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User Manual - The University of Texas at Dallas

1. 72 8 4 INSTALLING THE THERMOCOUPLES n 72 8 5 CHANGING TYPE PYROMETER lt gt 60 REACTOR 74 8 7 CHANGING CONTROLLER BATTERIES n 74 9 75 9 1 PIMS SOFTWARE INSTALLATION n 75 0 2 1 SOFTWAREINFORMATION n nn ec nn nn 75 10 GRAPHITE PARTS INFORMATIONN 76 10 1 OO EOIN 76 10 2 THE SIC COATED SUSCEPTOR aa 76 10 3 EHE SIC MEA EE LEES 77 10 4 PINHOLE HO OE VNLT 77 10 5 ESI LIINC 77 10 6 PREVENTION OF PINHOLES BY THE USER 27 I o 417800 77 10 7 TEMPERATURE GRADIENTS 78 10 8 USE OF SUSCEPTORS IN PROCESS ATMOSPHERE aaa 78 11 RECOMMENDED SPARE PARTS FOR JETFIRST 200 79 12 ui SED p quoc uu u M 80 FiG 1 REACTOR CIUS TAL N 90 FiG 2 CM P
2. 6 4 4 Configuration When the CONFIGURATION mode is selected the screen displays the Configuration form Configuration Gas name Range Alarm limit Pressure unit f mbar Gas 1 2 2000 sccm An Gas z o2 2000 sccm E Gas 3 N2 H2 1000 SU 5 Capacitance manometer ranqe 1 Temperature alarm limit el Temperature alarm delay 20 5 Lock door Demo mode Advanced solutions for thin film deposition www jipelec com User s Manual JetFirst 200 45 inele a division of qualiflow 6 4 4 1 Gases If the gas flow alarm limit 15 activated for a step and if the difference between the setpoint and the gas flow 15 over the alarm limit the gas name will flash in yellow color The gas flow alarm limit must be activated for each step In this mode the operator can also determine the pressure unit and set the Demonstration mode on Mass flow controllers The names of the gases and the flow ranges should only be changed if a flow controller is changed Click on configuration and enter the new values The flow meter range should be expressed in sccm If the gas alarm limit 1s set to a value other than zero the system will display an alarm during the process when the gas flow goes beyond its range For example If the gas alarm limit is set at 5 90 an alarm is engaged if the difference between the mass flow readout and the set point for this gas line 1s greater than 596 The gas alar
3. Va m a division of qualiflow 4 6 3 Adjusting the water flow controller IMPORTANT Adjust the airflow switch before water flow controller Remove the metallic panel on the low left side of the system fixation by magnets The water flow controller 15 the brass box with black connector Supply the system with air Power on the system Select maintenance mode and then valves control Press F1 to open the water valve Check that Led n 3 on controller is ON when water is flowing If not adjust the position of the black connector until the Led lights Check that water flow is around 5 and 10 l min Tighten the 2 screws of connector Re install the metallic panel 4 6 4 Equilibrate the current in the zones The temperature uniformity is very important during process A good uniformity will result in a good balance of the current between the 2 JetFirst 100 or 3 JetFirst 150 lamp zones The adjustment 15 different depending of the voltage of the converter 220V or 400 Proceeding Advanced solutions for thin film deposition User s Manual Remove the metallic covers on the top of the furnace Remove the metallic panel on the bottom right side The electronic boards of the power converters are now accessible Switch on the system Select manual heating from the PIMS See section 6 3 1 for further details Set power to 10 The balance between the zones can be adjusted with the potentiometers which are o
4. ERN 90 FIG 3 CONTROL uie PANE TK 80 FIG 4 REAR UTILITY 80 FIG 5 80 FIG 6 CR os u 90 FIG 7 URSI DIU 90 FIG 8 V e 90 FIG 9 INSTALLING THERMOCOUPEE uuu hasa 90 Fic 10 ISSTALLINGO OU PINS 90 FiG 11 DIMENSIONS sa 90 FiG 12 80 Fic 13 C 90 Advanced solutions for thin film deposition www jipelec com User s Manual JetFirst 200 111 Wu 8 Jipe ec a division of qualiflow 1 GENERAL INFORMATION 1 1 GENERAL DATA CONCERNING THE SYSTEM The following manual relates to the Jipelec JetFirst 200 system Contact manufacturer QUALIFLOW Tel 33 0 4 67 99 47 47 Web site www jipelec com 395 rue Louis L pine BP7 Fax 33 0 4 67 99 47 48 Email dstupfler qualiflow com 34935 MONTPELLIER Cedex 9 FRANCE 1 2 MANUFACTURER WARRANTY 1 2 1 Warranty conditions The JIPELEC JetFirst 200 systems have been manufactured and tested wi
5. If there 15 still high overshoot for the heating ramp there 1s another way to overcome this problem or at least to reduce the overshoot using a two step ramp The method 15 described in the drawing hereafter This requires some process engineering but as the reproducibility of the system 1s good the method can be of some interest for a better process control One step ramp Two step ramp Temperature Temperature Actual temperature Actual temperature Temperature setpoint Temperature setpoint 7 4 THERMOCOUPLES Thermocouples Chromel Alumel Type K Thermocouples can be used from ambient temperature up to 1000 C and only with non active gases When they are used under other conditions their lifetime is much shorter and in some cases it is impossible to use them reducing atmosphere for example One thermocouple can be used for temperature control 1 the second one can only be used for temperature measurement TC2 See fig 6 in appendix 7 4 1 Why thermocouple calibration The calibration curve for the K thermocouple is known and it cannot be modified The equation 15 Temperature Voltage Volts x 130 The setpoint correction parameter allows reducing the offset between the setpoint and the actual temperature from the thermocouple which is used for the temperature control It will not have any effect on the second thermocouple which is used for temperature measurement only The control thermocouple is connec
6. Zone 1 Zone 2 C Zoned Zoned Exit With the temperature compensation module it is possible to modify the distribution of power within the chamber so that the temperature is consistent over the substrate s surface The furnace is made up of 4 independent heating zones and the user may choose for each of them a power ratio with a 1000 reference corresponding to 200 Volts To access the temperature compensation mode click on Compensation table A diagram representing the heating zones will be displayed on the screen The compensation parameters can either be entered on the right hand side of the screen The distribution of power in the furnace depends on the temperature The compensation differs according to the level of power There are 13 compensation lines per table allowing the operator to accurately control power distribution On the left hand side of the screen a diagram of the lamps corresponding to each zone is displayed Select the zone and the lamps will be displayed in yellow To enter the parameters select New table first User s Manual JetFirst 200 www jipelec com 43 7 lec w a division of qualiflow Instructions Select New table and enter a name The user can enter a comment optional Then he must enter the following on each line power level from 0 to 1000 e the balance for each zone Zones 1 and 4 are on the edge of the furnace They a
7. 75 Jipelec Jipelec a division of qualiflow 10 GRAPHITE PARTS INFORMATION Qualiflow can provide graphite susceptors to work with If you choose to purchase graphite susceptors please read the following section This presents the material features and how to work with graphite susceptors CAUTION The SiC coated graphite susceptors and covers are sensitive to temperature gradients These parts should not be used with temperature ramp rates over 50 C s The user must be aware that the gas injection specially from reactor bottom side can lead to high temperature gradient and breakage in susceptor and cover Qualiflow strongly recommends using small gas flow for processes with susceptor especially if temperature exceeds 600 C Qualiflow will not give any warrantee on the susceptor and covers Contact Qualiflow for further information 10 1 INTRODUCTION Qualiflow provides SIC silicon carbide coated susceptors for heat treatment of small samples or compound semiconductors as well as for CVD processes SiC coated susceptors have a limited lifetime The most common phenomenon limiting the use of the susceptor is the occurrence of pinholes in the SiC coating The susceptor cannot be used any more because of the contamination level or the formation of spots on the backside of the wafer Recommendations are given to reduce pinhole formation The susceptors are also sensitive to temperature gradients 10 2 THE SIC COATED SUSC
8. Temperature control The temperature control thermocouple is installed under the wafer through an O ring connector located under the platen Another thermocouple for temperature reading only located on the edge of the platen 15 installed likewise The optical pyrometer looks at the center of the wafer backside 3 3 VACUUM CIRCUIT See fig 5 in appendix for vacuum and gas circuit The JetFirst system has vacuum capability down to 10 mbar using optional vacuum pump System is provided with 16 vacuum valve recipe controlled Constraint vacuum gauge 1000 mbar full range e Stainless steel flexible hose for vacuum pump connection 3 8 stainless steel exhaust line allows atmospheric pressure processes and avoids any over pressure inside the chamber System can be equipped with the following optional devices Vacuum pump Oil mist filter e Alumina trap Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 8 Jipelec Jipel a division of qualiflow 3 4 GAS CIRCUIT See fig 6 in appendix for vacuum and gas circuit The system is provided with a standard purge gas line Up to three optional process gas lines with mass flow controllers can be installed Features of a process gas lines e Polished stainless steel components e Swagelok fitting Purge gas line e Manual shut off valve 0 22 um filter e Ball flowmeter e Solenoid valve Process gas
9. e lec a division of qualiflow University of Texas JetFirst 200 User s Manual CN040085 May 2004 Jetfirst200 standard en v24 doc Advanced solutions for thin film deposition www pelec a division of qualiflow CONSTRUCTOR S FOREWORD The Jipelec system can be used in R amp D Itis obvious that all gases have not been tested and that consequently the user must take all the necessary precautions to prevent certain mixtures occurring The constructor declines all responsibility for any incidents caused by insufficient precautions or handling errors and their consequences The constructor specifies that the Jipelec system has no protection against any possible toxic emanations The responsibility for installing the machine in an environment which complies with the relating legislation is left entirely to the initiative and charge of the user who is considered to be aware of the effects of the gases that he uses as well as those of the decomposition products and gases generated by the processes in operation The user shall be responsible for connecting the exhaust line and the pump exhausts of the system to a gas scrubbing installation which is compatible with the process gases and gas flows and that complies with local regulation The constructor also specifies that the quartz tube and all parts in contact with vacuum or process gases must only be handled with gloves to
10. Power Converters IR lamp power supply Power Converters Boards PCBs Contactors Circuit breaker Transformer Terminals JetFirst 200 1104 10 1200 1050 820 1500 300 63 kW The different components are industrial and are easily available PCBs and lamp control are made by QUALIFLOW Advanced solutions for thin film deposition User s Manual JetFirst 200 www jipelec com a division of qualiflow Equipment Upper part includes the following components Furnace and lamps Lamp air cooling system Reaction chamber Quartz window upper platen Lower part includes the following components Platen quartz pins and thermocouples Optical pyrometer Gas panel Water circuit Air circuit Vacuum valve and capacitive jauge Flexible pipe to connect the vacuum pumping unit Fan See fig 1 in appendix for main components localization Rear Side See fig 4 in appendix for rear face representation connections power supply water air gases and vacuum are available on the rear face 2 2 PERFORMANCES These performance characteristics are given for standard silicon wafers standard thickness Performances Max substrate diameter Temperature range Thermocouple control range High temperature pyrometer control range standard Low temperature pyrometer control range optional Control of up to 4 gas lines and one purge line Recipe contr
