OPERATING INSTRUCTIONS TURBOVAC
Contents
1. Leybold Vacuum K ln firm stamp GA05118_1402 05 2005 35 Sales and Service Net Worldwide Germany Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 221 347 1234 Fax 49 221 347 1245 sales leybold com Leybold Vacuum GmbH Sales Area North East Branch office Berlin Buschkrugallee 33 1 Obergeschoss D 12359 Berlin Phone 49 30 435 609 O Fax 49 30 435 609 10 sales berlin leybold com Leybold Vacuum GmbH Sales Area South Southwest Branch office Munic Karl Hammerschmidt Strasse 38 D 85609 Aschheim Dornach Phone 49 89 357 33 90 Fax 49 89 357 33 933 sales muenchen leybold com service muenchen leybold com Leybold Vacuum GmbH Sales Area West Branch office Cologne Emil Hoffmann StraBe 43 D 50996 Cologne Suerth Phone 49 221 347 1270 Fax 49 221 347 1291 sales koeln leybold com Leybold Vacuum GmbH Service Center Emil Hoffmann StraBe 43 D 50996 Cologne Suerth Phone 49 221 347 1439 Fax 49 221 347 1945 service leybold com Leybold Vacuum GmbH Mobile after sales service Emil Hoffmann StraBe 43 D 50996 Cologne Suerth Phone 49 221 347 1765 Fax 49 221 347 1944 kundendienst leybold com Leybold Vacuum Dresden GmbH Zur Wetterwarte 50 Haus 304 D 01109 Dresden Service Phone 49 351 88 55 00 Fax 49 351 88 55 041 info leybold dresden de www leybold dresden de Europe Belgium Leybold Vacuum Nederland B V Belgisch bijkantoor Leuvensesteenweg 542 9A B 1932. not achieve ultimate pressure Measurement gauges are soiled Leak at the system lines or pump Minor grime collection at the pump The pump is oily Forevacuum pump with insufficient pum ping speed or ultimate pressure which is too high Leak at the power cord passage port TURBOVAC is rotating in the wrong direction TURBOVAC overheats Forevacuum pressure too high malfunction indication at the TURBOTRONIK Gas volume too great leak in the system Ventilation unit blocked Ambient temperature is too high Cooling water is lacking or insufficient Bearings are defective The TURBOVAC or the Anti suckback valve at the forevacuum vacuum chamber is con pump is defective taminated with oil The TURBOVAC was not aired or impro perly aired when shut down System configured incorrectly oil vapor streams back during forepump opera tion Sorption trap is saturated 32 GA05118_1402 05 2005 Corrective action Check the motor connection cable and connect correctly replace if necessary Replace the pump Balance the rotor only by the Leybold Service Department Bearings will have to be replaced only by the Leybold Service Department Change the masses of the system or install vibra tion damper to isolate oscillations Check the measurement device Clean or replace the measurement gauges Locate the leaks Bake out the pump see Section 5 3 Have the pump cleaned only by the Le
3. 3 3 1 7 1 109 2 104 8 102 1 10 10 5 102 5 107 D4BtoD16B 2 25 KF 10 KF 10 8 680 480 55 100 High vacuum port Description TURBOVAC 361 361 C 100 ISO K e 100 CF 160 ISO K e 160 CF 345 400 350 340 380 340 370 7 5 7 5 1 109 6 104 3 10 lt 1 1010 5 102 5 107 D16BtoD25B 2 25 KF 10 KF 10 12 680 480 55 100 Electrical connection 4 PA Forevacuum port GAO5118 1402 05 2005 9 Description A TURBOVAC 600 C TURBOVAC 1000 C High vacuum port DN 160 ISO K e 160 CF 160 ISO K CF 200 CF 6 ANSI 250 ISO K Pumping speed No les 560 850 1100 1150 He les 600 Ho les 570 Max gas throughput N mbar s lt 4 Ar mbar s lt 4 Compression No S10 He 2 104 Ho 1 1 108 Ultimate pressure mbar lt 10710 lt 10710 Speed rpm 36 000 36 000 Run up time freq converter approx min 4 9 Max Inlet pressure permanent with water cooling mbar 1 10 Max forevacuum pressure for N mbar 1 107 10 38 to 107 Recommended forevacuum pump at standard operation TRIVAC D25B 40B TRIVAC D 40B at purge gas operation TRIVAC 40B Run up time to 95 nominal speed min 3 E Forevacuum port DN 40 KF 40 KF 63 ISO K 40 KF 40KF 63 ISO K Purge gas vent port DN 10 KF 10 KF 10 KF 10 KF Cooling water connection hose nozzle mm 10 11 102 14 11 102 Weight approx kg 12 25 Max power consumption
4. at ultimate pressure VA 680 480 Max ambient temperature at operation C 55 55 Max bakeout temperature at CF flange C 100 100 1 As of 1995 in some cases 16 mm KF 2 11 mm with 40 mm type KF forevacuum port 10 mm with 63 mm type ISO K forevacuum port 10 GA05118_1402 05 2005 Description L EN TURBOVAC 600 C TURBOVAC 1000 C High vacuum port Forevacuum port Purge gas port D o fe a dl 25 Ss gt 8 Ss 25 z os 28 cs ce 9 o OW Fig 2 05 2005 11 GA05118_1402 Description Po 1 4 Ordering Information TURBOVAC 35LS 35 LS2 50 151 151 C 361 361 C 600 C 1000 C High vacuum port DN 40 KF 85664 85666 85400 DN 40 CF 853 99 DN 63 ISO K 854 01 800150V0010 DN 63 CF 854 02 DN 100 ISO K 85631 85635 85670 85675 DN 100 CF 856 32 856 71 DN 160 ISO K 85672 85677 800150V0015 855351 855 382 DN 160 CF 856 73 800150V0017 on request DN 200 CF on request 6 ANSI 894 891 DN 250 ISO K 855 361 855 371 855 392 Cooling water unit for TURBOVAC 35 LS 35 LS2 50 854 08 1 With forevacuum flange DN 40 KF 2 With forevacuum flange DN 63 ISO K 12 GA05118_1402 05 2005 1 5 TURBOVAC 35 LS 35 LS2 50 151 151 C 361 361 C 600 C 1000 C C F 30 86 35 95 40 104 45 113 50 122 55 131 No additional cooling requi red if all these conditions are satisfied Ambient temperature lt 30 C No bakeout operation
5. C Bakeout at ambient temperature gt 35 C High vacuum pressure gt 104 mbar Ambient temperature 45 55 C GA05118_1402 05 2005 13 Transport and Storing 14 GA05118_1402 05 2005 Caution EN Fig 3 Transportation 2 Transport and Storing When moving the heavier pumps the lower surfaces on the base flange are suitable for accepting a lifting fork see Fig 3 Take care not to damage the plugs and coolant connections during movement The TURBOVAC is shipped in a sealed PE bag which also contains a desic cant The maximum effective life of the desiccant is one year Do not open the packaging until immediately prior to installation 3 Installation 3 1 Conforming Utilisation The TURBOVAC models are engineered to pump vacuum chambers down to pressures in the high vacuum range A TURBOTRONIK frequency con verter and a forevacuum pump are required for the operation of the TUR BOVAC The TURBOVAC 35 LS and 35 LS2 are only intended for integration into a Helium leak detector These units are not suitable for operation without a forevacuum pump Turbomolecular pumps are not suitable for pumping either gases which contain dust particles or liquids Turbomolecular pumps without a purge gas feature are suitable only for moving air or inert gases They are not suitable for pumping aggressive or reactive gases TURBOVAC versions identified with a C in the model number are equipped with this pur
