Omega FMA 1400 Automobile Parts User Manual
Contents
1. Shop online at omega com CEOMEGA www omega com e mail info omega com FMA 1400 and FMA 1500 Mass Flow Meters and Controllers omega com CEOMEGA OMEGAnet Online Service Internet e mail www omega com info omega com USA ISO 9001 Certified Canada Servicing North America One Omega Drive Box 4047 Stamford CT 06907 0047 Tel 203 359 1660 FAX 203 359 7700 e mail info omega com 976 Bergar Laval Quebec H7L 5A1 Tel 514 856 6928 FAX 514 856 6886 e mail info omega ca For immediate technical or application assistance USA and Canada Mexico Benelux Czech Republic France Germany Austria United Kingdom ISO 9002 Certified Sales Service 1 800 826 6342 1 800 TC OMEGA Customer Service 1 800 622 2378 1 800 622 BEST Engineering Service 1 800 872 9436 1 800 USA WHEN TELEX 996404 EASYLINK 62968934 CABLE OMEGA En ol 001 203 359 7803 e mail espanol omega com FAX 001 203 359 7807 info omega com mx Servicing Europe Postbus 8034 1180 LA Amstelveen The Netherlands Tel 31 0 20 3472121 FAX 31 0 20 6434643 Toll Free in Benelux 0800 0993344 e mail sales omegaeng nl Rude arm dy 1868 733 01 Karvin 8 Tel 420 0 59 6311899 FAX 420 0 59 6311114 Toll Free 0800 1 66342 e mail info omegashop cz 11 rue Jacques Cartier 78280 Guyancourt France Tel 33 0 1 61 37 29 00 FAX 33 0 1 30 57 542. 3287 1357 6 129 Freon 12 3538 1432 5 395 Freon 13 CCIF 3834 153 4 660 Freon 13B1 3697 1113 6 644 Freon 14 CF 4210 1654 3 926 Freon 21 4252 140 4 592 Freon 22 CHCIF 4589 1544 3 858 Freon 113 CCI FCCIF 2031 161 8 360 Freon 114 C CLF 2240 160 7 626 Freon 115 C CIF 2418 164 6 892 Freon C318 C F 1760 185 8 397 Germane GeH 5696 1404 3 418 Germanium Tetrachloride GeCl 2668 1071 9 565 Helium He 1 454 1 241 1786 Hexafluoroethane CF Freon 116 2421 1834 6 157 Hexane 4 1792 3968 3 845 Hydrogen H 1 0106 3 419 0899 Hydrogen Bromide HBr 1 000 0861 3 610 Hydrogen Chloride HCI 1 000 1912 1 627 Hydrogen Cyanide HCN 1 070 3171 1 206 ACTUAL GAS 2 lt oO N 25 K Factor Cp Density Relative to Cal g 0 1 Hydrogen Fluoride HF 9998 3479 893 3 Hydrogen lodide HI 5 707 Hydrogen Selenide H Se 613 Hydrogen Sulfide H S 2397 1520 odine Pentafluoride IF sobutane 3 593 sobutylene C H 2 503 Krypton Kr 3 739 Methane CH 715 Methanol CH 1 429 Methyl Acetylene 1 787 Methyl Bromide CHBr 4 236 Methyl Chloride CH CI 2 253 Methyl Fluoride CHF 68 32231 1518 Methyl Mercaptan CH SH 2 146 Methyl Trichlorosilane CH SiCI 6 669 Molybdenum Hexafluoride 9 366 Monoethylamine C H NH 2 011 Monomethylamine 5 1 386 87 ot Neon NE 2328 8 98 Nitric Oxide NO 2328 1 339
3. 9900 Nitrogen Nz 1 25 Nitrogen Trifluoride NF 3 168 Nitrosyl Chloride NOCI 2 920 Nitrous Oxide N O 1 964 Octafluorocyclobutane Freon C318 8 397 Oxygen 0 1427 Oxygen Difluoride OF 2 406 Ozone 2 144 Pentaborane B Hy 2 816 Pentane 3 219 Perchloryl Fluoride CIO F 4 571 Perfluoropropane C F 8 388 Phosgene COCI 4 418 Phosphine PH 1 517 Phosphorous Oxychloride POCI 6 843 Phosphorous Pentafluoride PH 3021 1610 5 620 26 Nitrogen Dioxide NO 1933 2 052 7 1 37 6 6 Relative to Cal g 9 1 Phosphorous Trichloride PCI 6 127 Propane C Hs 1 967 Propylene C H 1 877 Silane SiH 1 433 Silicon Tetrachloride SiCl 7 580 Silicon Tetrafluoride SiF 4 643 508 4 Sulfur Dioxide SO 1488 2 858 Sulfur Hexafluoride SF 6 516 Sulfuryl Fluoride 505 4 562 Tetrafluoroethane Forane 134A 4 224 Tetrafluorohydrazine 3237 4 64 Trichlorofluoromethane Freon 11 CCIF 3287 1357 6 129 Trichlorosilane SiHCl 3278 1380 6 043 1 1 2 Trichloro 1 2 2 Trifluoroethane Freon 113 CCI FCCIF Triisobutyl Aluminum 0608 58 8 848 Titanium Tetrachloride 8 465 Trichloro Ethylene C HCI 5 95 Trimethylamine CH 4N 2 639 Tungsten Hexafluoride WF 13 28 Uranium Hexafluoride UF 15 70 Vinyl Bromide CH CHBr 4 772 Vinyl Chloride 2 788 Xenon Xe 0378 5 858 0 5 0 84 2 8 27 APPENDIX 3 DIMENSIONAL DRAWINGS 1 50 38 1
4. the DATA connector which is located at the back of the Command Module Power up the Mass Flow Meter for at least 30 minutes prior to commencing the calibration procedure 16 7 3 2 ZERO Adjustment Shut off the flow of gas into the Mass Flow Meter To ensure that no seepage or leak occurs into the meter it is good practice to temporarily disconnect the gas source Using the multimeter and the insulated screwdriver adjust the ZERO potentiometer R29 through the access window for 0 VDC or 4 mA respectively at zero flow 7 3 3 2596 Flow Adjustment Reconnect the gas source Using the flow regulator adjust the flow rate to 25 of full scale flow Check the flow rate indicated against the flow calibrator Adjust the set ting for potentiometer R21 by using the insulated screwdriver through the access window until the output of the flowmeter reads 1 25 VDC 37mV or 8mA 0 12mA 7 3 4 5096 Flow Adjustment Using the flow regulator increase the flow rate to 50 of full scale flow Check the flow rate indicated against the flow calibrator Adjust the setting for potentiometer R45 by using the insulated screwdriver through the access window until the out put of the flowmeter reads 2 50VDC 37 or 12mA 0 12mA 7 3 5 7596 Flow Adjustment Increase the flow rate to 7596 of full scale flow Check the flow rate indicated against the flow calibrator Adjust the setting for potentiometer R44 by using the insulated screwdriver thr
5. 1400 ranges above 10 L min 100 sLit min max 15 5 VDC 80 mA max 1 2 watts max 15 5 VDC 600 mA max 9 watts max Power inputs are each protected by a 750mA M medium time lag resettable fuse and a rectifier diode for polarity protection WETTED MATERIALS 316 stainless steel 416 stainless steel VITONe O rings BUNA N NEOPRENE or KALREZ O rings are optional Omega makes no expressed or implied guarantees of corrosion resistance of mass flow meters as pertains to different flow media reacting with components of meters It is the customers sole responsibility to select the model suitable for a particular gas based on the fluid contacting wetted materials offered in the different models INLET AND OUTLET CONNECTIONS 1 4 FMA 1400 ranges up to and above10 L min or 3 8 FMA 1400 for ranges above 10 L min compression fittings standard 1 8 or 3 8 compression fittings and 1 4 VCRe fittings are optional TRANSDUCER INTERFACE CABLE Flat cable with female 15 pin D connector ends is standard Optional shielded cable is available with male female 15 pin D connector ends Cable length may not exceed 9 5 feet 3 meters 4 3 CE Compliance Any model FMA 1500 or FMA 1400 bearing a CE marking on it is in compliance with the below stated test standards currently accepted EMC Compliance with 89 336 EEC as amended Emission Standard EN 55011 1991 Group 1 Class A Immunity Standard EN 55082 1 1992 FLOW