11. e Maximum pressure at water inlet 6 bars e Max pressure at water outlet 1 bar Minimum inlet temperature 2 C over the dew point e Maximum inlet temperature 9 8 Maximum outlet temperature 60 relief valve controls the water pressure This pressure must never exceed 3 bars and must be checked before any new start up See fig 8 in appendix CAUTION Water pr t not exceed 3 bars inside the system A relief valve controls the pressure This pressure must not exceed 3 bars and should be controlled each time you start the equipment Water flow is around 20 l min 4 5 VACUUM AND GAS CIRCUIT The machine is delivered with Swagelok fittings Polished stainless steel 316L pipe inner 26 35 are recommended e Pumping by QF 16 stainless steel pipe connected under the platen e Exhaust by 3 8 stainless steel pipe with Swagelok fittings The vacuum valve and the gas valves are recipe controlled and can be opened or closed at each step of a recipe See fig 4 5 and 6 in appendix for vacuum and gas circuit Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 14 of Weel a division of qualiflow 4 06 ADJUSTMENTS CAUTION Some subsystems are powered inside the system Factory trained technicians should carry out these operations 4 6 1 Adjust the inlet gas flow for each The inlet gas flow for each MFC must be adjusted according to the AP specified on the
12. 5 5 ETIN 7 MIETEN 5 5 50 290 B 590 09 oc comm o8 oi 7 0 45 1 1 o4 _ 17 1 5590 aa 1 1 59 1 1 Delete table Because of temperature control system a difference appears between the setpoint and the actual measurement The calibration mode permits to compensate this difference Operator has to calculate the error percentage 0 to 200 96o zero to two hundreds per thousand between the setpoint and the actual temperature and enter this value in the calibration table This value must be added to the existing correction value For the thermocouple the software only allows entering and saving the setpoint correction for different levels of temperature Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 40 Jipelec a division of Proceeding Select thermocouple calibration and save the values when they have been changed e Delete Table key allows resetting all the correction parameters Print key will print the thermocouple calibration table Exit will return to the parameters menu 6 4 2 Pyrometer calibration The temperature can be controlled either by the optical pyrometer or by a thermocouple The calibration tables give the temperature from the sensor in relation to the voltage For the py
13. 7 322 REACTOR RRRERERR 7 3 3 VACUUM CIRCUIT 1 2 2 6 6 132220222 I n 9 3 4 CT CIRCUIT 22 2 222 06 6061 6 0 2 2222 9 3 5 VACUUM AND GAS 9999 99999 9 10 36 WATER ORCUTT 10 3 7 TEMPERATURE CONTROL a u 11 3 8 COMMANDS 2 2 I I 11 3 6 1 PC and Programmable Logical Controller 1 11 3 8 2 11 3 6 3 FLECIE V I LOCION CS ua u aaa awa 11 3 9 DIMENSIONS AND u 12 3 10 OPTIONAL FEATURE 17 20 666 000 601 00 5050 222222 2 2 e s ee 12 4 INSTALLATION PROCEDURE wii 2 L E RE l uu SEVERE RS QNS Y 12 HANDLING AND INSTALLATION 65 8 4 a 12 Eod dio E 12 43 LAMP VENTILATION u aaa 14 4 4 WATER CIRCUIT a 14 4 5 VACUUM AND GAS CIRCUIT a r 14 4 6 ADJUSTMENTS I s ese 15 4 6 1 Adjust the inlet gas f
14. Line 3 450 seg 1200 sal wg Line 10 sod 2 seg em 1250 95 187 Line 11 550 4230 Line 26 180 Line 12 Line 27 J 15 Line 28 Line 14 Line 28 F Line 15 voy 8 Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 62 a division of Change the correction factor for each temperature setpoint as follows Thermocouple calibration table Temperature C Voltage m Correction Line 1 of Line 2 of gt Line 3 EB W Line 4 20 Line 5 509 133 i Line B 2 328 xg of x9 wi TI cf seg aff Line 10 seg Line 11 sof aw ff Line 12 0 sj Line 13 650 5000 Line 14 Line 15 Line 15 Line 17 Line 18 Line 19 Line 20 Line 21 Line 22 Line 23 Line 24 Line 25 Line 26 Line 27 Line 28 Line 29 Line 30 Temperature Voltage Correction xg ony off wg 5H xg 5g j x 3 5H moy 5 9H 1008 se a meg sj 106 Once the table is modified save it and exit from the parameter menu Advanced solutions for thin film deposition User s Manual JetFirst 200 www jipelec com 63 EC m lec Jipe ec a division of qualiflow e Run the same process again to check the accuracy of the cali
15. another table the user must download a recipe with the required table in process mode He 15 not obliged to launch the process To start heating enter a power setpoint 0 to 10096 and press key Start heating The heating will start immediately CAUTION At full power 100 or even less you can damage your substrate in a few seconds The manual heating must be used only for adjustments and with low power Some safeties are activated water air overheating but in case of failure nothing will be displayed The user must check himself that everything is correct Press Stop heating to stop heating Heating must be stopped prior to change to power setpoint Exit will return to the maintenance mode menu after a cooling cycle Advanced solutions for thin film deposition www JIpelec com User s Manual JetFirst 200 35 ION Jipelec a division of qualiflow 6 3 2 Manual control Manual control E 01 mbar This mode is used to e open and close the chamber e open or close the water valve same key click once and the valve opens if it is closed red indicator click again and the valve closes e turn the lamp fan on or off to cool them down e open and close the gas vacuum valve purges the gas panel e open and close the purge valve e display input and output status The chamber can not be opened if the pressure inside 15 not the same as or greater than the atmospher
16. calibration tables which can be used to process different types of substrate Each calibration table provides for 30 temperature voltage couple of values per pyrometer calibration table The calibration curve is created by interpolation between 2 couples of values The operator may therefore enter values into lines 1 to 30 WARNING Do not use thermocouples for temperature over 1000 The probe can be damaged The pyrometer calibration curve is linear at high temperatures and the computer will calculate the pyrometer s temperature for the maximum voltage by extending the last part of the curve entered For low temperature pyrometers the temperature limit is 1000 C for high temperature ones it is 1200 C Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 59 w a division of qualiflow See below for a full explanation of the calibration procedure 7 6 CALIBRATION PROCEDURE 7Z 6 1 Conditions The calibration procedure must be performed atatmospheric pressure to get a better contact between the thermocouple and the substrate e under air as the thermocouple lifetime 1s reduced under reduced atmosphere without gas flow in order to avoid any cooling effect of the thermocouple during calibration process 7 6 2 Calibration recipe Calibration is performed for each temperature controller the thermocouple and the low temperature pyrome
17. can enter a comment optional If you use a low temperature pyrometer you must select low temperature in order to have the right calculation for the max temperature Then you have to enter the values for recording thermocouple and pyrometer signals at the same time The thermocouple gives the wafer temperature for a voltage of the pyrometer The operator must perform a multi step process 50 by 50 for example in thermocouple control mode in order to get the actual calibration parameters see Erreur Source du renvoi introuvable Each couple temperature voltage must be entered in the calibration table so that the controller can make the right setpoint calculation The correction factor may vary from 0 to 200 Other functions available e Save as To save a compensation table with a new name e How to save Press Save as enter a new name press Save e Delete To delete a compensation table e Print To print the compensation table parameters on the color printer Exit To return to the parameters menu Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 42 T Jipelec a division of qualiflow 6 4 3 JIPELEC PIMS Temperature compensation Advanced solutions for thin film deposition Temperature compensation Comments Power 1000 zonel fone Zone3 zone4 soo 4000 500 500 4000 2 1000 2000 500 500 2000
18. has to enter 2 to 29 couples of values The thermocouple 15 difficult to use up to 1300 C to record a calibration curve The calibration curve 15 usually linear at high temperature and the computer will calculate the voltage value for 1300 C by prolongation of the last part of the curve that has been entered by the operator Setpoint correction Because of the temperature control the system used in the JETFIRST there is an offset between the temperature setpoint and the actual temperature that the system will reach during the process This offset can be set to zero by using the setpoint correction Like for the thermocouple because of temperature control system a difference appears between the setpoint and the actual measurement The calibration mode permits to compensate this difference During the process the operator has to calculate the error percentage 0 to 200 zero to two hundreds thousand between the setpoint and the actual temperature and then to enter this value in the calibration table This value must be added to the existing correction value Example If process 15 performed at 850 C under pyrometer temperature control and if the actual temperature is only 847 C setpoint correction for this part of the curve must be increased by 3 850 3900 By this way it 15 possible to adjust the temperature control very accurately To enter a new table Select New Table and enter a name up to 10 characters You
19. is represented Jipelec amp REACTOR ARTICULATION Jipelec amp EMERGENCY 54 JETFIRST N CONTROL FRONT PANEL LAMP COOLING CONTROL 130 P 128 Jz E Noa CIRCUIT PLUG EXHAUST BREAKER 4 GAS 520 COOLING 45 1500 1095 10 SUPPLY TEE ILL HEAT PUMP SUPPLY CONTROL REAR UTILITY PANEL n Jipelec TT Chemin du Vieux Chene ARSI 28740 PUN Tel 04 00 00 Fax 4 70 04 oF 4 PLATEN 16 1 4 1 4 BSP 3 8 TUBE Exhaust VACUUM CIRCUIT Ploten 55 ER J l H 1 o H en xx H n ner EM Een jx Se gt E ed EJ TJ EE EN H E du J J TESI ques i O auj a wo ol C 5 G G G QI O Z D O X _ Un lt O Jipelec Ventilation lox Exchanger Air Inlet AIR CIRCUIT E Haee o 7 10 10 Reactor J10 Water inlet 16 16 1 2 NI ed 1 8 1 2 Ve 3 8 10 1 2 lt 10 Water outlet i KW1 E
20. line optional e Manual shut off valve 0 22 um filter e Mass flow controller e Solenoid valve The system can perform both atmospheric and vacuum processes e During vacuum processes gases are pumped down through the vacuum valve and the stainless steel hose A check valve avoids back stream from the gas exhaust line e During atmospheric processes gases go out of the chamber by the gas exhaust line The valves and mass flow controllers are fully controlled by the system Gas flow can be changed at each step of a recipe Advanced solutions for thin film deposition www JIpelec com User s Manual JetFirst 200 9 Jipelec Jip a division of qualiflow 3 5 VACUUM AND GAS DIAGRAM Constraint Lamps Check valve Vacuum valve vacuum pump O gt optional Exhaust Gas2 Gas3 3 06 WATER CIRCUIT See fig 8 in appendix for water circuit representation The JetFirst 200 1s equipped with a water cooling circuit This allows to cool down the main parts of the furnace as well as power blocks The circuit 1s fully controlled by the PIMS Parts cooled by the water circuit e Lamps reflector Reactor chamber e Platen e Power converters Features of the water circuit Water relief valve Solenoid valve Flowmeter and filter Advanced solutions for thin film deposition User s Manual JetFirst 200 10 Jipelec Jipele
21. not touch the susceptor with knife Handle with plastic or rubber gloves Do not place on a metal table Use clean room wipes tissues Make sure not to touch metal parts of the reactor when installing the susceptor General After a reactor has just been installed there 15 a high risk of contamination Use an old susceptor during start up and tune in This susceptor will catch the initial contamination A new susceptor can be used to qualify low resistivity processes and start production Also use an old susceptor after a major modification on the reactor has been done User s Manual JetFirst 200 www jipelec com 77 Jipelec a division of qualiflow 10 7 TEMPERATURE GRADIENTS The SiC coated graphite susceptors and covers are sensitive to temperature gradients These parts should not be used with temperature ramp rates over 50 C s The user must be aware that the gas injection specially from reactor bottom side in some JetFirst systems can lead to high temperature gradient and breakage in susceptor and cover Qualiflow strongly recommend using small gas flow for processes with susceptor especially if temperature exceeds 600 C Qualiflow will not give any warrantee on the susceptor and covers Conclusion Pinhole formation 15 the predominant cause of susceptor failure The main cause is metal contamination in the graphite or from the outside of the susceptor as metals cause pinhole formation The lifetime
