TURBOVAC 151, 151 C Operating Instructions
Contents
1. The small flange connector for the high vacuum flange at the TURBOVAC Warning 50 is not strong enough to keep the pump from rotating if it should sud denly seize Rotation of the pump can cause leaks in the forevacuum line Secure the pump additionally to prevent rotation in case it should suddenly seize In most applications the TURBOVAC will be flanged direct to the high vacuum flange for the system The design of the lubricating system makes it possible to mount and run the TURBOVAC in any desired attitude It is not necessary to support the pump If there is a danger that dust could pass from the vacuum chamber into the TURBOVAC install a fine mesh filter between the vacuum chamber and the Fine mesh filter TURBOVAC The TURBOVAC is precision balanced and is generally operated without a vibration damper A special design vibration damper is available for mounting Vibration damper at the TURBOVAC high vacuum flange to decouple extremely sensitive equip ment and to prevent external vibrations from being transferred to the TURBO VAC If the TURBOVAC 1000 C are flanged via a vibration damper secure it in addition at the base flange GA05118 1502 12 2006 Oerlikon Leybold Vacuum 17 Installation oy aan KW SN g ring N Fig 5 Using ISO K flanges Design with ISO K clamp flange Fit the O ring at the centering ring The O ring should be flat and even it must not be twisted Then add the outer r2. Repair or replace the forevacuum pump Check the airing valve and replace if indicated Air the TURBOVAC correctly see Section 4 6 Install a roughing line or pre pump for a shorter period of time or install a sorption trap Regenerate or replace the sorption trap Disposal 7 Waste Disposal The equipment may have been contaminated by the process or by environ Contamination mental influences In this case the equipment must be decontaminated in accordance with the relevant regulations We offer this service at fixed prices Further details are available on request Warning Contaminated parts can be detrimental to health and environment Before beginning with any work first find out whether any parts are contamina ted Adhere to the relevant regulations and take the necessary precauti ons when handling contaminated parts Separate clean components according to their materials and dispose of these accordingly We offer this service Further details are available on request When sending us any equipment observe the regulations given in Section 5 2 Oerlikon Leybold Vacuum service GA05118 1502 12 2006 Oerlikon Leybold Vacuum 33 cerlikon leybold vacuum EC Manufacturer s Declaration in the spirit of Appendix Ilb to the 98 37 EG Machinery Guidelines We Oerlikon Leybold Vacuum GmbH herewith declare that operation of the incomplete machine defined below is not permissible until it has been determined
3. Oerlikon Leybold Vacuum GmbH Sales Area South Southwest Branch Office Munic Sendlinger Strasse 7 D 80331 Munic Phone 49 0 89 357 33 9 10 Fax 49 0 89 357 33 9 33 sales vacuum mn oerlikon com service vacuum mn Goerlikon com Oerlikon Leybold Vacuum GmbH Sales Area West amp Benelux Bonner Strasse 498 D 50968 Cologne Phone 49 0 221 347 1270 Fax 49 0 221 347 1291 sales vacuum kn oerlikon com Oerlikon Leybold Vacuum GmbH Service Competence Center Emil Hoffmann Strasse 43 D 50996 Cologne Suerth Phone 49 0 221 347 1439 Fax 49 0 221 347 1945 service vacuum kn oerlikon com Oerlikon Leybold Vacuum GmbH Mobil Customer Service Emil Hoffmann Strasse 43 D 50996 Cologne Suerth Phone 49 0 221 347 1765 Fax 49 0 221 347 1944 service vacuum kn oerlikon com Oerlikon Leybold Vacuum GmbH Dresden Zur Wetterwarte 50 Haus 304 D 01109 Dresden Service Phone 49 0 351 88 55 00 Fax 49 0 351 88 55 041 info vacuum dr oerlikon com 12 06 Oerlikon 5700 Mellon Road Export PA 15632 LV_08882_2006 Europe Belgium Oerlikon Leybold Vacuum Nederland B V Belgisch bijkantoor Leuvensesteenweg 542 9A B 1930 Zaventem Sales Phone 32 2 711 00 83 Fax 82 2 720 83 38 sales vacuum zv oerlikon com Service Phone 32 2 711 00 82 Fax 82 2 720 83 38 service vacuum zv oerlikon com France Oerlikon Leybold Vacuum France S A 7 Avenue du Qu bec Z A Courtaboeuf 1 B P
4. TURBOVAC 35 LS 35 LS2 High vacuum port DN 40 KF 40 KF Pumping speed He high vacuum gl 25 32 He interstage vacuum gl 4 5 5 5 Max gas throughput in permanent operation with water cooling at 10 2 mbar He mbar s 0 25 0 25 Max idle compression He high vacuum 1 5 108 2 104 He interstage vacuum 70 600 Max forevacuum pressure for He mbar 1 6 Forevacuum port DN 16 KF 16 KF Recommended forevacuum pump TRIVAC D 2 5 E Diaphragm pump Run up time to 9596 nominal speed min 2 Weight approx kg 2 Max power consumption at ultimate pressure W 45 15 Max ambient temperature at operation C 45 High vacuum port Interstage vacuum port Forevacuum port e Electrical connection TURBOVAC 35 LS and 35 LS2 GA05118_1502 12 2006 Oerlikon Leybold Vacuum 7 Description High vacuum port DN Pump housing Pumping speed at 103 mbar N l s He s1 ze Hs l s Max gas throughput in permanent operation with water cooling at 10 2 mbar No mbar s1 He mbar s Hs mbar I s Max idle compression N Ultimate pressure with TRIVAC D 2 5 E mbar Max forevacuum pressure for N mbar Forevacuum port DN Recommended forevacuum pump Run up time to 9596 nominal speed min Cooling water connection hose nozzle for Part No 854 08 mm Weight approx kg Max p
5. 70 C 158 F as to represent a burn hazard Shield the hot components against contact Note the symbols on the pump pointing to the hazards and in the case of a hot pump wear the required protective clothing Hazards caused by materials and substances Warning The forevacuum line must be tight Hazardous gases could escape from leaks or the gases being pumped i s could react with air or humidity e Take the appropriate precautionary measures prior to opening the intake or discharge connection if the pump has previously handled hazardous gases If necessary use gloves a respirator and or protective clothing and work under an exhaust hood Risk of explosion The standard version of the pump is not suited for operation in explosion hazard areas Contact us before planning to use the pump under such circumstances Contaminated parts can be detrimental to health and environment Before beginning with any work first find out whether any parts are contamina ted Adhere to the relevant regulations and take the necessary precauti ons when handling contaminated parts 4 GA05118 1502 12 2006 Oerlikon Leybold Vacuum Safety Information Failure to observe the following precautions could result in damage to the pump Unauthorized opening of the pump or modifications of the mechanical or Caution electrical components of the pump void the warranty The pump must only be opened by such persons who have been au
