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CMQ-V Series User's Manual
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1. No CP SP 1197E CMQ V Series Digital Mass Flow Controller User s Manual Communications JP Thank you for purchasing the CMQ V Series Digital Mass Flow Controller This manual contains information for ensuring correct use of the CMQ V Series communication functions This manual should be read by those who design and maintain devices that use the CMQ V Series communication functions Be sure to keep this manual nearby for handy reference Yamatake Corporation RESTRICTIONS ON USE This product has been designed developed and manufactured for general purpose application in machinery and equipment When using this product in application requiring particular safety special care should be taken to implement a fail safe and or redundant design concept as well as a periodic maintenance program Do not use this product in applications outlined below requiring particular safety e Safety devices for plant worker protection e Start stop control devices for transportation and material handling machines Aeronautical aerospace machines e Control devices for nuclear reactors Never use this product in applications where human safety may be put at risk IMPORTANT If it is necessary to change the parameters of the CMQ V Series frequently by communication write data at addresses of RAM The guaranteed data write count at the EEPROM addresses is limited to 100 000 times Note that the data in RAM is cleared
2. l 31H second byte of the station address 0 30H first byte of the sub address 0 30H second byte of the sub address X 58H device code R 52H first byte of the command S 53H second byte of the command omitted ETX 03H 1 Add the character codes in the message from STX through ETX in single byte units The add operation in single byte units is as follows 02H 30H 31H 30H 30H 58H 52H 53H e 03H Assume that the result is 376H 2 The low order one byte of the addition result 376H is 76H The two s complement of 76H is 8AH 3 Convert the obtained 8AH to a two byte ASCII code The result is 8 38H A 41H and the two bytes 8 38H and A 41H are the checksum e CR LF This indicates the end of the message Immediately after LF is received the device enters a state allowed to process the received message M Application layer The table below shows the configuration of the application layer Command RS decimal number format continuous address data read command WS decimal number format continuous address data write command RD hexadecimal number format continuous address data read command WD hexadecimal number format continuous address data write command Data delimiter RS WS comma RD WD None Word address RS WS 501W etc RD WD 01F5 etc Read count Numerical value of characters expressed as 1 for example Numerical value RS WS
3. 0 6660s cece cece eee eee es 15 M Error termination eiseres s6iececdseswasiweniake ys seen cae sine weed 15 Timing Specifications 0 cece eee eee enn nen een en eees 16 E Timing specifications for instruction and response message 16 M RS 485 driver control timing specifications se eee e ee eee 16 M Other precautions 0 eee eee eee ene e eee een e nent eens 17 Chapter 5 5 1 Chapter 6 6 1 6 2 Chapter 7 Chapter 8 APPENDIX COMMUNICATION DATA TABLE Basic Communication Data Processing ararararnenrnnrnrnrnen Communication data types and formats 6 0 cece cence eens Communication data storage Memory 6 6 c cee eee eens D ta a ddr ss See eng egw EEE re Data read write Count rrraaaaaava vaar v aar a isad eee eens Data unit and decimal point position 06 cece eee eens Communication Data Table 0 cece cece tence ee eee een aes Device related data 666 835 cds4eceedi aes session ear Operating status related d ta 0 066 6056 ssc teccmeeeesucnvessenavenws Flow set valus ciiise niert e ieee tia saee tc E AA Sara assowiss Heaees Totalized flow related data 0 ccc eee cece cece eee eee eee Function setup related data 6 cece eee eee eee eee ences Parameter setup related data cece eee eee eee eens COMMUNICATION PROGRAM FOR MASTER
4. 2 3 Writing of multiple data items Ui jo Mj 3 4 5 1 Fixed length continuous data write command 2 Start data address 3 Data 1 4 Data 2 to data n 1 5 Data n If writing is successful the normal termination code two decimal digits is returned If only part of the data is written and the remaining data is not written the warning termination code two decimal digits is returned If none of the data is written the abnormal termination code two decimal digits is returned e Normal termination 00 1 Abnormal termination or warning The abnormal termination code is entered at XX 1 For details of codes refer to gt 4 4 Termination Code Table on page 15 1 Termination code Maximum number of write data per message Up to 10 words for both RAM and EEPROM areas Chapter 4 COMMUNICATION PROCEDURE 4 4 Termination Code Table When an error occurred in the application layer an abnormal termination code is returned as a response message M Normal and warning termination Termination Type Contents and action code 00 Normal Communications end normally 21 Alarm Wrote data in the address that could not be set in the communication due to the setup allotment by external switching inputs The controller continues the process without writing any in the concerned address 23 Alarm The controller stops reading due to access to the address outside the scope The controller
5. ByteSize 0x08 DCB Parity EVENPARITY DCB StopBits ONESTOPBIT ifC SetCommState handle amp DCB CloseHandle handle handle void xffffffff return 8 return 0 Close void if handle void xffffffff I ifC SetCommMask handle XX CloseHandle handle handle void xffffffff return 2 ifC EscapeCommFunction handle CLRDTR CloseHandle handle handle void xffffffff return 3 if CloseHandleC handle return 4 handle void Oxffffffff telsef return 1 return Q Write unsigned char Mesg unsigned long Size unsigned long Error unsigned long Errors unsigned long SizeWritten COMSTAT Stat if handle void OxffffffFF return false ifC Size gt BUFFERSIZE printfC unsigned long size return false 35 Chapter 6 COMMUNICATION PROGRAM FOR MASTER STATION dot ClearCommError handle amp Errors amp Stat whileC BUFFERSIZE lt Stat cbOutQue Size if WriteFile handle Mesg Size amp SizeWritten false ifC GetLastError ERROR IO PENDING while GetOverlappedResult handle amp SizeWritten true Error GetLastError ifC Error ERROR_IO_INCOMPLETE continue telset ClearCommError handle amp Errors amp Stat break else ClearCommError handle amp Errors amp Stat ifC Size SizeWritten return true telset return false bool Read unsigned c
6. Front view Mating connector table All connectors are made by Hirose Electric Co Ltd Connector type Mating connector part No Mating contact Recommended wire part No Contact crimp type HIF3BA 20D 2 54C HIF3 2226SCC AWG 22 to 26 single wire allowed Forced pressure HIF3BA 20D 2 54R Not required AWG 28 Flat ribbon cable type only Chapter 2 WIRING Connector signal table Pin Signal name Description Remarks number 5V 5mA max 5Vdc reference voltage output 19 FLOW OUT Instantaneous flow rate PV 0 to 5Vdc 1 to 5Vdc 0 to 20mAdc voltage output setting flow rate 4 to 20mAdc SP output A GND Analog ground Common of analog signals 17 FLOW SP INPUT Instantaneous flow rate setting 0 to 5Vdc 1 to 5Vdc 0 to 20mAdc SP voltage input Open collector non insulated output Same as the common of digital signal DB o RS 485 communications DB Same as the common of digital signal POWER GND Power supply ground In order to decrease the voltage drop POWER GND Power supply ground caused by wiring resistance connect each POWER 24V Power supply 24Vde two wires to the power supply in parallel POWER 24V Power supply 24Vdc EG R m o Handling Precautions e Either pin No 6 and pin No 9 is able to connect as SG e For details on wiring way see the CMQ V Series Digital Mass Flow Controller user s manual No CP SP 1204E or CMQ V Series Digital Mass Flow Controller for Hydrogen and Hel
