MicroNode I/O Ethernet COMBO User Manual
Contents
1. The command line interface supports the help command which displays a brief summary of all commands The commands are self explanatory to anyone sufficiently familiar with the controller theory of operation and the technologies involved The diagnostics serial port is also be used to display all legally required Copyright messages current version information and hardware configuration information during the unit s power up sequence Page 9 of 28 MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I O Ethernet COMBO User Manual Table 3 Diagnostic Serial Port Connector Pin out Female DB 9 Pin RS232 Function SGND 2 9 Ethernet Connector The standard 100 10 BaseT Ethernet Port uses a standard shielded RJ45 connector Indicators for the Ethernet Port are located on the front panel 2 10 Status LED s There is one LED for the unit status and one for the network status located on the front panel Indicators for the Ethernet port are also located on the front panel The table below shows the meaning of different LED states Table 4 Modbus LED Status Conditions LED Color Status LED Network LED No power No Power Not Supported No Network Response Disconnected Booting Network Initializing configuring DHCP lternating Red Green__ Watchdog failure outputs off Network Configuration Error Iternating Red Amber __ I O failure Null network IP address configuration Error Alternating Green AmberNo2. Height X 120mm 4 7244 Width X 34mm 1 339 Depth I O Connector 37 pin male D sub Ethernet Connector 100 BaseT RJ45 with EMI filter LED indicators RS 232 Connector 38 400 bps TXD RXD DB9 connector Weight 200 g 0 44 Ib Environmental Specifications Criteria Specifications Operating 0 to 55 C Temperature Storage 40 to 85 C Humidity 5 to 95 non condensing Functional Specifications Criteria Specifications BUS Interface Ethernet Modbus TCP Front Panel 8 Digital I O points Network Status Module Indicators Status Rotary Switches IP address operating mode Power Specifications Criteria Specifications Input Powered from I O connector 24VDC 120 mA min Isolation DC DC Isolation Input Output Specifications Criteria Specifications Number of Digital O 8 points input or output Digital Input Current sinking Active Low 1 5 mA min Current sourcing Active High 1 5 mA min Digital Output Current sinking Active low 200 mA max channel Current sourcing Active high 200 mA max channel Current max 800 mA for DIO 0 7 Analog Input 8 single ended points 12 bit Software selectable range 0 10V 5 to 5V Analog Output 4 single ended points 12 bit Range 10 to 10V 5mA channel into a 2 KQ load Page 27 of 28 MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I O Ethernet COMBO User Manual WARRANTY MKS Instruments Inc MKS warrants that for one year from the date of sh
3. _H2V_ _ 12V_ Digital VO Digital 1 O LED X LEA LED X a lt a 24V Sa 24_GND i i i i A 3K 22K lt Ex 22K NVV O DIOX MN O DIOX i i 2 2K 2 2K Figure 4 Digital Sinking Input active low Figure 5 Digital Sourcing Input active high Below is an example of how to use the digital input interface for both the sinking and sourcing hardware configurations The digital I O circuitry is powered from an external 24 volt power source via the I O connector 24 VIN _ MicroNode Q DIO1 O O 24V GND MicroNode DIO1 Figure 6 Sinking Input Figure 7 Sourcing Input 2 7 Digital Output Interface Example The individual outputs will support up to 200 mA load per channel Each output is thermally protected against short circuiting 500 mA typically and includes under voltage protection The output Fault State is accessible through software External Schottky diodes are provided for output transient protection and each I O point is protected with a self resetting poly fuse rated for 500 mA Outputs default to the OFF condition during power up and processor reset conditions The figure below shows the output circuitry 24V Output Driver DIO X 24 GND Figure 8 Output Circuit Page 8 of 28 O MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I O Ethernet COMBO User Manual Below is an example of how to interface with the digital outputs
