Diode In-line Ion Pump
Contents
1. Maintenance The Diode In line series pump does not require any maintenance Any work performed on the pump must be carried out by authorized personnel Before carrying out any work on the pump disconnect it from the High Voltage supply If a pump has to be scrapped it must be disposed of in accordance with the specific national standards 14 49 Diode In line lon Pump User Manual 87 900 146 01 Installation procedure 1 Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale Diode In line lon Pump User Manual 87 900 146 01 15 49 1 Installation procedure Disposal 16 49 Diode In line lon Pump User Manual 87 900 146 01 Diode In line lon Pump User Manual Q0o gt 2 Technical Information Description of the Diode In Line lon Pump 18 Technical Specification 19 Diode In line lon pump 21 Outline Drawing 22 Stray Magnetic Field 232. When a Diode In Line ion pump does not reach the desired ultimate pressure and there are no leaks it is probably necessary to bake the system This is done by heating the pump and all the components in the system this operation is generally required to achieve base pressure less than 10 mbar Do not exceed the temperature limits reported in Table 1 Note that it is possible to perform the bakeout in two ways that is to say with the ion pump on or off In the first case bakeout with the ion pump on 1 Heat the pump body and the system with a bakeout oven unit or heating strips to temperatures between 150 C and 250 C it is worth noticing that 220 C constant temperature is the maximum allowable for most bakeable high voltage cables This temperature is high enough to outgas water vapor from the pump surfaces without damaging the magnets and the high voltage connector Note that the system components must be compatible with the bakeout temperature The heating must be approximately even on all surfaces or evaporated water will condense on the colder surfaces resulting in an incomplete bakeout and thus preventing the achievement of UHV vacuum pressure Leave the pump control unit on and monitor the pressure Agilent recommends that current during bakeout does not exceed 10 mA If this value is exceeded turn the bakeout off and then on again when low pressure is restored To control the heaters and to monitor the high press
3. Diode In Line lon Pump Installation 28 Inspection Procedure 28 Visual Inspection 28 Vacuum Evaluation 29 Short Circuits 30 Inlet Flange Connection 31 Control Unit Connection 34 Safety Interlock 35 Operating Procedure 36 Bakeout Operation 37 Maintenance 39 Exchange of the High Voltage Feedthrough 38 Pump Troubleshooting 40 Original Instructions E Agilent Technologies 2 Technical Information Description of the Diode In Line lon Pump Description of the Diode In Line lon Pump 18 49 The Agilent In line pump 919 1491 is a Diode pump especially designed to be mounted in line whose magnetic circuit has been optimized in order to provide low values of the stray field along the pump axis It operates in the pressure range from 10 to below 10 Torr mbar Its pumping speed will vary depending on the system pressure the gas type and the applied operating voltage The latter can be optimized using Agilent controllers to achieve the lowest possible operating pressure positive polarity high voltage supply is required to operate Diode pumps Fig 1 shows the Diode In line Ion Pump 919 1491 Figure 1 Diode In line lon Pump Diode In line lon Pump User Manual 87 900 146 01 Technical Specification Technical Information 2 The following table details the main technical specifications of the Diode In line Ion Pump 919 1491 Tab 1 Speci
4. corresponds with the pump center Typical 12 1 0 Y 8 Gos 2 E E T PO Bx E PO By E 04 acd a 0 2 0 0 z position cm Figure 6 Typical values of the stray magnetic field modulus of Bx and By components along path PO without Earth field contribution 24 49 Diode In line lon Pump User Manual 87 900 146 01 Technical Information 2 Typical eo p p oc o fu Stray magnetic field Gauss o e P1 Bx si P1 By 0 2 0 0 z position cm Figure 7 Typical values of the stray magnetic field modulus of Bx and By components along path P1 without Earth field contribution Typical 1 2 10 3 g 0 8 E H M P2 Bx E aa P2 By s a 0 2 0 0 z position cm Figure 8 Typical values of the stray magnetic field modulus of Bx and By components along path P2 without Earth field contribution Diode In line lon Pump User Manual 87 900 146 01 25 49 2 Technical Information Stray Magnetic Field Typical 4 a 9 o z E P3 Bx a P3 By 3 5 z position cm Figure 9 Typical values of the stray magnetic field modulus of Bx and By components along path P3 without Earth field contribution Typical 1 2 1 0 9 o 2 E E P4 Bx P P4 By E 0 A 5 z position cm Figure 10 Typical values of the stray magnetic field modulus of Bx and By components alon