7. Numerical value of characters expressed as 100 for example to be written RD WD Numerical value of characters expressed in hexadecimal as 0064 for example 10 Chapter 4 COMMUNICATION PROCEDURE 4 3 Description of Commands E Continuous data read command RS command Send message Response message This command reads data of continuous addresses by a single command This command enables the content of continuous data addresses starting with the specified read start address to be read as a single message The figure below shows the structure of the application layer of the send message when the data is read Continuous read command 1 2 Data delimiter 3 Data address 4 Number of read data If the message is correctly received a response message corresponding to the command content is returned The figure below shows the structure of the application layer of the response message when the data is read Normal termination reading of single data item Abnormal termination The abnormal termination code is entered at XX 1 For details of codes refer to gt 4 4 Termination Code Table on page 15 1 Termination code 2 Data delimiter 3 Data 4 Data 2 to n 1 5 Maximum number of read data per message Up to 10 words for both RAM and EEPROM areas 11 Chapter 4 COMMUNICATION PROCEDURE E Continuous data write command WS command This command writes data to conti
8. OxFFFFFFFF 1 1C ReadSize 0 ErrFlag 0x00010000 return false return true int num unsigned char ch for ch amp str ch lt amp str len ch num ch num CNUm amp xOOGGOOFF amp XO00000FF sprintf Cchar buf 2X num bool AppCPLC char tosend char received unsigned char theMsg BUFFERSIZE unsigned char theApp BUFFERSIZE unsigned char theHdr 16 unsigned long SzToSnd unsigned long RdSz unsigned long ErrFlg bool rt int Cnt 0 unsigned char Sum 4 char etx if handle void xFFFFFFFF return false ZeroMemory theMsg BUFFERSIZE sprintfC Cchar theHdr x02 x30 x31 x30 x30 x58 void CPLSum unsigned char str int len unsigned char buf sprintf Cchar theMsg s s x 3 theHdr tosend if CheckSum SzToSnd strlen Cchar theMsg CPLSumC theMsg SzToSnd amp theMsg SzToSnd strcatC Cchar theMsg r n SzToSnd strlen char theMsg resend Write theMsg SzToSnd rt ReadC theMsg OxFFFFFFFF amp RdSz amp ErrFlg if Irt H if Cnt lt COMRESENDNUM goto resend ifC ErrFlg XX ErrorCode ErrFlg telsef ErrorCode 0x000 0000 return false 37 Chapter 6 COMMUNICATION PROGRAM FOR MASTER STATION else ifC strncmpC Cchar theMsg Cchar theHdr 6 0 ErrorCode x00020000 ifC Cnt lt COMRESENDNUM goto resend return false if Che
9. The guaranteed data write count at the EEPROM addresses is limited to 100 000 times Note that the data in RAM is cleared and the data in EEPROM is copied on RAM if the power supply to the CMQ Series interrupted E Communication data storage memory Memory type The communication data are stored in the following two types of memory e RAM Stored data is cleared when the power is turned OFF However data can be written to this memory any number of times e EEPROM Stored data is retained even when the power is turned OFF whereas data write operations are limited to a total of 100 000 times owing to device characteristics Communication object memory In communication it is necessary to read write data from into the abovementioned two types of memory according to the purpose and use There is a difference between the object memories as follows e RAM Data is read written from into RAM only If the power supply is turned off after writing data into RAM and then it is turned on again the data in EEPROM is copied on RAM so the data in RAM becomes the same as in EEPROM e EEPROM Data are written in both RAM and EEPROM 18 Chapter 5 COMMUNICATION DATA TABLE E Data address The data addresses are allocated as shown in the table below Communication data EEPROM Offset value Address Offset value Address Decimal Decimal Decimal Decimal Hexadecimal Hexadecimal Hexadecimal Hexadecimal Device rela
10. 4 COMMUNICATION PROCEDURE The time required for the master station to finish the transmittal of instruction message and for the slave station to start the transmittal of response message becomes longer if the number of data to write and read increases When the faster response time is required by the slave station make sure to keep the number of data to read write at the minimum in one message When the number of data is one data to read write in one message the time required for the master station to finish the instruction message and for the slave station to transmit the response message is about 30ms 17 Chapter 5 COMMUNICATION DATA TABLE 5 1 Basic Communication Data Processing E Communication data types and formats Types of communication data The communications data are categorized as follow e Device related data e Operating status related data e Instantaneous flow rate related data Integrated flow related data Function setup related data e Parameter setup related data Format of communication data Communication data is classified into the following formats Numeric data Data indicating a numeric value PV SP etc Bit data Data where each bit is significant alarms etc Bit data must be composed by transmission and decomposed by reception IMPORTANT If it is necessary to change the parameters of the CMQ Series frequently by communication write data at addresses of RAM
11. For details see Chapter 6 COMMUNICATION PROGRAM FOR MASTER STATION Transmission start time A wait time of 10ms is required before the master station starts to transmit the next instruction message to the same slave station or a different slave station after the end of receiving response message 2 in the figure below 1 2 Transmis Instruction Response Instruction Response sion line message message message message 1 End of master station transmission Transmission start time of slave station Max 2000ms 2 End of slave station transmission Transmission start time of master station Min 10ms M RS 485 driver control timing specifications When the transmission reception on the RS 485 3 wire system is directly con trolled by the master station care should be paid to the following timing 1 Master station driver control enable Transmission Effective Effective line data data instruction response Slave station message message driver control disable enable 3 gt End of master End of slave station transmission station transmission 1 End of master station transmission Driver disable time 500us max 2 End of slave station reception Driver enable time 15ms min 3 End of slave station transmission Driver disable time 10ms max 4 End of master station reception Driver enable time 10ms min 16 E Other precautions Chapter
12. W column marks O Possible X Impossible E Device related data Note e For RD and WD commands the data is required four hexadecimal digits Data range EEPROM Remarks Address W Address W Decimal Decimal Hexadecimal Hexadecimal Gas type 0 User setting 1001 4001 X X Gas type change is 1 Nitrogen Air 03E9 OFA1 possible by function 2 Oxygen setup Address 5018 3 Argon 4 Carbon dioxide 5 Natural gas 13A Heating value 46MJ m3 6 Propane 7 Methane 8 Butane 9 Hydrogen 10 Helium 11 Natural gas 13A Heating value 45MJ m3 Full scale flow Depend on flow rate 1002 4002 The decimal point rate range O3EA OFA2 is removed Decimal point 0 No decimal point 1003 4003 XIX position of 1 XXXX 03EB OFA3 instantaneous 2 XXX X flow rate 3 XX XX 4 X XXX Decimal point 0 No decimal point 1004 4004 position of 1 XXXXXXXX O3EC OFA4 integrated 2 XXXXXXX X flow rate 3 XXXXXX XX 4 XXXXX XXX Instantaneous 0 mL min 1005 FEN flow rate unit 1 L min O3ED FEN Integrated Oo L 1006 4006 flow rate unit 1 m3 O3EE OFA6 20 Chapter 5 COMMUNICATION DATA TABLE E Operating status related data Note e For RD and WD commands the data is required four hexadecimal digits e The flow rate unit L min becomes mL min in MQV9200 EEPROM Address ce Address Decimal Hexadecimal Decimal Hexadecimal Alarm status bit Refer to 1 1201 4201 04B1 1069 Refer t