4. 535 16 Bit Command ReadDiscretelnputs 0x02 resets the counter Table 8 Modbus Commands Description As defined in the MODBUS Application Protocol Specification the device shall support reading one or more discrete inputs via the ReadDiscretelnputs function Page 19 of 28 MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I O Ethernet COMBO User Manual ReadCoils 0x01 For the purposes of this device a coil shall be synonymous with a Discrete Output As defined in the MODBUS Application Protocol Specification the device shall support reading one or more coils discrete outputs via the ReadCoils function WriteSingleCoil 0x05 fe Se WriteMultipleCoils 0x0F es eee ReadHoldingRegisters 0x03 ae As defined in the MODBUS Application Protocol Specification the device shall support reading one or more registers via the ReadHoldingRegisters function WriteSingleRegister 0x06 Is defined to access the HoldingRegisters When accessing an IO point the following method is used Note the digital input address is the reference number of the digital input minus one DI address Reference of DI Number 1 For example for DI number 4 with a reference of 4 the DI address would be 3 Map this data in your Modbus TCP scanner Note l For more details on Modbus see http www modbus org WATCHDOG TIMER The Modbus TCP Interface includes a watchdog timer to m
5. OOLweb functions are accessed and configured through the web browser interface Users must determine the Key Process Variables Once these variables are named and scaled they are available for data collection and analysis 7 1 1 Control Access Create the allowed permissions to process data ToolWeb Write Access Control Designated Controller OTP Address 0 0 0 0 Your IP Address 10 112 0 103 1188 CONFIGURATION ACCESS DENIED Figure 19 Access Control Page 21 of 28 MKS Instruments CIT Products 2006 All rights reserved o mks MicroNode I O Ethernet COMBO User Manual Technology for Productvlty 7 1 2 I O Bindings Select the I O points to be available for TOOLweb functions Each point is selected given a description and scaled to meaningful process units Up to 64 variables can be configured ToolWeb YO Binding Prohibited Y ToolWeb Variables to 1 0 Binding SevetoFie_ Figure 20 Collection Variables 7 1 3 Data Collection Plans A data collection plan selects the process variables of interest and the frequency of data collection Each collection plan can then be viewed using a Charting Applet or can be downloaded in CSV format to your local PC Page 22 of 28 MKS Instruments CIT Products 2006 All rights reserved 2mks MicroNode I O Ethernet COMBO User Manual Technology far Productvity Data Collection Plans Figure 21 Collection Plan 7 1 4 Data Collection
6. Plan Editing Create a collection plan and select the key process variables of interest Edit Collection Plan 0 500 0 Up time Figure 22 Edit Collection Plan 7 1 5 Charting Applet Once a data collection plan is configured you can view the data using a built in charting applet Page 23 of 28 MKS Instruments CIT Products 2006 All rights reserved emks MicroNode I O Ethernet COMBO User Manual Plot Collection Plan Default_CP Ne E y3 0 SE 8 Els E vda At fs me Fa Default_CP on ToolWeb M Check all I seal F Manual scale in fo 00 0 LE Last data 5 12 2006 15 07 14 727 Copyright C 1995 2003 MKS Instruments CIT Products Figure 23 Charting Applet 7 1 6 Download Data to Local PC Collection plan data can also be downloaded in CSV format Page 24 of 28 MKS Instruments CIT Products 2006 All rights reserved MicroNode I O Ethernet COMBO User Manual E Mieresott Larti cphatet i Mpe ta Len Lust Pare Toh ope aim pe pime o o Q ooo 1 0 0 6 004 0 100 oom 3 0 o onu ja O 00 a 0 0 0 0004 0 0 1 004 I G o o j D004 co 0 Mn 0004 D 004 o D Doit 0 0 ome n noose o 11 004 i i ce 4004 1 200 157555 11745 a 0 oc 1 om i a 67 0 11746 662 0 004 o 1 ome 0 Y 0 11747 8 D oo 3 G g o o O 008 0 G 11748 63 pom 0 000 O 0 1 Y I fi 0 11748 3 D cue 1004 a 0 D J o Som 53 ome O Reo 0 Y 0 0 002 noe D fom noose o o 0 o 0 9 0 0 11 00099 0 g a 0 E no o aa y a 0
