Home

OPERATING INSTRUCTIONS

Contents

1. Ve Le a Description DC motor TMS Plug in control 12 GA05141_0702 09 2004 1 4 Function and design of the MAG DRIVE4o e The MAG DRIVE 9 electronic converter is used to drive the MAG pumps from MAG 830 to MAG 3200 The electronic converter converts the single phase line supply voltage into a three phase DC voltage to control and monitor the electronically com mutated DC moter It also evaluates measured signals and controls open loop and closed loop the pump functions The temperature management system TMS and the magnetic bearing control system are integrated into the converter The TMS regulates the pump temperature by switching the heating on off or cooling the pump The digital magnetic bearing control system actively controls the pump rotor in five axes closed loop control All parameters required for pump operation and the listed faults and ope rating hours are stored in a non volatile memory in the pump When the converter is switched on the data are loaded into the converter from the p
2. l le ddo Fig 17 MAG W 1300 dimensions in mm GA05141_0702 09 2004 31 Description MAG W 2200 DN 250 CF Fig 18 MAG W 2200 dimensions in mm 32 GA05141_0702 09 2004 Description MAG W 2800 DN 250 CF VV UU DC UY Bearing Connector Fig 19 MAG W 2800 dimensions in mm GA05141_0702 09 2004 33 Installation 2 Installation MAG W 830 C High vacuum flange Forevacuum flange PK connection DRIVE BEARING connection SS Purge gas in Cooling water connection Correct Wrong Caution 8 bolts M10 x 35 Install the splinter guard as shown Installing the Installation torque per bolt 35 5 Nm splinter guard upside down may lead to contact Bolt quality 12 9 according to EN ISO 898 1 between splinter guard and rotor during fast with coating venting of the pump 0 2 yield strength gt 1080 N mm Fig 20 Connection elements installing the splinter guard and fixing the intake flange for the MAG W 830 C 34 GA05141_0702 09 2004 Installation MAG W 1300 C High vacuum flange Forevacuum
3. 4 PIN SIGNAL O 1 Relay 1 n o FAILURE 18 Relay 1 com FAILURE 34 Relay 1 n c FAILURE CIEN 2 Relay 2n o NORMAL 19 Relay 2 com NORMAL 35 Relay 2 n c NORMAL 03 OPERATION OPERATION OPERATION 052 3 Relay3n o WARNING 20 Relay 3 com WARNING 36 Relay 3 n c WARNING Soc 4 Relay4n o ACCELERATION 21 Relay 4 com ACCELERA 37 Relay 4 n c ACCELERATION oo 5 Relay5n o DECELERATION TION 38 Relay 5 nc DECELERATION o S o 6 Relay6n o OPTION Ee ay 5 com DECELERA 39 Relay6n c OPTION oo 7 Relay7 n o OPTION 23 Relay 6 com OPTION 40 Relay 7 n c OPTION o o o 8 Relay 8 n o OPTION A R y E Go 41 Relay 8 nc OPTION nal 9 Relay9n o OPTION a Cay coll 42 Relay 9 n c OPTION ete 10 GND 5 Relay 8 com OPTION 43 GND o2o 11 Donn REMOTE LOCAL 26 Relay 9 Gem OPTION 44 Dig input VENTING ON o2 12 Dig input START STOP 27 GND 45 Dig input Option 1 209 13 Dig input TMS OFF SS 15V 46 Dig input Option 2 o ol 14 Dig input PURGE GAS OFF toy 47 Dig input EMERGENCY OFF 089 15 oe 48 Dig input EMERGENCY OFF ELE 46 Analog input 1 ST END 49 O 17 Analog input 2 Ss ee 50 Analog output n o normally open com common n c normally closed Fig 44 Assignment control plug X14 EMERGENCY OFF X14 47 EMERGENCY OFF active EMERGENCY OFF X14 48 O Fig 45 Control plug X14 Emergency off The selection of signals for the option relay and the adjustment of their thresholds can be achieved v
4. ve pm D I o Fig 9 Dimensional drawing of the MAG DRIVE 9ital dimensions in mm 19 installation frame 4 x M3 screws Fig 10 Standard fixing of the MAG DRIVEJg tal 24 GA05141_0702 09 2004 Description MAG W 830 C MAG W 1300 C Forevacuum connection DN 40 KF DN 40 KF DN 25 KF DN 40 KF DN 40 KF Inlet flange A MAG W 830 C 160 ISO F 225 MAG W 1300 C 200 ISO F 285 MAG W 1300 C 250 ISO F 335 MAG W 1300 C 250 ISO K 290 Forevacuum connection Fig 11 MAG W 830 C and MAG W 1300 C dimensions in mm GA05141_0702 09 2004 25 Description MAG W 1500 CT Inlet flange A B Cc D E G 200 ISO F 285 260 213 12 30 15 250 ISO F 335 310 261 12 30 16 200 CF 253 231 200 24 15 7 5 H DN 40 KF Heater band 285 M8 15 mm deep _ Fig 12 MAG 1500 CT dimensions in mm 26 GA05141_0702 09 2004 Besprechungsexemplar
5. Analog input 1 Analog input 1 O X14 16 Analog ground See Fig 47 Function diagram outputs Part 1 amp inputs 64 GA05141_0702 09 2004 Installation Motor or bearing __ temperature Threshold Motor current gt Function Threshold gt signal relay Act frequency gt Threshold gt Relay 6 7 8 9 Option X14 23 24 25 26 No cooling water gt No purge gas gt O X14 6 7 8 9 TMS temp ok gt Venting gt X14 39 40 41 42 Pump standstill gt Start command Power supply ok gt Power failure gt Stand by gt Function analog output Analog output d N O X14 50 Analog ground SE ai 7 2 4 3 Current limiting Rotor displacement PVW13peak gt PVW24peak gt PZ12peak Fig 48 Function diagram outputs Part 2 5V Power supply for plug in control TXD RXD n c GND 5V Power supply for plug in control d 5000001 900006 Reset out for plug in control select plug in control input Boot input OMANODAaARWN 3 e Fig 49 Connector assignment interface X7 front side GA05141_0702 09 2004 65 Operation Protecting the touch down bearings Warning Warnin
6. 2 3 Differential pressure between inlet and outlet Fig 38 Recommended cooling water flow 52 6A05141_0702 09 2004 MAG W 1500 2800 3200 CT Bypass operation All pumps Cooling 2 6 Connecting the purge gas Please contact Leybold for assistance in making the decision as to which media can be pumped with or without purge gas In processes which require purge gas the pump will have to be vented when it is switched off through the purge gas port Suited are all gases E which will not cause corrosion or pitting in aluminium and steel and E which in connection with process deposits in the pump will not cause corrosion or sticking For venting and as the purge gas we recommend inert gases like nitrogen or argon The temperature of these gases should be between 5 C and 80 C max relative humidity should not exceed 10 ppm In individual cases and after consultation also dry filtered oil free air or fil tered ambient air may be used filter mesh lt 1pm In this case connect a filter to the purge gas and venting valve see Fig 42 Change the filters after some time at least annually Different venting methods are described in Chapter 3 1 Monitor the purge gas supply continuously Insufficient purge gas flow can result in WR Process gases entering the motor and bearing area of the MAG E Process gases escaping from the purge gas inlet E Humidity entering the pump Inadequate purge gas f
7. Replace the cable if it is damaged or in case the mea surement of the resistance shows abnormal values now Contact Leybold service Check the line voltage 200 240 V 10 15 Repeat step 2of failure TMS 1 In case the measured value is less than 60 Q contact Leybold service Contact Leybold service Check TMS sensor Measure the resistance between pins 1 and 3 of the TMS temperature sensor The resistance is typically bet ween 110 Q and 150 Q 20 C to 140 C Contact Leybold if the sensor is defective Contact Leybold service Measure the resistance between pins 1 and 3 of the TMS temperature sensor Contact Leybold if the resi stance of the sensor is under 100 Q Contact Leybold service GA05141_0702 09 2004 101 Troubleshooting Failure Message on Display Bearing Temp open Sensor loop is interrupted Cooling Temp open Sensor loop is interrupted AMB Not Initial Converter can not identify the pump SPI Com Fail Communication problem bet ween main controller and magne tic bearing controller SPI Timeout Communication problem bet ween main controller and magne tic bearing controller Bearing Overload Magnetic Bearing output current is overloaded Internal Overload DC DC Converter is overheated Rotor Not Lifted PK Communication Converter does not communicate with the memory chip of the pump The failure occurs when the fre quency is lower than 5 Hz In c
8. screw cap with O ring Ce polyethylene bag with cable tie Fig 58 Sealing the MAG tightly with the metal seal kit GA05141_0702 09 2004 93 Troubleshooting 94 GA05141_0702 09 2004 Warning 5 Troubleshooting In case of a malfunction the MAG will be braked and the first line of the display shows FAILURE Malfunction messages can be cancelled once the pump has come to a stop and after the malfunction has been rectified do so with the STOP function button or remote control The MAG shall be stopped completely and the mains power cord detached before you open the MAG DRIVE 9 Since dangerous voltages may nonetheless be encountered the housing must be opened only by a qualified electrician 5 1 Warning Message on Display Motor Temp Temperature sensor inside the motor reads a higher temperature value than the warning threshold 130 C Bearing Temp Temperature sensor inside the pump reads a higher tem perature value than the war ning threshold 98 C Converter Temp Temperature sensor inside of the converter reads a higher temperature value than the warning threshold 70 C Cooling Temp Temperature sensor at coo ling water block reads a hig her temperature value than the warning threshold 50 C Operation Cycles The registered number of start and standby cycles exceeds the permissible num ber normal warning thres hold So as not to constantly ma
9. Menu item Failure Total 65535 Failure TMS 65535 Failure Overload 65535 Failure Temp Bear 65535 Failure Mains 65535 F Storage O 10 Bearing Temp Description Adjustable value option Ac cess min max de Unit value value fault No of total failures since actual value r manufacturing date No of TMS Failures since actual value r manufacturing date Refer to Failure TMS 1 4 Section 6 Troubleshooting No of Overload Failures since actual value r manufacturing date Refer to Failure Overload Section 6 Troubleshooting No of bearing temperature failures actual value r since manufacturing date Refer to Failure Bearing Temp Section 6 Troubleshooting No of mains failures actual value r since manufacturing date Refer to Warning Mains Down Section 6 Troubleshooting n the event of a failure the actual value r characteristic operating parameters failure information 0 8 will be saved in the memory chip using a ring arrangement capable of saving 20 failure events 0 19 in chrono ogical order Index O represents the most recent and index 19 the oldest failure event Operating the Up Down keys lets you step through the index range 0 19 Operating the Enter key lets you step through the failure information 0 8 indicating the following Failure information 0 Failure message in plain text Failure information 1 Date and time o
10. Pumping speed for N measured without splinter guard PNEUROP Le 900 1170 1800 2400 Compression for N 1 5 108 1 5 108 3 5 10 1 109 Compression for H 7 5 lt 102 7 5 102 1 104 1 6 10 Ultimate pressure as to DIN 28 400 mbar lt 1 1010 Max forevacuum pressure with N water cooled mbar 2 2 1 3 air cooled mbar 0 2 0 2 0 1 0 3 Rotor speed min 36 000 36 000 29 400 28 800 Run up time min lt 8 lt 8 lt 10 lt 10 Weight kg 30 30 60 75 Max high vacuum flange temperature short time C F 85 185 for continuous operation C F 60 140 for bake out CF flange only C F 120 248 Forevacuum flange DN 40 KF Admissible ambient temperature C 5 40 oF 40 104 Storage temperature C 10 60 oF 14 140 Max relative air humidity 95 non condensing Degree of protection EN 60529 IP 20 18 GA05141_0702 09 2004 Technical data Continued Purge gas see Section 2 6 MAG DRIVE 9 a Voltage range 200 240 V 10 15 Line supply frequency 50 60 Hz Load Stand by approx 100 W Maximum heated pumps 1800 W Maximum non heated pumps 1100 W Max voltage motor 60 V Maximum pump current 15A rms Internal main fuse 16A Rated braking capacity 200 kA System fuse L or G characteristic Maximum frequency 600 Hz Load capability relay output 42V 1A Temperature during operation 0 45 C Storage temperature 10 C to 60 C Relative air humidity 95 non condensing Overvoltage category II Contaminatio
11. Temperature Management System ooooococcccco o 68 Power control system DC 70 Operation at high gas throughput or high forevacuum pressure 70 Bak6Out y ii a o eta 71 Operation with the START and STOP kee 72 REMOTE ue as i lean had ene cee ale ele Re ee a 13 3 8 3 9 10 10 1 w 10 2 10 3 10 4 10 5 10 6 10 7 10 8 10 9 Operation with plug in control 2 0 6 eee 75 Operating Statuses c fur ata apts awh Detour EE oe kes 76 Operating MENU si id ede Ried ae Ea ee ee ld AS 80 Basic Mes tata Ne A eta abe cadet Minhas in thet 80 Menu System Ova ad led arial yh niet eta is ba dale Rb 81 Mer Fallure Storage ies i chat a PR a ey tardan 82 Menu SEU CONVE sir riera ack eee alae es heen SE 83 Menu Set PUMP Ae sede NENNT ENN ENN NEEN ae pate eae 84 Menu Sek DM Arer ds Gat a aes abet dE A 84 Menu Set POOL MED ica wie wae a es eis ews 84 PreQuenICYSCTINGS EE bea ag RUE cade he Quai grave ne 85 Total Mew oF THE MENU sro aia AA Cee SE eG eal 88 Maintenance 90 GIGANING Ae Akal Sd hate Lees 90 Changing the rotor ition A A i i eas oe ts he 90 Changing the touch down bearings 90 Cleaning the frequency converter internally 2c eee eee 91 Removing the pump from the system eee 91 Seco LSybOOlG S ENEE 92 IR ele 92 Troubleshooting oo oooooocononnca eee eee eee 94 Warning Messages lt lt ttl netted Ghd Zeie A dae PASE hack Sege ierg 95 Failure messages iio dd dee A ee ve 97 EI le
12. ticles entering into the pump from the process During venting the flow must be of the laminar type in both the vacuum chamber and the turbo molecular pump The pump must not be vented to pressures above atmospheric pressure Operation GA05141_0702 09 2004 67 Operation only for MAG CT 68 GA05141_0702 09 2004 Caution 3 2 Temperature Management System Function description The TMS is only in function when a MAG CT version is connected The heater will be activated when the mains is switched on The TMS controls the heating and water cooling to maintain the pump at the specified setpo int temperature In order to maintain an almost homogeneous temperature distribution in the pump the system is equipped with several temperature sensors The mea sured values of these sensors are used to determine two temperatures for the TMS Tous and T Both temperatures are used to switch on and off the heater and the cooling water valve Switching points Heater OFF gt ON Tims lt Te 7 1 K Heater ON gt OFF Tims gt Tse 1 K Cooling OFF gt ON Ty gt Tog 2K Cooling ON OFF Ty lt Tyg 1K TMS ok Toei 8 K lt Trg Tse 5 K Warning TMS Tims gt Tset 5K Settings The temperature TMS setpoint can be programmed via the front panel keys at every time Principally the factory presetting will be used The setting is saved in the pump s memory chip Before changing any setpoint value request Le
13. 60 minutes depending on cooling water temperature and flow In case of corresponding connection the backing pump will be activated when switching on the MAG DRIVE 9 E Open the purge gas supply With a converter with default settings the pump s purge gas valve is open E Open the cooling water supply E Press the START key The pump runs up The STATUS LED is slowly flashing green When the STATUS LED is lit permanently green the pump is in normal operation Switching off E Press the STOP key The STATUS LED is fast flashing green When the STATUS LED is off the pump has come to a standstill E Close the cooling water supply when the pump is switched off in order to avoid condensate formation in the pump The backing pump may be switched off once the MAG has stopped If the MAG has been used for pumping corrosive gases it should be pur ged with dry nitrogen for one hour before switching off During down times of the system take care that neither ambient air nor cleaning agents enter the pump After a failure has occured and has been removed acknowledge the failu re message by pressing the STOP key Remote X14 11 Q _ Start X14 12 ae oe GND X14 10 O Switch closed START Switch open STOP Fig 52 Connecting up example remote control Significance of the lamps COM green Is lit if communication has been established via the interface STATUS green red Red steady light Failure Red fla