13. alarm Control continued alarm ignored Forced fully closed Forced fully open Slow start disabled to 8 Slow start enabled equivalent to approx 1 to 6 seconds settling time Chapter 5 COMMUNICATION DATA TABLE he EEPROM Address Ww Address Ww Decimal Decimal Hexadecimal Hexadecimal Gas type selection 1 0 Conversion factor for 2018 5018 4 each gas type set by 07E2 139A the user Air nitrogen Oxygen Argon Carbon dioxide CO2 Natural gas 13A LNG Heating value 46MJ m3 6 100 propane 7 100 methane 8 100 butane 9 Hydrogen 10 Helium 11 Natural gas 13A LNG Heating value 45MJ m Flow rate display 0 20 C 1 atmosphere 2019 5019 unit selection 1 0 C 1 atmosphere 07E3 139B reference condi 2 25 C 1 atmosphere tions 3 35 C 1 atmosphere Valve amperage 0 Function disabled 2020 5020 alarm setup type 1 Only upper limit alarm 07E4 139C selection 2 Only lower limit alarm 3 Upper lower limit alarms Direct setup 0 Function disabled 2021 5021 function ON OFF 1 Function enabled 07E5 139D Control dead 0 Function disabled 2022 5022 zone setting 1 Function enabled 07E6 139E PV filter 0 Without filter 2023 5023 process for filtering 1 Two samplings moving 07E7 139F of instantaneous average flow rate 2 Four samplings moving average 3 Eight samplings moving average 1 The oxygen can not be set for other controllers except those
14. and the data in EEPROM is copied on RAM if the power supply to the CMQ V Series interrupted NOTICE Be sure that the user receives this manual before the product is used Copying or duplicating this user s manual in part or in whole is forbid den The information and specifications in this manual are subject to change without notice Considerable effort has been made to ensure that this manual is free from inaccuracies and omissions If you should find an error or omis sion please contact Yamatake Corporation In no event is Yamatake Corporation liable to anyone for any indirect special or consequential damages as a result of using this product 2007 Yamatake Corporation ALL RIGHTS RESERVED Micro Flow uF CMQ are trademarks of Yamatake Corporation IF SAFETY PRECAUTIONS J E About Icons Safety precautions are for ensuring safe and correct use of this product and for preventing injury to the operator and other people or damage to property You must observe these safety precautions The safety precautions described in this manual are indicated by various icons The following describes the icons and their meanings Be sure to read and understand the following descriptions before reading this manual CA U TI O N Cautions are indicated when mishandling this product might result in minor injury to the user or only physical damage to this product E Examples wrongful operation or misuse of th
15. e Wiring way except the RS 485 communications wiring refer to CMQ V series Digital Mass Flow Controller user s manual No CP SP 1204E or CMQ V Series Digital Mass Flow Controller for Hydrogen and Helium Gases user s manual No CP SP 1205E Chapter 2 WIRING 2 1 RS 485 Connection An example of connection methods in such a case is shown below CMQ V Series slave station Terminal Terminating resistor CMQ V Series slave station CMQ V Series slave station CMQ V Series slave station Terminating resistor Terminal block e Connect terminating resistors of 150Q 5 1 2W min at each end of the trans mission line e Terminal block is required for the CMQ V series because of the connector type connection e The cable to the terminal block from the CMQ V series must be as short as pos sible e The FG grounding must not be made at the both shielded wire ends but only at one location e Yamatake s CMC10L001A000 can be used as a converter of the host station o Handling Precautions Be sure to connect SG terminals each other Failure to do so might cause unstable communications Chapter 2 WIRING 2 2 Connector Pin Layout of the CMQ V Series The following shows the connector pin layout of the CMQ V Series with the communication functions amp Connector pin layout Mounted connector part number HIF3BA 20PA 2 54DS 20 19 Manufacturer Hirose Electric Co Ltd
16. hexadecimal characters The station address is set up by the station address setup setup setting C65 However when the station address is set to 0 30H 30H the device creates no response even if station addresses match The device returns the same station address as that of the received message Sub address The C35 36 does not use the sub address For this reason set 00 30H 30H The device returns the same sub address as that of the received message Device code The device sets X 58H or x 78H as the device code This code is determined for each device series and other codes cannot be selected The device returns the same device code as that of the received message X 58H is used as the default and x 78H is used for judging the message as the resend message e ETX ETX indicates the end of the application layer Checksum This value is for checking whether or not some abnormality e g noise causes the message content to change during communications The checksum is expressed as two hexadecimal characters Chapter 4 COMMUNICATION PROCEDURE e How to calculate a checksum 1 Add the character codes in the message from STX through ETX in single byte units 2 Take two s complement of the low order one byte of the addition result 3 Convert the obtained two s complement to a two byte ASCII code The following is a sample checksum calculation Sample message STX 02H 0 30H first byte of the station address
17. stops writing due to access to the address outside the scope however writes inside addresses E Error termination Termination Type Contents and action code 40 Error W has not been set at the address All messages are aborted 41 Error WS or RS has not been set All messages are aborted 43 Error ETX 03H is not set in the correct position is not set after the address All messages are aborted 46 Error The address is erroneous All messages are aborted 47 Error There is an error in the number of word addresses to read All messages are aborted 48 Error There is an error in the written numeric Write has been executed except for the error address Error An undefined command or other message error All messages are aborted 15 Chapter 4 COMMUNICATION PROCEDURE 4 5 Timing Specifications E Timing specifications for instruction and response message The cautions below are required with regard to the timing to transmit a instruction message from the master station and a response message from the slave station Response monitor time The maximum response time from the end of the instruction message transmission by the master station until when the master station receives a response message from the slave station is two seconds 1 in the figure below So the response monitor time should be set to two seconds Generally when a response time out occurs the instruction message is resent
18. the CMQ V Series WIRING This chapter describes RS 485 wiring methods to make a communication link between the CMQ V Series and other instruments SETTING This chapter describes CMQ V Series communication settings COMMUNICATION PROCEDURE This chapter describes communication procedures message configuration data read write and signal timing operations COMMUNICATION DATA TABLE This chapter provides various data address tables for communications on the CMQ V Series COMMUNICATION PROGRAM FOR MASTER STATION This chapter gives precautions for programming and an example of a com munication program for the CMQ V Series TROUBLESHOOTING This chapter describes checkpoints to diagnose failures in CMQ V Series communications SPECIFICATIONS This chapter lists communication specifications for the CMQ V Series The appendix provides code tables Conventions Used in This Manual The following conventions are used in this manual CJ Handling Precautions Handling Precautions indicate items that the user should pay attention to when handling the CMQ V Series Note Notes indicate useful information that the user might benefit by knowing 1 2 3 The numbers with the parenthesis indicate steps in a sequence or indicate corresponding parts in an explanation DISP key This indicates a key on the setup display iv Contents SAFETY PRECAUTIONS The Role of This Manual Organization of This User s Manual