22. s capabilities The zoom key takes you back to the original size Advanced solutions for thin film deposition i www jipelec com User s Manual JetFirst 200 49 a division of qualiflow Use the Next and Previous keys to continue viewing the historical or to view the previous parameters The Print key enables the user to print the current page on the color printer Option is used to change the color and style of the curves and to select another scale for the Y axes power is displayed proportionately to temperature A cursor 15 available and may be moved rapidly using the lt lt or gt gt keys blue or more slowly using lt or gt You may also enter the cursor s step size by keying a number of seconds into the white space between the and 5 keys The cursor s current value is displayed in the upper part of the window along with the values for all the process parameters 1 e thermocouples pyrometers gas flow etc If you click on calibration the value of the pyrometers is displayed in terms of voltage rather than temperature at the cursor point The main purpose of this is to create the pyrometer calibration table by noting the voltage temperature ratio Clicking on alarm gives you access to the list of alarms see how to use it below 6 5 2 Alarms The Alarms key in historical menu allows displaying the list of a
23. to change a parameter in a step display this step change the parameter and exit step parameter will be saved automatically 6 1 7 Delete a recipe Select EDIT RECIPES mode and then select the recipe to delete in the tool bar Press key Delete The computer will ask to confirm Press Delete to confirm The recipe is now deleted Press Cancel if you do not want to delete the recipe Advanced solutions for thin film deposition ee COM User s Manual JetFirst 200 28 ION Jipelec a division of qualiflow 6 2 RUN PROCESS Before running a process check Water supply Compressed air supply e Gas supply Vacuum pump Select process mode with key RUN PROCESS 6 2 1 Download recipes the recipes are stored on the computer s hard disk It 15 necessary to send the parameters to the system controller before starting the process When the operator chooses process mode the system will display the Start Process form it will ask to download a recipe and then begin a process DL Downloading Advanced solutions for thin film deposition User s Manual JetFirst 200 29 Jipelec T a division of qualiflow If the process to perform 15 the same as the last one that was downloaded to the system displayed on the top of the form the operator can start process immediately Caution if a parameter of the step has been changed the recipe mu
24. to contact Qualiflow engineers for more details about servicing and maintenance operations 8 1 1 Reactor Cleaning the reactor windows 6months Cleaning the processing chamber Cleaning the pyrometer window Calibrating the pyrometer mt Controlling the platen O ring lya C o Comment 8 1 2 Furnace Basa s When 1 filament 15 Recommended to change P bowing or broken all the lamps Cleaning the reflector When changing lamps Control of the electrical connections Advanced solutions for thin film deposition www jipelec com User s Manual JetFirst 200 70 Jipelec Jip a division of qualiflow 8 1 3 Electricity Operation Periodicity Comment 6 1 4 Gas and vacuum Check gas panel and gas line tightness year Perform a leak test of the process chamber 8 1 5 Water compressed air 8 1 6 Safety Check safety interlocks and sensors adjustments 8 2 CHANGING LAMPS See fig 1 in appendix Disconnect all power from the system Remove the metallic reactor box Remove the stainless steel furnace protection Remove electrical connections of lamps and gently remove lamps using gloves Never touch the lamps with bare fingers otherwise clean them with alcohol Re install lamps using the same procedure in reverse order Do not forget isolating sheath on each lamp wire Advanced solutions for thin film deposition User s Manual JetFirst 200 www j
25. water e Select the required quartz pins Lift up the reactor box the platen appears Place the quartz pins with a tweezers or with fingers using gloves See fig 10 in appendix e Install the sample on quartz pins Note The JetFirst system 15 delivered with 3 sets of beveled quartz pins with different height The system 15 provided with special quartz pins to hold 4 and 6 wafers Be careful quartz pins are fragile 5 2 START UP e Check electricity water air and gas supplies e Start the computer and run the JetFirst managing software e Power up the rear circuit breaker e Press the green button Advanced solutions for thin film deposition www JIpelec com User s Manual JetFirst 200 19 Jipelec a division of qualiflow 6 SOFTWARE CONTROL PIMS The PIMS software provides easy programming control and monitoring of the JetFirst system To use the PIMS control the operator must select this mode in the main JetFirst menu The computer is the interface between the system and the operator and allows e giving process parameter to the system controller e receiving data and getting visualization during process e storing process data and monitoring them after processing Software options can be chosen either with mouse and pressing the left button when key 15 selected on the screen or by using the keyboard by pressing key Alt and the underlined letter of the key in the same time The software is orga
26. x 1 2 425 1 2 3 8 N Lomp coolino WATER CIRCUIT I Chenin du Veo Chine ZRST 38240 WEN Y 1 4 Reflector 1 4 pu 0 Power block N N A Fig 8 JF 200 U4 70 04 00 00 Fax 04 76 O4 6 40 Wafer Thermocouple INSTALLING TRERMOCOUPLE uF 200 JF 200 Water Quartz pin Quartz pin set of bevelled quartz is delivered Jetfirst 200 15 mm i Fig 10 Installing quartz pins LX JF200 DIMENSIONS Jipelec OOIPRINI Air outlet Water outlet 3 4 Water inlet KW2 3 4 E 0702 1 2 Water inlet bu 1 2 EVOJ 7711 mM 1 2 HEAT EXCHANGER Jipelec
27. 2 Compensation table Hour 161052 Calibration table Time 0 05 5100 Setpoint C 1 1200 A 190 Pyrometer T Power 900 Wa a nv nr rnrnran rr Pyrometer unit 6 WEE eene 3 oo nonet ette ennt t attese emet a enr ien iii eek Capacitancel mbar 00 s U GG W W a o c 02 EVM com 100 d ii R cima MERE e a ik ace cie Rn rige M 0 60 120 180 240 30 21 6 5 1 Available functionality By default historical are saved in the Historicals directory To select the historical corresponding to the required process just click on Load select the file from the list by clicking on it and press Enter The temperature and power curves will come up in the plotter window Once the historical has been loaded the 3 first minutes of the process are displayed You may use the zoom key to expand the time scale and the zoom key to compress this axis These keys can be used several times to attain the zoom required according to the software
28. 50 C to 1000 C Note Above temperature range values are given for silicon wafer or SiC coated susceptor only Pyrometer calibration 15 made according to the K thermocouple The calibration tables are saved on the computer hard disk It is possible to save different tables for different substrate materials and to associate them to process recipes 7 5 1 Why pyrometer calibration Pyrometer calibration is an essential operation A good temperature measurement will result from the quality of calibration The pyrometer measures a quantity of infrared radiation The quantity of radiation depends on e Substrate nature Silicon GaAs Graphite etc Nature of layers on substrate surface Temperature of substrate Some substrates especially GaAs may have their optical properties definitely changed if they reach some temperature levels The calibration must be always performed with a substrate with the same thermal past than the substrates that have to be processed in the system Notice that Silicon and GaAs are transparent for infrared at low temperature In the same way the thermocouple can see the lamps through the wafer at low temperature Usually the calibration does not change for the same type of substrate If calibration changes check that the pyrometer window 15 clean and that the pyrometer emissivity has not been changed Like for the thermocouple because of the temperature control system Proportional type a difference
29. EPTOR Susceptors are made out of graphite because of Good mechanical properties at high temperature Good thermal conductivity for homogeneous temperature Excellent resistance to thermal shock e Low thermal mass for fast heat up rate e Low level of metallic impurities Graphite however is porous and releases graphite dust In order to prevent this and to further increase purity the susceptor is coated with a Silicon Carbide layer by a CVD process Proper selection of the graphite ensures a good adhesion of the coating and resistance to thermal shock Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 76 Jipe ec a division of qualiflow 10 3 10 4 10 5 10 6 10 6 1 10 6 2 Advanced solutions for thin film deposition THE SIC COATING Silicon carbide 15 a hard and inert ceramic material The chemical resistance of SiC 15 extremely good The SiC Is resistant to oxidation in air up to a temperature of 1800 C During etching SiC is not thermodynamically stable The kinetics however are such that even after thousands of etch cycles no reduction of the SiC coating thickness can be measured Conditions that enhance etching of the SiC coating are reduced pressure and the presence of metals PINHOLE FORMATION In spite of the inertness of SiC small and large holes can develop in the SiC coating Pinholes have a size in the order of 0 1 mm The pinholes a
30. EPTORS UE EUER VE 55 7 3 1 How to reduce the overshoot esses eene 56 Tub IP uu u n d MN DM I CDD UE 56 7 4 1 Why thermocouple calibration e 56 7 4 2 Enter thermocouple calibration table 57 OEO T 58 Why pyrometer calibration 58 7 2 2 Enter pyrometer calibration table 59 140 CAIBRANONPROCEDURE 60 7 6 1 60 7 6 2 60 7 6 3 u 61 Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 11 Wu 08 a division of qualiflow s s 70 6 1 PERIODICITY OF MAINTENANCE OPERATION 70 8 1 1 CE 70 8 1 2 u u unan Su 70 8 1 3 71 8 1 4 Gas 71 8 1 5 WY LCI NG IE uisi UN UU MERE 71 8 1 6 Wo 71 52 71 8 3 CHANGING THE
31. TION We recommend to change batteries every year The PCD2 controller uses two 1 5 V batteries to save user s recipe and calibration tables in RAM Batteries can be replaced without any risk to loose your data until controller 15 supplied Batteries are normalized type LR03 AAA MICRO Use industrial batteries with minimum capacity of 1000 mA like DURACELL MN2400 e UCAR E92AMA Proceeding Remove the right side metallic panel Remove the SAIA controller cover just by pulling at the four corners e Batteries are in front of you Remove the old ones and installed the new one in the same direction Reinstall controller cover and metallic panel Advanced solutions for thin film deposition User s Manual JetFirst 200 www jipelec com 74 JI perec a division of qualiflow 9 SOFTWARE 9 1 PIMS SOFTWARE INSTALLATION The minimum requested configuration is e Pentium II PC or more 15 or more monitor e Windows 98 To install the software e Insert disk in the CD Room drive Run using Windows CD Rom a setup 9 2 SOFTWARE INFORMATION The software uses some files which are saved in the directory Data Recipes are in the file starbase mbd Historical are in the directory Historical It is recommended to make a back up of the Data directory once a month Advanced solutions for thin film deposition User s Manual JetFirst 200 www jipelec com
32. alue in the calibration table This value must be added to the correction value already displayed The following equation is used to calculate this coefficient Corrector coefficient 21000 x set point readout readout For thermocouple the software only allows the user correcting the set point and saving the correction for different temperature levels See section 7 6 below for a full explanation of the calibration procedure Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 57 Jipelec Jip a division of qualiflow 7 5 OPTICAL PYROMETERS System is provided with one optical pyrometer for high low temperature control range The pyrometer looks at the rear side of the substrate JetFirst and JetStar and only receives signal from the wafer and not from the lamps For accurate and repeatable regulation check the pyrometer calibration regularly A six month period appears to be the average reliability of the calibration However if the system is often used at high temperature over 1000 C it is recommended to calibrate the pyrometer more frequently High temperature pyrometer specifications spare part reference 012 Wavelength 4 8 to 5 2 um Type HT high temperature e Temperature range 400 to 1300 C Low temperature pyrometer specifications spare part reference 013 Wavelength 8 to 14 um e BT low temperature e Temperature range 1
33. appears between the setpoint and the actual measurement The calibration mode permits to compensate this difference by the setpoint correction parameters See thermocouple calibration The calibration has to be performed whenever the type of substrate or the process conditions are changed Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 58 N Jipelec a division of qualiflow 7 5 2 Enter pyrometer calibration table Select pyrometer calibration in the parameter mode The calibration table gives the temperature of the pyrometer according to its voltage Fyrometer calibration Voltage m Correction Temperature voltage m Correction 2801 50 8188 B 35 e oi ao i a l 00 550 00 58 dB moi aay on m 700 5 ECUN 55 1 21 E of 50 17 50 590 a 1 aa 1 1 1 E a c 017 31 E 750 6 E ola 1 1 8B 50 i itt 1 1 New table e Save Delete Table As far as the pyrometer 15 concerned the voltage depends on the substrate s temperature and emissivity Therefore the calibration curve depends on the substrate materials and on the structure of the layers at the substrate s surface The software allows the user saving several pyrometer