14. DIN 28 400 Max forevacuum pressure Rotor speed Run up time Braking time with without venting Cooling Cooling connection threads with Swagelok elbow for tube OD with stainless steel hose nipples for tube ID Cooling water temperature Base flange temperature Weight Max high vacuum flange temperature short time for continuous operation Vibration level at high vacuum flange at max speed Forevacuum flange Recommended backing pump Dry commpressing pump with pumping speed or rotary vane pump Admissible ambient temperature Storage temperature Max relative air humidity Degree of protection EN 60529 DN Le Le Le mbar mbar min min min mm C F C F kg C F C F um DN m h TRIVAC C F C F W 2200 C W 2200 C W 2800 CT 200 ISO F 250 ISO F 250 ISO F 1600 2000 2650 1450 1900 2450 1650 1800 2100 gt 108 lt 108 2 0 29 400 29 400 28 800 lt 8 lt 8 lt 10 1 lt 7 1 lt 7 2 lt 9 water 1 8 6 4 1 4 1 2 1 2 10 30 50 86 20 80 68 176 48 48 64 85 185 60 140 lt 0 01 40 KF 100 D 65 BCS 5 40 40 104 10 60 14 140 95 non condensing IP 20 Description W 3200 CT 320 ISO F 3200 3000 2250 28 800 lt 10 2 lt 9 6 4 1 4 65 GA05141_0702 09 2004 17 Description Technical data Continued MAG W 830 W 1300 W 2200 W 2800 High vacuum flange DN 160 CF 200 CF 250 CF 250 CF
15. Description MAG W 830 C W 1300 C W 1300 C High vacuum flange DN 160 ISO F 200 ISO F 250 ISO F 250 ISO K Pumping speed PNEUROP for N Le 700 1100 1220 for Ar Le 650 1050 1180 for H Le 300 920 1020 Compression for N gt 5 107 gt 108 gt 108 Ultimate pressure as to DIN 28 400 mbar lt 108 lt 108 lt 108 Max forevacuum pressure with N mbar 2 2 2 Rotor speed min 24 000 36 000 36 000 Run up time min lt 4 lt 6 lt 6 Braking time with without venting min 1 lt 4 1 lt 6 1 lt 6 Cooling water Cooling connection threads G 1 4 with Swagelok for tube OD mm 6 4 1 4 6 4 1 4 6 4 1 4 or with John Guest fitting for tube mm 6 6 Cooling water temperature C 10 30 F 50 86 Weight approx kg 82 Max high vacuum flange temperature short time C 85 F 185 for continuous operation C 60 F 140 Vibration level at high vacuum flange at max speed um lt 0 01 Forevacuum flange DN 40 KF 40 KF 40 KF or 25 KF Recommended backing pump Dry commpressing pump with pumping speed m 9 h 100 or rotary vane pump TRIVAC D 65 BCS Admissible ambient temperature C 5 40 oF 40 104 Storage temperature C 10 60 oF 14 140 Max relative air humidity 95 non condensing Degree of protection EN 60529 IP 20 GA05141_0702 09 2004 15 Description Technical data Continued MAG High vacuum flange Pumping speed PNEUROP for N for Ar for H Compression for N U
16. If several turbomolecular pumps are installed to the vacuum chamber of the same system there is the risk of interference vibration interference bet ween the pumps If such a risk exists please contact Leybold Vacuum Application Support We recommend installing an isolation valve between the pump and the chamber The valve should be closed during wet cleans of the chamber and in case of pump failures which will lead to a pump shut down The valve should normally be closed with power off The basic flange heater can become so hot during operation gt 85 C gt 185 F that it represents a burn hazard Provide protection against contact with the hot components Installation Earthquake protection Vibration influence Isolation valve Warning GA05141_0702 09 2004 47 Installation Turbomolecular pump Forevacuum gauge point Backing pump Anti vibration bellows Forevacuum valve High vacuum valve Purge gas connection Valve in the roughing line Electronic frequency converter OO JO Om P GObh A roughing line recommended if shorter cycle times are to be achieved SS a DRIVE BEARING and TMS cable Fig 34 Layout of a turbomolecular pump system 2 4 Connecting the backing pump A two stage rotary vane pump or dry compression backing pump is requi red to support operation of the MAG In case of high gas throughput it may also be necessary to use a roots blo wer to achieve the bac
17. W 2200 42 GA05141_0702 09 2004 Installation MAG W 2800 High vacuum flange AR ling water GA D 9 i l oo MW connection DRIVE BEARING connection Purge gas inlet blind flanged Correct EN U Se Gini a n o jy DN 250 CF 32 bolts M8 x 40 Caution dee torque per polt 25 5 Nm Install the splinter guard as shown Installing Bolt quality 119 9 according to the splinter guard upside down may lead to EN 1S0 898 1 with coating contact between splinter guard and rotor 0 2 yield strength gt 900 N mm during fast venting of the pump Fig 29 Connection elements installing the splinter guard and fixing the intake flange for the MAG W 2800 GA05141_0702 09 2004 43 Installation Keep the packaging Caution Warning Magnetic field 44 GA05141_0702 09 2004 Radiation 2 1 Unpacking storing transpor tation Remove the equipment from the transportation box and keep the packa ging Make sure that the product has not been damaged during transpor tation If this unit is damaged contact your carrier and inform Leybold if necessary For storage of the product use the packaging provided Lift the pump by the crane eyelets You can position the pump on the base plate for transport with a lift truck Protect the pump against slipping and tipping over Be careful not to damage the sockets and coolant connections durin
18. Work under a fume hood if avail able Disconnect the cables from the pump Disconnect the cooling water lines Remaining cooling water may flow out Protect all parts below Remove all bolts but 2 which hold the intake flange The 2 remaining bolts must be directly opposite Disconnect the forevacuum line GA05141_0702 09 2004 91 Maintenance Seal all ports Contamination Form Contamination 92 GA05141_0702 09 2004 Warning Support the pump with a lift truck at the base plate and remove the 2 remaining bolts Clean the intake and forevacuum connection flange as necessary for good adhesion of tape Place the dry cartridge into the forevacuum port Don t use loose crystals Firmly seal all ports with plastic adhesive film Cover the forevacuum connection port with its plastic cap Seal the high vacuum connection flange with the cover and the screws Pack the pump so that it may not be damaged during transportation Particularly protect the flanges the cooling water connectors and the cur rent feedthrough 4 6 Service at Leybold s If you send a pump to Leybold indicate whether the pump is free of sub stances damaging to health or whether it is contaminated If it is contami nated also indicate the nature of hazard To do so you must use a pre printed form which we shall send to you upon request A copy of this form is printed at the end of the Operating Instructions Declaration of Co
19. and Service Phone 33 1 69 82 48 00 Fax 33 1 69 07 57 38 Great Britain Leybold Vacuum UK Ltd Waterside Way Plough Lane London SW17 0HB Sales sales leybold co uk Phone 44 20 8971 7000 Fax 44 20 8971 7001 Service service leybold co uk Phone 44 20 8971 7030 Fax 44 20 8971 7003 Sales and Service Net Worldwide Italy Leybold Vacuum Italia S p A 8 Via Trasimeno 20128 Milano Sales sales leybold it Phone 39 02 27 22 31 Fax 39 02 27 20 96 41 Service service leybold it Phone 39 02 27 22 31 Fax 39 02 27 20 96 41 Netherlands Leybold Vacuum Nederland B V Computerweg 7 3542 DP Utrecht e mail mail leybold nl Sales and Service Phone 31 346 58 39 99 Fax 31 346 58 39 90 Spain Leybold Vacuum Espa a S A C Huelva 7 08940 Cornella de Llobregat Barcelona leybold leyboldspain com Sales Phone 34 93 666 46 16 Fax 34 93 666 43 70 Service Phone 34 93 666 49 51 Fax 34 93 685 40 10 Sweden Leybold Vacuum Scandinavia AB Box 9084 40092 Goteborg info leybold se Sales and Service Phone 46 31 68 84 70 Fax 46 31 68 39 39 Switzerland Leybold Vacuum Schweiz AG Leutschenbachstrasse 55 8050 Z rich sales leybold ch Sales Phone 41 1 308 40 50 Fax 41 1 302 43 73 Service Phone 41 1 308 40 62 Fax 41 1 302 40 60 AMERICAS USA Leybold Vacuum USA Inc 5700 Mellon Road Export PA 15632 info leyboldvacuum com Sale
20. flange DRIVE BEARING connection ISO F flange DN 200 260 mm Correct DN 250 310 mm DN 200 213 mm DN 250 261 mm 35 mm Wrong i ISO K flange Caution Install the splinter guard as shown Vacuum sealing disk consisting Installing the splinter guard upside of centering ring and O ring down may lead to contact between with outer support ring splinter guard and rotor during fast Retaining ring venting of the pump ISO K flange ISO F collar flange Bolt 12 bolts M10 x 35 Installation torque per bolt 35 Nm Bolt quality 12 9 according to EN ISO 898 1 with coating 0 2 yield strength gt 1080 N mm Fig 21 Connection elements installing the splinter guard and fixing the intake flange for the MAG W 1300 C GA05141_0702 09 2004 Installation MAG W 1500 CT High vacuum flange Heater band Forevacuum flange Purge gas valve Cooling water connection Purge gas in TMS PK DRIVE BEARING connection connection connection Correct DN 200 CF 24 bolts M8 x 40 Installation torque per bolt 25 Nm Bolt quality 10 9 according to EN ISO 898 1 with coating 0 2 yield strength gt 900 N mm Wrong DN 200 260 mm DN 250 310 mm Caution ISO F flange Install the splinter guard as shown DN 200 213 mm Installing the splinter guard upside DN 250 261 mm 12 Schrauben M10 x 35 Installation torque per bolt 35 9 Nm Bolt quality 12 9 according to E
21. front panel keys Operating display Acceleration 14 54 254Hz HOK Operating status Motor current Actual frequency TMS status code If a critical operating status occurs this warning is displayed alternating with the operating display Failure Accel Time Failure message Failure cause Fig 55 Display Fu Plug in control nction Returns to the operating display from the storage procedure without storage Returns to the operating display from any point of the basic menu No function Selects the programming menu from the operating display Confirms to store changed parameters to the EEPROM Switches forward to the next submenu Starts the pump only possible if there is no fault The start key is only active if the user is in the basic menu or in the operating display Stops the pump Returns to the operating display from the programming menu Acknowledges a failure after the cause of the failure has been removed only possible if the user is in the operating display Increases a parameter value or proceeds to the next option Lowers a parameter value or returns to the previous option Selects the programming menu from the operating display Switches back to the last main menu Selects the programming menu from the operating display Switches forward to the next main menu TMS status code No 4 oa FR wo hy Oo oO N OD Code Description H Heating pump HOK Temp TMS
22. item Purge Vent Option P V Menu Set Purge Vent Description The operator can select one of the beside standing options for purge and vent Displays the factory installed option for purge and vent Adjustable value option Ac cess min max de Unit value value fault purge OFF r won purge ON Controlling purge vent via control plug X14 Installed option r Plug in control General Sequence Default Values 490 Hz Maximum Frequency __ 490 Hz Maximum Frequency Freq Setpoint 465 5 Hz Normal Operation Threshold Freq Setpoint 95 of Freq Setpoint Normal Operation Threshold xx to 99 of Freq Setpoint Standby Setpoint with 20 Hz Hysteresis 250 Hz Standby Setpoint with 20 Hz Hysteresis 200 Hz Minimum Frequency 200 Hz Minimum Frequency Acceleration within 1000 secs Acceleration within Max Accel Time 600 to 3600 secs de Standstill ca Standstill 0 Hz andsti 0 Hz andsti Fig 57 Schematic of frequencies 3 10 8 Frequency settings The operating frequency the normal operation threshold and the stand by frequency can be set The values for normal operation threshold and stand by frequency including its hysteresis must not overlap The software does not accept values which could cause conflicts GA05141_0702 09 2004 85 Plug in control Table A Option relays Function of the option relays Refer to Set Converte
23. pump has come to a standstill When applying external voltage in excess of 42 V to terminals of the device observe local safety regulations Unauthorized device conversion and modifications are prohibited for safety reasons Only suitably qualified personnel are permitted to work on the pump or converter Personnel must be completely knowledgeable of all warning information and measures which are specified in this Instruction manual for transporting installing and operating the unit Qualified personnel Qualified electrical personnel in this instruction manual means a person who has received electrical engineering instruction or is an electrical expert in accordance with EN 60204 Part 1 3 30 respectivly 3 55 The device contains electrostatically sensitive devices ESD Warning Ensure that no items like bolts nuts washers pieces of wire for example enter into the inlet of the pump Foreign objects which enter into the pump will generally cause severe damage Damage caused by the intake of foreign objects is not covered by our war ranty For this reason always leave the supplied inlet screen in place Caution The equipment must not be exposed to drip or spray water Caution GA05141_0702 09 2004 5 Figures The references to diagrams e g 1 2 consist of the Fig No and the Item No in that order We reserve the right to alter the design or any data given in these Operating Instructions The illustrations ar
24. that there is no dan ger of ignition at pressures below about 100 mbar A hazardous condition will be created if flammable mixtures enter the hot pump at pressures above 100 mbar During operation the pump can reach temperatures as high as 120 C 248 F If the pump is damaged sparks could occur which could ignite explosive mixtures Also note the safety information provided by the gas supplier Materials Caution Purge gas Layers Caution Description GA05141_0702 09 2004 9 Description Ceramic layer Magnetic bearing Touch down bearings Data storage 10 GA05141_0702 09 2004 13 Design of the MAG The MAG comprises basically the pump housing the multistage rotor with the stator package the drive and a magnetic bearing Rotor The rotor is made from a high strength aluminium alloy The rotor and the lower stator plates are protected with a special ceramic layer KEPLA COAT The standard rotor is a multi stage axial flow turbine In addition to the turbine stage the wide range rotor has a screw stage Both rotors are machined from one piece and the geometry of the the bla des is optimized for high compression and pumping speed of the typical gases used in semiconductor manufacturing processes Bearings The MAG has a built in precision 5 axes controlled magnetic bearing The rotor is suspended by trouble free magnets along two orthogonal axes in each of two radial planes E and com
25. the correct mounting of the converter in a rack max ambient tem perature 45 C Apply cooling water according to specifica tions Check cooling water tubes for deposits See also Section 2 5 Make a service date Make a service date GA05141_0702 09 2004 95 Troubleshooting Warning Message on Display Unbalanc PVW13 Unbalanc PVW24 Unbalanc PZ12 A rotor displacement excee ding the warning threshold occured The code designa tes the affected axis Overload The rotational speed dropped below normal operation fre quency Mains down The converter is in the gene rator mode Op Without Purge The warning indicates that a C CT type of pump is opera ted while the purge gas valve is closed Protection The pump drive is blocked PK Communication Converter does not commu nicate with the memory chip of the pump Overspeed Actual frequency exceeds the setpoint more then 10 Hz The motor current drops to OA the frequency decrea ses to the actual frequency setpoint SPI Com Fail Communication problem bet ween main controller and magnetic bearing controller Rotor Not Lifted ABS Not Active ABS Active 96 GA05141_0702 09 2004 Possible Cause Mechanical shocks perhaps due to tool maintenance Shock venting Converter failure Backing pressure too high during opera tion Parameters Normal Operation are not set correctly Mains interru
26. time w Ready gt STOP command START command Start Delay Mains ok Mains failure Acceleration Frequency gt P 25 x P24 i 4 Mains fail E Stand by lt n C Normal Operation Rb vs Mains Down B Frequency gt P25 x P24 Frequency lt P25 x P24 d Overload 2 Mains failure STOP command d Deceleration Frequency lt 5 Hz Failure occurs Fail If a failure occurs allure the pump is decelerated Failure acknowledgement Parameter only possible if f lt 5 Hz P24 Frequency setpoint P25 Factor normal operation Fig 56 Diagram Operation status GA05141_0702 09 2004 79 Plug in control ter Freq Setpoint 600 Hz Motor Temp 50 C Enter Converter Temp 40 C Bearing Temp 50 C Actual Value TMS 70 C Not Active TA 68 C Enter Cooling Temp 38 C Not Active 3 10 Operating menu 3 10 1 Basic Menu Menu item Description Adjustable value option Ac cess min max stan Unit value value dard Ready Operating display z Freq Setpoint Sets the speed for operation 150 E Hz r w on Every change is directly written into the pump s data storage and is valid immediately Motor Temp Motor temperature actual value C r Converter Temp Temperature of the power actual value C r electronic Bearing Te
