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HFV 8000 Generator

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1. If the scan threshold is set too high the generator will begin to tune too early and the tuning will not be optimal If the scan threshold is set too low the threshold may never be reached and automatic tuning will not take over See Table 4 7 command 20 scan threshold 5 14 Installation Setup and Operation 5705072 F HFV 8000 Generator Display Mode and the LCD Display Indicator The Display Mode front panel push button allows you to cycle through modes 1 2 3 and 4 To select a mode 1 Scroll through the menu to the desired mode 2 Press and hold the Display Mode button for five seconds The mode will change and the indicator will display the state Note FAULT automatically displays when a fault condition occurs If the display mode switch is not pressed for five minutes the display returns to MODE 1 unless a fault has occurred In that case FAULT displays until you press the Display Mode button The modes represent the following MODE 1 default Top line displays current forward and reflected power Bottom line displays a bar graph indicating where the generator is operating within the specified frequency range Note The bar graph is shown as a scan range Therefore if the minimum and maximum frequency settings are the same the cursor will be set in the middle of the line MODE 2 Top line displays Total Hours AC On Total hours RF On Bottom line displays Total kWh delivered
2. This indicator latches on whenever the unit detects an overtemperature RF On sequence error or input line out of voltage range condition If this fault occurs the unit automatically shuts off the front panel LCD and displays the detected fault Top line FAULT Bottom line Type of fault 6 2 Troubleshooting and Global Customer Support 5705072 F HFV 8000 Generator OVERTEMPERATURE FAULT An overtemperature fault will display in the event of a complete loss of coolant Verify the Water In and Water Out connections are connected with the water flowing in the correct direction Make sure the inlet water temperature is 15 C to 30 C 59 F to 86 F and that the flow rate is greater than 11 4 lpm 3 gpm Also make sure you meet the specifications described in Environmental Specifications on page 3 8 and in Table 3 5 on page 3 8 After the generator cools restore operation by cycling the RF output enable command If these procedures do not help solve your problem contact AE Global Customer Support see AE Global Customer Support on page 6 8 RF ENABLE WITHOUT INTERLOCK FAULT RF power will not turn on if the RF enable signal is enabled before setting the interlock For proper operation you must set the interlock first then the RF enable If this procedure does not help solve your problem contact AE Global Customer Support see AE Global Customer Support on page 6 8 INPUT LINE FAULT An
3. on page 5 2 A DANGER The HFV generator can operate without being connected to either a chamber or a dummy load You are exposed to high voltage output from the generator if you do not hook the output to either a chamber or a dummy load Note If using a dummy load 50 Q connect the HFV generator to the load with an RG 393 cable and an appropriate load If you connect the generator to your chamber be sure to satisfy all chamber conditions for operation Before Engaging the Rear Circuit Breaker Become familiar with the Unpacking Spacing Requirements and Grounding sections in this chapter Also review the following sections Cooling water Connecting Cooling Water on page 5 5 Output power Connecting I O and Auxiliary Connectors on page 5 7 Input Power Connecting Input Power on page 5 8 Control Port Generator User port Generator User port Table 4 1 on page 4 2 Before Enabling the Output 1 Be sure to complete the steps in Before Engaging the Rear Circuit Breaker on page 5 9 2 Make sure the Standby Stop switch on the front panel is in the Stop down position 3 Engage the rear circuit breaker Note The front panel display should now activate 4 Verify the desired regulation mode is selected by looking at the front panel Load Regulation indicator ON load power regulation mode is selected this is the default OFF Forward power regulation is selected FLASHIN
4. b If no see Interlock OK Indicator Off on page 6 3 5 Is the Load Regulation indicator on solid or flashing 5705072 F Troubleshooting and Global Customer Support 6 1 Advanced Energy a If solid go to step 6 b If flashing see Load Regulation Indicator Flashing on page 6 4 6 Is the RF On indicator lit a If yes go to step 7 b If no see RF On Indicator Off on page 6 5 7 Is the At Set Point indicator on a If yes it indicates that the HFV generator is operating properly and delivering the requested power level b If no see At Set Point Indicator Off on page 6 5 If these questions do not help solve your problem contact AE Global Customer Support see AE Global Customer Support on page 6 8 ERROR INDICATIONS Front Panel Display LCD Not Lit The front panel display should operate as soon as the rear circuit breaker is turned on Verify that the 1 Rear circuit breaker is on 2 Input line voltage is between 178 to 229 VAC between all three phases Advanced Energy Displayed on LCD It is normal for ADVANCED ENERGY to display for a few seconds immediately after the rear circuit breaker has been enabled this is not an internal fault mode indicator However if the message continually displays try cycling the unit s circuit breaker If the problem persists contact AE Global Customer Support see AE Global Customer Support on page 6 8 Fault Indicator On
5. Continued Command Description Numberof Number of Host Data Response Bytes Data Bytes 133 Reads the minimum frequency value The 0 4 report controller board returns four data bytes minimum representing the minimum frequency in frequency Hertz e Range is 1765000 to 2165000 For example 2000000 2 000 000 Hz Set with command 3 134 Reads the maximum frequency value The 0 4 report controller board returns four data bytes maximum representing the maximum frequency value in frequency Hertz e Range is 1765000 to 2165000 For example 2000000 2 000 000 Hz Set with command 4 135 Reads the starting frequency value The 0 4 report controller board returns four data bytes starting representing the starting frequency in Hertz frequency e Range is 1765000 to 2165000 For example 2000000 2 000 000 Hz Set with command 5 136 Reads the generator forward power The 0 2 report controller board returns two data bytes forward representing the value in watts power For example 2500 2500 W 137 Reads the generator reflected power The 0 2 report controller board returns two data bytes reflected representing the reflected power value in power watts For example 2500 2500 W 140 Reads the host port time out value The 0 2 Host port controller board returns two data bytes time out representing the time out value in seconds value For example 500 5 00 s decimal is implied Set with comma
6. OFh Header Cmd CSR Chksum 06h ACK time 1356 Figure 4 11 Communications transaction example AE Bus Commands The following sections describe the command status response CSR codes returned by the HFV generator in response to a command as well as the AE Bus commands for the HFV generator AE BUS COMMAND STATUS RESPONSE CSR CODES When the HFV generator receives a command requesting a change in unit operation or status Command numbers 1 through 127 it responds with a command status response CSR code The CSR is a single byte number that indicates whether the unit accepted or rejected the command and in the case of rejection the reason the unit could not respond to the command Use Table 4 6 to interpret the CSR codes Table 4 6 Command Status Response CSR codes Value Meaning 0 Command accepted The following CSR codes are sent in response to a command that was not accepted and indicate why the command was not accepted 1 Control mode is incorrect 4 16 Communication Interfaces 5705072 F HFV 8000 Generator Table 4 6 Command Status Response CSR codes Continued Value Meaning Continued Output is on change not allowed Output is off change not allowed Data is out of range Invalid parameter Active fault s exist Ramping is active change not allowed Data byte count is incorrect Target life has been consumed Output OFF time
7. 1 Theory of Operation s i 4 lt sik cc be kn n n d l m h ANDA WG be x KAW 0 2 2 2 Chapter 3 Product Specifications Functional Specifications kk kk kk KK kK KK KK KK KK eee 3 1 Timing Diagrams cge si KKK MA eK EG Q lA d hln W bab AW G A 2095 3 2 Physical Specifications sini kk kk kK kk KK KK KK KK KK KK KI KK KK KK KK KK KK ews 3 5 Electrical Specifications kk kk kk KK KK KK KK GWEN KK KK KK KK KK KK es 3 6 Environmental Specifications X kk kk kk kK kK KK KK KK KK KK KK KK KK KK KK 3 8 Chapter 4 Communication Interfaces Generator User Port 15 Pin kk kk kK KK KK KK KK KK KK KK KK KK KK KK KK 4 1 User Port Interface Cabling Requirements KK KK KK 4 1 Generator User Port Pin Descriptions KK KK KA 4 2 Interconnect Schematics kk kK KK kK KK KK KK KK KK KK KI KK KK KK KK KK IK 4 6 Serial I O Host Port RS 232 With AE Bus 0 KK KK KK KK KK KK KK 4 8 Host Connector and Pin Descriptions KK KK KERR KK 4 8 Host Port Settings e s4x xa a 2a b naa mn ELA ha di mah BATA NGA 4 9 5705072 F V Advanced Energy AE Bus Host Port Transmission Parameters 4 10 AE Bus Protocol 2 wens pka REE Re Ka Ada da az k E 4 11 AE Bus Header Byte 44 papasa tices KK KK KK KK KK KK KK KK KK k 4 12 AE Bus Command Number Byte M K KK KK KK KK KK KK KK 4 12 AE Bus Optional Length Byt
8. 14 tuning goal 5 14 tuning phase 5 13 automatic tuning mode selecting 5 12 B baud rates Host port 4 10 C cables User port requirements 4 1 CE marking 1 4 center frequency description 2 1 center frequency mode selecting 5 12 certification 1 4 CE 1 4 CSA 1 4 EMC 1 4 NRTL C 1 4 checksum 4 13 circuit breaker rear 5 9 circuitry 4 6 see also illustrations Index circuits interlock 1 7 command 4 12 commands data logging on off 4 21 frequency rate of change 4 19 Host port 4 17 Host port time out value 4 22 maximum frequency 4 18 minimum frequency 4 18 report AC On total time 4 26 report actual frequency out 4 23 report calculated impedance 4 34 report delta 4 24 report device type 4 21 report diagnosis status 4 27 report forward power 4 22 report frequency rate of change 4 23 report kilowatt hours delivered 4 26 report last diagnostic test data 4 31 4 32 4 33 report logged data 4 34 report maximum frequency 4 22 report minimum frequency 4 21 4 22 report real gamma 4 23 report reflected power 4 22 report RF On total time 4 26 report scan threshold 4 24 report software checksum 4 27 report software configuration ID 4 27 report software level 4 26 report software part number 4 21 report starting frequency 4 22 report status 4 25 report tuning delta limit 4 24 report tuning gain 4 23 report tuning goal 4 23 report VSWR 4 23 reset tuning parameters 4 19 scan delta 4 20 sc
9. 19 regulation mode 5 11 reporting see commands response time 3 7 returning units for repair 6 9 RF on indicator 5 16 RF output cover interlock 1 6 RF output operating conditions 3 2 RF output power specifications 3 7 frequency 3 7 harmonics 3 7 load impedance 3 7 regulation 3 7 response time 3 7 transient regulation 3 7 RF power enable schematic diagram 4 7 RF power on status schematic diagram 4 8 RS 232 with AE Bus 4 8 specifications 3 8 S safety P conditions of use 1 6 phase directives 1 4 scanning 5 13 see also directives tuning 5 13 standards 1 4 Index iv 5705072 F HFV 8000 Generator see also standards scan frequency delta 4 20 5 14 scan threshold 4 20 5 13 5 14 scanning phase 5 13 schematic diagrams 4 6 selecting automatic tuning mode 5 12 center frequency mode 5 12 SEMI guideline 52 0200 1 5 serial I O Host port see Host port set point forward load power set point schematic di agram 4 7 indicator 5 17 shielding condition of use 1 6 shielding requirements 5 5 signals see also pin descriptions analog 4 1 digital 4 1 User port pin descriptions 4 2 size 3 6 spacing requirements 5 1 specifications coolant 3 8 electrical 3 6 environmental 3 8 functional 3 1 overvoltage category 3 8 physical 3 5 pollution degree 3 8 standards 47 CFR Part 18 1 5 ANSI AISA 82 02 01 1 5 CSA C22 2 No 1010 1 1 5 EN 50178 1 5 EN 55011 1 5 EN 61000 6 2 1 5 SEMI S2 0200 1 5 standby switch 5 11 stop switch 5 11
10. Returning Units for Repair kk kk kk kk KK KK KK KK KI KK KK ee 6 9 Warranty i a xa oat kwa la n k k Ra A N abe n B4 6i a EAA YAE KAY NP u ene ee KAG 6 10 Authorized Returns a a Haw KAMA KA Cee ele dort nese dere eens 6 10 Warranty Statement kk kk kk KK KK KK KK KK KK tees 6 10 5705072 F vii Advanced Energy Viii 5705072 F HFV 8000 Generator List of Tables Electromagnetic compatibility EMC directives and standards 1 5 Safety directives and standards KK KK KK KK KK KK KK KK KK KK KK KK KO 1 5 Industry guidelines 212556270 kk kk kk kk kK KK kK KK KK KK KK IK KK KK kK kk kk kk kk kk kk kk 1 5 Hardware interlocks maana Naa KA MIA D KK KK KK K KK KK KK KK KK KK KK KOK KK KK KK k 1 6 HFV generator theory of operation kk KK KK KK KK K ee 2 2 Functional specifications KB kk kk kk kK KK KK KK KK KK KK KK KK KK KK kk kk kk 3 1 Physical specifications l a kk kk kK kK KK seni KK SK KK KK kk kk kk kk kk kk kk 3 6 Electrical specifications 2 20 NG 4 xe ress kllk b d KANA NA be eee kk ae E NG NO e nl 3 6 Climatic specifications kk kk kk kk kK kK KK KK KK KK KK KK KK KK KK KK KK KK KK lk 3 8 Environmental specifications 2 paa map kk kk kk KK KK KK KK KK KK KK KI renerne 3 8 Generator User port pin descriptions KK KK KK KK KK KK KK KK KK KK gt 4 2 AGS PON CONNECT x x xa a a ALAB AMADO kw sa El
11. The following sections provide information that you need to understand before installing the HFV generator Spacing Requirements See Figure 3 3 on page 3 6 for unit dimensions Installation Requirements Install this unit according to the following requirements AN WARNING Operating and maintenance personnel must receive proper training before installing troubleshooting or maintaining high energy electrical equipment Potentially lethal voltages could cause death serious personal injury or damage to the equipment Ensure that all appropriate safety precautions are taken WARNING RISK OF DEATH OR BODILY INJURY Disconnect and lockout tagout all sources of input power before working on this unit or anything connected to it 5705072 F Installation Setup and Operation 5 1 Advanced Energy Unpacking Unpack the unit carefully Inspect the unit looking for obvious physical damage If no damage is apparent proceed with the next section If you do see signs of shipping damage contact Advanced Energy Industries Inc and the carrier immediately see AE Global Customer Support on page 6 8 Save the shipping container for submitting necessary claims to the carrier AN DANGER Capacitor discharge time of the 300 V bus is two minutes Do not remove top cover there are no user serviceable parts within INSTALLING THE HFV GENERATOR The following sections explain how to install the unit 5 2 Insta
12. The transmitting unit determines this value by accumulating the exclusive or XOR of all bytes of the packet up to but not including the checksum value The receiving unit accumulates the XOR of all bytes of the packet including the checksum If the result is zero the unit has received the packet intact The unit will act on the message only if the address is valid and the checksum is validated as having no parity errors 5705072 F Communication Interfaces 4 13 Advanced Energy Creating an Ideal Communications Transaction Figure 4 10 illustrates the steps in an ideal communications transaction between a host computer and the HFV generator Host HFV generator t Transmits message i packet Uy Z 2 7 7 Receives packet Waits N Sends ACK t S Assembles NN CSR byte N Or AN data byte s N Then transmits t Receives ACK N N N N Waits NN Receives packet t Sends ACK Waits My 2 Up Receives ACK t time END OF TRANSACTION 1139 Figure 4 10 AE Bus communications transaction To HOST TRANSMITS MESSAGE PACKET The host computer sends a message packet to the HFV generator The packet contains one of the following e A command that requests data or status information Acommand and data that change a parameter setting Anexecutable command T UNIT VERIFIES HOST TRANSMISSION PACKET Once the HFV generator receives the host computer transmission message packet the HFV generator ve