7. R el cl a lalo bt e DA 18 6 MOdb S TCP Int rface sii la tinta 19 P TOOLweb internace it A a A E AE it 21 7 1 TOOLWEB USERINTERFACE cti e a a de ida 21 LABEL GOMTOLACCESS AAE TE E RE toba 21 EL MOBIL O O DA LO A ee er IR 22 FI Data Colection Plans i nn inios elena acond nues tenons daa 22 7 1 4 Data Collection Plan Editing ss 23 LO Chanting API A e atado 23 7 1 6 Download Data to Local PC LL unies cann nan aiie 24 7 2 TOOLWEB TOOL SIDE INTERFACE cccccscscssssccscscsssseescccessssescscessscesseccssssssescssssesesecssssesesecesusessseceas 25 8 Appendix A SpecifiCations issued rte ni alee dede Pine tiie le Mdr 27 WARRANTY iii ii So eR ne a r ne 28 Page 3 of 28 MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I O Ethernet COMBO User Manual 1 General Information The MicroNode I O product line provides high density compact and economical I O solutions for popular Fieldbus Networks The MicroNode COMBO provides 8 digital input output points 8 analog input points and 4 analog outputs points to an Ethernet network Additional data monitoring is available through a standard web browser and the TOOLwebT tool side Interface XML over HTTP The MicroNode package provides flexible side or foot mounting and easy access to I O through a standard 37 pin D Sub connector Below are the orderable part numbers for all Ethernet COMBO M
8. Table 6 Serial Connection Parameters Parameter Value 38400 Databits 8 Parity None Once connected the IP address can be changed by typing the menu command and pressing m within 3 seconds The current IP address of the unit can be view by just typing menu RB cect Hypu teminat IX PE A Later Hen D 6 08 7 gt A ae er A A A A A AA a Starting Microhode 1 0 Terminal baud rate 38408 FEC routable IP addr 10 202 3 78 FEC routable IP mask 255 250 20 0 IFEC local IP address disabled IFEC MAC address 09 88 17 10 04 11 Syslog Console Verbosily 7 Product Part Number RSO824981 Serial Mumber 125272 Toolfeb Control Access NONE lemperalure Limit C 64 Rotary switch IP adress base 18 282 3 1 Press M in 3 seconds to wodify these settiogs Shel l gt She 11 Shel l gt Shell Shel 1 gt Sivel gt Shel1 gt Snell Shel l gt Crta NDA EVA MAI e Figure 15 Serial Diagnostics Menu Command The serial interface provides diagnostics for the device The help command can be used to display all commands available through the serial interface Page 16 of 28 MKS Instruments CIT Products 2006 All rights reserved MicroNode I O Ethernet COMBO User Manual o smks Technology for Productivity Pa EAN MU DA ira Men Des Cer qu query CPU use log display system call loy dep display DHCP status nbufs display network buffer statu
9. bove In Diagnostic mode the watchdog is disabled and the user is allowed to change the value of the outputs via the Web based diagnostic pages Setting the switches to a value of 300 configures the IP address using DHCP and setting the switches above 300 configures the unit to a static IP address For example A switch setting of 330 means that the diagnostic mode is set and the IP address is statically configured to 192 168 9 30 J5 Note Rotary switches settings above 554 are reserved and should not be used Page 11 of 28 MKS Instruments CIT Products 2006 All rights reserved MicroNode I O Ethernet COMBO User Manual 2mks Technology for Productylty 3 Quick Start het 20e 278 Set the IP address switches on the front of the unit to 3 1 0 The unit is now in Diagnostic mode with a static IP address The units IP address will be 192 168 0 10 Power the unit by supplying 24 volts to the I O connector See section 2 4 2 for wiring information Attach a network crossover cable between the MicroNode and your PC or use a HUB to build a small network Modify your PC network TCP IP settings using the computer s Connection Properties menu to match the following PC IP Address 192 168 0 1 PC Netmask 255 255 255 0 Open a web browser window and enter http 192 168 0 10 in the address line There is a slight delay as the unit transfers content to your local browser The main Device page is displayed If you are unable t