19. 08A0 Event output 2 delay 0 0 to 999 9s 2209 08A1 Valve amperage upper 0 1 to 100 0 limit alarm 08A3 Valve amperage lower 0 0 to 99 9 2212 limit alarm 08A4 Event output 1 upper 0 to 100 FS 2213 lower limit flow rate setup 08A5 Event output 2 upper 0 to 100 FS 2214 lower limit flow rate setup 08A6 SP ramp control ramp 1 MQV9200 9500 0 0 to 999 9 SP ramp control ramp 2 MQV0002 0005 0 000 to 9 999 MQV0010 0020 0050 0 00 to 99 99 MQV0200 0500 0 0 to 999 9 MQV1000 0 to 9999 Unit L min standard mL min standard for the MQV9200 Delay does not apply to totalizer pulse Unit L min standard mL min standard for the MQV9200 Chapter 5 COMMUNICATION DATA TABLE EEPROM Data range Address W Address W Decimal Decimal Hexadecimal Hexadecimal Analog scaling 10 to 100 FS 5217 Unit L min 1461 standard mL min standard for the MQV9200 Cumulative flow event 0 to 9999 2218 5218 Same as setting last 4 digits O8AA 1462 apes 601 an i Remarks Cumulative flow event 0 to 9999 2219 5219 Same as ing first 4 digi address 1602 setting first 4 digits 08AB 1463 IAO PV forced zero function 0 0 to 999 9s 2220 5220 delay 08AC 1464 SP upper limit flow rate 0 to 100 FS 2221 5221 Unit L min 08AD 1465 standard mL min SP lower limit flow rate 0 to 100 FS 2222 5222 standard for 08AE 1466 the MQV9200 31 Chapter 6 COMMUNICATION PROGRA
20. Conventions Used in This Manual Chapter 1 Chapter 2 2 1 2 2 Chapter 3 Chapter 4 4 1 4 2 4 3 4 4 OUTLINE EET EE EE Aisi aipane A miele a Aue biseass 1 WIRING RS 485 Connection s suixsrsssases site saa dios oR ess ee skare Ganda Hause blek sved 3 Connector Pin Layout of the CMQ V Series 06 6 cece eee e eee ees 4 SETTING M Setting method of communication functions ee 6 M Setting items of communication functions eee eee 6 COMMUNICATION PROCEDURE Outline of Communication 0 00 cece cece cece teen cnet ee eeeeeeeee 7 E Communication procedures eee e eee eee eee ees 7 Message Structure 6 eee eee eee eee n eee e nent eens 8 M Message structure cece eee eee eee eee e nett een neeeee 8 M Data link layer ee eee cent e eee n etn teen eens 8 M Application layer eee eee eee eee teen eee 10 Description of Commands 0 cee e cece eect nent eet eens 11 M Continuous data read command RS command 11 M Continuous data write command WS command 12 E Continuous data read command RD command 13 M Continuous data write command WD command 14 Termination Code Table 2 eee c cece eect eee e eee e eee eeeeees 15 M Normal and warning termination
21. M FOR MASTER STATION 6 1 Precautions for Programming 32 amp The maximum response moniter time of the instrument is 2 seconds So set the response time out to 2 seconds If no response is obtained within 2 seconds retransmit the same message The above retransmission is required since a message may not be properly transmitted due to noise or the like during communications Note When X is used as the device ID code in the instruction message the device ID code of the response message also becomes X Likewise the code in the response message becomes x when x is used as the device code in the instruction message Use the X and x device ID codes alternately during message retransmis sion from the master station to make it easier to identify whether the received response message is the current one or the preceding one Chapter 6 COMMUNICATION PROGRAM FOR MASTER STATION 6 2 Examples of Communication Program The program in this section is written in Borland s C Builder5 0 or Borland C Compiler5 5 for Windows95 98 NT 2000 This program is given here as a reference when the user makes a program and does not assure all the operations You can download Borland C Compiler5 5 from Borland Home Page E Before executing the program Make sure to check the settings for communications type station address transmis sion speed and data format of the instrument M Executing the progr
22. STATION Precautions for Programming 0 se cee eee eee teen eee tenes Examples of Communication Program e eee ee eee eee eee ees M Before executing the program 0 see e cece cece eects M Executing the program eee eee eee eee e eee e tenet enes M Data read write sample program 0s cece cece ees TROUBLESHOOTING M Check items in case communication is disabled SPECIFICATIONS M RS 485 specifications 6 eee e ene eee eee n ences E Code ta ble nee ne enn ee ee M Connection with CMCIOL 0 cece cece cee cece eee eee eees vi Chapter 1 OUTLINE If the optional model is provided with the RS 485 communications function communication with a PC PLC or other host devices are available using a user configured program The communication protocol can be selected from the Controller Peripheral Link CPL communications Yamatake s host communication protocol This chapter describes the CPL communications HM Features The features of the CMQ V s communications function are as follows e Up to 31 units can be connected to a single master station as a host device e When the communication specifications of the host device conform to the RS 232C interface the communication converter CMC10L sold separately is required The CMC10L allows the conversion between RS 232C and RS 485 e Almost all of the d
23. am This program is used for reading and writing data When the program is executed the application layers of the instruction message and response message communicated are indicated command RS 1001W 2 result 00 0 0 command WS 1204W 2 result 00 Sample indication of execution results Processing of the sample program e Communication settings Call open and initialize the RS 232C serial port e Command execution Set a desired character string in command and call AppCPL 33 Chapter 6 COMMUNICATION PROGRAM FOR MASTER STATION M Data read write sample program o Handling Precautions Yamatake won t be absolutely responsible for any trouble caused by apply ing this program sample C Builder 5 Borland C bcc32 cpl cpp cygwin gcc gcc cpl cpp include lt stdio h gt include lt windows h gt pragma hdrstop define COMRESENDNUM 2 define BUFFERSIZE 4096 define TIMEOUT 2000 HANDLE handle unsigned long ErrorCode bool CheckSum bool AppCPL char tosend char received int OpenC void int Close void bool Write unsigned char Mesg unsigned long Size bool Read unsigned char Buffer unsigned long SizeToRead unsigned long ReadSize unsigned long ErrFlag void CPLSum unsigned char str int len unsigned char buf int main int argc char argv char command 255 char recieve 255 handle void JOxffFFFFFF ErrorCode Q CheckSu
24. ckSum CPLSumC theMsg RdSz 4 Sum ifC CtheMsg RdSz 4 Sum I I CtheMsg RdSz 3 Sum 1 ErrorCode x00040000 ifC Cnt lt COMRESENDNUM goto resend return false ZeroMemory theApp BUFFERSIZE CopyMemory theApp amp theMsg 6 RdSz 6 etx strstr Cchar theApp x 3 if etx NULL ErrorCode x00200000 ifC Cnt lt COMRESENDNUM goto resend return false telsef etx 0x00 strcpy received char amp theApp return true 38 Chapter 7 TROUBLESHOOTING M Check items in case communication is disabled 1 Check the power supply 2 Check the wiring 3 Check if the communication conditions for the CMQ V Series meet those for the host computer If any one of the following setting items is different between both stations communication is disabled The underlined items mean that they can be set on the CMQ V Series side Transmission seed 38400 19200 9600 4800 2400bps Data length 7 8 bits Parity No parity odd parity even parity Stop bit I stop bit 2 stop bits 4 Check if the destination address of the command frame transmitted from the host computer meets the address set to the CMQ V Series The address of the CMQ V Series set to 0 for factory setting Even when the destination address of the command frame is set to 00 30H 30H the CMQ V Series does not respond to such a message 5 Use the upper case character codes for all t