13. To set the generator to a single frequency while in automatic tuning mode set Host port commands 3 4 and 5 to the same desired frequency see Table 4 7 on page 4 18 ADJUSTING TUNING PARAMETERS To control automatic tuning the HFV generator uses a tuning algorithm which you can adjust by setting several parameters see Host port commands on page 4 18 In automatic tuning mode the HFV unit begins by scanning through frequencies using the user set frequency limits until a user set scan threshold is passed When the threshold is passed the generator begins to tune automatically Automatic tuning mode has therefore two distinct periods the scanning phase and the tuning phase Note If the scan threshold is set too high the generator will begin to tune too early and the tuning will not be optimal If the scan threshold is set too low the threshold may never be reached and automatic tuning will not take over By characterizing a chamber you can identify the scan threshold appropriate to a specific process and chamber Advanced Energy offers HFV Virtual Front Panel VFP software that can help you characterize a chamber and identify appropriate tuning settings for it then set those parameters refer to the HFV VFP software manual for instructions To order VFP software contact your AE sales representative for contact information see Table 6 1 on page 6 8 To optimize the HFV generator s automatic tuning mode you may adjust
14. determine generator integrity The front panel is primarily for monitoring the operation of the generator or initiating the internal diagnostics program see Front view on page 5 3 The HFV generator is designed to fit into a 48 centimeter 19 rack with a panel height of 13 centimeters 5 25 JU The generator operates from a 208 VAC 3 d 50 60 Hz power source and can tolerate arbitrary phase rotation of the input power connections The HFV generator is water cooled with all power interface port and water connections at the rear of the generator see Figure 5 2 on page 5 4 5705072 F Product Overview and Theory 2 1 Advanced Energy THEORY OF OPERATION Figure 2 1 represents high level modules of HFV generator operation Table 2 1 explains each module Front Panel Switch ig Logic Control amp Generator User Cable Low Voltage DeviceNet Interface o Conversion 2 Line Input RF Power AC Line In Section Conversion RF Out 1 4 Use RG 393 or equivalent cable DC Power A Conversion 3 Water In pp Water Solenoid optional Water Out j 5 Figure 2 1 HFV generator block diagram Table 2 1 HFV generator theory of operation Module Explanation 1 Line input section The line input section provides input line filtering and circuit protection 2 Logic control and low This module controls th
15. has occurred e 7 The number of times RF enable has been set without the interlock set e 8 The number of line faults that have occurred e 9 The number of overtemperature faults that have occurred e 10 The number of host port heartbeat time outs Number of Host Data Bytes 0 Number of Response Data Bytes 4 221 report last ten faults Returns fault codes for the last ten faults The controller returns 10 bytes Each byte contains a fault code The low order byte is the most recent fault The fault codes are e 0 No fault e 1 Overtemperature fault e 2 Line fault 3 RF enable without interlock fault 4 DeviceNet communications fault 5 to 254 Undefined 10 4 30 Communication Interfaces 5705072 F HFV 8000 Generator Table 4 7 Host port commands Continued Command 240 report last diagnostic test data Description Reads data recorded during the last diagnostic test The controller board returns 48 data bytes three bytes for each of the 16 A D channels e Byte 1 Forward power test gt 0 The value is in range gt 1 The value is out of nominal operating parameters e Bytes 2 and 3 The forward power value at the time of the test e Byte 4 Reflected power test 0 The value is in range 1 The value is out of nominal operating parameters e Bytes 5 and 6 The reflected power value at the time of the test e Byte
16. input line fault occurs when the input voltage is out of range Measure the line voltage with a true RMS voltmeter and make sure it is between 178 to 229 VAC between all three phases If the line voltage is within tolerance cycle the RF output enable command to clear the fault and try operating the supply again If the fault reoccurs there is either an internal failure or an external voltage spike e Internal failure In this case run the Internal Diagnostics program See Running Internal Diagnostics on page 5 17 External voltage spike In this case try monitoring the line voltage for spikes If these procedures do not help solve your problem contact AE Global Customer Support see AE Global Customer Support on page 6 8 Interlock OK Indicator Off The front panel Interlock OK indicator illuminates when the interlock is satisfied If this indicator is not lit the output will be disabled Three settings on the HFV generator will satisfy the interlock circuit 5705072 F Troubleshooting and Global Customer Support 6 3 Advanced Energy 1 The front panel Standby Stop rocker switch must be in the Standby up position Standby is the closed position for this switch 2 The RF output cover must be firmly attached A microswitch on the rear panel senses the presence of the output cover 3 There must be an external closure between pins and 2 on the rear panel Generator User port This closure must h
17. is out of nominal operating parameters e Bytes 26 and 27 The I inverter value at the time of the test e Byte 28 V inverter test 0 The value is in range gt 1 The value is out of nominal operating parameters e Bytes 29 and 30 The V inverter value at the time of the test e Byte 31 Dissipation test 0 The value is in range gt 1 The value is out of nominal operating parameters e Bytes 32 and 33 The dissipation value at the time of the test Number of Host Data Bytes 0 Number of Response Data Bytes 48 4 32 Communication Interfaces 5705072 F HFV 8000 Generator Table 4 7 Host port commands Continued Command Description Numberof Number of Host Data Response Bytes Data Bytes 240 e Byte 34 15 V supply test 0 48 continued 0 The value is in range report last diagnostic test data gt 1 The value is out of nominal operating parameters e Bytes 35 and 36 The 15 V supply value at the time of the test e Byte 37 10 V reference test 0 The value is in range gt 1 The value is out of nominal operating parameters Bytes 38 and 39 The 10 V reference value at the time of the test e Byte 40 30 V supply test 0 The value is in range gt 1 The value is out of nominal operating parameters e Bytes 41 and 42 The 30 V supply value at the time of the test e Byte 43 15 V supply test 0 The value is in ran
18. new parameter was accepted If the host receives no response within a reasonable period it takes whatever action it has been programmed to take T UNIT TRANSMITS RESPONSE TO HOST The HFV generator prepares a response packet with the requested information or appropriate CSR code which it then transmits to the host computer The host computer then determines by means of the checksum if the response packet is complete If the host computer detects an error in the transmission the checksum is not validated it can request the packet be sent again by transmitting a NAK 15h Ts HOST ACKNOWLEDGES UNIT RESPONSE If the HFV generator receives an ACK 15h from the host computer it returns to the normal waiting state If the HFV generator receives a NAK 06h from the host computer the HFV generator retransmits the response packet The HFV generator continues to retransmit in response to NAK transmissions until the host computer stops the cycle If the HFV generator receives no response it assumes an ACK and returns to the waiting state 5705072 F Communication Interfaces 4 15 Advanced Energy AE BUS COMMUNICATIONS TRANSACTION EXAMPLE Figure 4 11 is a simplified graphic showing the steps in an example communications transaction between a host computer and an HFV generator Host Computer HFV generator OAh 06h 64h 00h 68h Header Cmd Data Chksum 06h ACK 09h 06h 00h
19. part number revision and device ID description 5705072 F Communication Interfaces 4 27 Advanced Energy Table 4 7 Host port commands Continued Command Description Numberof Number of Host Data Response Bytes Data Bytes 219 Reports a snapshot of generator data The 0 21 report controller board returns 21 data bytes condensed snapshot of e Bytes 0 and 1 represent forward power generator e Bytes 2 and 3 represent reflected power data Bytes 4 and 5 represent delivered power e Bytes 6 and 7 represent the set point Byte 8 represents the regulation mode 1 Selected by external switch gt 2 Forward power regulation gt 3 Load power regulation Byte 9 represents process status information 0 Power failure 1 Unassigned interrupt has occurred gt 2 A D conversion failure 3 Output on 4 Load power regulation 5 Overtemperature gt 6 Interlock gt 7 Line fault e Byte 10 represents process status information 0 Divide error gt 1 Software single step 2 Breakpoint 3 Overflow gt 4 Array bounds exception 5 Undefined opcode 6 Escape opcode exception gt 7 Numeric coprocessor exception 4 28 Communication Interfaces 5705072 F HFV 8000 Generator Table 4 7 Host port commands Continued Command Description 219 cont d e Byte 11 represents process status information gt 0 Center frequency 1 Set point s
20. switches DIP 4 9 interlock 1 6 Standby 5 11 Stop 5 11 symbols in user manual 1 2 T theory of operation 2 2 threshold minimum 5 11 threshold scan 4 20 5 13 5 14 timing diagrams 3 2 toggling frequency mode 3 3 transient regulation 3 7 transmission parameters table 4 11 tuning delta limit 4 20 5 14 tuning gain 4 20 5 14 tuning goal 5 14 tuning parameters 5 13 delta limit 4 20 5 14 frequency limits 4 18 4 19 5 13 frequency rate of change 4 19 5 13 maximum frequency command 4 18 minimum frequency command 4 18 reset command 4 19 scan delta frequency command 4 20 scan frequency delta 5 14 scan threshold 5 13 5 14 scan threshold command 4 20 starting frequency command 4 19 tuning delta limit command 4 20 tuning gain 5 14 tuning gain command 4 20 tuning goal 5 14 tuning goal command 4 20 tuning phase 5 13 TUV 1 4 U unpacking 5 2 user manual labels used 1 3 type conventions 1 1 User port 4 1 cable requirements 4 1 pin descriptions 4 2 signals 4 2 V VFP 2 1 5 13 views see illustrations Virtual Front Panel VFP software 2 1 5 13 W warranty authorized returns 6 10 filing a claim 6 10 5705072 F Index v Advanced Energy returning units 6 10 statement 6 10 water in out connections 5 4 5 6 water solenoid 3 2 defined 2 2 installing 5 6 weight 3 6 X XOR see exclusive or Index vi 5705072 F
21. the following tuning parameters using the Host port commands on page 4 18 or the optional VFP software To reset to factory defaults see Table 4 7 on page 4 18 command 7 reset tuning parameters Frequency Limits The frequency limits parameter sets the range of frequencies over which the HFV unit will operate You can set a start frequency an upper frequency limit and a lower frequency limit See Table 4 7 commands 3 4 and 5 minimum frequency maximum frequency and starting frequency In center frequency mode all three frequencies are set to the center frequency In automatic tuning mode the HFV unit starts searching for a tune at the start frequency and sweeps up until a satisfactory tuning is found or until the upper frequency limit is reached If a tune is not found this pattern is repeated See also Center Frequency Mode on page 5 11 and Automatic Tuning Mode on page 5 12 Frequency rate of change ms This value defines how quickly the generator moves through the steps during both the scanning and the tuning phases in milliseconds For example if you set this value to 5 the generator will make tuning adjustments no more than every 5 ms See Table 4 7 command 11 frequency rate of change 5705072 F Installation Setup and Operation 5 13 Advanced Energy Tuning goal When the tuning parameter measurement is below the tuning goal value the generator does not adjust the output fre
22. 200 9600 Closed Open 4800 19 2K Open Closed 9600 38 4K Open Open 19 2 K 57 6K Naba Requires internal modification to the unit Contact Global Customer Support before removing the safety cover see AE Global Customer Support on page 6 8 AE Bus Host Port Transmission Parameters The communications capability of the serial AE Bus Host port is limited to the following parameters e Start bits One e Number of Data Bits 8 e Parity Odd Stop bits One 4 10 Communication Interfaces 5705072 F HFV 8000 Generator e Low order bytes transmitted before high order bytes Table 4 5 lists the Host port transmission parameters Table 4 5 Transmission parameters RS 232 RS 485 RS 422 Baud rate 1200 4800 9600 9600 19 2 K 9600 19 2 K user 19 2 K 38 4 K 57 6 K 38 4 K 57 6 K selectable Connector 2 3 5 5 6 7 Internal jumper pins The host computer must finish one transaction with the HFV generator before it initiates another either with the same unit or any other unit Note The HFV generator sends data through pin 2 TXD D This pin must be connected to the receive pin RXD D on the host computer s PC serial connector The receive pin is normally pin 2 for a standard 9 pin PC serial port and normally pin 3 for a standard 25 pin PC serial port AE Bus Protocol The AE Bus protocol uses pure binary data nothing is coded in ASCID and is designed t
23. 4 Load power regulation e 5 Overtemperature 6 Interlock e 7 Line fault 2nd status byte e 0 Divide error e 1 Software single step e 2 Breakpoint e 3 Overflow e 4 Array bounds exception 5 Undefined opcode 6 Escape opcode exception e 7 Numeric coprocessor exception 3rd status byte e 0 Center frequency e 1 Set point scaled e 2 Wide bus voltage test e 3 Water valve is off e 4 In diagnostic mode e 5 RF request e 6 Digital frequency display e 7 Continuous load power tuning 4th status byte e 0 At set point e 1 Datalogging enabled e 2 RF enabled without interlock 3 Heartbeat time out off 5705072 F Communication Interfaces 4 25 Advanced Energy Table 4 7 Host port commands Continued Command Description Numberof Number of Host Data Response Bytes Data Bytes 164 Reads the set point value The controller 0 3 report board returns three data bytes set point e Bytes 1 and 2 represent the set point value in watts p Maximum power is 3000 W e Byte 3 indicates the regulation mode 1 Selected by external switch 2 Forward power regulation 3 Load power regulation Set with command 12 195 Reads the AC On total time The controller 0 4 report AC On board returns four data bytes each count total time equal to 0 25 h For example 11358 2839 5 h 196 Reads the RF On total time The controller 0 4 report RF On board returns 4 data
24. 7 Inverter power test 0 The value is in range gt 1 The value is out of nominal operating parameters e Bytes 8 and 9 The inverter power value at the time of the test e Byte 10 Fast I test 0 The value is in range gt 1 The value is out of nominal operating parameters e Bytes 11 and 12 The Fast I value at the time of the test e Byte 13 PAED test gt 0 The value is in range 1 The value is out of nominal operating parameters e Bytes 14 and 15 The PAED value at the time of the test Number of Host Data Bytes 0 Number of Response Data Bytes 48 5705072 F Communication Interfaces 4 31 Advanced Energy Table 4 7 Host port commands Continued Command 240 continued report last diagnostic test data Description e Byte 16 Bus sample test 0 The value is in range gt 1 The value is out of nominal operating parameters e Bytes 17 and 18 The Bus sample value at the time of the test e Byte 19 10 V reference test 0 The value is in range gt 1 The value is out of nominal operating parameters e Bytes 20 and 21 The 10 V reference value at the time of the test e Byte 22 Ground test 0 The value is in range gt 1 The value is out of nominal operating parameters e Bytes 23 and 24 The ground value at the time of the test e Byte 25 I inverter test 0 The value is in range gt 1 The value
25. E BUS OPTIONAL LENGTH BYTE This field supplements the Header field and exists only when the length bits bits 0 1 and 2 in the Header field contain a value of 7 07h If the number of data bytes in the Data field is 6 or less then the three length bits in the Header field are sufficient to represent this amount O to 6 00h to 06h Since the Data field may contain up to 255 bytes of information the Optional Length byte is required when the Data field is larger than 6 bytes When the Data field is larger than 6 bytes the length bits in the header bits O 1 and 2 will equal 7 07h and the Optional Length byte will contain a one byte value from 7 to 255 07h to ffh representing the number of data bytes in the Data field AE BUS DATA BYTES The Data field may contain from 0 to 255 bytes of binary data This field contains command related data or a command status response CSR Since some commands do not require data sometimes the Data field is not present If the value specified in the length bits bits O 1 and 2 of the Header field is O to 6 the HFV generator expects 0 to 6 data bytes However if the value in the Header field is 7 07h the HFV generator looks for the Optional Length byte after the Command field and reads this value to calculate the data byte count AE BUS CHECKSUM BYTE This one byte field is the last byte in the packet The value of this byte depends upon the number of bytes in each of the preceding fields
