Pumping Operations With DCU Betriebsanleitung • Operating
Contents
1. TC 100 TCK 100 PIN Function 2 d4 Remote Priority ON OFF 3 b4 Accessory 1 ON OFF 4 24 Accessory 2 ON OFF 5 d6 Pumping Station ON OFF 6 b6 Standby ON OFF Reset Operating modes with the remote control Basically there are three different possibilities with regard to the remote control with differing priorities with respect to the remote control functions Standard Remote Control Select 028 OpMode rem and set to 0 The individual functions which can be operated with the re mote control are activated via SPS High Level Activated individual functions cannot be operated via the serial interfa ce nor the keyboard Individual functions deactivated with the remote control can be operated via the serial interface or the keyboard Remote Control Priority Only TC 600 CAUTION 028 OpMode rem may only be altered to OFF when the pump is switched off 023 Motor TMP Priority ON In certain application cases as for example SPS control the remote control functions can be assigned prioritized switching Select 028 OpMode rem and set to 1 Bridge pin 1 pin 3 on the connecting plug remote gt All set functions will be switched off excepting motor turbopump ON which remains on ON The remote control functions can only be set via the connecting plug remote The DCU keyboard serial2. 39 2 93 99 05 33 Email contact pfeiffer vacuum it Japan Hakuto Co Ltd C P O Box 25 Vacuum Scientific Instruments Division C P 0 Box 25 Tokyo 100 91 Phone 81 3 32 258 910 Fax 81 3 32 259 011 Email pfeiffer hakuto co jp Korea Pfeiffer Vacuum Korea Ltd 703 Ho 853 1 Hankuk Mulru Dongchonri Suzi Eup 449 843 Yong in City Kyungkido Phone 82 31 266 0741 Fax 82 31 266 0747 Email sales pfeiffer vacuum co kr Netherlands Pfeiffer Vacuum Nederland BV Veldzigt 30a NL 3454 PW De Meern Phone 31 30 6666050 Fax 31 30 6662794 Email Sales pfeiffer vacuum nl Peru Ing E Brammertz s r l Jos Pardo 182 Apartado 173 PE 18 Miraflores Phone 51 1 445 8178 Fax 51 1 445 1931 Email braming terra com pe Poland Softrade Sp z o o ul Grunwaldzka 391 PL 60 173 Poznan Phone 48 61 8677 168 Fax 48 61 8677 111 Email softrade softrade com pl PFEIFFER VACUUM Portugal Tecnovac Tecnologia de Vacio S L Sector Literatos 38 Local 1 ES 28760 Tres Cantos Madrid Phone 34 91 804 11 34 Fax 34 91 804 30 91 Email tecnovac tecnovac es Singapore APP Systems Services Pte Ltd 11 Toh Guan Road East 03 01 APP Enterprise Building Singapore 608603 Phone 65 6425 6611 Fax 65 6560 6616 Email sales appsystems com sg Spain Tecnovac Tecnologia de Vacio S L Sector Literatos 38 Local 1 ES 28760 Tres Cantos Madrid Phone 34
3. 91 804 11 34 Fax 34 91 804 30 91 Email tecnovac tecnovac es Sweden Pfeiffer Vacuum Scandinavia AB Johanneslundsv gen 3 SE 194 61 Upplands Vasby Phone 46 8 590 748 10 Fax 46 8 590 748 88 Email sales pfeiffer vacuum se Switzerland Pfeiffer Vacuum Schweiz S A F rrlibuckstra e 30 CH 8005 Z rich Phone 41 1 444 2255 Fax 441 1 444 2266 Email info pfeiffer vacuum ch South Africa Labotec Pty Ltd P O Box 6553 Halfway House 1685 Midrand Phone 27 11 315 5434 Fax 27 11 315 5882 Email sales labotec co za Taiwan HAKUTO Taiwan Ltd Hsinchu office No 103 Hsien Chen 11th Street Chupei HsinChu County Taiwan R 0 C zip postal code 302 Phone 886 3 554 1020 Fax 886 3 554 0867 Email leo shih hakuto com tw Thailand Hakuto Thailand Ltd 18th Floor Chokchail Intil Bldg 690 Sukhumvit Road Klongton Klongtoey Bangkok 10110 Phone 662 259 6244 Fax 662 259 6243 Email tmgroup hakutothailand com U S A Pfeiffer Vacuum Inc 24 Trafalgar Square Nashua NH 03063 1988 USA Phone 1 603 578 6500 Fax 1 603 578 6550 Email contact pfeiffer vacuum com Venezuela Secotec S A Apartado 3452 Caracas 1010 A Phone 58 212 573 8687 Fax 58 212 573 1932 Email secotec cantv net Zentrale Headquarters Pfeiffer Vacuum GmbH Berliner Strasse 43 D 35614 Asslar Telefon 06441 802 0 Telefax 06441 802 202 Hotline 06441 802 333 www pfeiffer vacuum
4. Description of the backing pump control PM 800 544 BE Temperature Management System TMS Description of the TMS installation PT 0099 BE Pfeiffer protocol RS 232 RS 485 Description of the serial interface protocol PM 800 488 BE Level Converter RS 232 RS 485 Description of the pumping control via the RS 232 PM 800 549 BE TVF 005 Description of the venting valve PM 800 507 BE TIC 250 Description of the Profibus PM 800 599 BE PWM Box Description of the pulse width modulation PM 800 563 BE TCS 010 Description of the Pumping Station Control Unit PT 0045 BE Cover IP 54 for TC 600 Description of the water protection cover PT 0024 BE TBC 600 Description of the brake unit PT 0018 BE The number is available from PFEIFFER VACUUM Service or from the internet address shown in this manual 2 Parameter 2 1 General All function relevant elements of the display control unit or The value of the parameter is always readable and in some pump are available in the DCU in the form of parameters instances can be altered In principle there are three different Each parameter has a parameter number and a clear text types of parameter designation for example P 026 OpMode TMP Parameter Typ Function Setting command Activating deactivating a parameter Status request Parameter status reques readable only Set value standard Altering a parameter To adapt these parameters to the individual requirements of the user the DCU provides two
5. ON PFEIFFERE VACUUM 7 3 8 Operations With Temperature Manage ment System TMS only TC 600 750 Turbopump with TMS 95 Connection box 96 Connecting cable for heating element 97 Sensor connection The Temperature Management System TMS comprises a regulatable heating system which is installed in the fore vacuum part ofthe turbomolecular pump Heating up to a maximum of 90 C prevents the condensation of process gases or by products in this part of the pump As a matter of principle the TMS heating is only activated on attainment of the rotation speed switchpoint P 701 The TC 600 automatically recognizes a connected TMS heating unit and sets the parameter P 335 Heat type to 1 Activating TMS mode Select 794 Param Set and set to 1 Select 335 Heat type and check setting Select 704 TMSheatset Enter set temperature value 30 C 90 C Acknowledge the value Select 001 Heating and set to 1 With P 001 Heating The TMS heating can be activated and deactivated at any time with 1 or 0 respectively In addition to the above parameters which are used to start the TMS other parameters are also available to support working with the TMS Calling up the TMS temperature Select 331 TMS ActTmp and read off the temperature TMS set temperature attained Select 333 TMS steady and read off the information Function of
