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Operating Instructions SmartTest

1. Fig 6 66 88 PFEIFFER VACUUM test leak test vessel Fig 6 67 Calibration run Partial flow arrangement When connecting the SmartTest to a vacuum system with its own pump the test leak must be connected to its test vessel The calibration runs through the following sequence Fig 6 69 qEsoare FUMPING DOWN 1608 Inlet Pressure Pa 146 ci A 18 1 Fig 6 68 qEscare CALIBRATION Please Press OK if sianal is stable External test leak open In calibration with an external test leak or an internal test leak in the Manual internal mode the stability of the signal must be confirmed with the OK softkey Esca CALIBRATION Autotune Fig 6 70 PFEIFFER VACUUM 89 qEscare CALIBRATION Please wait CExternal test leak open Twin Flow high Fig 6 71 CALIBRATION Please wait External test leak open Twin Flow low Fig 6 72 Escape 4 CALIBRATION Please wait External test leak oPen gt d Counter flow Fig 6 73 In calibration with an external test leak the prompt appears qEscare Please close test leak Fig 6 74 e Close test leak valve qEscare CALIBRATION Please wait External test leak closed Twin Flow high Fig 6 75 E ASTE CALIBRATION Please Press OK if si nal is stable External test leak closed Fig 6 76 e Wait 5 minutes with test
2. 1 1 Directions for Use 1 1 1 Use of this Manual This chapter describes the safety requirements which must be observed on all accounts when using the SmartTest Helium Leak Detector All persons working on and with the leak detector must have read and understood the chapters relevant to their activities This chapter is binding for all persons and all activities 1 1 2 Symbols Used The following symbols are used with explanatory text to alert people to remaining risks during use for the intended purpose and to stress important technical requirements Specifications for the prevention of bodily injuries of all kinds Specifications for the prevention of severe material and environmental damage Specifications for handling or use Failure to observe these can lead to faults or minor material damage N PFEIFFER VACUUM 1 2 General Safety Precautions 1 2 1 Use for the Intended Purpose PFEIFFER The SmartTest Helium Leak Detectors serve for measurement and localization of small and very small leaks both on components and modules and on fittings and systems They are suitable both for underpressure leak testing vacuum method with or without partial current operation and for overpressure leak testing sniffing method The SmartTest Helium Leak Detectors may only be used for leak testing for the gases specified in the Technical Data The SmartTest Helium Leak Detectors are design
3. Connecting cable radio transmitter 4m PT 445 401 Extension cable 8m cascadable up to a maximum 28 m PT 445 402 Radio transmitter to operate another leak detector PT 445 422 1 technical data see appendix Sniffing probes Order number Sniffing line with standard tip TP 312 rigid 120 mm LP 503 3 m BG 449 207 T LP 505 5 m BG 449 208 T LP 510 10 m BG 449 209 T Sniffing tips TP 385 385 mm rigid BG 449 216 T TF 312 120 mm flexible BG 449 217 T TF 385 385 mm flexible BG 449 218 T 108 PFEIFFER VACUUM Bypass option Order number With main cable and German plug PT 445 410 T With main cable VL PT 445 412 T Signal tower Order number Signal tower lamp green red for optical leak indication B 4681 891 KC External test leaks Order number Calibrated helium vacuum test leak CT 406 1 3x10 6 mbar l s PT 445 406 CT 408 10 8 mbar l s B 8116 557 CT 446 10 4 10 6 mbar l s adjustable B 8115 580 Calibrated helium sniffing test leak CL 004 10 4 mbar l s BG 447 704 T 10 5 mbar l s BG 447 705 T 10 6 mbar l s BG 447 706 T Calibrated H2 He 5 95 sniff test leak CL 002A 10 4 mbar l s total leak rate BG 449 025A 10 6 mbar I s H2 leak rate Helium pistol BG 512 125 T Venting valve Order number Venting valve 24V DC G1 8 for connection to TC 110 PM Z01 290 PFEIFFER VACUUM 109 Appendix A Remote Contr
4. 6 3 4 Volume Press the softkeys g or Gi Concern also to Chapter 6 4 4 6 3 Minimum Volume PFEIFFER VACUUM 45 6 4 Setup You can go to the Setup menu by pressing the Setup softkey in any menu which displays it Observe the detailed instructions for handling the keys in this and the following two chapters Thereafter only menus parameters and value tables are described Escape Info SETUP MAIN MENU View Calibration settings Access User control settings Language SPrache Maintenance amp Langue Idioma Service Fig 6 14 View of the Setup extended setting in the display e Select the desired option with the softkeys on the right and left of the screen 6 4 1 View Select Setup gt View Escape Back VIEW Contrast DisPlay range Units Lower display limit Time amp BackYround Date at Ready to start Fig 6 15 View of the View setting in the display e Select the desired option with the softkeys on the right and left of the screen 46 PFEIFFER VACUUM 6 4 1 1 Contrast Select Setup gt View gt Contrast E gt ta lt z 60 Fig 6 16 View of the Contrast setting in the display e Selectthe desired option with the softkeys on the right and left of the screen on e Change its value with the and keys prolonged pressing causes the parameters to be run through automatically e Save the new valu
5. B Interfaces Te FIC io io TI 20 AUGE HEAD Fig 10 2 GAUGE HEAD Connection for compact gauge heads INPUT OUTPUT control and output signals RS232 connection for computer printer RS485 connection for computer RC remote control or radio transmitter RELAY 1 relay contact RELAY 2 relay contact LP connection for sniffing probe LP 503 LP 505 or LP 510 ON AAA WBHNH Notice All plugs are illustrated looking at the SmartTest from the outside PFEIFFER VACUUM 111 GAUGE HEAD in Signal Identification DGND 0 V Measuring signal Measuring signal Screening 24 V fuse 0 8 A slow blow OnhRwWNnN TU Fig 10 3 Usable compact gauge heads Linear gauge heads Display Gauge head designation Operating unit Compact Capacitance Gauges linear CMR 261 CMR 262 CMR 263 CMR 264 CMR 271 CMR 272 CMR 273 CMR 274 CMR 275 Compact Piezo Gauges linear APR 250 APR 260 APR 262 APR 265 APR 266 APR 267 Logarithmic gauge heads Display Gauge head designation Operating unit Compact Pirani Gauges TPR TPR 280 Compact Pirani PCR 260 PCR 260 Capacitance Gauges Compact FullRange CC Gauges PKR PKR 251 PKR 261 1 The pressure value for the gauge head type TPR PCR is only shown until 1000 mbar Pressures above 1000 mbar are shown as gt 1000 mbar See Fig 10 2 1 INPUT OUTPUT Input and output signals 25 pole D Sub sockets see F
6. Enclose a completed Declaration of Contamination Declare all dangers on the package Products which are not clearly declared as free from potentially harmful substances will be decontaminated at the expense of the customer Fill in the form Declaration of Contamination before you ship a product to Pfeiffer Vacuum and enclose it to the shipment You can download the form on http www pfeiffer vacuum net from the Service site VACUUM G Declaration of Conformity Product Art No Declaration of Conformity in accordance with the listed EC directives Signatures Pfeiffer Vacuum GmbH Berliner Str 43 35614 Asslar SmartTest Helium Leak Detector HLT 550 HLT 560 HLT 570 PT L02 100 PT L02 110 PT L02 120 PT L02 101 PT L02 111 PT L02 102 PT L02 112 We herewith declare that the aforementioned products confirm to the regulations in the subsequently listed guidelines The authorised representative for the arrangement of the technical documents is Andreas Schopphoff Pfeiffer Vacuum GmbH Berliner Str 43 35614 Asslar e Directive on Electromagnetic Compatibility 2004 108 EC e Directive on Machinery 2006 42 EC Applied harmonized standards EN 61010 1 2001 EN 61000 6 4 2007 Part EN 55011 Class B EN 61000 6 3 2007 Part EN 61000 3 2 EN 61000 6 2 2005 Parts EN 61000 4 2 EN 61000 4 3 EN 61000 4 4 EN 61000 4 5 EN 61000 4 6 EN 61000 4 11 DIN EN ISO 12100 1
7. Venting with STOP You can deactivate the Regeneration in general with the STOP key or with STOP in the Regeneration menu An active regeneration will be announced in the display The regeneration stops after 60 minutes automatically Escape Back REGENERATION Blank off inlet Port Terminate Function with STOP key E gt _m lt J Fig 6 49 Regeneration menu With Start you start the following action Start Stop with venting Start Stop with venting and so on PFEIFFER VACUUM 77 6 4 4 6 6 Calibration Request Select Setup gt User Settings gt Monitoring Functions gt Calibration Request Escape Back CALIBRATION REQUEST No Save Fig 6 50 View of the Calibration request setting in the display e Select the desired option with the softkeys on the right and left of the screen e Save the new value with Save or e Go back one level with Back or to the measured value or ready to start display with Escape Option Description yes The calling for calibration comes up 30 minutes after switching the machine on or when the temperature of the leak detector has changed more than 5 C since it was calibrated the last time no The calling for calibration does not come up 78 PFEIFFER VACUUM 6 4 5 Calibration Settings Select Setup gt Calibration Settings In this parameter group settings for the
8. LR log 1 2 2 5 5 10 VACUUM 6 4 4 4 2 Compact Gauge Setup gt User Settings gt Interfaces gt Compact Gauge Escape Full SetPoint value Press p2 source Type Pressure Plext 213 COMPACT GAUGE 1666 linear EREE 62 mbar mbar mbar internal Fig 6 34 Compact Gauge Option Value range Description with variable time constant Min Max Full 0 1 mbar Set the full deflection value F S according to the deflection 1 mbar rating plate of the gauge head only in 10 mbar linear gauge 100 mbar heads 1000 mbar 2000 mbar 5000 mbar 10000 mbar 50000 mbar Threshold 1E 10 9 9E 2 The threshold value for relay output value mbar Pressure p2 external The inlet pressure is determined by an external source pressure measuring point internal The inlet pressure is determined by an internal pressure measuring point In addition the type of the currently connected gauge head is displayed under Type and the measured value of the gauge head under Pressure p ext The pressure value for the gauge head type TPR PCR is only shown below 1000 mbar Pressures of more than 1000 mbar are shown as gt 1000 mbar in the display Usable compact gauge heads see appendix PBR and IMR may not be connected because of the increased power requirement PFEIFFER VACUUM 65 6 4 4 4 3 Control Location Select Setup gt User Setti
9. too low e Cable to Pirani sensor e Pirani sensor defective e Sensor electronics I O card defective E56 E165 p1 gt 10mbar after runup The fore vacuum pressure P1 after 5 min in run up is gt 10 mbar e Backing pump defective e Leaks in the vacuum system e Valve V1 does not open E60 E001 TMP frequency too high Rated speed of 1500 Hz exceeded by 10 001 e Check connecting cable restart leak detector e TC 110 defective E61 E002 TMP power supply Error detected in the power supply unit TC 110 faulty E002 e Power supply unit defective PFEIFFER VACUUM Malfunction messages no Displayed message Description and possible remedy of cause Display Pfeiffer Protocol E62 E006 TMP acceleration time Speed of the SplitFlow 80 is 15 min after starting below the too high E006 speed switching point lt 1200 Hz e Turbo pump bearing damage e TC 110 defective E63 E008 TMP connection TC to TMP connection between TC 110 and SplitFlow 80 defective pump faulty E008 e Check proper assembly of TC 110 on SplitFlow 80 e TC 110 defective E64 E015 TMP controller faulty TMP controller TC 110 detected as defective E015 e Exchange TC 110 E65 E021 TMP wrong resistor TMP controller detects wrong pump rated resistance 021 e Exchange SplitFlow 80 E66 E037 TMP motor control The control of the SplitFlow 80 motor is defective faulty E037 e Exchange SplitFlow 80 e Exchange
10. 6 4 3 VACUUM Run up Details Venting TMP With the Details softkey you go to the Run up Details menu with e the current fore vacuum pressure e the speed of the turbo pump e the current consumption of the turbo pump e the status of emission e the active filament Foreline Press P1 Rotation sPeed TMP current 3 K gt a lt z DETAILS Emissionn Filament 1 Vent TMP Fig 6 4 Run up Details Press Escape to return to the Run up display The Emission on is not established until after the filament test when P lt 10mbar and Speed Turbo gt 1450Hz After the run up the display changes to Ready to start unless you have selected Setup The Softkey Vent TMP appears when the maintenance was enabled under Access control gt enable maintenance Wait for TMP rotation lt 15GHz E gt a lt z VENT TMP Foreline Press P1 2 64mbar Rotation sPeed 1486 Hz KZ KI K Fig 6 5 Venting TMP 1 After confirming to Softkey vent TMP the TMP is switched off automatically and the leak detector waits until the frequency of the TMP has become smaller than 150 Hz PFEIFFER VACUUM 37 38 E gt ta lt z VENT TMP Venting TMP Foreline Press P1 831 mbar Rotation sPeed 147 Hz K Ca K Fig 6 6 Venting TMP 2 After that
11. 92 The display also shows the default value of the internal test leak in addition to the measured test leak value e g TL 8 3E 07 mbarl s Softkey Escape always returns you to the menu Ready to start Matching of the measured value of the internal test leak and the default value of the internal test leak does not mean that the measuring system is absolutely accurate if the internal test leak was used for calibrating the leak detector The display of the internal test leak may only be used as a reference Accurate measurements require calibration with an external test leak See Chapter 6 5 VACUUM 7 Errors 7 1 Errors are displayed by warnings and malfunction messages Warnings point at a problem but you usually still can measure during that time Measuring is no longer possible when malfunction messages are displayed Warnings and malfunction messages are signalized by an audible alarm It s frequency is changing between 500Hz and 1200Hz every 400ms Additionally one of the following messages is displayed Malfunction Messages Malfunction messages no Displayed message Description and possible remedy of cause Display Pfeiffer Protocol E21 E128 Nominal value ofthe e Suppressor voltage affected by a short circuit anode potential is too MSV is defective high E22 E133 Suppressor voltage e Briefincrease in pressure in the mass spectrometer reference v
