of surface texture Sources of vibration should be removed e It is important that a clean power supply should be provided to the instrument Page 4 46 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Finding Fringes and Use of Levelling Stages Finding fringes The following procedure defines the process for finding fringes for the two specific cases you may come across ie a surface with defined features or a featureless surface where the image focussing is used to assist the process e Turn on the light source e Ensure x1 zoom is selected in the Configuration Tab of the UI Use the Z adjust to move the measuring head closer to the c
90. tember 2005 TS CCI 3D Non Contact Surface Profiler Systems Note For details of when and how to use each option see page 4 48 e Data Output Mode Low Noise This consists of a tick box to select Low noise the default condition is with the tick box unselected What does it do The low noise option forces all the data to be computed in the PC Normally some calcula tions are made in the camera Disadvantage Increases the measurement time Only works with xyz or Z mode e Scan Type The options are Top Surface selected and Top Sur face unselected default What does it do Top Surface forces the software to only measure the top most surface encountered Disadvantage Reduces the sensitivity of the system e Post Threshold This consists of a slider that goes from min to max default What does it do Post Threshold adjusts the sensitivity of the algorithm allowing lower reflectivity surfaces to be measured Disadvantage Increases the possibility of the measurement containing spurious data Only works with Post Process Issue 5 2 September 2005 Page 4 9 TS CCI 3D Non Contact Surface Profiler Systems Fringe set up screen The fringe set up screen is accessed through the fringe set up tab and allows you to define the measurement length and position so that the scan captures all of the fringe data This is achieved by setting the top and bottom limits of the scan by moving through the piezo scan
91. tick sansa an sake said eat via depa 4 17 Load Component vers susecsacix cvawesuedelwiesnesutevss 4 17 Z Bottom End Stop vooesesos sise basnos dd asaaste 4 17 WOOI DAE Snerre renee hedde 4 18 Calibrate button eka ked e eee abi 4 18 Diagnostics button anan k kipa ion saa ia andi pata 4 18 Measure button rrrerereeeeooooreroooosesennnonn 4 18 Help bDUHON sessir sre ainara 4 18 Stop DUON imss neiaie a EEEE Een 4 18 Start a pattern measurement osos 4 19 Start a HDD Slider measurement 4 19 Main mens ai cap k ss aa teins maven aa k EER 4 20 File MENU scorer cue eee Ree ere ak ie akse pena 4 20 Actions MENU onze kree 4 20 USER epa lace sae ak kak a ta Re a iye RE erne 4 20 POOS on votan osans ke fiel as efe eta Dea ke tata 4 20 Help ian wine Accs pre laa ial ald e kak Sa e 4 21 How Do I Start The Instrument 4 22 How Do I Change My Password 4 22 How Do I Configure My Instrument 4 23 INO Gigs ban base a blan ki pe ek ae pa ka ine a kk pab Needs 4 23 XY MOLE eT ae TE VITE LOA NA ME AS SYON 4 23 NYS MO DE an atis bez ke e oti Oo 4 23 AMOU sezi aaa eT TE abiy 4 23 Page vi Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems ZOOM FENN PTI SEE JERES RE METYE A L YET R 4 23 Scanning Speeds ew kosa dil on kk reen e kas 4 24 Special Options ea lta aye boo sin ed so ea 4 24 How Do I Calibrate My Instrument 4
92. ular template to the document there is an associated box to allow you to enter a known template name or an ellipsis to allow you to select a stored template If the template acts on a single measurement select New document also e Auto run TalyMap With this tick box set the TalyMap analy sis package 1s started at the end of the measurement sequence and the data collected from the scan is transferred to TalyMap TalyMap 3D analysis package from within the CCI soft Show TalyMap button The user is able to switch to the ware if required by clicking the Show TalyMap button Measure Start Measurement button Clicking this button will start the process of making the measurement The progress of the Scan and the subsequent Correlations Page 4 14 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems process is given by means of a progress bar on the measurement macro dialog The time remaining in seconds is displayed There are two measurement macro dialogs ie single and multiple as shown The multiple measurements option creates an average measurement from 2 4 8 or 16 measurements Measurement Macro Measurement Macro Measurement Progress Measurement Progress Scan Sean TATANDA Correlations Correlations EN Time remaining 102 seconds Time remaining 76 seconds Measurements 2 of 4 Status Measuring Status Measuring amp Measurement Type Can be set to HDD Sli