25. destination of the communication message and the check information of the message Application layer Data is read and written in this layer The content of the layer varies according to the purpose of the message Messages comprise parts 1 to 9 as shown in the figure below The command details sent from the master station and the response details returned from the slave station are stored in the application layer 1 STX start of message 6 ETX end of command response 2 Station address 7 Checksum 3 Sub address 8 CR delimiter 4 Device code 9 LF delimiter 5 Send message command response message response M Data link layer Outline The data link layer is of a fixed length The position of each data item and the number of its characters are already decided Note however that the data positions of the data link layer from ETX onwards shift according to the number of characters in the application layer The character length however remains unchanged Response start conditions e The device sends the response message only when 1 message structure station address sub address checksum and message length of a single frame in the data link layer are all correct If even one of these is incorrect no response messages are sent and the device waits for new message e Number of word addresses accessible by a single frame Description of command EEPROM area Decimal format read command 1 to 10 1
26. e input 1 0 to 5V external reference input 2 1 to 5V external 24 reference input Input range selection of analog setup analog SP input range selection Analog output type and range selection analog PV output range selection Event 1 output type assignment Event 2 output type assignment External 3 stage switching function assignment Data range 2 Analog output selection is set at current output G6 2 3 6 or 7 0 0 to 20mA external reference input 1 0 to 20mA external reference input 2 4 to 20mA external reference input 0 to 5V instantaneous flow rate output 1 to 5V instantaneous flow rate output 0 to 20mA instantaneous flow rate output 4 to 20mA instantaneous flow rate output 0 to 5V setting flow rate output 1 to 5V setting flow rate output 0 to 20mA setting flow rate output 4to 20mA setting flow rate output Not used OFF fixed ON when the totalized flow event occurs Totalized pulse output ON when the flow rate is OK ON in control mode ON in fully open mode ON in control or fully open mode 7 ON in fully closed mode 8 PV upper limit event 9 PV lower limit event 1 10 PV lower limit event 2 1 to 10 Inverse output of above 1 to 10 Normal operation ON Event occurrence OFF Not used Switching of operating mode 1 Switching SP No Switching of totalizing operation Switching of analog I O voltage range simultane
27. essage is sent successfully the termination code is taken to be normal two decimal digits and returned appended with the number of read data four hexadecimal digits X number of read data specified by the command If message transmission ends in error the termination code is taken to be in error two decimal digits and returned without the read data e Normal termination reading of single data item ooj i 1 Mj 2 e Normal termination reading of multiple data items Hoa NESSE M 3 4 Abnormal termination The abnormal termination code is entered at XX 1 For details of codes refer to gt 4 4 Termination Code Table on page 15 1 Termination code 2 Data 3 Data 2 to data n 1 4 Data n Maximum number of read data per message Up to 10 words for both RAM and EEPROM areas 13 Chapter 4 COMMUNICATION PROCEDURE M Continuous data write command WD command 14 Send message Response message This command writes continuous data in two byte units This command is suitable for handling data in ladder programs sent by PLC communications as the data is of a fixed length The start data address is expressed as four hexadecimal digits Data is expressed as four X n n is a positive integer hexadecimal digits The write start data address four hexadecimal digits and the number of write data four X n hexadecimal digits are sent e Writing of single data item i TT EN 1
28. evice parameters can be communicated For details on communication parameters refer to gt Chapter 5 COMMUNICATION DATA TABLE RS 485 connection example Master station RS 232C RS 485 converter RS 485 3 wire system Slave station CMQ V series etc Connection between master station and slave station Chapter2 WIRING ACAUTION Use the CMQ V Series within the operating ranges recommended in the specifications of user s manual CP SP 1204E and CP SP 1205E temperature humidity voltage vibration shock mounting direction atmosphere etc Failure to do so might cause malfunction Be sure to turn the power off before connecting the controller Failure to do so might cause malfunction Wire this controller in compliance with the predetermined standards Also wire the controller with specified cables and recognized installation methods Failure to do so might cause malfunction Make sure that wire scraps chips or water do not enter inside the case of the controller Failure to heed this caution may lead to malfunction If there is a risk of a power surge caused by lightning use Yamatake Corporation s SurgeNon to prevent possible fire or equipment failure Be sure to check that the wiring is correct before turning the power on Incorrect wiring could cause damage or malfunction Do not disassemble the controller Doing so might cause malfunction Q Q Q Q Q Q Q 5 Handling Precautions
29. except those shipped only for the oxygen gas application The hydrogen and helium gases can not be set for other controllers not subject to hydrogen and helium gas applications Also the controllers subjected to the hydrogen and helium gases can not be set for the standard gases of Items 1 to 8 and 11 given in the data range Chapter 5 COMMUNICATION DATA TABLE Item Data range EEPROM Remarks g Address Address Decimal Decimal Hexadecimal Hexadecimal Station address setting Transmission speed selection Data format selectio SP limit function Operational differential pressure setting control optimization Flow rate display unit change func tion PV instantaneous flow rate display decimal point posi tion change function 0 Communications function disabled 1 to 127 Station address 0 38400bps 1 19200bps 2 9600bps 3 4800bps 4 2400bps 0 8 data bits even parity 1 stop bit 1 8 data bits no parity 2 stop bits 0 SP limit function disabled 1 Only upper limit enabled 2 Only lower limit enabled 3 Upper and lower limits enabled 0 Low differential pressure 50 50kPa 1 Standard differential pressure 200 100kPa 2 High differential pressure 300 0 100kPa 0 Flow rate is displayed in the standard flow rate unit 1 Flow rate is displayed in L min fixed 1 Flow rate is displayed in mL min fixed 0 Decimal point position is not changed 1 Decimal point p
30. ey after carrying out the operation in step 4 the setting remains at the previous value without being update E Setting items of communication functions Function Item Setup item and description Factory Remarks setup item setting Station address 0 Communications function The communications function does disabled not work at 0 Set a different ad 1 to 127 Station address dress from the slave station Transmission speed 0 38400bps 19200bps 9600bps 4800bps 2400bps Data format 8 bit data even parity 1 stop bit 8 bit data no parity 2 stop bits Chapter 4 COMMUNICATION PROCEDURE 4 1 Outline of Communication E Communication procedures The communication procedure is as follows 1 The instruction message is sent from the host device master station to one unit slave station to communicate with 2 The slave station receives the instruction message and performs read or write processing according to the content of the message 3 The slave station sends a message corresponding to the processing content as a response message 4 The master station receives the response message Chapter 4 COMMUNICATION PROCEDURE 4 2 Message Structure E Message structure The following shows the message structure Messages are broadly classified into two layers the data link layer and the application layer e Data link layer This layer contains the basic information required for the communication such as the