12. Bottom with dust filter Outlet Side Exhaust gas connection For hose g8 6 mm External backing pump connection DN 25 ISO KF Venting connection N3 Sniffing line connection for hose 6 4mm Maximum pressure at the venting 1 1 bar connection Standards and regulations Declaration of Conformity Appendix Degree of protection IP 40 Degree of contamination 2 EN 61010 2 2 Mains Connection Voltage frequency 230 V 10 50 Hz 120 V 10 60 Hz 100 V 10 50 60 Hz Protection class 1 Overvoltage category II Current lt 10 A Power consumption lt 400 VA HLT 560 lt 150 VA HLT 550 lt 300 VA HLT 570 Fuses 2 pieces 10 0 A slow blow 250 V 5x20 mm 2 3 Environmental Data PFEIFFER VACUUM 15 2 4 Measure Storage Operation Relative humidity Use Noise level 10 C 55 C 10 C 35 C max 80 up to 31 C decreasing to 50 at 35 C Only indoors altitude up to 2000 m above sea level lt 70 dB A according to IEC standard 16 Vacuum mode Operating modi Operation standby Inlet pressure Filaments Filter stages Measuring rate Display rate Alarm Acoustics Volume Threshold value Pre warning Relay output On screen displays PFEIFFER Smallest detectable leak rate 4He 3He H2 Greatest detectable leak rate 4He Hz He Measuring range Dimensional units of the display Detectable gases Response time to 63 of the signal Suction rate for helium Sucti
13. Escape PLEASE ENTER SERVICE PIN The access to the menu Service is only possible with a Service PIN Please enter the Service PIN PFEIFFER VACUUM 6 5 Calibration Vacuum Method The instrument must have warmed up for at least 20 minutes for optimum calibration Please observe the recommended test interval of the used test leak See quality test certificate Test leak In the vacuum mode the calibration of the SmartTest can be carried out with an internal or external test leak The internal calibration is only possible with mass 4 Internal test leak The calibration with the internal test leak can be carried out in two ways see also chapter 6 4 5 e Automatic internal Serves for calibration with the internal test leak without volume at test connection The test connection must have a blind flange for this e Manual internal Serves for calibration with the internal test leak with presence of volume at the test connection A stable measuring signal must be confirmed with the Signal stable softkey External test leak At test leak external see Chapter 6 4 5 the prompt appears 452A External CALIBRATION Connect and open external test leak Fig 6 65 e Is the displayed value equal to the value on the test leak rating plate Change if necessary if not see Chapter 6 4 5 e Connect the test leak e The valve of the test leak must be open e Confirm with OK
14. SmartTest by remote control if the wired version is used The remote control can be connected by a connecting cable with an RJ45 plug Fig 10 2 5 The remote control is not included in the normal scope of delivery of the SmartTest Pin Signal 2 24 V fuse 0 8 A slow blow 3 0 V DGND 0 V 4 RxD internal RS232 5 TxD internal RS232 114 PFEIFFER VACUUM RS485 The connection of the SmartTest to a computer can be made through the serial interface RS485 a Pin 1 free 2 24 V for supplying the field bus converter fuse 0 8 A slow blow free free D galvanically isolated DGND 0 V D galvanically isolated oN OO BR W free Fig 10 6 Plug RS485 8 pole See also Fig 10 2 4 PIN 1 PIN 2 PIN 3 PIN 4 PIN 5 PIN 6 PIN 7 PIN 8 free 24 V for supplying the field bus converter fuse 0 8 A slow blow free free D galvanically isolated DGND 0 V D galvanically isolated free Connector probably will not work if you do change this connector with the connector LP With the RS485 interface up to 32 instruments can be connected with each other by two lines whereby never more than one instrument may transmit at once PFEIFFER VACUUM 115 RS232 Connection for computer 9 pole D Sub sockets RS232 option RS485 Pin Signal Transmit data 2 TXD galvanically isolated RXD Receive data galvanically isolated 5 GGN
15. TC 110 E68 E140 No communication with No communication via the RS 485 between TC 110 and MC turbo pump 68 control card e Connection faulty or not plugged TC 110 wiring plane e TC 110 defective e MC 68 defective E70 E123 The offset voltage ofthe e The pre amplifier is defective H A Pee e Defective supply voltage pre amplifier E71 E25 TMP Temperature e Temperature sensor short circuit Control faulty E72 E26 TMP Temperature e Temperature sensor broken Sensor faulty 100 PFEIFFER VACUUM 7 2 Warnings Warnings no Displayed message Description and possible remedy of cause Display Pfeiffer Protocol W69 E167 TMP Fault e Unknown error code W101 W064 Real time clock reset Real time clock reset Please re enter the date and time ie enter date and Battery on MC 68 control circuit board discharged or i defective e MC 68 changed W102 W088 Please recalibrate The automatic calibration prompt is activated and one of the following conditions is fulfilled e 30 minutes have expired since switching on the leak detector e The pre amplifier temperature has changed by more than 5 C since the last calibration e The mass setting has changed e The filament has been switched over After the confirmation of this warning a warning triangle remains in the Ready to start menu which signalizes the existence of this interruption See Chapter 6 2 The warning triangle disappears as
16. acoustic signal is proportional to the bar display The frequency range is 300 Hz to 3300 Hz Trigger Alarm No tone is emitted if the leak rate is smaller than 0 min 4 5 min the warning limit A continuous tone is emitted if the leak rate is greater than the warning limit and smaller than the setpoint value A multi frequency signal is generated as soon as the leak rate exceeds the setpoint value The signal remains even when the leak rate changes An alarm delay time can be entered additionally see below Setpoint No tone is emitted if the leak rate is smaller than 0 min 4 5 min the warning limit A continuous tone is emitted if the leak rate is greater than the warning limit A tone with a frequency proportional to the leak rate is emitted as soon as the leak rate exceeds the setpoint value A continuous tone is emitted if the leak rate is greater than 100 setpoint value An alarm delay time can be entered additionally see below PFEIFFER VACUUM 61 6 4 4 4 Interfaces Option Value range Description with variable time constant Min Max Mode Pinpoint The frequency of the acoustic signal is proportional to the leak rate between 0 1 setpoint value and 10 setpoint value A constant low tone is emitted if the leak rate is lower than 0 1 setpoint value A constant high tone is emitted if the leak rate is greater than 10 setpoint value Setpoint 1E 12 9 9E 2 Alarm setpoint va
17. be adopted to the error list If a error should occur which cannot be repaired please contact your nearest Pfeiffer Vacuum service point Please make use of our service In the unlikely event of a error in your leak detector there are various ways to maintain the availability of your plant e Have the leak detector repaired on site by the PFEIFFER Service e Send the leak detector to the parent company for repair e Replace the leak detector with a new one Please contact your PFEIFFER representative for details 73 Changing Mains Fuses Danger Caution Mains voltage Incorrectly fused products may be fatal Only use fuses with the values specified above 1 Switch off the instrument and disconnect from the mains 2 Pull out the mains plug PFEIFFER VACUUM 105 106 PFEIFFER 3 Lever open and lift the cover of the fuse holder Fig 7 93 Change the mains fuses 1 4 Remove both fuse holders and replace defective fuses 10 0 A slow blow 250 V 5 x 20 mm Fig 7 94 5 Snap the fuse holder back together 6 Close the cover 7 Reconnect the power cable VACUUM 8 Disposal Contaminated components Caution Contaminated parts Contaminated parts can cause damage to health and the environment Find out about possible contamination before starting work Observe the pertinent regulations and safety precautions when handling c
18. fixed time constant without No leak rate filter Zero locked Manual background suppression locked released Manual background suppression released with START When the sensitive and released measuring range min sec is reached ZERO is executed immediately after 2s 5min the specified time constant Subtracts a zero value saved once by pressing the Zero key from the raw signal The automatic background suppression is locked The zero value is retained after pressing the Stop key Pressing the Zero key again overwrites the zero value The zero value is set to 0 at Power Off deactivation of the zero function by pressing the zero button more than 3 s or changing the zero function PFEIFFER VACUUM 59 MS BG on The internal mass spectrometer background is subtraction subtracted at START Not The internal background is generated by residual a n gas e g Helium that has not been pumped away a yet Sources for residual gas are air or absorbed eons gases from the inner surfaces of the leak detector This internal background will never disappear totally Very clean systems which have been pumped for a long time will show a background in the 10 11 mbar l s range Under normal conditions the background level is in the 10 10 mbar I s or low 10 9 mbar l s range When pressing START the current internal background is subtracted from all further measured signals automatically Thus it is made sure that only the net le
19. of the Access Control setting in the display PFEIFFER VACUUM 51 6 4 2 1 Change Menu PIN 52 PFEIFFER Select Setup gt Access Control gt Change Menu PIN Confines allows to access the software menu Exception The menu Information is always available See Chapter 6 4 6 Access to the menu can be restricted by entering or changing the personal identification number PIN When you leave the menu the access will be restricted after 2 minutes automatically The PIN is not checked if it is set to 0000 Remember the PIN you have entered well When you have entered a wrong PIN the message Wrong PIN will appear If you forget your PIN please contact Pfeiffer Vacuum Escape Back CHANGE MENU PIN New 68 Wd 8600 _ N iverify 6660 means Save No PIN check Fig 6 23 Option Value range Description Min Max New PIN 0000 9999 New menu PIN New PIN verify 0000 9999 New menu PIN repeat for confirmation VACUUM 6 4 2 2 Change Device PIN Select Setup gt Access Control gt Change Device PIN Confines allows to use the leak detector Access to the leak detector can be restricted by entering or changing the personal identification number PIN If the instrument PIN is not 0000 the leak detector asks for the PIN immediately after being switched on The leak detector cannot be used without entering the correct number Remember the PIN you have entere
20. of the guarantee The leak detector must not directly be switched off after the process in which condensable gases or steams are pumped is finished It must be running at least 20 minutes with opened gas ballast valve until the oil of the pump is freed from detached steams If this instruction is not respected the pump can be damaged by corrosion effects The oil level of the pump has to be controlled regularly The normal intervals of changing the oil from the producer have to be taken care of See instructions of the rotary vane pump The vacuum pump vacuum system and sealings may be damaged Do not generate overpressure with the SmartTest Do only use the SmartTest for leak detection The SmartTest may be damaged by misapplying it as step tread Do not use the SmartTest as step tread The SmartTest may be damaged by misapplying it as seat Do not use the SmartTest as seat The coating of the filament in the ion source may be damaged A burnout of the filament is possible Do not pump down those gases with the SmartTest which contain halogen molecules e g flour chlorine Such gases are e g SF6 oo PFEIFFER VACUUM Caution Danger of injury Although this instrument is distinguished by high standards of quality and safety and has been built and tested according to the latest state of the art injury or material damages cannot be totally ruled out
21. pfeiffer vacuum net VACUUM
22. when SmartTest measures i e in the state counter measure flow Twin FlowTM low and Twin FlowTM high 17 Leak Active when the alarm threshold is enabled and was exceeded passive below 90 of this value 18 Error Active in error state 19 Calibrate Active when SmartTest waits for confirmation during Acknowledge calibration internal calibration transfer factors external calibration test leak opend and signal stable test leak closed and signal stable transfer factors 21 Bypass Valve Active when bypass valve is open activation bypass option 23 DGND 0 V Reference potential of the digital outputs not galvanically isolated 22 No leak Active when the alarm threshold is under run 25 24 V 24 V e g for activating the digital inputs Fuse 0 8 A slow blow PFEIFFER VACUUM 113 Example of digital inputs 5 6 l Serdo i 7 Vent Oaa si Zi ace eal 9 Calibrate i 01 PARA2 iit Feedback baypass option 12 Reserve 13 Reserve 14 GND Input li i i i 24 V i Outputs 151 Ready to start i 0V 16 Ready to measure 171 Leak 18 i Error 5 Calibration acknowledge J o Reserve I i p Bypass valve i I tt i 310V 9 R Fig 10 5 Example of digital inputs When accessing via 24V of the leak detector a connection between PIN14 and PIN23 has to exist Remote control The remote control interface is designed as a serial interface for controlling the
