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Agilent Technologies Agilent E5250A Switch User Manual

1. Figure 7 1 Status Reporting Structure of E5250A Summary Message from Standard Event Queue Status Register Non empty utput i SRQ to Controller Queue i A eset e 4 Not Used Not Used yo lt RQS is read by f ere Rody 1 Serial Poll l Request pt 7 6 EsBMav 3 2 1 0 Status Byte Register Generation MSS i MSS is read by Be e cones A STB J O wT amp EFO 1 C l Service Request Enable Register l 7 lt 5l4 3 2 110 sre SRE PGO4001 120x120 The above figure shows Service Request Generation When a condition occurs that requires service the instrument sets Request Service bit RQS bit6 of Status Byte and sends a Service Request SRQ via GPIB bus to the controller So the controller can execute an interrupt service routine must be in the program that uses a Serial Poll to read Status Byte of each instrument to determine which instrument requested service See Status Byte Register on page 7 50 Agilent E5250A User s Guide Edition 9 7 49 Figure 7 2 Command Reference Status Byte Register Status Byte Register The E5250A Status Byte Register contains bits ESB and MAV for status summary messages from other registers The status of these bits depends on the condition of the Standard Event Status Register and the Output Queue If service request occurs B
2. Figure 9 3 Internal Connections and DIP SW Settings for E5255As 2 Rg l l i i 2 TVin2 cable G TVin3 cable S SW3 IT ame sW1 cum Vini cable TVOM IVout2 For E5255A in Slot 1 Connect IVin1 to SMU1 and set SW1 SW2 SW3 to 5 nl For E5255A in Slot 2 Connect IVin1 to SMU3 and set SW1 SW2 SW3 to ip For E5255A in Slot 3 Connect IVin1 to SMU4 and set SW1 SW2 SW3 to C T 4 O OOOO OO DPOOVVVIOO X pHoo0oo0oo0oo0ooo 12345678 91011 12 13 14 15 16 17 18 19 20 21 22 23 24 Table 9 7 E5250A Input Output Connection 4155 4156 Measurement ESS Input E5255A Output Port DUT Port Port SMU 1 SMU INPUT 1 Output 1 to 24 SLOT 1 Gate SMU 3 SMU INPUT 3 Output 25 to 48 SLOT 2 Drain SMU 4 SMU INPUT 4 Output 49 to 72 SLOT 3 Sub GNDU directly connected to Connector Plate Source Agilent E5250A User s Guide Edition 9 9 25 Figure 9 4 Executing Sample Programs HCI Measurement Program DC HCI Degradation Test Equipment Connections BNC Cable 3ea Shielding Box SLOTI 16494D 001 or 002 7 ea p BIAS SOURCE 1 Bias In
3. Figure 9 6 Example of Ib Vgs Measurement Results GRAPH LIST GRAPHI O amp MEDI Un 940CT03 02 30PM lb wWg Measurement ARKER MARKERI 2 500 4 170 08100000u A 1 ON VGSTR 2 8000000000 WYW LA ARKER 200 u a LN MAX NTER I SUB POLATE OFF i DI RECT WA RE ERS 20 0u ati G i CURSOR iA REER SKI P AUTO ANALY ne 815 0 00 CURSOR 0 00 Ya iY 1 00 idi 10 0 OFF MAREE Re LI NE SCALING DISPLAY SWEEP TI MI NG CONST CURSOR SETUP SETUP SETUP SETUP 9 30 Agilent E5250A User s Guide Edition 9 Executing Sample Programs HCI Measurement Program Figure 9 7 Initial Interim Characterization Example BRAPH LIST GRAPHICS HEDIUM 95FEB17 11 44PM Tdlain G mmax text V tca Measurement MARKER CURSOR I BiB S53BB3Bemy 10 000000000ud4 7 5000000000u MARKER S40 00000000m 179 0 7000000u4 BiB OF500000u CN ay Talin 1 BBOBBUDODOMA 0 HARKER 2 00m 1 50m MIN MAX INTER ID Bh P
4. ESR ESR This query command returns the present contents of the Standard Event Status Register Syntax ESR Query response register lt newline gt lt END gt Parameter Explanation register decimal integer value that is the sum of the binary weighted values for the set bits Semantics The following table shows the bits of the Standard Event Status Register and the binary weighted decimal value of each bit pi Pinar description weight P 0 1 OPC Operation Complete 1 2 not used always 0 2 4 QYE Query ERROR 3 8 DDE Device Dependent ERROR 4 16 EXE Execution ERROR 5 32 CME Command ERROR 6 64 not used always 0 7 128 PON Power on Example OUTPUT Hp5250 ESR ENTER Hp5250 A Agilent E5250A User s Guide Edition 9 7 7 Command Reference IDN IDN This query command returns the ID of your E5250A Syntax IDN Query response HEWLETT PACKARD model 0 revision lt newline gt lt AEND gt Response Type Explanation model character model number E5250A revision character revision number A 01 00 or later Example DIM A 50 OUTPUT Hp5250 IDN ENTER Hp5250 AS PRINT AS An example result of above program is HEWLETT PACKARD E5250A 0 A 01 00 7 8 Agilent E5250A User s Guide Edition 9 Syntax Query response Example Command Reference OPC OPC This command starts to monito
5. A B C Max Current Rating A 1 0 1 0 1 0 Max Voltage Rating V Channel to Guard 200 200 200 Channel to Channel 300 300 300 Closed Channel Residual Resistance Q Low Leakage I V Port 0 6 0 6 0 6 BIAS Port 1 0 1 0 1 0 Channel Isolation Resistance Q Low Leakage I V Port 10 5x10 2x10 BIAS Port 10 5x108 2x108 a When 0 Q resistors are mounted on the card as the protective resis tor Typical Data Offset Current lt 0 1 pA Low Leakage I V Port 10 6 Agilent E5250A User s Guide Edition 9 Specifications Agilent E5255A 24 8x3 Channel Multiplexer Channel Crosstalk Capacitance lt 0 4 pF channel Low Leakage I V Port lt 5 pF channel Bias Port Offset Voltage EMF at 5min lt 80 uV Low Leakage I V Port Guard Capacitance Low Leakage I V Port lt 180 pF lt 60 pF when the port is open a The offset current when 0 V is applied to all I O channels 2 EMF means Electro Motive Force and these are offset voltages after applying voltage and waiting 5 minutes 3 This is guard capacitance for an I O channel for following conditions Only one E5255A is installed in mainframe and only one I O channel is connected Supplemental Data Relay Contact Life gt 10 times Dry Switching Mode Settling Time lt 3 5 sec to settle to within 400 fA of final value when 10 V is applied Low Leakage I V Port Agilent E5250A User s Guide Edition 9 10 7
6. Connect to Bias port Connect to Input 3 Connect to Input 1 Figure 5 2 shows an example Input port 2 is the input Bias Port When the Bias Mode is turned ON all bias enabled output ports that are not connected to other input ports are connected to the input Bias Port So the output ports that are connected to input port 1 and 3 are not connected to the input Bias Port 5 12 Agilent E5250A User s Guide Edition 9 NOTE Table 5 4 Controlling the E5250A Switch Control Basics Couple Port This function is available only for the E5252A Bias Port and Couple Port cannot be set to the same port number This function is used for making Kelvin connections Couple port allows synchronized connection of two adjacent input ports to two adjacent output ports You set up the Couple Port by using the ROUTe COUPle PORT command described in Chapter 7 To turn Couple Port mode ON OFF refer to ROUTe COUPle STATe command in Chapter 7 For a programming example refer to Chapter 6 The input ports 1 and 2 3 and 4 5 and 6 7 and 8 or 9 and 10 can be coupled together See Table 5 4 For example if you specify input port number 1 in the ROUTe COUPle PORT command input ports 1 and 2 are coupled together Couple Port Number and Output Port Number oul Input Ports Available Output Port No Port No P P 01 SMU1 SMU2 01 to 12 for Normal Config 01 to 48 for Auto Config
7. 150 OUTPUT Hp5250 ROUT COUP PORT ALL 3 5 160 OUTPUT Hp5250 ROUT COUP STAT ALL ON 170 180 OUTPUT Hp5250 ROUT CLOS amp Channel 190 OUTPUT Hp5250 OPC 200 ENTER Hp5250 Complete 210 220 Put Measurement Routine here 230 240 OUTPUT Hp5250 ROUT OPEN CARD ALL 250 OUTPUT Hp5250 OPC 260 ER Hp5250 Complete 270 280 OUTPUT Hp5250 RST 290 1 300 END Line Description Number p 150 Sets up SMU3 amp 4 and SMU5 amp 6 input ports as Couple Ports 160 Turns on the Couple Port mode 180 Closes relays to create channels specified by Channel 190 to 200 Waits until the relay close operation is completed 220 Here insert measurement routine for your measurement instrument 240 to 260 Opens all relays and waits until open operation is completed 280 Resets the E5250A Agilent E5250A User s Guide Edition 9 6 21 Programming the E5250A Using the VFP Data Upload Library Using the VFP Data Upload Library This section introduces and explains how to use the VFP Data Upload Library e VFP Data Upload Library e Programming Example e Before Executing Your Program e Error Messages For information about using the VFP refer to Using Virtual Front Panel Utility on page 5 25 CAUTION The VFP Data Upload Library can be used only in an program runs on HP BASIC 6 22 Agilent E5250A User s Guide Edition 9 Syntax Parameters Ex
8. 10 Example Using Bias Mode 20 I 30 INTEGER Complete 40 DIM Channel 100 50 Channel 10101 10108 60 70 Put Instrument Initialization Routine here 80 90 ASSIGN Hp5250 TO 722 100 OUTPUT Hp5250 RST 110 OUTPUT Hp5250 ROUT FUNC NCON 120 OUTPUT Hp5250 ROUT CONN RULE ALL FREE 130 OUTPUT Hp5250 ROUT BIAS PORT 1 7 140 OUTPUT Hp5250 ROUT BIAS CHAN ENAB CARD 1 150 OUTPUT Hp5250 ROUT BIAS STAT 1 0N Line Description Number p 40 Declares data size of Channel which is used as channel _list parameter 50 Defines the desired channel _list 70 Here insert the initialization routine for your measurement instrument 100 Resets the E5250A 110 Sets the E5250A to Normal channel configuration mode 120 Sets the connection rule to FREE 130 This line is not used commented for the E5255A If you use the E5252A instead of the E5255A use this line which defines AUX INPUT HF 1 to be the input Bias Port 140 Bias enables all output ports of card 1 for the Bias Mode 150 Turns on the Bias Mode All output ports of card are connected to the input Bias Port Agilent E5250A User s Guide Edition 9 6 17 Programming the E5250A Programming Examples 160 170 Put Bias Source Control Routine here 180 190 OUTPUT Hp5250 ROUT CLOS amp Channel 200 OUTPUT H
9. E5252A Side Agilent E5250A User s Guide Edition 9 4 21 Figure 4 10 Table 4 5 Figure 4 11 Setting up Measurement Environment Connecting the E5250A Output To Connect the E5255A Output The E5255A output connector is shown in Figure 4 10 The E5250A SMU INPUT signal or the E5255A BIAS INPUT signal appears at the E5255A output connector as shown in Figure 4 10 when input output switching path is made E5255A Output Connector and Output Signal A Inpu A B a a A a T av Force Guard o a GGGGEGG BIAS Bias line Bias line B Ground You can easily connect the E5255A output to the connector plate or your test fixture by using the cable shown in Table 4 5 and Figure 4 11 The cable can be connected to the E5255A output ports labeled as 1 8 1 8 9 16 or 1 8 17 24 E5255A Output Cable Agilent Model No Description 16494D 001 8 Ch Shielded Coaxial cable 1 5m 16494D 002 8 Ch Shielded Coaxial cable 3m 16494D 8 Channel Shielded Coaxial Cable for E5255A FEMALE MALE To To E5255A Connector Plate 4 22 Agilent E5250A User s Guide Edition 9 Setting up Measurement Environment Measurement Cable Length Measurement Cable Length This section describes how to calculate the total guard capacitance when using a Source Monitor Unit SMU such as in Agilent 4155 4156 Semiconductor Parameter A
10. To select the input Bias Port refer to ROUT BIAS PORT When Bias Mode is ON you cannot directly specify Bias Port connections by ROUT OPEN or ROUT CLOSE Refer to those commands for details Bias disabled output ports are never connected to the input Bias Port when Bias Mode is ON When Bias Mode is OFF the input Bias Port is the same as the other input ports so relays can be controlled directly to connect to output ports At RST the value of this parameter is OFF ROUTe BIAS STATe card_number state Parameter Explanation card_number card number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL state ON or 1 turn ON the Bias Mode OFF or 0 turn OFF the Bias Mode OUTPUT Hp5250 ROUT BIAS STAT ALL ON Agilent E5250A User s Guide Edition 9 7 29 Syntax Query response Example Syntax Query response Example Command Reference ROUTe BIAS STATe ROUTe BIAS STATe This query command returns the Bias Mode of the specified card ROUTe BIAS STATe card_number Parameter Explanation card_number card number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 0 or 1 lt newline gt lt END gt 0 Bias Mode is OFF 1 Bias Mode is ON OUTPUT Hp5250 ROUT BIAS STAT ALL ON OUTPUT Hp5250 ROUT BIAS STAT 4 ENTER Hp5250 A In above example A will be 1
11. IVin1 cable Block 1 Resistor holder 1 P a DIP SW1 PA a IVout2 connector IVin2 cable Resistor holder 2 DIP SW2 Installation Installing the E5250A DIP SW3 7 IVout3 connector IVin3 cable Resistor holder 3 Screws Total 48 BIASin2 BIASin3 terminal terminal Resistors ee Total 24 bd BIASout1 BIASout2 terminal terminal Y To BIAS INPUT 51 To BIAS INPUT 52 To BIAS INPUT 53 To Modify BIAS Input A Each multiplexer block has an independent BIAS input You can change the BIAS input internally using the BIASin BIASout terminals shown in Figure 2 2 or externally using the BIAS INPUT connectors For actual examples of modifications see E5255A Configuration Examples To Use Multiplexer Blocks on another E5255A When a module is installed in a mainframe slot six module pins are connected to the mainframe internal bus So if multiplexers on different E5255As use the same module pin the IV inputs are connected together via the internal bus Agilent E5250A User s Guide Edition 9 2 11 Installation Installing the E5250A For example if a mainframe installs four E5255As which the IVin1 cable is connected to the SMU1 input connector and the IVin2 and IVin3 cables are not connected the E5250A configures a 32 output multiplexer that uses the SMU INPUT 1 connector as the IV input
12. Subprogram Program Line Meas_vth Test_commS MOSFET Vth Measurement Constant Definition block ChannelS 10101 10202 10303 10404 Meas_vth OUTPUT Hp5250 ROUT CLOS amp Channel Connect to DUT block OUTPUT Hp5250 OPC ENTER Hp5250 A Meas_vth OUTPUT Hp5250 ROUT OPEN CARD ALL Connection All Open block OUTPUT Hp5250 OPC ENTER Hp5250 A O oO Meas_c Test_comm Capacitance Measurement Constant Definition block Channel 10905 11006 Meas_c OUTPUT Hp5250 ROUT CLOS amp Channel Connect to DUT block OUTPUT Hp5250 OPC ENTER Hp5250 A Meas_c OUTPUT Hp5250 ROUT OPEN CARD ALL Connection All Open block OUTPUT Hp5250 OPC ENTER Hp5250 A ROUT FUNC NCON Set5250init OUTPUT Hp5250 OUTPU Hp5250 ROUT BIAS STAT ALL OFF OUTPUT Hp5250 ROUT CONN RULE ALL SROU OUTPUT Hp5250 ROUT CONN SEQ ALL BBM OUTPUT Hp5250 ROUT OPEN CARD ALL OUTPUT Hp5250 OPC ENTER Hp5250 A Agilent E5250A User s Guide Edition 9 9 15 Executing Sample Programs Vth and Capacitance Measurement Program 2 Remove the exclamation marks from program lines shown in the following table and enter the lines Subprogram Program Line Meas_vth COM Vfp_com_data Setup_data 14000
13. 0 00 e eee eee eee 6 9 Using Bias Modes i praeina bet pe ae eee as we SR eat 6 10 Using Couple Port for E5252A only 00 eee eee eee 6 11 Controlling Relay Switching 0 0 00 ce eee eee eee eee 6 12 Programming Examples eiss piros asee cee ee 6 13 Channel Creation Example 0 0 00 eee eee ee eee 6 14 Bias Mode Example oor snaci eree hesun re eee cee eee 6 16 Couple Port Example posos c ccs 400 cede kbs ee bees ee wba sles ke 6 19 Using the VFP Data Upload Library 00 00 0000 00008 6 22 VFP Data Upload Library 0 0 00 ee eee 6 23 Programming Example 0 0 e eee eee eee 6 25 Before Executing Your Program 0 0 cee eee eee eee eee 6 26 Error Messages i420 002 exes chs a E E EAR slave henge sae x 6 27 Using the Capacitance Compensation Routine 005 6 28 Capacitance Compensation Routine 0 0 0 0 0 eee eee 6 29 Required Conditions lt ope cepos epee ate cece eee eee 6 30 Programming Example 0 00 cece eee eee eee 6 32 Before Executing Your Program 00 0 0 eee eee eee eee 6 32 Error Messages taaa aa oe ena at Goin tale et ae 6 32 Command Reference Common Commands 0 cece eee cee enn eee 7 4 DIAGnostic Subsystem 0 0 cee eee 7 15 LROUTESUBSYSIEM sr eee egies teor EV ETEEN BOSE 4 oie AES 7 20 SYSTem Subsystem sso os0008 soaks ashe ERS eR ou eee ee el 7 42 Conients 4
14. NOTE CAUTION NOTE Executing Sample Programs This chapter explains how to use the following sample programs e Vth and Capacitance Measurement Program e HCI Measurement Program The sample programs are saved in the E5250A Program Disk LIF formatted 3 5 inch diskette that is furnished with Agilent E5250A This disk includes the setup files for controlling Agilent 4155 4156 Semiconductor Parameter Analyzer used in the program with Agilent ES250A The sample programs are HP BASIC language programs so you need an HP BASIC workstation to execute the programs The Vth and Capacitance Measurement Program uses the Agilent 4155 4156 Agilent 4284A Precision LCR Meter and the E5250A with the E5252A card The HCI Measurement Program uses the 4155 4156 Bias Sources and the E5250A with the E5255A cards These are sample programs so you may need to modify these programs and the 4155 4156 setup files for your application before executing the programs If the sample programs damage your device Agilent Technologies is NOT LIABLE for the damage To Keep Original Program Disk Copy the E5250A Program Disk and keep the original disk for your backup Also for storing a program after you modify it use a file name that is different from the original program name 9 2 Agilent E5250A User s Guide Edition 9 Table 9 1 Executing Sample Programs Vth and Capacitance Measurement Program Vth and Capacitance Measureme
15. OUTPUT Hp5250 ROUT CLOS 10101 10202 ROUTe CLOSe LIST This query command returns 0 or 1 for each channel specified by channel_list in same order as specified by channel_list 0 channel is opened not connected 1 channel is closed connected ROUTe CLOSe LIST channel_list Parameter Explanation channel_list Channels to check For details about channel_list refer to Chapter 5 close_status close_status lt newline gt lt END gt 1 closed or 0 opened OUTPUT Hp5250 ROUT OUTPUT Hp5250 ROUT ENTER Hp5250 AS LOS 10101 10202 LOS 10101 10102 10201 10202 HA In above example AS will be 1 0 0 1 Agilent E5250A User s Guide Edition 9 7 31 Syntax Example Syntax Query response Example Command Reference ROUTe CONNection RULE ROUTe CONNection RULE This command sets the connection rule Free or Single Route for the specified card For details refer to Connection Rule in Chapter 5 At RST all cards are set to FREE ROUTe CONNection RULE card_number rule Parameter Explanation card_number card number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL rule FREE free route SROUte single route OUTPUT Hp5250 ROUT CONN RULE ALL SROU ROUTe CONNection RULE This query command returns the connection rule of the specified c
16. Softkey Description SELF TEST Displays the SELF TEST MENU LEAK TEST Displays the LEAK TEST MENU QUIT Quits the Self Test Utility Agilent E5250A User s Guide Edition 9 3 11 Figure 3 2 Executing Self Test and Leak Test Using the Self Test Utility To Execute Self Test On the MAIN MENU of the E5250A Self Test Utility select the SELF TEST softkey to display the E5250A SELF TEST MENU and following softkeys Softkey Description CARD1 RELAY For executing Relay Test for Card1 CARD2 RELAY For executing Relay Test for Card2 CARD3 RELAY For executing Relay Test for Card3 CARD4 RELAY For executing Relay Test for Card4 CONTROLLER Executes Controller Test immediately FRONT PANEL Executes Front Panel I F Test immediately MAIN MENU Returns to MAIN MENU of Self Test Utility immediately Also the most recent Self Test result P F N is displayed on the 4155 4156 screen Example of SELF TEST MENU Agilent E5250A Test Utility SELF TEST MENU CARD1 RELAY Start Slot1l E5255A Relay Test N CARD2 RELAY Start Slot2 E5255A Relay Test N CARD3 RELAY Start Slot3 E5255A Relay Test N CARD4 RELAY Start Slot4 E5255A Relay Test N CONTROLLER Start E5250A Controller Test P FRONT PANEL Start E5250A Front Panel UIF Test N MAIN MENU Return to MAIN MENU P indicates test was passed F indicates test was failed N indicates test
17. Agilent E5250A User s Guide Edition 9 7 39 Syntax Example Syntax Example Command Reference ROUTe OPEN CARD ROUTe OPEN CARD This command disconnects all input ports from all output ports for the specified card Then if Bias Mode is ON connects the input Bias Port to all bias enabled output ports For details about the Bias Mode refer to ROUTe BIAS STATe in this chapter and refer to Chapter 5 ROUTe OPEN CARD card_number Parameter Explanation card_number card number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL OUTPUT Hp5250 ROUT OPEN CARD ALL ROUTe OPEN LIST This command disconnects the input ports from output ports as specified in channel_list For some modes such as Single Route Mode Couple Port Mode and Bias Mode more complex disconnections may occur For details refer to Chapter 5 For example if Bias Mode is ON you cannot directly specify the input Bias port But if you use ROUT OPEN to disconnect a bias enabled output port from another input port the output port is automatically connected to the input Bias Port ROUTe OPEN LIST channel_list Parameter Explanation channel_list Channels to open disconnect For details about channel_list refer to Chapter 5 OUTPUT Hp5250 ROUT OPEN 10101 10202 7 40 Agilent E5250A User s Guide Edition 9 Syntax Query respo
18. Each test device is judged to be valid or not by measuring the gate and drain leakage currents Change the following parameters in Limits for leakage tests block Parameter Description Default Igleak_max Maximum Gate leakage current in A 2 E 10 Idleak_max Maximum Drain leakage current in A 1 E 8 To specify the data displayed on the 4155 4156 screen Change the following parameters in the Setup for drawing saving data in main menu block 0 Displays the data for all parameters 1 Displays Idlin data 2 Displays Gmmax data 3 Displays Vtext data 4 Displays Vtci data 1 No data is displayed To change the timing for saving the test data Parameter Description Default Show_device To display the data for the specified device number 0 0 Displays the data for all devices n integer Displays the data for device No n Show_param To display the data for the specified parameter 0 Change the following parameter in the Setup for drawing saving data in main menu block Save_at_1 Save_at_1 For this parameter the default is 1 9 38 Last 0 Saves the data after each parameter measurement last 1 Saves the data after HCI test is completely finished Agilent E5250A User s Guide Edition 9 10 Specifications Specifications This chapter lists specifications typical data and supplemental data for the Agilent E5250A Low Leakage Switch Ma
19. Query response Example Command Reference DIAGnostic TEST CARD CLEar DIAGnostic TEST CARD CLEar This command clears the relay test result pass fail result of the specified card DIAGnostic TEST CARD CLEar card_number Parameter Explanation card_number card number 1 2 3 4 or ALL OUTPUT Hp5250 DIAG TEST CARD CLE 1 DIAGnostic TEST CARD EXECute This command executes the relay test for specified card then returns the pass fail result For more info see Chapter 3 You must attach the relay test adapter before executing this command This command changes all settings of card to same state as after executing SYST CPON command DIAGnostic TEST CARD EXECute card_number Parameter Explanation card_number card number 1 2 3 4 or ALL test_result lt newline gt lt END gt 1 Fail card exists O Pass OUTPUT Hp5250 DIAG TEST CARD ALL 7 16 Agilent E5250A User s Guide Edition 9 Syntax Query response Example Syntax Example Command Reference DIAGnostic TEST CARD STATe DIAGnostic TEST CARD STATe This command returns the most recent relay test result for the specified card DIAGnostic TEST CARD STATe card_number Parameter Explanation card_number card number 1 2 3 4 test_result lt newline gt lt AEND gt 1 Fail O Pass 1 Not Tested OUTPUT Hp5
20. gt 3 gH Q Q QA A RQ Q R IV Input 2 Q Output 9 N wo gt zl a BLOCK 3 BIAS Input3 gt vV Resistor gt fa D ro IV Input 3 O g Output 17 co o N N N N N w N gt 1 10 Agilent E5250A User s Guide Edition 9 Introduction Agilent E5255A Product Description Table 1 2 E5255A Input Output Connectors 2x8 multiplexer BIAS INPUT OUTEUE Output Port No Connector Block No Port No 2 Location Block BIAS 51 Output 1 to 8 Left Block2 BIAS2 52 Output 9 to 16 Center Block3 BIAS3 53 Output 17 to 24 Right Figure 1 6 E5255A BIAS INPUT Connectors and OUTPUT Connectors Ly u BIAS INPUT 2200VeV1A Max AA 82 OUTPUT t 200ve 1A Max A 1 8 8 18 24 8x3 CH MULTIPLEXER 1 17 24 n n WARNING Do not touch the force and guard terminals of the OUTPUT connectors while the E5250A is turned on Dangerous voltages up to the maximum input voltage may be present at the OUTPUT conne
21. 100 CALL Load_vfp_data Address_5250 MAT48 Mat48_data 110 CALL Init_vfp_setup Mat48_data 120 130 DISP SETUP IN PROGRESS SETUP NO Setup_num 140 CALL Connect_vfp Mat48_data Setup_num 150 160 Comment FNGet_vfp_comment Mat48_data Setup_num 170 180 DISP SETUP WAS COMPLETED SETUP COMMENT Comment S 190 200 END Line Zog Number Description 30 Declares data size of Mat48_data which is for internal use by the library Size must be 14000 40 Declares data size of Comment which is for storing comment from Setup Memory 100 Loads the data file MAT 48 which was made by VFP utility 110 Initializes the E5250A based on the loaded data 140 Connects relays based on data from specified Setup Memory 160 to 180 Gets the comment from specified Setup Memory and displays the comment Agilent E5250A User s Guide Edition 9 6 25 Programming the E5250A Using the VFP Data Upload Library Before Executing Your Program Before executing a program that uses subprograms from the VFP Data Upload Library do the following 1 Link the library to your program Link the library as shown in the following example The VFP Data Upload Library is an ASCII file on the E5250A Program Disk a GET the file UPLOAD from the E5250A Program Disk GET UPLOAD b RE STORE the file RE STORE U_LIB c LOAD your program d Link the library to your program by using the LOADSUB
22. ROUTe CLOSe CARD This query command returns channel_list of all closed connected channels for the specified card ROUTe CLOSe CARD card_number Parameter Explanation card_number card number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 channel_list lt newline gt lt END gt PEN CARD ALL LOS 10101 10202 LOS CARD 1 OUTPUT Hp5250 ROUT OUTPUT Hp5250 ROUT OUTPUT Hp5250 ROUT ENTER Hp5250 AS AAO AS will be 10101 10202 For the meaning of channel_list refer to Chapter 5 7 30 Agilent E5250A User s Guide Edition 9 Syntax Example Syntax Query response Example Command Reference ROUTe CLOSe LIST ROUTe CLOSe LIST This command connects the input ports to the output ports as specified in channel_list For some modes such as Single Route Mode Couple Port Mode and Bias Mode more complex connections may occur For details refer to Chapter 5 For example if Bias Mode is ON you cannot directly specify the input Bias port But if channel_list specifies an output port that is connected to the input Bias Port the output port is automatically disconnected from the Bias Port and connected to specified input port Refer to ROUTe BIAS STATe ROUTe CLOSe LIST channel_list Parameter Explanation channel_list Channels to close For details about channel_list refer to Chapter 5
23. Temperature Range Humidity Range Temperature Range Humidity Range Specifications Accessories Accessories The following specifications are applied for the accessories listed below Operating 5 C to 40 C Storage 40 C to 70 C Operating 5 to 80 RH non condensing Storage 5 to 90 RH at 65 C e Agilent 16494A Triaxial Cable e Agilent 16494B Kelvin Triaxial Cable e Agilent 16494C Kelvin Triaxial Cable for Agilent 4142B e Agilent 16494D 8ch Shielded Coaxial Cable e Agilent 16495C Connector Plate with 6 8ch Shield Intlk GNDU e Agilent 16495D Connector Plate with 12 8ch Shield Intkk GNDU e Agilent 16495E Half size Blank Plate e Agilent 16495F Connector Plate with 12 Triax Intk GNDU e Agilent 16495G Connector Plate with 24 Triax Intlk GNDU The following specifications are applied for the Agilent 16494E Wide Temperature 8ch Shielded Coaxial Cable Operating 5 C to 40 C for connector part 50 C to 200 C for cable part Storage 40 C to 70 C Operating 5 to 80 RH non condensing Storage 5 to 90 RH at 65 C 10 8 Agilent E5250A User s Guide Edition 9 Specifications Supplemental Data when used with Agilent 4155 4156 Supplemental Data when used with Agilent 4155 4156 The below data shows degradation of Agilent 4155 4156 when used with Low Leakage I V Port Tout is output current in A and Vout is output voltage in V Supplemental Data when used with
24. address of the E5250A is 22 10 ASSIGN Hp5250 TO 722 2 Use OUTPUT command to send SCPI commands to control the E5250A 3 Use ENTER command to get query response from the E5250A Example 10 REAL Complete 20 30 ASSIGN H 40 50 OUTPUT H 60 4 70 80 90 100 110 O O QOQ Qo Pe 120 OUTPUT H 130 E 140 150 END w p5250 TO 722 p5250 RST PI250 3 p5250 D5250 p5250 p5250 OPC Hp5250 Complete ROUT ROUT ROUT ROUT FUNC NCON CONN RULE ALL FREE CONN SEQ ALL BBM CLOS 10101 10202 Line Number Description 10 Declares Complete as a real number 30 Assigns I O path to control the ES250A 50 Resets the E5250A 70 Sets the E5250A to Normal channel configuration mode 80 Sets all cards to free connection rule 90 Sets all cards to break before make connection sequence 100 Creates channels 10101 and 10202 120 and 130 Waits until all operations are complete Agilent E5250A User s Guide Edition 9 6 5 Programming the E5250A Creating a Control Program Creating a Control Program This section explains how to create a control program for the ES250A The control program basically consists of the following six parts e Defining Channel Configuration Mode e Defining Connection Rule e Defining Connection Sequen
25. an Intlk connector and a GNDU connector triaxial through female to female The back of the Intlk connector is designed for soldering 16495G 002 has 24 triaxial connectors an Intlk connector and a GNDU connector The back of each connector is designed for soldering Connector Plates for E5255A 16495C 16495D Half size connector plate for ES255A The 16495C has six 8 channel shielded coaxial connectors an Intlk connector and a GNDU connector The back of each connector is designed for soldering Full size connector plate for E5255A The 16495D has twelve 8 channel shielded coaxial connectors an Intlk connector and a GNDU connector The back of each connector is designed for soldering Agilent E5250A User s Guide Edition 9 4 3 Setting up Measurement Environment Connector Plates Blank Plate 16495E Half size blank plate This plate is used to cover openings when you made too big openings for mounting the connector plate You will use this plate to cover openings if you mount the half size connector plate in openings made for the full size connector plate 4 4 Agilent E5250A User s Guide Edition 9 A WARNING Instrument Side DUT Side Figure 4 1 NOTE Setting up Measurement Environment Connecting 8 Channel Shielded Coaxial Cable Connecting 8 Channel Shielded Coaxial Cable This section introduces Agilent 16494E wide temperature 8 channel shielded coaxial cable and explains how to connect the
26. e Agilent E5250A Product Description e Agilent E5252A Product Description e Agilent E5255A Product Description e Options and Accessories 1 2 Agilent E5250A User s Guide Edition 9 Table 1 1 Figure 1 1 Introduction Agilent E5250A Product Description Agilent E5250A Product Description Agilent E5250A Low Leakage Switch Mainframe is a computer controlled switching matrix mainframe designed for semiconductor dc characteristics measurement applications The E5250A has four slots for installing the modules plug in cards listed in Table 1 1 These cards can be used in various switching matrix configurations in the E5250A For example using four E5252As you can configure a maximum 10 input 48 output switching matrix or using four E5255As you can configure a maximum 2 input x 96 output multiplexer Available Plug in Cards for E5250A Model No Description E5252A 10x12 Matrix Switch E5255A 24 8x3 Channel Multiplexer E5250A Front Panel Ld t J Agilent E5250A User s Guide Edition 9 1 3 Introduction Agilent E5250A Product Description Front Panel Tour The E5250A has 2 hard keys and 4 LED indicators on the front panel as shown in Figure 1 1 LINE key Line LED Local Self Test key Remote LED System Fail LED Fail LED Used to turn the E5250A on or off Turns on when the E5250A is turned on If Remote LE
27. on page 5 3 Using the Virtual Front Panel VFP Utility The Virtual Front Panel VFP Utility is used to control the E5250A by using Agilent 4155 4156 Semiconductor Parameter Analyzer s built in Instrument BASIC BASIC controller You can control the E5250A interactively without the control program Refer to Using Virtual Front Panel Utility on page 5 25 5 4 Agilent E5250A User s Guide Edition 9 Controlling the E5250A Switch Control Basics Switch Control Basics This section introduces basic information for controlling the relay switches on the E5252A and the E5255A e Channel List and Channel Configuration e Connection Rule e Connection Sequence e Bias Mode e Couple Port e E5252A Channel List e E5255A Channel List Agilent E5250A User s Guide Edition 9 5 5 Figure 5 1 Controlling the E5250A Switch Control Basics Channel List and Channel Configuration Some SCPI commands require the channel_list parameter which determines the relays to close open in the E5252A or the E5255A to connect disconnect the desired channels The following figure shows the basic syntax of the channel_list parameter Syntax of channel_list Parameter Card NoJ Channel No Card NoJ Channel No 1digit 4 digits 1digit 4 digits The channel_list depends on Channel Configuration mode as described later In the channel_list you can specify one or more channels
28. 03 SMU3 SMU4 01 to 12 for Normal Config 01 to 48 for Auto Config 05 SMUS SMU6 01 to 12 for Normal Config 01 to 48 for Auto Config 07 HF1 HF2 01 to 12 for Normal Config 01 to 48 for Auto Config 09 CV1 CV2 01 to 12 for Normal Config 01 to 48 for Auto Config Agilent E5250A User s Guide Edition 9 5 13 Controlling the E5250A Switch Control Basics The two output ports are determined by the channel_list parameter of the ROUT CLOS command and the lower output port number is always odd So when you execute ROUT CLOS or ROUT OPEN command for the couple port four relays operate synchronously as shown in Figure 5 3 For example assume that input ports and 2 are coupled and that the Couple Port mode is ON 1 If ROUT CLOS command specifies to connect channel 0105 relays are closed to realize two channels 0105 and 0206 2 If ROUT OPEN command specifies to disconnect channel 0105 all four relays between the two input ports and two output ports are opened Figure 5 3 Couple Port Relay Connections 2XN 1 2XN 1 INPUT INPUT 2XN 2XN at 2XM eee lam OUTPUT OUTPUT 1 Connect condition 2 Disconnect condition N 1 to 5 Bue M 1 to 6 for Normal Config Open M 1 to 24 max for Auto Config NOTE For each E5252A installed in the E5250A you can independently specify the same or different couple ports 5 14 Agilent E5250A User s Guide
29. 2 3 or 4 card_description lt newline gt lt SEND gt If designated card is not installed or initialize failed this command returns No Card For E5252A in Auto Config mode card_description response is one of following e E5252A 10x12 Matrix Switch e E5252A 10x24 Matrix Switch e E5252A 10x36 Matrix Switch e E5252A 10x48 Matrix Switch For E5252A in Normal Config mode E5252A 10x12 Matrix Switch For E5255A in Auto Config mode E5255A 11 12 13 14 15 16 Channel Multiplexer Where In is the number two characters of output ports for each input port n For example E5255A 24 24 0 16 16 16 Channel Multiplexer For E5255A in Normal Config mode E5255A 24 8x3 Channel Multiplexer OUTPUT Hp5250 SYST CDES 1 EN ER Hp5250 A 7 44 Agilent E5250A User s Guide Edition 9 Syntax Example SYSTem CPON Command Reference SYSTem CPON This command resets the specified card to the power on state If the parameter is ALL all addressable cards are reset to the power on state Status after this command is shown below Channel Configuration Connection Rule Connection Sequence Bias Mode Bias Port Bias Enabled Channels Couple Port Mode Couple Port Card Channel Status Self Test Result No Change Free Break Before Make Off e E5252A 10 e E5255A None All channels output ports are bias enabled Off No Couple Ports
30. Diagnostics hpe5250a_testExec_Q Executes the relay front panel controller test hpe5250a_testClear Clears the test result Passthrough hpe5250a_cmd Sends a command Functions hpe5250a_cmdInt Sends a command with an integer parameter hpe5250a_cmdReal Sends a command with a real parameter hpe5250a_cmdData_Q Sends a command to read any data hpe5250a_cmdString_Q Sends a command to read string response hpe5250a_cmdIntl6_Q Sends a command to read 16 bit integer response hpe5250a_cmdIntl6Arr_Q Sends a command to read 16 bit integer array response hpe5250a_cmdInt32_Q Sends a command to read 32 bit integer response hpe5250a_cmdInt32Arr_Q Sends a command to read 32 bit integer array response hpe5250a_cmdReal64_Q Sends a command to read 64 bit real response hpe5250a_cmdReal64Arr_Q Sends a command to read 64 bit real array response 8 6 Agilent E5250A User s Guide Edition 9 Syntax Parameters Syntax Parameters VXlplug amp play Driver Driver Functions hpe5250a_biasChanCard This function will enable or disable bias on all the output ports of the specified card ViStatus _VI_FUNC hpe5250a_biasChanCard ViSession vi Vilnt16 disable_enable Vilnt16 bias_cardno vi Instrument handle returned from hpe5250a_init disable_enable Bias status 0 sets bias enabled card 1 sets bias disabled card bias_cardno Card number 1 card 1 2 ca
31. Enable register bits The Standard Event Status Enable Register determines which bits of the Standard Event Status Register are enabled Enabled bits are ORed together and the result is reported to bit5 of the Status Byte Register The Standard Event Status Enable Register consists of 16 bits but only the lower 8 bits are used which correspond to the bits of the Standard Event Status Register For details refer to Standard Event Status Enable Register on page 7 54 Agilent E5250A User s Guide Edition 9 7 5 Example Command Reference ESE The following table shows the bits of the Standard Event Status Register and binary weighted decimal value of each bit bit a description 0 1 OPC Operation Complete 1 2 not used 2 4 QYE Query ERROR 3 8 DDE Device Dependent ERROR 4 16 EXE Execution ERROR 5 32 CME Command ERROR 6 64 not used 7 128 PON Power on The following four lines enable the same bit CME bit OUTPUT Hp5250 ESE 32 using decimal numeric OUTPUT Hp5250 ESE B100000 using binary numeric OUTPUT Hp5250 ESE Q40 using octal numeric OUTPUT Hp5250 ESE H20 using hexadecimal numeric The following is example for query NTER Hp5250 A 7 6 SE OUTPUT Hp5250 E ow Agilent E5250A User s Guide Edition 9 Command Reference
32. MIN OV OA 0S MAX 5V 2 mA 1 5 mS Also the DATA VARIAVLES fields set Vtext and Idlin Auto Analysis Function LINE1 GRAD line on Y1 at a point where VG 5 Gradient 0 LINE2 NORMAL line on Y1 at a point where ID 10u and a point WHERE ID 10u MARKER At a point where Gm MAX Gm Interpolate ON PARAM MES setup file extracts Idlin and Vtci by using the 4155 4156 User Function and Auto Analysis Function These parameters are extracted with the following conditions Idlin Gate voltage VG 5 V Substrate voltage VB 0V Vtci W L Ratio Gate width Gate length ratio 10 um 1 um For changing the conditions refer to Modifying the Program on page 9 35 9 20 Agilent E5250A User s Guide Edition 9 Executing Sample Programs HCI Measurement Program Step 5 Applies stress and characterizes the parameters This step performs the following 1 Applies the stress Vdst r and Vgstr to the valid devices Before running the SP_MUX_M program you must determine the Vdst r drain stress voltage by Id Vds measurement using setup file IDVD MES then edit the SP_MUX_M program to input value of Vdst r Refer to Executing the Program on page 9 27 2 Performs the interim characterization This sets up the 4155 4156 by using the PARAM MES setup file then measures the parameters Idlin Gmmax Vtext an
33. Mode Figure 5 4 Channel No Output Port Output Port No fe Z E O a lt __ _ ce 8 5 a d a Agilent E5250A User s Guide Edition 9 5 16 Table 5 6 NOTE Auto Configuration Mode Controlling the E5250A Switch Control Basics To use this mode the E5252A must be installed in the E5250A slots continuously from slot slots 1 2 or slots 1 2 3 or slots 1 2 3 4 To specify a channel you use five digits as shown in Table 5 6 Specifying E5252A Channels in Auto Config Mode One Channel 5 digits Slot No E5252A Confieuration Channel Number 4 digits is Card Number installed first 1 digit Input Port No Output Port No next 2 digits last 2 digits 1 10x12 Matrix 0 01 to 10 01 to 12 1 and 2 10x24 Matrix 0 O01 to 10 01 to 24 1to3 10x36 Matrix 0 01 to 10 01 to 36 1to4 10x48 Matrix 0 01 to 10 01 to 48 Card Number One digit always 0 Channel Number Four digits XXYY e XX input port number 01 to 10 e YY output port number 01 to 48 Channel Number assignment is shown in Figure 5 5 In the Auto Configuration mode you can omit any zeros at beginning of channel For example channel 00101 can be expressed by 101 For the following two cases three ports share one input path Do not specify two of the input ports at same time e SMUS HF1 and CV1 Input Port No 05 07 and 09 e SMU6 HF2 and CV2 Input Port No 06 08
