PZ170E User Manual E-481 High-Performance Piezo Amplifier
Contents
1. Turn the DC offset potentiometer full counterclockwise CCW If a negative DC offset is required set the DC offset to negative polarity with the Offset toggle switch Power up the E 481 using the On Off switch on the rear panel The green Power LED will light up Command the first motion of the piezo actuator by turning the offset potentiometer full clockwise CW to run the actuator over the nominal travel range then turn the potentiometer back full CCW E 481 PZ170E Release 1 2 0 Page 17 Operation Piezo Nano Positioning PI If an E 517 digital piezo controller operation module or an E 515 display module is installed watch the voltage and if an E 509 servo module is present the position on the display to check whether the system is operating properly Make sure that the full voltage swing is attained 9 When an E 509 servo module is installed the sensor monitor signal will show a voltage from about 0 to 10 V proportional to the piezo extension Example A piezo actuator with a nominal travel of 100 um shows a sensor monitor signal of 1 5 V at 15 um For an actuator with 30 um nominal travel 1 5 V at sensor monitor would correspond to 4 5 um 15 of 30 um 10 If an external analog signal is used connect the signal source to the Control In BNC socket If the signal range is not 1 100 of the output voltage adjustments can be made see p 14 If you have a closed loop system follow up by performi2. 250V 500V 500V 250V 750V D A 1000V ees eeeegeegeeeege Figure 2 Selection of E 481 output voltage range 2 4 Line Voltage Connection Connect the AC power cord of the E 481 to the wall socket 100 to 120 V or 220 to 240 V To disconnect the system from the power supply completely remove the power plug from the wall socket or remove the power cord from the E 481 Install this unit near the AC outlet and such that the AC power plug can be reached easily Unless you request otherwise upon delivery the E 481 will be set up for the voltage predominant in your country either 100 to 120 V 50 60 Hz or 220 to 240 V 50 60 Hz To adapt the E 481 to a different line voltage the two line power fuses must be replaced See AC Power and Line Power Fuses p 22 for instructions and for the required fuse types www pi ws E 481 PZ170E Release 1 2 0 Page 12 Operation Piezo Nano Positioning PI 2 5 Actuator Connection A On the PZT Out socket of the E 481 output voltages up to 1150 V can be present These voltages will cause death or serious injury Working with the E 481 requires adequately trained and educated operating personnel Operate the piezo actuator on the PZT Out socket only when it is connected to a protective earth conductor Connect your piezo actuator to the PZT Out socket of the E 481 amplifier If you order the actuator and contro
3. the amplifier is slaved to the E 509 servo controller Depending on the attached piezo mechanics and feedback sensor positioning accuracy and repeatability in the nanometer range and below are feasible Computer Control Control via PC by installing the E 517 digital piezo controller operation module is also possible Optionally digital control via a D A converter is possible For several D A boards from National Instruments PI offers a corresponding LabVIEW driver set which is compatible with the PI General Command Set GCS the command set used by all PI controllers A further option includes the patented Hyperbit technology providing enhanced system resolution E 481 PZ170E Release 1 2 0 Page 3 Introduction Piezo Nano Positioning PI Thermal Piezo Protection Circuit The E 481 features a temperature sensor input and control circuit to shut down the amplifier if the connected piezo actuator exceeds a maximum temperature threshold 1 2 Intended Use Based on their design and realization E 481 High Performance Piezo Amplifier Controllers are intended to drive capacitive loads in the present case piezoceramics piezo actuators E 481 must not be used for applications other than stated in this manual especially not for driving ohmic resistive or inductive loads If upgraded with an E 509 servo control module E 481 can be operated in closed loop mode using a position sensor LVDT SGS or capacitive sensors Appropr
4. 1 2 0 Page 10 A Operation www pi ws Piezo Nano Positioning PI CAUTION Make sure that the red selection pin is plugged Otherwise the piezo actuator can be damaged due to improper grounding CAUTION Exposing piezo actuators to voltages too far outside their operating range will destroy the active element in the actuator When changing the output voltage range make sure that both the polarity and the voltage as seen by the piezo actuator are within the allowable range The following output voltage ranges are available 0 to 1100 V default 260 to 780 V 550 to 550 V 260 to 780 V 0 to 1100 V NOTES The labels inside of the case show the recommended nominal output voltage ranges The available output voltage swing is as listed above max 1100 V The polarity of the output voltage can be inverted using the Input toggle switch on the E 481 front panel see p 15 for details The default setting for the output range is 0 1000 V This setting can be changed my moving an internal selection pin inside the case To change the output voltage range proceed as follows 1 2 Disconnect the E 481 from the power supply completely Remove the rear panel of the case Change the output voltage range by re plugging the red selection pin see figure below Remount the rear panel E 481 PZ170E Release 1 2 0 Page 11 Operation Piezo Nano Positioning PI 0 1000V 760V