23. 124 W072 Signal difference e Internal test leak defective Derweee opened and ls The external test leak valve is defective or not closed closed calibrated leak too small e The external test leak value is too small W125 W073 Calibration factor too The calculated calibration factor is outside the permissible low range lt 0 1 The old factor is retained e The test leak is defective e The entered leak rate value for the test leak is much too small e The conditions necessary for calibration have not been satisfied 102 PFEIFFER VACUUM Warnings no Displayed message Description and possible remedy of cause Display Pfeiffer Protocol W126 W074 Calibration factor too The calculated calibration factor is outside the permissible high range gt 100 The old factor is retained e The test leak is defective or empty e The entered test leak value for the test leak is too great e Mass spectrometer soiled and insensitive e The conditions necessary for calibration have not been satisfied W130 W060 Preamplifier e The ambient temperature is too low 2 1E Too IOW The temperature sensor in the pre amplifier is defective e Cable pre amplifier is defective After the confirmation of this warning a warning triangle remains in the Ready to start menu which signalizes the existence of this interruption See Chapter 6 2 The warning triangle disappears as recently as this interruption will be cor
24. 2 opens Relay 2 and drops when valve V2 closes gt Fig 3 2 Stop Relay activates when valve V6 opens and drops when valve V6 closes gt Fig 3 2 START STOP Relay activates at START and drops out at STOP Ready Relay activates when measuring Setpoint Relay activates when the leak rate exceeds the setpoint value and drops out when it falls 10 below the threshold value gt chapter 6 4 4 3 On 1 Relay always activated Warning limit LR Relay activates when the leak rate exceeds the warning limit gt chapter 6 4 4 3 Pressure setpoint Relay pulls up when the pressure in the external gauge head is greater than its setpoint gt chapter 6 4 4 4 2 1 The settings off and on are very suitable for checking the external relay switching Connections gt see appendix PFEIFFER VACUUM 67 6 4 4 4 5 Serial Port Select Setup gt User Settings Interfaces gt Serial Port Escape SERIAL PORT Port BA Protocol Pfei 96 Address 1 ry iffer 66Baud gt Back Save Fig 6 37 Serial port Option Value range Description Min Max Interface RS232 RS485 Selection whether the RS232 or the RS485 is to be used HLT2xx The interface protocol of the Protocol HLT2xx This protocol should only be used in applications in which the HLT5xx replaces a HLT2xx This protocol only covers part of the functional scope of the HLT2xx so that no full compatibility b
25. 26 Save Fig 6 19 View of the Display Range setting in the display PFEIFFER VACUUM 49 Option Value range Description Min Max Scaling linear Display linear log Display logarithmic 2 9 Number of decades in log display dec Range automatic automatic range selection manual manual range selection Time axis 16 960 Time axis time scale in seconds 6 4 1 5 Lower Display Limit Select Setup gt View gt Display Limit Escape LOWER DISPLAY LIMIT 1 040542 j to Back Save Fig 6 20 View of the Lower display limit setting in the display Option Value range Min Max Description Lower display limit for unit mbar l s 1E 12 mbar l s 1E 11 mbar l s 1E 10 mbar l s 1E 9 mbar l s This setting limits the display of the leak rate downwards in measuring mode It is only effective for the vacuum mode 50 PFEIFFER VACUUM 6 4 1 6 Background at Ready to Start Select Setup gt View gt Background at Ready to Start E gt a lt z BACKGROUND AT READY TO START Yes Yes No E gt M lt 3 Fig 6 21 View of the Ready to start setting in the display 6 4 2 Access Control Select Setup gt Access Control Escape ACCESS CONTROL Maintenance Change enabled device PIN Access to Change CAL function Menu PIN Fig 6 22 View
26. D Reference potential galvanically isolated Fig 10 7 RS232 interface See RS232 Fig 10 2 3 Relay 1 Relay 2 Relay contact 230 V 3 A Plug SmartTest Power Subcon 3 pole Fig 10 8 See Fig 10 2 6 or Fig 10 2 7 LP Connection for sniffing probe LP 503 LP 505 LP 510 RJ 45 8 pole Pin Signal zero Be aware that you do not change this connector with the connector RS485 LED red LED green 24 V 8 1 fuse 0 8 A slow blow oO oO BR W Fig 10 9 LED green Leak detector ready for measurement LED red Threshold exceeded See Fig 10 2 8 116 PFEIFFER VACUUM C List of Default Values Parameter Default Values Setting back Included in to VORGABE set of WERT when parameters loading default values contrast 50 no no invert display off yes yes leak rate unit mbar l s yes yes pressure unit mbar yes yes scaling log yes yes decades at scaling log 4 yes yes display unit automatic yes yes time axis 32 Seconds yes yes lower display limit 1E 12mbar l s yes yes background in ready to start on yes yes menu PIN 0 yes no instrument PIN 0 yes no calibration enabled on yes yes language English yes no mode Vacuum yes yes mass Masse 4 yes yes leak rate factor Gas yes no leak rate filter dynamic yes yes zero enabled yes yes time for start after zero 10 Seconds ye
27. DIN EN ISO 12100 2 Asslar 16 of April 2010 fog ene Manfred Bender Managing Director Dr Matthias Wiemer Managing Director PFEIFFER VACUUM 121 122 PFEIFFER VACUUM PFEIFFER VACUUM 123 A PASSION FOR PERFECTION You are looking for a perfect vacuum solution Please contact us Germany Pfeiffer Vacuum GmbH Headquarters Tel 49 0 6441 802 0 info pfeiffer vacuum de Benelux Pfeiffer Vacuum GmbH Sales amp Service Benelux Tel 800 pfeiffer benelux pfeiffer vacuum de China Pfeiffer Vacuum Shanghai Co Ltd Tel 86 21 3393 3940 info pfeiffer vacuum cn France Pfeiffer Vacuum France SAS Tel 33 169 30 92 82 info pfeiffer vacuum fr Great Britain Pfeiffer Vacuum Ltd Tel 44 1908 500600 sales pfeiffer vacuum co uk India Pfeiffer Vacuum India Ltd Tel 91 40 2775 0014 pfeiffer vsnl net Italy Pfeiffer Vacuum Italia S p A Tel 39 02 93 99 05 1 contact pfeiffer vacuum it Korea Pfeiffer Vacuum Korea Ltd Tel 82 31 266 0741 sales pfeiffer vacuum co kr wr Austria Pfeiffer Vacuum Austria GmbH Tel 43 1 894 17 04 office pfeiffer vacuum at Sweden Pfeiffer Vacuum Scandinavia AB Tel 46 8 590 748 10 sales pfeiffer vacuum se Switzerland Pfeiffer Vacuum Schweiz AG Tel 41 44 444 22 55 info pfeiffer vacuum ch United States Pfeiffer Vacuum Inc Tel 1 603 578 6500 contact pfeiffer vacuum com www
28. EEPROM and new initialized Please check software version number determined ings your settings e A software update has been performed and one or more new parameters determined The message can be acknowledged in this case The parameter s is are automatically initialized W151 W084 No bypass valve e Connection partial current valve removed connecta e Partial current valve selected in the menu but not connected W152 W085 No external pressure No external pressure sensor has been detected sensor connected e Ext gauge head selected in the menu but not connected or cable broken e Ext pressure sensor defective Rated resistance not detected 104 PFEIFFER VACUUM Warnings no Display Pfeiffer Protocol Displayed message Description and possible remedy of cause W160 W086 Leak rate too high Switched to Stand By to prevent contamination The monitor function Contamination protection is activated and a leak rate above the set limit value has been detected e Serious leak e Switch off limit value too low e Alarm delay set too short W161 W087 Maximum evacuation time exceeded Within the set evacuation time the measure mode has not been reached e Evacuation time is adapted incorrectly to the sample volume e Sample has a serious leak e Pressure set point are wrong selected By pressing OK you affirm a warning or a malfunction message which then will
29. FER VACUUM Maintenance personnel The maintenance personnel may operate the SmartTest leak detector in normal operation and perform maintenance work necessary for trouble free operation of the instrument In order to be authorised to maintain the SmartTest leak detector the person concerned must have taken part in an initial training conducted by a Pfeiffer Vacuum employee or an experienced member of staff of the system user See Maintenance Instructions IG 0108 BEN for further information Service personnel The service personnel may operate the SmartTest leak detector in normal operation and perform maintenance and service work The SmartTest leak detector may be serviced only by trained Pfeiffer Vacuum staff or trained employees of the system user with a similar qualification Training as a master electrician or a similar professional training is necessary in order to work on the electrical components See Maintenance Instructions IG 0108 BEN for further information 1 2 4 General Safety Rules Legal regulations Probable risk The generally applicable legal and otherwise binding regulations for the prevention of accidents and protection of the environment must be observed in addition to this document Such regulations may also extend to the handling of hazardous substances or provision wearing of personal safety equipment etc for example On suspicion that safe operation is no longer possible the instrume
30. Flow 80 is defective e Drive electronics TC 110 is defective E42 E148 Emission Off p1 too e Airin rush high e Valve V1 leaking 98 PFEIFFER VACUUM Malfunction messages Displayed message Description and possible remedy of cause no Display Pfeiffer Protocol E 43 E 149 Emission Off p2 too The emission is switched off during normal operation of the high leak detector when e inCF P2 gt pressure limit CF 5 mbar or e in TFL P2 gt pressure limit TFL 1 mbar or e in TFH P2 gt pressure limit TFH 0 1 mbar E49 E166 Output voltage ofthe e Sensor of the pressure measuring point defective ee e Electronics pressure measuring point defective E50 E160 Output voltage of the e Check cable to ext gauge ale pressure gauge e Sensor of the pressure measuring point ground connection e Electronics pressure measuring point defective E51 E161 Identifying resistor of The rated resistance of the ext pressure measuring point external pressure gauge too low fog law e Check cable to ext gauge e Wrong ext pressure measuring point used e Electronic pressure measuring point defective e Input short circuited E52 E162 Inlet pressure p2 too The output voltage of the pressure measuring point P2 is low too low e Cable to Pirani sensor broken e Pirani sensor defective e Sensor electronics I O card defective E54 E163 Foreline pressure p1 too The output voltage of the pressure measuring point P1 is low
31. OP button of the operating unit to start the measurement The test item will be evacuated and the pressure displayed during the pumping process After achieving the pressure for the measurement the measured value display appears chapter 6 3 2 and starting with an appropriate background signal lt 1E 09 mbarl s the test item can be charged with helium The leak rate of the test item will be shown in the display Press the START STOP button again to stop the measurement The SmartTest goes back into Ready to Start the test item will be vented and can be removed from the inlet port 6 3 1 2 Sniffing mode Seal the inlet port with a blank flange and connect the optional sniffing probe LP 5xx See chapter 5 3 1 Press the START STOP button of the operating unit to start the measurement The leak rate in the now shown measured value display should adjust to lt 5E 06 mbarl s helium fraction of the air The helium charged test item can now be leak checked with the sniffing probe The appropriate leak rate of the test item will be shown in the display Press the START STOP button again to stop the measurement The SmartTest goes back into Ready to Start and the test item will be vented PFEIFFER VACUUM 43 E 3 PUMPING DOWN 1686 om z Inlet Pressure Pa 166 i ee 16 L3 K ca K3 Fig 6 11 Pump fore vacuum The pressure during the pump down process is displayed 6 3 2 Measured Value Displ
32. aad COMPLETED Old New Anode Potential gt 469 469 Twin flow low CF 1 6 1 8 Savey Fig 6 88 The usual value calibration factor CF for He is 0 1 10 If you e accept the result press Save to save the new calibration values e do not accept the result press Escape to keep the old values If the usual values cannot be achieved despite several attempts please contact your nearest Pfeiffer Vacuum service point PFEIFFER VACUUM 6 7 Measuring the Internal Test Leak This function is only available in the vacuum mode with mass 4 After running up the instrument the display changes to Ready to start Setu READY TO START Mode VACUUM 4He CF 1 2 27 Jan 10 Filter dynamic Signal 7 4 l1 19mbar l s Check internal Regeneration test leak Mode Calibration VYacuum Sni ff Fig 6 89 Ready to start Softkey Test internal leak leads to sub menu qEscare MEASURING OF THE INTERNAL LEAK Test Port blanked off Yes Fig 6 90 The test connection must have a blank flange Confirm with Yes qEscare MEASURING OF THE INTERNAL LEAK Start with START STOP Fig 6 91 Activating the Start key leads to evacuation and starting of the test leak measurement PFEIFFER VACUUM 95 96 PFEIFFER Escape MEASURING OF THE INTERNAL LEAK TL Wert 8 6 lI mbarl s SOs fix a Fig 6
33. ak rate from the part under test is measured When switched to START STOP mode again a new internal background is calculated after 25 s off The internal mass spectrometer background MS BG is not subtracted at START See description on Zero constant function The automatic background suppression is not active The zero value is retained after pressing the Stop key This may mean that some leaks may not be detected An active suppression of the underground will be displayed Fig 6 12 Fig 6 13 in the status line as follows ZERO appears after pressing the zero button shortly in the zero option released or with start ZERO START appears after the provided time has passed in the zero option with start ZERO CONSTANT appears after pressing the zero button shortly in the zero option constant For further information on Zero constant function see Chapter 3 5 PFEIFFER VACUUM 6 4 4 3 Alarm Select Setup gt User Settings gt Alarm Escape ALARM Mode rioger alarm Ky minis KO SetPoint 1 6E 84 a value mbar 1 s Warning 166 x limit The hearing can be harmed by the audio alarm The acoustic output can exceed a level of 85dB A Do only expose to the audio alarm for a short time or use ear protection Option Value range Description with variable time constant Min Max Mode Prop leak rate The frequency of the