26. G The generator has been set to center frequency mode To change the regulation mode see Command 12 in Table 4 7 on page 4 18 5705072 F Installation Setup and Operation 5 9 Advanced Energy Regulation Mode on page 5 11 gt Timing Diagrams on page 3 2 Enabling the Output 1 Be sure to have completed the steps listed in Before Engaging the Rear Circuit Breaker on page 5 9 and Before Enabling the Output on page 5 9 2 Turn the Standby Stop switch on the front panel to the Standby up position The generator should now be under control of the Generator User port Note If any problems arise during the preceding process refer to the Troubleshooting Guide on page 6 1 3 Make sure there are no faults present by verifying that the front panel Fault indicator is off Note If this indicator is lit see Fault Indicator On on page 6 2 AN CAUTION The overtemperature fault protects only in the event of a complete loss of coolant 4 Make sure the interlock circuit is satisfied by verifying the front panel Interlock OK indicator is lit Note If this indicator is off see Interlock OK Indicator Off on page 6 3 5 In order for the HFV generator to deliver power it must receive an RF On command and the set point or requested output power level must be above a specified minimum see pin 4 and pin 5 in Table 4 1 on page 4 2 When these two conditions are met
27. MANUAL HFV 8000 Generator 3 kW 2 MHz 208 V Input 5705072 F November 2002 Advanced Energy Industries Inc 1625 Sharp Point Drive Fort Collins CO 80525 USA a 800 446 9167 CU technical support aei com User Manual HFV 8000 Generator 5705072 F ma NE AN ACE Advanced Energy COPYRIGHT This manual and the information contained herein is the proprietary property of Advanced Energy Industries Inc No part of this manual may be reproduced or copied without the express written permission of Advanced Energy Industries Inc Any unauthorized use of this manual or its contents is strictly prohibited Copyright 1997 2002 Advanced Energy Industries Inc All Rights Reserved DISCLAIMER AND LIMITATION OF LIABILITY The information contained in this manual is subject to change by Advanced Energy Industries Inc without prior notice Advanced Energy Industries Inc makes no warranty of any kind whatsoever either expressed or implied with respect to the information contained herein Advanced Energy Industries Inc shall not be liable in damages of whatever kind as a result of the reliance on or use of the information contained herein PRODUCT USAGE STATEMENT A WARNING Read this entire manual and all other publications pertaining to the work to be performed before you install operate or maintain this equipment Practice all plant and product safety instructions and precautions Failure to follow instructio
28. MODE 3 Top line displays Press and Hold Bottom line displays Center Auto Tune Note A flashing LOAD REG indicator means the generator is in center frequency mode if the LOAD REG is not flashing the generator is automatic tune mode For an alternative method to switch between center frequency mode and automatic tuning mode see Timing Diagrams on page 3 2 MODE 4 Top line displays Press and Hold Bottom line displays Mode for Diag 5705072 F Installation Setup and Operation 5 15 Advanced Energy MONITORING THE GENERATOR Table 5 1 describes the indicators on the HFV generator Table 5 1 Indicators Indicator Explanation Interlock OK This green indicator illuminates if interlock criteria are met see Interlock OK Indicator Off on page 6 3 for troubleshooting interlock problems Load Regulation This green indicator illuminates whenever load delivered power regulation mode is selected An unlit indicator means that forward power regulation mode is selected A flashing indicator indicates that the generator has been set to center frequency mode see MODE 3 in Display Mode and the LCD Display Indicator on page 5 15 RF On This green indicator illuminates whenever RF output power is enabled Depending on the set point level RF power may or may not be present at the output connector This indicator will not illuminate if RF power is shut off e Interlock is open A fau
29. RN Signal Type Output Description Enables output RF power with an external contact closure between pins 4 and 9 this pin is tied to the LED anode of an opto coupler through a 1 KQ resistor See Figure 4 4 on page 4 7 for an electrical diagram 11 12 INTERLOCK LOOP Enables the internal AC power contactor with an external closure between pins and 72 provided front panel Standby switch is closed and RF output cover is on External series resistance must be 15 Qor less This pin is tied to 15 V by a resettable fuse Note When this loop is interrupted the unit disables the output by opening the main contactor inside the supply Once the interlock is reestablished the main contactor will close but the output will not come on until the RF POWER ENABLE line pin 4 is cycled See Figure 4 7 on page 4 8 for an electrical diagram 5705072 F Communication Interfaces 4 5 Advanced Energy INTERCONNECT SCHEMATICS The following electrical diagrams detail the interface circuitry in the HFV unit 1848 User Control I O i HFV User I O I WV Vv i Reflected Power V I A 2 Meter A D or Exc ka NW NAN 0 to 10 V 0 to 1000 W I al i oY a I i 0 V 1847 Figure 4 2 Reflected power User Control I O i HFV User I O I NANAMN i Forward Load Power M l I M
30. Table 3 5 Environmental specifications Description Specification Overvoltage Category II Pollution degree 2 Coolant requirements Temperature 15 C to 30 C 459 F to 86 F inlet temperature Flow rate 11 4 Ipm 3 gpm minimum 3 8 Product Specifications 5705072 F HFV 8000 Generator Table 3 5 Environmental specifications Continued Description Specification Pressure 517 kPa 75 psi maximum inlet pressure Note If your generator has a water solenoid the maximum water pressure is 275 kPa 40 psi Contaminates AE recommends the following specifications for the water that cools the HFV generator pH between 7 and 9 Total chlorine lt 20 ppm e Total nitrate lt 10 ppm e Total sulfate lt 100 ppm Total dissolved solids lt 250 ppm e Total hardness expressed as calcium carbonate equivalent less than 250 ppm e Specific resistivity of 2500 Q per cm or higher at 25 C e Total dissolved solids TDS as estimated by the following TDS lt 640 000 specific resistivity Q per cm 5705072 F Product Specifications 3 9 Advanced Energy 3 10 Product Specifications 5705072 F HFV 8000 Generator Chapter 4 Communication Interfaces GENERATOR USER PORT 15 PIN The 15 pin Generator User port on the HFV generator provides analog and digital signals for controlling and monitoring the unit T
31. This command is invalid when the unit is in center frequency mode The value must be greater than or equal to the value set by command 3 minimum frequency and less than or equal to the value set by command 4 maximum frequency For example enter 2000000 2 000 000 Hz Read back with command 135 See also Frequency Limits on page 5 13 7 Resets tuning parameters to factory defaults 1 1 reset tuning Send 1 byte to select the setting CSR only parameters e 0 Keep current settings e 1 Factory defaults 11 Specifies the frequency rate of change Send 2 1 frequency two bytes least significant byte first CSR only rate of representing the frequency rate of change in change seconds Accepts a value of 5 to 1000 0 005 s to 1 000 s decimal is implied Read back with command 141 See also Frequency rate of change ms on page 5 13 12 Sets regulation mode Send one data byte 1 1 set indicating the desired mode CSR only regulation mode e 1 Selected by external switch e 2 Forward power regulation e 3 Load delivered power regulation Read back with command 132 5705072 F Communication Interfaces 4 19 Advanced Energy Table 4 7 Host port commands Continued Command 14 tuning goal Description Specifies the desired goal that the tuning algorithm will attempt to achieve Send two bytes least significant byte first representing the desired goal e Range is 1 to 8000 Read back w
32. after following these procedures you still have a problem or if the procedure instructs you to contact AE Global Customer Support and discuss the problem with a representative Be prepared to give the model number and serial number of the unit as well as the reason for the proposed return This consultation call allows Global Customer Support to determine whether the problem can be corrected in the field or if the unit needs to be returned Such technical consultation is always free of charge If you return a unit without first getting authorization from Global Customer Support and that unit is found to be functional you will be charged a re test and calibration fee plus shipping charges To ensure years of dependable service Advanced Energy products are thoroughly tested and designed to be among the most reliable and highest quality systems available worldwide 5705072 F Troubleshooting and Global Customer Support 6 9 Advanced Energy WARRANTY Advanced Energy AE products are warranted to be free from failures due to defects in material and workmanship for 12 months after they are shipped from the factory please see warranty statement below for details In order to claim shipping or handling damage you must inspect the delivered goods and report such damage to AE within 30 days of your receipt of the goods Please note that failing to report any damage within this period is the same as acknowledging that the goods we
33. ain options of this product are certified by Canadian Standards Association CSA NRTL C e CE marking self addressed by AE Compliance Engineering e EMC measurements verified by T V For more information refer to the letter of conformance US or declaration of conformity EU accompanying the product Safety and Compliance Directives and Standards Certain options of this unit have been tested for and comply with the following electromagnetic compatibility EMC and safety directives and standards and industry guidelines Note This device must be installed and used only in compliance with the directives and standards listed in addition to VDE 0113 EN 60204 IEC 60204 and applicable requirements 1 4 Safety and Product Compliance Guidelines 5705072 F HFV 8000 Generator ELECTROMAGNETIC COMPATIBILITY EMC DIRECTIVES AND STANDARDS Table 1 1 Electromagnetic compatibility EMC directives and standards Directive 89 336 EEC Description EC Council directive on the approximation of the laws of the Member States relating to electromagnetic compatibility EMC Directive 47 CFR Part 18 Code of Federal Regulations Limits and methods of measurement of radio interference characteristics of industrial scientific and medical equipment EN 55011 Limits and methods of measurement of radio disturbance characteristics of industrial scientific medical ISM radio frequency equipment Class A Gr
34. al diagrams 4 6 see also illustrations electrical specifications 3 6 input power specifications 3 6 RF output specifications 3 7 electromagnetic compatability EMC certification 1 4 directives and standards 1 4 EMC see electromagnetic compatibility environmental specifications 3 8 error indications 6 2 Advanced Energy displayed on LCD 6 2 at set point indicator off 6 5 fault indicator on 6 2 front panel display LCD not lit 6 2 high reflected power 6 7 input line fault 6 3 interlock ok indicator off 6 3 load regulation indicator flashing 6 4 no output no plasma 6 7 overtemperature fault 6 3 RF enable without interlock fault 6 3 RF on indicator off 6 5 exclusive or 4 15 F fault indicator 5 17 faults see error indications Index ii 5705072 F HFV 8000 Generator first time operation 5 9 fixed frequency see center frequency forward load power output schematic diagram 4 6 frequency 3 7 line 3 6 output 3 7 4 18 4 19 5 15 verifying operating 5 12 frequency limits 4 18 4 19 5 13 frequency mode polling 3 3 3 4 toggling 3 3 frequency rate of change 4 19 5 13 front panel controls 5 4 indicators 5 4 interlock 1 6 functional specifications 3 1 G general description 2 1 general transmission parameters 4 10 Generator User port see User port global customer support 6 8 contact information 6 8 graphics see illustrations grounding 5 5 condition of use 1 6 l icons in user manual 1 2 ill
35. an threshold 4 20 set regulation mode 4 19 starting frequency 4 19 tuning delta limits 4 20 tuning gain 4 20 5705072 F Index i Advanced Energy tuning goal 4 20 communications ACK 4 15 acknowledgement 4 15 AE Bus protocol 4 11 checksum 4 13 command 4 12 data data bytes 4 13 exclusive or 4 15 header 4 12 Host port 4 10 Host port transaction illustration 4 16 ideal transaction 4 14 ideal transaction illustration 4 14 NAK 4 15 negative acknowledgement 4 15 optional length byte 4 13 RS 232 with AE Bus 4 8 transaction example 4 16 XOR 4 15 compliance 1 4 compliance engineering 1 4 conditions of use 1 6 connecting cooling water 5 5 I O connections 5 7 input power 5 8 output power 5 7 water in out 5 6 connector cable specifications AC input 3 6 coolant 3 6 generator user 3 6 Host port 3 6 RF output 3 6 User port 3 6 connectors condition of use 1 6 Host Host port 4 8 User port 4 1 controls front panel 5 4 coolant connector cable specifications 3 6 contaminates 3 9 flow rate 3 8 pressure 3 9 specifications 3 8 temperature 3 8 cooling 3 2 CSA certification 1 4 current line 3 7 customer service see global customer support D data data bytes 4 13 DDS 2 1 5 11 diagnostics 6 6 internal 5 17 diagrams see illustrations digital signals 4 1 dimensions 3 6 DIP switch 4 9 direct digital synthesis DDS 2 1 5 11 directives 73 23 EEC 1 5 89 336 EEC 1 5 drawings see illustrations E electric
36. atic tuning mode continuously minimizes the mismatch to the generator This mode is only available while in forward power regulation mode In load power regulation an initial frequency sweep is performed to determine the frequency that yields the minimum reflected power Regulation Mode The rear panel rocker switch is used to select the desired regulation mode forward power or load power as measured at the generator output Center position defaults the unit to forward power regulation the 15 pin Generator User port does not support remote control of this function You may also set the desired regulation mode using the Host port see command 12 in Table 4 7 on page 4 18 Center Frequency Mode Center frequency mode sets the output frequency to the center of the frequency band This mode is used only to optimize settings on some systems during initial setup Note Center frequency mode disables Host port commands 3 4 and 5 see Table 4 7 on page 4 18 Note If you cycle AC input power the generator will default to automatic tuning mode 5705072 F Installation Setup and Operation 5 11 Advanced Energy SELECTING CENTER FREQUENCY MODE To select center frequency mode 1 Press the Display Mode button on the front panel repeatedly until the display reads Top line Press and Hold Bottom line Center Auto Tune 2 Press and hold the Display Mode button for at least five seconds until the Load Regulation ind
37. ave a series resistance of 15 Qor less and should have no other external loading See Figure 4 7 on page 4 8 for an electrical diagram WHAT IS THE INTERLOCK The HFV generator uses an interlock circuit to shut off the output in emergency situations The interlock circuit is basically several switches wired in series The interlock loop of the HFV generator must be closed or satisfied before the output power can be enabled Note When this loop is interrupted the unit disables the output by opening the main contactor inside the supply Once the interlock is reestablished the main contactor will close but the output will not come on until the RF power is cycled See Figure 4 7 on page 4 8 for an electrical diagram Load Regulation Indicator Flashing During normal operation the Load Regulation indicator will either be on load power regulation or off forward power regulation When this indicator is flashing the unit is in center frequency mode Center Frequency mode is used only to optimize settings on some systems during initial setup To select Center Frequency mode 1 Press the Display Mode button on the front panel repeatedly until the display reads Top line Press and Hold Bottom line Center Auto Tune 2 Press and hold the Display Mode button for at least five seconds until the Load Regulation indicator flashes To return to the automatic tuning mode 1 Press the Display Mode button on the front panel re