10. d 2 7 2 1 Shipping Box Contents e MicroNode Product 2 2 Hardware Description 1 0 37 Pin DSUB See 1 0 Table gt gt Digital 1 O MKS srarus ner MicroNode l O Mimina racimo Figure 1 MicroNode COMBO Front Panel 2 3 Installation Mount the unit on a horizontal or vertical surface in a suitable location and or enclosure for your application Provide sufficient clearance and airflow to maintain a 0 C to 55 C ambient operating temperature range Fasten the unit to the mounting surface using four screws not provided the 4mm wide mounting holes Page 5 of 28 MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I O Ethernet COMBO User Manual Mounting lkackeix 11008 pera ati Figure 2 MicroNode Mounting Holes A Height of 34mm not including 37 pin D Sub connector ls Note All dimensions are metric 2 4 Wiring The MicroNode requires two connections one to the Ethernet network and one to a 37 pin D Sub connector Ethernet and I O cables are available from a variety of industrial sources See table below for orderable I O mating connectors Table 2 1 0 Mating Connector Description MFG Part Number 37 pin D Sub Receptacle solder cup 523 L77 DC37S 37 pin D Sub Metal Hood 523 17E 1727 2 Warnin Follow all applicable electrical codes in your area when mounting and 9 wiring any electrical device Page 6 of 28 O MKS Instruments CIT Products 2006 All rights reserv
11. ed mks MicroNode I O Ethernet COMBO User Manual 2 4 1 Power Supply Wiring Connect an external 18 30 VDC power supply to the appropriate pins of the I O connector The connector should be wired according to the connector pin out in Section 2 4 2 2 4 2 I O Wiring The MicroNode provides access to the I O via a male 37 pin D Sub connector The pin out is shown in the following figure 32282 Z Z Z X 14 ON ds 0e eee OOO 2222220090200 lt LLLLLLINNNOQOQOQQ OMA A CAR 20 21 22 23 24 25 26 27 28 29 30 31 32 BHA 35 36 37 ao To cbr Sas est OO 3F3 3 35Q O0 0 O a lt aqeaq Qqgee2222 22 DS 3 0066 8 8 NW Figure 3 MicroNode COMBO Connector Pin out 2 5 I O Monitoring There are multiple control and data monitoring interfaces for the unit e Modbus TCP Ethernet control e Web browser manual control e Web browser configuration and graphical data monitoring e XML streaming data acquisition using TOOLweb protocol Page 7 of 28 MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I O Ethernet COMBO User Manual 2 6 Digital Input Interface Example Units are purchased with either sinking active low or sourcing active high I O Each input circuit includes an indicator LED in series with the detection opto coupler The opto coupler isolates the processor from the inputs The inputs require 1 5 mA in order to turn on
12. eemks Technology for Productivity Controls Group 134 W Rio Robles Drive San Jose CA 95134 Main 408 750 0300 Fax 408 750 2990 Rev 02 09 06 Page 1 of 28 MKS Instruments CIT Products 2006 All rights reserved MicroNode I O Ethernet COMBO User Manual mks Copyright Preface This manual and the software described in it are copyrighted with all rights reserved Under the copyright laws this manual and software may not be copied in whole or part without the prior written consent of MKS Instruments The same proprietary and copyright notices must be affixed to any permitted copies as were affixed to the original This exception does not allow copies to be made for others whether or not sold but all of the materials purchased may be sold given or loaned to another person Under the law copying includes translating into another language or format O MKS Instruments Controls Group 2006 134 W Rio Robles Drive San Jose CA 95134 About this manual This manual is designed to serve as a guideline for the installation setup operation and basic maintenance of the MicroNode device The information contained within this manual including product specifications is subject to change without notice Please observe all safety precautions and use appropriate procedures when handling the MicroNode product and its related software Export Regulation MKS Products provided subject to the US Export Regulation