34. alibration Starts the following operation Calibrate start stop Vent start stop Vent start stop Vent start stop Vent start stop Calibrate start stop etc Start without calibration Starts the following operation Vent start stop etc PFEIFFER VACUUM 85 6 4 7 3 Maintenance Interval Components Select Setup gt Maintenance amp Service gt Maintenance Components Escape Back MAINTENANCE COMPONENTS Fore 47 h PUMP TMP 8 47 h Ion 47 h Save source Fig 6 62 Maintenance components Under maintenance components the current operating hours of the components fore pump turbo pump and ion source are shown since the last maintenance was accomplished After each maintenance the counter can be reset This leads to a new entry in the list of maintenance intervals 6 4 7 4 Maintenance List 86 PFEIFFER Select Setup gt Maintenance amp Service gt Maintenance List Escape MAINTENANCE LIST Back ComPonent OF hour 9 Ion source 226 226 9 Fore Pume 226 o gt D Fig 6 63 Maintenance list Date and time of the maintenance are shown under show list of maintenance intervals So are the operating hours of the components This data are collected from one maintenance to the next VACUUM 6 4 7 5 Service Select Setup gt Maintenance amp Service gt Service Back oO OK Fig 6 64 Access with service PIN
35. alue too Val PARIE high high alve contaminations cause high mass spectrometer i pressure e The anode voltage is short circuited e The nominal value for the anode voltage is too high The anode voltage is limited to 1 200 V E24 E125 24V voltage at MSV e Fuse F1 on the MSV card is blown i peat die tog law MSV card defective e 24V supply voltage from main power supply unit too heavily stressed or faulty E25 E134 Filament current is too e MSV card defective high E26 E135 Filament current is too e MSV card defective owl e Defective ion source connector or cable E27 E145 Emission fail e Airin rush e Valves contaminated e Failure of a filament during measurement E28 E138 Emission for both e Both filaments defective Replace ion source filaments can not be ee i Defective ion source connector switched on e MSV card defective E29 E131 The anode potential e MSV is defective exceeds its nominal value by over 10 Me oedatgetva E30 E132 The anode potential has e Brief increase in pressure in the mass spectrometer grappen Braw nE e MSV is defective nominal value by over 10 e MC 68 defective PFEIFFER VACUUM Malfunction messages no Displayed message Description and possible remedy of cause Display Pfeiffer Protocol E31 E126 Anode cathode voltage Anode cathode voltage is greater than U gt 130 V iscoonigil e MSV is defective E32 E127 Anode cathode voltage Ano
36. ay 44 On reaching the measuring pressure the measured value display appears with the display type last used e analog digital with bar display and large numbers or e graphically as a function of the measuring time or e You can switch between analog digital display and the graphic display with the softkey Bottom right This alternately bears the analog display or graphic display symbol Analog digital display PFEIFFER VAC THIN FLOW HIGH 4 gt _ of 7 CJ 8710 E3 o ro pa 1 1 ll 2 mbar 107 a ee te Fig 6 12 Analogue Display Digital Display VACUUM Graphic display VAC TWIN FLOW HIGH New _ an fa 8 81078 etme io reat 9 28 Hs 645 Fig 6 13 Graphic display manual scaling You can restart the graph with the softkey New With the softkey Print the leak rate date and time are send to a printer that is connected with the serial port The interface protocol Printer must be selected see 6 4 4 4 5 6 3 3 Display Range Settings You can select the measuring range with the keys and Only appears if the Range manual See Chapter 6 4 1 4 option has been selected in the Display range menu In case of automatic range selection in the Display range menu the measuring range is adapted to the measuring result by selecting the Range automatic option so that this is always in the display range See Chapter 6 4 1 4
37. ay Range Settings Volume Setup View Contrast Units Time amp Date Display Range Lower Display Limit Background at Ready to Start Access Control Change Menu PIN Change Device PIN Calibration Enabled Maintenance enabled Language User Settings Mode amp Mass Filter amp Zero Alarm Interfaces Analog Output Compact Gauge Control Location Relay Serial Port Bypass Option Parameter save load Load PARA Set 1 2 Load Factory Settings Save PARA Set 1 2 Monitoring functions Flow Contamination Protection Volume amp Beep Valves Evacuation Time amp Vent Calibration Request Calibration Settings Information Settings System Data Vacuum System Error List Calibration History Paging function remote control RC 500 WL Maintenance and Service Maintenance device Burn In Maintenance Interval Components 6 4 7 4 Maintenance List 6 4 7 5 Service 6 5 Calibration Vacuum Method 6 6 Calibration Sniffing Method 6 7 Measuring the Internal Test Leak 7 Errors 7 1 Malfunction Messages 7 2 Warnings 7 3 Changing Mains Fuses 8 Disposal 9 Accessories and Consumer Materials Appendix A Remote Control RC 500 WL B Interfaces C List of Default Values D Pirani Characteristic E List of literature F Declaration of Contamination G Declaration of Conformity PFEIFFER VACUUM 97 97 101 105 107 108 110 110 111 117 119 120 120 121 PFEIFFER VACUUM Safety
38. calibration but not the calibration itself are made Escape CALIBRATION SETTINGS VAC gt Unit mbar l s Cintern gt mbar 1 s OR leak value 07 Calibration int auto mode Fig 6 51 Calibration settings Option Value range Description Min Max Unit e g mbar l s The unit for the test leak value For internal test leak fixed at mbar l s Test leak value Test leak value in selected unit Depending internal on the selected calibration mode this is external either an external or an internal test leak Calibration int auto Internal automatic calibration mode mode int man Internal manual calibration mode i e the signal stability must be confirmed manually external External calibration mode PFEIFFER VACUUM 79 6 4 6 Information 6 4 6 1 Settings Select Setup gt Information Escape Back INFORMATION Error list Settings System data Calibration history Paging function Vacuum diagram Fig 6 52 Information menu 80 PFEIFFER Select Setup gt Info gt Settings Escape SETTINGS fi ft Back SetPoint value Warning limit Volume Minimum volume Internal test leak Ext test leak VAC ak test leak SNIFF 6 mbar l s Ca Fig 6 53 Settings menu VACUUM 6 4 6 2 System Data Select Setup gt Info gt System Data Escape Rotation sree
39. compliance with the Technical Data The mains switch is on the back of the housing Switch on the instrument The instrument can be switched off at any time and in any state The current settings will be saved Fig 6 1 1 Mains switch Serves to switch the instrument on and off Caution Abrupt movements Abrupt movements can damage the running turbo pump Avoid abrupt movement and vibration of the instrument e g running over cables door sills during operation and up to 4 minutes after switching off since the turbo pump can be damaged PFEIFFER VACUUM 35 36 The instrument designation is displayed after switching on the instrument runs a self test ry PFEIFFER J VACUUM o L3 Smartest K2 oa Welcome OD Fig 6 2 Display SmartTest After the self test the message Pfeiffer Vacuum SmartTest is displayed For the most accurate measurements or for calibration the SmartTest should be allowed to warm up for at least 30 minutes The run up of the turbo pump starts This lasts 2 3 minutes and is visualized by the bar display Details Setu RUNNING UFP k Time until ready to start ax 166 SPrache Language Idioma Fig 6 3 Run up Setup parameters Language When the Setup softkey is pressed the Setup menu appears which allows you to set the operating parameters See page 6 4 PFEIFFER See Chapter
40. ctor Factor Leak rate is converted with user 1E 6 1E 6 defined factor Gas Leak rate gas equivalent Air Leak rate air equivalent 1 Connect sniffing line before pressing START Leak rate factor converts the measured leak rate He He or H3 into e an equivalent leak rate of another gas or e into an equivalent leak rate 4He 3He or H2 under different flow conditions to those of the molecular flow Under molecular flow conditions the leak rate only depends on the mass of gas PFEIFFER VACUUM 57 58 Example PFEIFFER We measure the test gas helium 4 and want to display the leak rate for air a MassHe_ ee Uap LRiye ieee LRHe x E LRHe x 0 372 With leak rate factor air the leak rate is converted according to the equation with the mass of the test gas 4 3 or 2 to an equivalent leak rate for air under molecular conditions Other gases Factors for other gases e g R134a are obtainable from Pfeiffer Vacuum VACUUM 6 4 4 2 Filter amp Zero Select Setup gt User settings gt Filter amp Zero Escape FILTER amp ZERO dynamic ii bg mines On Filter Zero MS BG subtraction Fig 6 30 View of the Filter amp Zero setting in the display Option Value range Description with variable time constant Min Max Filter dynamic Leak rate filter with dynamic adaptation of the time constant static Leak rate filter with
41. d well When you have entered a wrong PIN the message Wrong PIN will appear If you forget your PIN please contact Pfeiffer Vacuum Escape Back CHANGE DEVICE PIN New 68 Wd 8606 pa N verify 6666 means Save No PIN check Fig 6 24 View of the Change instrument PIN setting in the display Option Value range Description Min Max New PIN 0000 9999 New instrument PIN New PIN verify 0000 9999 New instrument PIN repeat for confirmation PFEIFFER VACUUM 53 6 4 2 3 Calibration Enabled 54 PFEIFFER Select Setup gt Access Control gt Calibration Enabled Authorizes for calibration of the leak detector E gt ee lt z CALIERATION ENABLED Yes Yes No E gt Mu lt 7 Fig 6 25 View of the Enable calibration setting in the display Option Value range Description Min Max Enable calibration Yes The calibration can be started from the Ready to start menu No Calibration cannot be started from the instrument operating unit VACUUM 6 4 2 4 Maintenance enabled Select Setup gt Access Control gt maintenance enabled Enables the user to use the maintenance menu and the venting of the TMP for changing the lubricant E gt So oh lt z MAINTENANCE ENABLED Yes Save Fig 6 26 Maintenance enabled Maintenance Yes The menu page Maintenance amp Serv
42. de cathode voltage is less than U lt 30 V i too lowi e Fuse F4 MSV card defective e MSV is defective E33 E129 Suppressor potential Suppressor potential is greater than 363V tas iigm e MSV is defective E34 E130 Suppressor potential Suppressor potential is less than U lt 297 V meio e Short circuit in the suppressor line e MSV is defective e High ohmic short circuit in the ion catcher E35 E159 24V of the OPTION The voltage 24 V for the external outputs I O RS 485 Gauge socket is too high Head is too high U gt 30 V e Check the external feed of the 24 V outputs e Power supply unit defective E36 E120 24V of the OPTION The voltage 24 V for the external outputs I O RS 485 Gauge socket is too low Head is too low U lt 20 V e Fuse F1 on I O card defective e Power supply unit defective E37 E122 24V of the remote The voltage 24 V for the external outputs RC fan 1 2 are too control is too low lt 20V low U lt 20 V e Fuse F2 on I O card defective e Power supply unit defective E39 E044 Temperature at e The ambient temperature is too high e poranio unii itga e Unfavourable position of leak detector heat build high gt 60 C tip e Fan failed e Air filter too heavily contaminated e Temperature sensor defective E41 E141 TMP frequency istoo The nominal speed 1450 Hz of the turbo molecular pump low SplitFlow 80 was not reached within 5 min e Fore pressure of the SplitFlow 80 is too high e Turbo molecular pump Split
43. decoupling of the mechanical pumps in the SmartTest vibrations of the instruments can never be ruled out totally To avoid humming vibration of the instrument on a base with a similar resonance frequency a firm stable base should be chosen which only exhibits a slight tendency to vibrate The leak detector is delivered in a special packing ready for operation The packing must be checked for damage before unpacking If damage to the packing or the instrument itself is visible please file a damage report with the shipping agent responsible immediately We recommend you to keep the special packing This original packing offers the best protection for transport over a great distance or for returning the leak detector for servicing 5 1 2 Carrying Transport 30 Only applies for type HLT560 The pump with oil filling may be tilted by a maximum of 90 In operation by a maximum 10 Danger Caution Heavy product When carrying heavy items your back can be injured or other injuries can occur when the item slips out of your hands Two people should carry the product PFEIFFER VACUUM There are recesses for the hands on both sides for carrying and transporting the SmartTest see Fig 5 1 pFEIFFER Fig 5 1 Position to held the SmartTest The centre of gravity is towards the rear of the unit therefore it must be held near the back 5 1 3 Transport Lock If your Smar
44. e amp venting menu see Chapter 6 4 4 6 5 venting has been set to manual In case of pending warning message a warning triangle appears at the position of softkey Check internal test leak in order to signalise the existent warning The function enables to consider the previous acknowledged warning message again PFEIFFER VACUUM 39 6 2 1 Regeneration Select Setup gt Regeneration The Regeneration is an automated Start Stop cycle intended for the reduction of a raised helium background This function can only be successful activated in the setting Venting with Stop You can deactivate the Regeneration in general with the STOP key or with STOP in the Regeneration menu An active Regeneration will be announced in the display The regeneration stops after 60 minutes automatically Escape Back REGENERATION Terminate Function with STOP key E gt mm lt z Fig 6 9 With Start you start the following action Start Stop with venting Start Stop with venting and so on 6 2 2 Check internal test leak 6 2 3 Setup Select Ready to Start Check internal test leak This option commences the measuring of the internal test leak See chapter 6 7 The function is only available in vacuum mode with mass 4 40 PFEIFFER Select Ready to Start gt Setup This option leads to the Setup menu See chapter 6 4 VACUUM 6 2 4 Calibration This function is only