6. Leybold Servicos La asia asa aaa dada 29 A A A ORA le pita el de ag 30 Removing the pump from the system 0000 eee 30 Troubleshooting eiris irite a Eds SE Ss ra REG as 31 Waste Disposal sas ii a Saes ads 33 EC Manufacturer s Declaration 0 00 eee eee eee eens 34 Safety Information Important Safety Information Indicates procedures that must be strictly observed to prevent hazards to Warning persons Indicates procedures that must be strictly observed to prevent damage to Caution or destruction of the product The Leybold TURBOVAC has been designed for safe and efficient operation when used properly and in accordance with these Operating Instructions It is the responsibility of the user to care fully read and strictly observe all safety precautions described in this section and throughout the Operating Instructions The TURBOVAC must only be operated in the proper condition and under the conditions described in the Operating Instructions It must be operated and maintained by trained per sonnel only Consult local state and national agencies regarding specific requirements and regulations Address any further safety operation and or maintenance questions to your nearest Leybold Vacuum office Failure to observe the following precautions could result in serious personal injury Mechanical hazards Risk of injury Avoid exposing any part of the human body to the vacuum Only Warning handle
7. at 10 2 mbar No mbar s 0 30 0 40 0 40 He mbar s 0 25 0 35 0 35 Ho mbar s1 0 20 0 25 0 25 Max idle compression N 2 109 2 108 2 108 Ultimate pressure with TRIVAC D 2 5 E mbar lt 5 108 lt 5 108 lt 2 1010 Max forevacuum pressure for N mbar 1 107 Forevacuum port DN 16 KF Recommended forevacuum pump TRIVAC D2 5 E Run up time to 95 nominal speed min 2 Cooling water connection hose nozzle for Part No 854 08 mm 10 Weight approx kg 2 Max power consumption at ultimate pressure W 45 15 Max ambient temperature at operation C 55 Max bakeout temperature at CF flange C 80 High vacuum port Forevacuum port Electrical connection TURBOVAC 50 8 GA05118_1402 05 2005 TURBOVAC 151 High vacuum port DN Pumping speed No sg Ar s He s Ho s Max gas throughput N mbar s Ar mbar s E mbar s Compression No He Ho Ultimate pressure mbar Max Inlet pressure permanent with water cooling mbar Max forevacuum pressure for N mbar Recommended forevacuum pump TRIVAC Run up time to 95 nominal speed min Forevacuum port DN Purge gas vent port DN Cooling water connection hose nozzle mm Weight approx kg Max power consumption at ultimate pressure VA Max ambient temperature at operation C Max bakeout temperature at CF flange C Vent port Connection for water cooling TURBOVAC 151 C TURBOVAC 361 C similar 100 ISO K 100 CF 145 150 135 115
8. pump running noise is below 70 dB A no noise insulating measures are required GA05118_1402 05 2005 19 Installation Forevacuum pump Anti suckback valve Sorption trap 20 GA05118_ 1402 05 2005 Warning 3 4 Forevacuum connection A suitable forevacuum pump is to be connected to the forevacuum con nection flange Fig 6 shows schematically the design of a pump system incorporating a TURBOVAC turbomolecular pump and a TRIVAC forevacuum pump with anti suckback valve When using a forevacuum pump not having an anti suckback valve a separate safety valve should be provided The safety valve keeps oil from backstreaming from the forevacuum pump and into the TURBOVAC when the system is not running We recommend installing a sorption trap in the forevacuum line to insure that the forevacuum chamber in the TURBOVAC remains largely free of oil vapors during operation as well Install a roughing pump line to achieve the shortest possible cycling times Be sure that there is sufficient vibration decoupling between the TURBOVAC and the forevacuum pump The forevacuum line must be tight Hazardous gases could escape from leaks or the gases being pumped could react with air or humidity 3 5 Connecting the cooling Air cooling The air cooling unit is available as a supplementary kit for retrofitting When installing the air cooled TURBOVAC ensure that there is an unrestric ted flow of air to the fan Alway
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10. A05118_1402 05 2005 Safety Information Failure to observe the following precautions could result in damage to the pump Unauthorized opening of the pump or modifications of the mecha Caution nical or electrical components of the pump void the warranty The pump must only be opened by such persons who have been authorised by Leybold to do so The rotor is precision balanced any change whatsoever such as loosening or bending any rotor component will make re balan cing necessary Unless appropriate accessories and attachments are used the TURBOVAC is not suitable for aggressive or corrosive media or those containing dust When handling corrosive media the C ver sion pump must be operated with purge gas when handling media containing dust a fine mesh filter must be installed Observe the information on media compatibility to be found in Section 4 1 Take care not to damage the plugs and coolant connections during movement Exposure of the pump to accelerating forces must be avoided or reduced to such an extent that the rotor unit will not be excited by vibrations In the case of critical applications you must consult our Applications Dept first The references to diagrams e g 1 2 consist of the Fig No and the Item Figures No in that order We reserve the right to alter the design or any data given in these Operating Instructions The illustrations are not binding Retain the Operating Instructions for furth