5. Conventions The notes and symbols used in this manual have the following meanings Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Any optional elements which might be mentioned in this documentation are described in their own manuals Current releases can be downloaded from the PI Website as PDF files http www pi ws obtained from your Physik Instrumente sales engineer or from info pi ws mailto info pi ws Contents Introduction 3 1T ee EE 3 12 Intended USC 0 00 0 ccccceccccceeeeecceeeeeeseeeeeeeeeaeaaeeeeeeeeseeeaeaseeeeeeeeeeeeaas 4 13 lt Safety Precautions E 5 14 Additional Eoupment 6 E E ue Te Le EE 7 Operation 8 24 GaliQrated SyStOM EE 8 22 SOUP EE 8 25 Operating Elements ee dee eee eink ae eTe 9 23 1 Front and Rear Panel Elements 9 232 Selection Pin for Output Voltage Hange 10 24 Line Voltage Connectoniss cstv dG teat Oates 12 25 Actuator Connection ET 13 25 1 Bipolar Piezo Actuators osios enaa aaa ea aaae a adai 13 252 Unipolar Piezo Actuators ssc ant eitran esata aaia eael aarte edie aiat 13 259 Wiring EX Mple TEE 14 26 Temperature Sensor Connechon 14 27 Control Signal Generation isan Goo ane Oe chee Gene
6. NTROL OUT signal analog operation m E 517 computer interface display module present AMPLIFIER IN can result from CONTROL OUT analog operation or from control input sent from a host computer via TCP IP USB RS 232 or IEEE488 interface remote control via computer interface m E 509 servo controller module present Notch filter and slew rate limiter are applied to the CONTROL OUT or the control input sent from a host computer AMPLIFIER IN is the result but in addition depends on the mode of operation o Closed loop operation corrections are applied by the P I servo loop o Open loop operation no corrections by the P I servo loop 2 8 Modes of Operation 2 8 1 Open Loop Operation All E 481 versions can be operated in open loop mode Open loop operation means that any control input provided by the user determines the output voltage directly 2 8 2 Closed Loop Operation Closed loop operation requires a position sensor and a servo module e g E 509 Closed loop operation means that the user commands the piezo position The output voltage required to reach this target position is calculated internally by the servo loop based on the given target and the feedback of the position sensors see E 509 User Manual PZ77E www pi ws E 481 PZ170E Release 1 2 0 Page 16 Operation www pi ws Piezo Nano Positioning PI Note In closed loop operation up to 10 of the output voltage range may be required for compensat
7. Piezo gt Nano Positioning PI PZ170E User Manual E 481 High Performance Piezo Amplifier Controller Release 1 2 0 Date 03 06 2013 This document describes the following product m E 481 00 High Performance Piezo Amplifier Controller with Energy Recovery 1 Channel iff f if V I Ai Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Moving the NanoWorld www pi ws Tel 49 721 4846 0 Fax 49 721 4846 1019 Zap info pi ws www pi ws Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI PIC PICMA PlLine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation The following designations are protected company names or registered trademarks of third parties LabVIEW The products described in this manual are in part protected by the following patents US Patent No 6 950 050 Copyright 1999 2012 by Physik Instrumente PI GmbH A Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 03 06 2013 Document Number PZ170E BSc BRo Release 1 2 0 E 481_User_PZ170E120 doc Subject to change without notice This manual is superseded by any ne
8. age category Il Protection class l Operating temperature range 5 to 40 C Storage temperature range 0 to 70 C Shipping temperature range 25 to 85 C Altitude for operation Max 3500 m Mass 8 6 kg Dimensions 288 x 450 x 158 mm 7 2 www pi ws Frequency Response Diagram Figure 5 E 481 operating limits with various piezo loads Values shown are capacitance in nanofarads E 481 PZ170E Release 1 2 0 Page 28 Positioning P I Nano Piezo Technical Data 7 3 Block Diagram Ardens Aaeryexny LZ LAOH tes WOO HS Bumes sediuni Ajddns Jamod uo puadap sny pue aues yndjno jeuwou SPISINO YO sue Se Jeudue 1ouw0oed 10 Suey ere bet gll Tres dO Yds Ted HalsMAWY 4YaMOd AOOW HOLIMS DS AO DNIMe een ATL EIER 1Y3NN1 AIl w ITVILNI HS ddi nen OeLNOO 10d 435440 90 NI EEIEINWN IK 190 20847 peqpa asd AH L DOL sA I PEPEE IVILNINZ44Q AMWNG Oplage ao SIMOSINOD DAYsS E 481 Block diagram Figure 6 Page 29 E 481 PZ170E Release 1 2 0 WwWwW pI ws Technical Data Piezo Nano Positioning PI 7 4 Signal Path with Servocontroller and PC Interface Modules The block diagram below shows the signal path for E 481 closed loop versions upgraded with an E 517 digital piezo controller operation module The E 481 open loop versions and models without E 517 module are equipped with dummy modules
9. ation Piezo Nano Positioning PI Element Function Overtemp LED lights up red if the temperature on the connected temperature sensor exceeds 85 C the high voltage output is then deactivated p 25 Offset Toggle switch inverts the sign of the DC offset voltage see p 14 for details Input Toggle switch inverts the sign of the amplifier input signal see p 15 for details Control In BNC socket for external analog control signal 11 V max input swing in the range of 10 to 10 V see p 14 for details Measurement category Temp Sensor In LEMO socket for a PT1000 temperature sensor p 14 or dummy plug max 4 V input Measurement category Overload Not shown in the figure above LED lights red if malfunction occurs p 25 The controls of the optional servo control E 509 and PC interface display E 517 E 515 modules are described in their own separate manuals The following elements are located on the rear side of the E 481 On off switch Line voltage connection p 12 Line power fuses p 22 Selection pin for output voltage range see below accessible only when the rear panel is removed 2 3 2 Selection Pin for Output Voltage Range www pi ws Changing the output voltage range requires opening the case and must be carried out by authorized qualified personnel only Disconnect unit from power supply completely before opening the case E 481 PZ170E Release