45. e display PFEIFFER VACUUM 25 26 Falling background Fig 3 4 Falling background Item Description 1 raw signal 2 saved value 3 displayed leak rate If the raw signal falls below the saved background value this is automatically set equal to the raw signal e g at time t1 As soon as the raw signal rises again e g at time t2 the saved background value remains constant Signal increases are displayed clearly as a leak This greatly simplifies measurement of the smallest leak rates Absolute measurement PFEIFFER If you want to see the raw signal including background press the ZERO key for about 3 s The saved value is set to zero e g at time t3 the background signal is no longer suppressed Item Description 1 displayed leak rate 2 raw signal VACUUM t3 t Fig 3 5 Absolute measurement Zero constant function Fig 3 6 Zero constant function Item Description 1 raw signal 2 saved value 3 displayed leak rate By pressing the ZERO key the momentary raw signal e g at time t1 t2 t5 is saved as a background value and is then subtracted from the following measured values raw signals The status message Zero appears in the measured value display PFEIFFER VACUUM 28 PFEIFFER The automatic background suppression is locked The zero value is retained after pressing the Stop key Pressing the Zero key again overwrites the zero
46. e signal tower to connection 1 Input Output See also Operating Instructions 5 3 5 Exhaust pipe Caution Exhaust gases and fumes Exhaust gases and fumes from oil sealed pumps may be harmful to health For operation in poorly ventilated rooms an exhaust pipe should be connected to exhaust connection 5 depending on the application and gases used In the HLT 560 oil fumes may occur after prolonged pumping against a high pressure caused by the oil sealed pump used 5 3 6 Venting Line For venting the samples with a certain gas e g argon or dry nitrogen this can be connected to connection 4 The excess pressure at the venting connection may not exceed 0 1 bar 5 4 Mains Connection Mains voltage Improperly earthed products may be dangerous to life in the event of a malfunction Only a 3 pole power cable with a properly connected protective earth may be used Only plug the mains plug into a shockproof socket The protective effect may not be cancelled out by an extension cable without an earthed conductor PFEIFFER VACUUM 33 34 PFEIFFER Connection data Before connecting make sure that the operating voltage of the instrument matches the local mains voltage You will find the specifications on the rating plate on the back of the instrument VACUUM 6 Operation 6 1 Switching On and Off Check the correct installation of all cables and accessories and
47. e with Save or e Go back one level with Back or to the measured value or ready to start display with Escape Option Value range Description Min Max Contrast 0 99 Display contrast Invert display Switchover display to representation PFEIFFER VACUUM 47 6 4 1 2 Units Select Setup gt View gt Units Escape Back Leak Tila Pressure mbar E gt M lt J Fig 6 17 View of the Units setting in the display Option Value range Description Min Max Leak rate mbar I s Pa m3 s Torr l s sccm SCCS atm cc s ppm only selectable in Sniffing mode g a only selectable in Sniffing mode oz yr only selectable in Sniffing mode Pressure mbar Pa atm Torr 48 PFEIFFER VACUUM 6 4 1 3 Time amp Date Select Setup gt View gt Time amp Date Escape Back TIME amp DATE E gt M lt J Fig 6 18 View of the Time amp Date setting in the display Option Value range Description Min Max e g 25th Jan 2011 Date Days 1 31 Month Jan Dec Year 1998 2097 Time e g 15 12 Time Minutes 00 59 Hours 00 23 6 4 1 4 Display Range Select Setup gt View gt Display Range Escape Back DISPLAY RANGE Scale mLosarithmic Ky ecades Ko Range automatic Time axis 3
48. eak it evacuation time infinitely cannot be pumped down as quickly as if it had no leak The maximum evacuation time defines the time which allows the sample to be pumped down to a pressure of 15 mbar If this time is exceeded the pump down process stops and an appropriate error message is displayed Venting manual Inlet can be vented in Ready to start mode by pressing the Vent softkey with Stop The inlet is vented automatically after STOP disabled Venting of the inlet is locked in the Ready to start mode Regeneration Start Stop cycle with short range Intended for the reduction of a raised helium background With Venting no or Venting manual the unintentional venting of vacuum equipment connected to the test connection is prevented In the case of the option Venting no is the venting operation only available via a modification of the adjustment in menu Evacuation Time amp Vent In the case of the option Venting manual is the venting operation possible in the menu Ready to Start see Chapter 6 1 with the Vent softkey VACUUM Regeneration Select Setup gt User Settings gt Monitoring Functions gt Evacuation Time amp Vent gt Regeneration The Regeneration is an automated Start Stop cycle intended for the reduction of a raised helium background This function can only be successful activated in the setting
49. ed specially for industrial applications and are used e For quality control in manufacturing processes e for quality control of production plants e asa service unit Use for the intended purpose also includes e Use of standard and original accessories e observance of this document and compliance with the instructions and regulations therein Danger Risk of injury due to toxic flammable and corrosive gases Harmful substances which are pumped down with the SmartTest Vacuum Mode Sniffer Mode emit through the exhaust and injure people in the surrounding area Do not sniff and pump down harmful substances Danger Risk of injury due to gliding off and falling Do not climb on the SmartTest Danger The SmartTest may tip off its base and injure people Place the SmartTest on a stable base Danger Risk of injury due to sucking connection flange If the Vacuum Mode of the SmartTest is activated the connection flange may suck bodily parts around the connection flange Keep bodily parts off the connection flange VACUUM The Helium Leak Detector SmartTest may not be operated in standing or under flowing or dripping water The same applies for all other kinds of liquids Avoid contact of the SmartTest with bases acids and solvents as well as extreme climatic conditions No corrosive process gases may be pumped with the SmartTest Failure to observe this will lead to voiding
50. ervice or repair must be free of harmful substances e g radioactive toxic caustic or microbiological Forwarding contaminated products Adhere to the forwarding regulations of all involved countries and forwarder companies Enclose a completed Declaration of Contamination Declare all dangers on the package Products which are not clearly declared as free from potentially harmful substances will be decontaminated at the expense of the customer VACUUM A completed and signed Contamination Declaration see www pfeiffer vacuum net and appendix Declaration of Contamination must be enclosed with every product sent in for repair Spare parts Only original spare parts may be used for repairs See maintenance Instructions IG 0108 BEN PFEIFFER VACUUM 13 1 3 Scope of Delivery The scope of delivery includes the following parts e Basic device HLT 5xx e Power Subcon relay plug e Cap for Power Subcon relay plug e Connecting plug Ventilation sniffer connection e Filter mat fan 500 um e Power cable e Set of hexagonal wrenches e Set of fuses e Documentation 14 PFEIFFER VACUUM 2 Technical Data Temperature 2 1 General Dimensions 550x460x304 mm LxWxH Weight 44 kg HLT 560 HLT 570 34 kg HLT 550 approx 150 kg HLT 565 572 575 with carriage and pump Max permissible acceleration 1 G horizontal in operation Test connection DN 25 ISO KF Cooling air Inlet
51. etween it and the HLT5xx is guaranteed Baudrate 9600 or 19200 Pfeiffer The Pfeiffer protocol Baudrate 9600 Binary The interface protocol for the instrument diagnosis Baudrate 19200 Printer Leak rate date and time are given on a printer after the softkey Print in the measured value display is pressed Baudrate 9600 Address 1 255 Bus address of the SmartTest in only available in Pfeiffer Protocol Pfeiffer Protocol Baudrate 9600 or 19200 Baudrate of SmartTest in HLT5xx only available with protocol HLT5xx protocol 68 PFEIFFER VACUUM 6 4 4 4 6 Bypass Option This option is only available if a bypass valve is installed Select Setup gt User Settings gt Interfaces gt Bypass Option Escape Internal evacuation delay Back BYPASS OPTION Partial flow Off KA Save Fig 6 38 View of the Bypass option setting in the display Option Value range Description Min Max Mode No bypass see below Partial flow see below Quick pump see below Internal pump down on see below delay off see below Explanations Mode Pump down Measure Pump down Measure without internal without internal with internal with internal pump down pump down pump down pump down delay delay delay delay No bypass int pump int pump int pump int pump Quick pump Partial flow int pump Partial flow int pump pump int
52. fil fa Back Turbo molecu ar Pume 1502 H 46h 273h Fig 6 54 System data page 1 4 pump data 6 4 6 3 Vacuum System Select Setup gt Info gt Vacuum System Back 0 6 6 0 3 Pi 1 4mba i E KA Pt open x closed Fig 6 55 Vacuum system PFEIFFER VACUUM 81 6 4 6 4 Error List Select Setup gt Info gt Error List ERROR LIST Back Remar No EG42 Emission Off P1 to E022 Nominal value of th KA Fig 6 56 Error list 6 4 6 5 Calibration History 82 PFEIFFER Select Setup gt Info gt Calibration History Escape CALIBRATION HISTORY Back Time CF Hi int He a J BOR ee eee ee i 09 13 11 11 16 18 18 16 16 18 18 16 ADUNNNAAONNNe eNO eT ANN EN AN EN EN EN EN waooo RIRIA IEN CICNCN CA nA mt d Ai aa A l T Oe e x 3m e w lt x D ee Fig 6 57 Calibration history VACUUM 6 4 6 6 Paging function remote control RC 500 WL Select Setup gt Info gt Paging function PAGING FUNCTION Off E gt C lt z Off On o K3 K3 Fig 6 58 Paging function A wireless remote control RC 500 WL must be installed and be switched on With the paging function the remote control RC 500 WL lets itself locate and assign acoustically from the leak detector Pressing the button On in the menu Paging function lets an acous
53. g Functions gt Valves E gt ee oh lt z VALVES Twin F low Enable high x mbar Twin Flow Enable low 5 48 mbar nable 5 4 mbar Counter E flow 1 Fig 6 47 View of the Valves setting in the display Option Value range Explanation Min Max Twin Flow high released released locked locked 0 01 0 5 mbar Pressure at which valve V4 opens Twin Flow low released released locked locked 0 1 5 mbar Pressure at which valve V3 opens Counterflow released released locked locked 0 1 25 mbar Pressure at which valve V1 opens In sniffer mode the adjustments cannot be changed The change in the illustrated standard settings can lead to a considerable reduction in the performance of the instrument Counterflow operation at 15 25 mbar represents a heavy strain for the turbo pump We recommend that you do not use continuous operation in this pressure range PFEIFFER VACUUM 75 6 4 4 6 5 Evacuation Time amp Vent 76 PFEIFFER Select Setup gt User Settings gt Monitoring Functions gt Evacuation Time amp Vent Escape EVACUATION TIME amp VENT Maximum evacuation time at STOP Regeneration Fig 6 48 View of the Evacuation time amp Venting setting in the display Option Value range Explanation Min Max Maximum 1s 30 min If the sample has a strong l
54. g functions 6 4 4 6 1 Flow Select Setup gt User Settings gt Monitoring Functions Escape Back MONITORING FUNCTIONS Flow Valves Contamination Evacuation time amp protection Vent Volume amp Calibration Beep request Fig 6 43 Monitoring functions 72 PFEIFFER Select Setup gt User Settings Monitoring Functions gt Flow E gt fo lt z FLOW Flow Flow 50 sccm max Current flow 29 sccm Save Fig 6 44 Flow menu Option Value range Explanation Min Max Flow min 1 40 sccm The warning Flow too low appears if the flow drops below this value during the measuring mode Flow max 10 50 sccm The warning Flow too high appears if this value is exceeded during the measuring mode The flow control only concerns the sniffing mode mode sniffing and serves for monitoring the sniffing probe If menu flow is activated while measurement the current flow will be displayed VACUUM 6 4 4 6 2 Contamination Protection Select Setup gt User Settings gt Monitoring Functions gt Contamination Protection Escape Back CONTAMINATION PROTECTION ie 1 lt 3 Limit 1 6E 63 mbar 1 s Save Fig 6 45 View of the Contamination protection setting in the display Option Value range Explanation Min Max Protection On Contamination protection is switched on Off Contaminati
55. gas H3 e Confirm with OK 90 PFEIFFER VACUUM In calibration with an external or internal test leak in the Manual internal mode the stability of the signal must be confirmed with the ok softkey Escape 7 CALIBRATION Please wait External test leak closed Twin Flow low Fig 6 77 Escape ii CALIBRATION ease wait CExter fai test leak closed Counter flow Fig 6 78 The result is displayed at the end of the calibration process Escape CALIBRATION 4 COMPLETED Old New Anode Potential 471i 4T U Twin flow hish CF 1 6 1 0 Twin flow low CF 8 3 8 Counter flow CF 0 8 4 8 Savep Fig 6 79 Usual values calibration factor for He Twin Flow 0 1 10 Counter Flow 0 5 30 Values between 0 1 and 100 are possible A factor inside of brackets means that the value of the test leak is too low for this measurement range The factor was calculated with an intermediate factor from the next sensitive measurement range If you e accept the result press Save to save the new calibration values e donot accept the result press Escape to keep the old values If the usual values cannot be achieved despite several attempts please contact your nearest Pfeiffer Vacuum service point PFEIFFER VACUUM 91 6 6 Calibration Sniffing Method The instrument must have warmed up for at least 30 minutes for optimum calibration Please obser