27. to maximum cleanliness when connecting Remove the transport seal from the intake flange To do so unscrew the screws 30 2 and remove the aluminum cover We recommend saving the transport seal for maintenance Foreign objects entering the pump through the high vacuum flange can cause serious damage to the rotor That s why the splinter guard must always be installed Damages caused during operation without the splinter guard are excluded from warranty The pump must be securely attached If the pump should sud denly seize inadequate attachment could cause the pump to break away or allow internal pump parts to be discharged Never operate the pump in bench tests for instance without its being connected at the vacuum chamber If the pump should suddenly seize a high decceleration torque will have to be absorbed by the system To accomplish this use all bolts provided by Leybold for fastening the high vacuum flange or use bolts of the prescribed quality see also the Fig 20 to 29 and 31 to 33 Pumps with ISO K flange must not be attached with clamps Installation Splinter guard Warning GA05141_0702 09 2004 45 Installation Nut N 160 ISO F 8 bolts M 10 x 50 ISO F flange mm stallation torque per bolt 35 5 Nm Dese Vacuum sealing disk consisting ALI ee of centering ring and O ring X VW ty stallation torque per bolt 35 5 Nm with outer support ring lt gt lt 2 Ll WN ees DN 320 ISO F 10
28. 0 C Bearing Temp Temperature sensor inside the pump reads a higher temperature value than the failure threshold 100 C Converter Temp Temperature sensor inside of the converter reads a higher temperature value than the failure threshold 90 C Possible Cause Motor temperature exceeds the failure threshold e g due to a high gas load Motor temperature sensor defective BEARING cable or connector dama ged Converter failure Cooling water flow too low or cooling water temperature too high Converter failure Cooling water flow too low or cooling water temperature too high Frequent acceleration and decelera tion of the pump Pt 100 temperature sensor bearing damaged Converter failure Frequent acceleration and decelera tion of the pump No sufficient air circulation Converter failure Troubleshooting Measures Acknowledge failure message Take the actual motor temperature reading from the display see Section 3 10 1 Reduce gas load If the warning persists contact Leybold service Step 1 Check pump temperature sensor Check pump connector X23 In particular measure resistance between pins X23 CC and X23 BB The resistance is typically 2kQ 1 In case of abnor mal values gt 3 4 kQ are measured contact Leybold service Step 2 Check BEARING cable If step 1 was successful do the following Check BEARING cable for bent pins Measure the resistance betw
29. 07 straight bended 180 straight 400036V0006 bended 225 straight straight 400036V0008 straight bended 270 straight 400036V0009 bended 225 straight straight 400036V0004 straight straight straight 400036V0010 bended 225 straight straight 400036V0005 bended 225 straight straight 400036V0002 bended 225 straight straight 400036V0003 bended 225 straight straight 400036V0012 bended 225 straight straight 400036V001 1 Converter cable outlet Pump cable outlet TMS X21 TMS X30 Heater X31 Part No bended 225 straight bended 180 400037V0001 straight straight bended 180 400037V0007 bended 225 straight bended 180 400037V0008 bended 225 straight bended 180 400037V0004 bended 225 straight bended 180 400037V0005 bended 225 straight bended 180 400037V0002 bended 225 straight bended 180 400037V0003 Cable Purge Vent for optional purge vent valve Part No 121 33 only Cable length 1 5m 3m 10m 20m Converter cable outlet Pump cable outlet TMS X21 Purge Vent Part No straight bended bended 400038V0007 bended 225 bended bended 400038V0006 bended 225 bended bended 400038V0002 straight bended bended 400038V0009 Fig 8 Overview and ordering data for connecting cables GA05141_0702 09 2004 23 Description max 115 h straight plugs bended plugs
30. 10 2 for Conv SR SW Rev Contact Leybold service Contact Leybold service Contact Leybold service Contact Leybold service Contact Leybold service Check cable connections Check cable Replace cable if it is damaged Contact Leybold service 5 3 Malfunctions Malfunction Converter dead LED mains does not light up after swit ching on Display malfunction confu sing messages No reaction when pressing keys Vacuum chamber pressure rises above normal backing pressure while the pump is stopped No purge gas flow Base pressure not reached MAG CT does not heat up Display blurred One or two high frequency sounds every 4 to 7 minutes display changes for a short time The values for frequency set point or normal operation are reset to standard values after the frequency converter has been changed Possible Cause No power supply Fuse F1 blown or converter failure Converter failure Purge gas and venting valve open or malfunctioning Valve malfunctioning Degassing surfaces of rotor and stator If the pump was stored in a humid environ ment or was exposed to humid ambient air all surfaces will be covered with con densation TMS failure Ambient temperature too high or too low This is no malfunction but a routine check of the overspeed protection The new frequency converter has a default value for stand by operation that overlaps with the normal opera
31. 4 Front panel Connection control plug Mains connection Connection magnetic bearing pump motor memory chip Connection TMS purge gas valve Network connection optional Fig 5 Rear panel with connections E GA05141_0702 09 2004 13 Description 14 GA05141_0702 09 2004 15 Standard specification MAG The turbomolecular pumps are shipped complete sealed in a PE bag con taining a desiccant The maximum effective life time of the desiccant is one year The intake flange is sealed with a transport seal the forevacuum flange with a plastic cap For the intake flange a centering ring with FPM O ring outer ring and a splinter guard are enclosed We also provide the bolts for attaching the pump to your tool To avoid any safety risk we highly recommend using only the bolts provided with the pump Refer also to Section 2 3 Connecting the MAG The electronic frequency converter MAG DRIVE 9 the cables required for operation and a seal kit to seal the pump tightly if it is removed from the process must be ordered seperately MAG DRIVE 9t E Converter E Line supply cable with USA connector approx 3m E Line supply cable with EURO connector approx 3 m E 2 spare fuses for the TMS miniature fuses 5 x 20 mm F4A according to IEC 127 2 1 and 2 fuse holders 6 3 x 30 mm Connector for control plug X14 pins 47 48 bridged E
32. 48 53 57 60 62 66 67 72 75 76 86 96 98 103 Purge Vent 7 23 63 84 86 89 R radiation 44 71 relay 12 19 60 61 70 78 83 86 89 remote control 12 73 94 S seal kit 14 21 91 93 serial interface 12 59 62 83 96 shock 48 66 96 98 splinter guard 14 18 20 34 43 45 stand by 19 60 66 73 78 79 83 86 99 103 T technical data 15 19 54 temperature sensor 22 95 97 99 102 TMS 7 9 12 14 22 23 36 38 39 48 59 63 68 70 72 75 77 80 82 84 86 89 100 103 torque 4 34 48 45 46 48 90 touch down bearings 66 90 transport seal 14 45 98 VM venting 15 17 34 36 40 43 48 53 54 56 57 61 67 76 83 86 89 96 98 103 vibration 10 15 17 47 48 98 GA05141_0702 09 2004 111 EUROPE Germany Leybold Vacuum Bonner Strasse 498 Bayenthal D 50968 Cologne sales leybold com Phone 49 221 347 1234 Fax 49 221 347 1245 Leybold Vacuum Service Center Emil Hoffmann Strasse 43 50996 Cologne Suerth service leybold com Phone 49 221 347 14 39 Fax 49 221 347 19 45 Belgium Leybold Vacuum Nederland B V Belgisch bijkantoor Leuvensesteenweg 542 9A 1930 Zaventem info leybold be Sales Phone 32 2 711 00 83 Fax 32 2 720 83 38 Service Phone 32 2 711 00 82 Fax 32 2 720 83 38 France Leybold Vacuum France S A 7 Avenue du Quebec Z A de Courtaboeuf B P 42 91942 Courtaboeuf Cedex leybold vacuum leybold fr Sales
33. 99 99 221 rotor displacement in the mag bearing plane VW24 0 00 199 99 222 rotor displacement in the mag bearing axis 212 0 00 199 99 209 analog input 1 0 00 100 00 210 analog input 2 0 00 100 00 Example P N Analog Out Section 3 10 4 is set to parameter P125 bearing temp Definition U Ana out P125 current P125max value Scale factor 10 V P125 current Vana out P125max value Scale factor 10 V P125 bearing temp C Scale factor Analog out Uana out Y 20 1 00 1 43 40 2 50 7 14 75 1 87 10 00 100 1 00 7 14 GA05141_0702 09 2004 87 Plug in control 3 10 9 Total view of the menu Basic menu Nr Ready Y System Info Failure Storage 00A ous gt AAA or A or er EI Enter gt lt q Freq Setpoint Real Time Clock Failure Total 600 Hz 99 12 31 23 59 65535 er Enter GIE Failure TMS Toe d 65535 MD Digital Converter Temp Conv Cat No SE 40 C 99999999999 KE Enter Fail Temp Bear Bearing Temp Conv Serial No a 65535 50 C 99999999999 SE Enter Conv SR SW Rev Failure Mains 65535 6 55 35 Enter gt Conv AMB SW Rev 6 55 35 F Storage 0 10 Bearing Temp 99 12 31 00 00 Enter Conv AMB Data R 1 01 Conv Op Hours 167772 16 Pump Cat No 99999999999 Pump Ser No 99999999999 Enter Name 1500 CT Pump
34. AG DRIVE g tal Part No 400035V0011 121 36 The products comply to the following guidelines E EC Low Voltage Equipment Guidelines 73 23 EWG and 93 68 EG E EC Directive on Electromagnetic Compatibility 89 336 EWG 91 263 EWG 92 31 EWG and 93 68 EWG Related harmonized standards M EN 61010 1 2002 WEN 61000 6 4 2001 WEN 61000 6 2 2001 Cal gne Sept 14 2004 A Cologne Sept 14 2004 Marcus Eisenhuth Manfred Kieffer Vice President Development Design Head of Product Development Leybold Vacuum Leybold Vacuum GmbH Bonner StraBe 498 Bayenthal 50968 K ln Tel 49 0 221 347 0 Fax 49 0 221 347 1250 documentation leybold com www leybold com GA05141_0702 09 2004 105 106 GA05141_0702 09 2004 SEMI NRTL LISTED Semiconductor Equipment and Materials International The system MAG Iital LINE E turbomolecular pump E connecting cables E frequency converter has been tested by the TUV Rheinland of North America according to the requirements of E NATL used standards UL 61010A 1 and IEC 61010 1 A2 and E SEMI S2 The components are in compliance to the tested standards Certificate No US 2271305 01 02 and 03 Leybold Vacuum Notes 107 GA05141_0702 09 2004 Leybold Vacuum Declaration of Contamination of Compressors Vacuum Pumps and Components The repair and or servicing of compressors vacuum pumps and components will be carried out only if a
35. Bolt quality 12 9 according to EN ISO 898 1 with coating 0 2 yield strength gt 1080 N mm Fig 24 Connection elements installing the splinter guard and fixing the intake flange for the MAG W 2800 C CT 38 GA05141_0702 09 2004 Installation MAG W 3200 CT High vacuum flange Heater band Forevacuum flange Purge gas valve Purge gas in Cooling water connection PK TMS DRIVE BEARING connection connection connection 1 Housing 2 Splinter guard 3 Ring 40 mm 10 bolts M12 x 40 Installation torque per bolt 45 Nm Bolt quality 12 9 according to EN ISO 898 1 with coating 0 2 yield strength gt 1080 N mm Fig 25 Connection elements installing the splinter guard and fixing the intake flange for the MAG W 3200 CT with DN 320 ISO F flange GA05141_0702 09 2004 39 Installation MAG W 830 Purge gas inlet blind flanged Correct jy Caution Install the splinter guard as shown Installing the splinter guard upside down may lead to contact between splinter guard and rotor during fast venting of the pump High vacuum flange Forevacuum flange DRIVE BEARING connection Cooling water connection a He DN 160 CF 20 bolts M8 x 40 Installation torque per bolt 25 9 Nm Bolt quality 10 9 according to EN ISO 898 1 with coating 0 2 yield strength gt 900 N mm Fig 26 Co
36. C Guidelines will be attained Designation Turbomolecular pump MAG gital LINE Models MAG W 880 C MAG W 830 MAG W 1300 C MAG W 1300 MAG W 1500 CT MAG W 2200 MAG W 2200 C MAG W 2800 MAG W 2800 C T MAG W 3200 CT Applied harmonized standards MEN 1012 2 1996 Cglogne Sept 14 2004 Part Nos A00000Vxxxx 400003V0002 400006V0071 400020Vxxxx 400021 Vxxxx 4000260 Vxxxx Cologne Sept 14 2004 LL JE Pete Marcus Eisenhuth Vice President Head of Product Development Ralf Adamietz Head of Design 400027Vxxxx 400030Vxxxx 400081 Vxxxx 400100Vxxxx 4001 10Vxxxx x 0to9 Leybold Vacuum Leybold Vacuum GmbH Bonner StraBe 498 Bayenthal D 50968 K ln Tel 49 0 221 347 0 Fax 449 0 221 347 1250 documentation leybold com 104 GA05141_0702 09 2004 www leybold com EC Conformance Declaration We the Leybold Vacuum GmbH declare herewith that the products listed below in the embodiment which we have placed on the market comply with the applicable EC guidelines This declaration becomes invalid if modifications are made to the product without consultation with us Maintaining the EMC guideline assumes an EMC adapted installation of component within the plant or machine Test were run using a typical construction in a test assembly that conforms with the standards Time of the CE label year 2004 Designation of the products Frequency converter Plug in control Model M
37. EE els ads Saha ak 103 EC Manufacturer s Declaration 00sec eee eee eee 104 EC Conformance Declaratton eee eee eee eee eee 105 Operating Instructions for MAGdigital series 0 0 0 0 00 110 Ndek nected swage Sari a eee tee ea ae a dee a 111 Contents GA05141_0702 09 2004 3 Safety information General safety information Warning Indicates procedures that must be strictly observed to prevent hazards to persons Caution Indicates procedures that must be strictly observed to prevent damage to or destruction of the MAG The Leybold MAG29 vacuum pump system is designed for safe and efficient operation when used properly and in accordance with this manual It is the responsibility of the user to carefully read and strictly observe all safety precautions described in this section and throughout the manual The turoomolecular pump must only be operated in the proper condition and under the condi tions described in the Operating Instructions It must be ope rated and maintained by trained personnel only Consult local state and national agencies regarding specific requirements and regulations Address any further safety operation and or mainte nance que stions to your nearest Leybold Vacuum office Warning Never expose any parts of the body to the vacuum Warning The standard version of the equipment is not suited for operation in explosion hazard areas Contact us before planning to use the pump under such circumst
38. N ISO 898 1 with coating 0 2 yield strength gt 1080 N mm down may lead to contact between splinter guard and rotor during fast venting of the pump Fig 22 Connection elements installing the splinter guard and fixing the intake flange for the MAG W 1500 CT 36 GA05141_0702 09 2004 Installation MAG W 2200 C Ny High vacuum flange Forevacuum flange Cooling water connection DRIVE BEARING connection Purge gas in PK connection Cooling water PK connection connection DRIVE BEARING connection Purge gas in DN 200 260 mm DN 250 310 mm a Housing 2 Splinter guard 3 Ring Elle DN 200 213 mm DN 250 261 mm Z ad T oc 12 bolts M10 x 35 Installation torque per bolt 35 Nm Bolt quality 12 9 according to EN ISO 898 1 with coating 0 2 yield strength gt 1080 N mm Fig 23 Connection elements installing the splinter guard and fixing the intake flange for the MAG W 2200 C GA05141_0702 09 2004 37 Installation MAG W 2800 C CT High vacuum flange Heater band Forevacuum flange q fA D LE Purge gas valve Purge gas in Cooling water connection DRIVE BEARING connection PK TMS connection connection 1 Housing 2 Splinter guard 3 Ring 37 12 bolts M10 x 35 Installation torque per bolt 35 9 Nm