6. 42 F 91942 Courtaboeuf Cedex Sales and Service Phone 33 1 69 82 48 00 Fax 438 1 69 07 57 38 sales vacuum or oerlikon com Oerlikon Leybold Vacuum France S A Valence Factory 640 Rue A Berg s B P 107 F 26501 Bourg l s Valence Cedex Phone 33 4 75 82 33 00 Fax 83 4 75 82 92 69 info vacuum vc oerlikon com Great Britain Oerlikon Leybold Vacuum UK LTD Unit 2 Silverglade Business Park Leatherhead Road UK Chessington Surrey KT9 2QL Sales Phone 44 13 7273 7300 Fax 44 18 7273 7301 sales vacuum In oerlikon com Service Phone 44 20 8971 7030 Fax 44 20 8971 7003 service vacuum In oerlikon com Italy Oerlikon Leybold Vacuum Italia S p A 8 Via Trasimeno 1 20128 Milano Sales Phone 39 02 27 22 31 Fax 89 02 27 20 96 41 sales vacuum mi oerlikon com Service Phone 39 02 27 22 31 Fax 39 02 27 22 32 17 service vacuum mi oerlikon com Oerlikon Leybold Vacuum Italia S p A Field Service Base Z Le Capanne 1 05021 Acquasparta TR Phone 39 0744 93 03 93 Fax 439 0744 94 42 87 service vacuum miQoerlikon com Leybold Vacuum USA Inc Phone 1 724 327 5700 Fax 1 724 825 8577 info vacuum exQoerlikon com Netherlands Oerlikon Leybold Vacuum Nederland B V Computerweg 7 NL 3542 DP Utrecht Sales and Service Phone 31 346 58 39 99 Fax 31 346 58 39 90 sales vacuum ut oerlikon com service vacuum ut oerlikon com Spain Oerlikon Leybold Vacuum S
7. 680 480 55 100 High vacuum port Description TURBOVAC 361 361 C 100 ISO K e 100 CF 160 ISO K e 160 CF 345 400 350 340 380 340 370 7 5 7 5 1 109 6 104 3 108 lt 1 101 5 102 5 107 D16BtoD25B 2 25 KF 10 KF 10 12 680 480 55 100 GA05118 1502 12 2006 O Oerlikon Leybold Vacuum 9 Description High vacuum port DN TURBOVAC 600 C 160 ISO K e 160 CF Pumping speed No EN 560 He I sg 600 H I gt 570 Max gas throughput N mbar I s 4 Ar mbar s 4 Compression No gt 10 He 2 104 Ho 1 1 103 Ultimate pressure mbar 10710 Speed rpm 36 000 Run up time freq converter approx min 4 Max Inlet pressure permanent with water cooling mbar 1 10 Max forevacuum pressure for N mbar 5 507 Recommended forevacuum pump at standard operation TRIVAC D 25B 40B at purge gas operation TRIVAC 40 B Run up time to 9596 nominal speed min 3 Forevacuum port DN 40 KF Purge gas vent port DN 10 KF Cooling water connection hose nozzle mm 10 Weight approx kg 12 Max power consumption at ultimate pressure VA 680 480 Max ambient temperature at operation C 55 Max bakeout temperature at CF flange C 100 1 As of 1995 in some cases 16 mm KF 2 11 mm with 40 mm type KF forevacuum port 10 mm with 63 mm type ISO K forevacuum port 10 GA05118_1502 12 2006 Oerlikon Leybold Vacuum TURBOVAC 1000 C 160 ISO K CF 200 CF 6 ANSI 850 1100 lt 10710 36 000 TRIVAC D 40 B
8. The pump can become so hot during operation gt 70 C 158 F as to represent a burn hazard Shield the hot components against contact The pump running noise is below 70 dB A no noise insulating measures are required GA05118 1502 12 2006 Oerlikon Leybold Vacuum 19 Installation Forevacuum pump Anti suckback valve Sorption trap Warning 3 4 Forevacuum connection A suitable forevacuum pump is to be connected to the forevacuum connec tion flange Fig 6 shows schematically the design of a pump system incorporating a TURBOVAC turbomolecular pump and a TRIVAC forevacuum pump with anti suckback valve When using a forevacuum pump not having an anti suckback valve a sepa rate safety valve should be provided The safety valve keeps oil from back streaming from the forevacuum pump and into the TURBOVAC when the system is not running We recommend installing a sorption trap in the forevacuum line to insure that the forevacuum chamber in the TURBOVAC remains largely free of oil vapors during operation as well Install a roughing pump line to achieve the shortest possible cycling times Be sure that there is sufficient vibration decoupling between the TURBOVAC and the forevacuum pump The forevacuum line must be tight Hazardous gases could escape from leaks or the gases being pumped could react with air or humidity 3 5 Connecting the cooling Air cooling The air cooling unit is available as a supp
9. good working order Wi ifa water flow monitoring device is connected is it functioning properly Check the water flow monitoring device by jumping its terminals and star ting the TURBOVAC Wi Is the forevacuum pressure sufficient E Is the vacuum chamber free of leaks Observe also the troubleshooting instructions for the TURBOTRONIK Warning GA05118 1502 12 2006 Oerlikon Leybold Vacuum 31 Troubleshooting Malfunction TURBOVAC does not start TURBOVAC generates loud running noises and vibrations The TURBOVAC does not achieve ultimate pressure TURBOVAC overheats malfunction indication at the TURBOTRONIK The TURBOVAC or the vacuum chamber is con taminated with oil Possible cause Motor connection cable not attached is loose or is defective Pump has seized Rotor is out of balance Bearing is defective Pump running within the natural frequency range of the system causing resonance Measurement device is defective Measurement gauges are soiled Leak at the system lines or pump Minor grime collection at the pump The pump is oily Forevacuum pump with insufficient pum ping speed or ultimate pressure which is too high Leak at the power cord passage port TURBOVAC is rotating in the wrong direc tion Forevacuum pressure too high Gas volume too great leak in the system Ventilation unit blocked Ambient temperature is too high Cooling water is lac
10. staff the leading European manufacturers of vacuum pumps strictly recommend to follow the installation instructions as given in this manual The high vacuum flange must be securely attached to the vacuum cham ber If the pump were to become blocked insufficient attachment could cause the pump to break away from its mount or allow internal pump parts to be discharged Never operate the pump in bench tests for instance without its being flanged to the vacuum chamber If the pump should suddenly seize the ensuing deceleration torque will have to be absorbed by the system To accomplish this the following are required when securing an ISO K type high vacuum flange Braking Clamping TURBOVAC torque Nm bolts 35 LS LS2 150 4 50 63 4 151 151 C 283 4 361 361 C 580 6 600 C 1486 10 1000 C DN 160 1500 16 DN 250 1500 10 Clamping bolts made of steel must be torqued down to 35 Nm those of quality 12 9 to 50 Nm When installing CF flanges use only the bolts specified tightening torque is 15 Nm for DN 40 CF 30 Nm for DN 63 CF and larger You will find the order numbers for the clamping bolts in the Oerlikon Oerlikon Leybold Vacuum Catalog The clamping bolts are not included as standard equipment with the pump Nm 15 30 35 50 ft lb 11 22 26 37 16 GA05118_1502 12 2006 Oerlikon Leybold Vacuum Installation max 100 mm 100 mm Incorrect R x Fig 4 Fixed flanging of the TURBOVAC to the vacuum chamber