6. 16 0 0 63 16 0 6 40 162 4 6 52 165 5 1 88 47 5 0 69 17 5 FOR HIGH FLOW MASS FLOW CONTROLLER ONLY 0 64 16 4 DIMENSIONS INCH mm FMA 1400 RANGES ABOVE 10 L MIN MASS FLOW CONTROLLER NOTES Omega reserves the right to change designs and dimensions at its sole discretion at any time without notice For certified dimensions please contact Omegae 31 NOTES 32 NOTES 33 WARRANTY DISCLAIMER OMEGA ENGINEERING INC warrants this unit to be free of defects in materials and workmanship for a period of 13 months from date of purchase OMEGA s Warranty adds an additional one 1 month grace period to the normal one 1 year product warranty to cover handling and shipping time This ensures that OMEGA s customers receive maximum coverage on each product If the unit malfunctions it must be returned to the factory for evaluation OMEGA s Customer Service Department will issue an Authorized Return AR number immediately upon phone or written request Upon examination by OMEGA if the unit is found to be defective it will be repaired or replaced at no charge OMEGA s WARRANTY does not apply to defects resulting from any action of the purchaser including but not limited to mishandling improper interfacing operation outside of design limits improp er repair or unauthorized modification This WARRANTY is VOID if the unit shows evidence of having been tampered with or shows evidence of having been dam
7. If the flow rate is not within 0 75 of full scale re adjust the setting for potentiometer R44 until the flow output is correct 7 4 7 100 Flow Adjustment Change the set point to 5 00 VDC to control at 100 of full scale flow Check the flow rate indicated against the flow calibrator If the flow rate is not within 0 75 of full scale re adjust the setting for potentiometer R43 until the flow output is correct Repeat steps 7 4 4 to 7 4 7 at least once more 18 TABLE VI FMA 1400 SOLENOID VALVE ORIFICE SELECTION TABLE ORIFICE PART NUMBER FLOW No 08 010 08 020 10 to 1000 sccm OR 040 1 to 5 slpm 8 TROUBLESHOOTING 8 1 Common Conditions Your Mass Flow Meter Controller was thoroughly checked at numerous quality control points during and after manufacturing and assembly operations It was cal ibrated in accordance to your desired flow and pressure conditions for a given gas or a mixture of gases It was carefully packed to prevent damage during shipment Should you feel that the instrument is not functioning properly please check for the following common conditions first V Are all cables connected correctly V Are there any leaks in the installation V the power supply correctly selected according to requirements When several meters are used a power supply with appropriate current rating should be selected V Were the connector pinouts matched properly When interchanging with other manufacturers eq
8. RANGES TABLE I FMA 1500 1400 FOR RANGES UP TO 10 L MIN LOW FLOW MASS FLOW METER CONTROLLERS scc min 02 std liters min 0101 0 to 100 0 to 10 10 0 to 200 TABLE II FMA 1500 1400 FOR RANGES ABOVE 10 L MIN MEDIUM FLOW MASS FLOW METER CONTROLLERS 50 TABLE III FMA 1500 1400 FOR RANGES ABOVE 10 L MIN HIGH FLOW MASS FLOW METER CONTROLLERS standard liters min N5 m Flow rates are stated for Nitrogen at STP conditions 1 70 F 21 1 C at 1 atm For other gases use the K factor as a multiplier from APPENDIX 2 8 TABLE IV PRESSURE DROPS Row RATE MAXIMUM PRESSURE DROP wan mio qa xm 35 sm 3 4 9 m wm o TABLE V APPROXIMATE WEIGHTS MODEL WEIGHT SHIPPING WEIGHT 1500 ranges up to 10 L min transmitter 1 71 Ibs 0 78 kg 3 21 Ibs 1 46 kg 1500 ranges above 10 L min transmitter 2 42 Ibs 1 10 kg 3 92 Ibs 1 78 kg 1400 ranges up to 10 L min transmitter 2 20 Ibs 1 00 kg 3 70 Ibs 1 68 kg 1400 ranges above 10 L min transmitter 2 84 Ibs 1 29 kg 4 34 Ibs 1 97 kg 5 OPERATING INSTRUCTIONS 5 1 Preparation and Warm Up It is assumed that the Mass Flow Meter or Controller has been correctly installed and thoroughly leak tested as described in section 2 Make sure the flow so
9. relative K factor is used to relate the calibration of the actual gas to the reference gas mass flow rate of an actual gas sccm mass flow rate of a reference gas sccm K factor of an actual gas K factor of a reference gas For example if we want to know the flow rate of oxygen and wish to calibrate with nitrogen at 1000 SCCM the flow rate of oxygen is Qo Q 1000 X 0 9926 992 6 sccm where K relative K factor to reference gas oxygen to nitrogen 22 APPENDIX 1 COMPONENTS DIAGRAMS O OOOOOOO O et Og ooh TTR BEROI ds uude D T ED mim an RIS FMA 1500 METERING PC BOARD ALSO INCORPORATED IN FMA 1400 23 R7 RI iine 7 a e m Jes t 15 827 R26 CRS ite un 3 FMA 1400 CONTROL PC BOARD APPENDIX 2 GAS FACTOR TABLE FACTORS K FACTOR Cp Density ACTUAL GAS MES Acetylene C H 5829 4036 1 162 10000 240 1293 Allene Propadiene C3H 4346 1 787 Ammonia 7310 760 Air Argon Ar 1782 Arsine ASH 3 478 Boron Trichloride 5 227 Boron Triflouride 3 025 Bromine Br 7 130 Boron Tribromide Br 0647 11 18 Bromine Pentaflouride BrF 1369 7 803 6 Bromine Triflouride BrF 6 108 Bromotrifluoromethane Freon 13 B1 CBrF 6 644 1 3 Butadiene C H 2 413 Butane 2 593 1 Butane C H 2 503 240 352 92 2 Butane C4Hg CIS 32
10. transducer The output flow signal is also available at the DATA connector on the rear panel of the FMA14PD Series Command Module The default calibration is performed for 0 to 5 VDC output signal If 4 20 mA out put signal is used for flow indication on the FMA 1400 the accuracy of the actual flow rate will be in the specified range 1 0 of full scale but the total uncer tainty of the output reading may be in the range of 2 0 of full scale Optional calibration for 4 20 mA output signal is available upon request at time of order Meter signal output is linearly proportional to the mass molecular flow rate of the gas being metered The full scale range and gas for which your meter has been calibrated are shown on the flow transducer s front label 5 3 Swamping Condition If a flow of more than 10 above the maximum flow rate of the Mass Flow Meter is taking place a condition known as swamping may occur Readings of a swamped meter cannot be assumed to be either accurate or linear Flow must be restored to below 110 of maximum meter range Once flow rates are lowered to within calibrated range the swamping condition will end Operation of the meter above 110 of maximum calibrated flow may increase recovery time 5 4 Set Point Reference Signal FMA 1400 FMA 1400 flow controllers have a built in solenoid valve and allow the user to set the flow to any desired flow rate within the range of the particular model installed This valv
11. 0 L min are designed to work with clean gases only Never try to meter or control flow rates of liquids with any FMA 1500 s or FMA 1400 s CALIBRATIONS Performed at standard conditions 14 7 psia 1 01 bars and 70 F 21 1 C unless otherwise requested or stated ENVIRONMENTAL IEC 664 Installation Level Il Pollution Degree 11 4 1 FMA 1500 Mass Flow Meters for ranges up to and above 10 L min ACCURACY 1 of full scale including linearity for gas temperatures ranging from 59 F to 77 F 15 C to 25 C and pressures of 10 to 60 psia 0 7 to 4 1 bars REPEATABILITY 0 2 of full scale TEMPERATURE COEFFICIENT 0 1 of full scale C PRESSURE COEFFICIENT 0 01 of full scale psi 0 07 bar RESPONSE TIME 300ms time constant approximately 1 second to within 2 of set flow rate for 25 to 100 of full scale flow rate GAS PRESSURE 500 psig 34 5 bars maximum optimum pressure is 20 psig 1 4 bars GAS AND AMBIENT TEMPERATURE 41 F to 122 F 5 C to 50 C RELATIVE GAS HUMIDITY Up to 70 LEAK INTEGRITY 1 10 sccs He maximum to the outside environment ATTITUDE SENSITIVITY 1 shift for a 90 degree rotation from horizontal to vertical standard calibration is in horizontal position OUTPUT SIGNALS Linear 0 5 VDC 2000 minimum load impedance 4 20 mA optional 50 500 Q maximum loop resistance 20 mV peak to peak max noise TRANSDUCER INPUT POWER 15 5 VDC 80 mA max 1 2 watts 15 5 VDC 10 m