11. OPERATING INSTRUCTIONS GA05118_1402 TURBOVAC Turbomolecular pumps with grease lubricated bearings TURBOVAC 35 LS 35 LS2 TURBOVAC 50 TURBOVAC 151 151 C TURBOVAC 361 361 C TURBOVAC 600 C TURBOVAC 1000 C and pumps modified by Leybold Leybold Vacuum Contents 2 GA05118_1402 05 2005 Section Page Important Safety Informati0N oocoooocoronooo eee 3 Description 3 52024 t a See Seen een chee et ead 6 Design and Operation iras Heed hese neat ai ee ey a a beat 6 Supplied Equipment cs us ta bed eer A ae ee Ee 6 echnical Dates ss anette we ara a a ad cad 7 Ordering INTOFMALION sas arca ad Aiea Sadly es rada 12 Operating environment and cooling 6 tt eee 13 Transport and Storing iaeoa mrina eee eee 14 Installation 00 00 a ew ea wee eee aa ae 15 Conforming UillSation re ee a SR a 15 Ambient CONOS pino ia ro A ti n 15 Connecting the pump to the vacuum chamber sssaaa aeea 16 FOreVaCuUM CONNeCtON y ida ta da ea 20 Connecting the tooling isso inss ti a bees 20 Connecting the purge gas and airing device 0 eee ee 22 Connecting the TURBOTRONIK 3 acusa gous aca tad Sage hy aes a 23 Operation y A Pee Lee eee eds ee 24 Media Compatibility Purge Gases s saasaa 24 Stat UPa i ae ci AA A E EA 25 Bakeo t a a E PS p ey A eee ees 26 Operator td 26 SWIENIN Ot ia pid a sa 26 AN 27 Maintenance gt iii o a A eee ee 29 Maintenance IntervalS ciao ei dee HE PT Da ee 29
12. corrosive media or those containing dust When handling corrosive media the C ver sion pump must be operated with purge gas when handling media containing dust a fine mesh filter must be installed Some media such as aluminum trichloride can sublime inside the pump and form deposits Thick deposits reduce the play between moving parts to the point that the pump could seize In some processes deposits can be prevented by heating the pump Please consult with us in case such problems arise Corrosive gases such as chlorine can destroy the rotors During operation the pressure inside the TURBOVAC is so low that there is no danger of ignition at pressures below about 100 mbar 75 Torr A hazardous condition will be created if flammable mixtures enter the hot pump at pressures above 100 mbar 75 Torr During operation the pump can reach temperatures as high as 120 C 248 F Sparks could occur in case of damage to the pump and these could ignite explosive mixtures We would be glad to consult with you as regards the media which can safe ly be handled with this unit Purge gas Suited are all gases E which will not cause corrosion or pitting in aluminium and steel and E which in connection with process deposits in the pump will not cause corrosion or sticking For venting and as the purge gas we recommend inert gases like nitrogen or argon The temperature of these gases should be between 5 C and 80 C max relative humi
13. dity should not exceed 10 ppm In individual cases and after consultation also dry filtered oil free air or fil tered ambient air may be used filter mesh lt tum Change the filters after some time at least annually Operation 108 TURBOVAC 35 LS 2 50 mbar TURBOVAC 151 to 1000 10 Starting pressure 10 S Pumping speed at the forevacuum pump m3 h V Chamber volume m 100 0 25 50 75 100 125 S V Fig 8 Determining the starting pressure for a TURBOVAC when evacuating larger volumes 4 2 Start up The starting pressure for the TURBOVAC can be read from the chart repro Starting pressure duced in Fig 8 Where S V gt 100 h 1 the forevacuum pump and the TURBOVAC can be switched on simultaneously In such a situation the TURBOVAC serves from the very outset as an effec tive baffle When dealing with larger volumes the vacuum chamber will first have to be pumped down with the forevacuum pump Then switch on the cooling and the TURBOVAC at the TURBOTRONIK Kindly refer to the TURBOTRONIK operating instructions for details Avoid impact and vibration while the pump is running Vibrations GA05118_1402 05 2005 25 Operation 26 GA05118 1402 05 2005 Warning Caution Venting 4 3 Bakeout If pressures in the range of 108 mbar are to be developed within a short period of time the vacuum chamber and the components installed t
14. er use GA05118_1402 05 2005 5 Description 6 6A05118_1402 05 2005 1 Description 1 1 Design and Operation The TURBOVAC models 35 LS to 1000 are turbomolecular pumps featuring grease lubricated bearings These units are engineered to pump vacuum chambers down to pressures in the high vacuum range A TURBOTRONIK frequency converter and a forevacuum pump are required for the operation of the TURBOVAC 1 2 Supplied Equipment The TURBOVAC is shipped in a sealed PE bag which also contains a desic cant The maximum effective life of the desiccant is one year TURBOVAC 35 LS 35 LS2 The pumps are shipped without splinter guard or connection accessories TURBOVAC 50 to 1000 For high vacuum port with ISO K flange Splinter guard centering ring with FPM sealing ring outer ring For high vacuum port with CF flange Splinter guard For high vacuum port with KF flange Splinter guard centering ring with FPM O ring and clamping ring For high vacuum port with ANSI flange Splinter guard Forevacuum port Centering ring with O ring and clamping ring Both the purge gas port and the airing port are blanked off for shipping In addition the pivoted threaded fittings used to make the coolant connec tion are included as standard equipment for the TURBOVAC 151 361 and 600 if needed they can be used to replace the hose nipples installed at the factory The electronic frequency converter and the connector cables re
15. ern Shuangchen Road Tianjin 300400 China Sales and Service Phone 86 22 2697 0808 Fax 86 22 2697 4061 Fax 86 22 2697 2017 leybold leybold com cn Leybold Vacuum Tianjin Equipment Manufacturing Co Ltd Beichen Economic Development Area BEDA No 8 Western Shuangchen Road Tianjin 300400 China Phone 86 22 2697 0808 Fax 86 22 2697 4061 Fax 86 22 2697 2017 leybold leybold com cn Leybold Vacuum Tianjin International Trade Co Ltd Beijing Branch 1 908 Beijing Landmark Towers 8 North Dongsanhuan Road Chaoyang District Beijing 100004 China Sales and Service Phone 86 10 6590 7607 Fax 86 10 6590 7622 Leybold Vacuum Tianjin International Trade Co Ltd Shanghai Branch Add No 33 76 Futedong San Rd Waigaogiao FTZ Shanghai 200131 China Sales and Service Phone 86 21 5064 4666 Fax 86 21 5064 4668 leybold_sh leybold com cn Leybold Vacuum Tianjin Guangzhou Branch Add G F 301 Building 110 Dongguangzhuang Rd Tianhe District Guangzhou 510610 China Sales Phone 86 20 8723 7873 Phone 86 20 8723 7597 Fax 86 20 8723 7875 leybold_gz leybold com cn India Leybold Vacuum India Pvt Ltd A 215 Road No 30 MIDC Wagle Industrial Estate Thane W 400 604 Maharashtra India Sales and Service Phone 91 22 2581 2929 Fax 91 22 2581 2626 ivt2004 yahoo com Ley Vacuum 1250 Japan Leybold Vacuum Japan Co Ltd Head Office Tobu A K Bldg 4