39. Nur zum intsrnen Gebrauch Description MAG W 2200 C Part No 400081V0011 400081V0021 Inlet flange A B Cc D 200 ISO F 285 396 213 260 250 ISO F 335 371 261 310 Fig 13 MAG W 2200 C dimensions in mm GA05141_0702 09 2004 27 Description MAG W 2200 C Part No 400081V0020 9335 9283 Fig 14 MAG W 2200 C dimensions in mm 28 GA05141_0702 09 2004 Description MAG W 2800 CT MAG W 3200 CT Inlet flange A B Cc D E F G H 250 ISO F 335 310 261 11 3 293 361 408 320 ISO F 425 395 318 13 5 0 248 316 363 Ou gt 369 L M8 14tief Fig 15 MAG 2800 CT and MAG 3200 CT dimensions in mm GA05141_0702 09 2004 29 Description MAG W 830 Fig 16 MAG W 830 dimensions in mm 30 GA05141_0702 09 2004 Description MAG W 1300 9253 DN 200 CF
40. OPERATING INSTRUCTIONS GA05141_0702 MAG LINE digital Turbomolecular Pumps with Magnetic Bearing MAG DRIVE 9 ta Electronic Frequency Converter Leybold vacuum Contents 2 GA05141_0702 09 2004 Section 2 2 2 3 2 4 2 5 2 6 2 7 2 7 1 2482 2 7 3 2 7 4 3 1 3 2 3 3 3 4 3 5 3 6 3 7 Page General safety Information 4 Description e d iia ia a da eee ee 7 DYSTOM OVA Wii iii Seu NN il o NEEN e NEEN 7 Compatibility with pumped mea 9 Designo the MAG i jas sete wee teas ale ee ti ets ee a 10 Function and design of the MAG DV 12 standard Specification comida rata ad ped eel e ba S 14 BS elle Daria ra E a a ia 15 AR E Ab ake 21 P mp configuratioh ss rir ere pi A ele ete ta at 22 Installation a ieee ee ee ee a NEIER ee eee 34 Unpacking storing Iranmeportaton tee 44 Operating VIO ME ici A owen Ss heen ee eis acy Mend ae id 44 Connecting the MAG to the vacuum chamber 45 Connecting the backing pump tee eee 48 Connecting the cooling water vico cia ae 50 Connecting the purge GaS 6 tee eee 53 Installing the MAG DRIVE 58 Power supply Connection XI aaeeea het a CN ads Eee deus 59 PUMP CONNECHION ewes vee ended ode pac dea Snape eae eG 59 Control pug X A ienr ose la ean pet ae at ae ena aes ee Gee aa 60 Emergency Ofelia A Hehe Seet Gi Wie geg pial ea fated ae 60 Interface CONNECT a a 62 Operation ia a ura 66 General operation riese 66
41. Op Hours 16777 40000 Start Cycles 1234 Enter Standby Cycles 1234 Enter PK Data Rev Ens 655 98 Operation Cycles 1234 CEnter Enter gt 88 GA05141_0702 09 2004 Plug in control Programming menu gt Set Pump gt lt p gt Set Purge Vent A or or A 4 lt Normal Operation 95 Max Accel time 1000 s TMS Setpoint 70 C Purge Vent Purge OFF Purge ON S Enter Standby Setpoint 250 Hz Pump Stand Still Start Command Relay 7 Option Pump Stand Still Relay 8 Option Start Command Relay 9 Option Mains Down To exit the programming menu Data to Eeprom Prog yes Esc no Prog Esc Data are stored in the EPROM Ready 00 0 A 0000 Hz Key Function Esc Mi Returns to the operating display from the storage procedure without storage E Returns to the operating display from any point of the basic menu Mon BR No function Prog Mi Selects the programming menu from the operating display H Confirms to store changed parameters to the EEPROM Enter M Switches forward to the next submenu Start Mi Starts the pump only possible if there is no fault The start key is only active if the user is in the basic menu Bus Adress or in the operating display An
42. Ready 0 0 A O Hz If the pump has the optional TMS including e g the red heater band the heater will be activated The setpoint temperature will be reached within 30 60 minutes depending on cooling water temperature and flow In case of corresponding connection the backing pump will be activated when switching on the MAG DRIVE 9 E Open the purge gas supply E Open the cooling water supply E Press the START key The pump runs up Acceleration 150A 250 Hz is diplayed until the frequency setpoint has been reached Then Normal Operation 10A 600 Hz is displayed GA05141_0702 09 2004 75 Plug in control Purge with dry nitrogen 76 GA05141_0702 09 2004 Switching off The MAG DRIVE 9 controls the venting automatically provided purge gas is connected to the MAG and the MAG DRIVE 9 is programmed corre spondingly Vent on E Press the STOP key Deceleration 150A 400 Hz will be displayed When the display reads Ready 0 0 A O Hz the pump has come to a standstill E Close the cooling water supply when the pump is switched off in order to avoid condensate formation in the pump The backing pump may be switched off once the MAG has stopped If the MAG has been used for pumping corrosive gases it should be pur ged with dry nitrogen for one hour before switching off During down times of the system take care that neither ambient air nor cleaning agents ente
43. ak 7 L IAN HOA dy Ov 39 00c 19 0058 M OVW aqn 17 1 yoojebemsg sof sok 7 L JIN HOA dy OV 30810832 19006 M DVIA aqny 4 DojeBems sok SA V L INN HOA JM Or JO OOZ 10 009 M EI aqn 17 1 yoojebemsg se soak 7 L JAN HOA dy OV 3 08 OSZ 19 008 DVIN aan 17 1 O00JaBems So sok V L ANN HOA dy OV 3 08 00 19 005 SVAN JOJOSUUOD Eqn 7 1 yoo ebems seh xOU 9L 0L NG gt OV OI 09g 9 008L M SYN JOJOSUUOD Eqn 7 1 yoojebems se BS 9L 0L NG gt OV 3 08l OSZ 9 008L M SVAN aqn Wu 9 Sun send uyor SoA xOU 9L 0L NG dy OV 3 08I OSZ 9 008L M SYN pepueq aqn y 4OO BBEMS sok ou YON YA GZ 3 08SI 003 9 008L M SYN JyOy ww Y Dun iseno uyof SoA OU 9L 0L NG ay Ov 3 08SI 003 9 008L M DVN 4JOJOBUUOD qn 7 1 DOR M So 0U 9 0 NG gt OV 3 08SI 09 9 088 M DVN u0193UUOY pa B09 duind uoloauU0d Na Na 19 eM JOJ0Y 0 pajunouwu seb obuely obuey dund Huljooy 2AJLA SABANA 2B1nd winnoeaeio4 39 ul uonembByuos duind GA05141_0702 09 2004 22 Cable DRIVE BEARING Cable length 1 5m 1 5m 3m 3m 3m 5m 5m 8m 10m 20m 23m 30m Cable TMS for CT versions only Cable length 15m 15m 3m 5m 8m 10m 20m Description 90 DRIVE BEARING connection TMS connection DRIVE BEARING connection Converter cable outlet Pump cable outlet DRIVE BEARING X20 DRIVE BEARING X23 PK X24 Part No bended 225 straight straight 400036V0001 straight straight straight 400036V00
44. alog Input 2 No Se 0 Stop RW Stops the pump Sopot RW Returns to the operating display from the programming menu SEN E Acknowledges a failure after the cause of the failure has been Enter E E bas removed only possible if the user is in the operating display Start Delay WR Increases a parameter value or proceeds to the next option Os Func X14 46 RW Lowers a parameter value or returns to the previous option Enter Failure Reset HM Selects the programming menu from the operating display M Switches back to the last main menu Op Hours Cycles E Selects the programming menu from the operating display Warning Switches forward to the next main menu r read value can only be read r Ww read write value can be read and written on online value can be changed always off offline value can only be changed when the pump stands still All menus can be invoked at all times for each operating mode in part they may be modified during operation GA05141_0702 09 2004 89 Maintenance 90 GA05141_0702 09 2004 Warning 4 Maintenance 4 1 Cleaning If required clean the turbomolecular pump and the frequency converter of dust with a dry cloth 4 2 Changing the rotor The rotor has to be changed at the latest E after 40 000 hours of operation or Ml after 5000 starts stops or cycles Refer also to Section 3 4 Operation at high gas throughput or high foreva cuum pressure Due to high speed and temperature
45. ances The pump must be securely attached If the pump should sud denly seize inadequate attachment could cause the pump to break away or allow internal pump parts to be discharged The rotor has to be changed after 40 000 hours of operation or after 5000 starts stops or cycles at the latest See also Section 3 4 Operation at high gas throughput or high forevacuum pres sure Due to high speed and temperature the service life of the rotor is limited If the rotor is changed too late it may be destroyed Thus in the flange mounts high forces and torque conditions can occur The mounting screws for the pump may be torn off When using clamped flange connections at the housing or with compo nents above the housing sudden twisting of the entire pump can be experienced 4 GA05141_0702 09 2004 Safety information Parts of the pump can become so hot during operation gt 70 C Warning gt 158 F that they represent a burn hazard Provide protection against contact with the hot components The converter has dangerous voltage levels Warning Failure to strictly follow the instructions in this Manual can result in death severe bodily injuries or significant material damage Unauthorizes opening of the frequency converter voids the war ranty Before opening the converter always disconnect it from the mains and the pump Before disconnecting any cables make sure that the converter is switched off and the
46. ase of a frequency above 5 Hz a warning will occur 102 GA05141_0702 09 2004 Possible Cause Pt 100 temperature sensor bea ring damaged Pt 100 temperature sensor coo ling is not connected Pt 100 damaged Drive Bearing Cable is not con nected with the pump pumps memory chip PK or the con troller Drive Bearing Cable or connector damaged Controller is not able to operate with the connected pump Converter failure Converter failure Converter failure Converter failure Converter failure Drive Bearing Cable is not con nected with the pump pumps memory chip PK or the con troller Drive Bearing Cable or connector damaged PK or converter failure Measures Check pump temperature sensor For measures see failure Bearing Temp Check cable conections Check if the Pt 100 is connected to the corre sponding sensor cable The sensor cables are marked with COOLING WATER or BASFLANGE TMS sensor Check cooling temperature sensor For Pin assignment see Fig 44 Measure the resistance between pins 1 and 3 of the cooling temp sensor The resistance is typical ly between 110 and 150 Ohm 20 C to 140 C Contact Leybold Service if the sensor is defective Check cable connections Check cable Replace the cable if it is damaged Contact Leybold service Principally controllers with SR Software Revision 302 18 or higher can be updated for new pumps see 3
47. bolts M 12 x 50 ISO F flange nstallation torque per bolt 45 5 Nm ES Bolt quality 12 9 according to EN ISO 898 1 with coating 0 2 yield strength gt 1080 N mm Fig 31 ISO F connection with bolts and nuts Nut DN 250 ISO K 12 bolts M 10 x 50 ISO F collar flange l Installation torque per bolt 35 5 Nm Bolt quality 12 9 according to EN ISO 898 1 with coating 0 2 yield strength gt 1080 N mm Retaining ring Vacuum sealing disk consisting of centering ring and O ring with outer support ring td A ISO K flange ISO F collar flange Ee Y NN ISS Retaining ring Fig 32 For the MAG with ISO K flange Clamped flange connection with collar flanges 46 6A05141_0702 09 2004 Correct Fig 838 Vacuum chamber fixed to the floor Mount the MAG as close as possible to the vacuum chamber If the MAG is permanently flanged to a vacuum chamber with a weight exceeding 500 kg it will not be necessary to secure it in any other way The vacuum chamber must be securely attached to the floor or a solid wall In case of lighter vacuum vessels secure the pump additionally The pum p s bottom is equipped with tappered holes for fastening a support see dimensional drawings For earthquake protection fix the pump as shown in Fig 20 to 29 Depending on the chamber s weight and fixing use the boreholes in the pump s bottom in addition The standard fixing for the converter is shown in Fig 10
48. correctly completed declaration has been sub mitted Non completion will result in delay The manufacturer can refuse to accept any equipment without a declaration A separate declaration has to be copleted for every single component This declaration may be completed and signed only by authorised and qualified staff Customer Dep Institute Reason for returning amp applicable please mark A repair QO chargeable O warranty Address O Austausch QO chargeable O warranty A DKD calibration amp Factory calibration Person to contact restoring goods because of following reason Phone Fax A rent loan A for credit UO against exchange Order number of customer O exchange already received arranged A Description of the equipment machine or component Ancillary equipment Type Part number Serial number Type of oil used B Condition of the equipment No Yes No Contamination No Yes 1 Has the equipment been used Q QQ toxic a a 2 Drained Product service fluid a a corrosive a a 3 All openings sealed airtight A a mmicrobiological a a 4 Purged a a explosive a a If yes which cleaning agent radioactive a a and which method of cleaning other harmful substances a a el bel C Description of processed substances Please fill in absolutely 1 What substances have come into contact with the equipment Trade nam
49. e 48 96 98 103 backing pump 15 17 48 72 75 76 EN C contamination 19 91 92 108 cooling water 15 17 22 34 43 50 52 60 68 72 75 76 80 83 86 89 91 92 95 97 99 100 102 corrosive 7 9 54 56 72 76 91 108 cycles 4 66 81 83 88 89 90 95 97 99 D dangerous voltage 5 data storage 10 80 DC motor 10 12 deceleration 60 61 66 73 76 78 79 95 97 deposits 9 53 95 97 dimensions 24 33 dripping water 58 DRIVE BEARING 7 23 34 43 48 63 E earthquake protection 47 emergency off 60 61 96 100 explosive 9 108 F forevacuum 4 14 18 20 22 25 34 43 48 49 55 67 70 71 90 92 forevacuum flange 14 18 34 43 48 fuse 14 19 58 101 103 G generate 9 H hazardous gases 49 91 hazardous voltages 58 59 hot components 5 47 l intake flange 14 34 43 45 91 K key 66 72 75 78 82 89 96 L LED 12 54 72 73 103 M magnetic bearing 7 10 12 59 66 80 96 100 102 magnetic field 44 mains 5 12 13 58 59 63 66 68 78 79 82 83 86 88 89 91 94 96 99 103 media 9 53 54 motor current 60 61 70 77 83 86 89 96 100 motor temperature 61 80 95 97 100 N noise level 44 O operating status 76 77 ordering data 21 23 Index P PE bag 14 44 45 92 PK 23 34 43 59 81 88 96 102 plug in control 7 12 13 21 65 75 89 105 Pumping speed 10 15 18 20 purge gas 9 13 19 20 34 43
50. e and or chemical term of service fluids and substances processed properties of the substances According to safety data sheet e g toxic inflammable corrosive radioactive Tradename Chemical name Residues a O Yes UNo b O Yes O No c O Yes ONo d O Yes O No Yes No j 2 Are these substances harmful a a 3 Dangerous decomposition products when thermally loaded a a Which Components contaminated by microbiological explosive or radioactive products will not be accepted without written evidence of decontamination D Legally binding declaration we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level Name of authorised person block letters date signatur of authorised person i firm stamp Leybold Vacuum K ln 108 GA05141_0702 09 2004 Fax to Service LV Fax 0049 221 347 1945 Form TMP 1 Turbopump Field Failure Report Field Service IR No RMA No if returning to factory Service Center Customer Turbopump Model Turbopump Pump Part Number Turbopump Serial Number Complaint Process OEM Equipment Name and Model Process Gas Was the turbopump replaced If yes replacement pump P N Date Installed O Yes A No replacement pump S N Date Removed Date Received Date Examined Received Condition Examined by Find
51. e not binding Retain the Operating Instructions for further use The Operating Instructions are included with the pump and the converter If they have different editions the version delivered with the pump describes the pump correctly and the version delivered with the converter describes the converter correctly The version number is either the digit behind the in the GA No or the first two digits behind the _ Example GA 05 141 6 02 is the sixth edition and GA05141_0702 the seventh 6 GA05141_0702 09 2004 1 Description 1 1 System overview The Leybold MAG pumping system consists of E The MAG turbo pump The MAG are turbomolecular pumps utilizing magnetic bearings They are designed to evacuate vacuum chambers down to pressure values in the high vacuum range and to pump high gas throughputs The versions without letter behind the number are designed for clean applications only The C versions have a coated rotor and are designed for clean or light corrosive applications The CT versions are additionally equipped with a temperature management system TMS to control the pump temperature They are prepared for use in medium to harsh corrosive applications The pumps are available with 2 different rotors MAG version Turbo pump MAG W version Turbo pump stages and an active drag stage See table Pump configuration for an overview on the available models E The MAG DRIVE 9e frequency converter The