34. ation table and start again the same process under thermocouple regulation in order to check that the pyrometer is corresponding to the thermocouple If needed change values of pyrometer voltages e Once this is done start the process under pyrometer calibration For recipe ranged to 1000 C you do not need to take the thermocouple probe out of the furnace Save historical to PYRO1 at the end Advanced solutions for thin film deposition www jipelec com User s Manual JetFirst 200 66 QS lec ec a division of qualiflow Goto Historical menu and click on Historical to display the graphical representation of the process Display historical file and choose calibration mode to get the temperature value from the pyrometer for each setpoint Historical setpoint 9 500 0 P D Thermocouple 5 tD tD Pyrometer Z Pyrometer unit 0 60 120 180 240 300 360 420 480 540 60 OUS v E Time s C my Contract lt EIE Expand Previous Hest page Go to Cursor step m Heading Print Exit From the pyrometer curve note down the pyrometer temperature value for each setpoint temperature value e Calculate the correction factor for each temperature setpoint as follows An example is given for line 6 w
35. avoid any pollution All maintenance and servicing work should be carried out by skilled personnel and where specified in relation with QUALIFLOW Service D epartment QUALIFLOW Service Department and Process Department will provide additional information or recommendation upon request Advanced solutions for thin film deposition www jipelec com User s Manual JetFirst 200 Constructor s Foreword el Jipetec a division of qualiflow TABLE of CONTENTS L CGENERAL INFORMATION CREER u G u 1 1 1 GENERAL DATA CONCERNING THE 5 5 2 2 000 0666 6100606 1 1 2 MANUFACTURER WARRANTY 2 22 2 2 2 66 66 56 6100 1 1 2 1 WY COMA 1 1 2 2 PETI i gra RR 1 1 5 SAFETY INSTRUCTIONS frate 2 1 3 1 User s manual aa huku 2 J 20100177 0120 QUA IEAA Tm 2 22 OVPERVYIIEXQSHSSII E NEO 3 2 1 GENERAL OVERVIEW 82 6 666060601 022 13222 222 222 1222 1 2 3 222 PERFORMANCES 6 2 SYSTEM DESCRIPTION 7 NEM FURNACE DARREN
36. be used for operator training or to install the software or an other computer to display process historical When the Demo mode 15 selected a red bar message 15 displayed on the main menu screen Advanced solutions for thin film deposition www User s Manual JetFirst 200 47 Jipelec a division of 6 4 5 Language This option allows changing the new language for the PIMS control software When the Language mode is selected the screen displays the Language form When the language is selected the program is stopped and must be restarted 6 4 6 Change password This option allows changing the password which is needed to access to Recipe Maintenance and Configuration modes When the Change password mode is selected the screen displays the following Change password Advanced solutions for thin film deposition User s Manual JetFirst 200 48 ZN jipelec a division of qualiflow 6 5 HISTORICAL This mode allows e displaying historical records of processes which have been saved e displaying the list of alarm events Select Historical and the screen will display a new form asking for Historical Process records or Alarms alarm events Exit will return to the main menu 1 Recipe Comments Date Lastrecipe 200241134
37. bration Save the process historical as TC02 Historical 2 Thermocouples Temperature C Pyrometer Time 5 e If values are still out of range run a process and calibrate the thermocouple again following the previous steps Note The difference between setpoint and thermocouple temperature values must not exceed 2 C You can see the above historical graphic that the TC1 readout value matches the setpoint value e Ifthe thermocouple calibration is correct you can follow the procedure and calibrate the pyrometer according to the thermocouple calibration e From this point thermocouple has to be already calibrated If not go back to the top of this section to calibrate the thermocouple e Now switch to mV for pyrometer unit The pyrometer readout value is now expressed in mV Pyrometer ri Pyrometer unit my Advanced solutions for thin film deposition User s Manual JetFirst 200 64 Jipe a division of qualiflow e From the pyrometer curve note down the pyrometer voltage value for each thermocouple temperature according to setpoint Time Pressure Historical TC02 torr Power Setpoint dl 600 0 is Thermocouple Temperature C Time 5 WARNING Note down voltage for a temperature setpoint of 1000 C This value allows checking the emissivity of the pyrometer Pyrometer voltage ra
38. c a division of qualiflow 3 7 TEMPERATURE CONTROL JetFirst is provided with closed loop temperature control set by thermocouple or optical pyrometer The system can also be used in power mode open loop Optical pyrometer BTor HT range e Thermocouple 2 K type Chromel Alumel 0 127 mm e Control Fast response temperature control board 3 8 COMMANDS 3 8 1 and Programmable Logical Controller PLC The JetFirst is provided with the Jipelec Process Image Management System PIMS It enables creation of recipes display of parameters and data acquisition during the process Another module allows pyrometer calibration An optional printer allows paper edition of curves The PC provides full control over system and optional features to purchase if required SAIA programmable controller providing detailed control over subsystems processes and safeties Another PLC controls temperature compensation and lamps failure 3 8 2 Front panel See fig 3 in appendix Features A ON push button green A OFF push button red Anemergency stop button 3 8 3 Electricity Electronics Electricity A circuit breaker on the rear side protects the furnace e Circuit breakers inside the equipment protect the different subsystems power contactor supplies the furnace during process The user must provide a general circuit breaker to protect the supply line of the system and the furnace see installation procedu
39. calibration datasheet A higher or lower inlet gas flow could result in instability of gas regulation Information on inlet gas flow is given in the calibration certificate of the MFC which is provided with the system documentation 4 6 2 Adjust the relief valve See fig 8 in appendix for water circuit representation Adjusting the water pressure Prior to any start up or whenever the machine has been stopped for an extended period of time it 15 necessary to check and adjust the water pressure in the water circuit To get the best running conditions the water pressure droop in the system between water inlet and outlet must be about 2 bars If the water outlet is at atmosphere follow this procedure Unscrew completely the pressure reducing valve placed at the rear of the machine Supply the water on the cooling circuit Tighten the screw of the pressure reducing valve till you achieve 3 bars pressure on the manometer If the equipment is connected to a cold water network Advanced solutions for thin film deposition User s Manual Unscrew completely the relief valve placed at the rear of the machine supply the water on the cooling circuit Tighten the screw of the relief valve till you achieve 3 bars pressure on the manometer Water outlet must not exceed 1 bar to be sure the water flow will be sufficient CAUTION If water outlet pressure exceeds 1 bar please contact QUALIFLOW www jipelec com JetFirst 200 15
40. cals File name Comments To save the process e Enter a historical name up to 10 characters e Enter a comment optional e Press the key Save The historical 15 saved on the hard disk in the directory Historical They can be saved on floppy disk or in other directories by using Windows facilities It will be possible to read the historical from any directory or driver in the historical mode The name of Historical directory must not be changed because 1 15 the default directory used by the software When the process has been saved or if saving 1s not needed press key Exit to return to the main menu Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 32 CEN ipelec a division of qualiflow If a gas alarm a temperature alarm limit has occurred during the process it will be displayed on the save process form 6 3 MAINTENANCE MODE This mode 15 dedicated to maintenance operations and adjustments The password must be entered to access this mode When the MAINTENANCE mode is selected the screen displays the MAINTENANCE form Maintenance mode The maintenance mode allows e setting the lamps at a fixed power controlling some valves controlling mass flow controllers displaying controller inputs status Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 33 Jipelec p
41. e power converter 400 440 15kW 053 Fuse 660V 22x58 32 with striker PEF019 Fuse 660V 22x58 50A with striker PEF020 Susceptor for samples ww SiC coated graphite susceptor 150mm diameter for 4x2 5048 substrates SIC coated graphite susceptor 150mm diameter for 3 substrates PQS049 Advanced solutions for thin film deposition User s Manual JetFirst 200 6 __104__ EMEN E LU c l 1 4 2 1 1 www jipelec com 79 Jipelec Jipel a division of qualiflow 12 APPENDIX Advanced solutions for thin film deposition User s Manual FIG FIG FIG FIG FIG FIG FIG FIG FIG FIG FIG FIG FIG o 0 A 99 N ox Ww N mM 3 REACTOR GENERAL VIEW REACTOR ARTICULATION CONTROL FRONT PANEL REAR UTILITY PANEL VACUUM CIRCUIT GAS CIRCUIT AIR CIRCUIT WATER CIRCUIT INSTALLING THERMOCOUPLE INSTALLING QUARTZ PINS DIMENSIONS FOOTPRINT HEAT EXCHANGER JetFirst 200 www jipelec com 80 483A Ec 17 4 mr NA CIL NINE cag Uu Mn Ceo T OVerview ye M E rr rrr rer WN eet gt t C QD C QD CO K O HUM Q QD 558220 4 Sduo7 JetFirst 200 version
42. e recipe First step Step is same Delete step Display Click on Next step to go to the next step and key previous step to go to the previous step It is possible to insert or delete a step by using corresponding keys When a step is inserted the following steps will have their step number increased by 1 and a new step with all parameters equal to zero 15 inserted step 30 15 deleted When a step is deleted the next step takes its number and all the followings have a step number decreased by 1 When pressing one of the keys Next step Previous step Insert step or Exit the parameters of the displayed step are automatically saved Advanced solutions for thin film deposition c I TI com User s Manual JetFirst 200 22 Jipelec a division of qualiflow 6 1 2 Create a recipe Each recipe has a name and several parameters An associated calibration table comment e Fifty steps When creating a new recipe some parameters have to be entered and others are optional Non optional parameters are e Recipe name e Calibration table name Create a new recipe Select New recipe The screen will erase the old parameters and place the cursor on the recipe name Icon in the upper left side of the tool bar e Enter recipe name Select a calibration table in list e Enter others parameters if needed they are optional e Save the recipe key Save rec
43. e up to 50 steps and it 1s possible to store many recipes in the system the limitation 1s the memory available on the hard disk When the EDIT mode is selected the screen displays the recipe programming screen D APIMS Pims 441 Quantum V1 0 DATA thirec Mew Load Recipe Temperatu m Li i 26 iu Mext Step is same Delete step Ne sccm Display 02 seer i qom IgE 0 k CCm uple control Advanced solutions for thin film deposition www jipelec com User s Manual JetFirst 200 21 es w a division of qualiflow Each recipe is made of e Aname up to 10 characters e associated calibration table to be chosen according to the sample to process e Acomment e Fifty steps First the operator must create a recipe and then can enter the parameters for the different steps and the screen displays the programming parameters screen For each step the operator can select Temperature dwell or ramp e Duration of step Temperature control mode not vacuum and purge valves e To set temperature alarm limit e To set the gas flow alarm limit e Gas line mass flow controller setpoint 6 1 1 Managing the recipe Selecting options To select options use the mouse and click with the left button Click on to change the status of the option Click on once more to return to previous status Exploring th
44. el a division of qualiflow 6 3 1 Manual heating The manual heating mode allows powering the lamps at a fixed setpoint Power setpoint During manual heating the screen displays the calibration table which is loaded in the controller Temperature from pyrometer according to calibration table Temperature from Temperature from TC2 Power feedback from system When manual heating mode 15 selected the system closes the chamber and sets cooling The manual heating mode enables the user to turn the lamps on at a specific set point Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 34 Jipelec a division of qualiflow When this mode is selected the power switch 15 thrown if the water flows are sufficient The system closes the chamber and activates the cooling process In this mode the user can test the heating in power or temperature control mode 2 possibilities e to go to power mode the user selects power mode and enters a set point between 0 and 100 96 e in temperature control mode the user enters a temperature set point between 0 and 1000 C The power is balanced via the compensation table displayed It can be selected when a recipe 15 downloaded with the appropriate table in process mode It is not necessary to launch the process The pyrometer 15 calibrated in accordance with the calibration table displayed To select