6. X4 gt All set functions will be switched off gt The remote control functions can only be set via the connecting plug X3 The DCU keyboard serial interface is inactive The functions Accessory 1 ON Accessory 2 ON Pumping station ON Standby Reset ON are activated and deactivated with the signals 1 and 0 respectively Priority OFF Select 028 OpMode rem and set to 1 Remove bridge pin 2 pin 7 on the connecting plug X3 gt Values set via the remote control will be taken over gt Operating is only possible via the DCU keyboard serial interface remote control not active gt Set values are not saved If 028 OpMode rem should be re set to 0 Values set via the keyboard or serial interface will be taken over Values set with 1 via the remote control will also be taken over Remote Control Malfunction Acknowledge ment If the heating reset input on the remote control for the TC600 750 is not used it can be utilized as an external malfunction acknowledgement via the remote control this means that after a switch off and subsequent switch on via the Motor TMP or Pumping Station inputs a malfunction acknowledgement will first be executed Set 028 OpMode rem to 2 12 PFEIFFERE VACUUM 3 17 Venting The Turbopump Venting is possible after the pump has been switched off Basically a delay time of 6 seconds is observed before ea
7. code In addition parameters 360 to 369 retain the lastten errors or warnings which occurred After an error has occurred all parameters can be viewed but no longer altered Exception Error E698 TC does not respond Here no actualisation of the parameter is possible until the communication has been restored Code Description Occurs Error Elimination Action At E001 TMP excess rotation speed B Inform PFEIFFER VACUUM Service If operations with mains voltage 90 132 VAC check set tings P 029 E002 Power pack unit error S B Check power pack output voltage Check settings P 013 Inform PFEIFFER VACUUM Service E006 Start up time error S B Set correct start up time When the start up phase is completed the ro Open vacuum valve tation speed of the pump drops below the rota Reduce fore vacuum pressure tion speed switchpoint Eliminate leak Check free running of the turbo pump E00713 Operating fluid deficiency S B Check oil level Request status of the oil sensor via P 301 Inform PFEIFFER VACUUM Service E008 Connection TC and pump S B Check connection TC and pump E014 The heating type identified in the self test has B Change configuration of heating or cooling unit been changed by pulling the plug or by an error Inform PFEIFFER VACUUM Service E015 Error in the TC controller S B Resetthe controller with mains ON OFF with
8. inter face is inactive The functions Heating ON error acknowledgment Stand by ON Pumping station ON Enable venting are activated and deactivated with the signals 1 and 0 respectively In the rotation speed setting mode the set value standard is processed exclusively via pin 7 on the connecting plug remote If pin 3 on the connection remote should be set to 0 Values set via the remote control will be taken over except in rotation speed setting mode Here the set value stan dard is processed via the serial interface or the keyboard Priority OFF Select 028 OpMode rem with f 0 Hz and set to 1 All set functions will be switched off excepting motor turbopump ON which remains on ON Set Pin3 Remote to 0 Operating is only possible via the DCU keyboard serial interface remote control not active Set values are not saved In rotation speed setting mode the rotation speed set via the keyboard or serial interface will be taken over If 028 OpMode rem should be re set to 0 Values set via the keyboard or serial interface will be taken over Values set with 1 via the remote control will also be taken over PFEIFFERE VACUUM 11 Only TC 100 TCK 100 Priority ON Select 028 OpMode rem and set to 1 TC 100 Bridge pin 2 pin 7 on the connecting plug X3 TCK 100 Bridge pin d4 pin z28 on the connecting plug
9. net
10. rotation speed TMP in Hz 0 2000 e 3 4 310 TMP I Mot Motor currentTMP IA 0 15 0 e 3 4 313 TMP DClink Motor voltage TMP in V 0 200 0 316 TMP power Motor power TMP _inW 0 1000 e 311 TMP Op hrs Operating hours TMP inh 0 99999 e 3 1 Operating adjustment turbopump 002 Standby Standby ON OFF OFF ON OFF 35 010 Pump stat Pumping station ON OFF OFF ON e 3 4 023 Motor TMP Motor Turbopump ON OFF OFF ON 3 10 026 OpMode TMP Operations mode TMP O final rot speed oper 1 rot speed setting 0 1 0 e 3 11 027 gas mode Gas mode 0 heavy inert gases 1 other gases 0 1 0 e 3 8 029 OpMode Drv Operating mode drive unit OFF max ON reduced power consumption OFF ON OFF e 3 4 308 Set rotspd Set rotation speed TMP in Hz 0 2000 e 3 4 309 Act rotspd Actual rotation speed TMP inHz 0 2000 e 3 1 717 Stbyrotset Rotation speed set value at standby operations 20 100 66 707 TMProt set Rotation speed set value in rotation speed setting operations in 20 0 100 0 50 0 3 11 Heating cooling turbopump 001 Heating Pre selection heating 0 0FF 1 ON 0 1 0 e 3 6 032 Conf Out4 Configuration heating output 0 Heat TMS operations 1 sealing gas valve control 0 1 0 e 3 7 331 TMS ActTmp Heating TMS actual value in C 5 200 e 3 8 333 TMS steady TMS regulator engaged ON OFF OFF ON e 3 8 334 TMS maxTmp Maximum TMS temperature occured in C 5 200 e 335 Heattype Heating typ _0 conventional heatin