11. the standard frequency converters NT 10 NT 12 or NT 13 P N 859 00 01 04 05 06 07 or the standard cables for the TURBOVAC 50 For the TUR BOVAC 35 LS and 35 LS2 exclusively the modified frequency converter SO NT 12 Ref No 200 99 042 and the corresponding cable Ref No 200 61 626 must be used GA05118 1502 12 2006 Oerlikon Leybold Vacuum 23 Operation Caution Danger of ignition Suited gases Filters 4 Operation 4 1 Media Compatibility Purge Gases Unless appropriate accessories and attachments are used the TURBO VAC is not suitable for aggressive or corrosive media or those containing dust When handling corrosive media the C version pump must be operated with purge gas when handling media containing dust a fine mesh filter must be installed Some media such as aluminum trichloride can sublime inside the pump and form deposits Thick deposits reduce the play between moving parts to the point that the pump could seize In some processes deposits can be pre vented by heating the pump Please consult with us in case such problems arise Corrosive gases such as chlorine can destroy the rotors During operation the pressure inside the TURBOVAC is so low that there is no danger of ignition at pressures below about 100 mbar 75 Torr A hazar dous condition will be created if flammable mixtures enter the hot pump at pressures above 100 mbar 75 Torr During operation the pump can reach tempera
12. via the purge gas and venting valve when shutting the pump down When additionally venting the vacuum chamber the venting function of the purge gas and venting valve must be opened before opening the chamber valve This will ensure the presence of a higher pressure in the area of the ball bearings compared to the remaining vacuum area This will prevent particles dust or aggressive gases from being forced through the bearings into the not yet vented motor chamber of the pump Cautious venting of the pump is possible from the high vacuum side since here the bearing forces will be lowest When doing so no free jet of gas must be allowed to form on the rotor so as to avoid exposing the rotor to addi tional forces When venting the pump through its foreline connection neither oil nor par ticles may be entrained in the gas flow from the forevacuum side into the pump Operation Purge gas and venting valve High vacuum side Foreline connection GA05118 1502 12 2006 Oerlikon Leybold Vacuum 27 Operation Speed of the Pressure Rise Speed Allturbomolecular pumps may be vented at full speed However the pres Pressure rise curve sure must not increase faster than specified through the pressure rise curve The pump must be vented significantly slower when there is the risk of par ticles entering into the pump from the process During venting the flow must be of the laminar type in both the vacuum chamber and the turbomolecula
13. while baking out under vacuum When making the initial examination of the pump mount blank flanges to eli minate any possibility of leaks and desorption in the vacuum chamber The pump will have to be disassembled if there is more extensive contamina tion The Oerlikon Leybold Vacuum Customer Service Department will have to be consulted here in all cases The rotor is precision balanced any change whatsoever such as loose ning or bending any rotor component will make re balancing necessary 5 4 Removing the pump from the system Switch off the pump and vent it as per the instructions in Sections 4 5 and 4 6 Take the appropriate precautionary measures prior to opening the intake or discharge connection if the pump has previously handled hazardous gases If necessary use gloves a respirator and or protective clothing and work under an exhaust hood If the pump previously handled corrosive gases then allow the purge gas to flow for as long as possible before detaching the pump from the system Remove the TURBOVAC from the system TURBOVAC pumps which are used in semiconductor processes for example will be contaminated with process gases These gases may be toxic and hazardous to health In addition deposits with similarly dangerous properties may have formed Many of these gases and deposits form acids when they come into contact with humid air This will result in serious corrosion damage to the pump To avoid health haz
14. 40 KF 63 ISO K 40 KF 10 KF 10 KF 11 102 11 25 55 100 250 ISO K 1150 40 KF 63 ISO K 10 KF 11 102 Description TURBOVAC 600 C TURBOVAC 1000 C vacuum port A High B Forevacuum port C Vent port D Purge gas port D E o e O Am 25 Gs 8 5S E os i 99 88 es co Q o O ui LL LL Fig 2 11 Oerlikon Leybold Vacuum GAO5118 1502 12 2006 Description 1 4 Ordering Information TURBOVAC 35LS 35LS2 50 High vacuum port DN 40 KF 856 64 85666 85400 DN 40 CF 853 99 DN 63 ISO K 854 01 800150V0010 DN 63 CF 854 02 DN 100 ISO K DN 100 CF DN 160 ISO K DN 160 CF DN 200 CF DN 200 ISO K 6 ANSI DN 250 ISO K Cooling water unit for TURBOVAC 35 LS 35 LS2 50 854 08 1 With forevacuum flange DN 40 KF 2 With forevacuum flange DN 63 ISO K 8 Venting flange turned by 180 4 Clean room packaging 151 856 31 856 32 151 C 361 856 35 856 70 800150V00059 103 41 856 71 856 72 856 73 12 GAO05118 1502 12 2006 Oerlikon Leybold Vacuum 361 C 856 75 800150V0018 856 77 600 C 800150V0015 800150V0017 1000 C 855 351 855 382 854 911 117 649 153 00 894 891 855 36 855 392 1 5 Operating environment and cooling TURBOVAC No additional cooling required if all these condi tions are satisfied 35 LS Ambient temperature 30 C 35 LS2 No bakeout operations High vacuum pressure 103 mbar Forevacu
15. 697 0808 Fax 86 22 2697 4061 Fax 86 22 2697 2017 sales vacuum tj oerlikon com Oerlikon Leybold Vacuum Tianjin Co Ltd Beichen Economic Development Area BEDA Shanghai Road Tianjin 300400 China Sales and Service Phone 86 22 2697 0808 Fax 86 22 2697 4061 Fax 86 22 2697 2017 info vacuum tj oerlikon com Oerlikon Leybold Vacuum Tianjin International Trade Co Ltd Shanghai Branch Add No 33 76 Futedong San Rd Waigaogiao FTZ Shanghai 200131 China Sales and Service Phone 86 21 5064 4666 Fax 86 21 5064 4668 info vacuum sh oerlikon com Oerlikon Leybold Vacuum Tianjin International Trade Co Ltd Guangzhou Office and Service Center 1st F Main Building Science City Plaza No 111 Science Revenue Guangzhou Science City GZSO 510663 Guangzhou China Sales Phone 86 20 22323980 Fax 486 20 22323990 info vacuum gz oerlikon com Oerlikon Leybold Vacuum Tianjin International Trade Co Ltd Beijing Branch 1 908 Beijing Landmark Towers 8 North Dongsanhuan Road Chaoyang District Beijing 100004 China Sales Phone 86 10 6590 7622 Fax 86 10 6590 7607 India Oerlikon Leybold Vacuum India Pvt Ltd EL 22 J Block MIDC Bhosari Pune 411026 India Sales Phone 91 20 3061 60000 Fax 91 20 2712 1571 sales vacuum pu oerlikon com Japan Oerlikon Leybold Vacuum Japan Co Ltd Head Office Tobu A K Bldg 4th Floor 28 3 Shin Yokohama 3 c