34. RULE card_number SEQuence card_number ALL sequence SEQuence card_number COUPle PORT card_number ALL couple_port PORT card_number STATe card_number ALL state STATe card_number FUNCtion channel_config FUNCtion OPEN CARD card_number ALL LIST channel_list LIST channel_list Parameter values card_number channel_list Auto Config Mode 0 Normal Config Mode 112131 4 Refer to Chapter 5 state ONIOFFIOI11 rule FREE SROU channel_config ACON NCON sequence NSEQ BBM MBBR Agilent E5250A User s Guide Edition 9 7 21 Syntax Example Syntax Example Command Reference ROUTe BIAS CHANnel DISable CARD ROUTe BIAS CHANnel DISable CARD This command bias disables all output ports of the specified card When Bias Mode is ON this command opens relays to disconnect the input Bias Port from all output ports Refer to ROUTe BIAS STATe At RST all output ports are bias enabled ROUTe BIAS CHANnel DISable CARD card_number Parameter Explanation card_number card number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL OUTPUT Hp5250 ROUT BIAS CHAN DIS CARD ALL ROUTe BIAS CHANnel DISable LIST This command bias disables the output ports specified by the channel_list When Bias Mode is ON this command opens relays to disconnect the input Bias Port from the output port
35. Syntax Query response Example Syntax Example Command Reference TST TST This query command executes an internal self test then returns the result After this command execution the E5250A becomes same status as after RST command execution TST test_result lt newline gt lt END gt test_result Explanation 0 pass 1 fail OUTPUT Hp5250 TST ENTER Hp5250 A WAI This command stops execution of any commands until the Operation Complete OPC bit is set to 1 which means there is no pending operation Refer to OPC command WAI OUTPUT Hp5250 WAI 7 14 Agilent E5250A User s Guide Edition 9 NOTE Command Reference DIAGnostic Command Tree DIA Gnostic Subsystem The DIAGnostic subsystem has commands for executing the self test function For more info see Chapter 3 The DIAGnostic subsystem commands ignore the E5250A channel configuration mode For DIAG commands that require a card number you specify 1 2 3 4 or ALL DIAGnostic Command Tree Command Parameter DIAGnostic TEST CARD CLEar card_number ALL EXECute card_number ALL STATe card_number FRAMe CLEar CONTroller FPANel EXECute CONTroller FPANel STATe CONTroller FPANel Parameter values card_number 1121314 Agilent E5250A User s Guide Edition 9 7 15 Syntax Example NOTE Syntax
36. To Mount Protective Resistors To protect the device DUT from electrical damage you can mount resistors between the IV input and BIAS input of multiplexer The following procedure shows how to mount the resistors See Figure 2 2 for the component locations When shipped from the factory 0 Q resistors are mounted and bit 4 of all DIP switches is set to OFF 0 1 Cut the original resistors 0 Q off 2 Loosen the screws from both sides of the resistor holder 3 Put resistors in holder and tighten screws And confirm that the resistors are held properly Resistors should be mounted on each multiplexer block that you will use 8 resistors block 4 Set bit 4 to ON 1 for the DIP switch of the related block For example if you mount resistors for Block 1 and 2 multiplexers set bit 4 to ON for DIP SW1 and SW2 To Select Protective Resistors Be careful about the following when selecting protective resistors Also be careful about the heating of the rear panel of mainframe or plug in module which may be heated by resistors even if you follow this warning e Ifonly one E5255A is installed in the mainframe Total power consumption by resistors must be less than 16W e If multiple E5255As are installed in the mainframe Total power consumption by resistors must be less than 32W e Consider the current flows to resistor when DUT shorts and make sure the power consumption by resistor will be within specification of resistor Do
37. and 10 For example if you specify input port 05 then you cannot specify input ports 07 and 09 You can specify 05 and 06 at the same time Agilent E5250A User s Guide Edition 9 5 17 Controlling the E5250A Switch Control Basics E5252A Channel Number in Auto Config Mode example for 10x48 matrix Figure 5 5 Channel No Output Port Output Port No fo Z A e e C TEE O al oo lt O a c Agilent E5250A User s Guide Edition 9 5 18 Table 5 7 E5255A Channel List This section describes how to define the channel_list specifically for the E5255A Controlling the E5250A Switch Control Basics For the basic syntax of channel_list parameter see Channel List and Channel Configuration on page 5 6 Normal Configuration Mode To specify a channel you use five digits as shown in Table 5 7 Specifying E5255A Channels in Normal Config Mode Slot No E5255A is installed 1 Block No of E5255A Card Number first 1 digit 1 One Channel 5 digits Channel Number 4 digits Input Port No next 2 digits IV Input 01 BIAS Input 51 IV Input 02 BIAS Input 52 IV Input 03 BIAS Input 53 IV Input 01 BIAS Input 51 IV Input 02 BIAS Input 52 IV Input 03 BIAS Input 53 IV Input 01 BIAS Input 51 IV Input 02 BIAS Input 52 IV Input 03 BIAS Input 53 Output Port No last 2 dig
38. measured by 4284A Cc Compensated capacitance value in F returned by Capacitance Compensation Routine Ge Compensated conductance value in S returned by Capacitance Compensation Routine Agilent E5250A User s Guide Edition 9 6 29 Programming the E5250A Using the Capacitance Compensation Routine Required Conditions This subprogram requires the following conditions e Setting of the 4284A Option Required 4284A 006 Frequency 1 kHz to 1 MHz Measurement Function Cp G Connection to E5250A Use Agilent 16048D E Test Cable and BNC T type Adapter Agilent part number 1250 2405 Calibration Must be done at the end of the 16048D E e E5250A Input port CV1 and CV2 e Connection of E5252A output To Connector Plate Use Agilent 16494A Triaxial Cable From Connector Plate to DUT Use low noise coaxial cable Agilent part number 8121 1191 for minimizing the compensation error You can also use another type of coaxial cable triaxial cable or combination of these See Using Other than Recommended Cable Using Other than Recommended Cable If you do not use the low noise coaxial cable Agilent part number 8121 1191 for the connection from Connector Plate to DUT the Capacitance Compensation Routine cannot return accurate results To get more accurate compensation results do following 6 30 Agilent E5250A User s Guide Edition 9 Programming the E5250A Using the Capacitance Compensation Routine
39. to Figure 7 5 Output Queue of E5250A Last Dat Brein oei Meis Last Data Byte to be read Queue Non Empty Next Data PaaS SSIS Byte Entered Se eas eae First Data Byte i to be read Output Queue Summary Message to Message Available MAV Bit 4 of Status Byte Register pg04005 120x100 The Response Formatter places Data Byte Messages and END messages into the Output Queue in response to query commands These messages are removed from the Output Queue as they are read by the controller As long as the Output Queue contains an unread message MAV is 1 Agilent E5250A User s Guide Edition 9 7 55 Command Reference Output Queue 7 56 Agilent E5250A User s Guide Edition 9 VXIplug amp play Driver VXlplug amp play Driver This chapter introduces the VXIplug amp play driver available for Agilent E5250A and consists of the following sections e System Requirements e Installing VXIplug amp play Driver e Driver Functions 8 2 Agilent E5250A User s Guide Edition 9 VXlplug amp play Driver System Requirements System Requirements The following system environments are required Operating System Microsoft Windows XP Professional Windows 2000 Windows NT 4 0 Windows 98 or Windows 95 It must be supported by the application development environment and VISA I O library Application Development Environment or programming environment Microsoft Visual B
40. 04 01 to 08 2x8MUX 1 BIAS Input 14 4 1 SMU2 0 IV Input 02 09 to 16 2x l6MUX 1 BIAS Input 12 with block in slot 3 card 2 SMU3 0 IV Input 03 09 to 16 2x l6MUX 2 BIAS Input 13 with block2 in slot 3 card 3 SMUS5 0 IV Input 05 01 to 08 2x8MUX 2 BIAS Input 15 Agilent E5250A User s Guide Edition 9 5 23 Controlling the E5250A Switch Control Basics Figure 5 8 Example for E5255A Channel Number in Auto Config Mode BIAS Input BIAS Input 11 14 1101 1102 1103 1147 1148 1401 1402 1403 1407 1408 IV Input IV Input 0101 0102 40103 0147 H0148 p 401 0402 403 SMU1 01 SMU4 04 040 0403 0407 0408 Output 1 Gs Output gt 2 G Made from Cards in Slot 1 and 2 Made from Block 3 of Card in Slot 3 Block 1 to 3 of each card should be connected in series BIAS Input BIAS Input 12 15 1201 1202 1203 1215
41. 1 0 IV Input 01 01 to 96 BIAS Input 11 to SMU2 2 0 IV Input 02 01 to 96 BIAS Input 12 to SMU3 3 0 IV Input 03 01 to 96 BIAS Input 13 to SMU4 4 0 IV Input 04 01 to 96 BIAS Input 14 to SMUS 5 0 IV Input 05 01 to 96 BIAS Input 15 to SMU6 6 0 IV Input 06 01 to 96 BIAS Input 16 Card Number One digit always 0 Channel Number Four digits XXYY e XX input port number 01 02 03 04 05 or 06 for IV Input Port 11 12 13 14 15 or 16 for BIAS Input Port e YY output port number Minimum output port number is 01 Maximum output port number is the total number of output ports for the ES255A blocks connected to the same input port For each configured multiplexer output port number 01 is assigned to first output port of smallest block number on card in the lowest slot number Agilent E5250A User s Guide Edition 9 5 21 Controlling the E5250A Switch Control Basics In the Auto Configuration mode you can omit any zeros at beginning of channel For example channel 00101 can be expressed by 101 Figure 5 7 Table 5 9 and Figure 5 8 show examples of the Channel Number In this example four E5255As are installed in the E5250A And the E5255As are configured to make the following multiplexers e Slot and Slot2 all six blocks are used together to make a 2x48 multiplexer IV input port is internally connected to SMU input port e Slot3 and Slot4 e Both Block used together to make 2x
42. 1 Measure R L C of your cable using the 4284A Measurement setup is as follows GUARD C GROUND E GROUND F GUARD D Wy 4 v FORCE or SENSE A hai FORCE or SENSE B Measurement Measurement Measurement Measurement Parameter Frequency Function Terminals R 1 kHz to 1 MHz A and B L SERIES see note C PARALLEL A and C a See figure above b Select 1 point in the frequency range c For triaxial cable connect B to F directly and measure L between A and E For coaxial cable connect B to D directly and measure L between A and C Ignore E and F 2 Overwrite the R L C data in the program lines listed below The data must be in per meter values Program Line No Defines R L C value of 1420 Triaxial cable for C meter High terminal 1430 Triaxial cable for C meter Low terminal 1440 Coaxial cable for C meter High terminal 1450 Coaxial cable for C meter Low terminal Original program defines initial data by DATA statement in the Rlc_data block as shown below 1350 BRle data 1360 R ohm L H cC F 1420 DATA 100 70E 3 400 00E 9 80 00E 12 User Triax Cbl H 1430 DATA 100 70E 3 400 00E 9 80 00E 12 User Triax Cbl L 1440 DATA 114 00E 3 544 00E 9 130 00E 12 User Coax Cbl H 1450 DATA 114 00E 3 544 00E 9 130 00E 12 User Coax Cbl L Agilent E5250A User s Guide Edition 9 6 31 Programming the E5250A Using the Capacitance Compensation R
43. 1216 1501 1502 1503 1507 1508 IV Input _ f IV Input 0201 0202 0203 0216 pu 0501 0502 0503 0507 0508 SMU2 02 SMU5 05 Output 2 3 15 16 Output _ gt 2 3 8 Made from Block 1 of Cards in Slot 3 and 4 Made from Block 3 of Card in Slot 4 Block 1 of each card should be connected in series BIAS Input 13 1301 1302 1303 1315 1316 IV Input SMUS6 is not used SMU3 03 0301 030 0303 0315 0316 Output _ gt 2 3 is 16 XXXX Channel Number Made from Block 2 of Cards in Slot 3 and 4 Block 2 of each card should be connected in series 5 24 Agilent E5250A User s Guide Edition 9 Controlling the E5250A Using Virtual Front Panel Utility Using Virtual Front Panel Utility The Virtual Front Panel VFP Utility is a control program for the E5250A The VFP utility runs on Agilent 4155 4156 Semiconductor Parameter Analyzer s built in IBASIC controller You can control the E5250A interactively from the 4155 4156 by using the VFP utility This section describes how to use the VFP utility e Functions of Virtual Front Panel Utility e Requirements e Starting the Virtual Front Panel Utility e Confirming the E5250A Card Configurations e Changing the VFP Setup Mode e Defining Labels for the E5250A Input Ports e Making Connections and Changing the Setup Data e Saving Loading the S
44. 16494E to the Device Under Test DUT Do not connect the 16494E cable to the E5255A or any instrument until connecting to the DUT as described below If you ignore this warning you maybe exposed to dangerous voltage The 16494E coaxial cable is used to connect the E5255A output directly to the DUT DUT socket or any fixture you want without using the connector plate One 16494E is used for one 8 channel output connector of the E5255A To use 24 output channels three 8 channel output connectors you need three 16494Es The instrument side of the 16494E cable can be connected directly to the E5255A output Solder the open side of the 16494E directly to DUT DUT socket or your test fixture as shown in Figure 4 1 Example of DUT Connection Shielding Ground Input A B SMU Force Guard BIAS Bias line Bias line B F A T 4 4 i DUT Ground Total 8 ea For highly accurate current forcing and measurements with minimized leakage extend the guard to surround the signal lines as close as possible to the DUT Agilent E5250A User s Guide Edition 9 4 5 Setting up Measurement Environment Mounting Connectors Directly Mounting Connectors Directly Previous sections described the information to use the available accessories also the 16495 Installation Guide provides the information how to install connector plates on the shielding box However you may n
45. 36 Agilent E5250A User s Guide Edition 9 Executing Sample Programs HCI Measurement Program To change Idlin and Gmmax extraction condition To change Gate voltage and Substrate voltage required for Idlin and Gmmax extraction do follows 1 GET the PARAM MES setup file by using the 4155 4156 2 Change the value of Substrate voltage VB on the SOURCE SETUP screen 3 Change the setting of VG parameter in LINE1 on the ANALYSIS SETUP screen To change the number of devices Change the setting of the No_of_devices variable in the Input Parameters block To test more than 25 devices you must change the configuration of the E5250A See chapter 2 To change the stress times Change the data at the DATA statement in the Stress duration setup block Each data shows the cumulative stress data Example DATA 10 20 50 DATA 100 200 500 DATA 1000 2000 5000 DATA 10000 20000 50000 DATA 100000 If you change the number of the data defined in DATA statements change the value of the Meas_points variable in the Stress duration setup block The value of Meas_points must be the same number as the number of data defined in the DATA statements In the above example the number of data in DATA statements is 13 So the variable for the above example must be set as follows Meas_points 13 Agilent E5250A User s Guide Edition 9 9 37 Executing Sample Programs HCI Measurement Program To change the test limits
46. 5 Using Couple Port for E5252A Sets up Couple Port ROUT COUP PORT card_no input_port_no No couple ports Sets Couple Port Mode ON OFF ROUT COUP STAT card_no state ALL OFF 6 Controls Relays on Cards ROUT CLOS channel_list All relays open ROUT OPEN channel_list All relays open ROUT OPEN CARD card_no ALL Parameter Description channel_config NCON or ACON rule sequence FREE or SROU NSEQ BBM or MBBR State ON 1 or OFF 0 channel _list 5 digit decimal number See Chapter 5 card_no ALL or 0 or 1 to 4 are available input_port_no 1 to 10 are available for ROUT BIAS PORT 1 3 5 7 or 9 are available for ROUT COUP PORT For details about these parameters refer to Chapter 5 and Chapter 7 CAUTION Agilent E5250A User s Guide Edition 9 Bias Port and Couple Port cannot be set for the same input port number 6 7 Programming the E5250A Creating a Control Program Defining Channel Configuration Mode Following commands are used to set the Channel Configuration mode For details refer to Channel List and Channel Configuration on page 5 6 Command Description ROUT FUNC NCON Sets Normal Channel Configuration mode ROUT FUNC ACON Sets Auto Channel Configuration mode Example 100 OUTPUT Hp5250 ROUT FUNC NCON 110 Sets E5250A to Normal channel configuration mode Defini
47. 7 and 8 0 disable or 1 enable port9 Couple port by the input ports 9 and 10 0 disable or 1 enable 8 20 Agilent E5250A User s Guide Edition 9 Syntax Parameters Syntax Parameters VXlplug amp play Driver Driver Functions hpe5250a_coupleState This function controls the couple port mode for the specified card This function applies only to the E5252A card ViStatus _VI_FUNC hpe5250a_coupleState ViSession vi Vilnt16 couplestate_cardno Vilnt16 couple_state vi Instrument handle returned from hpe5250a_init couplestate_cardn o Card number 1 card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the automatic configuration mode For the configuration mode see hpe5250a_func couple_state Couple port mode 0 OFF or 1 ON hpe5250a_dcl This function sends a device clear DCL to the instrument A device clear will abort the present operation and enable the instrument to accept a new command or query This is particularly useful in situations where it is not possible to determine the instrument state In this case it is customary to send a device clear before issuing a new instrument driver function The device clear ensures that the instrument will be able to begin processing the new commands ViStatus _VI_FUNC hpe5250a_dcl ViSession vi vi Instrument handle returned from hpe5250a_init Agilent E5250A User s Guide Edition 9
48. 8 21 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions hpe5250a_error_message This function translates the error return value from an instrument driver function to a readable string ViStatus _VI_FUNC hpe5250a_error_message ViSession vi ViStatus error_number ViChar _VI_FAR message vi Instrument handle returned from hpe5250a_init error_number Error return value from the driver function message Error message string This is limited to 256 characters hpe5250a_error_query This function returns the error numbers and corresponding error messages in the error queue of a instrument See Chapter 11 for a listing of the instrument error numbers and messages Instrument errors may occur when you places the instrument in a bad state such as sending an invalid sequence of coupled commands Instrument errors can be detected by polling Automatic polling can be accomplished by using the hpe5250a_errorQueryDetect function ViStatus _VI_FUNC hpe5250a_error_query ViSession vi ViPInt32 error_number ViChar _VI_FAR error_message vi Instrument handle returned from hpe5250a_init error_number Instrument s error code error_message Instrument s error message This is limited to 256 characters 8 22 Agilent E5250A User s Guide Edition 9 Syntax Parameters Syntax Parameters VXlplug amp play Driver Driver Functions hpe5250a_errorQueryDetect This function enabl
49. 817 for the 4155 4156 just press Enter key If not type GPIB address of the 4155 4156 then press Enter key The LEAK TEST MENU with the following softkeys are displayed Softkey Description START TEST For defining the Leak Test connection Need to define the E5250A input port and 4155 4156 SMU port MAIN MENU Returns to MAIN MENU of the Self Test Utility 3 Select START TEST softkey Following message softkeys are displayed Select IV Port of Leak Test by softkey Softkey Description IVn n 1 to 6 For specifying the E5250A SMU INPUT port for which you want to perform the leak measurement If only the E5255As are installed only Vn softkeys displayed are for SMU INPUT n internally connected to the E5255A IV input CANCEL Cancels the Leak Test execution 3 16 Agilent E5250A User s Guide Edition 9 Executing Self Test and Leak Test Using the Self Test Utility 4 Select desired Vn softkey n 1 to 6 for input port you want to test If the E5252A is installed in your E5250A and the 4156 is used for the Relay Test then when you press IV1 IV3 or IV5 softkey the following message and softkeys are displayed Is IVn Port a Kelvin connection Where n 1 3 or 5 Softkey Description YES Declares that the port specified by the Vn softkey is used for the Kelvin connection NO Declares that the port specified by the Vn softkey is used for the non Ke
50. AUX INPUT CV2 OUTPUT 6 Capacitance L 9 8 Agilent E5250A User s Guide Edition 9 Executing Sample Programs Vth and Capacitance Measurement Program Executing the Program Before executing the program do the following 1 Set the GPIB address for each instrument as follows e 4155 4156 717 e 4284A 724 e E5250A 722 Turn on all instruments and the computer Boot up HP BASIC operating system Set the 4155 4156 to NOT SYSTEM CONTROLLER on the SYSTEM MISCELLANEOUS page Insert the program disk into the disk drive that is connected to the computer Specify the mass storage device where the program disk is inserted by using the MSI statement For example if the device is CS80 702 1 enter the following command MSI CS80 702 1 GET the Vth and C measurement program SP_MAT and RE STORE the program In following example the file is stored as program file P_MAT GET SP_MAT RE STORE P_MAT GET the Capacitance Compensation Routine C_COMPEN and RE STORE the program In following example the file is stored as program file C_COM GET C_COMPEN RE STORE C_COM For details of Capacitance Compensation Routine refer to Using the Capacitance Compensation Routine on page 6 28 Agilent E5250A User s Guide Edition 9 9 9 Figure 9 2 Executing Sample Programs Vth and Capacitance Measurement Program Execute the program as follows 1 LOAD the Vth and C measureme
51. Address Agilent Technologies International sarl Rue de la Gare 29 CH 1110 Morges Switzerland Declares under sole responsibility that the product as originally delivered Product Name Low Leakage Switch Mainframe 10x12 Matrix Switch24 8x3 CH Multiplexer 24 8x3 CH Multiplexer Agilent E5250A Agilent E5252A Agilent E5255A This declaration covers all options of the above product s Model Number Product Options complies with the essential requirements of the following applicable European Directives and carries the CE marking accordingly Low Voltage Directive 73 23 EEC amended by 93 68 EEC EMC Directive 89 336 EEC amended by 93 68 EEC and conforms with the following product standards EMC Standard Limit IEC 61326 2002 EN 61326 1997 A1 1998 A2 2001 A3 2003 CISPR 11 1997 EN 55011 1998 IEC61000 4 2 1995 EN61000 4 2 1995 IEC 61000 4 3 1995 EN61000 4 3 1995 IEC 61000 4 4 1995 EN61000 4 4 1995 IEC 61000 4 5 1995 EN61000 4 5 1995 IEC 61000 4 6 1996 EN61000 4 6 1996 Group 1 Class A 4kV CD 8kV AD 3 V m 80 1000 MHz 0 5 kV signal lines 1 kV power lines 0 5 kV line line 1 kV line ground 3 V 0 15 80 MHz IEC 61000 4 11 1994 EN61000 4 11 1994 1 cycle 100 Canada ICES 001 1998 Australia New Zealand AS NZS 2064 1 The product was tested in a typical configuration with Agilent Technologies test systems Safety IEC 61010 1 2001 EN 61010 1 2001 Canada CSA C22 2 No 1010 1 1992 NRTL C S
52. Agilent 4155 Supplemental Data when used with Agilent 4156 non Kelvin connection Voltage Range Offset Accuracy with MPSMU Range Setting Measurement 2V 960 uV 0 5 x Tout V 780 uV 0 5 x Tout V Current Range Offset Accuracy with MPSMU Range Setting Measurement l nA 3 pA 0 2 x Vout pA 3 pA 0 2 x Vout pA 10 nA 7 pA 0 2 x Vout pA 5 pA 0 2 x Vout pA 100 nA 50 pA 0 4 x Vout pA 30 pA 0 4 x Vout pA Voltage Range Offset Accuracy with HRSMU Range Setting Measurement 2V 500 uV 0 5 x Iout V 280 uV 0 5 x Tout V Current Range Offset Accuracy with HRSMU Range Setting Measurement 10 pA 0 4 pA 0 2 x Vout pA 0 1 pA 0 2 x Vout pA 100 pA 0 4 pA 0 2 x Vout pA 0 1 pA 0 2 x Vout pA 1 nA 0 7 pA 0 2 x Vout pA 0 5 pA 0 2 x Vout pA 10 nA 4 pA 0 2 x Vout pA 2 pA 0 2 x Vout pA 100 nA 40 pA 0 3 x Vout pA 20 pA 0 3 x Vout pA Agilent E5250A User s Guide Edition 9 10 9 Specifications Supplemental Data when used with Agilent 4155 4156 10 10 Agilent E5250A User s Guide Edition 9 11 Error Messages Error Messages This chapter lists and describes the error messages for Agilent E5250A An error message consists of an error number and message There are two types of error messages e Standard SCPI Error Messages Negative error nu
53. Agilent E5250A User s Guide Edition 9 8 29 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions hpe5250a_self_test This function causes the instrument to perform a self test and returns the result of that self test This is used to verify that an instrument is operating properly A failure may indicate a potential hardware problem ViStatus _VI_FUNC hpe5250a_self_test ViSession vi ViPInt16 test_result ViChar_VI_FAR test_message vi Instrument handle returned from hpe5250a_init test_result Numeric result from self test operation 0 No error test_message Self test status message This is limited to 256 characters hpe5250a_testClear This function clears the test result for the specified relay card or the front panel or the controller ViStatus _VI_FUNC hpe5250a_testClear ViSession vi Vilnt16 framecard_clear vi Instrument handle returned from hpe5250a_init framecard_clear Test result to be cleared 0 1 2 3 4 5 6 or 7 See below O test result of all test 1 card 1 relay test result 2 card 2 relay test result 3 card 3 relay test result 4 card 4 relay test result 5 relay test result of all card 6 front panel test result 7 controller test result 8 30 Agilent E5250A User s Guide Edition 9 Syntax Parameters Syntax Parameters Syntax Parameters VXlplug amp play Driver Driver Functions hpe5250a_testExec_Q This functi
54. All relays open in present channel configuration mode No Change For the device reset state see RST SYSTem CPON card_number Parameter Explanation card_number card number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL OUTPUT Hp5250 SYST CPON ALL Agilent E5250A User s Guide Edition 9 7 45 Command Reference SYSTem CTYPe SYSTem CTYPe This query command returns the ID of the specified card This command has query form only Syntax SYSTem CTYPe card_number Parameter Explanation card_number card number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 Query response HEWLETT PACKARD model 0 revision lt newline gt lt END gt model E5252A or E5255A revision A 01 00 or later version NOTE If designated card is not installed or initialize failed this command returns NONE NONE 0 0 Example OUTPUT Hp5250 SYST CTYPE 1 ENTER Hp5250 A 7 46 Agilent E5250A User s Guide Edition 9 Syntax Query response Example Syntax Query response Example Command Reference SYSTem ERRor SYSTem ERRor This command reads the error from the head of the error queue and removes that error from the queue This command has query form only SYSTem ERRor err_no message lt newline gt lt AEND gt err_no is numeric response data and message is string re
55. E5252A Output Ports Output 1 to 4 are used in the program and should be connected as follows e Output 1 Gate e Output 2 Drain e Output 3 Substrate e Output 4 Source 6 14 Agilent E5250A User s Guide Edition 9 Program List Programming the E5250A Programming Examples 10 Example Creating Connection Channels 20 1 30 INTEGER Complete 40 DIM Channel 100 50 Gate Drain Substrate Source 60 ChannelS 10101 10202 10303 10404 Channels to Create 70 80 Put Instrument Initialization Routine here a0 100 ASSIGN Hp5250 TO 722 Assigns E5250A GPIB address to 722 110 OUTPUT Hp5250 RST 120 OUTPUT Hp5250 ROUT FUNC NCON Sets Normal Config mode 130 OUTPUT Hp5250 ROUT CONN RULE ALL SROU Sets Single rule 140 OUTPUT Hp5250 ROUT CONN SEQ ALL BBM Sets BBM sequence 150 1 160 OUTPUT Hp5250 ROUT CLOS amp Channel Creates channels 170 OUTPUT Hp5250 OPC 180 ENTER Hp5250 Complete 190 200 Put Measurement Routine here 210 220 OUTPUT Hp5250 ROUT OPEN CARD ALL Opens all relays 230 OUTPUT Hp5250 OPC 240 ENTER Hp5250 Complete 250 260 OUTPUT Hp5250 RST 270 1 280 END Line Description Number p 40 Declares data size of Channel which is used as channel _list parameter 60 Defines the desired channel_list 80 Here insert the initialization routine for your measurement instrument 110 Resets the E5250A 120 Sets the E5
56. INPUT 6 and HF2 INPUT 8 and CV2 INPUT 10 For example when IV5 is used HF1 and CV1 cannot be used Agilent E5250A User s Guide Edition 9 5 39 NOTE Controlling the E5250A Using Virtual Front Panel Utility Softkey Menu 1 Softkey Description OPEN Changes the relay state open or close of crosspoint selected by the CLOSE cursor The softkey toggles the state between open and close The E5250A settings are changed in real time If bias mode is ON and cursor is in the row of input bias port this softkey changes the relay state open close and bias disabled Means open means close means bias disabled When bias mode is ON if you disconnect a bias enabled output port from a non bias input port the output port is automatically connected to the input bias port UP Moves the cursor upward LEFT Moves the cursor to the left RIGHT Moves the cursor to the right DOWN Moves the cursor downward MORE Displays more softkeys The displayed softkeys depend on whether cursor selects input Bias Port and Bias Mode is ON See Softkey Menu 2 and Menu 3 on next pages RETURN Displays the previous level of the softkey menu shown previously in To Modify the Settings in Current Setup Memory Moving the Cursor Move the cursor by using the UP DOWN RIGHT LEFT softkeys Do not use arrow keys on the 4155 4156 front panel 5 40 Agilent E5250A User s Guide Edition 9 Control
57. Instrument handle returned from hpe5250a_init statusByte The contents of the status byte are returned in this parameter Agilent E5250A User s Guide Edition 9 8 27 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions hpe5250a_reset This function places the instrument in a default state Before issuing this function it may be necessary to send a device clear to ensure that the instrument can execute a reset A device clear can be issued by invoking hpe5250a_dcl function ViStatus _VI_FUNC hpe5250a_reset ViSession vi vi Instrument handle returned from hpe5250a_init hpe5250a_revision_query This function returns the driver revision and the instrument firmware revision ViStatus _VI_FUNC hpe5250a_revision_query ViSession vi ViChar_VI_FAR driver_rev ViChar _VI_FAR instr_rev vi Instrument handle returned from hpe5250a_init driver_rev Instrument driver revision This is limited to 256 characters instr_rev Instrument firmware revision This is limited to 256 characters 8 28 Agilent E5250A User s Guide Edition 9 Syntax Parameters Remarks VXlplug amp play Driver Driver Functions hpe5250a_selectCompenFile This function specifies capacitance conductance compensation data file used to compensate C G by using hpe5250a_compenC ViStatus _VI_FUNC hpe5250a_selectCompenFile ViSession vi ViString file_name vi Instrument handle returned from hpe5250a_i
58. Length in meters of 16494A cable 1 5 connected from E5252A output to connector plate Clen_usrtriax_h Length in meters of triaxial cable 0 connected from connector plate to DUT High terminal of capacitor Clen_usrtriax_l Length in meters of triaxial cable 0 connected from connector plate to DUT Low terminal of capacitor Clen_usrcoax_h Length in meters of coaxial cable 1 0 connected from connector plate to DUT High terminal of capacitor Clen_usrcoax_l Length in meters of coaxial cable 1 0 Channel E5250A channel_list to use 10905 11006 To change the E5250A input port output port connections change the Channel1 parameter And if you want to change the E5250A connection functions Channel Configuration mode etc modify the Set 5250init subprogram Agilent E5250A User s Guide Edition 9 Executing Sample Programs Vth and Capacitance Measurement Program To use the VFP data upload library If you want to use your VFP data in the program change the program as follows Before executing the program you need to create the VFP data and save it to a file on diskette And you must link the VFP Data Upload Library to the program For details refer to Using the Virtual Front Panel VFP Utility on page 5 4 and Using the VFP Data Upload Library on page 6 22 1 Insert an exclamation mark at the beginning of each program line shown in the following table and enter the lines
59. MODE FUNCTION Source Setup SMU1 vd Id v CONST 5V SMU2 Vg Ig Vv VARI 0 to 5V 50mV step SMU3 Vs Is COMMON CONST Common SMU4 Vsb Isb v CONST OV User Function Setup NAME UNIT DEFINITION SQRTId SQRT Id GRAD DIFF SQRTId Vg VTH V L1X BETA L1G 2 Agilent E5250A User s Guide Edition 9 9 5 Executing Sample Programs Vth and Capacitance Measurement Program Display Setup Xaxis Ylaxis Y2axis NAME Vg SQRTId GRAD SCALE LINEAR LINEAR LINEAR MIN OV 0 0 MAX 5V 200 m 80 m Also the DATA VARIAVLES fields set VTH and BETA Auto Analysis Setup LINE1 TANGENT line on Y1 at a point where GRAD MAX GRAD LINE2 MARKER At a point where GRAD MAX GRAD Interpolate OFF Capacitance Measurement Setup Measurement setup of the E5250A and 4284A for this program is as follows e E5250A E5252A Setup Slot No Channels 1 10905 and 11006 2 not used 3 not used 4 not used e 4284A Setup Measurement Frequency 100 kHz Signal Level 0 03 V Measurement Function Cp G 9 6 Agilent E5250A User s Guide Edition 9 Table 9 3 Executing Sample Programs Vth and Capacitance Measurement Program Setting up the Measurement Environment Before executing the program you need to set up the measurement environment Table 9 3 lists the required equipment Connect the E5250A outpu
60. Meas_vth Test_comm FNGet_vfp_comment Setup_data Setup_num Constant Definition block See Note Meas_vth Connect to DUT block Connect_vfp Setup_data Setup_num See Note Meas_vth Connection All Open block Connect_vfp Setup_data Setup_num See Note Meas_c COM Vfp_com_data Setup_data 14000 Meas_c Constant Definition block Test_comm FNGet_vfp_comment Setup_data Setup_num See Note Meas_c Connect to DUT block Connect_vfp Setup_data Setup_num See Note Meas_c Connection All Open block Connect_vfp Setup_data Setup_num See Note Set5250init COM Vfp_com_data Setup_data 14000 Adrs Adrs5250 CALL Load_vfp_data Adrs VFP_FILE Setup_data CALL Init_vfp_setup Setup_data See Note 4 a You must replace the Setup_num parameter with number of the VFP setup memory to use for Vth measurement b You must replace the Setup_num parameter with number of the VFP setup memory that sets Open All no connection condition c You must replace the Setup_num parameter with number of the VFP setup memory to use for C measurement d In Load_vfp_data subprogram enter your VFP data file name instead of VFP_FILE Your VFP data file must contain data for at least 3 Setup Memories for Vth measurement C mea surement and Open All condition 9 16 Agilent E5250A User s G
61. To use default GPIB address 722 just press the Enter key If not type the GPIB address of your E5250A then press Enter key The main menu of VFP is displayed on the 4155 4156 screen And the E5250A is initially set to settings of setup memory 1 Agilent E5250A User s Guide Edition 9 5 27 Controlling the E5250A Using Virtual Front Panel Utility The following softkeys are displayed on right side of the 4155 4156 screen Softkey Description SHOW For confirming which cards are installed in each E5250A slot CONFIG SETUP For changing the VFP setup mode Channel Configuration mode MODE Bias Port and Bias Mode state When the setup mode is changed all setup data is cleared that is connection data is set so that all relays are open DEFINE For defining labels for the E5250A input ports to be used in LABEL MEMORY SETUP PANEL SETUP For creating connection channels in the E5250A cards When you MEMORY modify any setting of the setup memory the E5250A connection channels are changed in real time SAVE For saving loading the setup data to from diskette LOAD QUIT Quits the VFP utility Confirming the E5250A Card Configurations Select SHOW CONFIG softkey SHOW CONFIGURATION MENU is displayed on the 4155 4156 to show which card is installed in each E5250A slot If card is the E5252A the following comment is displayed E5252A 10x12 Matrix Switch If card is the E5255A a comment sim
62. available for the E5250A Text Conventions The following text conventions are used in this manual Screen Text Represents text that appears on screen of the controller Italic Refers to a related document or is used for emphasis Contents Introduction Agilent E5250A Product Description 0 0 eee eee eee ee 1 3 Front Panel Tour canso Aetna sees Hea Ghee Sa Gotan A 1 4 Rear Panel Tout sesin teak eka G eas Aa a tak meen Sale Rea ees 1 4 shapely baganitiamon tan yatta ena E tandelo td ue hha t en Lane att abe kab neal os 1 5 Agilent E5252A Product Description 0 0 00 eee eee eee 1 6 DN ce Sac S TEIE Nan eet SS te aiken atl aia E oes 1 7 Agilent E5255A Product Description 0 0 0 0 e eee ee eee 1 8 ep Sens tS tA Nien N ce ety giteh oun cum Mgt RNA Cpt odie ue cael Ss 1 11 Options and Accessories 00 cee eee eee eee 1 12 Installation CA eee ARI ee T ee 2 2 To Inspect the E5250A and Accessories 0 c eee eee eee 2 3 Requirement i c4 5 234 bavciigs e bAIRA ASR a As UR Res BLO A RA 2 4 Power Requirements 0 eee e eee eee eee e een eens 2 4 Power Cablen o yucca be ee hie bane be RE RAS Eee Bes 2 4 Operating Environment 0 0 0 0 eee eee cee eee 2 6 Storage and Shipping Environment 0 00 00 0000 e eee 2 6 Installing the F5250A4 onines sete baka fo Eset eek RO OS ee hoe ees 2 7 DA ei eee dee ye tested nce ET Ail ae ET
63. between the instrument GNDU connector and the triaxial connector on the adapter 4 18 Agilent E5250A User s Guide Edition 9 Setting up Measurement Environment Connecting the E5250A Input Figure 4 7 Connection of Triax Dual Triax Adapter eae Agilent E5250A SMU INPUT m SMU INPUT AUX TRIAX DUAL TRIAX RS gt lan EN Adapter S y i A 3 AA beaa E O To From 2 e GND Agilent 16493H Cable By this connection input signal for SMU INPUT connectors is as follows SMU INPUT Port Number Input Signal 1 3 0r5 Force 2 4 0r 6 Sense If you make non Kelvin connection for the E5250A outputs use the odd input port only Because non Kelvin connection uses only Force signal for measurement Agilent E5250A User s Guide Edition 9 4 19 WARNING Figure 4 8 Table 4 4 Setting up Measurement Environment Connecting the E5250A Output Connecting the E5250A Output This section describes how to connect the E5252A and E5255A output to connector plate your test fixture and so on e To Connect the E5252A Output e To Connect the E5255A Output Turn off the E5250A and all instruments connected to the E5250A And do not turn them on until the connection described in this section is completed If you ignore this warning you may be exposed to dangerous voltage To Connect the E5252A Output The E5252A output connector is shown
64. cable Agilent part number 8121 1191 Kelvin connections non Kelvin connections This connection is available only for the effects of cable resistance by connect sense terminal Kelvin connectors This connection can cancel line and force line as close as possible to DUT Following connection is for the Kelvin connectors For the triaxial connectors or the 8 ch shielded connectors ignore SENSE terminal and make connection only for FORCE terminal Measurement results include residual resistance from the connection cable Sg Common Guard Force to DUT Triaxial Common Coaxial cable pur Tiaxial Coaxial cable connector Guard connector Sense J Wire _ lt Insulator lt Plate lt Plate CAUTION Never connect the guard terminal to any output including circuit common chassis ground or the guard terminal of any other unit Doing so may result in an emergency condition Agilent E5250A User s Guide Edition 9 4 13 NOTE Setting up Measurement Environment Mounting Connectors Directly For highly accurate current forcing and measurements while minimizing leakage surround all force and sense lines from SMU by a guard as far as possible and make cables stable by taping For reducing capacitance measurement error tape the cables to any grounded materials such as shielding box If you use probe card groundin
65. center female side e Agilent part number 1250 2405 male side female center female side Interconnection of BIAS INPUT Connectors Agilent E5255A BIAS INPUT 2200v 0 24 8x3 CH MULTIPLEXER G g 0 BNC T adapter lt B i f A To Bias Source ji A BNC cable Agilent E5250A User s Guide Edition 9 2 15 Figure 2 6 Installation Installing the E5250A 96 output multiplexer 1 BIAS input 1 IV input 4 modules To make this multiplexer you need four E5255As eight wires furnished five BNC open caps furnished and three BNC cables The example uses the SMU INPUT connector as the IV input and uses 0 Q resistors 1 See 24 output multiplexer 1 BIAS input 1 IV input 1 module and make four 24 output multiplexers Then the IVin1 cable on all modules must be connected to the SMU1 input connector 2 Install the modules into the mainframe For installing module see To Install Plug in Card on page 2 8 3 Connect BNC open caps to the BIAS INPUT 51 connector of the module in the slot 1 and all BIAS INPUT 52 connectors 4 Connect BNC cables between the following connectors e BIAS INPUT 51 slot 4 and BIAS INPUT 53 slot 3 e BIAS INPUT 51 slot 3 and BIAS INPUT 53 slot 2 e BIAS INPUT 51 slot 2 and BIAS INPUT 53 slot 1 So the BIAS INPUT 53 connector of the module in the slot 4 will be the BIAS in