11. the pump at standstill f 0 Hz Possibly Inform PFEIFFER VACUUM Service E021 Incorrect pump identification resistance S Inform PFEIFFER VACUUM Service E025 Error in the temperature monitoring TC S B Resetthe controller with mains ON OFF with the pump at standstill f 0 Hz Possibly Inform PFEIFFER VACUUM Service E026 Error of the temperatur sensor inside the TC S B Reset the controller with mains ON OFF with the pump at standstill f 0 Hz Possibly Inform PFEIFFER VACUUM Service E037 Error in the motor stages or control S B Possibly Inform PFEIFFER VACUUM Service E698 TC does not respond S B Check connection DCU TC Change the DCU Possibly Inform PFEIFFER VACUUM Service E9132 Error in the self test or when the pump S Error resets itself 5 times Then switching off via E006 Possibly set the op mode backing pump P 025 up to 2 starts up Check the free rotation of the pump Possibly Inform PFEIFFER VACUUM Service 1 only TC 600 TC750 This error messa 14 ge is not displayed via switch output 2 collective error message PFEIFFER E VACUUM 3 Error acknowledgement of this failure is only possible for 5 times S self test B operations 4 4 Warnings Warnings Wrnxxx or Warning Fxxx are only displayed and otherwise than is the case with errors do not cause components to be shut down Code Description Explanations F001 TMS heating start
12. up time elapsed TMS heating start up time elapsed F002 TMS limit temperature TMP temperature gt 100 C F003 TMS heating circuit temperature TMP temperature not within the range sensor 5 C and 120 C F007 Mains power failure Operations voltage has failed F039 Protective conductor warning TC Potential of the supply voltage in contact with the protective conductor PE F1102 Pressure gauge defective Pressure gauge disconnected during operations 1 only TC 600 750 2 Warning only in DCU WARNING Warning F039 must be eliminated without l delay otherwise there is a danger of an electric A shock 5 Supplementary Information Information with regard to Product Proper Use Installation Operation Errors Maintenance and Service Technical Data can be found in Operating Instructions PM 800 477 BE for Display And Operating Unit DCU which is included in this consignment The PFEIFFER VACUUM protocol for Serial Interface RS 485 is described in Operating Instructions PM 800 488 BE which is included in this consignment PFEIFFER E VACUUM 15 Notizen Notes PFEIFFERE VACUUM 17 Adressen Addresses Argentina ARO S A Av Belgrano 369 1092 Buenos Aires Phone 54 11 4331 5766 Fax 54 11 4331 3572 Email info aroline com ar
13. Australia Scitek Australia Pty Ltd Suite 1B 10 18 Cliff Street Milsons Point NSW 2061 Phone 61 2 9954 1925 Fax 61 2 9954 1939 Email contact scitek com au Austria Pfeiffer Vacuum Austria GmbH Diefenbachgasse 35 A 1150 Wien Phone 43 1 8941 704 Fax 43 1 8941 707 Service Hotline 43 1 8941704 Email office pfeiffer vacuum at Branch Office Czech Republic Pfeiffer Vacuum Austria GmbH Branch Prague Zvonarska 885 CZ 156 00 Praha 5 Phone 420 257 923 888 Fax 420 257 923 014 Email office pfeiffer vacuum cz Belgium Luxemburg Pfeiffer Vacuum Belgium N V S A Luxemburgstraat 5 B 9140 Temse Phone 32 3 710 5920 Fax 32 3 710 5929 Service Hotline 32 3 710 5922 Email Sales pfeiffer vacuum be Brazil Elmi Tec Assistencia T cnica e Representac o S C Ltda Rua Bernadino de Compos 551 Brooklin CEP 04620 002 S o Paulo SP Brasil Phone 55 11 5532 0740 Fax 55 11 5535 3598 Email elmi tec elmi tec com br Chile BERMAT S A Coyancura 2283 Oficina 601 Providencia P O Box 9781 Santiago Phone 56 2 231 8877 Fax 56 2 231 4294 Email bermat bermat cl Colombia Arotec Colombiana S A Carrera 16 No 36 95 Apartado 050 862 Santafe de Bogota Colombia Phone 57 1 288 7799 Fax 57 1 285 3604 Email arotec arotec net Denmark Pfeiffer Vacuum Scandinavia AB Vesterengen 2 DK 2630 Taastrup Phone 45 43 52 38 00 Fax 45 43 52 38 50 Ema
14. Betriebsanleitung Operating Instructions Pumping Operations With DCU E jew DCU PFEIFFER VACUUM O Turbomolecular Pumps PM 0547 BE P 0410 PFEIFFER VACUUM Index 2 1 2 2 2 3 3 1 3 2 3 3 3 4 3 5 3 6 3 7 3 8 3 9 3 10 3 11 3 12 3 13 3 14 3 15 3 16 3 17 3 18 3 19 3 20 3 21 3 N 2 Page Introduction To These Instruction 3 ParamBIBES nissan 4 Hc 4 Parameter Overview Numeric DU 4 Parameter Overview Operations Orientated 5 Pumping Operations 6 Ec 6 Switching On The DEU nennen 6 GGE TSO 6 Short Overview Operating 6 Switching On The Pumping Station rr 7 Operations with mains voltages 90 132V 7 Switching Stand By ON And OFF 7 Switching The Casing Heating ON And OFF 7 Sealing Gas Valve Operations sss 7 Operations With The Temperature Management System TMS sese rttnttentnnnas 8 Gas Type Dependent Operations a 8 Switching The Turbopump ON And OFF 9 Setting Rotation Speed Switch EOI 9 Rotation Speed Setting Mode 10 Pressure Measurement nenn 10 Backing Pump Operations 10 Switching Off The Pumping Station 11 Remote Control 11 Operating Modes With The Remote Control 11 Standard Remote D
15. ake ON OFF OFF ON OFF R W 0 j 023 Motor TMP E Motor Turbopump ON OFF OFF ON ON R W 0 Je 024 Conf Outl E Configuration output K1 0 switchpoint attained 1 TMS regulator 2 var switchp 0 2 0 R W 7 e 025 OpMode BkP G Operations mode backing pump 0 non stop 1 intermittent 2 switch on delayed 0 2 0 R W 7 e o 026 OpMode TMP Operations mode TMP O final rot speed op 1 rot speed setting m 0 1 0 R W 7 e le 027 Gas mode GJ Gas mode Ozheavy inert gases 1 other gases 0 1 0 R W 7 e e 028 Opmode rem G Remote operations mode standar 1 Remote priority 2 Remote error acknowl 0 2 0 R W 1 e e 029 OpMode Drv 3 Drive unit operations mode OFF max ON reduced power intake OFF ON OFF R W 0 e e 030 Vent mode G Venting mode _0 controlled venting 1 no venting 2 venting On 0 2 0 R W 7 e o 032 __ Conf Out4 Gl Configuration heating output 0 Heat TMS operations 1 sealing gas valve control 0 1 0 R W 7 035 Conf 1 01 G Configuration accessories ON Output 1 see chapter 3 19 0 3 0 R W 7 je 036 _ Conf 1 02 La Configuration accessories ON Output 2 see chapter 3 19 0 3 1 R W 7 D 055 _ Conf A01 a Configuration Analog Output 1 0 Rot Speed 1 Power 2 Current 0 2 0 R W 7 e e Status request only readable 8 8 Display Name Description min max fact setting RS 485 je 300 Unit remote controlled not choosable by R 0 e e 301 Oil defic Oil deficiency turbopump R 0 je 30 O Rotation sw