31. har Buffer unsigned long SizeToRead unsigned long ReadSize unsigned long ErrFlag i BOOL rt unsigned char RecvMesg BUFFERSIZE unsigned char cptr unsigned long i unsigned long stime unsigned long dtime unsigned long Error 0 unsigned long Size COMSTAT Stat ReadSize ErrFlag dtime Q if handle void Oxffffffff return false stime GetTickCount dot ClearCommError handle amp Error amp Stat ifC Stat cbInQue gt ZeroMemory RecvMesg BUFFERSIZE rt ReadFile handle RecvMesg Stat cbInQue amp Size RecvMesg Stat cbInQue 0x00 ifC Irt X Clear Error Flag ClearCommError handle amp Error amp Stat Set Error Flag ErrFlag Error return false for cptr amp RecvMesg i cptr lt amp RecvMesg Stat cbInQue cptr i ifC SizeToRead OxFFFFFFFF ifC cptr 0x02 ReadSize Q Buffer ReadSize cptr telsef ifC cptr Yn Df Buffer ReadSize cptr ifC Buffer ReadSize 2 Yr f Buffer ReadSize x00 goto OutOfWhile Buffer ReadSize cptr 36 Chapter 6 COMMUNICATION PROGRAM FOR MASTER STATION telsef Buffer ReadSize cptr ifC C ReadSize gt SizeToRead goto OutOfWhile Sleep 1 dtime GetTickCount Q stime Iwhile CSizeToRead gt ReadSize amp amp dtime lt TIMEOUT OutOfWhile ifC CCSizeToRead gt ReadSize amp amp CSizeToRead
32. he character codes other than the device code X or x in this controller 6 Are those multi dropped controllers belong operated themselves with different device address setups 7 Is the communication timing conformed with the Chapter 4 5 Timing Specifications page 16 39 Chapter 8 SPECIFICATIONS E RS 485 specifications Transmission speed bps 2400 4800 9600 19200 38400 Transmission distance 500m max 300m when connected with the MA500DIM and CMC410 Communications flow Half duplex Synchronization Start stop synchronization Data format 8 data bits 1 stop bit even parity 8 data bits 2 stop bits no parity Error detection Parity check checksum Station address 0 to 127 Communication function is inhibited when set to O 1 Network type N 31 units max The rest of items Conforms to RS 485 interface specifications 40 APPENDIX M Code table are not used for this communication The shaded parts of the table above system 41 APPENDIX M Connection with CMC10L The CMC10L001A000 is available as an RS 232C RS 485 3 wire system con verter from Yamatake s The following diagram shows an example of wiring using a straight cable for a host computer in the terminal mode CMQ V Series slave station Terminating resistor Shielded cable CMQ V Series slave station Shielded cabley CMQ V Series slave s
33. is product These icons graphically represent the actual danger The example on the left warns the user of the danger of electrical shock Triangles warn the user of a possible danger that may be caused by White circles with a diagonal bar notify the user that specific actions are prohibited to prevent possible danger These icons graphically represent the actual prohibited action The example on the left notifies the user that disassembly is prohibited Black filled in circles instruct the user to carry out a specific obligatory action to prevent possible danger These icons graphically represent the actual action to be carried out The example on the left instructs the user to remove the plug from the outlet ACAUTION Use the CMQ V Series within the operating ranges recommended in the specifications of user s manual CP SP 1204E and CP SP 1205E temperature humidity voltage vibration shock mounting direction atmosphere etc Failure to do so might cause malfunction Be sure to turn the power off before connecting the controller Failure to do so might cause malfunction Wire this controller in compliance with the predetermined standards Also wire the controller with specified cables and recognized installation methods Failure to do so might cause malfunction Make sure that wire scraps chips or water do not enter inside the case of the controller Failure to heed this caution may lead
34. ium Gases user s manual No CP SP 1205E Chapter 3 SETTING Setup the following to operate the communication functions of the CMQ Series E Setting method of communication functions Follow the following procedure to set the functions 1 Display the instantaneous flow rate by pressing the DISP key gt gt PV lamp and L min lamp mL min in MQV9200 start lighting 2 Keep pressing the W key and the ENT key at the same time for 3 seconds or more gt gt The item No amp appears on the 7 segment display and mode changes to the function setup mode 3 Select a desired setup item by pressing either A key or V key and then press the ENT key gt gt The current setting flashes on the 7 segment display 4 Select a desired setting by pressing either A key or V key 5 After a desired setup mode is selected confirm it by pressing the ENT key gt gt At this point the setup is updated After about one second the item number display is returned 6 If other setting items are desired return to 3 for setting If no other item is desired to be set proceed to the item 7 7 Press the DISP key to make the status from the function setup mode to instan taneous flow rate display B Handling Precautions e If any key is not pressed for one minute after the function setup mode the display automatically returns to the instantaneous flow rate display Ifthe DISP key is pressed without pressing the ENT k
35. larm nm gt FT Po Valve amperage upper limit alarm Sensor error common to AL81 AL82 and AL83 Input output adjustment data error Sensor calibration data error User setup data error P P gt gt CICIT N ojoj jo vij Valve overheat prevention limit operation 1 Sensor error 1 L81 Sensor error 2 AL82 Sensor error 3 AL83 gt 2 Event status bit configuration Address 1202 0 OFF 1 ON 0 ftvenmomuisas 6 Extemal sage switching input saus 1 OV npuy 3 Alarm status bit configuration Address 1203 0 OFF 1 ON OK lamp PV control status 0 Light out 1 Lighting Instantaneous PV OK 1 Slow start operation 0 Normal operation 1 Slow start operation 2 Digital setting Analog setting 0 Digital setting 1 Analog setting 3 Totalizing count status 0 Totalized flow PV lt Totalized flow event SP 1 Totalized flow PV 2 Totalized flow event SP 4 SP ramp control function 0 Function disabled 1 SP ramp control enabled Undefined 0 fixed 6 Undefined 0 fixed 7 Undefined 0 fixed 22 Chapter 5 COMMUNICATION DATA TABLE E Flow set value Note e For RD and WD commands the data is required four hexadecimal digits The flow rate unit L min becomes mL min in MQV9200 Data range EEPROM Remarks Address W Address W Decimal Decimal Hexadecimal Hexadecimal Flow set value SP 0 0 to 100 FS 1401 4401 The value i
36. m true if Open strcpyCcommand RS 1000W 2 AppCPLCcommand recieve printfC command s n command printfC result s n recieve strcpyCcommand WS 100QW 2 AppCPLCcommand recieve printfC command s n command printfC result s n recieve CloseQ getchar return 1 int Open void COMMTIMEOUTS Timeouts _DCB DCB handle CreateFile COM1 GENERIC_READ GENERIC_WRITE OPEN_EXISTING FILE_ATTRIBUTE_NORMAL ifC handle void xffffffff return 3 ifC SetupComm handle BUFFERSIZE BUFFERSIZE CloseHandle handle handle void xffffffff return 4 34 int Chapter 6 COMMUNICATION PROGRAM FOR MASTER STATION ifC PurgeComm handle PURGE_TXABORT PURGE RXABORT I PURGE_TXCLEAR PURGE_RXCLEAR CloseHandle handle handle void xffffffff return 5 Timeouts ReadIntervalTimeout Timeouts ReadTotalTimeoutMultiplier Timeouts ReadTotalTimeoutConstant Timeouts WriteTotalTimeoutMultiplier Timeouts WriteTotalTimeoutConstant OxFFFFFFFF O OOO ifC SetCommTimeouts handle amp Timeouts CloseHandle handle handle void xffffffff return 6 ifC GetCommStateC handle amp DCB CloseHandle handle handle void xffffffff return 7 DCB BaudRate CBR 19200 DCB fBinary 1 DCB fParity 1 DCB