10. ee 14 27 1 Analog Operation cecccseeeeecscceeeeccceeeeecneceeeeeceeeeseaceeeeseaedaneeeeaeenetees 14 272 Remote Control via Computer Interface 15 273 Output Voltage Manipulation ccccccccceceeeeeeeeceeceeeeeeeseesenteeeeeeees 15 28 Modes of Operation cccccccccccccccececeeeeeeeeeeeeeceeeeeeeeeesssssssesseeees 16 28 1 Open Loop Operation 16 282 Closed Loop Operation c ccccccceeeeecceceeeeeseseeneeeeeeeeeeseesenieeeeeeeess 16 29 Re e EE 17 2 10 Zero Point Adjustment with E 509 only 18 2 11 Protection Against Overheating ccceeeeceeeeeeeeeeeeeeeeeeeeettneeeeeees 20 Maintenance 22 3 1 AC Power and Line Power Fuses ossssessseeesesseseeeseereereeerrerrrrrereee 22 Ds ET H E 23 Software Download 24 Troubleshooting 25 Customer Service 26 Technical Data 27 L WE ee 27 72 Frequency Response Diagram cccccceeceeeeeeeeeeeeeeeeeeeeeeeeeeeeees 28 TS IOC Re en EE 29 74 Signal Path with Servocontroller and PC Interface Modules 30 L ER Gi Ee len 32 7 5 14 2 Pin High Voltage Connechor cc eeeeccceeeeeeeeeeeceeeeeeeneeeeeeneeeeeeaes 32 752 Temperature Gensor nn nsnterttnn nenene ent 33 Appendix 34 8 1 Protective Air Quality Reouirements 34 82 Howto Measure the Amplifier Output 34 Introduction 1 Piezo Nano Positioning PI Introduction 1 1 www pi ws Overview The E 481 high power piezo amplifier controller is specifically de
11. entilation CAUTION Exposing piezo actuators to voltages too far outside their operating range will destroy the active element in the actuator When changing the output voltage range make sure that both the polarity and the voltage as seen by the piezo actuator are within the allowable range 1 4 Additional Equipment www pi ws The E 481 is upgradable with a servo control module E 509 and or a digital piezo controller operation module E 517 E 515 for display only These modules come installed directly in the E 481 case If the servo module and a piezo actuator are ordered with the system your E 481 will be fully calibrated before being shipped Contact your PI sales engineer or write info pi ws if you want to upgrade your E 481 Any additional modules are described in their own separate manuals The following products are available E 509 C1A E 509 S1 E 517 i1 E 515 01 Sensor Servo Controller Module for capacitive or SGS position sensors respectively 1 channel to eliminate drift and hysteresis from positioning operations Digital Piezo Controller Operation Module 24 bit D A TCP IP USB RS 232 IEEE 488 GPIB 1 Channel displays the current voltage and if servo module also present the position of the PZT DLL COM LabVIEW convenient interactive user interface software for host PC is provided Display Module for PZT Voltage and Position 1 channel E 481 PZ170E Release 1 2 0 Page 6 Introducti
12. for a cooling phase 2 Wait until the temperature has dropped on the mechanics and or inside the electronics This can take several minutes 3 Power up the E 481 again www pi ws E 481 PZ170E Release 1 2 0 Page 20 Operation Piezo Nano Positioning PI NOTES To avoid overheating of the piezo actuator you can reduce the maximum operating frequency and output voltage The maximum operating frequency and output voltage travel depend on operating conditions such as thermal coupling single or double ended with or without air cooling length to diameter ratio and of course on the driving waveform For protective air quality requirements see p 34 The maximum possible frequency for a particular system should be determined after the system is set up with the defined operating conditions by slowly running the system up to the point where the controller performs a thermal shutdown It is important to take proper account of the time constant of the PT1000 temperature sensor the mechanical characteristics of the system and the amplifier parameters Permanent deactivation of the high voltage output due to overheating may indicate hardware failure www pi ws E 481 PZ170E Release 1 2 0 Page 21 Piezo Nano Positioning PI Maintenance 3 Maintenance Before cleaning the E 481 changing the AC fuses and removing or installing modules disconnect it from the power supply completely To do this remove the power plug from t
13. hanges the sign of the DC offset voltage pos provides offsets from 0 to 10 V neg offsets from 0 to 10 V For closed loop operation with an E 509 servo control module CONTROL OUT must be in the 0 to 10 V range 2 7 2 Remote Control via Computer Interface E 481 models equipped with an E 517 digital piezo controller operation module can be controlled from a host computer via TCP IP USB RS 232 or IEEE488 interface See the E 517 User Manual for details 2 7 3 Output Voltage Manipulation www pi ws You can invert the polarity of the output voltage by inverting the polarity of the amplifier input signal AMPLIFIER IN in the signal path diagram on p 31 the output voltage is labeled PZT HV OUT there To do this use the Input toggle switch on the E 481 front panel E 481 PZ170E Release 1 2 0 Page 15 Operation Piezo Nano Positioning PI m inv means that the polarity of the AMPLIFIER IN signal is inverted Example 1 V will be changed to 1 V and then amplified by 100 so that the output voltage will be 100 V m norm means that the polarity of the AMPLIFIER IN signal is not inverted Example 1 V will stay unchanged and the resulting output voltage will be 100 V Note that depending on the system configuration AMPLIFIER IN can result from different sources m No E 517 computer interface display module and no E 509 servo controller module present AMPLIFIER IN is identical with the CO