16. al 0 10 VDC 0 100 x fend 1 Power input signal 0 10 VDC 0 100 x Pmax 2 Current supply signal 0 10 VDC 0 100 x limax Information about the values fend Pmax Imax are readable in the operating instructions of the additional pump PFEIFFER VACUUM 13 4 Error Codes 4 1 General After the error is eliminated depress key CAUTION Errors Errxxx or Error Exxx always lead to gt The unit is again ready to operate shut down of the TMP the fan the heating and A me packing pump 4 2 Errors During Self Testing The following errors can occur during self testing performed when the DCU is switched on Display Error Possible Action Error E040 Hardware error external RAM defective Inform PFEIFFER VACUUM Service Error E042 Hardware error EPROM checksum Inform PFEIFFER VACUUM Service Error E043 Hardware error E2PROM erratum Inform PFEIFFER VACUUM Service Error E090 Insufficient RAM Inform PFEIFFER VACUUM Service DCU is connected to the wrong turbo electronics Connect correct turbo electronics Error E698 The connected drive unit does not respond Check communication lead between TC and DCU switch on TC 4 3 Errors During Operations During operat ions errors and warnings which occur are independent of the function of the service line always shown in the LC displ ay and can be additionally requested in parameter P 303 Error
17. ation speed After reaching 60 of speed the adjusted stand by rotation speed is displayed P 717 3 13 Pressure Measurement With the use of a high vacuum pressure gauge the pressure in the vacuum chamber is shown in the DCU display Basically an exactly pressure measurement is not possible by the DCU This is especially indi cated at linear working gauges in the lower pressure range In case of doubt an intended measuring unit should be used PLEASE NOTE The following pressure gauges are automatically recognized by the DCU Pressure Gauge Pmin mbar Pmax mbar TPR 2xx 5E 4 1E 3 PKR 2xx 5E 9 1E 3 ACR 261 CMR 261 APR 250 260 1E 1 1E 3 ACR 262 CMR 262 1E 2 1E 2 ACR 263 CMR 263 1E 3 1E 1 CMR 264 1E 4 1E0 Requesting the type of pressure gauge Select 794 Param set and set to 1 Select 738 gauge type Read off the pressure gauge type Some pressure gauges can only be recognized as a group e g ACR 261 ACR 263 and have to be set manually Requesting the actual pressure value Select 794 Param set and set to 1 Select 340 Pressure Read off the pressure value in mbar The following can be displayed depending on the pressure gauge type Display Example Appears when mbar no pressure gauge is connected 5E Ambar measuring range is non attained depending on the pressure gauge in us
18. backing pump is switched on and off in accordance with the power take up levels of the turbopump Differing power take up levels on an idling turbopump lead to differing pressure switchpoints on various pumps In addition on diaphragm pumps there are differing final pressures resul ting from the gas ballast equipment This means that ideal pressure switchpoint setting via the power take up level is not possible Nevertheless the advantage of intermittent operations can still be exploited by setting the pressure switch threshholds individually In this respect operations between 5 and 10 mbar are recommended A vacuum meter a DCU and a dosing valve are required in order to set the switching threshhold Instead of the vacuum meter a vacuum gauge can be connected directly to the DCU 10 PFEIFFER E VACUUM Setting the switching threshholds Select 340 Pressure Admit air into the fore vacuum line with the dosing valve while the pumping station is running until the fore vacuum pressure increases to 10 mbar Select 316 TMP power Read off the take up power at 10 mbar Select 711 BKP Pon Save the read off take up power as the upper switching threshhold Proceed analogically with the lower switching threshhold Take 5 mbar as the pressure value Select 710 BKP Poff Save the read off take up power as the lower switching threshhold Switch On Delayed select 794 Param set and se
19. ch venting procedure to ensure that any possible high vacuum valve is closed In a currentless state the venting valve is closed Where a malfunction error is involved venting will proceed in accordance with the selected venting mode Three types of venting modes can be selected in the extended parameter set Select 794 Param set and set to 1 TC 600 Allocate venting release via bridge PIN 1 and PIN 2 on the remote plug TC 100 Allocate venting release via bridge PIN 1 and PIN 3 respectively PIN 4 according to the output configuration TCK 100 Allocate venting release via bridge z28 and b4 respectively z4 according to the output configuration or Call up 012 Vent enab Select ON Call up 030 Vent mode Select 0 1 oder 2 Venting mode 0 automatic venting Automatic venting means that venting begins at a specific fre quency P 720 after the pumping station has been switched off or a mains power failure and continues for a specific dura tion P 721 In the event of a mains power failure the set duration value cannot be guaranteed Select 720 Vent frequ Set the venting frequency between 40 98 Select 721 Vent time Set the venting duration in sec between O and 3600 The venting valve is closed after mains power has been restored Venting mode 1 venting OFF The pump will not be vented Venting mode 2 v
20. ction to the Serial Interface RS 485 DCU 001 Switch on the external voltage supply to the TOC DCU 100 150 200 300 600 Switch on the DCU with switch S1 on the rear panel Self Testing After switching on the DCU performs a self test and also a test on the connected turbo electronics During the test a bar appears in the display in line 4 and this shows the progress of this procedure Display test All signs in the LC display are shown for a short time in black LEDs test During the whole testing procedure the red and the green LEDs illuminate DCU self test The DCU hardware tests itself Testing the connection to the turbo electronics The correct connection to the turbo electronics and their iden tity are checked Parameter test Information regarding the parameters is loaded Identification of the connected components The designa tion of the drive unit is displayed Providing there are no errors the DCU is now ready to operate 6 PFEIFFER E VACUUM 3 3 Short Overview Operation DCU PFEIFFER VACUUM o o euomoio el LA DD E 5 Selecting Parameters Selecting parameters with push button D backwards or forwards keeping the key depressed enables rapid scrolling Setting Parameters Select Parameter Depress key button D and a simultaneously till an arrow will appear in the second line from the top Arrow disappears if there is no setting after 8 sec With ke