5. 49 A Diode In Line ion pump that has been exposed to atmosphere during shipment or while in storage will operate properly if it has otherwise not been damaged Diode In line lon Pump User Manual 87 900 146 01 Technical Information 2 The pump is not harmed by such exposure although it is good practice to keep it under vacuum when not in use to exclude dust and the accumulation of water vapor from the environment Vacuum Evaluation Pumps whose stray magnetic field has been measured prior to shipping as per customer request are not shipped under vacuum but they are filled with dry nitrogen at atmospheric pressure Do not switch on these pumps as received and keep them closed up to the moment when they will be installed in the system Ion pumps whose stray magnetic field has not been measured prior to shipping are in an evacuated condition Before removing the shipping flange for installation on a vacuum system it is recommended to briefly start these pumps to verify the vacuum integrity and proper operation To verify the vacuum integrity of the new pump before venting 1 Connect the pump to the control unit as directed in the instruction manual of the control unit WARNING The high voltage which is present in the ion pump from the control unit can cause severe injury or death 2 With the main power switch in the OFF position plug the control unit into a suitable power source 3 Turn the power to
6. 900 146 01 Technical Information 2 Diode In Line lon Pump Diode In Line lon Pump Figure 2 Typical pumping speed l s 1 E 09 1 E 08 1 E 07 1 E 05 Pressure mbar Typical pumping speed vs pressure for nitrogen saturated pump measured according to ISO DIS 3556 1 1992 corrected by the conductance of the adapter on the Fischer Mommsen dome 1 E 03 1 E 05 Current A 1 E 07 1 E 10 1 E 09 1 E 08 1 E 07 Pressure mbar Figure 3 Diode In line lon Pump User Manual 87 900 146 01 Typical pressure vs current diagram saturated pump 21 49 2 Technical Information Outline Drawing Outline Drawing The following figure shows the outline drawing of the Diode In line ion pump 919 1491 dimensions are in mm e NI LO nM O 00 Y lt 482 7 Figure 4 Outline drawing 22 49 Diode In line lon Pump User Manual 87 900 146 01 Technical Information 2 Stray Magnetic Field The stray magnetic field of the pump was measured by means of a three axial probe along five paths the first referred to as path PO corresponds with the pump axis z direction the other pat
7. ON Diode In line lon Pump User Manual 87 900 146 01 29 49 2 Technical Information Diode In Line lon Pump Installation 4 Observe the reading for an indication of one of the following conditions a Ifthe pump is free of leaks and is at a low pressure the pressure indication shall quickly fall to or below the 10 mbar range as the volume of gas is pumped b If the pressure inside the pump is at or near atmospheric level an arc may strike inside the high voltage feedthrough giving a popping sound and the pump current will fluctuate If this occurs turn the power OFF immediately 5 Ifthe vacuum integrity has been lost the pump should be leak checked with a mass spectrometer leak detector before installation on the system Short Circuits If there is a short circuit between the anode and cathodes in the pump or cathode to pump body the short circuit current of the control unit will be drawn and low voltage will be indicated If a short circuit exists in the control unit or high voltage cable and connector low voltage will also be observed when the high voltage connector is disconnected from the pump refer to the control unit manuals An ohm meter reading on the pump feedthrough may not be effective in finding a short Short circuits may be caused by mechanical shock to the pump If the pump is shorted contact Agilent 30 49 Diode In line lon Pump User Manual 87 900 146 01 Technical Information 2 Inlet Flange Connect