52. een pins X20 CC and X20 BB with the cable connected to the pump The resistance is typically 2kQ 1 Replace the cable if it is damaged or in case the measurement of the resistance shows abnormal values gt 3 4 kQ now Contact Leybold service Apply cooling water according to specifications Check cooling water tubes for deposits See also Section 2 5 Contact Leybold service Apply cooling water according to specifications Check cooling water tubes for deposits See also Section 2 5 Allow pump to cool down between the cycles Check pump temperature sensor Check pump connector X23 In particular measure resistance between pins X23 q and X23 R The resi stance is typically between 110 Q and 130 Q 20 C to 70 C In case abnormal values are measured contact Leybold service Contact Leybold service Allow converter to cool down between the cycles Refer to Section 2 7 for the correct mounting of the converter in a rack max ambient temperature 45 C Contact Leybold service GA05141_0702 09 2004 97 Troubleshooting Failure Message on Display Overload PZ 12 Overload PV 13 Overload PW 24 An abnormal displacement of the rotor occured at frequen cies between O and 5 Hz The code designates the affected axis MB MB Purge ON MB Purge OFF An abnormal displacement ot the rotor occured at frequen cies between 146 Hz and 600 Hz The additional message gives information on the
53. electronic converter converts the single phase line supply voltage into a three phase DC voltage to drive the pump motor It also evalua tes measured signals and controls the pump functions the temperature management system TMS and the active magnetic bearing system The MAG DRIVE 9 can be operated with the START and STOP keys via a plug in control or via a network interface E A cable set consisting of DRIVE BEARING cable TMS or Purge Vent cable if required Description MAG C CT GA05141_0702 09 2004 7 Description MAG W 830 C MAG 1500 CT MAG W 1300 C MAG W 1500 CT MAG W 2200 C MAG W 2800 CT MAG W 3200 CT Fig 1 MAG turbopumps Fuses TMS O O Each Fuse 4 A Com Status d MAG DRIVE v a UJ Fig 2 MAG DRIVE 9 Front panel 8 GA05141_0702 09 2004 1 2 Compatibility with pumped media The MAG are specifically designed for the needs of the semiconductor industry All materials used inside the pump are compatible with typical gases used for semiconductor processes Please consult Leybold for recommendations on pump models for specific processes and application requirements Corrosion protection To protect the pump from corrosive gases it is mandatory to use dry Nitrogen purge during operation of the pump The purge gas pro
54. ending on the operation conditions the maximum service life of the rotor is 40 000 h The operation conditions depend on type of the gas throughput and pressure With high gas load especially when pumping Ar and SF the maximum service life of the rotor may be shorter In this case we must ask you to con sult us Also ensure that the high vacuum flange cannot warm up above the per missible temperature level 3 5 Bakeout Only for pumps with CF flange If pressures in the range of 108 mbar or below are to be developed the vacuum chamber and the components installed therein will have to be baked out Protect the rotor against intensive direct heat radiation When baking out at the forevacuum side at a sorption trap for example ensure that the components attached direct are not heated to more than 80 C The forevacuum pump must be in operation so as to eliminate the vapors liberated at the sorption trap The maximum bakeout temperature of the pump is 120 C Operation GA05141_0702 09 2004 71 Operation Purge with dry nitrogen 72 GA05141_0702 09 2004 3 6 Operation with the START and STOP keys Switching on E Switch on the MAG DRIVE 9 a The MAIN LED lights green Wait for approximately 20 to 30 seconds until the MAG DRIVE has been initiated If the pump has the optional TMS including e g the red heater band the heater will be activated The setpoint temperature will be reached within 30
55. es actual value r Start Cycles a 1234 PK SW Rev SW Revision of the actual value r CEnter 6 55 35 pump memory chip PK Standby Cycles PK HW Rev HW Revision actual value r 1234 6 55 35 of the pump memory chip PK PK Data Rev Revision of the pump memory chip actual value r Operation Cycles 6 55 35 data settings PK 1234 For the permissible number of operating hours operating cycles the system provides two Enter thresholds Exceeding these thresholds will result in a warning message default or an alarm message The corresponding menu entry for setting up the required response can be found ee in the section Programming the frequency converter 55 35 hreshold for system start If before starting the system the threshold is already exceeded starting the system will no longer be possible Threshold during operation The permissible threshold during operation is higher compared to the threshold which is permissible during system start The permissible number of this value is indicated through the PK Data Bev display YYY 6 55 35 GA05141_0702 09 2004 81 Plug in control Kid Failure Storage Failure Total 65535 Failure TMS 65535 Failure Overload 65535 Fail Temp Bear 65535 Failure Mains 65535 F Storage 0 10 Bearing Temp 99 12 31 00 00 Enter F Storage 8 10 Bearing Temp Enter 82 GA05141_0702 09 2004 3 10 3 Menu Failure Storage
56. escription ZOOAQO000r 19001 18000y LSO0AO L LOOv LVOOAOO OOY 000A 00007 000000007 1000100000y 0300AL8000v 1 00AL8000p LLOOAL8000v 000080007 0004430007 000A93000v cOOOAL COOOL cOOOA0GOOO0L LSLOAOL LOOv EcOOAO LOOT LZOOAO LOOv ZLOOAO OOY LLOOAOL LOOv S000A00 LOO ON Hed ou ou ou ou sok sok ou ou ou ou so SOA sok soA sok ou ou ou ou ou ou SIALL ou ou ou ou sok sok sok ou sok sok soA soA sok soA sek ou ou ou ou ou ou 19m Hulljooo 103 JOSU9S aunyesodwey 01JUu09 dund JO Josues alnjeledua pue PU Ja esH yy pajunou aq ueo oa juan aBund JO OF LZ ON Hed NLA quen G T aqn y 4OO BBEMS ou xOU 9L 0L NG ay Ov 39 0Sc 00875 M OVW aqn y PDOJaBems ou 0U 9L 0L NG gt OV JO 0Sc 0027 M SYN aqn 17 1 yoojebemsg ou OU 9L 0L NA 5 OV 39 00c UO L M OVNI aqn y 4OO sBeEMS ou xOU 9L 0L NG ay Ov dO O9L 088 M SYN aqn 17 1 yoojebemsg sof soak JL MN HOA gt OV JOSI Oce LO 00c M OVW aqn 17 1 yoojebemsg sof sok V L ANN HOA 5 OV 3081083 100082 M DVIA aqny 4 DojeBems SoA se V L MN HOA JM Ob JOSI OSZ 0087 MOV 8 L Pealy se soak wV PealyL dy OV 3 08I OSZ 9 0033 M SYN Z 4 s jdd u esoy Bos ssaJule s SoA ou PJ MN HOA ay OV 3 08I OSZ 9 0032 M SYN 2 1 Sau esoy og ssaJule s Soh ou PJ MN HOA Y Ov 3 08I 003 9 00332 M SYN aqn y yoojebemg se so
57. f the failure which has occured Failure information 2 umber of operating hours for the pump Failure information 3 Actual frequency during operation Failure information 4 8 Extended parameter numbers The 1st number represents the para meter number the 2nd number represents the parameter value For more information about parameter numbers see Table B Parameters for the analog output 3 10 4 Menu Set Converter Menu item Relay 6 Option Relay 7 Option Relay 8 Option Relay 9 Option Threshold Threshold Threshold P N Analog Out Scaling Ana Out Analog Input 2 Start Delay Display Bus Address Func X14 45 Func X14 46 Op Hours Cycles Description Relay with change over contact the operator can select one of the functions described in Table A Option relays on next page See also Relay outputs section 2 8 3 The settings of the relays 7 to 9 can be changed similar to relay 6 After each power off the relays 7 to 9 are in the default state See also Relay outputs section 2 8 3 Threshold bearing temp for option relay Threshold motor current for option relay Threshold frequency for option relay Signal choice Analog Out 0 10 V Setting of the selected parameters for the analog output Definition Lan out Paracurrent Paramax Value Scale factor 10 V For more information about parameter numbers see Table B Parameters for
58. g A 6G GA05141_0702 09 2004 3 Operation 3 1 General operation rules The magnetic bearing in the MAG are immune to wear In addition to the magnetic bearings the MAG is equipped with touch down bearings which protect the rotor against mechanical contact with the stator if the pump is subjected to external shock loading or when the pump is switched off These touch down bearings have a limited service life Please observe the following in order to obtain maximum service life E Avoid shock and vibrations e g from other pumps when the pump is running Shocks perpendicular to the rotation axis are particularly harm ful If the pump appears to be running in the mechanical bearings con tinuously it is switched off E Do not suddenly expose the MAG to an already evacuated vacuum chamber The pressure surge may cause the rotor to make contact with the touch down bearings This will cause increased wear E Do not disconnect the MAG and MAG DRIVE while they are operating If MAG and MAG DRIVE have been disconnected accidently re connect them E Do not stop the MAG with the mains Use the STOP key or a stop com mand Switching off the mains while the pump is running will wear out the touch down bearings The pump may make noise during the run up and run down phases This has neither an influence on the pump nor on the process Monitor the purge gas continuously Insufficient purge gas flow can result in E Process gases ente
59. g transportation Do not stand below the pump while connecting or removing the MAG The MAG is shipped in a sealed PE bag with desiccant Do not open the sealed package until immediately before installing Do not remove the covers and blanking flanges until you are ready to make the connections to ensure that the MAG is installed under the cleanest possible conditions 2 2 Operating environment When using the MAG inside a magnetic field the magnetic induction at the pump housing must not exceed 5 mT 1 mT milliTesla 10 G Gau B Exceeding this limit can cause excessive rotor heating due to the eddy cur rents generated in this situation It is therefore necessary to provide suita ble shielding in such cases The standard version of the MAG is resistant to radiation at levels up to 10 Gy 1 Gy Gray 100 rad The ambient temperature must not exceed 40 C 104 F The noise level when the pump is running is below 70 dB A EN ISO 2151 No acoustic insulation is required 1 Aluminum cover 2 Screws Fig 30 Removing the transport seal 2 3 Connecting the MAG to the vacuum chamber The MAG is shipped in a sealed PE bag with desiccant Do not open the package until immediately before installing Do not remove the covers and blanking flanges until you are ready to make the connections to ensure that the MAG is installed under the cleanest possible conditions Pay attention
60. ia the operator control menu see Section 3 10 4 Analog output The converter has an analog output which provides an analog signal 0 10 V with a 10 bit resolution The analog output function can be alternatively used to output motor current actual frequency motor temperature rotor displacement signals PW24 PV13 PZ12 The output value can be increased or reduced by a scale factor see Section 3 10 4 Set Converter GA05141_0702 09 2004 61 Installation 62 GA05141_0702 09 2004 Analog inputs The converter has two analog inputs with a 10 bit resolution Input signal 0 10V A supplementary function can be set for analog input 2 via the operator control menu see Section 3 10 4 No function The input signal can be output via the serial interface Frequency setpoint In addition to the function described above the drive frequency setpoint is entered via analog input 2 Digital inputs The converter has 5 digital inputs with the following functions TMS OFF Purge gas OFF Vent ON Option 1 2 The functions are active if a High signal 15 V e g Pins 28 or 29 is con nected at the digital input The functions for Option 1 2 are set in the operating menu see Section 3 10 4 Set Converter Remote Start if Remote is active The functions Start and Remote are active if a Low signal GND e g Pins 27 or 43 is connected at the digital input 2 7 4 Interface connector A 9 pin sub D socket is pro
61. ia the option relay The option relay must be programmed for this function refer to Section 2 8 3 Control plug X14 Relay outputs 3 3 Power control system PCS only for MAG W 1500 2200 2800 3200 For safety reasons motor power is limited depending on the temperatures within the pump Motor power will be highest when the pump is cold 3 4 Operation at high gas throughput or high forevacuum pressure In the operating software the alarm triggers for the service life of the rotor have been defined After this service life period has elapsed the rotor needs to be replaced The alarm thresholds have been derived from the applica tions known to date Continuous operation at a high motor current will reduce the ser vice life of the rotor In such cases additional safety measures need to be introduced which must be co ordinated with Leybold Also warming up of the rotor due to other influences will reduce its service life for example pumping of hot process gases Turbomolecular pumps contain a large amount of kinetic energy due to the high rotational speed in combination with the mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released In most applications the motor current will remain during continuous ope ration below the permitted maximum value The alarm thresholds have been selected in consideration of this maximum value Dep
62. iconductor processes are contamina ted by semiconductor process gases Most of these gases form acids when exposed to moist air which causes serious corrosion damage to the pump In order to prevent corrosion damage in the case of MAGs which have been removed the pump needs to be packaged in a sealed package For this the shipping package of the replacement pump may be used for example Failure to seal a contaminated MAG voids the warranty Warning For safety reasons we recommend to use a metal seal kit see Fig 58 for shipping of contaminated pumps s Proceed as follows to seal the turoomolecular pump immediately after removing it from your process Purge the pump for two hours with the backing pump running This helps to remove a large quantity of the process gases from the pump We recom mend purging the pump via the intake flange and the purge valve with approx 200 sccm Press the STOP button at the MAG DRIVE 9 tal and wait until the pump has come to a standstill Afterwards turn the mains switch to the O position The cables between the MAG and MAG DRIVE may be disconnected only after the MAG has come to a full stillstand and the mains is switched off When the pump has been pumping hazardous gases ensure that Warning proper safety precautions are taken before opening the intake or exhaust connections A Use gloves or protective clothing to avoid skin contact with toxic Je SR or highly corrosive substances
63. ings Cause of Failure Recommendations Remarks Questions Leybold vacuum GA05141_0702 09 2004 109 Operating Instructions for MAG 9 2 series Operating Instructions Valid for pumps Valid for converters MAG W 2800 C CT MAG W 3200 CT MAG W 830 MAG W 1300 MAG W 2200 MAG W 2800 GA 05 141 6 02 GA 05 141 6 01 MAG W 830 C MAG DRIVEdigital English German MAG to fi ft rsion NQIIS MAG 1500 CT rom eye SIO July 2003 July 2003 MAG W 1500 C CT i MAG W 2200 C MAG W 2800 C CT MAG W 3200 CT GA 05 152 2 02 MAG W 2200 C MAG DRIVE gital Part No 400081V0020 English from software version July 2003 303 00 KA 05154_0302 KA 05154_0301 MAG W 830 MAG DRIVEdlgital _ l MAG W 1300 Engl April 04 German April 04 MAG W 2200 from software version Suppl for GA Suppl for GA MAG W 2800 302 18 05 141 6 02 05 141 6 01 with CF flange KA 05157_0202 KA 05157_0201 MAG W 1300 C MAG DRIVEdlg tal with ISO K flange Engl July 04 German July 04 from software version Suppl for GA Suppl for GA 302 18 05 141 6 02 05 141 6 01 GA 05141_0702 GA 05141_0701 MAG W 830 C MAG DRIVE 9ital English German MAGNA ASCO from software version 9 MAG 1500 CT OSOS Sept 2004 Sept 2004 MAG W 1500 CT MAG W 2200 C 110 GA05141_0702 09 2004 index A acceleration 60 61 66 73 75 79 83 84 95 97 98 ambient temperature 15 18 44 95 97 103 backing pressur