12. 27 Toll Free in France 0800 466 342 e mail sales omega fr Daimlerstrasse 26 D 75392 Deckenpfronn Germany Tel 49 0 7056 9398 0 FAX 49 0 7056 9398 29 Toll Free in Germany 0800 639 7678 e mail info omega de One Omega Drive River Bend Technology Centre Northbank Irlam Manchester M44 5BD United Kingdom Tel 44 0 161 777 6611 Toll Free in United Kingdom 0800 488 48 FAX 44 0 161 777 6622 e mail sales omega co uk It is the policy of OMEGA to comply with all worldwide safety and EMC EMI regulations that apply OMEGA is constantly pursuing certification of its products to the European New Approach Directives OMEGA will add the CE mark to every appropriate device upon certification The information contained in this document is believed to be correct but OMEGA Engineering Inc accepts no liability for any errors it contains and reserves the right to alter specifications without notice WARNING These products are not designed for use in and should not be used for patient connected applications TABLE OF CONTENTS UNPACKING THE 1400 1500 MASS FLOW METER 1 1 1 Inspect Package for External 1 1 2 Unpack the Mass Flow Meter Controller 1 1 3 Returning Merchandise for 1 INSTALLATION 1 2 1 Prima
13. 4 336 2 503 291 374 508 Carbon Dioxide CO 7382 2016 1 964 2 Butane TRANS 2 503 Carbon Disulfide CS 6026 1428 3 397 Carbon Monoxide Co 2488 1 250 2 Carbon Tetrachloride CCl 6 860 Carbon Tetrafluoride Freon 14 CF 3 926 Carbonyl Fluoride 2 945 Carbonyl Sulfide COS 2 680 Chlorine Cl 114 3 63 Chlorine Trifluoride CIF 4 125 Chlorodifluoromethane Freon 22 CHCIF 3 858 Chloroform CHCl 5 326 Chloropentafluoroethane Freon 115 C CIF 6 892 Chlorotrifluromethane Freon 13 CCIF 4 660 CyanogenC N 2 322 CyanogenChloride CICN 2 742 Cyclopropane CH 1 877 Deuterium D 1 799 Diborane BH 1 235 Cp Cal g K Factor Density 9 1 Dibromodifluoromethane CBr F 1947 15 9 362 Dichlorodifluoromethane Freon 12 CCIF 3538 1432 5 395 Dichlofluoromethane Freon 21 4252 140 4 592 Dichloromethylsilane CH3 SiCl 2522 1882 5 758 Dichlorosilane SiH Cl 4044 150 4 506 Dichlorotetrafluoroethane Freon 114 C Cl F 2235 1604 7 626 1 1 Difluoroethylene Freon 1132A C H F 4271 224 2 857 Dimethylamine CH4 NH 3714 366 2 011 Dimethyl Ether CH4 0 3896 3414 2 055 2 2 Dimethylpropane 2 2170 3914 3 219 Ethane C H 420 1 342 Ethanol 3918 3395 2 055 Ethyl Acetylene C H 8225 3513 2 413 Ethyl Chloride 3891 244 2 879 Ethylene 365 1 251 Ethylene Oxide C H 0 5191 268 1 965 Fluorine F 9784 1873 1 695 Fluoroform Freon 23 CHF 4967 176 3 127 Freon 11
14. 5 57 141 4 1 00 25 41 3 09 78 6 0 50 12 7 _ 5 11 129 9 0 16 4 1 0 69 17 5 2 69 68 3 0 16 411 DIMENSIONS INCH mm FMA 1500 FOR RANGES UP TO 10 L MIN MASS FLOW METER NOTES Omega reserves the right to change designs and dimensions at its sole discretion at any time without notice For certified dimensions please contact Omegae 28 2001508 150 38 1 7 50 9 1 38 35 1 E 1 3 63 92 2 l 0 63 16 0 0 63 16 0 1 88 47 5 5 65 143 5 5 77 146 6 FOR HIGH FLOW MASS FLOWMETER ONLY 0 69 17 5 0 40 10 2 DIMENSIONS mm FMA 1500 FOR RANGES ABOVE 10 L MIN MASS FLOW CONTROLLER NOTES Omega reserves the right to change designs and dimensions at its sole discretion at any time without notice For certified dimensions please contact Omegae 29 2 00 50 8 5 57 141 4 3 43 87 1 1 00 25 4 0 50 12 71 1 338 85 7 0 50 12 7 5 40 137 0 1 50 38 1 0 16 4 1 0 69 17 5 2 69 68 31 0 53 13 5 DIMENSIONS INCH mm FMA 1400 RANGES UP TO 10 L MIN MASS FLOW CONTROLLER NOTES Omega reserves the right to change designs and dimensions at its sole discretion at any time without notice For certified dimensions please contact Omega 30 7 2 00 50 8 1 50 38 1 1 38 35 1 1 4 38 111 1 0 63
15. A max 0 15 watts Power inputs are each protected by a 750mA M medium time lag resettable fuse and a rectifier diode for polarity protection WETTED MATERIALS 316 stainless steel VITONe O rings BUNA Ne NEOPRENE or KALREZe O rings are optional Omega makes no expressed or implied guarantees of corrosion resistance of mass flow meters as pertains to different flow media reacting with components of meters It is the customers sole responsibility to select the model suitable for a particular gas based on the fluid contacting wetted materials offered in the different models INLET AND OUTLET CONNECTIONS 1 4 fittings standard on ranges up to 50 L min 3 8 compression fittings standard on 60 80 and 100 L min ranges Optional 1 8 compression fittings and 1 4 VCR fittings on ranges up to 10 L min 3 8 compression fittings and 1 4 VCR fittings on ranges above 10 L min up to 50 L min TRANSDUCER INTERFACE CABLE cable with male 15 pin connector is standard Optional shielded cable is available with male female 15 pin connector ends Cable length may not exceed 9 5 feet 3 meters 4 2 FMA 1400 Mass Flow Controllers for ranges up to and above 10 L min ACCURACY 1 of full scale including linearity for gas temperatures ranging from 59 F to 77 F 15 C to 25 C and pressures of 10 to 60 psia 0 7 to 4 1 bars REPEATABILITY 0 2 of full scale TEMPERATURE COEFFICIENT 0 1 of full
16. CFR 21 used in or with any nuclear installation or activity or 2 in medical applications or used on humans Should any Product s be used in or with any nuclear installation or activity medical application used on humans or misused in any way OMEGA assumes no responsibility as set forth in our basic WARRANTY DISCLAIMER language and additionally purchaser will indemnify OMEGA and hold OMEGA harmless from any liability or damage whatsoever arising out of the use of the Product s in such a manner RETURN REQUESTS INQUIRIES Direct all warranty and repair requests inquiries to the OMEGA Customer Service Department BEFORE RETURNING ANY PRODUCT S TO OMEGA PURCHASER MUST OBTAIN AN AUTHORIZED RETURN AR NUMBER FROM OMEGA S CUSTOMER SERVICE DEPARTMENT IN ORDER TO AVOID PROCESSING DELAYS The assigned AR number should then be marked on the outside of the return package and on any correspondence The purchaser is responsible for shipping charges freight insurance and proper packaging to prevent breakage in transit FOR WARRANTY RETURNS please have the FOR NON WARRANTY REPAIRS consult OMEGA following information available BEFORE for current repair charges Have the following contacting OMEGA information available BEFORE contacting OMEGA 1 Purchase Order number under which 1 Purchase Order number to cover the the product was PURCHASED COST of the repair 2 Model and serial number of the product 2 Model and serial number of