14. he wall socket or remove the power cord from the E 481 3 1 AC Power and Line Power Fuses Unless otherwise requested the unit will be set up for the power predominant in your country New line power fuses are required when changing the supply voltage CAUTION Both fuses are active and have to be checked if there is a fault and replaced when changing the supply voltage Figure 4 Fuse carrier Indication of valid voltage value must be located here Figure 3 Position of the line fuses and fuse carrier only one of two fuses visible To access the line power fuses proceed as follows 1 Switch off the E 481 and remove the line cord www pi ws E 481 PZ170E Release 1 2 0 Page 22 Maintenance Piezo Nano Positioning PI Wait a minute to be sure that any residual voltage has dissipated Carefully pull out the fuse carrier see figures above using a tool with a small flat tip e g a flat bladed screwdriver Be sure to replace both fuses with fuses of the type appropriate for the new voltage 220 to 240 V 2 x 2 A HT 250 Vac 100 to 120 V 2 x 4 A HT 250 Vac H High breaking T Time lag Note that IEC fuses are cited other fuse standards may require higher nominal current rating Rotate the fuse carrier so that the valid voltage setting 110 120 V or 220 240 V can be read in normal orientation see Figure 3 on p 22 for the required location of the valid voltage indication Rein
15. host PC if present www pi ws E 481 PZ170E Release 1 2 0 Page 26 PI Technical Data Piezo Nano Positioning 7 Technical Data 7 1 Specifications E 481 00 Function Power amplifier for PICA high voltage PZTs Amplifier Output voltage 0 to 1100 default V Selectable 260 to 780 V 550 to 550 V 260 to 780 V 0 to 1100 V Amplifier channels Average output power Peak output power per channel lt 5 ms Maximum output power Average current Peak current Amplifier bandwidth small signal Amplifier bandwidth large signal Ripple noise 0 to 100 kHz Current limitation Voltage gain Control input voltage Input impedance Interface and operation Output voltage socket Control input socket Piezo actuator temperature sensor DC Offset E 481 PZ170E Release 1 2 0 1 equivalent to 630 VA reactive power 2000 VA gt 600 mA 2000 mA 5 kHz 660 nF 1 kHz 3 4 uF 1 4 kHz 660 nF 350 Hz 3 4 pF 150 mVrus 2000 100 nF mVp p Short circuit proof 100 Servo off 1 100 of selected output range Servo on 0 to 10 V 100 kQ LEMO EGG 0B 701 CJL1173 BNC Max 85 C high voltage output is automatically deactivated if piezo actuator temperature out of range 10 turn pot adds 0 to 10 V or 10 to 0 V to Control In Page 27 Technical Data Piezo Nano Positioning PI Miscellaneous Operating voltage 100 to 120 or 220 to 240 V 50 60 Hz fuse change required Overvolt
16. iate sensors are provided by PI and integrated in the mechanics according to the mechanics product specifications Other sensors may be used as position sensors only with permission of PI Observe the safety precautions given in this User Manual E 481s meet the following ambient conditions and classifications Indoor use only Max altitude for operation 3500 m Operating temperature range 5 C to 40 C Storage temperature range 0 C to 70 C Shipping temperature range 25 C to 85 C Max relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C Line voltage fluctuations not greater than 10 of the line voltage m Transient overvoltages as typical for public power supply Note The nominal level of the transient overvoltage is the standing surge voltage according to the overvoltage category II IEC 60364 4 443 WR Overvoltage category II m Protection class m Degree of pollution 2 www pi ws E 481 PZ170E Release 1 2 0 Page 4 Piezo Nano Positioning PI Introduction 1 3 Safety Precautions Read this User Manual before operating the E 481 Always keep the User Manual safe and close to the described device In case of loss or damage to the instructions please order a new copy from your PI distributor or download one from www pi ws http www pi ws Also keep and add all further information e g extended instructions or Technical Notes to the User Man
17. ifier modules are equipped with a temperature monitoring circuit to avoid overheating of the connected mechanics It can be used with PT1000 temperature sensors Connect the PT1000 to the Temp Sensor In Lemo socket on the front panel of the E 481 connection details on p 33 When the mechanics connected to the E 481 does not feature a temperature sensor the included dummy plug order No 000016103 must be used When a temperature of 85 C is detected on the mechanics the E 481 temperature monitoring circuit deactivates the high voltage output of the amplifier PZT Out socket and the red Overtemp LED on the front panel lights up See p 20 for how to proceed in this case 2 7 Control Signal Generation 2 7 1 Analog Operation www pi ws The E 481 can be operated by an analog control signal CONTROL OUT in the signal path diagram on p 31 The CONTROL OUT signal is the sum of the signal on the Control In BNC socket and the offset voltage set with the DC Offset potentiometer Due to the constant amplifier gain of 100 the range of the CONTROL OUT signal is 1 100 of the output voltage range p 10 The signal may not have an active swing more than 11 V wide or 10 V for Servo ON Output voltage if in open loop mode or actuator position closed loop mode are directly proportional to the CONTROL OUT signal E 481 PZ170E Release 1 2 0 Page 14 Operation Piezo Nano Positioning PI Co