21. different parameter sets which are distinguished by the number of parameters involved The respective parameter set is selected via P 794 Param set The parametering Is always active Parameter Set Comment Setting P 794 Param set Basic parameter set Only parameters sorted according 0 to number and parameter type Extended parameter set Complete parameter set sorted 1 according to number and parameter type Parameters which do not appear in the display can neverthe less be operated via the serial interface PFEIFFER VACUUM 3 S e x a o X 2 2 Parameter Overview numerical DCU eee E Setting Commands readable and writable S Display Name Description min max fact setting RS 4851 eje 001 Heating Pre selection heating ON OFF OFF ON OFF R W 0 e e 002 Standby la Standby ON OFF OFF ON OFF R W 0 e e 004 RUTime ctr G Run up time monitoring ON OFF OFF ON ON R W 0 je je 009 Error ackn Error acknowledgement Ww 0 o o 010 Pump stat E Pumping station ON OFF OFF ON ON R W 0 e le 012 Ventenab X Venting enable ON OFF OFF ON ON R W 0 e o 013 Brake enab a Pre selection br
22. e gt 1E3mbar measuring range is exceeded depending on the pressure gauge in use 6 3E 9mbar valid pressure measurement range idfam mbar pressure gauge type not yet identified TPR250 pressure gauge TPR 250 connected ACR pressure gauge ACR 261 ACR 262 oder ACR 263 connected but not yet selected in this case the display id fam P 340 is shown Error error in the pressure gauge PFEIFFER VACUUM 9 3 14 Backing Pump Operations The operating modes non stop operations interval operati ons or Switch ON delayed can be selected depending on the selected backing pump and the vacuum application Interval operations can be selected for example to prolong the working life of the diaphragms in diaphragm vacuum pumps The backing pump is switched on and off depending on the power take up of the turbopump Rotary vane pumps must not be used for CAUTION internal operations A Non stop operations backing pump Select 794 Param set and set to 1 Select 025 OpMode BkP and set to 0 for non stop operations Interval operations backing pump Select 794 Param set and set to 1 Select 025 OpMode BkP and set to 1 for interval operations For intermittent operations involving the backing pump either a diaphragm pump with integrated semiconductor relay or a relay box with semiconductor relay should be used The
23. e adjusted stand by rotation speed is displayed P 717 3 6 Switching The Casing Heating ON OFF The TC 600 automatically recognizes a connected casing heating and sets according to the parameters P 355 Heat type to 0 If no heating is connected 1 is displayed To control the casing heating on the TC 100 TCK 100 it is necessary to select the respective accessory input and output see section 3 21 Select 794 Param Set and set to 1 Select 335 Heat type and check setting to 0 Select 001 Heating Select OFF or ON The casing heating is switched on and off dependent on the rotation speed switchpoint Undershooting the rotation speed switchpoint causes the heating to be switched off The status ofthe casing heating can be seen on the LC display on the DCU The function casing heating can be called up either via the serial interface or the remote control 3 7 Sealing Gas Valve Control Operation of the heating output Heat TMS may be configured through P 032 At this output also a sealing gas valve may be driven by a venting valve Select 794 Param Set and set to 1 Select 032 Conf Out4 and set to 1 A valve connected to the connection Heat TMS can be swit ched on at any time independently only through P 001 or the corresponding control input Heating ON at the remote connector Select 001 Heating Choose OFF or
24. e adjustment Deactivated drive In the case of a deactivated drive P 023 set to DEEI the switch point output is driven independently of the setting for the switch point 2 P 719 As soon as the speed drops below the adjusted switch point the switch output is de energized The setting may be selected between 5 and 97 of full speed Select 719 Switch pnt2 Adjust the switch point in the range between 5 97 Confirm the adjustment 3 12 Rotation Speed Setting Mode The rotation speed setting mode is selected if the turbopump volume flow rate should be reduced The pressure ratio of the pump reduces exponentially with the rotation speed Rotation speed standard in rotation speed setting mode Select 794 Param set and set to 1 Select 707 TMProt set Select the rotation speed in the range from 20 100 Operating mode turbopump Call up 026 OpMode TMP Select 1 for rotation speed setting mode The stand by mode is ineffective in rotation speed setting mode The rotation speed switch point has been fixed at 20 The rotation speed setting mode can be set via the remote control or the serial interface PLEASE NOTE Pumps with integrated oil pumps are first accelerated in rotation speed setting mode to 60 of their rated rotation speed also where the set rotation speed is lt 60 xfnom During this time the final rotation speed ist shown via P 308 set rot
25. enting ON When the pumping station is switched off in cases of malfunction and in the event of a power failure after a time lag of 6 seconds venting takes place If a high vacuum valve is installed it can be closed in the meantime Where a mains power failure is involved venting will only take place as long as the pump is able to supply power to the venting valve After power has been restored the venting valve stays open It closes when the pumping station is switched on 3 18 Operations Via Serial Interface RS 485 The group address of the TC 600 is 960 of the TC 100 TCK 100 is 950 All units connected to the bus must have differing seri al interface addresses P 797 The connection of an RS 232 for example a PC is possible via Level Converter PM 051 054 X The description ofthe data communication PFEIFFER VACUUM protocol can be found in Operating Instructions PM 800 488 BN 3 19 Emergency Power Operations If during turbopump operations the power fails warning F007 the pump rotor acts as a generator and takes over the supply of power for the electronics In addition a power failure is signalled by flashing green and red LEDs on the front panel 50 ON 50 OFF At a certain rotation speed depen ding on the pump the pump energy is no longer sufficient and communication between the DCU and the TC is interrup ted and error message E698 appears 3 20 Brake Mode only TC 600 In order to be able to m