17. GE mode set valve for the closed position Apply an inlet pressure of 5 psig and atmospheric pressure at the outlet If a small flow occurs turn the set screw on top of the solenoid valve clockwise until the flow through the FMA 1400 just stops 7 4 3 Full Scale Flow Adjustment Fully open the flow regulator upstream of the FMA 1400 Increase the inlet pres sure to 20 psig 25 psig for 1400 units above 10 L min Apply a 5 00 VDC set point reference Using the calibrator check the flow rate If necessary adjust R21 to match the desired full scale flow rate In control mode turning R21 clock wise will decrease the flow Conversely turning R21 counterclockwise will increase the flow through the FMA 1400 7 4 4 25 Flow Adjustment Change the set point to 1 25 VDC to control at 25 of full scale flow Check the flow rate indicated against the flow calibrator If the flow rate is not within 0 75 of full scale re adjust the setting for potentiometer R21 until the flow output is correct 7 4 5 50 Flow Adjustment Change the set point to 2 50 VDC to control at 50 of full scale flow Check the flow rate indicated against the flow calibrator If the flow rate is not within 0 75 of full scale re adjust the setting for potentiometer R45 until the flow output is correct 7 4 6 75 Flow Adjustment Change the set point to 3 75 VDC to control at 75 of full scale flow Check the flow rate indicated against the flow calibrator
18. Meter Controller Open the carton carefully from the top and inspect for any sign of concealed ship ping damage In addition to contacting the shipping carrier please forward a copy of any damage report to Omegae directly When unpacking the instrument please make sure that you have all the items indi cated on the Packing List Please report any shortages promptly 1 3 Returning Merchandise for Repair Please contact an Omega customer service representative and request a Return Authorization Number AR It is mandatory that any equipment returned for servicing be purged and neutral ized of any dangerous contents including but not limited to toxic bacterially infec tious corrosive or radioactive substances No work shall be performed on a returned product unless the customer submits a fully executed signed SAFETY CERTIFICATE Please request form from the Service Manager 2 INSTALLATION 2 1 Primary Gas Connections Please note that the FMA 1400 1500 Mass Flow Meter Controller will not operate with liquids Only clean gases are allowed to be introduced into the instrument If gases are contaminated they must be filtered to prevent the introduction of imped iments into the sensor Caution FMA 1400 1500 transducers should not be used for monitoring OXYGEN gas unless specifically cleaned and prepared for such application For more information contact Omega Attitude sensitivity of the Mass Flow Meter is 15 This means that the
19. N 3 Important notes In general D Connector numbering patterns are standardized There are how ever some connectors with nonconforming patterns and the numbering sequence on your mating connector may or may not coincide with the numbering sequence shown in our pin configuration table above It is imperative that you match the appropriate wires in accordance with the correct sequence regardless of the par ticular numbers displayed on your mating connector Make sure power is OFF when connecting or disconnecting any cables in the system The and power inputs are each protected by 750mA M medium time lag resettable fuse If a shorting condition or polarity reversal occurs the fuse will cut power to the flow transducer circuit Disconnect the power to the unit remove the faulty condition and reconnect the power The fuse will reset once the faulty con dition has been removed Cable length may not exceed 9 5 feet 3 meters Use of the FMA 1400 1500 flow transducer in a manner other than that specified in this manual or in writing from Omega may impair the protection provided by the equipment 3 PRINCIPLE OF OPERATION The stream of gas entering the Mass Flow transducer is split by shunting a small portion of the flow through a capillary stainless steel sensor tube The remainder of the gas flows through the primary flow conduit The geometry of the primary con duit and the sensor tube are designed to ensure lamina
20. aged as a result of excessive corrosion or current heat moisture or vibration improper specification misapplication misuse or other operating con ditions outside of OMEGA s control Components which wear not warranted including but not limited to contact points fuses and triacs OMEGA is pleased to offer suggestions on the use of its various products However OMEGA nei ther assumes responsibility for any omissions or errors nor assumes liability for any damages that result from the use of its products in accordance with information provided by OMEGA either verbal or written OMEGA warrants only that the parts manufactured by it will be as specified and free of defects OMEGA MAKES NO OTHER WARRANTIES OR REPRESENTATIONS OF ANY KIND WHATSOEVER EXPRESS OR IMPLIED EXCEPT THAT OF TITLE AND ALL IMPLIED WARRANTIES INCLUDING ANY WARRANTY OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PUR POSE ARE HEREBY DISCLAIMED LIMITATION OF LIABILITY The remedies of purchaser set forth herein are exclusive and the total liability of OMEGA with respect to this order whether based on contract warranty negligence indemnification strict liability or otherwise shall not exceed the purchase price of the component upon which liability is based In no event shall OMEGA be liable for consequential incidental or special damages CONDITIONS Equipment sold by OMEGA is not intended to be used nor shall it be used 1 as a Basic Component under 10
21. cron FMA 1500 1400 for ranges up to 10 L min or 60 micron FMA 1500 1400 for ranges above 10 L min filter is built into the inlet of the flow transducer The filter screen and the flow paths may require occasional cleaning as described below There is no other rec ommended maintenance required It is good practice however to keep the meter away from vibration hot or corrosive environments and excessive RF or magnet ic interference If periodic calibrations are required they should be performed by qualified per sonnel and calibrating instruments as described in section 7 It is recommended that units are returned to for repair service and calibration CAUTION TO PROTECT SERVICING PERSONNEL IT IS MANDATORY A THAT ANY INSTRUMENT BEING SERVICED IS COMPLETELY PURGED AND NEUTRALIZED OF TOXIC BACTERIOLOGICALLY INFECTED CORROSIVE OR RADIOACTIVE CONTENTS 6 2 Flow Path Cleaning Before attempting any disassembly of the unit for cleaning try inspecting the flow paths by looking into the inlet and outlet ends of the meter for any debris that may be clogging the flow through the meter Remove debris as necessary If the flow path is not unclogged then proceed with steps below Do not attempt to disassemble the sensor If blockage of the sensor tube is not alleviated by flushing through with cleaning fluids please return meter to Omega for servicing 6 2 1 Restrictor Flow Element RFE The Restrictor Flow Element RFE is a p
