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Six Inch Vertical Wafer Transmission Accessory
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1. the AutoPRO5 manual for more details PN 350 073601 01 Page 5 Installing the AutoPRO Motor Controller The motion control electronics interface the Vertical Wafer Accessory to your computer Commands are sent to this electronics unit using a USB cable A 15 pin accessory cable is used to connect this unit to the accessory Connecting the Motor Controller to Your Computer The power supply for the motor controller is self adjusting and can be used in most locations Please read the labels on the rear of the motor controller before attempting to connect the system A The power for the motor controller should always be turned off when attaching the cables AC INPUT VOLTAGE 100 230 VAC LINE FREQUENCY 47 63 Hz POWER CONSUMPTION SOW max Fuse rating 250V 2A Time Lag CAUTION To avoid electric shock the power cord ground conductor must be connected to ground Do not remove cover Refer servicing to qualified personnel Figure 10 Motor controller rear panel PN 350 073601 01 Page 6 Correct Cabling Procedure Computer to Motor Controller 15 Pin Male Male Accessory Cable USB Cable PIKE Motor Controller to Accessory Ya Computer Motor Controller PIKE Accessory Figure 11 Correct cabling procedure e The accessory port of the motor controller should be connected to the accessory through the 6 foot male to male 15 pin cable provided e Connect the USB cable from the controller to the PC Starting Au
2. Installation and User Guide TECHNOLOGIES Spertrwoscopic Creativity l PIKE A e Six Inch Vertical Wafer Transmission Accessory PN 350 073601 01 The information in this publication is provided for reference only All information contained in this publication is believed to be correct and complete PIKE Technologies Inc shall not be liable for errors contained herein nor for incidental or consequential damages in connection with the furnishing performance or use of this material All product specifications as well as the information contained in this publication are subject to change without notice This publication may contain or reference information and products protected by copyrights or patents and does not convey any license under the patent rights of PIKE Technologies Inc nor the rights of others PIKE Technologies Inc does not assume any liability arising out of any infringements of patents or other rights of third parties This document contains confidential or proprietary information of PIKE Technologies Inc Neither this document nor the information herein is to be reproduced distributed used or disclosed either in whole or in part except as specifically authorized by PIKE Technologies Inc PIKE Technologies Inc makes no warranty of any kind with regard to this material including but not limited to the implied warranties of merchantability and fitness for a particular purpose Copyright 1991 2013
3. by PIKE Technologies Inc Madison WI 53719 Printed in the United States of America All world rights reserved No part of this publication may be stored in a retrieval system transmitted or reproduced in any way including but not limited to photocopy photograph magnetic or other record without the prior written permission of PIKE Technologies Inc Address Comments to PIKE Technologies Inc 6125 Cottonwood Drive Madison WI 53719 Phone 608 274 2721 Fax 608 274 0103 E mail info piketech com Web Site www piketech com Jan 1 2013 Contents Introduction Unpacking Your Accessory Packing List Installation and Use Removing the Holder from the Accessory Inserting a Wafer Initial Alignment Linear Orientation to the Beam Installing the Software Installing the AutoPRO Motor Controller Connecting the Motor Controller to Your Computer Correct Cabling Procedure Starting AutoPRO It s Your First Time AutoPRO Overview AutoPRO Control How to Use Help Status Init exe First exe PN 350 073601 01 O JU JA IAIO JIU 0 IN IN ke O 0 CO IN IN O 12 12 12 Introduction The Vertical Wafer Accessory has been designed to mount a wafer in the beam of an FTIR spectrometer to allow manual or automatic mapping of the transmittance spectrum of the wafer The accessory has two major parts the drive mechanism and the ring The ring is placed into the drive mechanism and may be rotated through 360 degrees and tran