26. equency asa of the final rotation speed of the TMP 40 98 50 R W 7 e e 721 Venttime PI Ventingtime ins 6 3600 3600 R W 1 e le 738 _ Gaugetype Vacuum pressure gauge type 3 R W 4 794 Param set G Parameter set 0 basic parameter set 1 extended parameter set 3 0 1 0 R W 7 795 Servicelin E insert service line 795 R W 7 79 _ Address Unit address 1 255 1 R W 1 e e Function can only be affected via remote plug X16 1 R Parameter readable via interface W parameter writeable via interface A number parameter in bold type is a basic parameter set 2 See Interface instruction Pfeiffer Protocol RS 232 485 PM 800 488 BN a Parameter setting is saved internal and activated after re switching on 3 Parameter only for DCU 4 TC 600 750 5 TC 100 TCK 100 4 PFEIFFER E VACUUM 2 3 Parameter Overview Operations Oriented DCU _Display Name Description min max fact set RS485 Sect Run up time and rotation speed switchpoint 004 RUTime ctr Run up time monitoring O OFF 1 0N OFF ON ON e 3 4 700 TMP RUTime maximum run up time in mins 1 120 15 8 e 3 4 Switch pnt Rotation speed switchpoint in 34 Switch pnt2 Rotation speed switchpoint2 in 3 11 General operating information 315 TMP finspd Final
27. g 1 TMS 2 cooling 0 2 e 3 6 3 8 704 TMSheatset TMS heating temperature set value in C 30 90 40 e 3 8 Vent valve controlling turbopump 012 Vent enab Venting enable ON OFF OFF ON ON e 030 Vent mode Venting mode 0 automatic venting 1 do not vent 2 venting On 0 2 0 e 3 15 720 Vent frequ Venting frequency as a of the final rotation speed of the TMP e 3 15 721 Vent time Venting time ins e 3 15 Pumping station controlling 025 OpMode BkP Operations mode backing pump 0 non stop 1 intermittent 2 switch on delayed 0 2 0 e 3 12 035 Conf 1 01 Configuration Accessories ON Output 1 0 3 0 e 3 19 036 Conf 1 02 Configuration Accessories ON Output 2 0 3 e 340 Pressure Actual pressure value in mbar 1E 1 e Gaugetype Vacuum pressure gauge type e 3 11 BKP Poff Pmin for backing pump interval operations W 711 BKP Pon Pmax for backing pump interval operations_ W 0 1000 0 e Others 013 Brake enab Preselection Brake ON OFF OFF ON OFF e 024 Conf Outi Configuration output K1 O switchpoint attained 1 TMS regulator 0 1 0 e 3 8 028 OpMode rem Remote operations mode 0 standard 1 Remote priority 2 Remote error acknowl 0 2 0 e 3 14 055 Conf A01 Configuration Analogue Output 1 0 2 0 3 18 303 Error code Actual error code no Err Erron oder Wrnxxx e 312 Drv Softw Software version electronic drive unit e 351 Ctr Softw Software version Display and Control Unit 794 Param set Paramete
28. il sales pfeiffer vacuum dk France eiffer Vacuum France SAS 45 rue Senouque BP 139 78531 BUC Cedex Phone 33 0 1 30 83 04 00 ax 33 0 1 30 83 04 04 Email info pfeiffer vacuum fr qno e ermany Pfeiffer Vacuum GmbH Berliner Strasse 43 D 35614 Asslar Phone 449 6441 802 400 Fax 49 6441 802 399 Service Hotline 49 6441 802 333 Email Info pfeiffer vacuum de 04 10 Great Britain Pfeiffer Vacuum Ltd 2 4 Cromwell Business Centre Howard Way Interchange Park Newport Pagnell MK16 90S United Kingdom Phone 44 1 908 500615 Fax 44 1 908 500616 Email sales pfeiffer vacuum co ukGreece Analytical Instruments S A 1 Mantzarou St GR 15451 Athens Phone 30 210 674 8973 7 Fax 30 210 674 8978 Email contact analytical gr Hong Kong Pfeiffer Vacuum Asia Ltd c o Hakuto Enterprises Ltd 8th Floor World Trade Center No 280 Gloucester Road Causeway Bay Hong Kong Phone 852 2578 4921 Fax 852 2807 2498 Email sales pfeiffer vacuum com hk India Pfeiffer Vacuum India Ltd 25 5 Nicholson Road Tarbund Secunderabad 500 009 Phone 91 40 2775 0014 Fax 91 40 2775 7774 Email pfeiffer vsnl net Israel ODEM Scientific Applications Ltd 9 Hamazmera St P O B 2001 Nes Ziona Phone 972 8 938 0333 Fax 972 8 938 0334 Email odemltd isdn net il Italy Pfeiffer Vacuum Italia S p a Via San Martino 44 1 20017 RHO Milano Phone 39 2 93 99 051 Fax
29. itch point attained R 0 303 Error code Actualerrorcode no Err Errxxx or Wrnxxx R 4 e e 304 i Over temperature Electronic drive unit R 0 e o 305 i Over temperature turbopump R 0 e e 300 Set rotation speed attained R 0 e o 37 O Turbopump accelerates R 0 e e 308 Set rotspd Set rotation speed TMP in Hz 0 2000 R 1 e jo 309 Actrotspd Actual rotation speed TMP in Hz 0 2000 R 1 e je 310 TMP I Mot Motor current TMP DA 0 15 0 R 2 e e 311 TMP Op hrs PI Operating hours TMP inh 0 99999 R 1 je o 312 _ Drv Softw Software version electronic drive unit R 4 e je 313 TMP DClink Motor voltage TMP D 0 200 0 R 2 e e 314 Drv Op hrs G Operating hours electronic drive unit 0 99999 R 1 e Je 315 TMP finspd Final rotation speed TMP in Hz 0 2000 R 1 e Je 316 TMP power Motor power TMP in W 0 1000 R 1 e e 319 Cycl count Gl Cycle counter 0 99999 R 1 e e 331 TMS ActTmp Heating TMS actual value in C 5 200 R 1 e 333 __ TMS stead TMS regulator engaged ON OFF OFF ON R 0 le 334 TMS maxTmp Maximum TMS temperature occured in C 5 200 R 1 e 335 Heattype Heating type O conventional heating 1 TMS 0 1 R 7 e 340 Pressure Actual pressure value in mbar 3 1E 10 1E3 R 3 349 Drv Name Unit type electronic drive unit R 4 e je 350 Ctr Name Unit type operating and display unit 3 R 4 351 _ Ctr Softw Software version Display and Control Unit DCU 3 R 4 360 Pa
30. onitoring of PFEIFFER vacuum pumps allthe necessary product information but should anything be missing please get in touch with your local PFEIFFER These operating instructions describe the operations in VACUUM representatives or telephone the hotline number respect of PFEIFFER VACUUM turbomolecular pumps This which you will find on the back cover ofthese operating manual is a component of the complete operating manual for instructions your modular turbopump system Depending on the configura The respective documents are also available in PDF file tion of your system other operating instructions are included format via the homepage www pfeiffer vacuum de in your delivery consignment please see the table The following operating instructions are available for the TC pump program Product Definition Operating Manual Number Turbomolecular Drag Pump Definition of the turbopump dependent on the type of pump Pumping operations with the DCU turbopumps Operating definitions parameters PM 800 547 BE DCU 001 100 600 Description of the control unit installation PM 800 477 BE TPS 100 200 300 600 Description of the power pack PM 800 521 BE Casing heating turbopump Description of the casing heating PM 800 542 BE Air cooling turbopump Description of the air cooling system PM 800 543 BE Water cooling turbopump Description of the water cooling system PM 800 546 BE Backing Pump relay box