13. for both the sinking and sourcing hardware configurations The digital I O circuitry is powered from an external 24 volt power source via the I O connector 24VIN O 07 MicroNode MicroNode DIO1 O A q Figure 9 Sinking Output Figure 10 Sourcing Output 2 7 1 Analog Inputs The analog inputs are coupled directly to the processor and are implemented using 12 bit A D converters This device supports software settable ranges of OV to 10V and 5V to 5V All analog circuitry is powered from an internal 15 Vdc power source 1 Watt derived from the 24 V I O power The 15 V and 15 V power is protected with a self resetting poly fuse rated at 100 mA 2 7 2 Analog Outputs The analog outputs are implemented using 12 bit D A s with a 10V to 10V output range The output drivers are capable of driving 2 KQ 5 mA output loads Analog outputs default to 0 volts during power up and processor reset conditions The analog output power is derived from the same 15 V power used for the analog inputs 2 8 Diagnostic Serial Port The Ethernet MicroNode has an RS 232 serial diagnostics interface The serial port provides access to a proprietary command line interface with specific commands to display advanced or detailed status information and to control configuration parameters including those available via the Web interface Some are intended for advanced or factory use and are not normally exposed via the Web interface
14. from which the equipment was purchased or in the case of a direct purchase from MKS with the MKS CIT home office in San Jose CA This warranty does not apply to any equipment which has not been installed and used in accordance with the specifications recommended by MKS for the proper and normal use of the equipment MKS shall not be liable under any circumstances for indirect special consequential or incidental damages in connection with or arising out of the sale performance or use of the equipment covered by this warranty THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES EXPRESSED OR IMPLIED INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE AND ANY WARRANTY AGAINST INFRINGEMENT OF ANY PATENT Page 28 of 28 MKS Instruments CIT Products 2006 All rights reserved
15. icroNode configurations Table 1 Orderable Part Numbers AS00246 01 MicroNode l O Ethernet MB Combo sink front AS00272 01 MicroNode l O Ethernet MB Combo sink side AS00273 01 MicroNode I O Ethernet MB Combo source front AS00274 01 MicroNode I O Ethernet MB Combo source side 1 1 Conventions used in this User Manual a procedure practice condition or the like which if not correctly vf Warning The WARNING sign denotes a hazard to personnel It calls attention to performed or adhered to could result in injury to personnel Caution The CAUTION sign higlights information that is important to the safe operation of the BlueBox or to the integrity of your files ne Note The NOTE sign denotes important information It calls attention to a procedure practice condition or the like which is essential to highlight On screen buttons or menu items appear in bold and italics Example Click OK to save the settings Keyboard keys appear in brackets Example ENTER and CTRL Pages with additional information about a specific topic are cross referenced within the text Example See page xxx Page 4 of 28 MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I O Ethernet COMBO User Manual 2 Installation and Setup This section describes the MicroNode Combo hardware setup and the Ethernet network interface I O connection examples are given in section 2 6 an
16. ipment the equipment described above the equipment manufactured by MKS shall be free from defects in materials and workmanship and will correctly perform all date related operations including without limitation accepting data entry sequencing sorting comparing and reporting regardless of the date the operation is performed or the date involved in the operation provided that if the equipment exchanges data or is otherwise used with equipment software or other products of others such products of others themselves correctly perform all date related operations and store and transmit dates and date related data in a format compatible with MKS equipment THIS WARRANTY IS MKS SOLE WARRANTY CONCERNING DATE RELATED OPERATIONS For the period commencing with the date of shipment of this equipment and ending one year later MKS will at its option either repair or replace any part which is defective in materials or workmanship or with respect to the date related operations warranty without charge to the purchaser The foregoing shall constitute the exclusive and sole remedy of the purchaser for any breach by MKS of this warranty The purchaser before returning any equipment covered by this warranty which is asserted to be defective by the purchaser shall make specific written arrangements with respect to the responsibility for shipping the equipment and handling any other incidental charges with the MKS sales representative or distributor