66. channel_list Channels to bias disable ROUT BIAS CHAN DIS LIST channel_list Returns whether specified channels are bias disabled 1 disabled 0 enabled channel_list Channels to check Agilent E5250A User s Guide Edition 9 12 3 SCPI Command Summary Command Description ROUT BIAS CHAN ENAB CARD card_number Bias enables all channels in the specified card card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL ROUT BIAS CHAN ENAB LIST channel_list Bias enables the specified channels channel_list Channels to bias enable ROUT BIAS CHAN ENAB LIST channel_list Returns whether specified channels are bias enabled 1 enabled 0 disabled channel_list Channels to check ROUT BIAS PORT card_number bias_port Selects which input port is the Bias port on specified card Only for the E5252A card card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL bias_port 1 to 10 ROUT ROUT BIAS PORT card_number BIAS STAT card_number state Returns the input Bias Port number for the specified card Only for the E5252A card card_number For Auto Config mode 0 For Normal Config mode 1 2 3 4 Turns Bias Mode ON or OFF for the specified card card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL State ON o
67. command does not change the self test result For the power on settings see SYSTEM CPON 7 10 Agilent E5250A User s Guide Edition 9 Syntax Query response Semantics Command Reference SRE SRE This command sets the Service Request Enable Register bits 1 enables 0 masks SRE enable_number Parameter Explanation enable_number decimal integer that is the sum of the binary weighted values for the desired bits hexadecimal octal or binary value enable_number lt newline gt lt END gt The Service Request Enable Register consists of 8 bits BitO to Bit7 Bit6 is not defined and is always 0 The Service Request Enable Register determines which bits of the Status Byte Register are enabled The status of the enabled bits are ORed together and the result of OR is output to bit6 Master Summary Status bit of Status Byte Register For details refer to Status Reporting Structure on page 7 48 The following table shows the bits of the Status Byte Register and the binary weighted decimal value of each bit bit pore A description 0 1 not used 1 2 not used 2 4 not used 3 8 not used 4 16 MAV Message Available summary message 5 32 ESB Event Status Bit 6 64 MSS Master Summary Status 7 128 not used Agilent E5250A User s Guide Edition 9 7 11 Example Command Reference SRE The following four lines enable the s
68. create channels 10101 and 10202 6 12 Agilent E5250A User s Guide Edition 9 Programming the E5250A Programming Examples Programming Examples This section provides examples of control programs for the ES250A The programs are written in the HP BASIC language and can be executed without any modifications But the program examples do not include instrument control routines so to make a measurement you need to add the desired routines This section explains the following three examples e Channel Creation Example e Bias Mode Example e Couple Port Example For each example the required conditions program list and program description are given Agilent E5250A User s Guide Edition 9 6 13 Figure 6 1 Required Conditions Programming the E5250A Programming Examples Channel Creation Example The following example is a typical control program for the E5250A with the E5252A which connects instrument output to DUT as shown in Figure 6 1 Bias Mode and Couple Port are not used in this example MOSFET Connection Example a 1 to 20 Instrument t 3 ai an E5252A f Output 2 3 Drai n Substrate Source This program assumes the following conditions E5250A Installed Cards e Slot 1 E5252A e Slot 2 to 4 not used E5250A Input Ports e SMU INPUT to 4 should be connected to instrument e SMU INPUT 5 to 6 not used e AUX INPUTs not used
69. input connector on the E5255A 2 Connect the Vin2 cable to the IVout1 connector 3 Connect the IVin3 cable to the IVout2 connector 4 Set bit 1 to ON 1 and bit 2 thru 4 to OFF 0 for DIP SW1 to SW3 2 14 Agilent E5250A User s Guide Edition 9 Figure 2 5 Installation Installing the E5250A 5 Connect wires between BIASoutl and BIASin2 also between BIASout2 and BIASin3 6 Install the module into the slot 1 of the mainframe For installing module see To Install Plug in Card on page 2 8 7 Connect BNC open caps to BIAS INPUT 52 and 53 connectors So the BIAS INPUT 51 connector will be the BIAS input This example internally connects all BIAS INPUT connectors together So when bias is applied to a BIAS INPUT connector the bias will also be applied to all the other BIAS INPUT connectors Do not forget to connect the BNC open caps to the unused BIAS INPUT connectors Otherwise you will be shocked if you touch the connectors while bias is applied DO NOT connect the BNC short cap to the connectors If you do the E5255A and the Bias Source will be destroyed when the bias is applied To connect BIAS inputs externally You can use the BIAS INPUT connectors instead of the BIASin out internal connections shown above See Figure 2 5 This example uses three BNC cables and two BNC T type f m f adapters Recommended parts for the BNC T type adapters are listed below e Agilent part number 1250 0781 female side male
70. not allowed A string parameter data was received but was not allowed at this point 160 Block data error An error was detected in a block data This error is reported if the E5250A cannot determine more specific errors 161 and 168 161 Invalid block data An invalid block data was received for example an END message was received before the length was satisfied 168 Block data not allowed A legal block data was received but was not allowed at this point 170 Expression error An error was detected in an expression This error is reported if the E5250A cannot determine more specific errors 171 and 178 171 Invalid expression The expression was invalid for example unmatched parentheses or an illegal character 178 Expression data not allowed An expression was received but was not allowed at this point 11 6 Agilent E5250A User s Guide Edition 9 Error Messages Standard SCPI Error Messages Execution Error If syntax of a SCPI command header and parameter is valid but the command cannot be executed due to some condition of the E5250A a 2XX error occurs The error number and message are placed in the error queue and bit4 of the Standard Event Status Register is set Error Number Error Message and Description 200 Execution error Generic execution error that cannot be determined more specifically 220 Parameter error The parameter value is valid but not executable due to some condition of th
71. numeric 123 Exponent too large The magnitude of the exponent for a numeric parameter was larger than 32000 124 Too many digits The mantissa of a decimal numeric parameter contained more than 255 digits excluding leading zeros 128 Numeric data not allowed Numeric data is not allowed in this position for this command 138 Suffix not allowed A suffix was received after a numeric parameter For the E5250A no parameters have suffix 140 Character data error An error was detected in a character parameter This error message is reported if the E5250A cannot determine the more specific errors 141 through 148 141 Invalid character data Either the character parameter contains an invalid character or the particular element received is not valid for the command 144 Character data too long The character parameter contains more than 12 characters Agilent E5250A User s Guide Edition 9 11 5 Error Messages Standard SCPI Error Messages Kitan Error Message and Description 148 Character data not allowed A character parameter is not allowed for this position 150 String data error An error was detected in a string parameter This error is reported if the E5250A cannot determine a more specific error 151 and 158 151 Invalid string data An invalid string parameter data was received for example an END message was received before the terminal quote character 158 String data
72. output buffer are full and the E5250A cannot continue 440 Query UNTERMINATED after indefinite response A query was received in the same program message after a query requesting an indefinite length response was executed Agilent E5250A User s Guide Edition 9 11 9 Error Messages E5250A Specific Error Messages E5250A Specific Error Messages These are the E5250A specific errors that are not defined by SCPI These errors indicate that an E5250A operation did not properly complete due to card channel port or mode errors For the SCPI defined device dependent codes see Device Dependent Errors on page 11 8 For these errors an error number and message are placed in the error queue and bit3 of the Standard Event Status Register is set The E5250A specific error messages have positive error numbers 11 10 Agilent E5250A User s Guide Edition 9 Error Messages E5250A Specific Error Messages E5250A Channel Related Errors Error Number Error Message and Description 2000 2001 Invalid card number Wrong card number is specified in card number or channel list parameter Make sure card is properly installed in the correct E5250A slot Invalid channel number Wrong channel number is specified in the channel list Confirm the channel number the card configuration and the configuration mode of the E5250A 2006 Command not supported on this card Command was used that is
73. returns test result 180 to 260 Executes the Front Panel Interface Test then returns the test result 270 to 340 Executes the Relay Test for the card installed in slot 1 of the E5250A then returns test result 350 to 410 Executes the Relay Test for the card installed in slot 2 of the E5250A then returns test result 420 to 480 Executes the Relay Test for the card installed in slot 3 of the E5250A then returns test result 490 to 550 Executes the Relay Test for the card installed in slot 4 of the E5250A then returns test result Agilent E5250A User s Guide Edition 9 Table 3 3 Executing Self Test and Leak Test Using the Self Test Utility Using the Self Test Utility The Self Test Utility is a Self Test program for the E5250A and runs on the Agilent 4155 4156 s built in IBASIC controller Self Test Utility can execute all Self Test items listed in Table 3 1 and can also execute the Leak Test which checks leakage current of the E5250A with installed cards You execute the Self Test items and Leak Test interactively using softkeys from the 4155 4156 This section explains the operation of the Self Test Utility e Requirements e To Start the Self Test Utility e To Execute Self Test e To Execute Leak Test Requirements The following equipment is required to execute the Self Test Utility Required Equipment Agilent sas Model PartNo Description Qty Usage 4155 o
74. the E5255A 3017 Too many relays closed Max 200 Too many physical relays have been closed To close new relays must open some relays Maximum 200 relays can be closed 3018 Can t change to ACONfig mode Check card config The present card configuration of the E5250A does not allow the Auto Config mode Change the E5250A card configuration to allow Auto configuration mode 3019 Cannot use same port for Couple and Bias Same input port number is specified to be Couple Port and Bias Port Couple Port and Bias Port cannot be the same port Agilent E5250A User s Guide Edition 9 11 13 Error Messages E5250A Specific Error Messages 11 14 Agilent E5250A User s Guide Edition 9 12 SCPI Command Summary SCPI Command Summary This chapter is a quick reference for the SCPI subsystem commands available for Agilent E5250A The commands are in alphabetical order For details about these commands see Chapter 7 For how to specify the channel_list parameter see Chapter 5 Textual Notation for Subsystem Commands Square brackets are used to enclose optional information not required for execution of the command sequence So you can omit the characters in brackets and the command will still execute correctly For example for the ROUTe BIAS PORT command you can execute ROUT BIAS PORT or BIAS PORT which are exactly the same italic font Text you supply For example for card_num
75. the SP_MUX_A program as follows 1 2 Press the RUN function key on the computer The following message is displayed Enter number of devices default 24 Enter the number of devices to be analyzed Default number is 24 Then the following softkeys are displayed Softkey description Idlin Extract Tdc from the Idlin data for all valid devices Gmmax Extract Tdc from the Gmmax data for all valid devices Vtext Extract Tdc from the Vtext data for all valid devices Vtci Extract Tdc from the Vtci data for all valid devices All Extract Tdc for all these parameters for all valid devices End Quit the program Tdc is the time to target The SP_MUX_A program extracts Tdc from the measurement data that was saved by SP_MUX program Tdc is the time when the device parameter reached its termination condition 9 32 Agilent E5250A User s Guide Edition 9 Executing Sample Programs HCI Measurement Program 3 Select softkey for parameter for which you want to extract Tdc Analysis result and Tdc will be displayed on the 4155 4156 screen as shown in Figure 9 9 Then program pauses During pause you can save these results to a 4155 4156 s DAT type file 4 Select Continue function key to continue the program after each graph is displayed If you select the ALL softkey in step 3 the 4155 4156 screen displays the graph for the next parameter of the same device number And then program pauses If
76. used with Agilent 4284A Precision LCR Meter You enter the capacitance data measured by the 4284A and this subprogram returns the compensated value To use this subprogram link it to your program For details refer to Chapter 6 Agilent E5250A User s Guide Edition 9 5 3 CAUTION Controlling the E5250A Methods for Controlling the E5250A VFP Data Upload Library This subprogram library is used to convert the control data created by the Virtual Front Panel VFP Utility to data that can be used with your program runs on HP BASIC To use this library link it to your program For details refer to Chapter 6 Open or close the relay without allowing the output voltage to affect the relay by using the following procedure 1 Disable the output voltage of bias source Connect the relay Enable the output voltage of bias source Make measurements Disable the output voltage of bias source Nw FY DN Disconnect the relay If the relay is opened and output voltage reaches the relay the relay may be damaged or its service life reduced Modifying a Sample Program The sample programs furnished with the E5250A are useful for creating your program on HP BASIC You can create your desired program easily by modifying a sample program To understand the sample programs and how to modify refer to Chapter 9 Also you can use the Capacitance Compensation Routine and the VFP Data Upload Library introduced in Creating Your Own Program
77. was not executed Prepare the relay test adapters before you select CARDn RELAY key Select desired softkey 3 12 Agilent E5250A User s Guide Edition 9 NOTE Executing Self Test and Leak Test Using the Self Test Utility Executing the Controller Test To execute the controller test press the CONTROLLER softkey If F result is displayed after the test the E5250A is defective Contact your nearest Agilent Technologies Service Center Executing the Front Panel Interface Test To execute the front panel interface test do the following 1 Press the FRONT PANEL softkey 2 Confirm that the following four LEDs on the E5250A front panel are blinking And press the Local Self Test key on the E5250A front panel within 10 seconds e Remote LED e System Fail LED e Fail LED e Local Self Test LED Fail Condition for Front Panel Interface Test If an LED does not blink after selecting the FRONT PANEL softkey the LED is defective If you do not press the Local Self Test key within 10 seconds the Fail LED turns on If you pressed Local Self Test key within 10 seconds and the Fail LED still turns on it means the Local Self Test key is defective Contact your nearest Agilent Technologies Service Center Agilent E5250A User s Guide Edition 9 3 13 Executing Self Test and Leak Test Using the Self Test Utility Executing the Relay Test To execute the Relay Test do the following 1 Press the CARDn RELAY soft
78. 1 RETURN Displays the previous level of softkey menu Agilent E5250A User s Guide Edition 9 5 41 Controlling the E5250A Using Virtual Front Panel Utility Saving Loading the Setup Data Select the SAVE LOAD softkey The following softkeys are displayed Softkey Description CATALOG Lists the files of diskette that is in the 4155 4156 internal disk drive SAVE FILE For saving setup data to the diskette that is in the 4155 4156 internal disk drive See below LOAD FILE For loading setup data from the diskette that is in the 4155 4156 internal disk drive See below RETURN Returns to the VFP main menu To save setup data to diskette Select the SAVE FILE softkey The following message is displayed Input Save file name Type the name maximum 8 characters of file to which you want to save the setup data then press the Enter key To cancel this operation press the Enter key without typing the file name To load setup data from diskette Select the LOAD FILE softkey The following message is displayed Input Load file name Type the file name of setup data you want to load then press the Enter key The VFP setup data is loaded into the VFP To cancel this operation press the Enter key without typing the file name After loading the file the E5250A changes to the setting of setup memory 1 5 42 Agilent E5250A User s Guide Edition 9 Programming the E5250A CAUTION Prog
79. 16 multiplexer 1 IV input port is internally connected to SMU2 input port e Both Block2 used together to make 2x16 multiplexer 2 IV input port is internally connected to SMU3 input port e Block3 of Slot3 makes 2x8 multiplexer 1 IV input port is internally connected to SMU4 input port e Block3 of Slot4 makes 2x8 multiplexer 2 IV input port is internally connected to SMU5 input port For the internal connections of the E5255A see Chapter 2 Figure 5 7 Example Setup of E5255A 2x48 Multiplexer 2x8 Multiplexer slot 1 slot 2 slot 3 slot 4 2x8 Multiplexer 2 2x16 Multiplexer 1 2x16 Multiplexer 2 5 22 Agilent E5250A User s Guide Edition 9 Controlling the E5250A Switch Control Basics Table 5 9 Example IV Input Connection and Channel Number One Channel 5 digits IV I Slot Block Input Channel Number 4 digits Configuration No No ih Card Number 8 first 1 digit Input Port No Output Port No next 2 digits last 2 digits 1 1 to3 SMU1 0 IV Input 01 01 to 24 2x48MUX BIAS Input 11 with slot 2 card 2 1 to3 SMU1 0 IV Input 01 25 to 48 2x48MUX BIAS Input 11 with slot 1 card 3 1 SMU2 0 IV Input 02 01 to 08 2xl6MUX 1 BIAS Input 12 with block in slot 4 card 2 SMU3 0 IV Input 03 01 to 08 2x l16MUX 2 BIAS Input 13 with block2 in slot 4 card 3 SMU4 0 IV Input
80. 2 3 or 4 Query response 0 or 1 lt newline gt lt END gt 0 Couple Port Mode is OFF 1 Couple Port Mode is ON Example OUTPUT Hp5250 ROUT COUP STAT ALL ON OUTPUT Hp5250 ROUT COUP STAT 2 ENTER Hp5250 A For above example A will be as follows 1 7 38 Agilent E5250A User s Guide Edition 9 Syntax Example Syntax Query response Example Command Reference ROUTe FUNCtion ROUTe FUNCtion This command sets the channel configuration which determines how you specify the channel_list or card_number in other commands For details refer to Channel List and Channel Configuration in Chapter 5 When configuration is changed by ROUT FUNC all channels are opened disconnected and become same status as after SYSTem CPON ALL command execution At RST this parameter is set to NCONfig ROUTe FUNCtion channel_config Parameter Explanation channel_config ACONfig Auto Config Mode NCONfig Normal Config Mode OUTPUT Hp5250 ROUT FUNC ACON ROUTe FUNCtion This query command returns the present channel configuration For details refer to Channel List and Channel Configuration in Chapter 5 ROUTe FUNCtion ACON or NCON lt newline gt lt AEND gt OUTPUT Hp5250 ROUT FUNC ACON OUTPUT Hp5250 ROUT FUNC ENTER Hp5250 AS In above example AS will be as follows ACON
81. 2 1 Multiplexer Blocks and Components Multiplexer Resistor IVin IVout block holder BLASIN BIA Sont cable connector a Block 1 holder 1 BIASoutl IVin1 TVout1 DIP SW1 Block 2 holder 2 BIASin2 BIASout2 IVin2 TVout2 DIP SW2 Block 3 holder 3 BIASin3 IVin3 TVout3 DIP SW3 Table 2 2 Agilent E5255A Initial Setup Block number IVin cable connection BIASin BIASout Protective resistor 1 SMU1 BIAS INPUT 51 oQ 2 SMU2 BIAS INPUT 52 oQ 3 SMU3 BIAS INPUT 53 00 To Modify IV Input IV input connection is defined by the connection of Vin cable and the setting of DIP switch shown in Figure 2 2 For actual examples of modifications see E5255A Configuration Examples Each DIP switch has four bit switches Bits 1 to 3 are used to specify which SMU input connector is connected to the IV input Bit 4 of DIP switch is used to specify whether the protective resistors are 0 Q or not The DIP switches must be set properly after you complete the internal connection Make sure you set the DIP switches correctly If not dangerous voltages may be applied to unexpected output connectors 2 10 Agilent E5250A User s Guide Edition 9 Figure 2 2 Agilent E5255A Component Locations Module pins SMU input connectors BIT2 2 UJ TES co BIT3 4 BITI 1 0 OFF E BiT4 R 5 DIP SW setting IVin cable connection BIT1 BIT2 BIT3 SMU1 SMU2 SMU3 SMU4 SMU5 SMU6 0 ohm 0 other 1 IVout1 connector
82. 250 DIAG TEST CARD STAT 1 ENTER Hp5250 A DIAGnostic TEST FRA Me CLEar This command clears test result of the specified E5250A test DIAGnostic TEST FRAMe CLEar CONTroller FPANel Parameter Explanation CONTroller Controller test FPANel Front panel interface test OUTPUT Hp5250 DIAG TEST FRAM CLE CONT Agilent E5250A User s Guide Edition 9 7 17 Command Reference DIAGnostic TEST FRAMe EXECute DIAGnostic TEST FRAMe EXECute This command executes the specified E5250A test then returns the test result For more info see Chapter 3 After DIAG TEST FRAM EXEC CONT execution the E5250A status becomes same as after RST command execution After DIAG TEST FRAM EXEC FPAN execution the E5250A status is not changed NOTE The DIAG TEST FRAM EXEC FPAN command requires key input from the front panel If key is not pressed within 10 seconds this test result will be fail Syntax DIAGnostic TEST FRAMe EXECute CONTroller FPANel Parameter Explanation CONTroller Controller test FPANel Front panel interface test Query response test_result lt newline gt lt END gt 1 Fail O Pass Example OUTPUT Hp5250 DIAG TEST FRAM CONT 7 18 Agilent E5250A User s Guide Edition 9 Command Reference DIAGnostic TEST FRAMe STATe DIAGnostic TEST FRA Me STATe T
83. 250A to Normal channel configuration mode 130 Sets the connection rule to Single 140 Sets the connection sequence to Break Before Make 160 Closes relays to create the channels specified by Channel 170 to 180 Waits until the relay closing operation is completed 200 Here insert measurement routine for your measurement instrument 220 to 240 Opens all relays and waits until open operation is completed 260 Resets the E5250A Agilent E5250A User s Guide Edition 9 6 15 Figure 6 2 Required Conditions Programming the E5250A Programming Examples Bias Mode Example The following example shows how to use Bias Mode for the E5255A Example of Bias Mode BIAS Input to Instrument Vv Input Ea j This program assumes the following conditions E5250A Installed Cards e Slot 1 E5255A e Slot 2 to 4 not used E5250A Input Ports e SMU INPUT 1 should be connected to instrument e SMU INPUT 2 to 6 not used e AUX INPUTs not used E5255A Connection e IV Input Connection IVin1 should be connected to the E5250A SMU INPUT 1 e Bias Input Connection BIAS INPUT 51 should be connected to bias source E5255A Output Ports e Block 1 outputs 1 to 8 are used in the program e Block 2 and 3 not used 6 16 Agilent E5250A User s Guide Edition 9 Program List Programming the E5250A Programming Examples
84. 250A to settings of specified setup memory SETUP See later Changes Current Setup Memory to specified setup memory number SETUP Returns to the SETUP MEMORY MENU MEMORY 5 38 Agilent E5250A User s Guide Edition 9 NOTE Controlling the E5250A Using Virtual Front Panel Utility To enter a comment for the setup memory Select the COMMENT softkey The following message is displayed Input comment for this setup memory Max 20 char Type desired comment maximum 20 characters then press the Enter key If you press Enter key without typing a comment comment line is cleared To change the E5250A setup to specified setup memory Select the GOTO SETUP softkey The following message is displayed Input setup memory number to be connected Type the desired setup memory number then press the Enter key Current Setup Memory changes to the specified setup memory and the E5250A changes to the new settings To cancel this operation press the Enter key without typing a number To change the settings in a setup memory Select the CHANGE CHAN softkey A cursor for selecting input output crosspoints is displayed And the following softkeys are displayed for changing the settings of the setup memory Change the setting of the setup memory by using these softkeys Invalid Input Port The following E5250A input port combinations cannot be used for making a setup memory e IV5 INPUT 5 and HF1 INPUT 7 and CV1 INPUT 9 e IV6
85. 255A plug in cards Using Virtual Front Panel Utility describes how to use Virtual Front Panel VFP utility furnished with the E5250A The VFP is for Agilent 4155 4156 users Agilent E5250A User s Guide Edition 9 Table 5 1 Controlling the E5250A Methods for Controlling the E5250A Methods for Controlling the E5250A This section introduces several methods for controlling the E5250A Table 5 1 lists the E5250A control methods and the operating systems on which each control method can be used Summary of Control Methods Operating System Controller Control Method HP BASIC RMB UX pe oeeal asic Refer to workstation workstation PC 4155 4156 Creating Your Yes Yes Yes Yes Chapter 6 Program and 7 Modifying Yes No No No Chapter 6 Sample 7 and 8 Program Using VFP No No No Yes page 5 25 Creating Your Own Program You can create a control program using the SCPI Commands described in Chapter 7 on all the operating systems listed in Table 5 1 Refer to Chapter 6 for how to create the program In an control program which runs on HP BASIC operating system you can use the Capacitance Compensation Routine and the VFP Data Upload Library furnished with the E5250A Capacitance Compensation Routine This routine is an subprogram runs on HP BASIC and is used to compensate for the capacitance measurement error caused by the E5250A when the E5252A is installed This subprogram is
86. 3 4 5 6 7 Loads the 4155 4156 setup file for Vth measurement And sets up the 4155 4156 measurement conditions Creates connection channels in the E5250A for Vth measurement Measures Vth of MOSFET Disconnects the connection channels in the E5250A Judges pass or fail Displays result and measurement data on computer s screen Resets instrument Measures Capacitance 1 eo NDA RF NY Sets up the 4284A measurement conditions Creates connection channels in the E5250A for C measurement Measures capacitance Disconnects the connection channels in the E5250A Compensates the measurement data Judges pass or fail Displays result and measurement data on computer s screen Resets instrument Resets all instruments 9 4 Agilent E5250A User s Guide Edition 9 Vth Measurement Setup Executing Sample Programs Vth and Capacitance Measurement Program Measurement setup of the E5250A and 4155 4156 for this program is as follows e E5250A E5252A Setup Slot No Channels 1 10101 10202 10303 and 10404 2 not used 3 not used 4 not used e 4155 4156 Setup Below is summary of measurement setup saved in E5252 MES file For details of the setup data GET the 1 E5252 MES file using the 4155 4156 and refer to the setup displayed on the 4155 4156 screen Channel Source Setup SMU VNAME INAME
87. 45 pF 3 Low Leakage I V Port lt 123 pF General I V Port C Measurement Error lt 1 0 5 pF 4 C V Port 1 The offset current when OV is applied to all I O channels 2 EMF means Electro Motive Force and these are offset voltages after applying voltage and waiting 5 minutes 3 This is guard capacitance for an I O channel for following conditions Only one E5252A is installed in mainframe and only one I O channel is connected 4 When capacitance compensation routine is used for following measurement conditions Frequency 1 kHz to 1 MHz Measurement Range Maximum 1000 pF Measurement Terminal At the end of Agilent 16495A 001 1 5 m triaxial cable connected to the E5252A output terminal See Using the Capacitance Compensation Routine on page 6 28 Supplemental Data Bandwidth at 3dB lt 10 MHz C V HF Port Relay Contact Life gt 10 times Dry Switching Mode Settling Time lt 3 5 sec to settle to within 400 fA of final value when 10 V is applied Low Leakage I V Port Agilent E5250A User s Guide Edition 9 10 5 Specifications Agilent E5255A 24 8x3 Channel Multiplexer Agilent E5255A 24 8x3 Channel Multiplexer Switch Specifications These are specifications when the E5255A is installed in mainframe In the table the conditions are as follows e A 23 C 5 C 5 to 60 RH e B 5 C to 18 C and 28 C to 40 C 5 to 60 RH e C 28 C to 40 C 60 to 80 RH
88. 493H GNDU cable for direct connection to Connector Plate 4142B SMU SMUI1 to 6 16494C 001 Kelvin Triaxial cable or 16494A 001 Triaxial cable VSU AUXI to4 BNC cable VMU AUXI to 4 BNC cable GNDU SMU to 6 16493H GNDU cable and E5250 60044 Adapter 16493H GNDU cable for direct connection to Connector Plate Intlk 16435A Interlock cable adapter and 16493 Interlock cable for direct connection to Connector Plate 4 16 Agilent E5250A User s Guide Edition 9 S etting up Measurement Environment Connecting the E5250A Input Application Instrument E5250A Agilent Model No Output Connector Input Connector Cable Required C Measurement C Meter High Low CV1 and 2 BNC cable Pulse Input Pulse Generator OUTPUT HF1 or 2 BNC cable Bias Input Figure 4 6 Power Supply OUTPUT In the table above AUXI to 4 BNC cable e AUX means CV1 CV2 HF1 or HF2 connector e The E5250A does not have input connectors for the interlock Connect directly from instrument to the connector plate which has an interlock connector e Can t use Agilent 41422A 41423A HCU HVU of the 4142B with the E5250A e To connect instrument output that uses banana plug to AUX connector use Dual Banana plug to BNC Adapter Agilent part number 1251 2277 Figure 4 6 shows an example of connecting the E5250A to the 4156 Connection Example with Agilent 4156 Agilent E52
89. 50A User s Guide Edition 9 CIH Kelvin Triaxial Cable Triaxial Cable BNC Cable Agilent 4156 INTLK Cable Agilent E5250A CAUTION Setting up Measurement Environment Connecting the E5250A Input To Connect Bias Source to the E5255A Bias Input The E5255A BIAS INPUT connector is a BNC type connector Use BNC cable to connect the bias source to the BIAS INPUT of the E5255A If output terminal of the bias source is a banana plug use a Dual Banana Plug to BNC Adapter Agilent part number 1251 2277 To Connect GNDU to the E5250A Input Ground Unit GNDU of Agilent 4142B Modular DC Source Monitor or Agilent 41501 Expander for Agilent 4155 4156 is usually connected to GNDU connector on the connector plate by using Agilent 16493H GNDU cable This connection allows current over 1A If you want to connect the GNDU through the E5250A to connector plate test fixture or DUT connect the GNDU to the E5250A input as shown below Make sure current to GNDU is less than 1 A if you connect GNDU to the E5250A The maximum input current of the E5250A is 1A Required Parts Agilent r ae Model Part No Quantity Description 16493H 1 GNDU Cable E5250 60044 1 Triaxial to Dual Triaxial Adapter Procedure 1 Connect the adapter to the ES250A SMU INPUT connector 1 amp 2 3 amp 4 or 5 amp 6 as shown in Figure 4 7 2 Connect the GNDU cable
90. 5250A User s Guide Edition 9 8 25 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions hpe5250a_openCard This function will disconnect all input ports from all output ports for the specified card Then if bias mode is ON connects the input bias port to all bias enabled output ports ViStatus _VI_FUNC hpe5250a_openCard ViSession vi Vilnt16 open_cardno vi Instrument handle returned from hpe5250a_init open_cardno Card number 1 card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the automatic configuration mode For the configuration mode see hpe5250a_func hpe5250a_openList This function will disconnect the input ports from the output ports specified by the channel list The parameter openchan_list is an array of integers with each integer representing one channel The last number of the openchan_list should be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 ViStatus _VI_FUNC hpe5250a_openList ViSession vi Vilnt32_VI_FAR openchan_list vi Instrument handle returned from hpe5250a_init openchan_list Channel numbers to disconnect 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 channel number should be 101 in
91. 5250A front panel and the relays on the cards installed in the E5250A Self Test should be executed every day as an operation check before using the E5250A The Leak Test checks leakage current of cards installed in the ES250A Leak Test can be executed by using Agilent 4155 4156 Semiconductor Parameter Analyzer with the Self Test Utility program that is on the E5250A Program Disk furnished with the E5250A Performance Verification The Self Test and the Leak Test cannot be used to verify the specifications of the E5250A E5252A and E5255A To verify the specifications return the E5250A with the cards installed to your nearest Agilent Technologies Service Center The performance verification should be done by service personnel who are trained to service the E5250A and should be performed once a year e Executing Self Test introduces the test items of the Self Test and describes how to execute the Self Test e Using the Self Test Utility describes how to execute the Self Test and the Leak Test interactively from Agilent 4155 4156 semiconductor parameter analyzer 3 2 Agilent E5250A User s Guide Edition 9 Executing Self Test and Leak Test Executing Self Test Executing Self Test The Self Test of the E5250A consists of the following three tests Table 3 1 E5250A Self Test Items Test Item Description Executed by Refer to Controller Checks the operation of Turning on
92. 538 250 V 10 A Cable 8121 1582 8120 4211 Plug JIS C 8303 125 V 12 A Cable 8121 0743 8120 4753 Plug GB 1002 figure 3 250 V 10 A Cable 8120 8376 Plug Israel SI 32 250 V 10 A Cable 8120 5182 Plug SANS 164 1 250 V 10 A Cable 8121 0564 8120 4211 Plug IRAM 2073 10A 250 V 10 A Cable 8120 6870 Plug CNS 10917 2 125 V 10 A Cable 8121 1635 8120 6825 Plug CEI 23 16 250 V 10A Cable 8120 6978 Plug CS 0017 2003 250 V 10 A Cable 8120 8871 8120 0674 8121 1638 Agilent E5250A User s Guide Edition 9 2 5 Installation Requirements WARNING For protection from electrical shock the power cable ground must not be defeated Operating Environment The E5250A must be operated within the following environmental conditions e Temperature 5 C to 40 C 41 F to 104 F e Humidity 5 to 80 RH at 40 C 104 F non condensing e Altitude 0 m to 2000 m Storage and Shipping Environment The E5250A should be stored or shipped in environments within the following limits e Temperature 40 C to 70 C 40 F to 158 F e Humidity 5 to 90 RH at 65 C 149 F e Altitude 0 m to 15 240 m Protect the E5250A from temperature extremes to prevent condensation from forming inside the E5250A 2 6 Agilent E5250A User s Guide Edition 9 WARNING CAUTION NOTE A Installation Installing the E5250A Inst
93. 5A 1 Interlock Cable Adapter 16493J 1 Interlock Cable Procedure 1 Connect interlock connector of instrument to the BNC connector of the 16435A interlock cable adapter by using the BNC cable that is furnished with the adapter 2 Connect the 16435A adapter to the interlock connector by using the 16493J Interlock cable Agilent E5250A User s Guide Edition 9 4 11 NOTE Setting up Measurement Environment Mounting Connectors Directly To Check Interlock Circuit If you use the 4155 4156 you can easily check the interlock circuit as follows 1 2 a Oy ON sey Connect the Intlk connector of the 4155 4156 to your interlock circuit Press System front panel key then select CALIB DIAG primary softkey to display the SYSTEM SELF CALIBRATION DIAGNOSTICS page In the CALIB DIAG field select DIAG secondary softkey In the CATEGORY field select I O PERIPH secondary softkey Move pointer to the 403 INT Interlock LED field Select EXECUTE secondary softkey Confirm the following e LED turns on within 1 sec from when interlock circuit is shorted e LED turns off within 1 sec from when interlock circuit is open To stop the interlock test select STOP secondary softkey 4 12 Agilent E5250A User s Guide Edition 9 Setting up Measurement Environment Mounting Connectors Directly To Connect Connectors to DUT Following figure shows a connection example from the connector to DUT Use low noise coaxial
94. 9 5 9 NOTE Table 5 3 Controlling the E5250A Switch Control Basics Connection Sequence This is only for cards that are set to the Single Route connection rule Refer to Connection Rule on page 5 9 Connection sequence specifies the open close sequence of the relays when changing from an existing connection to a new connection You can specify the connection sequence by using the ROUTe CONNection SEQuence command described in Chapter 7 You can select one of the three connection sequences shown in Table 5 3 for each card installed in the E5250A When an existing connection is changed to a new connection the relays are opened closed as follows Connection Sequence Connection Relay Operation Sequence Break Before Make 1 Disconnect previous route 2 Wait for relays to open 3 Connect new route Make Before Break 1 Connect new route 2 Wait for relays to close 3 Disconnect previous route No Sequence 1 Disconnect previous route 2 Connect new route 5 10 Agilent E5250A User s Guide Edition 9 NOTE Controlling the E5250A Switch Control Basics Bias Mode Connection rule cannot be specified for the input Bias Port which can always be connected to multiple output ports Connection sequence to connect input Bias Port to output ports is always Break Before Make Bias Port and Couple Port cannot be set to the same port number Bias Mode is effective for t
95. Agilent E5250A Low Leakage Switch Mainframe User s Guide i Agilent Technologies Notices Agilent Technologies 1995 2008 No part of this manual may be reproduced in any form or by any means including elec tronic storage and retrieval or translation into a foreign language without prior agree ment and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number 5250 90000 Edition Edition 1 October 1995 Edition 2 January 1997 Edition 3 August 1997 Edition 4 January 2000 Edition 5 May 2000 Edition 6 January 2001 Edition 7 August 2003 Edition 8 July 2005 Edition 9 May 2008 Agilent Technologies Inc 5301 Stevens Creek Blvd Santa Clara CA 95051 USA Warranty The material contained in this docu ment is provided as is and is sub ject to being changed without notice in future editions Further to the max imum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a par ticular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connec tion with the furnishing use or per formance of this document or of any information contained herein Should Agilent and the user have a separate wr
96. Agilent E5250A User s Guide Edition 9 10 11 Contents Status Reporting Structure 0 0 Status Reporting Structure 00 Status Byte Register 0 0004 Service Request Enable Register Standard Event Status Register Standard Event Status Enable Register Output Queue een eta tweens ae E E VXIplug amp play Driver System Requirements 0 000 00008 Installing VXIplug amp play Driver 4 Driver Functions 0 0 0 cece eee eee eee eee Executing Sample Programs Vth and Capacitance Measurement Program IntroducttOn 2 2 0 5 Sache dt ees a a Setting up the Measurement Environment Executing the Program 0 eee nrun Modifying the Program 0 000s sees HCI Measurement Program Introducton 4 i 0 EERE E AAE ee reac Adding the Bias Source Control Routine Setting up the Measurement Environment Executing the Program 0 eee eeee Modifying the Program 0 0 0 0 0 ee eee Specifications Error Messages Agilent E5250A User s Guide Edition 9 Contents 5 Contents 12 SCPI Command Summary Conients 6 Agilent E5250A User s Guide Edition 9 Introduction Introduction This chapter gives an overview of Agilent E5250A E5252A and E5255A
97. COUP PORT ALL 1 3 OUTPUT Hp5250 ROUT COUP PORT 1 ENTER Hp5250 AS In above example AS will be as follows y3 7 36 Agilent E5250A User s Guide Edition 9 Command Reference ROUTe COUPIle STATe ROUTe COUPIle STATe NOTE This command applies only to the E5252A card The Couple Port function is not available for the E5255A card This command controls the Couple Port Mode for the specified card For details refer to Couple Ports in Chapter 5 To set up the couple ports refer to ROUT COUP PORT At RST the value of this parameter is OFF Syntax ROUTe COUPle STATe card_number state Parameter Explanation card_number card number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL State ON or 1 turn ON the Couple Port Mode OFF or 0 turn OFF the Couple Port Mode Example OUTPUT Hp5250 ROUT COUP STAT ALL ON Agilent E5250A User s Guide Edition 9 7 37 Command Reference ROUTe COUPIe STATe ROUTe COUPIle STATe NOTE This command applies only to the E5252A card The Couple Port function is not available for the E5255A card This query command returns the Couple Port Mode of the specified card For details refer to Couple Ports in Chapter 5 Syntax ROUTe COUPle STATe card_number Parameter Explanation card_number card number For Auto Config mode 0 For Normal Config mode 1