31. ore quickly brake the pump in rotation speed setting mode some pumps allow the connection of an external braking system accessory on request Activating brake mode Call up 013 Brake enab select ON De activating brake mode Call up 013 Brake enab select OFF CAUTION Malfunction E002 results if the brake mode is activated and there is no connected braking N system 3 21 Configuration Of The Accessory Input Output only on the TC 100 with TCS 010 or TCK 100 The following pumping station components can be connected Air cooling venting valve heating backing pump In this respect it is necessary to configure the accessory input output in relation to the function optionally via P 035 or P 036 Select 035 Conf 1 01 Select function as required 0 air cooling set by factory 1 Venting valve 2 Heating 3 Backing pump Select 036 Conf 1 02 Select function as required 0 air cooling 1 Venting valve set by factory 2 Heating 3 Backing pump 3 22 Configuration Of The Analog Output An analog signal 0 10 VDC with the following information can be taken from the TC or TCK 100 Rotation speed ofthe turbopump Power input Current input In this respect itis necessary to configure the analog input output in relation to the function Select 055 Conf A01 Select function 0 1 oder 2 0 Rotation speed sign
32. orrau 11 Remote Control Priority 11 Remote Control malfunction acknowledgement 12 Venting The TORO a u 12 Operations Via Serial Interface RS 485 Emergency Power Operations Brake Mode only with TC 600 aa 13 Configuration Of The Accessories Input And Output only TC IDU 13 Configuration of The Analog Output only TC 100 13 Used Abbreviations DCU TC TCK 2 Operation and Display Unit Electronic Drive Unit Electronic Drive Unit Print Modul PFEIFFER E VACUUM Page 4 Error EAEE 14 41 General nik 14 42 Errors During ZG TGG 14 43 Errors During Operations With The TC 600 14 AA NOTE ruaren parek rar 15 5 Supplementary Information 15 Pictogram Definitions Warning WARNING f Danger of an electric shock Warning WARNING Danger of personal injury Caution CAUTION Danger of damage to the unit or system Please Note Attention to particularly important information on the product handling the product or to a particular part of the documentation PLEASE NOTE lt E EI e Please note Current operating instructions are also available via www pfeiffer vacuum net under infoservice 1 Introduction To These Instructions The Display Control Unit DCU is a universal operating unit for We make every effort to ensure that you are in possession of the control and m
33. r set 0 basic parameter set 1 extended parameter set 0 1 0 e 3 4 3 15 795 Servicelin insert serviceline 795 e PM477BD 797 Address Unit address 1 255 1 e Table of failures 360 Past Err1 Error storage Position 1 last error occuring e 4 3 361 Error storage Position 2 362 Error storage Position 3 363 Error storage Position 4 364 Error storage Position 5 365 Error storage Position 6 366 Error storage Position 7 367 Error storage Position 8 368 Error storage Position 9 3 369 Past Err10 Error storage Position 10 e 4 3 only for TC 600 750 only for TC 100 TCK 100 Function can only be affected via remote plug X16 e Function can be called by RS 485 PFEIFFERE VACUUM 5 3 Pumping Operations 3 1 General On delivery the pre set basic parameter sets contain the following parameters Setting Command P 0xx Status Request P 3xx readable only Set Value Standard P 7xx 001 Heating ON OFF 308 Set rotation speed TMP in Hz 700 maximale Anlaufzeit in min 002 Stand by ON OFF 309 Actual rotation speed TMP in Hz 701 Schaltpunkt in 310 TMP Motor current in A 794 Parametersatz 311 operating hours TMP in h On delivery parameter P 794 Param Set has been preset to the value 0 basic parameter set By setting the value to 1 you access the extended parameter set 3 2 Switching 0n The DCU Make the conne
34. s reset Operations with mains voltages 90 132V In case of this rated voltage the output power of the TPS power supply or DCU Control unit is reduced by the rate of 20 CAUTION A Select 794 Param Set and set to 1 Select 029 OpMode drv Set to 1 reduced power take up TC600 Therefore the power input of the pump must be adapted with the DCU and via the parameter P 029 If the TC is not set to 80 the error code E001 or F007 is displayed 3 5 Switching Stand By ON OFF Select 002 Standby Select OFF oder ON Stand by mode is the operation of the pump at 66 of its final rotation speed factory setting This value is changeable Select 717 Stbyrotset Adjust Standby rotation speed in the range of 20 100 Stand by is recommended during operating breaks The func tion can also be selected via the remote control or the serial interface During activ stand by the rotation speed set point P 707 refers always to the adjusted stand by rotation speed P 717 Stand by mode is not possible in rotation speed setting mode please see section 3 12 At stand by mode pumps with integrated oil pump are first accelerated to 60 of their nominal rotation speed even if the set stand by rotation speed is lt 60 x fhom During this time the final rotation speed ist shown via P 308 set rotation speed After reaching 60 of speed th