64. ith purge gas Installation EZZZ LL Us lll eZ Filter mounted O ring in the groove Purge gas or air BG Bom WH Gees MAG W 2200 C with purge gas connection 1 4 thread Fig 42 Mounting the purge gas filter to the pump GA05141_0702 09 2004 57 Installation 58 GA05141_0702 09 2004 Caution Warning Warning 2 7 Installing the MAG DRIVE 9 The converter can be installed in a 19 cabinet It is 1 2 of 19 wide and has 3 height units For easier installation we offer an installation frame see Section 1 7 If you use this installation frame remove the converter s rub ber feet when installing the converter In order to guarantee sufficient cooling there must be a minimum clearance of 1 height unit 44 2 mm at the bottom and 1 height unit at the top During operation the temperature of the ambient air must not exceed 45 C The pump may be operated only with a suitable frequency con verter and a suitable connector cable Peak voltages of up to 130 V may be present at the connector line between the frequency converter and the pump mains voltage is present at the heater Route all cables so as to protect them from damage The protection rating for the connectors is IP 30 Do not expose the pump the frequency converter or the connec
65. king pressure necessary for operating the MAG Fig 34 shows schematically the design of a pump system incorporating a MAG with an additional foreline valve and an isolation valve between cham ber and MAG Foreline valve The foreline isolation valve is recommended to protect the MAG from shock venting in case of uncontrolled shut down of the backing pump This valve must be able to close fast enough to avoid pressure increase in the MAG In case of an oil sealed backing pump the foreline isolation valve protects the MAG from backstreaming oil vapor during standstill Connect the forevacuum flange of the MAG to the backing pump The torque on the forevacuum connection flange must not exceed the values shown in Fig 35 48 GA05141_0702 09 2004 M lt 150 Nm M lt 150 Nm Fig 835 Maximum torques for the forevacuum connection The forevacuum line must be tight Hazardous gases can escape at leaks or the gases being pumped can react with the air or humi dity We recommend a leak check Warning Installation GA05141_0702 09 2004 49 Installation Caution for CT versions 50 GA05141_0702 09 2004 Pump cooling Bypass Fig 36 Schematic of the cooling water flow for MAG W 1500 2800 3200 CT 2 5 Connecting the cooling water Cooling water specifications Inlet temperature 10 30 C Inlet pressure 2 to 7 bar absolute Cooling water requirement See Fig 38 Appearance Colorless clea
66. low voids the warranty Warning d k Installation GA05141_0702 09 2004 53 Installation 54 GA05141_0702 09 2004 Caution Pumps with purge gas valve MAG W 1500 CT W 2200 C W 2800 C CT W 3200 CT The MAG is equipped with a purge gas and venting valve It is controlled by the MAG DRIVEdo tal The purge gas and vent valve E regulates the flow of purge gas at supply pressures of between 1 5 and 6 0 bar absolute to the pump keeping pressure at a constant value and E provides for safe pump venting The flow of purge gas into the pump keeps aggressive or corrosive media and dust from entering the motor and bearing area Refer to Figure 39 for details on the design and function of the purge gas and vent valve assembly Attach the purge gas hose to the nipple and secure with a hose clamp Set purge gas pressure for a value of 1 5 to 6 0 bar absolute Use in the purge gas supply system only valves which can handle both the low purge gas flow and the much greater venting gas flow Purge gas inlet pressure exceeding 10 bar can damage or destroy the purge gas and vent valve With no voltage applied the purge gas and vent valve is closed The purge gas and vent valve will be open when switching on the MAG DRIVEd tal The red LED at the purge gas valve lights Technical data Purge gas pressure absolute 1 5 to 6 0 bar Purge gas Nitrogen or similar Max moisture content 10 pom Purge gas flow 36
67. ltimate pressure as to DIN 28 400 Max forevacuum pressure with N Rotor speed Run up time Braking time with without venting Cooling Cooling connection threads with Swagelok elbow for tube OD Cooling water temperature Base flange temperature Weight Max high vacuum flange temperature short time for continuous operation for bake out CF flange only Vibration level at high vacuum flange at max speed Forevacuum flange Recommended backing pump Dry commpressing pump with pumping speed or rotary vane pump Admissible ambient temperature Storage temperature Max relative air humidity Degree of protection EN 60529 16 GA05141_0702 09 2004 DN Le Le Le mbar mbar min min min G mm C F C F approx kg C F 0 F 0 CF um DN m3 hn TRIVAC C F C F 1500 CT 200 ISO F 1100 1000 920 gt 108 lt 108 1 7 W 1500 CT 1500 CT W 1500 CT 200 ISO F 250 ISO F 250 ISO F 200 CF 1100 1220 1220 1050 1180 1180 920 1020 1020 gt 108 gt 108 gt 108 lt 108 lt 108 lt 108 26 137 2 6 36 000 lt 6 1 lt 6 water 1 8 6 4 1 45 10 30 50 86 20 90 68 194 32 85 185 60 140 120 248 lt 0 01 40 KF 100 D 65 BCS 5 40 40 104 10 60 14 140 95 non condensing IP 20 Technical data Continued MAG High vacuum flange Pumping speed for No for Ar for H Compression for N Ultimate pressure as to
68. me Clock Real Time Clock actual value r 99 12 31 23 59 Format YY MM DD HH MM Greenwich Mean Time GMT Reference Time for false memory Conv Cat No 99999999999 Product Name Actual product name actual value r MD Digital of the converter Conv Serial No Conv Cat No Cat No of the converter actual value r 99999999999 99999999999 Conv Serial No Serial No of the converter actual value r 99999999999 Conv SW Revision of the Drive Controller actual value r SR SW Rev 6 55 35 Conv AMB SW Revision of the actual value r Ent SW Rev Magn Bearing Controller E Si 6 55 35 Conv AMB Data R 1 01 Conv AMB Data Revision of the actual value r Data R Magn Bearing Data Setting Enter 1 01 Conv HW Rev d Conv HW Rev Hardware Revision of the Converter actual value r 6 55 35 6 55 35 Conv Op Hours Operation hours of the Converter actual value h r Conv Op Hours 167772 16 AB Teno Pump Cat No Cat No of the pump actual value r 99999999999 Pump Cat No 99999999999 Pump Ser No Serial No of the pump actual value r 99999999999 Pump Ser No Pump Name Pump name 4 type actual value r 99999999999 MAG W 1500 CT Enter Pump Op Hours Operation hours of the pump actual value h r Se 16777 40000 Permitted operating hours 1500 CT Start Cycles actual value r 1234 Pump Op Hours Standby Cycles actual value r 16777 40000 1234 SE Cycl
69. mp Temperature of the magnetic actual value C r bearing Actual Value TMS Temperature of the Temperature actual value C r Management System T_A Value for Cooling Temp Control actual value C r Cooling Temp Cooling water temperature actual value C r Actual PVW 13 Rotor displacement in the actual value r magnetic bearing plane VW13 Actual PVW 24 Rotor displacement in the actual value r magnetic bearing plane VW24 Actual PZ 12 Rotor displacement in the actual value r magnetic bearing axis 212 Power Power consumption of the drive actual value W r Analog Input 1 Analog Input Channel 1 0 100 0 actual value r nput range 0 10 V Displ 0 00 100 0 Analog Input 2 Analog Input Channel 2 0 100 0 actual value r nput range 0 10 V Displ 0 00 100 0 400 Hz 24 000 min for MAG W 830 C 600 Hz 36 000 min for MAG W 830 W 1300 C amp W 1500 CT 490 Hz 29 400 min for MAG W 2200 C 480 Hz 28 800 min for MAG W 2800 amp 3200 C CT r read value can only be read r w read write value can be read and written 80 GA05141_0702 09 2004 on online off offline value can be changed always value can only be changed when the pump stands still Plug in control 3 10 2 Men System Info CPE Menu item Description Adjustable value option Ac GEES cess 8 99 12 31 23 59 min max de Unit Eten value value fault Product Name MD Digital Real Ti
70. n Pump Stand Still Relay 8 Option Start Command Enter P N Analog Out 3 Param Enter Analog Input 2 No Function Setpoint Display English Bus Adress 0 Func X14 45 Standby Mode Func X14 46 Failure Reset Enter Op Hours Cycles Warning GA05141_0702 09 2004 83 Plug in control eme Set Pump Enter Normal Operation 95 Max Accel time 1000 s Standby 250 Setpoint Hz Set TMS Enter etpoint C Set Purge Vent Purge Vent Purge OFF Option P V Option 1 Enter 84 GA05141_0702 09 2004 Purge ON 3 10 5 Menu item Normal Operation Menu Set Pump Description corresponding to the frequency setpoint Max Accel Time Monitor time for acceleration and overload Standby Setpoint Speed for Stand by mode 3 10 6 Menu item TMS Setpoint Menu Set TMS Description Setpoint of the Temperature Management System Threshold for normal operation Adjustable value option Ac cess min max de Unit value value fault Standby 99 95 r w Off Setpoint 600 3600 1000 s r w off 200 Normal 250 Hz r won Min Operation Freq Thresh Adjustable value option Ac cess min max de Unit value value fault 20 80 90 70 C r w on MAG W 1500 CT 90 C MAG W 2800 3200 CT 80 C 3 10 7 Menu
71. n level in accordance with EN 61010 2 Weight 10 kg Degree of protection EN 60529 IP20 Description GA05141_0702 09 2004 19 Description MAG W 3200 CT DN 320 With purge gas with splinter guard Forepump 100 m h Pipe 1mDN40 MAG W 2800 C CT DN 250 according to PNEUROP MAG W 2200 C DN 250 MAG W 2200 C DN 200 MAG W 1300 1500 C CT DN 250 T jo oO o o N D o a MAG W 1300 1500 C CT DN 200 _ MAG W 830 C DN 160 ol 1 00E 04 1 00E 03 1 00E 02 1 00E 01 Inlet pressure mbar Fig 6 Pumping speed curves for Nitrogen MAG W 2800 MAG W 2200 MAG W 830 1300 Compression ko 10 3 10 2 Forevacuum pressure Fig 7 ko curves 20 GA05141_0702 09 2004 1 7 Ordering data Part No Pumps see Table pumps Seal Kit DN 250 metal 200 07 901 Seal Kit metal for other flanges on request MAG DRIVE 9 converter 400035V001 1 Plug in control 121 36 Connecting cables converter pump see Fig 8 19 installation frame 161 00 Blind plate 1 4 19 3 HE 161 02 Connector for hardware interface from 25 pins to 50 pins on request Purge vent valve 121 33 Purge vent Tee 4001 53V0002 Screws M 10 x 50 200 15 752 Screw quality 12 9 according to EN ISO 898 1 with coating 0 2 yield strength gt 1080 N mm2 Washers 200 07 833 Nuts 211 28 117 Collar flange with snap ring DN 250 267 72 Description GA05141_0702 09 2004 21 D
72. nd 48 are connected via a jumper if you don t con nect an emergency off switch A plug for the control plug X14 with a jumper connected between pins 47 and 48 is included in the standard specification Description of the Emergency Off connection Pins 47 and 48 of control plug X14 make it possible to disable the output stage of the frequency converter via the hardware The power flow to the motor is then interrupted The two pins must be connected to each other to ensure proper operation If the two pins are to be monitored by the system control a floating dry contact must be available on the system side load carrying capacity 42 VDC 100 mA The contact used and the connecting cable must be protected against line supply voltage through double or reinforced insulation such that no hazar dous contact line supply voltage can be applied to pins 47 and 48 in the event of a fault Relay outputs The MAG DRIVE 9 converter has 9 relay outputs They have changeover contact Five relay outputs are permanently assigned a signal Failure Normal operation Warning Acceleration Deceleration The option relays can output one of the following signals Threshold bearing temperature reached Threshold motor current reached Threshold frequency reached No cooling water No purge gas TMS temperature OK Vent Start command applied Power supply O K Pump standstill Stand by Installation X14 50 pole Sub D I O
73. nnection elements installing the splinter guard and fixing the intake flange for the MAG W 830 40 GA05141_0702 09 2004 Installation MAG W 1300 High vacuum flange Forevacuum flange DRIVE BEAR Purge gas inlet lef connection blind flanged l Cooling water connection Correct a on z jy DN 200 CF 24 bolts M8 x 40 Caution Installation torque per polt 25 5 Nm Install the splinter guard as shown Installing Bolt quality 119 9 according to the splinter guard upside down may lead to ENSO 898 1 with coating contact between splinter guard and rotor 0 2 yield strength gt 900 N mm during fast venting of the pump Fig 27 Connection elements installing the splinter guard and fixing the intake flange for the MAG W 1300 GA05141_0702 09 2004 41 Installation MAG W 2200 High vacuum flange Forevacuum flange Purge gas inlet blind flanged Cooling water connection DRIVE BEARING connection M jy DN 250 CF 32 bolts M8 x 40 Caution EE torque per polt 25 Nm Install the splinter guard as shown Installing Polt belt Wr scene to the splinter guard upside down may lead to a contact between splinter guard and rotor 0 2 yield strength gt 900 N mm during fast venting of the pump Fig 28 Connection elements installing the splinter guard and fixing the intake flange for the MAG
74. nsor reads a tempe rature lower than 1 C Motor Temp SC The motor temperature sen sor reads a temperature lower than 1 C Frequency XX Abnormal motor current or frequency XX is a code no between 43 and 55 It helps the Leybold service to find the cause of the failure No Motor Current 100 GA05141_0702 09 2004 TMS temperature sensor Pt 100 Cooling water temperrature sensor Pt 100 typical resistance 70 to 75 Q y Heater plug X31 Possible Cause Temperature sensor Pt 100 short circui ted Temperature sensor KTY short circuited BEARING cable short circuited Converter failure The rotor frequency exceeds the nominal speed plus 5 Converter failure On START command DRIVE cable not connected or connectors damaged Resultant message after activating Emergency off DRIVE cable interrupted during operation of the MAG Pin 1 and 3 of the temperature sensors Measures Check pump connector X23 In particular measure the resistance between pins X23 q and X23 R Contact Leybold if the resistance of the sensor is under 100 Q Repeat step 1 of failure Motor Temp Contact Leybold service if the resistance of the sensor is less than 1 62 kQ Repeat step 2 of failure Motor Temp Contact Leybold service if the resistance of the sensor is less than 1 62 kQ Contact Leybold service Acknowledge failure message If failure per sists contact Le
75. ntamination of Vacuum Equipment and Components Another suitable form is available from the Leybold homepage http www leybold com under the headline customer service Either fasten this form at the pump or simply enclose it to the pump Don t pack the form with the pump into the PE bag This declaration of contamination is necessary to comply with legal requi rements and to protect our staff Leybold must return any pump without a declaration of contamination to the sender s address 4 7 Disposal The pump may be contaminated by the process or by environmental influ ences In this case it must be decontaminated in accordance with the rele vant regulations Leybold offers this service for fixed prices Further details are available on request Contaminated parts can be detrimental to health and environ ment Before beginning to work find out whether any parts are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts Separate clean components according to their materials and dispose of Leybold offers this service free of charge Further details are available on request If you send a pump to Leybold mind the regulations given in Section 4 6 Service at Leybold s Maintenance bolts collar flange retaining ring blank flange Centering ring with O ring desiccant nuts desiccant centering ring with O ring blank flange
76. ok heater ON OK Temp TMS ok C OK Temp TMS ok cooling ON W Temp TMS gt TMS g 5K OFF TMS cancelled via control plug X14 HCOK Temp TMS ok cooling ON heater ON NOK Temp TMS not ok cooling OFF heater OFF HC Temp TMS not ok cooling ON heater ON C Temp TMS not ok cooling ON see also Section 3 2 TMS only for pumps with TMS GA05141_0702 09 2004 77 Plug in control 78 GA05141_0702 09 2004 Stand by operation The pumping system can be operated in a stand by mode with reduced speed The speed can be set in the operating menu pump The function stand by can be activated with the digital inputs option 1 or 2 Do not use at the same time the stand by function and the speed con trol via the analog input Overload The speed is continuously monitored and controlled If the speed even at maximum current cannot be held at the setpoint as a result of external influences e g excessive gas intake the speed reduces until the converter goes into the Overload operating condition when the programmable fre quency threshold is fallen below refer to the menu settings pump Normal Operation The acceleration time is restarted If the converter hasn t gone into the normal operating mode after the monitoring time it is shutdown with the failure message Failure Overload Time Mains Down If the power fails while the pump is running the pump generates the power necessary to operate