45. emperature can reach high level and damage or destroy the sample At 100 a silicon wafer will melt in a few seconds Tenth This mode allows counting down step duration 10 times faster Example if duration 15 15 s the actual step duration will be 1 5 s Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 25 Jipelec a division of qualiflow TC Thermocouple or Pyrometer control al ve This mode allows choosing the sensor for the temperature control mode thermocouple or pyrometer The thermocouple is used for low temperature processes and to perform the pyrometer calibration The thermocouple cannot be used with active gases H2 because they reduce its lifetime The pyrometer is usually used for most of the processes During process the system will display the temperature from the control sensor Gas flow setpoint The gas 1 2 or 3 solenoid valve allowing or not the gas to enter the chamber will open if the mass flow controller setpoint 15 different from zero The mass flow 15 set to the required value for the step Vacuum valve Close primary vacuum valve The vacuum valve can be opened at each step of a recipe for purge vacuum process If the vacuum valve is closed the gas will go out of the chamber through the exhaust line Purge valve The purge valve can be ope
46. er s Manual www jipelec com JetFirst 200 72 Jipe a division of qualiflow 8 5 CHANGING TYPE OF PYROMETER HT lt gt BT See fig 1 and 11 in appendix and below for pyrometer location gt Platen Tube of sight EEES Pyrometer Procedure Disconnect all power to the system Remove the left metallic panel fixation by magnets Open the pyrometer box and disconnect its power supply Unscrew the two CHCs that supports the pyrometer Unscrew the gas connection which is mounted on the tube of sight Unscrew the tube of sight 6 CHC screws and take off the Viton O rings Mount back the joints on the new tube proper to the pyrometer used HT or BT Proceed in reverse order to mount the tube of sight and the pyrometer Once the pyrometer is changed perform the pyrometer calibration For further information see section 7 5 Advanced solutions for thin film deposition User s Manual www jipelec com JetFirst 200 13 Jipelec Jipel a division of qualiflow 8 6 CLEANING THE REACTOR Disconnect all power to the system Lift up chamber e Clean the chamber and the window with a lint free duster and alcohol or freon Never use acetone because of the Viton O ring e Pull the thermocouples and the quartz pins to clean the platen 8 7 CHANGING CONTROLLER BATTERIES CAU
47. failure The system receives no signal from the pyrometer Possible causes Pyrometer disconnected e Pyrometer failure 1149 failure 6 6 8 Temperature control failure Temperature control failure The system stops Difference between the temperature readout and the setpoint Possible causes e No wafer in the chamber e Pyrometer failure CI 134 Power Converter Boards PCB failure e Lamps supply failure 6 6 9 Primary pump failure The primary pump 15 powered off Its circuit breaker 15 open The system must be reset Possible causes e Pump motor is overloaded Circuit breaker 15 open Advanced solutions for thin film deposition User s Manual JetFirst 200 53 Jipelec Jip a division of qualiflow 7 SENSORS AND CONTROLLERS 7 1 TEMPERATURE CONTROL The Jipelec RTP systems are provided with closed loop temperature control with thermocouple or optical pyrometer The system can also be used in power mode open loop Temperature control devices One optical pyrometer for process temperature measurement e Two type thermocouples for pyrometer calibration and low temperature measurement e CT 134 Control board for fast response temperature control 7 2 CONDITIONS OF USE Thermocouples Lead free thermocouples be used from ambient temperature up to 1000 C and only with non active gases When they are used under other conditions their lifetime 1s much shorter a
48. he edge than in the center and for this reason it will be much easier to control the temperature measuring the temperature on the edge because the response time 1s much faster This 1s especially interesting when high heating rates are required The edge temperature measurement methods are e Edge pyrometer from the backside On some RTP systems only e Sheathed thermocouple in the special hole on the edge of the susceptor This allows measuring the temperature very close to the sample This method is recommended as the temperature is close to the sample temperature and the response time is short e Lead free thermocouple installed between the susceptor and the cover Infrared radiation from halogen lamps Lead free Thermocouple Sheathed Thermocouple Lead free Thermocouple Fast thermal transfer Edge pyrometer Central pyrometer stow thermal transfer Advanced solutions for thin film deposition www jipelec com User s Manual JetFirst 200 55 Jipelec Jip a division of qualiflow 7 3 1 How to reduce the overshoot A better temperature control method as described above can reduce the overshoot as the control system may have a better response time For example a sheathed thermocouple installed in the hole on the edge of the susceptor will have a much shorter response time than a lead free thermocouple installed in the backside and center of the susceptor because here the thermal exchanges are much faster
49. he temperature range The lamp array upper flange and quartz window are mounted in a rotating top lid giving full access to the chamber for easy loading and unloading of the wafers Silicon carbide coated graphite susceptors are available for processing of compound semiconductors and small samples JetFirst 200 version is specially dedicated to processes using susceptors Spare chambers can be provided upon request to avoid cross contamination if several processes have to be performed in the same equipment The PIMS PC control allows full process Applications Annealing for silicon and compound semiconductor wafers Rapid Thermal Oxidation e RTN Rapid Thermal Nitridation RID Rapid Thermal Diffusion from spin on dopant e Crystallization Contact Alloying e And Advanced solutions for thin film deposition www JIpelec com User s Manual JetFirst 200 3 a division of qualiflow JetFirst 200 www jipelec com User s Manual JetFirst 200 4 Jipe a division of qualiflow Specifications Features Number of lamps Number of zones Max Substrate diameter Purge gas line Process gas lines with MFC Temperature range Width mm Depth mm Height mm Weight Kg Max power Control panel See fig 3 appendix for front face representation Including ON OFF push buttons Alarm light EMERGENCY STOP button Electrical part Including
50. ic pressure Advanced solutions for thin film deposition www jipelec com User s Manual JetFirst 200 36 Jipelec Jipele a division of qualiflow 6 3 3 Gases control This mode allows having a direct control on the mass flow controllers Gases manual control This mode enables the user to directly control gas mass flow regulators The gas flows are displayed on bar graphs and the user can read the values The line gas valve opens if the line mass flow controller setpoint is not null The gas vacuum valve is open whilst the chamber remains closed The gases are pumped through the primary pump Just enter a setpoint to activate the controller Nevertheless some gaseous mixes especially and are forbidden to prevent explosions Exit will return to the maintenance mode menu reset all setpoints and close the gas valves Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 37 lec ec a division of qualiflow 6 3 4 Inputs Outputs This option displays the inputs and outputs status of the controller Logic Inputs Outputs I www jipelec com Advanced solutions for thin film deposition User s Manual JetFirst 200 38 ipelec a division of qualiflow 6 4 PARAMETERS CAUTION Changing value of parameters may have important consequences on the behavior of the system The operat
51. ions must be carried out very carefully The parameters menu allows entering in the system The password must be entered to access to this mode When PARAMETERS mode is selected the screen displays the following form System parameters Options e Pyrometer calibration table e Thermocouple calibration table e Configuration e Language e Change password Advanced solutions for thin film deposition pee com User s Manual JetFirst 200 39 a division of qualiflow 6 4 1 Thermocouple calibration The temperature can be controlled either by the optical pyrometer or by a thermocouple The calibration tables give the temperature from the sensor in relation with the voltage To install the thermocouple see section 8 4 in this manual To calibrate the thermocouple go to section 7 6 in this manual A fully described procedure is available to perform the thermocouple calibration The calibration curve for the K thermocouple is known and it cannot be modified The equation is Temperature Voltage Volts x 130 CON Thermocouple calibration Voltage m Correction Temperature Correction 385 61548 48 ll 7 oq 5 5 59 5 me OC 5 ETIN o M
52. ipe e Ifthe recipe is not saved it is not possible to display the steps and the screen will display a message 6 1 3 Copy recipe You can create a recipe by saving an existing recipe file under a new name Use the command button Save recipe to do so Recipe Load Recipe Save Recipe Print Recipe Proceeding e Load the recipe to save with a new name e Click on Save recipe button e Enter the new name e Press OK All parameters will remain the same as in the first recipe except the name Advanced solutions for thin film deposition User s Manual JetFirst 200 www jipelec com 23 Jipe a division of qualiflow 6 1 4 Enter parameters Steps When the new recipe has been saved it 15 possible to go to enter for each step the process parameters The screen will display step 1 parameters Entering parameters The temperature may change in ramps or stay on steady steps For each step only the ending temperature 15 entered The initial temperature of the step 1s the ambient temperature for step one and it is final temperature of the previous step for others It is also possible to choose some other parameters Temperature control mode closed loop or open loop no temperature control Temperature control sensor pyrometer or thermocouple Time base 1 second or 1 10 second Gas line 1 mass flow controller setpoint Gas line 2 mass flow controller setpoint Gas line 3 ma
53. ipelec com 71 a a division of qualiflow 8 3 CHANGING THE WINDOW See fig 1 in appendix Dismantling the window Disconnect all power from the system Lift up the reactor Unscrew the CHC M5 screws Remove the chamber flange Remove the window Installing the window Check the cleaning of all the pieces otherwise clean them with alcohol Place the window on the chamber flange check there 15 the Viton O rings Lift up the reactor Connect the chamber flange with the upper flange Place the screws and tighten them carefully Do not forget to put handle axis in its hole Open the water circuit and test tightness manual mode If necessary re tighten the screw 8 4 INSTALLING THE THERMOCOUPLES See fig 9 in appendix Switch off the machine Remove the left metallic panel fixation by magnets Under the platen 15 situated 2 stainless steel feed through with Viton O ring Remove the nut the small metallic ring and the two O ring Take the thermocouple place primary the nut then the ring and finally the two O ring Place this assembly inside the feed through very carefully Push this till the welding threads touch the wafer installed on the quartz pins Screw the nut to have the tightness It is possible to readjust the thermocouple position to have a good contact with the wafer Follow the same procedure in reverse order to remove the thermocouples Advanced solutions for thin film deposition Us
54. isplays all the parameters Recipe name e Current step e Calibration table name Setpoint e Temperature from pyrometer and thermocouple e Power to the lamps e Valves status Gas flow readings On the left part of the screen a plotter monitors the curves of the setpoint temperature sensors and the power to the lamps The color of the curve is the same color as the displayed value of the parameter White Setpoint e Green Pyrometer Magenta Yellow Power to lamps Valves status indicators White the valve is not provided on this system e Red the valve 1s closed Green the valve is open The screen also displays the temperature alarm limit checking status and the temperature alarm limit message 15 the temperature which is outside the limit when this function is activated Process can be stopped at any time by using key Stop In case of gas alarm the backside of the gas flow display will be yellow flashing Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 31 Jipelec Jipele a division of qualiflow 6 2 3 Save Process At the end of the process the system 15 being cooled down for 3 minutes After this time it 15 possible to save the process monitoring as a historical file End of process Do you want to save this process 5 a DATA GSA 200 his EJ Pim 441 Quantu M histori