17. o O10 1175s 5 o 1 004 1004 0 0 0004 0 DLS 11755 Sess o a g 0 i G 2 1004 0 0004 D om 100 0 o oa Qo a 1004 D o 0 0 0 0 o ow o a 0 Aia 11760 5085 f noose i 0004 0 dt 0 Dius 11751 f a t o oO D omi a 31158050 11762 1 o ou Q 0 0 a 32055 VE 560 G D o o 1 004 33 58 080 11764 5061 0 0004 4 EO ime 0004 Je wh ipdate 1 nenw Figure 24 Collection Plan Data 7 2 TOOLweb Tool Side Interface The tool side interface is relevant when a MicroNode is connected to a BlueBox in a semiconductor process tool APC and e diagnostic system The following messages are supported via the TOOLweb tool side Interface Table 9 TOOLweb Messages Supported The names and units as exposed in the CapabilitesResponse are the same as defined in the channel configuration Reference the BlueBox Manual for additional details on interfacing with BlueBox Page 25 of 28 MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I O Ethernet COMBO User Manual Note ui Microsoft Internet Explorer 5 0 1 or higher is required Microsoft Internet 2 Explorer versions less than 5 5 may not function as expected due to limitations of the browser Page 26 of 28 O MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I O Ethernet COMBO User Manual 8 Appendix A Specifications Physical Specifications Criteria Specifications Dimensions 80mm 3 1496
18. o load the page check the units switch settings and ensure the IP address of the PC is 192 168 0 1 Also check the Ethernet cable connections to your PC and to the MicroNode Figure 11 Device Web page Page 12 of 28 MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I O Ethernet COMBO User Manual e The Device page provides current status for the unit and provides basic control of the outputs through the I O block links control of the outputs is only allowed when the device is in diagnostic mode Once in production mode the outputs can no longer be controlled via the webpage Click on the underlined links to view the I O Figure 12 I O Links on Homepage e Selecting the underlined items in the I O blocks chart will launch secondary I O pages The following figures show the digital and analog input statuses that are displayed after an underlined link is selected Block 0 Discrete Inputs Block 1 Analogue Inputs Voit 1 2 3 4 5 6 7 8 o po apo poa e A A A U 0 0 0 0 0 0 e 0 Figure 13 Digital and Analog Input Web Page e The digital and analog output webpages provide basic control of the output points if the unit is in diagnostics mode The pull down menu allows the user to select the digital output state or to enter in a value for an analog output There is also a Blinking Output pull down menu that allows the user to put an output into a blinking or o
19. onitor and react in the event that communications are not maintained between the client and the server within a programmed amount of time If time between communications exceeds the timeout value programmed into the Watchdog Timeout Value Holding Register a timeout will occur and the Watchdog Timeout Counter register will increment 1 count for every timeout event that occurs In the event that a timeout occurs the Status LED will alternate between red amber and green Once a timeout occurs all outputs are disabled The Watchdog Timeout value can be set from 100 ms to 65535 ms and can be disabled by writing a value of 0 to the register The Watchdog Timeout Counter increments on each timeout event and is cleared by writing any value to the register ne To ensure that the Watchdog Counter register is cleared the register Note Y should be written to during initialization Page 20 of 28 O MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I O Ethernet COMBO User Manual 7 TOOLweb Interface TOOLweb is a system wide program for enabling and gathering real time data from multiple elements of a process and providing this data to factory based modules for analysis FDC and APC The Ethernet MicroNode uses TOOLweb functionality for the following e Web based tools for data analysis and debug directly from the I O module e Real time data acquisition using XML over HTTP 7 1 TOOLweb User Interface T