38. bytes each count equal total time to 0 25 h For example 10235 2558 75 h 197 Reads the total kilowatt hours delivered The 0 4 report controller board returns four data bytes each kilowatt count equal to 0 25 kWh hours delivered e For example 37581 9395 25 kWh 198 Reads the generator software revision level 0 3 ASCII report The controller board returns three ASCII characters software characters level n One letter followed by a two digit number 4 26 Communication Interfaces 5705072 F HFV 8000 Generator Table 4 7 Host port commands Continued Command Description Numberof Number of Host Data Response Bytes Data Bytes 199 Requests analog voltages from diagnostic 1 2 report analog to digital converter Send one data diagnosis byte as follows status e 0 Forward power 1 Reflected power 2 Inverter power e 3 FastI e 4 PAED e 5 Bus sample e 6 10 Vref e 7 Ground e 10 inverter e 11 V inverter e 12 Dissipation e 13 15 V supply e 14 10 V reference e 15 30 V supply e 16 15 V supply 17 User set point analog The controller board returns two bytes representing the requested voltage value 200 Reads the logic software checksum 0 2 report software checksum 201 Reads the software configuration ID string 0 32 byte report The controller board returns a 32 byte ASCII ASCII string software string representing the initial seven digits of configuration the AE
39. caled 2 Wide bus voltage test 3 Water valve is off gt 4 In diagnostic mode 5 RF request 6 Digital frequency display gt 7 Continuous load power tuning e Byte 12 represents process status information gt 0 At set point gt 1 Datalogging enabled gt 2 RF enabled without interlock gt 3 Heartbeat time out off e Bytes 13 16 represent the frequency value in Hertz gt For example 2000000 2 000 000 Hz e Bytes 17 and 18 represent the generator real gamma gt For example 250 0 250 decimal is implied e Bytes 19 and 20 represent the generator actual VSWR For example 1330 1 330 decimal is implied Number of Host Data Bytes cont d Number of Response Data Bytes cont d 5705072 F Communication Interfaces 4 29 Advanced Energy Table 4 7 Host port commands Continued Command 220 report customer service statistics Description Reads statistics on events in the unit The command from the Host should contain a one byte number indicating which statistic value is wanted The controller returns 4 bytes 4 9 represent a 32 bit number count of the event e 0 AC On total time e RFOn total time e 2 Total kilowatt hours delivered e 3 Joules e 4 The number of times the unit has been powered on 5 The number of times RF output has been enabled e 6 The number of DeviceNet communication faults that
40. cant byte first representing the minimum frequency value in Hertz e Range is 1765000 to 2165000 but the value cannot be greater than the value set by command 4 maximum frequency For example enter 2000000 2 000 000 Hz Set maximum frequency with command 4 Set starting frequency value with command 5 Read back with command 133 See also Frequency Limits on page 5 13 Number of Host Data Bytes 4 Number of Response Data Bytes 1 CSR only 4 maximum frequency Sets the maximum frequency Send four bytes least significant byte first representing the maximum frequency value in Hertz Note This command is invalid when the unit is in center frequency mode e Range is 1765000 to 2165000 but the value cannot be less than the value set by command 3 minimum frequency For example enter 2000000 2 000 000 Hz Set minimum frequency with command 3 Set starting frequency value with command 5 Read back with command 134 See also Frequency Limits on page 5 13 1 CSR only 4 18 Communication Interfaces 5705072 F HFV 8000 Generator Table 4 7 Host port commands Continued Command Description Numberof Number of Host Data Response Bytes Data Bytes 5 Sets the starting frequency Send four bytes 4 1 starting least significant byte first representing the CSR only frequency starting frequency value in Hertz Note
41. cifications Description Specification Input power specifications Line voltage 208 V 3 with ground no neutral connection required Line frequency 50 60 Hz 3 6 Product Specifications 5705072 F HFV 8000 Generator Table 3 3 Electrical specifications Continued Description Line current Specification 14 A at 176 VAC 12 A at 208 VAC Power 4 5 kW maximum at full rated RF output power Overcurrent protection 40 A circuit breaker RF output specifications Output power Scaled for 3000 W maximum with operator selectable set point RF is off when set point falls below 180mV RF is on when set point rises above 220 mV see Table 4 1 on page 4 2 Reflected power Reflected power is limited internally to 1000 W Regulation Across full frequency range into 50 Q load e Forward power regulation mode is 3 0 of set point or 24 W whichever is greater e Load power regulation mode is 44 090 of set point or 32 W whichever is greater e Display accuracy is 2 of set point regulated or 16 W whichever is greater Transient regulation 0 190 change for a 10 disturbance in the AC line voltage Frequency 1 765 to 2 165 MHz center or automatic selectable through the 9 pin Host port or front panel LCD and display mode switch see AE Bus Command Set on page 4 17 or Display Mode and the LCD Display Indicator on page 5 15 Response Time l
42. d A flashing load regulation indicator indicates that the generator has been set to Center Frequency mode see Center Frequency Mode on page 5 11 Timing Diagrams on page 3 2 and MODE 3 in Display Mode and the LCD Display Indicator on page 5 15 To set see Command 12 in Table 4 7 on page 4 18 Regulation Mode on page 5 11 Timing Diagrams on page 3 2 5705072 F i Advanced Energy Frequency limits The frequency limits parameter sets the range of frequencies over which the HFV unit will operate You can set a start frequency an upper frequency limit and a lower frequency limit See Table 4 7 commands 3 4 and 5 minimum frequency maximum frequency and starting frequency In center frequency mode all three frequencies are set to the center frequency In automatic tuning mode the HFV unit starts searching for a tune at the start frequency and sweeps up until a satisfactory tuning is found or until the upper frequency limit is reached If a tune is not found this pattern is repeated Frequency rate of change The frequency rate of change parameter defines how quickly the generator moves through the steps during both the scanning and the tuning phase in milliseconds For example if you set this value to 5 the generator will make tuning adjustments no more than every 5 ms See Table 4 7 command 11 frequency rate of change L LCD Liquid crystal display The actual display on the f
43. determination with regard thereto shall be final The AE Warranty Statement may be superseded by a service agreement entered into between AE and the buyer 5705072 F Troubleshooting and Global Customer Support 6 11 Advanced Energy 6 12 Troubleshooting and Global Customer Support 5705072 F HFV 8000 Generator Glossary A Automatic Tune mode This mode is the common mode of use that allows the operator to determine the output frequency range See also Automatic Tuning Mode on page 5 12 To set the output frequency range using the Host port see commands 3 4 and 5 in Table 4 7 on page 4 18 C Center Frequency mode Center frequency mode is typically used during chamber load match tuning and calibration of system power A flashing load regulation indicator means that the generator has been set to Center Frequency mode see Timing Diagrams on page 3 2 and MODE 3 in Display Mode and the LCD Display Indicator on page 5 15 For additional information see Monitoring the Generator on page 5 16 and Center Frequency Mode on page 5 11 D DDS Direct digital synthesis F Forward power regulation The HFV generator provides forward power and load delivered power regulation modes as measured at the RF output The load regulation indicator on the front panel illuminates whenever load power regulation mode is selected An unlit indicator indicates that forward power regulation mode is selecte
44. e KK KK KK KK KK KK KK KK 4 13 AE Bus Data Bytes kk kk kk kk kK KK KK KK KK KK KK a a kk kk a kk k 4 13 AE Bus Checksum Byte kK kK kK KK KK KK KK KK eee 4 13 Creating an Ideal Communications Transaction 4 14 TO Host Transmits Message Packet a 4 14 T1 Unit Verifies Host Transmission Packet 4 14 T2 Unit Transmits Response to Host aa 4 15 T3 Host Acknowledges Unit Response a 4 15 AE Bus Communications Transaction Example 4 16 AE Bus Commands 3s a ca a aka ad A ka haba Bah b a aii TEN 4 16 AE Bus Command Status Response CSR Codes 4 16 AE Bus Command Set kk kK KK KK KK KK KK KK KK KK KK KK KAG 4 17 Chapter 5 Installation Setup and Operation Preparing to Install the HFV generator kk kk kk KK KK K K K KR eee 5 1 Spacing Requirements k kk kK KK KK KK KK KK KK KK KK KK KK KK KK KA 5 1 Installation Requirements kk kk kk kK KK KK KK ene eee 5 1 Unpacking AA 5 2 Installing the HFV generator 4 paka kk kk kk kK KK KK K K K tl be eee KIR K K ENNA 5 2 Front Panel Drawing kk kk kk kk KK kK KK KK KK KK KK DES sew NAKS 5 3 Rear Panel Drawing ca sma si sw sa kk kik u ned l k Woke 4 4 Ka eee a l 5 4 Electromagnetic Field EMF Shielding Requirements 5 5 GIOUNCING 5a AA eters eet PAD eee aes See eee hee ee
45. e NAG e d ab k Wa al an 4 9 Host port settings maana KNA kk kk kk kK KK KK KK KK KK KK KA KK KK KK KK KK KK KK KK KK KK ke 4 10 Baud rate for Host port kk kk kk kk kK kk KK KK NGA AD KK KI KK KK a kk kk a a kk kk kk ka 4 10 Transmission parameters kk KK KK KK KK KK KK KK KK KK KK KK KK KK KK KK e 4 11 Command Status Response CSR codes AWK kK KK KK KK KK KK eee 4 16 POS IPON commands 22 sa NAN a t X y bee DEAN 4002 NANAIG A hese Rte one 4 18 leecher AA AA HH pp 5 16 Global Customer Support locations kk kK KK KK KK KK KK KK KK KK KK KK KK KK 6 8 5705072 F ix Advanced Energy x 5705072 F HFV 8000 Generator List of Figures nize qe ge N gg HH H H MaeByBODBDODBDBDBBxibia kbygoououn 1 7 HFV generator block diagram kk kk kk KK KK KK KK KK KI KIR KK KK KIR KK KI KK K 2 2 Typical frequency mode toggle timing diagram 000 RR RR RR KK KS 3 3 Typical mode polling timing diagram kk kk kK KK KK KK KK ee 3 4 Mounting dimensions shown without optional water solenoid 3 6 Generator User port connector kK KK KK KK KK KK KK KK KK KK KK KK KK k 4 1 Reflected power WW kk kk kk kk kk kk KK KK KK KK KK kk kk ka kk kk a kk kk ka kk kk kk 4 6 Forward load power output 2x Kaawa kk kk kK KK KK KK KK KK KK KK KK KK kk kK kk kK kK kk 4 6 RF power enable 24 paaa aka kk kk kk kk kK KK KK KK KK KK KK kk kk BA kk
46. e button on the front panel to cycle through the display modes and monitor the reflected power reading If the reflected power reading is close to 1000 W the troubleshooting steps are the same as those outlined in At Set Point Indicator Off on page 6 5 Note The reflected power is limited by the HFV generator to 1000 W internally It is most likely that your HFV generator is functioning properly and is reacting to an external condition 2 If the reflected power reading is much less than 1000 W see Running Internal Diagnostics on page 5 17 5705072 F Troubleshooting and Global Customer Support 6 7 Advanced Energy There could be an internal failure in the power or measurement section of the HFV generator The Internal Diagnostics is a self test that will verify the integrity of these sections of the supply AE WORLD WIDE WEB SITE For additional product information and troubleshooting procedures consult Advanced Energy s World Wide Web site http www advanced energy com AE GLOBAL CUSTOMER SUPPORT Please contact one of the following offices if you have questions Table 6 1 Global Customer Support locations Office AE World Headquarters 1625 Sharp Point Drive Fort Collins CO 80525 USA Note For returns and repairs please call Global Customer Support to get the correct shipping address Contact Phone 24 hrs day 7 days week 800 446 9167 or 970 221 0108 Fax M F 7 00 am 5 30
47. e ese 5 5 Connecting Cooling Water kk KK KK KK KK ee 5 5 Connecting I O and Auxiliary Connectors 000 RR RR eee 5 7 Connecting Output Power 0 c KK KK KK tee 5 7 Connecting Input Power c0 620 8250 KK KK KK KK KK KK KK KK KK eee ees 5 8 First Time Operation 0 0000 kK KK KK KK KK KK KK KK KK KI KK KK KI KK KK KK KK 5 9 Before Engaging the Rear Circuit Breaker aaa 5 9 Before Enabling the Output kk KK KK KK KK KK AA KK KK KK KK KK KK 5 9 Enabling the Output kk kk kk KK KK KK KI KK KK KK KK eee 5 10 Meeting Minimum Power Threshold KK KK KK RR RR KK KK 5 11 Normal Operation XX kk kk kk kk KK KK KK KK KK IK OES eR OE HE SERRE SRE Ow ES 5 11 Regulation MODE a eons cee PRA h na b h Wela l EE ees 5 11 Center Frequency Mode i kk kk kk kk kK KK kK KK KK KK KK KK KK eee eee 5 11 Selecting Center Frequency Mode WWW KK KK KK KK KK KK 5 12 Automatic Tuning Mode 5 kapa kk kk kK KK KK KK KI KK KK KK KK KK KK KK IK KH 5 12 Selecting Automatic Tuning Mode KK KK KK KK 5 12 Adjusting Tuning Parameters kk kk KK KK KK KIR KK KK KK KK IK 5 13 Display Mode and the LCD Display Indicator 5 15 Monitoring the Generator kK kK KK KK KK KK KK KK KK KK K KK KK KK 5 16 Running Internal Diagnostics aasa kk kk kK KK KK ee 5 17 vi 5705072 F HFV 8000 Generator Chapter 6 Troubleshooting and Global Cu
48. e operation of HFV generator power voltage conversion conversions 3 DC power conversion The DC power conversion module converts AC line power to regulated DC power 4 RF power conversion The RF power conversion module converts DC power to regulated RF power 5 Water solenoid The optional water solenoid provides water flow control If optional your generator has this option the valve controlling water flow opens during RF power delivery and closes 30 minutes after the last RF off command 2 2 Product Overview and Theory 5705072 F HFV 8000 Generator Chapter 3 Product Specifications FUNCTIONAL SPECIFICATIONS Table 3 1 describes the functional specifications of the HFV generator Table 3 1 Functional specifications Description Specification Output regulation modes The HFV generator provides forward power and load delivered power regulation modes as measured at the RF output To set see Command 12 in Table 4 7 on page 4 18 e Regulation Mode on page 5 11 e Timing Diagrams on page 3 2 Interface configurations The HFV generator has a 15 pin analog Generator User port for generator control A 9 pin serial Host port RS 232 RS 422 and RS 485 compatible is available for pre selecting the frequency or frequency tuning algorithm You can access the 9 pin Host port through a rear panel access cover see Host Connector and Pin Descriptions on page 4 8 and Figure 5 2
49. ement is below the tuning goal value the generator does not adjust the output frequency See Table 4 7 command 14 tuning goal Note This option of generator does not have the continuous tuning in load power regulation enabled For power regulation mode the generator will tune until a minimum tuning parameter is found It then operates at that output frequency until the RF enable command is turned off then back on through the Generator User port on the HFV unit V Virtual Front Panel VFP software To order VFP contact AE Worldwide Customer Service see AE Global Customer Support on page 6 8 W Water solenoid The optional water solenoid provides water flow control If your generator has this option the valve controlling water flow opens during RF power delivery and closes 30 minutes after the last RF off command To order the optional solenoid contact AE Worldwide Customer Service see AE Global Customer Support on page 6 8 5705072 F iii Advanced Energy iv 5705072 F HFV 8000 Generator A ACK see acknowledgement acknowledgement 4 15 AE Bus 4 8 protocol 4 11 AE World Wide Web site 6 8 algorithm tuning parameters defined 5 13 analog signals 4 1 automatic tuning 5 12 delta limit 4 20 5 14 frequency limits 4 18 4 19 5 13 frequency rate of change 4 19 5 13 parameters defined 5 13 scan frequency delta 4 20 5 14 scan threshold 4 20 5 13 5 14 scanning phase 5 13 tuning gain 4 20 5