16. fications Inlet pressure 3 to 7 bar absolute Cooling water requirement inlet temperature See Fig 7 Appearance Colorless clear free of oils and greases Sediments lt 250 mg l Particle size lt 150 um pH value 7 to 8 5 Overall hardness total alkaline earths max 20 German hardness scale 3 57 mmol l GA05118_1402 05 2005 21 Installation 22 6A05118_1402 05 2005 3 6 Connecting the purge gas and airing device See Section 4 1 for suited gases see Section 4 6 for different venting methods TURBOVAC 35 LS 35 LS2 and 50 with KF or ISO K connectors The TURBOVAC is aired through the system TURBOVAC 50 with CF connector and 151 361 If the pump cannot be aired through the system then a power failure airing valve shall be attached to the airing connection flange This power failure airing valve prevents oil vapor from the forevacuum line from diffusing back into the system TURBOVAC 151 C 361 C 600 C and 1000 C Either attach a power failure airing valve to the airing connection flange or a purge gas and airing valve at the purge gas connection flange Which of the two flanges is used will depend on the process When pumping clean non corrosive gases a power failure airing valve is to be attached When pumping reactive media connect a purge gas and airing valve Please contact Leybold for assistance in making the decision as to which media can be pumped with or without purge gas In proces
17. ge gas feature it protects only the bearing area and the motor in the TURBOVAC 3 2 Ambient Conditions When using the TURBOVAC inside a magnetic field the magnetic induction at the pump housing surface may not exceed the following values TURBOVAC 50 B 7 mT TURBOVAC 151 1000 B 5 mT incase of radial impingement B 15 mT in case of axial impingement Provide suitable shielding measures if these values are exceeded The standard version is resistant to radiation at levels up to 10 Gy 1 mT milliTesla 10 G Gauss 1 Gy Gray 100 rad Installation Magnetic field GA05118_1402 05 2005 15 Installation 16 GA05118_1402 05 2005 Warning 3 3 Connecting the pump to the vacuum chamber Remove the covers and the blank flanges at the turbomolecular pump only just before installing to ensure that the TURBOVAC is installed under the cle anest possible conditions Do not stand below the TURBOVAC pump while it is being connected to or detached from the system Turbopumps as described in the following operation manual con tains a high portion of kinetic energy due to their high rotational speed in combination with the specific rotor mass In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy is released To avoid the destruction of the equipment and to prevent injuries of the operating staff the leading European manufacturers of vac
18. he TURBOVAC A collar flange is required when using ultra high vacuum sealing washers Splinter guard A splinter guard is installed in the high vacuum flange to protect the TUR BOVAC Operate the pump only with this splinter guard in place as foreign objects passing through the intake port and into the pump can cause serious damage to the rotor Damage caused by foreign objects in the rotor sec tion is excluded from the guarantee Installation 0 11 Turbomolecular pump Forevacuum test point Forevacuum pump Anti vibration bellows Adsorption trap Forevacuum valve Airing valve High vacuum valve 9 Purge gas connection 10 Valve in the roughing pump line 11 Electronic frequency converter ANOARWND Roughing pump line recommended to achieve the shortest possible cycling times o oe Drive and control line Fig 6 Schematic of a turbomolecular pump system Flange heating only for pumps with the CF flange The flange heater is used to bake out under automatic control the high vacuum connection port at the TURBOVAC and the mating flange on the vacuum chamber The bakeout jacket or flange heater is mounted directly to the TURBOVAC intake flange This can be done even with the pump flanged to the vacu um chamber Risk of injury Warning The pump can become so hot during operation gt 70 C 158 F as to represent a burn hazard Shield the hot components against contact The
19. he latest Moreover we recommend to have the rotor assy exchanged depending on the thermal stress on the rotor after 45 000 to 100 000 operating hours This can only be done by Leybold Service For this ask for a quotation When using purge gas valves Depending on the degree of contamination of the purge gas used the filter will clog and will have to be exchanged our experience indicates that this will become necessary after 1 to 6 months When using an adsorption trap Regenerate or renew the adsorption agent regularly refer to the operating instructions provided with the trap 5 2 Leybold Service Whenever you send in equipment to Leybold indicate whether the equip ment is contaminated or is free of substances which could pose a health hazard If it is contaminated specify exactly which substances are involved You must use the form we have prepared for this purpose A copy of the form has been reproduced at the end of these Operating Instructions Declaration of Contamination for Compressors Vacuum Pumps and Components Another suitable form is available from the Leybold homepage www leybold com under the headline Support amp Downloads Attach the form to the equipment or enclose it with the equipment Do not place it together with the equipment inside the PE bag This statement detailing the type of contamination is required to satisfy legal requirements and for the protection of our employees Leybo
20. herein will have to be baked out In addition the TURBOVAC can be baked out using the flange heater provided for this purpose Protect the rotor against intensive direct heat radiation When baking out at the forevacuum side at a sorption trap for example ensure that the components attached direct are not heated to more than 80 C 176 F The forevacuum pump must be in operation so as to eliminate the vapors liberated at the sorption trap 4 4 Operation Risk of injury The pump can become so hot during operation gt 70 C 158 F as to represent a burn hazard Note the symbols on the pump pointing to the hazards and in the case of a hot pump wear the required protective clothing Exposure of the pump to accelerating forces must be avoided or reduced to such an extent that the rotor unit will not be excited by vibrations In the case of critical applications you must consult our Applications Dept first 4 5 Switching Off Switch off the TURBOVAC at the TURBOTRONIK Refer to the TURBOTRONIK operating instructions for details Switch off the forevacuum pump Vent the TURBOVAC before it has come to a full standstill refer to Section 4 6 In TRIVAC pumps the built in anti suckback valve will close automatically and shut off the forevacuum line When using forevacuum pumps without an anti suckback valve close the valve in the forevacuum line Close off the cooling water supply or switch off the ventilation im