77. pletely in the axial direction The bearing concept allows for low vibration operations and insures opera tion of the pump in any mounting position Magnetic bearings also guaran tee ultra clean vacuum because no grease is used for lubrication of bea rings Two touch down bearings are provided to stabilize the rotor mechanically if impacts occur during operation They are only used in case of the breaking of the power supply or BEARING cable during operation strong shocks or faulty electronics Motor and control A DC motor without commutator is used to power the rotor Drive voltage for the motor and the operating voltage for the magnetic bea ring are supplied by the MAG DRIVE 9 frequency converter It also hand les the automatic monitoring of these systems The pump is equipped with a data storage device which stores the impor tant operating parameters during the complete operation time of the pump The converter monitors continously all important operating parameters and provides warning and alarm signals in case the operating conditions exceed the specification or the set threshold
78. pted or converter switched off during operation of the pump Purge gas function disabled Emergency off active BEARING cable damaged or not connec ted Memory chip malfunctioning The frequency setpoint has been set during operation with serial interface e g RS232 Converter failure Converter failure Converter failure Converter failure Measures If warning message persists contact Leybold service Check the chamber pressure during opera tion Contact Leybold service Reduce backing pressure Additionally check process gas flow Set parameter Normal Operation to default 95 Refer also to Section 3 10 5 Reconnect converter to the mains Switch on the converter Set purge gas function to Purge ON Key panel or control connector X14 Deactivate Emergency off via control plug X14 Check BEARING connector and cable for damages or bent pins Contact Leybold servi ce if the cable is damaged Contact Leybold service Provide for right setting Contact Leybold service if the warning occurs frequently Contact Leybold service Contact Leybold service Contact Leybold service 5 2 Failure messages Failure Message on Display Motor Temp Temperature sensor inside the motor reads a higher temperature value than the failure threshold 140 C Cooling Temp Temperature sensor at cooling water block reads a higher temperature value than the failure threshold 6
79. r free of oils and greases Sediments lt 250 mg l Particle size lt 150 um Electrical conductivity lt 500 uS cm pH value 7 to 8 5 Overall hardness total alkaline earths max 20 German hardness scale 3 57 mmol l Further information on request Connect the cooling water to the connectors see Fig 37 The CT versions have a cooling water bypass Make sure that you do not mix up the inlet and the outlet con nection Turn off the cooling water supply when the pump is switched off in order to avoid condensate formation in the pump If you do not close the cooling water it may take longer to achieve ultimate pressure after start up of the system No cooling water is reqired when operating the pump at ultimate pressure Cooling water is only reqired when baking out the pump Swagelock tube fitting for tube 1 4 John Guest fitting for hose 6 mm OD Swagelock tube 1 4 1 4 6 4 mm Cooling water Cooling water out in Do not mix up the inlet and the outlet Fig 37 Connecting the cooling water Installation Stainless steel hose nipples 1 2 Swagelock tube 1 4 Thread G 1 8 Swagelock tube 1 4 bended GA05141_0702 09 2004 51 Installation 20 Temperature
80. r the pump 3 9 Operating statuses Switch On Guard The converter goes into the Switch On Guard operating status after the power is switched on and after initialization If there is no warning or failu re it changes over into the Ready condition After a failure has been acknowledged the converter goes into the Switch On Guard operating status The failure must be acknowledged a second time so that it then goes into the Ready condition Ready The converter is ready and waits for the START command All parameters can be interrogated or changed via the operator control panel The basic menu parameters refer to 3 10 Operating menu can be scan ned via the operator control panel Acceleration The pump continuously accelerates with the maximum current The acce leration time is monitored to ensure that it lies within a programmed value refer to the menu settings pump Accel Time If the converter hasn t rea ched the normal operating mode during the monitoring time then it is shut down with the failure message Accel Time Normal operation After a programmable frequency threshold has been reached refer to the menu settings pump Normal Operation the converter goes into the nor mal operation mode but the pump continues to accelerate up to the fre quency setpoint Key Esc Acceleration 14 54 254Hz HOK Mon Prog Enter Start Stop Fig 54 Functions of the
81. r Relay option Section 3 10 4 There are 4 option relays relay 6 9 with change over contact the operator can select one of the functions described in the following table If the condition of the selected functions is performed the selected relay switches over Bit 0 O OIN O O IRA OI IN BH e Apo Setting Bearing Temp Motor Current Frequency No Cooling Water No Purge gas TMS temp OK Venting Pump standstill Start Command Power supply OK Mains down Stand by 86 GA05141_0702 09 2004 Condition Bearing Temp P125 gt Treshold bearing temperature Motor Current P5 gt Treshold motor current Frequency P3 gt Treshold frequency Cooling Temp P127 gt Shut down temperature Pumptype C CT and function purge vent off TMS on and TMS Setpoint 5 lt TMS temp P123 lt TMS Setpoint 5 Pumptype C CT and venting Frequency P3 lt 2 Hz Start command is applied Power supply OK Power supply breakdown Stand by rotor speed reached Plug in control Table B Parameters for the analog output Typical parameter numbers Parameter Description min value max value unit 3 Frequency 0 1000 Hz 5 motor current 0 200 0 1A 6 power 0 6553 5 0 1 W 7 motor temp 0 150 S 11 converter temp 0 1000 C 123 TMS temp 0 140 C 125 bearing temp 0 140 C 127 cooling temp 0 140 C 386 average temp of the pump 0 140 C 220 rotor displacement in the mag bearing plane VW13 0 00 1
82. ring the motor and bearing area of the MAG E Process gases escaping from the purge gas valve E Humidity entering the pump Refer to Section 2 6 The pump can become so hot during operation that it represents a burn hazard Frequent acceleration and deceleration of the pump or operating cycles between stand by and normal operation put pressure on the rotor Therefore it has to be changed after 5000 start or stand by cycles ah 03 mbar 102 Forevacuum pressure Ps 10 10 20 30 40 50 60 Time s o Fig 50 Curve for safe venting of the MAG pressure rise as a function of venting time Venting As to suitable gases see Section 2 6 Venting Method The pump must be vented via the purge gas and venting valve or the vent port when shutting the pump down When additionally venting the vacuum chamber the venting function of the purge gas and venting valve must be opened before opening the chamber valve This will ensure the presence of a higher pressure in the magnetic bearings compared to the remaining vacuum area This will prevent parti cles dust or aggressive gases from being forced into the not yet vented motor chamber of the pump Speed of the pressure rise All turoomolecular pumps may be vented at full speed However the pres sure must not increase faster than specified through the pressure rise curve The pump must be vented significantly slower when there is the risk of par
83. rs The number of operating hours of the pump has rea ched the pre set alarm limit during system start The system can no longer be started The number of operating hours of the pump has rea ched the pre set alarm limit The system is automatically shut down and can thereafter no longer be started Firmware Update This failure message is displayed directly after swit ching on the mains The system cannot be started Possible Cause Temperature sensor Pt 100 short circui ted Intensive utilisation of the standby mode or a high number of starting processes The alarm is only active provided the menu item Operating Hours Cycles was changed to Alarm The number of operating hours of the system has reached the level necessary for servicing The alarm is only active provided the menu item Operating Hours Cycles was changed to Alarm A new converter software version is required for operation of the pump Troubleshooting Measures Measure the resistance between pins 1 and 3of the cooling water temperature sensor Contact Leybold if the resistance of the sensor is under 100 Q See Figure on the next page for position of the sensor Have the pump serviced Have the pump serviced Have the converter software updated GA05141_0702 09 2004 99 Troubleshooting Fig 59 Temperature sensors Failure Message on Display Bearing Temp SC The magnetic bearing tempe rature se
84. rsists contact Leybold service Remove transport seal see Section 2 4 Check BEARING connector and cable for bent pins Contact Leybold service if the cable is damaged Consult Leybold Application Support Acknowledge failure message and restart the pump If failure message persists contact Leybold service Check the chamber pressure during the ope ration Refer to Section 3 1 for correct venting of the pump Contact Leybold service Consult Leybold Application Support Reduce backing pressure Check if the rotor rotates freely Contact Leybold service if the rotor is damaged or blocked Reduce backing pressure Set parameter Accel Time to default 1000 s see Section 3 10 5 Reduce backing pressure Additionally check process gas flow Set parameter Normal Operation to default 95 and parameter Accel Time to default 1000 s see Section 3 10 5 Reduce backing pressure Additionally check process gas flow Failure Message on Display Cooling Temp SC The cooling water temperatu re sensor reads a temperatu re lower than 1 C Operating Cycles The registered number of start and stand by cycles exceeds the permissible alarm limit during system start The system can no lon ger be started The registered number of start and stand by cycles has reached the pre set alarm limit The system is automati cally shut down and can the reafter no longer be started Operating Hou
85. s Eastern amp Central time zones Phone 1 724 327 5700 Fax 1 724 733 1217 Pacific Mountain Alaskan amp Hawaiian time zones Phone 1 480 752 9191 Fax 1 480 752 9494 Service Phone 1 724 327 5700 Fax 1 724 733 3799 Leybold Vacuum GmbH Bonner Strasse 498 Bayenthal D 50968 Cologne Phone 4 49 0 221 347 0 Fax 49 0 221 347 1250 documentation leybold com ASIA P R China Leybold Vacuum Tianjin International Trade Co Ltd Beichen Economic Development Area BEDA Tianjin 300400 China Phone 86 22 26970808 Fax 86 22 26974061 Fax 86 22 26972017 leybold leybold com cn Leybold Tianjin Vacuum Equipment Manufacturing Co Ltd Beichen Economic Development Area BEDA Tianjin 300400 China Phone 86 22 26970808 Fax 86 22 26974061 Fax 86 22 26972017 leybold leybold com cn Leybold Vacuum Tianjin International Trade Co Ltd Shanghai Branch Add No 33 76 Futedong San Rd Waigaoqiao FTZ Shanghai 200131 China Phone 86 21 5064 4666 Fax 86 21 5064 4668 leybold_sh leybold com On Leybold Tianjin Vacuum Equipment Manufacturing Co Ltd Guangzhou Branch Add G F 301 Building 110 Dongguangzhuang Rd Tianhe District Guangzhou 510610 China Phone 86 20 8723 7873 Phone 86 20 8723 7597 Fax 86 20 87237875 leybold_gz leybold com cn Japan Sales Leybold Vacuum Japan Co Ltd Head Office Tobu A K Bldg 4
86. sccm 5 sccm 86 sccm 0 6 mbar s Vent gas flow A800 10 sccm Leak rate lt 107 mbar s Connection VCR Nut 1 4 ZA A MM ASSISTING Fig 39 Purge gas and vent valve assembly and turbomolecular pump schematic Installation GA05141_0702 09 2004 55 Installation 56 GA05141_0702 09 2004 Caution Purge gas Choke capillary N S S N Ni gt Venting gas SS To purge gas inlet WN S SS y of MAG W 830 and MAG W 1300 Fig 40 Schematic drawing of the purge gas Tee MAG W 1300 C Part No 400110V0017 Purge gas connection with capil lary for flow reduction to 36 sccm at 1 5 bar abs Fig 41 Purge gas connection Pumps without purge gas valve MAG W 830 C W 1300 C W 2200 C W 830 W 1300 W 2200 W 2800 The MAG has a purge gas inlet VCR nut 1 4 or DN 16 KF The required purge gas flow is 36 sccm 5 sccm The pump needs an external purge gas control The optional purge gas Tee allows the throttled inlet of purge and venting gas A purge gas pressure of 1 5 bar abs will provide the required flow of 36 sccm 5 sccm The Tee and the the purge vent valve can be mounted to the MAG W 830 C W 1300 C W 830 W 1300 W 2200 and W 2800 The pumps without C in the name are not suitable for pumping corrosive and aggressive gases even when they are operated w
87. shing Warning Green flashing slow Start delay Acceleration Green flashing fast Green steady light Deceleration Kinetic buffering Normal operation Stand by MAIN green This lamp is lit if the power is switched on and all of the supply voltages for operation are available Flashes when the power fails as long as the power supply voltages in the converter are maintained by the kinetic buffering 3 7 Remote control The pump can be switched on or off using the START STOP keys or via control connector X14 E X14 11 not connected Start Stop via the operator control panel E Jumper X14 11 X14 10 Start Stop via control input X14 12 Operation GA05141_0702 09 2004 73 Operation gt t IEN HY pee gt Shutdown X14 48 O X14 47 REMOTE So 1 0V 0 Operating mode 15v 1 Programming only via START ia S serial interface X14 10 P12 Start delay time P36 START interface START key pad STOP key pad STOP interface No Failure Failures one causes gt braking the pump braking operation with the pulsed resistor Fig 53 Function diagram START STOP 74 6A05141_0702 09 2004 Plug in control 3 8 Operation with plug in control Observe the general operation rules given in Section 3 1 to 3 5 Switching on E Switch on the MAG DRIVE 9 2 The display reads after approximately 20 to 30 seconds
88. sk this warning by others itis only displayed during run up up to approximately 150 Hz and during standby ope ration The registered number of start and standby cycles exceeds the permissible num ber warning threshold 2 and 3 The warning is now displayed constantly Pump Op Hours Warning messages Possible Cause Motor temperature exceeds the warning threshold e g due to a high gas load Drive failure or internal converter failure Cooling water flow too low or cooling water temperature too high Frequent acceleration and deceleration of the pump Frequent acceleration and deceleration of the pump No sufficient air circulation Cooling water flow too low or cooling water temperature too high Intensive utilisation of the standby mode or a high number of starting processes This section will only be active provided the menu item Operating Hours Cycles remains set to Warning The operating time of the pump attains the pre set warning threshold Troubleshooting Measures Take the actual motor temperature reading from the display see Section 3 10 1 Reduce gas load If the warning persists con tact Leybold service Contact Leybold service Apply cooling water according to specifica tions Check cooling water tubes for deposits See also Section 2 5 Allow pump to cool down between the cycles Allow converter to cool down between the cycles Refer to Section 2 7 for
89. status of the purge gas valve the moment the failure occured It can be used to estimate the run down time of the pump Starting Time The frequency has not rea ched 40 Hz 2 minutes after the start command was app lied Accel Time The pump does not reach the normal operation frequency after the set maximum acce leration time Overload Time The rotational speed has dropped below normal opera tion frequency and stays there for longer than the maximum Accel Time Shutdown Freq Rotational speed dropped below the shutdown frequen cy threshold 140 Hz 98 GA05141_0702 09 2004 Possible Cause Mechanical shocks possibly due to tool maintenance whwn the rotor stands still Pump is still protected with transport seal on power up BEARING cable or connector damaged Vibration influence of several pumps bet ween each other Mechanical shocks possibly due to tool maintenance Shock venting Converter failure Vibration influence of several pumps bet ween each other Backing pressure too high during start up Rotor blocked Backing pressure too high during start up Parameter Accel Time is not set cor rectly Backing pressure too high during opera tion Parameters Accel Time or Normal Operation are not set correctly Backing pressure too high during opera tion Measures Acknowledge failure message and restart the pump If failure message pe