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9. and pinch off tube until it is ready for attachment to the vacuum system WARNING To avoid injury never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off 10 49 The pump operation is optimized using one of the special Agilent controllers only The safety specifications agreement using the pump is guaranteed using the Agilent controllers only Diode In line lon Pump User Manual 87 900 146 01 Installation procedure 1 Use All the instructions for the correct use of the Diode In line ion pumps are contained in the control unit manual Read the manual carefully before using the pump Rough pumping down to 1x10 Torr mbar is recommended for the most rapid starting Roughing with an oil sealed mechanical pump is not desirable but when used a trap in the roughing line is recommended to reduce pressure due to water vapor and oils from the mechanical pump Be careful to minimize the time that the mechanical pump is open to the system and ion pump since mechanical pump vapors will start diffusing into the system at pressures below 1x10 Torr mbar and cause contamination In systems where oils must be completely eliminated turbopump roughing pumps should be used Hygroscopic deposits and hydrogen absorption into titanium may cause starting times to increase with age During exposure to air the deposits of titanium compound ab
10. installation etc DATE CORRECTIVE ACTION PLAN ACTUATION LOG N by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc i Agilent Technologies P Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to include the completed Health and Safety declaration Section No work can be started on your unit until we receive a completed copy of this form After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Product preparation o Remove all accessories from the core product e g inlet screens vent valves Prior to shipment and if applicable for your product drain any oils or other liquids purge or flush all gasses and wipe off any excess residue o If ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product o Seal the product in a plastic bag and package product care
11. relative low vapour pressure and they are very difficult to remove even by baking Bake the system walls thereby accelerating the desorption process Baking mobilizes the vapours so they can be cracked and pumped by discharge see par BAKEOUT OPERATION 5 Slow starting or slow pump down High voltage feedthrough is leaking Replace the feedthrough 6 System fails to achieve desired UHV vacuum pressure System not fully baked Water vapour limits base pressure Bake the system walls thereby accelerating the desorption process Baking mobilizes the vapours so they can be cracked and pumped by discharge see par BAKEOUT OPERATION 7 System fails to achieve desired UHV vacuum pressure System not appropriately cleaned for UHV Excessive outgassing from walls limits base pressure Clean all components for UHV and bake the system again Diode In line lon Pump User Manual 87 900 146 01 41 49 Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may
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13. Diode In line lon Pump Model 919 1491 User Manual 87 900 146 01 01 2014 ES Agilent Technologies Notices Agilent Technologies Inc 2013 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 146 01 Edition Edition 01 2014 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warr
14. S to one of the above questions Has the product been purged Ll ves No If yes which cleaning agent method Has the product been drained from oil O YES Ll NOT APPLICABLE confirm to place this declaration on the outside of the shipping box I declare that the above information is true and complete to the best of my knowledge and belief understand and agree to the terms and conditions on page 2 of this document Name Authorized Signature Position Date NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Page 3 of 3 Agilent VPD Request for Return United States Agilent Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 vpl customerservice agilent com Benelux Agilent Technologies Netherlands B V Groenelaan 5 1186 AA Amstelveen The Netherlands Tel 31 20 547 2000 Fax 31 20 547 2093 Brazil Agilent Technologies Brasil Avenida Marcos Penteado de Ulhoa Rodrigues 939 6 andar Castelo Branco Office Park Torre Jacarand Tambor Barueri Sao Paulo CEP 06460 040