98. Cable Connecting 1251 2367 Connector Frame female E5255A output 1251 0179 Coaxial Connector female 8ea required for one frame 0380 3070 Screw 2ea required for one frame 2260 0002 Nut 2ea required for one frame 2190 0913 Washer 2ea required for one frame 8121 1191 Low Noise Coaxial Cable Table 4 2 Dimensions of Connector Holes Kelvin Triaxial Connector in mm Triaxial Connector in mm 14 il 11 14 ais 28 cA of e DID ot 2 11 3 3 2 2 M3x0 5 8 Channel Shielded Coaxial Connector in mm Interlock Connector in mm 63 5 1 8 59 N f 82 Ao t erle e a Ge 2 23 __4 R15 dl ar Agilent E5250A User s Guide Edition 9 4 7 Figure 4 2 WARNING Setting up Measurement Environment Mounting Connectors Directly To Make Interlock Circuit The interlock circuit is to prevent electric shock when touching measurement terminals You must install an interlock circuit on shielding box to prevent dangerous voltages when door of the shielding box is open Figure 4 2 shows the pin assignments of the interlock connector mounted on your own connector plate or test fixture Interlock Connector Pin Assignments m interlock switch E o 9 UGIO1042 90 65 la plug side view of Intik terminal bo wiring side view of Intik terminal Dangerous voltages of up to the maximum voltage of SMUs may be present at force guard and sense terminals when the interlock ter
99. D is on pressing this key releases the E5250A from remote GPIB control by an external controller If Remote LED is off pressing this key executes the Relay Test Before pressing this key make sure the Relay Test Adapter is connected For details of Relay Test refer to Chapter 3 During Relay Test execution the LED in this key is ON Turns on when the E5250A is in the GPIB remote status Turns on if system error occurs in the E5250A Contact your nearest Agilent Technologies Service Center Turns on if the E5250A fails Self test including Relay Test If this LED turns on after executing Relay Test a plug in card may be defective And if this LED turns on after turning the E5250A on again the E5250A is defective If so contact your nearest Agilent Technologies Service Center Rear Panel Tour Rear panel of the E5250A is shown in Figure 1 2 The E5250A has 4 slots for installing plug in cards and 10 input connectors for connecting measurement cables from instruments SMU INPUT 1 4 SMU INPUT connectors are for semiconductor dc characteristics measurements The E5250A has six SMU INPUT ports which are triaxial type connectors The connectors can also be used for a maximum three Kelvin connection inputs by coupling two ports as follows SMU INPUT and 2 SMU INPUT 3 and 4 SMU INPUT 5 and 6 Agilent E5250A User s Guide Edition 9 CAUTION Figure 1 2 A AUX INPUT Introduction Agilent E5250A Product De
100. E 247 To Install Plug in Card noces cedadi ir eee eee 2 8 To Install Blank Panel 0 ee eee eee 2 9 To Configure E5255 A ersen ee See bone Shee Siac Sin alee bs 2 10 bee ere ee aE re ERE oe ee RET oe 2 11 Yer A NEO E AN oar ee ent re Sn A 2 12 E5255A Configuration Examples 0 000 e eee eee eee 2 13 To Set GPIB Addtess o 5 ire ncb see a seth eeae dese ede aa dn 2 17 To Connect GPIB Cable 0 00 2 17 Agilent E5250A User s Guide Edition 9 Contents 1 Contents Maintenance 26 2405 ie droge dc ee ts NE EN Ae Bl Shoah A fie ett e 2 18 Performance Verifications senese ebene eee eee ees 2 18 Cleaning pae ot dee See et E urls bl ye bape EETA E EEE ees 2 18 3 Executing Self Test and Leak Test Executing Sel Test as euet eea e beeen Hie Sat eek ROE A Sass ete 3 3 To Execute Self Test Standalone 0 0 0 3 4 To Execute Self Test using External Controller 0 4 3 6 Using the Self Test Utility sinn eee EAER 3 10 Requirements eee a oi eae E EE E Be iw athe he ate hele ta bategd 3 10 To Start the Self Test Utility 0 ee eee 3 11 To Execute Self Test sin cites neta shes wd eae ae Ae 3 12 To Ex cute Leak Test mesiac incir ye a weenie E ee E 3 15 4 Setting up Measurement Environment Connector Plates esate eena en a E Ss E O EE E eee S 4 3 Connector Plates for the E5252A 0 0 0 eee eee 4 3 Connector Plates for E5255A 1 0 eee eee 4 3 Blan
101. E5250A with installed cards to your nearest Agilent Technologies Service Center to do the Performance Verification 2 8 Agilent E5250A User s Guide Edition 9 Installation Installing the E5250A Figure 2 1 Module Extractor and Location of the Screw Hole Agilent E5252A Screw Hole for Module Extractor Module Extractor Agilent E5255A To Install Blank Panel CAUTION To prevent thermal damage to the E5250A cards be sure that blank panels Agilent part number E5250 60003 are installed in all unused slots If the blank panel is not installed to cover an unused slot install the blank panel as follows 1 Align the blank panel over the unused slot 2 Screw in the screws on the left and right edges of the blank panel by using the wrench furnished with the E5250A Agilent E5250A User s Guide Edition 9 2 9 Installation Installing the E5250A To Configure E5255A The Agilent E5255A has three 2 input 8 output multiplexers You can configure several multiplexers by modifying some internal connections Component locations on the E5255A are shown in Figure 2 2 and the relationship of the multiplexer blocks and the components is shown in Table 2 1 Table 2 2 shows the initial setting of the E5255A internal connections The setting does not depend on the slot in which the module is installed Table
102. Each specified channel consists of five digits as follows Card Number One digit decimal number 0 to 4 Specifies the slot number of the card that you want to control Depends on Channel Configuration mode Refer to Table 5 2 Channel Number Four digit decimal number First two digits specifies input port Last two digits specifies output port Depends on type of card and Channel Configuration mode Refer to E5252A Channel List on page 5 15 and E5255A Channel List on page 5 19 5 6 Agilent E5250A User s Guide Edition 9 Table 5 2 NOTE Controlling the E5250A Switch Control Basics Card Number ag per ale Slot No Card is Installed Card No Normal Configuration 1 1 2 2 3 3 4 4 Auto Configuration 1 to 4 0 In the channel _list as follows you can specify multiple channels by using comma or colon Comma use between each specified channel as in following examples e 10101 101 102 10103 means 10101 10102 and 10103 e 10112 10202 means 10112 and 10202 e 11010 201 Colon use to speci e 10101 101 102 means 11010 and 20102 fy a range of channels as in following examples 103 means 10101 10102 and 10103 e 10112 10202 means 10112 10201 and 10202 e 11012 201 102 means 11012 20101 and 20102 As shown in last two examples you can specify a range across input ports and card slots In the Auto Configuration mo
103. Edition 9 Table 5 5 NOTE Controlling the E5250A Switch Control Basics E5252A Channel List This section describes how to define the channel_list specifically for the E5252A For the basic syntax of the channel_list see Channel List and Channel Configuration on page 5 6 Normal Configuration Mode To specify a channel you use five digits as shown in Table 5 5 Specifying E5252A Channels in Normal Config Mode One Channel 5 digits slot NG Channel Number 4 digits E5252A is installed Card Number J first 1 digit Input Port No Output Port No next 2 digits last 2 digits 1 1 01 to 10 01 to 12 2 2 01 to 10 01 to 12 3 3 01 to 10 01 to 12 4 4 01 to 10 01 to 12 Card Number One digit 1 to 4 E5250A slot number in which card is installed Channel Number Four digits XXYY e XX input port number 01 to 10 e YY output port number 01 to 12 Channel Number assignment is shown in Figure 5 4 For the following two cases three ports share one input path Do not specify two of the input ports at same time e SMUS HF1 and CV1 Input Port No 05 07 and 09 e SMU6 HF2 and CV2 Input Port No 06 08 and 10 For example if you specify input port 05 then you cannot specify input ports 07 and 09 You can specify 05 and 06 at the same time Agilent E5250A User s Guide Edition 9 5 15 Controlling the E5250A Switch Control Basics E5252A Channel Number in Normal Config
104. L State ON or 1 turn ON Couple Mode OFF or 0 turn OFF Couple Mode 12 6 Agilent E5250A User s Guide Edition 9 SCPI Command Summary Command Description ROUT COUP STAT card_number Returns Couple Mode of specified card 0 Couple Mode is OFF 1 Couple Mode is ON card_number For Auto Config mode 0 For Normal Config mode 1 2 3 4 ROUT FUNC channel_config ROUT FUNC Sets the channel configuration mode channel_config ACON Auto Config Mode NCON Normal Config Mode Returns present channel configuration ACON Auto Config Mode NCON Normal Config Mode ROUT OPEN CARD card_number Disconnects all input ports from all output ports for specified card card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL ROUT OPEN LIST channel_list Disconnects the input ports from output ports as specified in channel_list channel_list Channels to open ROUT OPEN LIST channel_list Returns whether specified channels are opened 0 channel is closed connected 1 channel is opened disconnected channel_list Channels to check SYST CCON card_number Returns the card configuration information E5252A no info returned E5255A input port and resistance info for each block card_number 1 2 3 or 4 Agilent E5250A User s Guide Edition 9 12 7 SCPI Command Summary C
105. MU1 input connector on the E5255A 2 Connect the IVin2 cable to the Vout connector 3 Connect the Vin3 cable to the Vout2 connector Agilent E5250A User s Guide Edition 9 2 13 Figure 2 4 Installation Installing the E5250A 4 Set bit 1 to ON 1 and bit 2 thru 4 to OFF 0 for DIP SW1 to SW3 5 Install the module into the slot 1 of the mainframe For installing module see To Install Plug in Card on page 2 8 24 output multiplexer 1 BIAS input 1 IV input 1 module To make this multiplexer you need a E5255A two wires furnished and two BNC open caps furnished See Figure 2 4 for example setup The example uses the SMU INPUT connector as the IV input and uses 0 Q resistors 24 output multiplexer 1 BIAS input 1 IV input 1 module _ N oO s WO o gt a Dj gt 3 3 3 2 NIn NIM NIM i ee Ee IVin2 cable IVin3 cable 2 win ca mi Our cit IVin1 cable a IVout1 IVout2 4 Block 1 Block 2 Block 3 BIASin3 iA nee oA TTT oO00 do00000 Ma 12345678 9 10111213 1415 16 171819 2021 22 23 24 BIASout1 BIASout2 1 Connect the IVin1 cable to the SMU1
106. OLATE ON DIRECT 200 u A 150 u eee aay i fui CURSOR HARKER l NJ SKIP EE oe AUTE ANALY 7 315 0 0g go 00 CURSOR O 00 Y Y 500 m foiyv 5 00 DEF I AXIS HARKER LINE SCALING pISPLAY SWEEP TIMING CONST v1 CURSOR SETUP SETUP SETUP SETUP Figure 9 8 HCI Degradation Test Result Example GRAPH LI S amp T GRAPH G amp S MEDI Ut 9400TO4 08 10PM HG Gmman Shifti Streiaqgooosec Devi cesil MARKER aml NT 292 osi7raggous SER i MARKER 100 Mi Ne WAX I NTER GmSFT POLATE OFF decade ldi Cer MAREER SKIP AUTO ANALY B18 ioaq m CURSOR 10 0 Slress satj decade fdiw 10 0k OFF I MAREE Af LI NE SCALING DI SPLAY SWEEP TI MING CONST CURSOR SETUP SETUP SETUP SETUP Agilent E5250A User s Guide Edition 9 9 31 Executing Sample Programs HCI Measurement Program To Execute Analysis Program Before running the program do the following 1 2 Insert the E5250A Program Disk into the computer s disk drive Specify the mass storage device disk drive the program disk is inserted by using MSI statement For example if the device is CS80 702 1 enter the following command MSI CS80 702 1 Get the SP_MUX_A program from the program disk GET SP_MUX_A Eject the program disk Insert the diskette which saves test result data into the computer s disk drive Specify the directory which stores the test result data files For example if the directory is test_data enter MSI test_data Execute
107. Register TOTI 7 B 4 3 2 1 0 SRE SRE PG04003 120x120 7 52 Agilent E5250A User s Guide Edition 9 Command Reference Standard Event Status Register Standard Event Status Register The Standard Event Status Register has specific events assigned to specific bits Refer to Figure 7 4 and Table 7 2 Figure 7 4 Standard Event Status Register of E5250A wv F 5 5 o Ww wg 5 a m Lo oO co OL te oo Ss O T z oo o i yA oO 3z 7 E aisn S fe ir SS 2 E 2 oe O Zz oO PONUROCMEEXEPDEQYERQCbpc Standard Event 71615 4 3 2 4 0 Status Register Pee ESR Logical OR Standard Event amp Status Enable Register PONURQCMEIEXE DDEIQYER QCjOPC ESE 6 5 4 2 4 9 ESE Summary Message Event Summary Bit ESB Bit 5 of Status Byte Register QF pg04004 100x100 Agilent E5250A User s Guide Edition 9 7 53 Command Reference Standard Event Status Enable Register Table 7 2 Standard Event Status Register of E5250A Bit Definition Explanation 0 Operation Complete This event bit has meaning only if a request OPC to monitor is set by the OPC command Refer to OPC on page 7 9 This bit is set to 1 if there are no pending operations 1 Not Used Always 0 2 Query Error QYE e An atte
108. S 02 26PM d ud Measurement MARKER MARKERS 5 490 W 3 915648 M i ON LA MARKER 10 0m Mi NY MAX I NTER io POLATE OFF A DI RECT E MARKERI toem CURSOR idiv Ve 4 AA MARKER SKIP ae AUTO ANALY 515 0 00 CURSOR o oa YOD gw s00 m div 7 00 OFF MARKER ILI NE SCALING DISPLAY SWEEP Tl MI NG CONST CURSOR SETUP SETUP SETUP SETUP 9 28 Agilent E5250A User s Guide Edition 9 Executing Sample Programs HCI Measurement Program To Execute HCI Test Program 1 Load the HCI test program SP_MUX in this example and press RUN function key Then the following message is displayed on the computer screen Enter directory name for saving data default test_data Type the name of directory for saving HCI test data and press ENTER key After executing the program test data is saved to the directory in the diskette If you press ENTER key with no input the test data will be saved in test_data directory After this operation the Ib Vgs measurement is automatically executed and the measurement results are displayed on the 4155 4156 as shown in Figure 9 6 Also the program automatically extracts the gate stress voltage Vgst r which will be used later for stress testing Remove the device used to determine Vdst r and Vgst r after the following message is displayed Connect HCI d
109. This entry point passes the string in cmd_str followed by a space and then the real in value Note that either an Real32 or 64 can be passed as the Real32 will be promoted ViStatus _VI_FUNC hpe5250a_cmdReal ViSession vi ViString cmd_str ViReal64 value vi Instrument handle returned from hpe5250a_init cmd_str Instrument command cannot exceed 256 bytes in length value Parameter for command 1E 300 to 1E 300 hpe5250a_cmdReal64Arr_Q This function passes the cmd_str string to the instrument This command expects a response that is a definite arbitrary block of 64 bit reals You specify the cmd_str and size parameters and get result and count ViStatus _VI_FUNC hpe5250a_cmdReal64Arr_Q ViSession vi ViString cmd_str Vilnt32 size ViReal64 _VI_FAR result ViPInt32 count vi Instrument handle returned from hpe5250a_init cmd_str Instrument command cannot exceed 256 bytes in length size Size of result number of items in the array 1 to 2147483647 result Response from instrument count Count of valid items in result 8 16 Agilent E5250A User s Guide Edition 9 Syntax Parameters Syntax Parameters VXlplug amp play Driver Driver Functions hpe5250a_cmdReal64_Q This function passes the cmd_str string to the instrument This command expects a response that can be returned as a 64 bit real ViStatus _VI_FUNC hpe5250a_cmdReal64_Q ViSession vi ViString cmd_str ViPReal64 result vi Ins
110. alling the E5250A This section describes how to install the E5250A e To Install Plug in Card e To Install Blank Panel e To Configure E5255A e E5255A Configuration Examples e To Set GPIB Address e To Connect GPIB Cable To prevent electrical shock turn off the mainframe and remove the power cable before starting the instruction Be careful about the module pins used for internal connection to the mainframe The pins can be damaged easily Use clean handling and anti static procedures when removing configuring and installing the modules The modules contain components that can be damaged by static electricity Plug in module is shipped from the factory after the specifications are confirmed Agilent can guarantee that the modules will function and that the module performance is designed to meet its specifications However if you have any trouble contact your nearest Agilent Technologies service center If you require that the modules be guaranteed to their specifications for ISO compliance etc then you must perform a calibration on the instrument modules and mainframe together For calibration contact your nearest Agilent Technologies service center Agilent E5250A User s Guide Edition 9 2 7 CAUTION Installation Installing the E5250A To Install Plug in Card The E5252As and E5255As are plug in cards modules You install these cards in card slots 1 to 4 of the E5250A Th
111. am to change the following parameters in the Init_setting subprogram Parameter Description Default Hpib_sc GPIB select code 7 Ad415x GPIB address for the 4155 4156 17 Ad4284 GPIB address for the 4284A 24 Ad5250 GPIB address for the E5250A 22 To change the header of the measurement result report You can EDIT to change the following parameters in the Init_setting subprogram This is for header of report displayed on the computer For the display example refer to Figure 9 2 Parameter Description Default Usercomm Header comment title of the report Vth C Meas Sample Program Test_num Initial number for numbering the test 0 item If value is 0 the first test item will be number 1 Agilent E5250A User s Guide Edition 9 Executing Sample Programs Vth and Capacitance Measurement Program To output the measurement report to printer You can EDIT to change the following parameters in the Init_setting subprogram Printer must be connected to computer by using GPIB cable The report as shown in example in Figure 9 2 will be printed automatically Parameter Description Default Ad_prn GPIB address for printer 1 Prn_enab Enable disables print out function 0 1 Enable 0 Disable To execute the 4155 4156 calibration Remove the exclamation marks from program lines shown below and enter the lines These lines are in Init__instrument subprogram The cal
112. ame bits bit 4 and 5 OUTPUT Hp5250 SRE 48 OUTPUT Hp5250 SRI Gl OUTPUT Hp5250 SRI Gl OUTPUT Hp5250 SRI The following is example for query OUT Gl PUT Hp5250 SRE EN ER Hp5250 A 7 12 using decimal numeric B110000 using binary numeric Q60 using octal numeric H30 using hexadecimal numeric Agilent E5250A User s Guide Edition 9 Syntax Query response Semantics Example Command Reference STB STB This query command reads the Status Byte Register reads Master Summary Status bit not Request for Service Message For bit6 this command reads MSS not Request for Service RQS Refer to Status Reporting Structure on page 7 48 STB register lt newline gt lt AEND gt Parameter Explanation register decimal integer value that is the sum of the binary weighted values for the set bits The following table shows the bits of the Status Byte Register and the binary weighted decimal value of each bit bit ah description 0 1 not used always 0 1 2 not used always 0 2 4 not used always 0 3 8 not used always 0 4 16 MAV Message Available summary message 5 32 ESB Event Status Bit 6 64 MSS Master Summary Status 7 128 not used always 0 OUTPUT Hp5250 STB ENTER Hp5250 A Agilent E5250A User s Guide Edition 9 7 13
113. ample Syntax Parameter Example Programming the E5250A Using the VFP Data Upload Library VFP Data Upload Library VFP Data Upload Library is an subprogram library used for loading data that was made and saved by the Virtual Front Panel utility to your program The library contains the following four subprograms The library runs on HP BASIC Load_vfp_data subprogram Loads data file that was created and saved by Virtual Front Panel utility to your program The file contains all data from the 24 Setup Memories and setup mode data for initializing the E5250A Load_vfp_data Address_5250 LOAD_FILE Setup_data Address_5250 GPIB address of the E5250A LOAD_FILE File name of data you want to load Setup_data Data string for internal use in the library Must declare 14000 byte data size CALL Load_vfp_data 722 MAT48_1 Mat48_dataS Init_vfp_setup subprogram Initializes the E5250A based on the setup mode data loaded by the Load_vfp_data subprogram This subprogram sets the following parameters e Configuration Mode Auto or Normal e Connection Rule Free e Connection Sequence Break Before Make e Bias State Bias Mode ON OFF for each card e Input Bias Port for each card This subprogram must be entered before the Connect_vfp subprogram Init_vfp_setup Setup_data Setup_data Data string for internal use in the library Must declare 14000 byte data size CALL Init_vfp_setup Mat48_data Agi
114. ard For details refer to Connection Rule in Chapter 5 ROUTe CONNection RULE card_number Parameter Explanation card_number card number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 FREE or SROU lt newline gt lt END gt OUTPUT Hp5250 ROUT CONN RULE ALL SROU OUTPUT Hp5250 ROUT CONN RULE 1 ENTER Hp5250 AS In above example AS will be SROU 7 32 Agilent E5250A User s Guide Edition 9 Syntax Example Command Reference ROUTe CONNection SEQuence ROUTe CONNection SEQuence This command specifies the connection sequence mode which is the open close sequence of the relays when connection route is changed from an existing connection to a new connection For details refer to Connection Sequence in Chapter 5 The connection sequence is used only for cards that have been set to SROUte connection rule Refer to ROUTe CONNection RULE At RST BBMake is selected ROUTe CONNection S EQuence card_number sequence Parameter Explanation card_number card number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL sequence NS BB MBBR Make Before Break mode EQ No Sequence mode Break Before Make mode OUTPUT Hp5250 ROUT CONN SEQ ALL MBBR Agilent E5250A User s Guide Edition 9 7 33 Syntax Query response Example Command Refere
115. asic Microsoft Visual C Borland C Builder National Instruments LabWindows or LabVIEW or Agilent VEE It must be supported by the VISA I O library GPIB IEEE 488 Interface and 32 bit VISA I O Library Agilent GPIB interface with Agilent IO Libraries or equivalent Computer and peripherals Required specifications depend on the application development environment See manual of the application development environment The flexible disk drive is required to install the VXIplug amp play driver The CD ROM drive is required to install the software needed to use driver Minimum disk space 2 MB for 4155 4156 driver 1 MB for E5250A driver Agilent E5250A User s Guide Edition 9 8 3 VXIplug amp play Driver Installing VXlplug amp play Driver Installing VXIplug amp play Driver The installation flow is shown below If you have already installed the GPIB interface card VISA I O library and programming software on your PC skip steps 1 through 4 1 Install the GPIB interface card into your PC See the interface card manual Note the model number of the interface card as you may need it to configure the interface in step 3 Install VISA I O library Follow the instructions in the I O library s setup program Configure and check the GPIB interface See the I O library manual Install the programming software Follow the setup program instructions Install the VXIplug amp play driver as shown below a Inser
116. asurement cable length and capacitance Agilent E5250A User s Guide Edition 9 4 23 Table 4 6 Setting up Measurement Environment Measurement Cable Length Guard Capacitances of E5250A Measurement Environment Typical Cable Guard Connection Agilent Model Part No Length Capacitance from SMU to 16494A 003 for non Kelvin 80 cm 75 pF E5250A 16494B 003 for Kelvin 80 cm 90 pF 16494C 001 for 4142B 1 5m 140 pF E5250A and E5252A only card is installed 145 pF Plug in Card E5252A more 1 card 8 pF extra card E5255A only card is installed z 180 pF E5255A more 1 card 60 pF extra card from Card 16494A 001 for non Kelvin 1 5m 125 pF Output to 7 Connector 16494A 002 for non Kelvin 3m 240 pF Plate 16494B 001 for Kelvin 1 5m 140 pF 16494B 002 for Kelvin 3m 260 pF 16494C 001 for 4142B 1 5m 140 pF 16494C 002 for 4142B 3m 260 pF 16494D 001 1 5m 125 pF 16494D 002 3m 240 pF 16494E 003 3m 240 pF from Agilent Part No 8121 1191 Xm 130 pF per m Connector Plate to DUT 4 24 Agilent E5250A User s Guide Edition 9 Controlling the E5250A Controlling the E5250A This chapter explains how to control Agilent E5250A 5 2 Methods for Controlling the E5250A introduces several methods for controlling the E5250A Switch Control Basics introduces basic information for controlling the relay switches on the E5252A and E5
117. ational safety standards this instrument is equipped with a three wire power cable When connected to an appropriate ac power outlet this cable grounds the instrument frame The type of power cable shipped with each instrument depends on the country of destination Refer to the following table for the part numbers of the power cables available If the plug on the cable does not fit the power outlet or the cable is to be attached to a terminal block cut the cable at the plug end and re wire it This work should be performed by a qualified electrician all local electrical codes being strictly observed The color coding used in the cable will depend on the cable supplied If a new plug is to be connected it must meet local safety requirements and include the following features e Adequate load carrying capacity refer to Chapter 10 Specifications e Ground connection e Cable clamp 2 4 Agilent E5250A User s Guide Edition 9 Installation Requirements Plug BS 1363 A 250 V 10 A Cable 8120 4420 8120 1351 Plug AS 3112 250 V 10A Cable 8120 4419 8120 1369 Plug CEE 7 sheet VII 250 V 10 A Cable 8120 4519 8120 1689 Plug NEMA 5 15P 125 V 10 A Cable 8120 6825 8120 1378 8120 1395 Plug NEMA 6 15P 250 V 10 A Cable 8120 3996 8120 0698 Plug SEV 1011 250 V 10 A Cable 8120 2104 Plug SR 107 2 D1 250 V 10 A Cable 8120 2956 Plug IS 1293 and IS 6
118. ber you enter an allowed card number Also used to represent response data 12 2 Agilent E5250A User s Guide Edition 9 SCPI Command Summary Command Description DIAG TEST CARD CLE card_number T Clears relay test result pass fail of specified card card_number 1 2 3 4 or ALL DIAG TEST CARD EXEC card_number Executes relay test then returns result 1 fail card exists 0 pass card_number 1 2 3 4 or ALL DIAG TEST CARD STAT card_number Returns most recent relay test result 1 fail 0 pass 1 not tested card_number 1 2 3 4 DIAG T FRAM CLE unit E uv H Clears specified test result unit CONT controller test or FPAN front panel interface test DIAG T E wn H FRAM EXEC unit Executes specified test then returns test result 1 fail 0 pass unit CONT controller test or FPAN front panel interface test DIAG TI FRAM STAT unit E wn H Returns most recent test result of specified test 1 fail 0 pass 1 not tested unit CONT Controller test FRAN Front panel interface test ROUT BIAS CHAN DIS CARD card_number Bias disables all channels of specified card card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL ROUT BIAS CHAN DIS LIST channel_list Bias disables the specified channels
119. card installed in slot 4 of the ES250A may be defective Or if card is the E5255A the internal cable connection or the DIP switch setting may be wrong 3011 Bad couple port number For the Input Port No for Couple Port only 1 3 5 7 or 9 are allowed 3012 Bad bias port number For Input Port No for Bias Port only to 10 are allowed 11 12 Agilent E5250A User s Guide Edition 9 Error Messages E5250A Specific Error Messages Error Number Error Message and Description 3013 Cannot connect multiple channels in SROUTe mode Incorrect channel list for Single connection rule For Single connection rule an input port cannot be connected to multiple output ports and an output port cannot be connected to multiple input ports Change channel list or change connection rule to Free 3014 Cannot directly specify Bias Port channel Incorrect channel number when Bias Mode ON is specified in the channel list Cannot directly specify the channel number for the Bias Port 3015 Bad channel number combination on E5252A card Wrong input port combination is specified in the channel list for the E5252A card For input ports can specify only one of input port numbers 5 7 and 9 and only one of input port numbers 6 8 and 10 For example channel list cannot specify input ports 5 and 7 3016 Config error Re install E5255A May be problem with the E5255A installation Re install
120. case that you selected Idlin softkey in step 3 the following is saved to the file e Number of devices e Vadstr Vgstr Gate length Gate width e Idlin e Device Validity Tdc_idlin First device number 0 or 1 Extracted Tdc for the device Last device number 0 or 1 Extracted Tdc for the device e Averaged Tdc_idlin Calculated average Tdc For the above 0 means valid and 1 means invalid Following is an actual example for this case 4 Sy 1 95 1 E 60 1 B 5 Idlin Device Validity Tdc_idlin 1 0 835 5786 2 0 3401 432 3 0 6269 047 4 0 24366 79 Averaged Tdc_idlin 8718 2119 9 34 Agilent E5250A User s Guide Edition 9 Executing Sample Programs HCI Measurement Program Modifying the Program This section explains how to modify the SP_MUX_M sample program and PARAM MES setup file e To change the GPIB address e To change the 4155 4156 setup file used e To change Vtci extraction condition e To change Idlin and Gmmax extraction condition e To change the number of devices e To change the stress times e To change the test limits e To specify the data displayed on the 4155 4156 screen e To change the timing for saving the test data To change the GPIB address To change the GPIB address of the instruments change the following parameters in the GPIB Setup block Parameter Description Default Hpib_sc 4155 4156 GPIB select code 7 Hpib_add
121. ce e Using Bias Mode e Using Couple Port for E5252A only e Controlling Relay Switching Table 6 1 summarizes the commands for each part of the control program for the E5250A In the table default setting means the instrument state by the RST command or power on CAUTION The SCPI commands introduced in this section are ROUTe subsystem commands for controlling the E5250A There are also other SCPI subsystem commands for the E5250A DIAGnostic and SYSTem subsystem commands For details about all SCPI commands refer to Chapter 7 6 6 Agilent E5250A User s Guide Edition 9 Programming the E5250A Creating a Control Program Table 6 1 Programming Summary Description Command Default Setting 1 Defines Channel Configuration Mode ROUT FUNC channel_config NCON 2 Defines Connection Rule ROUT CONN RULE card_no rule ALL FREE 3 Defines Connection Sequence ROUT CONN SEQ card_no sequence ALL BBM 4 Using Bias Mode Selects input Bias Port for E5252A ROUT BIAS PORT card_no input_port_no ALL 10 Bias enables all output ports ROUT BIAS CHAN ENAB CARD card_no ALL Bias enables specified output ports ROUT BIAS CHAN ENAB LIST channel_list All enabled Bias disables all output ports ROUT BIAS CHAN DISA CARD card_no All enabled Bias disables specified output ports ROUT BIAS CHAN DISA LIST channel_list All enabled Sets Bias Mode ON OFF ROUT BIAS STAT card_no state ALL OFF
122. ces lt 10 Max total cable length number of interfaces x 2 m e If total number of interfaces gt 10 Max total cable length 20 m e Maximum cable length between interfaces is 4 m e Star connection and cascade connection are allowed Loop connection is not allowed Agilent E5250A User s Guide Edition 9 2 17 Installation Maintenance Maintenance Maintenance should be performed periodically to keep the E5250A in good condition Performance Verification Performance verification must be performed periodically so that the instruments satisfy the specifications and keep a good condition It is recommended to perform the performance verification once a year at least For the performance verification contact your nearest Agilent Technologies Service Center Trained service personnel will perform the performance verification Cleaning Before performing cleaning turn off the instrument and disconnect power cable from the rear panel Use a dry cloth to clean the external case parts To prevent electrical shock do not perform cleaning when the instrument is turned on and do not use a wet cloth 2 18 Agilent E5250A User s Guide Edition 9 Executing Self Test and Leak Test NOTE Executing Self Test and Leak Test This chapter describes how to execute the Self Test and the Leak Test The Self Test consists of three tests that check the operation of Agilent E5250A firmware LEDs and key that are on the E
123. cessories When you receive and open the box that contains the E5250A check the following e Before unpacking any components inspect all boxes for any signs of damage that might have occurred during shipment such as e Dents e Scratches e Cuts e Water marks e When you open the boxes that contain the E5250A check the components against the contents lists that are attached to the boxes e After installing the E5250A check the E5250A operation by executing self test shown in Chapter 3 If anything is wrong notify your local Agilent Technologies sales office When shipping the E5250A When you unpack the E5250A retain all packing materials for future use If it becomes necessary to reship the E5250A repack it in the original packing materials and shipping carton Agilent E5250A User s Guide Edition 9 2 3 CAUTION Installation Requirements Requirements This section describes the following requirements for the E5250A e Power Requirements e Power Cable e Operating Environment e Storage and Shipping Environment Power Requirements Before applying ac line power to the E5250A ensure that the correct power cable is used The E5250A can operate from any single phase ac power source supplying 100 to 240 V 10 in the frequency range from 47 to 63 Hz The maximum power consumption is 100 VA For details refer to Chapter 10 Specifications Power Cable In accordance with intern
124. connected between pin 4 and pin 5 or 6 of the interlock connector the LED lights to indicate high voltage output when more than 40 V is forced from an SMU in the 4155 4156 To install LED circuit on your shielding box do following 1 Mount LED on your shielding box For the dimensions of the LED refer to Figure 4 5 2 Use wire to connect the LED between pin 4 and pin 5 or 6 of the interlock connector Refer to Figure 4 2 Figure 4 5 Dimensions of LED Agilent part number 1450 0641 G6 ry t o Y Y T pn h We o 6 2 Y 05 6 Units mm UGIO1G13 50x50 4 10 Agilent E5250A User s Guide Edition 9 Setting up Measurement Environment Mounting Connectors Directly To Connect Interlock Circuit to Instrument Before beginning the measurement connect the interlock circuit to the interlock connector of the instrument as follows e For Agilent 4155 4156 semiconductor parameter analyzer Connect Intlk connector of the 4155 4156 to the interlock connector by using Agilent 16493 Interlock cable that is furnished with the 4155 4156 You can connect it directly without using any adapter e For the instruments which has a BNC Type interlock connector If you use an instrument that has a BNC type interlock connector such as Agilent 4142B connect interlock connectors of instrument and the interlock circuit as follows Required Parts Agilent v Model No Quantity Description 1643
125. ct Sets the automatic error checking hpe5250a_errorQueryDetect_Q Queries for the automatic error checking setting hpe5250a_dcl Sends the Device Clear hpe5250a_esr_Q Queries for the ESR status hpe5250a_readStatusByte_Q Reads the E5250A status byte hpe5250a_opc_Q Checks the E5250A operation completion status Mode Control hpe5250a_func Sets the configuration mode hpe5250a_connRuleSeq Sets the connection rule sequence Bias Mode hpe5250a_biasPort Selects the input bias port hpe5250_biasChanCard Selects the card for bias mode hpe5250_biasChanList Selects the channel list for bias mode hpe5250a_biasState Sets the bias port state hpe5250a_biasChanList_Q Queries for the bias channel list Couple Port hpe5250a_couplePort Selects the couple port hpe5250a_coupleState Sets the couple port state Agilent E5250A User s Guide Edition 9 8 5 VXI plug amp play Driver Driver Functions Category Function Description Route Control hpe5250a_closeList Closes the channel list hpe5250a_openList Opens the channel list hpe5250a_openCard Opens all output on the card hpe5250a_closeList_Q hpe5250a_openList_Q Queries for the channel list status hpe5250a_closeCard_Q Queries for the closed channel list on the card C G hpe5250a_CompenC Executes the C G compensation Compensation _ hpe5250a_selectCompenFile _ Selects the compensation data file
126. ctors CAUTION The maximum voltage that can be applied to any input terminal is 200 Vdc The maximum current is 1 Adc at 200 Vdc The maximum voltage that can be applied between input terminals is 300 Vdc Do not apply an input signal over these limits to the E5255A inputs If you do the E5255A will be damaged If you use a bias source that has current limit capability set the bias source current limit to less than 1 Adc Agilent E5250A User s Guide Edition 9 1 11 Introduction Options and Accessories SE Options and Accessories This section lists the options and accessories available for the ES250A Table 1 3 lists the options available for the E5250A Table 1 3 Options Rewind Option Item Description E5250A Low Leakage Switch Mainframe E5250A 301 Relay Test Adapter E5250A A6J ANSI Z540 compliant calibration E5250A UK6 Commercial cal certificate w test data 1 12 Agilent E5250A User s Guide Edition 9 Introduction Options and Accessories Table 1 4 lists accessories furnished with the E5250A E5252A and E5255A Table 1 4 Furnished Accessories Model TOF Number Part Number Description Qty E5250A E5250 90000 Agilent E5250A User s Guide 1 E5250 17001 E5250A VXI Plug amp Play Driver Disk 1 E5250 17003 Agilent E5250A Program Disk See next 1 page LIF formatted 3 5in diskette 04155 60007 Module Extractor 1 8710 2151 Wrench for re
127. d Vtci for each device 3 Judges whether to terminate the stress interim characterization cycle This cycle is terminated when total stress time reaches 100 000 sec or when there is no device satisfies all of the following conditions e Idlin value is within 10 of initial value Gmmax value is within 10 of initial value e Vtext value is within 20 mV of initial value e Vtci value is within 20 mV of initial value If none of these termination conditions has occurred stress time duration is increased and these 3 steps are repeated The default cumulative stress times are defined in the program as follows To change these cumulative stress times refer to Modifying the Program on page 9 35 Stress Cumulative Stress i Cumulative Stress time Stress time cycle stress time cycle stress time 1 10 sec 10 sec 8 1000 sec 2000 sec 2 10 sec 20 sec 9 3000 sec 5000 sec 3 30 sec 50 sec 10 5000 sec 10000 sec 4 50 sec 100 sec 11 10000 sec 20000 sec 5 100 sec 200 sec 12 30000 sec 50000 sec 6 300 sec 500 sec 13 50000 sec 100000 sec 7 500 sec 1000 sec Agilent E5250A User s Guide Edition 9 9 21 Executing Sample Programs HCI Measurement Program The measurement data is saved to the diskette in disk drive connected to the computer with the following file names e IDXxX Percent change data for Idlin e GMXX Percent change data for Gmmax e VTEXX Relative shift data for Vtext e VTIXX Relati
128. d enter the available value 6 32 Agilent E5250A User s Guide Edition 9 Command Reference Command Reference This chapter describes the following for Agilent E5250A SCPI commands available to control the E5250A via GPIB interface SCPI is a universal programming language for electronic test and measurement instruments and is based on IEEE 488 1 and IEEE 488 2 SCPI commands are divided into two types common commands and subsystem commands Common commands are generally not measurement related but are used to manage status registers data storage and so on Common commands are defined by IEEE 488 2 All common commands begin with an asterisk such as RST Subsystem commands are mostly measurement related and some are general purpose Subsystem commands have a hierarchical structure that uses a colon between mnemonics keywords such as DIAG TEST CARD RES Commands for the following subsystems are available for the E5250A DIAGnostic commands for performing self test ROUTe commands for signal routing SYSTem commands for controlling other functions that are not related to instrument performance Commands are listed in alphabetical order in this chapter Status reporting structure These are IEEE 488 2 status structures registers which can be set or read by the common commands For SCPI programming to control the E5250A refer to Chapter 6 Programming the E5250A For a quick reference
129. de you can omit any zeros at beginning of channel For example channel 00101 can be expressed by 101 Agilent E5250A User s Guide Edition 9 5 7 Controlling the E5250A Switch Control Basics Channel Configuration The E5250A allows the following two channel configuration modes The way to specify the channel_list depends on the channel configuration mode You can set the channel configuration by using the ROUT FUNC command described in Chapter 7 Normal Configuration Auto Configuration Default mode at Power On or RST command Each card is considered independently For each channel in channel_list you specify actual card number and channel number input port number and output port number To use this mode the same type of card must be installed in the E5250A slots from slot number continuously slots 1 2 or slots 1 2 3 or slots 1 2 3 4 The installed cards are treated as one card for the output ports For example if the E5252As are installed in slots 1 2 3 you can specify output ports 1 to 36 For each channel in channel_list card number is always 0 For channel number you specify the input port number and output port number depending on the type of card For more information refer to E5252A Channel List on page 5 15 and E5255A Channel List on page 5 19 5 8 Agilent E5250A User s Guide Edition 9 CAUTION Controlling the E5250A Switch Control Basics Connection Rule Connecti