16. If the coolant flow is turned on and off by means of a solenoid valve make the electrical connection in such a way that coolant flow will be started and stopped together with the pump itself Cooling water specifications Inlet pressure 3 to 7 bar absolute Cooling water requirement inlet temperature See Fig 7 Appearance Colorless clear free of oils and greases Sediments 250 mg l Particle size 150 um pH value 7 to 8 5 Overall hardness total alkaline earths max 20 German hardness scale 3 57 mmol l GA05118 1502 12 2006 O Oerlikon Leybold Vacuum 21 Installation 3 6 Connecting the purge gas and airing device See Section 4 1 for suited gases see Section 4 6 for different venting methods TURBOVAC 35 LS 35 LS2 and 50 with KF or ISO K connectors The TURBOVAC is aired through the system TURBOVAC 50 with CF connector and 151 361 If the pump cannot be aired through the system then a power failure airing valve shall be attached to the airing connection flange This power failure airing valve prevents oil vapor from the forevacuum line from diffusing back into the system TURBOVAC 151 C 361 C 600 C and 1000 C Either attach a power failure airing valve to the airing connection flange or a purge gas and airing valve at the purge gas connection flange Which of the two flanges is used will depend on the process When pumping clean non corrosive gases a power failure airing valve is to be attached When pump
17. and or servicing of compressors vacuum pumps and components will be carried out only if a correctly completed declaration has been sub mitted Non completion will result in delay The manufacturer can refuse to accept any equipment without a declaration A separate declaration has to be completed for each single component This declaration may be completed and signed only by authorised and qualified staff Customer Dep Institute Reason for return applicable please mark C Repair L1 chargeable C1 warranty Address Exchange O chargeable O warranty O exchange already arranged received Person to contact Return only Q rent Q loan O for credit Phone Fax Calibration O DKD O Factory calibration End user O Quality test certificate DIN 55350 18 4 2 1 A Description of the Leybold product Failure description Material description Catalog number Additional parts Serial number Application Tool Type of oil Forevacuum pumps Application Process B Condition of the equipment No Yes No Contamination No Yes 1 Has the equipment been used m OD oxic q a 2 Drained Product service fluid Q m corrosive Q 3 All openings sealed airtight u flammable u m 4 Purged m m explosive a a If yes which cleaning agent radioactive m and which method of cleaning microbiological 1 if answered with No go to D lt a other harmful subs
18. ards and corrosion damage when the pumps are de tached from the system lay a container of desiccant on the splinter guard and then close the pump immediately at all flange connections Store the pump with a desiccant in a PE bag S0 GAO05118 1502 12 2006 Oerlikon Leybold Vacuum Maintenance Troubleshooting A packing set is included with TURBOVAC models with a C in the type desi gnation Use this packing set after detaching the pump from the system Faulty leaky packing of a TURBOVAC will nullify the guarantee Ordering data Packing set for high vacuum connection flange Order No DN 100 160 200 91 240 DN 200 200 91 295 DN 250 6 ANSI 200 91 262 Pack the pump so that it cannot be damaged during shipping and so that no contaminants can escape from the packaging Protect in particular the flan ges the coolant connection nipples and the cable grommets If you return a pump to Oerlikon Leybold Vacuum be absolutely sure to observe the instructions given in Section 5 2 6 Troubleshooting When the connector cable to the TURBOVAC is attached the outputs of the TURBOTRONIK frequency converter are not free of voltage Before commencing troubleshooting procedures make the following simple checks E Is the TURBOVAC being supplied with electrical energy E Are the connections from the mains power cord to the frequency converter at the connector cable from the frequency converter to the mains net work in
19. ation the TURBOVAC serves from the very outset as an effective baffle When dealing with larger volumes the vacuum chamber will first have to be pumped down with the forevacuum pump Then switch on the cooling and the TURBOVAC at the TURBOTRONIk Kindly refer to the TURBOTRONIK operating instructions for details Avoid impact and vibration while the pump is running Vibrations GA05118 1502 12 2006 Oerlikon Leybold Vacuum 25 Operation Warning Caution Venting 4 3 Bakeout If pressures in the range of 108 mbar are to be developed within a short peri od of time the vacuum chamber and the components installed therein will have to be baked out In addition the TURBOVAC can be baked out using the flange heater provided for this purpose Protect the rotor against intensive direct heat radiation When baking out at the forevacuum side at a sorption trap for example ensure that the com ponents attached direct are not heated to more than 80 C 176 F The forevacuum pump must be in operation so as to eliminate the vapors liberated at the sorption trap 4 4 Operation Risk of injury The pump can become so hot during operation gt 70 C 158 F as to represent a burn hazard Note the symbols on the pump pointing to the hazards and in the case of a hot pump wear the required protective clothing Exposure of the pump to accelerating forces must be avoided or reduced to such an extent that th
20. cerlikon leybold vacuum TURBOVAC Turbomolecular pumps with grease lubricated bearings TURBOVAC 35 LS 35 LS2 TURBOVAC 50 TURBOVAC 151 151 C TURBOVAC 361 361 C TURBOVAC 600 C TURBOVAC 1000 C and pumps modified by Oerlikon Leybold Vacuum Operating Instructions GA05118 1502 idealvac com Tdeal acuum products E 505 872 0037 idealvac com Contents 3 1 3 2 3 3 3 4 3 5 3 6 3 7 4 1 4 2 4 8 4 4 4 5 4 6 5 1 5 2 5 9 5 4 Important Safety Information Description Design and Operation Supplied Equipment Technical Data Ordering Information Operating environment and cooling Transport and Storing Installation Conforming Utilisation Ambient Conditions Connecting the pump to the vacuum chamber Forevacuum connection Connecting the cooling Connecting the purge gas and airing device Connecting the TURBOTRONIK Operation Media Compatibility Purge Gases Start up Bakeout Operation Switching Off Venting Maintenance Maintenance Intervals Oerlikon Leybold Vacuum Service Cleaning Removing the pump from the system Troubleshooting Waste Disposal EC Manufacturer s Declaration 2 GAO5118 1502 12 2006 Oerlikon Leybold Vacuum Page o N N OOQ i 14 15 15 15 16 20 20 22 23 24 24 25 26 26 26 27 29 29 29 30 30 31 33 34 Safety Information Important Safety Information Indicates procedures that must be strictly observ