56. ice is enabled When enabled running up the TMP can be vented No The menu page Maintenance amp Service will be blanked When running up the TMP cannot be vented PFEIFFER VACUUM 55 6 4 3 Language Select Setup gt Language Escape Back LANGUAGE English Save Sichern Sauver Guardar Fig 6 27 View of the Language setting in the display Option Value range Description Min Max Language English Operating language English German Operating language German French Operating language French Spanish Operating language Spanish Chinese Operating language Chinese Russian Operating language Russian 6 4 4 User Settings Select Setup gt User Settings Escape Back USER SETTINGS Mode amp Inter faces Mass Filter amp Parameter Zero save load Alarm Monitoring functions Fig 6 28 View of the User setting in the display 56 PFEIFFER VACUUM 6 4 4 1 Mode amp Mass Select Setup gt User settings gt Mode amp Mass oF Escape MODE amp MASS Mode 4He lt Leak rate Gas factor 4 amu Fig 6 29 View of the Mode amp mass setting in the display Option Value range Description Min Max Mode Vacuum Vacuum mode Sniffing Sniffing mode Mass H2 2 amu detectable gas H2 3H 3 amu detectable gas 3H 4He 4 amu detectable gas 4He Leak rate fa
57. ig 10 2 2 Fig 10 4 D Sub plug 112 PFEIFFER VACUUM Pin Signal Explanation 1 CHANNEL 1 Analog output 0 10 V Ri 3 Q function See 6 4 4 4 1 2 CHANNEL 2 Analog output data as above See 6 4 4 4 1 3 AGND Reference potential analog outputs galvanically isolated 4 Audio output headphones or active speaker 5 Reference potential to audio output 6 13 DI1 8 Digital inputs 18 30 V approx 5 mA The functions are activated with the positive edge Equal rights with the operating unit 6 Start Stop Starts the measurement in status Ready to start and stops the measurement in status Ready to measure 7 Vent Venting with setting Venting manual see chapter 6 4 4 6 5 8 Zero Function same as ZERO key ZERO is cancelled if applied longer than 3s 9 Calibrate Starts calibration or to confirm Calibration Acknowledge PIN 19 10 PARA 2 Activate load parameter set 2 Deactivate load parameter set 1 11 Bypass Response Bypass option available 14 DGND Reference potential of the digital inputs galvanically isolated 15 ce DO1 8 Digital outputs not separated galvanically active 24 V 22 10 passive at DGND 0 V maximum permissible current 800 mA for all outputs together All outputs are active for approx 1 s when switching on 15 Ready to start Active when SmartTest is ready to pump off the test volume 16 Ready to Active
58. iled data see Communication Protocol IG 0105 BEN 2 6 Backing Pumps HLT 550 HLT 560 To be provided by the customer Pfeiffer Vacuum UNO 005 A Volume flow rate Single stage rotary vane pump oil sealed 4 m3 h at 50 Hz 5 m3 h at 60 Hz PFEIFFER VACUUM 17 HLT570 Pfeiffer Vacuum MVP 035 Two stage diaphragm pump oil free Volume flow rate 2 mh 2 7 Turbo Pump Pfeiffer Vacuum SplitFlow 80 Turbo pump with interstage pumping Volume flow rate for N3 60 I s 18 PFEIFFER VACUUM Description The SmartTest Helium Leak Detectors are microprocessor controller leak detecting instruments All the processes in the instrument are controlled automatically Fig 3 1 1 Test connection KF25 connection for connecting test objects 2 Rear Rear with mains connection interfaces connection for remote control sniffing probe and venting 3 Instrument operation Display and control unit 4 Loudspeaker Housing opening for loudspeaker signals 5 Fresh air opening Opening in housing for fresh air supply 6 Exhaust air opening Opening in housing for exhaust air discharge Extension stages Depending on the application the basic SmartTest instrument is extended with e an external backing pump e a carriage See Operating Instructions Helium Leak detector SmartTest with Cart PFEIFFER VACUUM 19 3 1 Measuring System The measuring system consists simplified of e atest connec
59. in the event of misuse or use for a purpose which was not intended Therefore read this document carefully and especially observe the Safety chapter Keep this document close to the instrument at all times The SmartTest may be damaged by wrong handling Do only run the SmartTest under the allowed conditions of temperature 10 C to 35 C and relative humidity max 80 up to 31 C decreasing to 50 at 35 C See also chapter 2 3 The SmartTest may be damaged due to lack of inspections In order to prevent subsequent damages check the exterior of the SmartTest frequently relating to optical damages and follow the Maintenance Instructions frequently 1 2 2 Responsibility and Guarantee 1 2 3 Personnel Pfeiffer Vacuum will accept no responsibility and provide no guarantee and exclude itself from all liability in the event that the user or third parties e use the product for a purpose for which it was not intended e fail to observe the Technical Data e manipulate the product in any way conversions modifications etc operate the product with accessories which are not listed in the appropriate product documentation 10 Operating personnel The operating personnel may operate the SmartTest leak detector in normal operation The normal operation includes only the following activities e Operation e the care and maintenance work described in this document PFEIF
60. lue value mbar l s Warning 1 100 Warning limit as percentage of the setpoint value limit In some applications for example during the pump down of a test chamber system it may be necessary to suppress an alarm for some time after pressing the START key After pressing the START key the acoustic signal can be activated as soon as the leak rate is lower than the warning limit or when the alarm delay has proceeded or when the type of alarm Prop leak rate i e Pinpoint or the sniffer mode is adjusted 62 PFEIFFER Select Setup gt User Settings gt Interfaces Interfaces enables selection of the displayed sub menu Escape Analog output INTERFACES ComPact Gauge Control location Fig 6 32 Interfaces VACUUM 6 4 4 4 1 Analog Output Select Setup gt User Settings gt Interfaces gt Analog Output Escape Channel 1 Scale ANALOG OUTPUT Pressure P2 1 V 1E 65 1 U rdec Fig 6 33 Option Channel 1 Value range Min Max Off Channel 1 is switched off 0 V Description with variable time constant Pressure p2 The inlet pressure p2 is output on channel 1 See pirani characteristic in appendix Pressure p1 The fore vacuum pressure p1 is output on channel 1 See pirani characteristic in attachment LR mantissa The leak rate mantissa is output linearly from 1 10 V i e 5 4 x 10 7
61. mbar l s is according to 5 4V LR exponent The exponent is output as a step function U 1 10 V in steps of 0 5 V per decade starting with 1 V 1x10 12 i e 5 4 x 10 7 mbar I s is according to 3 5V LR linear The leak rate is put out linearly from 0 10 V 10 V are analogue to the upper limit in scaling The upper limit 10V is forced through the adjustment scalling upper limit see below Example 5 4 x 10 7 mbar l s and the upper limit are according to 5 4V PFEIFFER VACUUM 63 64 PFEIFFER Option Value range Description with variable time constant Min Max Channel 1 LR log The output voltages are scaled logarithmically The output voltage is 0 10 V in adjustable steps of 0 5 V to 10 V per decade see Scaling setting The upper limit 10V is forced through the adjustment scaling gt upper limit see below The pitch is forced through scaling V decade Example 1 x 10 7 mbar l s upper limit 1 x 10 6 mbar l s and 2V decade is according to output voltage 8V Pressure p ext The voltage of the external gauge head is emitted For converting the pressure of the pressure voltage see Operating Instructions of the compact gauge head Channel 2 see channel 1 analog with channel 1 Scale upper limit upper limit 10 V for setting LR log and LR 1E 11 1E 6 linear V decade 0 5 Volt per decade for setting
62. ngs gt Interfaces gt Control Location Escape location Control Mater Back Zo CONTROL LOCATION amp RS2327485 Save Fig 6 35 View of the Control location setting in the display Description The HLT5xx is controlled by the START STOP and ZERO keys Option Value range Min Max Control location Local Local and RS232 RS485 The HLT5xx is controlled both by the START STOP and ZERO keys on the instrument and via the RS232 RS485 interface RS232 RS485 All PLC The HLT5xx is controlled via the RS232 RS485 interface by an external computer The START STOP and ZERO keys on the instrument are deactivated The HLT5xx is controlled both by the START STOP and ZERO keys on the instrument and also via the digital inputs and the RS232 RS485 Interfaces The HLT5xx is controlled via the digital input The START STOP and ZERO keys on the instrument are deactivated 66 PFEIFFER VACUUM 6 4 4 4 4 Relay Setup gt User Settings gt Interfaces gt Relay Kd E gt oo lt z RELAY Relay 1 Relay 8 Start Stop Zo Save Fig 6 36 Relay view of the Relay setting in the display Relay allows independent settings for the two output relays Parameter Settings Explanation Relay 1 Off 1 Relay always dropped out and Start Relay activates when valve V
63. no Displayed message Description and possible remedy of cause Display Pfeiffer Protocol W135 W077 Emission for filament 1 e Filament 1 defective can not be switched on fee e Defective ion source connector or cable e MSV card defective W136 W078 Emission for filament 2 e Filament 2 defective can not be switched on ae e Defective ion source connector or cable e MSV card defective W140 W079 EEPROM write timeout The write command from the MC 68 to the EEPROM was not acknowledged e E EPROM defective e Error on wiring board e MC 68 defective W141 W080 EEPROM parameter Software problem Please contact Pfeiffer Service queue overflow W142 W081 All EEPROM parameter EEPROM on wiring plane is empty and was initialized with lost Please check your default values All parameters must be re entered or settings determined e Ifthe warning occurs again after switching back the leak detector the EEPROM on the wiring plane is probably defective e Wrong EEPROM type used e New EEPROM is used W143 W082 x EEPROM parameter Missing or invalid value of parameters in the EEPROM after lost Please check your switching on the leak detector ings i settings e EEPROM cannot be described EEPROM defective e MC 68 control circuit board defective e Line connection to the EEPROM broken e Wrong EEPROM type used W145 W083 x EEPROM parameter Missing or changed parameter in the
64. nt must be taken out of operation and secured against accidental starting This may be the case e when the device shows visible signs of damage e when liquid has penetrated the instrument e when the instrument is no longer working e after long periods of storage under adverse conditions e after great transport stress Energy connections protective earthing Make sure the instrument is suitable for operating on the local power supply before connecting it The mains plug may only be plugged into a shockproof socket PFEIFFER VACUUM 11 12 Caution Mains voltage Improperly earthed products may be dangerous to life in the event of a malfunction Connect the product in accordance with local regulations and earth correctly Interruption of the earthed conductor inside or outside the instrument is not permissible Installation of protective devices An exhaust pipe must be installed under certain circumstances See Chapter 5 1 2 Misuse of protective devices Only fuses of the specified type with the specified current rating may be used as replacements Opening the instrument Caution Mains voltage hot parts and rotating components Removal of the housing shells is dangerous to life and limb The housing shells may never be removed in the course of the work described in this document Sending in for repairs PFEIFFER Products returned to Pfeiffer Vacuum for s
65. ol RC 500 WL 110 PFEIFFER Like the instrument operating unit the remote control RC 500 WL is a display operation and control element measured values of up to 24 hours of recording can be stored in an internal memory It offers the advantage of simple wireless operation of the leak detector from a distance of up to 100 m and is also connectable by a cable with the leak detector See also operating instructions RC 500 WL RC 500 IG 0140 BEN The following features are provided Fig 10 1 Wireless Remote Control RC 500 WL POWER button Switch on and off the Remote Control RC 500 WL ZERO button ZERO activates the background suppression in measurement mode By pressing the button longer than 3 seconds the underground suppression will be deactivated Touch Display The touch display offers comprehensive features of visualization operation and configuration Measured values can be displayed numerically or as a curve The functions are easy to use with the softkeys START STOP button The measuring process of the leak detector is started and stopped with the START STOP key VACUUM 5 LED operation Signals by flashing the operation of the Remote Control 6 LED Charge Lights up while the battery is being charged The Remote Control is an optional accessory and is therefore not included in the standard delivery scope It can be ordered separately if required with the appropriate accessories see Chapter 9
66. on protection is switched off Limit 1E 9 1E 3 Switch off limit value for the mbar l s contamination protection function If the contamination protection is switched on the SmartTest closes all inlet valves as soon as the measured leak rate exceeds the limited value Then only a small amount of helium gets into the mass spectrometer Contamination of the leak detector by helium is avoided The helium which gets into the sample can then be pumped off by an external pump If no extra pump is available we recommend venting the sample before continuing the measurements Notice Contamination protection will be activated not before alarm delay time is finished see Chapter 6 4 4 3 PFEIFFER VACUUM 73 6 4 4 6 3 Volume amp Beep Select Setup gt User Settings gt Monitoring Functions gt Volume amp Beep Escape Minimum volume Beep sound Back Zo VOLUME amp BEEP E On Save Fig 6 46 Volume settings Option Value range Explanation Min Max Beep sound Minimum volume Ons On Off 15 The minimum volume must be reached This prevents the volume being accidentally set so quiet that you can no longer hear the alarm signal The beep tones can be switched on and off Beep tones signal a change in status for example 74 PFEIFFER VACUUM 6 4 4 6 4 Valves Select Setup gt User Settings gt Monitorin