4. esolution etc may be defined and stored to a file IR Software Location Cancel lA Software Mare OR PN 350 073601 01 Page 9 e Setup Accessory This function allows selection of the actual accessory used with the spectrometer computer accessory communication test and basic accessory setup Select 6 inch Holder Accessor Type O VeeMax Port 1 O ATRHaz o Polarizer Baud Rate 5600 Precision Polarizer Communications Test RotatlF 6 inch Holder Demo Mode ON 8 inch Holder c c c C MapplA Configure Motors c c c c c AutoD itfuslA Map 300 Y Stage 150mm Sutos ampler Obrorm Sutos ampler C 300mm Autos ampler C WeeMas with Polarizer C ATRMasz with Polarizer Cancel Initialize Motor e Setup Experiment Macros and executable files can be integrated into the autosampler routine This function also allows special handling of multiple filenames and provides different security options Macro Files Pre Expenment Macro File FO Browse Clear Pre Sample Collect Macro File Po Browse Clear Post Sample Collect Macro File FO Browse Clear El Post Experiment Macro File FN Browse Clear El File Handling Background Handling Save files using generated filename erate E Collect Background at 1st point in profile al Collect Background at All Points in Profile Save E character filename Number of seconds in current year Save files using Roo
5. he motion These and all other functions are described fully in the AutoPRO manual Init exe First exe These are programs which may be inserted into an FTIR macro With these programs the basic functions required to run the accessory may be accessed from within the macro While the software is running a small AutoPRO status box is displayed in the lower right hand corner More details of how to use this and other exe files available in the AutoPRO software are given in the AutoPRO User s Manual PN 350 073601 01 Page 12 PIIKE TECHNOLOGIES Spectroscopic Creatit ity 6125 Cottonwood Drive Madison WI 53719 5120 608 274 2721 TEL 608 274 0103 FAX info piketech com www piketech com
6. istance may be set to zero by loosening the two screws fastening the indicator Align the scale indicator to the zero mark and secure the mounting screws Scale Indicator Indicator Mounting Screws PN 350 073601 01 Page 4 Installing the Software NOTE Always install the software first before plugging in the motion control unit If the controller is plugged in before the software has been installed the PIKE USB device driver may need to be updated Please refer to Appendix B of the AutoPRO5 manual Step 1 Insert the CD into the drive of your computer Step 2 From the START menu select Run The Run dialog box will appear to enter a filename Enter either X setup exe or browse to the Disk Directory and select setup exe A setup dialog box will appear for a few moments while the installation program checks for available memory and configuration The AutoPRO Setup dialog box will appear Choose to use the default path select Enter OR Choose to enter an alternative path and then select Enter OR Choose to exit Setup by selecting EXIT The software will be copied The source and destination files and percentage of completed task are displayed A dialog box will appear when the program has been loaded Click on the OK box to complete the installation Now the motion control unit can be plugged in Windows Plug and Play will detect the new device being plugged in and prompt you to install a driver for it Please refer to
7. nstallation and Use Removing the Holder from the Accessory Gear Drive Perform the following steps 1 Grasp the holder firmly between the top idler pulley and the tension idler Tension Idler 2 Gently push in a horizontal plane toward the instrument 3 When the ring has cleared the idler pulley and gear driver slightly twist the rear of the holder to the right 4 Pull the holder back horizontally until the tension idler has recoiled and remove the ring Inserting a Wafer Perform the following steps 1 Remove the wafer holding ring from its mount and place it on a flat surface 2 Rotate the three clamps so that the flats on the clamps are facing inwards 3 Place a wafer in the ring The wafer will rest on the three Delrin surfaces beneath the clamps 4 Rotationally orient the flat on the wafer to the desired position with respect to the ring It may be useful to place a mark on the ring to aid in this positioning 5 Rotate the wafer clamps through 180 degrees to secure the wafer in place Delrin Clamps PN 350 073601 01 Page 3 Initial Alignment Linear Orientation to the Beam The Vertical Wafer Accessory has been pre aligned to the sample baseplate to assure the infrared beam strikes the center of the wafer and that the maximum travel is allowed in both the linear and rotational planes The linear slide has two stops to limit the amount of travel of the slide The scale indicator showing the radius d