37. mands the data is required four hexadecimal digits Item Data range Remarks Address R W Address R W Decimal Decimal Hexadecimal Hexadecimal Key lock Run 0 Key lock disabled 2001 5001 1 Settings other than 07D1 1389 instantaneous SP and integrated SP are key locked All settings key locked RUN key operation 0 RUN key disabled 5002 selection and Operation starts in the 138A operation mode control mode when the selection when power is turned ON power turned ON RUN key enabled 1 Operation is started up in the operating mode used before power shut down when the power is turned ON RUN key enabled 2 Operation is started up in the fully closed mode when the power is turn ed ON Flow rate setup Digital setup set by key 5003 method SP setup operation or 138B method selection communications Analog setup set by external analog input voltage Number of flow set Number of SPs 1 5004 value selection SP 0 only 138C number of SPs Number of SPs 2 selection SP 0 SP 1 Number of SPs 3 SP 0 to SP 2 Number of SPs 4 SP 0 to SP 3 Number of SPs 5 SP 0 to SP 4 Number of SPs 6 SP 0 to SP 5 Number of SPs 7 SP 0 to SP 6 Number of SPs 8 SP 0 to SP 7 Input range selection 1 Analog output selection 5005 of analog setup is set at voltage output 138D analog SP input 56 0 1 4 or 5 range selection 0 0 to 5V internal referenc
38. n and helium gases in instrumenta tion should read this manual This manual outlines the product tells how to install wire and incorporate the product into instrumentation and describes its operation inspection and maintenance troubleshooting and hardware specifications Digital Mass Flow Controller CMQ V Series Communications Manual No CP SP 1197E This manual Those using the communications functions of the CMQ V series should read this manual This manual describes an outline of communications wiring communications procedures CMQ V series communications data trouble shooting and communications specifications MLP100 Loader Package for CMQ V Series Digital Mass Flow Controller Manual No CP SP 1216E This manual is supplied with the MLP100 Loader Package The manual describes the software used to make various settings for CMQ V Series using a personal computer Personnel in charge of design or set ting of a system using CMQ V Series must thoroughly read this manual The manual describes installation of the software into a personal computer operation of the personal computer various functions and setup proce dures iii Organization of This User s Manual This manual is organized as follows Chapter 1 Chapter 2 Chapter 3 Chapter 4 Chapter 5 Chapter 6 Chapter 7 Chapter 8 APPENDIX OUTLINE This chapter briefly describes communication functions of
39. n the L min 0579 1131 data range L min Flow set value SP 1 Flow set value SP 2 0 to 100 FS L min 0 to 100 FS L min 1402 4402 is the value 057A H 1132 g removed decimal point that obtained 1403 4403 by full scale flow 057B 1133 rate multiplied by Flow set value SP 3 0 to 100 FS 1404 4404 the percentage in L min 057C 1134 parentheses Flow set value SP 4 0 to 100 FS 1405 4405 L min 057D 1135 Flow set value SP 5 0 to 100 FS 1406 4406 L min 057E 1136 Flow set value SP 6 0 to 100 FS 1407 4407 L min 057F 1137 Flow set value SP 7 0 to 100 FS L min E Totalized flow related data OJO OJO Note e For RD and WD commands the data is required four hexadecimal digits Data range EEPROM Remarks Address W Address W Decimal Decimal Hexadecimal Hexadecimal Totalized flow event 0 to 9999 1601 4601 Same as RAM setting lower 4 digits 0641 11F9 address 2218 and 5218 in parameter set up Totalized flow event 0 to 9999 1602 4602 Same as RAM setting upper 4 digits 0642 11FA address 2219 and 5219 in parameter set up Totalized flow lower 0 to 9999 1603 4603 When resetting the 4 digits 0643 11FB totalized value Totalized flow upper 0 to 9999 1604 OJO 4604 O O make sure to write 4 digits 0644 11FC 0 for the both lower and upper digits 23 Chapter 5 COMMUNICATION DATA TABLE E Function setup related data Note e For RD and WD com
40. nuous addresses Send message The figure below shows the structure of the application layer of the send message for the data write command Write command Data delimiter Write data first word 1 2 3 Start write data address 4 5 Write data second word Response message The figure below shows the structure of the application layer of the response message for the data write command e Normal termination 00 1 Abnormal termination or warning The abnormal termination code is entered at XX 1 For details of codes refer to gt 4 4 Termination Code Table on page 15 1 Termination code Maximum number of write data per message Up to 10 words for both RAM and EEPROM areas 12 Chapter 4 COMMUNICATION PROCEDURE E Continuous data read command RD command Send message Response message This command reads continuous data in two byte units This command is suitable for handling data in ladder programs sent by PLC communications as the data is of a fixed length The start data address is expressed as four hexadecimal digits The number of read data is expressed as four digits and data is expressed as four X n n is a positive integer hexadecimal digits The read start data address four hexadecimal digits and the number of read data four hexadecimal digits are sent 1 Fixed length continuous data read command 2 Start data address 3 Number of read data If the m
41. o 2 1202 x 4202 x X 04B2 106A Refer to 3 1203 x 4203 XIX 04B3 106B 1204 4204 04B4 106C Event status bit Control status bit Operation mode 0 Valve full close 1 Valve control 2 Valve full open Instantaneous SP 0 SP 0 1205 4205 04B5 106D 1206 x 4206 x x 04B6 106E 1207 x 4207 x x 04B7 106F 0 to 100 FS L min 0 to 100 FS L min Instantaneous SP value in use Instantaneous PV value For RS command status is shown in decimal numbers For RS command status is shown in decimal numbers For RS command status is shown in decimal numbers When the valve is in full close or full open by external inputs write operation is disabled When SP No switching is selected by external inputs write operation is disabled The value larger than the one selected with SP No Address 5004 of the function setup can not be written The value in the data range L min is the value removed decimal point that obtained by full scale flow rate multiplied by the percentage in parentheses Valve actuation 0 0 to 100 0 1208 O Xx 4208 X X The decimal point is current 04B8 1070 removed 21 Chapter 5 COMMUNICATION DATA TABLE 1 Alarm status bit configuration Address 1201 0 Normal 1 Error oo Deviation lower limit alarm of instantaneous flow rate AL01 Deviation upper limit alarm of instantaneous flow rate ALO2 Valve amperage lower limit a
42. o pin 2 D Sub 25 pin D Sub 9 pin conversion cable An RS 232C cable for conversion between D Sub 25 pin and D Sub 9 pin 43 Revision History date an 2007 or SP nszefistedmon azbil Yamatake Corporation Advanced Automation Company 1 12 2 Kawana Fujisawa Kanagawa 251 8522 Japan URL http www azbil com Printed on recycled paper 07 Specifications are subject to change without notice Printed in Japan 1st Edition Issued in Jan 2007 U
43. osition is shifted one digit left 1 Decimal point position is shifted one digit right 2030 5030 X Though a 07EE 13A6 normal codis code is 5031 returned 13A7 after sending the write instruction message 5032 the data 13A8 cannot be written 5035 13AB 5036 This func 13AC tion is in valid for the MQV0050 J K 5037 This func 13AD tion is valid only for the MQV9200 9500 0002 0005 5038 OJo 13AE 29 Chapter 5 COMMUNICATION DATA TABLE E Parameter setup related data 30 Note e For RD and WD commands the data is required four hexadecimal digits e When the function setup is not valid parameter setup is invalid e The decimal point of all data is removed Item Data range Address W Decimal Hexadecimal Address Decimal Hexadecimal Instantaneous flow rate 0 5 to 100 FS 2201 5201 O K judgment range 0899 1451 Instantaneous flow rate 0 5 to 100 FS 2202 5202 O K judgment hysteresis 089A 1452 Instantaneous flow rate 0 5 to 100 FS 2203 deviation upper limit alarm 089B Instantaneous flow rate 0 5 to 100 FS deviation upper limit alarm hysteresis Instantaneous flow rate 0 5 to 100 FS 2205 deviation lower limit alarm 089D Instantaneous flow rate 0 5 to 100 FS 2206 deviation lower limit alarm 089E hysteresis Instantaneous flow rate 0 5 to 999 9s 2207 deviation alarm judgment 089F delay time Event output 1 delay 0 0 to 999 9s 2208