20. op up will appear for each section of I O e Inputs can be read Dynamic e Outputs can be set manually if the unit is in diagnostics mode Page 18 of 28 MKS Instruments CIT Products 2006 All rights reserved MicroNode I O Ethernet COMBO User Manual emks 6 Modbus TCP Interface All MicroNode s Modbus DevicelD is fixed at 255 decimal Use the Modbus mapping details provided through the web browser interface under the Configuration tab Modbus Data Mapping DataType Reference Quantity Description Input Reg 65001 4 Time 32 bit sec 32 bit usec BB input Reg 65101 a Temperature 1 100 C 116 Holding Reg 65101 1 watchdog Timeout millsec ui16 Holding Reg 65102 1 Watchdog Count counts ui16 input a 36 mtocko Dr ca is block o 00 Figure 18 Modbus Data Mapping The address map for the Modbus registers is listed in the table below Bool Table 7 Modbus Register Map Address Data Type Range Description Provides status of Block 0 and Block 1 Digital inputs Bool 0 1 Controls Block 0 and Block 1 Digital Outputs Real Real Time Clock value Int 16 bit 1 100 Internal Device Temperature in Degrees Celsius Unsig 16 Bit ned Int 0 100 65535 Watchdog timeout value in Milliseconds Writing a value of 0 to the register disables the Watchdog Watchdog Timeout counter Writing to the register Holding Reg 65101 Unsigned Int 0 65
21. rnet MicroNode is configured and controlled via its Ethernet port The following steps show how to configure a Windows PC for first time communication with a unit 1 Connect the MicroNode to your PC by using an Ethernet crossover cable for direct point to point connection or connect through an Ethernet switch or hub K Some 10 100MB Ethernet interfaces may not detect the MicroNode when using Note l an Ethernet crossover cable If you experience problems connect through an Ethernet switch or hub 2 Change your PC network TCP IP settings so that PC resides on same sub network as the MicroNode Use the following TCP IP settings if you have not changed the MicroNode IP address from its factory default IP Address 192 168 0 1 Subnet Mask 255 255 255 0 Default Gateway none 3 Open your PC web browser Netscape Internet Explorer or equivalent Enter the IP address in the web browser s address line http 192 168 0 X The main page for the MicroNode will open Page 15 of 28 MKS Instruments CIT Products 2006 All rights reserved smks MicroNode I O Ethernet COMBO User Manual 4 2 Connecting via a Serial Terminal Session Connect your computer to the diagnostics port DB9 using a standard null modem cable Using a terminal program such as Microsoft HyperTerminal or Tera Term Pro you can now communicate via the diagnostics port of the unit The serial connection parameters are listed in the following table
22. s Diversion or transfer contrary to U S law is prohibited Page 2 of 28 O MKS Instruments CIT Products 2006 All rights reserved Table of Contents 1 Generalitat e er ite bdo 4 1 1 CONVENTIONS USED IN THIS USER MANUAL 0 ccccccccccesscccssccesssccssecessecseecsssseeeseecsuscsessecuseeessecaseeeeeees 4 2 lala OA Ud ee 5 2 1 SHIPPING BOX CONTENTS ita ita 5 2 2 HARDWARE DESCRIPTION cuclillas rs 5 2 3 INSTALLATION cada adas dla 5 2 4 WIRINGS anadir d al 6 2 4 1 POWer SUPpply WITING teclado 7 BAD ALO Wings series the has te met SAA Re be es A En Re ER tt 7 2 5 VO MONITORING tases sss asada dia At 7 2 6 DIGITAL INPUT INTERFACE EXAMPLE c cccccccssscesssscssscssssseescessesessscesssseseescesusesesecesssesesscesusecesecesssesseecees 8 2 7 DIGITAL OUTPUT INTERFACE EXAMPLE ccccccssccscssessscsssseeescessssessecesssscsescessssesesscessseeececssusesseecssuseseeseas 8 LL ANalOg INPUIS Moi iii tic 9 21 25 SANAIOG O DUIS A A cae Male A ls Nasi eee eT aaa are order lattes 9 2 8 DIAGNOSTIE SERIAL POR caes 9 2 9 ETHERNET CONNECTOR a a 10 LAO STATUS LED Sa o 10 2 11 ROTARY SWITCHES eaan e 10 Bs gt QU k SE AE D A ee tae ne tnt 12 4 Network Configuration kitar iaa ada 15 4 1 CONNECTING TO A COMPUTER VIA TCPIYIP esse cnc co nano cines 15 4 2 CONNECTING VIA A SERIAL TERMINAL SESSION cococcconcccnoncconnnononoconaconncconaconnccann nono nc cnnnnrnn corona crnnnccnneos 16 5 CONTROLweb User Interface L
