RC3 Motor User Manual
Contents
1. 9 2 PREPARATION AND nnmnnn 10 2 1 eae 10 2 2 Bonding the Driving Plate to the 1 10 2 2 1 Mounting TNeINOIOR 13 2 2 2 Electrical Connection 13 223 13 PAA Motor RUN 14 32 15 3 1 ee 15 3 2 Specification Parameters 17 S2 Specificato ial aan 17 3 22 Materials Comprising the 440 0 18 3 23 Performance Envelope 19 3 3 Dimensions Layout 21 Nanomotion Ltd Page 7 of 21 Introduction 1 Introduction 1 1 About the Motor RC3 motors are high precision ceramic motors Designed and manufactured by Nanomotion Ltd these motors combine unlimited stroke with high resolution all in a compact package RC3 motors provide a linear response to the input voltage The2. Generic Emission Standards Class A for radiated emission and Class B for conducted emission EN 50082 2 1995 Generic Immunity Standard NOTE Standard Nanomotion motors comply with CE regulations Although the RC3 motors have the same internal design as the standard motors they are supplied as components for the vacuum system and therefore CE conformity in both EMI and Safety must be implemented as part of the UHV system design Page 4 of 21 Preface Warranty Nanomotion Ltd Preface and Warranty This Installation Manual is designed to help the reader install and operate the RC3 Piezo ceramic Motor This manual assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical dimensions as well as the mechanical and electrical installation procedures for these motors The motors are covered by warranty for a period of twelve months from the date of invoice The following voids the warranty Misuse or incorrect mounting incorrect electrical connections removal of motor cover or of serial number modification of parts and any other use that is not according to the cautions and warnings provided in this guide Liability for replacement will be determined after inspection of any defective item by Nanomotion or an approved agent Page 5 of 21 Definition of Terms and Warnings Definition of Terms
3. limiting the generality of the preceding sentence NM shall not be liable to the Purchaser for personal injury or property damages Nanomotion Ltd Page 2 of 21 Patent Information Preface and Warranty Nanomotion products are covered under one or more of the following registered or applied for patents 5 453 653 5 616 980 5 714 833 111597 5 640 063 6 247 338 6 244 076 6 747 391 6 661 153 69838991 3 6 384 515 7 119 477 7 075 211 69932359 5 1186063 7 211 929 69941 195 5 1577961 4813708 6 879 085 6 979 936 7 439 652 7061158 1800356 1800356 1800356 2007 533057 pending 2011 093431 pending 7 876 509 10 2007 7009928 pending 200780019448 6 7713361 9 pending 12 294 926 pending GB20080000041 78 pending GB2009000003796 pending 12 398 216 pending GB2446428 12 517 261 pending 08702695 1 pending 10 2009 7017629 pending 12 524 164 pending 12 581 194 pending Revision History ECO Revision Release date Details NA NA Aug 2012 Administrative change added patent information section in front matter Nanomotion Ltd Page 3 of 21 CE Compliance Nanomotion Ltd CE Compliance The Nanomotion s family of drivers and motors complies to the following directives Safety IEC 61010 1 1990 EMC 89 336 as amended by 92 31 EEC 93 68 EEC Harmonized Standards to which conformity is declared EN 50081 2 1993 EN 55011 1991
4. 21 Preparation and Installation 2 21 Mounting the motor The motor is inserted into the mounting base hole Make sure all of the dimensions and tolerances specified in the figure below are met 4174005 21 006 CERAMIC DRIVE PLATE __ COMPRESSED a SLIDE H VO MOTOR MOUNTING BASE WITH MOTOR INSERTED Figure 4 Motor Mounting dimensions in mm 2 2 2 Electrical Connection Wire the electrical connections to the flex tail using an AMP connector model 487951 4 2 2 3 Motor Grounding The motor s mounting base should be grounded to the main ground Nanomotion Ltd Page 13 of 21 2 2 4 Motor Nanomotion Ltd Preparation and Installation Be sure to perform motor run in an ambient environment in order to reduce the wear rate of the system and to prolong its lifetime The required run in conditions are as follows e Velocity 50 mm sec e Duty cycle 50 e Duration 4 hours General remarks 1 Be sure to operate the motors using only drivers supplied by Nanomotion and the correct resonance circuit 2 The procedure should be repeated if the motor is disconnected and reinstalled Do perform run in within a vacuum environment Page 14 of 21 Specifications 3 Specifications 3 1 General These specifications apply to the motor driven by the PD7 Driver Box The motor features a
5. NOTE Additional useful information CAUTION Identifies conditions or practices that could result in damage to this product or other property WARNING Identifies conditions or practices that could result in personal injury damage to the product or other property Warnings and Cautions WARNINGS Do not attempt to open the motor High voltage inside Be sure to ground the motor to the electrical network ground before operating CAUTIONS Avoid mechanical stress on the flex tail Do not set power on unless motor is mounted and preloaded Do not immerse the motor in any liquid or cleaning agent Use only a clean cloth to wipe the motor sure that the motor and specifically the finger tips are not subjected to mechanical shocks Be sure that the distance of the motor to the plate enables the motor finger tip to contact the driving plate otherwise the motor might be damaged during operation The mounting base and the method used for mounting should be designed for maximum mechanical rigidity and stiffness Nanomotion Ltd Page 6 of 21 Table of Contents Table of Contents 1 TN TIROBUG TION 2 fens cee vet ean E Sars sence fae 8 1 1 About the Motor iisisti 8 1 2 ence 9 1 3 Installation