55. istorical to display the graphical representation of the process From the thermocouple curve note down the main thermocouple values according to each set point Historical TCOT 4 ES E 0 60 120 180 240 300 360 420 480 540 600 Time s Contract lt Expand Previous page Hest page Advanced solutions for thin film deposition Cursor step 1 m 1 0 gt mI Heading Print Exit User s Manual JetFirst 200 CARENTE www jipelec com Jipelec a division of qualiflow With this list of readout and setpoint values calculate the setpoint correction factor for each temperature as follows Setpoint Readout Current Correction 1000 New correction Readout Note An example is given for line n 12 with a setpoint temperature of 600 C 600 612 1000 20 612 The new correction factor is 86 20 66 Select thermocouple calibration from the Parameter menu Thermocouple calibration table Temperature Volkage m Temperature Voltage m Correction Line 1 RE Line 2 oNEeU 50 sd Line 3 150 Line af ab 50 afl Line 5 08 wif 83D EU 58 Line xo 10 a 1050 3 Line 7 08 sf ir nof saf wwf Line 35 15 if
56. ith a temperature of 600 C 600 605 605 1000 8 So the new correction factor is 85 8 77 As described previously for temperature setpoint values above 1000 C you have to extrapolate the last readout values www jipelec com Advanced solutions for thin film deposition User s Manual JetFirst 200 67 Jipelec Jipelec a division of qualiflow Select calibration from the Parameter menu and enter the new correction factors Pyrometer calibration table e 0 16 wafer 150 Temperature Voltage m Correction Temperature C Voltage mV Correction Line 1 cy 155 naf Line 2 40 1150 0 Line 3 150 ESE 1200 Line 4 4 gt 1250 Line 5 8 sel mm ioi si F 4058 75 Line 22 Bg Line p Line 3 4 9mm I Line 10 af Line 11 aif sy GG E Line 12 SE Line 27 F J Bg Line 13 5 50 9 Line 14 8 WD Line 15 1050 seg Mmm ff e Once the table is modified save it and exit from the parameter menu Run the process under pyrometer regulation control Save the historical as 02 Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 68 QUE lec ec a division of qualiflo
57. large edge allows reducing the edge effect on the sample and getting a good uniformity on the sample to be processed inside the box Pyrometer The system is usually provided with one optical pyrometer for high or low temperature control range depending on the application The pyrometer looks at the rear side of the substrate and only receives signal from the substrate and not from the lamps See section 7 5 for further information Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 54 lec Jipe ec a division of qualiflow 7 3 TEMPERATURE CONTROL OF SUSCEPTORS The temperature control of susceptor is more complicated than with a single wafer because the thermal system susceptor sample and cover is much more complicated and has a much bigger thermal inertia This leads to lower ramp rates for both heating and cooling and to some big overshoot when using fast heating rates Hereafter are some recommendations to improve the temperature control with a susceptor The drawing hereunder describes the heating exchanges between the lamps cover sample and susceptor e Onthe edge the lamps heat the cover from the upper side The heat is directly transferred from the cover to the susceptor Inthe middle the lamps heat the cover and then the cover heats the sample by radiation with much less power than the lamps then the sample heats the susceptor The thermal exchanges are much faster on t
58. ll alarm events that have appeared during processing Li st of alarms Date Time www jipelec com Advanced solutions for thin film deposition User s Manual JetFirst 200 50 a division of qualiflow The list of all alarms 15 displayed on this page The time date and alarm type are specified The background color of each line depends on the type of alarm e red alarms that require system reset yellow for alarms that require the process to be stopped The alarms may be displayed over several pages Use the Previous page and Next page keys to view them Use Delete key to reset the alarm event list Use Print key to print alarm events list Exit will return to historical menu 6 6 SAFETY FEATURES During process the system checks Water flow Air pressure e Fan unit e Furnace temperature e Lamps filaments e Thermocouple e Pyrometer e Temperature control e Primary pump optional If any utilization condition 15 not fulfilled the system is protected by an alarm and safeties The screen displays the failure origin The alarm relay is activated Press Reset 24 to stop alarm safety cycle starts Follow instructions displayed on screen to unload the wafer Prior to any new process solve the problem 6 6 1 Water failure The water flow sensors detects a low flow The system stops Possible causes e The water supply
59. low for each asesinar Dt RERO FEVER ONUS IV ad ER EXE M NUES UIS SUP D I 15 4 6 2 LUPITAELIWZIAUTEUHAUEE 15 4 6 3 Adjusting the water flow controller eese eese eene eene rn nnne nennen nnns 16 4 6 4 Equilibrate the current in the 16 4 6 5 Adjustment of the DyrOmeleP eWMIsSIVIly 17 32 19 5 1 BEFORESTART UP I 19 922 19 6 SOFTWARE CONTROL PIMS 20 Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 a ec a division of qualiflow Ol lc nae 21 6 1 1 Manar e TTC IDEE 22 6 1 2 EET qo 23 6 1 3 SPURS C 23 6 1 4 24 1 5 Display a TeC PE 22 6 1 6 TEN 28 6 1 7 E uuu a nun E E 28 NER sna gst cu essa ae eee 29 6 2 1 Download TOI DOS costa 29 6 2 2 EPO CCS STOIC 31 6 2 3 32 63 MAWNTENANCE aaa nana 33 6 3 1 Ma
60. m limit is only active if it has been activated for the step see Recipe mode When an alarm 15 engaged a yellow light flashes on the process screen At the end of the process a message comes up on the screen to remind the operator that an alarm was engaged during the process Note the gas alarm limit does not stop the process Capacitance manometer range This menu option allows the user modifying the capacitance manometer range when the latter has been changed It is also possible to select an alarm limit for each gas line order to check during the process that the flow remains inside this limit The gas flow alarm limit can be set from 0 to 20 If the gas flow alarm limit 15 activated for a step and if the difference between the setpoint and gas flow 15 over the alarm limit the gas name will flash in yellow color The gas flow alarm limit must be activated for each step In this mode the operator can also determine the pressure unit and set the Demonstration mode on IMPORTANT NOTICE When gas name is entered the system will set the corresponding valve status indicator It is important to set one gas name for each gas line actually provided on the system Advanced solutions for thin film deposition www JIpelec com User s Manual JetFirst 200 46 E pelec w a division of qualiflow Temperature alarm limit The temperature alarm limit can be set from 0 to 50 in the parameters configuratio
61. n each power converter board Measure the voltage on the lamps on each zone and adjust the corresponding potentiometer to have 22Volts 220V converter or 40Volts 400V converter Repeat the procedure for 20 to get 44Volts 220V converter and 80Volts 400V converter Switch off the system Re install the metallic panel and the covers www jipelec com JetFirst 200 16 Jipelec Jipele a division of qualiflow 4 6 5 Adjustment of the pyrometer emissivity The JetFirst system can be equipped with pyrometers from different suppliers Whatever the pyrometer IMPAC or IRCON model the adjustment of the pyrometer emissivity needs to be done physically on the device The difference appears on the way to do it For further explanations on pyrometer settings refer to IRCON or IMPAC user s manual provided with your system IRCON pyrometer This pyrometer has a cover at the bottom Unscrew it and you will see the buttons that will let you setting the emissivity of the pyrometer EMISSIVITY Hange 10 to 99 Two digit press to change digital switch used to adjust the electronic circuits to match the emissivity to the material being measured mami iiti Response Time Range 0 15 t 10 seconds ae Potentiometer used to adjust the electronics circuits for the hd most suitable response to temperature changes Use low k k setting to track rapid changes Use highe
62. n mode If the temperature alarm limit 1s activated for a step and if the difference between the setpoint and the temperature measured is over the temperature alarm limit the system will display an alarm message The temperature alarm limit must be activated for each step The configuration mode also allows configuring the software in order to stop the system if there is temperature alarm limit Example Temperature alarm limit 20 C 5 700 Temperature control Pyrometer A message will come up if the pyrometer temperature is greater than 720 C or less than 680 C The temperature alarm limit does not stop the process When the process 15 complete a message appears to remind the operator that an alarm was engaged during the process It 15 possible to stop the process as soon as the temperature alarm limit occurs Just select temperature alarm limit stops process Opening temperature During process the chamber 15 locked for safety reasons gas in the chamber hot samples The chamber remains closed during cooling sequence until the temperature 15 upper the opening temperature The default value for the opening temperature 15 80 It can be set to any value between 0 and 9999 Pressure unit The operator can chose to display the pressure in Torr or mbar Just select the right option in the configuration mode Demo mode This mode allows running the software without running the JetFirst system It can
63. nd in some cases it 15 impossible to use them reducing atmosphere for example Sheathed thermocouples can be supplied for special applications The sheathed thermocouples are strongly recommended for temperature control of susceptors The lifetime of the thermocouple is really reduced in reducing atmosphere if you use a lead free thermocouple as the welding has some oxide that protects it and that will be removed in reducing atmosphere The lifetime can be as short as few process cycles If you use a sheathed thermocouple it has an Inconel sheath with good resistance to different type of gas atmospheres For the susceptor temperature control use a sheathed thermocouple installed in the small hole of the thermocouple on the edge of the susceptor and even more if you have a reducing atmosphere We have performed some pyrometer control in some cases First case 15 control of a sample on a susceptor but without cover and if the ramp rate 15 not too high We also have a system with a pyrometer on the edge JetFirst 150P in order to allow pyrometer temperature control with the susceptor Anyway for most of the applications with susceptors use the sheathed type thermocouples The central TC on backside will limit the temperature control capabilities because of the thermal inertia of the system and the response time The temperature uniformity is another issue and cannot be measured by thermocouples installed outside the susceptor The susceptor with a
64. ned at each step of a recipe for purge or vacuum process If the purge valve 15 closed the gas will go out of the chamber through the exhaust line To enter numerical values use the keyboard If the value is out of range the screen will display a message with the correct range for the parameter Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 26 Jipelec a division of qualiflow Temperature alarm limit Temperature alarm limit The temperature alarm limit can be set from 0 to 50 the parameters configuration mode If the temperature alarm limit 1s activated for a step and if the difference between the setpoint and the temperature from the temperature sensor is over the temperature alarm limit the system will display an alarm message The temperature alarm limit must be activated for each step The configuration mode also allows configuring the software in order to stop the system if there is a temperature alarm limit Gas alarm limit Gas alarm limit The gas alarm limit can be set from 0 to 20 the parameters configuration mode If the gas flow alarm limit 15 activated for a step and if the difference between the setpoint and gas flow 15 over the alarm limit the gas name will flashing in yellow color The gas flow alarm limit must be activated for each step CAUTION During the different recipes the user take care