130. e E5250A This error occurs if more specific errors 221 through 224 cannot be determined 222 Data out of range A valid parameter setting could not be executed because interpreted value was out of range as defined by the E5250A 223 Too much data A valid parameter setting block expression or string type could not be executed because parameter contained more data than the E5250A could handle due to insufficient memory or other requirements 224 Illegal parameter value A valid parameter setting where exact value from list of possibles was expected could not be executed due to present E5250A state 260 Expression error An expression related error occurred Agilent E5250A User s Guide Edition 9 11 7 Error Messages Standard SCPI Error Messages Device Dependent Errors 3XX errors indicate that an E5250A operation did not properly complete possibly due to an abnormal hardware or firmware condition These negative codes are SCPI defined For the device dependent positive error codes see E5250A Specific Error Messages on page 11 10 The positive codes are not SCPI defined For these errors an error number and message are placed in the error queue and bit3 of the Standard Event Status Register is set Error Error Message and Description Number 8 P 300 Device specific error Generic device dependent error for the E5250A that cannot be determined more s
131. e commands defined by JEEE 488 2 The following table shows some common commands that are supported for the E5250A Common Commands for E5250A Mnemonic Name CLS Clear Status ESE Standard Event Status Enable Command Query ESR Standard Event Status Register Query IDN Identification Query OPC Operation Complete Command Query RST Reset Command SRE Service Request Enable Command Query STB Read Status Byte Query TST Self Test Query WAT Wait to Continue Command 7 4 Agilent E5250A User s Guide Edition 9 Syntax Example Syntax Query response Semantics Command Reference OLS CLS This command clears the Status Byte Register the Standard Event Status Register and the Error Queue This command does not clear the enable registers Refer to Status Reporting Structure on page 7 48 Also this command stops the monitoring of pending operations by the OPC command This command does not have query form CLS OUTPUT Hp5250 CLS KSE This command sets the bits of the Standard Event Status Enable Register 1 enables 0 masks ESE enable_number enable_number decimal integer that is the sum of the binary weighted values for the desired bits hexadecimal octal or binary value enable_number lt newline gt lt WEND gt enable_number is decimal integer value that is the sum of the binary weighted values of the
132. e following procedure explains the card installation and removal 1 Turn off the E5250A then wait at least 10 seconds before you remove or install a card 2 Remove a blank panel or a card attached to the slot you want to install a new card as follows To remove blank panel do as follows a Loosen the screws on both the left and right edges of the blank panel by using the wrench furnished with the E5250A b Remove the blank panel To remove a card do as follows a Screw the Module Extractor into the screw hole for the extractor See Figure 2 1 Module Extractor is furnished with the E5250A b Loosen the screws on left and right edges of the card by using the wrench furnished with the E5250A c Gently pull the Module Extractor to extract the card from the card slot 3 Install the card as follows a Align the card with the left and right slot guide rails The component side should be facing up b Push the card into the slot until you feel it seat firmly into the connector at the back of the card slot c Screw in the screws on the left and right edges of the card by using the wrench furnished with the E5250A 4 Execute the Relay Test and Leak Test After installing the cards perform the Relay Test and Leak Test described in Chapter 3 to check the operation and leak current of the E5250A with installed cards If you want to confirm that the E5250A with installed cards meets its specifications return the
133. easurement Program Setting up the Measurement Environment Before executing the program you need to set up the measurement environment as follows 1 Prepare the equipment shown in Table 9 6 which lists the required equipment to execute the program 2 For each E5255A make internal connections and set the DIP switches Refer to Figure 9 3 Three E5255As are used which are installed in Slot1 Slot2 and Slot3 of the E5250A The internal connections of the three E5255As are almost the same except for the following e IVinl1 internal connection 1 in Figure 9 3 for each E5255A for Slotl TVin1 to SMU1 for Slot2 IVin1 to SMU3 for Slot3 TVin1 to SMU4 e DIP SW settings in each slot are different as shown in Figure 9 3 But within each E5255A SW1 SW2 SW3 settings are the same 3 Connect all equipment and devices as shown in Figure 9 4 and Table 9 7 Refer to Chapter 4 for the details of the connection from the E5250A output to Device Under Test DUT 9 24 Agilent E5250A User s Guide Edition 9 Executing Sample Programs HCI Measurement Program
134. ecking leakage current of the E5250A with plug in cards installed If leak test result is too large for your application contact nearest Agilent Technologies Service Center Leak test does not verify specifications of the ES250A and installed cards The Leak Test applies 10 Vdc to the specified input port of the E5S250A and measures the leakage current The test limits are shown in Table 3 4 You specify an input port of the E5250A and specify the 4155 4156 SMU to use The Leak Test automatically connects the specified input port to each output port consecutively and uses the 4155 4156 SMU to measure the leakage current for each channel You need to execute this test for each input port Table 3 4 Test Limits of Leak Test Card Instrument Connection Input Port Test Limit E5252A 4155 non Kelvin IV1 IV2 4 12 pA IV3 1V4 IV5 IV6 1 01 nA 4156 non Kelvin IV1 IV2 1 14pA IV3 IV4 IV5 IV6 1 01 nA Kelvin IV1 IV2 2 24 pA IV3 IV4 IV5 IV6 2 02 nA E5255A 4155 non Kelvin IV1 to IV6 4 12 pA 4156 non Kelvin IV1 to IV6 1 14pA Agilent E5250A User s Guide Edition 9 3 15 Executing Self Test and Leak Test Using the Self Test Utility To execute the Leak Test do the following 1 On MAIN MENU of the E5250A Self Test Utility select LEAK TEST softkey The following message is displayed Input Agilent 4155 4156 GPIB address default 817 2 To use default GPIB address
135. ection Sequence Break Before Make e Couple Port function is not available in the VFP 5 26 Agilent E5250A User s Guide Edition 9 Controlling the E5250A Using Virtual Front Panel Utility Requirements The following are required to execute the Virtual Front Panel VFP Utility Model Part No Description Qty 4155 or 4156 Semiconductor Parameter Analyzer 1 10833A B C GPIB Cable 1 E5250 17003 E5250A Program Disk furnished 1 Starting the Virtual Front Panel Utility 1 Before turning on the E5250A and the 4155 4156 Semiconductor Parameter Analyzer connect the GPIB cable between the instruments and make a measurement connection See Chapter 4 Turn on the 4155 4156 and the E5250A Set the 4155 4156 to SYSTEM CONTROLLER mode on SYSTEM MISCELLANEOUS page Insert the E5250A Program Disk into the 4155 4156 disk drive Press the Display key twice to change to All IBASIC screen This key is located in the IBASIC area on the 4155 4156 front panel Select the GET softkey This softkey is displayed on right side of the 4155 4156 screen The following statement is displayed on the 4155 4156 GET _ Type VFP between the double quotations of the GET statement Then press Enter key Wait until the 4155 4156 finishes getting the file Press the Run key which in the IBASIC area on the 4155 4156 front panel The following message is displayed Input Agilent E5250A GPIB Address default 722
136. ed Always zero 2 Not Used Always zero 3 Not Used Always zero 4 Message Available Indicates whether Output Queue is empty If MAV Queue Summary unread message exists this bit is set to 1 Message Otherwise this bit is set to 0 Refer to Output Queue on page 7 55 5 Standard Event Status Indicates whether one or more of the enabled Bit ESB Summary Standard Events Status Register bits is set Message 6 Request Service RQS Indicates whether a SRQ Service Request Message has occurred Read by Serial Poll Master Summary Status Indicates that the instrument has at least one MSS Summary reason for requesting service Read by Message STB 7 Not Used Always zero Agilent E5250A User s Guide Edition 9 7 51 Command Reference Service Request Enable Register Service Request Enable Register The Service Request Enable Register is an 8 bit register that can be used by the programmer to select which summary messages in the Status Byte Register may cause service requests Refer to Figure 7 3 Figure 7 3 Service Request Enable Register of E5250A STATUS SUMMARY SRQ to Controller MESSAGES A ereeeeeere ere eeee ee ot Use Not Used RQS is read by ou Serial Poll service Ros Status Byte Request pe 5 7 6 ESBMAY 3 21 140 Register Generatio MSS AY MSS is read by STB Logical OR A C Service Request Enable
137. ed for connecting the ES250A Confirm the GPIB address of the E5250A and the connection of the GPIB cable Or the E5250A firmware may be defective Must execute Init_vfp_setup before Connect_vfp Init_vfp_setup must be called before calling Connect_vfp Agilent E5250A User s Guide Edition 9 6 27 NOTE Programming the E5250A Using the Capacitance Compensation Routine Using the Capacitance Compensation Routine This section introduces and explains how to use the Capacitance Compensation Routine e Capacitance Compensation Routine e Required Conditions e Programming Example e Before Executing Your Program e Error Messages Restrictions for Using the Routine Capacitance Compensation Routine can be used only in an program runs on HP BASIC Corrected data by the routine is not guaranteed But typical data supplemental data is as follows Capacitance measurement accuracy 1 0 5 pF This typical data is for the following measurement conditions Frequency 1 kHz to 1 MHz Measurement Range Maximum 1000 pF Measurement Terminal At the end of the Agilent 16494A 001 1 5 m triaxial cable connected to the E5252A output terminal The typical data does not apply to cable or anything extended from the 16494A triaxial cable Also the conditions specified in Required Conditions on page 6 30 must be satisfied 6 28 Agilent E5250A User s Guide Edition 9 Syntax Parameter Pro
138. eed to directly mount connectors on your own connector plate or test fixture In this case you need to make connector holes and directly mount the connectors yourself This section has dimension information about the holes you need to make Do the following 1 Select the appropriate parts for your situation Refer to Table 4 1 2 Make holes and mount the connectors Refer to Table 4 2 For kelvin connection use the 16494B Kelvin cable Kelvin cable requires the kelvin triaxial connector which has two connector holes and three screw holes 3 Make interlock circuit as shown in To Make Interlock Circuit on page 4 8 4 Make cable connection between connector and DUT device under test Refer to To Connect Connectors to DUT on page 4 13 Table 4 1 lists the parts required to mount connectors on your shielding box From this table select the parts that you need to mount Quantity of parts depends on your site 4 6 Agilent E5250A User s Guide Edition 9 Setting up Measurement Environment Mounting Connectors Directly Table 4 1 Recommended Parts Usage pele Bart Description No Making interlock 1252 1419C Interlock Connector 6 pin female aes 3101 0302 or Switch 3101 3241 1450 0641 LED Vp 2 1 V Ip 10 mA 8150 5680 Wire Connecting 1250 2457 Triaxial Connector female E5252A output 8121 1191 Low Noise Coaxial
139. egradation test devices This device must be Device1 which was connected to the E5255A output port numbers 1 25 49 and GNDU as shown in Figure 9 4 Connect a new device in place of device removed by previous step Then press Continue function key to continue the program The program executes the leakage current tests which determine the valid devices to use for stress testing If the measured leakage currents are within the limit following message is displayed Device No XX can be used If the measured leakage currents are not within the limit following message is displayed Device No XX shall not be used Then the initial characterization before stress is performed for all valid devices Then stress interim characterization cycle is executed until stress termination conditions are met as described previously In each interim characterization Idlin Gmmax Vtext and Vtci are determined An example measurement is shown in Figure 9 7 Agilent E5250A User s Guide Edition 9 9 29 Executing Sample Programs HCI Measurement Program After each interim characterization the fractional change in a parameter versus the stress time is displayed on GRAPHICS page of the 4155 4156 as shown in Figure 9 8 After testing the test result data is saved to the diskette in the computer s disk drive and the following message is displayed HCI Degradation Test is Completed
140. ent E5250A User s Guide Edition 9 5 37 Controlling the E5250A Using Virtual Front Panel Utility You can define labels to use for the input ports of each row in the MEMORY SETUP PANEL Refer to Defining Labels for the E5250A Input Ports on page 5 31 The following softkeys are displayed for MEMORY SETUP PANEL Softkey Description CHANGE For changing the settings in the Current Setup Memory See CHAN later Displays cursor for input output crosspoints and some softkeys COMMENT For entering a comment for the setup memory See next page NEXT Displayed only for NORMAL Config mode not AUTO Config CARD mode Displays MEMORY SETUP PANEL of next card for changing settings SWITCH Displayed only for AUTO Config mode not NORMAL Config PAGE mode Displays other page of MEMORY SETUP PANEL if more than 48 output ports This softkey is displayed if the E5250A is configured for multiplexer that has more than 48 outputs example 2x96 multiplexer This softkey toggles between the MEMORY SETUP PANEL for outputs to 48 and for 49 to 96 NEXT Changes the Current Setup Memory to next setup memory SETUP number Increases the Current Setup Memory number by 1 And changes the E5250A to the new settings PREV Changes the Current Setup Memory to previous setup memory SETUP number Decreases the Current Setup Memory number by 1 And changes the E5250A to the new settings GOTO For changing the E5
141. es or disables automatic instrument error checking If automatic error checking is enabled then the driver will query the instrument for an error at the end of each function call ViStatus _VI_FUNC hpe5250a_errorQueryDetect ViSession vi ViBoolean errorQueryDetect vi Instrument handle returned from hpe5250a_init errorQueryDetect Error checking enable VI_TRUE or disable VI_FALSE hpe5250a_errorQueryDetect_Q This function indicates if automatic instrument error detection is enabled or disabled ViStatus _VI_FUNC hpe5250a_errorQueryDetect_Q ViSession vi ViPBoolean pErrDetect vi Instrument handle returned from hpe5250a_init pErrDetect Error checking enable VI_TRUE or disable VI_FALSE Agilent E5250A User s Guide Edition 9 8 23 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions hpe5250a_esr_Q This function returns the contents of the ESR register The driver returns the equivalent messages see Parameters ViStatus _VI_FUNC hpe5250a_esr_Q ViSession vi ViChar _VI_FAR errstr vi Instrument handle returned from hpe5250a_init errstr Response from instrument Bit Value Message 1 ESR_OPC 2 ESR_RQL 4 ESR_QYE_ERROR 8 ESR_DEVICE_DEPENDENT_ERROR 16 ESR_EXECUTION_ERROR 32 ESR_COMMAND_ERROR 64 ESR_URQ 128 ESR_PON OTHERS ESR_MULTI_EVENT hpe5250a_func This function is used to set the channel configu
142. est 170 PAUSE 180 Front Panel I F Test 190 OUTPUT Hp5250 DIAG TEST FRAM EXEC FPAN 200 DISP Press Local Self Test Key within 10 sec 210 ENTER Hp5250 A 220 IF A 0 THEN GOTO 250 230 DISP Failed Press Continue to go to Relay Test 240 GOTO 260 250 DISP Passed Press Continue to go to Relay Test 260 PAUSE 270 Relay Test 280 OUTPUT Hp5250 DIAG TEST CARD EXEC 1 290 ENTER Hp5250 A 300 IF A 0 THEN GOTO 330 310 DISP Card 1 failed Press Continue to test Card 2 320 GOTO 340 330 DISP Card 1 passed Press Continue to test Card 2 340 PAUSE 350 OUTPUT Hp5250 DIAG TEST CARD EXEC 2 360 ENTER Hp5250 A 370 IF A 0 THEN GOTO 400 380 DISP Card 2 failed Press Continue to test Card 3 390 GOTO 410 400 DISP Card 2 passed Press Continue to test Card 3 410 PAUSE 420 OUTPUT Hp5250 DIAG TEST CARD EXEC 3 3 8 Agilent E5250A User s Guide Edition 9 Executing Self Test and Leak Test Executing Self Test 430 ENTER Hp5250 A 440 IF A 0 THEN GOTO 470 450 DISP Card 3 failed Press Continue to test Card 4 460 GOTO 480 470 DISP Card 3 passed Press Continue to test Card 4 480 PAUSE 490 OUTPUT Hp5250 DIAG TEST CARD EXEC 4 500 ENTER Hp5250 A 510 IF A 0 THEN GOTO 540 520 DISP Card 4 failed 530 GOTO 550 540 DISP Card 4 passed 550 END Line Number Description 30 to 90 Clears all previous test results 100 to 170 Executes the Controller Test then
143. est Adapter Settings after Relay Test After Relay Test the E5250A settings are changed to same as after SYST CPON command execution Agilent E5250A User s Guide Edition 9 3 5 NOTE Executing Self Test and Leak Test Executing Self Test To Execute Self Test using External Controller You can execute Self Test from an external controller by using SCPI commands in a program This section describes the requirements SCPI commands and a sample program for Self Test execution from an external controller For details about the SCPI commands refer to Chapter 7 Requirements e Controller e GPIB Cable e Relay Test Adapter e BNC Short Caps 3 caps are furnished with each E5255A SCPI Commands for Self Test Table 3 2 shows the SCPI commands used to execute Self Test Keyword of the SCPI command first level is DIAG The DIAG commands ignore the E5250A channel configuration mode NORMAL or AUTO For DIAG commands that require a card number you specify 1 2 3 4 or ALL If the Fail LED turns on after executing the Self Test the ES250A or modules may be defective Contact your nearest Agilent Technologies Service Center Before executing Relay Test be careful about following e Attach the Relay Test Adapter to the E5250A input connectors Refer to Figure 3 1 Then set the switch on the adapter to the Relay Test position e Open all outputs of the plug in cards as follows If cable is connected to output connect
144. etup Data Agilent E5250A User s Guide Edition 9 5 25 Controlling the E5250A Using Virtual Front Panel Utility Functions of Virtual Front Panel Utility The Virtual Front Panel VFP utility is used to create the E5250A setup data and interactively from the 4155 4156 make channel connections on the E5250A plug in cards The VFP utility can perform the following e Display the E5250A card configurations e Change the channel configuration mode bias port and bias mode e Define labels for the E5250A input terminals e Create setup data connection data e Create channels on cards according to the connection data e Use 24 different setup memories for one setup data e Save load the setup data to from a file The setup data has 24 setup memories One setup memory is used for one measurement setup and is the minimum unit of the E5250A setup data For example one setup memory is used for MOSFET Vth measurement another setup memory is used for Capacitance measurement and so on One setup memory is used for the connection data of all installed cards The data created by the VFP can be saved to diskette by using the built in flexible disk drive of the 4155 4156 And VFP data on diskette can be loaded into VFP Also the VFP data on diskette can be loaded into your program by using the VFP Data Upload Library Refer to Chapter 6 In the VFP the following are always used and cannot be changed e Connection Rule FREE e Conn
145. following message is displayed depending on the connection type e Message for Kelvin connection Connect SMUm to IVn by Kelvin cable e Message for non Kelvin connection Connect SMUm to IVn by cable Where m to 6 specified by SMUm softkey and n 1 to 6 specified by Vn softkey And the following softkeys are displayed Softkey Description CONTINUE Executes the Leak Test Consecutively connects input port specified by IVn softkey to each output port and makes leak measurement CANCEL Cancels the Leak Test execution 3 18 Agilent E5250A User s Guide Edition 9 8 Executing Self Test and Leak Test Using the Self Test Utility Connect the cable from the 4155 4156 SMU port specified by the SMUm softkey m 1 to 6 in step 5 to the E5250A input port specified by the Vn softkey n 1 to 6 in step 4 e Use Kelvin triaxial cable for Kelvin connection e Use triaxial cable for non Kelvin connection Press the CONTINUE softkey to execute the Leak Test After the Leak Test is completed for the input port specified by the Vn softkey the test result PASS or FAIL is displayed on the 4155 4156 screen And the following softkeys are displayed Softkey Description REPORT CRT Displays the Leak Test results on the 4155 4156 screen LEAK TEST Returns to the LEAK TEST MENU To display the leak current measurement data on the 4155 4156 screen press the REPORT CRT softkey To re
146. g the probe card also reduces capacitance measurement error Low Noise Coaxial Cable When you make a SMU output connection by using low noise coaxial cable Agilent part number 8121 1191 shave the Conductive layer and the Insulator clear by knife so that the Center Conductor is insulated from the Conductive layer Refer to following figure Cover here using sleeve Insulator black J min 2mm Center conductor for Force Sense signal f S s4 S O me me approx 10 to 15 mm Outer conductor Insulator clear for Guard signal a Conductive layer black 4 14 Agilent E5250A User s Guide Edition 9 WARNING Setting up Measurement Environment Connecting the E5250A Input Connecting the E5250A Input This section explains how to connect instruments to the E5250A e To Connect Instruments to Input Connectors e To Connect Bias Source to the E5255A Bias Input e To Connect GNDU to the E5250A Input Turn off all instruments that will be connected to the E5250A And do not turn them on until the connection described in this section is completed If you ignore this warning you may be exposed to dangerous voltage To Connect Instruments to Input Connectors The E5250A input connector has six SMU input connectors and four AUX input connectors Table 4 3 shows cables required to connect the instrument for typical applications using the E5250A You can make Kelvin connections whe
147. gramming the E5250A Using the Capacitance Compensation Routine Capacitance Compensation Routine This routine is an subprogram used to compensate for capacitance measurement error caused by the E5250A with the E5252A matrix card installed The subprogram is used with Agilent 4284A Precision LCR Meter You enter capacitance and conductance data measured by the 4284A as a parameter and this subprogram returns the compensated value This routine runs on HP BASIC Ccompen_5250 Freq L1 L2_h L2_1 L3_h L3_1 C_m G_m C_c G_c Freq Measurement Frequency Hz 1000 Hz to 1000000 Hz 1 kHz to 1 MHz Li Length in meters of 16494A triaxial cable connected from E5252A output to connector plate L2_h Length in meters of triaxial cable connected from connector plate to DUT High terminal of capacitor If you do not use triaxial cable enter O for this parameter L21 Length in meters of triaxial cable connected from connector plate to DUT Low terminal of capacitor If you do not use triaxial cable enter O for this parameter L3_h Length in meters of coaxial cable connected from connector plate to DUT High terminal of capacitor If you do not use coaxial cable enter 0 for this parameter L31 Length in meters of coaxial cable connected from connector plate to DUT Low terminal of capacitor If you do not use coaxial cable enter 0 for this parameter Cm Capacitance data in F measured by 4284A G_m Conductance data in S
148. he input Bias Port e For the E5255A input Bias Port is the dedicated BIAS port on the E5255A e For the E5252A input Bias Port is the input port 1 to 10 that you select When Bias Mode is ON the input Bias Port is connected to all bias enabled output ports that are not connected to any other input ports You cannot directly control which output ports are connected to the input Bias Port e If another input port is disconnected ROUT OPEN command from a bias enabled output port the output port is automatically connected to the input Bias Port e If another input port is connected ROUT CLOS command to a bias enabled output port the output port is automatically disconnected from the input Bias Port Bias disabled output ports are never connected to the input Bias Port when Bias Mode is ON When Bias Mode is OFF the input Bias Port is the same as the other input ports so relays can be controlled directly to connect to output ports You can independently control the Bias Mode for each card installed in the E5250A Refer to ROUTe BIAS STATe in Chapter 7 For a programming example refer to Chapter 6 Agilent E5250A User s Guide Edition 9 5 11 Controlling the E5250A Switch Control Basics Figure 5 2 Example of Bias Mode J C lt E OO Input 01 Bias Port Input 02 Input 03 Input 10 C C O C Output Port gt O Open Close
149. his command returns the most recent test result pass fail of the specified ES250A test Syntax DIAGnostic TEST FRAMe STATe CONTroller FPANel Parameter Explanation CONTroller Controller test FPANel Front panel interface test Query response test_result lt newline gt lt END gt 1 Fail 0 Pass 1 Not Tested Example OUTPUT Hp5250 DIAG TEST FRAM STAT CONT ENTER Hp5250 A Agilent E5250A User s Guide Edition 9 7 19 Command Reference ROUTe Command Tree ROUTe Subsystem The ROUTe subsystem has commands for controlling the signal routing Open a channel opens relays to disconnect the channel that is disconnects input port from output port Close a channel closes relays to connect the channel that is connects input port to output port ROUTe Command Tree Command Parameter ROUTe BIAS CHANnel DISAble CARD card_number ALL LIST channel_list LIST channel_list ENABle CARD card_number ALL LIST channel_list LIST channel_list PORT card_number ALL bias_port PORT card_number STATe card_number ALL state STATe card_number GLOSSE CARD card_number LIST channel_list LIST channel_list 7 20 Agilent E5250A User s Guide Edition 9 Command Reference RO UTe Command Tree Command Parameter ROUTe CONNection RULE card_number ALL rule
150. ibration will be done automatically before measurement CALL Cal415x DISP Agilent 4155 4156 Calibration Completed To save the 4155 4156 measurement data To save the Vth measurement data to a diskette in the 4155 4156 s disk drive remove the exclamation marks from the program lines shown below and enter the lines These lines are in the Save Measurement Data block of the Meas_vth subprogram OUTPUT Hp415x MMEM STOR TRAC DEF VTH DAT DISK OUTPUT Hp415x OPC ENTER Hp415x A The measurement data will be saved to the VTH DAT file after the measurement If desired you can use another file name instead of VTH DAT 9 12 Agilent E5250A User s Guide Edition 9 Executing Sample Programs Vth and Capacitance Measurement Program To change the Vth measurement setup You can EDIT the program to change the following parameters in the Constant Definition block of the Meas_vth subprogram Parameter Description Default Test_comm Comment for the measurement MOSFET Vth Measurement Param_file 4155 4156 setup file to use E5252 MES Vth_max The maximum Vth limit in V 2 0 Vth_min The minimum Vth limit in V 0 1 Channel E5250A channel_list to use 10101 10202 10303 10404 To change the E5250A input port output port connections change the Channe1 parameter And if you want to change the E5250A connection functions Channel Configuration
151. ilar to following example is displayed E5255A 24 8x3 Block 1 Block 2 Block 3 Channel Multiplexer Input 1 No Resistance Input 2 No Resistance Input 3 No Resistance For Input N the N can be to 6 and indicates which E5250A SMU input port is connected to the IV input of each multiplexer block The next parameter indicates if resistor is used between input Bias Port and IV Input ports as follows e No Resistance no resistor used e With Resistance resistor is used 5 28 Agilent E5250A User s Guide Edition 9 Controlling the E5250A Using Virtual Front Panel Utility Changing the VFP Setup Mode Select the SETUP MODE softkey The display shows the present setup conditions Channel Configuration mode Model Number of each card Bias Mode state of each card Bias Port number of each card NORMAL or AUTO E5252A or E5255A ON or OFF E5252A 1 to 10 E5255A not applicable The card numbers are 1 to 4 in NORMAL configuration mode and 0 zero in AUTO configuration mode The following softkeys are available Softkey Description CHANGE For changing the channel configuration mode See next page CONFIG CARDn For selecting which card to change the Bias Port and Bias Mode n 1 to 4 state CARDn softkeys are displayed only in NORMAL configuration mode Displays the BIAS STATE BIAS PORT and RETURN softkeys Select RETURN softkey to display CARDn softkey again so you can
152. in Figure 4 8 The E5250A input signal SMU input or AUX input appears at the E5252A output connector as shown in Figure 4 8 when input output switching path is made E5252A Output Connector and Output Signal Input A B SMU Force or Sense Guard B AUX Signal line Ground Ground You can easily connect the E5252A output connector to the connector plate or your test fixture by using cables shown in Table 4 4 E5252A Output Cable Agilent Model No Description 16494A 001 Triaxial cable 1 5m for non Kelvin connection 16494A 002 Triaxial cable 3m for non Kelvin connection 16494B 001 Kelvin Triaxial cable 1 5m for Kelvin connection 16494B 002 Kelvin Triaxial cable 3m for Kelvin connection 4 20 Agilent E5250A User s Guide Edition 9 Figure 4 9 For Kelvin connection use Kelvin triaxial cable listed in Table 4 4 To make a Setting up Measurement Environment Connecting the E5250A Output Kelvin output port 1 3 5 7 9 and 11 couple two E5252A output ports as follows Kelvin Output Port Output Port Number 1 1 Force and 2 Sense 3 3 Force and 4 Sense 5 5 Force and 6 Sense 7 7 Force and 8 Sense 9 9 Force and 10 Sense 11 11 Force and 12 Sense Figure 4 9 shows the 16494B Kelvin triaxial cable for the E5252A 16494B Kelvin Triaxial Cable for E5252A 8 Connector Plate Side
153. inframe with the Agilent E5252A 10x12 Matrix Switch and the Agilent E5255A 24 8x3 Channel Multiplexer This chapter also provides the supplemental data when used with the Agilent 4155 4156 The specifications are the performance standards or limits against which these units have been tested The typical data and supplemental data are not warranted but provide useful information about functions and performance If not noted otherwise the conditions for specifications and other data are as follows Temperature 23 C 5 C Humidity lt 60 RH 10 2 Agilent E5250A User s Guide Edition 9 Temperature Range Humidity Range Altitude Power Requirement Maximum VA Number of Slots Dimensions Weight E5252A Number of Input Ports E5255A Number of Input Ports Number of Output Ports Specifications General Specifications General Specifications Operating 5 C to 40 C Storage 40 C to 70 C Operating 5 to 80 RH non condensing Storage 5 to 90 RH at 65 C Operating 0 to 2 000 m 6 500 ft Storage 0 to 15 240 m 50 000 ft 100 to 240V 10 47 to 63 Hz 100 VA 4 slots for 30 mm height switch cards E5250A 230 mm H x 430 mm W x 600 mm D E5252A 30 mm H x 395 mm W x 424 mm D E5255A 30 mm H x 395 mm W x 424 mm D E5250A 11 2 kg E5252A 2 0 kg E5255A 2 1 kg Low Leakage I V Port 2 ports General I V Port 4 ports C V Port 2 ports HF Port 2 ports Low Lea
154. ion Sequence 2 0 4 0 S200 te Ota herd eka shat ka GARE 5 10 Bias Mode creena ented S Set hee we ada na Race oh eae MBean a 5 11 Couple Port sy 0s4 23 ia Acka see ase okt sti E E EER e800 ARN 5 13 B5252A Channel List ccecce inus 4p unun ohne oes pd ete ee 4b 5 15 EB5255A Channel List seirende ee ss Gee eth eA Ad 5 19 Using Virtual Front Panel Utility 0 0 eee eee 5 25 Functions of Virtual Front Panel Utility 00 5 26 Requirements ici cesses sks Beaks FAS elk sak bee ae ee ad wee ia GN 5 27 Starting the Virtual Front Panel Utility 0 0 00 5 27 Confirming the E5250A Card Configurations 00 5 28 Changing the VFP Setup Mode 0 00 ee eee eee eee 5 29 Defining Labels for the E5250A Input Ports 0 0 5 31 Making Connections and Changing the Setup Data 5 33 Saving Loading the Setup Data 0 eee eee eee eee 5 42 6 Programming the E5250A SCPI Programming Basics 0 0 c ccc eee eens 6 3 SCPI Command Hierarchy soe esee n cee eee 6 4 Agilent E5250A User s Guide Edition 9 Contents 3 Contents Controlling E5250A by Using HP BASIC 000 6 5 Creating a Control Program 0 0 eee eee 6 6 Defining Channel Configuration Mode 0 00 00 002s 6 8 Defining Connection Rule 0 00 eee ee eee 6 8 Defining Connection Sequence
155. iplexers four 24 output multiplexers three 32 output multiplexers two 48 output multiplexers or one 96 output multiplexer The E5255A block diagram is shown in Figure 1 5 BIAS Input The BIAS INPUT ports are used to apply ac or de bias to DUT BIAS INPUT ports are BNC connectors Each BIAS INPUT port is assigned to a 2x8 multiplexer block as shown in Table 1 2 And you can make internal connections to connect a BIAS INPUT port to multiple blocks Refer to Chapter 2 IV Input IV input is used for measuring forcing dc current voltage You can connect the IV input to desired SMU INPUT connector SMU1 to SMU6 of the E5250A by making an internal connection Refer to Chapter 2 The E5250A AUX INPUT connectors are not used with the E5255A OUTPUT Connectors The E5255A has three 8 channel coaxial output connectors as shown in Figure 1 6 Each output connector is assigned to a 2x8 multiplexer as shown in Table 1 2 1 8 Agilent E5250A User s Guide Edition 9 WARNING Resistors Introduction Agilent E5255A Product Description Resistors connected between BIAS path and IV path are for protecting DUT from electrical damage When shipped from factory 0 resistance is used in the E5255A You can easily replace with desired resistors Refer to Chapter 2 The following resistors are furnished with the E5255A e OQ resistors 3 sets with 10 resistors in each set e 1 2 KQ resistors 3 sets with 10 resistors in each set e 22 KQ resistor
156. it6 RQS of Status Byte Register is set Refer to Figure 7 2 and Table 7 1 for the E5250A Status Byte Register Status Byte Register of E5250A STATUS MMARY MESSAGES from ce Not Used N OO RQS is read by RQS Serial Poll Status Byte i Register MSS MSS is read by STB Not Used p WI Standard Event Output Queue D lt MT On OO ae ase Qo NO a PGO4002 120x80 The Status Byte Register can be read with either a serial poll or the STB common query command refer to Common Commands on page 7 4 Serial poll is a low level GPIB command that can be executed by SPOLL in HP BASIC such as the following Status SPOLL Hp5250 Both serial poll and STB read the Status Byte Register identically but have following difference e SPOLL returns RQS for bit6 e STB returns MSS for bit6 RQS and MSS are always the same value so returned Status Byte value is always the same for these two methods 7 50 Agilent E5250A User s Guide Edition 9 Table 7 1 Command Reference Status Byte Register In general use serial polling not STB inside interrupt service routines Use STB in other cases not in interrupt service routine when you want to know the value of Status Byte Status Byte Register of E5250A Bit Definition Explanation 0 Not Used Always zero 1 Not Us
157. its 01 to 08 01 to 08 01 to 08 IV Input 01 BIAS Input 51 IV Input 02 BIAS Input 52 IV Input 03 BIAS Input 53 01 to 08 Agilent E5250A User s Guide Edition 9 5 19 Controlling the E5250A Switch Control Basics Card Number One digit 1 to 4 E5250A slot number in which card is installed Channel Number Four digits XXYY e XX input port number depends on the block number 01 02 or 03 for IV Input Port Number 51 52 or 53 for BIAS Input Port Number The input port number depends only on the block number and does not depend on which the E5250A SMU Input is connected to the IV Input e YY output port number 01 to 08 Channel Number assignment is shown in Figure 5 6 Figure 5 6 E5255A Channel Number in Normal Config Mode Block 1 BIAS Input a 102 fs BIAS Input 53 5 20 Agilent E5250A User s Guide Edition 9 Controlling the E5250A Switch Control Basics Auto Configuration Mode To use this mode the E5255A must be installed in the E5250A slots continuously from slot slots 1 2 or slots 1 2 3 or slots 1 2 3 4 To specify a channel use five digits as shown in Table 5 8 Table 5 8 Specifying E5255A Channels in Auto Config Mode IV Port Input One Channel 5 digits Connection reer ee Channel Number 4 digits p M j first 1 digit Input Port No Output Port No next 2 digits last 2 digits to SMU1
158. itten agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the sep arate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accor dance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcon tract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer soft ware as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclo sure of Software is subject to Agilent Tech nologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data A DECLARATION OF CONFORMITY Agilent Technologies According to ISO IEC Guide 22 and CEN CENELEC EN 45014 Manufacturer s Name Manufacturer s Address Supplier s
159. k Plates vay munne r hte he ate one Eades erence Revere We BS 4 4 Connecting 8 Channel Shielded Coaxial Cable 00 0 4 5 eS Ta seeded be Soa depen a bd vt a gh Rodan del Mee a a ey 4 5 Mounting Connectors Directly 0 0 eee eee 4 6 To Make Interlock Circuit 0 2 ee eee eee 4 8 To Connect Connectors to DUT 0 0 00 eee eee eee 4 13 Connecting the E5250A Input 02 0 ee ee 4 15 To Connect Instruments to Input Connectors 000 4 15 To Connect Bias Source to the E5255A Bias Input 4 18 To Connect GNDU to the E5250A Input 0 008 4 18 Connecting the E5250A Output 00 0 2 eee eee 4 20 Contents 2 Agilent E5250A User s Guide Edition 9 Contents To Connect the E5252A Output 00 0 eee eee eee 4 20 To Connect the E5255A Output 0 0 eee eee 4 22 Measurement Cable Length 0 00 0 eee eee ee eee 4 23 5 Controlling the E5250A Methods for Controlling the E5250A 0 0 00 eee ee eee 5 3 Creating Your Own Program 0 0 cece cee eee 5 3 Modifying a Sample Program 0 0 c eee eee eee 5 4 Using the Virtual Front Panel VFP Utility 0 04 5 4 Switch Control Basics 1 0 0 cee eect eens 5 5 Channel List and Channel Configuration 0 0000 5 6 Connection Rule 550s ee paner an hie Ges EAE eee Cay eta A E 5 9 Connect
160. kage I V Port port multiplexer block Bias Port 1 port multiplexer block depends on the number of cards For each E5252A 12 For each E5255A 24 8 ports x 3 multiplexer blocks Agilent E5250A User s Guide Edition 9 10 3 Specifications Agilent E5252A 10x12 Matrix Switch Agilent E5252A 10x12 Matrix Switch Switch Specifications These are specifications when the E5252A is installed in mainframe In the table the conditions are as follows e A 23 C 5 C 5 to 60 RH e B 5 C to 18 C and 28 C to 40 C 5 to 60 RH e C 28 C to 40 C 60 to 80 RH A B C Max Current Rating A 1 0 1 0 1 0 Max Voltage Rating V Channel to Guard 200 200 200 Channel to Channel 300 300 300 Closed Channel Residual Resistance Q Low Leakage I V Port 0 6 0 6 0 6 General I V Port 1 0 1 0 1 0 C V HF Port 1 0 1 0 1 0 Channel Isolation Resistance Q Low Leakage I V Port 10 3 5x10 2x10 General I V Port 10 2 5x10 2x10 C V HF Port 10 5x108 2x108 10 4 Agilent E5250A User s Guide Edition 9 Specifications Agilent E5252A 10x12 Matrix Switch Typical Data Offset Current lt 0 1 pA Low Leakage I V Port lt 1000 pA General I V Port Channel Crosstalk Capacitance lt 0 3 pF per channel Offset Voltage EMF at 5 min lt 80 uV Low Leakage I V Port lt 110 pV General I V Port lt 110 uV C V HF Port Guard Capacitance lt 1
161. ke non Kelvin connection at end of cable 3 Attach the Relay Test Adapter to the E5250A input connectors as shown in Figure 3 1 4 Set switch on the Relay Test Adapter to Relay Test position 5 For each E5255A card installed in the E5250A a Disconnect any cables from the BIAS INPUT connectors of the E5255A b Connect a BNC Short Cap to each E5255A BIAS INPUT connector 6 If Remote LED is on press the Local Self Test key to return to Local control The Remote LED should turn off 7 Press the Local Self Test key The Relay Test executes 8 Wait until the LED in Local Self Test key turns off 3 4 Agilent E5250A User s Guide Edition 9 NOTE Figure 3 1 NOTE Executing Self Test and Leak Test Executing Self Test If Fail LED is ON after Relay Test After executing the relay test if the Fail LED turns on the cause is one of the following e The Relay Test Adapter is not connected or a cable is still connected to input connector e Output is not open See step 2 of previous procedure e You did not properly install the E5255A See To Configure E5255A on page 2 10 e A plug in card may be defective Contact your nearest Agilent Technologies Service Center Relay Test Adapter Connection Relay T