21. e rotor unit will not be excited by vibrations In the case of critical applications you must consult our Applications Dept first 4 5 Switching Off Switch off the TURBOVAC at the TURBOTRONIK Refer to the TURBOTRONIK operating instructions for details Switch off the forevacuum pump Vent the TURBOVAC before it has come to a full standstill refer to Section 4 6 In TRIVAC pumps the built in anti suckback valve will close automatically and shut off the forevacuum line When using forevacuum pumps without an anti suckback valve close the valve in the forevacuum line Close off the cooling water supply or switch off the ventilation immediately after switching off the TURBOVAC in order to avoid condensate formation in the pump If the pump previously handled corrosive gases it will be necessary to purge the pump with dry nitrogen for one hour prior to shut down When the System is not in operation ensure that neither ambient air nor cleaning agents can enter the TURBOVAC 26 GAO05118 1502 12 2006 Oerlikon Leybold Vacuum 103 mbar 102 TURBOVAC 35 LS 2 50 TURBOVAC 151 361 Forevacuum pressure 10 TURBOVAC 600 1000 Time Fig 9 Curves showing the pressure rise 4 6 Venting As to suitable gases see Section 4 1 Venting Methods There are three different methods of venting the turbomolecular pump In the case processes requiring a purge gas the pump must be vented
22. ed to prevent hazards to Warning persons Indicates procedures that must be strictly observed to prevent damage to or Caution destruction of the product The Oerlikon Leybold Vacuum TURBOVAC have been designed for safe and efficient operation when used properly and in accordance with these Operating Instructions It is the responsibility of the user to carefully read and strictly observe all safety precautions described in this section and throughout the Operating Instructions The TURBOVAC must only be operated in the proper condition and under the conditions described in the Operating Instructions It must be operated and maintained by trained personnel only Consult local state and national agencies regar ding specific requirements and regulations Address any further safety operation and or maintenance questions to our nearest office Failure to observe the following precautions could result in serious personal injury Mechanical hazards Risk of injury Warning Avoid exposing any part of the human body to the vacuum Only handle the pump when it is vented Turbopumps as described in the following operation manual contains a high portion of kinetic energy due to their high rotational speed in combi nation with the specific rotor mass In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy is released To avoid the destruction of the equipment and to prev
23. ent injuries of the operating staff the leading European manufacturers of vacuum pumps strictly recommend to follow the installation instructions as given in this manual Never operate the pump in bench tests for instance without its being flanged to the vacuum chamber The small flange connector for the high vacuum flange at the TURBOVAC 50 is not strong enough to keep the pump from rotating if it should sud denly seize Rotation of the pump can cause leaks in the forevacuum line Secure the pump additionally to prevent rotation in case it should suddenly seize GA05118 1502 12 2006 Oerlikon Leybold Vacuum 3 Safety Information Electrical hazards Warning Risk of injury Dangerous voltages are present at the mains connections Before begin ning with any maintenance or service work on the pump disconnect the pump from all power supplies Operate the pump only with the matching frequency converter and connector line Voltages of up to 400 V will be present at the connection cable between the frequency converter and the pump mains voltage will be present at the fan the flange heater the valves and their supply leads Route the conductors and cables so as to protect them from damage When the connector cable to the TURBOVAC is attached the outputs of the TURBOTRONIK frequency converter are not free of voltage Thermal hazards Warning Risk of injury The pump can become so hot during operation gt
24. er the equipment is con taminated or is free of substances which could pose a health hazard If it is contaminated specify exactly which substances are involved You must use the form we have prepared for this purpose A copy of the form has been reproduced at the end of these Operating Instructions Declaration of Contamination for Compressors Vacuum Pumps and Components Another suitable form is available from www oerlikon com Oerlikon Leybold Vacuum Systems Documentation Download Documents Attach the form to the equipment or enclose it with the equipment This statement detailing the type of contamination is required to satisfy legal requirements and for the protection of our employees We must return to the sender any equipment which is not accompanied by a contamination statement Maintenance Caution Standard bearing exchange Contamination Form GA05118 1502 12 2006 Oerlikon Leybold Vacuum 29 Maintenance Caution Hazardous gases Deposits Desiccant Close the pump 5 3 Cleaning Contamination inside the TURBOVAC is indicated by a deterioration in perfor mance i e an increasing decline in working pressure If there is only slight contamination such as a coating on the TURBOVAC inte rior surfaces due to exposure to the atmosphere over an extended period of time for the CF version the flange heater can be used for cleaning The ultimate pressure must be monitored
25. home Kohoku ku Yokohama shi Kanagawa ken 222 0033 Sales Phone 81 45 471 3330 Fax 81 45 471 3323 Oerlikon Leybold Vacuum Japan Co Ltd Osaka Sales Office 5 13 Kawagishi cho Suita chi Osaka fu Phone 81 6 4860 2212 Fax 81 45 471 3323 Oerlikon Leybold Vacuum Japan Co Ltd Tsukuba Technical S C Tsukuba Minami Daiichi Kogyo Danchi 21 Kasumi no Sato Ami machi Inashiki gun Ibaraki ken 300 0315 Service Phone 81 29 889 2841 Fax 481 29 889 2838 Korea Oerlikon Leybold Vacuum Korea Ltd 761 4 Yulkeum ri SungHwan eup Cheonan City Choongchung Namdo 330 807 Korea Sales Phone 82 41 580 4420 Fax 82 41 588 3737 Service Phone 82 41 580 4415 Fax 482 41 588 3737 Singapore Oerlikon Leybold Vacuum Singapore Pte Ltd 1 Science Park Road Singapore Science Park 2 1102 12 Capricorn Building Singapore 117528 Sales and Service Phone 65 6308 7000 Fax 65 67730 039 info vacuum sgQGoerlikon com Taiwan Oerlikon Leybold Vacuum Taiwan Ltd No 416 1 Sec 3 Chung Hsin Rd Chu Tung Hsin Chu Taiwan R O C Sales and Service Phone 886 3 500 1688 Fax 4886 3 583 3999 sales vacuum hc oerlikon com cerlikon leybold vacuum www oerlikon com