67. on rate at inlet with large backing pump on HLT 550 Pump time for high sensitivity VACUUM Vacuum sniffing lt 3 minutes runup time pump lt 18 mbar temporarily up to 25 mbar 2 Iridium yttrated none static dynamic 20 Hz 3 Hz adjustable adjustable adjustable Leak rate vs time analogue digital according to AVS 2 1 lt 5x10 1 mbar I s lt 5x10 9 mbar I s lt 5x10 mbar l s 1 mbar l s 1x102 mbar l s 10 12 1 mbar I s mbar l s Pa m s sccm sccs Torr l s atmcc s 4He He H3 lt 0 3 s gt 2 5 V s at Piniet lt 0 5 mbar depending on the external pump Sniffing mode at volume 0 5 at volume 10 at volume 100 Pump time up to first measurement at volume 0 5 at volume 10 at volume 100 Internal test leak Smallest detectable leak rate 4He 3He H2 Greatest detectable leak rate 4He H3 He Measuring range Dimensional units of the display Detectable gases Response time 2 s HLT 560 HLT 570 70 s HLT 560 200 s HLT 570 700 s HLT 560 2100 s HLT 570 2 s HLT 560 HLT 570 45 s HLT 560 135 s HLT 570 500 s HLT 560 1300 s HLT 570 Rear of the instrument according to AVS 2 1 lt 5x108 mbar l s 1 mbar l s 1x102 mbar l s 1x108 1 mbar I s mbar l s Pa m s ppm sccm sccs g a oz yr Torr l s atmcc s 4He He H3 lt 1 s with 3 m sniffing line 2 5 Interfaces Connecting plug arrangement and deta
68. ontaminated parts Caution Materials which are harmful to the environment Products or parts mechanical and electrical components operating fluids etc can be harmful to the environment Dispose of such harmful materials according to local regulations Division of the components After dismantling the product the components must be divided into the following categories for disposal Contaminated components radioactive toxic caustic microbiological etc must be decontaminated according to national regulations separated and disposed of according to their type of material Uncontaminated components These components must be separated according to their type of material and recycled Operating fluids Operating fluids of the backing pump and high vacuum pumps must be disposed of according to the local regulations PFEIFFER VACUUM 107 9 Accessories and Consumer Materials Basic instrument Order number Filter mats 5 pieces B 8199 999 EG Carriage for SmartTest prepared for fore pump 230 V 50 Hz PT 445 415 100 120 V 50 60 Hz PT 445 416 Transport case for SmartTest PT 445403 Scratch guard for SmartTest PU mat PT 445 404 Screw in flange DN 25 ISO KF for external backing pump PT 445 417 Remote control Order number Remote control RC 500 WL wireless PT 445 420 T Remote control RC 500 non wireless PT 445 421 T Accessories
69. or Factory settings Other valve settings See Chapter 6 4 4 6 4 VACUUM Sniffing method In the sniffing method the test gas escaping from leaks in the sample into the atmosphere is detected The sample must withstand the applied test pressure In operation with the sniffing probe a constant gas flow is sucked in from the atmosphere The helium proportion of the air 5 2 ppm causes a leak rate display of approx 1x10 6 mbar I s which can be eliminated by the ZERO function To detect a leak the sniffing probe is applied to the points of the sample under helium overpressure which are suspected of leaking An increased leak rate value indicates an increased concentration of helium and therefore a leak The higher the pressure and the helium concentration in the sample the smaller the leaks which can be detected The sensitivity stages counterflow gt Twin Flow low are run through The detection sensitivity and the quantifiability of the leak rate are less favourable than in the vacuum pressure leak detection PFEIFFER VACUUM 23 3 4 Test Gases 24 PFEIFFER For reasons of economy and detection sensitivity 4He helium with mass 4 is generally used as a test gas for leak detection Under certain conditions e g at increased He concentration on the sample it may be useful to change to a different test gas such as He helium with mass 3 or H hydrogen mass 2 These gases can also be detected wi
70. pump pump Partial flow Partial flow Partial flow Partial flow Partial flow pump int pump int pump pump int pump pump pump PFEIFFER VACUUM 69 6 4 4 5 Parameter save load Select Setup gt User settings gt Parameter save load Escape Back PARAMETER SAVE LOAD Load PARA SET 1 PARAS SET fm Load PARA SET 2 PARA SET Za K z factory ofl gt Fig 6 39 Parameter save load 6 4 4 5 1 Load PARA Set 1 2 Select Setup gt User settings gt Parameter save load gt Load PARA Set 1 2 Escape Back Load Parameter set PARA SET 1 23 Jun 2009 16 37 7 D hrat J View Load parameter set Fig 6 40 Example Parameter set 1 The Softkey View parameter set leads to 4 more pages of parameter values of the parameter set 70 PFEIFFER VACUUM 6 4 4 5 2 Load Factory Settings Select Setup gt User Settings gt Parameter save load gt Load Factory Settings Escape Back Load factory settings L3 KA to Fig 6 41 Default parameter List of default parameter see appendix 6 4 4 5 3 Save PARA Set 1 2 Select Setup gt User settings gt Parameter save load gt Save PARA Set 1 2 Escape Back Save current settings as CJ os SET j K E gt 4 z Fig 6 42 Save PARA Set 1 The parameter set will be saved after pressing the button Save PFEIFFER VACUUM 71 6 4 4 6 Monitorin
71. recently as this interruption will be corrected W103 W062 Flow through capillary e Filter is filter tip blocked le toa low e Sinter filter in filter tip soiled e Capillaries blocked by dirt e Lower flow limit set incorrectly After the confirmation of this warning a warning triangle remains in the Ready to start menu which signalizes the existence of this interruption See Chapter 6 2 The warning triangle disappears as recently as this interruption will be corrected W104 W065 Capillary broken The flow of the sniffer pipe is monitored in the sniffing mode If the flow exceeds the set maximum the gas flow through the capillaries is too high The maximum flow can be set by the menu within certain limits The factory setting is 40 sccm e Capillary broken or torn e Upper flow limit set incorrectly After the confirmation of this warning a warning triangle remains in the Ready to start menu which signalizes the existence of this interruption See Chapter 6 2 The warning triangle disappears as recently as this interruption will be corrected W105 W066 Global Reset A global reset has been performed PFEIFFER VACUUM 101 Warnings no Displayed message Description and possible remedy of cause Display Pfeiffer Protocol W106 W067 Default Settings loaded The factory settings have been loaded by the instrument software W107 wo
72. rected W131 W075 Preamplifier e The ambient temperature is too high temperature is too high e The air filter is soiled gt 60 C e Heat build up due to unfavourable position e Temperature sensor in the pre amplifier defective After the confirmation of this warning a warning triangle remains in the Ready to start menu which signalizes the existence of this interruption See Chapter 6 2 The warning triangle disappears as recently as this interruption will be corrected W132 W063 Temperature at e Ambient temperature too low electronic unit is too Be e Temperature sensor defective low lt 2 C After the confirmation of this warning a warning triangle remains in the Ready to start menu which signalizes the existence of this interruption See Chapter 6 2 The warning triangle disappears as recently as this interruption will be corrected W133 W076 Temperature at e The ambient temperature is too high electronic unit is too high gt 55 C Unfavourable position of leak detector heat build up e Fan failed e Air filter too heavily contaminated e Temperature sensor defective After the confirmation of this warning a warning triangle remains in the Ready to start menu which signalizes the existence of this interruption See Chapter 6 2 The warning triangle disappears as recently as this interruption will be corrected PFEIFFER VACUUM 103 Warnings
73. ry 2 Technical Data 2 1 General 2 2 Mains Connection 2 3 Environmental Data 2 4 Measure 2 5 Interfaces 2 6 Backing Pumps 2 7 Turbo Pump 3 Description 3 1 Measuring System 3 2 Detection Principles 3 3 Leak Detection Methods 3 4 Test Gases 3 5 Background Suppression 4 Manual Control Elements 4 1 Instrument Operation 5 Commissioning 5 1 Installation Assembly 5 1 1 Unpacking 5 1 2 Carrying Transport 5 1 3 Transport Lock 5 2 Mount the External Backing Pump 5 3 Mounting Accessories 5 3 1 Sniffing Probe 5 3 2 Remote Control 5 3 3 Bypass Option 5 3 4 Signal tower 5 3 5 Exhaust pipe 5 3 6 Venting Line 5 4 Mains Connection 6 Operation 6 1 Switching On and Off 6 2 Ready to start 6 2 1 Regeneration 6 2 2 Check internal test leak 6 2 3 Setup PFEIFFER VACUUM PFEIFFER 6 2 4 6 2 5 6 3 1 6 3 1 1 6 3 1 2 6 3 2 6 3 3 6 3 4 6 4 1 6 4 1 1 6 4 1 2 6 4 1 3 6 4 1 4 6 4 1 5 6 4 1 6 6 4 2 6 4 2 1 6 4 2 2 6 4 2 3 6 4 2 4 6 4 3 6 4 4 6 4 4 1 6 4 4 2 6 4 4 3 6 4 4 4 6 4 4 4 1 6 4 4 4 2 6 4 4 4 3 6 4 4 4 4 6 4 4 4 5 6 4 4 4 6 6 4 4 5 6 4 4 5 1 6 4 4 5 2 6 4 4 5 3 6 4 4 6 6 4 4 6 1 6 4 4 6 2 6 4 4 6 3 6 4 4 6 4 6 4 4 6 5 6 4 4 6 6 6 4 5 6 4 6 6 4 6 1 6 4 6 2 6 4 6 3 6 4 6 4 6 4 6 5 6 4 6 6 6 4 7 6 4 7 1 6 4 7 2 6 4 7 3 VACUUM Calibration Measuring mode Vacuum Sniffing Measure Measure with a test item Vacuum mode Sniffing mode Measured Value Display Displ
74. s flow from the sample goes through the test connection Twin Flow low At pressure p2 lt 5 mbar V1 and V3 are open Twin Flow high At pressure p2 lt 0 5 mbar V1 and V4 are open The gas flow passes through partial pump B to the backing pump and the test connection is pumped up to high vacuum The suction performance of the partial pump B is approx 40 l s Only the partial pump A acts in counterflow and allows light gasses such as hydrogen and helium to get through to the helium sensor on account of the mass dependent compression capacity PFEIFFER VACUUM 21 3 3 Leak Detection Methods 22 When searching for leaks with the SmartTest the test gas entering or escaping through leaks in the sample is detected For gas to flow through a leak a pressure difference between the inside and outside of the sample is necessary For this either excess pressure or vacuum pressure is generated inside the sample Vacuum method PFEIFFER In the vacuum method test gas is blown against the wall of the evacuated sample from the atmosphere side It enters the sample at leaks and is fed to the leak detector The sample must be vacuum pressure proof The sensitivity stages counterflow gt Twin Flow low gt Twin Flow high are run through The detection limit is lower than in the sniffing method The helium concentration at the leak must be known in order to quantify the leak The state of equilibrium must be waited f
75. s yes BG subtraction at START on yes yes alarm mode Trigger Alarm yes yes alarm delay 30 Seconds yes yes LR setpoint value 1E 4 mbar l s yes yes warning limit 100 yes yes analog output channal 1 LR mantissa yes yes analog output channal 2 LR exponent yes yes analog scaling upper limit 5 yes no analog scaling V decade 1V per decade yes no PFEIFFER VACUUM 117 Parameter Default Values Setting back Included in to VORGABE set of WERT when parameters loading default values full scale lin gauge head 1000 mbar yes no setpoint value for ext gauge heads 1E 1 mbar yes no pressure P2 source internal no no control location local RS232 RS485 yes yes mode relay 1 off yes no mode relay 2 off yes no interface RS232 yes no serial port Pfeiffer yes yes bypass modus no bypass yes yes venting delay internal off yes yes flow max 50sccm yes yes flow min 10sccm yes yes contamination protection off yes yes limit contamination protection 1E 3 mbar l s yes yes minimum volume 0 yes yes volume 2 yes yes TwinFlow high set free yes yes Change over threshhold TwinFlow high 0 5mbar yes yes TwinFlow low set free yes yes Change over threshhold TwinFlow low 5 mbar yes yes counterflow set free yes yes Change over threshhold counterflow 15 mbar yes yes maximum evacuation time 30 minutes yes yes venting with stop yes yes calibratoin request off yes
76. s0 Service interval e Perform service backing pump i expe e Perform service SplitFlow 80 After the confirmation of this warning a warning triangle remains in the Ready to start menu which signalizes the existence of this interruption See Chapter 6 2 After maintaining the leak detector the service interval can be set back under maintenance amp service device maintenance interval W108 wo91 Zero disabled The Zero function has been locked in the setting menu but was operated via the PLC input W109 W068 Amplifier signal too The pre amplifier signal is overmodulated in the most high gt 10V insensitive measuring range e Pre amplifier defective e Mass spectrometer heavily soiled W120 W069 Time out during Pressure threshold for following measuring range is not calibration reached within the set time limit The time limit is specified by the set maximum evacuation time in the menu W121 W070 Calibrated leak signal je The test leak used for the calibration is too small tasma e The external test leak valve is not open or defective e Internal test leak defective W122 W092 Cal signal not stable e Leak rate signal too small and noisy e Internal test leak defective e Backing pump with heavily unstable end pressure W123 W071 Peak out of tuning e Leak rate signal was unstable during the mass range adjustment Re calibrate e Check internal test leak and repeat the calibration with an external test leak W