90. tects the bearing section and the motor from corrosive gases The rotor and the stator of the pump are KEPLA coated to prevent corro sive attack caused by the process gases The corrosion protection of the pump is effective only when the pump is protected from moisture during standstill and storage If the process gas contains moisture contact Leybold for recommendations Sublimation Some media e g AICI can sublimate in the pump and form deposits Thick coatings can infringe on the required operating clearence and ultima tely cause the pump to seize These deposits can also react with moisture and generate corrosive gases e g HCl This can become very critical when the pump is exposed to air Deposits can be avoided in many processes by heating the pump with TMS Temperature Management System The TMS is integrated in all CT versions The purpose of the TMS is to keep the pump temperature in a constant range To achieve the temperature the pump is equipped with a heaterband Some media e g metall organic compounds can decompose at the hot surface of the pump and build layers Please direct any inqueries to the manufacturer In order to handle gases or media e g ACL which can form deposits inside the pump it is required to use the TMS Tempera ture Management System The temperature selected for such processes has to be set to the maximum value Ignition danger During operation the pressure inside the MAG is so low
91. th Floor 23 3 Shin Yokohama 3 chome Kohoku ku Yokohama shi Kanagawa ken 222 0033 Phone 81 45 4713330 Fax 81 45 4713323 Sales Leybold Vacuum Japan Co Ltd Osaka Branch Office MURATA Bldg 7F 2 7 53 Nihi Miyahara Yodogawa ku Osaka shi 532 0004 Phone 81 6 6393 5211 Fax 81 6 6393 5215 Service Leybold Vacuum Japan Co Ltd Tsukuba Technical S C Tsukuba Minami Daiichi Kogyo Danchi 21 Kasumi no Sato Ami machi nashiki gun Ibaraki ken 300 0315 Tel 81 298 89 2841 Fax 81 298 89 2838 Korea Leybold Vacuum Korea Ltd 1761 47 Yulkeum ri SungHwan eup Chonan Choongchung Namdo 330 807 Korea Sales Tel 82 41 580 4431 Fax 82 41 588 3737 Service Center Phone 82 41 588 3765 Fax 82 41 588 3769 Singapore Leybold Vacuum Singapore Pte Ltd No 1 International Business Park B1 20B The Synergy Singapore 609917 Phone 65 66652910 Fax 65 65668202 vacuum leyboldvac com sg Taiwan Leybold Vacuum Taiwan Ltd 2F No 416 1 Sec 3 Chung Hsin Rd Chu Tung Hsin Chu Taiwan R O C Phone 886 3 5833988 Fax 886 3 5833999 Leybold vacuum www leybold com Technical alterations reserved Printed in Germany on chlorine free bleached paper 09 04 LV_06869_2004
92. the MAG DRIVE 9 up to a minimum frequency of 110 Hz When the power returns the pump is again accelerated up to the frequency setpoint The acceleration time is now restarted If the converter hasn t gone into the normal operating mode after the monitoring time it is shutdown with the failure message Accel Time If the system is running in the normal operation mode then in the case of an occurring mains failure the corresponding relay contact Normal opera tion will be disabled with a delay Brief mains voltage interruptions of less than five seconds will not have an influence on the relay output provided the speed of the pump does not drop within this time span below the speed limit set up through the normal operation factor or if a stop process was initiated Deceleration After a stop command the pump is braked down to a speed lt 5 Hz as quickly as possible A brake resistor is integrated into the converter which converts the regenerative energy into heat Failure The converter was shutdown with a failure message and waits for a failure acknowledgement after the failure has been removed The failure type can be read from the display The failure message can be acknowledged by depressing the STOP key or via the digital input option when the pump stands still f lt 5 Hz Plug in control Mains switched on Y E Initialization S gt Switch On Guard S After a failure quit a second
93. the analog output on next page Scale factor for the analog output 0 00 Analog input 0 10 V optionally frequency setpoint via analog input 2 10 V max frequency setpoint Waiting time between start command and acceleration Display language Bus adress for the converter by operation via serial interface RS 232 485 Function of the digital input option 1 idle no function Stand by mode Failure reset Function of the digital input option 2 idle no function Stand by mode Failure reset will be displayed as soon as the number of permissible operating hours or cycles is exceeded in the case of Alarm the system is shut down or a restart is prevented n the case of Warning a warning Warning Default 5 Adjustable value option Ac cess min max stan Unit value value dard 0 10 0 r won 0 10 7 r won 0 10 8 r won 0 10 10 r won 0 200 70 C r won 0 150 100 0 1Ar won 0 600 300 Hz iw on 0 1023 125 r won 100 0 1 00 r won no function r w off Function frequency setpoint 0 3600 0 s r w off English rw on German 0 31 0 r won 0 2 1 t w Off 0 2 2 t w Off r w off Alarm Relay 9 Option Mains Down Threshold 70 C Scaling Ana Out 1 00 Plug in control Set Converter Enter Relay 6 Option Bearing Temp 5 No Cooling Water No Purgegas Pump Stand Still Start Command Powersupply OK D Relay 7 Optio
94. the service life of the rotor is limited If the rotor is changed too late it may be destroyed Thus in the flange mounts high forces and torque conditions can occur The mounting screws for the pump may be torn off When using clamped flange connections at the housing or with compo nents above the housing sudden twisting of the entire pump can be experienced The pump s operating hours are displayed at the frequency converter see Sectiont 3 10 2 A warning message appears after 37 000 hours of operation and after 3700 starts stops or cycles Only the Leybold service can change the rotor 4 3 Changing the touch down bearings Wear occurs at the touch down bearings when hard shocks have to be supported Maintenance is also required after removing the bearing cable during ope ration of the pump Under these conditions the rotor can not be controlled by the magnet bearing and the pump will have a full run down on the touch down bearing Only the Leybold service can change the touch down bearings Maintenance 4 4 Cleaning the frequency converter internally Depending on the installation site the converter may collect grime dust moisture on the inside Such contamination may lead to malfunctions overheating or short circuits Therefore the converter must be cleaned after 5 years Only the Leybold service can clean the converter internally 4 5 Removing the pump from the system MAG which have been used in sem
95. tion threshold Troubleshooting Measures Check the line voltage Contact Leybold service Switch the converter off and on again If the converter still malfunctions contact Leybold service Open and close purge gas and or venting valve via control plug X14 LED on the valve must light up and a clicking noise can be heard Foreline pressure drops while the valve is closed Set purge flow according to specification Open and close purge gas and venting valve via control plug X14 LED on the valve must light up and a clicking noise can be heard SSC pressure drops while the valve is clo sed Leave the pump system run for 3 to 5 hours to reach a pressure below 10 mbar See TMS failures Operate the converter according to the speci fications No measures required Accept default values or set new values see Sections 3 10 and 4 4 GA05141_0702 09 2004 103 EC Manufacturer s Declaration in the spirit of Appendix IIb to the 98 37 EG Machinery Guidelines We LEYBOLD Vacuum GmbH herewith declare that operation of the incomplete machine defined below is not permissible until it has been determined that the machine into which this incomplete machine is to be installed meets the regulations of the EEC Directive on Machinery When using the appropriate Leybold accessories e g connector lines and when powering the pump with the spe cified Leybold frequency converters the protection level prescribed in the EM
96. tion instructions to maintain EMC The MAG DRIVE complies with the Electromagnetic Compatibility EMC Directives of the EC In order to maintain this the following installa tion instructions must be observed E To connect the pump to the converter the prescribed Leybold cables must be used M The connection cables to the analog interface control plug X14 and to the serial interface connector X7 must be shielded The shields must be connected to the metal housings of the SUB D connector and SUB D socket 2 7 1 Power supply connection X19 The converter is ready to be connected to line supply voltages between 200 240 V 50 60 Hz The connection is established using the power cable supplied which is inserted at connector X19 at the rear of the converter The converter will be damaged if it is operated with the incorrect Caution supply voltage 2 7 2 Pump connection To avoid contact with hazardous voltages in case of malfunction Warning the pump must be connected to PE Connect the converter X20 to the motor and magnetic bearing connection of the pump X23 and the PK communication connection X24 using the DRIVE BEARING cable Connect the converter X21 to the TMS connection X30 using the TMS cable Also refer to Fig 46 Make sure that you have fixed all cables properly GA05141_0702 09 2004 59 Installation GO GA05141_0702 09 2004 2 7 3 Control plug X14 Emergency off Make sure that pins 47 a
97. tions to dripping water Install 16 A fuses for the converter When connecting the frequency converter to a polyphase network between two phases provide additional external fuse protection for both phases fuse amperage 16 A The external fuse must have a minimum rated bra king capacity of 5 kA Only adequately trained electrical electronic personnel may con nect up the equipment in accordance with valid IEC internatio nal EN European and or national guidelines or under their management and supervision The connecting cables between the converter and pump may only be inserted or removed when the pump is switched off and stands still after the run down procedure and the converter is iso lated from the line supply Do not switch on frequency converter until all cables have been connected properly Unauthorized opening of the converter voids the warranty Hazardous voltages are present inside the converter Death or severe injury can occur if you come into contact with these hazar dous voltages Before opening the converter isolate the converter from the line supply and lock the switch so that it cannot be acci dentally switched on again In addition the pump has to stand still because it works as gene rator as long as it rotates and the pump cables have to be disconnected Installation 1 Phase L a 2 Not assigned O O O 3 Neutral N 123 ES Fig 43 Connector assignment X19 supply connection Installa
98. ump The outputs of the electronic converter are no load and short circuit proof For remote control via control connector X14 we recommend that either a relay or optocoupler is used to provide electrical decoupling Housing The converter is supplied with a closed housing It can be installed in a 19 cabinet see Section 2 7 Front panel Main switch 9 pin connecting socket for the plug in control or for connection of a serial interface 2 short stroke keys 1 green red STATUS LED 1 green COM LED communications interface 1 green MAIN LED line supply voltage 2 fuses TMS The optional plug in control has 10 keys and 1 LCD with 2 lines each 16 characters The plug in control displays operating statuses and failures and allows the configuration of the pumping system Rear panel X14 50 pin D socket connector for remote monitoring and open loop con trol X19 3 pin Hirschmann connector for the connection to the mains supply X20 MIL standard socket connector for internal sensors magnetic bearing connection motor drive and communication to the memory chip X21 MIL standard socket connector for the TMS and purge valve connec tion Spare slot for optional network cards e g Device Net Description Fuses TMS O O Each Fuse 4A MAG DRIVE 2 MAG DRIVE 9 a Lo Fuses TMS O Each Fuse 4A MAG DRIVE od y MAG DRIVE 9 4 with Plug in control Fig
99. vided at the front panel The connector X7 is assigned the serial interface RS 232 It is only to be used by the Leybold Service Installation Pumps with TMS DRIVE BEARING MS aooo E EE Control plug O Pumps without TMS 8 wo DG 5 X24 py e E DRIVE BEARING x20 X23 Gi a X21 0 O O QA MAINS Control plug Pumps with optional zt purge vent valve E IP X24 DRIVE BEARING Purge Vent IM e MAINS Control plug Fig 46 Block wiring diagram GA05141_0702 09 2004 63 Installation Relay 1 Failure No failure gt Start command applied Actual frequency gt Normal operation Warning gt Acceleration Deceleration Function analog input 2 Analog input 2 Frequency Analog input 2 setpoint O X14 17
100. ybold For the setting refer to 3 10 6 Operating menu Set TMS Heat up The setpoint temperature will be reached within 30 to 60 minutes depen ding on cooling and environmental conditions For temperature sensitive applications observe the cooling water specifications refer to Section 1 6 and 2 5 In order to guarantee correct temperature setting of the pump it is required to provide the cooling water within the envelope descri bed in Section 2 5 Operation TMS Code 1 ai 2 a 3 2 sia o gt 34 Heater ON m ees wm Cooling ON Warning Signal TMS 0 AAA E Fig 51 Typical function diagram TMS for the MAG DRIVE 9 a TMS status code The TMS status code is displayed on the operation display No Code Description 1 H Heating pump 2 HOK Temp TMS ok heater ON 3 OK Temp TMS ok 4 COK Temp TMS ok cooling ON 5 W Temp TMS gt TMS 5K OFF TMS cancelled via control plug X14 HCOK Temp TMS ok cooling ON heater ON NOK Temp TMS not ok cooling OFF heater OFF HC Temp TMS not ok cooling ON heater ON C Temp TMS not ok cooling ON oOo a N OD GA05141_0702 09 2004 69 Operation 7O GA05141_0702 09 2004 Warning Actual temperature The actual temperature is displayed on the operating display refer to 3 10 1 Operating menu Basic menu Signal TMS OK If the actual TMS temperature lies in the range 5K from the setpoint tem perature the TMS OK signal can be output v
101. ybold service Contact Leybold service Check cables and connectors straighten pins if required Deactivate Emergency off via control plug X14 and acknowledge failure message Reconnect or replace DRIVE cable Failure Message on Display TMS 1 The converter measures a heating current of less than 300 mA when heater is on TMS 2 The converter measures a heating current of more than 4A TMS 3 TMS temperature sensor reads a temperature higher than 139 C TMS 4 TMS temperature sensor reads a temperature lower than 1 C Possible Cause Fuse TMS blown Heating element or internal pump connection damaged TMS DRIVE cable or connec tors damaged Converter failure Overvoltage Heating element defective Converter failure TMS sensor damaged Converter failure TMS sensor short circuited Converter failure Troubleshooting Measures Step 1 Check fuse Replace fuse TMS F4A 5x20 mm if blown Step 2 Check pump heating element X31 Check if the connector of the heating element is con nected The resistance of the heating element X31 is typically between 70 Q and 75 Q In case abnormal values are measured contact Leybold service Step 3 Check TMS cable If step 2 was successful do the following Check TMS cable for bent pins Measure resistance between pins X21 AA and X21 q with the cable connected to the pump The resistance is typically between 70 Q and 75 Q

Download Pdf Manuals

Related Search

Related Contents

Philips BIENVENIDO CD445 User's Manual  音声応答による サービスを提供するシステムです。    Handbuch  

Copyright © All rights reserved. Failed to retrieve file