65. ng the system by making it level This is very important during process to provide a good and uniform gas injection Use a standard vertical level and use the threaded feet of the system to make it level 4 2 ELECTRICITY JetFirst 200 3x 400V N GND 63 kW 50 Hz 90 A 3 x 220V GND 63 kW 60 Hz 165 A The Jipelec JetFirst is provided with a circuit breaker to protect the system The user must use a circuit breaker to protect the mains power cable according to the following table Voltage Circuit breaker JetFirst 200 3 x 400V N GND 100 A 5 x 35 Advanced solutions for thin film deposition www jipelec com User s Manual JetFirst 200 12 Jipelec a division of 3 x 220V GND 250A 4 x 70 Use the big gland to connect the mains power cable to system terminals Advanced solutions for thin film deposition www ipelec com User s Manual JetFirst 200 13 _ Jipe lec w a division of qualiflow 4 3 LAMP VENTILATION FAN See fig 7 In appendix for air circuit The rotating direction of lamp ventilation fan must be check before running any process The fan is controlled by the PIMS and can be started using manual mode e Flow 300 l min for a sufficient air cooling of the lamps e Connection to fan 3160 Exhaust pipe 2100 or 0160 with heat exchanger 4 4 WATER CIRCUIT Features Water inlet outlet Rubber pipe 216 Water flow 20 lit min
66. nge is 0 10V it will measure 1300 C for a voltage of 10000mV theorical values As the thermocouple doesn t measure temperature above 1000 C you have to do extrapolation of the temperature curve for setpoint values up to 1300 C Temperature setpoint value 9C Voltage mV Voltage value type Extrapolation mV 5800 Readout value 0 1000 6099 1050 6398 Extrapolated value Advanced solutions for thin film deposition www JIpelec com User s Manual JetFirst 200 65 lec Jipe ec a division of qualiflow Select calibration from the Parameter menu and choose the HT150 table Fill the voltage column with the values picked up from the historical graphics and the extrapolated values for temperature setpoint values above 1000 C calibration table Temperature C Voltage m Correction Temperature Line 1 350 1823 158 Line 15 1100 Line 2 400 1930 Line 17 1150 Line 3 451 2400 Line 18 1200 Line 4 500 2960 Line 18 1250 Line 5 551 3383 Line 20 1300 Line 601 3753 Line 21 Line 651 4074 Line 22 Line 8 rol 434 Line 23 Line 3 751 4527 Line 24 Line 10 B 4325 Line 25 Line 11 851 5245 Line 12 900 5556 Line 27 Line 13 950 5800 Line 28 Line 14 333 60595 Line 29 Line 15 1050 5 338 Line 30 se a 100 105 d 109 Line 26 e Save the pyrometer calibr
67. nized in menus and sub menus EI JIPELEC 1 5 01 00 00 xl 10 05 2004 Inputs Outputs Parameters Maintenance mode Historicals Parameters Communications The main menu offers options CREATE EDIT RECIPES to create modify display or delete RUN PROCESS to run process MAINTENANCE MODE for manual control of the system HISTORICAL to display saved processed and alarm events e PARAMETERS for calibrations and configuration parameters EXIT to return to WINDOWS and to terminal control Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 20 Jipelec a division of qualiflow The operator needs to enter a password to access to RECIPES MAINTENANCE and CONFIGURATION modes At delivery the password is When this password has been entered the system 15 in engineering mode and a message 15 displayed on the main menu form The system will remain under engineering mode until the operator will exit from the PIMS software When the system is in the engineering mode the operator can access to all menu options If the password is a or A the PIMS software will automatically starts in engineering mode For any other password the operator will need to enter the password to go in the engineering mode 6 1 CREATE EDIT RECIPES This mode is for creating modifying deleting or displaying recipes Each recipe can hav
68. nual Qm 34 6 3 2 n fnere 36 6 3 3 ua sss 37 6 3 4 E au EE 38 o MEE IW vids t 39 6 4 1 RC 40 6 4 2 VOM OT EET 41 6 4 3 Temperature 43 6 4 4 TII N A EA 45 6 4 5 i 48 6 4 6 OAS 48 x 49 6 5 1 Available functionality 49 6 5 2 I a an kaa A 50 51 1 170072407 0017 u iu N 51 2 qu au 52 6 6 3 fl i 52 6 6 4 Tun Q uu elit 52 5 52 6 6 6 sia 52 6 6 7 J I E AEE em 35 6 6 8 Temperature Crol EE 53 6 6 9 Pi PO E qaw 53 SENSORSANDCONIROLLERS u u mua i a assasi 54 FN MENS em 54 2 54 7 3 TEMPERATURE CONTROL OF SUSC
69. of susceptors can be extended by preventing any kind of metal contamination of the SiC coating Careful handling will extend the lifetime of the susceptors Contact Qualiflow for further information 10 8 USE OF SUSCEPTORS IN PROCESS ATMOSPHERE Uncoated graphite e In reducing atmosphere up to 2500 C In oxidizing atmosphere up to 400 C SiC coated graphite In reducing or inert atmosphere up to 1600 C e In oxidizing atmosphere up to 1800 C Advanced solutions for thin film deposition www jipelec com User s Manual JetFirst 200 78 a division of 11 RECOMMENDED SPARE PARTS FOR JETFIRST 200 Description Part number Quantity Quartz window 2292 x 10 Set of 3 quartz pins for 6 wafer 15 Set of 3 outer quartz pins H 20 5 Sao3quupmH ROS U Sao3owrqumzpmH 2 Po 1 _ Thermocouple 1g 76 10 with connector 2 Thermocouple 1g 99735 with connector a Proa 2 _ Viton O ring forchamber Viton O Ring for Quartz window merov Viton O ring for upper flange mv 1 Viton O ring for pyrometer window Tubular halogen lamp 6000W 480V 16 window for optical pyrometer Set of 10 Viton O rings for thermocouple feedthroughs Half electronic bus Interface for 3 mass flow controllers Pyrometer thermocouple electronic board Temperature control board Electronics DC supply Gas filter 5 SW 1 to 4 3x400V JetFirst Doubl
70. ol Up to 8 Ambient to 1200 C Ambient to 1000 C 400 C to 1300 C 150 C to 1000 C Multistep ramp or dwell heat up Vacuum Designed to connect a pumping unit to the reactor System 15 provided with a vacuum valve Advanced solutions for thin film deposition User s Manual JetFirst 200 www jipelec com Jipelec Jipelec a division of qualiflow 3 SYSTEM DESCRIPTION 3 1 FURNACE See fig 1 and 2 in appendix for general overview and fig 11 and 12 for dimensions and footprint Two configurations are available e Stainless steel manufacturing Aluminum manufacturing The furnace is located in the upper part of the system It is installed in a rotating top lid with the upper part of the process chamber The furnace can rotate on the backside to allow sample loading and full access to the process chamber The 16 tubular infrared heating lamps are installed inside a water cooled and mirror polished aluminum reflector Two tubes supporting the lamps supplied with water cool down the lamps furnace On its upper side you find electrical connections for lamps and safety heat sensor The stainless steel box of the furnace 15 cooled down by a fan located in the lower part of the system It evacuates the hot air through the exhaust pipe with an output situated at the back of the system Special power converters had been developed by Qualiflow to control the halogen lamps in order to provide accurate po
71. r setting to get smooth average temperatura display BASIC 4 Model No Block D 0 IMPAC pyrometer This pyrometer has a cover at the bottom set with two CHC screws Unscrew them and you will have the following configuration that will let you setting the emissivity of the pyrometer Be careful when you take the cover out of the pyrometer as the cover 15 connected to 10 pin plug To set the emissivity lt Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 17 Jipe a division of qualiflow Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 18 Jipelec a division of qualiflow Procedure To perform the adjustment enter the Manual Heating mode see section Erreur Source du renvoi introuvable Heat up to 900 C using thermocouple readout e Pick up pyrometer value mV at 900 C and then adjust the emissivity as described in the pyrometer user s manual Standard values These values are given below as an example only Nevertheless the final actual setting should keep close from these values High Temperature Low Temperature pyrometer pyrometer 5 UTILISATION 5 1 BEFORE START UP CAUTION Before start up read the whole user s manual Procedure e Before start up read the whole user s manual e Check all connections Electricity gases air
72. re Electronics Qualiflow made Power Converters Boards PCBs which are designed for e Electronics supply CI 155 Temperature control CI 134 Temperature transformer card CI 149 Advanced solutions for thin film deposition User s Manual JetFirst 200 www jipelec com Jipelec Jipelec a division of qualiflow See the Technical Manual for information about the electrical configuration 3 9 DIMENSIONS AND FOOTPRINT The Jipelec JetFirst system has been designed to get the most appropriate dimensions and footprint in order to facilitate the operator s work and position e Dimensions 1050 L x 820 W x 1500 H See Fig 11 and 12 in appendix 3 10 OPTIONAL FEATURE The system can be equipped with a heat exchanger to cool down the lamps within a closed loop air circuit as required in a clean room environment See fig 7 11 and 13 in appendix 4 INSTALLATION PROCEDURE 4 1 HANDLING AND INSTALLATION SYSTEM IMPORTANT NOTE The JetFirst system must be installed on a stable flat surface otherwise the frame of the system can be warped and lead to reactor leaks The vacuum pump must be installed in a way that avoid vibration from the JetFirst The system is mounted on four bevel wheels for easy moving Once the JetFirst at the required position in your room use the threaded feet to lift the machine so the wheel don t touch the ground Your system is now fixed The last step consist in stabilizi
73. re often visible by a gray or yellow discoloration around a hardly visible hole In virtually all cases the presence of metals 15 responsible for the creation of the pinholes As an example the use of stainless steel tweezers for loading and unloading susceptors leads to a rapid formation of holes on the places where the SiC has been touched Metallic residue or particles will react with and form a product that will react with the SiC OVER ETCHING Corrosion of the SiC only takes place during the cleaning step In the initial stage of the cleaning step the whole susceptor 15 covered with Silicon The recesses are covered with the silicon layer from the pre coat step The first part of the SiC coating that becomes exposed 15 the wafer recess During the rest of the cleaning step there 15 no layer of S1 over the recess This 15 why pinholes are usually first observed in the recess Whenever there 15 silicon present on the susceptor the mixture will etch the silicon forming silicon chlorides Formation of these chlorides leads to a reaction equilibrium which means that the etch activity of on silicon free parts is reduced When over etching pure reacts strongly with the weak spots in the SiC coating Reducing the over etch time 15 essential in improving the lifetime of susceptors PREVENTION OF PINHOLES BY THE USER Unpacking e Take the susceptor in the sealed bag into the clean room Carefully open do
74. re supplied with a higher voltage 400V compared to 200 V for the other zones Therefore the power ratio 15 different Enter the parameters and save the values Save IMPORTANT For the last line the power value must always be activated for 1000 Otherwise the heating may be stopped when too much power is requested Example Power 2000 1000 900 2000 1000 1500 1000 1000 1500 From 1 to 25 the coefficients from line 1 will be applied For example if the system gives 2090 set point line 1 15 selected Remember that the zone coefficient 15 determined in relation to 1000 1 200V for 1000900 We therefore supply zone 1 with 2000 the set point multiplied by two zone 2 with 1000 the same as the set point and zone 3 with 900 9 10 of the set point Zones 4 15 same as zone 1 If we calculate in terms of voltage 2096 of 200 V equals 40 V We will therefore supply zone 1 with 80V zone 2 with 40 V and zone 3 with 36 V Zones 4 15 handled in the same way Other available functions Save as this key 15 used to save a compensation table under a new name e How to save Press Save as enter a new name press Save e Delete Deletes a compensation table e Print Parameters of the current compensation table are sent to printer Exit Used to return to the parameters menu Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 44 a division of
75. rometer the voltage is function of the temperature and of the emissivity of the substrate So the calibration curve depends on substrate materials and on the layers on its surface The software allows entering several calibration tables that may be used to process substrates of different nature To calibrate the pyrometer go to section Erreur Source du renvoi introuvable in this manual A fully described procedure is available to perform the pyrometer calibration When the Pyrometer calibration mode is selected the screen displays the Pyrometer calibration form Fyrometer calibration C Voltage mV Correction Temperature Voltage mw Correction T F i T T 0 8E mE oei oi SN 9 B ETUN ECUN E ol 400 1 1 EMEN 500 1 ol k a qp 171 EMEN ol 90 k 1 a om New table Delete Table Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 41 SON pelec w a division of qualiflow Each calibration table is made of 30 temperature voltage couples The calibration curve will be made by interpolation between 2 couples of values The operator