22. deviation is less than 10 of full scale reading correct the SPAN potentiometer R21 setting by using the insulated screwdriver through the access window to eliminate any deviation If the deviation is larger than 10 of full scale reading a defective condition may be present LIKELY REASONS FOR A MALFUNCTIONING SIGNAL MAY BE Occluded or contaminated sensor tube Leaking condition in the FMA 1500 transducer or the gas line and fittings For gases other than nitrogen recheck appropriate factor from Gas Factor Table Temperature and or pressure correction errors See also section 8 TROUBLESHOOTING If after attempting to remedy the above conditions a malfunction still persists return the meter for factory service see section 1 1 At this point the calibration is complete However it is advisable that several addi tional points between 0 and 100 such as 25 50 and 75 flow be checked If discrepancies are found proceed to step 7 3 for Linearity Adjustment 7 3 Linearity Adjustment All adjustments in this section are made from the outside of the meter there is no need to disassemble any part of the instrument 7 3 1 Connections and Initial Warm Up Connect the multimeter to output pins 2 and 3 for 0 5 VDC or pins 5 and 15 for optional 4 20 mA see Figure 2 3 If you are calibrating a Mass Flow Meter System that incorporates a FMA14PD Series Command Module the multimeter may be connected via
23. e is normally closed when no power is applied The set point input responds to an analog 0 to 5 VDC reference voltage This volt 10 age is a linear representation of O to 10096 of the full scale mass flow rate Response time to set point changes are 1 second FMA 1400 for ranges up to 10 L min and 2 seconds FMA 1400 for ranges above 10 L min to within 296 of the final flow over 25 to 10096 of full scale On pin 6 of the FMA 1400 transducer is a regulated and constant output signal This signal may be used in conjunction with a local set point potentiome ter for flow setting COMMON VREF 5VDC gt 0 SVDC INPUT SET POINT FIGURE 5 1 LOCAL SET POINT POTENTIOMETER CONNECTIONS It is recommended that a potentiometer between 5K to 100K ohm and capable of at least 10 turns or more for adjustment be used Use the control potentiometer to command the percentage of flow desired Alternatively a variable 0 to 5VDC analog signal may be applied directly to the SET POINT and COMMON connections of the FMA 1400 transducer see Figure 2 1 5 5 TTL Valve OFF Control FMA 1400 It may at times be desirable to set the flow and maintain that setting while being able to turn the flow control valve off and on again This can be accomplished by applying a TTL compatible high and low signal of 5 VDC and 0 VDC to pin 8 on the 15 pin D connector When 0 VDC LOW signal is applied the solenoid valve is not powered and therefore wi
24. gas flow path of the Flow Meter Controller must be horizontal within those stated limits Should there be need for a different orientation of the meter re calibration may be necessary 1 It is also preferable to install the FMA 1400 1500 transducer in a stable environment free of frequent and sudden temperature changes high moisture and drafts Prior to connecting gas lines inspect all parts of the piping system including fer rules and fittings for dust or other contaminants Be sure to observe the direction of gas flow as indicated by the arrow on the front of the meter when connecting the gas system to be monitored Insert tubing into the compression fittings until the ends of the properly sized tub ings home flush against the shoulders of the fittings Compression fittings are to be tightened according to the manufacturer s instructions to one and one quarter turns Avoid over tightening which will seriously damage the Restrictor Flow Elements RFE s FMA 1400 1500 transducers are supplied with standard 1 4 inch FMA 1400 1500 for ranges up to and above 10 L min or 3 8 inch FMA 1400 1500 for ranges above 10 L min or optional 1 8 inch inlet and outlet compression fittings which should not be removed unless the meter is being cleaned or calibrated for a new flow range Using a Helium Leak Detector or other equivalent method perform a thorough leak test of the entire system All FMA 1400 1500 s are checked prior to shipment for
25. leakage within stated limits See specifications in this manual 2 2 Electrical Connections FMA 1400 1500 transducers require a 15VDC and 15VDC power supply to operate Additionally a readout panel meter digital multimeter or other equiva lent device is required to observe the flow signal A variable analog 0 5VDC ref erence input is required for FMA 1400 models The Omega FMA14PD Series accessory Command Modules offer a convenient and compact means to fulfill these needs FMA 1400 1500 transducers come with a 15 pin D connector The pin diagram is provided on figure 2 3 DC POWER SUPPLY REMOTE EXTERNAL SETPOINT LOCAL SETPOINT SOURCE POT 5000 ohm AFC ONLY AFC ONLY CLOCKWISE BBB PANEL METE PLC 15 PIN D CONN FIGURE 2 1 WIRING DIAGRAM FOR FMA 1400 1500 TRANSDUCERS PIN FUNCTION Chassis Ground Common Signal Ground For Pin 3 0 5 VDC Flow Signal 15 VDC Power Supply 4 20 mA Flow Signal optional 7 VDC for Local Set Point unassigned TTL Valve Off Control FMA 1400 Control Set Point Input 0 5 VDC FMA 1400 Common Signal Ground for Pin 9 Common Power Supply Valve Test Point Purge FMA 1400 unassigned 15 VDC Power Supply 4 20 mA Flow Signal optional PWD gt FIGURE 2 3 1400 1500 15 PIN CONNECTOR CONFIGURATIO
26. libtatiQni certet tnmen 14 7 2 Calibration of 1500 Mass Flow Meters 15 7 2 1 Connections and Initial Warm Up 15 7 2 2 ZERO Adjustment 16 7 2 3 SPAN Adjustment essent 16 7 9 POMS WNC sia cssc L tix UR ain 16 7 3 1 Connections and Initial Warm 16 7 3 2 eic disant nn saa 17 7 3 3 25 Flow Adjustment esses 17 3 4 50 POW AdJUStM N iain 17 1 93 5 7595 Flow 1 u cuiii siete th eret tetas 17 7 3 6 100 Flow Adjustment antenne 17 7 4 Calibration of FMA 1400 Mass Flow Controllers 17 7 4 1 Disable Solenoid Valve 17 T42 NaNe 61 na au nasua hapas 18 7 4 3 Full Scale Flow Adjustment 18 7 4 4 25 Flow Adjustment sss 18 1 55 50 siii cerita tei aaa rd psc 18 7 4 6 7595 Flow Adjustment 18 7 4 7 100 Flow 18 8 TROUBLESHOOTING 19 COMME ONS ado n u iata od un un a um h a
27. ll remain normally closed Conversely a 5 VDC HIGH signal applied will allow the solenoid valve to remain active The sole noid valve will remain active when the VALVE OFF pin remains floating The simplest means for utilizing the VALVE OFF control feature is to connect a toggle switch between the COMMON and VALVE OFF pins of the FMA 1400 transducer Toggling the switch on and off will allow for activating and deactivating the solenoid valve 5 6 Valve Test Purge FMA 1400 At times it may be necessary to purge the flow system with a neutralizing gas such as pure dry nitrogen The FMA 1400 transducer is capable of a full open con dition for the solenoid valve regardless of set point conditions For FMA 1400 s 11 utilizing 15VDC valve configuration connecting the TEST pin 12 on 15 pin D connectors to ground will fully open the valve For FMA 1400 s with a valve configuration connecting the TEST pin to 15VDC will fully open the valve 6 MAINTENANCE 6 1 Introduction It is important that the Mass Flow Meter Controller is used with clean filtered gases only Liquids may not be metered Since the RTD sensor consists in part of a small capillary stainless steel tube it is prone to occlusion due to impedi ments or gas crystallization Other flow passages are also easily obstructed Therefore great care must be exercised to avoid the introduction of any potential flow impediment To protect the instrument a 50 mi