15. This will make the startup faster and easier Switch on the high voltage applied to the pump and observe the current and voltage Fastest starting is obtained using a high applied voltage 7 kV is suggested The applied voltage may be reduced later to optimize the pumping speed and achieve the lowest vacuum pressure If started at 104 Torr mbar the voltage will start at approximately 800 volts and increase to full voltage as the pump starts operating The current will start at several mA and slowly decrease to LA or nA as low vacuum pressure is achieved When starting the ion pump for the first time if the voltage decreases instead of increasing reduce the vacuum pressure then start the ion pump again When the pump reaches its full operating voltage you may close the roughing valve If the pump does not start after 30 minutes of pumping see the section PUMP TROUBLE SHOOTING Once the pump reaches its ultimate pressure with stable voltage and current the ion pump may be baked at high temperature if required per the section titled BAKEOUT OPERATION To stop the ion pump simply switch off the high voltage The pump surfaces will continue to pump for a few minutes depending on the system pressure When venting the pump use clean dry nitrogen This will avoid water absorption on the pump surfaces and make subsequent pump downs easier Diode In line lon Pump User Manual 87 900 146 01 Technical Information 2 Bakeout Operation
16. ach one to 4 5 8 ft Ibs 0 6 1 1 Kgm of torque After tightening a nut always tighten the opposite nut with respect to the center of the flange This will partially close the gap between the flange faces Diode In line lon Pump User Manual 87 900 146 01 Technical Information 2 6 Repeat the sequential tightening for two more cycles 7 Continue tightening the bolts until the flange faces meet and a pronounced increase in torque is felt Note that it is not possible to install the screws from the lower side but only from the upper side of the flange Diode In line lon Pump User Manual 87 900 146 01 33 49 2 Technical Information Control Unit Connection Control Unit Connection WARNING The high voltage present in the high voltage cable which connects the control unit to the ion pump can cause severe injury or death Before mounting the high voltage connector of the cable on the pump high voltage feedthrough or before removing it be sure that the main power is removed from the control unit WARNING To avoid injury never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off WARNING Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at least 10 seconds after removing the main power from the control unit to allow capac
17. anty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of im
18. e inrushing air as the pump is opened Diode In line lon Pump User Manual 87 900 146 01 31 49 2 Technical Information Inlet Flange Connection WARNING The pinch off seal is extremely sharp Be careful when opening Watch your fingers Use appropriate procedures to maintain the clean condition of the pump and vacuum system Unscrew the bolts of the two inlet flanges and remove the blank flanges and the copper gasket plates Some particles of copper oxide may adhere to the outer edge of the flange gasket Be careful not to allow them or any other foreign materials to fall into the pump Connect the ion pump to the vacuum chamber in the in line configuration for which it is especially designed The pump is equipped with eyebolts to facilitate lifting operations Proceed as follows 1 Inspect the mating flanges for cleanliness and absence of scratches on the knife edge 2 Place a new copper gasket between pump flange and vacuum chamber flange 3 Bolt mating flanges of the pump to the chamber with the screws provided with the ion pump For flanges over NW 35 2 75 o d also mount washers below the nuts and screw heads Lubrication is essential to prevent galling of the nut and screw after bakeout 32 49 4 Use silver plated screws or apply high temperature lubricant to the screw threads Lubrication simplifies sealing and disassembly recommended lubricant is Fel Pro C 100 5 Attach the nuts and tighten e
19. e pump high voltage feedthrough or before removing it be sure that the main power is removed from the control unit Before removing the high voltage connector of the cable from the control unit be sure that the main power is removed from the control unit Wait at least 10 seconds after removing the main power from the control unit to allow capacitors to discharge completely In Line pumps are maintenance free In case of life time expiry or premature failure of the pump please contact your nearest Agilent sales service office Exchange of the High Voltage Feedthrough wi The high voltage feedthrough contains a ceramic insulator that can be damaged if excessive force is applied in torque in bending or in tension When installing or removing the feedthrough the applied torque should not exceed 2 Nm Rotate the feedthrough gently when making the threaded connection to avoid excessive force 1 Remove the 6 bolts of the Mini ConFlat flange connection see Fig 48 2 Remove the cable connection disc 3 Gently relieve the feedthrough from the metal gasket connection and turn the feedthrough counterclockwise until it is completely detached from the internal high voltage threaded connection 4 Replace the feedthrough and the copper gasket making sure that the feedthrough is connected to the pumps internal connector Check that the feedthrough is not shorted Diode In line lon Pump User Manual 87 900 146 01 39 49 2 Tech