50. en load impedance Both center frequency and automatic tuning modes support operation into a fixed impedance matching network which simplifies system complexity increases reliability and improves process to process repeatability Automatic tuning mode continuously minimizes the mismatch to the generator This mode is only available while in forward power regulation mode In load power regulation an initial frequency sweep is performed to determine the frequency that yields the minimum reflected power For operation instructions see First Time Operation on page 5 9 and Normal Operation on page 5 11 You can control the HFV generator through a 15 pin custom analog Generator User port see Generator User Port 15 Pin on page 4 1 You can also control the frequency and frequency tuning algorithm through the generator s serial Host port which is RS 232 RS 422 and RS 485 compatible see Serial I O Host Port RS 232 With AE Bus on page 4 8 In addition Advanced Energy has Virtual Front Panel VFP software available for purchase With VFP software you can control most generator functions and monitor the HFV generator using a personal computer To order VFP software contact your AE sales representative for contact information see Table 6 1 on page 6 8 The front panel features a liquid crystal display LCD mode selector and five status indicators The HFV generator also has an internal diagnostics program to help
51. es radio frequency interference Connecting Cooling Water This generator is water cooled Do not operate the unit until water is connected and the cooling requirements are met AN CAUTION Water connections must be made in accordance with applicable requirements AN CAUTION If you connect the cooling water on multiple generators in series ensure the input water temperature to all generators is less than the maximum input water temperature AN CAUTION The overtemperature fault protects only in the event of a complete loss of coolant 5705072 F Installation Setup and Operation 5 5 Advanced Energy To connect the cooling water complete the following steps 1 Comnect the input and output water connections and tighten securely 2 If you do not have an optional water solenoid install the water shield If your generator has the cooling water solenoid complete the following steps a Remove the water shield b Insert the solenoid into the fitting on the generator until the front ferrule seats in the fitting Make sure the solenoid is in the vertical position c Tighten the nut by hand Rotate the nut to the original position with a wrench an increase in resistance is encountered at the original position d Finish tightening with an addition 1 4 turn e Plug in solenoid connector Note If the connector type male or female will not plug into the solenoid connector use the adapter cable shipped w
52. es hysteresis so the generator has two thresholds If an RF on command is given the set point level must be above the output on threshold for the HFV generator to deliver power The HFV generator will continue to deliver power until the set point level falls below the output off threshold or until the RF on command is disabled see command Table 4 7 on page 4 18 At Set Point Indicator Off When the output is enabled RF On indicator lit and the At Set Point indicator is off the power output is not meeting the set point or requested power level This can be caused by an internal or external load fault condition Note The output must be enabled RF On indicator must be lit before the At Set Point indicator will illuminate If the RF On indicator is off see RF On Indicator Off on page 6 5 5705072 F Troubleshooting and Global Customer Support 6 5 Advanced Energy INTERNAL FAULT CHECK To check for internal faults see Running Internal Diagnostics on page 5 17 If the HFV generator passes this test then proceed to the following section otherwise contact AE Global Customer Support see AE Global Customer Support on page 6 8 EXTERNAL LOAD CHECKS OPEN SHORT RF OUTPUT PATH Use extreme caution as this section involves troubleshooting the output of the HFV generator AN WARNING Use suitable precautions this area contains high voltages that could cause serious injury or death There are fo
53. eter A D or Exc G 0 to 10 V 0 to Full I 9 NAW Rated Power 6 kerd I Ll V gt I I I Figure 4 3 Forward load power output 4 6 Communication Interfaces 5705072 F HFV 8000 Generator N t5V User Control I O I HFV User I O I i 15 V External Contact i RF Power Enable NAN e I 1kQ I VW I 1kQ 1000 pF TT I l I 0 Figure 4 4 RF power enable User Control I O HFV User I O User Setpoint 0 to 10 V 0 to 8000 W Power Setpoint 1623 2kQ NAN 1009 V 0 Figure 4 5 Forward load power set point 1849 QO 10K bd ____ 1000 pF 4759 RF Status 1389 5705072 F Communication Interfaces 4 7 Advanced Energy Figure 4 6 RF power on status User Control I O HFV User I O 415V 30 V TYA External Contact Interlock I I I I I I I I I 7 I I ve SF Li 15 Front Panel Rear Output Standby Switch Cover Switch 1626 Ed a Figure 4 7 Interlock loop SERIAL I O HOST PORT RS 232 WITH AE BUS The HFV generator provides a serial communications interface through the AE Bus Host port The Host port enables you to modify the default settings of the complex tuning algorithm for detailed process control and enhancement For a complete list of avai
54. evice ID network address and communications baud rate To access the DIP switch 1 Use a screwdriver to remove the two screws from the rear panel access cover see Figure 5 2 on page 5 4 2 Remove the rear panel access cover The Host port connector and an 8 position DIP switch are directly behind the cover 5705072 F Communication Interfaces 4 9 Advanced Energy Up to 31 device addresses are available address 0 is reserved for broadcast commands A switch in the OPEN or OFF position represents a binary 1 for address selection purposes Table 4 3 lists the switch designations and Table 4 4 lists the baud rate selections Table 4 3 Host port settings Switch Switch Switch Switch Switch Switch Switch Switch 1 2 3 4 5 6 7 8 A4 A3 A2 A1 A0 BR1 BRO Host Host Baud Baud Open for RS Port Port Rate Rate 232 Address TO U Address Selection Selection MSB LSB MSB LSB Closed for RS 485 422N0te I Note I Requires internal modification to the unit the safety cover see AE Global Customer Support on page 6 8 Contact Global Customer Support before removing Use A4 to A0 straight binary representation to select Host port addresses 1 to 31 Use BR1 and BRO to define baud rate selection see also Table 4 4 Table 4 4 Baud rate for Host port BR1 BRO RS 232 switch 8 RS 485 422 switch 8 open Baud Rate closed Baud RateNete Closed Closed 1
55. from AE Global Customer Support and that are found to be functional will not be covered under the warranty see warranty statement below That is you will have to pay a retest and calibration fee and all shipping charges Warranty Statement The seller makes no express or implied warranty that the goods are merchantable or fit for any particular purpose except as specifically stated in printed AE specifications The sole responsibility of the Seller shall be that it will 6 10 Troubleshooting and Global Customer Support 5705072 F HFV 8000 Generator manufacture the goods in accordance with its published specifications and that the goods will be free from defects in material and workmanship The seller s liability for breach of an expressed warranty shall exist only if the goods are installed started in operation and tested in conformity with the seller s published instructions The seller expressly excludes any warranty whatsoever concerning goods that have been subject to misuse negligence or accident or that have been altered or repaired by anyone other than the seller or the seller s duly authorized agent This warranty is expressly made in lieu of any and all other warranties express or implied unless otherwise agreed to in writing The warranty period is 12 months after the date the goods are shipped from AE In all cases the seller has sole responsibility for determining the cause and nature of the failure and the seller s
56. ge gt 1 The value is out of nominal operating parameters e Bytes 44 and 45 The 15 V supply value at the time of the test e Byte 46 User set point analog test 0 The value is in range gt 1 The value is out of nominal operating parameters Bytes 47 and 48 The User set point analog value at the time of the test 250 Reports the unit serial number The controller 0 4 report serial returns 4 bytes representing the serial number number 5705072 F Communication Interfaces 4 33 Advanced Energy Table 4 7 Host port commands Continued Command Description Numberof Number of Host Data Response Bytes Data Bytes 254 Reads calculated impedance The controller 0 9 report board returns nine bytes calculated mn impedance e Bytes 1 to 4 Resistive impedance e Bytes 5 to 8 Reactive impedance e Byte 9 Phase angle in degrees 255 Reads a data packet from the log buffer Send 2 4 reportlogged two bytes least significant byte first data representing the data packet number Accepts a value of 0 to 3999 The controller board returns four data bytes for the data packet requested e Bytes 1 and 2 report forward power e Bytes 3 and 4 report reflected power Command 127 toggles data logging on and off 4 34 Communication Interfaces 5705072 F HFV 8000 Generator Chapter 5 Installation Setup and Operation PREPARING TO INSTALL THE HFV GENERATOR
57. his section describes the User port connector the minimal User port connections required to operate the unit User port cabling requirements and detailed information about the User port signals The Generator User port is a 15 pin shielded female subminiature D connector see Figure 4 1 Pin 8 Pin 15 Pin 1 Pin 9 OOO000000 POOOOO0Q 1061 Figure 4 1 Generator User port connector User Port Interface Cabling Requirements Connect the HFV generator s User port to the system controller with a shielded 15 wire I O cable Shielded twisted pair wiring may be used but is not mandatory Minimize signal losses by keeping the cable as short as possible The maximum recommended cable length between the HFV generator and the controller is 10 meters 33 feet Minimize interference from adjacent electrical equipment by terminating the EMI shield in the cable to the metal shells of the cable s connectors Additionally you must tie the chassis of the HFV generator to a local earth ground through an adequately sized copper grounding strap Note Grounding the User port at the HFV generator reduces noise interference To avoid ground loop problems you should typically ground only one end of the User port cable 5705072 F Communication Interfaces 4 1 Advanced Energy Generator User Port Pin Descriptions Table 4 1 Generator User port pin descriptions Table 4 1 describes the connector pins for the Generator User p
58. hysical specifications 1 5 38 1 mm e N 20 25 514 35 mm 6 6 17 431 8 mm p 19 482 6 mm O 5 21 132 34 mm O O 1627 5705072 F Product Specifications 3 5 Advanced Energy Figure 3 3 Mounting dimensions shown without optional water solenoid Table 3 2 Physical specifications Description Specification Size 13 3 cm H x 43 2 cm W x 51 4 cm D 5 25 H x 17 0 W x 20 25 D Allow 10 16 cm 4 07 additional depth for line cord service loop right hand side of rear panel Allow 3 81 cm 1 50 additional depth for the RF output cover left hand side of rear panel Allow 11 94 cm 4 7 additional depth for the optional water solenoid See also Figure 3 3 on page 3 6 Weight 34 kg 75 Ib maximum Connector cable specifications RF output SQSTM female connector Note RF output cable not provided RG 393 or equivalent recommended AC input power 4 wire cord 10 mm 8 AWG 60 cm 2 long the ground wire is an additional 55 8 cm 22 longer Fach conductor has 10 ring lugs installed Generator User port 15 pin shielded female subminiature D Host port 9 pin shielded female subminiature D Coolant 3 8 stainless steel female NPT ELECTRICAL SPECIFICATIONS Table 3 3 describes the electrical specifications for the HFV generator Table 3 3 Electrical spe
59. ical Support e technical support aei com 5705072 F Advanced Energy iv 5705072 F HFV 8000 Generator Table of Contents Chapter 1 Safety and Product Compliance Guidelines Important Safety Information kk kk kk kK KK KK KK KK KK K KK eke ewes 1 1 Interpreting the Manual Ak kk kk kK kK KK KK KK K KK KK KK MERU KI KIR K K K KK KK 1 1 Type Conventions EL kk KK KK KK KK KK KK KK KK KK KK KK kk kK kk 1 1 Danger Warning and Caution Boxes kak kK KK KK KK KK KK KK KK 1 2 Safety Guidelines 6 225 a kk kk kk KK KK KK KK KK KK KK KK KK KK KK KK KK KK eS 1 2 Rules for Safe Installation and Operation KK RR KK KK 1 2 Interpreting Product Labels kk KK KK KK KK KK K K ee 1 3 Product Comp lianer rn x z add ab sk AA AA 1 4 Product Certification A kk kk kK KK KK KG KK KK dees KK KK KK nG 1 4 Safety and Compliance Directives and Standards 1 4 Electromagnetic Compatibility EMC Directives and Standards 1 5 Safety Directives and standards 00 0 cece eee 1 5 Industry Guidelines kk kk kK KK KK KK KK KK KK ees 1 5 Conditions of Use kk kk kk kK kK KK KK KK KK KK KK KK KK KK KK KK KK KK KK k 1 6 lrilt rloc KS 5 3 KGG NAA KENT Ewe KE w BHE E A A AN DE ROEN RER oN 1 6 Chapter 2 Product Overview and Theory General Description snena kk kk KK kK KK KK KK KK KK KK KI KK KK KK KK KK KK KK kk 2
60. icator flashes Note The load regulation indicator will begin to flash indicating center frequency mode See also Display Mode and the LCD Display Indicator on page 5 15 To verify the operating frequency while in center frequency mode select MODE 1 on the front panel LCD display see also Display Mode and the LCD Display Indicator on page 5 15 Note Cycling AC power circuit breaker to the generator will cause the generator to automatically return to automatic tuning mode You will need to repeat the steps in Selecting Center Frequency Mode on page 5 12 to return to center frequency mode after cycling the power Automatic Tuning Mode Automatic tuning mode continually adjusts the frequency to minimize the mismatch to the generator This mode is particularly useful when you expect large variations in operating impedance SELECTING AUTOMATIC TUNING MODE To select automatic tuning mode 1 Press the Display Mode button on the front panel repeatedly until the display reads Top line Press and Hold Bottom line Center Auto Tune 2 Press and hold the Display Mode button for at least five seconds until the Load Regulation indicator does not flash Note When the Load Regulation indicator is not flashing the generator is in automatic tuning mode See also Display Mode and the LCD Display Indicator on page 5 15 5 12 Installation Setup and Operation 5705072 F HFV 8000 Generator
61. ing any other connection connect the auxiliary Protective Earth ground conductor on the rear panel Use only a shielded power cable on the output power connector Install and operate this device only in a pollution degree 2 or better environment which means an indoor location such as a computer room office or factory floor where only nonconductive pollution occurs during operation Occasionally a temporary conductivity caused by condensation occurs when the device is not operating e Nonstandard connectors for input output power must be inaccessible to the user Use only shielded cables on control interface and communication connectors INTERLOCKS A WARNING Advanced Energy Industries Inc products may include interlocks When interlocks exist they are not intended for the protection of the operator but are intended to prevent damage to equipment or property Hazardous areas of Advanced Energy products are not operator accessible the use of a tool is required Table 1 4 lists the hardware interlocks associated with the HFV generator To recover from an interlock fault see Interlock OK Indicator Off on page 6 3 Note For more information on satisfying the minimum operating requirements for the HFV generator see Satisfying Minimal User Port Requirements for Operation on page 4 1 Table 1 4 Hardware interlocks Interlock Mechanism Detection Method Equipment Condition While Interlock is Not Sati
62. ith command 153 See also Tuning goal on page 5 14 Number of Host Data Bytes 2 Number of Response Data Bytes 1 CSR only 15 tuning gain Specifies the gain used in the tuning algorithm Send two bytes least significant byte first representing the tuning gain Accepts a value of 1 to 1000 Read back with command 154 See also Tuning gain on page 5 14 1 CSR only 16 tuning delta limits Specifies the maximum frequency delta for the tuning algorithm Send four bytes least significant byte first representing the tuning delta limit Accepts a value of 1 to 100000 Read back with command 155 See also Tuning delta limit Hz on page 5 14 1 CSR only 19 scan delta Specifies the frequency step size for the scan algorithm Send four bytes least significant byte first representing the scan delta in Hertz Accepts a value of 1 to 10000 1 to 10000 Hz Read back with command 156 See also Scan delta frequency Hz on page 5 14 1 CSR only 20 scan threshold Specifies the threshold at which the scan algorithm completes Send two bytes least significant byte first representing the scan threshold Accepts a value of 1 to 8000 Read back with command 157 See also Scan threshold on page 5 14 1 CSR only 4 20 Communication Interfaces 5705072 F HFV 8000 Generator Table 4 7 Host port commands Contin