162. key n 1 to 4 The following message is displayed on the 4155 4156 screen depending on card e Message for the E5252A Attach the relay test adapter on input terminal and open all output of slot n e Message for the E5255A Attach the relay test adapter and the BNC short cap to E5250A E5255A input And open all output of slot n Where n 1 to 4 And the following softkeys are displayed Softkey Description CONTINUE Executes the Relay Test for the card immediately CANCEL Cancels the Relay Test execution Disconnect all cables from the E5250A input terminals And attach the Relay Test Adapter to the E5250A input terminals For each E5255A card connect a BNC short cap to each E5255A BIAS INPUT port Open all outputs of the plug in cards as follows If cable is connected to output connector of plug in card open output at DUT end of cable If end of cable is Kelvin connection disconnect the cable or make non Kelvin connection at end of cable Press the CONTINUE softkey to execute the Relay Test Or press the CANCEL softkey to cancel test execution Repeat steps 1 to 4 for the each card you want to test If F result is displayed after executing the Relay Test the card is defective Contact your nearest Agilent Technologies Service Center 3 14 Agilent E5250A User s Guide Edition 9 Executing Self Test and Leak Test Using the Self Test Utility To Execute Leak Test NOTE Leak Test is for ch
163. lable For details refer to e Sets up the couple ports for specified card You can specify multiple input_port_no to set up mult iple couple ports Command Description ROUT COUP PORT card_no input_port_no Sets up couples ports determined by input_port_no on card specified by card_no e Turns the Couple Port Mode ON or OFF Command Description ROUT COUP STAT card_no ON Turns on the couple port mode for card specified by card_no ROUT COUP STAT card_no OFF Turns off the couple port mode for card specified by card_no 100 OUTPUT Hp5250 ROUT COUP PORT ALL 1 3 110 Sets up two couple 120 OUTPUT Hp5250 ROUT ports 1 amp 2 and 3 amp 4 on all cards COUP STAT ALL ON 130 Turns on the couple port mode for all cards Agilent E5250A User s Guide Edition 9 6 11 Programming the E5250A Creating a Control Program Controlling Relay Switching Following commands are used to control relay switching For details of channel_list see Channel List and Channel Configuration on page 5 6 Command Description ROUT CLOS channel_list Close the relays specified by channel_list ROUT OPEN channel_list Open the relays specified by channel_list ROUT OPEN CARD card_no Open all relays on card specified by card_no Example 100 OUTPUT Hp5250 ROUT CLOS 10101 10202 110 Closes relays to
164. lent E5250A User s Guide Edition 9 6 23 Syntax Parameters Example Syntax Parameters Example Programming the E5250A Using the VFP Data Upload Library Connect_vfp subprogram Makes relay connections based on data from the specified Setup Memory Data from all 24 Setup Memories was loaded by the Load_vfp_data subprogram Connect_vf p Setup_data Setup_num Setup_data Data string for internal use in the library Must declare 14000 byte data size Setup_num Setup Memory number to 24 CALL Connect_vfp Mat48_data 1 FNGet_vfp_comment subprogram Returns comment from the specified Setup Memory Comments for all 24 Setup Memories were loaded by the Load_vfp_data subprogram FNGet_vfp_comment Setup_data Setup_num Setup_data Data string for internal use in the library Must declare 14000 byte data size Setup_num Setup Memory number from which to get comment to 24 Comment FNGet_vfp_commentS Mat48_data 1 DISP Comment Comments 6 24 Agilent E5250A User s Guide Edition 9 Programming the E5250A Using the VFP Data Upload Library Programming Example The following program is an example for using the VFP Data Upload Library 10 Example for using VFP Data Upload Library 20 30 COM Vfp_com_data Mat48_data 14000 40 DIM Comment 20 50 Address_5250 722 E5250A GPIB Address 722 60 Setup_num 1 VFP Setup Memory Number 1 70 80 OUTPUT Address_5250 RST 90
165. ling the E5250A Using Virtual Front Panel Utility Softkey Menu 2 For the following conditions the following softkeys are displayed by selecting the MORE softkey on Softkey Menu 1 Cursor points to row of normal input port or to row of input Bias Port with Bias Mode OFF Softkey Description OPEN Opens all relays If Bias Mode is ON then closes relays to connect ALL bias enabled output ports to the input Bias Port OPEN Opens all relays of row at cursor If Bias Mode is ON then closes ROW relays to connect bias enabled output ports that are not connected to other input ports to the input Bias Port CLOSE Closes all relays of row at cursor And all output ports are ROW disconnected from the input Bias Port MORE Displays softkey menu 1 RETURN Displays the previous level of softkey menu Softkey Menu 3 For the following conditions the following softkeys are displayed by selecting the MORE softkey on Softkey Menu 1 Cursor points to row of input Bias Port and Bias Mode is ON Softkey Description OPEN Opens all relays then connects all bias enabled output ports to the ALL input Bias Port DISABLE Bias disables all output ports So relays open to disconnect all ROW output ports from the input Bias Port ENABLE Bias enables all output ports then connects all output ports that ROW are not connected to another input port to the input Bias Port MORE Displays softkey menu
166. list of all SCPI subsystem commands described in this chapter refer to Chapter 12 SCPI Command Summary For error messages related to the SCPI commands refer to Chapter 11 Error Messages 7 2 Agilent E5250A User s Guide Edition 9 Command Reference Textual Notation for Subsystem Commands CAPITAL LETTERS italic font G Capital letters are the minimally required letters of the command header Lowercase letters are the long form complete spelling which you can omit if desired For example for SYSTem CCONfig you only need to specify SYST CCON Square brackets are used to enclose optional information not required for execution of the command sequence For example for the ROUTe BIAS PORT command you can execute ROUT BIAS PORT or BIAS PORT which are exactly the same Text you supply For example for card_number you enter an allowed card number Also used to represent response data Vertical bar can be read as or and is used to separate alternative parameter options Braces curly brackets are used to enclose one or more parameters that may be included zero or more times Angular brackets indicate that the word or words enclosed represent something other than themselves For example lt newline gt Agilent E5250A User s Guide Edition 9 7 3 Command Reference Common Commands for E5250A Common Commands This section describes common commands and queries which ar
167. lvin connection CANCEL Cancels the Leak Test execution Select the YES or NO softkey The following message and the softkeys are displayed Select SMU channel for IVn leak measurement by softkey Where n 1 to 6 Softkey Description SMUm Declares that you will connect the 4155 4156 SMUm to the m 1 to 6 E5250A port specified by the Vn softkey SMU5 and SMU6 are displayed only if 5th and 6th SMU are installed in the 41501 expander of the 4155 4156 CANCEL Cancels the Leak Test execution Agilent E5250A User s Guide Edition 9 3 17 Executing Self Test and Leak Test Using the Self Test Utility 5 Select the desired SMUm softkey m 1 to 6 Following message is displayed depending on the connection type e Message for Kelvin connection Disconnect Kelvin cable from IVn terminal And disconnect all cables from output terminals e Message for non Kelvin connection Disconnect cable from IVn terminal And disconnect all cables from output terminals Where n 1 to 6 And the following softkeys are displayed Softkey Description CONTINUE To continue setting up the Leak Test CANCEL Cancels the Leak Test execution 6 Disconnect all cables from the E5250A input output terminals Then connect triaxial cable or Kelvin triaxial cable to the 4155 4156 SMU terminal you specified in step 5 because the next step executes the zero offset cancel 7 Select the CONTINUE softkey The
168. mbers Command Error Execution Error Device Dependent Error and Query Error are standard SCPI errors e E5250A Specific Error Messages Positive error numbers are the E5250A specific errors Error messages are classified by error number as listed in the following table Error Range Error Category 0 No error 100 to 199 Command Error 200 to 299 Execution Error 300 to 399 Device Dependent Error 400 to 499 Query Error 100 to 32767 E5250A Specific Error When an error occurs the corresponding bit is set in the Standard Event Status Register see Chapter 7 Error Catez t Standard Event BARY Status Register Bit Command Error bit5 Execution Error bit4 Device Dependent Error bit3 Query Error bit2 E5250A Specific Error bit3 Also the error number and message are placed in the error queue which can be read by the SYSTem ERRor query command The error queue is cleared by the common command CLS and when power is turned on For these commands see Chapter 7 11 2 Agilent E5250A User s Guide Edition 9 Error Messages Standard SCPI Error Messages Standard SCPI Error Messages Standard SCPI error messages have negative error numbers The following are the standard SCPI error messages for the ES250A Command Error If syntax of SCPI command is not valid a 1XX error occurs The error number and message are placed in the error queue and bit5 of the Sta
169. mbers and output ports have meaning But you cannot omit the input port in the channel_list disable_status disable_status lt newline gt lt MEND gt 1 disabled 0 enabled OUTPU Hp5250 ROUT BIAS CHAN ENAB CARD ALL OUTPUT Hp5250 ROUT BIAS CHAN DIS 10101 OUTPUT Hp5250 ROUT BIAS CHAN DIS 10101 10102 10201 ENTER Hp5250 A In above example AS will be as follows lla Ores 10101 and 10201 have the same meaning because the specified input port is ignored Agilent E5250A User s Guide Edition 9 7 23 Syntax Example Command Reference ROUTe BIAS CHANnel ENABle CARD ROUTe BIAS CHANnel ENABle CARD This command bias enables all output ports of the specified card When Bias Mode is ON this command closes relays to connect the input Bias Port to all output ports that are not already connected by ROUT CLOS command to other input ports Refer to ROUTe BIAS STATe At RST all output ports are bias enabled ROUTe BIAS CHANnel ENABle CARD card_number Parameter Explanation card_number card number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL OUTPUT Hp5250 ROUT BIAS CHAN ENAB CARD ALL 7 24 Agilent E5250A User s Guide Edition 9 Syntax Example Command Reference ROUTe BIAS CHANnel ENABle LIST ROUTe BIAS CHANnel ENABle LIST This command bias enables
170. minals are shorted To Install Interlock Circuit Install the interlock circuit as follows 1 Mount two mechanical switches on your shielding box so that the switches close when the door of the shielding box is closed and open when the door is opened For the dimensions of the switch refer to Figure 4 3 and Figure 4 4 2 Use wire to connect the two switches in series between pin number 1 and 2 or 3 of the interlock connector See Figure 4 2 For example Agilent 4155 4156 is connected to the interlock circuit it cannot force more than 40 V when the door is open When door is closed it can force more than 40 V 4 8 Agilent E5250A User s Guide Edition 9 Setting up Measurement Environment Mounting Connectors Directly Dimensions of Interlock Switch Agilent part number 3101 0302 18 8 Figure 4 3 cof al amp b 4 S Ey 5 fe 2 pee A os ps Units mm UGIG1O11 8 5x60 Figure 4 4 _ 10 2 4 3 ae Switch off l f Switch on 2 0 Units mm UGIGIO12 85x60 Dimensions of Interlock Switch Agilent part number 3101 3241 27 9 10 9 Agilent E5250A User s Guide Edition 9 4 9 Setting up Measurement Environment Mounting Connectors Directly To Install LED Circuit The 4155 4156 semiconductor parameter analyzer s Intlk connector provides the interlock signal and a LED drive signal If a LED is
171. mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL bias_port Input port number 1 to 10 Example OUTPUT Hp5250 ROUT BIAS PORT ALL 6 Agilent E5250A User s Guide Edition 9 7 27 NOTE Syntax Query response Example Command Reference ROUTe BIAS PORT ROUTe BIAS PORT This command applies only to the E5252A card For the E5255A card the input Bias Port cannot be selected and is always the built in Bias Port This query command returns the input Bias Port number for the specified card ROUTe BIAS PORT card_number Parameter Explanation card_number card number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 port_number lt newline gt lt END gt port_number 1 to 10 OUTPU Hp5250 ROUT BIAS PORT ALL 4 OUTPU ENTER Hp5250 ROUT Hp5250 A BIAS PORT 1 For above example A will be as follows 4 7 28 Agilent E5250A User s Guide Edition 9 Syntax Example Command Reference ROUTe BIAS STATe ROUTe BIAS STATe This command controls the Bias Mode for the specified card For details refer to Bias Mode in Chapter 5 When Bias Mode is ON the input Bias Port is connected to all bias enabled output ports that are not connected to any other input ports To bias enable the desired output ports refer to ROUT BIAS CHAN ENAB CARD or ROUT BIAS CHAN ENAB LIST
172. mode etc modify the Set 5250init subprogram To change the 4155 4156 measurement setup change the Param_files parameter to the name of your desired setup file To change the name of parameter Vth entered from the 4155 4156 change VTH and Vth to the desired name on the 3 lines shown below Where VTH is the parameter defined by the E5252 MES setup file eas_vth subprogram Measurement block OUTPUT Hp415x TRAC VTH ENTER Hp415x Vth eas_vth subprogram Test measurement data block IF Vth lt Vth_min OR Vth gt Vth_max THEN eas_vth subprogram Reset Instrument block OUTPUT Out_str USING Imgl Test_num Result Vth_min V th Vth_max Test_comm Agilent E5250A User s Guide Edition 9 9 13 Executing Sample Programs Vth and Capacitance Measurement Program To change the capacitance measurement setup You can EDIT the program to change the following parameters in the Constant Definition block of the Meas_c subprogram connected from connector plate to DUT Low terminal of capacitor Parameter Description Default Test_comm Comment for the measurement Capacitance Measurement Capa_max The maximum capacitance limit in F 2 0E 11 Capa_min The minimum capacitance limit in F 8 0E 12 Sig_volt Signal level for C measurement in V 0 03 Meas_freq Frequency for C measurement in Hz 1 0E 5 Cable_len Length in meters of 16048D E cable 1 Clen_hptriax
173. moving plug in card 1 Power Cable 1 E5252A E5252 90000 Agilent E5252A Installation Guide 1 8710 2151 Wrench for removing plug in card 1 E5255A E5255 90000 Agilent E5255A Installation Guide 1 1250 0929 BNC Short Cap 3 E5255 65000 BIAS Input Modification Kit 1 BNC Open Cap x 2 wire x 2 E5255 65001 0 Q Resistor Set 10 resistors 3 E5255 65002 1 2 KQ Resistor Set 10 resistors 3 E5255 65003 22 KQ Resistor Set 10 resistors 3 8710 2151 Wrench for removing plug in card 1 a The Agilent E5250A VXIplug amp play driver supports Windows XP Pro fessional Windows 2000 Windows NT 4 0 Windows 98 and Windows 95 Agilent E5250A User s Guide Edition 9 1 13 Introduction Options and Accessories Contents of the E5250A Program Disk Virtual Front Panel Utility Interactive control program for the E5250A Runs on Agilent 4155 4156 s built in IBASIC controller Refer to Chapter 5 VFP Data Upload Library Subprogram library used for uploading the E5250A control data made by Virtual Front Panel Utility to your program Runs on HP BASIC Refer to Chapter 6 Capacitance Compensation Routine Subprogram to compensate for capacitance error caused by the E5250A and E5252A Runs on HP BASIC This subprogram is used to compensate the capacitance data measured by Agilent 4284A Precision LCR Meter Refer to Chapter 6 Sample Programs Three sample programs one for Vth and C measurement using the E5252A a
174. mpt is being made to read data from the Output Queue when no data is present or pending e Data in the Output Queue has been lost 3 Device Dependent This event bit indicates that an error has Error DDE occurred which is not a Command Error a Query Error or an Execution Error 4 Execution Error EXE Syntax of command is correct but cannot be executed due to some condition of the E5250A 5 Command Error A command syntax error has been detected CME 6 Not Used Always 0 7 Power On PON This event bit indicates that an off to on transition has occurred in instrument s power supply 8 to 15 Not used Always 0 Standard Event Status Enable Register The Standard Event Status Enable Register is an 8 bit register that can be used by the programmer to select which bits of Standard Event Status Register are enabled The status of the enabled bits are ORed together and result of OR will be reported to the ESB bit Bit5 of the Status Byte Register The 8 bits of this register correspond to the 8 bits of the Standard Event Status Register Refer to Figure 7 4 7 54 Agilent E5250A User s Guide Edition 9 Figure 7 5 Command Reference Output Queue Output Queue The Output Queue stores response messages until they are read If an unread message exists Bit4 Message Available MAV of the Status Byte Register is set to 1 So Bit4 is used to synchronize information exchange with the controller Refer
175. n using the 4156 HRSMU 41501 HPSMU 4142B SMU E5270 SMU Use cables as follows e 4156 41501 Agilent 16494B 003 Kelvin triaxial cable e 4142B Agilent 16494C 001 Kelvin triaxial cable e E5270 Agilent 16494B 001 Kelvin triaxial cable To connect Kelvin triaxial cable to the E5250A input use pairs couple ports of SMU INPUT connectors 1 amp 2 3 amp 4 or 5 amp 6 of the E5250A The input signal for each Kelvin input is as follows e Odd input port number FORCE e Even input port number SENSE Agilent E5250A User s Guide Edition 9 4 15 Setting up Measurement Environment Connecting the E5250A Input Table 4 3 E5250A Input Connections Instrument E5250A Application Agilent Output Input Cable Required Model No Connector Connector DC 4155 MPSMU SMUI1 to 6 16494A 003 Triaxial cable Measurement VSU AUXI to4 BNC cable VMU AUXI to 4 BNC cable Intlk 16493J Interlock cable for direct connection to Connector Plate 4156 HRSMU SMU to 6 16494B 003 Kelvin Triaxial cable or 16494A 003 Triaxial cable VSU AUXI to4 BNC cable VMU AUXI to 4 BNC cable Intlk 16493J Interlock cable for direct connection to Connector Plate 41501 HPSMU SMUI1 to 6 16494B 003 Kelvin Triaxial cable or 16494A 003 Triaxial cable MPSMU SMU1 to 6 16494A 003 Triaxial cable PGU HF1 or 2 BNC cable GNDU SMUI to 6 16493H GNDU cable and E5250 60004 Adapter 16
176. nalyzer Agilent 4142B Modular DC Source Monitor Agilent E5270 Series of Parametric Measurement Solution and so on When using an SMU the length of measurement cables is limited by the guard capacitance of the cables Guard capacitance means the capacitance between the signal line FORCE or SENSE and the GUARD line Table 4 6 lists the guard capacitance for each element of the ES250A measurement environment When using the 4155 4156 4142B E5270 the maximum limit of the guard capacitance is approximately 900 pF So you add the following and total must be less than 900 pF e Guard capacitance of cable from SMU to E5250A SMU INPUT e Guard capacitance of E5250A and installed plug in cards e Guard capacitance of cable from plug in card output to connector plate e Guard capacitance of cable from connector plate to DUT e Other capacitances such as for probe card The following is an example to calculate the guard capacitance of a measurement environment Installed Plug in cards Four E5252A cards 145 pF 8 pF x 3 Input Cable 16494A 003 75 pF Output Cable 16494A 001 125 pF Cable from Connector Plate to DUT 8121 1191 2 m 130 pF x 2 Probe Card Guard Capacitance approximately 10 pF example In this environment the total guard capacitance Cg t otal is as follows Cg total 145 8x3 75 125 130x2 10 pF 639 pF lt 900 pF Even if you use other instruments you can use the table for reference about the me
177. nce ROUTe CONNection SEQuence ROUTe CONNection SEQuence This query command returns the connection sequence mode of the specified card For details refer to Connection Sequence in Chapter 5 ROUTe CONNection SEQuence card_number Parameter Explanation card_number card number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 NSEQ or BBM or MBBR lt newline gt lt AEND gt OUTPUT Hp5250 ROUT CONN SEQ ALL MBBR OUTPUT Hp5250 ROUT CONN SEQ 0 ENTER Hp5250 AS In above example AS will be as follows BBR 7 34 Agilent E5250A User s Guide Edition 9 NOTE Syntax Example Command Reference ROUTe COUPle PORT ROUTe COUPIle PORT This command applies only to the E5252A card The Couple Port function is not available for the E5255A card The Bias Port and Couple Port cannot be set to same port number This command is used to set up couple ports which are used for making Kelvin connections For details refer to Couple Ports in Chapter 5 Each specified input port number will be coupled with the next input port and two output ports The two output ports are determined by the ROUT CLOS command and the lower output port number is always odd See example below To turn Couple Port Mode ON OFF refer to ROUT COUP STAT For each card you can set up the same or different couple ports This command overwrites the pre
178. ncy 1E 3 to 1E 6 Hz len_hptrx Agilent 16494A triaxial cable 1 5 or 3 0 m len_usrtrx_h Triaxial cable length in m between connector plate and DUT high terminal If you do not use triaxial cable enter O zero len_usrtrx_l Triaxial cable length in m between connector plate and DUT low terminal If you do not use triaxial cable enter 0 zero len_usrcoax_h Coaxial cable length in m between connector plate and DUT high terminal If you do not use coaxial cable enter 0 zero len_usrcoax_l Coaxial cable length in m between connector plate and DUT low terminal If you do not use coaxial cable enter 0 zero raw_c Capacitance value in F measured by the 4284A raw_g Conductance value in S measured by the 4284A compen_c Capacitance compensation result in F compen_g Conductance compensation result in S 8 18 Agilent E5250A User s Guide Edition 9 Syntax Parameters VXlplug amp play Driver Driver Functions hpe5250a_connRuleSeq The function sets connection rule and connection sequence for the specified card ViStatus _VI_FUNC hpe5250a_connRuleSeq ViSession vi Vilnt16 cardno_ruleseq Vilnt16 rule ViInt16 sequence vi Instrument handle returned from hpe5250a_init cardno_ruleseq Card number 1 card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the automatic configuration mode For the configuration mode see hpe5250a_func rule Co
179. nd these lines by using FIND statement CALL Bias_source_on CALL Bias_source_off Delete the exclamation mark from the beginning of the following lines in the Bias_source_on and Bias_source_off subprograms Then modify the OUTPUT statements to match your Bias Sources The SOUR XXX SCPI command is used to control the output voltage of the Bias Sources Bias_source_on SUB Bias_source_on I Bias Source On COM Meas_info5 REAL Vdstr Vgstr Vdd Vbb Gate_length Gate_w idth ee Se ee ee a ee Se Se a SS a SS SS OUTPUT 701 SOUR amp VALS Vgstr Set Gate Stress Voltage OUTPUT 702 SOUR amp VALS Vdstr Set Drain Stress Voltage OUTPUT 703 SOUR 0 0 Set Substrate Stress Voltage SUBEND Bias_source_off SUB Bias_source_off 1 ot Bias Source Off COM Meas_info5 REAL Vdstr Vgstr Vdd Vbb Gate_length Gate_w idth SS ee eS eS ee eS SS SS a eS ee Se SS SS Se ee OUTPUT 701 SOUR 0 0 Set Gate Voltage to 0 0V OUTPUT 702 SOUR 0 0 Set Drain Voltage to 0 0V OUTPUT 703 SOUR 0 0 Set Substrate Voltage to 0 0V SUBEND Save modified file to an empty formatted diskette as in following example This diskette is used for executing program And the data measured and analyzed will be saved to this diskette automatically during program execution RE STORE SP_MUX Agilent E5250A User s Guide Edition 9 9 23 Executing Sample Programs HCI M
180. nd two for HCI test and analysis using the E5255A Runs on HP BASIC Refer to Chapter 9 Self test Utility Self test and relay test program for the E5250A Runs on the 4155 4156 s built in IBASIC controller Refer to Chapter 3 1 14 Agilent E5250A User s Guide Edition 9 Introduction Options and Accessories Table 1 5 lists accessories available for the E5250A Table 1 5 Available Accessories ada Opn Dep E5252A 10x12 Matrix Switch E5255A 24 8x3 Channel Multiplexer 16494A Triaxial Cable 16494A 001 1 5 m length 16494A 002 3 m length 16494A 003 80 cm length 16494B Kelvin Triaxial Cable 4156 kelvin to E5250 kelvin 16494B 001 1 5 m length 16494B 002 3 m length 16494B 003 80 cm length 16494C Kelvin Triaxial Cable 4142 kelvin to E5250 kelvin 16494C 001 1 5 m length 16494C 002 3 m length 16494D 8 Channel Shielded Coaxial Cable 16494D 001 1 5 m length 16494D 002 3 m length 16494E Wide Temperature 8 Channel Shielded Coaxial Cable 16494E 001 3m length 16495C Connector plate with 6 connectors for 16494D 16495D Connector plate with 12 connectors for 16494D 16495E Blank plate 16495F Connector plate with 12xtriaxial intlk GNDU 16495F 001 Bulkhead feedthrough connectors female to female 16495F 002 Connectors to contacts for soldering 16495G Connector plate with 24xtriaxial intlk GNDU 16495G 001 Bulkhead feedthr
181. ndard Event Status Register is set A SCPI command consists of a command header and zero or more parameters The following are example SCPI commands e Subsystem command ROUT OPEN CARD 1 ROUT OPEN CARD is the command header and 1 is the parameter A subsystem command header consists of mnemonics keywords separated by colons Query commands have a question mark at end of last mnemonic e Common command SRE 48 SRE is the command header and 48 is the parameter A common command header consists of an asterisk followed by 3 characters Query commands have a question mark at end of header cee Error Message and Description 100 Command error Generic syntax error that cannot be determined more specifically 101 Invalid character A syntax element contains a character that is invalid for that type of element for example a header containing an ampersand 102 Syntax error An unrecognized command or data type was received for example a string was received when the E5250A does not accept strings Agilent E5250A User s Guide Edition 9 11 3 Error Messages Standard SCPI Error Messages Error ais Number Error Message and Description 103 Invalid separator An illegal character was received when a separator was expected for example the semicolon was omitted between multiple commands in a program message 104 Data type erro
182. nected Under certain conditions dangerous voltages may exist even with the power cable removed To avoid injuries always disconnect power and discharge circuits before touching them DO NOT SERVICE OR ADJUST ALONE Do not attempt internal service or adjustment unless another person capable of rendering first aid and resuscitation is present e DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Because of the danger of introducing additional hazards do not install substitute parts or perform any unauthorized modification to the instrument Return the instrument to a Agilent Technologies Sales and Service Office for services and repair to ensure that safety features are maintained e DANGEROUS PROCEDURE WARNINGS Warnings such as example below precede potentially dangerous procedures throughout this manual Instructions contained in the warnings must be followed WARNING Dangerous Voltage capable of causing death are present in this instrument Use extreme caution when handling testing and adjusting WARNING CAUTION GO Q gt 4 ers Op y gt amp Safety Symbols The general definitions of safety symbols used on equipment or in manuals are listed below Instruction manual symbol the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual in order to protect against damage to the instrument Indicates dangerous voltage and potential for electrical shock Do not t
183. nel Multiplexer Installation Describes requirements to install the E5250A and tasks for installation Executing Self Test and Leak Test Describes how to execute the three Self Test items Controller Test Front Panel Interface Test and Relay Test and the Leak Test Setting up Measurement Environment Explains how to connect your instruments to the E5250A input and how to connect the E5250A output to your wafer prober or test fixture Controlling the E5250A Introduces several methods for controlling the E5250A gives basic information for controlling the relay switches on the plug in cards and describes how to use Virtual Front Panel VFP utility furnished with the E5250A Programming the E5250A Describes how to create programs that contain SCPI commands to control the E5250A Command Reference Describes the SCPI commands available to operate the E5250A via GPIB interface and the status reporting structure VXIplug amp play Driver Introduces the VXIplug amp play driver available for the E5250A Executing Sample Programs Explains how to execute and modify the sample programs stored in the program disk that is furnished with the E5250A e Specifications Lists specifications typical data supplemental data and reference data for the E5250A E5252A and E5255A e Error Messages Lists and describes the error messages for the E5250A e SCPI Command Summary This is a quick reference for the SCPI subsystem commands
184. nel numbers to know the close status 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 channel number should be 101 instead of 00101 close_status Status of the channels given in the closechan_list 0 opened or 1 closed hpe5250a_cmd This function passes the cmd_str string to the instrument Must be a NULL terminated C string ViStatus _VI_FUNC hpe5250a_cmd ViSession vi ViString cmd_str vi Instrument handle returned from hpe5250a_init cmd_str Instrument command cannot exceed 256 bytes in length 8 12 Agilent E5250A User s Guide Edition 9 Syntax Parameters Syntax Parameters VXlplug amp play Driver Driver Functions hpe5250a_cmdData_Q This function passes the cmd_str string to the instrument This entry point will wait for a response which may be any data You specify the cmd_str and size parameters and get result ViStatus _VI_FUNC hpe5250a_cmdData_Q ViSession vi ViString cmd_str Vilnt32 size ViChar _VI_FAR result vi Instrument handle returned from hpe5250a_init cmd_str Instrument command cannot exceed 256 bytes in length size Length of result in bytes 2 to 32767 result Response from instrument hpe5250a_cmdInt This function passes the cmd_str string to the instrument This entry point passes the string in cmd_str followed by a space and then the integer in
185. ng Connection Rule Following commands are used to set the Connection Rule For details refer to Connection Rule on page 5 9 Command Description ROUT CONN RULE card_no FREE Sets Free Connection rule ROUT CONN RULE card_no SROU Sets Single Connection rule Example 100 OUTPUT Hp5250 ROUT CONN RULE ALL FREE 110 Sets all cards to Free Connection rule 6 8 Agilent E5250A User s Guide Edition 9 Example Defining Connection Sequence Programming the E5250A Creating a Control Program Following commands are used to specify the Connection Sequence For details refer to Connection Sequence on page 5 10 Command Description ROUT CONN SEQ card_no NSEQ Connection sequence not specified ROUT CONN SEQ card_no BBM Specifies Break before Make connection sequence ROUT CONN SEQ card_no MBBR Specifies Make before Break connection sequence 100 OUTPUT Hp5250 ROUT CONN SI EQ ALL BBM 110 Sets all cards to Break before Make connection sequence Agilent E5250A User s Guide Edition 9 6 9 Programming the E5250A Creating a Control Program Using Bias Mode If you use the Bias Mode following commands are available For details refer to Bias Mode on page 5 11 e Selects input port to be input Bias Port on specified card for E5252A only Command Description ROUT BIAS PORT card_no input_por
186. nit file_name Compensation data file name Use absolute path If the value is NULL string the default data is used If you change the compensation data copy the default data shown below and modify the data for your measurement cable You will need to change the data for DATAOS and 06 and or DATAO7 and 08 corresponding to your cables To measure and change the compensation data refer to Chapter 6 To get the R L and C value measure R L and C of the cable using the 4284A and divide them by cable length in m Compensation data must be the value for 1 m length Do not change the data format in the file E5250A C Compensation coefficient data table CAUTION Do not add or delete REVISION line and DATAxx line Change the value for R L C of DATA05 06 07 or 08 REVISION A 03 00 R ohm L H c F DATAOO 74 65E 3 140 00E 9 58 44E 12 Frame Path 1 DATAO1 75 41E 3 90 00E 9 67 13E 12 Frame Path 2 DATAO2 231 41E 3 450 00E 9 178 85E 12 Card Path High DATAO3 177 56E 3 390 00E 9 135 45E 12 Card Path Low DATA04 100 70E 3 400 00E 9 80 OOE 12 Triax Cable m DATAO5 100 70E 3 400 00E 9 80 00E 12 User Triax Cbl H m DATAO6 100 70E 3 400 00E 9 80 OOE 12 User Triax Cbl L m DATAO7 114 00E 3 544 00E 9 130 OOE 12 User Coax Cbl H m DATA08 114 00E 3 544 00E 9 130 OOE 12 User Coax Cbl L m DATAO9 0 OOE 3 0 OOE 9 1 20E 12 Stray Capacitance END of Data
187. nnection rule 0 free route or 1 single route sequence Connection sequence 0 1 or 2 See below 0 no sequence 1 break before make 2 make before break Agilent E5250A User s Guide Edition 9 8 19 Syntax Parameters VXI plug amp play Driver Driver Functions hpe5250a_couplePort This function sets the couple ports which are used for making kelvin connections on the specified card The specified input port number will be coupled with the next input port and two output ports For each card you may setup the same or different couple ports This command overwrites the previous couple port setting for the card This command applies only to the E5252A card The couple port mode is controlled by the hpe5250a_coupleState function ViStatus _VI_FUNC hpe5250a_couplePort ViSession vi Vilnt16 coupleport_cardno Vilnt16 port1 Vilnt16 port3 Vilnt16 port Vilnt16 port7 Vilnt16 port9 vi Instrument handle returned from hpe5250a_init coupleport_cardn o Card number 1 card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the automatic configuration mode For the configuration mode see hpe5250a_func porti Couple port by the input ports 1 and 2 0 disable or 1 enable port3 Couple port by the input ports 3 and 4 0 disable or 1 enable ports Couple port by the input ports 5 and 6 0 disable or 1 enable port7 Couple port by the input ports
188. not use resistors that have specifications inadequate for your applications which will result in resistors heating up burning or smoking 2 12 Agilent E5250A User s Guide Edition 9 Figure 2 3 Installation Installing the E5250A E5255A Configuration Examples The following example configurations are described e 24 output multiplexer 3 BIAS inputs 1 IV input 1 module e 24 output multiplexer 1 BIAS input 1 IV input 1 module e 96 output multiplexer 1 BIAS input 1 IV input 4 modules 24 output multiplexer 3 BIAS inputs 1 IV input 1 module To make this multiplexer you need a E5255A See Figure 2 3 for example setup The example uses the SMU INPUT 1 connector as the IV input and uses 0 Q resistors 24 output multiplexer 3 BIAS inputs 1 IV input 1 module 5 2 amp PIT H SMU4 O H SMU3 D IVin2 cable G IVin3 cable ii IVout1 O IVout2 D D SW3 pu Block 1 Block 2 Block 3 Q SERS wot iV 500 56 bd 566 XS 6666 XS 12345678 2 9 10111213 141516 171819 20 21 22 23 24 Flo 1 Connect the IVin1 cable to the S
189. not supported by the card 2009 Too many channels in channel list Too many channels are specified in the channel list Maximum number of channels e E5252A number of cards x 120 e E5255A number of cards x 48 2011 Empty channel list No channel list is specified 2012 Invalid channel range Wrong channel list is defined Confirm the syntax of the channel list the card configuration and the configuration mode of the E5250A Agilent E5250A User s Guide Edition 9 11 11 Error Messages E5250A Specific Error Messages E5250A Card Mode Port Related Errors Error Number Error Message and Description 3000 Card0 initialization fail The E5250A may be defective Contact your nearest Agilent Technologies service center 3001 Card1 initialization fail The E5250A or card installed in slot 1 of the ES250A may be defective Or if card is the E5255A the internal cable connection or the DIP switch setting may be wrong 3002 Card2 initialization fail The E5250A or card installed in slot 2 of the E5250A may be defective Or if card is the E5255A the internal cable connection or the DIP switch setting may be wrong 3003 Card3 initialization fail The E5250A or card installed in slot 3 of the ES250A may be defective Or if card is the E5255A the internal cable connection or the DIP switch setting may be wrong 3004 Card4 initialization fail The E5250A or
190. nse Example Command Reference ROUTe OPEN LIST ROUTe OPEN LIST This query command returns 0 or 1 for each channel specified by channel_list in same order as specified by channel_list 0 channel is closed connected 1 channel is opened not connected ROUTe OPEN LIST channel_list Parameter Explanation channel _list Channels to check For details about channel _list refer to Chapter 5 open_status open_status lt newline gt lt END gt 1 opened 0 closed OUTPUT Hp5250 OUTPUT Hp5250 OUTPUT Hp5250 ENTER Hp5250 AS ROUT OPEN CARD ALL ROUT CLOS 10101 10202 ROUT OPEN 10101 10102 10201 10202 In above example AS will be as follows 0 1 1 0 Agilent E5250A User s Guide Edition 9 7 41 Command Reference SYSTem Command Tree SYSTem Subsystem The SYSTem subsystem is a collection of functions that are not related to instrument performance SYSTem Command Tree Command Parameter SYSTem CCONfig card_number CDEScription card_number CPON card_number ALL CTYPe card_number ERRor VERSion Parameter values card_number Auto Config Mode 0 Normal Config Mode 112131 4 7 42 Agilent E5250A User s Guide Edition 9 Syntax Query response Example SYSTem C CONfig Command Reference SYSTem CCONfig This query command returns the card configura
191. nt Program This section introduces and explains how to use and modify the Vth and Capacitance measurement program This section consists of the following sections e Introduction e Setting up the Measurement Environment e Executing the Program e Modifying the Program Introduction This program measures the parameters of the devices shown in Table 9 1 by using the Agilent 4155 4156 Semiconductor Parameter Analyzer the Agilent 4284A Precision LCR Meter and the Agilent E5250A with the E5252A card The program flow is shown in Table 9 2 In this program the 4155 4156 is set up by loading the 4155 4156 setup file E5252 MES which is saved on the E5250A Program Disk So the program disk must be in the 4155 4156 s disk drive when you execute the program Devices and Parameters Measured i No of Measurement Instrument Device Devices Parameter Used Measured N channel MOSFET 1 Threshold Voltage Vth 4155 4156 Capacitor 1 Capacitance 4284A Agilent E5250A User s Guide Edition 9 9 3 Table 9 2 Executing Sample Programs Vth and Capacitance Measurement Program Vth and Capacitance Measurement Flow Step Description 1 Initializes the Instruments Resets the 4155 4156 Resets the 4284A Resets and initializes the ES250A Configuration Mode NORMAL Bias Mode OFF Connection Rule Single Connection Sequence BBM Measures Vth of MOSFET 1 2
192. nt program as following example LOAD P_MAT Link the Capacitance Compensation Routine by using the LOADSUB ALL statement as in following example LOADSUB ALL FROM C_COM Eject the E5250A Program Disk from the disk drive connected to the computer Insert the E5250A Program Disk into the 4155 4156 s disk drive Setup file E5252 MES is stored on the disk and is used to set up 4155 4156 for the Vth measurement RUN the program After the measurement measurement results are displayed on the computer as shown in example in Figure 9 2 Example of Vth and C Measurement Results Comment Vth amp C Meas Sample Program Test Time 30 Sep 1995 10 29 27 P F Min Meas Max Comment P 10 000E 002 18 255E 001 20 000E 001 MOSFET Vth Measurement F 8 000E 12 2 164E 11 2 000E 11 Capacitance Measurement 9 10 Agilent E5250A User s Guide Edition 9 Executing Sample Programs Vth and Capacitance Measurement Program Modifying the Program This section explains how to modify the sample program e To change the GPIB Address e To change the header of the measurement result report e To output the measurement report to printer e To execute the 4155 4156 calibration e To save the 4155 4156 measurement data e To change the Vth measurement setup e To change the capacitance measurement setup e To use the VFP data upload library To change the GPIB Address You can EDIT the progr
193. numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 ViStatus _VI_FUNC hpe5250a_closeList ViSession vi Vilnt32_VI_FAR closechan_list vi Instrument handle returned from hpe5250a_init closechan_list Channel numbers to connect 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 channel number should be 101 instead of 00101 Agilent E5250A User s Guide Edition 9 8 11 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions hpe5250a_closeList_Q This function will query the instrument for the channels closed given in the closechan_list The parameter closechan_list is an array of integers with each integer representing one channel The last number of the closechan_list should be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 The close_status parameter is an array of integers containing the return values of the query The close_status array returned will correspond one to one with closechan_list parameter ViStatus _VI_FUNC hpe5250a_closeList_Q ViSession vi Vilnt32_VI_FAR closechan_list Vilnt32 _VI_FAR close_status vi Instrument handle returned from hpe5250a_init closechan_list Chan