20. exposed products o If requesting a calibration service units must be functionally capable of being calibrated Page 2 of 3 Agilent VPD Request for Return Agilent Technologies Vacuum Products Division Request for Return Form Customer information Company Contact Name Address Tel Email Equipment Product description Agilent PartNo Agilent Serial No Original Purchasing Reference Failure description Type of process for which the equipment was used Type of return O Non Billable 7 Billable New PO hard copy must be submitted with this form Exchange I Repair Upgrade Demo L Calibration Evaluation Return for Credit Health and safety Substances please refer to MSDS forms Agilent will not accept delivery of any product that is exposed to radioactive biological The product has been exposed to the following substances explosive substances or dioxins PCB s without written evidence of decontamination ec TES yen KUST camla dre ble toio nu Trade name Chemical name Chemical Symbol CAS Number Toxic O yes Ono Harmful O yes O no Corrosive O yes Ono Reactive O YES O NO Flammable O yes Ono Explosive O yes Ono Radioactive Clyres O no Biological Oves Ono Oxidizing O yes Ono Sensitizer O yes Ono Other dangerous substances O yes Ono Goods preparation If you have replied YE
21. fication Model 919 1491 Element type Diode Nominal pumping speed for Nitrogen l s 50 Operating life at 1x10 5 mbar hours 50000 Maximum starting current mA 150 Maximum baking current mA 10 mA Protect current mA 20 mA Maximum operating voltage Vdc 7000 10 Maximum starting pressure mbar 104 Ultimate pressure mbar 10 11 Inlet flanges 3 3 8 CFF Flange of the preliminary evacuation port 2 3 4 CFF Temperature limits C Pump without magnets 400 Magnets 350 HV cable 220 Material Pump body AISI 304 SST Internal housing AISI 316L ESR 1 4435 Cathodes Titanium Anode AISI 304 SST Magnets Ferrite Weight Ibs kg 95 43 Tested according to ISO DIS 3556 1 1992 Diode In line lon Pump User Manual 87 900 146 01 19 49 2 Technical Information Technical Specification Figures 2 and 3 show the nitrogen pumping speed vs pressure diagrams and the pressure vs current diagram for the saturated pump The pumping speed of a newly regenerated i e baked sputter ion pump decreases during operation until it reaches a stabilized level known as saturation corresponding to the nominal pumping speed To saturate the Diode In Line ion pump it normally requires an amount of gas of the order of about 1 5 Torr litres mbar litres Consequently pumps can operate for extended periods of time at low pressures in the non saturated state if they are properly conditioned 20 49 Diode In line lon Pump User Manual 87
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23. fully to avoid damage in transit You are responsible for loss or damage in transit o Include a copy of the Health and Safety Declaration in the shipping documentation on the outside of the shipping box of your returning product o Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned o Return only products for which the RA was issued Shipping o Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product o Return shipments must comply with all applicable Shipping Regulations IATA DOT ADR etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 Please visit our website for Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 individual office information vpt customercare agilent com vpl ra agilent com http www agilent com Page 1 of 3 Agilent VPD Request for Return Agilent Technologies Vacuum Products Division Terms and conditions TERMS AND CONDITIONS Please read the terms and conditions below as t