63. ith the generator f Install the protection shield around the solenoid 3 Turn on the water and ensure that there are no leaks 4 Ensure the flow rate and temperature are within the minimum specifications required to operate the HFV generator see Functional Specifications on page 3 1 and Environmental Specifications on page 3 8 Note Keep the water cooling system running as long as the rear circuit breaker is on to help maximize the cooling of the auxilliary supply which is also water cooled AN WARNING If your generator does not include the water solenoid be sure the water shield is installed 5 6 Installation Setup and Operation 5705072 F HFV 8000 Generator Connecting I O and Auxiliary Connectors AN WARNING RISK OF DEATH OR BODILY INJURY Disconnect and lockout tagout all sources of input power before working on this unit or anything connected to it AN WARNING Do not connect any power to this unit without first connecting cooling water and ensuring that there are no leaks Connect and secure all interface connectors as well as any auxiliary connectors See Interconnect Schematics on page 4 6 for interface circuitry electrical diagrams Connecting Output Power AN DANGER Remove and lockout tagout the input power before working on or around the output terminals Failure to do so could result in death or bodily injury Complete the following steps to connect the output p
64. kk kk kk kk kk eS 4 7 Forward load power set point kk kk kK kK kK KK KK KK KK KK KK KK KK KK KK KK KK KK kk 4 7 RF power on status 2502 5 Ak kk kk kK KK kK kK KK KK KI KIR KK KI KK KK KK KK KK KK KK KK KK kK kK ANG 4 8 Interlock loop 23 25 AA DAA n Av a aka Sees sk AW A Aw NGA 2 A 0 THEA Aha ban 4 8 Serial AE Bus Host port connector kK KK KK KK KK KK KK KK KK KK KK KK 4 9 Graphic representation of a message packet KK KK KK KK KK RR KK KK 4 12 AE Bus communications transaction kk kK KK KK KI KK KK KI KI KIR KK KI KK KK 4 14 Communications transaction example 0000 KK KK KRI KK KK KK 4 16 AAP 5 3 Rear view shown without optional water solenoid aaa 5 4 5705072 F Xi Advanced Energy Xii 5705072 F HFV 8000 Generator Chapter 1 Safety and Product Compliance Guidelines IMPORTANT SAFETY INFORMATION To ensure safe installation and operation of the Advanced Energy HFV generator read and understand this manual before attempting to install and operate this unit At a minimum read and follow the safety instructions and practices documented under Safety Guidelines on page 1 2 INTERPRETING THE MANUAL The following sections explain the document type conventions and the danger warning and caution boxes that provide information about the specific levels of hazard seriousness Type Conventions Please note the following type convention
65. lable functions see AE Bus Command Set on page 4 17 To obtain sample AE Bus host software please contact AE Global Customer Support see AE Global Customer Support on page 6 8 Note The unit is configured at the factory to use RS 232 but may be changed to RS 422 or RS 485 by contacting AE Technical Support see AE Global Customer Support on page 6 8 Host Connector and Pin Descriptions The serial AE Bus Host port is a 9 pin female shielded subminiature D connector To access the Host port 1 Use a screwdriver to remove the two screws from the rear panel access cover see Figure 5 2 on page 5 4 2 Remove the rear panel access cover The Host port connector and an 8 position DIP switch are directly behind the cover 4 8 Communication Interfaces 5705072 F HFV 8000 Generator Figure 4 8 shows the serial Host port and Table 4 2 describes each pin Pin 5 Pin 6 1017 Figure 4 8 Serial AE Bus Host port connector Pin 1 Pin 9 Table 4 2 Host port connector Pin Name Description 1 RESERVED Reserved for future use 2 TXD RS 232 transmit data 3 RXD RS 232 receive data 4 RESERVED Reserved for future use 5 COM Data common 6 TR RS 485 O xmit rx data RS 422 J rx data 7 TR RS 485 4 xmit rx data RS 422 4 rx data 8 RESERVED Reserved for future use 9 RESERVED Reserved for future use Host Port Settings An 8 position DIP switch determines the d
66. lation and Operation Please note the following rules for safe installation and operation of the product Do not attempt to install or operate this equipment without proper training e Ensure that this unit is properly grounded Ensure that all cables are properly connected e Verify that input line voltage and current capacity are within specifications before turning on the power supplies Use proper electrostatic discharge ESD precautions Always be careful around this equipment 1 2 Safety and Product Compliance Guidelines 5705072 F HFV 8000 Generator Interpreting Product Labels The following labels could appear on your unit Hazardous voltage Short circuit protected High voltage Protective Earth ground Earth ground CE label Nonionizing radiation HAZARDOUS VOLTAGE Risk of death or bodily injury Disconnect all sources of input power before working on this unit or anything connected to it 3060414 3 l Q No A amp 1029 1069 oN N 1020 gt 1030 1332 5705072 F Safety and Product Compliance Guidelines Advanced Energy Hot surface Warning refer to manual NRTL C NRTL LR 106911 xx 1154 PRODUCT COMPLIANCE The following sections include information about unit compliance and certification including the conditions of use required to be in compliance with the standards and directives Product Certification Cert
67. llation Setup and Operation 5705072 F HFV 8000 Generator Front Panel Drawing Standby _ Stop o HFV 8000 O At Setpoint RF On Interlock OK Load Regulation Fe 3 a Figure 5 1 Front view 5705072 F Installation Setup and Operation 5 3 Advanced Energy Rear Panel Drawing ze E gt Rear access panel that houses 8 E the Host port connector and xt 3 an 8 pin DIP switch 83 o e lt o NG 3 Gi ga a o Ko 3 Water In g 5 d 5 amp a 5 a E i 3 i O O Figure 5 2 Rear view shown without optional water solenoid 5 4 Installation Setup and Operation 5705072 F HFV 8000 Generator Electromagnetic Field EMF Shielding Requirements In order to meet current EMF compliance regulations you must install the provided EMI suppression ferrite on the 15 pin shielded Generator User port cable see also Generator User Port 15 Pin on page 4 1 1 Install the ferrite on the cable 2 Attached it to the HFV generator Grounding AN WARNING Do not attempt to turn on power until the generator is grounded The HFV generator provides an RFI ground mounting hole for a 10 32 screw A suitable chassis ground connection made to this mounting hole prevents or minimiz
68. lt condition is present 5 16 Installation Setup and Operation 5705072 F HFV 8000 Generator Table 5 1 Indicators Continued Indicator Explanation At Set Point This green indicator illuminates whenever output power matches the requested power within specified accuracy spec If RF power is on an unlit indicator indicates that an internal power limit has been reached Fault This yellow indicator illuminates whenever An overtemperature condition exists The input line voltage is out of range e An RF On sequence error occurs Note RF power will not turn on if the RF enable signal is enabled before setting the interlock The sequence is to enable the interlock first then set RF enable When a fault conditions occurs the LCD displays the following Top line displays FAULT Bottom line displays a type of fault If this indicator is on see Fault Indicator On on page 6 2 RUNNING INTERNAL DIAGNOSTICS The Internal Diagnostics test is a 5 second open load test During the test the HFV generator takes a number of internal measurements to determine if the power conversion and output sections are operating properly and to ensure that the housekeeping or logic voltages are within tolerance The internal diagnostics test does not check the integrity of the rear panel control ports or related logic functions AN WARNING Use suitable precautions this area contai
69. messages a CANNOT RUN DIAGNOSTICS This means the test is not set up correctly Recheck the setup detailed above b DIAGNOSTICS IN PROGRESS If after the test the LCD displays a PASS the diagnostics routine did not find any internal problems b FAIL contact AE Global Customer Support see AE Global Customer Support on page 6 8 5 18 Installation Setup and Operation 5705072 F HFV 8000 Generator Chapter 6 Troubleshooting and Global Customer Support This chapter contains basic troubleshooting information as well as procedures for returning a unit for repair BEFORE CALLING AE GLOBAL CUSTOMER SUPPORT The following troubleshooting guide allows you to verify the integrity of your HEV generator AN WARNING RISK OF DEATH OR BODILY INJURY Disconnect and lockout tagout all sources of input power before working on this unit or anything connected to it Troubleshooting Guide The following questions may help solve troubleshooting problems 1 Is the front panel display LCD lit a If yes go to step 2 b If no see Front Panel Display LCD Not Lit on page 6 2 2 Is Advanced Energy Industries displayed on the front panel LCD a If yes see Advanced Energy Displayed on LCD on page 6 2 b Inno go to step 3 3 Is the Fault indicator off a If yes go to step 4 b If no see Fault Indicator On on page 6 2 4 Is the Interlock OK indicator on a If yes go to step 5
70. nd 40 4 22 Communication Interfaces 5705072 F HFV 8000 Generator Table 4 7 Host port commands Continued Command Description Numberof Number of Host Data Response Bytes Data Bytes 141 Reads the frequency rate of change The 0 2 report controller board returns two data bytes frequency representing the frequency rate of change in rate of seconds change For example 1000 1 000 s decimal is implied Set with command 11 142 Reads the generator real gamma The 0 2 report real controller board returns two data bytes gamma NE For example 250 0 250 decimal is implied 144 Reads the generator actual VSWR The 0 2 report VSWR controller board returns two data bytes For example 1330 1 330 decimal is implied 147 Reads the actual frequency value The 0 4 report actual controller board returns four data bytes frequency representing the actual frequency value in out Hertz For example 2000000 2 000 000 Hz 153 Reads the goal that the tuning algorithm is 0 2 reporttuning attempting to achieve The controller board goal returns two data bytes For example 8000 Set with command 14 See also Tuning goal on page 5 14 154 Reads the gain used in the tuning algorithm 0 2 reporttuning The controller board returns two bytes gain For example 8000 Set with command 15 See also Tuning gain on page 5 14 5705072 F Communication Interfaces 4 23 Advanced E
71. nergy Table 4 7 Host port commands Continued Command Description Numberof Number of Host Data Response Bytes Data Bytes 155 Reads the maximum frequency delta for the 0 4 report tuning tuning algorithm The controller board returns delta limit two data bytes For example 100000 Set with command 16 See also Tuning delta limit Hz on page 5 14 156 Reads the frequency step size for the scan 0 4 report delta algorithm The controller board returns four data bytes representing the scan delta in Hertz For example 10000 10000 Hz Set with command 19 See also Scan delta frequency Hz on page 5 14 157 Requests the threshold at which the scan 0 2 report scan algorithm completes The controller board threshold returns two data bytes For example 8000 Set with command 20 See also Scan threshold on page 5 14 160 Reports configuration file flags read with 0 4 report VFP The controller board returns four data configuration bytes file flags 4 24 Communication Interfaces 5705072 F HFV 8000 Generator Table 4 7 Host port commands Continued Command Description Numberof Number of Host Data Response Bytes Data Bytes 162 Reads the process status The controller board 0 4 report status returns four data bytes 1st status byte e 0 Power failure e 1 Unassigned interrupt has occurred 2 A D conversion failure e 3 Output on
72. ns can cause personal injury and or property damage If the equipment is used in a manner not specified by the manufacturer the protection provided by the equipment may be impaired All personnel who work with or who are exposed to this equipment must take precautions to protect themselves against serious or possibly fatal bodily injury Advanced Energy Industries Inc AE provides information on its products and associated hazards but it assumes no responsibility for the after sale operation of the equipment or the safety practices of the owner or user This equipment produces or uses potentially lethal high voltage high current radio frequency RF energy NEVER DEFEAT INTERLOCKS OR GROUNDS ii 5705072 F HFV 8000 Generator TRADEMARKS ADVANCED Pisa registered trademark of Advanced Energy Industries Inc ENERGY Advanced Energy is a registered trademark of Advanced Energy Industries Inc AE is a registered trademark of Advanced Energy Industries Inc SQSTM is a trademark of Tru Connector Corporation Peabody MA CUSTOMER FEEDBACK Advanced Energy s technical writing staff has carefully developed this manual using research based document design principles However improvement is ongoing and the writing staff welcomes and appreciates customer feedback Please send any comments on the content organization or format of this user manual to e tech writing aei com To order a manual please contact Techn
73. ns high voltages that could cause serious injury or death You can run the test only after configuring the generator in a special setup Note Regular generator control is disabled when diagnostics are in progress An integrity report is visually indicated by the front panel LCD To run the diagnostics 5705072 F Installation Setup and Operation 5 17 Advanced Energy Remove the power to the generator by disengaging the circuit breaker Remove the RF output cable and cover see Figure 5 2 on page 5 4 Replace the RF output cover in the required 180 orientation Two microswitches on the rear panel will sense the proper position This provides safety from high voltages while the test is being performed Engage the circuit breaker 5 Ensure the RF Enable signal is disabled 10 Note You must not have RF enable set If the RF Enable is set prior to running diagnostics you will receive a CANNOT RUN DIAGNOSTICS notification on the front panel display Make sure the interlock is satisfied that is the front panel INTLK OK indicator must be lit If the indicator is off see Interlock OK Indicator Off on page 6 3 To initiate the test use the front panel Display Mode button to cycle through the display modes until the display reads Top line Press and Hold Bottom line Mode for Diag Press and hold the Display Mode button for a minimum of five seconds You will receive one of two
74. o facilitate direct communications between a host computer and the HEV generator The AE Bus message packet combines a set quantity of bits and bytes in such a way that groups of information can be sent over communications lines at one time Five types of information fields make up communications message packets see Figure 4 9 e Header address and the length of Data field Command Number the commands are listed in Table 4 7 on page 4 18 e Optional Length byte Data e Checksum 5705072 F Communication Interfaces 4 11 Advanced Energy Figure 4 9 shows the organization of these fields in the AE Bus message packet The subsequent paragraphs describe each field in detail Command Number Data 0 255 bytes 0 255 GHz Iy o z e sJ alae 0 7 6 5 4 3 2 t hd Header Optional Length Byte Checksum 5 bit address 3 bit length 1138 Figure 4 9 Graphic representation of a message packet AE BUS HEADER BYTE The first byte in each packet contains two pieces of information five bits contain the packet address and three bits contain the data byte count If the message packet originates with the host computer master the address specifies the packet destination to an HFV generator for example If the packet is going to the host the address specifie
75. ocated on the rear panel for this option To order the optional solenoid contact AE Global Customer Support see AE Global Customer Support on page 6 8 TIMING DIAGRAMS Operators can switch between center frequency mode and automatic tuning mode either manually or through the generator Generator User port see also Center Frequency Mode on page 5 11 and Automatic Tuning Mode on page 5 12 Center frequency mode indicated on the front panel by a blinking LOAD REG indicator limits the generator output frequency to 1 965 MHz and is typically used for system calibration Automatic tuning mode is the common mode of use that allows the operator to determine the output frequency range To set the output frequency range through the Host port see commands 3 4 and 5 in Table 4 7 on page 4 18 3 2 Product Specifications 5705072 F HFV 8000 Generator The following timing diagrams show the requirements for changing the frequency mode Figure 3 1 Frequency Mode Toggle and for confirming the status of the frequency mode Figure 3 2 Frequency Mode Polling nV int 100 mS 100 mS 100 mS gt _ lt lt gt _ lt 50 mS Wait le gt ble JV ed ter iV TA 500 mS Figure 3 1 Typical frequency mode toggle timing diagram e A RF ENABLE pins 4 and 9 transitions high with ANALOG SET POINT pin 5 inside the noise window e B The power su