35. st Eri Gl Error storage Position 1 last error occuring R 4 e e 361 Past Err2 Error storage Position 2 R 4 e e 362 Past Err3 Gl Error storage Position 3 R 4 363 Past Err4 Error storage Position 4 R 4 364 Past Err5 G Error storage Position 5 R 4 e e 365 _ Past Err6 la Error storage Position 6 R 4 je e 366 Past Err7 Error storage Position 7 R 4 e 367 Past Err8 G Error storage Position 8 R 4 e e 368 Past Err9 Error storage Position 9 R 4 e e 369 Past Err10 Gl Error storage Position 10 R 4 e e Set values readable and writable amp 8 Display Name Description min max fact setting RS485 e Je 700 TMP RUTime Zi maximum run up time in mins 1 120 154 85 R W 1 e je 701 Switch pnt GT Rotation speed switchpoint in 50 97 80 R W 1 e le 704__ TMSheatset 3 TMS heating temperature set value __in C 30 90 40 R W 1 e 707 TMProt set E Rotation speed set value in rotation speed setting operations in 96 20 0 100 0 50 0 R W 2 je e 708 DrvPwr set la Drive power set in 10 100 80 R W 7 e e 710 BKE Poff E Pmin for backing pump interval operations W 0 1000 0 R W 1 je le 71 _ BKP Pon Ga Pmax for backing pump interval operations w 0 1000 0 R W 1 e je 717 Stbyrotset a Rotation speed set value at standby operations 96 20 100 66 R W 2 je je 719 _ Switch pnt2 E Rotation speed switchpoint2 in 5 97 20 R W 1 e le 720__ Vent frequ E Venting fr
36. switch output 1 only TC 600 The switch output 1 is normally set to high on the rotation speed switchpoint being exceeded The function of switch output 1 can be re programmed so that switch output 1 is high only when the TMS set temperature is attained Select 024 Conf Out1 and set to 1 This information can be used for example as an input signal for a higher ordered process control 8 PFEIFFERE VACUUM 3 9 Gas Type Dependent Operations To protect the rotors against overheating the maximum power on some turbopumps is limited to the nominal rotation speed Normally with a lower pre set rotation speed more power can be provided This frequency power curve is dependent on the type of gas Selecting the gas type Select 794 Param Set and set tof 1 Select 027 gas mode Select 0 for heavy noble gases and 1 for other gases Gas type curve Power Run up D C Gas mode 0 B A Gas mode 1 Frequency fnom The rotation speed is reduced when the gas dependent maxi mum power is exceeded until there is equilibrium between the permissible power and the gas friction To avoid rotation speed fluctuations it is recommended to set in rotation speed setting mode the equilibrium frequency or a somewhat lower frequency 3 10 Switching The Turbopump ON OFF only TC 600 750 During pumping station operations pumping station ON the turbopump can be s
37. t to 1 select 025 OpMode BkP choose 2 for delayed switch on When simultaneously switching on the turbopump and the backing pump the gas flow could cause a failure with the error message E913 during the starting phase In order to prevent this it is recommended to first start the turbopump and then the backing pump or open a driven fore vacuum valve In the operating mode delayed switch on after activation of the parameter Pump start P 010 and Motor TMP P 023 the turbopump is started first and as soon as a speed of 6 Hz has been exceeded the backing pump controlled via the TC is then switched on Should the backing pump or a fore vacuum valve be driven by a higher level system controller it is recommended to pro ceed in the same way 3 15 Switching Off The Pumping Station Depress 9 onthe front panel As an alternative the pumping station can be switched off via the remote control the serial interface or P 010 3 16 Remote Control The following functions can be activated via the remote control please also refer to the operating instructions for the respective turbopump TC 600 PIN Function Venting enable ON OFF Turbopump ON OFF remote priority ON OFF Pumping Station ON OFF Heating ON OFF Error acknowledgement Stand by ON OFF Rotation speed setting mode via pulse width modulation PWM rd EO jor w N
38. witched on and off separately Select 023 Motor TMP Select OFF or ON as required 3 11 Adjusting Rotation Speed Switchpoint The speed switch point may be used to generate the message Pump ready As soon as the speed exceeds respectively drops below the speed switch point 1 P 701 Switch pnt the switched output is energized or de energized The factory default setting is 80 Simple Switch Point Adjustment upper value only Select 701 Switch pnt Adjust the switch point in the range between 50 97 Confirm the adjustment Depending on the setting of the parameter P 024 Conf Outi the lower and the upper speed switch point may be influenced simultaneously The factory default setting is 20 respectively 8096 of the final rotation speed Double switch point adjustment lower and upper value Select 024 Conf Outl Set the parameter to 2 Confirm the adjustment The speed switch point can now be varied through two further parameters Activated drive In the case of an activated drive P 023 set to ON the switch point output is driven independently of the setting for the switch point 1 P 701 As soon as the speed exceeds the adjusted switch point the switch point output is energized The setting may be selected between 50 and 97 of the final rotation speed Select 701 Switch pnt Adjust the switch point in the range between 50 97 Confirm th
39. y button D reduce the value and with key button a increase the value Depress key button D and a simultaneously till the arrow disappears The Parameter is set Error acknowledgement Depress key button EO for a duration of min 2 seconds For amore comprehensive description please refer to the operating instructions for the DCU PM 800 477 BN 3 4 Switching The Pumping Station ON OFF Please Note Before switching on the pumping station the set value P 7xx and setting commands P 0xx should be checked for their suitability with regard to the selected pump and pumping process Remove the remote plug on the TC only TC 600 Switch on switch S1 on the mains power unit Select 794 Param Set and set to 1 Check the relevant set value standards and setting commands Section 2 2 Select 023 motor TMP and set to ON only TC 600 Switch on the pumping station with key onthe DCU or via the serial interface remote control or Parameter P 010 Pump stat on the DCU Start up of the turbopump After successful completion of the self test the turbopump starts up and the backing pump is driven The rotation speed switchpoint P 701 must be attained within the pre set start up time P 700 Both parameters can be matched to the process If an error code is displayed please refer to the error code table in section 4 When the error is acknowledged the start up time i
Download Pdf Manuals
Related Search