21. in particular the flanges the coolant connection nipples and the cable grommets If you return a pump to Leybold be absolutely sure to observe the instruc tions given in Section 5 2 6 Troubleshooting When the connector cable to the TURBOVAC is attached the out puts of the TURBOTRONIK frequency converter are not free of vol tage Before commencing troubleshooting procedures make the following simple checks E Is the TURBOVAC being supplied with electrical energy E Are the connections from the mains power cord to the frequency converter at the connector cable from the frequency converter to the mains network in good working order E ifa water flow monitoring device is connected is it functioning proper ly Check the water flow monitoring device by jumping its terminals and starting the TURBOVAC E s the forevacuum pressure sufficient E Is the vacuum chamber free of leaks Observe also the troubleshooting instructions for the TURBOTRONIK Warning Maintenance Troubleshooting GA05118_1402 05 2005 31 Troubleshooting Malfunction Possible cause TURBOVAC does not Motor connection cable not attached is start loose or is defective Pump has seized TURBOVAC generates Rotor is out of balance loud running noises and vibrations Bearing is defective Pump running within the natural frequen cy range of the system causing reso nance The TURBOVAC does Measurement device is defective
22. itional forces When venting the pump through its foreline connection neither oil nor par ticles may be entrained in the gas flow from the forevacuum side into the pump Operation Purge gas and venting valve High vacuum side Foreline connection GA05118_1402 05 2005 27 Operation Speed Pressure rise curve 28 GA05118 1402 05 2005 Particles Speed of the Pressure Rise All turbomolecular pumps may be vented at full speed However the pres sure must not increase faster than specified through the pressure rise curve The pump must be vented significantly slower when there is the risk of par ticles entering into the pump from the process During venting the flow must be of the laminar type in both the vacuum chamber and the turbo molecular pump The speed of the pressure rise during venting of the running pump will gre atly influence the load on the rotor stator pack and the bearings The slo wer the pump is vented the longer the service life of the bearings will be The pump must not be vented to pressures above atmospheric pressure 5 Maintenance The pump must only be opened by such persons who have been authorised by Leybold to do so 5 1 Maintenance Intervals After 15 000 operating hours at the latest a standard bearing exchange will be recommended for the TURBOVAC 35 to 361 C For the TURBOVAC 600 C and 1000 C a standard bearing exchange will be required after 10 000 ope rating hours at t
23. ld must return to the sender any equipment which is not accompa nied by a contamination statement Maintenance Caution Standard bearing exchange Contamination Form GA05118_1402 05 2005 29 Maintenance Caution Hazardous gases Deposits Desiccant Close the pump 30 GA05118_1402 05 2005 5 3 Cleaning Contamination inside the TURBOVAC is indicated by a deterioration in per formance e an increasing decline in working pressure If there is only slight contamination such as a coating on the TURBOVAC interior surfaces due to exposure to the atmosphere over an extended peri od of time for the CF version the flange heater can be used for cleaning The ultimate pressure must be monitored while baking out under vacuum When making the initial examination of the pump mount blank flanges to eliminate any possibility of leaks and desorption in the vacuum chamber The pump will have to be disassembled if there is more extensive contami nation The LEYBOLD Customer Service Department will have to be con sulted here in all cases The rotor is precision balanced any change whatsoever such as loosening or bending any rotor component will make re balan cing necessary 5 4 Removing the pump from the system Switch off the pump and vent it as per the instructions in Sections 4 5 and 4 6 Take the appropriate precautionary measures prior to opening the intake or discharge connection if the pum
24. mediately after switching off the TURBOVAC in order to avoid condensate formation in the pump If the pump previously handled corrosive gases it will be necessary to purge the pump with dry nitrogen for one hour prior to shut down When the system is not in operation ensure that neither ambient air nor cleaning agents can enter the TURBOVAC 103 mbar 102 TURBOVAC 35 LS 2 50 TURBOVAC 151 361 Forevacuum pressure 101 TURBOVAC 600 1000 Time Fig 9 Curves showing the pressure rise 4 6 Venting As to suitable gases see Section 4 1 Venting Methods There are three different methods of venting the turoomolecular pump In the case processes requiring a purge gas the pump must be vented via the purge gas and venting valve when shutting the pump down When additionally venting the vacuum chamber the venting function of the purge gas and venting valve must be opened before opening the chamber valve This will ensure the presence of a higher pressure in the area of the ball bearings compared to the remaining vacuum area This will prevent particles dust or aggressive gases from being forced through the bearings into the not yet vented motor chamber of the pump Cautious venting of the pump is possible from the high vacuum side since here the bearing forces will be lowest When doing so no free jet of gas must be allowed to form on the rotor so as to avoid exposing the rotor to add