194. of DEFINE LABEL MENU Agilent E DEFINE E5250A CARD1 CARD2 CARD3 CARD4 Select de 5 32 5250A Virtual Front Panel Utility LABEL MENU NPUTI EV 8 NPUT2 Iv2 NPUT3 TVv3 NPUT4 Iv4 NPUT5 Iv5 NPUT6 IV6 NPUT7 HEIL NPUT8 HF2 NPUT9 CVI T NPUTIO CVZ 8 E5252A No Bias Input Port E5252A No Bias Input Port E5255A BIAS1 C3B1 BIAS2 C3B2 BIAS3 C3B3 E5255A BIAS1 C4Bl BIAS2 C4B2 BIAS3 C4B3 sired softkey Agilent E5250A User s Guide Edition 9 Controlling the E5250A Using Virtual Front Panel Utility Making Connections and Changing the Setup Data Select SETUP MEMORY softkey The E5250A is initially set to connections of setup memory 1 then SETUP MEMORY MENU and following softkeys are displayed Current Setup Memory indicates setup memory that currently sets E5250A Softkey Description NEXT SETUP Changes Current Setup Memory to next setup memory number Increases number of Current Setup Memory by 1 And changes the E5250A to new settings PREV SETUP Changes Current Setup Memory to previous setup memory number Decreases number of Current Setup Memory by 1 And changes the E5250A to new settings GOTO SETUP Changes the E5250A to settings of specified setup memory See later Changes Current Setup Memory to specified setup memory number MODIFY SETUP For modifying settings in Current Se
195. ogramming Basics SCPI Programming Basics This section describes the structure of SCPI commands and the basics of using an program that contains SCPI commands to control the E5250A and runs on HP BASIC e SCPI Command Hierarchy e Controlling E5250A by Using HP BASIC Agilent E5250A User s Guide Edition 9 6 3 Programming the E5250A SCPI Programming Basics SCPI Command Hierarchy The SCPI commands use a hierarchical structure for subsystem commands similar to a file system For example in ROUT CONN RULE command the hierarchy is as follows ROUT root CONN sub level 1 RULE sub level 2 The colon at the beginning of the command means root The colons between two command keywords means moving down to a lower level NOTE Using a Semicolon to Reduce Typing A semicolon enables two commands to be sent on the same line For example ROUT CONN RULE ALL FREE SEQ ALL BBM is the same as the following two commands ROUT CONN RULE ALL FREE ROUT CONN SEQ ALL BBM So using a semicolon reduces typing and simplifies the program A command terminator such as carriage return resets the path to root 6 4 Agilent E5250A User s Guide Edition 9 Programming the E5250A SCPI Programming Basics Controlling E5250A by Using HP BASIC 1 Assign I O path for controlling the E5250A by using the ASSIGN command In the following example the select code of the external computer is 7 and GPIB
196. ommand Description SYST CDES card_number Returns a description of the specified card model number and input output port info card_number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 OX L CPON card_number Resets the specified card to the power on state card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL lt SYoL CTYP card_number lt SYo ERR SYS VERS 12 8 Returns ID of specified card model number and revision card_number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 Reads error from head of error queue and removes that error from queue Returns SCPI version number for which the E5250A complies Agilent E5250A User s Guide Edition 9
197. on executes the controller test the front panel test or the relay test for the specified card You must attach the relay test adapter before executing the relay test The Front Panel test requires the key to be pressed within 10 seconds else the test will fail ViStatus _VI_FUNC hpe5250a_testExec_Q ViSession vi Vilnt16 framecard_exec ViPInt16 exec_result vi Instrument handle returned from hpe5250a_init framecard_exec Test to be executed 1 card 1 relay test to 4 card 4 relay test 5 relay test for all card 6 front panel test or 7 controller test exec_result Test result 0 No error hpe5250a_timeOut This function sets a minimum timeout value for driver I O transactions in milliseconds The default timeout period is 2 seconds ViStatus_VI_FUNC hpe5250a_timeOut ViSession vi ViInt32 timeOut vi Instrument handle returned from hpe5250a_init timeOut T O timeout value for all functions in the driver in milliseconds 0 to 2147483647 hpe5250a_timeOut_Q This function returns the timeout value for driver I O transactions in milliseconds ViStatus_VI_FUNC hpe5250a_timeOut_Q ViSession vi ViPInt32 pTimeOut vi Instrument handle returned from hpe5250a_init pTimeOut Minimum timeout period that the driver can be set to in milliseconds Agilent E5250A User s Guide Edition 9 8 31 VXI plug amp play Driver Driver Functions 8 32 Agilent E5250A User s Guide Edition 9 Executing Sample Programs
198. on rule is used to specify if an input or output port can have multiple connections and it is specified by the ROUTe CONNection RULE command described in Chapter 7 For each card installed in the E5250A for auto configuration mode installed cards are treated as one card you can specify one of the following connection rules Single Route E5250A INPUT Free 3 Each input port can be connected to only one output port and each output port can be connected to only one input port So existing connection to a port must be disconnected when a new connection is made If normal configuration mode is set to the E5250A with multiple cards an input output path is effective for each card For example if normal configuration mode is set to the E5250A with two E5252As and single route is set to both cards the following connection is possible Po LHe s E t Q G Q sy Y Y i i i L cl fl I 1 O Q eter materi Close a e 12 Open E5252A Card 1 Output E5252A Card 2 Output Each input port can be connected to multiple output ports and each output port can be connected to multiple input ports If the Free connection rule has been specified ensure multiple input ports are not connected to the same output port Such configurations can cause damage Agilent E5250A User s Guide Edition
199. operation is canceled To insert a setup memory Select the INSERT SETUP softkey The following message is displayed Input setup memory number to be inserted ENTER to cancel Type the setup memory number where you want to insert a new setup memory then press the Enter key For example if you specify 12 setup memory 24 is deleted setup memories 12 to 23 are shifted up by one and new setup memory 12 is set to Open All If you press Enter key without typing a number operation is canceled To clear setup memory To clear a setup memory select the CLEAR SETUP softkey The following message is displayed Input setup memory number to be cleared ENTER to cancel Type the setup memory number to clear then press the Enter key The setup memory is set to Open All To clear all setup memories select the CLEAR ALL softkey The following message and softkeys are displayed Clear all setup memory OK Softkey Description CLEAR ALL Clears all setup memories CANCEL Cancels the clear operation Select the CLEAR ALL softkey to clear all setup memories Agilent E5250A User s Guide Edition 9 5 35 Figure 5 12 Controlling the E5250A Using Virtual Front Panel Utility To modify the settings in Current Setup Memory Select MODIFY SETUP softkey MEMORY SETUP PANEL appears as shown in examples in Figure 5 12 to Figure 5 14 and softkeys shown after Figure 5 14 appear One setup memory is used fo
200. or of plug in card open output at DUT end of cable If end of cable is Kelvin connection disconnect the cable or make non Kelvin connection at end of cable e For each E5255A installed in the E5250A connect a BNC short cap to each E5255A BIAS INPUT connector 3 6 Agilent E5250A User s Guide Edition 9 Table 3 2 NOTE SCPI Commands for Self Test Executing Self Test and Leak Test Executing Self Test Test Item Description SCPI Command Controller Executes Controller Test DIAG TEST FRAM EXEC CONT Test then returns test result Returns test result DIAG TEST FRAM STAT CON Clears test result DIAG TEST FRAM CLE CONT Front Panel Executes I F Test then DIAG TEST FRAM EXEC FPAN Interface returns test result I F Test Returns test result DIAG TEST FRAM STAT FPAN Clears test result DIAG TEST FRAM CLE FPAN Relay Test Executes Relay Test then DIAG TEST CARD EXEC ALL returns test result or Card No 1 2 3 or 4 Returns test result DIAG TEST CARD STAT ALL or Card No 1 2 3 or 4 Clears test result DIAG TEST CARD CLE ALL or Card No 1 2 3 or 4 Front Panel Interface Test After the DIAG TEST FRAM EXEC FPAN command is executed the Remote System Fail Fail and Local Self Test LEDs on the E5250A front panel blink for about 10 second
201. orporation NOTE Safety Summary The following general safety precautions must be observed during all phases of operation service and repair of this instrument Failure to comply with these precautions or with specific warnings elsewhere in this manual may impair the protections provided by the equipment In addition it violates safety standards of design manufacture and intended use of the instrument Agilent Technologies Inc assumes no liability for customer s failure to comply with these requirements Agilent E5250A complies with INSTALLATION CATEGORY II for mains input and INSTALLATION CATEGORY I for measurement input terminals and POLLUTION DEGREE 2 defined in IEC 1010 1 Agilent E5250A is INDOOR USE products GROUND THE INSTRUMENT This is Safety Class I instrument To minimize shock hazard the instrument chassis and cabinet must be connected to an electrical ground The power terminal and the power cable must meet International Electrotechnical Commission IEC safety standards DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE Do not operate the instrument in the presence of flammable gases or fumes Operation of any electrical instrument in such an environment constitutes a definite safety hazard KEEP AWAY FROM LIVE CIRCUITS Operation personnel must not remove instrument covers Component replacement and internal adjustments must be made by qualified maintenance personnel Do not replace components with power cable con
202. ouch terminals that have this symbol when insrument is on Affixed to product containing static sensitive devices use anti static handling procedures to prevent electrostatic discharge damage to component Protective conductor terminal For protection against electrical shock in case of a fault Used with field wiring terminals to indicate the terminal which must be connected to ground before operating equipment Frame or chassis terminal A connection to the frame chassis of the equipment which normally includes all exposed metal structures Indicates earth ground terminal Alternating current Direct current ON Supply OFF Supply STANDBY Supply Means INSTALLATION CATEGORY I Measurement terminals on the rear panel comply with INSTALLATION CATEGORY I The warning sign denotes a hazard It calls attention to a procedure practice condition or the like which if not correctly performed or adhered to could result in injury or death to personal The caution sign denotes a hazard It calls attention to an operating procedure practice condition or the like which if not correctly performed or adhered to could result in damage to or destruction of part or all of the product In This Manual This manual is a user s guide for Agilent E5250A and consists of the following chapters Introduction Provides an overview of the E5250A Low Leakage Switch Mainframe E5252A 10x12 Matrix Switch and E5255A 24 8x3 Chan
203. ough connectors female to female 16495G 002 Connectors to contacts for soldering Agilent E5250A User s Guide Edition 9 Introduction Options and Accessories 1 16 Agilent E5250A User s Guide Edition 9 Installation Installation This chapter describes requirements to install Agilent E5250A and the tasks for installation and is organized into the following three sections e To Inspect the E5250A and Accessories describes how to inspect the E5250A when you receive it e Requirements explains the information required for operating storing and shipping the E5250A e Installing the E5250A describes how to install the E5250A e Maintenance describes about performance verification and cleaning A WARNING The maximum input voltage of the E5250A is 200 V And dangerous voltages may be present at the E5250A output terminals To prevent electric shock you must observe the following safety precautions when using the E5250A e Use a three conductor ac power cable to connect cabinet if used and the E5250A to an electric ground safety ground If you need to touch the force and guard terminals of the output connector turn off the E5250A and discharge any capacitors whenever possible e Warn workers around the E5250A about dangerous conditions 2 2 Agilent E5250A User s Guide Edition 9 Installation To Inspect the E5250A and Accessories To Inspect the E5250A and Ac
204. outine Programming Example The following program is an example for using the capacitance compensation subprogram 100 Example of Capacitance Compensation LO 120 Freq 1 E 6 MEASUREMENT FREQUENCY 1MHz 130 L1 1 5 E5252A OUTPUT CABLE 1 5m 140 L2_h 0 TRIAX CABLE High SIDE none 0m 150 L2_1 0 TRIAX CABLE Low SIDE none 0m f 160 L3_h 2 COAX CABLE High SIDE 2m 170 L3_1 2 COAX CABLE Low SIDE 2m 180 190 OUTPUT Hp4284 FUNC IMP CPG SET Cp G FUNCTION 200 OUTPUT Hp4284 FREQ amp VALS Freq SET MEAS FREQ 210 OUTPUT Hp4284 CORR LENG 2M SET 16048D LENGTH 220 OUTPUT Hp4284 TRG H 230 ENTER Hp4284 C_m G_m Stat 240 250 Ccompen_5250 Freq L1 L2_h L2_1 L3_h L3_1 C_m G_m C_c G_c 260 DISP CORRECTED C DATA C_c 270 DISP CORRECTED G DATA G_c 280 290 END Before Executing Your Program Before executing a program that uses the capacitance compensation subprogram you must link the subprogram to your program as follows The subprogram is in an ASCII file on the ES250A Program Disk 1 GET the file C_COMPEN from the E5250A Program Disk GET C_COMPEN 2 RE STORE the file RE STORE C_COM 3 Load your program 4 Link the subprogram to your program by using the LOADSUB statement LOADSUB ALL FROM C_COM Error Messages If error occurs following error message is displayed and program is paused Parameter Out of Range Improper parameter value Confirm an
205. p5250 OPC 210 ENTER Hp5250 Complete 220 230 Put Measurement Routine here 240 250 OUTPUT Hp5250 ROUT BIAS STAT ALL OFF 260 OUTPUT Hp5250 ROUT OPEN CARD ALL 270 OUTPUT Hp5250 OPC 280 ER Hp5250 Complete 290 1 300 OUTPUT Hp5250 RST 310 320 END Line Description Number Pp 170 Here insert your bias source control routine 190 Disconnects all output ports of block 1 from the input Bias Port then connects the output ports to the IV input port 200 to 210 Waits until the channel connections are completed 230 Here insert measurement routine for your measurement instrument 250 Turns off the Bias Mode 260 to 280 Opens all relays then connects all output ports of block 1 to the input Bias Port again and waits until the connections are completed 300 Resets the E5250A 6 18 Agilent E5250A User s Guide Edition 9 Figure 6 3 Required Conditions Programming the E5250A Programming Examples Couple Port Example The following example shows how to use the Couple Port This function is available only for the E5252A Example of Couple Port to all Instrument 4o Source This program assumes the following conditions E5250A Installed Cards e Slot 1 E5252A must be installed e Slot 2 to 4 not used E5250A Input Ports e SMU INPUT 1 and 2 should be connected to instrument e SMU INPUT 3 amp 4 and 5 amp 6 should be connected to instrument Couple port e AUX INPUTs no
206. pecifically 311 Memory error An error was detected in the E5250A s memory 350 Queue overflow If error queue is full this code is entered into the error queue instead of the code that caused the error This code indicates that there was no room in the error queue so an error occurred but was not recorded 11 8 Agilent E5250A User s Guide Edition 9 Error Messages Standard SCPI Error Messages Query Errors If the output queue control of the E5250A detects one of following problems a 4XX error occurs e An attempt was made to read data from the output queue when no output data is present or pending e Data in the output queue has been lost If this type of error occurs the error number and message are placed in the error queue and bit2 of the Standard Event Status Register is set Error Number Error Message and Description 400 Query error Generic query error for the E5250A that cannot be determined more specifically 410 Query INTERRUPTED A condition causing an INTERRUPTED query error occurred for example a query followed by DAB or GET before a response was completely sent 420 Query UNTERMINATED A condition causing an UNTERMINATED query error occurred for example the E5250A was addressed to talk and an incomplete program message was received 430 Query DEADLOCKED A condition causing a DEADLOCKED query error occurred for example both input buffer and
207. pen All 10 Open All 22 Open All 11 Open All 23 Open All 12 Open All 24 Open All Select desired softkey To change the E5250A setup to specified setup memory Select the GOTO SETUP softkey The following message is displayed Input setup memory number to be connected Type the desired setup memory number then press the Enter key Current Setup Memory changes to the specified setup memory and the E5250A changes to the new settings If you press Enter key without typing a number the operation is canceled To copy a setup memory Select the COPY SETUP softkey The following message is displayed Input copy src amp dest setup memory number src dest Type the desired setup memory number then press the Enter key This operation overwrites the setup memory data For example to copy setup memory No 1 to No 5 type as follows 1 5 If you press Enter key without typing numbers operation is canceled 5 34 Agilent E5250A User s Guide Edition 9 Controlling the E5250A Using Virtual Front Panel Utility To delete a setup memory Select the DELETE SETUP softkey The following message is displayed Input setup memory number to be deleted ENTER to cancel Type the setup memory number to delete then press the Enter key For example if you type 12 setup memory 12 is deleted setup memories 13 to 24 are shifted down by one and setup memory 24 is set to Open All If you press Enter key without typing a number
208. plate or test fixture and describes the information to connecting the connectors to prober socket or DUT e Connecting the E5250A Input explains how to connect instruments to the E5250A input e Connecting the E5250A Output describes the information to connect the plug in card output to a connector plate connectors on your own shielding box and so on e Measurement Cable Length is a reference for deciding total cable length at your site by calculating the total guard capacitance according to the cable length from instrument to Device Under Test DUT 4 2 Agilent E5250A User s Guide Edition 9 Setting up Measurement Environment Connector Plates Connector Plates A connector plate is the interface to connect the E5250A to your prober or test fixture The following connector plates are available for the E5250A To install the connector plate refer to Agilent 16495 Installation Guide Connector Plates for the E5252A 16495F 16495G Half size connector plate for E5252A 16495F 001 has 12 triaxial through connectors female to female an Intlk connector and a GNDU connector triaxial through female to female The back of the Intlk connector is designed for soldering 16495F 002 has 12 triaxial connectors an Intlk connector and a GNDU connector The back of each connector is designed for soldering Full size connector plate for E5252A 16495G 001 has 24 triaxial through connectors female to female
209. press Enter key To cancel operation press Enter key without typing a number To change the Bias Mode state Select BIAS STATE softkey This softkey toggles the state OFF ON To enter cancel the changes and return to the VFP main menu Select MAIN MENU softkey If you did not make changes Main Menu is displayed If you made changes following message softkeys are displayed Changing mode will clear all setup memory OK Softkey Description CHANGE Enters the changes you made and returns to the VFP main menu MODE All the previous setup memory data is cleared CANCEL Cancels the changes you made and returns to the VFP main menu Setup memory data is not cleared 5 30 Agilent E5250A User s Guide Edition 9 Controlling the E5250A Using Virtual Front Panel Utility Defining Labels for the E5250A Input Ports You can define labels to use for the input ports of each row in the MEMORY SETUP PANEL Select the DEFINE LABEL softkey The DEFINE LABEL MENU and following softkeys are displayed Softkey Description E5250A For displaying softkeys to select the desired input ports See below INPUT CARDn For selecting the E5255A You can define a label for the input Bias INPUT Port of selected E5255A This softkey is displayed only for card n 1 to 4 slots that have the E5255A installed See next page MAIN For returning to VFP main menu MENU To define labels for the E5250A input port
210. put 96 output multiplexer 1 BIAS input 1 IV input 4 modules BNC open caps 3 BNC cables 4 BIAS INPUT 51 ____ slot number BNC cable from Bias Source Do not forget to connect the BNC open caps to the unused BIAS INPUT connectors Otherwise you will be shocked if you touch the connectors while bias is applied DO NOT connect the BNC short cap to the connectors If you do the E5255A and the Bias Source will be destroyed when the bias is applied 2 16 Agilent E5250A User s Guide Edition 9 Installation Installing the E5250A To Set GPIB Address Every device on the GPIB bus must have a unique address If you need to change the GPIB address of the E5250A make sure the E5250A is turned off With a small flatblade screwdriver set the GPIB ADDRESS switch on the rear panel to the new address 0 to 30 The new GPIB address is recognized only at power on The E5250A leaves the factory with the GPIB address set to 22 To Connect GPIB Cable To connect the E5250A with a computer or peripheral device via GPIB IEEE Std 488 connect an GPIB cable between the GPIB connector on the E5250A rear panel and the GPIB connector on the peripheral device Including the controller a total of 15 GPIB interfaces can be connected on the same GPIB bus The following are rules for connecting GPIB interfaces If total number of interfa
211. put Output SLoT2 1 24 JUI te al Bias Input B BIAS SOURCE 2 25 48 25 to 48 SLOT3 N pl assos ie E5250A 49 72 ee SMU V l GPIB Cable HPs wss o anu H 16494A 003 3ea C lDrain p gt 4155 4156 Sl Gate Sub GNDU Source HP BASIC 41501 16494A 001 or 002 A CONTROLLER I 2 oe Se 24 J 25 J26 acces o 48 J Par Son aZ Ta GNDU J j a i J 4 z 4 i Pd N po Z ee 7 a Cc P flo vA C Coo Devicel Device2 Device24 Total 24ea NOTE Device used to Determine Stress Conditions HCI test program SP_MUX_M uses Device above to determine stress voltages Vdstr and Vgstr So during the program you are prompted to replace Devicel after these voltages are determined 9 26 Agilent E5250A User s Guide Edition 9 Executing Sample Programs HCI Measurement Program Executing the Program You should have already added the bias source control routine and set up the measurement environment as described previously Before running the program do following 1 Set the GPIB address of instruments as follows e 4155 4156 717 e E5250A 722 e Bias Source Set the GPIB addresses to match your control routine Address 701 to 703 are defaults used in SP_MUX_M program Turn on all instruments and the computer Boot up HP BASIC operating system Insert a diskette into the computer s disk drive The diskette must contain the HCI test prog
212. r An improper data type was received for example numeric data was expected but string data was received 105 GET not allowed A group execute trigger was received within a program message 108 Parameter not allowed Too many parameters for the command were received 109 Missing parameter Fewer parameters were received than required for the command 110 Command header error An error was detected in the header This error message is reported if the E5250A cannot determine the more specific header errors 111 through 114 111 Header separator error An illegal character for a header separator was received for example no white space between the command header and parameter 112 Program mnemonic too long A keyword in the command header contains more than twelve characters 113 Undefined header An undefined command header was received for example XYZ or ROUT OPEN COOD 11 4 Agilent E5250A User s Guide Edition 9 Error Messages Standard SCPI Error Messages Error ane Nimber Error Message and Description 120 Numeric data error An error was detected in a numeric parameter including the non decimal numeric types This error message is reported when the E5250A cannot determine the more specific errors 121 through 128 121 Invalid character in number An invalid character for the parameter was received for example an alphacharacter was received when the parameter type was decimal
213. r sequence Specifies the connection sequence mode for the specified card card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL sequence NSEQ No Sequence mode BBM Break Before Make mode MBBR Make Before Break mode Agilent E5250A User s Guide Edition 9 12 5 SCPI Command Summary Command Description ROUT CONN SEQ card_number Returns the connections sequence mode of the specified card NSEQ No Sequence mode BBM Break Before Make mode MBBR Make Before Break mode card_number For Auto Config mode 0 For Normal Config mode 1 2 3 4 ROUT COUP PORT card_number couple_port Sets up the couple ports for the specified card Only for the E5252A card card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL couple_port One or more input port numbers 1 3 5 7 or 9 Enclose by single quotation marks Separate multiple input port numbers by comma For example 1 5 ROUT COUP PORT card_number Returns the lower input port number of each couple pair on the specified card Only for the E5252A card card_number For Auto Config mode 0 For Normal Config mode 1 2 3 4 ROUT COUP STAT card_number state Turns Couple Mode ON or OFF for the specified card Only for the E5252A card card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or AL
214. r 1 turn ON Bias Mode OFF or 0 turn OFF Bias Mode ROUT BIAS STAT card_number Returns the Bias Mode for the specified card 0 Bias Mode is OFF 1 Bias Mode is ON card_number For Auto Config mode 0 For Normal Config mode 1 2 3 4 12 4 Agilent E5250A User s Guide Edition 9 SCPI Command Summary Command Description ROUT CLOS CARD card_number Returns channel_list of all closed channels for the specified card Closed channel means an input port connected to an output port card_number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 ROUT CLOS LIST channel_list ROUT CLOS LIST channel_list Connects input ports to output ports as specified in channel_list channel_list Channels to close Returns whether specified channels are closed 0 channel is open not connected 1 channel is closed connected channel_list Channels to check ROUT CONN RULE card_number rule Sets the connection rule for the specified card card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL rule FREE free route or SROUte single route ROUT CONN RULE card_number Returns the connection rule of the specified card FREE free route SROU single route card_number For Auto Config mode 0 For Normal Config mode 1 2 3 4 ROUT CONN SEQ card_numbe
215. r 4155 4156 GPIB address 17 Swm_sc E5250A GPIB select code 7 Swm_addr E5250A GPIB address 22 Agilent E5250A User s Guide Edition 9 9 35 Executing Sample Programs HCI Measurement Program To change the 4155 4156 setup file used To change the 4155 4156 s setup file used for the HCI test program modify the setting of the setup file and save it as a new setup file Then change the following parameter in the Definition of measurement and stress setup files block of the program Parameter Description Default Ibvg_file Setup file for extracting Vgstr IBVGMES Igleak_file Setup file for Gate leakage current IGLEAK MES measurement Idleak_file Setup file for Drain leakage current IDLEAK MES measurement Param_file Setup file for parameter measurement PARAM MES To change Vtci extraction condition To change W L ratio Gate width Gate length ratio required for Vtci extraction do follows 1 GET the PARAM LMES setup file by using the 4155 4156 2 Change the setting of ID parameter in LINE2 on the ANALYSIS SETUP screen The value of ID can be calculated by the following expression ID 1 pA x W L where W means Gate width in m and L means Gate length in m 3 Change the following parameters in the Device geometries block of program Parameter Description Default Gate_length Gate length in m 1 E 6 Gate_width Gate width in m 1 E 5 9
216. r 4156 Semiconductor 1 Executing Parameter Analyzer Self Test Utility 10833A B C GPIB Cable 1 E5250 17003 E5250A Program 1 Disk furnished E5250A 301 Relay Test Adapter 1 Relay Test E5250 60002 1250 0929 BNC Short Cap 3 for each E5255A furnished with the E5255A 3 10 Agilent E5250A User s Guide Edition 9 Executing Self Test and Leak Test Using the Self Test Utility To Start the Self Test Utility 1 Before turning on the 4155 4156 and E5250A connect the GPIB cable between the E5250A and the 4155 4156 Turn on the 4155 4156 and E5250A Set the 4155 4156 to SYSTEM CONTROLLER mode on SYSTEM MISCELLANEOUS page Insert the E5250A Program Disk into the 4155 4156 disk drive Press the Display key twice to display the All IBASIC screen This key is located in the IBASIC area on the 4155 4156 front panel Select GET softkey on the 4155 4156 screen The following is displayed GET Type SELFTEST between the double quotations of GET statement Then press Enter key Wait until the 4155 4156 finishes getting the file Press Run key which is in the IBASIC area on the 4155 4156 front panel The following message is displayed Input Agilent E5250A GPIB Address default 722 To use default GPIB address 722 just press the Enter key If not type the GPIB address of your E5250A then press Enter key MAIN MENU of the E5250A Self Test Utility and following softkeys are displayed on the 4155 4156
217. r connection data of all installed cards For Auto Config mode settings for all cards are on one MEMORY SETUP PANEL For Normal Config mode each card uses a different MEMORY SETUP PANEL Memory Setup Panel for the E5252A in Auto Config Agilent E5250A Virtual Front Panel Utility MEMORY SETUP PANEL Current Setup Memory 1 Comment MOSFET Vth Card Number 10 111111111122222222223333333333444444444 Input 123456789012345678901234567890123456789012345678 Iv Gs E eeu ee cried at bid Nhe kes es E E Gots Racist Bike E ache Use softkeys to move cursor and to change status 5 36 Agilent E5250A User s Guide Edition 9 Controlling the E5250A Using Virtual Front Panel Utility Figure 5 13 Memory Setup Panel for the E5255A in Normal Config 2 X 24 multiplexer Agilent E5250A Virtual Front Panel Utility MEMORY SETUP PANEL Current Setup Memory 1 Comment MOS CAP Card Number ei Input 12345678 IV1 CEPE E BS1 CCCCCCC IV oaa BS1 eeEe IVL o iaaea BSO Fosss sasn Use softkeys to move cursor and to change status Figure 5 14 Memory Setup Panel for the E5255A in Auto Config 2 X 24 multiplexer Agilent E5250A Virtual Front Panel Utility MEMORY SETUP PANEL Current Setup Memory 1 Comment MOS CAP Card Number 20 111111111122222 Input 123456789012345678901234 IVL C E E ea fete ae ats te BS1 eCeEEee e Use softkeys to move cursor and to change status Agil
218. r different Bias Port This function applies only to the E5252A card ViStatus _VI_FUNC hpe5250a_biasPort ViSession vi Vilnt16 biasport_cardno Vilnt16 bias_port vi Instrument handle returned from hpe5250a_init biasport_cardno Card number card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the automatic configuration mode For the configuration mode see hpe5250a_func bias_port Input port number to be set to the bias port 1 to 10 input port 1 to input port 10 hpe5250a_biasState This function controls the bias mode for the specified card When Bias Mode is ON the input Bias Port is connected to all bias enabled output ports that are not connected to any other input ports Bias disabled output ports are never connected to the input Bias Port when Bias Mode is ON ViStatus _VI_FUNC hpe5250a_biasState ViSession vi Vilnt16 biasstate_cardno Vilnt16 state vi Instrument handle returned from hpe5250a_init biasstate_cardno Card number 1 card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the automatic configuration mode For the configuration mode see hpe5250a_func state Bias mode 0 OFF or 1 ON Agilent E5250A User s Guide Edition 9 8 9 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions hpe5250a_close This function terminates the soft
219. r pending operations and sets clears the Operation Complete OPC bit in the Standard Event Status Register as follows e If there is no pending operation sets the OPC bit to 1 e Ifthere are any pending operations sets the OPC bit to 0 The bit will be set to 1 again when all pending operations are completed So OPC command is required to enable the OPC bit To stop monitoring pending operations disable OPC bit execute the CLS command For details about the Standard Event Status Register refer to Standard Event Status Register on page 7 53 Also see WAI command OP C 1 lt newline gt lt END gt OPC places ASCII character 1 into the Output Queue when all pending operations are completed For details refer to Output Queue on page 7 55 OUTPUT Hp5250 OPC The following example is for query OUTPUT Hp5250 OPC ENTER Hp5250 A Agilent E5250A User s Guide Edition 9 7 9 Command Reference RST RST This command performs an instrument reset Status after RST is shown below Channel Configuration Normal Config Mode Connection Rule Free Connection Sequence Break Before Make Bias Mode Off Bias Port e E5252A 10 e E5255A None Bias Enabled Channels All channels output ports are bias enabled Couple Port Mode Off Couple Port No Couple Port Card Channel Status All relays open Self Test Result No Change Syntax RST Example OUTPUT Hp5250 RST NOTE This
220. ram SP_MUxX in this example you modified in Adding the Bias Source Control Routine on page 9 23 Specify the computer s mass storage device disk drive the diskette is inserted by using MSI statement For example if the device is CS80 702 1 enter the following command MSI CS80 702 1 Load your HCI test program The following example loads and displays SP_MUX program in this example LOAD SP_MUX EDIT Insert the E5250A Program Disk into the 4155 4156 s disk drive then get the setup file IDVD MES to set up the 4155 4156 Enter the following command from the command line of the computer OUTPUT 722 ROUT CLOS 10101 20101 30101 Press Single key on the 4155 4156 s front panel The Id Vds measurement is performed and the Id Vds measurement result is displayed as shown in Figure 9 5 Determine the drain stress voltage Vdst r from the above curve Recommended maximum value is about 0 5 V below actual breakdown Then edit the HCI test program SP_MUX in this example and define the Vdst r value The value should be defined in the following program line Agilent E5250A User s Guide Edition 9 9 27 Executing Sample Programs HCI Measurement Program Drain stress voltage should be determined by Id Vd charact eristics Vdstr 5 Drain stress voltage After defining the value re store the program Figure 9 5 Id Vds Measurement Example GRAPH LIST GRAPHICS MEDI Utd 940CTO
221. ramming the E5250A Standard Commands for Programmable Instruments SCPI is a universal programming language for electronic test and measurement instruments and based on IEEE 488 1 and IEEE488 2 This chapter describes how to create programs that contain SCPI commands to control the E5250A These programs can be run from an external controller This chapter explains the following programming tasks along with programming examples e SCPI Programming Basics explains the basics of using an program that contains SCPI commands to control the E5250A and runs on HP BASIC e Creating a Control Program shows typical programming flow for controlling the E5250A e Programming Examples provides some examples of the E5250A programming e Using the VFP Data Upload Library explains how to use the VFP Data Upload Library furnished with the ES250A e Using the Capacitance Compensation Routine explains how to use the Capacitance Compensation Routine furnished with the E5250A For the details about SCPI commands refer to Chapter 7 In addition to this chapter refer to Chapter 9 which describes how to use and modify the sample programs furnished with the E5250A and helps to increase your understanding about programming The VFP Data Upload Library and the Capacitance Compensation Routine can be used only in an program runs on HP BASIC 6 2 Agilent E5250A User s Guide Edition 9 Programming the E5250A SCPI Pr
222. ration to the auto configuration mode or the normal configuration mode ViStatus _VI_FUNC hpe5250a_func ViSession vi Vilnt16 channel_config vi Instrument handle returned from hpe5250a_init channel_config Configuration mode 0 auto or 1 normal 8 24 Agilent E5250A User s Guide Edition 9 Syntax Parameters Syntax Parameters VXlplug amp play Driver Driver Functions hpe5250a_init This function initializes the software connection to the instrument and optionally verifies that instrument is in the system In addition it may perform any necessary actions to place the instrument in its reset state If the hpe5250a_init function encounters an error then the value of the vi output parameter will be VILNULL ViStatus _VI_FUNC hpe5250a_init ViRsrc InstrDesc ViBoolean id_query ViBoolean do_reset ViPSession v1 InstrDesc Instrument description Examples GPIBO 1 INSTR id_query VI_TRUE to perform In System Verification or VI_FALSE do not perform In System Verification do_reset VI_TRUE to perform reset operation or VI_FALSE do not perform reset operation vi Instrument handle This is VI_NULL if an error occurred during the init hpe5250a_opc_Q This function does the OPC common command ViStatus _VI_FUNC hpe5250a_opc_Q ViSession vi ViPBoolean result vi Instrument handle returned from hpe5250a_init result VI_TRUE Operation complete or VI_FALSE Operation is pending Agilent E
223. rd 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the automatic configuration mode For the configuration mode see hpe5250a_func hpe5250a_biasChanList This function will enable or disable bias on all the output ports specified by the biaschan_list The parameter biaschan_list is an array of integers with each integer representing one channel The last number of the biaschan_list should be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 ViStatus _VI_FUNC hpe5250a_biasChanList ViSession vi Vilnt16 biaschan_disen Vilnt32 _VI_FAR biaschan_list vi Instrument handle returned from hpe5250a_init biaschan_disen Bias status 0 sets bias enabled port 1 sets bias disabled port biaschan_list Channel numbers 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 channel number should be 101 instead of 00101 Agilent E5250A User s Guide Edition 9 8 7 Syntax Parameters VXI plug amp play Driver Driver Functions hpe5250a_biasChanList_Q This function will query the instrument for the bias status for the channels given in the list The parameter biaschan_list is an array of integers with each integer representing one channel The last number of the biaschan_list sho
224. s 3 sets with 10 resistors in each set If you replace initial 0 resistors with other resistors you must cut the initial resistors Then if you need 0 Q resistors again use the ones listed above Be careful about the following when selecting protective resistors If only one E525SA is installed in the mainframe total power consumption by resistors must be less than 16W e If multiple E5255As are installed in the mainframe total power consumption by resistors must be less than 32W Consider the current flows to resistor when DUT shorts and make sure the power consumption by resistor will be within specification of resistor Do not use resistors that have specifications inadequate for your applications which will result in resistors heating up burning or smoking Be careful about the heating of the rear panel of mainframe or plug in card which may be heated by resistors even if you follow this warning Agilent E5250A User s Guide Edition 9 1 9 Introduction Agilent E5255A Product Description Figure 1 5 E5255A Block Diagram BLOCK 1 BIAS Input V Resistor gt IV Input 1 Output 5 1 3 4 6 7 BLOCK 2 BIAS Input2 Q V Resistor