28. ly remove the short ing condition or check polarities fuse resets automatically REMOVE CAUSE OF SHORT CIRCUIT apply appropriate gas pressure flush clean or disassemble to remove impediments or replace signal and power supply commons are different apply appropriate gas pressure check cables and all connections or replace re adjust set point re adjust valve section 7 4 INDICATION LIKELY REASON REMEDY unstable or no zero reading full scale out put at no flow condition or with valve closed calibration off FMA 1400 valve does not work in open position FMA 1400 valve does not work in close position gas leak pc board defective defective sensor gas Leak gas metered is not the same as what meter was calibrated for composition of gas changed gas leak pc board defective RFE dirty occluded sensor tube filter screen obstructed at inlet transducer is not mounted properly incorrect valve adjustment pc board defect cable or connectors malfunction differential pressure too high insufficient inlet pressure incorrect valve adjustment pc board defect cable or connectors malfunction orifice obstructed locate and correct return to factory for replacement return to factory for replacement locate and repair use matched calibration see K factor tables in APPENDIX 2 locate and correct return to factory for replacement flush clean or disassemble to remove impedime
29. na s 19 8 2 Troubleshooting QUIE iius rd na 20 8 3 Technical Assistance nn 22 9 CALIBRATION CONVERSIONS FROM REFERENCE GASES 22 APPENDIX 1 COMPONENT DIAGRAWMS een 23 APPENDIX 2 GAS FACTOR TABLE 5 24 APPENDIX DIMENSIONAL 28 APPENDIX4 WARRANTY sd titer tias Uc on Mina 32 TRADEMARKS Buna is a registered trademark of DuPont Dow Elastometers Omega is a registered trademark of Omega Engineering Inc Kalrez9 is a registered trademark of DuPont Dow Elastomers CR is a registered trademark of Crawford Fitting Co Neoprene is a registered trademark of DuPont Viton is a registered trademark of Dupont Dow Elastometers L L C 1 UNPACKING THE FMA 1400 1500 MASS FLOW METER AND CONTROLLER 1 1 Inspect Package for External Damage Remove the Packing List and verify that you have received all equipment If you have any questions about the shipment please call the Omega Customer Service Department at 1 800 622 2378 or 203 359 1660 Your FMA 1400 1500 Mass Flow Meter Controller was carefully packed in a stur dy cardboard carton with anti static cushioning materials to withstand shipping shock Upon receipt inspect the package for possible external damage In case of external damage to the package contact the shipping company immediately 1 2 Unpack the Mass Flow
30. nts flush clean or disassemble to remove impediments or return to factory for replacement flush clean or disassemble to remove impediments or replace check for any tilt or change in the mounting of the transducer generally units are calibrated for horizontal installation relative to the sensor tube re adjust valve section 7 4 return to factory for replacement check cable and connectors or replace decrease pressure to correct level adjust appropriately re adjust valve section 7 4 return to factory for replacement check cable and connectors or replace disassemble to remove impediments or return to factory For best results it is recommended that instruments are returned to the factory for servicing See section 1 3 for return procedures 8 3 Technical Assistance Omega Engineering will provide technical assistance over the phone to qualified repair personnel Please call our Flow Department 800 872 9436 extension 2298 9 CALIBRATION CONVERSIONS FROM REFERENCE GASES The calibration conversion incorporates the K factor The K factor is derived from gas density and coefficient of specific heat For diatomic gases ES NEN XC gas density gram liter coefficient of specific heat cal gram Note in the above relationship that d and Cp are usually chosen at standard con ditions of one atmosphere and 25 C If the flow range of a Mass Flow Controller or Controller remains unchanged a
31. ough the access window until the output of the flowme ter reads 3 75VDC 37 or 16mA 0 12mA 7 3 6 100 Flow Adjustment Increase the flow rate to 10096 of full scale flow Check the flow rate indicated against the flow calibrator Adjust the setting for potentiometer R43 by using the insulated screwdriver through the access window until the output of the flowme ter reads 5 00VDC 37mV or 20mA 0 12mA Repeat steps 7 3 3 to 7 3 6 at least once more 7 4 Calibration of FMA 1400 Mass Flow Controllers All adjustments in this section are made from the outside of the meter there is no need to disassemble any part of the instrument FMA 1400 Mass Flow Controllers may be field recalibrated checked for the same range they were originally factory calibrated for 7 4 1 Disable Solenoid Valve Remove the round plastic cap on top of the solenoid valve Turn the set screw on top of the valve counterclockwise until it stops to open the valve Set the valve into PURGE mode This step essentially bypasses the flow control properties of 17 the transducer The unit will now act as a mass flow meter CAUTION If the valve is left in the AUTO control or OPEN mode for an extended period of time it may become warm or even hot to the touch Use care in avoiding direct contact with the valve during operation Follow steps outlined in section 7 2 and 7 3 then continue with step 7 4 2 below 7 4 2 Valve Adjustment Discontinue the PUR
32. r flow in each branch According to principles of fluid dynamics the flow rates of a gas in the two laminar flow conduits are proportional to one another Therefore the flow rates measured in the sensor tube are directly proportional to the total flow through the transducer In order to sense the flow in the sensor tube heat flux is introduced at two sec tions of the sensor tube by means of precision wound heater sensor coils Heat is transferred through the thin wall of the sensor tube to the gas flowing inside As gas flow takes place heat is carried by the gas stream from the upstream coil to the downstream coil windings The resultant temperature dependent resistance differential is detected by the electronic control circuit The measured gradient at the sensor windings is linearly proportional to the instantaneous rate of flow tak ing place An output signal is generated that is a function of the amount of heat carried by the gases to indicate mass molecular based flow rates Additionally FMA 1400 model Mass Flow Controllers incorporate a proportionat ing solenoid valve The closed loop control circuit of the FMA 1400 continuously compares the mass flow output with the selected flow rate Deviations from the set point are corrected by compensating valve adjustments thus maintaining the desired flow parameters 4 SPECIFICATIONS FLOW MEDIUM Please note that 1400 1500 Mass Flow Meters and Controllers for ranges up to and above 1