24. g path P4 without Earth field contribution 26 49 Diode In line lon Pump User Manual 87 900 146 01 Technical Information 2 ag Typical 3 5 jme 29 8 a 25 2 v 2 o B v gis Bz E 2 Ba n 0 5 0 60 50 40 30 20 10 0 10 20 30 40 50 60 z position cm Figure 11 Typical values of the stray magnetic field modulus of Bz component for paths PO P1 P2 P3 and P4 without Earth field contribution Diode In line lon Pump User Manual 87 900 146 01 27 49 2 Technical Information Diode In Line lon Pump Installation Diode In Line lon Pump Installation Inspection Procedure In Line ion pumps are evacuated baked out sealed and leak checked at below 1x10 Torr mbar prior to shipping The following information and procedures can be used to evaluate the vacuum integrity of a Diode In line ion pump before installation Pumps whose stray magnetic field has been measured prior to shipping as per customer request are not shipped under vacuum but they are filled with dry nitrogen at atmospheric pressure Do not switch on these pumps as received and keep them closed up to the moment when they will be installed in the system Visual Inspection Inspect the pump and magnet for physical damage which may have occurred during shipment Inspect the pinch off seal If it is open the pump is in air at atmospheric pressure WARNING The pinch off seal is extremely sharp Be careful 28
25. hey apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale o Unless otherwise pre negotiated customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements o Agilent Technologies is not responsible for returning customer provided packaging or containers o Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part o Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number o Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced o Products returned that have not been drained from oil will be disposed o A Special Cleaning fee will apply to all
26. hs referred to as paths P1 P2 P3 and P4 are shifted of 0 5 cm from the pump axis along x and y directions according to the pump axis identification shown in Fig 5 PO x 0 y 0 60 lt z lt 60 cm P1 x 0 5 em y 0 60 lt z lt 60 cm P2 x 0 5 cm y 0 60 lt z lt 60 cm P3 x 0 y 0 5 cm 60 lt z lt 60 cm P4 x 0 y 0 5 cm 60 lt z lt 60 cm The typical measured values for Bx and By components are shown in Figs 6 and 7 for values of z ranging from 60 cm to 60 cm from the center of the pump Please notice that the background contribution due to the Earth magnetic field was subtracted from these values The design of the In Line ion pump is optimized in order to guarantee a very low stray magnetic field inside the central pump housing Moreover particular care has been taken during the pole piece assembly in order to avoid possible mounting mismatches that could lead to an undesired increase of the stray field The magnetic stray field is guaranteed to be within specification only with the pole piece as mounted by the factory Therefore we recommend not to dismount the pole piece Maximum value for the integrals of Bx and By components between z 60 cm and z 60 cm 0 025 mTesla meter Diode In line lon Pump User Manual 87 900 146 01 23 49 2 Technical Information Stray Magnetic Field Figure 5 Pump axis identification The origin of the coordinate system
27. ion Pumps whose stray magnetic field has been measured prior to shipping as per customer request are not shipped under vacuum but they are filled with dry nitrogen at atmospheric pressure Do not switch on these pumps as received and keep them closed up to the moment when they will be installed in the system The pump should be mounted allowing sufficient clearance for installation and removal of the high voltage connector To achieve good performance of the ion pump at low vacuum pressure it is critical that atmospheric pollution and dust must not enter the pump during venting This type of contamination will not be removed by the standard high temperature bakeout procedure and may degrade the ion pump performance The pump should be kept sealed with its pinch off tubulation until it is ready for connection to the vacuum system Before venting the pump consult the inspection procedure see the previous paragraph Vent the ion pump by opening the pinch off tubulation in a clean area free from smog dust pollen etc Venting with dry nitrogen gas is further recommended This can be done by placing a clean polyethylene bag over the ion pump flange Purge the bag with clean dry nitrogen for several minutes then reach into the bag and release the internal vacuum using pliers to open the copper tube pinch off Do not open the pinch off seal with a saw or grinder These methods will cause metal particles to be drawn into the pump by th