18. ing nonlinearity and drift First Operation The following instructions refer to analog operation p 14 of the system If your E 481 is equipped with an E 517 digital piezo controller operation module and you want to control the system via the computer interface perform only steps 1 to 3 of the instructions below and then operate the system as described in the E 517 User Manual 1 Make sure that the E 481 is connected to line power but powered down line cord socket and On Off switch are on the rear panel see Line Voltage Connection p 12 for details If your piezo actuator is equipped with a PT1000 temperature sensor connect it to the Temp Sensor In socket of the E 481 If no temperature sensor is present connect the included dummy plug Part No 000016103 Make sure that the Input toggle switch on the E 481 front panel is in the norm position i e the polarity of the output voltage ist not inverted Connect the piezo actuator to the E 481 PZT Out high voltage output and to a protective earth conductor For closed loop systems E 509 servo module present see also the E 509 User Manual 5 1 Connect the sensor cable to the corresponding socket on the servo module 52 Deactivate servo control set SERVO toggle switch on the servo module OFF 5 3 If you are using the sensor monitor signal connect your appropriate electronics to the SENSOR MONITOR socket on the servo module
19. instead The purpose of these dummies is to complete the internal circuitry and the front panel of the chassis CAUTION If your E 481 contains dummy modules Do not operate the E 481 when the dummy modules are removed Without the dummy module s the system will malfunction because no control signal can be fed into the amplifier module due to the broken circuit www pi ws E 481 PZ170E Release 1 2 0 Page 30 Technical Data Piezo Nano Positioning PI FRONT PANEL REAR CONNECTOR TCPAP USB RS 232 IEEE 488 SERVO ON OFF PC CONNECTION TARGET OUT E 517 Computer Interface Display D OFFSET CONTROL In AMPLIFIER IN CONTROL IN P2T HV OUT SERVO ON OFF e n Se i SLEW RATE CONTAOL OUT e LIWITER SOA E 509 SERVO CONTROLLER Figure 7 Interconnections between E 517 digital piezo controller operation module power amplifier E 481 and E 509 servo module www pi ws E 481 PZ170E Release 1 2 0 Page 31 Technical Data Piezo Nano Positioning PI 7 5 Pin Assignments 7 5 1 2 Pin High Voltage Connector On the PZT Out Lemo socket of the E 481 output voltages up to 1150 V can be present These voltages will cause death or serious injury Working with the E 481 requires adequately trained and educated operating personnel Operate the piezo actuator on the PZT Out socket only when it is connected to a protective earth conducto
20. ity 450 V negative piezo polarity 250 to 750 V 200 V 0 to 1000 V 50 V E 481 PZ170E Release 1 2 0 Page 19 Operation Piezo Nano Positioning PI This is the output value corresponding to the low end of the piezo actuator travel range To check the output voltage range command the maximum extension with either a DC voltage on Control In or with the DC Offset potentiometer or a combination of the two In doing so read the monitor signal on the PZT Out 100 BNC socket or watch the output voltage on the display module if present If the full output voltage range is attainable the zero point adjustment is finished If not repeat the adjustment with a slightly different value for the zero point 2 11 Protection Against Overheating To protect the system against overheating the high voltage output on the PZT Out socket is deactivated automatically in the following cases m APT1000 temperature sensor connected to the E 481 detects a temperature of 85 C on the mechanics In this case the red Overtemp LED on the front panel lights up m The internal temperature sensor of the E 481 detects a temperature of 85 C at the electronics In this case the red Overtemp LED on the front panel does not light up If the high voltage output has been deactivated the piezo actuator will no longer move Proceed as follows when the high voltage output has been deactivated 1 Turn off the E 481
21. ller together and or provide PI with sufficient information about your application the actuator connector will be wired as required If you are connecting other actuators or wiring your own connector read the discussion of actuator type carefully and any documentation that came with the actuator 2 5 1 Bipolar Piezo Actuators Here the output voltage swing is so chosen that the actuator sees both negative and positive high voltages The output always has one lead at 0 V and here the other is in a zero crossing range commonly 500 V 2 5 2 Unipolar Piezo Actuators www pi ws The notation of positive and negative polarity of piezo actuators does not refer to their direction of motion Unipolar piezos of any polarity will elongate when a higher voltage is applied to their than to their terminal Positive and negative refers to the sign of the voltage on the core of the cable All standard PI piezo actuators with 2 conductor LEMO connectors have positive polarity E 481 PZ170E Release 1 2 0 Page 13 Operation Piezo Nano Positioning PI 2 5 3 Wiring Example In the wiring example shown at right a HU OUT positive piezo is connected so as to have 0 to 1100 V applied To achieve this the positive terminal possibly labeled 1100 V is connected to the variable HV Out and the negative terminal to PGND L1 QVU PGND 2 6 Temperature Sensor Connection E 481 ampl
22. mmy plug for the temperature sensor socket LEMO FFA OS 303 CLAC32 User manual this document Technical Note for GCS LabVIEW driver set Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately Save all packing materials in case the product need be shipped again E 481 PZ170E Release 1 2 0 Page 7 Operation Piezo Nano Positioning PI Operation 2 1 Calibrated System If a controller with an included servo module is ordered together with a piezo actuator the system will be fully calibrated at PI according to your specifications before being shipped and will come with a calibration information sheet NOTES Calibration should only be done by qualified authorized personnel after consultation with PI If you inform PI about your application your E 481s will be fully calibrated before being shipped It is usually not necessary for you to do anything more than adjust the zero point before operating the system Do not interchange controller whole devices or individual modules and or piezo stages if they are matched and calibrated together Respect the assignment of the piezo actuators to the individual controller channels as indicated by the serial numbers on the labels affixed to the devices With multi axis stages respect the channel axis assignments indicated by the cable labeling 2 2 Setup www pi ws CAUTION Place the E 481 in a location wi