23. s nbufl display network buffer location oetstat display network interface status route display routing table socks display list of sockel s static add Odd network interface del Delete network interface ird cadir reg read bytes from 120 device ira cadd creg lt val gt write 1 byte te 120 devise sntpe print SNIP client statistics date print current dat bites display HTTP sessions httpd pre HTTP debug messages httpu disables HTIP debug messages display the boot mena rep exit monitor resume application gt Figure 16 Serial Diagnostics Help Command Page 17 of 28 MKS Instruments CIT Products 2006 All rights reserved 2mks MicroNode I O Ethernet COMBO User Manual Technology for Productvity 5 CONTROLweb User Interface The user interface is web based You can access it by simply browsing to the IP address of the CONTROLweb node ma Microsoft Internet Explorer versions older than 5 5 may not function as Note Y expected due to limitations of the browser The main page of the CONTROLweb unit shows a top view of the module This is referenced as the Device tab Controller 1 0 Blocks Figure 17 Device Homepage Dynamic diagnostic details available from this page are e Unit data model number serial number and software version Operational Mode Operation statistics Ethernet load Modbus details By selecting I O of interest from the main page a p
24. scillating state Page 13 of 28 O MKS Instruments CIT Products 2006 All rights reserved smks MicroNode I O Ethernet COMBO User Manual Block 1 Analogue Outputs Vo Block 0 Discrete Outputs I AA IES 19 09 09 09 09 09 09 03 Blink Output None v Figure 14 Digital and Analog Output Webpages Oscilate Output e Click on the link for the analog or digital output page Change the state of one of the outputs by selecting an option from the pull down menu and for the case of analog enter a number within the range of 10V to 10V If the output does not come on check the status and network LEDs on the front of the unit The module LED should be blinking amber and the network LED should be blinking green If the states are different reference the LED status table in section 2 10 Also check the 24V power connection Page 14 of 28 O MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I O Ethernet COMBO User Manual 4 Network Configuration The MicroNode network settings configure the 100 10 BaseT Ethernet port The following are factory default Ethernet settings Parameter Setting IP Address 192 168 0 X Subnet mask 255 255 255 0 Default Gatewa Note ui Reading or changing the network settings of an unknown unit is achieved by connecting via a serial terminal session See section 4 2 4 1 Connecting to a computer via TCP IP The Ethe
25. t Supported Not Supported Blinking Amber Unit Okay Diagnostic Mode Watchdog Inactive Standing by for Modbus master to connect Blinking Green Unit Okay Production Mode Watchdog Active Modbus master present and active 2 11 Rotary Switches The Ethernet MicroNode has three rotary switches on its front panel each switch represents a decimal digit O through 9 The switches serve two purposes 1 Determine the least significant byte of the IP address 2 Determine the operating mode Table 5 Switch Conditions Mode Switch Settings Watchdog IP address Production 000 Enabled DHCP Production 001 254 Enabled 192 168 0 Switch Settings Disabled__ DHCP Diagnostic 301 554 Disabled 192 168 0 Switch Settings 300 Page 10 of 28 O MKS Instruments CIT Products 2006 All rights reserved mks MicroNode I O Ethernet COMBO User Manual When the unit is in normal production mode the combinations of the rotary switches represent a decimal number between 000 to 254 When the number is between 001 to 254 this number is used to configure the last network segment of the static IP address with a factory set prefix 192 168 9 xxx or any other prefix that may be configured through the diagnostic serial port If the rotary switch combination is set to 000 the unit will obtain an IP address automatically using DHCP protocol To set the operating mode to diagnostics mode set the rotary switches to 300 or a
Download Pdf Manuals
Related Search