76. ocess recently 4 Is your reflected power reading close to 1000 W the HFV generator s reflected power limit If you answered yes to any one of the previous questions and the HFV generator passed the Internal Diagnostics test the HFV generator is probably working properly and it may be reacting to an external load condition You may want to consult a process engineer or system manufacturer to troubleshoot chamber related issues No Output No Plasma If there is no output or plasma check the front panel RF On indicator 1 If the RF On indicator is off see the RF On Indicator Off on page 6 5 2 If the RF On indicator is on then follow the troubleshooting steps in At Set Point Indicator Off on page 6 5 High Reflected Power High reflected power is usually caused by a load mismatch Note The concept of reflected power is often misunderstood Most users believe the presence of reflected power is bad and that it should be minimized Check the regulation mode of the HFV generator The reflected power may seem higher than expected in Load Regulation because Load power is actually the difference between Forward and Reflected Load power Forward power Reflected power For more information see the literature section on our web site at www advanced energy com Look for the document titled Forward and Reflected Powers What do they really mean 1 To verify that your reflected power is high use the Display Mod
77. oint signal must be greater than 220 mV for RF to be turned on or less than 180 mV for it to be turned off See Figure 4 5 on page 4 7 for an electrical diagram RETURN Common for pins 2 3 and 5 tied to chassis ground 5705072 F Communication Interfaces Advanced Energy Table 4 1 Generator User port pin descriptions Continued Signal Pin 7 Return Pin 8 Signal Name RF POWER ON STATUS Signal Type Output Description Pin 7 is supplied with 15 V through a 10 kQ resistor While RF power is present at the output an internal relay opens the contacts between pin 7 and pin 8 See Figure 4 6 on page 4 8 for an electrical diagram With pin 8 grounded externally pin 7 will be at 15 V when RF power is present and at O V when there is no RF power Note For RF to be present at the output the output must be enabled and the set point level must be above the minimum specification see Electrical specifications on page 3 6 RF POWER ON STATUS REFERENCE Output Floating pin that can be used as a reference for pin 7 while RF power is present at the output an internal relay opens the contacts between pin 7 and pin 8 4 4 Communication Interfaces 5705072 F HFV 8000 Generator Table 4 1 Generator User port pin descriptions Continued Signal Pin 9 Return Pin Signal Name RF POWER ENABLE RETU
78. on page 5 4 Host port control features The Host port controls the frequency and frequency tuning algorithm along with other control features see AE Bus Command Set on page 4 17 5705072 F Product Specifications 3 1 Advanced Energy Table 3 1 Functional specifications Continued Description RF output operating conditions Specification To achieve RF output ensure the following conditions are met External interlock loop closed less than 15 Qin series path RF output cover firmly attached Front panel Standby switch in the Standby up position No faults present Front Panel Fault indicator should be off Nochamber arcing present Set point signal gt 220 mV Generator User port RF Enable command present Cooling The HFV generator is water cooled to allow operation in a clean room environment The HFV generator will not reduce performance when the inlet water temperature is 15 C to 30 C 59 F to 86 F and the flow rate is 11 4 Ipm 3 gpm or greater All supplied water connections should be 9 53 mm 3 8 ID or larger water lines Keep the incoming and outgoing water lines as short as possible and the outlet back pressure minimized In addition you may purchase an optional water solenoid to control water flow A valve automatically opens during RF power delivery and closes 30 minutes after the last RF off command An electrical connector is l
79. ort interface Signal Return Signal Name Signal Pin Pin Type 2 6 REFLECTED Analog 0 V to 10V 0 to 1000 W POWER OUTPUT output See Figure 4 2 on page 4 6 for an electrical diagram 3 6 FORWARD LOAD Analog 0 V to 10V 0 W to 3000 W POWER OUTPUT output i Forward power is represented when forward power regulation is selected Load power is represented when load power regulation is selected To select regulation mode see Command 12 in Table 4 7 on Regulation Mode on e Timing Diagrams on See Figure 4 3 on page 4 6 for an electrical diagram 4 2 Communication Interfaces 5705072 F HFV 8000 Generator Table 4 1 Generator User port pin descriptions Continued Signal Pin 4 Return Pin 9 Signal Name RF POWER ENABLE Signal Type Input Description Enables RF output power with an external contact closure between pins 4 and 9 This pin is tied to 15 V through a 1 kQ resistor In order for the generator to deliver RF output power the conditions below must be met in the following order 1 Interlocks satisfied 2 RF Power enabled and Set point 5 220 mV 3 Generator not in fault mode See Table 5 1 on page 5 16 See Figure 4 4 on page 4 7 for an electrical diagram FORWARD LOAD POWER SET POINT Analog input 0 V to 10V 0 to 3000 W The set point circuitry uses hysteresis If RF on command pins 4 amp 9 is enabled the set p
80. oup 2 CISPR 11 EN 61000 6 2 Electromagnetic Compatibility generic immunity standard industrial SAFETY DIRECTIVES AND STANDARDS Table 1 2 Safety directives and standards Directive Description 73 23 EEC EC Council directive on the harmonization of the laws of the Member States relating to electrical equipment designed for use within certain voltage limits LVD Low Voltage Directive ANSI ISA Safety standard for electrical and electronic test measuring 82 02 01 controlling and related equipment general requirements harmonized standard to IEC publication 61010 1 CSA C22 2 Safety requirements for electrical equipment for measurement No 1010 1 control and laboratory use EN 50178 Electronic equipment for use in electrical power installations INDUSTRY GUIDELINES Table 1 3 Industry guidelines Guideline SEMI S2 0200 Description Environmental health and safety guidelines for semiconductor manufacturing equipment This device must be installed and used only in compliance with the standards listed in addition to VDE 0113 EN 60204 IEC 204 and applicable requirements 5705072 F Safety and Product Compliance Guidelines 1 5 Advanced Energy Conditions of Use To comply with the stated directives and standards you must meet the following conditions of use This device must be used in an overvoltage category II installation only Before mak
81. ower connector 1 Remove the two screws holding the output safety connector cover and remove the cover 2 Slide the connector cover on the power cable 3 Install the output cable on the output connector of the HFV generator 4 Replace the output safety connector cover on the generator and fasten with screws and star washers Note The screws and star washers must be securely installed to prevent excessive RF emissions and electrical shock 5705072 F Installation Setup and Operation 5 7 Advanced Energy Connecting Input Power AN DANGER Before making any input line power connection turn off and lockout tagout building circuit breakers supplying input power to the HFV generator Also ensure that the circuit breakers on the rear panel are in the OFF position AN WARNING This generator must be used in a pollution degree 2 or better environment AN WARNING This device must be used in an overvoltage category II installation only AN CAUTION Make input power connections and wire terminations in accordance with local safety requirements Check for proper power requirements at the source and then connect input power ensuring the following The 8 AWG yellow green wire must be connected to ground 5 8 Installation Setup and Operation 5705072 F HFV 8000 Generator FIRST TIME OPERATION Before proceeding be sure the setup of the HFV generator is complete see Installing the HFV generator
82. peatedly until the display reads Top line Press and Hold 6 4 Troubleshooting and Global Customer Support 5705072 F HFV 8000 Generator Bottom line Center Auto Tune 2 Press and hold the Display Mode button for at least five seconds until the Load Regulation indicator does not flash RF On Indicator Off When the front panel RF On indicator illuminates the output is enabled and the set point or requested power level is above the minimum required setting In order for the RF On indicator to be on the following conditions must be met 1 The front panel Fault indicator must be off If this indicator is on see Fault Indicator On on page 6 2 2 The front panel Interlock OK indicator must be on If this indicator is off see Interlock OK Indicator Off on page 6 3 3 In order for the HFV generator to deliver power the unit must receive an RF on command and the set point or requested output power level must be above a specified minimum see Table 3 3 on page 3 6 When these two conditions are met the RF On indicator should illuminate and the generator will deliver power Verify that there is an external contact closure between pins 4 and 9 to enable the RF output power See Table 4 1 on page 4 2 and Figure 4 4 on page 4 7 The output power set point minimum is a threshold that allows the generator to deliver power see Meeting Minimum Power Threshold on page 5 11 The set point circuitry us
83. pm MST 970 407 5981 Email technical support aei com We will respond to email by the next business day Note For customers outside the US please contact your local AE office AE Voorhees NJ Phone 800 275 6971 or Bldg 347 Yamabuki cho Shinjuku ku Tokyo Japan 856 627 6100 1007 Laurel Oak Road Voorhees NJ 08043 USA Fax 856 627 6159 AE GmbH Phone 49 711 77927 0 Raiffeisenstrasse 32 Fax 49 711 7778700 70794 Filderstadt Bonlanden Germany AE Japan KK Phone 81 3 32351511 TOWA Edogawabashi Fax 81 3 32353580 6 8 Troubleshooting and Global Customer Support 5705072 F HFV 8000 Generator Table 6 1 Global Customer Support locations Continued Office Contact AE Korea Ltd Phone 82 342 705 2100 Gongduk Building 4th floor Fax 82 342 705 2766 272 6 Seohyun Dong Bundang Gu Sungam Si Kyunggi 463 050 Korea AE United Kingdom Phone 44 1869 320022 Unit 5 Minton Place Fax 44 1869 325004 Market Court Victoria Road Bicester Oxon OX26 6QB UK AE Taiwan Ltd Phone 886 2 82215599 10F 6 No 110 Chung Shan Rd Fax 886 2 82215050 Sec 3 Chungho City Taipei Hsien Taiwan 235 AE China Phone 86 755 83867986 Rm 910 Anhui Building Fax 86 755 83867984 No 6007 Shennan Road Shenzhen China 518040 RETURNING UNITS FOR REPAIR Before returning any product for repair and or adjustment first follow all troubleshooting procedures If
84. pply waits 50 msec and then sets reflected power level to current frequency mode Auto Mode 10 V e C RF ENABLE pins 4 and 9 transitions low after 100 msec The system controller reads the reflected power signal to determine the frequency mode e D RF ENABLE pins 4 and 9 transitions high again after 200 msec The power supply toggles the frequency mode and reports the mode change by changing reflected power level to 5 V e E RF ENABLE pins 4 and 9 transitions to low 5705072 F Product Specifications 3 3 Advanced Energy Figure 3 2 e F The reflected power level holds at the new voltage until the original 500 msec period elapses 100 ms 50 mS Wait _ i lt NG 1827 500 ms Typical mode polling timing diagram e A RF ENABLE pins 4 and 9 transitions high with ANALOG SET POINT pin 5 inside the noise window e B The power supply waits 50 msec and then sets the reflected power level to the current frequency mode Center Freq Mode 5 V e C RF ENABLE pins 4 and 9 transitions low after 100 msec The system controller reads the reflected power signal to determine the frequency mode e D The reflected power level holds at the original voltage until the 500 msec period elapses 3 4 Product Specifications 5705072 F HFV 8000 Generator PHYSICAL SPECIFICATIONS Figure 3 3 illustrates the HFV generator s physical dimensions and Table 3 2 describes the p
85. quency Note This option of generator does not have the continuous tuning in load power regulation enabled For power regulation mode the generator will tune until a minimum tuning parameter is found It then operates at that output frequency until the RF enable command is turned off then back on through the Generator User port on the HFV unit See Table 4 7 command 14 tuning goal Tuning gain This parameter affects the size of the tuning steps the larger the number the greater the size of the tuning steps Note When setting the tuning gain be aware that if the gain is set too low the tuning function may react to noise in the signal and fail to correct the real direction of change See Table 4 7 command 15 tuning gain Tuning delta limit Hz The tuning delta limit sets the maximum amount of frequency change for each step during tuning Note When setting the tuning delta limit be aware that if the limit is set too low the tuning function may react to noise in the signal and fail to correct the real direction of change The lowest recommended tuning delta limit value is 5000 See Table 4 7 command 16 tuning delta limits Scan delta frequency Hz This parameter sets the maximum amount of frequency change for each step during scanning The typical value is 10 000 See Table 4 7 command 19 scan delta frequency Scan threshold The scan threshold sets a threshold below which the tuning phase begins
86. r active minimum off time is 50 ms Recipe is active change not allowed Joule set point has not been reached Bus fault active high or low Set point exceeds user limit TCC is active change not allowed Data sent is greater than user limit for P V or I Command not accepted there is no such command AE BUS COMMAND SET The HFV generator AE Bus serial communication interface has two types of commands Commands 1 through 127 request a change to the HFV generator such as turning output on or off or changing a setting in the unit The unit responds to these commands by sending a command status response CSR This single byte response indicates whether the unit has accepted or rejected the command and in the case of rejection the reason the unit could not respond to the command For more information on CSR codes see AE Bus Command Status Response CSR Codes on page 4 16 Command numbers 128 through 255 request information from the unit such as output on off status and unit settings The unit responds to these commands by sending the data requested 5705072 F Communication Interfaces 4 17 Advanced Energy Table 4 7 lists the Host commands Table 4 7 Host port commands Command 3 minimum frequency Description Sets the minimum frequency Note This command is invalid when the unit is in center frequency mode Send four bytes least signifi
87. re received undamaged For a warranty claim to be valid it must Be made within the applicable warranty period e Include the product serial number and a full description of the circumstances giving rise to the claim Have been assigned a return material authorization number see below by AE Global Customer Support All warranty work will be performed at an authorized AE service center see list of contacts at the beginning of this chapter You are responsible for obtaining authorization see details below to return any defective units prepaying the freight costs and ensuring that the units are returned to an authorized AE service center AE will return the repaired unit freight prepaid to you by second day air shipment or ground carrier for local returns repair parts and labor will be provided free of charge Whoever ships the unit either you or AF is responsible for properly packaging and adequately insuring the unit Authorized Returns Before returning any product for repair and or adjustment call AE Global Customer Support and discuss the problem with them Be prepared to give them the model number and serial number of the unit as well as the reason for the proposed return This consultation call will allow Global Customer Support to determine if the unit must actually be returned for the problem to be corrected Such technical consultation is always available at no charge Units that are returned without authorization