93. ure all of the data all of the fringes have to appear between the top and bottom limit markers Turn off any focussing aids Contrast reference Gradient enhance and Focus filter and use the slider to move the fringes around to check the light level Adjust the light level so that no yellow areas are visible Yellow areas show that there is too much light Ifa pixel is saturated at any point during a measurement it will turn into missing data Setting TalyMap options There are a number of options that you can set that will affect the way that TalyMap acts on the data measured Save 3D Data File As Enter the filename that you wish CCI to save the measured data file under Page 4 42 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems Auto increment If the box is ticked then subsequent measure ments can be stored with the same filename the software will add a three digit extension to the filename eg TalysurfCCIO01 sur TalysurfCCI002 sur and so on New document Select this tickbox if you wish TalyMap to start with a new document when it analyses the measured data Apply template to document Select the template that you wish TalyMap to apply to the analysed data Click on the ellipsis to browse the available templates If the template operates on a single measurement select the new document option also Auto run TalyMap Select this tickbox if you wish TalyMap to automatically start once the
94. urement by click ing on the scanning speed radio button x1 x5 or x9 The 1x speed produces the most accurate results but achieves this at the expense of measuring speed The x5 and x9 speeds increase measurement speeds whilst sacrificing accuracy The x5 and x9 speeds are most appropriate when the ultimate accuracy is not required that is when measuring rough surfaces When the scanning speed is changed a message is displayed informing you of the need to change the Hardware Light Filter see Light Levels page 4 37 is set to the same setting as the scan ning speed Special options Select any of the Special Options as required see page 4 48 Page 4 24 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems How Do I Calibrate My Instrument The calibration of the instrument is performed using one of the three calibration artefacts and utilises the software calibration wiz ard Calibration Types e XY Calibration X and Y Gains e Z Calibration Z Gain e Z Datum Correction Z Form from a single measurement e Advanced Z Datum Correction Z Form from multiple mea surements Calibration Wizard e You access the software calibration wizard through either the Actions menu see page 4 19 or the button on the toolbar e When the wizard is opened a live video image is displayed in the main image window e The wizard contains a front page displaying the current lens and each of the calibration typ
95. val The apparent size of a camera pixel see Points that is projected on the test sample Spatial Sampling Interval is a function of the interferometric microscope magnification Specular 1 an object that reflects light 2 In the direction in which a mirror reflects incident light Special Options A number of special configuration options available on the CCI instrument They are Data Output Mode Low Noise Scan Type and Post Threshold Full descriptions are given on page 4 7 of this handbook Surface Texture The repetitive or random deviation from the nominal surface that forms the three dimensional surface topography Includes lay Page 8 10 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems waviness roughness and flaws Any manufactured surface has irregularities due partly to the nature of the material but to a greater extent to the finishing operation used T Talymap Software Application that can calculate form and 3D surface fin ish Itis able to analyse data in a SUR format file Turret A rotating plate on a microscope that contains a number of objec tives to provide for a rapid change of magnification U User Person using the system to take a measurement or process con nected with taking a measurement Vv W Wavefront A surface connecting all field points of electromagnetic energy that are equi phased from the source Issue 5 2 September 2005 P
96. ve different phases In an interferometer the two wavefronts are produced by the reference surface and the test sample surface Interferometer An instrument that employs the interference of light waves to mea sure the wavefront Interferometric Objective An optical component that gathers light from the object and from a reference surface Creates an image with an interference pattern Page 8 4 Issue 5 2 September 2005 TS CCI 3D Non Contact Surface Profiler Systems J K L Lateral Resolution The smallest linear separable and measurable feature on the imaged surface Lateral resolution of an interferometric micro scope objective is a function of the numerical aperture and the Spatial Sampling Interval See Vertical Resolution and Sparrow M Magnification The amount of lateral enlarging produced by an interferometric microscope objective Measure Measurement Encompasses steps from capturing images to 3D processing does not include aligning component or 3D analysis MEMS Micro Electro Mechanical System Microroughness Fine irregularities of a surface Issue 5 2 September 2005 Page 8 5 TS CCI 3D Non Contact Surface Profiler Systems Mirau interferometer An interferometer with a beam splitter and reference mirror in line with the main optical path N Neutral Filter A filter that has attenuation independent of wavelength and there fore does not affect the bandwidth of light Also ter

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