26. identified with a C in the model number are equipped with this purge gas feature it protects only the bearing area and the motor in the TURBOVAC 3 2 Ambient Conditions When using the TURBOVAC inside a magnetic field the magnetic induction at Magnetic field the pump housing surface may not exceed the following values TURBOVAC 50 B 7 mT TURBOVAC 151 1000 B 5 mT in case of radial impingement B 15 mT in case of axial impingement Provide suitable shielding measures if these values are exceeded The standard version is resistant to radiation at levels up to 109 Gy 1 mT milliTesla 10 G Gauss 1 Gy Gray 100 rad GA05118 1502 12 2006 Oerlikon Leybold Vacuum 15 Installation 3 3 Connecting the pump to the vacuum chamber Remove the covers and the blank flanges at the turbomolecular pump only just before installing to ensure that the TURBOVAC is installed under the clea nest possible conditions Do not stand below the TURBOVAC pump while it is being connected to or detached from the system Warning Turbopumps as described in the following operation manual contains a high portion of kinetic energy due to their high rotational speed in combi nation with the specific rotor mass In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational ener 9y is released To avoid the destruction of the equipment and to prevent injuries of the operating
27. ing A collar flange with retaining ring and suitable sealing washer can also be used to connect the TURBOVAC A collar flange is required when using ultra high vacuum sealing washers Splinter guard A splinter guard is installed in the high vacuum flange to protect the TURBO VAC Operate the pump only with this splinter guard in place as foreign objects passing through the intake port and into the pump can cause serious damage to the rotor Damage caused by foreign objects in the rotor section is excluded from the guarantee 18 GAO05118 1502 12 2006 Oerlikon Leybold Vacuum Installation 0 11 Turbomolecular pump Forevacuum test point Forevacuum pump Anti vibration bellows Adsorption trap Forevacuum valve Airing valve High vacuum valve Purge gas connection 10 Valve in the roughing pump line 11 Electronic frequency converter OMONDARWNH Roughing pump line recommended to achieve the shortest possible cycling times Si TES Drive and control line Fig 6 Schematic of a turbomolecular pump system Flange heating only for pumps with the CF flange The flange heater is used to bake out under automatic control the high vacuum connection port at the TURBOVAC and the mating flange on the vacuum chamber The bakeout jacket or flange heater is mounted directly to the TURBOVAC intake flange This can be done even with the pump flanged to the vacuum chamber Risk of injury Warning
28. ing reactive media connect a purge gas and airing valve Please contact Oerlikon Leybold Vacuum for assistance in making the decisi on as to which media can be pumped with or without purge gas In processes which require purge gas the pump will have to be aired when it is switched off through the purge gas valve Observe the operating instructions for the purge gas and airing valve 22 GAO05118 1502 12 2006 Oerlikon Leybold Vacuum Installation 3 7 Connecting the TURBOTRONIK Use the connector cable to attach the TURBOVAC and the TURBOTRONIK see the operating instructions on the TURBOTRONK for details Risk of injury Warning Dangerous voltages are present at the mains connections Before begin ning with any maintenance or service work on the pump disconnect the pump from all power supplies Operate the pump only with the matching frequency converter and connector line Voltages of up to 400 V will be present at the connection cable between the frequency converter and the pump mains voltage will be present at the fan the flange heater the valves and their supply leads Route the conductors and cables so as to protect them from damage The connections are of the IP 40 safety classification Do not expose the pump frequency converter or connectors to dripping water The TURBOVAC 35 LS and 35 LS2 are special pumps designed specifically for leak detectors These pumps must not be operated in connection with
29. keout at ambient temperature gt 85 C High vacuum pressure gt 104 mbar Ambient temperature 45 55 C GA05118 1502 12 2006 Oerlikon Leybold Vacuum 13 Transport and Storing f amp N Fig 3 Transportation 2 Transport and Storing When moving the heavier pumps the lower surfaces on the base flange are suitable for accepting a lifting fork see Fig 3 Take care not to damage the plugs and coolant connections during move ment Caution The TURBOVAC is shipped in a sealed PE bag which also contains a desic cant The maximum effective life of the desiccant is one year Do not open the packaging until immediately prior to installation 14 GAO05118 1502 12 2006 Oerlikon Leybold Vacuum Installation 3 Installation 3 1 Conforming Utilisation The TURBOVAC models are engineered to pump vacuum chambers down to pressures in the high vacuum range A TURBOTRONIK frequency converter and a forevacuum pump are required for the operation of the TURBOVAC The TURBOVAC 35 LS and 35 LS2 are only intended for integration into a Helium leak detector These units are not suitable for operation without a forevacuum pump Turbomolecular pumps are not suitable for pumping either gases which con tain dust particles or liquids Turbomolecular pumps without a purge gas feature are suitable only for moving air or inert gases They are not suitable for pumping aggressive or reactive gases TURBOVAC versions
30. king or insufficient Bearings are defective Anti suckback valve at the forevacuum pump is defective The TURBOVAC was not aired or impro perly aired when shut down System configured incorrectly oil vapor streams back during forepump operation Sorption trap is saturated 382 GAO05118 1502 12 2006 Oerlikon Leybold Vacuum Corrective action Check the motor connection cable and connect cor rectly replace if necessary Replace the pump Balance the rotor only by the OLV Service Department Bearings will have to be replaced only by the OLV Service Department Change the masses of the system or install vibration damper to isolate oscillations Check the measurement device Clean or replace the measurement gauges Locate the leaks Bake out the pump see Section 5 3 Have the pump cleaned only by the OLV Service Department Check ultimate pressure of the forevacuum pump or install a more powerful forevacuum pump Locate and repair leaks only by the OLV Service Department Check the connector lines interchange poles if necessary Check the forevacuum pump install a more powerful forevacuum pump if necessary Seal leak install a more powerful forevacuum pump if necessary Ensure sufficient supply of cooling air Route cooler air to the fan or employ water cooling option Ensure sufficient supply of cooling water Have the pump repaired only by the OLV Service Department