33. recision flow divider inside the trans ducer which splits the inlet gas flow by a preset amount to the sensor and main flow paths The particular RFE used in a given Mass Flow Meter Controller depends on the gas and flow range of the instrument 12 6 2 2 1400 1500 for ranges up to 10 L min Unscrew the inlet compression fitting of meter Note that the Restrictor Flow Element RFE is connected to the inlet fitting Carefully disassemble the RFE from the inlet connection The 50 micron filter screen will now become visible Push the screen out through the inlet fitting Clean or replace each of the removed parts as necessary If alcohol is used for clean ing allow time for drying Inspect the flow path inside the transducer for any visible signs of contaminants If necessary flush the flow path through with alcohol Thoroughly dry the flow paths by flowing clean dry gas through Carefully re install the RFE and inlet fitting avoiding any twisting and deforming the RFE Be sure that no dust has collected on the O ring seal A Note Over tightening will deform and render the RFE defective It is advisable that at least one calibration point be checked after re installing the inlet fitting see section 7 6 2 3 FMA 1400 1500 for ranges above 10 L min Unscrew the four socket head cap screws two 10 24 and two 6 32 at the inlet side of the meter This will release the short square block containing the inlet com pression fi
34. return the valve to functional use 7 CALIBRATION PROCEDURES Note Removal of the factory installed calibration seals and or any A adjustments made to the meter as described in this section will void any calibration warranty applicable 7 1 Flow Calibration Omega Engineering Flow Calibration Laboratory offers professional calibration support for Mass Flow Meters and Controllers using precision calibrators under strictly controlled conditions NIST traceable calibrations are available Calibrations can also be performed at customers site using available standards Factory calibrations are performed using NIST traceable precision volumetric cal ibrators incorporating liquid sealed frictionless actuators Generally calibrations are performed using dry nitrogen gas The calibration can then be corrected to the appropriate gas desired based on relative correction K factors shown in the gas factor table see Appendix 2 A reference gas other than nitrogen may be used to closer approximate the flow characteristics of certain gases This practice is recommended when a reference gas is found with ther modynamic properties similar to the actual gas under consideration The appro priate relative correction factor should be recalculated see section 9 It is standard practice to calibrate Mass Flow Meters Controllers with dry nitrogen gas at 70 F 21 1 C 20 psig 1 4 bars 25 psig 1 7 bars for FMA 1400 ranges above 10 L min inle
35. ry Gas Connections n 1 2 2 Electrical Connections sess 2 PRINCIPLE OF OPERATION 4 SPECIFICATIONS u LULU ua E EIS 5 4 1 FMA 1500 Mass Flow Meters for ranges up to and above TU Pi an uiaiia 5 4 2 FMA 1400 Mass Flow Controllers for ranges up to and above TO L min drap soto tte triones 6 sn u 7 OPERATING INSTRUCTI0NS 9 5 1 Preparation and Warm 9 5 2 Flow Signal Output Readings tinens 10 5 9 Warm Condition 10 5 4 Set Point Reference Signal FMA 1400 10 5 5 TTL Valve OFF Control 1400 11 5 6 Valve Test Purge FMA 1400 itis reae 11 MAINTENANCE 12 12 6 2 Flow Path ACO 12 6 2 1 Re strictor Flow Element RFE 12 6 2 2 1400 1500 Ranges up to 10 13 6 2 3 FMA 1400 1500 Ranges above 10 L min 13 6 2 4 Valve Maintenance 1400 13 CALIBRATION PROCEDURES 14 7 1 How Ga
36. scale C PRESSURE COEFFICIENT 0 01 of full scale psi 0 07 bar RESPONSE TIME FMA 1400 for ranges up to 10 L min 300ms time constant approximately 1 second to within 2 of set flow rate for 25 to 100 of full scale flow FMA 1400 for ranges above 10 L min 600ms time constant approximately 2 seconds to within 2 of set flow rate for 25 to 100 of full scale flow GAS PRESSURE 500 psig 34 5 bars maximum optimum pressure is 20 psig 1 4 bars 25 psig 1 7 bars gauge for FMA 1400 ranges above 10 L min MAXIMUM DIFFERENTIAL PRESSURES 40 psig 2 61 bars for FMA 1400 ranges above 10 L min 50 psig 3 34 bars for FMA 1400 ranges up to and above 10 L min Optimum differential pressure is 25 psid 1 7 bars See Table IV for pressure drops associated with various models and flow rates GAS AND AMBIENT TEMPERATURE 41 F to 122 F 5 C to 50 C RELATIVE GAS HUMIDITY up to 70 LEAK INTEGRITY 1 x 10 sccs He maximum to the outside environment ATTITUDE SENSITIVITY 1 shift for a 90 degree rotation from horizontal to vertical standard calibration is in horizontal position OUTPUT SIGNALS Linear 0 5 VDC 2000 minimum load impedance 4 20 mA optional 50 500 loop resistance 20 mV peak to peak max noise COMMAND SIGNAL 0 5 VDC 200K input impedance TRANSDUCER INPUT POWER FMA 1400 ranges up to 10 L min 15 sLit min max 15 5 VDC 80 mA max 1 2 watts max 15 5 VDC 200 mA max 3 watts max FMA
37. ssories Benchtop Laboratory Meters Controllers Calibrators Simulators amp Pumps Industrial pH amp Conductivity Equipment DATA ACQUISITION Data Acquisition amp Engineering Software Communications Based Acquisition Systems Plug in Cards for Apple IBM amp Compatibles Datalogging Systems Recorders Printers amp Plotters HEATERS Heating Cable Cartridge amp Strip Heaters Immersion amp Band Heaters Flexible Heaters Laboratory Heaters ENVIRONMENTAL MONITORING AND CONTROL Metering amp Control Instrumentation Refractometers Pumps amp Tubing Air Soil amp Water Monitors Industrial Water amp Wastewater Treatment pH Conductivity amp Dissolved Oxygen Instruments SERE 1686 0606
38. t pressure and 0 psig 0 bar outlet pressure It is best to cal ibrate the FMA 1400 1500 transducers to actual operating conditions Specific gas calibrations of non toxic and non corrosive gases are available at specific condi tions Please contact Omega for a price quotation It is recommended that a flow calibrator of at least four times better collective accuracy than that of the Mass Flow Meter Controller to be calibrated be used Equipment required for calibration includes a flow calibration standard and a cer tified high sensitivity multimeter which together have a collective accuracy of 0 25 or better an insulated plastic screwdriver a flow regulator example metering needle valve installed upstream from the Mass Flow Meter and a pres sure regulated source of dry filtered nitrogen gas or other suitable reference gas The gas and ambient temperature as well as inlet and outlet pressure conditions should be set up in accordance with actual operating conditions Calibration potentiometer locations are illustrated in Figure 7 1 14 D CONNECTOR 999999 999999990 gt R21 SPAN R29 ZERO R43 100 P R44 7596 R45 50 FIGURE 7 1 CALIBRATION POTENTIOMETER LOCATIONS 7 2 Calibration of FMA 1500 Mass Flow Meters All adjustments in this section are made from the outside of the meter there is no need to disassemble any part of the instrument FMA 1500 Mass Flow Meters may be field recalibra