25. mps Safety requirements Part 2 Vacuum pumps Cologne April 15 2005 Cologne April 15 2005 Li Oe well K Alda Marcus Eisenhuth Ralf Adamietz Vice President Head of Construction Head of Product Development Leybold vacuum Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 0 221 347 0 Fax 49 0 221 347 1250 documentation leybold com www leybold com 34 GA05118_1402 05 2005 Leybold Vacuum Declaration of Contamination of Compressors Vacuum Pumps and Components The repair and or servicing of compressors vacuum pumps and components will be carried out only if a correctly completed declaration has been sub mitted Non completion will result in delay The manufacturer can refuse to accept any equipment without a declaration A separate declaration has to be copleted for every single component This declaration may be completed and signed only by authorised and qualified staff Customer Dep Institute Address Reason for returning El applicable please mark O repair U chargeable O warranty O replacement CU chargeable O warranty U DKD calibration L Factory calibration Person to contact restoring goods because of following reason Phone Fax A rent loan O for credit O against exchange Order number of customer O exchange already received arranged A Description of the equipment machine or component Type Ancillary equipment Par
26. nt at the fan the flange heater the valves and their supply leads Route the conductors and cables so as to protect them from damage When the connector cable to the TURBOVAC is attached the outputs of the TURBOTRONIK frequency converter are not free of voltage Thermal hazards Warning Risk of injury The pump can become so hot during operation gt 70 C 158 F as to represent a burn hazard Shield the hot components against contact Note the symbols on the pump pointing to the hazards and in the case of a hot pump wear the required protective clothing Hazards caused by materials and substances Warning The forevacuum line must be tight Hazardous gases could escape from leaks or the gases being pumped could react with air or humidity Take the appropriate precautionary measures prior to opening the intake or discharge connection if the pump has previously hand led hazardous gases If necessary use gloves a respirator and or protective clothing and work under an exhaust hood Risk of explosion The standard version of the pump is not suited for operation in explosion hazard areas Contact us before planning to use the pump under such circumstances Contaminated parts can be detrimental to health and environ ment Before beginning with any work first find out whether any parts are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts 4 G
27. old Vacuum Nederland B V Computerweg 7 NL 3542 DP Utrecht Sales and Service Phone 31 346 58 39 99 Fax 31 346 58 39 90 sales netherlands leybold com service netherlands leybold com Spain Leybold Vacuum Espa a S A C Huelva 7 E 08940 Cornella de Llobregat Barcelona Sales Phone 34 93 666 46 16 Fax 34 93 666 43 70 sales spain leybold com Service Phone 34 93 666 49 51 Fax 34 93 685 40 10 Sweden Leybold Vacuum Scandinavia AB Box 9084 SE 40092 G teborg Sales and Service Phone 46 31 68 84 70 Fax 46 31 68 39 39 info leybold se Visiting delivery address Datavagen 57B SE 43632 Askim Switzerland Leybold Vacuum Schweiz AG Leutschenbachstrasse 55 CH 8050 Z rich Sales Phone 41 1 308 40 50 Fax 41 1 302 43 73 sales leybold ch Service Phone 41 1 308 40 62 Fax 41 1 308 40 60 America USA Leybold Vacuum USA Inc 5700 Mellon Road Export PA 15632 info leyboldvacuum com Sales Eastern amp Central time zones Phone 1 724 327 5700 Fax 1 724 733 1217 Pacific Mountain Alaskan amp Hawaiian time zones Phone 1 480 752 9191 Fax 1 480 752 9494 Service Phone 1 724 327 5700 Fax 1 724 733 3799 Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 221 34 Fax 49 221 34 info leybold com 7 0 7 Asia P R China Leybold Vacuum Tianjin International Trade Co Ltd Beichen Economic Development Area BEDA No 8 West
28. p has previously hand led hazardous gases If necessary use gloves a respirator and or protective clothing and work under an exhaust hood If the pump previously handled corrosive gases then allow the purge gas to flow for as long as possible before detaching the pump from the system Remove the TURBOVAC from the system TURBOVAC pumps which are used in semiconductor processes for exam ple will be contaminated with process gases These gases may be toxic and hazardous to health In addition deposits with similarly dangerous properties may have formed Many of these gases and deposits form acids when they come into contact with humid air This will result in serious cor rosion damage to the pump To avoid health hazards and corrosion damage when the pumps are deta ched from the system lay a container of desiccant on the splinter guard and then close the pump immediately at all flange connections Store the pump with a desiccant in a PE bag A packing set is included with TURBOVAC models with a C in the type designation Use this packing set after detaching the pump from the system Faulty leaky packing of a TURBOVAC will nullify the guarantee Ordering data Packing set for high vacuum connection flange Order No DN 100 160 200 91 240 DN 200 200 91 295 DN 250 6 ANSI 200 91 262 Pack the pump so that it cannot be damaged during shipping and so that no contaminants can escape from the packaging Protect
29. quired for operation are not included as standard equipment with the pump PE Polyethylene FPM Fluoroelastomer resistant to temperatures of up to 150 C 300 F HN Description 1 3 Technical Data TURBOVAC 35 LS 35 LS2 TURBOVAC 35 LS 35 LS2 High vacuum port DN 40 KF 40 KF Pumping speed He high vacuum les 25 32 He interstage vacuum les 4 5 5 5 Max gas throughput in permanent operation with water cooling at 10 2 mbar He mbar s 0 25 0 25 Max idle compression He high vacuum 1 5 108 2 104 He interstage vacuum 70 600 Max forevacuum pressure for He mbar 1 6 Forevacuum port DN 16 KF 16 KF Recommended forevacuum pump TRIVAC D 2 5 E Diaphragm pump Run up time to 95 nominal speed min 2 Weight approx kg 2 Max power consumption at ultimate pressure W 45 15 Max ambient temperature at operation C 45 High vacuum port Interstage vacuum port Forevacuum port Electrical connection TURBOVAC 35 LS and 35 LS2 GA05118_1402 05 2005 7 Description oo TURBOVAC 50 O Ring sealed O Ring sealed Metal sealed High vacuum port DN 40 KF 63 ISO K 63 CF Pump housing Aluminium Aluminium Stainless steel Pumping speed at 103 mbar N les 33 55 55 He les 36 48 48 H les 28 30 30 Max gas throughput in permanent operation with water cooling