31. lementary kit for retrofitting When installing the air cooled TURBOVAC ensure that there is an unrestricted flow of air to the fan Always maintain a minimum distance of 20 cm 8 inch to the nearest object Ensure that no heated air from neighboring equipment will be drawn in by the fan Connect the fan in the air ventilation unit to the AC mains Make the electrical connection for the ventilation unit in such a way that it will be started and stopped together with the pump itself Observe the information given in the operating instructions for the air ventilati on unit GA 05 199 20 GAO05118 1502 12 2006 Oerlikon Leybold Vacuum Installation TURBOVAC 35 LS 35 LS2 50 TURBOVAC 600 1000 50 80 n t EN 30 60 z z o 20 8 50 amp a o 10 40 s 0 2 30 5 10 15 20 25 30 o 35 E a Cooling water temperature O 20 10 TURBOVAC 151 361 0 50 5 10 15 20 25 30 c 35 l h Cooling water temperature 40 fe 30 E Z 20 E 8 10 O 0 5 10 15 20 25 30 C 35 Cooling water temperature Fig 7 Cooling water consumption Water cooling When attaching the water cooling unit to the TURBOVAC 35 LS 35 LS2 and 50 remove the pump foot and then bolt the cooling unit to the bottom of the pump The mounting bolts are provided with the water cooling unit Connect the coolant hoses to the hose nipples and secure with hose clamps
32. ower consumption at ultimate pressure W Max ambient temperature at operation C Max bakeout temperature at CF flange C O Ring sealed 40 KF Aluminium 33 36 28 0 30 0 25 0 20 2 108 5 108 TURBOVAC 50 O Ring sealed 63 ISO K Aluminium 55 48 30 0 40 0 35 0 25 2 108 5 108 1 107 16 KF TRIVAC D2 5E 2 10 2 45 15 55 80 High vacuum port TURBOVAC 50 8 GA05118 1502 12 2006 Oerlikon Leybold Vacuum Metal sealed 63 CF Stainless steel 55 48 30 0 40 0 35 0 25 2 108 5 108 Forevacuum port Electrical connection High vacuum port DN Pumping speed No l s Ar l s He l s H Irs Max gas throughput N mbar s Ar mbar s H mbar s Compression No He H5 Ultimate pressure mbar Max Inlet pressure permanent with water cooling mbar Max forevacuum pressure for N mbar Recommended forevacuum pump TRIVAC Run up time to 9596 nominal speed min Forevacuum port DN Purge gas vent port DN Cooling water connection hose nozzle mm Weight approx kg Max power consumption at ultimate pressure VA Max ambient temperature at operation C Max bakeout temperature at CF flange C Vent port Connection for water cooling TURBOVAC 151 C TURBOVAC 361 C similar TURBOVAC 151 100 ISO K 100 CF 145 150 135 115 3 3 1 7 109 104 102 1 10710 N 5 10 5 107 D4BtoD16B 2 25 KF 10 KF 10 8
33. pain S A C Huelva 7 E 08940 Cornella de Llobregat Barcelona Sales Phone 34 93 666 46 16 Fax 434 93 666 43 70 sales vacuum ba oerlikon com Service Phone 34 93 666 49 51 Fax 434 93 685 40 10 Sweden Oerlikon Leybold Vacuum Scandinavia AB Box 9084 SE 40092 Goteborg Sales and Service Phone 46 31 68 84 70 Fax 46 31 68 39 39 info vacuum gt oerlikon com Visiting delivery address Datavagen 57B SE 43632 Askim Switzerland Oerlikon Leybold Vacuum Schweiz AG Leutschenbachstrasse 55 CH 8050 Z rich Sales Phone 41 044 308 40 50 Fax 41 044 302 43 73 sales vacuum zh oerlikon com Service Phone 41 044 308 40 62 Fax 41 044 308 40 60 America USA Oerlikon Leybold Vacuum USA Inc 5700 Mellon Road Export PA 15632 Phone 1 724 327 5700 Fax 1 724 325 3577 info vacuum exGoerlikon com Sales Eastern amp Central time zones Phone 1 724 327 5700 Fax 1 724 733 1217 Pacific Mountain Alaskan amp Hawaiian time zones Phone 1 480 752 9191 Fax 1 480 752 9494 Service Phone 1 724 327 5700 Fax 1 724 733 3799 Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 0 221 347 0 Fax 49 0 221 347 1250 info vacuum oerlikon com Asia PR China Oerlikon Leybold Vacuum Tianjin International Trade Co Ltd Beichen Economic Development Area BEDA Shanghai Road Tianjin 300400 China Sales and Service Phone 86 22 2
34. r pump The speed of the pressure rise during venting of the running pump will greatly influence the load on the rotor stator pack and the bearings The slower the pump is vented the longer the service life of the bearings will be Particles The pump must not be vented to pressures above atmospheric pressure 28 GAO05118 1502 12 2006 Oerlikon Leybold Vacuum 5 Maintenance The pump must only be opened by such persons who have been authorised by Oerlikon Leybold Vacuum to do so 5 1 Maintenance Intervals After 15 000 operating hours at the latest a standard bearing exchange will be recommended for the TURBOVAC 35 to 361 C For the TURBOVAC 600 C and 1000 C a standard bearing exchange will be required after 10 000 opera ting hours at the latest Moreover we recommend to have the rotor assy exchanged depending on the thermal stress on the rotor after 45 000 to 100 000 operating hours This can only be done by Oerlikon Leybold Vacuum Service For this ask for a quotation When using purge gas valves Depending on the degree of contamination of the purge gas used the filter will clog and will have to be exchanged our experience indicates that this will become necessary after 1 to 6 months When using an adsorption trap Regenerate or renew the adsorption agent regularly refer to the operating instructions provided with the trap 5 2 Oerlikon Leybold Vacuum Service Whenever you send us in equipment indicate wheth
35. sures in the high vacuum range A TURBOTRONIK frequency converter and a forevacuum pump are required for the operation of the TURBOVAC 1 2 Supplied Equipment The TURBOVAC is shipped in a sealed PE bag which also contains a desic cant The maximum effective life of the desiccant is one year TURBOVAC 35 LS 35 LS2 The pumps are shipped without splinter guard or connection accessories TURBOVAC 50 to 1000 For high vacuum port with ISO K flange Splinter guard centering ring with FPM sealing ring outer ring For high vacuum port with CF flange Splinter guard For high vacuum port with KF flange Splinter guard centering ring with FPM O ring and clamping ring For high vacuum port with ANSI flange Splinter guard Forevacuum port Centering ring with O ring and clamping ring Both the purge gas port and the airing port are blanked off for shipping In addition the pivoted threaded fittings used to make the coolant connection are included as standard equipment for the TURBOVAC 151 361 and 600 if needed they can be used to replace the hose nipples installed at the factory The electronic frequency converter and the connector cables required for operation are not included as standard equipment with the pump PE Polyethylene FPM Fluoroelastomer resistant to temperatures of up to 150 C 300 F 6 GA05118_1502 12 2006 Oerlikon Leybold Vacuum Description 1 3 Technical Data Special Versions for Leak Detectors