44. ous external switching of 45 and D a Switching of operating mode 2 Chapter 5 COMMUNICATION DATA TABLE EEPROM Address Ww Address Ww Decimal Decimal Hexadecimal Hexadecimal 2005 5005 07D5 138D External contact input 1 function assignment External contact input 2 function assignment External contact input 3 function assignment Automatic valve shut off when the totalized flow event occurs On off of totalized flow reset function at start of control Flow rate alarm setup type Operation selection at alarm occurrence Slow start setup Chapter 5 COMMUNICATION DATA TABLE Data range Address WwW Address Ww Decimal Decimal Hexadecimal ii Hexadecimal a Not used 2010 5010 Reset totalized flow count 1392 Stop totalizing flow count 2011 5011 Switching of SP No 07DB 1393 Switching of instantaneous flow rate setup method Valve forced fully closed Valve forced fully open Switching of slow start operation or switching of instantaneous SP ramp control operation Switching of operating mode control by contact ON forced fully closed by contact OFF 9 Flow rate zero adjust ment 10 Switching of gas type setup 11 Switching of flow rate range 12 Switching of SP ramp 13 Alarm reset Function disabled Function enabled Function disabled Function enabled Function disabled Only upper limit alarm Only lower limit alarm Upper lower limit
45. shipped only for the oxygen gas application The hydrogen and helium gases can not be set for other controllers not subject to hydrogen and helium gas applications Also the controllers subjected to the hydrogen and helium gases can not be set for the standard gases of Items 1 to 8 and 11 given in the data range 27 Chapter 5 COMMUNICATION DATA TABLE 28 Item Data range Remarks Address Address Decimal Decimal Hexadecimal Hexadecimal Flow rate range 0 Standard range setup 1 10 to 99 10 to 99 of Flow rate range standard range When setup 2 calculating the range reduction the least sig nificant digit is truncated 10 to 99 10 to 99 of standard range When calculating the range reduction the least sig nificant digit is not truncated Gas type selection 2 0 Conversion factor for each gas type set by the user 1 Air nitrogen 2 Oxygen 3 Argon 4 Carbon dioxide CO2 5 Natural gas 13A LNG Heating value 46MJ m3 6 100 propane 7 100 methane 8 100 butane 9 Hydrogen 10 Helium 11 Natural gas 13A LNG Heating value 45MJ m SP ramp control 0 Function disabled function 1 SP ramp control 1 In SP ramp up ramp 1 in SP ramp down ramp 2 2 SP ramp control 2 In external contact OFF ramp 1 in external contact ON ramp 2 Forced PV 0 Function disabled instantaneous 1 Function enabled flow rate zero function 1 The oxygen can not be set for other controllers
46. tation Terminating resistor eee Se Terminal Host computer CMC10L block The pin No 6 can be used as SG e Connect terminating resistors of 150Q 5 1 2W min at each end of the trans mission line e Terminal block is required for the CMQ V series because of the connector type connection e The cable to the terminal block from the CMQ V series must be as short as pos sible e The FG grounding must not be made at the both shielded wire ends but only at one location u Handling Precautions Be sure to connect SG terminals each other Failure to do so might cause 49 unstable communications APPENDIX Connect the master station SD to the slave station RD and the master station RD to the slave station SD To execute this connection set the MODE switch provided in the CMC10L as shown in the following table in accordance with the host computer side RS 232C connector pin arrangement modem terminal and the type of cable cross straight RS 232C Cable type MODE switch TERMINAL Straight MODEM used TERMINAL TERMINAL MODEM Straight TERMINAL MODEM MODEN Straight An RS 232C cable with a D Sub 9 pin connector at each end where pins with the same number are mutually connected for example pin 2 RS 232C cable to pin 2 and pin 3 to 3 Cross An RS 232C cable with a D Sub 9 pin connector at each end where different number pins are connected for example pin 2 to pin 3 and pin 3 t
47. ted data 1000 1001 to 1199 4000 4001 to 4199 03E8 03E9 to 04AF OFAO OFA1 to 1067 Operating status 1200 1201 to 1399 4200 4201 to 4399 related data 04B0 04B1 to 0577 1068 1069 to 112F Instantaneous flow 1400 1401 to 1599 4400 4401 to 4599 rate related data 0578 0579 to 063F 1130 1131 to 11F7 Integrated flow rate 1600 1601 to 1799 4600 4601 to 4799 related data 0640 0641 to 0707 11F8 11F9 to 12BF Function setup 2000 2001 to 2199 5000 5001 to 5199 related data 07D0 07D1 to 0897 1388 1389 to 144F Parameter setup 2200 2201 to 2399 5200 5201 to 5399 related data 0898 0899 to 095F 1450 1451 to 1517 E Data read write count The number of data which can be continuously read written by once communica tion is as shown in the table below Read 1to 10 1to 10 1to 10 1 to 10 E Data unit and decimal point position Read write data is not appended with a decimal point The unit and decimal point position is determined for each data item For details on the data unit and decimal point position see the CMQ V Series Digital Mass Flow Controller User s manual No CP SP 1204E or CMQ V Series Digital Mass Flow Controller For Hydrogen and Helium Gases User s man ual No CP SP 1205E 19 Chapter 5 COMMUNICATION DATA TABLE 5 2 Communication Data Table The enabling conditions for the address and R W Read Write of each data are specified in the following table The meaning of R
48. to 10 Decimal format write command 1 to 10 1 to 10 RD Hexadecimal format read command 1 to 10 1 to 10 Hexadecimal format write command 1 to 10 1 to 10 Chapter 4 COMMUNICATION PROCEDURE O List of data link layer data definitions The following list shows the definitions for data in the data link layer Data name Character code Number of Meaning of data characters EE EE Start of message B address 0 to 7FH are or s as Identification of device hexadecimal character codes to communicate with SE ore OH EG Device ype ETX 03H End position of the application layer Checksum OOH to FFH are expressed as two Checksum of message digit hexadecimal character codes oe om 4 fendormessage 0 oa 7 endormessage 2 Description of data items e STX 02H When STX is received the device judges this to be the start of the send message For this reason the device returns to the initial state whatever reception state it was in and processing is started on the assumption that the STX the first character has been received The purpose of this is to enable recovery of the device s response at the next correct message e g RETRY message from the master station in the event that noise for example causes an error in the sent message Station address Of the messages sent by the master station the device creates response messages only when station addresses are the same Station addresses in the messages are expressed as two digit
49. to malfunction If there is a risk of a power surge caused by lightning use Yamatake Corporation s SurgeNon to prevent possible fire or equipment failure Be sure to check that the wiring is correct before turning the power on Incorrect wiring could cause damage or malfunction 2900 SG Do not disassemble the controller Doing so might cause malfunction The Role of This Manual Four manuals have been prepared for the CMQ V Series Read the manual according to your specific requirements The below lists all the manuals that accompany the CMQ V Series and gives a brief outline of the manual If you do not have the required manual contact Yamatake Corporation or your dealer CMQ V Series Digital Mass Flow Controller Manual No CP SP 1204E First time users of the CMQ V Series and those in charge of maintenance or hardware design for incorporating a CMQ V Series controller in instru mentation should read this manual This manual outlines the product tells how to install wire and incorporate the product into instrumentation and describes its operation inspection and maintenance troubleshooting and hardware specifications CMQ V Series Digital Mass Flow Controller for Hydrogen and Helium Gases Manual No CP SP 1205E First time users of the CMQ V Series for hydrogen and helium gases and those in charge of maintenance or hardware design for incorporating a CMQ V Series controller For hydroge
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