28. itors to discharge completely To disconnect the coaxial high voltage cable from the controller slide the safety locking sleeve very little sleeve travel is required from the control unit and at the same time pull on the male end of the cable connector to remove it from the socket on the control unit 34 49 Diode In line lon Pump User Manual 87 900 146 01 Technical Information 2 Safety Interlock The Diode In Line pump feedthrough in conjunction with the cable P N 929 0705 when used with the Agilent 4UHV control unit allows the operation of the High Voltage Cable Safety Interlock feature When the high voltage cable connector is disconnected from the Diode In Line pump feedthrough the high voltage is automatically switched off by the control unit Diode In line lon Pump User Manual 87 900 146 01 35 49 2 Technical Information Operating Procedure Operating Procedure 36 49 1 10 11 Using a clean roughing pump evacuate the system to a minimum starting pressure 10 Torr mbar or less is recommended A turbomolecular roughing pump is also recommended Connect the control unit to a suitable power source and switch the power on Connect the control unit to the pump It is worth noticing that when starting an ion pump a slight increase in the vacuum pressure is normal as the internal components are heated and outgassed If possible leave the roughing pump connected to the system while starting the ion pump
29. mage to the equipment The notes contain important information taken from the text 8 49 Diode In line lon Pump User Manual 87 900 146 01 Installation procedure 1 Preparation for Installation The pump is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 6 recyclable and complies with EEC Directive 85 399 In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Normal exposure to the environment cannot damage the pump Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust Diode In line lon Pump User Manual 87 900 146 01 9 49 1 Installation procedure Installation Installation Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation to obtain the declared functioning specification the ambient temperature must be between 0 C and 85 C The pump should be kept sealed with its blank flanges
30. nical Information Maintenance 5 Bake out the pump while it is operating and leave it to cool down then verify that the base pressure is below 10 Torr mbar Figure 12 High voltage feedthrough connection 40 49 Diode In line lon Pump User Manual 87 900 146 01 Technical Information 2 Pump Troubleshooting Tab 2 Symptom Possible cause Correction procedure 1 Slow starting Starting vacuum pressure too high Reduce pressure to 105 Torr recommended 10 4 Torr minimum 2 Slow starting more than 30 minutes Air leaks which limit pressure to gt 10 6 Torr mbar and cause longer starting time Leak check the vacuum system with a helium leak detector 3 Slow pump down due to long exposure of viton parts to air Viton releases considerable gas after long exposure to air A bell jar system which reached 1 5 x 10 8 Torr 2 x 10 8 mbar in 24 hours after 30 minutes air exposure will only reach 7 5 x 10 8 Torr 1 x 107 mbar in 24 hours after 20 hours air exposure With the system under vacuum pump for several days or heat to 100 150 C for up to 15 hours 4 Slow pump down due to absorption of vapours on pump and system walls Vapours and gases admitted to a system are absorbed on the walls of the system and pump Subsequent reduction in pressure depends on the rate of depletion of this vapour Heavy hydrocarbons are most troublesome because of their
31. ormation 8 Preparation for Installation 9 Installation 10 Use 11 Operating Procedure 12 Maintenance 14 Disposal 15 Original Instructions GEB Agilent Technologies 7 49 1 Installation procedure General Information General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The Diode In line series pumps are ion pumps commonly used to create ultra high vacuum due to their cleanliness ability to pump different gases and maintenance and vibration free operation The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This manual uses the following standard protocol WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The caution messages are displayed before procedures which if not followed could cause da
32. portant data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met Diode In line lon Pump User Manual 87 900 146 01 Diode In line lon Pump Diode In line lon Pump P A gt p x S 4 NI gt ter Diode In line lon Pump User Manual 87 900 146 01 3 49 Diode In line lon Pump 4 49 Diode In line lon Pump User Manual 87 900 146 01 Contents 1 2 Contents Installation procedure 7 General Information 8 Preparation for Installation 9 Installation 10 Use 11 Operating Procedure 12 Maintenance 14 Disposal 15 Technical Information 17 Description of the Diode In Line lon Pump 18 Technical Specification 18 Diode In line lon Pump 21 Outline Drawing 22 Stray Magnetic Field 23 Diode In Line lon Pump Installation 28 Inlet Flange Connection 31 Control Unit Connection 33 Safety Interlock 35 Operating Procedure 36 GE Agilent Technologies 5 49 Contents Bakeout Operation 366 Maintenance 39 Pump Troubleshooting 41 6 49 Diode In line lon Pump User Manual 87 900 146 01 Diode In line lon Pump User Manual Installation procedure General Inf