77. shown if the calibration is enabled in the Access Control mode see Chapter 6 4 2 3 Select Ready to Start gt Calibration This option commences the calibration routine See chapter 6 5 or 6 6 respectively 6 2 5 Measuring mode Vacuum Sniffing This function is only shown if the software menu is not locked by menu PIN see Chapter 6 4 2 1 Select Ready to Start gt Measuring mode Vacuum Sniffing Observe the detailed instructions for handling the keys in this and the following chapter Thereafter only menus parameters and the value tables are described Escape Back MODE amp MASS Mass 4He 4 amu Leak rate Gas Save factor Fig 6 10 View of the Mode amp mass setting in the display e Select the desired option with the softkeys on the right and left of the screen e Change the value with the and keys prolonged pressing causes the parameters to be run through automatically e Save the new value with Save or e Go back one level with Back or to the measured value or ready to start display with Escape PFEIFFER VACUUM 41 42 Option Value range Description Min Max Mode Vacuum Vacuum mode Sniffing Sniffing mode Mass H2 2 amu detectable gas H2 3H 3 amu detectable gas 3H 4He 4 amu detectable gas 4He Leak rate factor Factor Leak rate is converted with user 1E 6 1E 6 defined factor Gas Leak rate gas equi
78. tTest HLT570 has a label Transport locking on the base please remove the two Allan head screws size 4 at the label Keep the screws The screws must be reinserted for transport 5 2 Mount the External Backing Pump SmartTest HLT 550 The external backing pump is connected at the bottom via the connection flange DN 25 ISO KF Other SmartTest models If large volume objects need to be tested an additional backing pump can be connected at the bottom via the additional connection flange DN 25 ISO KF See Chapter 9 PFEIFFER VACUUM 31 5 3 Mounting Accessories 5 3 1 Sniffing Probe Connect the sniffing probe as illustrated for sniffing operation Fig 5 2 Connections for sniffing probe Input output connection RC connection Electrical connection for sniffing probe KR DH a Gas connection for sniffing probe or venting line hose nipple 6 4 mm a Exhaust gas connection quick screw connection for hose 8 6 mm The sniffing probe must be removed for vacuum operation because the connection is used for venting 5 3 2 Remote Control Connect the optional Remote control unit to connection 2 RC See also Appendix 32 PFEIFFER VACUUM 5 3 3 Bypass Option Connect the 25 poles D sub connector of the bypass option to connection 1 Input Output See also Operating Instructions 5 3 4 Signal tower Connect the 25 poles D sub connector of th
79. th the leak detector Caution Danger of explosion Hydrogen forms a highly explosive gas mixture with air Great caution is necessary when using hydrogen No smoking no naked flames avoid sparks Because of the high percentage of water in typical residual gases the leak rate background in the measurement of hydrogen is fairly high in a range from 107 mbar l s For the leak detection the test gas can be diluted with a neutral gas such as nitrogen or argon This helps to reduce contamination of the atmosphere and an increase in the signal background especially in case of serious leaks The leak rate signal is then of course reduced according to the test gas concentration VACUUM 3 5 Background Suppression The background signal may increase dependent on the measuring conditions e g high percentage of helium in the ambient air The background signal can be suppressed to enable easy measurement of small leak rates despite a high background The background suppression can be locked or activated automatically with every START See Chapter 6 4 4 2 Rising background Fig 3 3 Rising background Item Description 1 raw signal 2 displayed leak rate By pressing the ZERO key the momentary raw signal e g at time t1 is saved as a background value and is then subtracted from the following measured values See Chapter 6 4 4 2 The status message Zero appears in the measured valu
80. the TMP will be vented for 10 seconds TMP vented E E I z UENT_ TMP TMP is vented Please switch off leak detector Foreline Press P1 1666 mbar O Rotation sPeed 26 Hz Vent TMP Fig 6 7 Venting TMP 3 When this 10 seconds have passed the leak detector has to be switched off The maintenance of the lubricant can be started now You can start the leak detector again with the softkey start new You can vent the TMP again with the softkey vent TMP PFEIFFER VACUUM 6 2 Ready to start Setu READY TO START Mode VACUUM 4He CF 1 2 27 Jan 1080 Filter dynamic Signal T 4 il 10mbar l17s Check internal Regeneration test lea Mode Calibration Vacuum Sni ff Fig 6 8 Ready to start The instrument now displays the following parameters Mode Operating mode vacuum or sniffing Mass Type of gas He4 He3 H2 Filter Filter stage without dynamic normal CF Date and calibration factor of the last calibration of Twin Flow high Twin Flow low for sniffing Reserve fil Reserve filament active Only appears if one of the two active filaments is defective This display persists until the filaments ion sources are changed Signal Current background signal Only appears if the appropriate option has been selected in the Underground ready to start menu See Chapter 6 4 1 6 Softkey Vent is only active if in the Evacuation tim
81. tic signal sound at the remote control RC 500 WL Press the button Off to switch off the acoustic signal PFEIFFER VACUUM 83 6 4 7 Maintenance and Service Select Setup gt Maintenance amp Service The maintenance menu can only be chosen when the maintenance was enabled under setup access control maintenance enabled Escape Back MAINTENANCE amp SERVICE Maintenance Maintenance device components View Maintenance gt iii _ z Fig 6 59 Maintenance and service 6 4 7 1 Maintenance device Select Setup gt Maintenance amp Service gt Maintenance device Escape Back MAINTENANCE DEVICE Device 273 h Device oP time 273 h Save Fig 6 60 Maintenance interval counter Press the button Device to reset the device maintenance interval counter 84 PFEIFFER VACUUM 6 4 7 2 Burnin Select Setup gt Maintenance amp Service gt Burn in The Burn in is an automated Start Stop cycle This function can only be successful activated in the setting Venting with Stop See Chapter 6 4 4 6 5 An active Burn in will be announced in the display You can deactivate the Burn in with STOP in the Burn in menu or with the STOP key Escape BURN IN Blank off inlet Port Terminate Function with STOP key Start without Start with calibration calibration Fig 6 61 Burn in Start with c
82. tion e abacking pump e aturbo pump e afew valves e ahelium sensor test P2 rest connection helium sensor V4 V5 test leak pad Gas connection for V2 sniffing probe or Xo venting line P1 fore vacuum pressure backing pump external backing pump optional Fig 3 2 The sample is flanged to the test connection The valves V1 V2 V3 and V4 connect the sample and the helium sensor without an unsuitable operating state occurring for this A test leak is connected with valve V5 for calibration The valve V6 serves for venting so that the sample can be removed again It is also used as a sniffing connection All valves open electromagnetically and close with spring force The measuring tube P1 measures the fore vacuum pressure P2 the pressure at the test connection 20 PFEIFFER VACUUM 3 2 Detection Principles Counterflow Twin Flow The sample is connected to the backing pump via valve V2 At a pressure p2 15 mbar the valve V1 to the turbo pump is opened Helium can get to the helium sensor through the two partial pumps A and B against the pumping direction The mass dependent compression capacity of the two partial pumps keeps away heavy gases The proportion of helium which gets through to the helium sensor depends on the suction performance of the backing pump and the compressions of the two partial pumps The ga
83. translation of the original instructions IG 0100 BEN_I 1010 A PASSION FOR PERFECTION E SmartTest HLT 550 HLT 560 HLT 570 mm VACUUM Product identification The data specified on the rating plate are necessary in correspondence with Pfeiffer Vacuum Therefore transfer the data to the copy Fig 0 1 Validity This document is valid for products with the article number SmartTest PT LO2 100 HLT 560 230 V with rotary vane pump UNO 005 A PT LO2 101 HLT 560 120 V with rotary vane pump UNO 005 A PT LO2 102 HLT 560 100 V with rotary vane pump UNO 005 A SmartTest PT LO2 120 HLT 550 100 230 V with backing pump provided by the customer SmartTest PT LO2 110 HLT 570 230 V with diaphragm pump MVP 035 PT LO2 111 HLT 570 120 V with diaphragm pump MVP 035 PT L02 112 HLT 570 100 V with diaphragm pump MVP 035 This document is based on firmware versions beginning with V2 3 If the instrument does not work as described check whether your instrument is equipped with these firmware versions Subject to technical modifications without prior notice The figures are not to scale PFEIFFER VACUUM Content 1 Safety 1 1 Directions for Use 1 1 1 Use of this Manual 1 1 2 Symbols Used 1 2 General Safety Precautions 1 2 1 Use for the Intended Purpose 1 2 2 Responsibility and Guarantee 1 2 3 Personnel 1 2 4 General Safety Rules 1 3 Scope of Delive
84. valent Air Leak rate air equivalent 1 Connect sniffing line before pressing START Leak rate factor converts the measured leak rate He He or H3 into e an equivalent leak rate of another gas or e into an equivalent leak rate 4He 3He or H2 under different flow conditions to those of the molecular flow Under molecular flow conditions the leak rate only depends on the mass of gas We measure the test gas helium 4 and want to display the leak rate for air neS MassHe_ TA LR ap LR x eee LRHe x ea LRHe x 0 372 With leak rate factor air the leak rate is converted according to the equation with the mass of the test gas 4 3 or 2 to an equivalent leak rate for air under molecular Factors for other gases e g R134a are obtainable from Pfeiffer Vacuum Example conditions Other gases PFEIFFER VACUUM 6 3 Measure 6 3 1 Measure with a test item The instrument is ready to detect leaks as soon as it displays Ready to start e Select the desired measuring mode Mode Vacuum or Sniffing e Check whether the parameters displayed in the Start menu are applicable 6 3 1 1 Vacuum mode Risk of injury due to sucking connection flange If the Vacuum Mode of the SmartTest is activated the connection flange may suck bodily parts around the connection flange Keep bodily parts off the connection flange Remove the blank flange from the inlet port and connect the test item Press the START ST
85. value The zero value is set to 0 at Power Off or changing the zero function If the raw signal of the leak rate drops below the saved value background value see time t3 to t4 itis not evaluated but the slightest detectable leak rate detection limit is displayed So leaks are not displayed raw signal that are smaller than the saved underground value saved value VACUUM 4 Manual Control Elements 4 1 Instrument Operation The operating unit is the display operation and control unit for the leak detector Fig 4 1 Functions of the buttons on the display 1 START STOP key The measuring process is started and stopped with the START STOP key 2 ZERO key ZERO activates the background suppression in measurement mode When you press the key longer than 3 seconds you will deactivate the underground pressure 3 Softkeys The function of these keys depends on the current operating state The respective meaning appears in the display 4 Display The display shows measured values operating modi instrument parameters and their values as well as the meaning of the softkeys PFEIFFER VACUUM 29 5 Commissioning 5 1 Installation Assembly 5 1 1 Unpacking See the Chapter Technical Data Chapter 2 regarding the permissible ambient temperature degree of protection voltages max acceleration of the instrument in operation etc Despite good attenuation and vibration
86. ve the recommended test interval of the used test leak See quality test certificate Test leak Press Calibration in the Ready to start menu to start calibration The prompt appears Escap qFS SP EXTERNAL CALIBRATION Sniff external test leak Fig 6 80 e Is the value equal to the value on the test leak rating plate Change if necessary See Chapter 6 4 5 e Hold the sniffing probe against the test leak e Confirm this with START or with the key on the probe Fig 6 81 Sniffing external test leak 92 PFEIFFER VACUUM Calibration run The calibration runs through the following sequences qescare PUMPING DOWN 1000 Inlet Pressure Pa 166 9 07 mbar 16 Fig 6 82 E CALIBRATION Please Press OK if si nal is stable Sniff external test leak Fig 6 83 The stability of the signal must be confirmed with the OK softkey Estap iia CALIBRATION Autotune qEscare CALIBRATION Please wait Sniff external test leak Twin Flow low Fig 6 85 The prompt now appears Sniff air Fig 6 86 e Remove the sniffing probe from the test leak e Confirm with OK or with the key on the probe PFEIFFER VACUUM 93 Escape CALIBRATION Please Press OK if siYnal if stable Sniff air Fig 6 87 The result is displayed at the end of the calibration process E CALIBRATION
87. yes int test leak 1E 6 mbar l s no no ext test leak vacuum 1E 7 mbar l s yes yes ext test leak sniffing 1E 5 mbar l s yes yes calibration mode int auto yes yes 118 PFEIFFER VACUUM Characteristic jrani P D 3098 00s Z 00s 9 00s s Al n 00S o0s e 00s 2 00s 0 30 L 1 4 TT TTT TOTT TTT TTT TMT TTT TTT 0 30 4 Zo 30 4 10 30 L 00 30 L LO 30 L 4 ZO 30 L 0 30 L equ d Fig 10 10 VACUUM 119 PFEIFFER E List of literature F 120 Operating manual Sniffer Probe LP 503 LP 505 LP 510 BG 805 268 BEN Operating manual Bypass Option PL0002 BN Operating manual Cart for SmartTest IG 0110 BEN Communication Protocol SmartTest IG 0105 BEN Maintenance Instructions SmartTest IG 0108 BEN Operating instructions RC 500 WL RC 500 IG 0140 BEN Declaration of Contamination PFEIFFER Products returned to Pfeiffer Vacuum for service or repair must be free of harmful substances e g radioactive toxic caustic or microbiological Forwarding contaminated products Adhere to the forwarding regulations of all involved countries and forwarder companies

Operating Instructions SmartTest

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