30. s High vacuum pressure lt 10 mbar Forevacuum pressure lt 5101 mbar Continuous operation at high vacuum pressure lt 104 mbar Ambient temperature lt 45 C mbar Torr 104 8105 108 8 104 102 8103 5102 4102 5101 41071 2 1 5 Air or water cooling required Ambient temperature 30 40 C Bakeout operations High vacuum pressure 108 to 5 10 mbar Forevacuum pressure 5 107 to 2 mbar Bakeout at ambient temperature lt 40 C Continuous operation at high vacuum pressure gt 104 mbar Rapid cycling operation Bakeout at ambient temperature lt 35 C or High vacuum pressure lt 108 mbar and ambient temperature lt 45 C Bakeout at ambient temperature lt 35 Co high vacuum pressure lt 108 mbar and ambient temperature lt 45 C Bakeout at ambient temperature lt 35 Cor high vacuum pressure lt 104 mbar and ambient temperature lt 45 C Description Operating environment and cooling Water cooling required if any one of these conditions prevails Ambient temperature 40 45 C Bakeout operations High vacuum pressure gt 5 102 mbar Forevacuum pressure gt 2 mbar Ambient temperature 45 55 C Bakeout at ambient temperature gt 40 C Bakeout at ambient temperature gt 35 C High vacuum pressure gt 10 mbar Ambient temperature 45 55 C Bakeout at ambient temperature gt 35 C High vacuum pressure gt 10 mbar Ambient temperature 45 55
31. s maintain a minimum distance of 20 cm 8 inch to the nearest object Ensure that no heated air from neighboring equipment will be drawn in by the fan Connect the fan in the air ventilation unit to the AC mains Make the electrical connection for the ventilation unit in such a way that it will be started and stopped together with the pump itself Observe the information given in the operating instructions for the air ven tilation unit GA 05 199 Installation TURBOVAC 35 LS 35 LS2 50 TURBOVAC 600 1000 50 80 Ih Ih D n 2 5 30 60 o 20 E 50 3 ie 10 3 0 D 5 10 15 20 25 80 35 3 ag RE Cooling water temperature O 20 10 TURBOVAC 151 361 0 s 5 10 15 20 25 300 35 l h Cooling water temperature gt 40 30 E 20 amp 10 0 5 10 15 20 25 30 C 35 Cooling water temperature Fig 7 Cooling water consumption Water cooling When attaching the water cooling unit to the TURBOVAC 35 LS 35 LS2 and 50 remove the pump foot and then bolt the cooling unit to the bottom of the pump The mounting bolts are provided with the water cooling unit Connect the coolant hoses to the hose nipples and secure with hose clamps If the coolant flow is turned on and off by means of a solenoid valve make the electrical connection in such a way that coolant flow will be started and stopped together with the pump itself Cooling water speci
32. ses which require purge gas the pump will have to be aired when it is switched off through the purge gas valve Observe the operating instructions for the purge gas and airing valve Installation 3 7 Connecting the TURBOTRONIK Use the connector cable to attach the TURBOVAC and the TURBOTRONIK see the operating instructions on the TURBOTRONIK for details Warning Risk of injury Dangerous voltages are present at the mains connections Before beginning with any maintenance or service work on the pump disconnect the pump from all power supplies Operate the pump only with the matching frequency converter and connector line Voltages of up to 400 V will be present at the connection cable between the frequency converter and the pump mains voltage will be present at the fan the flange heater the valves and their supply leads Route the conductors and cables so as to protect them from damage The connections are of the IP 40 safety classification Do not expose the pump frequency converter or connectors to dripping water The TURBOVAC 35 LS must only be operated with a modified NT 12 fre quency converter Please consult with Leybold GA05118_1402 05 2005 23 Operation Caution Danger of ignition Suited gases 24 GA05118_1402 05 2005 Filters 4 Operation 4 1 Media Compatibility Purge Gases Unless appropriate accessories and attachments are used the TURBOVAC is not suitable for aggressive or
33. t number Serial number Type of oil used B Condition of the equipment No 1 Has the equipment been used QO 2 Drained Product service fluid 3 All openings sealed airtight 4 Purged If yes which cleaning agent and which method of cleaning fe lt _ C Description of processed substances Please fill in absolutely 1 What substances have come into contact with the equipment Yes No Contamination No Yes O m 0X0 a a a a corrosive a a a mmicrobiological a a a a explosive a a radioactive a m other harmful substances a Trade name and or chemical term of service fluids and substances processed properties of the substances According to safety data sheet e g toxic inflammable corrosive radioactive Tradename Chemical name Residues a O Yes O No b O Yes ONo c O Yes QNo d O Yes QNo Yes No j 2 Are these substances harmful a a 3 Dangerous decomposition products when thermally loaded a a Which without written evidence of decontamination Components contaminated by microbiological explosive or radioactive products will not be accepted D Legally binding declaration we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level Name of authorised person block letters date signatur of authorised person
34. t should suddenly seize Rotation of the pump can cause leaks in the forevacuum line Secure the pump additionally to prevent rotation in case it should suddenly seize In most applications the TURBOVAC will be flanged direct to the high vacu um flange for the system The design of the lubricating system makes it possible to mount and run the TURBOVAC in any desired attitude It is not necessary to support the pump If there is a danger that dust could pass from the vacuum chamber into the TURBOVAC install a fine mesh filter between the vacuum chamber and the TURBOVAC The TURBOVAC is precision balanced and is generally operated without a vibration damper A special design vibration damper is available for moun ting at the TURBOVAC high vacuum flange to decouple extremely sensitive equipment and to prevent external vibrations from being transferred to the TURBOVAC If the TURBOVAC 1000 C are flanged via a vibration damper secure it in addition at the base flange Installation Warning Fine mesh filter Vibration damper GA05118_1402 05 2005 17 Installation 18 GA05118_1402 05 2005 Install outer centering ring y Nz Fig 5 Using ISO K flanges Design with ISO K clamp flange Fit the O ring at the centering ring The O ring should be flat and even it must not be twisted Then add the outer ring A collar flange with retaining ring and suitable sealing washer can also be used to connect t