225. s If an LED does not blink the LED is defective Confirm that the four LEDs are blinking then press the Local Self Test key on the E5250A front panel within 10 seconds The LEDs should stop blinking If you do not press the Local Self Test key within 10 seconds the E5250A returns a fail result for the Front Panel Interface Test which turns on the Fail LED If you pressed Local Self Test key within 10 seconds and the Fail LED still turns on it means the Local Self Test key is defective If you find any problem contact your nearest Agilent Technologies Service Center Agilent E5250A User s Guide Edition 9 3 7 Executing Self Test and Leak Test Executing Self Test Self Test Programming Example This sample program is effective for an E5250A that has four cards installed If your E5250A does not have four cards installed delete the Relay Test program lines for the empty card slots The program runs on HP BASIC 10 Self Test by External Controller 20 30 REAL A 40 ASSIGN Hp5250 TO 722 50 OUTPUT Hp5250 DIAG TEST FRAM CLE CONT 60 OUTPUT Hp5250 DIAG TEST FRAM CLE FPAN 70 OUTPUT Hp5250 DIAG TEST CARD CLE ALL 80 DISP Press Continue to go to Controller Test 90 PAUSE 100 Controller Test 110 OUTPUT Hp5250 DIAG TEST FRAM EXEC CONT 120 ENTER Hp5250 A 130 IF A 0 THEN GOTO 160 140 DISP Failed Press Continue to go to I F Test 150 GOTO 170 160 DISP Passed Press Continue to go to I F T
226. s Select the E5250A INPUT softkey The following softkeys are displayed Softkey Description INPUTn For selecting the E5250A input port You can define a label for the LABEL selected input port See below n 1 to 10 MORE For displaying more softkeys to select the input port This softkey toggles between the INPUTn LABEL softkeys n 1 to 5 and n 6 to 10 RETURN For returning to the DEFINE LABEL MENU Select the INPUTn LABEL softkey n 1 to 10 The following message is displayed Input Label Name Max 5 char string Type desired label maximum 5 characters then press the Enter key If you press the Enter key without typing any characters the label is cleared Agilent E5250A User s Guide Edition 9 5 31 Figure 5 10 Controlling the E5250A Using Virtual Front Panel Utility To define labels for the E5255A bias input ports Select the CARDn INPUT softkey n 1 to 4 The following softkeys are displayed Softkey Description BIASn For selecting input Bias Port on the E5255A that was selected by LABEL the CARDn INPUT softkey See below n 1 to 3 RETURN For returning to the DEFINE LABEL MENU Select the BIASn LABEL softkey n 1 to 3 The following message is displayed Input Lab Type desire el Name Max 5 char string d label maximum 5 characters then press the Enter key If you press the Enter key without typing any characters the label is cleared Example
227. s specified by channel_list Refer to ROUTe BIAS STATe At RST all output ports are bias enabled ROUTe BIAS CHANnel DISable LIST channel_list Parameter Explanation channel_list Channels to bias disable For details about channel_list refer to Chapter 5 The input ports specified by the channel_list are ignored The input port is always the input Bias Port So in the channel_list only the card numbers and output ports have meaning But you cannot omit the input port in the channel_list OUTPUT Hp5250 ROUT BIAS CHAN DIS 10301 10402 In above example the input Bias Port on card 1 is disabled for output ports 1 and 2 Specified input ports 3 and 4 are ignored because the input port is always the input Bias Port 7 22 Agilent E5250A User s Guide Edition 9 Syntax Query response Example Command Reference ROUTe BIAS CHANnel DISable LIST ROUTe BIAS CHANnel DISable LIST This query command returns 0 or 1 for each channel specified by channel_list in same order as specified by channel_list 1 channel is bias disabled 0 channel is bias enabled ROUTe BIAS CHANnel DISable LIST channel_list Parameter Explanation channel_list Channels to check For details about channel_list refer to Chapter 5 The input ports specified by the channel_list are ignored The input port is always the input Bias Port So in the channel_list only the card nu
228. scription AUX INPUT connectors are for C V measurements pulse input and so on The E5250A has 4 AUX INPUT ports HF1 HF2 CV1 CV2 These are BNC type connectors The AUX INPUT connectors are used only with the E5252A and are not used with the E5255A The maximum measurement voltage that can be applied to any input terminal is 200 Vdc The maximum measurement current is 1 Adc at 200 Vdc The maximum voltage that can be applied between input terminals is 300 Vdc Do not apply an input signal over these limits to the E5250A inputs If you do the E5250A will be damaged If you use a bias source that has current limit capability set the bias source current limit to less than 1 Adc E5250A Rear Panel mE Tel n J al N I N lj 59 00Hz A OHA Nex UNE p E 7 mannana o WARNING No operator servicesble parta nakte Rafar arvielng Re quelled personnal Agilent E5250A User s Guide Edition 9 1 5 Figure 1 3 Introduction Agilent E5252A Product Description Agilent E5252A Product Description The E5252A 10x12 Matrix Switch is a 10 input to 12 output switching matrix card for the E5250A The E5252A is de
229. select another card to change the Bias Port and Bias Mode state BIAS For toggling the Bias Mode ON OFF This softkey is displayed in STATE AUTO configuration mode or by selecting the CARDn softkey in NORMAL configuration mode See next page BIAS Only for the E5252A card For selecting the Bias Port This softkey PORT is displayed in AUTO configuration mode or by selecting the CARDn softkey in NORMAL configuration mode See next page MAIN For returning to VFP main menu See next page MENU If you change the VFP Setup Mode all data is cleared from the setup memories when you return to the VFP main menu Agilent E5250A User s Guide Edition 9 5 29 Figure 5 9 Controlling the E5250A Using Virtual Front Panel Utility Example of SETUP MODE MENU Agilent E5250A Virtual Front Panel Utility SETUP MODE MENU CONFIG MODE NORMAL BIAS STATE BIAS PORT CARD1 E5252 OFF 10 CARD2 E5252 OFF 10 CARD3 E5255 OFF CARD4 E5255 OFF S CAUTION If any setting parameter of this menu is changed all setup memory will be cleared Select desired softkey To change the channel configuration mode Select the CHANGE CONFIG softkey This softkey toggles the configuration mode between AUTO and NORMAL To change the Bias Port for the E5252A only Select the BIAS PORT softkey The following message is displayed Input Bias Port Number Type input port number 1 to 10 is available to use as bias port then
230. signed for semiconductor dc parametric measurement applications that need to switch some instruments connected to Device Under Test DUT or need to scan instrument input output for many DUTs automatically The E5250A can be installed with maximum four E5252As And the input terminals of the E5252As are connected together inside the E5250A So the E5250A can configure a 10x24 matrix two E5252As 10x36 matrix three E5252As and 10x48 matrix four E5252As The E5252A block diagram and output connectors are shown in Figure 1 3 and Figure 1 4 E5252A Block Diagram OUTPUT 4 5 6 7 3 OOOO N INPUT smu smu2 smu Q smua smus O PETTITT TO HF C O cvi GO rm 4 smus CQO HF2 cv2 e e S A 1 6 Agilent E5250A User s Guide Edition 9 Introduction Agilent E5252A Product Description Input Ports The E5252A has 10 input ports via the E5250A Input paths for SMU1 and SMU2 are designed for low current measurement There are actually only six input paths so two of the input paths are shared by three ports each as follows e SMUS HF1 and CV1 ports share same input path e SMU6 HF2 and CV2 ports share same input path So for these two input paths you can only use one input port at a time For example
231. sponse data If there has been no error error queue is empty the response to this query is as follows 0 No error OUTPUT Hp5250 SYST ERR ENTER Hp5250 A B SYSTem VERSion This command returns the SCPI version number for which the E5250A complies This command has query form only SYSTem VERSion YYYY V lt newline gt lt AEND gt YYYY is the year for example 1995 V is the approved revision number for that year OUTPUT Hp5250 SYST VERS ENTER Hp5250 AS Agilent E5250A User s Guide Edition 9 7 47 Command Reference Status Reporting Structure Status Reporting Structure This section describes the status reporting structure used in the E5250A These are IEEE 488 2 status structures that can be set and read by the SCPI Common Commands as described in Common Commands on page 7 4 Status Reporting Structure The status reporting structure consists of the following Status Byte Register Service Request Enable Register Standard Event Status Register Standard Event Status Enable Register Output Queue In general the status reporting structure is used to request service via Service Request SRQ or to indicate a specific condition such as operation complete Refer to the following figures for a model of the E5250A status reporting structure 7 48 Agilent E5250A User s Guide Edition 9 Command Reference Status Reporting Structure
232. statement LOADSUB ALL FROM U_LIB 2 Change the mass storage device Before executing your program you must set the mass storage device to the device that has the file that will be loaded by Load_vfp_data subprogram For example if the file is on the device CS80 701 1 you should change the mass storage device by using the MSI statement MSI CS80 701 1 Or you can specify the mass storage device as follows Load_vfp_data Address_5250 LOAD_FILE CS80 701 1 Setup_data 6 26 Agilent E5250A User s Guide Edition 9 Programming the E5250A Using the VFP Data Upload Library Error Messages If any error related to the VFP Data Upload Library occurs in your program one of following error messages is displayed and the program is paused Cannot configure for AUTO Normal mode used Cannot use the data for Auto Config mode Normal Configuration mode is used File name is wrong File name is not correct Enter the correct file name Instrument at address XXX is not E5250A Instrument specified by GPIB address XXX is not E5250A Confirm GPIB address for the E5250A and enter the correct value Note XXX is the number you specified for the parameter Address_5250 in the Load_vfp_data subprogram File data is not VFP format or is broken Cannot load the data because the data format is not for VFP or the data is broken Enter the correct file name GPIB address connection or firmware is bad Timeout occurr
233. stead of 00101 8 26 Agilent E5250A User s Guide Edition 9 Syntax Parameters Syntax Parameters VXlplug amp play Driver Driver Functions hpe5250a_openList_Q This function will query the instrument for the channels open given in the openchan_list The parameter openchan_list is an array of integers with each integer representing one channel The last number of the openchan_list should be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 The open_status parameter is an array of integers containing the return values of the query The open_status array returned will correspond one to one with gt openchan_list parameter ViStatus _VI_FUNC hpe5250a_openList_Q ViSession vi Vilnt32_VI_FAR openchan_list Vilnt32 _VI_FAR open_status vi Instrument handle returned from hpe5250a_init openchan_list Channel numbers to know the open status 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 channel number should be 101 instead of 00101 open_status Status of the channels given in the openchan_list 1 opened or 0 closed hpe5250a_readStatusByte_Q This function returns the contents of the status byte register ViStatus _VI_FUNC hpe5250a_readStatusByte_Q ViSession vi ViPInt16 statusByte vi
234. t the E5250A Plug amp Play Driver Disk into the flexible disk drive connected to your PC b Execute the SETUP EXE program stored on the diskette The program automatically installs the following files in Vxipnp Winnt Hpe5250a or Vxipnp Win95 Hpe5250a depending on the OS 8 4 hpe5250a bas hpe5250a c hpe5250a def hpe5250a fp hpe5250a GID hpe5250a h hpe5250a hlp readme txt DelsL1 isu Agilent E5250A User s Guide Edition 9 VXlplug amp play Driver Driver Functions Driver Functions Table 8 1 lists all the functions for the E5250A You will see a brief description of the functions in the table For the description syntax and parameters of the function refer to the reference section following this table The driver functions in the reference section will appear in the alphabetical order Table 8 1 E5250A Driver Function Lists Category Function Description Miscellaneous hpe5250a_init Initializes the E5250A hpe5250a_close Closes the connection with the E5250A hpe5250a_reset Executes the E5250A reset hpe5250a_self_test Executes the E5250A self test hpe5250a_error_query Queries for the E5250A error code message hpe5250a_error_message Queries for the driver error hpe5250a_revision_query Queries for the E5250A firmware driver revisions hpe5250a_timeOut Sets the timeout hpe5250a_timeOut_Q Queries for the timeout setting hpe5250a_errorQueryDete
235. t to Device Under Test DUT For details refer to Setting up Measurement Environment on page 4 1 And connect all equipment as shown in Figure 9 1 and Table 9 4 The E5252A must be installed in slot of the ES250A Required Equipments Agilent Model Part No Description Qty E5250A Low Leakage Switch Mainframe 1 E5252A 10x12 Matrix Switch 1 4155 4156 Semiconductor Parameter Analyzer 1 16494A 003 Triaxial Cable 80 cm 4 16494A 001 or 002 Triaxial Cable 1 5 m or 3 m 6 16495F Connector Plate 1 4284A with 4284A 006 Precision LCR Meter 1 16048D E Test Lead 1 1250 2405 BNC T type Adapter 2 10833A B C GPIB Cable 3 Agilent E5250A User s Guide Edition 9 9 7 Executing Sample Programs Vth and Capacitance Measurement Program Figure 9 1 Vth and C Measurement Setup and DUT Connection GPIB Cable Total 3 ea m HP BASIC Controller 16048D E 16495A n Output 4155 4156 Shielding Box or Test Fixture 164944 w Opt 003 164944 E5250A E5252A wiOpt 001 or Opt 002 6 ea Table 9 4 Instrument and DUT Connection Instrument E5250A DUT Terminal via Model No i Input Port Output Port ener Elate 4155 4156 SMU 1 SMU INPUT 1 OUTPUT 1 MOSFET Drain SMU 2 SMU INPUT 2 OUTPUT 2 MOSFET Gate SMU 3 SMU INPUT 3 OUTPUT 3 MOSFET Source SMU 4 SMU INPUT 4 OUTPUT 4 MOSFET Substrate 4284A Hp Hc AUX INPUT CV1 OUTPUT 5 Capacitance H Lp Le
236. t used The program couples SMU INPUT 3 amp 4 and couples SMU INPUT 5 amp 6 For each Couple Port use Kelvin triaxial cable for instrument connection E5252A Output Ports Output 1 2 3 4 5 6 should be connected to Substrate Gate Drain Drain Source Source respectively Agilent E5250A User s Guide Edition 9 6 19 Program List Programming the E5250A Programming Examples 10 Example Using Couple Port 20 30 INTEGER Complete 40 DIM Channel 100 50 Substrate Gate Drain Source 60 ChannelS 101 202 303 505 70 l 80 Put Instrument Initialize Routine here 90 100 ASSIGN Hp5250 TO 722 110 OUTPUT Hp5250 RST 120 OUTPUT Hp5250 ROUT FUNC ACON 130 OUTPUT Hp5250 ROUT CONN RULE ALL SROU 140 OUTPUT Hp5250 ROUT CONN SEQ ALL BBM ae Description 40 Declares data size of Channel which is used as channel_list parameter 60 Defines the desired channel_list 80 Here insert the initialization routine for your measurement instrument 110 Resets the E5250A 120 Sets the E5250A to Auto channel configuration mode 130 Sets the connection rule to Single 140 Sets the connection sequence to Break Before Make 6 20 Agilent E5250A User s Guide Edition 9 Programming the E5250A Programming Examples
237. t_no input_port_no specifies which input port on specified card to be the input Bias Port e Bias enables the output ports Command Description ROUT BIAS CHAN ENAB CARD card_no ROUT BIAS CHAN ENAB LIST channel_list Bias enables all output ports on specified card Bias enables the specified output ports e Bias disables the output ports Command Description ROUT BIAS CHAN DISA CARD card_no Bias disables all output ports on specified card ROUT BIAS CHAN DISA LIST channel_list Bias disables the specified output ports Turns the Bias Mode ON OFF Command Description ROUT BIAS STAT card_no ON Turns on Bias Mode for card specified by card_no ROUT BIAS STAT card_no OFF card_no Turns off Bias Mode for card specified by Example OU oe eS cards OU 1 OU Owe WN E o er PU Selects SMU1 input PU PU Hp5250 ROUT BIAS PORT ALL 1 port to be input Bias Port for all Hp5250 ROUT BIAS CHAN ENAB CARD ALL Bias enables all output ports o Hp5250 ROUT BIAS STAT ALL ON Turns on the Bias Mode for all cards n all cards Agilent E5250A User s Guide Edition 9 Example Programming the E5250A Creating a Control Program Using Couple Port for E5252A only If you use Couple Port the follo Couple Port on page 5 13 wing commands are avai
238. the E5250A page 3 4 Test the E5250A firmware Entering SCPI Command page 3 6 Using Self Test Utility page 3 10 Front Checks the operation of Entering SCPI Command page 3 6 Panel the LEDs and key that 7 NE Interface are on the E5250A front Using Self Test Utility page 3 10 Test panel Relay Test Checks the operation of Pressing the Local page 3 4 the relays on the cards Self Test key installed in the E5250A Entering SCPI Command page 3 6 Using Self Test Utility page 3 10 Agilent E5250A User s Guide Edition 9 3 3 Executing Self Test and Leak Test Executing Self Test To Execute Self Test Standalone Controller Test is executed automatically when you turn on the E5250A You execute the Relay Test by pressing the Local Self Test key on the E5250A front panel Executing the Controller Test 1 Turn on the E5250A 2 Wait until the LED in the Local Self Test key turns off If System Fail LED or Fail LED stays on after executing the Controller Test contact your nearest Agilent Technologies Service Center Executing the Relay Test Requirements e Relay Test Adapter E5250A 301 e BNC Short Caps 3 caps are furnished with each E5255A Procedure 1 Disconnect all cables from the E5250A input connectors 2 Open all outputs of the plug in cards as follows If cable is connected to output connector of plug in card open output at DUT end of cable If end of cable is Kelvin connection disconnect the cable or ma
239. the output ports specified by channel_list When Bias Mode is ON this command closes relays to connect the input Bias Port to the output ports specified by channel_list Refer to ROUTe BIAS STATe Output ports that are already connected to another input port cannot be connected to the input Bias Port At RST all output ports are bias enabled ROUTe BIAS CHANnel ENABle LIST channel_list Parameter Explanation channel_list Channels to bias enable For details about channel_list refer to Chapter 5 The input ports specified by the channel_list are ignored The input port is always the input Bias Port So in the channel_list only the card numbers and output ports have meaning But you cannot omit the input port in the channel_list OUTPUT Hp5250 ROUT BIAS CHAN ENAB 10401 10502 In above example the input Bias Port on card 1 is enabled for output ports 1 and 2 Specified input ports 4 and 5 are ignored because input port is always the input Bias Port Agilent E5250A User s Guide Edition 9 7 25 Syntax Query response Example Command Reference ROUTe BIAS CHANnel ENABle LIST ROUTe BIAS CHANnel ENABle LIST This query command returns 0 or 1 for each channel specified by channel_list in same order as specified by channel_list 0 channel is bias disabled 1 channel is bias enabled ROUTe BIAS CHANnel ENABle LIST channel_list Parameter Explana
240. tion channel_list Channels to check For details about channel_list refer to Chapter 5 The input ports specified by the channel_list are ignored The input port is always the input Bias Port So in the channel_list only the card numbers and output ports have meaning But you cannot omit the input port in the channel_list enable_status enable_status lt newline gt lt WEND gt 1 enabled 0 disabled OUTPUT Hp5250 ROUT BIAS CHAN DIS CARD ALL OUTPUT Hp5250 ROUT BIAS CHAN ENAB 10101 OUTPUT Hp5250 ROUT BIAS CHAN ENAB 10101 10102 10201 ENTER Hp5250 A In above example AS will be as follows 10 1 10101 and 10201 have the same meaning because the specified input port is ignored 7 26 Agilent E5250A User s Guide Edition 9 Command Reference ROUTe BIAS PORT ROUTe BIAS PORT NOTE This command applies only to the E5252A card For the E5255A card the input Bias Port cannot be selected and is always the built in Bias Port The Bias Port and Couple Port cannot be set to same port number This command selects which input port is the Bias Port on the specified card For each card you can specify the same or different Bias Port For details refer to Bias Mode in Chapter 5 At RST Bias Port is set to 10 for the E5252A Syntax ROUTe BIAS PORT card_number bias_port Parameter Explanation card_number card number For Auto Config
241. tion information This command has query form only SYSTem CCONfig card_number Parameter Explanation card_number card number 1 2 3 or 4 card_configuration lt newline gt lt END gt For the E5252A no response Always returns 10 For the E5255A definite length block response data 16ABCDEF where each letter is 8 bit binary data as follows A indicates input B indicates if resistance C indicates input port 1 to 6 that is connected to block 1 port 1 to 6 that is connected to block 2 is set for block 1 Bias Port 1 resistance set 0 not set D indicates if resistance is set for block 2 Bias Port 1 resistance set 0 not set E indicates input port 1 to 6 that is connected to block 3 F indicates if resistance is set for block 3 Bias Port 1 resistance set 0 not set OUTPUT Hp52 ENTER Hp525 ENTER AS USI FOR I 1 TO 6 C NUM BS I PRINT BYT NEXT I 50s SSy SGTsCCON 1T O AS G 3X 6A BS 1 E NO Talp s Mag Agilent E5250A User s Guide Edition 9 7 43 Syntax Query response NOTE Example Command Reference SYSTem CDEScription SYSTem CDEScription This query command returns a description of the specified card This command has query form only SYSTem CDEScription card_number Parameter Explanation card_number card number For Auto Config mode 0 For Normal Config mode 1
242. trument handle returned from hpe5250a_init cmd_str Instrument command cannot exceed 256 bytes in length result Response from instrument hpe5250a_cmdString_Q This function passes the cmd_str string to the instrument This entry point will wait for a response which must be a string character data You specify the cmd_str and size parameters and get result ViStatus _VI_FUNC hpe5250a_cmdString_Q ViSession vi ViString cmd_str Vilnt32 size ViChar _VI_FAR result vi Instrument handle returned from hpe5250a_init cmd_str Instrument command cannot exceed 256 bytes in length size Length of result in bytes 2 to 32767 result Response from instrument Agilent E5250A User s Guide Edition 9 8 17 Syntax Parameters VXI plug amp play Driver Driver Functions hpe5250a_compenC This function compensates capacitance conductance data measured by using Agi lent 4284A C meter and returns compensation results If you change the compensa tion data create the compensation data file and specify the data file using hpe5250a_selectCompenFile function before executing this function ViStatus _VI_FUNC hpe5250a_compenC ViSession vi ViReal64 frequency ViReal64 len_hptrx ViReal64 len_usrtrx_h ViReal64 len_usrtrx_l ViReal64 len_usrcoax_h ViReal64 len_usrcoax_l ViReal64 raw_c ViReal64 raw_g ViPReal64 compen_c ViPReal64 compen_g vi Instrument handle returned from hpe5250a_init frequency Measurement freque
243. tup Memory See later MORE Displays more softkeys See below table MAIN MENU Returns to the VFP main menu Softkey Description CLEAR SETUP For clearing settings of specified setup memory See later The setup memory is changed to Open All no connection setup COPY SETUP For copying a setup memory to another setup memory See later DELETE SETUP For deleting the specified setup memory The higher setup memories are shifted down and setup memory 24 is set to Open All no connection See later INSERT SETUP For inserting setup memory Open All no connection at specified setup memory number Specified setup and higher memories are shifted up and setup memory 24 is deleted See later CLEAR ALL For clearing all setup memories All setup memories are changed to Open All no connection setup See later MORE Displays more softkeys See above table MAIN MENU Returns to the VFP main menu Agilent E5250A User s Guide Edition 9 5 33 Figure 5 11 Controlling the E5250A Using Virtual Front Panel Utility Example of SETUP MEMORY MENU Agilent E5250A Virtual Front Panel Utility SETUP MEMORY MENU Current Setup Memory 1 Setup Comment Setup Comment 1 Open All 13 Open All 2 MOSFET 1 14 Open All 3 MOSFET 2 15 Open All 4 MOSFET 3 16 Open All 5 MOS CAP 1 17 Open All 6 MOS CAP 2 18 Open All 7 MOS CAP 3 19 Open All 8 Open All 20 Open All 9 Open All 21 O
244. turn to the LEAK TEST MENU select the LEAK TEST softkey And to perform the Leak Test for another input port repeat steps 3 to 9 Agilent E5250A User s Guide Edition 9 3 19 Executing Self Test and Leak Test Using the Self Test Utility 3 20 Agilent E5250A User s Guide Edition 9 Setting up Measurement Environment Setting up Measurement Environment This chapter explains how to connect your instruments to Agilent E5250A input and how to connect the E5250A output to your wafer prober or test fixture You can connect the E5250A output E5252A or E5255A to your prober or fixture in the following three ways e Via the available connector plates e For E5255A only Directly using Agilent 16494E coaxial cable e Via connectors that you mount directly on your own connector plate or test fixture This chapter explains how to do this in the following sections e Connector Plates introduces connector plates available for the plug in card For installing the connector plates on your shielding box for prober or fixture refer to Agilent 16495 Installation Guide e Connecting 8 Channel Shielded Coaxial Cable explains how to use the 16494E coaxial cable which is used to directly connect the E5255A output to the DUT DUT socket or any fixture you want without using a connector plate e Mounting Connectors Directly describes connector hole dimensions for mounting connectors directly on your own connector
245. uide Edition 9 NOTE Executing Sample Programs HCI Measurement Program HCI Measurement Program This section explains how to use and modify the HCI measurement sample program This section consists of the following sections e Introduction e Adding the Bias Source Control Routine e Setting up the Measurement Environment e Executing the Program e Modifying the Program Introduction The Hot Carrier Induced HCI degradation of MOSFET parameters is measured by using Agilent 4155 4156 Semiconductor Parameter Analyzer bias sources and the E5250A with the E5255A card Two HP BASIC language programs are used to perform the HCI measurement e HCI Test Program SP_MUX_M performs HCI degradation test according to the JEDEC proceeding titled A PROCEDURE FOR MEASURING HCI 29 JULY 93 e Analysis Program SP_MUX_A determines the lifetime of MOSFET from the data measured by HCI test program The SP_MUX_M program flow is shown in Table 9 5 Table 9 5 also lists the files that are used to set up the 4155 4156 for each part of the SP_MUX_M program These setup files are stored on the E5250A Program Disk So the program disk must be in the 4155 4156 s disk drive when you execute the program For details about a 4155 4156 setup file GET the setup file and refer to the setup by using the 4155 4156 To Add the Bias Source Control Routine The HCI measurement sample program SP_MUX_M requires bias so
246. uld be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 The bias_status parameter is an array of integers containing the return values of the query The bias_status array returned will correspond one to one with piaschan_list parameter ViStatus _VI_FUNC hpe5250a_biasChanList_Q ViSession vi Vilnt16 bias_disen Vilnt32 _VI_FAR biaschan_list Vilnt32 _VI_FAR bias_status vi Instrument handle returned from hpe5250a_init bias_disen Bias status for the query 0 confirms if the port is the bias enabled 1 confirms if the port is the bias disabled biaschan_list Channel numbers to know the bias status 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 channel number should be 101 instead of 00101 bias_status Bias status of the channels given in the biaschan_list Returned value depends on the setting of bias_disen as shown below when bias_disen 0 0 means bias disabled 1 means enabled when bias_disen 1 0 means bias enabled 1 means disabled 8 8 Agilent E5250A User s Guide Edition 9 Syntax Parameters Syntax Parameters VXlplug amp play Driver Driver Functions hpe5250a_biasPort This function will select which input port is the bias port on the specified card For each card you can specify the same o
247. upplementary Information This DoC applies to above listed products placed on the EU market after September 26 2006 4 Fe A Date Toshiyuki Kawaji QA Manager Agilent Technologies For further information please contact your local Agilent Technologies sales office agent or distributor NOTE e Herstellerbescheinigung GEAUSCHEMISSION Lpa lt 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T 19 e Manufacturer s Declaration ACOUSTIC NOISE EMISSION Lpa lt 70 dB operator position normal operation per ISO 7779 This ISM device complies with Canadian ICES 001 Cet appareil ISM est conforme Hla norme NMB 001 du Canada This product complies with the WEEE Directive 2002 96 EC marking requirements The affixed label indicates that you must not discard this electrical electronic product in domestic household waste Product Category With reference to the equipment types in the WEEE Directive Annex I this product is classed as a Monitoring and Control instrumentation product Do not dispose in domestic household waste To return unwanted products contact your local Agilent office or see www agilent com environment product for more information Microsoft Windows Windows NT Visual C and Visual Basic are registered trademarks of Microsoft Corporation Borland C Builder is registered trademark of International Inc LabWindows and LabVIEW are registered trademarks of National Instruments C
248. urces You must modify or add a control routine for your bias sources to the program Refer to Adding the Bias Source Control Routine on page 9 23 Agilent E5250A User s Guide Edition 9 9 17 Table 9 5 NOTE Executing Sample Programs HCI Measurement Program HCI Degradation Measurement Flow ste Description ASSAIS P P setup file 1 Initializes the Instruments 1 Resets the 4155 4156 2 Resets and initializes the ES250A Configuration Mode AUTO Bias Mode OFF Connection Rule FREE Channel Status All Relays Open 2 Determines Stress Condition See later IBVGMES 3 Selects devices valid for the HCI test See later IGLEAK MES IDLEAK MES 4 Characterizes the initial parameters See later PARAM MES 5 Applies stress and characterizes the parameters PARAM MES See later Step 2 Determines Stress Condition This step determines the gate stress voltage Vgst r from the Ib Vgs measurement test result This Vgst r value will be used in step 5 Test Device for Defining Stress Conditions The test device used to determine the stress conditions step 2 should not be used for Hot Carrier stress testing steps 3 to 5 9 18 Agilent E5250A User s Guide Edition 9 Executing Sample Programs HCI Measurement Program Step 3 Selects devices valid for the HCI test This step judges whether each device is valid according to the current leak test result The IGLEAK MES and IDLEAK MES files are
249. used to set up the 4155 4156 for this step As shown below 24 devices are connected to the E5250A and measured individually by switching For devices that fail this step no further testing is performed and 0 0 is recorded Pai Device 1 Device2 Device 3 Device 24 Gate 1 2 3 4 Drain 25 26 27 48 Sub 49 50 51 79 Source GNDU GNDU GNDU GNDU GNDU Step 4 Characterizes the initial parameters This step initially before stress measures parameters for the devices that were determined to be valid by the previous step The PARAM MI A summary of the measurement setup saved in PARAM MI details of the setup data GET the PARAM MI ES file sets up the 4155 4156 to the setup displayed on the 4155 4156 Channel Source Setup ES is shown below For ES file using the 4155 4156 and refer SMU VNAME INAME MODE FUNCTION Source Setup SMUI1 VG IG v VARI 0 to 5V 20mV step SMU3 VD ID v CONST 0 1V SMU4 VB IB v CONST OV GNDU vs IS COMMON CONST Common Agilent E5250A User s Guide Edition 9 9 19 Executing Sample Programs HCI Measurement Program User Function Setup NAME UNIT DEFINITION Gm S DIFF ID VG Vtext V QMX MY1 MY2 AT VD 1 2 Gmmax S MAX Gm Vtci V L2X Taian A L1Y1 Display Setup Xaxis Ylaxis Y2axis NAME VG ID Gm SCALE LINEAR LINEAR LINEAR
250. value Note that either an Int16 or 32 can be passed as the Int16 will be promoted ViStatus _VI_FUNC hpe5250a_cmdInt ViSession vi ViString cmd_str Vilnt32 value vi Instrument handle returned from hpe5250a_init cmd_str Instrument command cannot exceed 256 bytes in length value Parameter for command 2147483647 to 2147483647 Agilent E5250A User s Guide Edition 9 8 13 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions hpe5250a_cmdInt16Arr_Q This function passes the cmd_str string to the instrument This command expects a response that is a definite arbitrary block of 16 bit integers You specify the cmd_str and size parameters and get result and count ViStatus _VI_FUNC hpe5250a_cmdInt16Arr_Q ViSession vi ViString cmd_str Vilnt32 size Vilntl6 _VI_FAR result ViPInt32 count vi Instrument handle returned from hpe5250a_init cmd_str Instrument command cannot exceed 256 bytes in length size Size of result number of items in the array 1 to 2147483647 result Response from instrument count Count of valid items in result hpe5250a_cmdInt16_Q This function passes the cmd_str string to the instrument This command expects a response that can be returned as a 16 bit integer ViStatus _VI_FUNC hpe5250a_cmdInt16_Q ViSession vi ViString cmd_str ViPInt16 result vi Instrument handle returned from hpe5250a_init cmd_str Instrument command cannot e
251. ve shift data for Vtci where XX means the test device number Required Equipments Prepare the equipment shown in Table 9 6 which lists the required equipment to execute the program Table 9 6 Required Equipment Agilent Model Part No Description Qty E5250A Low Leakage Switch Mainframe 1 E5255A 24 8x3 Channel Multiplexer 3 4155 4156 Semiconductor Parameter Analyzer 1 41501 SMU PGU expander for GNDU 1 16494A 001 or 002 Triaxial Cable 1 5 m or 3 m 1 16494A 003 Triaxial Cable 80 cm 3 16494D 001 or 002 8 Channel Shielded Coaxial Cable 1 5 m or 3 m 9 16495D Connector Plate 1 10833A B C GPIB Cable 5 E5250 17002 E5250A Program Disk furnished 1 E Bias Source 3 BNC BNC cable for Bias Source 3 7 3 5 inch diskette for storing measurement data 1 and modified program 9 22 Agilent E5250A User s Guide Edition 9 Executing Sample Programs HCI Measurement Program Adding the Bias Source Control Routine This sample program requires bias sources to apply stress to DUT So you must modify the following bias source control subprograms to match your bias sources or create new subprograms The following subprogram is for bias sources that support SCPI commands 1 Get the HCI test program SP_MUX_M from the E5250A Program Disk by using the computer GET SP_MUX_M Delete the exclamation marks from beginning of the following two program lines You can easily fi
252. vious couple port setting for the card At RST no input ports are coupled ROUTe COUPle PORT card_number couple_port Parameter Explanation card_number card number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL couple_port One or more input port numbers 1 3 5 7 or 9 Enclose by single quotation marks Separate multiple input port numbers by comma For example 1 5 OUTPUT Hp5250 ROUT COUP PORT ALL 1 OUTPUT Hp5250 ROUT CLOS 10103 This example connects input port to output port 3 and connects input port 2 to output port 4 The lower output port of the couple port is always the odd number port even if you specify an even output port in the ROUT CLOS command For example if you used ROUT CLOS 10104 the connections would be the same as above Agilent E5250A User s Guide Edition 9 7 35 Command Reference ROUTe COUPle PORT ROUTe COUPIle PORT NOTE This command applies only to the E5252A card This query command returns the lower input port number of each coupled pair For details refer to Couple Ports in Chapter 5 Syntax ROUTe COUPle PORT card_number Parameter Explanation card_number card number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 Query response port_number port_number lt newline gt lt END gt port_number 1 or 3 or 5 or 7 or 9 Example OUTPUT Hp5250 ROUT
253. ware connection to the instrument and deallocates system resources It is generally a good programming habit to close the instrument handle when the program is done using the instrument ViStatus _VI_FUNC hpe5250a_close ViSession vi vi Instrument handle returned from hpe5250a_init hpe5250a_closeCard_Q This function will query the card for the channels closed of the specified card The parameter closechan_list contains the channel numbers returned by the instrument This will be an array of integers terminated by zero to identify the end of the list Array of enough length should be passed to the function ViStatus _VI_FUNC hpe5250a_closeCard_Q ViSession vi Vilnt16 close_card Vilnt32 _VI_FAR closechan_list vi Instrument handle returned from hpe5250a_init close_card Card number 1 card 1 2 card 2 3 card 3 or 4 card 4 in the normal configuration mode or 0 all card in the automatic configuration mode For the configuration mode see hpe5250a_func closechan_list Channels closed of the specified card 8 10 Agilent E5250A User s Guide Edition 9 Syntax Parameters VXlplug amp play Driver Driver Functions hpe5250a_closeList This function will connect the input ports to the output ports specified by the channel list The parameter closechan_list is an array of integers with each integer representing one channel The last number of the closechan_list should be 0
254. xceed 256 bytes in length result Response from instrument 8 14 Agilent E5250A User s Guide Edition 9 Syntax Parameters Syntax Parameters VXlplug amp play Driver Driver Functions hpe5250a_cmdInt32Arr_Q This function passes the cmd_str string to the instrument This command expects a response that is a definite arbitrary block of 32 bit integers You specify the cmd_str and size parameters and get result and count ViStatus _VI_FUNC hpe5250a_cmdInt32Arr_Q ViSession vi ViString cmd_str Vilnt32 size Vilnt32 _VI_FAR result ViPInt32 count vi Instrument handle returned from hpe5250a_init cmd_str Instrument command cannot exceed 256 bytes in length size Size of result number of items in the array 1 to 2147483647 result Response from instrument count Count of valid items in result hpe5250a_cmdInt32_Q This function passes the cmd_str string to the instrument This command expects a response that can be returned as a 32 bit integer ViStatus _VI_FUNC hpe5250a_cmdInt32_Q ViSession vi ViString cmd_str ViPInt32 result vi Instrument handle returned from hpe5250a_init cmd_str Instrument command cannot exceed 256 bytes in length result Response from instrument Agilent E5250A User s Guide Edition 9 8 15 Syntax Parameters Syntax Parameters VXI plug amp play Driver Driver Functions hpe5250a_cmdReal This function passes the cmd_str string to the instrument
255. you cannot use HF1 and CV 1 input ports at the same time Output Ports The E5252A has 12 output ports Two ports can be coupled for Kelvin connection output for a maximum of six Kelvin outputs e OUTPUTI and OUTPUT2 e OUTPUT3 and OUTPUT4 e OUTPUTS and OUTPUT6 e OUTPUT7 and OUTPUT8 e OUTPUTS and OUTPUTIO e OUTPUT11 and OUTPUT12 The output ports are triaxial connectors Figure 1 4 E5252A Output Ports u 1 A2 MATRIX SWITCH f FD D OUTPUT m WARNING Do not touch the force and guard terminals of the output connectors while the E5250A is turned on Dangerous voltages up to the maximum input voltage may be present at the output connectors Agilent E5250A User s Guide Edition 9 1 7 Introduction Agilent E5255A Product Description Agilent E5255A Product Description The E5255A 24 8x3 Channel Multiplexer is a 2 input to 24 output multiplexer card for the E5250A The E5255A consists of 3 blocks three 2x8 multiplexers So one E5255A can be configured as a 2x8 multiplexer 2x16 multiplexer or 2x24 multiplexer 2 input means one BIAS input and one IV input The E5255A is designed for semiconductor device reliability testing which needs to automatically scan instrument input output for many DUTs A maximum of four E5255As can be installed in the E5250A which can use the multiplexers in several configurations For example the E5250A can configure twelve 8 output multiplexers six 16 output mult
256. you select the softkey to specify parameter in step 3 the 4155 4156 screen displays the graph for the next device for the parameter And program pauses This step is repeated according to entered number of devices and selected softkey Figure 9 9 HCI Degradation Test Data Analysis Example GRAPH LIST GRAPHICS MEDI U ht 940CTO4 O8 14PhM HCI Gmmax Shitig Sr rsio000eee Deviesad MARKER CURSOR 10 000000 0kKee826 10 gcg cocoon ooD y MARKERS 10 000000 0OkKee2ec 12 80000 000 ON Gmi NT 232 goriroagggus i Tde HITRA F KR eee MARKER 100 MI NY MAX I NTER GmSFT POLATE ON BDI REST MARKERS er aie CURSOR tdi MARKER SKIP AUTO ANALY B15 100 0m CURSOR 10 0 Sires s isee decade tdi oO Ok SHORT l MARKERS LI NE SCALING DI SPLAYJ SWEEP TIM NG CONST CURSOR SETUP SETUP SETUP SETUP F ais Agilent E5250A User s Guide Edition 9 9 33 Executing Sample Programs HCI Measurement Program NOTE If you don t want program to pause change the parameter in SP_MUX_A program to Pause_to_save 0 before you run the SP_MUX_A program The program automatically extracts Tdc saves result data and stops 5 All calculated data is saved to ANAHCT file on computer s disk drive which is an ASCII file The data is also listed on the 4155 4156 s screen After analyzing saving and listing the data the 4155 4156 is initialized For example in the

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