36. tances d m C Description of processed substances Please fill in absolutely 1 What substances have come into contact with the equipment Trade name and or chemical term of service fluids and substances processed properties of the substances According to safety data sheet e g toxic inflammable corrosive radioactive Tradename Chemical name a b C d No Yes 2 Are these substances harmful m e 3 Dangerous decomposition products when heated m C If yes which 2 Components contaminated by microbiological explosive or radioactive products substances will not be accepted without written evidence of decontamination D Legally binding declaration we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level Name of authorised person block letters Dae Sigmaturofauthorised person 1 i SET es ee ee ee firm stamp 17200001_002_00 Oerlikon Leybold Vacuum GA05118_1502 12 2006 Oerlikon Leybold Vacuum 35 Sales and Service Germany Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 0 221 347 1234 Fax 49 0 221 347 1245 sales vacuum oerlikon com Oerlikon Leybold Vacuum GmbH Sales Area North East Branch Office Berlin Buschkrugallee 33 1 Obergeschoss D 12359 Berlin Phone 49 0 30 435 609 0 Fax 49 0 30 435 609 10 sales vacuum bn oerlikon com
37. that the machine into which this incomplete machine is to be installed meets the regulations of the EC Directive on Machinery When using the appropriate Oerlikon Leybold Vacuum accessories e g connectors lines flange heaters and fans and when powering the pump with the specified frequency converters the protection level prescribed in the EMC Guidelines will be attained Designation of the products Turbomolecular pump Models Part Nos TURBOVAC 35 LS 35 LS2 856 64 856 66 TURBOVAC 50 853 99 854 00 854 01 854 02 800150V0010 TURBOVAC 151 151 C 103 41 856 31 856 32 856 33 856 35 TURBOVAC 361 361 C 856 70 856 71 856 72 856 73 856 74 856 75 856 77 800150V0005 800150V0018 TURBOVAC 600 C 800150V0005 800150V0015 800150V0017 TURBOVAC 1000 C 117 64 15300 854 91 855 35 855 36 855 38 855 39 894 89 Related harmonized standards B EN 1012 2 1996 Compressors and vacuum pumps Safety requirements Part 2 Vacuum pumps Cologne Dec 13 Cologne Dec 12 2006 Meee f Ralf Adamietz i Head of Design Department Dr Ulrich Jung Vice President Head of Product Development Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 221 347 O Fax 49 221 347 1250 documentation vacuum oerlikon com 34 GA05118_1502 12 2006 Oerlikon Leybold Vacuum cerlikon leybold vacuum Declaration of Contamination of Compressors Vacuum Pumps and Components The repair
38. thori sed by Oerlikon Oerlikon Leybold Vacuum Vacuum to do so The rotor is precision balanced any change whatsoever such as loose ning or bending any rotor component will make re balancing necessary Unless appropriate accessories and attachments are used the TURBO VAC is not suitable for aggressive or corrosive media or those containing dust When handling corrosive media the C version pump must be operated with purge gas when handling media containing dust a fine mesh filter must be installed Observe the information on media compatibility to be found in Section 4 1 Take care not to damage the plugs and coolant connections during move ment Exposure of the pump to accelerating forces must be avoided or reduced to such an extent that the rotor unit will not be excited by vibrations In the case of critical applications you must consult our Applications Dept first The references to diagrams e g 1 2 consist of the Fig No and the Item Figures No in that order We reserve the right to alter the design or any data given in these Operating Instructions The illustrations are not binding Retain the Operating Instructions for further use GA05118 1502 12 2006 Oerlikon Leybold Vacuum 5 Description 1 Description 1 1 Design and Operation The TURBOVAC models 35 LS to 1000 are turbomolecular pumps featuring grease lubricated bearings These units are engineered to pump vacuum chambers down to pres
39. tures as high as 120 C 248 F Sparks could occur in case of damage to the pump and these could ignite explosive mixtures We would be glad to consult with you as regards the media which can safely be handled with this unit Purge gas Suited are all gases EH which will not cause corrosion or pitting in aluminium and steel and BI which in connection with process deposits in the pump will not cause cor rosion or sticking For venting and as the purge gas we recommend inert gases like nitrogen or argon The temperature of these gases should be between 5 C and 80 C max relative humidity should not exceed 10 ppm In individual cases and after consultation also dry filtered oil free air or filte red ambient air may be used filter mesh lt 1pm Change the filters after some time at least annually 24 GAO05118 1502 12 2006 Oerlikon Leybold Vacuum Operation 10 mbar TURBOVAC 151 to 1000 eiua 35 LS 2 5 102 Starting pressure 10 S Pumping speed at the forevacuum pump m3 h V Chamber volume m3 109 0 25 50 75 100 125 S V Fig 8 Determining the starting pressure for a TURBOVAC when evacuating larger volumes 4 2 Start up The starting pressure for the TURBOVAC can be read from the chart repro Starting pressure duced in Fig 8 Where S V gt 100 h the forevacuum pump and the TURBOVAC can be Switched on simultaneously In such a situ
40. um pressure 5307 mbar 50 Continuous operation at high vacuum pressure lt 104 mbar Ambient temperature lt 45 C 151 151 C NE 361 361 C 600 C iui 1000 C ED C F mbar Torr 30 86 10 8105 35 95 103 8104 40 104 102 8103 45 113 5 10 4 410 50 122 5101 4 107 55 1981 2 1 5 Air or water cooling required Ambient temperature 30 40 C Bakeout operations High vacuum pressure 10 to 5 10 mbar Forevacuum pressure 5 10 to 2 mbar Bakeout at ambient temperature 40 C Continuous operation at high vacuum pressure gt 104 mbar Rapid cycling operation Bakeout at ambient temperature lt 35 C or High vacuum pressure 10 mbar and ambient temperature 45 C Bakeout at ambient temperature lt 35 Co high vacuum pressure 10 mbar and ambient temperature lt 45 C Bakeout at ambient temperature lt 35 C or high vacuum pressure lt 104 mbar and ambient temperature 45 C Description Water cooling required if any one of these conditions prevails Ambient temperature 40 45 C Bakeout operations High vacuum pressure gt 5 10 mbar Forevacuum pressure 2 mbar Ambient temperature 45 55 C Bakeout at ambient temperature gt 40 C Bakeout at ambient temperature gt 85 C High vacuum pressure gt 10 mbar Ambient temperature 45 55 C Bakeout at ambient temperature gt 85 C High vacuum pressure gt 10 mbar Ambient temperature 45 55 C Ba
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