23. nalog control signal is 0 V and turn the DC offset potentiometer full CCW 3 Set the SERVO toggle switch on the front panel of the servo module to OFF 4 Connect a voltmeter to the SENSOR MONITOR socket of the servo module 5 Power up the system 6 Turn the offset potentiometer full clockwise and than back full counterclockwise 0 V to exercise the piezo actuator 7 Adjust the ZERO potentiometer on the servo module until a sensor monitor signal of 0 V is measured by the voltmeter on the SENSOR MONITOR socket of the servo module 8 Switch to closed loop operation SERVO ON CAUTION If your piezo actuator starts oscillating humming noise immediately switch to open loop operation SERVO OFF The actuator can be irreparably damaged by resonant oscillation Adjust the settings of the servo control parameters potentiometers on E 509 servo module see E 509 User Manual before switching to closed loop operation again If a display module is present the position display of the piezo actuator will now jump to 0 Connect a voltmeter to the monitor signal on the PZT Out 100 BNC socket or watch the output voltage on the display module if present Adjust the ZERO potentiometer on the E 509 module to obtain the following value for the output voltage at the zero point of the sensor Selected output voltage range Output value at Zero point 0 to 1000 V 50 V 250 to 750 V 200 V 500 to 500 V 450 V positive piezo polar
24. ng a zero point adjustment 2 10 Zero Point Adjustment with E 509 only www pi ws The zero point adjustment of the E 509 servo module becomes necessary when the application conditions particularly load temperature of the piezo actuator have changed Proper zero point adjustment of the sensor ensures that the full output voltage swing can be used in closed loop operation without reaching the output voltage limits of the amplifier and causing an overflow condition see E 509 User Manual PZ77E Equipment needed For zero point adjustment in analog operation an adjustable voltage source is needed which is able to output 1 100 of the selected output voltage range Furthermore a precision voltmeter is required If an E 517 digital piezo controller operation module is present in the system zero point adjustment can be performed without additional equipment see the E 517 user manual for further information Adjustment is possible in Online mode remote control from PC as well as in Offline mode analog operation p 15 However offline and online modes must not be mixed during the adjustment How to perform zero point adjustment in analog operation 1 Make sure the piezo actuator is mounted in the same way and with the same load as during normal operation in the application E 481 PZ170E Release 1 2 0 Page 18 Operation www pi ws Piezo Nano Positioning PI 2 Make sure that the external a
25. ntrol In signal An external voltage can be applied to the Control In BNC socket The signal applied to the Control In BNC socket can also be generated using a DAC board in a PC PI offers a LabVIEW driver set which can be used with certain D A boards This driver set is compatible with the PI General Command Set GCS LabVIEW driver set available for all newer controllers from PI In addition Pl s patented Hyperbit technology for providing position resolution higher than that of the D A board is in the E 500 ACD driver set see Additional Equipment p 6 DC Offset potentiometer Depending on the position of the potentiometer a DC voltage between 0 and 10 V is made available If you require a constant DC offset e g 0 make sure the knob stays at the required position Due to the constant gain of 100 the range of the CONTROL OUT signal is set to 1 100 of the output voltage range p 10 If the signal on the Control In BNC socket does not already have a range of 1 100 of the desired output voltage range the following adjustments can be made in order to be able to use the full output voltage range m Shift with DC Offset Use the DC offset potentiometer to add a constant to the Control In signal so that CONTROL OUT is 1 100 of the desired output The possible offset runs from 0 to 10 V or 0 to 10 V depending on the offset polarity m Reverse the offset polarity The Offset toggle switch c
26. on E 500 ACD E 500 HCD Piezo Nano Positioning PI CD with Driver Set for Analog Controllers available free of charge upon request Computer control can be implemented using a DAC board in a PC to generate the analog input signal PI offers a LabVIEW driver set which can be used with certain D A boards This driver set is compatible with the PI General Command Set GCS LabVIEW driver set available for all newer controllers from PI The PI Analog Controller drivers support all D A converter boards from National Instruments that are compatible with DAQmx8 3 LabVIEW compatibility is given from version 7 1 upwards Connection of a sensor monitor signal from a sensor or servo module e g E 509 is required The driver set is also available for download from the PI website Access to HyperBit Functionality for Enhanced System Resolution Supports certain D A boards Die patented Hyperbit technology for providing position resolution higher than that of the D A board is in the E 500 ACD driver set Activating Hyperbit requires purchase of the password which can be obtained from PI under Order No E 500 HCD 1 5 Unpacking www pi ws Unpack the E 481 High Performance Piezo Amplifier Controller with care Compare the contents against the items covered by the contract and against the packing list The following components are included E 481 00 3763 000016103 PZ170E E500T0011 Amplifier Line cord Du