6. linear voltage response The motor and driver can be modeled as a DC motor with friction driven by a voltage amplifier as illustrated in the following diagram Nanomotion Ltd Figure 5 Block Diagram of the Motor and Driver Where Vin Command to the driver 10 to 10 V Kf Force constant N V Offset Starting voltage V Kfv Velocity damping factor similar to back EMF N x sec Vel Motor velocity m Sec M Moving mass kg 5 Laplace variable 1 sec Page 15 of 21 Specifications A block diagram of a typical RC3 Driver Motor Sub system is illustrated in Figure 5 A command voltage of 10V is applied to the driver which then generates a 40 5Khz sine wave V motor whose amplitude is a function of command voltage The sine wave drives the RC3 motor Velocity Force RC3 MOTOR 05 V Command DRIVER Figure 6 Block Diagram of a typical RC3 Driver Motor Sub system Nanomotion Ltd Page 16 of 21 Specifications 3 2 Specification Parameters 3 2 1 Specifications Performance Maximum Velocity Dynamic Stall Force Force 80 mm sec Non Energized Stiffness Nominal Preload on Stage Kf Kfv Offset Attainable Resolution Nominal Lifetime Electrical Maximal Voltage Maximal Current consumption Maximal Power Consumption Electrical Connection Environmental Ambient Temperature Storage Humidity Vacuum level ultra high vacuum motors Maximal Baking Tem
7. WV nanomorion A Johnson Electric Company RC3 Ultrasonic Motor User Manual D N RC03458000 00 REV August 29 2012 Nanomotion Ltd POB 623 Yokneam 20692 Israel Tel 972 73 2498000 Fax 972 73 2498099 Web Site www nanomotion com E mail nano nanomotion com CE Compliance Copyright 2000 2012 This document contains proprietary information of Nanomotion Ltd and may not be reproduced in any form without prior written consent from Nanomotion Ltd Limited Warranty Nanomotion hereinafter NM warrants the product other than software manufactured by it to be free from defects in material and workmanship for a period of time of one year except those parts normally considered as consumable expendable components such as motor conditioning brushes The warranty commences thirty 30 days from the date of shipment NM warrants those parts replaced under warranty for a period equal to the remaining warranty coverage of the original part sole and exclusive obligation under this warranty provision shall be to repair or at its sole option exchange defective products or the relevant part or component but only if i the Purchaser reports the defect to NM in writing and provides a description of the defective product and complete information about the manner of its discovery within ten 10 days of its discovery ii NM has the opportunity to investigate the reported defect and determines that the defect arises fro
8. d by conduction through the fingers Hence the motor and the ceramic drive strip bases must both be thermaly designed to dissipate 0 75W each per motor with a temperature rise of 15 C maximum Also the temperature of all parts in contact with the motor and with the ceramic drive strip should not exeed 40 C Nanomotion Ltd Page 20 of 21 Specifications 3 3 Dimensions Layout FINGER DIRECTION TIPS 03 05 2 018 9 3 05 DETAIL 5 1 TYPx3 8 1 1 TYP fe Q lo oe 9 u2 A AA jag gt a o H T 05 Haa Nhe Q 1 4 6 LOCATION MOUNTING FLEX TONES PIN COMPATIBLE WITH 2 72 AMP P N 487951 SMT CONNECTOR Q 56 NOTES 1 DIMENSIONS ARE IN MM 2 GENERAL TOLERANCE 0 1 Figure 9 Dimensions Layout Nanomotion Ltd Page 21 of 21
9. ith the motor finger tips according to the instructions given in this section Stage Ceramic Driving Plate Figure 1 Bonding the Ceramic Driving Plate Nanomotion Ltd Page 10 of 21 Preparation and Installation 1 Clean the bonding region on the stage using a suitable agent such as acetone or methanol 2 Peel off the self adhesive tape on the Ceramic driving plate The self adhesive tape is compatible with high vacuum applications 3 Referring to the figure below position the plate so that there is a distance of at least 0 5mm between the edges of the ceramic plate and the finger tips RC3 Motor 0 5mm Ceramic Plate Figure 2 Ceramic Drive Plate Position Nanomotion Ltd Page 11 of 21 Preparation and Installation 4 Referring to the Figure 3 apply at least two drops of epoxy adhesive about 2cm apart to the center of the Ceramic driving plate upper surface The Epoxy must bond the plate and the stage Recommended adhesive Emerson amp Cuming ecobond 24 vacuum compatible NOTE Be sure the epoxy contacts the upper surfaces of the plate and the stage carriage but that no excess glue flows over the Ceramic plate front surface Ceramic Plate Figure 3 Securing the Ceramic Driving Plate to the Stage 5 Allow the required time period for curing according to the Epoxy manufacturer specifications 6 Mount the motor according to the following section Nanomotion Ltd Page 12 of