35. taminated parts Separate clean components according to their materials and dispose of these accordingly Leybold offers this service free of charge Further details are available on request When sending any equipment to Leybold observe the regulations given in Section 5 2 Leybold Service GA05118_1402 05 2005 33 EC Manufacturers Declaration in the spirit of Appendix lib to the 98 37 EG Machinery Guidelines We Leybold Vacuum GmbH herewith declare that operation of the incomplete machine defined below is not permissible until it has been determined that the machine into which this incomplete machine is to be installed meets the regulations of the EC Directive on Machinery When using the appropriate Leybold accessories e g connectors lines flange heaters and fans and when power ing the pump with the specified Leybold frequency converters the protection level prescribed in the EMC Guide lines will be attained Designation of the products Turbomolecular pump Models Part Nos TURBOVAC 35 LS 35 LS2 50 D2 856 64 856 66 856 68 TURBOVAC 50 853 99 854 00 854 01 854 02 800150V0010 TURBOVAC 151 151 C 856 31 856 32 856 35 856 33 TURBOVAC 361 361 C 856 70 856 71 856 72 856 73 856 74 856 75 856 77 TURBOVAC 600 C 800150V0005 800150V0015 800150V0017 TURBOVAC 1000 C 855 35 855 36 855 37 855 38 855 39 894 89 117 64 Related harmonized standards M EN 1012 2 1996 Compressors and vacuum pu
36. th Floor 23 3 Shin Yokohama 3 chome Kohoku ku Yokohama shi Kanagawa ken 222 0033 Sales Phone 81 45 4713330 Fax 81 45 4713323 Leybold Vacuum Japan Co Ltd Osaka Branch Office MURATA Bldg 7F 2 7 53 Nihi Miyahara Yodogawa ku Osaka shi 532 0004 Sales Phone 81 6 6393 5211 Fax 81 6 6393 5215 Leybold Vacuum Japan Co Ltd Tsukuba Technical S C Tsukuba Minami Daiichi Kogyo Danchi 21 Kasumi no Sato Ami machi Inashiki gun Ibaraki ken 300 0315 Service Phone 81 298 89 2841 Fax 81 298 89 2838 Korea Leybold Vacuum Korea Ltd 761 4 Yulkeum ri SungHwan eup Cheonan City Choongchung Namdo 330 807 Korea Sales Phone 82 41 580 4420 Fax 82 41 588 3737 Service Phone 82 41 580 4415 Fax 82 41 588 3737 Singapore Leybold Vacuum Singapore Pte Ltd No 1 International Business Park B1 20B The Synergy Singapore 609917 Sales and Service Phone 65 66652910 Fax 65 65668202 vacuum leyboldvac com sg Taiwan Leybold Vacuum Taiwan Ltd No 416 1 Sec 3 Chung Hsin Rd Chu Tung Hsin Chu Taiwan R O C Sales and Service Phone 886 3 5833988 Fax 886 3 5833999 bold www leybold com
37. the pump when it is vented Turbopumps as described in the following operation manual con tains a high portion of kinetic energy due to their high rotational speed in combination with the specific rotor mass In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy is released To avoid the destruction of the equipment and to prevent injuries of the operating staff the leading European manufacturers of vacuum pumps strictly recommend to follow the installation instructions as given in this manual Never operate the pump in bench tests for instance without its being flanged to the vacuum chamber The small flange connector for the high vacuum flange at the TURBOVAC 50 is not strong enough to keep the pump from rota ting if it should suddenly seize Rotation of the pump can cause leaks in the forevacuum line Secure the pump additionally to prevent rotation in case it should suddenly seize GAO5118 1402 05 2005 3 Safety Information Electrical hazards Warning Risk of injury Dangerous voltages are present at the mains connections Before beginning with any maintenance or service work on the pump disconnect the pump from all power supplies Operate the pump only with the matching frequency converter and connector line Voltages of up to 400 V will be present at the connection cable between the frequency converter and the pump mains voltage will be prese
38. uum pumps strictly recommend to follow the installation instructions as given in this manual The high vacuum flange must be securely attached to the vacu um chamber If the pump were to become blocked insufficient attachment could cause the pump to break away from its mount or allow internal pump parts to be discharged Never operate the pump in bench tests for instance without its being flanged to the vacuum chamber If the pump should suddenly seize the ensuing deceleration torque will have to be absorbed by the system To accomplish this the following are required when securing an ISO K type high vacuum flange Braking Clamping TURBOVAC torque Nm bolts 35 LS LS2 150 4 50 63 4 151 151 C 283 4 361 361 C 580 6 600 C 1486 10 1000C DN 160 1500 16 DN 250 1500 10 Clamping bolts made of steel must be torqued down to 35 Nm those of quality 12 9 to 50 Nm When installing CF flanges use only the bolts specified tightening torque is 15 Nm for DN 40 CF 30 Nm for DN 63 CF and larger You will find the order numbers for the clamping bolts in the Leybold Catalog The clamping bolts are not included as standard equipment with the pump Nm 15 30 35 50 ft lb 11 22 26 37 max 100 mm max 100 mm max 100 mm Incorrect Fig 4 Fixed flanging of the TURBOVAC to the vacuum chamber The small flange connector for the high vacuum flange at the TURBOVAC 50 is not strong enough to keep the pump from rota ting if i
39. ybold Service Department Check ultimate pressure of the forevacuum pump or install a more powerful forevacuum pump Locate and repair leaks only by the Leybold Service Department Check the connector lines interchange poles if necessary Check the forevacuum pump install a more powerful forevacuum pump if necessary Seal leak install a more powerful forevacuum pump if necessary Ensure sufficient supply of cooling air Route cooler air to the fan or employ water cooling option Ensure sufficient supply of cooling water Have the pump repaired only by the Leybold Service Department Repair or replace the forevacuum pump Check the airing valve and replace if indicated Air the TURBOVAC correctly see Section 4 6 Install a roughing line or pre pump for a shorter period of time or install a sorption trap Regenerate or replace the sorption trap Waste Disposal 7 Waste Disposal The equipment may have been contaminated by the process or by envi Contamination ronmental influences In this case the equipment must be decontaminated in accordance with the relevant regulations Leybold offers this service at fixed prices Further details are available on request Contaminated parts can be detrimental to health and environ Warning ment Before beginning with any work first find out whether any parts are contaminated Adhere to the relevant regulations and take the necessary precautions when handling con
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