39. ted checked for the same range they were originally factory calibrated for When linearity adjustment is needed or flow range changes are being made proceed to step 7 3 Flow range changes may require a different Restrictor Flow Element RFE Additionally a dif ferent Solenoid Valve Orifice for the FMA 1400 Mass Flow Controller see Table VI may also be required Consult Omega for more information 7 2 1 Connections and Initial Warm Up Connect the multimeter to output pins 2 and 3 of the 15 pin D connector for 0 5 VDC or pins 5 and 15 for optional 4 20 mA see Figure 2 3 If you are calibrating a Mass Flow Meter System that incorporates a FMA14PD Series Command Module the multimeter may be connected via the DATA connector which is located at the back of the Command Module Power up the Mass Flow Meter for at least 30 minutes prior to commencing the calibration procedure 15 7 2 2 ZERO Adjustment Shut off the flow of gas into the Mass Flow Meter To ensure that no seepage or leak occurs into the meter it is good practice to temporarily disconnect the gas source Using the multimeter and the insulated screwdriver adjust the ZERO potentiometer R29 through the access window for 0 VDC or 4 mA respectively at zero flow 7 2 3 SPAN Adjustment Reconnect the gas source Using the flow regulator adjust the flow rate to 10096 of full scale flow Check the flow rate indicated against the flow calibrator If the
40. the under warranty and product and 3 Repair instructions and or specific 3 Repair instructions and or specific problems problems relative to the product relative to the product OMEGASs policy is to make running changes not model changes whenever an improvement is possible This affords our customers the latest in technology and engineering OMEGA is a registered trademark of OMEGA ENGINEERING INC Copyright 2001 OMEGA ENGINEERING INC rights reserved This document may not be copied photo copied reproduced translated or reduced to any electronic medium or machine readable form in whole or in part without the prior written consent of OMEGA ENGINEERING INC 32 Where Do Find Everything Need for Process Measurement and Control OMEGA Of Course Shop online at www omega com TEMPERATURE Thermocouple RTD amp Thermistor Probes Connectors Panels amp Assemblies Wire Thermocouple RTD amp Thermistor Calibrators amp Ice Point References Recorders Controllers amp Process Monitors Infrared Pyrometers PRESSURE STRAIN AND FORCE M Transducers amp Strain Gages Load Cells amp Pressure Gages Displacement Transducers Instrumentation amp Accessories FLOW LEVEL Rotameters Gas Mass Flow meter amp Flow Computers Air Velocity Indicators Turbine Paddlewheel Systems Totalizers amp Batch Controllers H CONDUCTIVITY pH Electrodes Testers amp Acce
41. tting The 60 micron filter screen will now become visible Remove the screen DO NOT remove the RFE inside the flow transducer Clean or replace each of the removed parts as necessary If alcohol is used for cleaning allow time for drying Inspect the flow path inside the transducer for any visible signs of contaminant s If necessary flush the flow path through with alcohol Thoroughly dry the flow paths by flowing clean dry gas through Re install the inlet parts and filter screen Be sure that no dust has collected on the O ring seal It is advisable that at least one calibration point be checked after re installing the inlet fitting see section 7 6 2 4 Valve Maintenance FMA 1400 The solenoid valve consists of 316 and 416 stainless steel and VITON or optional NEOPRENE or KALREZ O rings and seals No regular maintenance is required except for periodic cleaning Various corrosive gases may demand more frequent replacement of VITON O rings and seals inside the valve Be sure to use an elastomer material appropriate for your specific gas application 13 Contact Omega for optional sealing materials available Set the FMA 1400 into PURGE mode and attempt to flush through with a clean filtered and neutral gas such as nitrogen Another option for fully opening the valve is to remove the plastic cap on top of the valve and turn the set screw coun terclockwise until it stops See section 7 4 for valve adjustment to
42. uipment cables and connectors must be carefully wired for correct pin configurations V 1 the pressure differential across the instrument sufficient 19 8 2 Troubleshooting Guide INDICATION LIKELY REASON REMEDY lack of reading or output output reads at or saturation only flow reading does not coincide with the set point FMA 1400 models only no response to set point FMA 1400 models only power supply off fuse blown FMA 1400 1500 fuse blown FMA14PD Series filter screen obstructed at inlet occluded sensor tube pc board defect valve adjustment wrong fuse blown FMA 1400 1500 inadequate gas pressure filter screen obstructed at inlet ground loop inadequate gas pressure cable or connector malfunction set point is too low 296 of full scale valve adjustment wrong check connection of power supply disconnect FMA 1400 1500 transducer from power supply remove the short ing condition or check polarities fuse resets automatically disconnect power cord from AC supply remove and inspect fuses at AC power input connector of 14 Series replace as necessary REMOVE CAUSE OF SHORT CIRCUIT flush clean or disassemble to remove impediments or replace flush clean or disassemble to remove impediments or return to factory for replacement return to factory for replacement re adjust valve section 7 4 disconnect FMA 1400 1500 transducer from power supp
43. urce is OFF Power up the transducer using your own power supply or turn the POWER switch to the ON position at the front panel of your FMA14PD Series Command Module Allow the Mass Flow Meter or Controller to warm up for a minimum of 15 minutes 9 During initial powering of the FMA 1400 1500 transducer the flow output signal will be indicating a higher than usual output This is indication that the FMA 1400 1500 trans ducer has not yet attained it s minimum operating temperature This condition will automatically cancel within a few minutes and the transducer should eventually zero Caution If the valve is left in the AUTO control or OPEN mode for A an extended period of time it may become warm or even hot to the the touch Use care in avoiding direct contact with the valve during operation 5 2 Flow Signal Output Readings The flow signal output can be viewed on the panel meter digital multimeter or other display device used as shown in figure 2 1 When using the accessory FMA14PD Series Command Module the flow rate will appear on the display at the front panel The observed reading is a 0 to 100 indi cation direct engineering units are optional If using a multichannel readout be sure that the CHANNEL selector switch is set to the correct channel Analog output flow signals of 0 to 5 VDC or optional 4 to 20 mA are attained at the appropriate pins of the 15 pin D connector see Figure 2 3 on the top of the FMA 1400 1500
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