10. m faulty material parts or workmanship and iii the Purchaser returns the affected product to a location designated by NM These provisions constitute the exclusive remedy of the Purchaser for product defects or any other claim of liability in connection with the purchase or use of NM products This warranty policy applies only to NM products purchased directly from NM or from an authorized NM distributor or representative This warranty shall not apply to i products repaired or altered by anyone other than those authorized by NM ii products subjected to negligence accidents or damage by circumstances beyond NM control iii product subjected to improper operation or maintenance i e operation not in accordance with NM Installation Manuals and or instructions or for use other than the original purpose for which the product was designed to be used The warranty stands only when the motors are used with the NM drivers amplifiers NM shall not in any event have obligations or liabilities to the Purchaser or any other party for loss of profits loss of use or incidental increased cost of operation or delays in operation special or consequential damages whether based on contract tort including negligence strict liability or any other theory or form of action even if NM has been advised of the possibility thereof arising out of or in connection with the manufacture sale delivery use repair or performance of the NM products Without
11. operation of the motor and driver resembles that of a DC motor driven by a voltage amplifier The RC3 HV and RC3 UHV motors are constructed of materials that have been selected and designed for high vacuum compatibility NOTE The specifications described in this manual apply only to the motor driven by the PD7 driver box Nanomotion Ltd Page 8 of 21 1 2 Handling Introduction CAUTIONS Avoid mechanical stress on the flex tail Do not set power on unless the motor is mounted and preloaded Do not immerse the motor in any liquid or cleaning agent Use only a clean cloth to wipe the motor Be sure that the motor and specifically the finger tips are not subjected to mechanical shocks 1 3 Installation and Servicing Nanomotion Ltd It is recommended to follow the installation instructions in this guide when mounting and installing the motor The RC3 motor does not contain any user serviceable parts Page 9 of 21 Preparation and Installation 2 Preparation and Installation 2 1 Overview The installation procedure consists of the following Bonding the Ceramic Driving plate to the stage Mounting the motor Grounding the motor Connecting the motor to its driver 2 2 Bonding the Driving Plate to the Stage The Driving Ceramic Plate interfaces between the motor finger tips and the stage providing the required friction Bond the driving plate to the stage surface interfacing w
12. perature Physical Dimensions Diameter Length Weight Nanomotion Ltd 180 mm sec min 12 N min 8 5 N min 1 8 min less for HV motor N 2 7 40 N Volt command 50 20 1 to 2 V Better than 100 See application notes 20 000 hours under nominal operating conditions 280Vrms 40 5KHz sine wave 270mA rms 30mA 17W 2W zero W at hold 4 contact edge connector on FPC 0 50 C 20 C 70 C 0 80 non condensing 10 Torr guaranteed only after baking 140 C 21mm 41 7mm 34 gr Page 17 of 21 Specifications 3 2 2 Materials Comprising the Motor Nanomotion Ltd AL 2024 T6 Peek Viton Conifer Tellurium Copper Silver coated Tellurium Copper Fired Silver Electrodes PZT Alumina Vacuum Epoxy Kapton Pyralux Flexible Printed Circuit SS AISI 304 Page 18 of 21 Specifications 3 2 3 Performance Envelope The following graph illustrates motor velocity as a function of the applied driver command voltage under no load Allowing up to 30 mm sec variations use it as a reference and as a guideline for expected motor performance Velocity mm sec 300 0 250 0 200 0 150 0 100 0 50 0 0 0 Motors velocity VS command 1 2 3 4 5 6 7 8 9 10 Command V Figure 7 Motor Velocity vs Command The motor operates horizontally at room temperature and low duty c
13. ycle lt 10 It interfaces a Ceramic Strip according to Nanomotion Specifications and a cross roller high quality slide Nanomotion Ltd Page 19 of 21 Specifications The following graph and table are designed to help the user determine the correct performance envelope of operation so as to not overheat and damage the motor Aattyd aiasvakregnes 0 8 6 4 2 0 0 10 2D 3D 25 C 50 C VACUUM Curve Duty Maximum Duty Maximum Duty Maximum Cycle Continuous Cycle Cycle Continuous Cycle Cycle Continuous Cycle Operation sec Operation sec Operation sec a 100 100 100 b 100 100 44 184 c 100 92 137 26 107 d 100 62 93 17 72 e 78 87 sec 47 70 13 55 f 56 63 sec 33 50 9 39 g 50 56 sec 30 45 8 35 Figure 8 Performance Envelope At Various Work Regimes Defining a performance envelope example of the use of the above graph and table A vacuum application requires 4N at a velocity of 0 The graph shows that this point of operation corresponds to curve The table shows that curve c and a vacuum environment require that a duty cycle of 26 will not be exeeded while maintaining a maximum continuous operation time of 107 seconds Vacuum application note Heat dissipation mechanism is by radiation to the motor case an
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