88. rifies that the message is intended for it and not for another unit on the network At this time the HFV generator also analyzes the checksum to verify that the message was received correctly 4 14 Communication Interfaces 5705072 F HFV 8000 Generator e If the address does not match the HFV generator does not respond to the host computer the HFV generator resets and resumes waiting for a message addressed to it If the address matches but the exclusive or XOR sum of the bytes in the packet including the checksum is not zero the HFV generator sends a negative acknowledgment NAK hexadecimal 15h to the host computer Ifthe address matches and the message is intact the HFV generator sends an acknowledgment ACK hexadecimal 06h to the host computer If the HFV generator receives a request for data or status information it gathers and sends the requested information Otherwise it evaluates the incoming command and sends a message packet that contains a one byte data value CSR code to the host see AE Bus Command Status Response CSR Codes on page 4 16 CSR code 0 is sent when the command has been accepted If the host receives a NAK 15h from the HFV generator the host either retransmits the packet or does whatever else it has been programmed to do in this situation If the host receives an ACK 06h it waits for the requested data or status information or it waits for the CSR code telling it whether or not the
89. ront panel S Scan delta frequency This parameter sets the maximum amount of frequency change for each step during scanning The typical value is 10 000 See Table 4 7 command 19 scan delta frequency Scan Threshold The scan threshold parameter sets a threshold below which the tuning phase begins If the scan threshold is set too high the generator will begin to tune too early and the tuning will not be optimal If the scan threshold is set too low the threshold may never be reached and automatic tuning will not take over See Table 4 7 command 20 scan threshold T TDS Total dissolved solids Tuning delta limit This parameter sets the maximum amount of frequency change for each step during tuning See Table 4 7 command 16 tuning delta limits Note When setting the tuning delta limit be aware that if the limit is set too low the tuning function may react to noise in the signal and fail to correct the real direction of change The lowest recommended tuning delta limit value is 5000 ii 5705072 F HFV 8000 Generator Tuning gain This parameter affects the size of the tuning steps the larger the number the greater the size of the tuning steps See Table 4 7 command 15 tuning gain Note When setting the tuning gain be aware that if the gain is set too low the tuning function may react to noise in the signal and fail to correct the real direction of change Tuning goal When the tuning parameter measur
90. s e Pin 2 and signal names REFLECTED POWER OUTPUT appear in capitalized italics Technical terms appear in italicized text when first introduced and many terms are defined in the Glossary Unit labels switches indicators and so forth generally appear in boldface letters as they are labeled on the unit Standby Commands 5 and command names starting frequency appear in boldface lowercase letters 5705072 F Safety and Product Compliance Guidelines 1 1 Advanced Energy Danger Warning and Caution Boxes or associated equipment Advanced Energy includes this symbol in Danger This symbol represents important notes concerning potential harm to people this unit Warning and Caution boxes to identify specific levels of hazard seriousness A DANGER DANGER indicates an imminently hazardous situation that if not avoided will result in death or serious injury DANGER is limited to the most extreme situations A WARNING WARNING indicates a potentially hazardous situation that if not avoided could result in death or serious injury and or property damage AN CAUTION CAUTION indicates a potentially hazardous situation that if not avoided could result in minor or moderate injury and or damage to property CAUTION is also used for property damage only accidents SAFETY GUIDELINES Review the following information before attempting to install and operate the product Rules for Safe Instal
91. s the packet origin from the HFV generator The address section of the Header field is five bits long bits 3 7 which allows a total of 32 distinct addresses Address 0 zero is reserved for the network broadcast address when this address is used in a host originated packet all units execute the packet but do not respond to the host The remaining three bits bits 0 1 and 2 are the length bits These bits tell the receiving unit how long the Data field is so that the unit can determine when it has received the entire message If the Data field contains more than 6 bytes the value of these three bits will be set to 7 07h and the Optional length byte field will contain a value indicating the number of data bytes in the Data field Note The value of these bits refers only to the number of actual data bytes in the Data field Do not include the checksum byte when calculating the value for these bits see AE Bus Checksum Byte on page 4 13 AE BUS COMMAND NUMBER BYTE This one byte field contains an 8 bit value from 0 to 255 00h to ffh representing the command number If the message packet originates with the host computer this value specifies the purpose of the message packet If the message originates with the HFV generator the value specifies the command to which it is responding See AE Bus Commands on page 4 16 for a complete list of commands 4 12 Communication Interfaces 5705072 F HFV 8000 Generator A
92. sfied RF output cover Switch opens The main contactor is open RF output is disabled Front panel Standby Switch opens The main contactor is open RF switch output is disabled 1 6 Safety and Product Compliance Guidelines 5705072 F HFV 8000 Generator Figure 1 1 illustrates the interlock circuit User Control I O HFV User I O Ma I I l l I 15 V 30 V I O I l I External Contact Interlock TA Pa s O YAY i 3 2 o a o _ eH Front Panel Rear Output Standby Switch Cover Switch ia SI lt Figure 1 1 Interlock circuit 5705072 F Safety and Product Compliance Guidelines 1 7 Advanced Energy 1 8 Safety and Product Compliance Guidelines 5705072 F HFV 8000 Generator Chapter 2 Product Overview and Theory GENERAL DESCRIPTION This HFV generator is a 3 kilowatt high efficiency 1 765 megahertz to 2 165 megahertz generator intended for continuous heavy use in a vacuum chamber environment The generator employs Advanced Energy s patented RF circuit topology in a compact rack mountable enclosure Designed to regulate on forward power or load delivered power into a broad range of output impedances the HFV generator can operate in center frequency mode or in automatic tuning mode Direct digital synthesis DDS continually adjusts the operating frequency in order to minimize the reflected power for a giv
93. stomer Support Before Calling AE Global Customer Support XL 6 1 Troubleshooting Guide kk kk KK kK KK KK KK tee 6 1 Error Indications s2 A maea i we Kl beha AA 6 2 Front Panel Display LCD Not Lit KK KK KK KK RR KK KK KK 6 2 Advanced Energy Displayed on LCD WW kk KK KK KK KK KK KK KK KK 6 2 Fault Indicator On lt 2 25 4394 deed kk KK KK KK KK KK KK KK K KK KK KK KK KK KK kk 6 2 Overtemperature Fault KK KK KK KK KK KK KK KK KK KK KK en 6 3 RF Enable Without Interlock Fault KK KK KK KK KK KK 6 3 Input bin Fault s4 amp 5 5 A a a tasers Mant un ba Satan gee AWA 6 3 Interlock OK Indicator Off kk kk KK KK KK KK KK KK IK KK KK KK KK KR K BIEN 6 3 What is the Interlock J A kk kk kK KK KK KK KK eee 6 4 Load Regulation Indicator Flashing W K KK KK KK KK KK KK KK KK 6 4 RF On Indicator Off 2 34262006 tn mka WATA KK KK KK KK KK KK KK IK KK KK KK ee 6 5 At Set Point Indicator Off 01224444 kk kK KK KK KK KK KK KK KK KK KK RR KK KK 6 5 Internal Fault Check kk kk KK KK KK KK KK KK KK KK KK KK ee 6 6 External Load Checks Open Short RF Output Path 6 6 No Output No Plasma kk kk kk KK ce KAR KAWAN KANA KATE KK KK 6 7 High Reflected Power a a baa kk kk kk kK KK KK KK KK KK KK a KK kk kK kk kk 6 7 AE World Wide Web Site 4 vk kk kK kK KK kK KK KK KK KK KK KI KK KK KK KK KK KK ee 6 8 AE Global Customer Support kK kk KK KK KK KK KK KK KK KK KK KK KK KK 6 8
94. t 100 ms rise at full scale set point and fall time from RF On or RF Off Load Impedance 50 Q 2 Q center impedance Harmonics At full rated output all harmonics are 21 dB below the RF output signal when operated into a 50 Q nonreactive load impedance All spurious nonharmonic outputs are 45 dB below the RF output signal 5705072 F Product Specifications 3 7 Advanced Energy ENVIRONMENTAL SPECIFICATIONS Table 3 4 and Table 3 5 describe the environmental specifications Table 3 4 Climatic specifications Temperature Relative Humidity Air Pressure Operating Class 3K3 Class 3K2 Class 3K3 5 C to 40 C 10 to 85 Note 1 80 kPa to 106 kPa 41 F to 104 F 2 g m to 25 g m 800 mbar to 1060 mbar approximately 2000 m above sea level Storage Class 1K4 Class 1K3 Class 1K4 25 C to 55 C 5 to 95 80 kPa to 106 kPa 13 F to 131 F 1 g m to 29 g m 800 mbar to 1060 mbar approximately 2000 m above sea level Transportation Class 2K3 Class 2K3 Class 2K3 25 C to 70 C 95 Note 2 70 kPa to 106 kPa 13 F to 158 F 60 g m Note 3 700 mbar to 1060 mbar approximately 3265 m above sea level Note 1 Noncondensing Note 2 Maximum relative humidity when the unit temperature slowly increases or when the unit temperature directly increases from 25 C to 30 C Note 3 Maximum absolute humidity when the unit temperature directly decreases from 70 C to 15 C
95. t 4 8 interlock loop bana 3 1 schematic diagram 4 8 ieee nesi nin interlock ok indicator 5 16 RE CeSOTIPNOnS interlocks 1 6 settings 4 9 5705072 F Index iii Advanced Energy front panel standby switch 1 6 hardware 1 6 RF output cover 1 6 internal diagnostics 5 17 6 6 L labels product 1 3 line current 3 7 line frequency 3 6 line voltage 3 6 load impedance 3 7 load regulation indicator 5 16 M manual see user manual marking CE 1 4 message packet 4 11 illustration 4 12 modes output regulation 3 1 regulation 5 11 selecting automatic tuning 5 12 selecting center frequency 5 12 switching between center frequency and automatic tuning 3 2 mounting dimensions 3 6 N NAK see negative acknowledgement negative acknowledgement 4 15 normal operation 5 11 NRTL C certification 1 4 O operation first time 5 9 normal 5 11 theory 2 2 optional length byte 4 13 output power schematic diagram 4 6 output regulation modes 3 1 overcurrent protection 3 6 3 7 overvoltage category photos see illustrations physical specifications 3 5 connectors and cables 3 6 size 3 6 weight 3 6 pin descriptions 4 2 4 8 Host port 4 8 User port 4 2 polling frequency mode 3 3 3 4 pollution degree specification 3 8 ports see connectors product certification 1 4 compliance 1 4 description 2 1 product labels 1 3 R rear circuit breaker 5 9 reflected power schematic diagram 4 6 specification 3 7 regulation 3 2 3 7 4
96. the RF On indicator is on and the generator will deliver power AN CAUTION Do not exceed the specified full rated output power Verify that there is an external contact closure between pins 4 and 9 to enable the RF output power See Table 4 1 on page 4 2 and Figure 4 4 on page 4 7 5 10 Installation Setup and Operation 5705072 F HFV 8000 Generator Meeting Minimum Power Threshold The output power set point minimum is a threshold that allows the generator to deliver power The set point circuitry uses hysteresis so that the generator has two thresholds If an RF On command is given the power requested through the set point level must be above the minimum power On threshold for the HFV generator to deliver power The HFV generator will continue to deliver power until the power requested through the set point level falls below the minimum power Off off threshold or until the RF On command is disabled That is the generator delivers power when the RF On command is enabled AND the power set point is above 66 W The generator ceases to deliver power when the RF On command is disabled OR the Power Set Point is below 54 W NORMAL OPERATION You can operate the HFV generator either as a center frequency generator or as a variable frequency generator where the operating frequency is automatically tuned or continually adjusted by direct digital synthesis DDS to minimize reflected power and enable higher output powers Autom
97. ued Command Description Numberof Number of Host Data Response Bytes Data Bytes 40 Sets the host port time out value through the 2 1 set Host port host Send two bytes least significant byte CSR only time out first representing the time out value in seconds e Range is 2 to 500 20 ms to 5 00 s decimal implied Read back with command 140 127 Enables or disables data logging Send one 1 1 data logging byte to toggle data logging off or on CSR only on off e 0 Off e 1 On Command 255 reads the log records 128 Reads the device type The controller board 0 3 or 4 byte report device returns a three or four byte ASCII string ASCII string type HFV or HFV L 129 Reads the output power value in watts The 0 4 byte report device controller board returns a four byte ASCII ASCII string size string 3000 3000 W 130 Reads the software part number The 0 7 byte report controller board returns a seven byte ASCII ASCII string software part string representing the initial seven digits of number the AE part number Command 198 retrieves the revision letter 132 Reads regulation mode The controller board 0 1 report returns one data byte regulation mode e 1 Regulation mode determined by external switch 2 Forward power regulation e 3 Load delivered power regulation Set with command 12 5705072 F Communication Interfaces 4 21 Advanced Energy Table 4 7 Host port commands
98. ur basic components that could impede the RF path the HFV generator output connector the output cable the tuner or the chamber Complete the following steps 1 Turn the rear circuit breaker off to ensure that there is no RF power at the output of the HFV generator For the HFV generator output connector a Remove the output cable and visually inspect the output connector for signs of arcing or heat stress b Verify an open is measured between the center conductor and outer shield c Make sure the output connector is mounted firmly to the chassis For the output cable a Visually make sure there is a good connection between the output cable and end connectors on both sides of the output cable b Verify the continuity of the center conductor c Verify the continuity of the outer shield d Verify that there is no continuity between the center conductors and outer shields e Swap cables if possible and retry operating the HFV generator For the tuner and the chamber The only way to isolate the tuner or the chamber is to exchange the tuner or the HFV generator with another known functioning unit You can also run the HFV generator into a 50 22 dummy load 6 6 Troubleshooting and Global Customer Support 5705072 F HFV 8000 Generator Also consider these questions 1 Are you currently setting up a new chamber system 2 Has any work been done recently on the chamber 3 Have there been any changes in your pr
99. ustrations dimensions 3 6 forward load power output 4 6 forward load power set point 4 7 frequency mode timing diagram 3 3 front panel 5 4 Host port 4 9 Host port communications transaction 4 14 Host port transaction example 4 16 interlock circuit 1 7 interlock loop 4 8 message packet 4 12 polling timing diagram 3 4 rear panel 5 4 reflected power 4 6 RF power enable 4 7 RF power on status 4 8 theory of operation 2 2 User port connector 4 1 indicators at set point 5 17 error 6 2 see also error indications fault 5 17 front panel 5 4 interlock ok 5 16 H load regulation 5 16 harmonics 3 7 N GO TO header 4 12 input power specifications 3 6 Host port line current 3 6 AE Bus protocol 4 11 line frequency 3 6 baud rate 4 10 line voltage 3 6 commands 4 17 installation sce Hive Commande condition of use 1 6 nO connectors 1 6 communicating through 4 10 oveivoltage cateaorli 1 6 communications checksum 4 13 otag goryt 1 mm nications command 442 pollution degree 2 environment 1 6 oe icati data data bytes 4 13 safety warning 5 1 JEL wa lene Maa date bytes water solenoid 5 6 communications header 4 12 HE interconnect schematics 4 6 communications optional length byte 4 13 sea also sehematic diaqram communications transaction 4 14 i i 9 ege interface configuration 3 1 communications transaction example 4 16 er hu interlock 6 4 communications transaction illustration 4 S RAN 14 4 16 circuit 1 7

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