8. ory Type Communications C VeeMax USB port status ee Open Polarizer Precision Polarizer Communications Test RotatlA 6 inch Holder 8 inch Holder a MapplR C AutoDiffusiR Map300 CO xY Stage C 150mm AutoS ampler 200mm AutoS ampler C 300mm AutoS ampler VeeMax with Polarizer C ATRMax with Polarizer FE C WeeMax with Prec Polarizer C ATRMax with Prec Polarizer Cancel PN 350 073601 01 Page 8 AutoPRO Overview AutoPRO is a Windows based automation software program for use with PIKE automated accessories and the AutoPRO motion controller With this software package a range of automated accessories may be programmed and operated in conjunction with most Windows based FTIR software packages Several programs comprise the complete software package but the following two programs are central to the function of the software and will be introduced briefly here AutoPRO Control This program contains the tools required to operate your automated accessory Status gt y Collect Data Sample Root waf E Background Back d Root ackground Root Back Scan Map300 C AutoPRO5 Profile yy map ACCDEMO IRDEMO Unload Help Quit The AutoPRO control panel contains the following major functions e Setup Bench Basic parameters for data collection number of scans r
9. slated through 3 inches to produce an R Theta motion The tolerance of the diameter of the wafer that can be mounted conforms to SEMI standards Orientation of the wafer with respect to the angle scale is left to the user s discretion It may be useful to mark the clamp side of the ring with respect to the angular scale so that the wafer flat may have a repeatable position with respect to the scale The Vertical Wafer Accessory is mounted onto a standard sample compartment baseplate perpendicular to the beam The entire baseplate and accessory can then be secured to the instruments sample compartment Wafer Ring Drive Mechanism Figure 1 6 Inch Vertical Wafer Accessory PN 350 073601 01 Page 1 Unpacking Your Accessory In order for you to quickly verify receipt of your accessory we have included a packing list Please inspect the package carefully Packing List Manual Wafer Holder Vertical Wafer Accessory Manual PN 350 073601 Quantity 1 6 Inch Trav Acc Automated Wafer Holder Vertical Wafer Accessory Manual PN 350 073601 Quantity 1 Motor Controller Quantity 1 PN 350 073601 01 Vertical Wafer Accessory PN 073 16XX Quantity 1 AutoPRO Manual and Software PN 350 000070 Quantity 1 6 Inch Wafer Ring PN 073 3600 Quantity 1 6 Inch Wafer Ring PN 073 3600 Quantity 1 Motorized Vertical Wafer Accy PN 073 26XX Quantity 1 Power Cables Quantity 1 set Page 2 Idler Pulley I
10. t filename Root File Name mafz34 FTIR Software Example Filename paf234 spc Midac Grams w l 7 Select Al al Default Directories Security Cancel OF PN 350 073601 01 Page 10 e Program Motions A series of samples may be defined and stored to a file This file may be subsequently used to move your accessory while collecting data from your spectrometer e Thi AutoPRO Wafer ar gt File Edit Setup Draw Help Profile Description No Description R 67 14 Theta 289 0 X 21 8 Y 63 5 18pt samp waf e Load and Unload The accessory stage may be moved to an unload position to simplify the insertion of new samples Status Collect Data rofile Sample Root O Background Setup Accessory Program Motions Background Root Back O TO Setup Experiment Auto Operation z HappiR C Program Files x66 PIKE TechnologiestAutoPr imss an PN 350 073601 01 Page 11 How to Use Help Choose Help from the menu or press F1 on the keyboard e Index Displays an index of Help topics including menus commands and shortcuts e Using Help Provides information on how to use Windows Help e About Provides specific information regarding the version of AutoPRO and current system information Status The status of the accessory at any time is displayed This includes the position of the accessory the current status of the motors and a thumbnail view of the file being used for programming t
11. toPRO There are several ways in which to run AutoPRO control Follow the steps below in order to start AutoPRO Control as a stand alone application 1 Click the start button 2 Point to Programs 3 Point to the AutoPRO5 folder 4 Click on the AutoPRO program The program will be run and will be displayed in the lower left hand corner of the display Note that AutoPRO requires that your computer system be set up with a screen resolution of at least 800x600 PN 350 073601 01 Page 7 It s Your First Time When you start AutoPRO for the first time the software does not know which accessory you have and you will be asked to configure the software The dialog below will be shown A You must select an accessory When you click OK the Accessory Setup page will be displayed a OOOO Accessory Type Communications C VeeMax USB port status Pi Open Polarizer Precision Polarizer ee Communications Test RotatlR 6 inch Holder Demo Mode OFF ca C MapplR onfigure Motors C AutoDiffuslA C Map300 C xY Stage C 150mm AutoSampler 200mm AutoS ampler C 300mm AutoSampler C VeeMax with Polarizer C ATRMax with Polarizer Initialize Motors PE O WeeMax with Prec Polarizer A OK C ATRMax with Prec Polarizer In order to configure the software to work with your accessory click the button next to the accessory description Click on 6 holder and ensure DEMO MODE is OFF Click OK a OOOO Access
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