27. onnecting cables m Note the required voltage range for the analog signal at Control In The control input range is basically one one hundredth of the output voltage see p 14 for more information The Overtemp LED lights m The connected PT1000 temperature sensor is reporting 85 C and the high voltage output has thus been shut off Turn off the controller Wait until the temperature has dropped before powering the controller up again Overload LED lights Indicates an overload condition of the amplifier possibly caused by a malfunction or short circuit m Turn off the controller After a few minutes the controller should be ready to be powered up again If the failure reoccurs disconnect the piezo actuator and turn on the controller again If the Overload LED does not light up the failure was caused by the piezo actuator If the Overload LED does light up again the failure was caused by the controller Please contact PI see below www pi ws E 481 PZ170E Release 1 2 0 Page 25 Customer Service Piezo Nano Positioning PI S Customer Service Still having problems Call your PI representative or write to info pi ws please have the following information about your system ready m Product codes and serial numbers of all products in the system m Current firmware version of the controller if present WR Software version of drivers and or host software if present m Operating system on
28. r Type LEMO EGG 0B 701 CJL 1173 HV OUT Pin assignments 0 1100 HV OUT High voltage output PGND rl aie PGND Power ground Housing Cable shield for protective ground www pi ws E 481 PZ170E Release 1 2 0 Page 32 Technical Data Piezo Nano Positioning PI 7 5 2 Temperature Sensor Pinl Pin2 a Pin3 Figure 8 Temperature sensor connector view from Figure 9 Temperature solder side sensor diagram Pin assignment Pin 1 Temp_SA Pin 2 Temp_S Pin 3 GND PE Housing Shield GND PE www pi ws E 481 PZ170E Release 1 2 0 Page 33 Appendix Piezo Nano Positioning PI S Appendix 8 1 Protective Air Quality Requirements Optionally the PICA piezo actuators P 212 P 216 P 225 and P 235 can be ordered with the P 177 50 option Dynamic applications with E 481 temperature sensor and protective air for PICA HVPZT The protective air must meet the following requirements Temperature at least 3 C 5 5 F above dew point Residual oil content lt 0 03 mg m measured at 7 bar 102 psi and 20 C 68 F Particulates lt 0 01 mg m3 These requirements can generally be met by running compressed air conformant to ISO 8573 1 Quality Class 4 through a dryer and microfilter with 99 9999 effectiveness Maximum pressure in the translator must not exceed 0 5 bar 7 3 psi 8 2 How to Measure the Amplifier Output The innovative efficient circuitry of the E 481 reduces power consumption and hea
29. scilloscope is not high enough use a low pass filter at the oscilloscope input to eliminate frequencies above 100 kHz Alternatively you can use an analog oscilloscope or perform high resolution measurements in the lower frequency range When following those instructions you will obtain valid measurement results www pi ws E 481 PZ170E Release 1 2 0 Page 35
30. signed for dynamic operation of high capacitance PICA piezo actuators The E 481 is based on a novel design combining pulse width modulation and energy recovery Instead of dissipating the reactive power in heat sinks this energy is temporarily stored in inductive elements Only the active power used by the piezo actuator has to be delivered The energy not used by the actuator is returned to the amplifier and reused as supply voltage via a step up transforming process A peak sink and source current of up to 2000 mA is possible Selectable Output Range The output range can be set to positive negative or bipolar and provides a voltage swing of 1100 V in open loop operation Open Loop and Closed Loop Operation E 481 amplifiers can be used to drive open and closed loop piezo positioning systems For open loop piezo operation the amplifier output voltage is determined by the analog signal at the Control In socket combined with the DC offset potentiometer setting Open loop operation is ideal for applications where the fastest response and the highest bandwidth are essential Here commanding and reading the target position in absolute values is either not important or carried out by an external feedback loop The control signal can be adjusted by various settings Optional Servo Controller Upgrade The E 481 00 allows easy installation of an optional E 509 sensor servo controller module for closed loop piezo position control In this mode
31. stall the fuse carrier 3 2 Cleaning The outside surface of the case can be cleaned using mild detergents or disinfectant solutions Organic solvents must not be used www pi ws E 481 PZ170E Release 1 2 0 Page 23 Software Download Piezo Nano Positioning PI ei Software Download www pi ws Updated releases of GCS LabVIEW drivers for analog controllers from PI and the corresponding manuals are available for download at www pi ws You need a password for the download This password is provided in a Technical Note delivered with the controller E500T0011 To download from the PI Website proceed as follows 1 On the www pi ws front page click on Manuals Software ISO Statements in the Resources section on the left 2 Select Software amp Manuals on PI Support Server from the list that pops up 3 Onthe PI PORTAL page enter the Username and the Password which are provided in the separate Technical Note and click on Login A Click on the E Piezo Drivers amp Nanopositioning category 5 Click on E 500 6 Click on Software if you click on Documents you will get the latest manuals 7 Click on the latest CD Mirror includes the manual versions that were with the release or on the latest update zip file E 481 PZ170E Release 1 2 0 Page 24 Troubleshooting Piezo Nano Positioning PI 5 Troubleshooting Positioner does not move Cables not connected properly m Check the c