33. sorb water vapor In subsequent start ups pump heating causes release of the water vapor and some previously pumped hydrogen thus the starting time may be lengthened Diode In line lon Pump User Manual 87 900 146 01 11 49 1 Installation procedure Operating Procedure Operating Procedure Check that the controller HV polarity is correct for the pump positive polarity is required for Diode pumps Refer to the relevant pump control unit instruction manual and follow the procedure below when operating the pump 1 12 49 With a clean roughing pump establish a minimum starting pressure in the vacuum system per Table 1 of this document Plug the control unit into a suitable power source and switch the power ON Observe the voltage current and roughing pressure If started at too high pressure 5x10 Torr mbar a controller voltage of approximately 300 to 400 volts is typical A current value near the short circuit current of the control unit could indicate that an unconfined flow discharge exists in the pump and system If this is the case turn the voltage off and wait for a lower roughing pressure A temporary rise in roughing pressure will usually be noticed during any starting procedure Allow the roughing valve to remain open after turning on the ion pump until an adequate starting pressure is reached If the ion pump voltage drops after closing the roughing valves reopen the valve for additional rough pumping As the pre
34. ssure decreases the voltage again will rise and the roughing valve may be closed When the voltage has increased to 2 3 kV place the control unit in the PROTECT condition The system is now automatically protected against pressure increases to 10 Torr mbar when the pump is left unattended If such an increase should occur the control unit will be turned off automatically The pressure in the pump can also be determined by reading the current and converting this reading to pressure with the appropriate pressure versus current graph shown in the appendix Technical Information of this manual Diode In line lon Pump User Manual 87 900 146 01 Installation procedure 1 The steps on the pressure current charts are a characteristic of the 4UHV step voltage operation When the current drawn by the pump reaches the specified values the controller will change the high voltage output to a lower applied voltage 7 When venting the pump use dry nitrogen This will avoid water vapor absorption on the pump walls WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in the presence of explosive gases CAUTION Do not put any electronic device near the pump since the magnetic field may cause a device malfunction Diode In line lon Pump User Manual 87 900 146 01 13 49 1 Installation procedure Maintenance
35. upport amp Service NORTH AMERICA Toll Free 800 882 7426 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com chem vacuum Worldwide Web Site Catalog and Order On line www agilent com chem vacuum Representatives in most countries 12 13
36. ure limit during bakeout an automatically controlled relay may be used Bake the Diode In line ion pump for at least 24 hours Longer bakeout periods are recommended when the pump has been used with heavy gas loads or when UHV pressure 10 Torr mbar or less is desired Diode In line lon Pump User Manual 87 900 146 01 37 49 2 Technical Information Bakeout Operation 4 Asthe pump and system cool down to room temperature a drop in pressure should be observed In the second case bakeout with the ion pump off an external turbo pump connected to the system through a bakeable isolation valve is necessary The ion pump should be switched on when the system is still at the bakeout temperature then the turbo pump should be insulated and the system should be kept at high temperature for the final part of the bakeout process until the ion current begins to decrease This second method gives the best vacuum performance A three layer foil wrapping can be used to achieve a more uniform temperature during the bakeout 38 49 Do not touch the pump during the heating and cooling phases The high temperature may cause serious damage Diode In line lon Pump User Manual 87 900 146 01 Technical Information 2 Maintenance WARNING The high voltage present in the high voltage cable which connects the control unit to the ion pump can cause severe injury or death Before mounting the high voltage connector of the cable on th
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