76. shock hazard This label prevents the user of eventual electrical hazards Mechanical pinch hazard This label prevents the user of eventual mechanical hazards Toxic and or corrosive gases and chemicals This label warns the user from the danger and lethal risks involved when using toxic or corrosive chemicals 1 3 2 Personnel qualifications installing or maintenance operations and procedures described in this manual may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by JIPLELEC Technical Support Department Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 2 Jipelec Jipelec a division of qualiflow 2 SYSTEM OVERVIEW 2 1 GENERAL OVERVIEW The Jipelec JetFirst has been specially developed to meet the requirements of small scale production universities and research laboratories The high reliability and high performance characteristics of the JetFirst enable small scale production up to 5000 wafers per year The JetFirst systems are available with process chambers for samples up to 4 6 and 8 substrate diameter 100mm 150mm and 200mm JetFirst 100 and 150 are top bench systems A 150 P version production dedicated version and the JetFirst 200 are bigger and installed on the floor The temperature measurement and the control system provide accurate and repeatable thermal control across t
77. ss flow controller setpoint To open or not the purge valve To open of not the vacuum valve To activate the temperature alarm limit To activate the gas flow alarm limit When no temperature control mode is chosen the system will run in power mode without any feedback from temperature sensors Power setpoint can be set from 0 to 100 CAUTION When using power mode there is no temperature control and you may damage your samples or melt them in a few seconds if power is too high The ranges for parameters are Advanced solutions for thin film deposition User s Manual Temperature 0 1300 C Time 0 9999 s Gas setpoint up to MFC full range www jipelec com JetFirst 200 24 Jipelec a division of qualiflow Temperature Temperature C During process temperature can be ramping or dwell The initial temperature 15 the final temperature of the previous step or ambient temperature for first step The step s final temperature 15 the displayed temperature Time Step duration from 0 to 9999 seconds It is possible to reduce the step time base by a factor of ten see parameter Tenth Temperature control Valve In standard mode the system 15 in temperature control mode It is possible to choose the open loop mode without temperature select the option NO TEMPERATURE CONTROL CAUTION Using the open loop mode t
78. st be downloaded once more If the recipe to process 1s different from the last recipe downloaded then downloading must be done before operation To download a recipe Selectarecipe to download in the list with the mouse Select key Download The associated calibration tables are also downloaded It is possible to return to the main menu by using key Exit When downloading has been performed press key Start Process When Start Process 15 selected once more the screen will display the process form and process starts immediately Process overview Re cipe Calibration Calibration BT125 jipelec tep tima 215 tep resttimae ds Compensation FULL full time 14 40 Rec resttime 828 Furnace Thermocouple control TI 100 setpoint 430 Purameter C 90 2 TC2 C 80 Power X rv alves 3 O Primary vacuum valve 10 O Purge valve 0 00 00 05 00 10 00 During the process the chamber is locked and its remains locked until the temperature has reached the opening threshold see configuration mode Advanced solutions for thin film deposition a ra www JIpelec com iii User s Manual JetFirst 200 30 a division of qualiflow 6 2 2 Process monitorin During process the screen d
79. tap is off e The water pressure is not sufficient The water flow sensor is not well adjusted e A water leak In the circuit Advanced solutions for thin film deposition www JIpelec com User s Manual JetFirst 200 51 Jipelec Jipel a division of qualiflow 6 6 2 Air failure The air pressure switch detects an air failure and stops the system Possible causes e Nocompressed air supply Compressed air pressure 15 below 6 bars The pressure switch 15 not well adjusted 6 6 3 Fan failure The fan circuit breaker has been cut off The Initialization process must be launched Possible causes e Motor is overloaded e Circuit breaker has been cut off 6 6 4 Furnace overheating Temperature switch on furnace has detected an overheating Possible causes Water flow is not sufficient Too long processes 6 6 5 Lamp failure The controller detects a bad balance between the current of the four zones The system stops Possible causes One lamp filament is broken One power fuse is burned One power block does not work 6 6 6 TC failure Thermocouple failure The system stops Using thermocouple temperature control the thermocouple is broken Change either the thermocouple or the temperature control mode Advanced solutions for thin film deposition www JIpelec com User s Manual JetFirst 200 52 7 n lec w a division of qualiflow 6 6 7 Pyrometer
80. ted to the CONTROL cable and the other one to the READ cable If you use a lead free thermocouple or a sheathed Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 56 Jipelec a division of qualiflow one should not affect the setpoint correction procedure The adjustment might be a little bit different as the thermocouples are not used exactly in the same conditions and at the same position For thermocouple the software only allows entering and saving the setpoint correction for different levels of temperature See section 7 6 below for a full explanation of the calibration procedure 7 4 2 Enter thermocouple calibration table Select the thermocouple calibration table in the parameter mode m Thermocouple calibration Thermocouple calibration Voltage m Correction Temperature Voltage mv Correction 385 8007 6154 48 ll ee ETEN of off NEN xg esg s m 550 oh ie 520 oH 590 oMO NUEN so 5 9 cm B of o lt i co oM EUN og cp W The operator must calculate the percentage of error from 0 to 200 between the set point and the readout for each temperature dwell of the process historical then enter this v
81. ter or high temperature pyrometer Each device has a specific recipe to run calibration For thermocouple and low temperature pyrometer BT the recipe is set with temperature ranged from 09 to 1000 C with even steps of 50 C For the high temperature pyrometer the furnace needs to be heated to 450 C before starting any measurement e First step at 30 of power e Second step 30sec at 30 of power e Then heating from 450 C up to 1000 C with even steps of 50 C The recipe 15 limited to 1000 C in the first time in order to be able to use the thermocouple for regulation Once the pyrometer is calibrated at 1000 C take the thermocouple probe out of the furnace and perform pyrometer calibration up to 1200 C Advanced solutions for thin film deposition User s Manual JetFirst 200 www jipelec com 60 QUE lec ec a division of qualiflow 7 6 3 Proceeding Temperature C e Install a substrate in the chamber and the thermocouple in the center as described in the manual in section 8 4 Check there is contact between thermocouple and wafer Connect thermocouple to controller cable TC1 e Download the existing recipe called tc The temperature is ranged with steps of 50 under thermocouple regulation control see section 6 2 for recipe downloading e Run the process and save the process historical as TC01 see section 6 2 3 Goto Historical menu and click on H
82. th the use of selected and reliable equipments QUALIFLOW gives a 12 months warranty on the equipment from date of shipment Consumables are not covered by the warranty quartz graphite or SiC coated graphite parts thermocouples lamps cooling fluids The warranty 15 valid only if the equipment has been used according to QUALIFLOW instructions 1 2 2 Liability and Warranty obligations of J I P ELEC under this warranty shall cease if the end user or third parties Disregard the information contained in the manuals provided with JetFirst 200 Use the product in a non conforming manner Make any kind of changes modifications alterations use of other gases than those specified by Qualiflow for this JetFirst machine Use the product with accessories not listed in the corresponding product documentation Reasonable care must be used to avoid hazards QUALIFLOW expressly disclaims responsibility for loss or damage caused by use of its products other than In accordance with proper operating procedures Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 1 a division of qualiflow 1 3 SAFETY INSTRUCTIONS 1 3 1 User s manual pictogram definitions Burn hazard while touching hot parts This label prevents the user from eventual burning hazards Damage hazard to the system This label prevents the user from eventual hazards that can damage the system Electrical
83. that One step which use H2 injection has to follow with one pump step 30 sec a purge step 30 sec or a new H2 injection and not with a O2 injection One step which use O2 injection has to follow with one pump step 30 sec a purge step 30 sec or a new O2 injection and not with a H2 injection The user must connect a pump the pumping time must be less than 30 seconds to reach the pressure of 1 Torr and the gas purge flow must be 15 l min 6 1 5 Display a recipe Choose the EDIT RECIPES mode Select the recipe with arrow keys or use the find option Then you can display the steps of the recipe by using keys step and then next step and previous to go to a step to an other The First step key will display step 1 Exit will return to the menu Advanced solutions for thin film deposition ee COM User s Manual JetFirst 200 27 a division of command of the center toolbar allows to get a graphic representation of the recipe Click on Display recipe the following window appears JIPELEC PIMS Display recipe Cursor 244 s Page 1 3 385 sccm sccm 0 N2 H2 sccm 0 LI LI m LI LI 01 00 02 00 03 00 04 00 05 00 6 1 6 Modify a recipe Choose and select the recipe following procedure described above in S 6 2 1 If you change comments or another parameter of the first page recipe you must save it by pressing key save If you need
84. w Open the 02 historical file to check the accuracy of the pyrometer calibration Time Pressure Historical PYRO2 9619 torr a sccm 156 omod Thermocouple Temperature C Pyrometer im 59 Pyrometer unit 0 60 120 180 240 300 360 420 480 540 60 cp Time s x e Expand Hm Previous Sc Hest page an t Cursor step 10 om Heading Frint Exit 5 Note The difference between setpoint and pyrometer temperature values must not exceed 2 C You can see in the above historical graphic that the TC1 readout value matches the setpoint value e If values are still out of range run a process and calibrate pyrometer again www jipelec com Advanced solutions for thin film deposition User s Manual JetFirst 200 69 Jipelec Jipelec a division of qualiflow 8 MAINTENANCE 8 1 PERIODICITY OF MAINTENANCE OPERATION Respect the periodicity of maintenance operations The periodicity of operation is strongly linked with process applications and must be adapted to the application The metallic housing protects the operator form contacts with powered parts During maintenance or adjustments the system must be powered off CAUTION Some parts inside the system may remain powered up These operations must be carried out only by factory trained technicians Feel free
85. wer control and fast response time It is possible to lift up the lamp furnace thanks to a hinge useful for maintenance operations For servicing the furnace 15 fully accessible once you remove the white metallic box 3 2 REACTOR See fig 1 and 2 in appendix for general overview Halogen lamps Reflector Quartz window Process chamber Substrate Platen Thermocouple Pyrometer Two configurations are available e Stainless steel reactor e Aluminum reactor The process chamber is a cold wall chamber with water cooled and mirror polished metal walls An infrared window stanched with Viton O ring separates the chamber from the furnace Advanced solutions for thin film deposition www Jipelec com User s Manual JetFirst 200 7 Jipelec Jipelec a division of qualiflow Infrared halogen lamps heat the substrate through a quartz window located on the topside of the process chamber Two gas jacks permit to open manually the reactor and to load the wafer on the platen easily Three beveled quartz pins installed in the platen hold the sample They can be change in a minute to switch to other size of sample Gas injection The gas inlets are located in the platen or below the quartz window depending on the version Gas is injected under the wafer It circulates around the wafer and the exhaust 1s done through the flexible pipe There is no risk of contamination by the reaction chamber because of the water cooled walls

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