32. t dissipation especially in dynamic applications Working with an internal switching frequency of 100 kHz charge is transferred to the piezo actuator using low loss PWM techniques The ripple of the amplifier output is lt 100 mV at 100 kHz But when measuring the amplifier output signal with low sampling rate and small bandwidth e g with a digital oscilloscope aliasing will occur and distort the measurement result In digital signal processing aliasing refers to an effect that the signal reconstructed from samples is different than the original continuous signal when the sampling rate is too low With the E 481 amplifier output this means that a low frequency signal seems to be measured which is not present at all Example When a 91 Hz signal is sampled with 100 Hz sampling rate the result seems to be a 9 1 Hz signal see figure below www pi ws E 481 PZ170E Release 1 2 0 Page 34 Appendix Piezo Nano Positioning PI Original Signal Fig 1 Signal digitization with too low sample rate time in 1 100 s Original signal 91 Hz and sampling rate 100 Hz the result is mistaked as a 9 1 Hz signal Alias To avoid aliasing the sampling rate must be at least twice as high as the highest frequency in the signal to be sampled according to the Nyquist Shannon sampling theorem l e with an amplifier switching frequency of 100 kHz the sampling rate must be 200 kHz or higher If the sampling rate provided by your o
33. th adequate ventilation to prevent internal heat build up Allow at least 10 cm 4 inches clearance from the top and the rear of the unit and 5 cm 2 inches from each side The device needs to be installed horizontally Vertical mounting prevents internal convection Never cover the ventilation slots as this will impede ventilation The E 481 amplifier is suitable for mounting in a 19 rack E 481 PZ170E Release 1 2 0 Page 8 Operation Piezo Nano Positioning PI 2 3 Operating Elements 2 3 1 Front and Rear Panel Elements ENERGY RECOVERY mera POWER AMPLIFIER GC op ozr cum Pi D onset 2 Current Mon 4AA1V Control In A i PZT Out max 1150 V max 11 V A Temp Sensor In max 4 V E 481 Figure 1 E 481 front panel Element Function DC Offset 10 turn potentiometer for DC Offset see p 14 for details PZT Out LEMO socket high voltage output for the piezo actuator pinout on p 32 further details on p 10 and p 15 The maximum voltage swing is 1100 V PZT Out 100 BNC socket monitor output for the voltage of the Current Mon 1A 4 1V Power high voltage output 100 V output voltage correspond to 1 V monitor voltage BNC socket monitor output for the current of the high voltage output 1 A output current corresponds to 1 V monitor voltage LED steady green during operation www pi ws E 481 PZ170E Release 1 2 0 Page 9 Oper
34. ual On the PZT Out Lemo socket of the E 481 output voltages up to 1150 V can be present These voltages will cause death or serious injury Working with the E 481 requires adequately trained and educated operating personnel Operate the piezo actuator on the PZT Out socket only when it is connected to a protective earth conductor Connect the AC power cord of the E 481 to the wall socket 100 to 120 V or 220 to 240 V Two new line power fuses are required when changing the supply voltage See p 22 for more information To disconnect the system from the power supply completely remove the power plug from the wall socket or remove the power cord from the E 481 Install this unit near the AC outlet and such that the AC power plug can be reached easily Changing the output voltage range requires opening the case and must be carried out by authorized qualified personnel only Disconnect unit from power supply completely before opening the case www pi ws E 481 PZ170E Release 1 2 0 Page 5 Introduction CAUTION Piezo Nano Positioning PI Place the E 481 in a location with adequate ventilation to prevent internal heat build up Allow at least 10 cm 4 inches clearance from the top and the rear of the unit and 5 cm 2 inches from each side The device needs to be installed horizontally Vertical mounting prevents internal convection Never cover the ventilation slots as this will impede v
35. w release The newest release is available for download at www pi ws http www pi ws Declaration of Conformity according to ISO IEC Guide 22 and EN 45014 Manufacturer Physik Instrumente Pl GmbH amp Co KG Manufacturer s Auf der ROmerstrasse 1 Address D 76228 Karlsruhe German The manufacturer hereby declares that the product Product Name Power Amplifier for HVPZT with Energy Recovery Model Numbers E 481 Product Options all complies with the following European directives 73 23 EEC Low voltage directive 89 336 EEC EMC Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EN 55011 05 98 A1 08 99 class A EN 55022 09 98 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 February 19 2007 Karlsruhe Germany Lee Dr Karl Spanner President About this Document Users of this Manual This manual is designed to help the reader to install and operate the E 481 High Performance Piezo Amplifier Controller It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the E 481 High Performance Piezo Amplifier Controller as well as the installation procedures which are required to put the system into operation
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